JPH1163400A - Liquefied material gas passage blocking preventing method and device therefor - Google Patents

Liquefied material gas passage blocking preventing method and device therefor

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Publication number
JPH1163400A
JPH1163400A JP22037797A JP22037797A JPH1163400A JP H1163400 A JPH1163400 A JP H1163400A JP 22037797 A JP22037797 A JP 22037797A JP 22037797 A JP22037797 A JP 22037797A JP H1163400 A JPH1163400 A JP H1163400A
Authority
JP
Japan
Prior art keywords
temperature
pipe
primary
pressure
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22037797A
Other languages
Japanese (ja)
Other versions
JP3387787B2 (en
Inventor
Takenobu Matsuo
剛伸 松尾
Satoru Kagatsume
哲 加賀爪
Koji Kawada
幸司 川田
Katsunori Komehana
克典 米華
Shinichi Ikeda
信一 池田
Akihiro Morimoto
明弘 森本
Yukio Minami
幸男 皆見
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Fujikin Inc
Original Assignee
Tokyo Electron Ltd
Fujikin Inc
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Filing date
Publication date
Application filed by Tokyo Electron Ltd, Fujikin Inc filed Critical Tokyo Electron Ltd
Priority to JP22037797A priority Critical patent/JP3387787B2/en
Publication of JPH1163400A publication Critical patent/JPH1163400A/en
Application granted granted Critical
Publication of JP3387787B2 publication Critical patent/JP3387787B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a passage blocking preventing method and a device for preventing a phenomenon of liquefied material gas blocking a passage being liquefied at the time of passing throttle mechanism such as an orifice in a line. SOLUTION: In a flow control method of feeding liquefied material gas from a high pressure side primary piping PP1 to a low pressure side secondary piping PP2 through throttle mechanism V3 , the temperature of the primary side piping PP and throttle mechanism V3 is set to higher temperature than the temperature (saturated steam pressure temperature) at the time of the primary side of material gas being saturated steam pressure. A device for materializing this method is composed of a primary side pressure detector P1 for detecting gas pressure in the primary side piping PP1 , an arithmetic and control unit CC for computing saturated steam pressure temperature corresponding to the detected gas pressure, and a primary side piping heater H1 setting the temperature of the primary side piping PP1 and throttle mechanism V3 to higher temperature than the saturated steam pressure temperature.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明の属する技術分野】本発明は主として半導体製造
設備や化学品製造設備などにおいて利用される液化材料
ガスの流量制御方法に関し、更に詳細にはガスがオリフ
ィス等の絞り機構を通過する際に液化して流路を閉鎖す
る現象を防止できる液化材料ガスの流路閉塞防止方法お
よびその装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for controlling a flow rate of a liquefied material gas mainly used in a semiconductor manufacturing facility or a chemical product manufacturing facility, and more particularly, to a method for liquefying a gas when passing through a throttle mechanism such as an orifice. The present invention relates to a method and an apparatus for preventing a liquefied material gas from closing a flow path, which can prevent a phenomenon of closing a flow path.

【０００２】[0002]

【従来の技術】近年、液化材料ガスの流量を精度よく制
御しなければならない分野が増大している。例えば、半
導体産業では高集積化に伴って薄膜制御技術が飛躍的に
進展し、薄膜を形成する材料ガスの流量制御の高精度化
が要求されている。2. Description of the Related Art In recent years, the field in which the flow rate of a liquefied material gas must be accurately controlled has been increasing. For example, in the semiconductor industry, thin film control technology has dramatically advanced along with high integration, and there is a demand for higher precision of flow rate control of a material gas forming a thin film.

【０００３】そのために用いられる従来の流量制御装置
としては、例えば特開平８−３３５１１７号公報に示さ
れているように、流体供給源から可変バルブを介して流
体を１次側配管に導入し、音速ノズルで流体を絞り込ん
で２次側配管に設定流量で流送する方式のものが一般的
である。[0003] As a conventional flow control device used for this purpose, for example, as shown in Japanese Patent Application Laid-Open No. 8-335117, a fluid is introduced from a fluid supply source into a primary pipe through a variable valve. In general, a system is used in which a fluid is throttled by a sonic nozzle and flown to a secondary pipe at a set flow rate.

【０００４】音速ノズルで２次側圧力を１次側圧力の１
／２以下になるように流体を絞り込めば、音速ノズルを
通過する流体流量は１次側圧力に比例するだけで、２次
側圧力に依存しなくなることが知られている。即ち、１
次側圧力だけを検知すれば高精度に流量制御を行うこと
ができる。[0004] The sonic nozzle reduces the secondary pressure to one of the primary pressure.
It is known that, if the fluid is narrowed down to / 2 or less, the flow rate of the fluid passing through the sonic nozzle is only proportional to the primary pressure and does not depend on the secondary pressure. That is, 1
If only the secondary pressure is detected, the flow rate can be controlled with high accuracy.

【０００５】[0005]

【発明が解決しようとする課題】ところが、流体として
代替フロンや四塩化炭素等の液化材料ガスを用いた場合
に、この従来装置の音速ノズルが液化した流体で閉塞
（目づまり）し、流量制御が不能になる現象が続発する
に至った。音速ノズルをオリフィスや流量調節バルブに
変換しても事態を打開することはできなかった。However, when a liquefied material gas such as chlorofluorocarbon or carbon tetrachloride is used as the fluid, the sonic nozzle of this conventional device is blocked (clogged) by the liquefied fluid, and the flow rate is controlled. The phenomenon that became impossible came to occur successively. Even if the sonic nozzle was converted to an orifice or a flow control valve, the situation could not be overcome.

【０００６】この閉塞現象が生起するのは次の理由によ
ると考えられる。高圧側の１次側配管からノズルを介し
て低圧側の２次側配管にガスが流出するとき、絞り込ま
れたガスが２次側配管内で急激に断熱膨張して温度が急
速に低下する。It is considered that this blocking phenomenon occurs for the following reasons. When gas flows from the high-pressure primary pipe through the nozzle to the low-pressure secondary pipe, the narrowed gas rapidly adiabatically expands in the secondary pipe, and the temperature drops rapidly.

【０００７】このため、ノズル近傍の２次側配管部分が
冷却され、熱伝導により１次側配管部分も冷却される。
従って、１次側配管内のガス温度が低下して、ガスが部
分的に液化して液滴状になり、この液滴がノズルやオリ
フィスの開口部を閉鎖して流量制御を不能にするのであ
る。For this reason, the secondary piping near the nozzle is cooled, and the primary piping is also cooled by heat conduction.
Accordingly, the temperature of the gas in the primary side pipe decreases, and the gas partially liquefies to form droplets. The droplets close the openings of the nozzles and orifices, making it impossible to control the flow rate. is there.

【０００８】更に、この液滴がノズルやオリフィスを通
過して２次側配管に流出すると、２次側圧力は１次側圧
力よりも相当程度低いから、減圧沸騰現象により液滴が
急速に気化する。この際に気化熱を２次側配管部分から
奪うため、２次側配管が冷却されて、１次側配管内での
液滴化を加速すると考えられる。Further, when the droplet passes through the nozzle or the orifice and flows out to the secondary pipe, the secondary pressure is considerably lower than the primary pressure. I do. At this time, since the heat of vaporization is taken from the secondary pipe portion, it is considered that the secondary pipe is cooled and the droplet formation in the primary pipe is accelerated.

【０００９】[0009]

【課題を解決するための手段】本発明者等は液化材料ガ
スの液滴形成による流路閉塞を防止するために鋭意研究
した結果、本発明を完成するに到った。即ち、本発明に
係る液化材料ガスの流路閉塞防止方法は、高圧側の１次
側配管から液化材料ガスを絞り機構を介して低圧側の２
次側配管へ流送する流量制御方法において、１次側配管
及び絞り機構の温度を液化材料ガスの１次側圧力が飽和
蒸気圧であるとしたときの温度（飽和蒸気圧温度）より
高温度に設定することを基本構成としている。Means for Solving the Problems The present inventors have made intensive studies to prevent the passage from being blocked by the formation of liquid material gas droplets, and as a result, have completed the present invention. That is, in the method for preventing the passage of the liquefied material gas from flowing according to the present invention, the liquefied material gas is supplied from the high pressure side primary pipe through the throttle mechanism to the low pressure side gas.
In the flow rate control method for flowing to the secondary pipe, the temperature of the primary pipe and the throttle mechanism is higher than the temperature (saturated vapor pressure temperature) when the primary pressure of the liquefied material gas is the saturated vapor pressure. Is set as the basic configuration.

【００１０】この方法を実現する液化材料ガスの流路閉
塞防止装置は、１次側配管内のガス圧力を検出する１次
側圧力検出器と、この１次側圧力検出器により検出され
た１次側圧力が飽和蒸気圧であるとしたときの温度（飽
和蒸気圧温度）を演算する演算制御装置と、この演算制
御装置の指令により１次側配管及び絞り機構の温度を前
記飽和蒸気圧温度より高温度に設定する１次側配管ヒー
ターから構成される。A liquefied material gas flow path blockage prevention device which realizes this method includes a primary side pressure detector for detecting gas pressure in a primary side pipe, and a primary side pressure detector detected by the primary side pressure detector. An arithmetic and control unit for calculating the temperature (saturated vapor pressure temperature) when the secondary side pressure is assumed to be the saturated vapor pressure, and the temperature of the primary pipe and the throttle mechanism is changed by the instruction of the arithmetic and control unit to the saturated vapor pressure temperature. It is composed of a primary-side piping heater set at a higher temperature.

【００１１】また、配管構成として、１次側配管、絞り
機構および２次側配管が同一水平面上にある流路閉塞防
止装置を提案する。Further, as a piping configuration, there is proposed a flow path blockage prevention device in which a primary side piping, a throttle mechanism, and a secondary side piping are on the same horizontal plane.

【００１２】さらに、別の配管構成として、１次側配
管、絞り機構および２次側配管が傾斜状または垂直状に
配置され、液化材料ガスが上昇方向に流送される流路閉
塞防止装置を提案する。Further, as another piping configuration, there is provided a channel blockage prevention device in which a primary side pipe, a throttle mechanism, and a secondary side pipe are arranged in an inclined or vertical shape, and a liquefied material gas flows in an ascending direction. suggest.

【００１３】前記方法および装置において、絞り機構の
典型例として、流量固定型のオリフィスおよび流量可変
型の流量調節バルブを提案する。In the above method and apparatus, a fixed flow type orifice and a variable flow type flow control valve are proposed as typical examples of the throttle mechanism.

【００１４】[0014]

【発明の実施の形態】本発明において使用する液化材料
ガスとは、通常、液体で保存し気体で使用する材料のこ
とで言い換えれば容易に液化できる気体材料である。例
えば、液化天然ガス（ＬＮＧ）、液化石油ガス（ＬＰ
Ｇ）等があるが、化学品製造用の単体物質としてはプロ
パン（沸点−４５℃）、ブタン（沸点０．６℃）、ペン
タン（沸点３０℃）等がある。また、半導体製造用には
四塩化炭素（沸点７６．７５℃）、代替フロン（沸点３
２．１℃、ＣＣｌ2 ＦＣＨ3 ）等がある。DESCRIPTION OF THE PREFERRED EMBODIMENTS A liquefied material gas used in the present invention is a material which is usually stored as a liquid and used as a gas, in other words, a gas material which can be easily liquefied. For example, liquefied natural gas (LNG), liquefied petroleum gas (LP)
G) and the like, but as a single substance for the production of chemicals, there are propane (boiling point −45 ° C.), butane (boiling point 0.6 ° C.), pentane (boiling point 30 ° C.), and the like. For semiconductor production, carbon tetrachloride (boiling point: 76.75 ° C.), alternative chlorofluorocarbon (boiling point: 3
2.1 ° C., CCl 2 FCH 3 ).

【００１５】特に、本発明者等は、半導体製造用ガス供
給システムにおいて、ガスとして使用される四塩化炭素
が流路閉塞現象を生起することを発端とし、これを解決
するために前記代替フロンを材料として各種実験を通し
て本発明を完成するに到った。[0015] In particular, the inventors of the present invention started from the fact that carbon tetrachloride used as a gas in the gas supply system for semiconductor production causes a flow path clogging phenomenon. The present invention has been completed through various experiments as materials.

【００１６】実際に用いられている液化材料ガスライン
は極めて複雑な回路を構成するが、本発明では、ガスが
流入する１次側配管（上流側配管と云ってもよい）、ガ
スを絞って流量を決める絞り機構およびガスが流出する
２次側配管（下流側配管と云ってもよい）を対象とす
る。即ち、１次側配管ー絞り機構ー２次側配管の単位を
並列又は直列に複数組合わせることによって、実用上の
液化材料ガスラインが構成されると考える。The liquefied material gas line actually used forms an extremely complicated circuit, but in the present invention, the primary pipe (also referred to as the upstream pipe) into which the gas flows, and the gas are throttled. The target is a throttle mechanism for determining the flow rate and a secondary pipe (also referred to as a downstream pipe) from which gas flows out. That is, it is considered that a practical liquefied material gas line is configured by combining a plurality of units of the primary pipe, the throttle mechanism, and the secondary pipe in parallel or in series.

【００１７】前記絞り機構とは、高圧側である１次側配
管内のガスを絞り込んで低圧にして２次側配管に流送す
るもので、その開口面積の大きさ（開口度）で流量を決
めることができる。これには開口度が固定式のオリフィ
ス、ノズル、ベンチュリー管等と、開口度が可変式の流
量調節バルブが存する。The throttle mechanism narrows the gas in the primary pipe, which is on the high pressure side, and sends it to the secondary pipe at a low pressure. The flow rate is determined by the size of the opening area (opening degree). You can decide. This includes orifices, nozzles, venturi tubes and the like having a fixed opening degree, and a flow control valve having a variable opening degree.

【００１８】この流量調節バルブとしては、例えばダイ
レクトタッチ型のメタルダイヤフラム弁を使用でき、そ
の駆動部にはボールねじ機構とステッピングモータとを
組み合せたパルスモータ型駆動装置が使用される。尚、
駆動装置としてはこの他に、磁歪素子形駆動装置、ソレ
ノイド形駆動装置、圧電素子形駆動装置、空気圧形駆動
装置、熱膨張形駆動装置等の使用が可能である。As the flow control valve, for example, a direct-touch type metal diaphragm valve can be used, and a pulse motor type driving device in which a ball screw mechanism and a stepping motor are combined is used as a driving portion thereof. still,
In addition, as the driving device, a magnetostrictive driving device, a solenoid driving device, a piezoelectric driving device, a pneumatic driving device, a thermal expansion driving device and the like can be used.

【００１９】前述したように、流路閉塞現象は１次側配
管の温度低下によるガスの液化が原因であるから、液化
材料ガスラインでは１次側配管、オリフィス又は流量調
節バルブ、２次側配管を加熱（ベーキング）して、ガス
が液化しないようにしている。しかし、ガスの種類毎に
何℃まで加熱すればよいか、即ち最適ベーキング温度は
異なる。勿論ベーキング温度は高ければ高い程よいに決
まっているが、省エネルギーの観点から最適ベーキング
温度を決定する必要性がある。As described above, since the flow path blockage phenomenon is caused by liquefaction of gas due to a decrease in the temperature of the primary pipe, the liquefied material gas line has a primary pipe, an orifice or a flow control valve, and a secondary pipe. Is heated (baked) so that the gas does not liquefy. However, the temperature to which the heating should be performed for each kind of gas, that is, the optimum baking temperature differs. Of course, the higher the baking temperature, the better. However, it is necessary to determine the optimum baking temperature from the viewpoint of energy saving.

【００２０】本発明者等は、最適ベーキング温度をガス
の物性値から導出できないかを検討するために、流路閉
塞の確認テストを行った。液化ガスとして代替フロン
（沸点３２．１℃、ＣＣｌ2 ＦＣＨ3 ）を用い、この液
化代替フロンを充填したタンクをウォーターバス内で所
定温度に加熱して、その飽和蒸気をコントロールバルブ
の開閉操作で１次側配管に導入する。The present inventors conducted a test for confirming passage blockage in order to determine whether the optimum baking temperature could be derived from the physical properties of the gas. A chlorofluorocarbon alternative (boiling point: 32.1 ° C., CCl 2 FCH 3 ) is used as a liquefied gas, a tank filled with the liquefied alternative chlorofluorocarbon is heated to a predetermined temperature in a water bath, and the saturated steam is released by opening and closing a control valve. Introduce to the primary side piping.

【００２１】オリフィス又は流量調節バルブからなる絞
り機構で所定流量にして２次側配管に流送する。２次側
配管の最終端部は大気開放（１気圧）の場合とロータリ
ーポンプで真空引きの場合について検討した。１次側配
管および２次側配管にはベーキング用のテープヒーター
を巻回した。勿論、絞り機構も加熱されており、オリフ
ィスの場合には配管内に内装されているのでオリフィス
を中心として上流側と下流側を１次側および２次側配管
と呼び、テープヒーターで加熱される。流量調節バルブ
のようにバルブが外部に露出する場合には、バルブ中心
より上流を１次側配管、下流を２次側配管とし、バルブ
自体も１次側および２次側配管ヒーターで加熱されるの
である。The flow rate is adjusted to a predetermined flow rate by a throttle mechanism comprising an orifice or a flow rate control valve, and is sent to the secondary pipe. The case where the final end of the secondary side pipe was opened to the atmosphere (1 atm) and the case where vacuum was evacuated by a rotary pump were examined. A baking tape heater was wound around the primary side pipe and the secondary side pipe. Of course, the throttle mechanism is also heated, and in the case of an orifice, the upstream and downstream sides of the orifice are referred to as primary and secondary pipes because the orifice is installed in the pipe, and is heated by a tape heater. . When the valve is exposed to the outside like a flow control valve, the upstream side from the center of the valve is a primary side pipe, and the downstream side is a secondary side pipe, and the valve itself is also heated by the primary side and secondary side pipe heaters. It is.

【００２２】２種類の流路閉塞現象について検討を加え
た。第１は、１次側配管から２次側配管へ代替フロンガ
スを定常状態で送流したときに生起する閉塞現象であ
る。第２は、１次側配管に飽和蒸気としての代替フロン
ガスを導入するコントーロルバルブや外部大気・真空ポ
ンプに排気する排気バルブの開閉時、詳しくは閉から開
にしてガスを流送した直後に生起する閉塞現象である。
ここで述べる閉塞現象とは、代替フロンガスが１次側配
管内で液化することにより流量コントロールができなく
なる現象で、実験的には絞り機構の近傍における２次側
配管内でのガス温度の低下および圧力の増加により確認
できる。A study was made on two types of flow path blockage phenomena. The first is a blockage phenomenon that occurs when the alternative CFC gas is sent in a steady state from the primary pipe to the secondary pipe. Second, when opening and closing a control valve that introduces an alternative fluorocarbon gas as a saturated vapor into the primary pipe and an exhaust valve that exhausts to an external atmosphere / vacuum pump, specifically, immediately after the gas is flowed from closed to open. This is an obstruction phenomenon that occurs.
The blocking phenomenon described here is a phenomenon in which the flow rate cannot be controlled due to the liquefaction of the alternative Freon gas in the primary pipe, and it has been experimentally confirmed that the gas temperature decreases in the secondary pipe near the throttle mechanism. This can be confirmed by increasing the pressure.

【００２３】定常状態において生起する第１の閉塞現象
は次のように測定できる。代替フロンガスの温度はウォ
ーターバスの温度であり、これを以後、設定ガス温度と
呼ぶ。代替フロンガスは設定ガス温度での飽和蒸気圧を
有してコントロールバルブを介して１次側配管に導入さ
れる。従って、１次側圧力は飽和蒸気圧になっており、
設定ガス温度はその圧力での飽和蒸気圧温度になってい
る。The first blocking phenomenon that occurs in the steady state can be measured as follows. The temperature of the alternative CFC gas is the temperature of the water bath, and is hereinafter referred to as a set gas temperature. The alternative CFC has a saturated vapor pressure at a set gas temperature and is introduced into the primary pipe via a control valve. Therefore, the primary pressure is a saturated vapor pressure,
The set gas temperature is the saturated vapor pressure temperature at that pressure.

【００２４】テープヒーターによって調節されるオリフ
ィス等の絞り機構近傍の１次側配管の温度を設定配管温
度と呼び、この設定配管温度を前記設定ガス温度より２
０℃だけ高めに調整しておく。そして、１時間当たり１
０℃のスピードで設定配管温度を降温し、１次側および
２次側の温度および圧力を測定しながら、閉塞現象が生
起したときの設定配管温度を記録し、この温度を閉塞温
度（又は閉塞点とも呼ぶ）とする。The temperature of the primary side pipe near the throttle mechanism such as the orifice controlled by the tape heater is called a set pipe temperature.
Adjust higher by 0 ° C. And one per hour
The set pipe temperature is lowered at a speed of 0 ° C., and the set pipe temperature when the clogging phenomenon occurs is recorded while measuring the temperatures and pressures of the primary side and the secondary side. Point).

【００２５】この定常流での閉塞温度を測定した結果、
大気開放時の閉塞温度は設定ガス温度より１℃程小さい
だけでほとんど等しい。１次側圧力は飽和蒸気圧であ
り、設定ガス温度はその飽和蒸気圧に対応した温度、即
ち飽和蒸気圧温度である。従って、設定配管温度がそれ
よりやや小さくなると液化が生起して閉塞が生じる。As a result of measuring the closing temperature in this steady flow,
The closing temperature at the time of opening to the atmosphere is almost equal only by being about 1 ° C. lower than the set gas temperature. The primary pressure is a saturated vapor pressure, and the set gas temperature is a temperature corresponding to the saturated vapor pressure, that is, a saturated vapor pressure temperature. Therefore, if the set pipe temperature is slightly lower than that, liquefaction occurs and blockage occurs.

【００２６】一方、真空排気時の閉塞温度は設定ガス温
度より高い目で、設定ガス温度が８０℃のとき閉塞温度
は９１℃と約１１℃高くなっている。この理由は、真空
排気時は１次側と２次側の圧力差が大きくなるため、ガ
スが２次側に流出した時の断熱膨張が急激になって１次
側を激しく冷却し、１次側配管内のガスの液化を加速す
るからに他ならない。またこの気液二相流が２次側配管
に送流されたとき、液滴の減圧沸騰が更に激しくなっ
て、急激な気化吸熱により２次側および１次側配管の冷
却が増々進行するからである。On the other hand, the closing temperature at the time of evacuation is higher than the set gas temperature. When the set gas temperature is 80 ° C., the closing temperature is 91 ° C., which is about 11 ° C. higher. The reason for this is that the pressure difference between the primary side and the secondary side becomes large during evacuation, so that the adiabatic expansion when the gas flows out to the secondary side becomes sharp, and the primary side is cooled violently. It is nothing less than accelerating the liquefaction of the gas in the side piping. Also, when this gas-liquid two-phase flow is sent to the secondary pipe, the boiling under reduced pressure of the droplets becomes more intense, and the cooling of the secondary pipe and the primary pipe increases further due to rapid vaporization heat absorption. It is.

【００２７】絞り機構を流量調節バルブに変更し、弁開
度を変えて真空排気時における色々な流量につき閉塞温
度を測定した。設定温度が高くなるにつれて閉塞温度は
さらに高くなってゆくが、設定ガス温度が一定の場合に
は流量（弁開度）を変えても閉塞温度はほとんど変わら
ない。しかも閉塞温度は設定ガス温度、つまり飽和蒸気
圧温度より１０℃も越えていない。流量を可変できる点
で絞り機構として流量調節バルブが有効であり、しかも
閉塞温度が流量依存性をほとんど有していない事から、
閉塞現象を温度調整だけで極めて簡単に遮断できること
が分る。The restricting mechanism was changed to a flow control valve, and the valve opening was changed to measure the closing temperature at various flow rates during evacuation. The blocking temperature further increases as the set temperature increases, but when the set gas temperature is constant, the blocking temperature hardly changes even if the flow rate (valve opening) is changed. Moreover, the closing temperature does not exceed the set gas temperature, that is, the saturated vapor pressure temperature by more than 10 ° C. Since a flow control valve is effective as a throttle mechanism in that the flow rate can be varied, and since the closing temperature has almost no flow rate dependency,
It can be seen that the clogging phenomenon can be cut off very easily only by adjusting the temperature.

【００２８】次に、直線状の１次側配管ー絞り機構ー２
次側配管の組合せ単位を水平に配置した場合、垂直に配
置してガスを下→上に上昇させ、又上→下に下降させた
場合につき閉塞温度を測定した。その結果、閉塞温度は
設定ガス温度、即ち飽和蒸気圧温度より約３℃程小さく
なった。特徴的なことは、下→上向きの場合において流
量が小さいときは閉塞が観察されなかった点である。Next, the linear primary side pipe-throttling mechanism-2
The blocking temperature was measured when the combination unit of the secondary piping was arranged horizontally, the gas was arranged vertically and the gas was raised from lower to upper, and when the gas was lowered from upper to lower. As a result, the closing temperature was lower by about 3 ° C. than the set gas temperature, that is, the saturated vapor pressure temperature. What is characteristic is that no obstruction was observed when the flow rate was low in the downward-to-upward direction.

【００２９】流れ方向下→上向きでガス流量が小さいと
きは、１次側のガスが液化しても液滴が重力により下方
に落下して絞り機構に達しないためと考えられる。流量
が多いときは液滴がガス流に運ばれて絞り機構に達して
閉塞が発生する。それに対し、流れ方向が上→下向きお
よび水平の場合には１次側の液滴が絞り機構に到達しや
すく、流量の大小にかかわらず閉塞が起きる。When the gas flow rate is low from the downward direction to the upward direction and the gas flow rate is small, it is considered that even if the gas on the primary side liquefies, the droplets fall down due to gravity and do not reach the throttle mechanism. When the flow rate is high, the droplets are carried by the gas flow and reach the throttle mechanism to cause blockage. On the other hand, when the flow direction is upward → downward and horizontal, the primary-side droplet easily reaches the throttle mechanism, and blockage occurs regardless of the flow rate.

【００３０】実用上の液化材料ガスの配管系は１次側配
管→絞り機構→２次側配管の単位を直列・並列にまた水
平・垂直・傾斜して組合わせた複雑な回路を構成してい
る。特に上→下へガス流を下降させる配管の垂直配置又
は傾斜配置は閉塞を生起しやすいので、回路上できるだ
け導入しない方がよい。しかし傾斜又は垂直配管の途中
に絞り機構がない場合には閉塞が起きないので問題とす
ることはない。従って、単なる配管の垂直・傾斜は構わ
ない。The practical liquefied material gas piping system constitutes a complex circuit in which the units of the primary piping → throttle mechanism → secondary piping are combined in series / parallel and horizontally / vertically / inclination. I have. In particular, the vertical arrangement or the inclined arrangement of the pipe for lowering the gas flow from the upper side to the lower side is likely to cause blockage, so that it is better not to introduce the pipe as much as possible on the circuit. However, if there is no throttle mechanism in the middle of the inclined or vertical pipe, there is no problem because no blockage occurs. Therefore, a simple vertical / inclination of the pipe is acceptable.

【００３１】以上から、ガスの定常流における流路閉塞
は１次側配管及び絞り機構の温度、即ち設定配管温度を
ガスの飽和蒸気圧温度（ガスの飽和蒸気圧曲線から求ま
るその飽和蒸気圧に対応する温度）よりも高温度に、最
大でも１１℃高めることによって防止できることが分っ
た。From the above, the blockage of the flow path in the steady flow of gas is caused by the temperature of the primary pipe and the throttle mechanism, that is, the set pipe temperature is set to the saturated vapor pressure temperature of the gas (the saturated vapor pressure obtained from the gas saturated vapor pressure curve). It has been found that this can be prevented by raising the temperature to a higher temperature than the corresponding temperature by at most 11 ° C.

【００３２】次に、バルブの開閉操作により生起する第
２の閉塞現象は次のように解釈できる。コントロールバ
ルブを閉→開にした瞬間、ウォーターバス内のタンクか
ら代替フロンの飽和蒸気が１次側配管に流入し、断熱膨
張して１次側配管温度を低下させる。さらに、タンクか
らガスが補給され圧力が元の１次圧まで上昇すると、１
次側配管温度に対し過飽和なガスが一部液化する。この
液滴が絞り機構を閉塞し、又液滴が２次側へ流入してそ
の気化吸熱により１次側温度が更に低下して、液化によ
る流路閉塞を加速するのである。Next, the second blocking phenomenon caused by the opening / closing operation of the valve can be interpreted as follows. At the moment when the control valve is closed to open, the saturated steam of the alternative Freon flows into the primary pipe from the tank in the water bath, adiabatically expands, and lowers the primary pipe temperature. Further, when gas is supplied from the tank and the pressure rises to the original primary pressure, 1
Part of the supersaturated gas liquefies with respect to the temperature of the downstream pipe. The droplet closes the throttle mechanism, and the droplet flows into the secondary side, and the primary side temperature further decreases due to the vaporization heat absorption, thereby accelerating the closing of the flow path due to liquefaction.

【００３３】同様に、２次側配管を排気バルブを介して
大気に開放した場合についても、流路閉塞現象の確認試
験を行った。結果的に、排気バルブを開にしたままコン
トロールバルブを閉から開にした直後およびコントロー
ルバルブを開にしたまま排気バルブを閉から開にした直
後の両者とも閉塞現象が確認された。即ち、流路が遮断
された状態から突然流通したときに閉塞が発生するので
ある。設定配管温度を設定ガス温度、つまり飽和蒸気圧
温度と等しい状態から上昇させ、閉塞しなくなる限界温
度を閉塞温度（閉塞点とも呼ぶ）とした。実験から設定
配管温度を飽和蒸気圧温度より２０℃以上高くすること
で閉塞現象を防止できることが分った。Similarly, when the secondary pipe was opened to the atmosphere via an exhaust valve, a test for confirming the flow path closing phenomenon was performed. As a result, a blocking phenomenon was confirmed both immediately after the control valve was opened from the closed state while the exhaust valve was opened and immediately after the exhaust valve was opened from the closed state while the control valve was opened. That is, blockage occurs when the flow suddenly flows from a state where the flow path is blocked. The set pipe temperature was raised from a state equal to the set gas temperature, that is, the saturated vapor pressure temperature, and the limit temperature at which no blockage occurred was defined as a blockage temperature (also referred to as a blockage point). From experiments, it was found that the clogging phenomenon could be prevented by setting the set pipe temperature higher than the saturated vapor pressure temperature by 20 ° C. or more.

【００３４】次に、２次側配管を排気バルブを介して真
空排気した場合につき、閉塞試験をした。この場合、閉
塞温度は２種類存在する。第１は、バルブを開けた直後
閉塞現象は確認されるが閉塞はいずれ停止して持続しな
い場合であり、この閉塞温度は設定ガス温度より約４℃
高めであった。第２の閉塞は、バルブを開けたときにさ
え閉塞現象が確認されない場合であり、この閉塞温度は
設定ガス温度（飽和蒸気圧温度）より約１５℃高めとな
った。Next, a blockage test was performed for the case where the secondary pipe was evacuated through an exhaust valve. In this case, there are two types of closing temperatures. The first is a case where a blockage phenomenon is confirmed immediately after the valve is opened, but the blockage stops and does not continue, and the blockage temperature is about 4 ° C. higher than the set gas temperature.
It was expensive. The second blockage is a case where no blockage phenomenon is observed even when the valve is opened, and the blockage temperature is about 15 ° C. higher than the set gas temperature (saturated vapor pressure temperature).

【００３５】オリフィスを流量調節バルブに変更して流
量を可変にし、２次側配管を排気バルブを介して真空排
気して閉塞試験を行った。小流量まで変化させたが、い
ずれの場合も閉塞温度は設定ガス温度より約１５℃高め
であった。つまり、閉塞温度の流量依存性は小さいこと
が分る。The orifice was changed to a flow control valve to vary the flow rate, and the secondary pipe was evacuated via an exhaust valve to perform a blockage test. Although the flow rate was changed to a small value, the closing temperature was about 15 ° C. higher than the set gas temperature in each case. That is, it is understood that the flow rate dependence of the closing temperature is small.

【００３６】更に、絞り機構を流量可変の流量調節バル
ブにして真空排気した場合について、配管を水平にす
る、配管を垂直にして下から上向きに流送する、配管を
垂直にして上から下向きに流送する３方式の閉塞試験を
行った。３方式共に閉塞温度は飽和蒸気圧温度かそれよ
りやや低い温度となり、下→上の場合にはガス流量の小
さいときには閉塞が起きないが、水平および上→下の場
合には流量が小さいときでさえ閉塞が起きることが分っ
た。特に、上→下の場合にのみバルブ操作時に異常な閉
塞現象が別に確認された。これは絞り機構からかなり離
れた位置における１次側配管内の液化現象であり、しか
しこの場合でも閉塞温度は飽和蒸気圧温度を１８℃上回
るだけに収まった。Further, when vacuum is evacuated by using a flow control valve with a variable flow rate as the throttle mechanism, pipes are made horizontal, pipes are made vertical and flowed upward from below, and pipes are made vertical and downward from above. A three-way blockage test was conducted. In all three systems, the blockage temperature is the saturated vapor pressure temperature or slightly lower than that. When the gas flow rate is low in the case of lower → upper, no blockage occurs, but in the case of horizontal and upper → lower, the flow rate is small. Even occlusion was found to occur. In particular, only in the case of upward → downward, an abnormal closing phenomenon during valve operation was separately confirmed. This is a liquefaction phenomenon in the primary pipe at a position far from the throttle mechanism, but even in this case, the closing temperature was only 18 ° C. above the saturated vapor pressure temperature.

【００３７】水平方向および上→下向きの場合、絞り機
構の１次側近傍で発生した液滴は下方に落ち易く、流量
の小さいときでもわずかに発生した液滴が絞り機構に到
達し閉塞を惹起するものと考えられる。大流量の場合に
は配管の設置方向にかかわらず、発生した液滴が絞り機
構にまで運ばれて閉塞を生起する。In the horizontal and upward → downward directions, droplets generated near the primary side of the throttle mechanism easily fall downward, and even when the flow rate is small, slightly generated droplets reach the throttle mechanism and cause blockage. It is thought to be. In the case of a large flow rate, regardless of the installation direction of the pipe, the generated droplets are carried to the throttle mechanism to cause blockage.

【００３８】以上からバルブの開閉操作により生起する
閉塞現象は、設定配管温度をガスの飽和蒸気圧温度より
１８℃高めに設定すれば防止できることが分る。１８℃
高めが閉塞温度である場合もあるから、余裕をみて２０
℃以上高めに設定すれば閉塞現象を防止できることが分
る。From the above, it can be seen that the clogging phenomenon caused by the opening and closing operation of the valve can be prevented by setting the set piping temperature to 18 ° C. higher than the saturated vapor pressure temperature of the gas. 18 ℃
Since the higher temperature may be the blocking temperature, there is a margin to
It can be seen that if the temperature is set higher than ℃, the clogging phenomenon can be prevented.

【００３９】従って、定常状態における場合とバルブ開
閉操作による場合の閉塞を常に解消するためには、設定
配管温度をガスの飽和蒸気圧温度より２０℃以上高めに
設定すればよいことが結論される。Therefore, it is concluded that the set piping temperature should be set at least 20 ° C. higher than the saturated vapor pressure of the gas in order to always eliminate the blockage in the steady state and in the case of the valve opening / closing operation. .

【００４０】[0040]

【実施例】以下に、本発明の実施例を図面に従って詳細
に説明する。図１は第１実施例を示し、絞り機構として
オリフィスを使用し、２次側端部を大気に開放した場合
である。２はウォーターバス、４はウォーター、６はタ
ンク、Ｆは沸点３２．１℃の代替フロンの液体、ＰＰ1
は上流側である１次側配管、Ｏはオリフィス、ＰＰ2 は
下流側である２次側配管、Ｐ1 は１次側圧力検出器、Ｐ
2 は２次側圧力検出器、Ｔｗはウォーターバス温度計、
Ｔｉは入口ガス温度計、Ｔ1 は１次側配管温度計、Ｔ2
は２次側配管温度計、Ｔｇ1 は１次側ガス温度計、Ｔｇ
2 は２次側ガス温度計、Ｖ1 はコントロールバルブ、Ｖ
2 は窒素用バルブ、Ｖ4 は排気バルブである。Ｈ1 ，Ｈ
2 は１次側および２次側配管ヒーターで、具体的には配
管に加熱用のテープヒーターが巻装されている。Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 shows a first embodiment in which an orifice is used as a throttle mechanism and a secondary end is opened to the atmosphere. 2 is a water bath, 4 is water, 6 is a tank, F is a liquid of alternative Freon having a boiling point of 32.1 ° C, PP 1
Is an upstream primary pipe, O is an orifice, PP 2 is a downstream secondary pipe, P 1 is a primary pressure detector, P
2 is a secondary pressure detector, Tw is a water bath thermometer,
Ti is the inlet gas temperature thermometer, T 1 is the primary pipe thermometer, T 2
Is the secondary pipe thermometer, Tg 1 is the primary gas thermometer, Tg
2 is a secondary gas thermometer, V 1 is a control valve, V
2 is nitrogen valve, V 4 is an exhaust valve. H 1, H
Reference numeral 2 denotes a primary side and secondary side pipe heater, and more specifically, a tape heater for heating is wound around the pipe.

【００４１】次に上記構成の作動に付き説明する。ま
ず、テープヒーターおよびウォーターバスの電源を入
れ、コントロールバルブＶ1 を閉、窒素用バルブＶ2 と
排気バルブＶ4 を開にしてＮ2 ガスを１時間通しなが
ら、配管ＰＰ1 ，ＰＰ2 を配管設定温度で安定させた。
ウォーターバス２では液体のフロンＦが蒸発し、ウォー
ターバス温度での飽和蒸気となり、フロンの飽和蒸気圧
曲線にしたがった飽和蒸気圧に達している。Next, the operation of the above configuration will be described. First, turn on the tape heater and a water bath, the closed control valve V 1, while passing nitrogen valve V 2 and the exhaust valve V 4 and to open the N 2 gas for 1 hour, the pipe PP 1, PP 2 pipe Stabilized at the set temperature.
In the water bath 2, the liquid Freon F evaporates and becomes saturated vapor at the water bath temperature, and reaches a saturated vapor pressure according to the Freon's saturated vapor pressure curve.

【００４２】窒素用バルブＶ2 を閉じ、コントロールバ
ルブＶ1 を開くと、フロンガスが１次側配管ＰＰ1 から
絞り機構であるオリフィスＯを通り２次側配管ＰＰ2 か
ら大気へ逃散してゆく。絞り機構として用いられるオリ
フィスＯは鋭い縁をもつ孔をあけた円板で、孔の開口面
積と１次側および２次側の差圧により流量が決められ
る。When the nitrogen valve V 2 is closed and the control valve V 1 is opened, Freon gas escapes from the primary pipe PP 1 through the orifice O as a throttle mechanism to the atmosphere from the secondary pipe PP 2 . The orifice O used as a throttle mechanism is a disk having a hole with a sharp edge, and the flow rate is determined by the opening area of the hole and the differential pressure between the primary side and the secondary side.

【００４３】定常状態における閉塞現象を調べるため、
１次側配管温度をウォーターバス温度（飽和蒸気圧温
度）より１０℃高く設定し、降温スピード１０℃／時で
降温させながら圧力と温度を記録した。データ記録はペ
ンレコーダーで行ない、チャートスピードは２ｍｍ／分
とした。２次側の圧力と温度から閉塞現象を確認した。
そして閉塞現象が初めて確認できた限界温度を定常状態
の閉塞温度とする。In order to investigate the blocking phenomenon in a steady state,
The primary side pipe temperature was set at 10 ° C. higher than the water bath temperature (saturated vapor pressure temperature), and the pressure and temperature were recorded while lowering the temperature at a rate of 10 ° C./hour. Data recording was performed with a pen recorder, and the chart speed was 2 mm / min. The clogging phenomenon was confirmed from the pressure and temperature on the secondary side.
Then, the limit temperature at which the blocking phenomenon can be confirmed for the first time is defined as the steady-state blocking temperature.

【００４４】次に、バルブ操作時の閉塞現象を調べるた
め、コントロールバルブＶ1 を閉、窒素用バルブＶ2 と
排気バルブＶ4 を開にしてＮ2 ガスを１時間通した。こ
の間に配管設定温度（１次側配管温度）をウォーターバ
ス温度に等しく設定して、温度条件を安定させた。この
後、窒素用バルブＶ2 を閉じ、コントロールバルブＶ 1
を開にした瞬間の閉塞現象を確認した。更に、排気バル
ブＶ4 を閉にした後、Ｖ4 を開にした直後の閉塞現象も
確認した。閉塞現象が確認された場合、配管設定温度を
５℃高くして、閉塞現象が確認されなくなるまで繰り返
し、閉塞現象が確認されなくなる限界温度をバルブ操作
時の閉塞温度とする。Next, a clogging phenomenon during valve operation was examined.
Control valve V1Closed, nitrogen valve VTwoWhen
Exhaust valve VFourOpen to NTwoGas was passed for one hour. This
Between the pipe set temperature (primary side pipe temperature)
The temperature condition was stabilized by setting the temperature to be equal to the temperature. this
After that, nitrogen valve VTwoClose the control valve V 1
The blockage phenomenon at the moment when was opened was confirmed. Furthermore, exhaust valve
Bu VFourAfter closingFourObstruction phenomenon immediately after opening
confirmed. If a clogging phenomenon is confirmed, set the piping set temperature.
Increase by 5 ° C and repeat until no clogging phenomenon is observed
The limit temperature at which no clogging phenomenon is observed
And the closing temperature.

【００４５】定常状態およびバルブ操作時の閉塞温度
（閉塞点）は図２に示されている。定常状態における閉
塞温度は×印で示され、飽和蒸気圧曲線位置、即ち飽和
蒸気圧温度より１〜２℃小さくなっていることが分る。
１次側配管のオリフィス近傍温度が飽和蒸気圧温度より
わずかに小さくなった段階で、１次側ガスの液化が生起
するのである。一方、バルブ操作時の閉塞温度は○印で
示され、飽和蒸気圧温度より２０℃高めの範囲内に収ま
っている。従って、２つの閉塞温度から１次側配管温度
を飽和蒸気圧温度より２０℃以上高く設定すれば流路閉
塞を回避することができる。FIG. 2 shows the closing temperature (blocking point) in the steady state and during valve operation. The closing temperature in the steady state is indicated by a cross, which indicates that the temperature is lower than the saturated vapor pressure curve position by 1 to 2 ° C.
Liquefaction of the primary gas occurs when the temperature near the orifice of the primary pipe becomes slightly lower than the saturated vapor pressure temperature. On the other hand, the closing temperature at the time of operating the valve is indicated by a circle, and falls within a range of 20 ° C. higher than the saturated vapor pressure temperature. Therefore, if the primary side pipe temperature is set to be higher than the saturated vapor pressure temperature by 20 ° C. or more from the two blockage temperatures, the flow path blockage can be avoided.

【００４６】図３は第２実施例の構成図である。絞り機
構としてオリフィスＯを使用し、２次側端部をリークバ
ルブ付きの真空ポンプＶＰにより排気した場合を示す。
図１と異なる部分を説明すると、配管と平衡にバイパス
ラインＢＬを設け、その入口側に補助バルブＶ5 を、そ
の出口側に補助バルブＶ6 を設けた。また調整バルブＶ
7 を設けて排気側を大気圧にしたり真空に可変できるよ
うにし、排気側圧力検出器Ｐ3 により排気側配管部の内
圧を検出する。FIG. 3 is a block diagram of the second embodiment. The case where the orifice O is used as a throttle mechanism and the secondary end is evacuated by a vacuum pump VP with a leak valve is shown.
To describe the different parts 1, a bypass line BL is provided on the pipe and equilibrium, the auxiliary valve V 5 on the inlet side, and an auxiliary valve V 6 to the outlet side. Adjustment valve V
7 is provided to allow variable exhaust side to a vacuum or atmospheric pressure, for detecting the internal pressure of the exhaust pipe part by the exhaust side pressure detector P 3.

【００４７】まず、定常状態における閉塞温度を測定し
た。真空ポンプＶＰを引かない状態でバルブＶ1 ，
Ｖ5 ，Ｖ6 ，Ｖ7 を閉とし、窒素用バルブＶ2 を開にし
てＮ2 ガスを１時間パージし、ガスおよび配管の温度を
安定させた。その後、バルブＶ2 を閉め、補助バルブＶ
5 ，Ｖ6 を開にして、真空ポンプＶＰを作動させ、配管
内のＮ2 ガスを排気した。排気側圧力検出器が１０の−
３乗ｔｏｒｒ以下になったことを確認してバルブＶ5 ，
Ｖ6 を閉にし、その後コントロールバルブＶ1 を開にし
た。First, the closing temperature in a steady state was measured. Without pulling the vacuum pump VP, the valves V 1 ,
The V 5, V 6, V 7 is closed, the nitrogen valve V 2 in the open N 2 gas for 1 hour purge, was stabilized temperature of the gas and the pipe. Then, the valve V 2 is closed, and the auxiliary valve V
5, and the V 6 is opened, the vacuum pump is activated VP, was evacuated and N 2 gas in the pipe. Exhaust pressure detector is 10-
After confirming that the pressure has become equal to or less than the third power torr, valve V 5
The V 6 in a closed and then the control valve V 1 open.

【００４８】設定ガス温度（ウォーターバス温度）を４
０、５０、６０、７０、８０℃の５段階とし、初期の設
定配管温度は設定ガス温度より２０℃高くした。各部の
温度が安定した後、降温スピード１０℃／時で降温し、
閉塞温度を確認した。Set the gas temperature (water bath temperature) to 4
There were five stages of 0, 50, 60, 70 and 80 ° C, and the initial set pipe temperature was 20 ° C higher than the set gas temperature. After the temperature of each part is stabilized, the temperature is decreased at a rate of 10 ° C / hour,
The blocking temperature was confirmed.

【００４９】真空排気時は表１に、大気開放時は表２に
閉塞温度がまとめられている。表から分かるように、設
定ガス温度が８０℃のときに閉塞温度が１１℃上回って
いるのが最大である。真空排気時に閉塞温度が設定ガス
温度をかなり上回るのは、１次側と２次側の差圧が大き
くなるために、２次側に流入したときに断熱膨張による
冷却および減圧沸騰による気化吸熱による冷却が大気開
放時より大きくなるからである。図４は表１と表２のデ
ータを蒸気圧に対して画いたもので、飽和蒸気圧曲線に
対する閉塞温度の関係が示されている。Table 1 summarizes the closing temperature when evacuating, and Table 2 when releasing to air. As can be seen from the table, when the set gas temperature is 80 ° C., it is the maximum that the closing temperature exceeds 11 ° C. The reason why the closing temperature is significantly higher than the set gas temperature during the evacuation is that the differential pressure between the primary side and the secondary side becomes large, so that when the gas flows into the secondary side, it is cooled by adiabatic expansion and vaporized heat absorption by decompression boiling. This is because the cooling is greater than when the atmosphere is opened. FIG. 4 shows the data of Tables 1 and 2 plotted against the vapor pressure, and shows the relationship between the saturated vapor pressure curve and the closing temperature.

【００５０】[0050]

【表１】 [Table 1]

【００５１】[0051]

【表２】 [Table 2]

【００５２】次に、バルブ操作時の閉塞現象の確認を行
った。設定ガス温度を６０℃に固定し、初期の設定配管
温度も設定ガス温度と同じ６０℃に設定した。まず、バ
ルブＶ1 ，Ｖ2 ，Ｖ5 ，Ｖ6 を閉にし、調整バルブＶ7
を開にして大気開放状態に設定し、この状態でコントロ
ールバルブＶ1 を開にした瞬間の閉塞をチェックしてゆ
く。設定配管温度を次第に上昇させて、閉塞現象が確認
されなくなるまで繰り返した。Next, the closing phenomenon at the time of operating the valve was confirmed. The set gas temperature was fixed at 60 ° C., and the initial set pipe temperature was also set at 60 ° C., the same as the set gas temperature. First, the valves V 1 , V 2 , V 5 , and V 6 are closed, and the adjustment valve V 7
Open to to set open to the atmosphere, slide into check the closure of the moment in which the control valve V 1 in the open in this state. The set piping temperature was gradually increased, and this was repeated until the clogging phenomenon was not confirmed.

【００５３】また、Ｎ2 ガスをパージしたあと、バルブ
Ｖ1 ，Ｖ2 ，Ｖ7 を閉にし、バルブＶ5 ，Ｖ6 を開にし
て真空ポンプＶＰを作動させ、配管内のＮ2 ガスを排気
して圧力検出器Ｐ3 が１０の−３乗ｔｏｒｒ以下になる
のを確認した。その後、バルブＶ5 ，Ｖ6 を閉にし、コ
ントロールバルブＶ1 を開にした瞬間の閉塞現象を確認
した。このとき２次側圧力は約８ｔｏｒｒであった。次
に、真空ポンプＶＰを作動状態のまま調整バルブＶ7 を
開にして２次側圧力が約２００ｔｏｒｒになった状態
で、コントロールバルブＶ1 を閉から開にした瞬間の閉
塞現象を確認した。After purging the N 2 gas, the valves V 1 , V 2 , V 7 are closed, the valves V 5 , V 6 are opened and the vacuum pump VP is operated to remove the N 2 gas in the pipe. After exhausting, it was confirmed that the pressure detector P 3 became 10 −3 torr or less. Thereafter, the valves V 5 and V 6 were closed, and the closing phenomenon at the moment when the control valve V 1 was opened was confirmed. At this time, the secondary pressure was about 8 torr. Next, in a state where the left control valve V 7 of the operating state of the vacuum pump VP 2 outlet pressure in the opening was about 200 torr, was confirmed blockage at the moment when the control valve V 1 and from the closed to the open.

【００５４】結果は表３に示されている。閉塞温度を閉
塞点と表現しているが、２００ｔｏｒｒと８ｔｏｒｒの
閉塞点は共に６４℃であり、設定ガス温度つまり飽和蒸
気圧温度より４℃高めであった。これらの結果を表１、
表２および図４を加えて考察すると、オリフィス近傍の
１次側配管温度を設定ガス温度より２０℃以上高くすれ
ば閉塞現象を回避できることは明らかである。The results are shown in Table 3. Although the closing temperature is expressed as the closing point, the closing points at 200 torr and 8 torr were both 64 ° C., which was 4 ° C. higher than the set gas temperature, that is, the saturated vapor pressure temperature. Table 1 shows these results.
In addition to Table 2 and FIG. 4, it is clear that the clogging phenomenon can be avoided by setting the temperature of the primary pipe near the orifice higher than the set gas temperature by 20 ° C. or more.

【００５５】[0055]

【表３】 [Table 3]

【００５６】図５は第３実施例の構成図である。絞り機
構として流量固定のオリフィスの代りに流量可変の流量
調節バルブＶ3 を配置し、調整バルブＶ7 を廃して排気
バルブＶ4 を配置した点が図３と異なっているだけであ
る。本実施例ではダイヤフラムタイプの流量調節バルブ
Ｖ3 により、弁開度を変えて閉塞温度の流量依存性を検
討した。設定ガス温度は４０、６０、８０℃の３種類に
対して実験を行った。FIG. 5 is a block diagram of the third embodiment. Instead of the flow rate fixed orifice as a throttle mechanism flow variable flow control valve V 3 are arranged, in that the control valve V 7 is arranged an exhaust valve V 4 and the waste is only different from Fig. The flow control valve V 3 of diaphragm type, in this example, was examined flow rate dependency of the blocking temperature by changing the valve opening. The experiment was performed for three types of gas temperatures of 40, 60 and 80 ° C.

【００５７】まず、バルブＶ1 ，Ｖ5 ，Ｖ6 を閉とし、
バルブＶ2 ，Ｖ4 を開にしてＮ2 ガスを流送し、流量調
節バルブＶ3 を適当な弁開度にして設定ガス流量に調節
した。その後、ヒーターＨ1 ，Ｈ2 により設定配管温度
（１次側配管温度）を設定ガス温度より２０℃高くし
た。真空ポンプＶＰのスイッチを入れ、バルブＶ2 を
閉、バルブＶ5 ，Ｖ6 を開にしてＮ2 を真空排気し、圧
力検出器Ｐ3 が１０の−３乗ｔｏｒｒになるまで排気し
た。さらに、バルブＶ5 ，Ｖ6 を閉にし、コントロール
バルブＶ1 を開にして定常流での閉塞点を測定した。First, the valves V 1 , V 5 and V 6 are closed,
The valves V 2 and V 4 were opened to feed N 2 gas, and the flow control valve V 3 was adjusted to an appropriate valve opening to adjust the set gas flow rate. Thereafter, the set pipe temperature (primary pipe temperature) was raised by 20 ° C. from the set gas temperature by the heaters H 1 and H 2 . Turn on the vacuum pump VP, the N 2 was evacuated the valve V 2 closed, and the valves V 5, V 6 is opened, the pressure detector P 3 was evacuated to -3 square torr for 10. Furthermore, the valves V 5, V 6 are closed to measure the occlusion point in a steady stream to the control valve V 1 open.

【００５８】図６に流量に対する閉塞点の結果が示され
ている。設定ガス温度が高くなるにつれて、閉塞温度は
設定ガス温度より次第に高くなってゆくが、設定ガス温
度が８０℃の場合でも８３℃位であり、約３℃高めにな
るに過ぎない。流量との関係においては、ほとんど閉塞
点は変化せず、閉塞点の流量依存性はほとんど無いと云
ってもよい。従って、流量を可変にできるという理由か
ら、オリフィスの代りに流量調節バルブを用いることが
できる。FIG. 6 shows the result of the blockage point with respect to the flow rate. As the set gas temperature increases, the closing temperature gradually increases from the set gas temperature. However, even when the set gas temperature is 80 ° C., it is about 83 ° C., which is only about 3 ° C. higher. In relation to the flow rate, the closing point hardly changes, and it can be said that the blocking point has almost no flow rate dependency. Therefore, a flow control valve can be used instead of the orifice because the flow can be varied.

【００５９】次に、バルブ操作時の閉塞現象の確認を行
った。設定ガス温度は８０℃に固定し、流量を５０、３
００、１０００ｃｍ／分の場合に設定配管温度を９０、
９５、１００℃の３段階に分けて閉塞現象を確認してい
った。Next, the closing phenomenon at the time of operating the valve was confirmed. The set gas temperature is fixed at 80 ° C, and the flow rate is 50, 3
When the setting pipe temperature is 90,
The blocking phenomenon was confirmed in three stages of 95 and 100 ° C.

【００６０】実験方法を述べると、バルブＶ1 ，Ｖ5 ，
Ｖ6 を閉、バルブＶ2 ，Ｖ4 を開にしてＮ2 ガスを送流
し、所定流量が流れるように流量調節バルブＶ3 を設定
した。真空ポンプのスイッチを入れてバルブＶ2 を閉と
し、バルブＶ5 ，Ｖ6 を開にして５分間保持し、Ｎ2 ガ
スを真空排気した。その後、バルブＶ5 ，Ｖ6 を閉にし
て、コントロールバルブＶ1 を閉から開にした直後の閉
塞現象を確認する。そしてバルブＶ1 を閉とし、バルブ
Ｖ5 ，Ｖ6 を開にし、設定配管温度および流量を変更し
て、再び閉塞実験を行う。The experimental method will be described. The valves V 1 , V 5 ,
The V 6 closed, and the valve V 2, V 4 to open the N 2 gas feed flushed, was set a flow control valve V 3 to a predetermined flow rate to flow. The valve V 2 is closed by switching on the vacuum pump, and a valve V 5, V 6 in the open and held for 5 minutes, was evacuated with N 2 gas. Thereafter, the valve V 5, V 6 in the closed, the control valve V 1 to confirm blockage immediately after the close to open. And a valve V 1 is closed, the valve V 5, V 6 is opened, by changing the setting pipe temperature and flow rate, performs occlusion experiment again.

【００６１】実験の結果は表４にまとめられている。３
種の流量共に設定配管温度が９５℃のときに閉塞現象が
見られなくなり、閉塞点は９５℃となる。従って、設定
配管温度を設定ガス温度より１５℃高くすれば閉塞現象
は生起しない。定常状態とバルブ操作時の閉塞点から判
断すれば、設定配管温度を設定ガス温度より２０℃以上
高く設定するならば、余裕をもって閉塞現象は生起しな
いと云える。The results of the experiment are summarized in Table 4. 3
When the set piping temperature is 95 ° C. for both kinds of flow rates, the clogging phenomenon is not observed, and the clogging point is 95 ° C. Therefore, if the set pipe temperature is set to 15 ° C. higher than the set gas temperature, the clogging phenomenon does not occur. Judging from the steady state and the clogging point at the time of valve operation, if the set pipe temperature is set to be higher than the set gas temperature by 20 ° C. or more, it can be said that the clogging phenomenon does not occur with a margin.

【００６２】[0062]

【表４】 [Table 4]

【００６３】図７および図８は第４実施例の構成図であ
る。本実施例では、配管を垂直にしてガスの流れ方向を
下→上向き、上→下向きに変えた場合の閉塞現象につい
て確認テストを行い、閉塞現象に対するガスの流れ方向
の影響を考察した。特に、閉塞現象が顕著に現れる約８
０℃の設定ガス温度に限定して行った。図７は下→上向
きのガス流に対する構成図で、図８は上→下向きのガス
流に対する構成図である。同時に水平配管に対しても行
っているが、この場合は図５と同様であるので図示を省
略した。FIGS. 7 and 8 are block diagrams of the fourth embodiment. In the present example, a confirmation test was performed on the clogging phenomenon when the gas flow direction was changed from downward to upward and from upward to downward with the pipe being vertical, and the effect of the gas flow direction on the clogging phenomenon was considered. In particular, about 8 in which the clogging phenomenon appears remarkably
The test was performed by limiting the set gas temperature to 0 ° C. FIG. 7 is a configuration diagram for a downward to upward gas flow, and FIG. 8 is a configuration diagram for an upward to downward gas flow. At the same time, the process is performed on the horizontal piping, but in this case, the illustration is omitted because it is the same as FIG.

【００６４】１次側配管（上流側配管）の設定温度を１
００℃にし、Ｎ2 ガスにより弁開度を調整して、設定ガ
ス流量を５０、３００ｃｃ／分の２種類で実験を行っ
た。The set temperature of the primary pipe (upstream pipe) is set to 1
The temperature was set to 00 ° C., the valve opening was adjusted with N 2 gas, and the experiment was performed at two set gas flow rates of 50 and 300 cc / min.

【００６５】まず、定常流の場合における閉塞点の確認
を行った。実験方法は図５で示す第３実施例と同様であ
るから、ここでは省略する。実験結果は表５に示されて
いる。この表から分るように、下→上、水平、上→下の
３方向における閉塞点は全て設定ガス温度近傍であり、
最大でも４℃だけ低くなっている。特に、下→上の場合
で５０ｃｃ／分のときに閉塞現象が見られなかった。こ
れは１次側で液滴が生成されても流量が小さい場合には
重力で落下して流量調節バルブに到達しないからであ
る。流量が大きくなると液滴がガス流に運ばれて閉塞が
起きる。また、閉塞点と１次側（１次側圧力）Ｐ1 との
関係は図９に示されている。この図からも閉塞点が点線
で示す設定ガス温度つまり飽和蒸気圧温度に依存してい
ることがよく理解できる。First, the blockage point in the case of a steady flow was confirmed. The experimental method is the same as that of the third embodiment shown in FIG. The experimental results are shown in Table 5. As can be seen from this table, all the clogging points in the three directions of lower → upper, horizontal and upper → lower are near the set gas temperature,
It is lower by at most 4 ° C. In particular, no clogging phenomenon was observed at a flow rate of 50 cc / min from the bottom to the top. This is because, even if droplets are generated on the primary side, if the flow rate is small, the liquid drops by gravity and does not reach the flow rate control valve. As the flow rate increases, droplets are carried into the gas stream, causing blockage. The relationship between occluded point and the primary side (primary pressure) P 1 is illustrated in FIG. From this figure, it can be clearly understood that the closing point depends on the set gas temperature indicated by the dotted line, that is, the saturated vapor pressure temperature.

【００６６】[0066]

【表５】 [Table 5]

【００６７】次に、バルブ操作時の閉塞現象を確認し
た。上流側の１次側配管と流量調節バルブを各々一定温
度に設定し、真空排気状態の実験ラインにフロンガスを
導入した直後の閉塞現象の有無を確認した。又、ガス流
量の影響を調べるため、２次側圧力の設定として５、１
０、１５、２０ｔｏｒｒの４種類で実験を行った。Next, a closing phenomenon at the time of operating the valve was confirmed. The upstream primary pipe and the flow rate control valve were each set at a constant temperature, and the presence or absence of a clogging phenomenon immediately after the introduction of Freon gas into the vacuum exhausted experimental line was confirmed. In order to investigate the influence of the gas flow rate, the secondary pressure was set to 5, 1
The experiment was performed with four types of 0, 15, and 20 torr.

【００６８】なお、設定ガス温度８０℃の実験条件下に
おいて、上記の２次側圧力にしたときのフロンガスの実
流量を測定した結果、各々約１００、２６０、４２０、
６００ｃｃ／分（４０℃，１気圧換算の値）であった。
測定方法としては、タンクに一定量のフロンを入れ、テ
スト条件下において、各々の２次側圧力でタンク内のフ
ロンがなくなるまでガスを流し続け、その時間とフロン
が気化したときの体積（液体の時の約２６０倍）から計
算して実流量を求めた。The actual flow rate of the chlorofluorocarbon gas at the above-mentioned secondary pressure was measured under the experimental conditions of the set gas temperature of 80 ° C., and as a result, about 100, 260, 420,
It was 600 cc / min (40 ° C., 1 atm conversion value).
As a measurement method, put a certain amount of chlorofluorocarbon into the tank, and under the test conditions, continue to flow gas until there is no chlorofluorocarbon in the tank at each secondary pressure, the time and the volume when the chlorofluorocarbon vaporized (liquid The actual flow rate was calculated from the above (approximately 260 times that of the above).

【００６９】実験方法は図５で示す第３実施例と同様で
あるから、ここでは省略する。実験結果は図１０に示さ
れている。下→上、水平、上→下の３方向共に閉塞点は
飽和蒸気圧曲線、即ち飽和蒸気圧温度よりも下になり、
約２℃小さくなっている。この図１０の傾向は図９と同
様であるから、定常流と同様の閉塞と呼ぶ。即ち、１次
側の流量調節バルブ近傍で液滴が生成されて、流量調節
バルブを閉塞すると考えられる。The experimental method is the same as that of the third embodiment shown in FIG. The experimental results are shown in FIG. The obstruction point is lower than the saturated vapor pressure curve, that is, the saturated vapor pressure temperature in all three directions of lower → upper, horizontal, and upper → lower,
It is about 2 ° C smaller. Since the tendency in FIG. 10 is the same as that in FIG. 9, it is referred to as a blockage similar to a steady flow. That is, it is considered that droplets are generated in the vicinity of the flow rate control valve on the primary side, and the flow rate control valve is closed.

【００７０】図１０とは全く異なる現象が上→下方向の
場合にのみ発生し、図１１に示す。これは定常流同様の
閉塞とは考えられない。発明者はこの現象を次の様に考
えている。上→下に流れる場合、上流側の１次側配管で
生成した液滴は重力により流量調整バルブに落下して閉
塞を起こしやすい。流量調節バルブの近傍でできた液滴
は図１０のように定常流同様の閉塞を生起し、流量調節
バルブよりかなり離れた１次側配管内で生成された液滴
が図１１で示す閉塞の原因であると考えている。しか
し、いずれにしても、閉塞温度は最大でも飽和蒸気圧温
度を約１８℃上回っているだけであり、２０℃未満であ
ることが実験的にも裏づけられた。A phenomenon completely different from that of FIG. 10 occurs only in the case of upward → downward, and is shown in FIG. This is not considered to be a blockage similar to a steady flow. The inventor considers this phenomenon as follows. In the case of flowing from the upper side to the lower side, the droplet generated in the primary pipe on the upstream side easily falls on the flow rate control valve due to gravity and is easily blocked. Droplets formed in the vicinity of the flow control valve cause a blockage similar to a steady flow as shown in FIG. 10, and droplets generated in the primary pipe far away from the flow control valve cause the blockage shown in FIG. I think it is the cause. However, in any case, the clogging temperature is only about 18 ° C. at most higher than the saturated vapor pressure temperature, and it was experimentally confirmed that it is less than 20 ° C.

【００７１】図１２は本発明の第５実施例であり、流路
閉塞防止装置の構成図を示している。１次側圧力検出器
Ｐ1 により１次側配管ＰＰ1 内の１次側ガス圧力を検出
する。この圧力値を受けて、演算制御装置ＣＣは、前記
１次側ガス圧力に対応した飽和蒸気圧温度を算出し、こ
れにより２０℃以上高めの温度を１次側配管ヒーターＨ
1 に指令する。ヒーターＨ1 は１次側配管ＰＰ1 をその
指令温度にまで加熱し、配管内におけるガスの液化を防
止する。FIG. 12 shows a fifth embodiment of the present invention, and is a configuration diagram of a flow path blockage prevention device. The primary pressure detector P 1 detects the primary-side gas pressure of the primary side piping PP 1. Receiving this pressure value, the arithmetic and control unit CC calculates a saturated vapor pressure temperature corresponding to the primary gas pressure, thereby increasing the temperature higher by 20 ° C. or more to the primary pipe heater H.
Command 1 Heater H 1 heats the primary pipe PP 1 to its instruction temperature to prevent liquefaction of the gas in the pipe.

【００７２】[0072]

【発明の効果】上述したように、定常流の場合には１次
側配管温度（設定配管温度）を設定ガス温度（飽和蒸気
圧温度）より高温度に、またバルブ操作時には前記設定
ガス温度より２０℃以上高く設定しておけば、絞り機構
における液化材料ガスの閉塞は生起せず、安定した流量
でガスの送流を行うことができる。したがって、半導体
製造ライン、化学品製造ラインにおいて目的物質の製造
を安定して行え、均一な製品を供給できる実用的な流路
閉塞防止方法および装置を提供できる。As described above, in the case of a steady flow, the primary pipe temperature (set pipe temperature) is set higher than the set gas temperature (saturated vapor pressure temperature). If the temperature is set higher than 20 ° C., the liquefied material gas is not blocked in the throttle mechanism, and the gas can be sent at a stable flow rate. Therefore, it is possible to provide a practical method and apparatus for preventing flow path blockage, which can stably produce a target substance in a semiconductor production line or a chemical production line and can supply a uniform product.

【図面の簡単な説明】[Brief description of the drawings]

【図１】本発明に係る流路閉塞防止方法およびその装置
の第１実施例の構成図である。FIG. 1 is a configuration diagram of a first embodiment of a flow path blocking prevention method and apparatus according to the present invention.

【図２】第１実施例における蒸気圧曲線と流路閉塞の関
係を示すグラフである。FIG. 2 is a graph showing a relationship between a steam pressure curve and a flow path blockage in the first embodiment.

【図３】本発明の第２実施例の構成図である。FIG. 3 is a configuration diagram of a second embodiment of the present invention.

【図４】第２実施例における蒸気圧曲線と流路閉塞の関
係を示すグラフである。FIG. 4 is a graph showing a relationship between a steam pressure curve and a flow path blockage in the second embodiment.

【図５】本発明の第３実施例の構成図である。FIG. 5 is a configuration diagram of a third embodiment of the present invention.

【図６】第３実施例における流量と閉塞点の関係を示す
グラフである。FIG. 6 is a graph showing a relationship between a flow rate and a closing point in the third embodiment.

【図７】本発明の第４実施例において下→上方向へガス
が流れる場合の構成図である。FIG. 7 is a configuration diagram in the case where gas flows from downward to upward in the fourth embodiment of the present invention.

【図８】本発明の第４実施例において上→下方向へガス
が流れる場合の構成図である。FIG. 8 is a configuration diagram when a gas flows upward to downward in a fourth embodiment of the present invention.

【図９】第４実施例における定常流の閉塞点を示すグラ
フである。FIG. 9 is a graph showing a closed point of a steady flow in the fourth embodiment.

【図１０】第４実施例におけるバルブ操作時の閉塞点を
示すグラフである。FIG. 10 is a graph showing a closing point when a valve is operated in a fourth embodiment.

【図１１】第４実施例において上→下方向へ流れる場合
のバルブ操作時の閉塞点を示すグラフである。FIG. 11 is a graph showing a closing point at the time of operating a valve when flowing in an upward-downward direction in a fourth embodiment.

【図１２】本発明の第５実施例で、流路閉塞防止装置の
具体的構成図である。FIG. 12 is a specific configuration diagram of a channel blockage prevention device according to a fifth embodiment of the present invention.

【符号の説明】 ２はウォーターバス、４はウォーター、６はタンク、Ｂ
Ｌはバイパスライン、ＣＣは演算制御装置、Ｆは代替フ
ロン、Ｈ1 は１次側配管ヒーター、Ｈ2 は２次側配管ヒ
ーター、Ｏはオリフィス、ＰＰ1 は１次側配管、ＰＰ2
は２次側配管、Ｐ1 は１次側圧力検出器、Ｐ2 は２次側
圧力検出器、Ｐ3 は排気側圧力検出器、Ｔｗはウォータ
バス温度計、Ｔｉは入口ガス温度計、Ｔ1 は１次側配管
温度計、Ｔ2 は２次側配管温度計、Ｔｇ1 は１次側ガス
温度計、Ｔｇ2 は２次側ガス温度計、Ｖ1 はコントロー
ルバルブ、Ｖ2 は窒素用バルブ、Ｖ3 は流量調節バル
ブ、Ｖ4 は排気バルブ、Ｖ5 ・Ｖ6 は補助バルブ、Ｖ7
は調整バルブ、ＶＰはリークバルブ付きの真空ポンプ。[Explanation of Signs] 2 is a water bath, 4 is water, 6 is a tank, B
L is a bypass line, CC is an arithmetic and control unit, F is an alternative chlorofluorocarbon, H 1 is a primary pipe heater, H 2 is a secondary pipe heater, O is an orifice, PP 1 is a primary pipe, PP 2
The secondary side piping, P 1 is the primary pressure detector, P 2 is the outlet pressure detectors, P 3 is the exhaust side pressure detector, Tw is a water bath thermometer, Ti is the inlet gas temperature thermometer, T 1 primary pipe thermometer, T 2 is the secondary side piping thermometer, Tg 1 is the primary gas thermometer, Tg 2 is the secondary gas thermometer, V 1 is the control valve, V 2 is a nitrogen valve, V 3 is the flow rate control valve, V 4 is the exhaust valve, V 5 · V 6 is the auxiliary valve, V 7
Is an adjustment valve, and VP is a vacuum pump with a leak valve.

フロントページの続き (72)発明者 川田 幸司 大阪府大阪市西区立売堀２丁目３番２号 株式会社フジキン内 (72)発明者 米華 克典 大阪府大阪市西区立売堀２丁目３番２号 株式会社フジキン内 (72)発明者 池田 信一 大阪府大阪市西区立売堀２丁目３番２号 株式会社フジキン内 (72)発明者 森本 明弘 大阪府大阪市西区立売堀２丁目３番２号 株式会社フジキン内 (72)発明者 皆見 幸男 大阪府大阪市西区立売堀２丁目３番２号 株式会社フジキン内Continuing from the front page (72) Koji Kawada 2-3-2, Noribori, Nishi-ku, Osaka, Osaka Prefecture Fujikin Co., Ltd. (72) Katsunori Yoneka 2-3-2, Noribori, Nishi-ku, Osaka, Osaka Fujikin Co., Ltd. (72) Inventor Shinichi Ikeda 2-3-2, Noribori, Nishi-ku, Osaka-shi, Osaka Fujikin Co., Ltd. (72) Inventor Akihiro Morimoto 2-3-2, Noribori, Nishi-ku, Osaka-shi, Osaka Fujikinnai (72) ) Inventor Yukio Minami 2-3-2, Noribori, Nishi-ku, Osaka-shi, Osaka Fujikin Co., Ltd.

Claims (10)

【特許請求の範囲】[Claims] 【請求項１】 高圧側の１次側配管から液化材料ガスを
絞り機構を介して低圧側の２次側配管へ流送する流量制
御方法において、１次側配管及び絞り機構の温度を材料
ガスの１次側圧力が飽和蒸気圧であるとしたときの温度
（飽和蒸気圧温度）より高温度に設定することを特徴と
する液化材料ガスの流路閉塞防止方法。In a flow control method for feeding a liquefied material gas from a high pressure side primary pipe to a low pressure side secondary pipe via a throttle mechanism, the temperature of the primary pipe and the throttle mechanism is controlled by a material gas. (C) setting a temperature higher than a temperature (saturated vapor pressure temperature) when the primary pressure is a saturated vapor pressure. 【請求項２】 １次側配管及び絞り機構の温度を前記飽
和蒸気圧温度より２０℃以上高く設定するようにした請
求項１に記載の流路閉塞防止方法。2. The method according to claim 1, wherein the temperatures of the primary side pipe and the throttle mechanism are set at least 20 ° C. higher than the saturated vapor pressure temperature. 【請求項３】 前記絞り機構がオリフィスである請求項
１又は請求項２に記載の流路閉塞防止方法。3. The method according to claim 1, wherein the throttle mechanism is an orifice. 【請求項４】 前記絞り機構が流量を可変できる流量調
節バルブである請求項１又は請求項２に記載の流路閉塞
防止方法。4. The method according to claim 1, wherein the throttle mechanism is a flow control valve capable of changing a flow rate. 【請求項５】高圧側の１次側配管から液化材料ガスを絞
り機構を介して低圧側の２次側配管へ流送する流量制御
装置において、１次側配管内のガス圧力を検出する１次
側圧力検出器と、この１次側圧力検出器により検出され
た１次側圧力が飽和蒸気圧であるとしたときの温度（飽
和蒸気圧温度）を演算する演算制御装置と、この演算制
御装置の指令により１次側配管及び絞り機構の温度を前
記飽和蒸気圧温度より高温度に設定する１次側配管ヒー
ターから構成される液化材料ガスの流路閉塞防止装置。5. A flow control device for flowing a liquefied material gas from a high-pressure primary pipe to a low-pressure secondary pipe via a throttle mechanism, wherein a gas pressure in the primary pipe is detected. A secondary pressure detector, an arithmetic and control unit for calculating a temperature (saturated vapor pressure temperature) when the primary pressure detected by the primary pressure detector is assumed to be a saturated vapor pressure, and the arithmetic control A liquefied material gas flow path blockage prevention device comprising a primary piping heater for setting the temperature of the primary piping and the throttle mechanism to a temperature higher than the saturated vapor pressure temperature in accordance with a command from the device. 【請求項６】 １次側配管及び絞り機構の温度を前記飽
和蒸気圧温度より２０℃以上高く設定するようにした請
求項５に記載の液化材料ガスの流路閉塞防止装置。6. The apparatus according to claim 5, wherein the temperatures of the primary side pipe and the throttle mechanism are set at least 20 ° C. higher than the saturated vapor pressure temperature. 【請求項７】 前記１次側配管、絞り機構および２次側
配管が同一水平面上に配置される請求項５又は請求項６
に記載の流路閉塞防止装置。7. The primary pipe, the throttle mechanism, and the secondary pipe are arranged on the same horizontal plane.
3. The flow path blockage prevention device according to item 1. 【請求項８】 前記１次側配管、絞り機構および２次側
配管が傾斜状または垂直状に配置され、液化材料ガスが
上昇方向に流送される請求項５又は請求項６に記載の流
路閉塞防止装置。8. The flow according to claim 5, wherein the primary side pipe, the throttle mechanism, and the secondary side pipe are arranged in an inclined or vertical shape, and the liquefied material gas is fed in an ascending direction. Road blockage prevention device. 【請求項９】 前記絞り機構がオリフィスである請求項
５、請求項６、請求項７又は請求項８に記載の流路閉塞
防止装置。9. The flow passage blocking prevention device according to claim 5, wherein the throttle mechanism is an orifice. 【請求項１０】 前記絞り機構が流量を可変できる流量
調節バルブである請求項５、請求項６、請求項７又は請
求項８に記載の流路閉塞防止装置。10. The flow path blocking prevention device according to claim 5, wherein said throttle mechanism is a flow rate control valve capable of changing a flow rate.
JP22037797A 1997-08-15 1997-08-15 Method and apparatus for preventing liquefied material gas flow path blockage Expired - Lifetime JP3387787B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22037797A JP3387787B2 (en) 1997-08-15 1997-08-15 Method and apparatus for preventing liquefied material gas flow path blockage

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Application Number Priority Date Filing Date Title
JP22037797A JP3387787B2 (en) 1997-08-15 1997-08-15 Method and apparatus for preventing liquefied material gas flow path blockage

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JPH1163400A true JPH1163400A (en) 1999-03-05
JP3387787B2 JP3387787B2 (en) 2003-03-17

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020059070A1 (en) * 2018-09-20 2020-03-26 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ Substrate treatment device, method for manufacturing semiconductor device and program

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020059070A1 (en) * 2018-09-20 2020-03-26 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ Substrate treatment device, method for manufacturing semiconductor device and program
JPWO2020059070A1 (en) * 2018-09-20 2021-08-30 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ Substrate processing equipment, semiconductor equipment manufacturing methods and programs

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