JPH11346486A - Ultrasonic motor and electronic apparatus equipped with the ultrasonic motor - Google Patents

Ultrasonic motor and electronic apparatus equipped with the ultrasonic motor

Info

Publication number
JPH11346486A
JPH11346486A JP10151745A JP15174598A JPH11346486A JP H11346486 A JPH11346486 A JP H11346486A JP 10151745 A JP10151745 A JP 10151745A JP 15174598 A JP15174598 A JP 15174598A JP H11346486 A JPH11346486 A JP H11346486A
Authority
JP
Japan
Prior art keywords
piezoelectric vibrator
vibration
pressing
ultrasonic motor
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10151745A
Other languages
Japanese (ja)
Other versions
JP4327268B2 (en
Inventor
Akihiro Iino
朗弘 飯野
Makoto Suzuki
鈴木　　誠
Masao Kasuga
政雄 春日
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP15174598A priority Critical patent/JP4327268B2/en
Publication of JPH11346486A publication Critical patent/JPH11346486A/en
Application granted granted Critical
Publication of JP4327268B2 publication Critical patent/JP4327268B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PROBLEM TO BE SOLVED: To generate large torque and to stabilize the torque. SOLUTION: An ultrasonic motor 10 for taking out an output, through press contact with a piezoelectric oscillator 11 performing elliptical oscillation by combining bending oscillation and stretching oscillation comprises a member for pressing the piezoelectric oscillator 11, at a part opposite to the press contact part, against the press contact part, and a member 14 for guiding the piezoelectric oscillator 11 in the pressing direction at least one node of the bending oscillation or stretching oscillation of the piezoelectric oscillator 11, while abutting against the opposite sides in at least two directions, i.e., the pressing direction and a direction perpendicular thereto.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明の属する技術分野】本発明は、大きなトルクを発
生させ、トルクを安定させた超音波モータ及び超音波モ
ータ付き電子機器に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic motor that generates a large torque and stabilizes the torque, and an electronic device with the ultrasonic motor.

【０００２】[0002]

【従来の技術】近時、マイクロモータの分野で、圧電素
子の圧電効果を利用した超音波モータは、電気的エネル
ギーから機械的エネルギーへの高い変換効率及び装置構
成の小型化、という利点から、注目されている。特に、
圧電振動子自体の２モード振動により駆動力を得るタイ
プの超音波モータは、小型化を図る観点から、広く用い
られている。2. Description of the Related Art In recent years, in the field of micromotors, ultrasonic motors utilizing the piezoelectric effect of piezoelectric elements have the advantages of high conversion efficiency from electrical energy to mechanical energy and miniaturization of the device configuration. Attention has been paid. Especially,
An ultrasonic motor of a type that obtains a driving force by two-mode vibration of a piezoelectric vibrator itself is widely used from the viewpoint of miniaturization.

【０００３】図１４は、従来技術に係わる超音波モータ
の構造を示す。この超音波モータ１００は、所定分極処
理を施し、屈曲振動及び伸縮振動を生じる圧電振動子１
０１と、前記圧電振動子１０１の中心部であり且つ前記
屈曲振動及び伸縮振動の節を挟み込んで支持する支持部
材１０２と、支持部材１０２の周縁に固定された加圧部
材１０３と、圧電振動子１０１の端面を圧接された移動
体１０４からなる。そして、圧電振動子１０１は、同時
に屈曲振動及び伸縮振動を励振して、周面で楕円振動す
る一方、加圧力は、加圧部材１０３、支持部材１０２を
介して、圧電振動子１０１の中心部の振動節に加えら
れ、圧電振動子１０１と移動体１０４とを周期的に圧接
させ、両者の間に摩擦力を生じさせる。そして、移動体
１０４は、一方向へ回転させられると共に圧接部位と移
動体１０４の接触位置も変動する。また、加圧力は圧電
振動子の中心（支持位置）から圧接部位までの半分にか
かる為、圧電振動子の中心の左右で振動のバランスが崩
れ振動効率が落ちるとともに、節の位置も中心からずれ
る為、支持部での振動ロスも激しくなる。FIG. 14 shows the structure of an ultrasonic motor according to the prior art. The ultrasonic motor 100 is a piezoelectric vibrator 1 that performs a predetermined polarization process to generate bending vibration and expansion / contraction vibration.
01, a supporting member 102 which is a central portion of the piezoelectric vibrator 101 and supports the nodes of the bending vibration and the stretching vibration, and a pressing member 103 fixed to a peripheral edge of the supporting member 102; A moving body 104 is pressed against an end face of the moving body 101. Then, the piezoelectric vibrator 101 simultaneously excites the bending vibration and the expansion / contraction vibration and performs an elliptical vibration on the peripheral surface, while the pressing force is applied to the central portion of the piezoelectric vibrator 101 via the pressing member 103 and the supporting member 102. , The piezoelectric vibrator 101 and the moving body 104 are periodically pressed into contact with each other to generate a frictional force therebetween. Then, the moving body 104 is rotated in one direction, and the contact position between the press-contact portion and the moving body 104 also changes. In addition, since the pressing force is applied to half of the piezoelectric vibrator from the center (support position) to the press-contact portion, the balance of vibration is lost on the left and right of the center of the piezoelectric vibrator, the vibration efficiency is reduced, and the position of the node is also shifted from the center. Therefore, the vibration loss at the support part also becomes severe.

【０００４】[0004]

【発明が解決しようとする課題】しかしながら、従来技
術に係わる超音波モータの支持部材１０２は、圧電振動
子１０１を狭持するにすぎないため、支持部材１０２の
支持位置は、大きな加圧力を加えられると、振動節から
ずれてしまう。そして、圧電振動子に生じる屈曲振動及
び伸縮振動は、不安定になる。また、圧電振動子１０１
は、移動体１０４との圧接部から反作用の力を受けるた
め、加圧方向に対して垂直方向へ変位してしまい、移動
体１０４に対する圧接部位を滑らせるので、圧電振動子
１０１と移動体１０４との間に生じる摩擦力は変動す
る。以上の不安定な振動状態及び摩擦力の変動は、大き
なトルクを発生させることができない、また、トルクを
変動させるという問題を生じさせていた。However, since the supporting member 102 of the ultrasonic motor according to the prior art merely holds the piezoelectric vibrator 101, the supporting position of the supporting member 102 is large when a large pressing force is applied. If it is, it will shift from the vibration node. Then, the bending vibration and the stretching vibration generated in the piezoelectric vibrator become unstable. Further, the piezoelectric vibrator 101
Receives the reaction force from the pressure contact portion with the moving body 104, and is displaced in the direction perpendicular to the pressing direction, and slides the pressure contact portion with the moving body 104, so that the piezoelectric vibrator 101 and the moving body 104 And the frictional force generated between them varies. The unstable vibration state and the fluctuation of the frictional force described above have caused a problem that a large torque cannot be generated and the torque fluctuates.

【０００５】本発明は、上記問題を解決するためなされ
たものであって、その目的は、大きなトルクを発生させ
るとともに、トルクや移動スピードを安定させた超音波
モータ及び超音波モータ付電子機器を提供する。The present invention has been made to solve the above problems, and an object of the present invention is to provide an ultrasonic motor and an electronic device with an ultrasonic motor which generate a large torque and stabilize the torque and the moving speed. provide.

【０００６】[0006]

【課題を解決するための手段】即ち、以上の課題を解決
する手段は、請求項１に記載するように、屈曲振動と伸
縮振動とにより楕円振動する圧電振動子を圧接させて出
力を取り出す超音波モータにおいて、前記圧電振動子の
うち前記圧接させる部位に対して反対側の部位を前記圧
接部位へ加圧する加圧部材と、前記圧電振動子のうち前
記屈曲振動又は伸縮振動の少なくとも一方の節であっ
て、前記加圧方向と垂直な少なくとも２方向において、
各々対向する両側に当接するとともに、前記加圧方向へ
前記圧電振動子を案内する節案内部材と、を備えたこと
を特徴とする。In order to solve the above-mentioned problems, a means for solving the above-mentioned problem is that a piezoelectric vibrator that performs elliptical vibration by bending vibration and expansion-contraction vibration is brought into pressure contact with the piezoelectric vibrator to take out an output. In the acoustic wave motor, a pressing member that presses a portion of the piezoelectric vibrator opposite to the portion to be pressed against the pressed portion, and at least one node of the bending vibration or the expansion and contraction vibration of the piezoelectric vibrator. In at least two directions perpendicular to the pressing direction,
And a node guide member that contacts the opposing sides and guides the piezoelectric vibrator in the pressing direction.

【０００７】以上の手段にあって、節案内部材は、屈曲
振動又は伸縮振動の１つの節に対して２方向において対
向する両側で当接する場合、１つ節に対して一の方向に
おいて対向する両側で当接するとともに、他の節に対し
て他の方向において対向する両側で当接する場合、さら
に、複数の節に対してそれぞれ異なる方向において対向
する両側で当接する場合の何れも含まれる。また、圧電
振動子のうち圧接させる部位とは、移動体に対して圧電
振動子を圧接させる部位である。In the above means, when the node guide member abuts on one side of the bending vibration or the expansion and contraction vibration on the opposite sides in two directions, it faces one node in one direction. This includes both cases where both sides contact each other and both sides that oppose another node in another direction, and further cases where each node opposes a plurality of nodes in different directions. The portion of the piezoelectric vibrator to be pressed against is a portion of the piezoelectric vibrator to be pressed against the moving body.

【０００８】これによれば、圧電振動子は、屈曲振動と
伸縮振動とにより楕円振動する一方で、加圧部材は、圧
電振動子のうち前記圧接させる部位と反対側の部位を圧
接部位へ加圧し、圧電振動子と移動体とを圧接させるの
で、両者の間に摩擦力が生じ、移動体は移動される。特
に、圧接部位と反対側の部位を直接加圧するので、全て
の加圧力は圧電振動子と移動体の圧接部位全体にに加わ
り振動のバランスが崩れること無く、節の位置も移動し
ないので支持部での振動ロスも極めて小さい。また、加
圧力によって支持部材がずれることもないので大きな加
圧力を与えることが可能となり、大きな摩擦力が生じ
る。一方、節案内部材は、屈曲振動又は伸縮振動の節に
当接するので、屈曲振動又は伸縮振動を妨げない。ま
た、屈曲振動等の節であって、加圧方向と垂直な少なく
とも２方向において、各々対向する両側に当接し、屈曲
振動及び伸縮振動が生じたとき、圧電振動子を加圧方向
に対して垂直な方向へ移動させず、加圧方向のみに案内
するので、圧電振動子に生じる屈曲振動及び伸縮振動は
安定し、圧電振動子の移動体との圧接部位は変位しな
い。したがって、大きな加圧力が圧電振動子と移動体と
の間に加えられ、大きなトルクを発生させるとともに、
トルクを安定させる。According to this, the piezoelectric vibrator oscillates elliptically by the bending vibration and the expansion and contraction vibration, while the pressing member applies a portion of the piezoelectric vibrator opposite to the portion to be pressed to the pressed portion. Since the piezoelectric vibrator and the moving body are pressed against each other, a frictional force is generated between the two and the moving body is moved. In particular, since the part on the opposite side of the pressure contact part is directly pressurized, all the pressing force is applied to the entire pressure contact part of the piezoelectric vibrator and the moving body, and the balance of vibration does not collapse and the position of the node does not move, so the support part The vibration loss at is very small. Further, since the supporting member does not shift due to the pressing force, a large pressing force can be applied, and a large frictional force is generated. On the other hand, since the node guide member contacts the node of the bending vibration or the expansion / contraction vibration, it does not hinder the bending vibration or the expansion / contraction vibration. Also, in a node of bending vibration, etc., in at least two directions perpendicular to the pressing direction, the piezoelectric vibrator is brought into contact with the opposing sides, and when the bending vibration and the stretching vibration occur, the piezoelectric vibrator is moved in the pressing direction. Since the guide is guided only in the pressing direction without moving in the vertical direction, the bending vibration and the expansion and contraction vibration generated in the piezoelectric vibrator are stabilized, and the pressure contact portion of the piezoelectric vibrator with the moving body is not displaced. Therefore, a large pressing force is applied between the piezoelectric vibrator and the moving body, generating a large torque,
Stabilize torque.

【０００９】また、請求項２に記載するように、屈曲振
動と伸縮振動とにより楕円振動する圧電振動子を圧接さ
せて出力を取り出す超音波モータにおいて、前記圧電振
動子のうち前記圧接させる部位に対して反対側を前記圧
接側へ加圧する加圧部材と、前記圧電振動子のうち伸縮
振動の節であって、前記加圧方向と垂直な少なくとも一
の方向において、対向する両側に当接するとともに、前
記加圧方向へ前記圧電振動子を案内する節案内部材と、
前記圧電振動子のうち前記圧接側と反対側の端部であっ
て、前記加圧方向と垂直な少なくとも他の方向におい
て、対向する両側に当接するとともに、前記加圧方向へ
前記圧電振動子を案内する端部案内部材と、を備えたこ
とを特徴とする。According to a second aspect of the present invention, there is provided an ultrasonic motor in which a piezoelectric vibrator which performs elliptical vibration by bending vibration and expansion / contraction vibration is pressed into contact with the piezoelectric vibrator to take out an output, and the portion of the piezoelectric vibrator to be brought into pressure contact with the piezoelectric vibrator. On the other hand, a pressing member for pressing the opposite side to the pressing side, and a node of the stretching vibration of the piezoelectric vibrator, in at least one direction perpendicular to the pressing direction, abutting on opposite sides. A joint guide member for guiding the piezoelectric vibrator in the pressing direction,
An end of the piezoelectric vibrator opposite to the press-contact side, in at least another direction perpendicular to the pressing direction, abutting on opposite sides, and moving the piezoelectric vibrator in the pressing direction. And an end guide member for guiding.

【００１０】これによれば、圧電振動子は、屈曲振動と
伸縮振動とにより楕円振動する一方で、加圧部材は、圧
接側と反対側から圧接側へ圧電振動子を加圧して駆動対
象としての移動体に圧接させる。摩擦力が圧電振動子と
移動体の圧接部位に生じ、この摩擦力により移動体は所
定の方向へ移動させられる。一方、節案内部材は、圧電
振動子を加圧方向に対して垂直な一の方向へ移動させ
ず、端部案内部材は、圧電振動子を加圧方向に対して垂
直な他の方向へ移動させず、圧電振動子は加圧方向に対
して垂直な方向へ移動しないとともに加圧方向へ案内さ
れるので、圧電振動子に生じる屈曲振動及び伸縮振動は
安定し、圧電振動子の移動体との圧接部位は変位しな
い。According to this, while the piezoelectric vibrator oscillates in an elliptical manner by the bending vibration and the expansion and contraction vibration, the pressing member presses the piezoelectric vibrator from the side opposite to the press-contact side to the press-contact side to be driven. To the moving object. A frictional force is generated at a pressure contact portion between the piezoelectric vibrator and the moving body, and the moving body is moved in a predetermined direction by the frictional force. On the other hand, the node guide member does not move the piezoelectric vibrator in one direction perpendicular to the pressing direction, and the end guide member moves the piezoelectric vibrator in another direction perpendicular to the pressing direction. Without doing so, the piezoelectric vibrator does not move in the direction perpendicular to the pressurizing direction and is guided in the pressurizing direction, so that the bending vibration and stretching vibration generated in the piezoelectric vibrator are stable, and the piezoelectric vibrator Is not displaced.

【００１１】また、請求項３に記載するように、屈曲振
動と伸縮振動とにより楕円振動する圧電振動子を圧接さ
せて出力を取り出す超音波モータにおいて、前記圧電振
動子のうち前記圧接させる部位に対して反対側の部位を
前記圧接部位へ加圧する加圧部材と、前記圧電振動子の
うち前記屈曲振動又は伸縮振動の少なくとも一方の節で
あって、前記加圧方向と垂直な一の方向において、対向
する両側に当接するとともに、前記加圧方向へ前記圧電
振動子を案内する節案内部材と、前記圧電振動子のうち
前記屈曲振動又は伸縮振動の少なくとも一方の節に対し
て、前記加圧方向と垂直な他の方向において固定される
固定部材と、前記固定部材であって、前記他の方向にお
いて、対向する両側に当接するとともに、前記固定部材
と対になって前記加圧方向へ前記圧電振動子を案内する
案内部材と、を備えたことを特徴とする。According to a third aspect of the present invention, there is provided an ultrasonic motor in which a piezoelectric vibrator which performs elliptical vibration by bending vibration and expansion / contraction vibration is brought into pressure contact with the piezoelectric vibrator to take out an output, and a portion of the piezoelectric vibrator which is brought into pressure contact with the piezoelectric vibrator. A pressing member that presses a portion on the opposite side to the press contact portion, and at least one node of the bending vibration or the stretching vibration of the piezoelectric vibrator, in one direction perpendicular to the pressing direction. A node guide member that abuts on opposing sides and guides the piezoelectric vibrator in the pressing direction, and pressurizes at least one node of the bending vibration or the stretching vibration of the piezoelectric vibrator. A fixing member fixed in another direction perpendicular to the direction, and the fixing member, in the other direction, abutting on opposite sides, and paired with the fixing member; Characterized by comprising a guide member for guiding said the pressure direction piezoelectric vibrator, a.

【００１２】これによれば、加圧部材は、圧電振動子の
うち圧接させる部位と反対側の対応する部位を圧接部位
へ加圧するので、全ての加圧力は圧接部位へ加わる。節
案内部材は、圧電振動子のうち加圧方向と垂直な一の方
向の対向する両側に当接するので、圧電振動子を一の方
向へ移動させず、加圧方向へ案内する。案内部材は、固
定部材のうち加圧方向に対して垂直な他の方向の対向す
る両側に当接し、固定部材を他の方向へ移動させないと
ともに加圧方向へ案内し、固定部材に固定した圧電振動
子も他の方向へ移動させず加圧方向へ案内される。即
ち、圧電振動子は加圧方向に対して垂直な方向へ移動せ
ず、加圧方向へ案内されるので、圧電振動子に生じる屈
曲振動及び伸縮振動は安定し、圧電振動子の移動体との
圧接部位は変位しない。According to this, since the pressing member presses the corresponding portion of the piezoelectric vibrator opposite to the portion to be pressed against the pressed portion, all the pressing force is applied to the pressed portion. The node guide member contacts the opposing sides of the piezoelectric vibrator in one direction perpendicular to the pressing direction, and thus guides the piezoelectric vibrator in the pressing direction without moving the piezoelectric vibrator in one direction. The guide member abuts on opposite sides of the fixed member in the other direction perpendicular to the pressing direction, does not move the fixed member in the other direction, guides the fixed member in the pressing direction, and fixes the piezoelectric member to the fixed member. The vibrator is also guided in the pressing direction without moving in the other direction. That is, since the piezoelectric vibrator does not move in the direction perpendicular to the pressing direction but is guided in the pressing direction, the bending vibration and the expansion and contraction vibration generated in the piezoelectric vibrator are stable, and the piezoelectric vibrator can move with the moving body. Is not displaced.

【００１３】また、請求項４に記載するように、屈曲振
動と伸縮振動とにより楕円振動する圧電振動子を加圧す
ることにより圧接させて出力を取り出す超音波モータに
おいて、前記圧電振動子のうち前記屈曲振動又は伸縮振
動の少なくとも一方の節に対して、前記圧電振動子を加
圧する方向と垂直な方向において固定される固定部材
と、前記固定部材と嵌まり合って、前記加圧方向と垂直
な方向への前記圧電振動子の移動を制限するとともに、
前記固定部材を前記加圧方向へ案内する案内部材と、を
備えたことを特徴とするAccording to a fourth aspect of the present invention, there is provided an ultrasonic motor in which a piezoelectric vibrator which performs elliptical vibration by bending vibration and expansion / contraction vibration is pressed and brought into contact with the piezoelectric vibrator to take out an output. A fixing member fixed in a direction perpendicular to the direction in which the piezoelectric vibrator is pressed against at least one node of the bending vibration or the expansion and contraction vibration, and is fitted with the fixing member to be perpendicular to the pressing direction. While limiting the movement of the piezoelectric vibrator in the direction,
A guide member for guiding the fixing member in the pressing direction.

【００１４】これによれば、固定部材は、案内部材と嵌
まり合って加圧方向に対して垂直な方向へ圧電振動子を
移動させず、案内部材は固定部材を加圧方向へ案内し、
固定部材と固定する圧電振動子も同様に加圧方向へ案内
するので、圧電振動子に生じる屈曲振動及び伸縮振動は
安定し、圧電振動子の移動体との圧接部位は変位しな
い。According to this, the fixing member fits with the guide member and does not move the piezoelectric vibrator in a direction perpendicular to the pressing direction, the guide member guides the fixing member in the pressing direction,
Since the piezoelectric vibrator fixed to the fixed member is similarly guided in the pressing direction, the bending vibration and the expansion / contraction vibration generated in the piezoelectric vibrator are stabilized, and the pressure contact portion of the piezoelectric vibrator with the moving body is not displaced.

【００１５】また、請求項５に記載するように、屈曲振
動と伸縮振動とにより楕円振動する圧電振動子を加圧す
ることにより圧接させて出力を取り出す超音波モータに
おいて、前記圧電振動子のうち前記屈曲振動又は伸縮振
動の少なくとも一方の節に対して、前記圧電振動子を加
圧する方向と垂直な方向において固定される固定部材
と、前記固定部材であって、前記圧電振動子を加圧する
方向と垂直な少なくとも２方向において、各々対向する
両側に当接するとともに、前記固定部材を前記加圧方向
へ案内する案内部材と、を備えたことを特徴とする。According to a fifth aspect of the present invention, there is provided an ultrasonic motor in which a piezoelectric vibrator which performs elliptical vibration by bending vibration and expansion / contraction vibration is pressed and brought into contact with the piezoelectric vibrator to take out an output. A fixing member fixed in a direction perpendicular to a direction in which the piezoelectric vibrator is pressed against at least one node of the bending vibration or the stretching vibration, and a direction in which the fixing member is pressed with the piezoelectric vibrator. A guide member that abuts on opposite sides in at least two perpendicular directions and guides the fixing member in the pressing direction.

【００１６】これによれば、案内部材は、固定部材のう
ち圧電振動子を加圧する方向と垂直な少なくとも異なる
２方向において、各々対向する両側に当接するので、固
定部材を加圧方向に対して垂直な方向へ移動させず加圧
方向へ案内し、固定部材に固定した圧電振動子も加圧方
向に対して垂直な方向へ移動せず加圧方向へ案内される
ので、圧電振動子に生じる屈曲振動及び伸縮振動は安定
し、圧電振動子の移動体との圧接部位は変位しない。According to this, the guide member abuts on both opposing sides in at least two different directions perpendicular to the direction in which the piezoelectric vibrator is pressed out of the fixed member. It is guided in the pressing direction without moving in the vertical direction, and the piezoelectric vibrator fixed to the fixed member is also guided in the pressing direction without moving in the direction perpendicular to the pressing direction, so it occurs in the piezoelectric vibrator The bending vibration and the stretching vibration are stable, and the pressure contact portion of the piezoelectric vibrator with the moving body is not displaced.

【００１７】また、請求項６に記載するように、請求項
４又は請求項５記載の超音波モータにおいて、前記固定
部材を介して前記圧電振動子を加圧する加圧部材を備え
たことを特徴とする。これによれば、加圧部材は、固定
部材を加圧し、この加圧力は、固定部材又は案内部材か
ら圧電振動子に伝達され、圧電振動子と移動体とを圧接
させる。According to a sixth aspect of the present invention, in the ultrasonic motor according to the fourth or fifth aspect, a pressure member for pressing the piezoelectric vibrator through the fixed member is provided. And According to this, the pressing member presses the fixed member, and the pressing force is transmitted from the fixed member or the guide member to the piezoelectric vibrator, and presses the piezoelectric vibrator and the moving body against each other.

【００１８】また、請求項７に記載するように、請求項
４又は請求項５記載の超音波モータにおいて、前記圧電
振動子のうち圧接させる部位に対して反対側の部位を前
記圧電振動子の圧接部位へ加圧する加圧部材を備えたこ
とを特徴とする。これによれば、加圧部材は、圧電振動
子の圧接部位に対応する反対側の部位を圧接部位へ加圧
するので、全ての加圧力は、圧電振動子の移動体との圧
接部位に加わる。According to a seventh aspect of the present invention, in the ultrasonic motor according to the fourth or fifth aspect, a part of the piezoelectric vibrator opposite to a part to be pressed against is connected to the piezoelectric vibrator. A pressurizing member for pressurizing the press-contact portion is provided. According to this, since the pressing member presses the portion on the opposite side corresponding to the pressed portion of the piezoelectric vibrator to the pressed portion, all the pressing force is applied to the pressed portion of the piezoelectric vibrator against the moving body.

【００１９】また、請求項８に記載するように、請求項
１、２、４、５の何れかに記載の超音波モータにおい
て、前記圧電振動子の圧接部位に前記楕円振動を拡大す
る振動拡大部材を備えたことを特徴とする。これによれ
ば、振動拡大部材は、楕円振動を拡大するので、大きな
移動スピードを生じさせる。According to an eighth aspect of the present invention, in the ultrasonic motor according to any one of the first, second, fourth, and fifth aspects, the vibration expansion for expanding the elliptical vibration at the pressure contact portion of the piezoelectric vibrator. A member is provided. According to this, since the vibration expanding member expands the elliptical vibration, a large moving speed is generated.

【００２０】また、請求項９に記載するように、請求項
８記載の超音波モータにおいて、前記振動拡大部材は、
前記加圧されて生じる摩擦による摩耗を均一にする曲面
を有することを特徴とする。これによれば、振動拡大部
材が支持部等、案内部の僅かな隙間によって移動体の移
動方向と反対方向に動いても移動体と常に均一に移動す
るので、常に移動体に一定の加圧力並びに推進力を加
え、トルクおよびスピードを安定させる。According to a ninth aspect of the present invention, in the ultrasonic motor according to the eighth aspect, the vibration enlarging member includes:
It is characterized by having a curved surface for uniformizing wear due to friction generated by the pressurization. According to this, even when the vibration enlarging member moves in the direction opposite to the moving direction of the moving body due to the small gap of the guide section such as the support section, the vibration expanding member always moves uniformly with the moving body, so that a constant pressing force is always applied to the moving body. And add propulsion to stabilize torque and speed.

【００２１】また、請求項１０に記載するように、請求
項８記載の超音波モータにおいて、前記圧電振動子のう
ち圧接部位に対して反対側の部位に、前記振動拡大部材
と同一のバランス用突起を設けたことを特徴とするこれ
によれば、バランス用突起は、圧電振動子について、振
動拡大部材側の慣性モーメントとバランス用突起側の慣
性モーメントを等しくし、圧電振動子の振動バランスを
保ち、屈曲振動及び伸縮振動を安定させると同時にスプ
リアス振動を防止する。According to a tenth aspect of the present invention, in the ultrasonic motor according to the eighth aspect, the same balance as that of the vibration enlarging member is provided on a portion of the piezoelectric vibrator opposite to the pressure contact portion. According to this feature, the protrusion is provided, and the balance protrusion makes the moment of inertia of the vibration enlarging member side equal to the moment of inertia of the balance protrusion side with respect to the piezoelectric vibrator, and balances the vibration balance of the piezoelectric vibrator. Maintain and stabilize bending vibration and expansion / contraction vibration, and at the same time prevent spurious vibration.

【００２２】また、請求項１１に記載するように、請求
項１、２、４、５の何れかに記載の超音波モータにおい
て、前記節案内部材、前記端部案内部材、前記固定部材
は、前記圧電振動子より弾性率の低い材料からなること
を特徴とする。以上にあって、弾性率の低い材料には、
樹脂、ゴムを含み、樹脂には、例えばプラスチックを含
む。これによれば、節案内部材等は低弾性率材料からな
り、屈曲振動又は伸縮振動を伝達せず、屈曲振動等を減
衰させないので、高効率で大きなトルクを発生させる。According to an eleventh aspect of the present invention, in the ultrasonic motor according to any one of the first, second, fourth, and fifth aspects, the joint guide member, the end guide member, and the fixing member include: The piezoelectric vibrator is made of a material having a lower elastic modulus than the piezoelectric vibrator. As mentioned above, materials with low elastic modulus
It includes resin and rubber, and the resin includes, for example, plastic. According to this, the node guide member and the like are made of a low elastic modulus material, do not transmit bending vibration or expansion and contraction vibration, and do not attenuate bending vibration and the like, so that a large torque is generated with high efficiency.

【００２３】また、請求項１２に記載するように、請求
項１、２、４、５の何れかに記載の超音波モータにおい
て、前記節案内部材又は前記端部案内部材と前記圧電振
動子との間に弾性率の低い低弾性率部材を設けたことを
特徴とする。これによれば、低弾性率部材は、圧電振動
子から屈曲振動又は伸縮振動を伝達せず、屈曲振動又は
伸縮振動を減衰させないので、高効率で大きなトルクを
発生させる。According to a twelfth aspect of the present invention, in the ultrasonic motor according to any one of the first, second, fourth, and fifth aspects, the joint guide member or the end guide member and the piezoelectric vibrator are connected to each other. A low elastic modulus member having a low elastic modulus is provided therebetween. According to this, the low elastic modulus member does not transmit the bending vibration or the stretching vibration from the piezoelectric vibrator and does not attenuate the bending vibration or the stretching vibration, so that a large torque is generated with high efficiency.

【００２４】また、請求項１３に記載するように、請求
項４又は請求項５の何れかに記載の超音波モータにおい
て、前記圧電振動子に形成した電極と前記固定部材との
間に、両者を絶縁する絶縁スペースを設けたことを特徴
とする。これによれば、絶縁スペースにより、電極と固
定部材は絶縁され、駆動信号はショートすることもな
い。According to a thirteenth aspect of the present invention, in the ultrasonic motor according to the fourth or fifth aspect, both electrodes are provided between the electrode formed on the piezoelectric vibrator and the fixing member. Characterized in that an insulating space is provided to insulate them. According to this, the electrode and the fixing member are insulated by the insulating space, and the drive signal does not short-circuit.

【００２５】また、請求項１４に記載するように、請求
項１、２、７の何れかに記載の超音波モータにおいて、
前記加圧部材と前記圧電振動子との間に、前記圧電振動
子より弾性率の低い低弾性率部材を設けたことを特徴と
する。これによれば、低弾性率部材は、圧電振動子から
屈曲振動又は伸縮振動を伝達せず、屈曲振動又は伸縮振
動を減衰させないので、高効率で大きなトルクを発生さ
せる。According to a fourteenth aspect, in the ultrasonic motor according to any one of the first, second, and seventh aspects,
A low elastic modulus member having a lower elastic modulus than the piezoelectric vibrator is provided between the pressing member and the piezoelectric vibrator. According to this, the low elastic modulus member does not transmit the bending vibration or the stretching vibration from the piezoelectric vibrator and does not attenuate the bending vibration or the stretching vibration, so that a large torque is generated with high efficiency.

【００２６】また、請求項１５に記載するように、請求
項１、２、４、５の何れかに記載の超音波モータにおい
て、前記圧電振動子は、伸縮振動を生じる第１の圧電振
動子と屈曲振動を生じる第２の圧電振動子とを積層させ
たことを特徴とする。これによれば、第１の圧電振動子
は伸縮振動し、第２の圧電振動子は屈曲振動し、振動変
位の大きな楕円振動を起こし、大きなトルクを生じさせ
る。According to a fifteenth aspect of the present invention, in the ultrasonic motor according to any one of the first to fourth aspects, the piezoelectric vibrator is a first piezoelectric vibrator that generates expansion and contraction vibration. And a second piezoelectric vibrator that generates bending vibration. According to this, the first piezoelectric vibrator performs expansion and contraction vibration, and the second piezoelectric vibrator performs bending vibration, causing elliptical vibration with large vibration displacement and generating large torque.

【００２７】また、請求項１６に記載するように、電子
機器であって、請求項１から請求項１５の何れかに記載
の超音波モータを利用したステージを用いたことを特徴
とする。ここで、電子機器には、測定器、加工装置、磁
気記録装置等が含まれ、ステージは測定器の移動ステー
ジ、加工装置の被加工物の移動ステージ、磁気記録メデ
ィアの移動等に用いられる。これによれば、本発明の超
音波モータを利用した電子機器が実現される。According to a sixteenth aspect of the present invention, there is provided an electronic apparatus using a stage using the ultrasonic motor according to any one of the first to fifteenth aspects. Here, the electronic device includes a measuring device, a processing device, a magnetic recording device and the like, and the stage is used for a moving stage of the measuring device, a moving stage of a workpiece of the processing device, a movement of a magnetic recording medium, and the like. According to this, an electronic device using the ultrasonic motor of the present invention is realized.

【００２８】[0028]

【発明の実施の形態】以下、図１〜図１３を参照して本
発明を適用した実施の形態を詳細に説明する。 《実施の形態１》図１は、本発明を適用した実施の形態
１に係わる超音波モータを示し、同図（ａ）は正面の構
造を、同図（ｂ）は底面の構造を示す。この超音波モー
タは、圧電振動子１１と、圧電振動子１１の図中底面に
設けた本発明の振動拡大部材１２と、圧電振動子１１の
図中上面に設けた低弾性率部材１３と、圧電振動子１１
の周囲に配置した本発明の節案内部材としての案内ケー
ス１４と、案内ケース１４の上面に設けた加圧部材１５
と、案内ケース１４の側部を嵌め合わせた案内板１６と
からなり、振動拡大突起１２の先端は移動体１７に圧接
させている。Embodiments of the present invention will be described below in detail with reference to FIGS. Embodiment 1 FIG. 1 shows an ultrasonic motor according to Embodiment 1 to which the present invention is applied. FIG. 1A shows a front structure, and FIG. 1B shows a bottom structure. The ultrasonic motor includes a piezoelectric vibrator 11, a vibration magnifying member 12 of the present invention provided on the bottom surface of the piezoelectric vibrator 11 in the drawing, and a low elastic modulus member 13 provided on the top surface of the piezoelectric vibrator 11 in the drawing. Piezoelectric vibrator 11
And a pressing member 15 provided on the upper surface of the guide case 14.
And a guide plate 16 in which the side portions of the guide case 14 are fitted. The distal end of the vibration expanding projection 12 is pressed against the moving body 17.

【００２９】図２、図３は、圧電振動子の構造、振動状
態を示す図である。圧電振動子１１は、第１の圧電振動
子１１１と、第１の圧電振動子１１１に積層させた第２
の圧電振動子１１２からなる。各圧電振動子１１１、１
１２は、例えば、チタン酸バリウム、チタン酸ジルコン
酸鉛、ニオブ酸リチウム、タンタル酸リチウム等の圧電
材料を用いて作製される。第１の圧電振動子１１１は、
図中表側を（−）、裏側を（＋）として略全面を厚み方
向へ分極処理し、分極部１１１ａとしている。また、表
側の全面及び裏側の全面に電極を形成する。第２の圧電
振動子１１２は、矩形体を４分割して、各分割部に対し
て図中表側を（＋）、裏側を（−）として厚み方向へ分
極処理した第１の分極部１１２ａ、第２の分極部１１２
ｂ、第３の分極部１１２ｃ、第４の分極部１１２ｄを有
する。また、各分極部１１２ａ…１１２ｄの表側にはそ
れぞれ電極を形成し、他方、第２の圧電振動子１１２の
裏側には、全面に対極として電極を形成する。また、第
１の分極部１１２ａの電極と第２の分極部１１２ｂの電
極とを導線で導通し、第３の分極部１１２ｃと第４の分
極部１１２ｄの電極とを導線で導通する。FIGS. 2 and 3 are views showing the structure and vibration state of the piezoelectric vibrator. The piezoelectric vibrator 11 includes a first piezoelectric vibrator 111 and a second piezoelectric vibrator 111 laminated on the first piezoelectric vibrator 111.
Of the piezoelectric vibrator 112. Each piezoelectric vibrator 111, 1
12 is manufactured using a piezoelectric material such as barium titanate, lead zirconate titanate, lithium niobate and lithium tantalate. The first piezoelectric vibrator 111 includes:
In the drawing, substantially the entire surface is polarized in the thickness direction with the front side being (-) and the back side being (+), thereby forming a polarized portion 111a. Further, electrodes are formed on the entire front surface and the entire rear surface. The second piezoelectric vibrator 112 divides a rectangular body into four parts, and firstly polarizes the divided parts in the thickness direction with (+) on the front side and (−) on the back side in each figure, Second polarization section 112
b, a third polarized portion 112c and a fourth polarized portion 112d. An electrode is formed on the front side of each of the polarized portions 112a... 112d, while an electrode is formed on the entire back side of the second piezoelectric vibrator 112 as a counter electrode. In addition, the electrode of the first polarization section 112a and the electrode of the second polarization section 112b are electrically connected by a conductor, and the electrode of the third polarization section 112c and the electrode of the fourth polarization section 112d are electrically connected by a conductor.

【００３０】そして、第１の圧電振動子１１１の分極部
１１１ａ、第２の圧電振動子１１２の第１の分極部１１
２ａと第２の分極部１１２ｂに駆動信号を入力すると、
図２に示すように、伸縮振動Ｖ１が第１の圧電振動子１
１１に生じ、屈曲振動Ｖ２及び図示しない伸縮振動が第
２の圧電振動子１１２に生じ、一方向に回転する楕円振
動Ｖ３が屈曲振動Ｖ２等と伸縮振動Ｖ１とにより圧電振
動子１１の各周面に生じる。このように、第１の圧電振
動子１１１、第２の圧電振動子１１２のそれぞれに、伸
縮振動Ｖ１、屈曲振動Ｖ２を生じさせるので、圧電振動
子１１の楕円振動Ｖ３は大きく変位し、大きなトルクを
生じさせる。一方、第２の圧電振動子１１２の第３の分
極部１１２ｃと第４の分極部１１２ｄ、第１の圧電振動
子１１１の分極部１１１ａに駆動信号を入力すると、図
３に示すように、屈曲振動Ｖ１と１８０°位相の異なる
屈曲振動Ｖ４及び図示しない伸縮振動が第２の圧電振動
子１１２に生じ、楕円振動Ｖ３と逆方向へ回転する楕円
振動Ｖ５が圧電振動子１１に生じる。なお、第２の圧電
振動子１１２のみ用いて、これに生じる屈曲振動Ｖ２、
Ｖ４及び伸縮振動により、圧電振動子１１に楕円振動を
生じさせてもよい。The polarization section 111a of the first piezoelectric vibrator 111 and the first polarization section 11a of the second piezoelectric vibrator 112
When a drive signal is input to 2a and the second polarization unit 112b,
As shown in FIG. 2, the stretching vibration V1 is the first piezoelectric vibrator 1
11, a bending vibration V2 and a stretching vibration (not shown) occur in the second piezoelectric vibrator 112, and an elliptical vibration V3 rotating in one direction is caused by the bending vibration V2 and the like and the stretching vibration V1 on each peripheral surface of the piezoelectric vibrator 11. Occurs. As described above, since the first piezoelectric vibrator 111 and the second piezoelectric vibrator 112 generate the stretching vibration V1 and the bending vibration V2, respectively, the elliptical vibration V3 of the piezoelectric vibrator 11 is greatly displaced, and a large torque is generated. Cause. On the other hand, when a drive signal is input to the third polarization part 112c and the fourth polarization part 112d of the second piezoelectric vibrator 112 and the polarization part 111a of the first piezoelectric vibrator 111, as shown in FIG. A bending vibration V4 having a phase difference of 180 ° from the vibration V1 and a stretching vibration (not shown) are generated in the second piezoelectric vibrator 112, and an elliptical vibration V5 rotating in a direction opposite to the elliptical vibration V3 is generated in the piezoelectric vibrator 11. In addition, using only the second piezoelectric vibrator 112, the bending vibration V2 generated in the second piezoelectric vibrator 112,
Elliptical vibration may be generated in the piezoelectric vibrator 11 by V4 and the stretching vibration.

【００３１】図４は、圧電振動子に生じる伸縮振動、屈
曲振動の節の位置を示す。同図（ａ）に示す矩形体の圧
電振動子１１に対し、伸縮振動Ｖ１が生じると、同図
（ｂ）に示すように、矩形体の長辺の中心が節Ｎ１にな
る。一方、屈振動Ｖ２、Ｖ４が生じると、矩形体の長辺
に沿って等間隔に３箇所が節Ｎ２、Ｎ３、Ｎ４になる。
なお、本実施の形態では、伸縮振動Ｖ１の節Ｎ１と屈曲
振動Ｖ２、Ｖ４の節Ｎ３の位置は一致している。FIG. 4 shows the positions of nodes of stretching vibration and bending vibration generated in the piezoelectric vibrator. When the stretching vibration V1 occurs with respect to the rectangular piezoelectric vibrator 11 shown in FIG. 4A, the center of the long side of the rectangular body becomes the node N1 as shown in FIG. 4B. On the other hand, when the bending vibrations V2 and V4 occur, three portions become nodes N2, N3 and N4 at equal intervals along the long side of the rectangular body.
In the present embodiment, the position of the node N1 of the stretching vibration V1 and the position of the node N3 of the bending vibrations V2 and V4 match.

【００３２】また、図１に示すように、振動拡大部材１
２は、圧電振動子１１の移動体１７との圧接部位１１
ａ、即ち、短辺の略中央部に固定されている。そして、
圧電振動子１１の楕円振動Ｖ３、Ｖ５を拡大させ、大き
な振動変位で移動体１７に圧接し、移動体１７との間に
大きな摩擦力を生じさせる。Also, as shown in FIG.
2 is a pressure contact portion 11 of the piezoelectric vibrator 11 with the moving body 17.
a, that is, it is fixed to the approximate center of the short side. And
The elliptical vibrations V3 and V5 of the piezoelectric vibrator 11 are enlarged, and the piezoelectric vibrator 11 is pressed against the moving body 17 with a large vibration displacement to generate a large frictional force with the moving body 17.

【００３３】低弾性率部材１３は、圧電振動子１１より
弾性率の低い材料、例えば、樹脂、ゴム、プラスチック
からなり、圧電振動子１１の伸縮振動Ｖ１、屈曲振動Ｖ
２、Ｖ４を案内ケース１４へ伝達させず、伸縮振動Ｖ１
等を減衰させない。The low elastic modulus member 13 is made of a material having a lower elastic modulus than the piezoelectric vibrator 11, for example, resin, rubber, or plastic.
2, V4 is not transmitted to the guide case 14, and the stretching vibration V1
Etc. are not attenuated.

【００３４】案内ケース１４は、正面コの字状の本体
と、図中コの字状本体の両腕部から圧電振動子１１へ向
かって突出する第１の節案内部１４ａ、１４ａ、第２の
節案内部１４ｂ、１４ｂと、本体上部から圧電振動子１
１へ向かって突出する突出部１４ｃからなる。ここで、
案内ケース１４は、屈曲振動及び伸縮振動を伝達させ
ず、屈曲振動等を減衰させない観点から、圧電振動子１
１より弾性率の低い材料、例えば、プラスチック等の樹
脂、ゴムで作製する。第１の節案内部１４ａ、１４ａ、
図１（ｂ）に示すように、圧電振動子１１のうち屈曲振
動の節Ｎ２に位置し、この圧電振動子１１の節Ｎ２であ
って、加圧部材１５の加圧する方向と垂直な幅方向の対
向する両部位および厚み方向の対向する両部位に当接す
る。そして、圧電振動子１１は加圧方向に対して垂直な
方向へ移動せず、加圧方向に案内されるので、屈曲振動
及び伸縮振動は安定し、圧電振動子１１と移動体１７と
の圧接部位は変位しない。第２の節案内部１４ｂ、１４
ｂは、圧電振動子１１のうち屈曲振動の節Ｎ４に位置
し、圧電振動子１１の節Ｎ４であって、加圧部材１５の
加圧する方向と垂直な幅方向において、対向する両部
位、及び加圧方向に対して垂直な厚み方向において、対
向する両部位に対して当接する。なお、第１の節案内部
１４ａ、第２の節案内部１４ｂと圧電振動体１１との間
に、圧電振動子１１より弾性率の低いゴム、プラスチッ
ク等の樹脂からなる低弾性率のシートを介在させてもよ
い。突出部１４ｃは、圧電振動子１１の移動体１７との
圧接部１１ａ、即ち、振動拡大部材１２を設けた部位、
と反対側の対応する部位に設けられており、加圧部材１
５の全ての加圧力を圧電振動子１１に伝える。The guide case 14 has a front U-shaped main body, and first joint guide portions 14a, 14a projecting toward the piezoelectric vibrator 11 from both arms of the U-shaped main body in the figure. Of the piezoelectric vibrator 1 from the upper part of the main body.
1 comprises a protruding portion 14c protruding toward the first portion. here,
The guide case 14 does not transmit bending vibration and expansion / contraction vibration and does not attenuate bending vibration and the like.
It is made of a material having a lower elastic modulus than 1, for example, resin such as plastic or rubber. The first joint guides 14a, 14a,
As shown in FIG. 1B, the piezoelectric vibrator 11 is located at a node N2 of the bending vibration, and is a node N2 of the piezoelectric vibrator 11 in a width direction perpendicular to the direction in which the pressing member 15 is pressed. Abut on both opposing parts in the thickness direction. Since the piezoelectric vibrator 11 does not move in the direction perpendicular to the pressing direction but is guided in the pressing direction, the bending vibration and the stretching vibration are stable, and the pressure contact between the piezoelectric vibrator 11 and the moving body 17 is performed. The part does not displace. Second joint guides 14b, 14
b is located at the node N4 of the bending vibration of the piezoelectric vibrator 11, is the node N4 of the piezoelectric vibrator 11, and oppose each other in the width direction perpendicular to the pressing direction of the pressing member 15, and In the thickness direction perpendicular to the pressurizing direction, it contacts both opposing parts. A low-elastic sheet made of a resin such as rubber or plastic having a lower elastic modulus than the piezoelectric vibrator 11 is provided between the first and second joint guides 14 a and 14 b and the piezoelectric vibrator 11. It may be interposed. The protrusion 14 c is a pressure contact portion 11 a of the piezoelectric vibrator 11 with the moving body 17, that is, a portion where the vibration magnifying member 12 is provided,
And a pressure member 1
5 is transmitted to the piezoelectric vibrator 11.

【００３５】加圧部材１５は、例えば、コイルばねを用
い、案内ケース１４の突出部１４ｃ、低弾性率部材１３
を介して、圧電振動子１１の移動体１７との圧接部位１
１ａと反対側の対応する部位を圧接部位へ加圧する。そ
して、全ての加圧力は、振動拡大部材１２を経由して移
動体１７に加わるので、振動拡大部材１２と移動体１７
との間に生じる摩擦力は大きくなる。なお、加圧部材１
５には、ゴム、板ばね等の弾性部材を用いてもよい。案
内板１６は、案内ケース１４の側部を入り込ませる案内
溝１６ａを加圧部材１５の加圧方向に沿って形成し、案
内ケース１４を加圧方向へ案内する。The pressing member 15 uses, for example, a coil spring, and has a protrusion 14 c of the guide case 14 and a low elastic modulus member 13.
Of the piezoelectric vibrator 11 with the moving body 17
The corresponding part on the opposite side to 1a is pressed to the pressure contact part. Since all the pressing force is applied to the moving body 17 via the vibration expanding member 12, the vibration expanding member 12 and the moving body 17
And the frictional force generated between them increases. The pressing member 1
An elastic member such as rubber or a leaf spring may be used for 5. The guide plate 16 is formed with a guide groove 16a in which the side portion of the guide case 14 is inserted, along the pressing direction of the pressing member 15, and guides the guide case 14 in the pressing direction.

【００３６】次に、図１から図３に基づいて、超音波モ
ータの使用方法について説明する。移動体１７を一方向
へ移動させる場合、第１の圧電振動子１１１の分極部１
１１ａ、第２の圧電振動子１１２の第１の分極部１１２
ａ、第２の分極部１１２ｂに駆動信号を入力すればよ
い。伸縮振動Ｖ１が第１の圧電振動子１１１に生じ、屈
曲振動Ｖ２が第２の圧電振動子１１２に生じ、楕円振動
Ｖ３が圧電振動子１１の周面に生じる。楕円振動Ｖ３
は、振動拡大部材１２により、拡大させられる。一方、
加圧部材１５は、案内ケース１４の突出部１４ｃ、低弾
性率部材１３を介して、圧電振動子１１のうち移動体１
７との圧接部位１１ａと反対側の対応する部位を圧接部
位１１ａへ向かって加圧し、移動体１７上に振動拡大部
材１２を圧接させる。このとき、全ての加圧力が圧電振
動子１１と移動体１７との圧接部１１ａに加わり、ま
た、案内ケース１４は、屈曲振動及び伸縮振動に対して
も、圧電振動子１１を加圧方向と垂直な方向へ移動させ
ず、加圧方向のみに案内するので、圧電振動子１１に生
じる屈曲振動及び伸縮振動は安定し、圧電振動子１１の
移動体１７との圧接部位１１ａは滑らないので、圧電振
動子１１と移動体１７との間に大きな加圧力が加わる。
そして、振動拡大部材１２と移動体１７との間に、大き
な摩擦力が生じ、移動体１７は、一方向へ高速で移動す
る。Next, a method of using the ultrasonic motor will be described with reference to FIGS. When moving the moving body 17 in one direction, the polarization unit 1 of the first piezoelectric vibrator 111
11a, first polarization section 112 of second piezoelectric vibrator 112
a, A driving signal may be input to the second polarization unit 112b. The stretching vibration V1 occurs in the first piezoelectric vibrator 111, the bending vibration V2 occurs in the second piezoelectric vibrator 112, and the elliptical vibration V3 occurs on the peripheral surface of the piezoelectric vibrator 11. Elliptical vibration V3
Is enlarged by the vibration enlarging member 12. on the other hand,
The pressing member 15 is connected to the moving body 1 of the piezoelectric vibrator 11 through the protrusion 14 c of the guide case 14 and the low elasticity member 13.
A corresponding portion on the opposite side of the pressure contact portion 11a with the member 7 is pressed toward the pressure contact portion 11a, and the vibration expanding member 12 is pressed against the moving body 17. At this time, all the pressing force is applied to the pressure contact portion 11a between the piezoelectric vibrator 11 and the moving body 17, and the guide case 14 also moves the piezoelectric vibrator 11 in the pressing direction against the bending vibration and the stretching vibration. Since the piezoelectric vibrator 11 is guided only in the pressing direction without moving in the vertical direction, the bending vibration and the stretching vibration generated in the piezoelectric vibrator 11 are stable, and the pressure contact portion 11a of the piezoelectric vibrator 11 with the moving body 17 does not slip. A large pressing force is applied between the piezoelectric vibrator 11 and the moving body 17.
Then, a large frictional force is generated between the vibration expanding member 12 and the moving body 17, and the moving body 17 moves in one direction at a high speed.

【００３７】一方、移動体１７を逆方向へ移動させる場
合は、第１の圧電振動子１１１の分極部１１１ａ、第２
の圧電振動子１１２の第３の分極部１１２ｃ、第４の分
極部１１２ｄに駆動信号を入力すればよい。伸縮振動Ｖ
１が第１の圧電振動子１１１に生じ、屈曲振動Ｖ４が第
２の圧電振動子１１２に生じ、逆回転の楕円振動Ｖ５が
圧電振動子１１の周面に生じ、楕円振動Ｖ５は、振動拡
大部材１２により、拡大させられる。一方、加圧部材１
５は、案内ケース１４の突出部１４ｃ、低弾性率部材１
３を介して、圧電振動子１１のうち移動体１７との圧接
部位１１ａと反対側の部位を圧接部位１１ａへ向かって
加圧し、移動体１７上に振動拡大部材１２を圧接させ
る。そして、移動体１７は、逆方向の摩擦力を受け、一
の方向と逆の方向へ移動する。On the other hand, when moving the moving body 17 in the opposite direction, the polarization portion 111a of the first piezoelectric vibrator 111 and the second
A drive signal may be input to the third polarization section 112c and the fourth polarization section 112d of the piezoelectric vibrator 112. Telescopic vibration V
1 is generated in the first piezoelectric vibrator 111, bending vibration V4 is generated in the second piezoelectric vibrator 112, reverse rotation elliptical vibration V5 is generated on the peripheral surface of the piezoelectric vibrator 11, and the elliptical vibration V5 is vibration expansion. It is enlarged by the member 12. On the other hand, the pressing member 1
5 is a projection 14c of the guide case 14, the low elasticity member 1
The portion of the piezoelectric vibrator 11 on the side opposite to the pressure contact portion 11a with the moving body 17 is pressurized toward the pressure contact portion 11a via the piezoelectric vibrator 11, and the vibration magnifying member 12 is pressed on the moving body 17. Then, the moving body 17 receives the frictional force in the opposite direction and moves in the direction opposite to the one direction.

【００３８】以上より、本実施の形態によれば、加圧部
部材１５により、全ての加圧力が圧電振動子１１に設け
た振動拡大突起１２と移動体１７との圧接部１１ａに加
わるので、大きなトルクを発生させる。また、案内ケー
ス１４は、屈曲振動及び伸縮振動に対しても、圧電振動
子１１を加圧方向と垂直な方向へ移動させずに、加圧方
向のみに案内するので、圧電振動子１１に生じる屈曲振
動及び伸縮振動は安定する。したがって、圧電振動子１
１の移動体１７との圧接部位１１ａは滑らないので、圧
電振動子１１の圧接部位１１ａに設けた振動拡大部材１
２と移動体１７との間に大きな加圧力が加わり、大きな
トルクを発生させるとともに、トルクを安定させる。ま
た、第１の圧電振動子１１１と第２の圧電振動子１１２
とを積層させ、それぞれに、伸縮振動Ｖ１、屈曲振動Ｖ
２を生じさせるので、圧電振動子１１の楕円振動Ｖ３は
大きく変位し、より大きなトルクを生じさせる。また、
振動拡大部材１２は、圧電振動子１１の楕円振動Ｖ３、
Ｖ５を拡大させ、移動体１７との間に大きな摩擦力を生
じさせるので、大きなトルクを生じさせ、移動体１７を
高速で移動させる。また、加圧部材１５と圧電振動子１
１との間に低弾性率部材１３を介在させるので、屈曲振
動及び伸縮振動の伝達を防止し、屈曲振動等を減衰させ
ない。また、案内ケース１４は、圧電振動子１１より弾
性率の低い材料からなるので、屈曲振動及び伸縮振動の
伝達を防止し、屈曲振動等を減衰させない。なお、第１
の節案内部１４ａ、第２の節案内部１４ｂと圧電振動体
１１との間に、圧電振動子１１より弾性率の低い低弾性
率のシートを介在させれば、屈曲振動及び伸縮振動の伝
達を防止し、屈曲振動等を減衰させない。As described above, according to the present embodiment, all the pressing force is applied to the pressure contact portion 11a between the vibration expanding projection 12 provided on the piezoelectric vibrator 11 and the moving body 17 by the pressing portion member 15, Generates large torque. In addition, the guide case 14 guides the piezoelectric vibrator 11 only in the pressing direction without moving the piezoelectric vibrator 11 in the direction perpendicular to the pressing direction even with respect to the bending vibration and the expansion / contraction vibration. The bending vibration and the stretching vibration are stable. Therefore, the piezoelectric vibrator 1
Since the pressure contact portion 11 a of the piezoelectric vibrator 11 does not slip, the vibration magnifying member 1
A large pressing force is applied between the moving body 2 and the moving body 17 to generate a large torque and stabilize the torque. Further, the first piezoelectric vibrator 111 and the second piezoelectric vibrator 112
Are laminated, and the stretching vibration V1 and the bending vibration V
2, the elliptical vibration V3 of the piezoelectric vibrator 11 is greatly displaced and generates a larger torque. Also,
The vibration magnifying member 12 includes an elliptical vibration V3 of the piezoelectric vibrator 11,
Since V5 is enlarged to generate a large frictional force with the moving body 17, a large torque is generated to move the moving body 17 at high speed. Further, the pressing member 15 and the piezoelectric vibrator 1
Since the low elastic modulus member 13 is interposed between the first member 1 and the second member 1, transmission of bending vibration and stretching vibration is prevented, and bending vibration and the like are not attenuated. Further, since the guide case 14 is made of a material having a lower elastic modulus than the piezoelectric vibrator 11, transmission of bending vibration and expansion / contraction vibration is prevented, and bending vibration and the like are not attenuated. The first
If a low elastic modulus sheet having a lower elastic modulus than the piezoelectric vibrator 11 is interposed between the joint guide portion 14a, the second joint guide portion 14b, and the piezoelectric vibrator 11, transmission of bending vibration and stretching vibration can be achieved. To prevent bending vibration and the like.

【００３９】《実施の形態２》図５は、本発明を適用し
た実施の形態２に係わる超音波モータを示し、同図
（ａ）は正面の構造、同図（ｂ）は底面の構造を示す。
この超音波モータは、圧電振動子１１と、圧電振動子１
１の下部に設けた振動拡大部材１２と、圧電振動子１１
のうち振動拡大部材１２の反対側に設けたバランス用突
起２１と、バランス用突起２１の上面に圧接する加圧部
材１５と、圧電振動子１１の伸縮振動の節に当接する本
発明の節案内部材としての案内ケース２２からなる。な
お、以下実施の形態１と同一の部材については、同一番
号を付し説明を省略する。Embodiment 2 FIGS. 5A and 5B show an ultrasonic motor according to Embodiment 2 to which the present invention is applied. FIG. 5A shows a front structure, and FIG. 5B shows a bottom structure. Show.
The ultrasonic motor includes a piezoelectric vibrator 11 and a piezoelectric vibrator 1.
1 and a piezoelectric vibrator 11
The balance projection 21 provided on the opposite side of the vibration expanding member 12, the pressing member 15 pressed against the upper surface of the balance projection 21, and the node guide of the present invention contacting the nodes of the expansion and contraction vibration of the piezoelectric vibrator 11. It comprises a guide case 22 as a member. Note that the same members as those in the first embodiment are given the same reference numerals and description thereof is omitted.

【００４０】ここで、バランス用突起２１は、振動拡大
部材１２と同一物であり、圧電振動子１１のうち振動拡
大部材１２と反対側の対応する部位に設けられている。
そして、圧電振動子１１の振動バランスを保ち、屈曲振
動及び伸縮振動を安定させる。案内ケース２２は、図５
（ｂ）に示すように、矩形体の内部に略十字状の空間２
２ａを成形し、この十字状の空間２２ａに圧電振動子１
１を入り込ませ、案内ケース２２の内面を、圧電振動子
１１の幅方向において対向する両部位、厚み方向におい
て対向する両部位に当接させる。そして、圧電振動子１
１は、加圧方向に対して垂直な方向へ移動せず、加圧方
向へ案内される。Here, the balance projection 21 is the same as the vibration magnifying member 12 and is provided at a corresponding portion of the piezoelectric vibrator 11 on the side opposite to the vibration magnifying member 12.
Then, the vibration balance of the piezoelectric vibrator 11 is maintained, and the bending vibration and the stretching vibration are stabilized. The guide case 22 is shown in FIG.
As shown in (b), a substantially cross-shaped space 2 is formed inside the rectangular body.
2a, and the piezoelectric vibrator 1 is inserted into the cross-shaped space 22a.
1 and the inner surface of the guide case 22 is brought into contact with both portions of the piezoelectric vibrator 11 facing each other in the width direction and both portions facing each other in the thickness direction. And the piezoelectric vibrator 1
1 is guided in the pressing direction without moving in the direction perpendicular to the pressing direction.

【００４１】次に、この超音波モータの動作について説
明する。圧電振動子１１に屈曲振動及び伸縮振動を生じ
させ、周面に楕円振動を生じさせ、楕円振動の変位は、
振動拡大部材１２により、拡大する。一方、加圧部材１
５はバランス用突起２１を介して圧電振動子１１を加圧
し、振動拡大部材１２と移動体１７とを圧接させる。こ
のとき、案内ケース２２は、加圧方向に対して垂直な方
向へ圧電振動子１１を移動させず、屈曲振動及び伸縮振
動を安定させるとともに、振動拡大部材１２の移動体１
７との圧接部位を変位しない。また、バランス用突起２
１は、圧電振動子１１の上部と下部の慣性モーメント、
剛性を等しくし、圧電振動子１１のバランスを保つの
で、屈曲振動等を安定させ、節を中心に形成する。そし
て、移動体１７と振動拡大部材１２との間に摩擦力が生
じ、移動体１７は、一方向へ移動する。Next, the operation of the ultrasonic motor will be described. A bending vibration and a stretching vibration are generated in the piezoelectric vibrator 11, and an elliptical vibration is generated on the peripheral surface.
The vibration is expanded by the vibration expanding member 12. On the other hand, the pressing member 1
5 presses the piezoelectric vibrator 11 via the balance projection 21 to bring the vibration expanding member 12 and the moving body 17 into pressure contact with each other. At this time, the guide case 22 does not move the piezoelectric vibrator 11 in a direction perpendicular to the pressing direction, stabilizes the bending vibration and the expansion / contraction vibration, and moves the moving body 1 of the vibration magnifying member 12.
7 is not displaced. Also, balance projection 2
1 is the moment of inertia of the upper and lower parts of the piezoelectric vibrator 11,
Since the rigidity is made equal and the balance of the piezoelectric vibrator 11 is maintained, the bending vibration and the like are stabilized, and are formed around the nodes. Then, a frictional force is generated between the moving body 17 and the vibration expanding member 12, and the moving body 17 moves in one direction.

【００４２】以上より、本実施の形態によれば、案内ケ
ース２２により、圧電振動子１１を加圧方向に対して垂
直な方向へ移動させず、加圧方向のみへ案内し、屈曲振
動及び伸縮振動を安定させるとともに、振動拡大部材１
２と移動体１７との圧接部位を滑らせないようにするの
で、大きな加圧力が圧電振動子１１と移動体１７との間
に加わる。その結果、実施の形態１と同様に大きなトル
クを発生させるとともに、トルクを安定させる。また、
バランス用突起２１により、圧電振動子１１のバランス
を保つようにしたので、屈曲振動及び伸縮振動を安定さ
せる。As described above, according to the present embodiment, the guide case 22 guides the piezoelectric vibrator 11 only in the pressing direction without moving the piezoelectric vibrator 11 in the direction perpendicular to the pressing direction. Vibration stabilizing member 1
A large pressing force is applied between the piezoelectric vibrator 11 and the moving body 17 so as not to slide the press contact portion between the moving body 17 and the moving body 17. As a result, a large torque is generated as in the first embodiment, and the torque is stabilized. Also,
Since the balance of the piezoelectric vibrator 11 is maintained by the balance projection 21, the bending vibration and the expansion and contraction vibration are stabilized.

【００４３】《実施の形態３》図６は、本発明を適用し
た実施の形態３に係わる超音波モータを示し、（ａ）は
正面の構造、（ｂ）は底面の構造を示す。この超音波モ
ータは、圧電振動子１１と、圧電振動子１１の下面に設
けた振動拡大部材２３と、圧電振動子１１の振動節の周
囲に設けた本発明の節案内部材として案内ケース２４
と、圧電振動子１１の上面に設けた低弾性率部材１３
と、低弾性率部材１３の上面に圧接する加圧部材１５か
らなる。Third Embodiment FIGS. 6A and 6B show an ultrasonic motor according to a third embodiment to which the present invention is applied, wherein FIG. 6A shows a front structure, and FIG. 6B shows a bottom structure. The ultrasonic motor includes a piezoelectric vibrator 11, a vibration magnifying member 23 provided on the lower surface of the piezoelectric vibrator 11, and a guide case 24 provided as a node guide member of the present invention provided around a vibrating node of the piezoelectric vibrator 11.
And a low elastic modulus member 13 provided on the upper surface of the piezoelectric vibrator 11.
And a pressurizing member 15 pressed against the upper surface of the low elastic modulus member 13.

【００４４】ここで、低弾性率部材１３は、圧電振動子
１１から加圧部材１５へ屈曲振動及び伸縮振動を伝達さ
せず、屈曲振動等を減衰させない。振動拡大部材２３
は、移動体１７との圧接部位に曲面２３ａを有する。こ
の曲面２３ａは、振動拡大部材２３を加圧方向に対して
傾けて圧接させたとき、移動体１７との間に生じる摩擦
を均一にし、特定の一箇所を激しく摩耗させない。そし
て、移動体１７に一定の加圧力を加え、移動体１７を一
定速度で移動させる。案内ケース２４は、内部を空洞に
した直方体の中に、圧電振動子１１の屈曲振動の節へ向
かって突出した第１の節案内部２４ａ、２４ａ、第２の
節案内部２４ｂ、２４ｂと、圧電振動子１１の伸縮振動
の節に向かって突出した第３の節案内部２４ｃ、２４
ｃ、２４ｃを有する。第１の節案内部２４ａ、２４ａ、
第２の節案内部２４ｂ、２４ｂは、圧電振動子１１のう
ち屈曲振動の節であって加圧方向と垂直な幅方向の対向
する両部位に当接する。また、第３の節案内部２４ｃ、
２４ｃ、２４ｃは、圧電振動子１１のうち伸縮振動の節
であって、加圧方向と垂直な厚み方向において、対向す
る両側に当接する。そして、案内ケース２４の第１の節
案内部２４ａ、２４ａ、第２の節案内部２４ｂ、２４ｂ
は、加圧方向に対して垂直な幅方向へ圧電振動子１１を
移動させず、また、第３の節案内部２４ｃ、２４ｃ、２
４ｃは、加圧方向に対して垂直な厚み方向へ圧電振動子
１１を移動させない。即ち、圧電振動子１１は、加圧方
向に対して垂直な方向へ移動せず、加圧方向へ案内され
る。Here, the low elastic modulus member 13 does not transmit bending vibration and expansion / contraction vibration from the piezoelectric vibrator 11 to the pressing member 15 and does not attenuate bending vibration and the like. Vibration expanding member 23
Has a curved surface 23a at a pressure contact portion with the moving body 17. This curved surface 23a makes the friction generated between the vibration expanding member 23 and the moving body 17 uniform when the vibration expanding member 23 is inclined and pressed against the pressing direction, and does not abruptly wear a specific portion. Then, a constant pressure is applied to the moving body 17 to move the moving body 17 at a constant speed. The guide case 24 includes a first node guide portion 24a, 24a, a second node guide portion 24b, 24b protruding toward a node of bending vibration of the piezoelectric vibrator 11 in a rectangular parallelepiped having a hollow inside, Third node guides 24c, 24 protruding toward nodes of expansion and contraction vibration of piezoelectric vibrator 11
c and 24c. The first joint guides 24a, 24a,
The second node guides 24b, 24b are nodes of bending vibration of the piezoelectric vibrator 11, and abut on both opposing portions in the width direction perpendicular to the pressing direction. In addition, the third joint guide portion 24c,
Reference numerals 24c, 24c denote expansion / contraction vibration nodes of the piezoelectric vibrator 11, and abut on opposite sides in the thickness direction perpendicular to the pressing direction. Then, the first joint guide portions 24a, 24a of the guide case 24, the second joint guide portions 24b, 24b
Does not move the piezoelectric vibrator 11 in the width direction perpendicular to the pressurizing direction, and does not move the third node guides 24c, 24c,
4c does not move the piezoelectric vibrator 11 in the thickness direction perpendicular to the pressing direction. That is, the piezoelectric vibrator 11 is guided in the pressing direction without moving in the direction perpendicular to the pressing direction.

【００４５】以上より、本実施の形態によれば、案内ケ
ース２４により、圧電振動子１１を加圧方向に垂直な方
向へ移動させず、加圧方向へ案内させるようにしたの
で、実施の形態１と同様の効果が得られる。また、振動
拡大部材２３のうち移動体１７との圧接部位を曲面２３
ａとし、移動体１７との間に生じる摩擦による偏摩耗を
防止するようにしたので、移動体１７は一定の加圧力を
加えられ、トルクは一定になる。As described above, according to the present embodiment, the guide case 24 guides the piezoelectric vibrator 11 in the pressing direction without moving the piezoelectric vibrator 11 in the direction perpendicular to the pressing direction. The same effect as that of No. 1 can be obtained. Also, the portion of the vibration magnifying member 23 that is pressed against the moving body 17 is defined by a curved surface 23.
Since a is set to “a” and uneven wear due to friction generated between the moving body 17 and the moving body 17 is prevented, a constant pressing force is applied to the moving body 17 and the torque becomes constant.

【００４６】《実施の形態４》図７は、本発明を適用し
た実施の形態４に係わる超音波モータを示し、（ａ）は
正面構造、（ｂ）は底面構造を示す。この超音波モータ
は、圧電振動子１１と、圧電振動子１１の下面に設けた
振動拡大部材１２と、圧電振動子１１の周囲に配置した
本発明の節案内部材、案内部材としての案内ケース２５
と、圧電振動子１１の伸縮振動の節に固定した固定部材
２６、２６と、圧電振動子１１のうち振動拡大部材１２
に対して反対側の部位に圧接する加圧部材１５とからな
る。Embodiment 4 FIGS. 7A and 7B show an ultrasonic motor according to Embodiment 4 to which the present invention is applied, wherein FIG. 7A shows a front structure, and FIG. 7B shows a bottom structure. The ultrasonic motor includes a piezoelectric vibrator 11, a vibration magnifying member 12 provided on a lower surface of the piezoelectric vibrator 11, a node guide member of the present invention disposed around the piezoelectric vibrator 11, and a guide case 25 as a guide member.
A fixing member 26 fixed to a node of the stretching vibration of the piezoelectric vibrator 11;
And a pressurizing member 15 which presses against a portion on the opposite side to the pressurized member.

【００４７】ここで、案内ケース２５は、内部を空洞と
した直方体であり、圧電振動子１１の屈曲振動の節の位
置で内側へ突出する第１の節案内部２５ａ、２５ａ及び
第２の節案内部２５ｂ、２５ｂを有し、直方体の対向す
る両内面に加圧方向に沿って案内溝２５ｃ、２５ｃを形
成している。第１の節案内部２５ａ、２５ａ、第２の節
案内部２５ｂ、２５ｂは、圧電振動子１１のうち屈曲振
動の節であって、加圧方向に対して垂直な幅方向におい
て、対向する両部位に当接する。固定部材２６、２６の
それぞれ端面は、同図（ｂ）に示すように、圧電振動子
１１の加圧方向と垂直な厚み方向において、案内溝２５
ｃ、２５ｃに対して当接する。そして、案内ケース２５
の第１の節案内部２５ａ、２５ａ、第２の節案内部２５
ｂ、２５ｂは、加圧方向に対して垂直な幅方向へ圧電振
動子１１を移動させず、加圧方向へ案内する。また、固
定部材２６、２６と案内溝２５ｃ、２５ｃは、加圧方向
に対して垂直な厚み方向へ圧電振動子１１を移動させ
ず、加圧方向へ案内する。即ち、圧電振動子１１は、加
圧方向に対して垂直な方向へ移動せず、加圧方向へ案内
されるので、伸縮振動及び屈曲振動は安定し、圧電振動
子１１に設けた振動拡大部材１２と移動体１７との圧接
部は変位しない。Here, the guide case 25 is a rectangular parallelepiped with a hollow inside, and the first node guide portions 25a, 25a and the second node projecting inward at the position of the node of the bending vibration of the piezoelectric vibrator 11. It has guide portions 25b, 25b, and guide grooves 25c, 25c are formed on both opposing inner surfaces of the rectangular parallelepiped along the pressing direction. The first node guides 25a, 25a and the second node guides 25b, 25b are nodes of bending vibration of the piezoelectric vibrator 11, and are opposed to each other in the width direction perpendicular to the pressing direction. Contact the site. As shown in FIG. 2B, the end faces of the fixing members 26, 26 are formed in the guide grooves 25 in the thickness direction perpendicular to the pressing direction of the piezoelectric vibrator 11.
c, 25c. And the guide case 25
First joint guides 25a, 25a, second joint guides 25
b and 25b guide the piezoelectric vibrator 11 in the pressing direction without moving the piezoelectric vibrator 11 in the width direction perpendicular to the pressing direction. The fixing members 26, 26 and the guide grooves 25c, 25c guide the piezoelectric vibrator 11 in the pressing direction without moving the piezoelectric vibrator 11 in the thickness direction perpendicular to the pressing direction. That is, since the piezoelectric vibrator 11 is guided in the pressing direction without moving in the direction perpendicular to the pressing direction, the expansion and contraction vibration and the bending vibration are stable, and the vibration expanding member provided in the piezoelectric vibrator 11 is provided. The pressure contact portion between the moving body 12 and the moving body 17 does not displace.

【００４８】以上より、本実施の形態によれば、案内ケ
ース２５は、圧電振動子１１を加圧方向と垂直な方向へ
移動させず、加圧方向へ案内するようにしたので、実施
の形態１と同様に、大きなトルクが得られるとともに、
トルクは安定する。As described above, according to the present embodiment, the guide case 25 guides the piezoelectric vibrator 11 in the pressing direction without moving the piezoelectric vibrator 11 in the direction perpendicular to the pressing direction. As with 1, large torque can be obtained,
The torque stabilizes.

【００４９】《実施の形態５》図８は、本発明を適用し
た実施の形態５に係わる超音波モータの正面の構造を示
す。この超音波モータは、圧電振動子１１と、圧電振動
子１１の下面に設けた振動拡大部材１２と、圧電振動子
１１の周囲に設けた本発明の節案内部材、端部案内部材
としての案内ケース２７と、案内ケース２７の上面に圧
接する加圧部材１５と、案内ケース２６の側部を嵌め合
わせた案内板１６からなり、振動拡大部材１２の先端
は、円盤状の移動体２８に圧接している。Fifth Embodiment FIG. 8 shows a front structure of an ultrasonic motor according to a fifth embodiment of the present invention. The ultrasonic motor includes a piezoelectric vibrator 11, a vibration magnifying member 12 provided on a lower surface of the piezoelectric vibrator 11, and a guide member and an end guide member of the present invention provided around the piezoelectric vibrator 11. A case 27, a pressure member 15 that presses against the upper surface of the guide case 27, and a guide plate 16 in which a side portion of the guide case 26 is fitted. The tip of the vibration magnifying member 12 presses against a disk-shaped moving body 28. doing.

【００５０】ここで、案内ケース２７は、コの字状の案
内ケース本体の両腕から圧電振動子１１の伸縮振動の節
に向けて突出する節案内部２７ａ、２７ａと、案内ケー
ス本体の角部から圧電振動子１１へ突出する端部案内部
２７ｂを有する。節案内部２７ａ、２７ａは、圧電振動
子１１のうち伸縮振動の節であって、加圧部材１５の加
圧する方向と垂直な幅方向において対向する両部位およ
び加圧方向に対して垂直な厚み方向において対向する両
部位に対して当接する（図１（ｂ）参照）。端部案内部
２７ｂ、２７ｂは、圧電振動子１１のうち振動拡大部材
１２と反対側の端部であって、加圧部材１５の加圧する
方向と垂直な幅方向において、対向する両部位及び加圧
方向に対して垂直な厚み方向において、対向する両部
位、並びに、移動体２７との圧接部と反対側の端面に当
接する。そして、節案内部２７ａ、２７ａ、端部案内部
２７ｂ、２７ｂは、圧電振動子１１を加圧方向に対して
垂直な方向へ移動させず、加圧方向へ案内する。また、
加圧部材１５は、圧電振動子１１のうち振動拡大部材１
２と反対側の対応する部位と振動拡大部材１２とを結ぶ
方向へ、案内ケース２７を加圧し、振動拡大部材１２と
移動体２８との間に、全ての加圧力が加わる。Here, the guide case 27 includes node guide portions 27a, 27a projecting from both arms of the U-shaped guide case body toward nodes of the expansion and contraction vibration of the piezoelectric vibrator 11, and a corner of the guide case body. An end guide portion 27b protruding from the portion to the piezoelectric vibrator 11 is provided. The joint guide portions 27a, 27a are the nodes of the stretching vibration of the piezoelectric vibrator 11, and are opposed to each other in the width direction perpendicular to the pressing direction of the pressing member 15 and the thickness perpendicular to the pressing direction. It comes into contact with both parts facing each other in the direction (see FIG. 1B). The end guides 27b, 27b are opposite ends of the piezoelectric vibrator 11 to the vibration magnifying member 12, and are opposed to each other in the width direction perpendicular to the direction in which the pressing member 15 is pressed. In the thickness direction perpendicular to the pressure direction, the portions abut on both opposing portions and the end face on the side opposite to the pressure contact portion with the moving body 27. The joint guides 27a, 27a and the end guides 27b, 27b guide the piezoelectric vibrator 11 in the pressing direction without moving the piezoelectric vibrator 11 in the direction perpendicular to the pressing direction. Also,
The pressurizing member 15 is a member for expanding the vibration
The guide case 27 is pressurized in a direction connecting the corresponding portion on the opposite side to 2 and the vibration expanding member 12, and all the pressing force is applied between the vibration expanding member 12 and the moving body 28.

【００５１】次に、この超音波モータの動作について説
明する。圧電振動子１１に伸縮振動及び屈曲振動を生じ
させ、また、加圧部材１５により、案内ケース２７を介
して圧電振動子１１を加圧し、振動拡大部材１２を移動
体２７に圧接させる。このとき、節案内部２７ａ、２７
ａ、端部案内部２７ｂ、２７ｂは、圧電振動子１１を加
圧方向に対して垂直な方向へ移動させず、加圧方向へ案
内するので、屈曲振動及び伸縮振動は安定し、圧電振動
子１１の移動体２８との圧接部位は変位しない。そし
て、移動体２８は一方向へ回転する。Next, the operation of the ultrasonic motor will be described. The expansion / contraction vibration and the bending vibration are generated in the piezoelectric vibrator 11, and the piezoelectric vibrator 11 is pressed by the pressing member 15 through the guide case 27, and the vibration expanding member 12 is pressed against the moving body 27. At this time, the node guides 27a, 27
a, the end guides 27b, 27b guide the piezoelectric vibrator 11 in the pressing direction without moving the piezoelectric vibrator 11 in the direction perpendicular to the pressing direction, so that the bending vibration and the stretching vibration are stable, The pressure contact portion of the eleventh moving body 28 does not displace. Then, the moving body 28 rotates in one direction.

【００５２】以上より、本実施の形態によれば、案内ケ
ース２７の節案内部２７ａ、２７ａ、端部案内部２７
ｂ、２７ｂは、圧電振動子１１を加圧方向に対して垂直
な方向へ移動させず、加圧方向へ案内し、屈曲振動及び
伸縮振動を安定させ、圧電振動子１１の移動体２８との
圧接部位を変位されないので、大きな加圧力が振動拡大
部材１２と移動体２８の圧接部に加わり、大きなトルク
を発生させるとともに、トルクを安定させる。さらに、
加圧部材１５により、振動拡大部材１２と反対側の対応
する部位から振動拡大部材１２へ加圧するようにしたの
で、振動拡大部材１２と移動体２８との間に、全ての加
圧力が加わり、大きなトルクを発生させる。As described above, according to the present embodiment, the joint guide portions 27a, 27a of the guide case 27, the end guide portion 27
b and 27b guide the piezoelectric vibrator 11 in the pressing direction without moving the piezoelectric vibrator 11 in the direction perpendicular to the pressing direction, stabilize the bending vibration and the stretching vibration, and allow the piezoelectric vibrator 11 to move with the moving body 28. Since the press-contact portion is not displaced, a large pressing force is applied to the press-contact portion of the vibration expanding member 12 and the moving body 28, thereby generating a large torque and stabilizing the torque. further,
Since the pressing member 15 presses the vibration expanding member 12 from a corresponding portion on the opposite side to the vibration expanding member 12, all the pressing force is applied between the vibration expanding member 12 and the moving body 28, Generates large torque.

【００５３】《実施の形態６》図９は、本発明を適用し
た実施の形態６に係わる超音波モータを示し、（ａ）は
側面の構造、（ｂ）は、背面の構造、（ｃ）は底面から
観察した構造を示す。この超音波モータは、積層型の圧
電振動子３１と、圧電振動子３１の底面に設けた振動拡
大部材１２と、圧電振動子３１の屈曲振動の節に固定さ
れた固定部材３２と、圧電振動子３１の上面を圧接する
加圧部材１５と、固定部材３２と嵌合した本発明の案内
部材としての案内板３３からなり、振動拡大部材１２
は、移動体１７に圧接している。Embodiment 6 FIGS. 9A and 9B show an ultrasonic motor according to Embodiment 6 to which the present invention is applied, wherein FIG. 9A shows a side structure, FIG. 9B shows a back surface structure, and FIG. Indicates the structure observed from the bottom. The ultrasonic motor includes a laminated piezoelectric vibrator 31, a vibration magnifying member 12 provided on the bottom surface of the piezoelectric vibrator 31, a fixed member 32 fixed to a node of the bending vibration of the piezoelectric vibrator 31, The vibration magnifying member 12 includes a pressure member 15 for pressing the upper surface of the child 31 and a guide plate 33 as a guide member of the present invention fitted to the fixed member 32.
Is in pressure contact with the moving body 17.

【００５４】図１０は、圧電振動子の積層構造を示す図
である。圧電振動子３１は、同図（ａ）〜（ｄ）に示す
第１の圧電振動子３１１と、第２の圧電振動子３１２
と、第３の圧電振動子３１３と、第４の圧電振動子３１
４を積層して焼き固めた構造である。第１の圧電振動子
３１１、第２の圧電振動子３１２は、同図（ａ）、
（ｂ）に示すように、略全面に図中表側を（＋）、裏側
を（−）として分極処理を施し、分極部３１１ａ、３１
２ａとしている。また、分極部３１１ａ、３１２ａに対
応して表側に電極を形成する。また、屈曲振動の節部に
固定部材３２を貫通させる２つの貫通孔３１１ｂ、３１
１ｂ、３１２ｂ、３１２ｂを形成している。第３の圧電
振動子３１３、第４の圧電振動子３１４は、同図
（ｃ）、（ｄ）に示すように、矩形体を４分割した各分
割部に対して表側を（＋）、裏側を（−）として分極処
理を施し、第１の分極部３１３ａ、３１４ａ、第２の分
極部３１３ｂ、３１４ｂ、第３の分極部３１３ｃ、３１
４ｃ、第４の分極部３１３ｄ、３１４ｄとしている。ま
た、屈曲振動の節部に固定部材３２を貫通させる貫通孔
３１３ｅ、３１３ｅ、３１４ｅ、３１４ｅを形成してい
る。FIG. 10 is a diagram showing a laminated structure of the piezoelectric vibrator. The piezoelectric vibrator 31 includes a first piezoelectric vibrator 311 and a second piezoelectric vibrator 312 shown in FIGS.
, The third piezoelectric vibrator 313 and the fourth piezoelectric vibrator 31
4 is laminated and baked. The first piezoelectric vibrator 311 and the second piezoelectric vibrator 312 are shown in FIG.
As shown in (b), a polarization process is performed on substantially the entire surface with the front side (+) in the figure and the back side (-), and the polarization parts 311a and 311
2a. Further, electrodes are formed on the front side corresponding to the polarization parts 311a and 312a. Further, two through holes 311b and 31 through which the fixing member 32 penetrates the nodes of the bending vibration.
1b, 312b and 312b are formed. As shown in FIGS. 3C and 3D, the third piezoelectric vibrator 313 and the fourth piezoelectric vibrator 314 have a front side of (+) and a rear side of each of the four divided rectangular bodies. (−) To perform a polarization process, the first polarization parts 313a and 314a, the second polarization parts 313b and 314b, and the third polarization parts 313c and 31
4c, and fourth polarization portions 313d and 314d. Further, through holes 313e, 313e, 314e, and 314e for penetrating the fixing member 32 are formed in the nodes of the bending vibration.

【００５５】また、第１の圧電振動子３１１、第２の圧
電振動子３１２、第３の圧電振動子３１３、第４の圧電
振動子３１４の裏側には、同図（ｅ）に示すように、略
全面に電極を形成し、表側の電極の対極としている。ま
た、圧電振動子３１の一方の側面には、同図（ｇ）に示
すように、第１の側面電極３１ａ、第２の側面電極３１
ｂ、第３の側面電極３１ｃを厚み方向へ形成し、反対の
側面に第４の側面電極、第５の側面電極を形成する。第
１の側面電極３１ａは、第１の圧電振動子３１１の分極
部３１１ａに形成した電極と第２の圧電振動子３１２の
分極部３１２ａに形成した電極とを導通させる。第２の
側面電極３１ｂは、第３の圧電振動子３１３の第１の分
極部３１３ａに形成した電極と第４の圧電振動子３１４
の第１の分極部３１４ａに形成した電極とを導通させ
る。第３の側面電極３１ｃは、第３の圧電振動子３１３
の第４の分極部３１３ｄに形成した電極と第４の圧電振
動子３１４の第４の分極部３１４ｄに形成した電極とを
導通させる。第４の側面電極は、第３の圧電振動子３１
３の第２の分極部３１３ｂに形成した電極と第４の圧電
振動子３１４の第２の分極部３１４ｂに形成した電極と
を導通させる。第５の側面電極は、第３の圧電振動子３
１３の第３の分極部３１３ｃに形成した電極と第４の圧
電振動子３１４の第３の分極部３１４ｃに形成した電極
とを導通させる。As shown in FIG. 9E, the first piezoelectric vibrator 311, the second piezoelectric vibrator 312, the third piezoelectric vibrator 313, and the fourth piezoelectric vibrator 314 are provided on the back side. , An electrode is formed on substantially the entire surface, and serves as a counter electrode of the electrode on the front side. On one side surface of the piezoelectric vibrator 31, a first side surface electrode 31a and a second side surface electrode 31 are provided as shown in FIG.
b, A third side electrode 31c is formed in the thickness direction, and a fourth side electrode and a fifth side electrode are formed on the opposite side. The first side surface electrode 31a conducts between the electrode formed on the polarized portion 311a of the first piezoelectric vibrator 311 and the electrode formed on the polarized portion 312a of the second piezoelectric vibrator 312. The second side surface electrode 31b is connected to the electrode formed on the first polarization section 313a of the third piezoelectric vibrator 313 and the fourth piezoelectric vibrator 314.
Is electrically connected to the electrode formed on the first polarized portion 314a. The third side electrode 31c is connected to the third piezoelectric vibrator 313.
The electrode formed on the fourth polarized portion 313d of the fourth piezoelectric vibrator 314 is electrically connected to the electrode formed on the fourth polarized portion 314d of the fourth piezoelectric vibrator 314. The fourth side electrode is a third piezoelectric vibrator 31.
The electrode formed on the third polarized portion 313b of the third piezoelectric vibrator 314 is electrically connected to the electrode formed on the second polarized portion 314b of the fourth piezoelectric vibrator 314. The fifth side electrode is a third piezoelectric vibrator 3
The electrode formed on the third polarization portion 313c of the thirteenth and the electrode formed on the third polarization portion 314c of the fourth piezoelectric vibrator 314 are conducted.

【００５６】なお、同図（ｆ）に、例えば第１の圧電振
動子３１１を用いて示すように、後述する固定軸３２
１、３２１を貫通させる各圧電振動子３１１、３１２、
３１３、３１４に貫通孔３１１ｂ、３１２ｂ、３１３
ｅ、３１４ｅより径の大きく電極３１１ｃを形成し、電
極３１１ｃと固定軸３２１、３２１との間に、円環状の
絶縁スペース３１１ｄ、３１１ｄを設けてもよい。この
ようにすれば、固定軸３２１、３２１と電極３１１ｃと
は絶縁され、両者の短絡は防止される。As shown in FIG. 5F, for example, using a first piezoelectric vibrator 311,
1, 321 through each of the piezoelectric vibrators 311, 312,
313 and 314 have through holes 311b, 312b and 313
e, an electrode 311c having a diameter larger than that of 314e may be formed, and annular insulating spaces 311d and 311d may be provided between the electrode 311c and the fixed shafts 321 and 321. In this way, the fixed shafts 321 and 321 are insulated from the electrode 311c, and a short circuit between them is prevented.

【００５７】また、図９に示すように、固定部材３２
は、圧電振動子３１に貫通した固定軸３２１と、固定軸
３２１の周囲にあって、圧電振動子３１に当接させたゴ
ムシート３２２、３２２と、固定軸３２１とネジで固定
したプレート３２３と、プレート３２３と圧電振動子３
１との間に配設したナット３２４、３２４とからなる。
固定軸３２１、３２１は、ナット３２４及びプレート３
２３を固定する部位の周面にネジを形成している。ゴム
シート３２２は、圧電振動子３１より低い弾性率なの
で、圧電振動子３１から振動もれを防止する。プレート
３２３は、同図（ｃ）に示すように、加圧方向に沿って
断面台形状に成形している。この固定部材３２の組立方
法は、圧電振動子３１の屈曲振動の節に設けた貫通孔３
１１ｂ…３１４ｅに、固定軸３２１を貫通させ、次に、
固定軸３２１に沿った圧電振動子３１の両面にゴムシー
ト３２２を当接させた状態で、固定軸３２１にナット３
２４、３２４をプレート３２３を通すとともに、固定軸
を３２１を回転させてナット３２４、３２４を締め、圧
電振動子３１に固定させる。Further, as shown in FIG.
Are a fixed shaft 321 penetrating the piezoelectric vibrator 31, rubber sheets 322 and 322 around the fixed shaft 321 and abutting on the piezoelectric vibrator 31, and a plate 323 fixed to the fixed shaft 321 with screws. , Plate 323 and piezoelectric vibrator 3
1 and nuts 324 and 324 disposed between the first and second nuts.
The fixed shafts 321 and 321 are provided with a nut 324 and a plate 3
A screw is formed on the peripheral surface of the portion where the 23 is fixed. Since the rubber sheet 322 has a lower elastic modulus than the piezoelectric vibrator 31, the rubber sheet 322 prevents leakage from the piezoelectric vibrator 31. The plate 323 is formed in a trapezoidal cross section along the pressing direction, as shown in FIG. The assembling method of the fixing member 32 is based on the method of assembling the through hole 3 provided at the node of the bending vibration of the piezoelectric vibrator 31.
11b... 314e through the fixed shaft 321;
With the rubber sheet 322 abutting on both sides of the piezoelectric vibrator 31 along the fixed shaft 321, the nut 3 is attached to the fixed shaft 321.
24 and 324 are passed through the plate 323, and the fixed shaft is rotated 321 to tighten the nuts 324 and 324 to fix the piezoelectric vibrator 31.

【００５８】案内板３３は、圧電振動子３１の加圧方向
に沿って設けられ、加圧方向に沿って、断面台形状の案
内溝３３ａを形成し、この案内溝３３ａにプレート３２
３を嵌め合わせている。そして、プレート３２３と対に
なって、固定部材３２を加圧方向へ案内し、また、断面
台形状の案内溝３３ａの下辺と斜辺をプレート３２３に
当接させているので、固定部材３２を加圧方向に対して
垂直な方向へ移動させない。加圧部材１５は、圧電振動
子３１のうち振動拡大部材１２と反対側の部位を振動拡
大部材１２へ加圧する。なお、加圧部材１５は、前述の
加圧方向へ固定部材３２の固定軸３２１を加圧してもよ
いし、プレート３２３の端面を加圧してもよい。The guide plate 33 is provided along the pressing direction of the piezoelectric vibrator 31, and forms a guide groove 33 a having a trapezoidal cross section along the pressing direction.
3 is fitted. The fixing member 32 is guided in the pressing direction in a pair with the plate 323, and the lower side and the oblique side of the guide groove 33a having a trapezoidal cross section are brought into contact with the plate 323. Do not move in the direction perpendicular to the pressure direction. The pressure member 15 presses a portion of the piezoelectric vibrator 31 opposite to the vibration magnifying member 12 to the vibration magnifying member 12. The pressing member 15 may press the fixing shaft 321 of the fixing member 32 in the above-described pressing direction, or may press the end surface of the plate 323.

【００５９】次に、この超音波モータの動作について説
明する。第１の圧電振動子３１１と第２の圧電振動子３
１２に伸縮振動を生じさせ、第３の圧電振動子３１３と
第４の圧電振動子３１４に屈曲振動を生じさせ、振動拡
大部材１２を楕円振動させる。一方、加圧部材１５は、
振動拡大部材１２と反対側の対応する部位を振動拡大部
材１２へ加圧する。このとき、案内板３３はプレート３
２３とともに、固定部材３２を加圧方向へ案内するとと
もに、固定部材３２を加圧方向に対して垂直な方向へ移
動させない。また、固定部材３２に固定した圧電振動子
３１も加圧方向へ案内され、加圧方向に対して垂直な方
向へ移動しない。よって、屈曲振動及び伸縮振動は安定
し、圧電振動子３１の移動体１７との圧接部位は変位し
ない。そして、振動拡大部材１２と移動体１７との間に
大きな摩擦力が生じ、移動体１７は高速で移動する。Next, the operation of the ultrasonic motor will be described. First piezoelectric vibrator 311 and second piezoelectric vibrator 3
12, the third piezoelectric vibrator 313 and the fourth piezoelectric vibrator 314 generate bending vibration, and cause the vibration magnifying member 12 to perform elliptical vibration. On the other hand, the pressing member 15
A corresponding portion on the opposite side of the vibration expanding member 12 is pressed against the vibration expanding member 12. At this time, the guide plate 33 is
Together with 23, the fixing member 32 is guided in the pressing direction, and the fixing member 32 is not moved in the direction perpendicular to the pressing direction. Further, the piezoelectric vibrator 31 fixed to the fixing member 32 is also guided in the pressing direction, and does not move in the direction perpendicular to the pressing direction. Therefore, the bending vibration and the stretching vibration are stable, and the pressure contact portion of the piezoelectric vibrator 31 with the moving body 17 is not displaced. Then, a large frictional force is generated between the vibration expanding member 12 and the moving body 17, and the moving body 17 moves at a high speed.

【００６０】以上より、本実施の形態によれば、固定部
材３２と案内板３３とにより、圧電振動子３１を加圧方
向に案内し、加圧方向に対して垂直な方向へ移動させな
いようにし、屈曲振動及び伸縮振動を安定させ、振動拡
大部材１２と移動体１７との圧接部位を滑らせないよう
にしたので、圧電振動子３１に大きな加圧力を加えら
れ、大きなトルクを生じさせるとともに、トルクを安定
させる。また、固定軸３２１と電極３１１ｃとの間に絶
縁スペース３１１ｄを設けるので、固定軸３２１と電極
３１１ｃとは絶縁され、電極３１１ｃと固定軸３２１と
の短絡は防止される。また、圧電振動子３１は、第１の
圧電振動子３１１と第２の圧電振動子３１２に伸縮振動
を生じさせ、第３の圧電振動子３１３と第４の圧電振動
子３１４とにより屈曲振動を生じさせるので、さらに大
きなトルクを発生させる。As described above, according to the present embodiment, the piezoelectric vibrator 31 is guided in the pressing direction by the fixing member 32 and the guide plate 33 so as not to move in the direction perpendicular to the pressing direction. Since the bending vibration and the expansion and contraction vibration are stabilized and the pressure contact portion between the vibration expanding member 12 and the moving body 17 is prevented from slipping, a large pressing force is applied to the piezoelectric vibrator 31 and a large torque is generated. Stabilize torque. Further, since the insulating space 311d is provided between the fixed shaft 321 and the electrode 311c, the fixed shaft 321 and the electrode 311c are insulated, and a short circuit between the electrode 311c and the fixed shaft 321 is prevented. The piezoelectric vibrator 31 causes the first piezoelectric vibrator 311 and the second piezoelectric vibrator 312 to expand and contract, and the third piezoelectric vibrator 313 and the fourth piezoelectric vibrator 314 generate bending vibration. As a result, a larger torque is generated.

【００６１】《実施の形態７》図１１は、本発明を適用
した実施の形態７に係わる超音波モータを示し、（ａ）
は正面の構造、（ｂ）は側面の構造を示す。この超音波
モータは、圧電振動子３１と、圧電振動子３１の底面に
設けた振動拡大部材１２、１２と、圧電振動子３１の振
動拡大部材１２、１２と反対側の対応する部位に設けた
バランス用突起２１、２１と、バランス用突起２１、２
１の上面を加圧する加圧部材１５、１５と、圧電振動子
３１の厚み方向に固定された固定部材３６と、固定部材
３６に対して当接する案内部材３７から構成されてい
る。Embodiment 7 FIG. 11 shows an ultrasonic motor according to Embodiment 7 to which the present invention is applied.
Shows the structure of the front, and (b) shows the structure of the side. The ultrasonic motor is provided at the piezoelectric vibrator 31, the vibration magnifying members 12, 12 provided on the bottom surface of the piezoelectric vibrator 31, and the corresponding parts of the piezoelectric vibrator 31 opposite to the vibration magnifying members 12, 12. Balance projections 21, 21 and balance projections 21, 2
The piezoelectric vibrator 31 includes a pressing member 15 for pressing the upper surface of the piezoelectric vibrator 1, a fixing member 36 fixed in the thickness direction of the piezoelectric vibrator 31, and a guide member 37 in contact with the fixing member 36.

【００６２】ここで、固定部材３６は、加圧方向に対し
て垂直な方向へ圧電振動子３１の伸縮振動の節を貫通す
る固定軸３６ａと、圧電振動子３１と案内部材３７との
間に設けたスペーサ３６ｂ、３６ｂからなる。案内部材
３７は、コ字状の各先端部に圧電振動子３１の加圧方向
へ延びる案内溝３７ａ、３７ａを形成している。この案
内溝３７ａ、３７ａの各側面は、固定軸３６ａのうち加
圧方向に対して垂直な圧電振動子３１の厚み方向におい
て、対向する両先端面に当接するとともに、固定軸３６
ａのうち加圧方向に対して垂直な圧電振動子３１の長手
方向において、対向する両部位に当接している。そし
て、案内部材３７は、加圧方向に対して垂直方向へ固定
軸３６ａを移動させず、加圧方向へのみ案内し、固定軸
３６ａを固定した圧電振動子３１も加圧方向に対して垂
直な方向へ移動せず、加圧方向へ案内される。Here, the fixed member 36 is provided between the fixed shaft 36 a penetrating the node of the stretching vibration of the piezoelectric vibrator 31 in a direction perpendicular to the pressing direction, and the piezoelectric vibrator 31 and the guide member 37. The spacers 36b are provided. The guide member 37 has guide grooves 37 a, 37 a extending in the pressing direction of the piezoelectric vibrator 31 at the respective U-shaped ends. Each side surface of the guide grooves 37a, 37a abuts on both end surfaces facing each other in the thickness direction of the piezoelectric vibrator 31, which is perpendicular to the pressing direction, of the fixed shaft 36a.
In a, the piezoelectric vibrator 31 is in contact with both opposing portions in the longitudinal direction of the piezoelectric vibrator 31 perpendicular to the pressing direction. The guide member 37 guides only the pressing direction without moving the fixed shaft 36a in the direction perpendicular to the pressing direction, and the piezoelectric vibrator 31 with the fixed shaft 36a fixed is also perpendicular to the pressing direction. It is guided in the pressing direction without moving in any direction.

【００６３】以上より、本実施の形態によれば、案内部
材３７、固定部材３６により、圧電振動子３１を加圧方
向に対して垂直な方向へ移動させず、加圧方向へ案内
し、屈曲振動及び伸縮振動を安定させ、振動拡大部材１
２、１２の移動体１７との圧接部を変位させないように
したので、移動体１７と振動拡大部材１２、１２との間
に大きな加圧力が加わり、大きなトルクを発生させると
ともに、トルクを安定させる。また、加圧部材１５、１
５により、圧電振動子３１のうち振動拡大部材１２、１
２と反対側の部位を振動拡大部材１２、１２へ向けて加
圧するようにしたので、全ての加圧力は、振動拡大部材
１２、１２と移動体１７との圧接部位に加わり、大きな
トルクを発生させる。また、圧電振動子３１のうち振動
拡大部材１２、１２に対して反対側の部位にバランス用
突起２１、２１を設けているので、圧電振動子３１の上
部と下部の慣性モーメントは等しくなり、圧電振動子３
１のバランスは保たれ、屈曲振動及び伸縮振動は安定す
る。As described above, according to the present embodiment, the guide member 37 and the fixing member 36 guide the piezoelectric vibrator 31 in the pressing direction without moving the piezoelectric vibrator 31 in the direction perpendicular to the pressing direction. Vibration expansion and contraction vibration
Since the pressure contact portions 2 and 12 with the moving body 17 are not displaced, a large pressing force is applied between the moving body 17 and the vibration magnifying members 12 and 12 to generate a large torque and stabilize the torque. . The pressing members 15, 1
5, the vibration expanding members 12, 1 of the piezoelectric vibrators 31
Since the portion opposite to 2 is pressurized toward the vibration expanding members 12, all the pressing force is applied to the pressure contact portion between the vibration expanding members 12, 12 and the moving body 17 to generate a large torque. Let it. Further, since the balance projections 21 are provided on the opposite side of the vibration expanding members 12 of the piezoelectric vibrator 31, the inertia moments of the upper and lower portions of the piezoelectric vibrator 31 are equal, and the piezoelectric vibrator 31 has the same moment of inertia. Vibrator 3
The balance of 1 is maintained, and the bending vibration and the stretching vibration are stabilized.

【００６４】《実施の形態８》図１２は、本発明を適用
した実施の形態８に係わる超音波モータを示し、（ａ）
は正面の構造、（ｂ）は側面の構造を示す。この超音波
モータは、圧電振動子３１と、圧電振動子３１の底面に
設けた振動拡大部材１２、１２と、圧電振動子３１に固
定された固定部材４１と、固定部材４１を当接させた案
内部材４２、４２と、固定部材４１に圧接させた加圧部
材１５からなる。<< Eighth Embodiment >> FIG. 12 shows an ultrasonic motor according to an eighth embodiment of the present invention.
Shows the structure of the front, and (b) shows the structure of the side. In this ultrasonic motor, the piezoelectric vibrator 31, the vibration expanding members 12 provided on the bottom surface of the piezoelectric vibrator 31, the fixed member 41 fixed to the piezoelectric vibrator 31, and the fixed member 41 were brought into contact with each other. It comprises guide members 42, 42, and pressurizing member 15 pressed against fixed member 41.

【００６５】ここで、固定部材４１は、圧電振動子３１
の屈曲振動の節を加圧方向へ垂直な方向へ貫通する固定
軸４１ａ、４１ａと、固定軸４１ａ、４１ａの両端部を
固定するコ字状部材４１ｃと、コの字状部材４１ｃと圧
電振動子３１との間のスペースに設けたスペーサ４１
ｂ、４１ｂと、コ字状部材４１ｃの上面から加圧方向と
平行に上方へ突出する円柱状部材４１ｄ、４１ｄからな
る。案内部材４２、４２は、断面円環状であり圧電振動
子３１の加圧方向へ延びている。また、内周面に固定部
材４１の円柱状部材４１ｄ、４１ｄの外周面を当接さ
せ、円柱状部材４１ｄ、４１ｄを摺動自在としている。
そして、案内部材４２、４２は、円柱状部材４１ｄ、４
１ｄを加圧方向に対して垂直な方向へ移動させず、加圧
方向へ案内する。即ち、固定部材４１に固定する圧電振
動子３１は加圧方向に対して垂直な方向へ移動せず、加
圧方向へ案内する。Here, the fixing member 41 is a piezoelectric vibrator 31.
Fixed shafts 41a, 41a penetrating the nodes of the bending vibration in the direction perpendicular to the pressing direction, U-shaped members 41c for fixing both ends of the fixed shafts 41a, 41a, U-shaped members 41c, and piezoelectric vibration Spacer 41 provided in space between element 31
b, 41b and columnar members 41d, 41d projecting upward from the upper surface of the U-shaped member 41c in parallel with the pressing direction. The guide members 42 are annular in cross section and extend in the direction in which the piezoelectric vibrator 31 is pressed. Further, the outer peripheral surfaces of the cylindrical members 41d, 41d of the fixing member 41 are brought into contact with the inner peripheral surface, so that the cylindrical members 41d, 41d are slidable.
The guide members 42, 42 are connected to the cylindrical members 41d, 4d.
1d is guided in the pressing direction without moving in the direction perpendicular to the pressing direction. That is, the piezoelectric vibrator 31 fixed to the fixing member 41 does not move in a direction perpendicular to the pressing direction but guides in the pressing direction.

【００６６】以上より、本実施の形態によれば、固定部
材４１、案内部材４２により、圧電振動子３１を加圧方
向に対して垂直な方向へ移動させず、加圧方向へ案内す
るようにし、屈曲振動及び伸縮振動を安定させ、振動拡
大部材１２、１２の移動体１７との圧接部位を変位させ
ないようにしたので、振動拡大部材１２、１２と移動体
１７との間に大きな加圧力が加えられ、大きなトルクを
発生させるとともに、トルクを安定させる。As described above, according to the present embodiment, the piezoelectric vibrator 31 is guided by the fixing member 41 and the guide member 42 in the pressing direction without moving in the direction perpendicular to the pressing direction. Since the bending vibration and the expansion and contraction vibration are stabilized, and the pressure contact portions of the vibration expanding members 12 and 12 with the moving body 17 are not displaced, a large pressing force is applied between the vibration expanding members 12 and 12 and the moving body 17. In addition, it generates a large torque and stabilizes the torque.

【００６７】《実施の形態９》図１３は、本発明を適用
した実施の形態９に係わる超音波モータ付電子機器のブ
ロック図を示す。超音波モータ付電子機器５０は、前述
の圧電振動子５１と、圧電振動子５１により可動される
移動体５２と、移動体５２と圧電振動子５１とを加圧す
る加圧機構５３と、移動体５２と連動して可動する伝達
機構５４と、伝達機構５４の動作に基づいて運動する出
力機構５５を備えることにより実現する。ここで、伝達
機構５４には、例えば、歯車、摩擦車等の伝達車を用い
る。出力機構５５には、例えば、カメラにおいてはシャ
ッタ駆動機構、レンズ駆動機構を、電子時計においては
指針駆動機構、カレンダ駆動機構を、工作機械において
は刃具送り機構、加工部材送り機構等を用いる。超音波
モータ付電子機器５０としては、例えば、電子時計、計
測器、カメラ、プリンタ、印刷機、工作機械、ロボッ
ト、移動装置などに適用される。なお、移動体５２に出
力軸を取り付け、出力軸からトルクを伝達するための動
力伝達機構を有する構成にすれば、超音波モータ単体で
駆動機構が実現される。<< Embodiment 9 >> FIG. 13 is a block diagram showing an electronic apparatus with an ultrasonic motor according to Embodiment 9 to which the present invention is applied. The ultrasonic motor-equipped electronic device 50 includes the above-described piezoelectric vibrator 51, a moving body 52 movable by the piezoelectric vibrator 51, a pressing mechanism 53 for pressing the moving body 52 and the piezoelectric vibrator 51, This is realized by providing a transmission mechanism 54 that moves in conjunction with 52 and an output mechanism 55 that moves based on the operation of the transmission mechanism 54. Here, as the transmission mechanism 54, for example, a transmission wheel such as a gear wheel or a friction wheel is used. As the output mechanism 55, for example, a shutter drive mechanism and a lens drive mechanism are used in a camera, a pointer drive mechanism and a calendar drive mechanism are used in an electronic timepiece, and a blade feed mechanism and a processing member feed mechanism are used in a machine tool. As the electronic device 50 with an ultrasonic motor, for example, it is applied to an electronic timepiece, a measuring instrument, a camera, a printer, a printing machine, a machine tool, a robot, a moving device, and the like. In addition, if the output shaft is attached to the moving body 52 and a power transmission mechanism for transmitting torque from the output shaft is provided, a driving mechanism is realized by the ultrasonic motor alone.

【００６８】[0068]

【発明の効果】以上より、本発明によれば、圧電振動子
を加圧方向と垂直な方向へ移動させず、加圧方向のみに
案内するので、圧電振動子に生じる屈曲振動及び伸縮振
動は安定し、圧電振動子の移動体との圧接部位は変位せ
ず、大きな加圧力が圧電振動子と移動体との間に加えら
れ、大きなトルクを発生させるとともに、トルクを安定
させる。さらに、圧電振動子のうち圧接部位と反対側の
部位を圧接部位へ加圧し、全ての加圧力が圧電振動子の
圧接部位に加わるようにしたので、大きな加圧力が圧電
振動子と移動体との間に加えられ、大きなトルクを発生
させる。As described above, according to the present invention, since the piezoelectric vibrator is guided only in the pressing direction without moving in the direction perpendicular to the pressing direction, the bending vibration and the stretching vibration generated in the piezoelectric vibrator are reduced. The piezoelectric vibrator is stable, the pressure contact portion of the piezoelectric vibrator with the moving body is not displaced, and a large pressing force is applied between the piezoelectric vibrator and the moving body to generate a large torque and stabilize the torque. Furthermore, the portion of the piezoelectric vibrator opposite to the press-contact portion is pressurized to the press-contact portion, and all the pressing force is applied to the press-contact portion of the piezoelectric vibrator, so that a large pressing force is applied to the piezoelectric vibrator and the moving body. To generate large torque.

【図面の簡単な説明】[Brief description of the drawings]

【図１】本発明を適用した実施の形態１に係わる超音波
モータを示し、（ａ）は正面の構造、同図（ｂ）は底面
の構造を示す説明図である。FIGS. 1A and 1B show an ultrasonic motor according to a first embodiment to which the present invention is applied, wherein FIG. 1A is an explanatory diagram showing a front structure, and FIG. 1B is an explanatory diagram showing a bottom structure.

【図２】図１に係わる圧電振動子の構造、振動状態を示
す説明図である。FIG. 2 is an explanatory diagram showing a structure and a vibration state of the piezoelectric vibrator according to FIG. 1;

【図３】図１に係わる圧電振動子の構造、振動状態を示
す説明図である。FIG. 3 is an explanatory diagram showing a structure and a vibration state of the piezoelectric vibrator according to FIG. 1;

【図４】図１に係わる圧電振動子に生じる伸縮振動、屈
曲振動の節の位置を示す説明図である。FIG. 4 is an explanatory diagram showing positions of nodes of stretching vibration and bending vibration generated in the piezoelectric vibrator according to FIG. 1;

【図５】本発明を適用した実施の形態２に係わる超音波
モータを示し、同図（ａ）は正面の構造、同図（ｂ）は
底面の構造を示す説明図である。5A and 5B show an ultrasonic motor according to a second embodiment to which the present invention is applied, wherein FIG. 5A is an explanatory view showing a front structure, and FIG. 5B is an explanatory view showing a bottom structure.

【図６】本発明を適用した実施の形態３に係わる超音波
モータを示し、（ａ）は正面の構造、（ｂ）は底面の構
造を示す説明図である。FIGS. 6A and 6B are explanatory diagrams showing an ultrasonic motor according to a third embodiment to which the present invention is applied, wherein FIG. 6A is a front view structure and FIG. 6B is a bottom view structure.

【図７】本発明を適用した実施の形態４に係わる超音波
モータを示し、（ａ）は正面構造、（ｂ）は底面構造を
示す説明図である。FIGS. 7A and 7B show an ultrasonic motor according to a fourth embodiment to which the present invention is applied, wherein FIG. 7A is an explanatory view showing a front structure, and FIG.

【図８】図８は、本発明を適用した実施の形態５に係わ
る超音波モータの正面の構造を示す。FIG. 8 shows a front structure of an ultrasonic motor according to a fifth embodiment to which the present invention is applied.

【図９】本発明を適用した実施の形態６に係わる超音波
モータを示し、（ａ）は側面の構造、（ｂ）は、背面の
構造、（ｃ）は底面から観察した構造を示す説明図であ
る。9A and 9B show an ultrasonic motor according to Embodiment 6 to which the present invention is applied, wherein FIG. 9A is a side view structure, FIG. 9B is a rear view structure, and FIG. FIG.

【図１０】図９に係わる圧電振動子の積層構造を示す説
明図である。FIG. 10 is an explanatory view showing a laminated structure of the piezoelectric vibrator according to FIG. 9;

【図１１】本発明を適用した実施の形態７に係わる超音
波モータを示し、（ａ）は正面の構造、（ｂ）は側面の
構造を示す説明図である。11A and 11B show an ultrasonic motor according to a seventh embodiment to which the present invention is applied, wherein FIG. 11A is an explanatory diagram showing a front structure, and FIG. 11B is an explanatory diagram showing a side structure.

【図１２】図１２は、本発明を適用した実施の形態８に
係わる超音波モータを示し、（ａ）は正面の構造、
（ｂ）は側面の構造を示す説明図である。FIG. 12 shows an ultrasonic motor according to an eighth embodiment to which the present invention is applied, wherein (a) is a front structure,
(B) is an explanatory view showing a side structure.

【図１３】本発明を適用した実施の形態９に係わる超音
波モータ付電子機器のブロック図を示す説明図である。FIG. 13 is an explanatory diagram showing a block diagram of an electronic device with an ultrasonic motor according to a ninth embodiment to which the present invention is applied.

【図１４】従来技術に係わる超音波モータの構造を示
す。FIG. 14 shows a structure of an ultrasonic motor according to the related art.

【符号の説明】[Explanation of symbols]

１０ 超音波モータ １１ 圧電振動子 １２ 振動拡大部材 １３ 低弾性率部材 １４ 案内ケース １５ 加圧部材 ２１ バランス用突起 ２２ 案内ケース ２３ 振動拡大突起 ２４ 案内ケース ２５ 案内ケース ２６ 固定部材 ２７ 案内ケース ３１ 圧電振動子 ３１１ｃ 絶縁スペース ３２ 固定部材 ３３ 案内板 ３６ 固定部材 ３７ 案内部材 ４１ 固定部材 ４２ 案内部材 DESCRIPTION OF SYMBOLS 10 Ultrasonic motor 11 Piezoelectric vibrator 12 Vibration magnifying member 13 Low elastic modulus member 14 Guide case 15 Pressure member 21 Balance projection 22 Guide case 23 Vibration magnifying projection 24 Guide case 25 Guide case 26 Fixed member 27 Guide case 31 Piezoelectric vibration Child 311c Insulating space 32 Fixed member 33 Guide plate 36 Fixed member 37 Guide member 41 Fixed member 42 Guide member

Claims (16)

【特許請求の範囲】[Claims] 【請求項１】屈曲振動と伸縮振動との合成振動を発生す
る少なくとも圧電素子からなる圧電振動子を圧接させて
出力を取り出す超音波モータにおいて、 前記圧電振動子のうち前記圧接させる部位に対して反対
側の部位を前記圧接部位へ加圧する加圧部材と、 前記圧電振動子のうち前記屈曲振動又は伸縮振動の少な
くとも一方の節であって、前記加圧方向と垂直な少なく
とも２方向において、各々対向する両側に当接するとと
もに、前記加圧方向へ前記圧電振動子を案内する節案内
部材と、 を備えたことを特徴とする超音波モータ。1. An ultrasonic motor which presses a piezoelectric vibrator made of at least a piezoelectric element and generates an output by generating a combined vibration of a bending vibration and a stretching vibration, and takes out an output. A pressurizing member that presses the opposite side to the press-contacting part, and at least one node of the bending vibration or the stretching vibration of the piezoelectric vibrator, in at least two directions perpendicular to the pressing direction, An ultrasonic motor comprising: a node guide member that abuts on opposite sides and guides the piezoelectric vibrator in the pressing direction. 【請求項２】屈曲振動と伸縮振動との合成振動を発生す
る少なくとも圧電素子からなる圧電振動子を圧接させて
出力を取り出す超音波モータにおいて、 前記圧電振動子のうち前記圧接させる部位に対して反対
側を前記圧接側へ加圧する加圧部材と、 前記圧電振動子のうち伸縮振動の節であって、前記加圧
方向と垂直な少なくとも一の方向において、対向する両
側に当接するとともに、前記加圧方向へ前記圧電振動子
を案内する節案内部材と、 前記圧電振動子のうち前記圧接側と反対側の端部であっ
て、前記加圧方向と垂直な少なくとも他の方向におい
て、対向する両側に当接するとともに、前記加圧方向へ
前記圧電振動子を案内する端部案内部材と、 を備えたことを特徴とする超音波モータ。2. An ultrasonic motor for extracting an output by pressing a piezoelectric vibrator made of at least a piezoelectric element, which generates a combined vibration of bending vibration and expansion / contraction vibration, wherein the portion of the piezoelectric vibrator to be pressed against A pressurizing member for pressing the opposite side to the press-contact side, and a node of stretching vibration of the piezoelectric vibrator, in at least one direction perpendicular to the pressurizing direction, abutting on opposing sides; A node guide member for guiding the piezoelectric vibrator in a pressing direction, and an end of the piezoelectric vibrator on the opposite side to the press-contact side, facing at least another direction perpendicular to the pressing direction. An end guide member that abuts on both sides and guides the piezoelectric vibrator in the pressing direction. 【請求項３】屈曲振動と伸縮振動との合成振動を発生す
る少なくとも圧電素子からなる圧電振動子を圧接させて
出力を取り出す超音波モータにおいて、 前記圧電振動子のうち前記圧接させる部位に対して反対
側の部位を前記圧接部位へ加圧する加圧部材と、 前記圧電振動子のうち前記屈曲振動又は伸縮振動の少な
くとも一方の節であって、前記加圧方向と垂直な一の方
向において、対向する両側に当接するとともに、前記加
圧方向へ前記圧電振動子を案内する節案内部材と、 前記圧電振動子のうち前記屈曲振動又は伸縮振動の少な
くとも一方の節に対して、前記加圧方向と垂直な他の方
向において、固定される固定部材と、 前記固定部材であって、前記他の方向において、対向す
る両側に当接するとともに、前記固定部材と対になって
前記加圧方向へ前記圧電振動子を案内する案内部材と、 を備えたことを特徴とする超音波モータ。3. An ultrasonic motor for extracting an output by pressing a piezoelectric vibrator made of at least a piezoelectric element that generates a combined vibration of a bending vibration and a stretching vibration, wherein the ultrasonic vibrating motor includes a portion of the piezoelectric vibrator that is to be pressed against the piezoelectric vibrator. A pressurizing member that presses an opposing portion to the press-contact portion; and at least one node of the bending vibration or the stretching vibration of the piezoelectric vibrator, which opposes in one direction perpendicular to the pressing direction. A node guide member that contacts the piezoelectric vibrator in the pressurizing direction while abutting on both sides of the piezoelectric vibrator; A fixing member that is fixed in another direction perpendicular to the fixing member, wherein the fixing member contacts the opposite sides in the other direction, and is paired with the fixing member. And a guide member for guiding the piezoelectric vibrator in a pressing direction. 【請求項４】屈曲振動と伸縮振動との合成振動を発生す
る少なくとも圧電素子からなる圧電振動子を圧接させて
出力を取り出す超音波モータにおいて、 前記圧電振動子のうち前記屈曲振動又は伸縮振動の少な
くとも一方の節に対して、前記圧電振動子を加圧する方
向と垂直な方向において、固定される固定部材と、 前記固定部材と嵌まり合って、前記加圧方向と垂直な方
向への前記圧電振動子の移動を制限するとともに、前記
固定部材を前記加圧方向へ案内する案内部材と、 を備えたことを特徴とする超音波モータ。4. An ultrasonic motor for extracting an output by pressing a piezoelectric vibrator made of at least a piezoelectric element which generates a combined vibration of a bending vibration and a stretching vibration, wherein the piezoelectric vibrator generates a combined vibration of the bending vibration and the stretching vibration. A fixing member fixed to at least one of the nodes in a direction perpendicular to a direction in which the piezoelectric vibrator is pressed; a fixing member fitted to the fixing member; and the piezoelectric member in a direction perpendicular to the pressing direction. A guide member that restricts movement of the vibrator and guides the fixed member in the pressing direction. 【請求項５】屈曲振動と伸縮振動との合成振動を発生す
る少なくとも圧電素子からなる圧電振動子を圧接させて
出力を取り出す超音波モータにおいて、 前記圧電振動子のうち前記屈曲振動又は伸縮振動の少な
くとも一方の節に対して、前記圧電振動子を加圧する方
向と垂直な方向において、固定される固定部材と、 前記固定部材であって、前記圧電振動子を加圧する方向
と垂直な少なくとも２方向において、各々対向する両側
に当接するとともに、前記固定部材を前記加圧方向へ案
内する案内部材と、 を備えたことを特徴とする超音波モータ。5. An ultrasonic motor for extracting an output by pressing a piezoelectric vibrator made of at least a piezoelectric element which generates a combined vibration of a bending vibration and a stretching vibration, wherein the piezoelectric vibrator generates a combined vibration of the bending vibration and the stretching vibration. A fixing member fixed to at least one of the nodes in a direction perpendicular to the direction in which the piezoelectric vibrator is pressed, and at least two directions perpendicular to the direction in which the piezoelectric vibrator is pressed, wherein the fixing member is , A guide member that abuts on both sides facing each other and guides the fixed member in the pressing direction. 【請求項６】前記固定部材を介して前記圧電振動子を加
圧する加圧部材を備えたことを特徴とする請求項４又は
請求項５記載の超音波モータ。6. The ultrasonic motor according to claim 4, further comprising a pressing member that presses the piezoelectric vibrator through the fixing member. 【請求項７】前記圧電振動子のうち圧接させる部位に対
して反対側の部位を前記圧電振動子の圧接部位へ加圧す
る加圧部材を備えたことを特徴とする請求項４又は請求
項５記載の超音波モータ。7. A pressure member for pressing a portion of the piezoelectric vibrator opposite to a portion to be pressed against the pressed portion of the piezoelectric vibrator. An ultrasonic motor as described. 【請求項８】前記圧電振動子の圧接部位に前記屈曲振動
と伸縮振動を拡大する振動拡大部材を備えたことを特徴
とする請求項１、２、４、５の何れかに記載の超音波モ
ータ。8. An ultrasonic wave according to claim 1, wherein a vibration expanding member for expanding said bending vibration and expansion / contraction vibration is provided at a pressure contact portion of said piezoelectric vibrator. motor. 【請求項９】前記振動拡大部材は、曲面形状を有するこ
とを特徴とする請求項８記載の超音波モータ。9. The ultrasonic motor according to claim 8, wherein said vibration expanding member has a curved shape. 【請求項１０】前記圧電振動子のうち圧接部位に対して
反対側の部位に、前記振動拡大部材と同一のバランス用
突起を設けたことを特徴とする請求項８記載の超音波モ
ータ。10. The ultrasonic motor according to claim 8, wherein the same balance projection as that of the vibration enlarging member is provided on a portion of the piezoelectric vibrator opposite to the press-contact portion. 【請求項１１】前記節案内部材、前記端部案内部材、前
記固定部材は、前記圧電振動子より弾性率の低い材料か
らなることを特徴とする請求項１、２、４、５の何れか
に記載の超音波モータ。11. The method according to claim 1, wherein the joint guide member, the end guide member, and the fixing member are made of a material having a lower elastic modulus than the piezoelectric vibrator. 2. The ultrasonic motor according to claim 1. 【請求項１２】前記節案内部材又は前記端部案内部材と
前記圧電振動子との間に、前記圧電振動子より弾性率の
低い低弾性率部材を設けたことを特徴とする請求項１、
２、４、５の何れかに記載の超音波モータ。12. A low elastic modulus member having a lower elastic modulus than the piezoelectric vibrator is provided between the node guide member or the end guide member and the piezoelectric vibrator.
The ultrasonic motor according to any one of 2, 4, and 5. 【請求項１３】前記圧電振動子に形成した電極と前記固
定部材との間に、両者を絶縁する絶縁スペースを設けた
ことを特徴とする請求項４又は請求項５に記載の超音波
モータ。13. The ultrasonic motor according to claim 4, wherein an insulating space is provided between the electrode formed on the piezoelectric vibrator and the fixing member to insulate them. 【請求項１４】前記加圧部材と前記圧電振動子との間に
前記圧電振動子より弾性率の低い低弾性率部材を設けた
ことを特徴とする請求項１、２、７の何れかに記載の超
音波モータ。14. A low elastic modulus member having a lower elastic modulus than the piezoelectric vibrator is provided between the pressing member and the piezoelectric vibrator. An ultrasonic motor as described. 【請求項１５】前記圧電振動子は、伸縮振動を生じる第
１の圧電振動子と屈曲振動を生じる第２の圧電振動子と
を積層させたことを特徴とする請求項１、２、４、５の
何れかに記載の超音波モータ。15. The piezoelectric vibrator according to claim 1, wherein a first piezoelectric vibrator that generates stretching vibration and a second piezoelectric vibrator that generates bending vibration are laminated. The ultrasonic motor according to any one of the above items 5. 【請求項１６】請求項１から請求項１５の何れかに記載
の超音波モータを備えたことを特徴とする超音波モータ
付電子機器。16. An electronic device with an ultrasonic motor, comprising the ultrasonic motor according to claim 1. Description:
JP15174598A 1998-06-01 1998-06-01 Ultrasonic motor and electronic device with ultrasonic motor Expired - Fee Related JP4327268B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15174598A JP4327268B2 (en) 1998-06-01 1998-06-01 Ultrasonic motor and electronic device with ultrasonic motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15174598A JP4327268B2 (en) 1998-06-01 1998-06-01 Ultrasonic motor and electronic device with ultrasonic motor

Related Child Applications (3)

Application Number Title Priority Date Filing Date
JP2007112764A Division JP4150056B2 (en) 2007-04-23 2007-04-23 Ultrasonic motor and electronic device with ultrasonic motor
JP2007112766A Division JP4294061B2 (en) 2007-04-23 2007-04-23 Ultrasonic motor and electronic device with ultrasonic motor
JP2007112765A Division JP4245183B2 (en) 2007-04-23 2007-04-23 Ultrasonic motor and electronic device with ultrasonic motor

Publications (2)

Publication Number Publication Date
JPH11346486A true JPH11346486A (en) 1999-12-14
JP4327268B2 JP4327268B2 (en) 2009-09-09

Family

ID=15525362

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15174598A Expired - Fee Related JP4327268B2 (en) 1998-06-01 1998-06-01 Ultrasonic motor and electronic device with ultrasonic motor

Country Status (1)

Country Link
JP (1) JP4327268B2 (en)

Cited By (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001286166A (en) * 2000-03-30 2001-10-12 Seiko Epson Corp Piezoelectric actuator, timepiece and equipment
JP2004242448A (en) * 2003-02-06 2004-08-26 Seiko Epson Corp Drive
JP2005065358A (en) * 2003-08-12 2005-03-10 Seiko Instruments Inc Ultrasonic motor employing multilayer piezoelectric oscillator and electronic apparatus employing it
JP2005217253A (en) * 2004-01-30 2005-08-11 Seiko Instruments Inc Piezoelectric device and electronic equipment using it
JP2005295656A (en) * 2004-03-31 2005-10-20 Seiko Instruments Inc Ultrasonic motor and electronic equipment fitted with ultrasonic motor
JP2007097317A (en) * 2005-09-29 2007-04-12 Olympus Corp Ultrasonic drive device
JP2007122051A (en) * 2005-10-24 2007-05-17 Samsung Electro-Mechanics Co Ltd Lens transfer device
WO2007066633A1 (en) * 2005-12-05 2007-06-14 Matsushita Electric Industrial Co., Ltd. Ultrasonic actuator
JP2007226234A (en) * 2006-02-20 2007-09-06 Samsung Electro-Mechanics Co Ltd Lens driving device
JP2008032445A (en) * 2006-07-27 2008-02-14 Sii Nanotechnology Inc Piezoelectric actuator and scanning probe microscope using the same
JP2009106153A (en) * 2002-07-12 2009-05-14 Seiko Instruments Inc Piezoelectric motor and electronic equipment with piezoelectric motor
WO2010013361A1 (en) * 2008-08-01 2010-02-04 ニッコー株式会社 Apparatus for holding piezoelectric vibrator
EP1995864A3 (en) * 2007-05-07 2010-04-07 Sharp Kabushiki Kaisha Driving device
JP2010200461A (en) * 2009-02-24 2010-09-09 Toyota Industries Corp Fastening structure for vibration actuator
JP2011015605A (en) * 2010-08-26 2011-01-20 Seiko Instruments Inc Ultrasonic motor using multilayer piezoelectric vibrator, and electronic device using the same
US8288919B2 (en) 2009-07-27 2012-10-16 Panasonic Corporation Vibratory actuator
JP2013121197A (en) * 2011-12-06 2013-06-17 Seiko Epson Corp Piezoelectric motor, driving device, electronic component inspection device, electronic component conveying device, printing device, robot hand, and robot
JP2013121194A (en) * 2011-12-06 2013-06-17 Seiko Epson Corp Piezoelectric motor, driving device, electronic component transferring device, electronic component inspecting device, printing device, robot hand and robot
JP2013158151A (en) * 2012-01-30 2013-08-15 Canon Inc Ultrasonic motor
JP2013156296A (en) * 2012-01-26 2013-08-15 Tdk Corp Lens driving device and piezoelectric actuator unit
JP2013195701A (en) * 2012-03-19 2013-09-30 Tdk Corp Lens drive device
JP2013230018A (en) * 2012-04-26 2013-11-07 Seiko Epson Corp Actuator, robot hand, robot, transportation device, electronic component transportation device and electronic component inspection device
JP2013240173A (en) * 2012-05-14 2013-11-28 Seiko Epson Corp Piezoelectric motor, robot hand, robot, electronic component transport device, electronic component inspection device, liquid-sending pump, printer, electronic watch, projector, transport device
JP2013240172A (en) * 2012-05-14 2013-11-28 Seiko Epson Corp Piezoelectric motor, robot hand, robot, electronic component transport device, electronic component inspection device, liquid-sending pump, printer, electronic watch, projector, transport device
US8796906B2 (en) 2011-12-06 2014-08-05 Seiko Epson Corporation Piezoelectric motor, driving device, electronic component conveying device, electronic component inspection device, printing device, robot hand, and robot
JP2015195720A (en) * 2015-07-02 2015-11-05 キヤノン株式会社 motor and lens barrel
JP2015195719A (en) * 2015-07-02 2015-11-05 キヤノン株式会社 motor and lens barrel
US10063163B2 (en) 2012-06-15 2018-08-28 Commissariat A L'energie Atomique Et Aux Energies Alternatives Actuator for an ultrasonic motor and ultrasonic motor comprising at least one such actuator
TWI643440B (en) * 2016-04-28 2018-12-01 日商佳能股份有限公司 Motor and electronic apparatus including motor
WO2018223751A1 (en) * 2017-06-06 2018-12-13 广州简成光电有限公司 Piezoelectric motor

Cited By (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001286166A (en) * 2000-03-30 2001-10-12 Seiko Epson Corp Piezoelectric actuator, timepiece and equipment
JP4631124B2 (en) * 2000-03-30 2011-02-16 セイコーエプソン株式会社 Piezoelectric actuators, watches and equipment
JP2009106153A (en) * 2002-07-12 2009-05-14 Seiko Instruments Inc Piezoelectric motor and electronic equipment with piezoelectric motor
JP2009153379A (en) * 2002-07-12 2009-07-09 Seiko Instruments Inc Piezoelectric motor and electronic apparatus with piezoelectric motor
JP2009106154A (en) * 2002-07-12 2009-05-14 Seiko Instruments Inc Piezoelectric motor and electronic equipment with same
JP2009106155A (en) * 2002-07-12 2009-05-14 Seiko Instruments Inc Piezoelectric motor and electronic equipment with same
JP2004242448A (en) * 2003-02-06 2004-08-26 Seiko Epson Corp Drive
JP2005065358A (en) * 2003-08-12 2005-03-10 Seiko Instruments Inc Ultrasonic motor employing multilayer piezoelectric oscillator and electronic apparatus employing it
JP4745615B2 (en) * 2004-01-30 2011-08-10 セイコーインスツル株式会社 Piezoelectric device and electronic apparatus using the same
JP2005217253A (en) * 2004-01-30 2005-08-11 Seiko Instruments Inc Piezoelectric device and electronic equipment using it
JP2005295656A (en) * 2004-03-31 2005-10-20 Seiko Instruments Inc Ultrasonic motor and electronic equipment fitted with ultrasonic motor
JP2007097317A (en) * 2005-09-29 2007-04-12 Olympus Corp Ultrasonic drive device
US7426081B2 (en) 2005-10-24 2008-09-16 Samsung Electro-Mechanics Co., Ltd. Lens transfer device
JP4509084B2 (en) * 2005-10-24 2010-07-21 サムソン エレクトロ−メカニックス カンパニーリミテッド． Lens transfer device
JP2007122051A (en) * 2005-10-24 2007-05-17 Samsung Electro-Mechanics Co Ltd Lens transfer device
WO2007066633A1 (en) * 2005-12-05 2007-06-14 Matsushita Electric Industrial Co., Ltd. Ultrasonic actuator
US7671516B2 (en) 2005-12-05 2010-03-02 Panasonic Corporation Ultrasonic actuator
JP4674218B2 (en) * 2006-02-20 2011-04-20 サムソン エレクトロ−メカニックス カンパニーリミテッド． Lens transfer device
JP2007226234A (en) * 2006-02-20 2007-09-06 Samsung Electro-Mechanics Co Ltd Lens driving device
JP2008032445A (en) * 2006-07-27 2008-02-14 Sii Nanotechnology Inc Piezoelectric actuator and scanning probe microscope using the same
EP1995864A3 (en) * 2007-05-07 2010-04-07 Sharp Kabushiki Kaisha Driving device
US8531091B2 (en) 2008-08-01 2013-09-10 Nikko Company Apparatus for holding piezoelectric vibrator
JP2010041777A (en) * 2008-08-01 2010-02-18 Nikko Co Holder for piezoelectric vibrator
WO2010013361A1 (en) * 2008-08-01 2010-02-04 ニッコー株式会社 Apparatus for holding piezoelectric vibrator
JP2010200461A (en) * 2009-02-24 2010-09-09 Toyota Industries Corp Fastening structure for vibration actuator
US8288919B2 (en) 2009-07-27 2012-10-16 Panasonic Corporation Vibratory actuator
JP2011015605A (en) * 2010-08-26 2011-01-20 Seiko Instruments Inc Ultrasonic motor using multilayer piezoelectric vibrator, and electronic device using the same
JP2013121197A (en) * 2011-12-06 2013-06-17 Seiko Epson Corp Piezoelectric motor, driving device, electronic component inspection device, electronic component conveying device, printing device, robot hand, and robot
JP2013121194A (en) * 2011-12-06 2013-06-17 Seiko Epson Corp Piezoelectric motor, driving device, electronic component transferring device, electronic component inspecting device, printing device, robot hand and robot
US8796906B2 (en) 2011-12-06 2014-08-05 Seiko Epson Corporation Piezoelectric motor, driving device, electronic component conveying device, electronic component inspection device, printing device, robot hand, and robot
JP2013156296A (en) * 2012-01-26 2013-08-15 Tdk Corp Lens driving device and piezoelectric actuator unit
JP2013158151A (en) * 2012-01-30 2013-08-15 Canon Inc Ultrasonic motor
US9812994B2 (en) 2012-01-30 2017-11-07 Canon Kabushiki Kaisha Ultrasonic motor and lens driving apparatus
US9000654B2 (en) 2012-01-30 2015-04-07 Canon Kabushiki Kaisha Ultrasonic motor and lens driving apparatus
JP2013195701A (en) * 2012-03-19 2013-09-30 Tdk Corp Lens drive device
JP2013230018A (en) * 2012-04-26 2013-11-07 Seiko Epson Corp Actuator, robot hand, robot, transportation device, electronic component transportation device and electronic component inspection device
JP2013240172A (en) * 2012-05-14 2013-11-28 Seiko Epson Corp Piezoelectric motor, robot hand, robot, electronic component transport device, electronic component inspection device, liquid-sending pump, printer, electronic watch, projector, transport device
JP2013240173A (en) * 2012-05-14 2013-11-28 Seiko Epson Corp Piezoelectric motor, robot hand, robot, electronic component transport device, electronic component inspection device, liquid-sending pump, printer, electronic watch, projector, transport device
US10063163B2 (en) 2012-06-15 2018-08-28 Commissariat A L'energie Atomique Et Aux Energies Alternatives Actuator for an ultrasonic motor and ultrasonic motor comprising at least one such actuator
JP2015195720A (en) * 2015-07-02 2015-11-05 キヤノン株式会社 motor and lens barrel
JP2015195719A (en) * 2015-07-02 2015-11-05 キヤノン株式会社 motor and lens barrel
TWI643440B (en) * 2016-04-28 2018-12-01 日商佳能股份有限公司 Motor and electronic apparatus including motor
US10840828B2 (en) 2016-04-28 2020-11-17 Canon Kabushiki Kaisha Motor and electronic apparatus including motor
WO2018223751A1 (en) * 2017-06-06 2018-12-13 广州简成光电有限公司 Piezoelectric motor

Also Published As

Publication number Publication date
JP4327268B2 (en) 2009-09-09

Similar Documents

Publication Publication Date Title
JPH11346486A (en) Ultrasonic motor and electronic apparatus equipped with the ultrasonic motor
US6396194B1 (en) Ultrasound motor and electronic apparatus equipped with ultrasonic motor
JPH1132491A (en) Ultrasonic motor and electronic equipment with it
US20090256445A1 (en) Ultrasonic motor and ultrasonic vibrator
JP2000116162A (en) Ultrasonic motor and electronic apparatus with the ultrasonic motor
JP4294061B2 (en) Ultrasonic motor and electronic device with ultrasonic motor
US6952072B2 (en) Ultrasonic motor and electronic apparatus utilizing ultrasonic motor
JP4394158B2 (en) Ultrasonic motor and electronic device with ultrasonic motor
US8299682B2 (en) Ultrasonic motor
JPH0795777A (en) Oscillatory wave driving device
JP4245183B2 (en) Ultrasonic motor and electronic device with ultrasonic motor
JP4150056B2 (en) Ultrasonic motor and electronic device with ultrasonic motor
JP4681679B2 (en) Vibrating body, ultrasonic motor, and electronic device with ultrasonic motor
JP4521053B2 (en) Ultrasonic motor and electronic device with ultrasonic motor
JPH11346487A (en) Oscillation wave unit and oscillation wave driver
JPH05137359A (en) Ultrasonic vibrator and ultrasonic driving apparatus
JP4634174B2 (en) Ultrasonic motor and electronic device using the same
JPH0223070A (en) Linear type ultrasonic motor
JP4981427B2 (en) Vibration drive device
JP3200315B2 (en) Vibration actuator
JPH07337044A (en) Ultrasonic actuator
JPH0697863B2 (en) Piezoelectric drive
JP4053762B2 (en) Ultrasonic motor and electronic device with ultrasonic motor
JP2019080490A (en) Vibration type actuator, lens barrel, camera, and control method
JP2000350481A (en) Vibration wave-drive device and office equipment

Legal Events

Date Code Title Description
RD01 Notification of change of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7421

Effective date: 20040302

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050530

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050530

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070423

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080304

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080425

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080527

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080715

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080819

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20081008

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090127

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090304

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20090609

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20090611

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120619

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

RD01 Notification of change of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7421

Effective date: 20091108

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120619

Year of fee payment: 3

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: R3D03

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130619

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130619

Year of fee payment: 4

LAPS Cancellation because of no payment of annual fees