JPH11304611A - Fluid pressure sensor - Google Patents
Fluid pressure sensorInfo
- Publication number
- JPH11304611A JPH11304611A JP11321598A JP11321598A JPH11304611A JP H11304611 A JPH11304611 A JP H11304611A JP 11321598 A JP11321598 A JP 11321598A JP 11321598 A JP11321598 A JP 11321598A JP H11304611 A JPH11304611 A JP H11304611A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- electric resistance
- fluid pressure
- receiving plate
- pressure receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、流体の圧力を検
出するための流体圧力センサーに関する。The present invention relates to a fluid pressure sensor for detecting a pressure of a fluid.
【０００２】[0002]
【従来の技術】冷凍サイクル中の冷媒の圧力を検出する
ため等に用いられる流体圧力センサーは、従来は、例え
ば図７に示されるような断面形状の電気絶縁材料からな
る受圧部材９１を用い、その円形の受圧面９１ａの裏面
に四個の電気抵抗片９２ａ，９２ｂ，９２ｃ，９２ｄを
貼着してそれらがホイートストンブリッジを形成するよ
うに接続し、各電気抵抗片９２ａ，９２ｂ，９２ｃ，９
２ｄが歪むのに伴って変化する電気抵抗値の変化から冷
媒圧を検出している。2. Description of the Related Art Conventionally, a fluid pressure sensor used for detecting a pressure of a refrigerant in a refrigeration cycle or the like uses a pressure receiving member 91 made of an electrically insulating material having a sectional shape as shown in FIG. Four electric resistance pieces 92a, 92b, 92c and 92d are attached to the back surface of the circular pressure receiving surface 91a and connected so as to form a Wheatstone bridge, and the electric resistance pieces 92a, 92b, 92c and 9 are connected.
The refrigerant pressure is detected from a change in the electric resistance value that changes with the distortion of 2d.
【０００３】[0003]
【発明が解決しようとする課題】上述のような従来の流
体圧力センサーは、受圧面９１ａに流体圧がかかると、
図８に示されるように、中央に近い側の二つの電気抵抗
片９２ｂ，９２ｃが伸び、外縁に近い側の二つの電気抵
抗片９２ａ，９２ｄが縮むが、その変形から流体圧を正
確に検出するために、受圧部材９１の外縁部を厚肉に形
成して受圧によって変形しないようにしている。In the above-described conventional fluid pressure sensor, when a fluid pressure is applied to the pressure receiving surface 91a,
As shown in FIG. 8, the two electric resistance pieces 92b and 92c near the center extend and the two electric resistance pieces 92a and 92d near the outer edge contract, but the fluid pressure is accurately detected from the deformation. For this purpose, the outer edge of the pressure receiving member 91 is formed thick so as not to be deformed by the pressure.
【０００４】しかし、そのために受圧部材９１を図７に
示されるような凹状の断面形状に形成するためには、製
造コストが例えば一個数百円と非常に高価なものになっ
てしまう。However, in order to form the pressure receiving member 91 in a concave cross-sectional shape as shown in FIG. 7, the manufacturing cost is extremely high, for example, several hundred yen.
【０００５】そこで本発明は、受圧部材の部品製造コス
トを大幅に削減することができる流体圧力センサーを提
供することを目的とする。Accordingly, an object of the present invention is to provide a fluid pressure sensor capable of greatly reducing the cost of manufacturing parts for a pressure receiving member.
【０００６】[0006]
【課題を解決するための手段】上記の目的を達成するた
め、本発明の流体圧力センサーは、表面側で流体圧を受
ける可撓性薄膜の裏面に密着してセラミックス製円板か
らなる受圧部材を配置し、歪みに伴って電気抵抗値が変
化する電気抵抗体を上記受圧部材の表裏両面に貼着し
て、上記電気抵抗体の抵抗値の変化から上記流体圧を検
知するようにしたことを特徴とする。In order to achieve the above object, a fluid pressure sensor according to the present invention comprises a pressure receiving member formed of a ceramic disc in close contact with the back surface of a flexible thin film which receives fluid pressure on the front side. Is arranged, and an electric resistor whose electric resistance value changes with strain is attached to both front and back surfaces of the pressure receiving member, and the fluid pressure is detected from the change in the resistance value of the electric resistor. It is characterized by.
【０００７】なお、上記受圧部材は、表面側から上記可
撓性薄膜により押圧され、裏面側の外縁部分が受け部材
に当接して支持されていてもよく、上記電気抵抗体はホ
イートストンブリッジを形成する四つの電気抵抗片から
なり、各電気抵抗片が上記受圧部材の片面の半分の領域
に貼着されていてもよい。また、上記電気抵抗片は、各
々中間部分が波状に形成されていてもよい。The pressure receiving member may be pressed from the front side by the flexible thin film, and an outer edge portion on the back side may be supported in contact with the receiving member, and the electric resistor may form a Wheatstone bridge. Each of the electric resistance pieces may be attached to a half area of one surface of the pressure receiving member. Further, each of the electric resistance pieces may be formed in a wavy shape at an intermediate portion.
【０００８】[0008]
【発明の実施の形態】図面を参照して本発明の実施の形
態を説明する。図１は、本発明の実施の形態の流体圧力
センサーを示しており、例えば、カーエアコンの冷凍サ
イクル中の冷媒の圧力を検出するために用いられるもの
である。Embodiments of the present invention will be described with reference to the drawings. FIG. 1 shows a fluid pressure sensor according to an embodiment of the present invention, which is used, for example, to detect the pressure of a refrigerant in a refrigeration cycle of a car air conditioner.
【０００９】金属製の受圧部ハウジング１の先端には、
冷媒流路に接続される接続孔２が形成されており、連通
孔３を介して接続孔２と受圧部ハウジング１の内側の受
圧空間４とが通じている。At the tip of the metal pressure receiving housing 1,
A connection hole 2 connected to the refrigerant flow path is formed, and the connection hole 2 and the pressure receiving space 4 inside the pressure receiving portion housing 1 communicate with each other through the communication hole 3.
【００１０】受圧部ハウジング１をかしめてその内側に
固定された支持部材５には、可撓性薄膜からなるダイア
フラム６が、全面で受圧空間４に面して冷媒圧を受ける
ように配置され、ダイアフラム６の外縁部はハウジング
１と支持部材５との間に挟み込まれたＯリング７により
全周にわたって気密に押圧固定されている。A diaphragm 6 made of a flexible thin film is disposed on a support member 5 fixed to the inside of the pressure receiving portion housing 1 by caulking the pressure receiving portion housing 1 so as to face the pressure receiving space 4 and receive the refrigerant pressure. The outer edge of the diaphragm 6 is air-tightly pressed and fixed over the entire periphery by an O-ring 7 sandwiched between the housing 1 and the support member 5.
【００１１】ダイアフラム６の裏面に密着して、ダイア
フラム６の直径より一まわり小さな径の電気絶縁性のセ
ラミックス製円板からなる受圧板１０が配置されてい
る。この受圧板１０は、厚さが一定の平板状のものなの
で、プレス成形により、例えば一個１００円以下の低コ
ストで製造することができる。A pressure receiving plate 10 made of an electrically insulating ceramic disk and having a diameter slightly smaller than the diameter of the diaphragm 6 is disposed in close contact with the back surface of the diaphragm 6. Since the pressure receiving plate 10 has a flat plate shape with a constant thickness, it can be manufactured at a low cost of, for example, 100 yen or less by press molding.
【００１２】支持部材５の表面側の部分は円形の凹状に
形成されていて、その凹部の周部に形成された段部５ａ
に受圧板１０の裏面側の外縁部分１０ａが当接してい
る。したがって、受圧板１０は、表面側からダイアフラ
ム６により押圧され、裏面側の外縁部分１０ａが支持部
材５に当接した状態で支持されている。The surface portion of the support member 5 is formed in a circular concave shape, and a step 5a is formed around the concave portion.
The outer peripheral portion 10a on the back side of the pressure receiving plate 10 is in contact with the pressure receiving plate 10. Therefore, the pressure receiving plate 10 is pressed by the diaphragm 6 from the front surface side, and is supported in a state where the outer edge portion 10 a on the back surface is in contact with the support member 5.
【００１３】図２と図３は、受圧板１０の表面と裏面を
示しており、歪みに伴って電気抵抗値が変化する四つの
電気抵抗片２１〜２４が、いわゆる厚膜印刷によって受
圧板１０の表裏両面に貼着されている。なお、各電気抵
抗片２１〜２４には見易くするために斜線を付してあ
る。FIG. 2 and FIG. 3 show the front and back surfaces of the pressure receiving plate 10, respectively. Four electric resistance pieces 21 to 24 whose electric resistance values change with distortion are formed by so-called thick film printing. Is affixed to both sides. Each of the electric resistance pieces 21 to 24 is hatched for easy viewing.
【００１４】各電気抵抗片２１〜２４は、充分な長さを
確保するために中間部分を波状に繰り返しカーブさせ
て、各々受圧板１０の片面の半分の領域に貼着されてい
る。このように、四つの電気抵抗片２１〜２４を受圧板
１０の表裏両面に分けて貼着したので、片面だけに貼着
する場合に比べて二倍の広い面積に貼着して検出精度を
上げることができる。Each of the electric resistance pieces 21 to 24 has a middle portion repeatedly curved in a wavy shape in order to secure a sufficient length, and is attached to a half area of one side of the pressure receiving plate 10. As described above, since the four electric resistance pieces 21 to 24 are adhered separately on the front and back surfaces of the pressure receiving plate 10, the detection accuracy can be improved by attaching the electric resistance pieces 21 to 24 to a double area as compared with the case where the electric resistance pieces are adhered to only one surface. Can be raised.
【００１５】そして、各電気抵抗片２１〜２４の両端部
に形成されたスルーホール３１〜３４において表裏両面
の電気抵抗片２１〜２４どうしが接続されており、図４
に示されるように、ホイートストンブリッジを形成して
いる。The electric resistance pieces 21 to 24 on the front and back surfaces are connected to each other through through holes 31 to 34 formed at both ends of the electric resistance pieces 21 to 24, respectively, as shown in FIG.
As shown in the figure, a Wheatstone bridge is formed.
【００１６】そのうち第１と第３のスルーホール３１，
３３の端子には外部の直流電源２０から電圧が与えら
れ、それに対応して第２と第４のスルーホール３２，３
４の端子間に出力電圧が生じる。The first and third through holes 31,
33 is supplied with a voltage from an external DC power supply 20, and correspondingly, the second and fourth through holes 32, 3
An output voltage is generated between the four terminals.
【００１７】図１に戻って、受圧板１０の裏面側にはフ
レキシブル基板１３の一端側が取り付けられていて、各
スルーホール３１〜３４の端子にフレキシブル基板１３
の電気配線が接続され、フレキシブル基板１３の中間部
分に取り付けられた増幅器１２において、第２と第４の
スルーホール３２，３４の端子間からの出力電圧が増幅
される。Returning to FIG. 1, one end of a flexible board 13 is attached to the back side of the pressure receiving plate 10, and the terminals of the through holes 31 to 34 are connected to the flexible board 13 at the terminals thereof.
And the output voltage from between the terminals of the second and fourth through holes 32 and 34 is amplified by the amplifier 12 attached to the intermediate portion of the flexible substrate 13.
【００１８】支持部材５を中間に挟んで受圧部ハウジン
グ１の裏側にかしめ固定されたコネクタハウジング１１
内には、３本の接点ピン１４が配置されていて、各接点
ピン１４の基部にはフレキシブル基板１３の配線が接続
されている。A connector housing 11 caulked and fixed to the back of the pressure receiving housing 1 with the support member 5 interposed therebetween.
Inside, three contact pins 14 are arranged, and the wiring of the flexible substrate 13 is connected to the base of each contact pin 14.
【００１９】なお、３本の接点ピン１４のうち２本は、
例えば０ボルトと５ボルトの入力電圧用接点であり、残
りの１本は、例えば０〜１０kg/cm2の圧力に対応して
０．２〜４．８ボルトの電圧が出力される出力用接点で
ある。Two of the three contact pins 14 are:
For example, a contact for input voltage of 0 volts and 5 volts, and another contact for output which outputs a voltage of 0.2 to 4.8 volts corresponding to a pressure of 0 to 10 kg / cm 2 , for example. It is.
【００２０】このように構成された流体圧力センサーに
おいては、接続孔２から連通孔３を通って受圧空間４内
に導入される冷媒の圧力が、ダイアフラム６を介して受
圧板１０の表面側において受圧され、受圧板１０が撓
む。In the fluid pressure sensor configured as described above, the pressure of the refrigerant introduced from the connection hole 2 through the communication hole 3 into the pressure receiving space 4 is applied to the surface of the pressure receiving plate 10 via the diaphragm 6. The pressure is received, and the pressure receiving plate 10 bends.
【００２１】すると、受圧板１０の表面側の電気抵抗片
２１，２２は縮んで電気抵抗値が小さくなると同時に、
受圧板１０の裏面側の電気抵抗片２３，２４は伸びて電
気抵抗値が大きくなる。Then, the electric resistance pieces 21 and 22 on the surface side of the pressure receiving plate 10 shrink to reduce the electric resistance value, and at the same time,
The electric resistance pieces 23 and 24 on the back surface side of the pressure receiving plate 10 are extended to increase the electric resistance value.
【００２２】そして、それに伴って変化する第２と第４
のスルーホール３２，３４の端子間電圧に基づく接点ピ
ン１４からの出力電圧値により、受圧板１０に加わる冷
媒圧力を検知することができる。Then, the second and fourth states which change accordingly
The refrigerant pressure applied to the pressure receiving plate 10 can be detected from the output voltage value from the contact pin 14 based on the voltage between the terminals of the through holes 32 and 34.
【００２３】図５及び図６は、本発明の第２の実施の形
態の受圧板１０の表面と裏面を示しており、各電気抵抗
片２１〜２４の端部の端子１３１〜１３４を受圧板１０
の側面で接続して、スルーホール加工をなくしたもので
ある。このようにすることによって、製造コストをさら
に低減することができる。１３５は、抵抗値調整のため
の切れ目である。FIGS. 5 and 6 show the front and back surfaces of a pressure receiving plate 10 according to a second embodiment of the present invention, in which terminals 131 to 134 at the ends of the electric resistance pieces 21 to 24 are connected to the pressure receiving plate. 10
The connection is made on the side surface of, and the through hole processing is eliminated. By doing so, the manufacturing cost can be further reduced. 135 is a break for adjusting the resistance value.
【００２４】[0024]
【発明の効果】本発明によれば、表面側で流体圧を受け
る可撓性薄膜の裏面に密着してセラミックス製円板から
なる受圧部材を配置したので、受圧部材をプレス成形に
よって非常に低コストで製造することができ、しかも歪
みに伴って電気抵抗値が変化する電気抵抗体を受圧部材
の表裏両面に貼着したことにより、片面だけに貼着する
場合にくらべて二倍の広い面積に貼着して高精度の圧力
検出を行うことができる。According to the present invention, the pressure receiving member made of a ceramic disk is disposed in close contact with the back surface of the flexible thin film which receives fluid pressure on the front surface side. The electric resistor, which can be manufactured at low cost and changes in electric resistance with strain, is attached to both front and back surfaces of the pressure receiving member, which is twice as large as that when only one surface is attached. To perform high-precision pressure detection.
【図１】本発明の実施の形態の流体圧力センサーの縦断
面図である。FIG. 1 is a longitudinal sectional view of a fluid pressure sensor according to an embodiment of the present invention.
【図２】本発明の実施の形態の受圧部材の表面の正面図
である。FIG. 2 is a front view of the surface of the pressure receiving member according to the embodiment of the present invention.
【図３】本発明の実施の形態の受圧部材の裏面の正面図
である。FIG. 3 is a front view of a back surface of the pressure receiving member according to the embodiment of the present invention.
【図４】本発明の実施の形態の流体圧力センサーの配線
図である。FIG. 4 is a wiring diagram of the fluid pressure sensor according to the embodiment of the present invention.
【図５】本発明の第２の実施の形態の受圧部材の表面の
正面図である。FIG. 5 is a front view of a surface of a pressure receiving member according to a second embodiment of the present invention.
【図６】本発明の第２の実施の形態の受圧部材の裏面の
正面図である。FIG. 6 is a front view of a back surface of a pressure receiving member according to a second embodiment of the present invention.
【図７】従来の受圧部材の側面断面図である。FIG. 7 is a side sectional view of a conventional pressure receiving member.
【図８】従来の受圧部材の受圧状態の側面断面図であ
る。FIG. 8 is a side sectional view of a conventional pressure receiving member in a pressure receiving state.
５ 支持部材 ５ａ 段部 ６ ダイアフラム １０ 受圧板 ２１〜２４ 電気抵抗片 ３１〜３４ スルーホール １３１〜１３４ 端子 DESCRIPTION OF SYMBOLS 5 Support member 5a Step part 6 Diaphragm 10 Pressure receiving plate 21-24 Electric resistance piece 31-34 Through hole 131-134 Terminal
Claims (4)
に密着してセラミックス製円板からなる受圧部材を配置
し、歪みに伴って電気抵抗値が変化する電気抵抗体を上
記受圧部材の表裏両面に貼着して、上記電気抵抗体の抵
抗値の変化から上記流体圧を検知するようにしたことを
特徴とする流体圧力センサー。1. A pressure receiving member made of a ceramic disk is disposed in close contact with the back surface of a flexible thin film which receives fluid pressure on the front surface side. A fluid pressure sensor which is attached to both front and back surfaces of a member, and detects the fluid pressure from a change in the resistance value of the electric resistor.
膜により押圧され、裏面側の外縁部分が受け部材に当接
して支持されている請求項１記載の流体圧力センサー。2. The fluid pressure sensor according to claim 1, wherein the pressure receiving member is pressed from the front side by the flexible thin film, and an outer edge portion on the back side is supported in contact with the receiving member.
を形成する四つの電気抵抗片からなり、各電気抵抗片が
上記受圧部材の片面の半分の領域に貼着されている請求
項１又は２記載の流体圧力センサー。3. An electric resistor according to claim 1, wherein said electric resistor comprises four electric resistance pieces forming a Wheatstone bridge, and each electric resistance piece is attached to a half area of one surface of said pressure receiving member. Fluid pressure sensor.
形成されている請求項３記載の流体圧力センサー。4. The fluid pressure sensor according to claim 3, wherein each of said electric resistance pieces has an intermediate portion formed in a wavy shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11321598A JPH11304611A (en) | 1998-04-23 | 1998-04-23 | Fluid pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11321598A JPH11304611A (en) | 1998-04-23 | 1998-04-23 | Fluid pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11304611A true JPH11304611A (en) | 1999-11-05 |
Family
ID=14606497
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11321598A Pending JPH11304611A (en) | 1998-04-23 | 1998-04-23 | Fluid pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11304611A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1322318C (en) * | 2004-02-04 | 2007-06-20 | 株式会社电装 | Pressure sensor having a metal diaphragm responsive to pressure |
-
1998
- 1998-04-23 JP JP11321598A patent/JPH11304611A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1322318C (en) * | 2004-02-04 | 2007-06-20 | 株式会社电装 | Pressure sensor having a metal diaphragm responsive to pressure |
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