JPH11260589A - Static eliminator - Google Patents
Static eliminatorInfo
- Publication number
- JPH11260589A JPH11260589A JP5719298A JP5719298A JPH11260589A JP H11260589 A JPH11260589 A JP H11260589A JP 5719298 A JP5719298 A JP 5719298A JP 5719298 A JP5719298 A JP 5719298A JP H11260589 A JPH11260589 A JP H11260589A
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- Japan
- Prior art keywords
- electrode
- discharge electrode
- ground electrode
- voltage
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Elimination Of Static Electricity (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、フィルムシートや
半導体デバイス等の静電気を帯びた物体から静電気を除
去する除電器に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a static eliminator for removing static electricity from an electrostatically charged object such as a film sheet or a semiconductor device.
【０００２】[0002]
【従来の技術】フィルムシートや半導体デバイス等の帯
電物体は静電気を帯びやすいため、その保管や製造工程
においては、帯電した静電気を除去する必要がある。こ
のため、従来より、製造工程等においては、帯電物体の
近傍の空気をイオン化して、帯電物体を電気的に中和す
ることにより、除電を行う除電器が用いられている。2. Description of the Related Art Since a charged object such as a film sheet or a semiconductor device is easily charged with static electricity, it is necessary to remove the charged static electricity in storage and manufacturing processes. For this reason, conventionally, in a manufacturing process and the like, a static eliminator has been used which ionizes air in the vicinity of a charged object to electrically neutralize the charged object, thereby eliminating static electricity.
【０００３】図４（ａ）および（ｂ）は、従来の除電器
の要部（除電電極１）の構成を示す図である。図４
（ａ）は、除電電極１の構成を示す一部裁断側面図であ
り、図４（ｂ）は、図４（ａ）に示すＸ−Ｘ線視断面図
である。図４（ａ）に示す除電電極１において、２は、
中心導体２ａと、絶縁体を介して外部導体２ｂと同軸配
置された外部導体２ｂと、該外部導体２ｂを被覆する絶
縁体とからなる同軸ケーブルである。上記中心導体２ａ
の一端には、図示しない高圧電源より高電圧が印加され
ており、外部導体２ｂは接地されている。また、同軸ケ
ーブル２の中心導体２ａの他端部は、除電電極１内にお
いて一定長さ分が高圧電極３として用いられている。４
は、ポリエステル等が断面略コ字形状に形成されてなる
樹脂成形部であり、除電電極１を保護している。FIGS. 4 (a) and 4 (b) are diagrams showing a configuration of a main part (a static elimination electrode 1) of a conventional static eliminator. FIG.
4A is a partially cut-away side view showing the configuration of the charge removing electrode 1, and FIG. 4B is a sectional view taken along line XX shown in FIG. 4A. In the static elimination electrode 1 shown in FIG.
This is a coaxial cable including a central conductor 2a, an outer conductor 2b coaxially arranged with the outer conductor 2b via an insulator, and an insulator covering the outer conductor 2b. The center conductor 2a
Is applied with a high voltage from a high-voltage power supply (not shown), and the outer conductor 2b is grounded. The other end of the center conductor 2 a of the coaxial cable 2 is used as the high-voltage electrode 3 for a certain length in the charge eliminating electrode 1. 4
Is a resin molded portion formed of polyester or the like having a substantially U-shaped cross section, and protects the static elimination electrode 1.
【０００４】図４（ｂ）に示す５は、樹脂成形部４の同
図右側部分の下方に配設された第１の接地電極である。
この第１の接地電極５は、電気的に外部導体２ｂに接続
されており、外部導体２ｂを介して接地されている。６
は、樹脂成形部４の同図左側の下方に配設され、かつ第
１の接地電極５に対して対向配置された第２の接地電極
である。この第２の接地電極６は、第１の接地電極５と
同様にして外部導体２ｂを介して接地されている。[0004] Reference numeral 5 shown in FIG. 4 (b) is a first ground electrode disposed below the right side portion of the resin molded portion 4 in the figure.
The first ground electrode 5 is electrically connected to the outer conductor 2b, and is grounded via the outer conductor 2b. 6
Is a second ground electrode disposed below the resin molded part 4 on the left side of the figure and opposed to the first ground electrode 5. The second ground electrode 6 is grounded via the external conductor 2b in the same manner as the first ground electrode 5.
【０００５】図４（ａ）に示す７、７、・・・は、モール
ド部１０の中央部に長手方向に一定間隔をおいて各々配
設された複数の結合リングであり、真鍮等が円筒形状に
形成されてなる。これらの結合リング７、７、・・・に
は、図４（ｂ）に示す絶縁部材８を介して高圧電極３が
貫通されている。.. Shown in FIG. 4 (a) are a plurality of connecting rings which are respectively disposed at a certain interval in the longitudinal direction at a central portion of the mold portion 10, and are made of a cylinder made of brass or the like. It is formed in a shape. The high voltage electrode 3 penetrates these coupling rings 7, 7,... Via an insulating member 8 shown in FIG.
【０００６】９、９、・・・は、結合リング７、７、・・・の
下部に、各先端部が第１の接地電極５および第２の接地
電極６の位置より下方へ突出しないように各々取り付け
られた針状の放電電極である。結合リング７、７、・・・
は、絶縁部材８を介して電気的に高圧電極３と静電結合
している。１０は、樹脂成形部４の内部に充填されたモ
ールド部である。１１は、放電電極９の下方に配設され
た帯電物体である。１２は、樹脂成形部４の左方であっ
て、かつ第２の接地電極６の左上方に配設されたエアパ
イプであり、図示しないコンプレッサより供給されるエ
アＡを帯電物体１１へ向けて吹き付ける。このエアパイ
プ１２は、放電電極９と帯電物体１１との間の距離が長
い場合に、放電電極９の周囲に発生するイオンを帯電物
体１１へ吹き付ける役目をしている。., 9,..., Do not protrude below the positions of the first ground electrode 5 and the second ground electrode 6 below the coupling rings 7, 7,. Are the needle-shaped discharge electrodes respectively attached to the electrodes. Connecting rings 7, 7, ...
Are electrically coupled to the high-voltage electrode 3 via the insulating member 8. Reference numeral 10 denotes a mold portion filled inside the resin molding portion 4. Reference numeral 11 denotes a charged object disposed below the discharge electrode 9. Reference numeral 12 denotes an air pipe disposed on the left side of the resin molding section 4 and on the upper left side of the second ground electrode 6, and blows air A supplied from a compressor (not shown) toward the charged object 11. . The air pipe 12 serves to blow ions generated around the discharge electrode 9 to the charged object 11 when the distance between the discharge electrode 9 and the charged object 11 is long.
【０００７】上記構成において、図示しない高圧電源よ
り高電圧が中心導体２ａ（高圧電極３）に印加される
と、高電圧は、静電結合作用により結合リング７を介し
て放電電極９に印加される。これにより、放電電極９の
先端部と第１の接地電極５および第２の接地電極６との
間に絶縁破壊が生じて、コロナ放電が発生し、周囲の空
気が正イオンと負イオンとに交互にイオン化される。従
って、帯電物体１１の帯電電荷の極性に応じていずれか
の極性のイオンが帯電物体１１に引き寄せられて、帯電
物体１１の帯電電荷と結合することにより、帯電物体１
１が除電される。In the above configuration, when a high voltage is applied to the center conductor 2a (high-voltage electrode 3) from a high-voltage power supply (not shown), the high voltage is applied to the discharge electrode 9 via the coupling ring 7 by an electrostatic coupling action. You. As a result, dielectric breakdown occurs between the tip of the discharge electrode 9 and the first ground electrode 5 and the second ground electrode 6, corona discharge occurs, and the surrounding air becomes positive ions and negative ions. It is ionized alternately. Therefore, ions of either polarity are attracted to the charged object 11 in accordance with the polarity of the charged object 11 and combined with the charged charge of the charged object 11, whereby the charged object 1 is charged.
1 is neutralized.
【０００８】また、放電電極９と帯電物体１１との距離
が長く除電効果が低い場合には、図示しないコンプレッ
サよりエアＡがエアパイプ１２に供給される。これによ
り、エアＡがエア吹出穴１２ａから帯電物体１１へ向け
て吹き出されることにより、イオン化した空気が帯電物
体１１へ吹き付けられる。When the distance between the discharge electrode 9 and the charged object 11 is long and the charge removing effect is low, air A is supplied to the air pipe 12 from a compressor (not shown). As a result, the air A is blown out from the air blowing hole 12a toward the charged object 11, so that ionized air is blown onto the charged object 11.
【０００９】[0009]
【発明が解決しようとする課題】しかしながら、従来の
除電器においては、図４（ｂ）に示すように第２の接地
電極６および樹脂成形部４が邪魔となるため、エアパイ
プ１２の取り付け位置が制限される。従って、従来の除
電器においては、エアＡが放電電極９から遠い空間、す
なわちイオン濃度が薄い空間を通過するため、帯電物体
１１に対する除電効果がそれほど高くならないという欠
点があった。また、図５に示すように第２の接地電極６
（図４（ａ）参照）をエアパイプ１２と共用することに
より除電効果を高める方法も考えられるが、この方法
も、エアＡがイオン濃度が薄い空間を通過するため、帯
電物体１１に対する除電効果がそれほど高くならない。
本発明はこのような背景の下になされたもので、除電効
果を高めることができる除電器を提供することを目的と
する。However, in the conventional static eliminator, as shown in FIG. 4B, the second ground electrode 6 and the resin molded portion 4 hinder the mounting position of the air pipe 12. Limited. Therefore, in the conventional static eliminator, the air A passes through a space far from the discharge electrode 9, that is, a space having a low ion concentration, and thus has a disadvantage that the static elimination effect on the charged object 11 is not so high. In addition, as shown in FIG.
Although a method of increasing the charge eliminating effect by sharing the air pipe 12 (see FIG. 4A) with the air pipe 12 is also considered, this method also reduces the charge eliminating effect on the charged object 11 because the air A passes through a space having a low ion concentration. Not so high.
The present invention has been made under such a background, and an object of the present invention is to provide a static eliminator capable of enhancing a static elimination effect.
【００１０】[0010]
【課題を解決するための手段】請求項１に記載の発明
は、高電圧が印加される高圧電極と、前記高圧電極を収
容してなる樹脂成形部と、その先端部分が前記樹脂成形
部の下面から突出するように前記樹脂成形部に収容さ
れ、かつ帯電物体の上方に位置しており、静電結合によ
り前記高電圧が印加される放電電極と、前記放電電極お
よび前記樹脂成形部の近傍に配設されかつ接地された第
１の接地電極と、前記１の接地電極に対して前記放電電
極を挟んで対向する位置であって、自身と前記樹脂成形
部との間の距離が、前記第１の接地電極と前記樹脂成形
部との間の距離より大となる位置に配設された第２の接
地電極と、前記放電電極と前記第２の接地電極との間を
通過し、かつ前記放電電極の先端の近傍を通過する、前
記帯電物体へ向かう方向へエアを吹き付けるエア吹付手
段とを具備することを特徴とする。また、請求項２に記
載の発明は、請求項１に記載の除電器において、導体の
一部が螺旋状に形成され、かつ前記導体の他部が前記放
電電極とされ、前記螺旋状の部分に絶縁部材を介して前
記高圧電極が貫通されてなる電極ユニットとを具備する
ことを特徴とする。According to a first aspect of the present invention, there is provided a high-voltage electrode to which a high voltage is applied, a resin molded portion accommodating the high-voltage electrode, and a tip portion of the resin molded portion. A discharge electrode that is housed in the resin molding portion so as to protrude from the lower surface and is located above the charged object, and is adjacent to the discharge electrode to which the high voltage is applied by electrostatic coupling, and the discharge electrode and the resin molding portion A first ground electrode disposed and grounded at a position opposed to the first ground electrode with the discharge electrode interposed therebetween, and a distance between the first ground electrode and the resin molding portion is A second ground electrode disposed at a position larger than the distance between the first ground electrode and the resin molded portion, and passing between the discharge electrode and the second ground electrode, and The direction toward the charged object that passes near the tip of the discharge electrode Characterized by comprising an air blowing means for blowing air into. According to a second aspect of the present invention, in the static eliminator according to the first aspect, a part of the conductor is formed in a spiral shape, and the other part of the conductor is the discharge electrode, and the spiral portion is formed. And an electrode unit having the high-voltage electrode penetrated through an insulating member.
【００１１】[0011]
【発明の実施の形態】以下、図面を参照して本発明の実
施形態について説明する。図１は本発明の一実施形態に
よる除電器の構成を示す図である。この図において、図
４（ａ）および（ｂ）の各部に対応する部分には同一の
符号を付ける。図１に示す２０は、交流電源であり、例
えば、１００Ｖの電圧を発生する。２２は、昇圧トラン
スであり、その一次側には、スイッチ２１を介して交流
電源２０が接続されており、一次側に印加された電圧１
００Ｖを昇圧した高電圧（例えば、７ｋＶ）を二次側に
出力する。また、昇圧トランス２２の二次側の一端は、
同軸ケーブル２の中心導体２ａが接続されており、一
方、昇圧トランス２２の二次側の他端は、外部導体２ｂ
と共に接地されている。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a configuration of a static eliminator according to one embodiment of the present invention. In this figure, parts corresponding to the respective parts in FIGS. 4A and 4B are denoted by the same reference numerals. Reference numeral 20 shown in FIG. 1 denotes an AC power supply, which generates a voltage of 100 V, for example. Reference numeral 22 denotes a step-up transformer, the primary side of which is connected to an AC power supply 20 via a switch 21, and a voltage 1 applied to the primary side.
A high voltage (for example, 7 kV) obtained by boosting 00V is output to the secondary side. One end on the secondary side of the step-up transformer 22 is
The center conductor 2a of the coaxial cable 2 is connected, while the other end on the secondary side of the step-up transformer 22 is connected to the external conductor 2b.
And grounded.
【００１２】３０は除電電極である。図２（ａ）は、図
１に示す除電電極３０の構成を示す一部裁断側面図であ
り、図２（ｂ）は、図２（ａ）に示すＸ−Ｘ線視断面図
である。図２（ａ）に示す除電電極３０においては、図
４（ａ）に示す結合リング７および放電電極９に代え
て、電極ユニット３１が設けられている。また、図２
（ｂ）に示す第１の接地電極５、第２の接地電極６およ
ｂエアパイプ１２の配設位置は、図４（ｂ）に示す第１
の接地電極５、第２の接地電極６およびエアパイプ１２
の配設位置と異なる。Reference numeral 30 denotes a neutralizing electrode. FIG. 2A is a partially cut-away side view showing the configuration of the static elimination electrode 30 shown in FIG. 1, and FIG. 2B is a cross-sectional view taken along line XX shown in FIG. 2A. In the static elimination electrode 30 shown in FIG. 2A, an electrode unit 31 is provided instead of the coupling ring 7 and the discharge electrode 9 shown in FIG. FIG.
The arrangement positions of the first ground electrode 5, the second ground electrode 6, and the b air pipe 12 shown in FIG.
Ground electrode 5, second ground electrode 6, and air pipe 12
Is different from the arrangement position.
【００１３】図２（ａ）に示す電極ユニット３１は、図
３に示す棒状の導体が螺旋状に巻回されてなる結合螺旋
部３１ａと、上記導体の一端部が直線状に形成されてな
り、かつ先端が針状に形成された放電電極部３１ｂとか
らなる。すなわち、上記結合螺旋部３１ａは、結合リン
グ７（図４（ａ）参照）に対応しており、放電電極部３
１ｂは、放電電極９（図４（ａ）参照）に対応してい
る。The electrode unit 31 shown in FIG. 2A has a connecting spiral portion 31a formed by spirally winding a rod-like conductor shown in FIG. 3, and one end of the conductor is formed linearly. And a discharge electrode portion 31b having a needle-like tip. That is, the coupling spiral portion 31a corresponds to the coupling ring 7 (see FIG. 4A), and the discharge electrode portion 3
1b corresponds to the discharge electrode 9 (see FIG. 4A).
【００１４】また、図２（ｂ）に示す電極ユニット３１
の結合螺旋部３１ａには、絶縁部材８を介して高圧電極
３が貫通されている。さらに、電極ユニット３１の放電
電極部３１ｂは、放電電極部３１ｂの中心（高圧電極
３）より同図左側へ距離ｄ1離れた位置から下方へ延び
るように形成されている。The electrode unit 31 shown in FIG.
The high-voltage electrode 3 penetrates through the coupling spiral portion 31a via the insulating member 8. Further, the discharge electrode portion 31b of the electrode unit 31 is formed to extend downward from a position at a distance d1 to the left side of the drawing from the center (high-voltage electrode 3) of the discharge electrode portion 31b.
【００１５】第１の接地電極５は、樹脂成形部４の下方
であって、かつ放電電極部３１ｂより同図右側へ距離ｄ
2（＞ｄ1）離れたところに位置している。第２の接地電
極６は、第１の接地電極５に対して対向配置されてお
り、放電電極部３１ｂから同図左側へ距離ｄ2離れたと
ころに位置している。すなわち、放電電極部３１ｂは、
第１の接地電極５と第２の接地電極６との中間に位置し
ている。言い換えれば、第２の接地電極６と樹脂成形部
４との間の距離は、第１の接地電極５と樹脂成形部４と
の間の距離より大きい。エアパイプ１２は、樹脂成形部
４の左方であって、かつ大きくあいた樹脂成形部４と第
２の接地電極６との間をエアＡが帯電物体１１へ向けて
吹き抜ける位置に配設されている。言い換えれば、エア
Ａは、放電電極部３１ｂの近傍を通って帯電物体１１へ
吹き抜ける。The first ground electrode 5 is located below the resin molded portion 4 and at a distance d from the discharge electrode portion 31b to the right side in FIG.
2 (> d1). The second ground electrode 6 is opposed to the first ground electrode 5, and is located at a distance d2 from the discharge electrode portion 31b to the left side in the figure. That is, the discharge electrode portion 31b
It is located between the first ground electrode 5 and the second ground electrode 6. In other words, the distance between the second ground electrode 6 and the resin molding 4 is larger than the distance between the first ground electrode 5 and the resin molding 4. The air pipe 12 is disposed on the left side of the resin molded part 4 and at a position where the air A blows toward the charged object 11 between the widely formed resin molded part 4 and the second ground electrode 6. . In other words, the air A passes through the vicinity of the discharge electrode portion 31b and blows into the charged object 11.
【００１６】上記構成において、図１に示すスイッチ２
１がオンにされると、交流電源２０の出力電圧１００Ｖ
が昇圧トランス２２により、例えば、７ｋＶに昇圧され
て高圧電極３（中心導体２ａ）に印加される。この高圧
電極３に印加された高電圧に印加された高電圧は、静電
結合作用により図２（ｂ）に示す結合螺旋部３１ａを介
して放電電極部３１ｂに印加される。In the above configuration, the switch 2 shown in FIG.
1 is turned on, the output voltage of the AC power supply 20 is 100 V
Is boosted to, for example, 7 kV by the step-up transformer 22 and applied to the high-voltage electrode 3 (center conductor 2 a). The high voltage applied to the high voltage applied to the high voltage electrode 3 is applied to the discharge electrode part 31b via the coupling spiral part 31a shown in FIG.
【００１７】これにより、放電電極部３１ｂと第１の接
地電極５および第２の接地電極６との間に絶縁破壊が生
じてコロナ放電が発生し、周囲の空気が正イオンと負イ
オンにイオン化される。従って、帯電物体１１の帯電電
荷の極性に応じていずれかの極性のイオンが帯電物体１
１に引き寄せられて帯電物体１１の帯電電荷と結合する
ことにより、帯電電荷が中和され、帯電物体が除電され
る。As a result, dielectric breakdown occurs between the discharge electrode portion 31b and the first and second ground electrodes 5 and 6, corona discharge occurs, and the surrounding air is ionized into positive ions and negative ions. Is done. Therefore, ions of any polarity depending on the polarity of the charge of the charged object 11
1 and is combined with the charged charge of the charged object 11, thereby neutralizing the charged charge and discharging the charged object.
【００１８】また、放電電極部３１ｂと帯電物体１１と
の距離が長く除電効果が低い場合には、図示しないコン
プレッサよりエアＡがエアパイプ１２に供給される。こ
れにより、エアＡが帯電物体１１へ向けて吹き出され
る。このとき、エアＡは、放電電極部３１ｂの先端の近
傍の空間、言い換えれば、イオン濃度の高い空間を通過
するため、効率的にイオンが帯電物体１１へ吹き付けら
れる。When the distance between the discharge electrode portion 31b and the charged object 11 is long and the static elimination effect is low, air A is supplied to the air pipe 12 from a compressor (not shown). Thereby, the air A is blown toward the charged object 11. At this time, since the air A passes through a space near the tip of the discharge electrode portion 31b, in other words, a space having a high ion concentration, ions are efficiently blown to the charged object 11.
【００１９】以上説明したように、上述した一実施形態
による除電器によれば、第２の接地電極６と樹脂成形部
４との距離を大きくとっているので、エアＡがイオン濃
度の高い空間を通過するため、除電効果を高めることが
できる。As described above, according to the static eliminator according to the above-described embodiment, since the distance between the second ground electrode 6 and the resin molded portion 4 is large, the air A is in a space having a high ion concentration. Therefore, the static elimination effect can be enhanced.
【００２０】[0020]
【発明の効果】以上説明したように、本発明によれば、
第２の接地電極と樹脂成形部との間の距離を大きくとっ
てあるので、エア吹付手段から帯電物体へ吹き付けられ
るエアが、放電電極の近傍のイオン濃度が高い空間を通
過する。従って、本発明によれば、イオン濃度が高い空
気が帯電物体に吹き付けられるので、除電効果を高める
ことができるという効果が得られる。As described above, according to the present invention,
Since the distance between the second ground electrode and the resin molding is large, the air blown from the air blowing means to the charged object passes through the space near the discharge electrode where the ion concentration is high. Therefore, according to the present invention, since air having a high ion concentration is blown onto the charged object, the effect of increasing the charge eliminating effect can be obtained.
【図面の簡単な説明】[Brief description of the drawings]
【図１】 本発明の一実施形態による除電器の構成を示
す図である。FIG. 1 is a diagram showing a configuration of a static eliminator according to an embodiment of the present invention.
【図２】 図１に示す除電電極３０の構成を示す図であ
る。FIG. 2 is a diagram showing a configuration of a static elimination electrode 30 shown in FIG.
【図３】 図２に示す電極ユニット３１の構成を示す斜
視図である。FIG. 3 is a perspective view showing a configuration of an electrode unit 31 shown in FIG.
【図４】 従来の除電器に用いられる除電電極１の構成
を示す図である。FIG. 4 is a diagram showing a configuration of a static elimination electrode 1 used in a conventional static eliminator.
【図５】 従来の除電器の欠点を説明する図である。FIG. 5 is a diagram for explaining the drawbacks of the conventional static eliminator.
３ 高圧電極 ５ 第１の接地電極 ６ 第２の接地電極 ８ 絶縁部材 １１ 帯電物体 １２ エアパイプ ３０ 除電電極 ３１ 電極ユニット ３１ａ 結合螺旋部 ３１ｂ 放電電極部 Reference Signs List 3 High voltage electrode 5 First ground electrode 6 Second ground electrode 8 Insulating member 11 Charged object 12 Air pipe 30 Static elimination electrode 31 Electrode unit 31a Coupling spiral part 31b Discharge electrode part
Claims (2)
に前記樹脂成形部に収容され、かつ帯電物体の上方に位
置しており、静電結合により前記高電圧が印加される放
電電極と、 前記放電電極および前記樹脂成形部の近傍に配設されか
つ接地された第１の接地電極と、 前記１の接地電極に対して前記放電電極を挟んで対向す
る位置であって、自身と前記樹脂成形部との間の距離
が、前記第１の接地電極と前記樹脂成形部との間の距離
より大となる位置に配設された第２の接地電極と、 前記放電電極と前記第２の接地電極との間を通過し、か
つ前記放電電極の先端の近傍を通過する、前記帯電物体
へ向かう方向へエアを吹き付けるエア吹付手段とを具備
することを特徴とする除電器。1. A high-voltage electrode to which a high voltage is applied, a resin molded part accommodating the high-voltage electrode, and a tip part is accommodated in the resin molded part so as to protrude from a lower surface of the resin molded part. A discharge electrode positioned above the charged object and to which the high voltage is applied by electrostatic coupling; and a first ground electrode disposed near the discharge electrode and the resin molded part and grounded. And a position facing the first ground electrode with the discharge electrode interposed therebetween, wherein a distance between the first ground electrode and the resin molding portion is between the first ground electrode and the resin molding portion. And a second ground electrode disposed at a position larger than the distance between the discharge electrode and the second ground electrode, and passing near the tip of the discharge electrode. Air blowing means for blowing air in the direction toward the object Discharger, characterized in that the Bei.
記導体の他部が前記放電電極とされ、前記螺旋状の部分
に絶縁部材を介して前記高圧電極が貫通されてなる電極
ユニットとを具備することを特徴とする請求項１に記載
の除電器。2. An electrode unit in which a part of a conductor is formed in a spiral shape, the other part of the conductor is used as the discharge electrode, and the high-voltage electrode is penetrated through the spiral part via an insulating member. The static eliminator according to claim 1, comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05719298A JP3670132B2 (en) | 1998-03-09 | 1998-03-09 | Static eliminator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05719298A JP3670132B2 (en) | 1998-03-09 | 1998-03-09 | Static eliminator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11260589A true JPH11260589A (en) | 1999-09-24 |
| JP3670132B2 JP3670132B2 (en) | 2005-07-13 |
Family
ID=13048633
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP05719298A Expired - Lifetime JP3670132B2 (en) | 1998-03-09 | 1998-03-09 | Static eliminator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3670132B2 (en) |
-
1998
- 1998-03-09 JP JP05719298A patent/JP3670132B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP3670132B2 (en) | 2005-07-13 |
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