JPH11201792A - 流量検出素子および流量センサ - Google Patents

流量検出素子および流量センサ

Info

Publication number
JPH11201792A
JPH11201792A JP10004856A JP485698A JPH11201792A JP H11201792 A JPH11201792 A JP H11201792A JP 10004856 A JP10004856 A JP 10004856A JP 485698 A JP485698 A JP 485698A JP H11201792 A JPH11201792 A JP H11201792A
Authority
JP
Japan
Prior art keywords
diaphragm
heat generating
generating portion
flow rate
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10004856A
Other languages
English (en)
Japanese (ja)
Inventor
Tomoya Yamakawa
智也 山川
Masahiro Kawai
正浩 河合
Yutaka Ohashi
豊 大橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10004856A priority Critical patent/JPH11201792A/ja
Priority to DE1998138647 priority patent/DE19838647B4/de
Publication of JPH11201792A publication Critical patent/JPH11201792A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
JP10004856A 1998-01-13 1998-01-13 流量検出素子および流量センサ Pending JPH11201792A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10004856A JPH11201792A (ja) 1998-01-13 1998-01-13 流量検出素子および流量センサ
DE1998138647 DE19838647B4 (de) 1998-01-13 1998-08-25 Flußmeßelement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10004856A JPH11201792A (ja) 1998-01-13 1998-01-13 流量検出素子および流量センサ

Publications (1)

Publication Number Publication Date
JPH11201792A true JPH11201792A (ja) 1999-07-30

Family

ID=11595330

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10004856A Pending JPH11201792A (ja) 1998-01-13 1998-01-13 流量検出素子および流量センサ

Country Status (2)

Country Link
JP (1) JPH11201792A (de)
DE (1) DE19838647B4 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012207925A (ja) * 2011-03-29 2012-10-25 Denso Corp 熱式空気流量計

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004038988B3 (de) * 2004-08-10 2006-01-19 Siemens Ag Strömungssensor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4472239A (en) * 1981-10-09 1984-09-18 Honeywell, Inc. Method of making semiconductor device
US5291781A (en) * 1991-04-12 1994-03-08 Yamatake-Honeywell Co., Ltd. Diaphragm-type sensor
JPH0755523A (ja) * 1993-08-20 1995-03-03 Tokico Ltd 流量センサ
DE19605180A1 (de) * 1996-02-13 1997-08-14 Daimler Benz Ag Anemometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012207925A (ja) * 2011-03-29 2012-10-25 Denso Corp 熱式空気流量計

Also Published As

Publication number Publication date
DE19838647B4 (de) 2008-01-10
DE19838647A1 (de) 1999-07-22

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