JPH11201792A - 流量検出素子および流量センサ - Google Patents
流量検出素子および流量センサInfo
- Publication number
- JPH11201792A JPH11201792A JP10004856A JP485698A JPH11201792A JP H11201792 A JPH11201792 A JP H11201792A JP 10004856 A JP10004856 A JP 10004856A JP 485698 A JP485698 A JP 485698A JP H11201792 A JPH11201792 A JP H11201792A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- heat generating
- generating portion
- flow rate
- flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10004856A JPH11201792A (ja) | 1998-01-13 | 1998-01-13 | 流量検出素子および流量センサ |
DE1998138647 DE19838647B4 (de) | 1998-01-13 | 1998-08-25 | Flußmeßelement |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10004856A JPH11201792A (ja) | 1998-01-13 | 1998-01-13 | 流量検出素子および流量センサ |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH11201792A true JPH11201792A (ja) | 1999-07-30 |
Family
ID=11595330
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10004856A Pending JPH11201792A (ja) | 1998-01-13 | 1998-01-13 | 流量検出素子および流量センサ |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPH11201792A (de) |
DE (1) | DE19838647B4 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012207925A (ja) * | 2011-03-29 | 2012-10-25 | Denso Corp | 熱式空気流量計 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004038988B3 (de) * | 2004-08-10 | 2006-01-19 | Siemens Ag | Strömungssensor |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4472239A (en) * | 1981-10-09 | 1984-09-18 | Honeywell, Inc. | Method of making semiconductor device |
US5291781A (en) * | 1991-04-12 | 1994-03-08 | Yamatake-Honeywell Co., Ltd. | Diaphragm-type sensor |
JPH0755523A (ja) * | 1993-08-20 | 1995-03-03 | Tokico Ltd | 流量センサ |
DE19605180A1 (de) * | 1996-02-13 | 1997-08-14 | Daimler Benz Ag | Anemometer |
-
1998
- 1998-01-13 JP JP10004856A patent/JPH11201792A/ja active Pending
- 1998-08-25 DE DE1998138647 patent/DE19838647B4/de not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012207925A (ja) * | 2011-03-29 | 2012-10-25 | Denso Corp | 熱式空気流量計 |
Also Published As
Publication number | Publication date |
---|---|
DE19838647B4 (de) | 2008-01-10 |
DE19838647A1 (de) | 1999-07-22 |
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