JPH11189288A - Tabular member storage container - Google Patents

Tabular member storage container

Info

Publication number
JPH11189288A
JPH11189288A JP9361322A JP36132297A JPH11189288A JP H11189288 A JPH11189288 A JP H11189288A JP 9361322 A JP9361322 A JP 9361322A JP 36132297 A JP36132297 A JP 36132297A JP H11189288 A JPH11189288 A JP H11189288A
Authority
JP
Japan
Prior art keywords
outer box
hook
upper lid
lever
box body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9361322A
Other languages
Japanese (ja)
Inventor
Yoshihiro Kiyono
良浩 清野
Mitsuhiro Endo
光弘 遠藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Silicon Corp
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Silicon Corp
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Silicon Corp, Mitsubishi Materials Corp filed Critical Mitsubishi Materials Silicon Corp
Priority to JP9361322A priority Critical patent/JPH11189288A/en
Publication of JPH11189288A publication Critical patent/JPH11189288A/en
Pending legal-status Critical Current

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  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Closures For Containers (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a locking structure for improving operativity at the time of opening/closing an upper lid by locking the upper lid with an outer box body, unlocking and pushing up the upper lid by lever control. SOLUTION: The tabular member storage container comprises an outer box body 3 and an upper lid 4 put over an upper part of the outer box body 3. Engaging protrusions 17 are provided respectively on opposite positions on an outer side wall of an opening periphery of the upper lid 4. A hook lever member comprising a pair of hooks 9 including engaging recesses 11 to be engaged with the engaging protrusions 17 respectively and a lever 10 including a finger hooking part 15 are respectively provided on the outer box body 3. The lever 10 rotatably supports the hooks 9 and an end is rotatably supported on the outer box body 3. The finger hooking part 15 of the lever 10 is pulled outward from a state (a), thereby canceling engagement between the hook 9 and the upper lid 4, and at this time a lower face of the engaging recess 11 pushes up the engaging protrusion 17.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明の属する技術分野】本発明は、複数の半導体ウェ
ーハ（以下、ウェーハという）、ディスク、若しくは基
盤などの板状部材を保管したり、運搬するのに用いて好
適な、収納容器に関し、特に、上蓋と外箱本体との係止
構造に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a storage container suitable for storing and transporting a plurality of plate members such as semiconductor wafers (hereinafter, referred to as "wafers"), disks, and substrates. And a locking structure between the upper lid and the outer box body.

【０００２】[0002]

【従来の技術】ウェーハはシリコン等の単結晶インゴッ
トを軸直角方向に薄くスライスして得られるが、これは
薄くて脆く、しかも汚染を極端に嫌うため、その搬送に
は充分な配慮が必要である。すなわち、ウェーハをクリ
ーンな状態で輸送するために、ウェーハをウェーハ収納
インラインバスケット（内箱）に入れた状態でウェーハ
収納容器（輸送用ウェーハ出荷ボックス）に収納し、こ
れに、上蓋を被せて気密状態に封じ込め、さらに、ウェ
ーハ収納容器の外部を包装し衝撃を緩和する緩衝材とと
ともに段ボール梱包して、輸送する。このように、ウェ
ーハ収納容器は、一般に、前記内箱を収納する外箱本体
と、外箱本体を封じ込める上蓋とで構成されており、内
部をクリーンな状態に常に保つためには、外箱本体と上
蓋との接合部分を完全にシールする必要がある。そし
て、このようなウェーハ収納用容器においては、上蓋を
外箱本体に固定することと、簡単な操作で上蓋の外箱本
体への係止を解除することが共に要求される。2. Description of the Related Art A wafer is obtained by slicing a single crystal ingot of silicon or the like thinly in a direction perpendicular to the axis, but this is thin and brittle, and extremely dislikes contamination. is there. In other words, in order to transport the wafers in a clean state, the wafers are stored in a wafer storage container (transportation wafer shipping box) with the wafers placed in a wafer storage in-line basket (inner box), and the upper lid is put on the wafer and airtight. It is sealed in a state, and is further packed in a corrugated cardboard together with a cushioning material for wrapping the outside of the wafer container and cushioning the impact, and then transported. As described above, the wafer storage container generally includes the outer box main body that stores the inner box, and the upper lid that seals the outer box main body. It is necessary to completely seal the joint between the cover and the upper lid. In such a wafer storage container, it is required both to fix the upper lid to the outer box main body and to release the locking of the upper lid to the outer box main body by a simple operation.

【０００３】ここで、ウェーハを整然と収納して搬送す
ることのできる、従来のウェーハ収納容器としては、例
えば図１２ないし図１９に示すようなものが知られてい
る（特開平５−６３０６６号公報）。すなわち、図１２
は従来の係止構造を備えるウェーハ収納容器の破断正面
図、図１３は図１２の側面図、図１４は図１２のＢ部拡
大詳細図、図１５は上蓋の正面図、図１６は図１５のＣ
−Ｃ線断面図、図１７は係止構造を示すフック部の正面
図、図１８は図１７のＤ−Ｄ線断面図、図１９は上蓋を
閉じる際のフックの作用を示す図１８と同様の図であ
る。Here, as a conventional wafer storage container capable of storing and transporting wafers in an orderly manner, for example, the one shown in FIGS. 12 to 19 is known (Japanese Patent Laid-Open No. 5-63066). ). That is, FIG.
13 is a cutaway front view of a conventional wafer storage container having a locking structure, FIG. 13 is a side view of FIG. 12, FIG. 14 is an enlarged detailed view of a portion B of FIG. 12, FIG. 15 is a front view of an upper cover, and FIG. C
17 is a front view of the hook portion showing the locking structure, FIG. 18 is a cross-sectional view taken along the line DD of FIG. 17, and FIG. 19 is the same as FIG. 18 showing the function of the hook when closing the upper lid. FIG.

【０００４】ウェーハ収納容器は、図１２および図１３
に示すように、外箱１０１と外箱１０１内に収納される
内箱１０２を含んで構成されている。外箱１０１は、外
箱本体１０１Ａと上蓋１０１Ｂとで構成され、上蓋１０
１Ｂは外箱本体１０１Ａの上端開口部に被せられて外箱
本体１０１Ａに係止されるが、両者の間にはパッキン１
０３が介在するため、図示のように上蓋１０１Ｂを閉じ
た状態では外箱１０１内は密閉状態に保たれる。また、
内箱１０２は、図１３に示すように、複数枚のウェーハ
Ｗを整然と収容するものであって、これの上部は開口
し、その相対向する一対の側壁１０２ａ，１０２ａの内
側には縦方向に長い複数のリブ１０２ｂがウェーハＷの
配列方向（図１２の紙面垂直方向）に適当なピッチで突
設されており、これらのリブ１０２ｂの間には複数の収
納溝が形成されている。そして、各ウェーハＷは、側壁
１０２ａ，１０２ａにそれぞれ形成された相対向する一
対の収納溝に嵌め込まれて整然と収容される。FIGS. 12 and 13 show wafer storage containers.
As shown in the figure, the outer box 101 and the inner box 102 housed in the outer box 101 are included. The outer case 101 includes an outer case main body 101A and an upper cover 101B.
1B is covered with the upper end opening of the outer box main body 101A and is locked to the outer box main body 101A.
As the upper cover 101B is closed as shown in the drawing, the inside of the outer box 101 is kept in a closed state because the upper cover 101B is interposed. Also,
As shown in FIG. 13, the inner box 102 is for accommodating a plurality of wafers W in an orderly manner. The upper part of the inner box 102 is open, and the inner side of the pair of opposed side walls 102 a is vertically arranged inside. A plurality of long ribs 102b protrude at an appropriate pitch in the arrangement direction of the wafers W (a direction perpendicular to the paper surface of FIG. 12), and a plurality of storage grooves are formed between the ribs 102b. Each of the wafers W is fitted into a pair of opposed storage grooves formed on the side walls 102a and 102a, respectively, and is stored in an orderly manner.

【０００５】ところで、上蓋１０１Ｂの開口周縁部に
は、図１４に詳細に示すように、内外二重壁を構成する
内側壁１１１および外側壁１１２が形成されている。ま
た、外箱本体１０１Ａの開口周縁部には、同じく内外二
重壁を構成する内側壁１１３および外側壁１１４が形成
されている。図示のように、外箱本体１０１Ａの上端開
口部に上蓋１０１Ｂが被せられて係止されている状態に
おいては、上蓋１０１Ｂと外箱本体１０１Ａの各外側壁
１１２，１１４は互いに嵌合しており、嵌合状態にある
両外側壁１１２，１１４と上蓋１０１Ｂ、外箱本体１０
１Ａの各内側壁１１１，１１３とで囲まれる空間には前
記パッキン１０３が介在し、このパッキン１０３のシー
ル作用によって上蓋１０１Ｂと外箱本体１０１Ａとの接
合部から収納容器内への外気の浸入が防止されている。[0005] By the way, as shown in detail in FIG. 14, an inner side wall 111 and an outer side wall 112 constituting an inner / outer double wall are formed at the periphery of the opening of the upper lid 101B. Further, an inner side wall 113 and an outer side wall 114, which also form an inner / outer double wall, are formed on the periphery of the opening of the outer box main body 101A. As shown in the drawing, in a state where the upper lid 101B is covered and locked on the upper end opening of the outer box main body 101A, the outer walls 112 and 114 of the outer lid main body 101A are fitted with each other. , The two outer walls 112 and 114 in the fitted state, the upper lid 101B, and the outer box body 10
The packing 103 is interposed in the space surrounded by the inner side walls 111 and 113 of 1A, and the sealing action of the packing 103 prevents outside air from entering the storage container from the joint between the upper lid 101B and the outer box main body 101A. Has been prevented.

【０００６】ここで、上蓋１０１Ｂの係止構造につい
て、図１５ないし図１９を参照して説明する。１５図に
示すように、上蓋１０１Ｂの左右側方には、開口周縁部
から一体的に垂下する一対のフック１１６，１１６が相
対向して形成されており、各フック１１６，１１６の両
端部には係止片１１７，１１７が形成され、中央部には
矩形の操作口１１８が穿設されている。一方、図１７な
いし図１９に示すように、外箱本体１０１Ａの前記フッ
ク１１６に対応する部位には、フック１１６が嵌まり込
むべき矩形凹部１２１が形成されており、外箱本体１０
１Ａの開口周縁部には前記フック１１６の係止片１１
７，１１７の頂部が係合すべき係止具１２２，１２２が
突設されている。なお、各係止具１２２には、下方に向
って広がる傾斜面１２２ａが形成されている。また、外
箱本体１０１Ａの係止具１２２，１２２の下方位置に
は、図１８に示すように、上蓋１０１Ｂが係止状態にあ
るときにフック１１６の係止片１１７，１１７の裏面の
中間部に当接する突起１２３，１２３が突設されてい
る。Here, the locking structure of the upper cover 101B will be described with reference to FIGS. As shown in FIG. 15, on the left and right sides of the upper lid 101B, a pair of hooks 116, 116 hanging down integrally from the peripheral edge of the opening are formed facing each other. Are formed with locking pieces 117, 117, and a rectangular operation port 118 is formed in the center. On the other hand, as shown in FIGS. 17 to 19, a rectangular recess 121 into which the hook 116 is to be fitted is formed in a portion corresponding to the hook 116 of the outer case main body 101 </ b> A.
The locking piece 11 of the hook 116 is provided on the periphery of the opening 1A.
Locking members 122, 122 with which the tops of 7, 117 are to be engaged are projected. In addition, each locking tool 122 is formed with an inclined surface 122a that spreads downward. As shown in FIG. 18, when the upper lid 101B is in the locked state, the intermediate portion of the back surface of the locking pieces 117, 117 of the hook 116 is located below the locking tools 122, 122 of the outer box body 101A. The projections 123, 123 that come into contact with are provided.

【０００７】上記構成のウェーハ収納容器において、上
蓋１０１Ｂを閉じるには、図１９に示すように、上蓋１
０１Ｂを外箱本体１０１Ａの上端開口部に被せ、上蓋１
０１Ｂを下方へ押圧すればよい。すると、図１９に実線
にて示すように、上蓋１０１Ｂの各フック１１６はその
下端縁が外箱本体１０１Ａの係止具１２２の斜面１２２
ａに当接し、該斜面１２２ａに沿って滑ることによって
フック１１６は外方へ押し広げられる。そして、フック
１１６の下端縁が係止具１２２から外れた後は、図１９
に鎖線にて示すように、フック１１６はその裏面が係止
具１２２に当接することによってさらに押し広げられ、
各係止片１１７の上端縁が係止具１２２を通過すると同
時にフック１１６は弾性力で元の位置まで戻り、このと
き各係止片１１７の上端が係止具１２２に係合するた
め、上蓋１０１Ｂは外箱本体１０１Ａに被せられて係止
される。In the wafer container having the above-described structure, the upper cover 101B is closed as shown in FIG.
01B over the opening at the upper end of the outer box main body 101A.
01B may be pressed downward. Then, as shown by a solid line in FIG. 19, each hook 116 of the upper lid 101B has its lower end edge formed by the slope 122 of the locking member 122 of the outer box main body 101A.
a, and the hook 116 is pushed outward by sliding along the slope 122a. Then, after the lower edge of the hook 116 is disengaged from the locking tool 122, FIG.
As shown by a dashed line in FIG. 3, the hook 116 is further expanded by the back surface of the hook 116 abutting against the locking member 122.
At the same time as the upper edge of each locking piece 117 passes through the locking tool 122, the hook 116 returns to its original position by elastic force. At this time, the upper end of each locking piece 117 engages with the locking tool 122, 101B is locked by being put on the outer case body 101A.

【０００８】次に、上蓋１０１Ｂを開ける場合には、図
１８に示すように、上蓋１０１Ｂの各フック１１６の下
端部を外方から内方へ向って力で押し込めば良い。する
と、フック１１６の各係止片１１７は、図１８に鎖線に
て示すように、外箱本体１０１Ａ側の突起１２３を支点
として回動するため、係止片１１７の係止具１２２との
係合が解除される。その後、上蓋１０１Ｂを上方へ持ち
上げれば、上蓋１０１Ｂを外箱本体１０１Ａから取外す
ことができる。上述のようなフック１１６を内方へ押し
込む作業は、内側から外側に向って押し広げる作業に比
べて力をかけ易いため、上蓋１０１Ｂと外箱本体１０１
Ａとの係止の解除を作業性よく行うことができる。Next, when opening the upper lid 101B, as shown in FIG. 18, the lower end of each hook 116 of the upper lid 101B may be pushed in from the outside to the inside by force. Then, as shown by a chain line in FIG. 18, each locking piece 117 of the hook 116 rotates about the projection 123 on the outer box main body 101 </ b> A as a fulcrum, so that the locking piece 117 engages with the locking tool 122. Is canceled. Thereafter, by lifting the upper lid 101B upward, the upper lid 101B can be removed from the outer box main body 101A. The work of pushing the hook 116 inward as described above is easier to apply force than the work of pushing the hook 116 inward from the inside to the outside.
Release of the lock with A can be performed with good workability.

【０００９】[0009]

【発明が解決しようとする課題】しかしながら、上記従
来のものは、上蓋を外箱本体に固定することと、簡単な
操作で上蓋の外箱本体への係止を解除できるが、上蓋を
外箱本体から取外す（上蓋を開ける）ことは容易ではな
い。すなわち、上記従来技術のものでは、上蓋を開ける
ためには、フックの部分が元に戻らないように手で押え
ながら同時に上蓋を持ち上げる必要があり、作業性が悪
い。特に、温度差が生じたときや長時間にわたる経過後
に、収納容器内外の圧力差が生じて、上蓋が外箱本体に
吸引され上蓋を容易には持ち上げれない場合には、２名
の作業員が必要になる危惧がある。また、単なるフック
止めによる係止構造なので、上蓋と外箱本体との接合部
を圧縮密閉する力が弱いという問題点もある。さらに、
温度変化や気圧変化により、外箱本体がその内方に収縮
した場合には、外箱本体と上蓋との間に隙間が生じ易
く、シール性が悪くなるという問題点もある。However, in the above-mentioned prior art, the upper lid is fixed to the outer box main body, and the locking of the upper lid to the outer box main body can be released by a simple operation. It is not easy to remove from the main body (open the top lid). That is, in the above-mentioned prior art, in order to open the upper lid, it is necessary to simultaneously lift the upper lid while pressing the hook so as not to return to the original position, which is inferior in workability. In particular, when a temperature difference occurs or after a long period of time, a pressure difference between the inside and outside of the storage container occurs, and the upper lid is sucked into the outer box body and the upper lid cannot be easily lifted, two workers are required. May be required. In addition, since the locking structure is simply hooked, there is also a problem that the force for compressing and sealing the joint between the upper lid and the outer box body is weak. further,
When the outer case body shrinks inward due to temperature change or atmospheric pressure change, a gap is easily formed between the outer case body and the upper lid, and there is also a problem that the sealing property is deteriorated.

【００１０】本発明は、上記従来技術の有する問題点に
鑑みてなされたものであり、レバー操作により上蓋と外
箱本体との係止、そして両者の係止解除および上蓋の持
ち上げを共に行って、上蓋を開ける際の作業性の向上を
図ることができるとともに、上蓋と外箱本体との接合部
の圧縮性が良く、シール性の高い板状部材収納容器を提
供することを目的としている。SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art. The lever is operated to lock the upper cover and the outer box main body, release both locks, and lift the upper cover together. It is an object of the present invention to provide a plate-like member storage container which can improve the workability when opening the upper lid, has good compressibility at a joint portion between the upper lid and the outer box main body, and has a high sealing property.

【００１１】[0011]

【課題を解決するための手段】上記目的を達成するため
の本発明は、板状部材、若しくは板状部材を収納した内
箱を収容する外箱本体と、前記外箱本体の上部に被せら
れて接合される上蓋との間を係止状態に保つ板状部材収
納容器において、前記上蓋の側壁の少なくとも一対の相
対向する部位に係合突起がそれぞれ設けられ、一方、前
記外箱本体の側壁の少なくとも一対の相対向する部位に
それぞれ設けられた、前記上蓋の係合突起とそれぞれ係
合可能な係合凹部を備えたフック部と、該フック部をそ
れぞれ支持し、かつ一端部が前記外箱本体に回動自在に
支持されて、前記フック部を前記上蓋に係合させるとと
もに前記係合を解除するためのレバー部とからなるフッ
ク・レバー部材を備え、前記それぞれのレバー部が前記
外箱本体側に向けてそれぞれ押し込まれることにより、
前記フック部と前記上蓋とを係合せしめるように構成
し、さらに、前記レバー部の下端部を一部延長して、前
記係合状態で前記外箱本体との間に開操作用の間隙を形
成する指掛け部をそれぞれ設けたことを特徴とするもの
である。According to the present invention, there is provided an outer box body for accommodating a plate-like member or an inner box containing the plate-like member, and an upper part of the outer box body. In the plate-like member storage container that keeps a locked state between the upper lid and the upper lid, engagement projections are provided on at least a pair of opposing portions of a side wall of the upper lid, while a side wall of the outer box body is provided. A hook portion provided at each of at least a pair of opposed portions and having an engagement concave portion engageable with the engagement protrusion of the upper lid, and each of the hook portions supports the hook portion, and one end portion is provided with the outer portion. A hook lever member rotatably supported by the box main body and comprising a lever portion for engaging the hook portion with the upper lid and releasing the engagement, wherein each of the lever portions is To the box body side By being pushed respectively,
The hook portion and the upper lid are configured to be engaged with each other, and further, the lower end portion of the lever portion is partially extended to form a gap for the opening operation between the outer box main body in the engaged state. The present invention is characterized in that finger hooks to be formed are provided.

【００１２】また、本発明におけるウェーハ収納容器
は、前記上蓋は平面視したときの輪郭が矩形形状とさ
れ、その下端側面に前記矩形形状に沿う直線部が形成さ
れ、前記外箱本体は、前記上蓋に対応してその平面視が
矩形形状とされると共に、その形状の四隅に上下方向に
延在する脚部が設けられているものにおいて、前記係合
突起を前記上蓋の側壁の少なくとも一対の相対向する部
位の直線部にほぼ全域にわたってそれぞれ設け、一方、
前記上蓋の係合突起とそれぞれ係合可能な係合凹部を備
えた前記フック部は、上部の係合部周辺が前記上蓋の側
壁直線部のほぼ全域にわたる幅を有し、かつ、前記フッ
ク・レバー部材の前記外箱本体への支持部、操作部及び
指掛け部の幅を前記外箱本体の脚部間におさまるように
狭めたことを特徴とするものでもよい。Further, in the wafer container according to the present invention, the upper lid has a rectangular shape when viewed in a plan view, and a linear portion along the rectangular shape is formed on a lower side surface thereof. The upper cover has a rectangular shape in plan view corresponding to the upper lid, and a leg portion extending in the vertical direction is provided at each of the four corners of the shape. Provided over almost the entire area in the straight portion of the opposing part,
The hook portion having an engagement concave portion engageable with each of the engagement protrusions of the upper cover has a width around an entire area of a side wall linear portion of the upper cover around an upper engagement portion, and The width of the supporting portion of the lever member to the outer box main body, the operation portion, and the finger hook portion may be narrowed so as to fit between the legs of the outer box main body.

【００１３】さらに、前記上蓋の係合突起及び前記外箱
本体のフック・レバー部材は、相対向する２面にそれぞ
れ設けられてもよいし、あるいは、相対向する二対の面
の合計４面にそれぞれ設けられてもよい。Further, the engaging projection of the upper lid and the hook lever member of the outer box body may be provided on two opposing surfaces, respectively, or a total of four opposing surfaces may be provided. May be provided respectively.

【００１４】さらにまた、前記指掛け部は、前記側壁と
ほぼ平行な直線状断面、前記側壁に対して中央部が外向
きに膨出する曲面状断面、あるいは、前記指掛け部がほ
ぼ指形状に等しい凹凸断面の何れの断面形状で設けられ
てもよい。Further, the finger hook portion is a straight section substantially parallel to the side wall, a curved cross section whose central portion bulges outward with respect to the side wall, or the finger hook portion is substantially equal to a finger shape. It may be provided in any cross-sectional shape of the uneven cross section.

【００１５】そして、前記それぞれのフック・レバー部
材は、前記外箱本体に対して着脱可能に取り付けられ、
また、フック部とレバー部とに分割可能に構成されたも
のとするのがよい。The respective hook and lever members are detachably attached to the outer box body,
Further, it is preferable that the hook portion and the lever portion are configured to be splittable.

【００１６】以下、本発明の作用について説明する。請
求項１に記載の発明では、上蓋を外箱本体に係止させる
には、上蓋を外箱本体に被せた後上蓋の係合突起にフッ
ク部の係合凹部を引っ掛けて、少なくとも一対のフック
・レバー部材のレバー部をそれぞれ本体側へ向けて押し
つけることにより、フック部は若干の回転運動を伴って
下向きにそれぞれ移動し、それらの係合凹部が上蓋の係
合突起を引き下げるようにして係合する。一方、上蓋の
外箱本体との係止を解除するには、少なくとも一対のレ
バー部に設けられた指掛け部をそれぞれ外向きに引く
と、フック部は逆方向への若干の回転運動を伴って外箱
本体からそ離れるように上向きに移動し、それらの係合
凹部が上蓋の係合突起から外れる。この際、フック部の
係合凹部下面が上蓋の係合突起下面を押し上げるので、
外箱本体に密着していた上蓋を上方へ若干量押し上げる
ことができ、結果的に、上蓋の外箱本体への密着力を解
くことができる。最後に、上蓋を小さな力で持ち上げれ
ば外箱本体から外れて、上蓋を開くことができる。Hereinafter, the operation of the present invention will be described. According to the first aspect of the present invention, in order to lock the upper lid to the outer box main body, the upper lid is put on the outer box main body, and then the engaging recess of the hook portion is hooked on the engaging protrusion of the upper lid, so that at least one pair of hooks is provided. By pushing the levers of the lever members toward the main body, the hooks move downward with a slight rotational movement, and the engaging recesses of the hooks pull down the engaging projections of the upper lid. Combine. On the other hand, in order to release the locking of the upper lid with the outer box main body, when the finger hooks provided on at least the pair of levers are respectively pulled outward, the hooks are slightly rotated in the opposite direction. It moves upward away from the outer box main body, and their engagement recesses are disengaged from the engagement protrusions of the upper lid. At this time, the lower surface of the engaging recess of the hook pushes up the lower surface of the engaging protrusion of the upper lid,
The upper lid that has been in close contact with the outer box body can be pushed upward by a small amount, and as a result, the adhesion of the upper lid to the outer box body can be released. Finally, if the upper lid is lifted with a small force, it can be detached from the outer box body and the upper lid can be opened.

【００１７】このように、本発明では、少なくとも一対
のフック・レバー部材により外箱本体を閉じている密着
力を除き、すなわち、少なくとも一対のフック・レバー
部材で上蓋を持ち上げ、上蓋と外箱本体との密着状態を
解除するもので、作業性と確実性が改善される。特に、
温度差が生じたときや長時間にわたる経過後に、収納容
器内外の圧力差が生じて、従来のように上蓋が外箱本体
に吸引されて上蓋が開きにくいことがあっても、少なく
とも一対のレバー部の操作により上蓋を容易に持ち上げ
て、収納容器内外の気圧差をなくすことができる。ま
た、本発明は、フック・レバー部材を使用することで、
フック部及びレバー部を外箱本体近傍の係止位置に保持
して思わぬ干渉を防止できるので、従来の単なるフック
止めの方法と比較して、上蓋と外箱本体との接合部の密
着力を確実に維持することができ、しかも、係合解除の
操作は、指掛け部と本体側壁との間に形成された操作ス
ペースを利用して容易に実施できる。As described above, according to the present invention, the tightness of closing the outer box body by at least one pair of hook lever members is removed, that is, the upper cover is lifted by at least one pair of hook lever members, and the upper cover and the outer box body are removed. The workability and reliability are improved by releasing the close contact with the work. Especially,
Even when a temperature difference occurs or after a long time elapses, a pressure difference between the inside and outside of the storage container occurs, and the upper lid is sucked into the outer box body and the upper lid is difficult to open as in the related art, at least a pair of levers. By operating the unit, the upper lid can be easily lifted to eliminate the pressure difference between the inside and outside of the storage container. In addition, the present invention, by using a hook lever member,
Since the hook and lever can be held in the locking position near the outer box body to prevent unexpected interference, the adhesion between the upper lid and the outer box body can be compared with the conventional simple hooking method. Can be reliably maintained, and the operation of disengagement can be easily performed using the operation space formed between the finger hook and the main body side wall.

【００１８】請求項２に記載の発明では、上述した請求
項１に記載の発明に加えて、係止突起と係止凹部との係
合部を側壁の相対向する部位の直線部のほぼ全域にわた
って設けるようにしたので、上蓋と外箱本体との接合部
は、係合部の全域にわたってほぼ均等な密着力を確実に
維持することができるようになり、シール性をさらに向
上させることができる。また、前記フック・レバー部材
の前記外箱本体への支持部及び操作部を前記外箱本体の
脚部間におさまるように幅を狭めたので、係止時には操
作部が脚部間に納まって無用の干渉から保護され、係止
状態の維持を確実なものとする。According to a second aspect of the present invention, in addition to the first aspect of the present invention, the engaging portion between the locking projection and the locking concave portion is formed in substantially the entire region of the straight portion of the side wall facing each other. As a result, the joint between the upper lid and the outer box main body can reliably maintain a substantially uniform contact force over the entire area of the engaging portion, and the sealing performance can be further improved. . Further, since the width of the support portion and the operation portion of the hook / lever member to the outer box main body is narrowed so as to fit between the legs of the outer box main body, the operation portion fits between the legs during locking. It is protected from unnecessary interference and ensures that the locked state is maintained.

【００１９】なお、請求項１又は請求項２のような収納
容器は、相対向する一対の面の合計２面に設けても充分
なシール性を得られるが、相対向する二対の面の合計４
面に設けることにより、そのシール性はより一層向上す
る。そして、指掛け部分の断面形状は、前記側壁とほぼ
平行な直線状断面でも充分な操作性を得られるが、前記
側壁に対して中央部が外向きに膨出する曲面状断面やほ
ぼ指形状に等しい凹凸断面とすれば、より一層の操作性
の向上が得られる。In the storage container according to the first or second aspect, a sufficient sealing property can be obtained even if the storage container is provided on a total of two surfaces of a pair of opposite surfaces. 4 in total
By providing it on the surface, the sealing performance is further improved. In addition, the cross-sectional shape of the finger hook portion can obtain sufficient operability even with a linear cross section substantially parallel to the side wall, but has a curved cross section or a substantially finger shape in which a central portion bulges outward with respect to the side wall. If the concavo-convex cross sections are equal, operability can be further improved.

【００２０】なおまた、それぞれのフック・レバー部材
は、前記外箱本体に対して着脱可能に取り付けられ、そ
して、このフック・レバー部材として、フック部及びレ
バー部に分割可能に構成されたものを採用することによ
り、係止構造を構成する各部材の清掃作業が容易にな
る。Each of the hook and lever members is detachably attached to the main body of the outer box, and the hook and lever members are configured to be divided into a hook portion and a lever portion. By adopting, the cleaning work of each member constituting the locking structure becomes easy.

【００２１】[0021]

【発明の実施の形態】次に、本発明の数例の実施形態に
ついて、図面を参照して説明する。なお、以下に説明す
る板状部材収納容器の実施形態は本発明の数例にすぎ
ず、本発明はその特許請求の範囲を逸脱しない範囲内に
おいて、設計変更等の変形例を含むものであり、また、
その収納品としては、ウェーハの他にも、ディスク、基
盤などのような他の板状部材にも適用できる。図１は本
発明に係わる収納容器の外観を示す斜視図、図２は図１
の分解斜視図、図３は図１を係止部側からみた正面図、
図４は図３の側面図である。Next, several embodiments of the present invention will be described with reference to the drawings. The embodiment of the plate-shaped member storage container described below is only a few examples of the present invention, and the present invention includes modifications such as design changes without departing from the scope of the claims. ,Also,
As the stored product, in addition to the wafer, other plate-like members such as a disk and a base can be applied. FIG. 1 is a perspective view showing the appearance of a storage container according to the present invention, and FIG.
FIG. 3 is a front view of FIG. 1 as viewed from the locking portion side,
FIG. 4 is a side view of FIG.

【００２２】先ず、図１及び図２に示すように、本発明
の板状部材収納容器は、外箱１と外箱１内に収納される
内箱２を含んで構成され、一方の外箱１は、外箱本体３
とこの外箱本体３に対して開閉可能な上蓋４とに分割さ
れる。外箱本体３には、平面視がほぼ矩形断面の開口部
の全周にわたってコ字状断面のシール溝５が設けられ、
シール部材としてのパッキン６がシール溝５に嵌合して
配設されている。外箱本体３は四隅のコーナー部に設け
られた上下方向の４本の脚部３ａで自立し、対向する一
対の側面の脚部３ａ，３ａ間には本体凹部３ｂが設けら
れ、この凹部を形成する側壁上部にフック・レバー部材
７が着脱可能に取り付けられると共に、他の対向する側
面には、収納容器を持ち運ぶ時に使用する搬送凹部３ｃ
が設けられている。なお、図中の符号の８は複数のウェ
ーハ押さえ溝８ａを備えたウェーハ押さえを示し、上蓋
４の内側に着脱可能に取り付けられており、また、内箱
２は、複数枚のウェーハを整然とした状態で収納するた
めに、ウェーハ押さえ溝８ａと対向する収納溝２ａが複
数設けられたものであり、基本的には図１２および図１
３のものと同一なので、その説明は省略する。なおま
た、以下に説明する本発明の収納容器は、複数枚のウェ
ーハを収容する内箱を外箱本体に収納するものに限ら
ず、複数枚のウェーハＷを内箱を介さずに、直接外箱本
体内に収納するウェーハ収納容器にも適用できる。First, as shown in FIGS. 1 and 2, the plate-like member storage container of the present invention includes an outer box 1 and an inner box 2 stored in the outer box 1, and one of the outer boxes 1 is the outer box body 3
And an upper lid 4 that can be opened and closed with respect to the outer box body 3. The outer box body 3 is provided with a seal groove 5 having a U-shaped cross section over the entire periphery of the opening having a substantially rectangular cross section in plan view.
A packing 6 serving as a sealing member is provided so as to fit in the sealing groove 5. The outer box body 3 is self-supporting with four vertical legs 3a provided at four corners, and a main body concave portion 3b is provided between a pair of opposing side surface legs 3a. A hook / lever member 7 is detachably attached to an upper portion of the side wall to be formed, and a transfer recess 3c used when carrying the storage container is provided on the other opposing side surface.
Is provided. Note that reference numeral 8 in the drawing denotes a wafer holder provided with a plurality of wafer holding grooves 8a, which is detachably attached to the inside of the upper lid 4, and the inner box 2 has an orderly plurality of wafers. In order to store in a state, a plurality of storage grooves 2a facing the wafer holding grooves 8a are provided.
Since it is the same as that of No. 3, its description is omitted. In addition, the storage container of the present invention described below is not limited to the case in which the inner box accommodating a plurality of wafers is accommodated in the outer box main body, and the plurality of wafers W can be directly removed without passing through the inner box. The present invention can also be applied to a wafer storage container stored in the box body.

【００２３】さて、上述したフック・レバー部材７は、
それぞれ外箱本体側から見た正面図を（ａ）に、そして
その右側面図を（ｂ）に示した図５及び図６から分かる
ように、フック部９とレバー部１０との２部品に分割可
能である。ほぼ長方形の板状部材であるフック部９は、
係合凹部１１，１１と、レバー部１０を回動自在に支持
する軸受け部１２，１２，１２とを備え、各軸受け部１
２には後述するレバー部１０の連結軸１３が着脱可能と
なるよう軸通路１２ａが設けられている。なお、係合凹
部１１は、外側の開口面積が若干大となるように穿設さ
れている。一方、レバー部１０は、同じくほぼ長方形の
板状部材に連結軸１３及び取付軸１４の２本の軸が平行
に設けられると共に、下端部の中央付近を一部下方に向
けて延長した指掛け部１５を備えている。取付軸１４
は、フック・レバー部材７を外箱本体３に回動自在に支
持させるための軸で、その一端（図６（ａ）の左側）は
円筒状の軸１４ａとしてあるが、他端は、図６（ｂ）に
示すように、円筒の周面を平行に切り欠いた欠円断面の
軸１４ｂとしてある。この取付軸１４は、外箱本体３の
対向する側壁のそれぞれに一対ずつ設けられた軸穴１６
ａ，１６ｂ（図７参照）を貫通して支持される。なお、
一対の軸穴は、一方の軸穴１６ｂだけに部分的に切り欠
いた軸通路を設けてレバー部１０の軸１４ｂが通り抜け
可能としてもよいし、あるいは、両方の軸穴に軸通路を
設けたものを採用してもよい。なおまた、取付軸１４
は、その両端を軸１４ａと同様の円筒状とし、かつ外箱
本体３に設けられる軸穴形状として軸通路を設けた一対
の軸穴１６ｂ，１６ｂを採用して、フック・レバー部材
７の着脱を容易にしてもよい。Now, the above-mentioned hook lever member 7
As can be seen from FIG. 5 and FIG. 6 in which the front view as viewed from the outer box body side is shown in FIG. 5A and the right side view in FIG. 5B is shown in FIG. 5 and FIG. Can be divided. The hook portion 9, which is a substantially rectangular plate-like member,
Each of the bearings 1 includes an engagement recess 11, and bearings 12, 12, 12 for rotatably supporting the lever 10.
2 is provided with a shaft passage 12a so that a connecting shaft 13 of the lever unit 10 described later can be detached. The engaging recess 11 is formed so as to have a slightly larger outside opening area. On the other hand, the lever portion 10 is a finger hook portion in which two axes of a connection shaft 13 and a mounting shaft 14 are provided in parallel on a substantially rectangular plate-like member, and a portion near the center of the lower end portion is partially downwardly extended. 15 are provided. Mounting shaft 14
Is a shaft for rotatably supporting the hook lever member 7 on the outer box main body 3. One end (the left side in FIG. 6A) is a cylindrical shaft 14a, while the other end is shown in FIG. As shown in FIG. 6 (b), the axis is a shaft 14b having a circular cross section obtained by cutting the peripheral surface of the cylinder in parallel. This mounting shaft 14 has a pair of shaft holes 16 provided on each of the opposed side walls of the outer box body 3.
a, 16b (see FIG. 7). In addition,
A pair of shaft holes may be provided with a partially cut-out shaft passage only in one shaft hole 16b so that the shaft 14b of the lever portion 10 can pass through, or a shaft passage may be provided in both shaft holes. A thing may be adopted. In addition, the mounting shaft 14
Adopts a pair of shaft holes 16b, 16b having both ends in the same cylindrical shape as the shaft 14a and having a shaft passage formed in the outer box body 3 so that the hook / lever member 7 can be attached and detached. May be facilitated.

【００２４】図２に示すように、平面視がほぼ矩形状の
上蓋４には、相対向する開口部周縁側壁にそれぞれ一対
の係合突起１７，１７が突設されている。この係合突起
１７，１７は、それぞれがフック部９の係合凹部１１，
１１に入り込んで係止される形状となっており、ここで
は係合凹部１１よりやや小さい矩形状とし、その外周面
は外側へ向けて若干広がる傾斜面にしてある。また、上
蓋４の開口部周縁には、外箱本体３のシール溝５に対向
するコ字状断面のシール溝１８（図９（ｄ）参照）が設
けられている。このシール溝１８は、外箱本体３のシー
ル溝５を形成する両側壁の外側に嵌合するように、その
大きさを設定してある。なお、この係合突起１７は、図
示したように二つに分割されたものでもよいし、あるい
は連続したひとつとしたり、三つまたはそれ以上に分割
したものでもよく、収納容器の大きさなどの条件を考慮
して適宜選択し、これに合わせてフック部９の係合凹部
１１も変更すればよい。As shown in FIG. 2, a pair of engaging projections 17 are formed on the upper lid 4 having a substantially rectangular shape in a plan view, on opposite peripheral side walls of the opening. The engagement projections 17 are respectively provided with the engagement recesses 11 of the hook 9.
11 and is locked here. Here, it has a rectangular shape slightly smaller than the engagement recessed portion 11, and its outer peripheral surface is an inclined surface that spreads slightly outward. A seal groove 18 (see FIG. 9D) having a U-shaped cross section facing the seal groove 5 of the outer box main body 3 is provided on the periphery of the opening of the upper lid 4. The size of the seal groove 18 is set so that the seal groove 18 is fitted to the outside of both side walls forming the seal groove 5 of the outer box body 3. The engaging projection 17 may be divided into two as shown, or may be a continuous one, or may be divided into three or more. It may be appropriately selected in consideration of the conditions, and the engagement recess 11 of the hook 9 may be changed accordingly.

【００２５】ところで、フック部９とレバー部１０との
結合は、レバー部１０の連結軸１３を両端部及び中央部
の３カ所でフック部９の軸受け部１２に軸通路１２ａか
ら押し込むようにして嵌合させるもので、一般的にはフ
ック部９として樹脂の成形部品が使用されることから、
自らの弾性により軸通路１２ａが開いて連結軸１３の通
過が可能になる。いったん連結軸１３が通り抜けると、
開いた軸通路１２ａは弾性により復帰するため、連結軸
１３は軸受け部１２から抜けることなく内部を回動する
ことができ、従って、フック部９とレバー部１０とは相
対的に所定の範囲内での回動が可能に結合される。The connection between the hook 9 and the lever 10 is made by pushing the connecting shaft 13 of the lever 10 into the bearing 12 of the hook 9 from the shaft passage 12a at three positions, both ends and a center. Since a resin molded part is generally used as the hook part 9,
The shaft passage 12a is opened by its own elasticity, so that the connection shaft 13 can pass through. Once the connecting shaft 13 passes,
Since the opened shaft passage 12a returns by elasticity, the connecting shaft 13 can rotate inside without falling out of the bearing portion 12, so that the hook portion 9 and the lever portion 10 are relatively within a predetermined range. Are pivotably coupled.

【００２６】こうして一体となったフック・レバー部材
７は、レバー部１０の取付軸１４を外箱本体３の軸穴１
６ａ，１６ｂに嵌合させることで、外箱本体３に対して
回動自在に支持される。このとき、最初に円筒状の取付
軸１４ａを軸穴１６ａに嵌合させ、続いて欠円断面の軸
部１４ｂの平行面が、すなわち軸部の小径部が切り欠い
た軸通路を通過するようにして押し込むことにより、樹
脂製の外箱本体３が有する弾性により軸通路が開くの
で、軸部１４ｂは軸通路を通り抜けて軸穴１６ｂに嵌合
することができる。なお、欠円断面の軸部１４ｂの平行
面が切り欠いた軸通路をようやく通過するように軸通路
を設定したことで、フック・レバー部材７が外箱本体３
から容易に外れることはない。The hook / lever member 7 integrated as described above is mounted on the shaft hole 1 of the outer box body 3 with the mounting shaft 14 of the lever portion 10.
By being fitted to 6a, 16b, it is supported rotatably with respect to the outer box main body 3. At this time, first, the cylindrical mounting shaft 14a is fitted into the shaft hole 16a, and then the parallel surface of the shaft portion 14b having a partially circular section, that is, the small-diameter portion of the shaft portion passes through the shaft passage. By pressing the shaft, the shaft passage is opened by the elasticity of the outer case body 3 made of resin, so that the shaft portion 14b can pass through the shaft passage and fit into the shaft hole 16b. By setting the shaft passage so that the parallel surface of the shaft portion 14b having the cut-out circular section finally passes through the cut-out shaft passage, the hook / lever member 7 is connected to the outer box main body 3.
It does not come off easily.

【００２７】以下、上述した係止構造の作用をフック・
レバー部材７による係止操作及び係止解除操作とともに
説明する。図８の断面図は係止状態を示したもので、上
蓋４が外箱本体３の上端開口部に被せされて係止されて
いる状態においては、上蓋４のシール溝が、外箱本体３
のシール溝５の外側に嵌合しており、外箱本体３のシー
ル溝５に配設されたパッキン６を押圧することにより、
パッキン６のシール作用によって上蓋４と外箱本体３と
の接合部から収納容器内への外気の浸入が防止されてい
る。すなわち、パッキン６はシール溝５から上面が突出
した状態で設置されているので、上蓋４側のシール溝上
面（底面）がこれを押圧することでパッキン６を圧縮変
形させて接合部をシールするのである。このような係止
状態では、レバー部１０及び指掛け部１５は脚部３ａ間
の本体凹部３ｂに納まっている。The operation of the above-described locking structure will now be described with reference to hooks.
A description will be given together with the locking operation and the unlocking operation by the lever member 7. The cross-sectional view of FIG. 8 shows the locked state. In a state where the upper lid 4 is locked by being put on the upper end opening of the outer box body 3, the seal groove of the upper lid 4 is engaged with the outer box body 3.
By pressing the packing 6 disposed in the seal groove 5 of the outer box main body 3,
The sealing action of the packing 6 prevents outside air from entering the storage container from the joint between the upper lid 4 and the outer box body 3. That is, since the packing 6 is installed with the upper surface protruding from the seal groove 5, the seal groove upper surface (bottom surface) of the upper lid 4 presses the packing groove 6 to compress and deform the packing 6 to seal the joint. It is. In such a locked state, the lever 10 and the finger hook 15 are accommodated in the main body recess 3b between the legs 3a.

【００２８】図８の係止状態を解除するためには、指掛
け部１５と外箱本体３の側壁との間に指を差し入れ、レ
バー部１０を矢印Ｆの方向へ引けばよい。この時、レバ
ー部１０の下端部を延長した指掛け部１５と、円形のウ
ェーハ形状に合わせて内向きに傾斜する外箱本体３の側
壁との間には、充分な操作スペースを確保できる。この
ようにしてレバー部１０を引くと、係止部は図９に示す
（ａ）ないし（ｄ）の順に変化し、係止状態が解除され
て上蓋４を開くことができる。そこで、これを簡単に説
明すると、（ａ）は係止状態にあり、取付軸１４を支点
として回転したレバー部１１の連結軸１３がフック部９
を引き下げ、この結果、係止凹部１１の上面が係止突起
１７を引き下げているのが分かる。（ｂ）はフック・レ
バー部材７が取付軸１４を支点として係止位置から若干
解除方向（反時計方向）に回転移動した状態を示してお
り、係止凹部１１の下面が係止突起１７の下面に接触し
始めている。（ｃ）はさらに回転移動した状態を示して
おり、レバー部１０の操作により係止凹部１１の下面が
係止突起１７の下面を押し上げるので、接合部で密着し
ていた上蓋４は、持ち上げられるようにして外箱本体３
からわずかに離れる。このような状態になれば、（ｄ）
に示すように、上箱４を手で容易に持ち上げて開くこと
ができる。なお、上蓋４を被せて外箱本体３に係止する
場合は、上述した解除操作と逆の順序で操作すればよ
く、係合突起１７に係合凹部１１を引っかけた後、レバ
ー部１０を外箱本体側へ向けて押圧すればよい。8 can be released by inserting a finger between the finger hook 15 and the side wall of the outer box body 3 and pulling the lever 10 in the direction of arrow F. At this time, a sufficient operation space can be secured between the finger hook 15 having the lower end of the lever 10 extended and the side wall of the outer box body 3 inclined inward in accordance with the shape of the circular wafer. When the lever portion 10 is pulled in this manner, the locking portion changes in the order of (a) to (d) shown in FIG. 9, the locked state is released, and the upper lid 4 can be opened. Therefore, a brief description of this will be given. (A) is in a locked state, and the connecting shaft 13 of the lever portion 11 rotated about the mounting shaft 14 is connected to the hook portion 9.
As a result, it can be seen that the upper surface of the locking recess 11 has lowered the locking projection 17. (B) shows a state in which the hook / lever member 7 has been rotated slightly in the releasing direction (counterclockwise) from the locking position with the mounting shaft 14 as a fulcrum. It is starting to touch the underside. (C) shows the state of further rotation and movement, and the lower surface of the locking concave portion 11 pushes up the lower surface of the locking projection 17 by operating the lever portion 10, so that the upper lid 4 that has been in close contact with the joint portion is lifted. Outer box body 3
Slightly away from. If this happens, (d)
As shown in FIG. 7, the upper box 4 can be easily lifted and opened by hand. When the upper cover 4 is put on and locked to the outer box main body 3, the operation may be performed in the reverse order of the above-described release operation. What is necessary is just to press toward the outer box main body side.

【００２９】このように、本実施形態の係止構造では、
レバー部１０を操作するだけで容易に係止及び係止解除
の操作をすることができ、しかも係止解除の操作の中で
上蓋４を持ち上げて密着状態の接合部を切り離すので、
特に容器内外の圧力差があった場合には、接合部の密着
が少しでも解除されることによって圧力差が解消され、
上蓋４を開く作業性が著しく向上する。また、係止状態
では、フック・レバー部材７が上蓋４を引き下げた状態
に保持するので、温度変化や圧力変化が生じた場合であ
ってもパッキン６に対し適当な圧縮力を維持できるよう
になり、良好なシール性を確保できる。As described above, in the locking structure of the present embodiment,
Locking and unlocking operations can be easily performed only by operating the lever portion 10. In addition, since the upper lid 4 is lifted up during the unlocking operation to separate the bonded joints,
In particular, when there is a pressure difference between the inside and outside of the container, the pressure difference is resolved by releasing the adhesion of the joint even a little,
The workability of opening the upper lid 4 is significantly improved. Further, in the locked state, the hook / lever member 7 holds the upper lid 4 in a lowered state, so that even if a temperature change or a pressure change occurs, the packing 6 can maintain an appropriate compressive force. And good sealing properties can be secured.

【００３０】そして、上述したフック・レバー部材７
は、フック部９及びレバー部１０が外箱本体近傍の係止
位置に保持され、特に係止解除操作を行うレバー部１０
及び指掛け部１５が外箱本体３の本体凹部３ｂに格納さ
れるような位置になるので、搬送時など思わぬ干渉をひ
きおこして無用の上蓋開放がなされるのを防止でき、係
止の確実性も向上する。The hook / lever member 7 described above
The hook portion 9 and the lever portion 10 are held in a locking position near the outer box main body, and in particular, the lever portion 10 for performing an unlocking operation.
In addition, since the finger hook portion 15 is located at a position where it can be stored in the main body concave portion 3b of the outer box main body 3, it is possible to prevent the unnecessary opening of the upper cover due to unexpected interference such as at the time of transportation, and to ensure the locking. Also improve.

【００３１】また、これまで説明した実施形態では、平
面視がほぼ矩形の直線部の中央部を部分的に係止してい
たが、図１１に示した他の実施形態のように、係止部を
直線部のほぼ全域にわたって設けてもよい。この場合、
係止突起１７とこれに係合可能な係合凹部１１が設けら
れたフック部９の上部のみを幅方向に延長し、残るフッ
ク部９の下部、すなわちレバー部１０との連結部やレバ
ー部１０及び指掛け部１５はこれまでどおり、外箱本体
３の脚部３ｂ間に納まる幅にしておく。このようにすれ
ば、接合部における係止部の領域が増加するので、シー
ル性の向上が期待できる。Further, in the embodiment described so far, the center of the linear portion which is substantially rectangular in plan view is partially locked. However, as in the other embodiments shown in FIG. The portion may be provided over substantially the entire area of the straight portion. in this case,
Only the upper part of the hook part 9 provided with the locking projection 17 and the engaging concave part 11 engageable with it is extended in the width direction, and the lower part of the remaining hook part 9, that is, the connection part with the lever part 10 and the lever part As before, the width of the finger 10 and the finger hook 15 is set to fit between the legs 3b of the outer box body 3. By doing so, the area of the engaging portion at the joint increases, so that an improvement in sealing performance can be expected.

【００３２】さらに、これまで説明した実施形態では、
相対向する２面に一対のフック・レバー部材７及び係合
突起１７をそれぞれ設けたものであったが、図示を省略
した他の実施形態では、相対向する２対の面の合計４面
に、すなわち平面視がほぼ矩形の全ての直線部に対し
て、中央部に、あるいは直線部のほぼ全体にわたってフ
ック・レバー部材７及び係合突起１７を設けてもよく、
これによって係止状態を保持する領域が増すので、より
一層のシール性向上が期待できる。Further, in the embodiments described so far,
Although a pair of hook / lever members 7 and engagement projections 17 are provided on two opposing surfaces, respectively, in other embodiments not shown, a total of four opposing surfaces are provided on a total of four surfaces. That is, the hook / lever member 7 and the engaging projection 17 may be provided at the center portion or almost the entire straight portion with respect to all the straight portions that are substantially rectangular in plan view.
This increases the area in which the locked state is maintained, so that further improvement in sealing performance can be expected.

【００３３】また、上述した実施形態の指掛け部１５
は、レバー部１０の下端部を外箱本体３の側壁とほぼ平
行な平板状に単に延長しただけのものであったが、この
指掛け部１５の断面形状には多くの変形例が可能であ
る。例えば、図１０（ａ）に示したように、中央部が側
壁から外向きに膨出する曲面状の断面としてもよいし、
あるいは図１０（ｂ）に示すように、ほぼ指の形に合わ
せた凹凸断面形状としてもよい。このような断面形状の
指掛け部１５とすることにより、側壁との間の操作スペ
ースがさらに増加するので、係止解除の操作性はより一
層向上する。Further, the finger hook 15 of the above-described embodiment is used.
Is a simple extension of the lower end of the lever portion 10 into a flat plate substantially parallel to the side wall of the outer box body 3, but many modifications can be made to the cross-sectional shape of the finger hook portion 15. . For example, as shown in FIG. 10A, a central section may have a curved cross section that bulges outward from a side wall,
Alternatively, as shown in FIG. 10 (b), an uneven cross-sectional shape substantially matching the shape of a finger may be used. By providing the finger hook 15 having such a cross-sectional shape, the operation space between the side wall and the side wall is further increased, so that the operability of unlocking is further improved.

【００３４】ところで、本発明のフック・レバー部材７
は、外箱本体３に対して着脱可能であるとともに、フッ
ク部９とレバー部１０との間も分割可能に構成されてい
る。この結果、ウェーハ収納容器の使用を繰り返し、容
器の清掃や洗浄が必要となった場合など、各々を分解し
た状態で処理できる。このため、各部品を隅々まで確実
に清掃・洗浄処理することができ、極端に汚染を嫌うウ
ェーハ容器には最適の構造となる。By the way, the hook and lever member 7 of the present invention
Is detachable from the outer box main body 3 and is also configured to be able to be divided between the hook portion 9 and the lever portion 10. As a result, when the use of the wafer storage container is repeated and the cleaning or cleaning of the container is required, the processing can be performed in a state where each is disassembled. For this reason, each part can be reliably cleaned and cleaned to every corner, and the structure is optimal for a wafer container that is extremely resistant to contamination.

【００３５】[0035]

【発明の効果】本発明は、以上説明したとおりに構成さ
れているので、以下に記載するような効果を奏する。請
求項１に記載の発明は、一対のフック・レバー部材によ
り上蓋を外箱本体に係止して容器内外を確実に密封し、
また、係止解除の操作と同時に上蓋の外箱本体への密着
力を解くことができる。このように、一対のフック・レ
バー部材により外箱本体を閉じている密着力を除き、す
なわち、一対のフック・レバー部材により上蓋を持ち上
げ、上蓋と外箱本体との密着状態を解除することがで
き、作業性と確実性が改善される。特に、温度差が生じ
たときや長時間にわたる経過後に、収納容器内外の圧力
差が生じて、従来のように上蓋が外箱本体に吸引され上
蓋が開きにくい場合でも、レバー部に設けた指掛け部の
操作で上蓋を容易に持ち上げて、収納容器内外の気圧差
をなくすことができる。また、本発明は、フック・レバ
ー方式を採用したので、フック部をレバー部により係止
位置に確実に保持できて、従来の単なるフック止めの方
法と比較して、より強い密着力で上蓋と外箱本体との接
合部を圧縮密閉することができ、さらに、フック・レバ
ー部材の操作部を本体脚部間の凹部に格納できるので誤
操作が抑制される。そして、操作部となるレバー部材が
本体脚部間に配置されていても、指掛け部を設けたこと
で本体側壁との間の操作スペースが増し、特に係止解除
操作時の操作性が著しく向上する。請求項２に記載の発
明は、上蓋および外箱本体の接合部における係合部の領
域が増加するので、温度変化や気圧変化があっても良好
なシール性を維持できる。請求項３に記載の発明は、上
蓋を外箱本体に確実に係止し、温度変化や気圧変化を受
けても良好なシール性を維持し、さらに、請求項４に記
載の発明は、接合部における係合部の領域が増すので、
より一層良好なシール性を維持できる。請求項５、請求
項６及び請求項７に記載の発明は、何れの場合も係止解
除操作時の作業スペースが増し、作業性を向上させる。
請求項８及び請求項９に記載の発明は、フック・レバー
部材を外箱本体から取り外して二つの部品に分割するこ
とが可能になるので、それぞれの部品を確実に清掃・洗
浄処理することができる。Since the present invention is configured as described above, it has the following effects. In the invention according to claim 1, the upper lid is locked to the outer box main body by a pair of hook and lever members to securely seal the inside and outside of the container,
In addition, the adhesion of the upper lid to the outer box body can be released simultaneously with the operation of releasing the lock. As described above, it is possible to remove the close contact force closing the outer box body by the pair of hook lever members, that is, lift the upper cover by the pair of hook lever members, and release the close contact state between the upper cover and the outer box body. Workability and reliability are improved. In particular, when a temperature difference occurs or after a long time elapses, a pressure difference between the inside and outside of the storage container occurs, so that the upper lid is sucked into the outer box body and the upper lid is difficult to open as in the conventional case, the finger hook provided on the lever portion. By operating the unit, the upper lid can be easily lifted, and the pressure difference between the inside and outside of the storage container can be eliminated. In addition, since the present invention employs a hook-and-lever system, the hook portion can be securely held at the locking position by the lever portion, and the upper lid can be more strongly adhered to the upper lid as compared with a conventional simple hooking method. The joint with the outer box main body can be compressed and hermetically sealed, and the operation section of the hook / lever member can be stored in the recess between the main body legs, so that erroneous operation is suppressed. And even if the lever member that becomes the operation part is arranged between the main body legs, the provision of the finger hook part increases the operation space between the main body side wall and the operability especially during the unlocking operation is remarkably improved. I do. According to the second aspect of the present invention, the area of the engagement portion at the joint between the upper lid and the outer box main body increases, so that good sealing performance can be maintained even if there is a temperature change or a pressure change. According to a third aspect of the present invention, the upper lid is securely locked to the outer box main body, and a good sealing property is maintained even under a temperature change or a pressure change. Since the area of the engagement part in the part increases,
Even better sealing performance can be maintained. In any of the fifth, sixth, and seventh aspects of the present invention, the work space at the time of the lock release operation is increased, and the workability is improved.
According to the inventions described in claims 8 and 9, since the hook and lever member can be separated from the outer box body and divided into two parts, the respective parts can be reliably cleaned and cleaned. it can.

【図面の簡単な説明】[Brief description of the drawings]

【図１】 本発明に係わる板状部材収納容器の外観を示
す斜視図である。FIG. 1 is a perspective view showing an external appearance of a plate-like member storage container according to the present invention.

【図２】 本発明に係わる板状部材収納容器の構成を示
す分解斜視図である。FIG. 2 is an exploded perspective view showing a configuration of a plate-like member storage container according to the present invention.

【図３】 図１の板状部材収納容器を係止部側から見た
正面図である。FIG. 3 is a front view of the plate-shaped member storage container of FIG. 1 as viewed from a locking portion side.

【図４】 図３の右側面図である。FIG. 4 is a right side view of FIG.

【図５】 本発明の板状部材収納容器のフック部を示す
図で、（ａ）は外箱本体側から見た正面図、（ｂ）は
（ａ）の右側面図である。5A and 5B are diagrams showing a hook portion of the plate-shaped member storage container of the present invention, wherein FIG. 5A is a front view as viewed from the outer box body side, and FIG. 5B is a right side view of FIG.

【図６】 本発明の板状部材収納容器のレバー部を示す
図で、（ａ）は外箱本体側から見た正面図、（ｂ）は
（ａ）の右側面図である。FIGS. 6A and 6B are views showing a lever portion of the plate-shaped member storage container of the present invention, wherein FIG. 6A is a front view as viewed from the outer box body side, and FIG. 6B is a right side view of FIG.

【図７】 本発明の板状部材収納容器の外箱本体を示す
半断面図である。FIG. 7 is a half sectional view showing an outer box main body of the plate-shaped member storage container of the present invention.

【図８】 本発明の板状部材収納容器の係止状態を示す
断面図である。FIG. 8 is a cross-sectional view showing a locked state of the plate-shaped member storage container of the present invention.

【図９】 係止部の動作を順に示す図で、（ａ）は係止
状態を示す要部断面図、（ｂ）はフック部による上蓋の
押し下げが解除された状態を示す要部断面図、（ｃ）は
フック部が上蓋を押し上げ始めた状態を示す要部断面
図、（ｄ）は上蓋が開いた状態を示す要部断面図であ
る。9A and 9B are views sequentially showing the operation of the locking portion, wherein FIG. 9A is a cross-sectional view of a main part showing a locked state, and FIG. 9B is a cross-sectional view of a main part showing a state in which the upper lid has been released from being pushed down by a hook. (C) is a cross-sectional view of a main part showing a state where the hook portion starts pushing up the upper lid, and (d) is a cross-sectional view of the main part showing a state where the upper lid is opened.

【図１０】 指掛け部の変形例を示す図で、（ａ）は中
央部が外向きに膨出する曲面状断面を示す図３のＡーＡ
線断面図、（ｂ）はほぼ指形状の凹凸断面を示す図３の
ＡーＡ線断面図である。10A and 10B are diagrams showing a modification of the finger hook portion, and FIG. 10A shows a curved cross section in which a central portion bulges outward, and FIG.
FIG. 4B is a cross-sectional view taken along the line AA of FIG. 3 showing a substantially finger-shaped uneven cross section.

【図１１】 本発明の他の実施例を示す図３と同様の図
である。FIG. 11 is a view similar to FIG. 3, showing another embodiment of the present invention.

【図１２】 従来の係止構造を備えるウェーハ収納容器
の破断正面図である。FIG. 12 is a cutaway front view of a conventional wafer storage container having a locking structure.

【図１３】 図１２の側面図である。FIG. 13 is a side view of FIG.

【図１４】 図１２のＢ部拡大詳細図である。14 is an enlarged detailed view of a portion B in FIG. 12;

【図１５】 従来の上蓋の正面図である。FIG. 15 is a front view of a conventional upper lid.

【図１６】 図１５のＣ−Ｃ線断面図である。16 is a sectional view taken along line CC of FIG.

【図１７】 従来の係止構造を示すフック部の正面図で
ある。FIG. 17 is a front view of a hook portion showing a conventional locking structure.

【図１８】 図１７のＤ−Ｄ線断面図である。18 is a sectional view taken along line DD of FIG. 17;

【図１９】 上蓋を閉じる際のフックの作用を示す図１
８と同様の図である。FIG. 19 is a view showing an operation of a hook when closing the upper lid.
FIG.

【符号の説明】[Explanation of symbols]

Ｗ ウェーハ ３ 外箱本体 ３ａ 脚部 ３ｂ 本体凹部 ４ 上蓋 ５ シール溝 ６ パッキン（シール部材） ７ フック・レバー部材 ９ フック部 １０ レバー部 １１ 係合凹部 １５ 指掛け部 １７ 係合突起 W wafer 3 Outer box body 3a Leg 3b Body recess 4 Upper lid 5 Seal groove 6 Packing (seal member) 7 Hook / lever member 9 Hook 10 Lever 11 Engagement recess 15 Finger hook 17 Engagement protrusion

Claims (9)

【特許請求の範囲】[Claims] 【請求項１】 板状部材、若しくは板状部材を収納した
内箱を収容する外箱本体と、前記外箱本体の上部に被せ
られて接合される上蓋との間を係止状態に保つ板状部材
収納容器において、 前記上蓋の側壁の少なくとも一対の相対向する部位に係
合突起がそれぞれ設けられ、 一方、前記外箱本体の側壁の少なくとも一対の相対向す
る部位にそれぞれ設けられた、前記上蓋の係合突起とそ
れぞれ係合可能な係合凹部を備えたフック部と、該フッ
ク部をそれぞれ支持し、かつ一端部が前記外箱本体に回
動自在に支持されて、前記フック部を前記上蓋に係合さ
せるとともに前記係合を解除するためのレバー部とから
なるフック・レバー部材を備え、前記それぞれのレバー
部が前記外箱本体側に向けてそれぞれ押し込まれること
により、前記フック部と前記上蓋とを係合せしめるよう
に構成し、さらに、前記レバー部の下端部を一部延長し
て、前記係合状態で前記外箱本体との間に開操作用の間
隙を形成する指掛け部をそれぞれ設けたことを特徴とす
る板状部材収納容器。1. A plate for keeping a locked state between an outer box body accommodating a plate-shaped member or an inner box accommodating the plate-shaped member, and an upper lid covered on and joined to an upper portion of the outer box body. In the shape member storage container, engagement protrusions are respectively provided on at least a pair of opposed portions of the side wall of the upper lid, while, provided on at least a pair of opposed portions of the side wall of the outer box main body, A hook portion having an engagement concave portion engageable with the engagement protrusion of the upper lid, and each of the hook portions supporting the hook portion, and one end portion rotatably supported by the outer box body, A hook lever member comprising a lever portion for engaging with the upper lid and releasing the engagement, wherein each of the lever portions is pushed toward the outer box body side, whereby the hook portion is formed. When A finger hook configured to be engaged with the upper cover, and further extending a lower end portion of the lever portion to form a gap for the opening operation with the outer box body in the engaged state. Are provided. 【請求項２】 前記上蓋は平面視したときの輪郭が矩形
形状とされ、その下端側面には前記矩形形状に沿う直線
部が形成され、 前記外箱本体は、前記上蓋に対応してその平面視が矩形
形状とされると共に、その形状の四隅に上下方向に延在
する脚部が設けられているものにおいて、 前記係合突起を前記上蓋の側壁の少なくとも一対の相対
向する部位の直線部にほぼ全域にわたってそれぞれ設
け、 一方、前記上蓋の係合突起とそれぞれ係合可能な係合凹
部を備えた前記フック部は、上部の係合部周辺が前記上
蓋の側壁直線部のほぼ全域にわたる幅を有し、かつ、前
記フック・レバー部材の前記外箱本体への支持部、操作
部及び指掛け部の幅を前記外箱本体の脚部間におさまる
ように狭めたことを特徴とする請求項１に記載の板状部
材収納容器。2. The upper lid has a rectangular shape when viewed in a plan view, and has a rectangular portion formed on a lower side surface thereof. The outer box body has a flat surface corresponding to the upper lid. In the one having a rectangular shape and provided with legs extending in the vertical direction at four corners of the shape, the engaging projection is formed by a straight portion of at least one pair of opposing portions of the side wall of the upper lid. The hook portion, which has an engagement recess that can be engaged with the engagement projection of the upper lid, has a width around the upper portion of the engagement portion substantially over the entire linear portion of the side wall of the upper lid. And a width of a support portion, an operation portion, and a finger hook portion of the hook / lever member to the outer box main body is narrowed so as to fit between the legs of the outer box main body. 2. The container according to claim 1. 【請求項３】 前記上蓋の係合突起及び前記外箱本体の
フック・レバー部材が相対向する２面にそれぞれ設けら
れたことを特徴とする請求項１又は請求項２に記載の板
状部材収納容器。3. The plate-like member according to claim 1, wherein the engagement protrusion of the upper lid and the hook lever member of the outer box main body are provided on two opposing surfaces, respectively. Storage container. 【請求項４】 前記上蓋の係合突起及び前記外箱本体の
フック・レバー部材が相対向する二対の面の合計４面に
それぞれ設けられたことを特徴とする請求項１又は請求
項２に記載の板状部材収納容器。4. The device according to claim 1, wherein the engaging projection of the upper lid and the hook lever member of the outer box main body are provided on a total of four opposing surfaces, respectively. The container for storing a plate-shaped member according to item 1. 【請求項５】 前記指掛け部が前記側壁とほぼ平行な直
線状断面に設けられたことを特徴とする請求項１から４
のいずれかに記載の板状部材収納容器。5. The device according to claim 1, wherein the finger hook is provided in a linear cross section substantially parallel to the side wall.
The plate-shaped member storage container according to any one of the above. 【請求項６】 前記指掛け部が前記側壁に対して中央部
が外向きに膨出する曲面状断面に設けられたことを特徴
とする請求項１から４のいずれかに記載の板状部材収納
容器。6. The plate-like member storage according to claim 1, wherein the finger hook portion is provided in a curved cross section in which a central portion bulges outward with respect to the side wall. container. 【請求項７】 前記指掛け部がほぼ指形状をした凹凸断
面に設けられたことを特徴とする請求項１から４のいず
れかに記載の板状部材収納容器。7. The container according to claim 1, wherein the finger hook portion is provided in a substantially finger-shaped uneven cross section. 【請求項８】 前記それぞれのフック・レバー部材が前
記外箱本体に対して着脱可能に取り付けられたことを特
徴とする請求項１から７のいずれかに記載の板状部材収
納容器。8. The container according to claim 1, wherein said hook and lever members are detachably attached to said outer box body. 【請求項９】 前記それぞれのフック・レバー部材がフ
ック部とレバー部とに分割可能に構成されたことを特徴
とする請求項１から８のいずれかに記載の板状部材収納
容器。9. The plate-like member container according to claim 1, wherein each of the hook and lever members is configured to be splittable into a hook portion and a lever portion.
JP9361322A 1997-12-26 1997-12-26 Tabular member storage container Pending JPH11189288A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9361322A JPH11189288A (en) 1997-12-26 1997-12-26 Tabular member storage container

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9361322A JPH11189288A (en) 1997-12-26 1997-12-26 Tabular member storage container

Publications (1)

Publication Number Publication Date
JPH11189288A true JPH11189288A (en) 1999-07-13

Family

ID=18473107

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9361322A Pending JPH11189288A (en) 1997-12-26 1997-12-26 Tabular member storage container

Country Status (1)

Country Link
JP (1) JPH11189288A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1434256A3 (en) * 2002-12-27 2007-03-21 Miraial Co., Ltd. Thin plate supporting container
JP2019116315A (en) * 2017-12-27 2019-07-18 株式会社吉野工業所 Hinge cap

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1434256A3 (en) * 2002-12-27 2007-03-21 Miraial Co., Ltd. Thin plate supporting container
US7357257B2 (en) 2002-12-27 2008-04-15 Miraial Co., Ltd. Thin plate supporting container
US7383955B2 (en) 2002-12-27 2008-06-10 Miraial Co., Ltd. Thin plate supporting container
US7410061B2 (en) 2002-12-27 2008-08-12 Miraial Co., Ltd. Thin plate supporting container
US7497333B2 (en) 2002-12-27 2009-03-03 Miraial Co., Ltd. Thin plate supporting container
US7520388B2 (en) 2002-12-27 2009-04-21 Miraial Co., Ltd. Thin plate supporting container
JP2019116315A (en) * 2017-12-27 2019-07-18 株式会社吉野工業所 Hinge cap

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