JPH1086086A - Base board adsorption member and its device - Google Patents
Base board adsorption member and its deviceInfo
- Publication number
- JPH1086086A JPH1086086A JP24214196A JP24214196A JPH1086086A JP H1086086 A JPH1086086 A JP H1086086A JP 24214196 A JP24214196 A JP 24214196A JP 24214196 A JP24214196 A JP 24214196A JP H1086086 A JPH1086086 A JP H1086086A
- Authority
- JP
- Japan
- Prior art keywords
- suction
- pad
- substrate
- glass substrate
- mounting table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、例えば液晶パネル
用の大型ガラス基板の検査工程に用いられる基板吸着部
材および装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate adsorbing member and an apparatus used in an inspection process of a large glass substrate for a liquid crystal panel, for example.
【０００２】[0002]
【従来の技術】最近、液晶技術の進歩にともない、液晶
パネルなどの表示素子も大型化され、これとともに、マ
スター基板と呼ばれるガラス基板の大型化も進んでい
る。このようなガラス基板は、その大きさに対して厚さ
が極めて薄く、たわみ易いものになっているが、かかる
ガラス基板についても、品質管理の上から顕微鏡などを
使用した各種の検査が行われており、これら検査を検査
装置の大型ステージ上に載置した状態で行うようになっ
ている。2. Description of the Related Art Recently, with the advancement of liquid crystal technology, display elements such as liquid crystal panels have become larger, and at the same time, glass substrates called master substrates have been increasing in size. Such a glass substrate has an extremely small thickness with respect to its size and is easy to bend. For such a glass substrate, various inspections using a microscope or the like are performed from the viewpoint of quality control. These inspections are performed with the inspection apparatus mounted on a large stage of the inspection apparatus.
【０００３】そこで、従来、特開平７−１８３３６６号
公報に開示される大型ガラス基板のエア吸着方法が考え
られている。図１１は、載置台１の表面に複数の方形の
吸着溝２ａ〜２ｄを、載置台１の中心点Ｏに対して対称
的に、適当な間隔をおいて形成し、これら複数の方形の
吸着溝２ａ〜２ｄに対して、中心点Ｏに近い吸着溝２ａ
から遠い吸着溝２ｄの順で適当なタイムラグをなして順
にエア吸着することにより、このように載置台１上に載
置されるガラス基板３全面を、載置台１面に密着させ、
安定に固定できるようにしたものである。Therefore, a method of adsorbing air on a large glass substrate disclosed in Japanese Patent Application Laid-Open No. 7-183366 has been proposed. FIG. 11 shows that a plurality of rectangular suction grooves 2a to 2d are formed on the surface of the mounting table 1 at appropriate intervals symmetrically with respect to the center point O of the mounting table 1, and the plurality of rectangular suction grooves are formed. For the grooves 2a to 2d, the suction groove 2a near the center point O
The air suction is performed in the order of the suction groove 2d in the order of the distant suction groove 2d and an appropriate time lag so that the entire surface of the glass substrate 3 thus mounted on the mounting table 1 is brought into close contact with the mounting table 1 surface,
It is designed to be fixed stably.
【０００４】[0004]
【発明が解決しようとする課題】ところが、このような
エア吸着方法によると、仮に、図１２に示すようにガラ
ス基板３に反りがあって、ガラス基板３の周縁部分が載
置台１面から僅かに浮き上がっているような場合、載置
台１面とガラス基板３面が密着状態にならず、安定した
基板検査ができないことがある。このため、エア吸着力
を増して強引にガラス基板３面を密着させようとする
と、吸着時の大きな吸引力により極めて薄く壊れやすい
ガラス基板３が破損してしまうおそれがあった。However, according to such an air suction method, if the glass substrate 3 is warped as shown in FIG. 12, the peripheral portion of the glass substrate 3 is slightly different from the surface of the mounting table 1. In such a case, the surface of the mounting table 1 and the surface of the glass substrate 3 do not come into close contact with each other, and stable substrate inspection may not be performed. For this reason, if the air suction force is increased to force the glass substrate 3 surface into close contact, the extremely thin and fragile glass substrate 3 may be damaged by a large suction force at the time of suction.
【０００５】また、最近の顕微鏡を使用した基板検査に
は、透過照明を使用して基板上の傷や埃を検出すること
が行われているが、上述した方法に適用される載置台１
では、載置台１中央部分に穴部を形成していないことか
ら、このような基板検査ができないという問題点もあっ
た。Further, in recent board inspection using a microscope, detection of scratches and dust on the board using transmitted illumination is performed. However, the mounting table 1 applied to the above-described method is used.
In this case, there is also a problem that such a board inspection cannot be performed because no hole is formed in the center of the mounting table 1.
【０００６】本発明は、上記事情に鑑みてなされたもの
で、載置台への基板を確実に吸着でき、精度の高い安定
した基板検査を実現できる基板吸着部材および装置を提
供することを目的とする。The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a substrate suction member and an apparatus capable of reliably adsorbing a substrate to a mounting table and realizing a highly accurate and stable substrate inspection. I do.
【０００７】[0007]
【課題を解決するための手段】請求項１記載の発明は、
基板吸着部を有する中空の吸着パッドと、この吸着パッ
ド弾性的に支持する弾性部材からなるパッド支持部材
と、前記吸着パッドの所定範囲での動きを可能にして該
吸着パッドを固定部材に取付ける取付け手段とにより構
成している。According to the first aspect of the present invention,
A hollow suction pad having a substrate suction portion, a pad support member made of an elastic member for elastically supporting the suction pad, and an attachment for enabling the suction pad to move within a predetermined range and mounting the suction pad to a fixed member Means.
【０００８】請求項２記載の発明は、請求項１記載にお
いて、前記取付け部材は、前記吸着パッドの動きを制限
する弾性部材を有している。請求項３記載の発明は、基
板を載置する載置台と、この載置台上に配置され、エア
吸着力を発生する基板吸着部を有する吸着パッドと、こ
の吸着パッドを支持するとともに、前記吸着パッドを前
記載置台面より上方に位置させる弾性を有する支持部材
と、前記吸着パッドの基板吸着部にエア吸着力を発生さ
せるエア駆動力を発生するエア制御手段とにより構成し
ている。According to a second aspect of the present invention, in the first aspect, the attachment member has an elastic member for restricting the movement of the suction pad. According to a third aspect of the present invention, there is provided a mounting table for mounting a substrate, a suction pad disposed on the mounting table and having a substrate suction section for generating an air suction force, supporting the suction pad, and supporting the suction pad. The pad includes a support member having elasticity for positioning the pad above the mounting table surface, and air control means for generating an air driving force for generating an air suction force to the substrate suction portion of the suction pad.
【０００９】この結果、請求項１記載の発明によれば、
基板吸着部を有する吸着パッドは、弾性部材のパッド支
持部材による支持により、所定範囲で自由に動けるよう
になっているので、基板の傾きに対してもパッド支持部
材の変形により、吸着部を吸着でき、さらにパッド支持
部材の弾性力により外れにくい状態で保持できる。As a result, according to the first aspect of the present invention,
Since the suction pad having the substrate suction portion can be freely moved within a predetermined range by supporting the elastic member by the pad support member, the suction portion is sucked by the deformation of the pad support member even with the inclination of the substrate. It can be held in a state where it is hard to come off by the elastic force of the pad support member.
【００１０】また、請求項２記載の発明によれば、基板
吸着部に基板を吸着した状態で、吸着パッドが弾性部材
に当接することにより、吸着パッドに対するバネ定数が
急激に増加して基板側の振動を抑制することができる。According to the second aspect of the present invention, when the suction pad abuts on the elastic member in a state where the substrate is suctioned by the substrate suction portion, the spring constant for the suction pad rapidly increases and the substrate side Vibration can be suppressed.
【００１１】また、請求項３記載の発明によれば、吸着
パッドを載置台面より上方に突出させ弾性的に支持する
ことにより基板に反りが生じでも基板にパッドが近接
し、かつ吸引時に基板の傾きに添うように吸着パッドが
変形して基板に密着するので、吸着部での吸着を確実に
行うことができ、基板に関する検査を安定した状態で精
度よく行うことができる。According to the third aspect of the present invention, the suction pad protrudes above the surface of the mounting table and is elastically supported, so that even if the substrate is warped, the pad is close to the substrate and the substrate is sucked. The suction pad is deformed so as to follow the inclination of the substrate and adheres to the substrate, so that the suction at the suction portion can be reliably performed, and the inspection for the substrate can be performed accurately in a stable state.
【００１２】[0012]
【発明の実施の形態】以下、本発明の実施の形態を図面
に従い説明する。 （第１の実施の形態）図１は、本発明が適用されるガラ
ス基板を吸着保持する基板吸着装置の概略構成を示して
いる。図において、１１はガラス基板１２を載置する載
置台で、この載置台１１は、長方形の枠状をなしてい
て、この長方形の枠部分にガラス基板１２を載置すると
ともに、中央部分を透孔部に形成して、いわゆる中抜き
載置台に構成している。Embodiments of the present invention will be described below with reference to the drawings. (First Embodiment) FIG. 1 shows a schematic configuration of a substrate suction device for suction holding a glass substrate to which the present invention is applied. In the figure, reference numeral 11 denotes a mounting table on which a glass substrate 12 is mounted. The mounting table 11 has a rectangular frame shape. The glass substrate 12 is mounted on the rectangular frame portion, and the central portion is transparent. A so-called hollow mounting table is formed in the hole.
【００１３】また、載置台１１には、複数の基板吸着部
材１３を設けている。この場合、基板吸着部材１３は、
載置台１１の長手方向の周縁に２個づつ、幅方向の周縁
に２個づつの合計８個を配置している。The mounting table 11 is provided with a plurality of substrate suction members 13. In this case, the substrate suction member 13
A total of eight pieces are arranged, two on the peripheral edge of the mounting table 11 and two on the peripheral edge in the width direction.
【００１４】図２は、基板吸着部材１３の概略構成の断
面図を示している。この場合、図２は、左右対称形状の
中心面から半分だけを図示したものである。図におい
て、１４は合成樹脂などで形成される中空の吸着パッド
で、この吸着パッド１４は、上方に吸着部１４１を有
し、この吸着部１４１の中央部には、中空部に連通する
穴部１４２を形成している。また、この吸着パッド１４
の上方周面に、段部１４３を形成している。FIG. 2 is a cross-sectional view of a schematic configuration of the substrate suction member 13. In this case, FIG. 2 shows only a half from the center plane of the symmetrical shape. In the drawing, reference numeral 14 denotes a hollow suction pad formed of a synthetic resin or the like. The suction pad 14 has a suction portion 141 at an upper portion, and a hole portion communicating with the hollow portion is provided at the center of the suction portion 141. 142 are formed. In addition, this suction pad 14
A step portion 143 is formed on the upper peripheral surface of.
【００１５】吸着パッド１４の中空部に僅かな間隙１６
を介して筒状のパッド支持部材１５を挿入している。こ
のパッド支持部材１５は、ゴムなどの比較的柔らかく変
形し易い弾性部材からなるもので、先端部に吸盤１５１
を形成し、この吸盤１５１面を吸着パッド１４の吸着部
１４１の裏面側に当接している。A small gap 16 is formed in the hollow portion of the suction pad 14.
, A cylindrical pad support member 15 is inserted. The pad support member 15 is made of a relatively soft and easily deformable elastic member such as rubber.
The suction cup 151 is in contact with the back surface of the suction portion 141 of the suction pad 14.
【００１６】そして、このような吸着パッド１４とパッ
ド支持部材１５を有する基板吸着部材１３は、図３に示
すように載置台１１の吸着パッド取付け部１１１に取付
けられる。この場合、吸着パッド取付け部１１１は、溝
部１１２を形成し、この溝部１１２の底面に穴部１１３
を有していて、この溝部１１２にパッド支持部材１５を
設けた吸着パッド１４を僅かな間隙１７を介して設ける
とともに、溝部１１２底面の穴部１１３をパッド支持部
材１５の中空部、吸盤１５１を介して吸着パッド１４の
吸着部１４１中央部の穴部１４２に連通するようにして
いる。The substrate suction member 13 having the suction pad 14 and the pad support member 15 is mounted on the suction pad mounting portion 111 of the mounting table 11 as shown in FIG. In this case, the suction pad mounting portion 111 forms a groove 112, and a hole 113 is formed on the bottom surface of the groove 112.
The suction pad 14 in which the pad support member 15 is provided in the groove 112 is provided through a slight gap 17, and the hole 113 on the bottom surface of the groove 112 is formed in the hollow portion of the pad support member 15, and the suction cup 151 is formed in the groove 112. The suction pad 14 communicates with the hole 142 at the center of the suction portion 141 of the suction pad 14.
【００１７】そして、吸着パッド１４の先端部に、押え
枠体１８の穴部１８１を挿通するとともに、この穴部１
８１周縁部に吸着パッド１４の段部１４３を係合するこ
とで、吸着パッド１４の抜落ちを防止して載置台１１上
に保持している。この場合、押え枠体１８の穴部１８１
と吸着パッド１４の先端部との間にも僅かな間隙２２を
形成して、吸着パッド１４の所定範囲での動きを可能に
している。また、押え枠体１８は、図示しないネジなど
により載置台１１に固定している。Then, the hole 181 of the holding frame 18 is inserted into the tip of the suction pad 14, and the hole 1
By engaging the step portion 143 of the suction pad 14 with the peripheral portion 81, the suction pad 14 is prevented from dropping off and is held on the mounting table 11. In this case, the hole 181 of the holding frame 18
A slight gap 22 is also formed between the suction pad 14 and the tip of the suction pad 14 to allow the suction pad 14 to move within a predetermined range. The holding frame 18 is fixed to the mounting table 11 with screws (not shown) or the like.
【００１８】そして、このような基板吸着部材１３を取
付けた溝部１１２底面の穴部１１３に通気管１９を連通
するとともに、電磁弁２０を介して真空ポンプ２１を接
続し、この真空ポンプ２１でのエア引きによるエア駆動
力によりパッド支持部材１５を介して吸着パッド１４の
吸着部１４１にエア吸着力を得られるようにしている。A vent pipe 19 communicates with a hole 113 on the bottom of the groove 112 on which the substrate suction member 13 is mounted, and a vacuum pump 21 is connected via an electromagnetic valve 20. An air suction force can be obtained on the suction portion 141 of the suction pad 14 via the pad support member 15 by an air driving force by air pull.
【００１９】次に、このように構成した実施の形態の動
作を説明する。いま、ガラス基板１２の検査工程におい
て、ガラス基板１２が、中抜きの載置台１１上に供給さ
れるが、この時、ガラス基板１２の周縁部が載置台１１
の長手方向および幅方向のそれぞれ周縁に設けられた基
板吸着部材１３上に位置するようにしている。Next, the operation of the embodiment configured as described above will be described. Now, in the inspection process of the glass substrate 12, the glass substrate 12 is supplied onto the hollow mounting table 11. At this time, the periphery of the glass substrate 12 is
Are located on the substrate suction members 13 provided on the peripheral edges in the longitudinal direction and the width direction, respectively.
【００２０】そして、この状態から、真空ポンプ２１で
エア引きが行われると、それぞれの基板吸着部材１３で
は、パッド支持部材１５を介して吸着パッド１４の吸着
部１４１にエア吸着力が得られ、ガラス基板１２は、載
置台１１上に吸着状態になって固定される。In this state, when air is drawn by the vacuum pump 21, each substrate suction member 13 obtains an air suction force on the suction portion 141 of the suction pad 14 via the pad support member 15. The glass substrate 12 is fixed in a suction state on the mounting table 11.
【００２１】ここで、ガラス基板１２面が全く平なら
ば、載置台１１面と平行が保たれるので、何ら問題ない
が、仮に、ガラス基板１２に反りがあるような場合、載
置台１１面と平行でなくなることがある。この場合、本
発明の基板吸着部材１３では、吸着部１４１を有する吸
着パッド１４は、その中空部に弾性部材のパッド支持部
材１５で支持されており、ガラス基板１２の反りによる
傾きに対応してパッド支持部材１５の変形により、吸着
パッド１４が載置台１１の溝部１１２との間隙１７およ
び押え枠体１８の穴部１８１と吸着パッド１４の先端部
との間隙２２の範囲で自由に傾くようになっているの
で、ガラス基板１２の反り面に対して吸着パッド１４の
吸着部１４１がガラス基板１２に対してほぼ平行にな
り、ガラス基板１２が良好に吸着され、さらにパッド支
持部材１５の弾性力により吸着の外れにくい状態で保持
される。Here, if the surface of the glass substrate 12 is completely flat, there is no problem because the surface of the mounting table 11 is kept parallel to the surface of the mounting table 11. However, if the glass substrate 12 is warped, May not be parallel. In this case, in the substrate suction member 13 of the present invention, the suction pad 14 having the suction portion 141 is supported by a pad supporting member 15 of an elastic member in its hollow portion, and corresponds to the inclination of the glass substrate 12 due to the warpage. Due to the deformation of the pad support member 15, the suction pad 14 is freely tilted within the gap 17 between the groove 112 of the mounting table 11 and the gap 22 between the hole 181 of the holding frame 18 and the tip of the suction pad 14. Therefore, the suction portion 141 of the suction pad 14 is substantially parallel to the warp surface of the glass substrate 12 with respect to the glass substrate 12, the glass substrate 12 is suctioned well, and the elastic force of the pad support member 15 Thus, it is held in a state in which the adsorption is not easily released.
【００２２】これにより、ガラス基板１２は、多少の反
りがあるような場合も、載置台１１上の複数の基板吸着
部材１３により確実に吸着して載置するようにできるの
で、反りによる焦点ズレや基板の振動ズレが防止でき、
安定した状態でガラス基板１２の検査を実施することが
できる。しかも、吸着パッド１４が載置台１１上面より
突出しているので、ガラス基板１２に反りが生じても常
に吸着パッド１４にガラス基板１２が近接して良好な吸
着力が作用する。また、ガラス基板１２を載置する載置
台１１は、中央部分を透孔部に形成した、いわゆる中抜
き載置台に構成しているので、透過照明を使用した傷や
埃の検出にも適用することができる。 （第２の実施の形態）ところで、第１の実施の形態で
は、吸着パッド１４を支持するパッド支持部材１５の変
形により吸着パッド１４が載置台１１の溝部１１２との
間隙１７の範囲で自由に傾くように構成しているが、パ
ッド支持部材１５には、ゴムなどの比較的柔らかく変形
し易い弾性部材を用いているため、仮に床面から振動が
侵入したり、クリーンルーム内のダウンブローなどによ
りガラス基板１２に振動が伝わりたわみを生じたような
場合、パッド支持部材１５が共振し、ガラス基板１２の
振動を抑制することができなくおそれがある。特に、顕
微鏡を使用した基板検査の場合に、ガラス基板１２の光
軸方向の振動、たわみにより顕微鏡像にブレやボケなど
が生じ易くなって、検査精度か低下してしまう。Thus, even when the glass substrate 12 is slightly warped, the plurality of substrate suction members 13 on the mounting table 11 can surely adsorb and mount the glass substrate 12, so that the focus shift caused by the warpage. And vibration displacement of the board can be prevented,
The inspection of the glass substrate 12 can be performed in a stable state. In addition, since the suction pad 14 protrudes from the upper surface of the mounting table 11, even if the glass substrate 12 is warped, the glass substrate 12 always comes close to the suction pad 14 and a good suction force acts. Further, since the mounting table 11 on which the glass substrate 12 is mounted is formed as a so-called hollow mounting table having a central portion formed in a through-hole portion, the mounting table 11 is also applied to detection of scratches and dust using transmitted illumination. be able to. (Second Embodiment) In the first embodiment, the suction pad 14 can be freely moved within the range of the gap 17 with the groove 112 of the mounting table 11 due to the deformation of the pad support member 15 that supports the suction pad 14. Although it is configured to be inclined, the pad support member 15 is made of a relatively soft and easily deformable elastic member such as rubber, so that vibrations may enter from the floor surface temporarily or be down blown in a clean room. In the case where the vibration transmitted to the glass substrate 12 causes bending, the pad support member 15 resonates, and the vibration of the glass substrate 12 may not be able to be suppressed. In particular, in the case of a substrate inspection using a microscope, the microscope image tends to be blurred or blurred due to vibration and deflection in the optical axis direction of the glass substrate 12, and the inspection accuracy is reduced.
【００２３】そこで、この第２の実施の形態では、この
ようなパッド支持部材１５自身の振動を防止するように
している。図４は、本発明の第２の実施の形態の概略構
成を示すもので、図３と同一部分には、同符号を付して
いる。Therefore, in the second embodiment, the vibration of the pad supporting member 15 itself is prevented. FIG. 4 shows a schematic configuration of a second embodiment of the present invention, and the same parts as those in FIG. 3 are denoted by the same reference numerals.
【００２４】この場合、押え枠体１８の穴部１８１の吸
着パッド１４の先端部と対向する周縁部に沿って弾性部
材、例えばゴムブッシュ２３を設けている。この場合、
ゴムブッシュ２３に代えて、ウレタンやシリコンなどの
弾性部材を使用してもよい。In this case, an elastic member, for example, a rubber bush 23 is provided along a peripheral portion of the hole 181 of the holding frame 18 facing the tip of the suction pad 14. in this case,
Instead of the rubber bush 23, an elastic member such as urethane or silicon may be used.
【００２５】この場合、ゴムブッシュ２３と吸着パッド
１４の先端部との間隙２２は、検査対称のガラス基板１
２のたわみ易さなどを考慮して調整する。このようにす
ると、ガラス基板１２の反りによる傾きに対応してパッ
ド支持部材１５の変形により吸着パッド１４が傾いてガ
ラス基板１２の反り面に吸着された状態で、ガラス基板
１２に、床面からの振動やクリーンルーム内のダウンブ
ローにより、たわみが生じたような場合、このたわみが
ある程度進むと吸着パッド１４の傾きも大きくなって、
押え枠体１８の穴部１８１との間隙２２が狭まり、つい
には吸着パッド１４の先端部がゴムブッシュ２３に当接
して、その動きが制限される。In this case, the gap 22 between the rubber bush 23 and the tip of the suction pad 14 is the same as that of the glass substrate 1 which is to be inspected.
2 is adjusted in consideration of the ease of bending. In this manner, the suction pad 14 is tilted due to the deformation of the pad support member 15 corresponding to the tilt due to the warpage of the glass substrate 12 and is suctioned to the warped surface of the glass substrate 12, and the glass substrate 12 is moved from the floor surface In the case where bending occurs due to vibration of the air or down blow in the clean room, when the bending proceeds to some extent, the inclination of the suction pad 14 also increases,
The gap 22 between the holding frame body 18 and the hole 181 is narrowed, and the tip of the suction pad 14 finally comes into contact with the rubber bush 23 to restrict its movement.
【００２６】すると、この当接によりパッド支持部材１
５のバネ成分に、ゴムブッシュ２３のバネ成分が並列結
合され、この時点を境に吸着パッド１４に対するバネ定
数は、図５に示すように急激に増加するようになるの
で、吸着部１４１に吸着しているガラス基板１２が振動
しにくくなって、ガラス基板１２自身のたわみが抑制さ
れる。Then, this contact causes the pad support member 1
The spring component of the rubber bush 23 is connected in parallel to the spring component of No. 5, and at this time, the spring constant for the suction pad 14 rapidly increases as shown in FIG. The vibrating glass substrate 12 is less likely to vibrate, and the deflection of the glass substrate 12 itself is suppressed.
【００２７】このようにすれば、ガラス基板１２に振動
が伝わるような場合でも、ガラス基板１２自身を振動し
にくくして、ガラス基板１２のたわみを抑制するように
できるので、顕微鏡を使用した基板検査の場合に、顕微
鏡像のブレやボケなどを確実に防止でき、精度の高い基
板検査を行うことができる。In this way, even when vibration is transmitted to the glass substrate 12, the glass substrate 12 itself can be made hard to vibrate and the deflection of the glass substrate 12 can be suppressed. In the case of inspection, blurring or blurring of a microscope image can be reliably prevented, and a highly accurate substrate inspection can be performed.
【００２８】なお、パッド支持部材１５の弾性力とゴム
ブッシュ２３の弾性力のバランスを調整することによ
り、吸着パッド１４による吸着し易さと、ガラス基板１
２の振動しにくさとのバランスを最良に設定することも
できる。 （第３の実施の形態）この第３の実施の形態では、第２
の実施の形態で述べたゴムブッシュ２３の働きをパッド
支持部材１５自身に持たせるようにしたものである。By adjusting the balance between the elastic force of the pad supporting member 15 and the elastic force of the rubber bush 23, it is easy to adsorb by the adsorbing pad 14 and the glass substrate 1
It is also possible to optimally set the balance with the difficulty of vibration 2. (Third Embodiment) In the third embodiment, the second
The function of the rubber bush 23 described in the above embodiment is imparted to the pad support member 15 itself.
【００２９】この場合、図６（ａ）（ｂ）に示すように
ゴムなどの比較的柔らかく変形し易い弾性部材からなる
筒状のパッド支持部材１５は、先端部に吸盤１５１を形
成し、基端部側の周面の円周方向に沿って幅の狭い溝部
１５２を形成している。この場合、溝部１５２は、周面
のある点から直線状に形成してもよい。In this case, as shown in FIGS. 6 (a) and 6 (b), a cylindrical pad support member 15 made of a relatively soft and easily deformable elastic member such as rubber is provided with a suction cup 151 at the tip end. A narrow groove portion 152 is formed along the circumferential direction of the peripheral surface on the end side. In this case, the groove 152 may be formed linearly from a certain point on the peripheral surface.
【００３０】その他は、上述した図４と同様である。こ
の場合、ガラス基板１２に、たわみが生じたような場
合、このたわみがある程度進むと、吸着パッド１４の傾
きとともに、パッド支持部材１５の傾きも大きくなっ
て、溝部１５２の幅が狭まり、ついには、溝部１５２を
挟んだ両端部は、図６（ｂ）のように直接当接される。The other points are the same as those in FIG. In this case, in the case where the glass substrate 12 is bent, if the bending proceeds to some extent, the inclination of the pad support member 15 is increased together with the inclination of the suction pad 14, and the width of the groove 152 is narrowed. The two ends sandwiching the groove 152 are in direct contact as shown in FIG.
【００３１】すると、この溝部１５２両端部の当接によ
り、パッド支持部材１５の溝部１５２部分でのバネ成分
に、溝部１５２両端部の当接によるバネ成分が並列に結
合されるようになって、この時点を境に吸着パッド１４
のたわみ方向のバネ定数は、上述した図５に似た急激な
増加特性が得られるので、この場合も第２の実施の形態
と同様な効果が得られる。Then, the contact between the two ends of the groove 152 allows the spring component at the both ends of the groove 152 of the pad supporting member 15 to be connected in parallel to the spring component due to the contact of the two ends of the groove 152. At this time, the suction pad 14
Since the spring constant in the bending direction has a sharp increase characteristic similar to that of FIG. 5, the same effect as in the second embodiment can be obtained in this case as well.
【００３２】また、ここでは、パッド支持部材１５に溝
部１５２を形成するようにしているで、第２実施の形態
と比べて加工箇所、部品点数を少なくでき、コスト的に
有利にできる。 （第４の実施の形態）図７は、本発明の第４の実施の形
態の概略構成を示している。In this case, since the groove 152 is formed in the pad support member 15, the number of processing locations and the number of parts can be reduced as compared with the second embodiment, which is advantageous in cost. (Fourth Embodiment) FIG. 7 shows a schematic configuration of a fourth embodiment of the present invention.
【００３３】この場合、基板載置台３１に段部３２１を
有する穴部３２を形成し、この穴部３２の段部３２１に
弾性を有するダイヤフラム３３を気密に取り付け、この
ダイヤフラム３３で仕切られた穴部３２下方を通気室３
２２に形成している。In this case, a hole 32 having a step 321 is formed in the substrate mounting table 31, an elastic diaphragm 33 is hermetically attached to the step 321 of the hole 32, and a hole partitioned by the diaphragm 33 is provided. The lower part of the part 32 is the ventilation chamber 3
22.
【００３４】ダイヤフラム３３の中央部に連なる連通管
３４を介して吸着パッド３５を取り付けている。この吸
着パッド３５は、吸着部３５１を有し、この吸着部３５
１の中央部に連通管３４を介して通気室３２２に連通す
る穴部３５２を形成している。また、吸着パッド３５
は、ダイヤフラム３３に取り付けた状態で、載置台３１
面より上方に位置するようになっている。A suction pad 35 is attached via a communication pipe 34 connected to the center of the diaphragm 33. The suction pad 35 has a suction portion 351 and the suction portion 35.
A hole 352 that communicates with the ventilation chamber 322 via the communication pipe 34 is formed in the center portion of the hole 1. In addition, the suction pad 35
Is mounted on the mounting table 31 in a state where it is attached to the diaphragm 33.
It is located above the plane.
【００３５】一方、穴部３２下方のを通気室３２２に
は、通気管３６を連通するとともに、電磁弁３７を介し
て真空ポンプ３８を接続し、この真空ポンプ３８でのエ
ア引きによるエア駆動力により、吸着パッド３５の吸着
部３５１にエア吸着力を得られるようにするとともに、
さらに通気室３２２の排気をも可能にしている。On the other hand, a ventilation pipe 36 is connected to the ventilation chamber 322 below the hole 32 and a vacuum pump 38 is connected via a solenoid valve 37. Thereby, the suction portion 351 of the suction pad 35 can obtain the air suction force,
Further, exhaust of the ventilation chamber 322 is enabled.
【００３６】しかして、いま、図７（ａ）に示すように
吸着パッド３５の吸着部３５１が載置台３１面より上方
に位置している状態から、ガラス基板３９が載置された
場合、吸着パッド３５の吸着部３５１は、ダイヤフラム
３３の弾性により、図７（ｂ）に示すようにガラス基板
３９に多少の反りが存在していても、ガラス基板３９面
に添うように密着される。However, when the glass substrate 39 is placed from the state where the suction portion 351 of the suction pad 35 is located above the surface of the mounting table 31 as shown in FIG. The suction portion 351 of the pad 35 is closely attached to the surface of the glass substrate 39 due to the elasticity of the diaphragm 33 even if the glass substrate 39 is slightly warped as shown in FIG.
【００３７】この状態から、電磁弁３７を開くと、真空
ポンプ３８から吸着パッド３５の吸部３５１までのエア
通路が確保され、真空ポンプ３８でのエア引きにより吸
着パッド３５の吸着部３５１へのガラス基板３９の吸着
が成立する（図７（ｂ））。In this state, when the solenoid valve 37 is opened, an air passage from the vacuum pump 38 to the suction part 351 of the suction pad 35 is secured, and the air is drawn by the vacuum pump 38 so that the suction pad 35 is moved to the suction part 351. Adsorption of the glass substrate 39 is established (FIG. 7B).
【００３８】さらに、真空ポンプ３８によりエア引きを
行うと、通気室３２２内の気圧が低下し、図７（ｃ）に
示すようにダイヤフラム３３が通気室３２２側にたわ
む。これにより吸着パッド３５の吸着部３５１は、下方
向に引き込まれるようになり、ガラス基板３９は、載置
台３１面と面一の状態で固定される。Further, when air is drawn by the vacuum pump 38, the air pressure in the ventilation chamber 322 decreases, and the diaphragm 33 bends toward the ventilation chamber 322 as shown in FIG. As a result, the suction portion 351 of the suction pad 35 is pulled downward, and the glass substrate 39 is fixed in a state flush with the surface of the mounting table 31.
【００３９】この場合、吸着部３５１の面積をＳ1 、ダ
イヤフラム３３の面積をＳ2 とし、真空ポンプ３８によ
り、これら吸着部３５１およびダイヤフラム３３にかか
る外気との差圧力をＰとすると、吸着部３５１に作用す
る吸着力はＳ1 ・Ｐで、ダイヤフラム３３に作用する引
張り力は、Ｓ2 ・Ｐとなる。これにより、Ｓ1 ・Ｐ＜Ｓ
2 ・Ｐとすると、ガラス基板３９を載置台３１面まで引
き込んだとき、ガラス基板３９が吸着部３５１から外れ
るおそれがあるので、Ｓ1 ・Ｐ＞Ｓ2 ・Ｐになるように
設定する必要がある。In this case, assuming that the area of the suction section 351 is S1, the area of the diaphragm 33 is S2, and the differential pressure between the suction section 351 and the outside air applied to the diaphragm 33 by the vacuum pump 38 is P, the suction section 351 The acting suction force is S1 · P, and the tensile force acting on the diaphragm 33 is S2 · P. Thus, S1 · P <S
If 2 · P is set, it is necessary to set S1 · P> S2 · P because the glass substrate 39 may come off from the suction portion 351 when the glass substrate 39 is pulled into the mounting table 31 surface.
【００４０】これにより、ガラス基板３９に多少の反り
などがあっても、ガラス基板３９に対する吸着パッド３
５の吸着部３５１の吸着を確実に行い、載置台３１上に
固定するようにできるので、ガラス基板３９に関する検
査を安定した状態で精度よく行うことができる。As a result, even if the glass substrate 39 is slightly warped or the like, the suction pad 3
Since the suction section 351 of No. 5 can be reliably sucked and fixed on the mounting table 31, the inspection of the glass substrate 39 can be performed in a stable and accurate manner.
【００４１】また、吸着部３５１によりガラス基板３９
を吸着した状態から、ダイヤフラム３３を通気室３２２
側にたわませてガラス基板３９を載置台３１上に固定す
るようにしているが、このダイヤフラム３３のたわみの
時点から吸着部３５１に対するダイヤフラム３３の弾性
が急激に変化され、上述した図５に似た特性が得られる
ので、この場合も第２の実施の形態と同様な効果が得ら
れる。Further, the suction portion 351 causes the glass substrate 39.
The diaphragm 33 is moved from the state in which
The glass substrate 39 is fixed on the mounting table 31 while being bent to the side, but the elasticity of the diaphragm 33 with respect to the suction part 351 is rapidly changed from the time of the bending of the diaphragm 33, and FIG. Since similar characteristics can be obtained, the same effects as in the second embodiment can be obtained in this case as well.
【００４２】その後、電磁弁３７を閉じると、真空ポン
プ３８から吸着パッド３５の吸着部３５１までのエア通
路が遮断され、吸着部３５１によるガラス基板３９の吸
着状態が解除される。次いで、ガラス基板３９を載置台
３１から取り除くと、ダイヤフラム３３とともに吸着パ
ッド３５も図７（ａ）の状態に自動復帰される。Thereafter, when the electromagnetic valve 37 is closed, the air passage from the vacuum pump 38 to the suction section 351 of the suction pad 35 is shut off, and the suction state of the glass substrate 39 by the suction section 351 is released. Next, when the glass substrate 39 is removed from the mounting table 31, the suction pad 35 is automatically returned to the state shown in FIG.
【００４３】なお、図８に示すように、載置台３１上に
上述した図７の構成のものに、さらに複数の吸着溝４０
を配置し、これら吸着溝４０に通気管３６１を連通する
とともに、電磁弁３７１を介して真空ポンプ３８に接続
するようにして、最初に電磁弁３７を開いて上述したよ
うにガラス基板３９を載置台３１面まで引き込んだ後、
電磁弁３７１を開いて吸着溝４０にエア吸着力を作用さ
せるようにすれば、ガラス基板３９を効率的に吸着で
き、より強固にガラス基板３９を固定することができ
る。 （第５の実施の形態）図９は、本発明の第５の実施の形
態の概略構成を示すもので、図７と同一部分には同符号
を付している。As shown in FIG. 8, a plurality of suction grooves 40 are provided on the mounting table 31 in addition to the structure shown in FIG.
The suction pipe 40 communicates with the ventilation pipe 361 through the suction groove 40, and is connected to the vacuum pump 38 via the solenoid valve 371. First, the solenoid valve 37 is opened, and the glass substrate 39 is placed as described above. After pulling in up to 31 tables,
If the electromagnetic valve 371 is opened to apply the air suction force to the suction groove 40, the glass substrate 39 can be efficiently suctioned, and the glass substrate 39 can be more firmly fixed. (Fifth Embodiment) FIG. 9 shows a schematic configuration of a fifth embodiment of the present invention, and the same parts as those in FIG.
【００４４】この場合、載置台３１の穴部３２中に吸着
部３５１を有する吸着パッド３５をＯリング４１を介し
て上下動可能に設け、この吸着パッド３５下方の穴部３
２を通気室３２２に形成している。そして、吸着部３５
１中央部の穴部３５２を通気室３２２に連通している。In this case, a suction pad 35 having a suction portion 351 is provided in the hole 32 of the mounting table 31 via an O-ring 41 so as to be vertically movable, and the hole 3 below the suction pad 35 is provided.
2 are formed in the ventilation chamber 322. Then, the suction unit 35
A central hole 352 communicates with the ventilation chamber 322.
【００４５】そして、通気室３２２には、圧縮バネ４２
を設け、この圧縮バネ４２の弾性力により、吸着パッド
３５を上方向に押し上げるようにしている。しかして、
この場合も、吸着パッド３５は、圧縮バネ４２の弾性力
により載置台３１面より上方に位置されており、載置台
３１上にガラス基板３９が載置されると、このガラス基
板３９面に添うように密着される。この状態から、電磁
弁３７を開くと、真空ポンプ３８から吸着パッド３５の
吸着部３５１までのエア通路が確保され、真空ポンプ３
８でのエア引きにより吸着パッド３５の吸着部３５１へ
のガラス基板３９の吸着が成立する。Then, the compression spring 42 is provided in the ventilation chamber 322.
, And the suction pad 35 is pushed upward by the elastic force of the compression spring 42. Then
Also in this case, the suction pad 35 is located above the surface of the mounting table 31 by the elastic force of the compression spring 42, and when the glass substrate 39 is mounted on the mounting table 31, the suction pad 35 follows the surface of the glass substrate 39. So that they are in close contact. When the electromagnetic valve 37 is opened from this state, an air passage from the vacuum pump 38 to the suction portion 351 of the suction pad 35 is secured, and the vacuum pump 3
The suction of the glass substrate 39 to the suction portion 351 of the suction pad 35 is established by the air suction at 8.
【００４６】この状態から、さらに真空ポンプ３８によ
りエア引きを行うと、通気室３２２内部が排気され、吸
着パッド３５は、圧縮バネ４２の弾性力に抗して下方向
に引き込まれるようになって、ガラス基板３９は、載置
台３１面と面一の状態で固定される（図９）。When air is further drawn from this state by the vacuum pump 38, the inside of the ventilation chamber 322 is exhausted, and the suction pad 35 is drawn downward against the elastic force of the compression spring 42. The glass substrate 39 is fixed in a state flush with the surface of the mounting table 31 (FIG. 9).
【００４７】この場合、吸着部３５１の面積をＳ11、通
気室３２２の断面積をＳ12とし、真空ポンプ３８によ
り、これら吸着部３５１および通気室３２２にかかる外
気との差圧力をＰとすると、吸着部３５１に作用する吸
着力はＳ11・Ｐで、圧縮バネ４２に作用する引張り力
は、Ｓ12・Ｐとなる。これにより、Ｓ11・Ｐ＜Ｓ12・Ｐ
とすると、ガラス基板３９を載置台３１面まで引き込ん
だとき、ガラス基板３９が吸着部３５１から外れるおそ
れがあるので、Ｓ11・Ｐ＞Ｓ12・Ｐになるように設定す
る必要がある。In this case, if the area of the suction unit 351 is S11, the sectional area of the ventilation chamber 322 is S12, and the pressure difference between the suction unit 351 and the outside air applied to the ventilation chamber 322 by the vacuum pump 38 is P, The suction force acting on the portion 351 is S11 · P, and the tensile force acting on the compression spring 42 is S12 · P. Thereby, S11 · P <S12 · P
Then, when the glass substrate 39 is pulled down to the surface of the mounting table 31, the glass substrate 39 may come off from the suction portion 351. Therefore, it is necessary to set S11 · P> S12 · P.
【００４８】このようにしても、第４の実施の形態と同
様な効果を期待できる。 （第６の実施の形態）図１０は、本発明の第６の実施の
形態の概略構成を示すもので、図７と同一部分には同符
号を付している。In this case, the same effect as in the fourth embodiment can be expected. (Sixth Embodiment) FIG. 10 shows a schematic configuration of a sixth embodiment of the present invention, and the same parts as those in FIG.
【００４９】この場合、載置台３１の穴部３２中に吸着
パッド３５の吸着部３５１中央部の穴部３５２に連通す
るベローズ管４３を取り付け、このベローズ管４３に通
気管３６を連通し、さらに電磁弁３７を介して真空ポン
プ３８を接続している。また、この時のベローズ管４３
の弾性により吸着パッド３５を上方向に押し上げるよう
にしている。In this case, a bellows pipe 43 communicating with a hole 352 at the center of the suction portion 351 of the suction pad 35 is attached to the hole 32 of the mounting table 31, and a ventilation pipe 36 is connected to the bellows pipe 43. A vacuum pump 38 is connected via an electromagnetic valve 37. At this time, the bellows tube 43
The elasticity causes the suction pad 35 to be pushed upward.
【００５０】しかして、この場合も、吸着パッド３５
は、ベローズ管４３の弾性力により載置台３１面より上
方に位置されており、載置台３１上にガラス基板３９が
載置されると、このガラス基板３９面に添うように密着
される。この状態から、電磁弁３７を開くと、真空ポン
プ３８から吸着パッド３５の吸着部３５１までのエア通
路が確保され、真空ポンプ３８でのエア引きにより吸着
パッド３５の吸着部３５１へのガラス基板３９の吸着が
成立する。However, also in this case, the suction pad 35
Is located above the mounting table 31 by the elastic force of the bellows tube 43, and when the glass substrate 39 is mounted on the mounting table 31, the glass substrate 39 is in close contact with the glass substrate 39. When the electromagnetic valve 37 is opened from this state, an air passage from the vacuum pump 38 to the suction section 351 of the suction pad 35 is secured, and the vacuum pump 38 pulls air to attach the glass substrate 39 to the suction section 351 of the suction pad 35. Is established.
【００５１】この状態から、さらに真空ポンプ３８によ
りエア引きを行うと、ベローズ管４３内部が排気され、
ベローズ管４３の圧縮方向の変形とともに、吸着パッド
３５は、下方向に引き込まれるようになって、ガラス基
板３９は、載置台３１面と面一の状態で固定される（図
１０）。In this state, when air is further drawn by the vacuum pump 38, the inside of the bellows tube 43 is exhausted,
With the deformation of the bellows tube 43 in the compression direction, the suction pad 35 is drawn in downward, and the glass substrate 39 is fixed in a state flush with the surface of the mounting table 31 (FIG. 10).
【００５２】この場合、吸着部３５１の面積をＳ21、ベ
ローズ管４３の断面積をＳ22とし、真空ポンプ３８によ
り、これら吸着部３５１およびベローズ管４３にかかる
外気との差圧力をＰとすると、吸着部３５１に作用する
吸着力はＳ21・Ｐで、ベローズ管４３に作用する引張り
力は、Ｓ22・Ｐとなる。これにより、Ｓ21・Ｐ＜Ｓ22・
Ｐとすると、ガラス基板３９を載置台３１面まで引き込
んだとき、ガラス基板３９が吸着部３５１から外れるお
それがあるので、Ｓ21・Ｐ＞Ｓ22・Ｐになるように設定
する必要がある。In this case, if the area of the suction part 351 is S21, the cross-sectional area of the bellows pipe 43 is S22, and the pressure difference between the suction part 351 and the bellows pipe 43 with the outside air by the vacuum pump 38 is P, The suction force acting on the portion 351 is S21 · P, and the tensile force acting on the bellows tube 43 is S22 · P. Thereby, S21 · P <S22 ·
If P is set, when the glass substrate 39 is pulled to the surface of the mounting table 31, there is a possibility that the glass substrate 39 may come off from the suction portion 351. Therefore, it is necessary to set S21 · P> S22 · P.
【００５３】このようにしても、第４の実施の形態と同
様な効果を期待できる。なお、上述した第１乃至第６の
実施の形態では、一貫してガラス基板について述べた
が、ウェハなどの大型基板吸着にも適用することができ
る。また、第４の実施の形態では、吸着パッドを固定す
るための押え枠体を載置台１１の上面に取り付けるよう
にしたが、吸着パッドだけが載置台上面より突出するよ
うに押え枠体を載置台に埋め込むこともできる。Even in this case, the same effect as in the fourth embodiment can be expected. In the first to sixth embodiments described above, a glass substrate has been described consistently, but the present invention can be applied to adsorption of a large substrate such as a wafer. In the fourth embodiment, the holding frame for fixing the suction pad is mounted on the upper surface of the mounting table 11, but the holding frame is mounted so that only the suction pad projects from the upper surface of the mounting table. It can be embedded in a table.
【００５４】[0054]
【発明の効果】以上述べたように、本発明によれば、基
板吸着部を有する吸着パッドは、弾性部材のパッド支持
部材による支持により、所定範囲で自由に動けるように
なっていて、基板の傾きに対してもパッド支持部材の変
形により、吸着部を吸着でき、さらにパッド支持部材の
弾性力により外れにくい状態で保持できるので、安定し
た状態での基板検査を実現できる。As described above, according to the present invention, the suction pad having the substrate suction portion can be freely moved within a predetermined range by the elastic member being supported by the pad support member. Even when the pad support member is deformed, the suction portion can be sucked by the deformation of the pad support member, and the pad support member can be held in a state in which the pad support member is not easily detached by the elastic force of the pad support member.
【００５５】また、基板吸着部に基板を吸着した状態
で、弾性部材のバネ定数の急激な増加により基板の振動
を抑制できるので、顕微鏡を使用した基板検査の場合
に、顕微鏡像のブレや焦点ズレによるボケなどを確実に
防止でき、精度の高い検査を行うことができる。Further, the vibration of the substrate can be suppressed by a sudden increase in the spring constant of the elastic member in a state where the substrate is adsorbed on the substrate adsorbing portion. It is possible to reliably prevent blurring or the like due to misalignment, and to perform a highly accurate inspection.
【００５６】また、載置台上面より吸着パッドを突出さ
せ、この吸着パッドを弾性的に支持することにより、基
板に反りなどがあっても吸着部での吸着を確実に行うこ
とができ、基板に関する検査を安定した状態で精度よく
行うことができる。Further, by making the suction pad protrude from the upper surface of the mounting table and elastically supporting the suction pad, even if the substrate is warped or the like, the suction at the suction portion can be performed reliably, and the Inspection can be performed accurately in a stable state.
【図１】本発明の第１の実施の形態の概略構成を示す
図。FIG. 1 is a diagram showing a schematic configuration of a first embodiment of the present invention.
【図２】第１の実施の形態に用いられる基板吸着部材の
概略構成を示す図。FIG. 2 is a diagram showing a schematic configuration of a substrate suction member used in the first embodiment.
【図３】第１の実施の形態に用いられる基板吸着部材の
概略構成を示す図。FIG. 3 is a diagram showing a schematic configuration of a substrate suction member used in the first embodiment.
【図４】本発明の第２の実施の形態に用いられる基板吸
着部材の概略構成を示す図。FIG. 4 is a diagram showing a schematic configuration of a substrate suction member used in a second embodiment of the present invention.
【図５】第２の実施の形態を説明するための図。FIG. 5 is a diagram illustrating a second embodiment.
【図６】本発明の第３の実施の形態に用いられる基板吸
着部材を構成するパッド支持部材の概略構成を示す図。FIG. 6 is a diagram showing a schematic configuration of a pad support member constituting a substrate suction member used in a third embodiment of the present invention.
【図７】本発明の第４実施の形態の概略構成を示す図。FIG. 7 is a diagram showing a schematic configuration of a fourth embodiment of the present invention.
【図８】第４実施の形態の概略構成を示す図。FIG. 8 is a diagram showing a schematic configuration of a fourth embodiment.
【図９】本発明の第５実施の形態の概略構成を示す図。FIG. 9 is a diagram showing a schematic configuration of a fifth embodiment of the present invention.
【図１０】本発明の第６実施の形態の概略構成を示す
図。FIG. 10 is a diagram showing a schematic configuration of a sixth embodiment of the present invention.
【図１１】従来の基板吸着装置の一例の概略構成を示す
図。FIG. 11 is a diagram showing a schematic configuration of an example of a conventional substrate suction device.
【図１２】載置台上のガラス基板の状態を説明するため
の図。FIG. 12 is a diagram illustrating a state of a glass substrate on a mounting table.
１１…載置台、 １１１…吸着パッド取付け部、 １１２…溝部、 １１３…穴部、 １２…ガラス基板、 １３…基板吸着部材、 １４…吸着パッド、 １４１…吸着部、 １４２…穴部、 １４３…段部、 １５…パッド支持部材、 １５１…吸盤、 １５２…溝部、 １６…間隙、 １７…間隙、 １８…押え枠体、 １８１…穴部、 １９…通気管、 ２０…電磁弁、 ２１…真空ポンプ、 ２２…間隙、 ２３…ゴムブッシュ、 ３１…載置台、 ３２…穴部、 ３２２…通気室、 ３３…ダイヤフラム、 ３４…連通管、 ３５…吸着パッド、 ３５１…吸着部、 ３６…通気管、 ３７…電磁弁、 ３８…真空ポンプ、 ３９…ガラス基板、 ４１…Ｏリング、 ４２…圧縮バネ、 ４３…ベローズ管。 DESCRIPTION OF SYMBOLS 11 ... Mounting table, 111 ... Adsorption pad mounting part, 112 ... Groove part, 113 ... Hole part, 12 ... Glass substrate, 13 ... Substrate adsorption member, 14 ... Adsorption pad, 141 ... Adsorption part, 142 ... Hole part, 143 ... Step Part, 15: pad support member, 151: suction cup, 152: groove, 16: gap, 17: gap, 18: holding frame, 181: hole, 19: ventilation pipe, 20: solenoid valve, 21: vacuum pump, Reference numeral 22: gap, 23: rubber bush, 31: mounting table, 32: hole, 322: ventilation chamber, 33: diaphragm, 34: communication pipe, 35: suction pad, 351: suction section, 36: ventilation pipe, 37 ... Electromagnetic valve, 38: vacuum pump, 39: glass substrate, 41: O-ring, 42: compression spring, 43: bellows tube.
Claims (3)
と、 この吸着パッドを弾性的に支持する弾性部材からなるパ
ッド支持部材と、 前記吸着パッドの所定範囲での動きを可能にして該吸着
パッドを固定部材に取付ける取付け手段とを具備したこ
とを特徴とする基板吸着部材。1. A hollow suction pad having a substrate suction portion, a pad support member made of an elastic member for elastically supporting the suction pad, and a movement of the suction pad in a predetermined range enabling the suction pad to move. Mounting means for mounting the substrate to the fixing member.
きを制限する弾性部材を有することを特徴とする請求項
１記載の基板吸着部材。2. The substrate suction member according to claim 1, wherein the attachment member has an elastic member that restricts movement of the suction pad.
着部を有する吸着パッドと、 この吸着パッドを支持するとともに、前記吸着パッドを
前記載置台面より上方に位置させる弾性を有する支持部
材と、 前記吸着パッドの基板吸着部にエア吸着力を発生させる
エア制御手段とを具備したことを特徴とする基板吸着装
置。3. A mounting table on which a substrate is mounted, a suction pad disposed on the mounting table and having a substrate suction unit for generating an air suction force, supporting the suction pad, and holding the suction pad in front of the mounting pad. A substrate suction device, comprising: a support member having elasticity positioned above the mounting table surface; and air control means for generating an air suction force in a substrate suction portion of the suction pad.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24214196A JP3782523B2 (en) | 1996-09-12 | 1996-09-12 | Substrate adsorption member and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24214196A JP3782523B2 (en) | 1996-09-12 | 1996-09-12 | Substrate adsorption member and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1086086A true JPH1086086A (en) | 1998-04-07 |
| JP3782523B2 JP3782523B2 (en) | 2006-06-07 |
Family
ID=17084931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24214196A Expired - Fee Related JP3782523B2 (en) | 1996-09-12 | 1996-09-12 | Substrate adsorption member and apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3782523B2 (en) |
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