JPH10510921A - 点火補助部材を有するペニング測定セル - Google Patents
点火補助部材を有するペニング測定セルInfo
- Publication number
- JPH10510921A JPH10510921A JP8519445A JP51944596A JPH10510921A JP H10510921 A JPH10510921 A JP H10510921A JP 8519445 A JP8519445 A JP 8519445A JP 51944596 A JP51944596 A JP 51944596A JP H10510921 A JPH10510921 A JP H10510921A
- Authority
- JP
- Japan
- Prior art keywords
- anode
- measuring cell
- cathode
- ring
- metal strip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
- H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/30—Vacuum gauges by making use of ionisation effects
- G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1.陽極(5)及び陰極(2)を有する電極装置ならびに該電極装置(2、5) のための点火補助部材(11)を有するペニング測定セル(1)であって、 前記陽極(5)及び陰極(2)は、永久磁石(8、9)の磁界内に配置され ているペニング測定セル(1)において、 少なくとも1つの金属ストリップ(11)が前記陽極(5)に固定されてお り、前記金属ストリップ(11)の自由端部は、前記陰極(2)の方向に延在し ていることを特徴とするペニング測定セル(1)。 2.リング(5)が陽極を形成し、ならびに前記リング(5)を囲むケーシング (2)が陰極を形成し、 前記金属ストリップ(11)は、陽極電圧供給部(7)の領域の前記陽極リ ング(5)に固定されていることを特徴とする請求項1記載の測定セル。 3.陽極リング(5)の開口部から側面に突き出ている2つの金属ストリップ( 11)が設けられていることを特徴とする請求項2記載の測定セル。 4.金属ストリップ(11)は、陽極リングの中心に固定されており、 前記金属ストリップ(11)の端部は、前記陽極リング(5)の開口部から 突き出ていることを特徴 とする請求項2記載の測定セル。 5.金属ストリップ(11)の長手方向は、該長手方向が磁力線に交差するよう に選択されることを特徴とする請求項1〜4までのうちの1項記載の測定セル。 6.金属板ストリップ(11)の長手方向と磁力線との間の角度は20°の規模 にとどまることを特徴とする請求項5記載の測定セル。 7.金属板ストリップ(11)は、弱磁性材料から成ることを特徴とする請求項 1〜6までのうち1項記載の測定セル。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4445828.2 | 1994-12-22 | ||
DE4445828A DE4445828A1 (de) | 1994-12-22 | 1994-12-22 | Penning-Meßzelle mit Zündhilfe |
PCT/EP1995/003553 WO1996019720A1 (de) | 1994-12-22 | 1995-09-09 | Penning-messzelle mit zündhilfe |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH10510921A true JPH10510921A (ja) | 1998-10-20 |
JP3648246B2 JP3648246B2 (ja) | 2005-05-18 |
Family
ID=6536607
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51944596A Expired - Fee Related JP3648246B2 (ja) | 1994-12-22 | 1995-09-09 | 点火補助部材を有するペニング測定セル |
Country Status (5)
Country | Link |
---|---|
US (1) | US5923172A (ja) |
EP (1) | EP0799413B1 (ja) |
JP (1) | JP3648246B2 (ja) |
DE (2) | DE4445828A1 (ja) |
WO (1) | WO1996019720A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010145119A (ja) * | 2008-12-16 | 2010-07-01 | Dia Shinku Kk | 冷陰極電離真空計 |
JP2010276597A (ja) * | 2009-04-09 | 2010-12-09 | Canon Anelva Corp | 冷陰極電離真空計及びそれを備えた真空処理装置並びに放電開始補助電極 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE278423C (ja) * | ||||
US2643342A (en) * | 1947-01-17 | 1953-06-23 | Atomic Energy Commission | Ionization gauge |
US2758232A (en) * | 1951-08-17 | 1956-08-07 | Cons Electrodynamics Corp | Vacuum discharge gauge |
DE1873797U (de) * | 1959-09-16 | 1963-06-12 | Leybolds Nachfolger E | Ionisationsmanometer mit kalter kathode. |
DE3047744A1 (de) * | 1980-12-18 | 1982-07-22 | Leybold-Heraeus GmbH, 5000 Köln | Kaltkathoden-ionisationsvakuummeter |
DE3642670A1 (de) * | 1986-12-13 | 1988-06-23 | Leybold Ag | Penning-ionisationsvakuummeter |
GB2256310A (en) * | 1991-05-31 | 1992-12-02 | Boc Group Plc | A vacuum gauge |
ATE168467T1 (de) * | 1993-04-28 | 1998-08-15 | Fredericks Co | Ionisationswandler mit sich gegenuberliegenden magneten |
-
1994
- 1994-12-22 DE DE4445828A patent/DE4445828A1/de not_active Withdrawn
-
1995
- 1995-09-09 US US08/849,506 patent/US5923172A/en not_active Expired - Lifetime
- 1995-09-09 JP JP51944596A patent/JP3648246B2/ja not_active Expired - Fee Related
- 1995-09-09 DE DE59507855T patent/DE59507855D1/de not_active Expired - Lifetime
- 1995-09-09 WO PCT/EP1995/003553 patent/WO1996019720A1/de active IP Right Grant
- 1995-09-09 EP EP95932704A patent/EP0799413B1/de not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010145119A (ja) * | 2008-12-16 | 2010-07-01 | Dia Shinku Kk | 冷陰極電離真空計 |
JP2010276597A (ja) * | 2009-04-09 | 2010-12-09 | Canon Anelva Corp | 冷陰極電離真空計及びそれを備えた真空処理装置並びに放電開始補助電極 |
Also Published As
Publication number | Publication date |
---|---|
EP0799413A1 (de) | 1997-10-08 |
DE59507855D1 (de) | 2000-03-30 |
US5923172A (en) | 1999-07-13 |
DE4445828A1 (de) | 1996-06-27 |
JP3648246B2 (ja) | 2005-05-18 |
EP0799413B1 (de) | 2000-02-23 |
WO1996019720A1 (de) | 1996-06-27 |
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