JPH10167807A - Mgo-base composite ceramics and its production - Google Patents
Mgo-base composite ceramics and its productionInfo
- Publication number
- JPH10167807A JPH10167807A JP8328412A JP32841296A JPH10167807A JP H10167807 A JPH10167807 A JP H10167807A JP 8328412 A JP8328412 A JP 8328412A JP 32841296 A JP32841296 A JP 32841296A JP H10167807 A JPH10167807 A JP H10167807A
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- mgo
- ceramics
- particles
- dispersed
- metal powder
- Prior art date
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、特殊構造のＭｇＯ
複合セラミックス及びその製法に関する。詳しくは、特
殊な組織構造を有し、高性能で高機能性を有したＭｇＯ
複合セラミックス及びその製造方法に関する。The present invention relates to a specially-structured MgO
The present invention relates to a composite ceramic and a method for producing the same. Specifically, MgO with a special structure, high performance and high functionality
The present invention relates to a composite ceramic and a method for producing the same.
【０００２】[0002]
【従来の技術】ＭｇＯは優れた耐熱性、耐食性、電気絶
縁性を有するが、強度、破壊靭性値、耐熱衝撃性に乏し
く、構造材料として使用するには不十分である。また、
ターゲットなどの成膜材料としては、絶縁性が評価のポ
イントとなる場合があり、焼結体の密度、純度、組織構
造（粒界、粒内）が影響する。2. Description of the Related Art MgO has excellent heat resistance, corrosion resistance and electrical insulation, but has poor strength, fracture toughness and thermal shock resistance, and is insufficient for use as a structural material. Also,
For a film forming material such as a target, insulation may be a point of evaluation, and the density, purity, and microstructure (grain boundaries, intragrains) of the sintered body influence.
【０００３】そこで、従来、ＭｇＯやＡｌ2 Ｏ3 などの
酸化物セラミックスの物理的性質（強度、破壊靭性値
等）の欠点を、分散粒子の複合化により改善しようとす
る研究がなされてきた。しかしながら、それらの研究の
多くはミクロンレベルの複合化が中心であり、その特性
改善には限界があった。これらの研究では、分散粒子の
複合化に伴う破壊靭性の向上は、当該分散粒子がマトリ
ックスの粒界に偏在するために生じるクラック偏向に起
因していると報告されている。[0003] Therefore, researches have been made to improve the defects of the physical properties (strength, fracture toughness, etc.) of oxide ceramics such as MgO and Al 2 O 3 by combining dispersed particles. However, most of these studies focus on micron-level complexation, and there is a limit to improving its properties. In these studies, it is reported that the improvement in fracture toughness due to the composite of dispersed particles is caused by crack deflection caused by uneven distribution of the dispersed particles at the grain boundaries of the matrix.
【０００４】なお、アルミナのようなセラミックス焼結
体は、異方性粒子でマトリックスが形成されており、そ
の粒子境界で隣接粒子の熱膨張差により歪みが発生し、
このために、粒界が破壊源となり、強度低下の原因とな
ることは周知である。[0004] In a ceramic sintered body such as alumina, a matrix is formed of anisotropic particles, and distortion occurs due to a difference in thermal expansion between adjacent particles at the particle boundary.
For this reason, it is well known that the grain boundaries serve as a fracture source and cause a decrease in strength.
【０００５】このように、分散粒子の複合化では、マト
リックスの粒界に分散した粒子が、クラックの進展を阻
止し、このため、破壊靭性の向上が期待される。[0005] As described above, in the composite of the dispersed particles, the particles dispersed in the grain boundaries of the matrix prevent the progress of cracks, and therefore, improvement in fracture toughness is expected.
【０００６】[0006]
【発明が解決しようとする課題】しかし、このような従
来の複合化では、破壊の発生源である粒界の欠陥は改善
されず、その欠点は残存しているため、破壊強度等の大
きな向上は望めなかった。However, in such a conventional composite, defects at the grain boundaries, which are sources of fracture, are not improved, and the defects remain, so that the fracture strength and the like are greatly improved. Could not hope.
【０００７】本発明は、上記従来の問題点を解決し、Ｍ
ｇＯマトリックス中に、分散粒子を複合化することによ
り、ＭｇＯの特性を改善し、構造セラミックス及び機能
セラミックスとして高性能の複合セラミックスを提供す
ること、即ち、例えば、通常の耐熱材料、電子セラミッ
クス材料においては、それほど結晶を成長させなくて
も、耐熱衝撃性が得られ、また、使用時の破壊特性が著
しく改善されるＭｇＯ複合セラミックス及びその製造方
法を提供することを目的とする。The present invention solves the above-mentioned conventional problems, and
By combining dispersed particles in a gO matrix, the characteristics of MgO are improved, and high-performance composite ceramics are provided as structural ceramics and functional ceramics, that is, for example, in ordinary heat-resistant materials and electronic ceramic materials. It is an object of the present invention to provide an MgO composite ceramic which can provide a thermal shock resistance without remarkably growing a crystal and has remarkably improved fracture characteristics during use, and a method for producing the same.
【０００８】[0008]
【課題を解決するための手段】本発明のＭｇＯ複合セラ
ミックスは、粒子径０．５〜１００μｍの結晶粒子を有
するＭｇＯマトリックスの結晶粒内及び粒界に、粒子径
１．０μｍ以下のＳｃ、Ｙ又はＬａの微粒子１〜２０重
量％を分散させたことを特徴とする。The MgO composite ceramics of the present invention has Sc, Y particles having a particle diameter of 1.0 .mu.m or less in MgO matrix crystal grains having crystal particles having a particle diameter of 0.5 to 100 .mu.m and at grain boundaries. Alternatively, 1 to 20% by weight of La fine particles are dispersed.
【０００９】本発明のＭｇＯ複合セラミックスは、Ｍｇ
Ｏマトリックス中にＳｃ、Ｙ又はＬａ微粒子を分散させ
るという、ナノメーター・オーダーの複合化、即ち、セ
ラミックスの最小構成単位である結晶粒の複合化を行う
ことにより、ＭｇＯセラミックスの物理的性質の改善を
図るものである。即ち、本発明では、ＭｇＯ結晶粒内及
び粒界にＬａ微粒子等を分散させることで、ＭｇＯとＬ
ａ微粒子等との粒界に残留応力を生じさせる。この残留
応力により、隣接する粒子の粒界に圧縮応力場を生じさ
せる。そして、伝播しようとするクラック先端をピニン
グないしシーリングしたり、ディフレクションすること
により、クラック先端の伝播を防止する。The MgO composite ceramics of the present invention comprises Mg
Improvement of the physical properties of MgO ceramics by dispersing Sc, Y or La fine particles in an O matrix, by performing nanometer-order composite, that is, composite of crystal grains, which is the minimum constituent unit of ceramics. It is intended. That is, in the present invention, by dispersing La fine particles and the like in the MgO crystal grains and in the grain boundaries, MgO and L are dispersed.
a Residual stress is generated at the grain boundary with the fine particles. This residual stress creates a compressive stress field at the grain boundaries of adjacent particles. Then, the propagation of the crack tip is prevented by pinning or sealing the tip of the crack to be propagated or by performing deflection.
【００１０】なお、上記作用効果を得る点で、本発明に
おけるマトリックスＭｇＯは、焼結工程で厳密に焼結さ
れる必要があり、この粒子内に分散相のＬａなどが均一
に分散されることが必要である。更に、焼結過程で分散
粒子の一部はマトリックス粒子内に取り込まれるもので
なければならない。本発明に係るＳｃ，Ｙ，Ｌａはこの
ような条件を十分に満たす、ＭｇＯマトリックスの分散
粒子として最適なものである。In order to obtain the above-mentioned functions and effects, the matrix MgO in the present invention must be sintered strictly in the sintering step, and the dispersed phase such as La is uniformly dispersed in the particles. is required. In addition, some of the dispersed particles must be incorporated into the matrix particles during the sintering process. Sc, Y, and La according to the present invention, which sufficiently satisfy such conditions, are optimal as dispersed particles of an MgO matrix.
【００１１】本発明において、分散粒子のＳｃ、Ｙ又は
Ｌａの出発原料は、各々、Ｓｃ金属粉末、Ｙ金属粉末又
はＬａ金属粉末、或いはそれらの酸化物を用いることが
できる。In the present invention, the Sc, Y or La starting material of the dispersed particles may be Sc metal powder, Y metal powder or La metal powder, or an oxide thereof.
【００１２】このような本発明のＭｇＯ複合セラミック
スは、ＭｇＯとＳｃ、Ｙ又はＬａの金属粉末とを混合し
て成形した後、或いは、ＭｇＯとＳｃ、Ｙ又はＬａの金
属酸化物粉末とを混合して成形し、成形体を水素雰囲気
中、７５０〜８５０℃で還元処理した後、１５００℃以
上の温度で焼結する本発明のＭｇＯ複合セラミックスの
製造方法により製造される。The MgO composite ceramic of the present invention is prepared by mixing MgO and a metal powder of Sc, Y or La, or by mixing MgO and a metal oxide powder of Sc, Y or La. Then, the compact is subjected to a reduction treatment in a hydrogen atmosphere at 750 to 850 ° C., and then sintered at a temperature of 1500 ° C. or more by the method for producing an MgO composite ceramic of the present invention.
【００１３】[0013]
【発明の実施の形態】以下に本発明の実施の形態を詳細
に説明する。Embodiments of the present invention will be described below in detail.
【００１４】本発明のＭｇＯ複合セラミックスは、マト
リックスとしてＭｇＯを用い、分散粒子として元素周期
律表３ａ族の中から選ばれるＳｃ、Ｙ又はＬａ微粒子を
用いること、そして、焼結体のＭｇＯ結晶粒子径が０．
５〜１００μｍであり、分散粒子の粒子径が１μｍ以下
であり、その割合が１〜２０重量％であることが特徴で
ある。The MgO composite ceramic of the present invention uses MgO as a matrix, uses Sc, Y or La fine particles selected from Group 3a of the periodic table as dispersed particles, and uses MgO crystal particles of a sintered body. The diameter is 0.
5 to 100 μm, the particle size of the dispersed particles is 1 μm or less, and the ratio thereof is 1 to 20% by weight.
【００１５】なお、本発明において、Ｌａ等の分散粒子
の割合は、ＭｇＯと分散粒子との合計に対する内割の割
合である。In the present invention, the ratio of the dispersed particles such as La is the ratio of the inner portion to the total of MgO and the dispersed particles.
【００１６】本発明の複合セラミックスのＭｇＯマトリ
ックスの結晶粒子の粒子径を０．５〜１００μｍとする
理由は、この範囲が、組織制御が可能で強度が大幅に高
くなるためであり、分散粒子の粒子径を１．０μｍ以下
にする理由は、ＭｇＯマトリックス結晶粒内に取り込ま
れるのに適した粒度範囲であるためである。The reason why the particle size of the crystal particles of the MgO matrix of the composite ceramic of the present invention is 0.5 to 100 μm is that this range is because the structure can be controlled and the strength is greatly increased. The reason for setting the particle diameter to 1.0 μm or less is that the particle diameter is in a range suitable for being incorporated into MgO matrix crystal grains.
【００１７】また、Ｓｃ、Ｙ又はＬａの割合を１〜２０
重量％とする理由は、２０重量％を超えると、特にＳ
ｃ、Ｙ又はＬａの出発原料として酸化物を用いた場合に
は、水素雰囲気での還元処理が不十分で固溶体を生成し
易くなり、金属粉末を用いた場合には、材料組織の制御
が困難となり、強度などの特性がバラツキ、材料の信頼
性がなくなり、いずれの場合も不適当であることによ
る。Ｓｃ、Ｙ又はＬａの割合が、１〜２０重量％の範囲
であれば、マトリックス中に分散粒子が均一に取り込ま
れた組織が制御でき、特性も向上する。Further, the proportion of Sc, Y or La is 1 to 20.
The reason for setting the weight% is that if the content exceeds 20% by weight,
When an oxide is used as a starting material for c, Y or La, the reduction treatment in a hydrogen atmosphere is insufficient, so that a solid solution is easily generated, and when a metal powder is used, control of the material structure is difficult. This is because the characteristics such as strength vary, and the reliability of the material is lost. When the proportion of Sc, Y or La is in the range of 1 to 20% by weight, the structure in which the dispersed particles are uniformly taken into the matrix can be controlled, and the characteristics can be improved.
【００１８】このＳｃ、Ｙ又はＬａの出発原料として
は、Ｓｃ金属粉末、Ｙ金属粉末又はＬａ金属粉末、或い
は、Ｓｃ2 Ｏ3 等のＳｃ酸化物粉末、Ｙ2 Ｏ3 等のＹ酸
化物粉末、又はＬａ2 Ｏ3 等のＬａ酸化物粉末を用いる
ことができる。[0018] As the starting material for this Sc, Y or La, Sc metal powder, Y metal powder or La metal powder, or, Sc oxide powders such as Sc 2 O 3, Y oxide powders such as Y 2 O 3 Or La oxide powder such as La 2 O 3 can be used.
【００１９】このような本発明のＭｇＯ複合セラミック
スは、本発明の方法に従って、好ましくは、粒子径５μ
ｍ以下のＭｇＯ粉末及び粒子径１μｍ以下のＳｃ金属粉
末、Ｙ金属粉末、Ｌａ金属粉末、あるいはその酸化物粉
末を混合して所定形状に成形した後、１５００℃以上、
特に１６００〜１６５０℃で常圧焼結することにより製
造される。According to the method of the present invention, the MgO composite ceramic of the present invention preferably has a particle diameter of 5 μm.
m MgO powder and a Sc metal powder having a particle diameter of 1 μm or less, a Y metal powder, a La metal powder, or an oxide powder thereof are mixed and formed into a predetermined shape.
In particular, it is manufactured by normal pressure sintering at 1600 to 1650 ° C.
【００２０】原料として用いるＭｇＯ粉末の粒子径を５
μｍ以下とする理由は、焼結し易いためであり、また分
散粒子の粒子径を１．０μｍ以下とする理由は、粒子径
が１μｍを超えるとマイクロクラックが発生すること、
粒子径１μｍ以下であればマトリックス粒内に分散粒子
が取り込まれ易いこと、そして、残留応力がある限界以
上になってもマイクロクラックが発生しない範囲である
こと等である。The particle size of the MgO powder used as a raw material is 5
The reason for setting the particle size to not more than μm is that it is easy to sinter, and the reason for setting the particle size of the dispersed particles to not more than 1.0 μm is that microcracks occur when the particle size exceeds 1 μm;
If the particle diameter is 1 μm or less, the dispersed particles are easily taken into the matrix particles, and even if the residual stress exceeds a certain limit, the microcracks are not generated.
【００２１】なお、Ｓｃ，Ｙ，Ｌａの出発原料として酸
化物粉末を用いた場合には、焼結に先立ち、水素雰囲気
中、７５０〜８５０℃で還元処理して酸素を除去する。When oxide powder is used as a starting material for Sc, Y and La, prior to sintering, a reduction treatment is performed at 750 to 850 ° C. in a hydrogen atmosphere to remove oxygen.
【００２２】本発明において、焼結温度が１５００℃未
満であると十分な緻密化が図れず、高特性の焼結体が得
られない。焼結は、真空又は不活性雰囲気で常圧焼結、
常圧焼結＋ＨＩＰ（熱間等方圧プレス）処理、或いは、
ホットプレス焼結にて行うのが好ましい。In the present invention, if the sintering temperature is lower than 1500 ° C., sufficient densification cannot be achieved, and a sintered body having high characteristics cannot be obtained. Sintering is normal pressure sintering in a vacuum or inert atmosphere,
Normal pressure sintering + HIP (Hot isostatic pressing) treatment, or
It is preferable to perform hot press sintering.
【００２３】本発明のＭｇＯ複合セラミックスは、耐熱
材料、耐食材料、電子セラミックス・ターゲット材料
等、各種高性能、高機能性セラミックス材料などに特に
好適である。The MgO composite ceramic of the present invention is particularly suitable for various high-performance and high-performance ceramic materials such as heat-resistant materials, corrosion-resistant materials, electronic ceramics and target materials.
【００２４】[0024]
【実施例】以下に実施例及び比較例を挙げて、本発明を
より具体的に説明するが、本発明はその要旨を超えない
限り、以下の実施例に限定されるものではない。EXAMPLES The present invention will be described more specifically with reference to examples and comparative examples below, but the present invention is not limited to the following examples unless it exceeds the gist.
【００２５】実施例１〜１０，比較例１〜５ ＭｇＯ粉末（赤穂化成社製３Ｎ、平均粒径０．２μｍ）
と、Ｌａ2 Ｏ3 、Ｓｃ2 Ｏ3 （三菱マテリアル社製：３
２５メッシュパス品を撹拌ミルで予め粉砕）又はＹ2 Ｏ
3 （信越化学社製、平均粒径０．２μｍ）を表１記載の
配合割合で、エタノールを分散媒として、撹拌ミルで２
時間湿式混合した（ただし、比較例５ではＭｇＯ粉末の
み）。これを充分に乾燥した後に、ボールミルで混合解
砕した。実施例２〜４，６〜８及び１０と比較例３，４
では、得られた混合粉末を黒鉛ダイス（内径φ６０ｍ
ｍ）に充填し、１ＭＰａに予備圧縮した後、水素雰囲気
中、８００℃で５時間還元処理し、その後、誘導加熱式
焼結炉（富士電波工業社製）にてアルゴン雰囲気中でホ
ットプレス焼結した。焼結条件は、１５００℃まで昇温
させた後、１時間保持とし、プレス圧は３０ＭＰａとし
た。Examples 1 to 10, Comparative Examples 1 to 5 MgO powder (3N, Ako Kasei Co., Ltd., average particle size 0.2 μm)
And La 2 O 3 , Sc 2 O 3 (Mitsubishi Materials Corporation: 3
25 mesh pass product is pre-ground with a stirring mill) or Y 2 O
3 (manufactured by Shin-Etsu Chemical Co., Ltd., average particle size: 0.2 μm) in a mixing ratio shown in Table 1 with ethanol as a dispersion medium,
It was wet-mixed for hours (however, in Comparative Example 5, only MgO powder). After this was sufficiently dried, it was mixed and crushed by a ball mill. Examples 2 to 4, 6 to 8 and 10 and Comparative Examples 3 and 4
Then, the obtained mixed powder is placed in a graphite die (inner diameter φ60 m
m), pre-compressed to 1 MPa, reduced in a hydrogen atmosphere at 800 ° C. for 5 hours, and then hot-pressed in an argon atmosphere in an induction heating sintering furnace (manufactured by Fuji Denki Kogyo KK). Tied. The sintering conditions were as follows: after the temperature was raised to 1500 ° C., the temperature was maintained for 1 hour, and the press pressure was 30 MPa.
【００２６】また、比較例１，２では水素雰囲気中での
還元処理を行わずに、上記と同様の条件でホットプレス
焼結した。In Comparative Examples 1 and 2, hot press sintering was performed under the same conditions as above without performing reduction treatment in a hydrogen atmosphere.
【００２７】また、実施例１，５，９及び比較例５で
は、前記のように調製した混合粉末を水素雰囲気中、８
００℃で４時間還元処理した後、この混合粉末を金型
（内径φ６０ｍｍで厚さ７ｍｍ）に充填し、７５ｋｇ／
ｃｍ2 で一軸加圧成形した後、１５００ｋｇ／ｃｍ2 で
ＣＩＰ成形し、得られた成形体を焼結炉（富士電波工業
社製）に入れ、水素雰囲気中、８００℃で１時間還元処
理した後、アルゴン雰囲気中１３５０℃で１時間保持
し、１６５０℃で３時間常圧焼結した。In Examples 1, 5, 9 and Comparative Example 5, the mixed powder prepared as described above was mixed in a hydrogen atmosphere for 8 hours.
After reduction treatment at 00 ° C. for 4 hours, the mixed powder was filled in a mold (inner diameter φ60 mm and thickness 7 mm),
After uniaxial pressing at a cm 2, and CIP molding at 1500 kg / cm 2, placed the resulting molded body in a sintering furnace (manufactured by Fuji Telecommunications Industry Co., Ltd.), in a hydrogen atmosphere for 1 hour reduction treatment at 800 ° C. Then, it was kept at 1350 ° C. for 1 hour in an argon atmosphere and sintered at 1650 ° C. for 3 hours under normal pressure.
【００２８】得られたＭｇＯ焼結体は、切り出し、研削
・研摩加工して、ＪＩＳ Ｒ１６０１に準じた３×４×
４０ｍｍの３点曲げ試験片の大きさとし、密度、破壊強
度を調べた。その結果を表１に示す。なお、密度はトル
エン中、アルキメデス法で測定した。破壊強度は３点曲
げ試験により測定した。The obtained MgO sintered body was cut out, ground and polished to obtain a 3 × 4 × according to JIS R1601.
The size of a 40 mm three-point bending test piece was measured, and the density and the breaking strength were examined. Table 1 shows the results. The density was measured by the Archimedes method in toluene. The breaking strength was measured by a three-point bending test.
【００２９】なお、実施例１〜１０のものについて、結
晶組織をＳＥＭ観察により調べたところ、いずれも、粒
子径０．５〜１００μｍの結晶粒子を有するＭｇＯマト
リックスの結晶粒内及び粒界に、粒子径１．０μｍ以下
のＳｃ、Ｙ又はＬａの微粒子が均一に分散していた。When the crystal structure of each of Examples 1 to 10 was examined by SEM observation, it was found that in each of the MgO matrix having 0.5 to 100 μm crystal grains, Fine particles of Sc, Y or La having a particle diameter of 1.0 μm or less were uniformly dispersed.
【００３０】[0030]
【表１】 [Table 1]
【００３１】表１より明らかなように、本発明のＭｇＯ
複合セラミックスは、Ｓｃ、Ｙ又はＬａの分散粒子がＭ
ｇＯ結晶粒内及び粒界に分散した組織を有しており、曲
げ強度は単相材料の約２倍まで向上し、高密度で特性の
バラツキも少ない。しかも、このような高性能なＭｇＯ
複合セラミックスを、ホットプレス焼結だけでなく、常
圧焼結でも安価に製造することができる。As is clear from Table 1, the MgO of the present invention
In the composite ceramic, the dispersed particles of Sc, Y or La have M
It has a structure dispersed in the gO crystal grains and at the grain boundaries, has a bending strength improved to about twice that of a single-phase material, has a high density, and has little variation in properties. Moreover, such high performance MgO
Composite ceramics can be manufactured at low cost by normal pressure sintering as well as hot press sintering.
【００３２】[0032]
【発明の効果】以上詳述した通り、本発明のＭｇＯ複合
セラミックス及びその製造方法によれば、ＭｇＯセラミ
ックスの破壊靭性、耐熱衝撃性、曲げ強度等の機械的特
性が著しく改善され、各種構造セラミックス材料又は機
能セラミックス材料として有用な高特性ＭｇＯ複合セラ
ミックスが提供される。As described above in detail, according to the MgO composite ceramics and the method of manufacturing the same of the present invention, mechanical properties such as fracture toughness, thermal shock resistance, bending strength and the like of MgO ceramics are remarkably improved, and various types of structural ceramics can be obtained. A high-performance MgO composite ceramic useful as a material or a functional ceramic material is provided.
Claims (4)
有するＭｇＯマトリックスの結晶粒内及び粒界に、粒子
径１．０μｍ以下のＳｃ、Ｙ又はＬａの微粒子１〜２０
重量％を分散させたことを特徴とするＭｇＯ複合セラミ
ックス。1. Fine particles of Sc, Y or La having a particle diameter of 1.0 μm or less are present in crystal grains and in a grain boundary of an MgO matrix having crystal particles having a particle diameter of 0.5 to 100 μm.
MgO composite ceramics, wherein the weight% is dispersed.
て、Ｓｃ、Ｙ又はＬａの出発原料は、各々、Ｓｃ金属粉
末、Ｙ金属粉末又はＬａ金属粉末、或いはそれらの酸化
物であることを特徴とするＭｇＯ複合セラミックス。2. The ceramic according to claim 1, wherein the starting material of Sc, Y or La is Sc metal powder, Y metal powder or La metal powder, or an oxide thereof. MgO composite ceramics.
スを製造する方法であって、ＭｇＯとＳｃ、Ｙ又はＬａ
の金属粉末とを混合して成形した後、１５００℃以上の
温度で焼結することを特徴とするＭｇＯ複合セラミック
スの製造方法。3. The method for producing a MgO composite ceramic according to claim 1, wherein MgO, Sc, Y or La is used.
A method for producing an MgO composite ceramic, comprising: forming a mixture by mixing with the metal powder of (1) and sintering at a temperature of 1500 ° C. or higher.
スを製造する方法において、ＭｇＯとＳｃ、Ｙ又はＬａ
の金属酸化物粉末とを混合して成形した後、水素雰囲気
中、７５０〜８５０℃で還元処理し、その後、１５００
℃以上の温度で焼結することを特徴とするＭｇＯ複合セ
ラミックスの製造方法。4. The method for producing an MgO composite ceramic according to claim 1, wherein MgO and Sc, Y or La are mixed.
, And subjected to a reduction treatment in a hydrogen atmosphere at 750 to 850 ° C.
A method for producing an MgO composite ceramic, comprising sintering at a temperature of not less than ℃.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32841296A JP3223822B2 (en) | 1996-12-09 | 1996-12-09 | MgO composite ceramics and method for producing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32841296A JP3223822B2 (en) | 1996-12-09 | 1996-12-09 | MgO composite ceramics and method for producing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10167807A true JPH10167807A (en) | 1998-06-23 |
| JP3223822B2 JP3223822B2 (en) | 2001-10-29 |
Family
ID=18209982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32841296A Expired - Fee Related JP3223822B2 (en) | 1996-12-09 | 1996-12-09 | MgO composite ceramics and method for producing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3223822B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1672667A2 (en) | 2004-12-17 | 2006-06-21 | Samsung SDI Co., Ltd. | Plasma display panel including protective layer and method of forming the protective layer |
| US20140144775A1 (en) * | 2011-07-01 | 2014-05-29 | Nippon Tungsten Co., Ltd. | MgO TARGET FOR SPUTTERING |
-
1996
- 1996-12-09 JP JP32841296A patent/JP3223822B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1672667A2 (en) | 2004-12-17 | 2006-06-21 | Samsung SDI Co., Ltd. | Plasma display panel including protective layer and method of forming the protective layer |
| US20140144775A1 (en) * | 2011-07-01 | 2014-05-29 | Nippon Tungsten Co., Ltd. | MgO TARGET FOR SPUTTERING |
| US9773652B2 (en) * | 2011-07-01 | 2017-09-26 | Ube Material Industries, Ltd. | MgO target for sputtering |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3223822B2 (en) | 2001-10-29 |
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