JPH10144943A - Solar cell and its manufacture - Google Patents
Solar cell and its manufactureInfo
- Publication number
- JPH10144943A JPH10144943A JP8300123A JP30012396A JPH10144943A JP H10144943 A JPH10144943 A JP H10144943A JP 8300123 A JP8300123 A JP 8300123A JP 30012396 A JP30012396 A JP 30012396A JP H10144943 A JPH10144943 A JP H10144943A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- solar cell
- silver
- substrate
- aluminum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/546—Polycrystalline silicon PV cells
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- Photovoltaic Devices (AREA)
Abstract
Description
【０００１】[0001]
【発明に属する技術分野】本発明は、たとえば、シリコ
ン多結晶太陽電池セル,シリコン単結晶太陽電池セルの
構造および製造方法に関する。さらに詳しくは、高性能
でかつ機械的強度の強い太陽電池セルおよびその製造方
法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to, for example, the structure and manufacturing method of a polycrystalline silicon solar cell and a monocrystalline silicon solar cell. More specifically, the present invention relates to a solar cell having high performance and high mechanical strength, and a method for manufacturing the same.
【０００２】[0002]
【従来の技術】従来の太陽電池セルの製造方法およびセ
ル構造を図８に示す。2. Description of the Related Art FIG. 8 shows a conventional method for manufacturing a solar cell and a cell structure.
【０００３】まず、図８(１)に示すように、０.４mm
厚、結晶軸(１００)のｐ型シリコン基板１０１を数％の
水酸化ナトリウムとイソプロピルアルコールを溶かした
８０℃の溶液中で３０分間処理し、基板表面１０１Ａの
ダメージを取り去るとともに表面１０１Ａにピラミッド
状の凹凸１０２を形成する(テクスチャーエッチ工程)。
なお、図８(１)において一点鎖線で囲んだ部分は所定の
倍率で拡大されている。[0003] First, as shown in FIG.
The p-type silicon substrate 101 having a thickness and a crystal axis of (100) is treated for 30 minutes in an 80 ° C. solution in which several percent of sodium hydroxide and isopropyl alcohol are dissolved, thereby removing the damage on the substrate surface 101A and forming a pyramid on the surface 101A. Is formed (texture etching step).
In FIG. 8A, a portion surrounded by a dashed line is enlarged at a predetermined magnification.
【０００４】次に、図８(２)に示すように、基板１０１
を１０００℃で３０分間処理し、n型不純物(一般にはリ
ン)を拡散することにより、基板表面にｐｎ接合１０３
を形成する。[0004] Next, as shown in FIG.
Is treated at 1000 ° C. for 30 minutes to diffuse an n-type impurity (generally, phosphorus) to form a pn junction 103 on the substrate surface.
To form
【０００５】次に、図８(３)に示すように、スプレー法
を用いて受光面１０４に金属酸化物を形成し反射防止膜
１０５とする。そして、受光面１０４を耐酸テープで覆
った後、フッ酸と硝酸の混合液で３０秒間処理し、裏
面,側面の不要なｎ型拡散層１０６Ｂ,１０６Ｃを除去し
て、図８(４)に示すように、受光面１０４にｎ型拡散層
１０６Ａと反射防止膜１０５が順に積層した構造にす
る。[0005] Next, as shown in FIG. 8 (3), a metal oxide is formed on the light receiving surface 104 by a spray method to form an antireflection film 105. Then, after covering the light-receiving surface 104 with an acid-resistant tape, it is treated with a mixed solution of hydrofluoric acid and nitric acid for 30 seconds to remove unnecessary n-type diffusion layers 106B and 106C on the back and side surfaces. As shown, the light receiving surface 104 has a structure in which an n-type diffusion layer 106A and an antireflection film 105 are sequentially stacked.
【０００６】次に、図８(５)に示すように、基板１０１
の裏面に銀ペーストとアルミペーストをスクリーン印刷
して７００℃〜８００℃で焼成する。これにより、アル
ミペーストはシリコン基板１０１と合金化して裏面にＰ
＋層１１０を形成する。この構造によって、太陽電池セ
ルの高出力化を図ることができる。[0008] Next, as shown in FIG.
A silver paste and an aluminum paste are screen-printed on the back surface and fired at 700 ° C to 800 ° C. As a result, the aluminum paste is alloyed with the silicon substrate 101 and P
The + layer 110 is formed. With this structure, high output of the solar cell can be achieved.
【０００７】上記アルミペーストで形成されたアルミ電
極１１１には直接はんだ付けができないから、銀ペース
トが構成する銀電極部１１２が出力取り出し用として基
板１０１の裏面に形成されるのである。Since the aluminum electrode 111 formed of the above-mentioned aluminum paste cannot be directly soldered, the silver electrode portion 112 made of the silver paste is formed on the back surface of the substrate 101 for taking out the output.
【０００８】一方、図８(６)に示すように、基板１０１
の表面にも、銀ペーストをスクリーン印刷し７００℃〜
７５０℃に焼成して、銀電極部１１５を形成する。そし
てさらに、１９０℃に加熱した銀入りはんだ(ＱＱＳ５
７１Ｓn６２等)槽にフラックスを塗布した基板１０１を
３０秒間浸漬し、図８(７)に示すように、表裏の銀電極
部１１２と１１５にはんだ層１１６を被覆した後、キシ
レン、トルエン、アセトン等の有機溶剤にてフラックスを
洗浄除去して、太陽電池セル１１７が完成する。On the other hand, as shown in FIG.
Screen printing of silver paste on the surface of
By firing at 750 ° C., the silver electrode portion 115 is formed. Further, the solder containing silver heated to 190 ° C. (QQS5
The substrate 101 coated with the flux is immersed in a bath for 30 seconds, and as shown in FIG. 8 (7), the silver electrodes 112 and 115 on the front and back are coated with a solder layer 116, and then xylene, toluene, acetone, etc. The flux is washed and removed with the organic solvent described above to complete the solar cell 117.
【０００９】この従来の太陽電池セル１１７の表面形状
を図９に示し、裏面形状を図１０に示す。図７(Ｂ)に示
すように、この従来の太陽電池セル１１７裏面では、高
出力化のためにアルミ電極１１１と出力取り出し用の銀
電極１１２とが、部分的に重なり合うように形成されて
いる。この重なり合った部分１２０は、シリコン、銀、ア
ルミの３種の金属が合金化しており、非常に脆弱になっ
ている。そのため、はんだ被覆工程等で基板１０１が急
激に加熱、冷却されると基板が割れ歩留が低下する要因
になる。つまり、はんだ工程では基板が急激に加熱、冷
却されて割れ易くなるとともに、はんだと基板、電極材
料との熱膨張係数の差に起因する応力によっても基板が
割れ易くなるため歩留が低下するのである。FIG. 9 shows a surface shape of this conventional solar cell 117, and FIG. 10 shows a back surface shape thereof. As shown in FIG. 7B, on the back surface of the conventional solar cell 117, an aluminum electrode 111 and a silver electrode 112 for taking out output are formed so as to partially overlap each other in order to increase the output. . The overlapped portion 120 is extremely brittle because three kinds of metals, silicon, silver and aluminum, are alloyed. Therefore, when the substrate 101 is rapidly heated and cooled in the solder coating step or the like, the substrate is cracked, which causes a reduction in yield. In other words, in the soldering process, the substrate is rapidly heated and cooled to be easily cracked, and the yield is lowered because the substrate is easily cracked due to the stress caused by the difference in the thermal expansion coefficient between the solder, the substrate, and the electrode material. is there.
【００１０】他方で、太陽電池セルのコスト低減のため
には、今後、原価比率の高い基板をより薄くする必要が
あるが、このような薄型化を行うに際して、上述の重な
り合った脆弱な部分でのセル割れが大きな障害となる。On the other hand, in order to reduce the cost of the photovoltaic cell, it is necessary to make the substrate having a high cost ratio thinner in the future. Cell breakage is a major obstacle.
【００１１】また、図８(１)に示したように、表面にピ
ラミッド状の凹凸１０２を形成する(テクスチャーエッ
チ)ことにより、セル表面での光の反射ロスをなくし高
出力化が可能となる。このテクスチャーエッチ処理は
(１００)の結晶軸を有するウエハにおいてより効果的と
なるので、太陽電池用基板として(１００)面の結晶が用
いられることが多い。Further, as shown in FIG. 8A, by forming pyramid-shaped irregularities 102 on the surface (texture etch), it is possible to eliminate the reflection loss of light on the cell surface and to increase the output. . This texture etch process
Since a wafer having a (100) crystal axis is more effective, a (100) crystal is often used as a solar cell substrate.
【００１２】しかし、(１００)の結晶軸を有する基板の
場合、ウエハの辺のあたる部分が(０１０)、(００１)の
結晶軸を有することが一般的であるので、セルが基板の
辺に平行あるいは直角に割れることが多い。一方で、ア
ルミ電極１１１と出力取り出し用の銀電極１１２とが重
なり合った脆弱な部分１２０は、ウエハの辺に平行もし
くは直角に並んでいることが多い。したがって、上記平
行あるいは直角方向への割れやすさは、１つの脆弱部分
１２０からの平行あるいは直角方向への割れが他の脆弱
部分１２０の割れを連続的に引き起こし易くなる。However, in the case of a substrate having a crystal axis of (100), a portion corresponding to the side of the wafer generally has a crystal axis of (010) or (001). Often split parallel or perpendicular. On the other hand, the fragile portions 120 where the aluminum electrodes 111 and the silver electrodes 112 for taking out output overlap are often arranged in parallel or at right angles to the side of the wafer. Therefore, the above-mentioned cracks in the parallel or perpendicular direction are likely to cause cracks in the parallel or perpendicular direction from one fragile portion 120 to continuously cause cracks in the other fragile portion 120.
【００１３】また、一般には、上記従来例に示したよう
に、裏面の銀ペーストとアルミペーストとを印刷した後
に焼成するか、あるいは、裏面の銀ペーストとアルミペ
ーストおよび表面の銀ペーストを印刷した後に焼成して
電極を形成する。この場合、アルミペーストと銀ペース
トとシリコン基板１０１とが一層反応し易くなって、脆
弱な３種の金属の合金層がより深く形成される。したが
って、アルミ電極１１１と銀電極１１２とが重なり合っ
た部分１２０がさらにより脆弱となりセルが一層割れ易
くなる。In general, as shown in the above-mentioned conventional example, the silver paste and the aluminum paste on the back surface are printed and then fired, or the silver paste and the aluminum paste on the back surface and the silver paste on the front surface are printed. After firing, an electrode is formed. In this case, the aluminum paste, the silver paste, and the silicon substrate 101 react more easily, and an alloy layer of three kinds of fragile metals is formed deeper. Therefore, the portion 120 where the aluminum electrode 111 and the silver electrode 112 overlap is much more fragile, and the cell is more easily broken.
【００１４】なお、図１１(Ａ)および図１１(Ｂ)に従来
の太陽電池セルの割れかたの一例を示す。図１１(Ａ)お
よび(Ｂ)を参照することによって、(1) 基板１０１の辺
に平行あるいは直角に割れることが多いことと、(2) ア
ルミ電極１１１と銀電極１１２とが重なり合った脆弱な
部分１２０を起点に割れることが多いことが分かる。ま
た、銀ペーストの印刷膜厚が厚いと銀電極１１２の一部
が剥離し、そこを起点に割れることも多い。FIGS. 11A and 11B show an example of how a conventional solar cell breaks. Referring to FIGS. 11A and 11B, it is found that (1) a crack that is often broken parallel or perpendicular to the side of the substrate 101 and (2) a fragile structure in which the aluminum electrode 111 and the silver electrode 112 overlap. It can be seen that there are many cracks starting from the portion 120. In addition, when the printed film thickness of the silver paste is large, a part of the silver electrode 112 is peeled off, and the silver electrode 112 often breaks there.
【００１５】[0015]
【発明が解決しようとする課題】そこで、本発明は前記
の問題に鑑みてなされたものであり、電極に起因する脆
弱さを解消でき、薄型化に際しても製造の歩留まりを向
上でき、高性能かつ高信頼性の太陽電池セルおよびその
製造方法を提供することにある。SUMMARY OF THE INVENTION Accordingly, the present invention has been made in view of the above-mentioned problems, and can eliminate the fragility caused by the electrodes, can improve the production yield even in the case of thinning, can achieve high performance, An object of the present invention is to provide a highly reliable solar cell and a method for manufacturing the same.
【００１６】[0016]
【課題を解決するための手段】本発明は、アルミペース
トを基板裏面にスクリーン印刷してp＋層を形成する太
陽電池セルにおいて、電極パターンやペースト材料、基
板材料の変更や製造プロセスの変更によりセルの強度を
改善し、セル割れを低減するものである。SUMMARY OF THE INVENTION The present invention relates to a solar cell in which a p + layer is formed by screen-printing an aluminum paste on the back surface of a substrate, by changing an electrode pattern, a paste material, a substrate material, and a manufacturing process. To improve cell strength and reduce cell cracking.
【００１７】上記目的を達成するために、請求項１の発
明は、図６(Ｂ)に示すように、裏面の出力取り出し用の
銀電極が有する複数の細線がアルミ電極と重なり合うよ
うに構成した。したがって、はんだ被覆工程やインター
コネクタ接続工程等でセルが急熱急冷される際の熱的な
応力を上記複数の細線に分散できる。したがって、セル
を割れにくくできる。したがって、より薄いシリコンウ
エハを使用でき、大幅な材料コストダウンを図ることが
できる。In order to achieve the above object, the invention of claim 1 is configured such that a plurality of fine wires of a silver electrode for output extraction on the back surface overlap with an aluminum electrode as shown in FIG. 6 (B). . Therefore, the thermal stress when the cell is rapidly heated and quenched in the solder coating step, the interconnector connection step, and the like can be distributed to the plurality of fine wires. Therefore, the cells can be hardly broken. Therefore, a thinner silicon wafer can be used, and the material cost can be significantly reduced.
【００１８】また、請求項２の発明は、裏面の出力取り
出し用の銀電極が、上記アルミ電極に重なっていなくて
上記細線部分に連なっている基部を備え、この基部は上
記細線部分よりも幅太の帯状であり、スリットを有して
いる。したがって、この基部に電気的接続のためのはん
だを被覆する際に、はんだが基部に乗り易くなって、は
んだによる被覆量を均一にできる。したがって、インタ
ーコネクタの接続も作業性良く確実に行え、また、モジ
ュール組み立て時のセル割れも低減する。Further, according to a second aspect of the present invention, the silver electrode for taking out the output on the back surface has a base which is not overlapped with the aluminum electrode but is connected to the thin wire portion, and the base has a width wider than that of the thin wire portion. It is a thick band and has slits. Therefore, when the base is coated with the solder for electrical connection, the solder can be easily mounted on the base, and the amount of the coating with the solder can be made uniform. Therefore, connection of the interconnector can be reliably performed with good workability, and cell cracking during module assembly is reduced.
【００１９】また、請求項３の発明は、上記出力取り出
し用の銀電極が、２μm以上の球状銀粉末を用いた銀電
極用ペーストを焼結して作製されている。したがって、
請求項３の発明によれば、ペーストの焼結時の応力を低
減でき、太陽電池セルを割れにくくできる上に、ペース
トの印刷膜厚が厚くても、銀電極が剥離しにくくなる。Further, in the invention according to claim 3, the silver electrode for taking out the output is produced by sintering a silver electrode paste using a spherical silver powder of 2 μm or more. Therefore,
According to the third aspect of the present invention, the stress at the time of sintering the paste can be reduced, the solar cell can be hardly broken, and even if the printed film thickness of the paste is large, the silver electrode is hardly peeled off.
【００２０】また、請求項４の発明は、基板が(１００)
の結晶軸を有し、上記基板の側辺が上記基板の(０１０)
面から±４５°以内でずれている。したがって、アルミ
電極と銀電極とが重なっている脆弱部分が基板側辺に直
角あるいは平行に並んでいる場合に、脆弱部分の連続割
れを防ぐことができる。According to a fourth aspect of the present invention, the substrate is (100)
And the side of the substrate is (010)
It deviates within ± 45 ° from the surface. Therefore, when the fragile portion where the aluminum electrode and the silver electrode overlap is arranged at right angles or parallel to the side of the substrate, continuous cracking of the fragile portion can be prevented.
【００２１】また、請求項５の発明は、請求項１乃至４
のいずれか１つに記載の太陽電池セルを製造する太陽電
池セルの製造方法において、上記基板の裏面に銀電極用
ペーストを印刷して焼成して上記銀電極を形成してか
ら、アルミ電極用ペーストを印刷して焼成して上記アル
ミ電極を形成する。Further, the invention of claim 5 provides the invention according to claims 1 to 4
In the method for manufacturing a solar cell according to any one of the above, a silver electrode paste is printed and fired on the back surface of the substrate to form the silver electrode, The paste is printed and fired to form the aluminum electrode.
【００２２】したがって、銀電極の焼結された銀が、ア
ルミ電極のアルミと反応しにくくなる。したがって、ア
ルミと銀とシリコンとからなる脆弱な３種金属の合金層
が形成されることを抑制できる。したがって、電極に起
因する脆弱さを解消できる。Therefore, the sintered silver of the silver electrode hardly reacts with the aluminum of the aluminum electrode. Therefore, the formation of a brittle three-metal alloy layer made of aluminum, silver, and silicon can be suppressed. Therefore, the weakness caused by the electrode can be eliminated.
【００２３】したがって、本発明よれば、高性能でかつ
機械強度の高い太陽電池セルを提供できる。Therefore, according to the present invention, a solar cell having high performance and high mechanical strength can be provided.
【００２４】[0024]
【発明の実施の形態】以下、この発明の太陽電池セルお
よびその製造方法を図示の実施の形態に基づいて詳細に
説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a solar cell according to the present invention and a method for manufacturing the same will be described in detail with reference to the illustrated embodiments.
【００２５】図１に、この発明の太陽電池セルの製造方
法の実施形態を示す。FIG. 1 shows an embodiment of a method for manufacturing a solar cell according to the present invention.
【００２６】この実施形態では、まず、図１(１）に示
すように、０.４mm厚、結晶軸(１００)のｐ型シリコン
基板１を用いた。この基板１は、その側辺１Ｄが基板の
(０１０)面から４５°ずれている。この基板１を、数％
の水酸化ナトリウムとイソプロピルアルコールを溶かし
た８０℃の溶液中で３０分間処理し、基板表面１Ａのダ
メージを取り去るとともに表面１Ａにピラミッド状の凹
凸２を形成する(テクスチャーエッチ工程)。なお、図１
(１)において、一点鎖線で囲んだ部分は所定の倍率で拡
大されている。In this embodiment, first, as shown in FIG. 1A, a p-type silicon substrate 1 having a thickness of 0.4 mm and a crystal axis (100) was used. This substrate 1 has a side 1D of the substrate.
It is shifted by 45 ° from the (010) plane. This substrate 1 is several percent
Is treated in a solution of sodium hydroxide and isopropyl alcohol at 80 ° C. for 30 minutes to remove damage on the substrate surface 1A and form pyramid-shaped irregularities 2 on the surface 1A (texture etching step). FIG.
In (1), a portion surrounded by a chain line is enlarged at a predetermined magnification.
【００２７】次に、図１(２)に示すように、基板１を１
０００℃で３０分間処理し、n型不純物(一般にはリン)
を拡散することにより、基板表面にｐｎ接合３を形成す
る。Next, as shown in FIG.
Treated at 000 ° C for 30 minutes, n-type impurities (generally phosphorus)
Is diffused to form a pn junction 3 on the substrate surface.
【００２８】次に、図１(３)に示すように、スプレー法
を用いて受光面４に金属酸化物を形成し反射防止膜５と
する。そして、受光面４を耐酸テープで覆った後、フッ
酸と硝酸の混合液で３０秒間処理し、裏面,側面の不要
なｎ型拡散層６Ｂ,６Ｃを除去して、図１(４)に示すよ
うに、受光面４にｎ型拡散層６Ａと反射防止膜５が順に
積層した構造にする。Next, as shown in FIG. 1 (3), a metal oxide is formed on the light receiving surface 4 by using a spray method to form an antireflection film 5. Then, after covering the light-receiving surface 4 with an acid-resistant tape, it is treated with a mixed solution of hydrofluoric acid and nitric acid for 30 seconds to remove unnecessary n-type diffusion layers 6B and 6C on the back surface and side surfaces. As shown, the light receiving surface 4 has a structure in which an n-type diffusion layer 6A and an antireflection film 5 are sequentially stacked.
【００２９】次に、図１(５)に示すように、基板１の裏
面に、裏面銀電極用ペーストをスクリーン印刷し、７０
０℃〜７５０℃で焼成して、裏面の銀電極７を形成す
る。上記銀電極用ペーストは、粒径２μm以上の球状銀
粉末８０％,ガラスフリット４％,ビヒクル１６％から成
る。図４に、銀電極７を裏面側から見たパターンを示
す。この銀電極７は、基板１の側辺１Ｄに平行に延びる
２本のレール状パターンになっていて、幅太で帯状の基
部１０とこの基部１０から横方向に延びる細線部１１と
を有している。この細線部１１は帯状の基部１０が延び
る方向に沿って所定の間隔を隔てて並んでいる。また、
上記帯状の基部１０は、上記細線部１１と略同じ間隔で
並んでいる長方形状の複数のスリット１２を有してい
る。Next, as shown in FIG. 1 (5), the back surface silver electrode paste was screen-printed on the back surface of the
By baking at 0 ° C. to 750 ° C., a silver electrode 7 on the back surface is formed. The silver electrode paste is composed of 80% of spherical silver powder having a particle size of 2 μm or more, 4% of glass frit, and 16% of vehicle. FIG. 4 shows a pattern of the silver electrode 7 as viewed from the back side. The silver electrode 7 is in the form of two rails extending in parallel to the side 1D of the substrate 1 and has a wide, band-shaped base 10 and a thin line 11 extending laterally from the base 10. ing. The thin line portions 11 are arranged at predetermined intervals along the direction in which the band-shaped base 10 extends. Also,
The strip-shaped base 10 has a plurality of rectangular slits 12 arranged at substantially the same interval as the thin wire section 11.
【００３０】次に、図１(６)に示すように、基板１の裏
面にアルミペーストをスクリーン印刷し、基板１の表面
に銀ペーストをスクリーン印刷して、それぞれ、７００
℃〜８００℃で焼成して、アルミ電極１３および表銀電
極１５を形成する。Next, as shown in FIG. 1 (6), aluminum paste is screen-printed on the back surface of the substrate 1 and silver paste is screen-printed on the surface of the substrate 1, and
The aluminum electrode 13 and the surface silver electrode 15 are formed by firing at a temperature of 800C to 800C.
【００３１】図３(Ａ)に表銀電極１５を表面側から見た
パターンを示し、図３(Ｂ)にアルミ電極１３を裏面側か
ら見たパターンを示す。表銀電極１５は平行な２本の太
線１７,１８と、この２本の太線１７と１８を横切るよ
うに延びている複数本の細線２０を有している。また、
アルミ電極１３は、上記裏面の２本の銀電極７,７に対
応する領域に長方形の開口２１，２１を有する四角形状
である。FIG. 3A shows a pattern when the front silver electrode 15 is viewed from the front side, and FIG. 3B shows a pattern when the aluminum electrode 13 is viewed from the rear side. The surface silver electrode 15 has two parallel thick lines 17 and 18 and a plurality of thin lines 20 extending across the two thick lines 17 and 18. Also,
The aluminum electrode 13 has a rectangular shape having rectangular openings 21 and 21 in regions corresponding to the two silver electrodes 7 on the rear surface.
【００３２】次に、図１(７)に示すように、表の銀電極
１５および裏の銀電極７に半田２３を被覆した後、キシ
レン、トルエン、アセトン等の有機溶剤によってフラック
スを洗浄して除去する。これにより、太陽電池セル２５
が完成する。Next, as shown in FIG. 1 (7), after the solder 23 is coated on the front silver electrode 15 and the back silver electrode 7, the flux is washed with an organic solvent such as xylene, toluene or acetone. Remove. Thereby, the solar cell 25
Is completed.
【００３３】この太陽電池セル２５を表面から見た様子
を図２(Ａ)に示し、太陽電池セル２５を裏面から見た様
子を図２(Ｂ)に示す。図２(Ａ)に示すように、表の銀電
極１５は基板１の表面の略全エリアに亘っている。ま
た、図２(Ｂ)に示すように、アルミ電極１３は、基板１
の裏面を略全エリアに亘って覆っている。そして、この
アルミ電極１３の２つの開口２１,２１から、裏の銀電
極７,７の帯状の基部１０と、横方向に延びる細線部１
１が露出している。ただし、図６(Ｂ)に断面を示すよう
に、この細線部１１の先の部分１１Ａは上記アルミ電極
１３と基板１の裏面とで挟まれていて、アルミ電極１３
に重なっている。FIG. 2A shows this solar cell 25 viewed from the front, and FIG. 2B shows the solar cell 25 viewed from the back. As shown in FIG. 2A, the silver electrodes 15 in the front cover substantially the entire area of the surface of the substrate 1. Further, as shown in FIG. 2B, the aluminum electrode 13 is
Is covered over substantially the entire area. Then, from the two openings 21, 21 of the aluminum electrode 13, the band-shaped base 10 of the silver electrodes 7, 7 on the back and the thin line portion 1 extending in the lateral direction are formed.
1 is exposed. However, as shown in the cross section in FIG. 6B, a portion 11A at the tip of the fine wire portion 11 is sandwiched between the aluminum electrode 13 and the back surface of the substrate 1, and the aluminum electrode 13
Overlaps.
【００３４】この実施形態の太陽電池セル２５によれ
ば、図６(Ｂ)に示すように、裏面の出力取り出し用の銀
電極７が有する複数の細線部１１がアルミ電極１３と重
なり合うように構成した。したがって、はんだ被覆工程
やインターコネクタ接続工程等でセル２５が急熱急冷さ
れる際の熱的な応力を上記複数の細線部１１に分散でき
る。したがって、セル２５を割れにくくできる。According to the solar cell 25 of this embodiment, as shown in FIG. 6 (B), the plurality of fine wire portions 11 of the silver electrode 7 for output extraction on the back surface are overlapped with the aluminum electrode 13. did. Therefore, the thermal stress generated when the cell 25 is rapidly heated and quenched in the solder coating step, the interconnector connection step, and the like can be distributed to the plurality of fine wire portions 11. Therefore, the cell 25 can be hardly broken.
【００３５】また、この実施形態によれば、裏面の出力
取り出し用の銀電極７の基部１０がスリット１２を有し
ている。したがって、この基部１０に電気的接続のため
のはんだ２３を被覆する際に、はんだ２３が基部１０に
乗り易くなって、図６(Ｂ)に示すように、はんだ２３に
よる被覆量を均一にできる。したがって、インターコネ
クタの接続も作業性良く確実に行え、また、モジュール
組み立て時のセル割れも低減する。Further, according to this embodiment, the base 10 of the silver electrode 7 for taking out output on the back surface has the slit 12. Therefore, when the base 23 is coated with the solder 23 for electrical connection, the solder 23 can easily ride on the base 10, and as shown in FIG. . Therefore, connection of the interconnector can be reliably performed with good workability, and cell cracking during module assembly is reduced.
【００３６】また、この実施形態は、上記出力取り出し
用の銀電極７が、２μm以上の球状銀粉末を用いた銀電
極用ペーストを焼結して作製されている。したがって、
ペーストの焼結時の応力を低減でき、太陽電池セルを割
れにくくできる上に、ペーストの印刷膜厚が厚くても、
銀電極７が剥離しにくくなる。In this embodiment, the silver electrode 7 for extracting output is manufactured by sintering a silver electrode paste using a spherical silver powder of 2 μm or more. Therefore,
The stress during sintering of the paste can be reduced, the solar cells can be hardly broken, and even if the printed film thickness of the paste is large,
It becomes difficult for the silver electrode 7 to peel off.
【００３７】また、この実施形態は、基板１が(１００)
の結晶軸を有し、上記基板１の側辺１Ｄが上記基板の
(０１０)面から±４５°だけずれている。したがって、
アルミ電極１３と銀電極７とが重なっている脆弱部分３
０の連続割れを防ぐことができる。なお、この実験例に
よれば、基板１の側辺１Ｄが上記基板の(０１０)面から
±４５°だけずれていることによって、従来例に比べて
セル強度を７％改善できた。Also, in this embodiment, the substrate 1 is (100)
And the side 1D of the substrate 1 is
It is shifted by ± 45 ° from the (010) plane. Therefore,
Fragile portion 3 where aluminum electrode 13 and silver electrode 7 overlap
0 continuous cracks can be prevented. According to this experimental example, since the side 1D of the substrate 1 was shifted by ± 45 ° from the (010) plane of the substrate, the cell strength could be improved by 7% as compared with the conventional example.
【００３８】また、上記実施の形態の製造方法によれ
ば、基板１の裏面に銀電極用ペーストを印刷して焼成し
て上記銀電極７を形成してから、アルミ電極用ペースト
を印刷して焼成して上記アルミ電極１３を形成する。し
たがって、銀電極７の焼結された銀が、アルミ電極１３
のアルミと反応しにくくなる。したがって、アルミと銀
とシリコンとからなる脆弱な３種金属の合金層が形成さ
れることを抑制でき、電極に起因する脆弱さを解消でき
る。なお、実験例によれば、この製造方法によって、従
来の方法に比べて、セル強度を２０％改善できた。Further, according to the manufacturing method of the above embodiment, the silver electrode 7 is formed by printing and firing the silver electrode paste on the back surface of the substrate 1 and then printing the aluminum electrode paste. The aluminum electrode 13 is formed by firing. Therefore, the sintered silver of the silver electrode 7 is
Reaction with aluminum. Therefore, it is possible to suppress the formation of a brittle trimetallic alloy layer made of aluminum, silver, and silicon, and to eliminate the brittleness caused by the electrodes. According to the experimental example, the cell strength could be improved by 20% by this manufacturing method as compared with the conventional method.
【００３９】したがって、上記実施の形態の太陽電池セ
ルの製造方法および太陽電池セルによれば、高性能でか
つ機械強度の高い太陽電池セルを提供できる。Therefore, according to the solar cell manufacturing method and the solar cell of the above embodiment, a solar cell having high performance and high mechanical strength can be provided.
【００４０】〔実験結果〕図１４に、裏面の銀電極の形
状によって太陽電池セルの強度が変化することを確認し
た実験結果を黒丸で示す。セル強度は裏面銀電極が中心
になるようにセル(ウエハ厚２５０μm)を５cm角に切断
し、裏面銀電極部に反対の面から荷重をかけて破壊する
限界強度として求めた。[Experimental Results] FIG. 14 shows the experimental results by black circles in which it was confirmed that the strength of the solar battery cell varies depending on the shape of the silver electrode on the back surface. The cell strength was determined as a critical strength at which the cell (wafer thickness 250 μm) was cut into 5 cm square so that the back surface silver electrode was at the center, and a load was applied to the back surface silver electrode portion from the opposite surface to break.
【００４１】この実験結果によれば、上記アルミ電極１
３を図１５(Ａ)に示すように細線部１１の幅および細線
部１１間の間隔を１.０ｍｍの銀電極とした場合には、
強度が１２００ｇであった。また、上記アルミ電極１３
を図１５(Ｂ)に示すように細線部１１の幅および細線部
１１間の間隔を０.５ｍｍの銀電極とした場合には、強
度が１２００ｇであった。また、上記アルミ電極１３を
図１５(Ｃ)に示すように細線部１１の幅および細線部１
１間の間隔を０.２５ｍｍの銀電極とした場合には、強
度が１４００ｇであった。また、従来の太陽電池セルで
は、セルの強度は８００ｇであった。なお、この実験
は、上記各場合において、裏面銀電極がアルミ電極と重
なり合う部分の面積を同一にして行った。According to the results of the experiment, the aluminum electrode 1
3 is a silver electrode having a width of the thin line portions 11 and an interval between the thin line portions 11 of 1.0 mm as shown in FIG.
The strength was 1200 g. The aluminum electrode 13
As shown in FIG. 15B, when the width of the thin line portions 11 and the interval between the thin line portions 11 were 0.5 mm silver electrodes, the strength was 1200 g. Further, as shown in FIG. 15 (C), the width of the thin wire portion 11 and the width of the thin wire portion 1 are changed.
In the case where the distance between the electrodes was a 0.25 mm silver electrode, the strength was 1400 g. In the conventional solar cell, the cell strength was 800 g. Note that this experiment was performed with the same area of the portion where the back surface silver electrode overlaps the aluminum electrode in each of the above cases.
【００４２】上記実験から分かるように、裏面の銀電極
が細線部１１を備えることによって、セル強度が向上す
ることが実験により確認できた。また、細線部１１の幅
が最も狭い０.２５ｍｍ幅のパターンが最も強かった。As can be seen from the above experiment, it was confirmed by the experiment that the silver electrode on the back surface was provided with the fine wire portion 11 to improve the cell strength. In addition, the pattern having the narrowest width of 0.25 mm was the strongest.
【００４３】また、図１３に、裏面銀電極用ペーストが
含有する球状銀粉末の粒径とセル強度の関係を黒丸で示
す。粒径が１μm以下の銀粉末を含有するペーストに比
べて、粒径が２μm以上の銀粉末を含有するペーストの
方がセル強度が改善されている。ただし、あまり粒径が
大きすぎると基板への接着強度が低下するので望ましく
ない。FIG. 13 shows the relationship between the particle size and the cell strength of the spherical silver powder contained in the back surface silver electrode paste by black circles. As compared with a paste containing silver powder having a particle size of 1 μm or less, a paste containing silver powder having a particle size of 2 μm or more has improved cell strength. However, if the particle size is too large, the bonding strength to the substrate is reduced, which is not desirable.
【００４４】なお、上記実施形態の太陽電池セルでは、
裏面の銀電極７の形状を、図４に示す形状にしたが、裏
面の銀電極の形状としては、図５(Ａ)に示すように、複
数の細線５１が縦横に延びているメッシュ状パターンで
あってもよい。また、図６(Ｂ)に示すように、図４に示
したようなレール状パターンの銀電極７が７Ａ,７Ｂ,７
Ｃに３分割されたような形状であってもよい。また、図
５(Ｃ)に示すように、裏面の銀電極は、丸い形状の基部
５２から放射状に延びる複数の細線５３を有した形状の
３つの電極５５で構成されていてもよい。また、裏面の
銀電極が、図５(Ｄ)に示すように、複数の細線５７が縦
横に延びているメッシュ状の３つの電極５６で構成され
ていてもよい。In the solar cell of the above embodiment,
The shape of the silver electrode 7 on the back surface is the shape shown in FIG. 4, but the shape of the silver electrode on the back surface is a mesh pattern in which a plurality of fine lines 51 extend vertically and horizontally as shown in FIG. It may be. As shown in FIG. 6B, the silver electrode 7 having a rail-like pattern as shown in FIG.
The shape may be such that the C is divided into three. Further, as shown in FIG. 5C, the silver electrode on the back surface may be constituted by three electrodes 55 having a plurality of fine lines 53 extending radially from a round base 52. Further, the silver electrode on the back surface may be constituted by three mesh-like electrodes 56 in which a plurality of fine lines 57 extend vertically and horizontally as shown in FIG.
【００４５】なお、上記実施形態のような結晶軸が(１
００)の基板１の側辺１Ｄが(０１０)面から±４５°以
内でずれている基板を、上述の実施形態のような(ｎ＋
／ｐ／ｐ＋)構造のセルに適用するのではなく、従来型
の(ｎ＋／ｐ)セルに適用した場合にも、セル割れを抑制
できる効果がある。なぜならば、ペーストをスクリーン
印刷する場合、スキージが基板１に荷重をかけながら基
板１の側辺１Ｄに平行に移動するので、側辺１Ｄが(０
１０)面から±４５°以内でずれているほうが基板１が
割れにくくなるのである。Note that the crystal axis is (1) as in the above embodiment.
00), the side 1D of the substrate 1 is shifted within ± 45 ° from the (010) plane by the (n +
Even when the present invention is applied to a conventional (n + / p) cell instead of being applied to a cell having a (/ p / p +) structure, there is an effect of suppressing cell cracking. This is because when the paste is screen-printed, the squeegee moves in parallel with the side 1D of the substrate 1 while applying a load to the substrate 1, so that the side 1D is (0
10) The substrate 1 is less liable to be broken if it deviates from the plane within ± 45 °.
【００４６】[0046]
【発明の効果】以上の説明より明らかなように、請求項
１の発明の太陽電池セルは、図６(Ｂ)に示すように、裏
面の出力取り出し用の銀電極が有する複数の細線がアル
ミ電極と重なり合うように構成した。したがって、はん
だ被覆工程やインターコネクタ接続工程等でセルが急熱
急冷される際の熱的な応力を上記複数の細線に分散でき
る。したがって、セルを割れにくくできる。したがっ
て、より薄いシリコンウエハを使用でき、大幅な材料コ
ストダウンを図ることができる。また、基板への応力が
分散減少できるため、通常の厚さのシリコンウエハを使
用した場合には、セル割れが減少し歩留が上がる。As is apparent from the above description, as shown in FIG. 6 (B), the solar cell according to the first aspect of the present invention has a plurality of fine wires of a silver electrode for output output on the back surface formed of aluminum. It was configured to overlap the electrodes. Therefore, the thermal stress when the cell is rapidly heated and quenched in the solder coating step, the interconnector connection step, and the like can be distributed to the plurality of fine wires. Therefore, the cells can be hardly broken. Therefore, a thinner silicon wafer can be used, and the material cost can be significantly reduced. Further, since the stress applied to the substrate can be reduced and dispersed, when a silicon wafer having a normal thickness is used, cell cracking is reduced and the yield is increased.
【００４７】また、請求項２の発明は、裏面の出力取り
出し用の銀電極が、上記アルミ電極に重なっていなくて
上記細線部分に連なっている基部を備え、この基部は上
記細線部分よりも幅太の帯状であり、スリットを有して
いる。したがって、この基部に電気的接続のためのはん
だを被覆する際に、はんだが基部に乗り易くなって、は
んだによる被覆量を均一にできる。したがって、インタ
ーコネクタの接続も作業性良く確実に行え、また、モジ
ュール組み立て時のセル割れも低減する。また、セル裏
面の凹凸が少なくなるため、セルの電気特性検査時や、
セルをラミネートしモジュールに組み立てる工程でも、
セル割れが低減できる。According to a second aspect of the present invention, the silver electrode for taking out the output on the back surface has a base which is not overlapped with the aluminum electrode but is connected to the thin wire portion, and the base has a width wider than that of the thin wire portion. It is a thick band and has slits. Therefore, when the base is coated with the solder for electrical connection, the solder can be easily mounted on the base, and the amount of the coating with the solder can be made uniform. Therefore, connection of the interconnector can be reliably performed with good workability, and cell cracking during module assembly is reduced. In addition, since the unevenness on the back surface of the cell is reduced, it can be used when inspecting the electrical characteristics of the cell,
In the process of laminating cells and assembling them into modules,
Cell cracking can be reduced.
【００４８】また、脆弱なアルミ／銀／シリコン合金層
がはんだ付けをする基部から離れているので、インター
コネクタをはんだ付けする際の局部加熱に対しても割れ
にくい。Further, since the fragile aluminum / silver / silicon alloy layer is separated from the base for soldering, it is hard to be broken by local heating when soldering the interconnector.
【００４９】また、請求項３の発明は、上記出力取り出
し用の銀電極が、２μm以上の球状銀粉末を用いた銀電
極用ペーストを焼結して作製されている。したがって、
請求項３の発明によれば、ペーストの焼結時の応力を低
減でき、太陽電池セルを割れにくくできる上に、ペース
トの印刷膜厚が厚くても、銀電極が剥離しにくくなる。According to a third aspect of the present invention, the silver electrode for outputting power is manufactured by sintering a silver electrode paste using a spherical silver powder of 2 μm or more. Therefore,
According to the third aspect of the present invention, the stress at the time of sintering the paste can be reduced, the solar cell can be hardly broken, and even if the printed film thickness of the paste is large, the silver electrode is hardly peeled off.
【００５０】また、請求項４の発明は、基板が(１００)
の結晶軸を有し、上記基板の側辺が上記基板の(０１０)
面から±４５°以内でずれている。したがって、アルミ
電極と銀電極とが重なっている脆弱部分が基板側辺に直
角あるいは平行に並んでいる場合に、脆弱部分の連続割
れを防ぐことができる。According to a fourth aspect of the present invention, the substrate is (100)
And the side of the substrate is (010)
It deviates within ± 45 ° from the surface. Therefore, when the fragile portion where the aluminum electrode and the silver electrode overlap is arranged at right angles or parallel to the side of the substrate, continuous cracking of the fragile portion can be prevented.
【００５１】また、請求項５の発明は、請求項１乃至４
のいずれか１つに記載の太陽電池セルを製造する太陽電
池セルの製造方法において、上記基板の裏面に銀電極用
ペーストを印刷して焼成して上記銀電極を形成してか
ら、アルミ電極用ペーストを印刷して焼成して上記アル
ミ電極を形成する。Further, the invention of claim 5 provides the invention according to claims 1 to 4
In the method for manufacturing a solar cell according to any one of the above, a silver electrode paste is printed and fired on the back surface of the substrate to form the silver electrode, The paste is printed and fired to form the aluminum electrode.
【００５２】したがって、銀電極の焼結された銀が、ア
ルミ電極のアルミと反応しにくくなる。したがって、ア
ルミと銀とシリコンとからなる脆弱な３種金属の合金層
が形成されることを抑制できる。したがって、電極に起
因する脆弱さを解消できる。Therefore, the sintered silver of the silver electrode hardly reacts with the aluminum of the aluminum electrode. Therefore, the formation of a brittle three-metal alloy layer made of aluminum, silver, and silicon can be suppressed. Therefore, the weakness caused by the electrode can be eliminated.
【図１】 図１は本発明の太陽電池セルの製造方法の実
施形態を示すプロセス図である。FIG. 1 is a process diagram showing an embodiment of a method for manufacturing a solar cell according to the present invention.
【図２】 図２(Ａ)は本発明の太陽電池セルの実施形態
を表面から見た様子を示す形状図であり、図２(Ｂ)は上
記実施形態を裏面から見た様子を示す形状図である。FIG. 2 (A) is a shape view showing an embodiment of the solar battery cell of the present invention viewed from the front surface, and FIG. 2 (B) is a shape diagram showing the above embodiment viewed from the back surface. FIG.
【図３】 図３(Ａ)は上記実施形態の基板表面の銀電極
の形状を示す図であり、図３(Ｂ)は上記実施形態の基板
裏面のアルミ電極の形状を示す図である。FIG. 3A is a diagram illustrating a shape of a silver electrode on the surface of the substrate according to the embodiment, and FIG. 3B is a diagram illustrating a shape of an aluminum electrode on the back surface of the substrate according to the embodiment.
【図４】 図４は上記実施形態の裏面銀電極の形状を示
す図である。FIG. 4 is a diagram showing a shape of a back surface silver electrode of the embodiment.
【図５】 図５(Ａ)〜(Ｄ)は、上記実施形態の裏面銀電
極の変形例の形状を示す図である。FIGS. 5A to 5D are diagrams showing shapes of modified examples of the back surface silver electrode of the embodiment.
【図６】 図６(Ａ)は上記実施形態の裏面銀電極にはん
だが被覆された状態を裏面側から見た様子を示す図であ
り、図６(Ｂ)は上記状態の断面図である。FIG. 6A is a diagram showing a state in which the back surface silver electrode of the embodiment is coated with solder as viewed from the back surface side, and FIG. 6B is a cross-sectional view of the above state. .
【図７】 図７(Ａ)は従来の太陽電池セルの裏面銀電極
にはんだが被覆された状態を裏面側から見た様子を示す
図であり、図７(Ｂ)は上記状態の断面図である。FIG. 7A is a view showing a state in which solder is coated on a back surface silver electrode of a conventional solar cell as viewed from the back surface side, and FIG. 7B is a cross-sectional view of the above state. It is.
【図８】 図８は従来の太陽電池セルの製造プロセス図
である。FIG. 8 is a manufacturing process diagram of a conventional solar cell.
【図９】 図９は従来の太陽電池セルの表面形状図であ
る。FIG. 9 is a surface shape diagram of a conventional solar cell.
【図１０】 図１０は従来の太陽電池セルの裏面形状図
である。FIG. 10 is a rear view of a conventional solar cell.
【図１１】 図１１(Ａ)および(Ｂ)は従来の太陽電池セ
ルの割れ方を示す裏面形状図である。FIGS. 11 (A) and 11 (B) are rear surface shape views showing how a conventional solar cell is broken.
【図１２】 図１２(Ａ)は(０１０)面と基板側辺とが一
致している場合の割れ方を示す裏面形状図であり、図１
２(Ｂ)は(０１０)面と基板側辺とが４５°だけずれてい
る場合の割れ方を示す裏面形状図である。FIG. 12A is a back surface shape diagram showing how to break when the (010) plane is coincident with the side of the substrate.
FIG. 2 (B) is a rear surface shape diagram showing how to break when the (010) plane and the substrate side are shifted by 45 °.
【図１３】 裏面の銀電極を作製するペーストの銀粒径
とセル強度との関係を調べた実験結果を示す図である。FIG. 13 is a view showing an experimental result of examining a relationship between a silver particle size of a paste for producing a silver electrode on a back surface and cell strength.
【図１４】 裏面の銀電極の細線の寸法とセル強度との
関係を調べた実験結果を示す図である。FIG. 14 is a view showing an experimental result of examining a relationship between a dimension of a fine line of a silver electrode on a back surface and cell strength.
【図１５】 図１５(Ａ),(Ｂ),(Ｃ)は裏面の銀電極の細
線の寸法を１.０ｍｍ,０.５ｍｍ,０.２５ｍｍに設定し
た場合の形状を示す図である。FIGS. 15A, 15B, and 15C are views showing shapes when the fine line of the silver electrode on the back surface is set to 1.0 mm, 0.5 mm, and 0.25 mm.
１…基板、１Ｄ…側辺、２…凹凸、３…ｐｎ接合、４…
受光面、５…反射防止膜、６Ａ，６Ｂ，６Ｃ、７…裏面
の銀電極、１０…基部、１１…細線部、１２…スリッ
ト、１３…アルミ電極、１５…表銀電極、１７,１８…
太線、２０…細線、２１…開口、２３…はんだ、２５…
太陽電池セル、３０…脆弱部分。DESCRIPTION OF SYMBOLS 1 ... Substrate, 1D ... Side, 2 ... Unevenness, 3 ... pn junction, 4 ...
Light-receiving surface, 5: anti-reflection film, 6A, 6B, 6C, 7: silver electrode on the back surface, 10: base, 11: fine wire, 12: slit, 13: aluminum electrode, 15: surface silver electrode, 17, 18 ...
Thick line, 20 ... thin line, 21 ... opening, 23 ... solder, 25 ...
Solar cell, 30 ... fragile part.
Claims (5)
ペーストがｐ＋層とアルミ電極を形成している太陽電池
セルにおいて、 出力取り出し用の銀電極を備え、 この出力取り出し用の銀電極は、複数の細線で構成され
た細線部分を有し、この細線部分が上記基板裏面と上記
アルミ電極とで挟まれて上記アルミ電極に重なっている
ことを特徴とする太陽電池セル。1. A solar cell in which an aluminum paste screen-printed on the back surface of a substrate forms a p + layer and an aluminum electrode, comprising a silver electrode for extracting output, wherein the silver electrode for extracting output includes a plurality of silver electrodes. A solar cell having a thin line portion formed of a thin line, wherein the thin line portion is sandwiched between the back surface of the substrate and the aluminum electrode and overlaps the aluminum electrode.
て、 上記出力取り出し用の銀電極は、 上記アルミ電極に重なっていなくて上記細線部分に連な
っている基部を備え、この基部は、上記細線部分よりも
幅太の帯状であり、スリットを有していることを特徴と
する太陽電池セル。2. The solar cell according to claim 1, wherein the silver electrode for taking out the output has a base that does not overlap with the aluminum electrode but continues to the thin wire portion, and the base has the thin wire. A solar cell having a band shape wider than a portion and having a slit.
において、 上記出力取り出し用の銀電極は、 粒径が２μｍ以上の銀粉末からなる銀電極用ペーストを
焼結して作製されていることを特徴とする太陽電池セ
ル。3. The solar cell according to claim 1, wherein the silver electrode for extracting output is made by sintering a silver electrode paste made of silver powder having a particle size of 2 μm or more. A solar cell characterized by the above-mentioned.
太陽電池セルにおいて、 上記基板が(１００)の結晶軸を有し、 上記基板の側辺が上記基板の(０１０)面から±４５°以
内でずれていることを特徴とする太陽電池セル。4. The solar cell according to claim 1, wherein the substrate has a crystal axis of (100), and a side of the substrate extends from a (010) plane of the substrate. A solar cell characterized by being shifted within ± 45 °.
太陽電池セルを製造する太陽電池セルの製造方法におい
て、 上記基板の裏面に銀電極用ペーストを印刷して焼成して
上記銀電極を形成してから、アルミ電極用ペーストを印
刷して焼成して上記アルミ電極を形成することを特徴と
する太陽電池セルの製造方法。5. The method for manufacturing a solar cell according to claim 1, wherein a paste for a silver electrode is printed on the back surface of the substrate and fired by printing. A method for manufacturing a solar cell, comprising forming an electrode, printing and firing an aluminum electrode paste to form the aluminum electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30012396A JP3349370B2 (en) | 1996-11-12 | 1996-11-12 | Solar cell |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30012396A JP3349370B2 (en) | 1996-11-12 | 1996-11-12 | Solar cell |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10144943A true JPH10144943A (en) | 1998-05-29 |
| JP3349370B2 JP3349370B2 (en) | 2002-11-25 |
Family
ID=17881009
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30012396A Expired - Fee Related JP3349370B2 (en) | 1996-11-12 | 1996-11-12 | Solar cell |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3349370B2 (en) |
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