JPH10142152A - Measuring method and device of quantum efficiency of fluorescent material - Google Patents
Measuring method and device of quantum efficiency of fluorescent materialInfo
- Publication number
- JPH10142152A JPH10142152A JP30147896A JP30147896A JPH10142152A JP H10142152 A JPH10142152 A JP H10142152A JP 30147896 A JP30147896 A JP 30147896A JP 30147896 A JP30147896 A JP 30147896A JP H10142152 A JPH10142152 A JP H10142152A
- Authority
- JP
- Japan
- Prior art keywords
- wavelength
- phosphor
- amount
- quantum efficiency
- wavelengths
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Spectrometry And Color Measurement (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、蛍光体の量子効率
を測定する方法及び装置に関するものである。[0001] 1. Field of the Invention [0002] The present invention relates to a method and an apparatus for measuring the quantum efficiency of a phosphor.
【０００２】[0002]
【従来の技術】蛍光体の量子効率は、例えばランプ用蛍
光体が到達し得る効率の極限を知る尺度として極めて重
要で、主として絶対値法と相対値法の二種類の測定方法
が用いられてきた。2. Description of the Related Art The quantum efficiency of a fluorescent material is extremely important as a measure of the limit of the efficiency that a fluorescent material for a lamp can reach, for example, and two types of measurement methods, an absolute value method and a relative value method, have been mainly used. Was.
【０００３】絶対値法は、蛍光体に吸収される励起光の
光量子数（フォトン数）と蛍光の光量子数（フォトン
数）とを独立に測定し、その比から量子効率を求める方
法である。この方法では蛍光体に吸収される励起光のフ
ォトンの数は、以下の方法で求める。まず、単一波長の
励起放射に対して、サーモパイルなどの熱型放射検出器
や絶対放射計を使って、蛍光体面での放射照度を測定
し、絶対反射率が値付けされた硫酸バリウムなどを反射
率標準として、蛍光体面の反射率を測定して（１−反射
率）から吸収率を求め、両者の値から励起光の吸収エネ
ルギーのフォトン数を求める。次に、蛍光体からの相対
蛍光分光スペクトルを分光測光器で測定し、その絶対量
を、前述の熱型放射検出器や絶対放射計の前面に、励起
光を除去する光学フィルタを装着して、求め、相対蛍光
スペクトルと絶対量とからその蛍光フォトン数を導き、
吸収エネルギーのフォトン数との比から蛍光体の量子効
率を求める方法である。この方法では、励起光の吸収フ
ォトン数と蛍光フォトン数を定量的に測定する熱形放射
検出器や絶対放射計の感度が低いため、十分な測定精度
が得られない問題があった。The absolute value method is a method in which the photon number (photon number) of excitation light and the photon number (photon number) of fluorescence absorbed by a phosphor are independently measured, and the quantum efficiency is obtained from the ratio. In this method, the number of photons of the excitation light absorbed by the phosphor is obtained by the following method. First, the irradiance on the phosphor surface is measured using a thermal radiation detector such as a thermopile or an absolute radiometer for the excitation radiation of a single wavelength, and barium sulfate or the like whose absolute reflectance is assigned is measured. As a reflectance standard, the reflectance of the phosphor surface is measured to determine the absorptance from (1−reflectance), and the photon number of the absorption energy of the excitation light is determined from both values. Next, the relative fluorescence spectroscopy spectrum from the phosphor is measured with a spectrophotometer, and the absolute amount is measured by attaching an optical filter that removes the excitation light to the front of the aforementioned thermal radiation detector or absolute radiometer. , Find and derive the number of fluorescence photons from the relative fluorescence spectrum and absolute amount
In this method, the quantum efficiency of the phosphor is obtained from the ratio of the absorbed energy to the number of photons. This method has a problem that sufficient measurement accuracy cannot be obtained because the sensitivity of a thermal radiation detector or an absolute radiometer that quantitatively measures the number of absorption photons and the number of fluorescence photons of excitation light is low.
【０００４】この問題を解決する手段として、図８に示
すような方法が提案されている。この方法は、まず、測
定しようとする蛍光体１２の蛍光体面が積分球１３の第
１の窓１４に装着し、積分球１３の第２の窓１５から、
光源１６、光学系１７、光学フィルタ１８から照射され
た蛍光体１２の励起光１９を入射させ、蛍光体１２の蛍
光体面に前記励起光１９を照射する。蛍光体１２の蛍光
体面から発する励起光１９の反射スペクトルと蛍光スペ
クトルを前記積分球１３で積分し、積分球１３の第３の
窓２０に装着した分光測定器２１で測定する。このとき
の分光測定器２１の出力をそれぞれＲ（λ）、Ｐ（λ）
とする。このとき、積分球１３の積分効率をη、分光測
定器２１の効率の補正係数をＫ・ｆ（λ）とすると、蛍
光体１２の蛍光体面での励起光１９の反射スペクトルは
η・Ｋ・ｆ（λ）・Ｒ（λ）、蛍光スペクトルは、η・
Ｋ・ｆ（λ）・Ｐ（λ）となる。次に、蛍光体１２の代
わりに、反射率が既知の反射率標準２２を積分球１３の
第１の窓１４に装着して前記と同様の測定を行なうこと
により、蛍光体１２の蛍光体面に入射した励起光１９の
分光放射照度η・Ｋ・ｆ（λ）・１／α（λ）・Ｅ
（λ）が得られる。このとき、α（λ）は、反射率標準
２２の分光反射率、Ｅ（λ）は、このときの分光測定器
２１の読みである。この結果から、蛍光体１２に吸収さ
れる励起光１９の分光エネルギー分布は、As a means for solving this problem, a method as shown in FIG. 8 has been proposed. In this method, first, the phosphor surface of the phosphor 12 to be measured is mounted on the first window 14 of the integrating sphere 13, and from the second window 15 of the integrating sphere 13,
The excitation light 19 of the phosphor 12 radiated from the light source 16, the optical system 17, and the optical filter 18 is incident, and the phosphor surface of the phosphor 12 is irradiated with the excitation light 19. The reflection spectrum and the fluorescence spectrum of the excitation light 19 emitted from the phosphor surface of the phosphor 12 are integrated by the integrating sphere 13 and measured by the spectrometer 21 attached to the third window 20 of the integrating sphere 13. The outputs of the spectrometer 21 at this time are R (λ) and P (λ), respectively.
And At this time, assuming that the integration efficiency of the integrating sphere 13 is η and the correction coefficient of the efficiency of the spectrometer 21 is K · f (λ), the reflection spectrum of the excitation light 19 on the phosphor surface of the phosphor 12 is η · K · f (λ) · R (λ), the fluorescence spectrum is η ·
K · f (λ) · P (λ). Next, instead of the phosphor 12, a reflectance standard 22 having a known reflectance is attached to the first window 14 of the integrating sphere 13, and the same measurement as described above is performed. Spectral irradiance η · K · f (λ) · 1 / α (λ) · E of the incident excitation light 19
(Λ) is obtained. At this time, α (λ) is the spectral reflectance of the reflectance standard 22 and E (λ) is the reading of the spectrometer 21 at this time. From this result, the spectral energy distribution of the excitation light 19 absorbed by the phosphor 12 is:
【０００５】[0005]
【数１】 η・Ｋ・ｆ（λ）・（１／α（λ））・Ｅ（λ）−η・Ｋ・ｆ（λ）・Ｒ（λ） ＝η・Ｋ｛ｆ（λ）・（１／α（λ））・Ｅ（λ）−ｆ（λ）・Ｒ（λ）｝ ＝η・Ｋ・Ａ（λ） 但し、 Ａ（λ）＝｛ｆ（λ）・（１／α（λ））・Ｅ（λ）−ｆ
（λ）・Ｒ（λ）｝ となるため、量子効率εはΗ · K · f (λ) · (1 / α (λ)) · E (λ) −η · K · f (λ) · R (λ) = η · K ｛f (λ) · (1 / α (λ)) · E (λ) −f (λ) · R (λ)｝ = η · K · A (λ) where A (λ) = ｛f (λ) · (1 / α (Λ)) · E (λ) -f
(Λ) · R (λ)｝, the quantum efficiency ε is
【０００６】[0006]
【数２】 (Equation 2)
【０００７】λ3，λ4：蛍光スペクトルが存在する波長
範囲 λ5，λ6：励起スペクトルの波長範囲 で与えられ、η、Ｋを絶対放射計などで求める必要がな
く、相対分光分布から高精度に蛍光体の量子効率を求め
ることができる。[Lambda] 3, [lambda] 4: wavelength range where the fluorescence spectrum exists [lambda] 5, [lambda] 6: given by the wavelength range of the excitation spectrum, it is not necessary to determine η and K with an absolute radiometer, etc. Can be obtained.
【０００８】[0008]
【発明が解決しようとする課題】近年、特定波長λ1で
の量子効率が既知の蛍光体について別の波長λ2での量
子効率を求める場合が多い。例えば、蛍光灯などで使用
されている２５４ｎｍからプラズマディスプレイで使用
されている１４７ｎｍの量子効率を求める場合などがあ
る。このような場合、波長λ2に対し、前記量子効率測
定方法を用いる必要がある。この方法では、積分球が必
要になり、このため、光量が不足しがちであり、強力な
励起光や高精度の分光器が必要であった。また、積分球
と分光反射率標準を使用するため、測定系が複雑であ
る。In recent years, the quantum efficiency at another wavelength λ2 of a phosphor whose quantum efficiency at a specific wavelength λ1 is known is often found. For example, there is a case where the quantum efficiency from 254 nm used in a fluorescent lamp or the like to 147 nm used in a plasma display is obtained. In such a case, it is necessary to use the quantum efficiency measurement method for the wavelength λ2. In this method, an integrating sphere is required, which tends to result in a shortage of light quantity, and requires a strong excitation light and a high-precision spectroscope. In addition, since an integrating sphere and a spectral reflectance standard are used, the measurement system is complicated.
【０００９】本発明は、上述した方法の課題を考慮し、
蛍光体の量子効率を簡易な構成で精度よく測定すること
ことができる蛍光体の量子効率測定方法および装置を提
供することを目的とする。The present invention has been made in view of the above-mentioned problems of the method,
An object of the present invention is to provide a method and an apparatus for measuring quantum efficiency of a phosphor, which can accurately measure the quantum efficiency of the phosphor with a simple configuration.
【００１０】[0010]
【課題を解決するための手段】特定波長λ1での放射に
対する吸収率と量子効率が既知の測定しようとする蛍光
体と、波長λ1の放射束を発生する光源１と、波長λ2の
放射を発生する光源２と、前記波長λ2の放射束を前記
蛍光体に導き波長λ1とλ2に対し波長選択性を持たない
光学系と、前記波長λ1とλ2の放射量と反射量を測定す
る放射検出器と、前記蛍光体の発光スペクトルを測定す
る分光測定器とからなり、前記蛍光体の波長λ2の放射
束と波長λ1の放射束の蛍光体面での入射量を放射検出
器で測定し、前記蛍光体の波長λ2での放射束と波長λ1
での放射束の光源１あるいは光源２の光軸と、放射検出
器の入射面の法線あるいは蛍光体面の法線とのなす入射
角θ１と反射角θ２の反射量を放射検出器で測定し、波
長λ1とλ2の前記蛍光体への入射量と、反射角θ２方向
への反射量と、波長λ1における吸収率とから、前記蛍
光体の波長λ2に対する放射束の吸収率を求め、波長λ1
とλ2の入射量と吸収率から吸収量を求め、波長λ1とλ
2の発光スペクトルから発光量を求め、吸収量の光量子
と発光量の光量子を除算し、さらに波長λ1の量子効率
と比較して、波長λ2の蛍光体の量子効率を求める。SUMMARY OF THE INVENTION A phosphor whose absorption and quantum efficiency are known for radiation at a specific wavelength .lambda.1 to be measured, a light source 1 for generating a radiant flux of wavelength .lambda.1, and a source for generating radiation of wavelength .lambda.2. A light source 2 that guides the radiant flux of the wavelength λ2 to the phosphor, does not have wavelength selectivity with respect to the wavelengths λ1 and λ2, and a radiation detector that measures the radiant and reflectivity of the wavelengths λ1 and λ2 And a spectrometer for measuring the emission spectrum of the phosphor, measuring the incident amount of the luminous flux of wavelength λ2 and the radiant flux of wavelength λ1 of the phosphor on the phosphor surface with a radiation detector, Radiation flux at wavelength λ2 of the body and wavelength λ1
The radiation detector measures the amount of reflection of the incident angle θ1 and the reflection angle θ2 between the optical axis of the light source 1 or the light source 2 of the radiant flux and the normal to the incident surface of the radiation detector or the normal to the phosphor surface. From the incident amounts of the wavelengths λ1 and λ2 to the phosphor, the amount of reflection in the reflection angle θ2 direction, and the absorptance at the wavelength λ1, the absorptance of the luminous flux with respect to the wavelength λ2 of the phosphor is determined.
The absorption amount is calculated from the incident light amount and the absorption ratio of λ 1 and λ 2, and the wavelengths λ 1 and λ
The light emission amount is obtained from the light emission spectrum of No. 2, the light quantum of the light absorption amount is divided by the light quantum of the light emission amount, and further compared with the quantum efficiency of the wavelength λ1 to obtain the quantum efficiency of the phosphor of the wavelength λ2.
【００１１】また、波長λ1とλ2が紫外域の波長であ
り、測定雰囲気が窒素または真空である。The wavelengths λ1 and λ2 are ultraviolet wavelengths, and the measurement atmosphere is nitrogen or vacuum.
【００１２】さらに、波長λ1が２５４ｎｍの紫外光で
あり、波長λ2が波長２００ｎｍ以下の真空紫外域であ
り、波長λ2の測定雰囲気が窒素または真空である。Further, the wavelength λ1 is ultraviolet light having a wavelength of 254 nm, the wavelength λ2 is a vacuum ultraviolet region having a wavelength of 200 nm or less, and the measurement atmosphere of the wavelength λ2 is nitrogen or vacuum.
【００１３】加えて、入射角θ１が０゜、反射角θ２が
４５゜である。In addition, the incident angle θ1 is 0 ° and the reflection angle θ2 is 45 °.
【００１４】[0014]
【発明の実施の形態】以下、本発明の実施の形態につい
て図面を参照して説明する。Embodiments of the present invention will be described below with reference to the drawings.
【００１５】本実施の形態における測定方法は、図１に
示すように、測定１から測定６までの６つの測定と、こ
れらの測定結果を用いた量子効率算出過程からなる。図
２から図７は測定１から測定６の具体的な実施の形態を
示すもので、波長λ1は２５４ｎｍ、波長λ2は１４７ｎ
ｍとし、光源の光軸と放射検出器の入射面の法線あるい
は蛍光体面の法線とのなす入射角θ１は０゜、反射角θ
２は４５゜とし、光源には重水素ランプ、光学系には１
４７ｎｍと２５４ｎｍに対して透過特性に波長依存性が
ないフッ化マグネシウムレンズ、放射検出器にはシリコ
ンホトダイオード、分光器としてマルチチャンネル分光
装置を用いた。As shown in FIG. 1, the measuring method according to the present embodiment includes six measurements from measurement 1 to measurement 6, and a quantum efficiency calculation process using these measurement results. 2 to 7 show specific embodiments of Measurement 1 to Measurement 6, where the wavelength λ1 is 254 nm and the wavelength λ2 is 147n.
m, the incident angle θ1 between the optical axis of the light source and the normal to the incident surface of the radiation detector or the normal to the phosphor surface is 0 °, and the reflection angle θ
2 is 45 °, a deuterium lamp for the light source, and 1 for the optical system.
A magnesium fluoride lens whose transmission characteristics do not have wavelength dependence at 47 nm and 254 nm, a silicon photodiode as a radiation detector, and a multi-channel spectrometer as a spectroscope were used.
【００１６】（Ｉ）まず、図２に示す測定１の構成によ
り、波長２５４ｎｍの光の、測定しようとする蛍光体面
での入射量を測定する。図２における測定１は、重水素
ランプ１と、重水素ランプ１からの放射束を検出するた
め、光軸上に入射角０゜で置き、あらかじめ波長毎の絶
対入射量の値をつけたシリコンホトダイオード２と、シ
リコンホトダイオード２に重水素ランプ１からの放射束
を導くフッ化マグネシウムレンズ３と、波長２５４ｎｍ
のみを波長選択する干渉フィルタ４と、シリコンホトダ
イオード２に接続され、その出力信号を読み取るデジタ
ルマルチメータ５とから構成される。このとき、重水素
ランプ１とシリコンホトダイオード２との距離をＬ１と
する。ここで、重水素ランプ１と干渉フィルタ４が請求
項の光源１を、フッ化マグネシウムレンズが光学系を、
シリコンホトダイオード２とデジタルマルチメータ５が
放射検出器にそれぞれ対応する。(I) First, the amount of light having a wavelength of 254 nm incident on the phosphor surface to be measured is measured by the configuration of measurement 1 shown in FIG. In the measurement 1 in FIG. 2, the deuterium lamp 1 and the silicon were placed at an incident angle of 0 ° on the optical axis to detect the radiant flux from the deuterium lamp 1, and the absolute incident amount for each wavelength was previously given. A photodiode 2, a magnesium fluoride lens 3 for guiding the radiant flux from the deuterium lamp 1 to the silicon photodiode 2, a wavelength of 254 nm
It comprises an interference filter 4 for selecting only the wavelength and a digital multimeter 5 connected to the silicon photodiode 2 and reading its output signal. At this time, the distance between the deuterium lamp 1 and the silicon photodiode 2 is L1. Here, the deuterium lamp 1 and the interference filter 4 correspond to the light source 1 of the claims, the magnesium fluoride lens corresponds to the optical system,
The silicon photodiode 2 and the digital multimeter 5 correspond to the radiation detector, respectively.
【００１７】このように構成された測定１の動作を以下
説明する。重水素ランプ１を点灯し、安定するのを待
つ。重水素ランプ１から発せられた連続スペクトル光
は、干渉フィルタ４で主波長が２５４ｎｍの照射光とな
ってフッ化マグネシウムレンズ３で集光された後、シリ
コンホトダイオード２に入射する。このとき、シリコン
ホトダイオード２の出力信号をデジタルマルチメータ５
で読み取る。シリコンホトダイオード２は波長毎にあら
かじめ入射量の値が付けられており、デジタルマルチメ
ータ５の読取値から２５４ｎｍに対するシリコンホトダ
イオード２の位置における入射量Ｅin(254)が測定でき
る。The operation of the measurement 1 configured as described above will be described below. Turn on the deuterium lamp 1 and wait for it to stabilize. Continuous spectrum light emitted from the deuterium lamp 1 becomes irradiation light having a main wavelength of 254 nm by the interference filter 4 and is condensed by the magnesium fluoride lens 3 before being incident on the silicon photodiode 2. At this time, the output signal of the silicon photodiode 2 is
Read with. The silicon photodiode 2 is given a value of the incident amount for each wavelength in advance, and the incident amount E in (254) at the position of the silicon photodiode 2 with respect to 254 nm can be measured from the read value of the digital multimeter 5.
【００１８】次に、図３に示す測定２の構成で、波長１
４７ｎｍの、測定しようとする蛍光体面での入射量を測
定する。図３において、測定２は、重水素ランプ１と、
重水素ランプ１からの放射束を検出するため、光軸上に
入射角０゜で置いたシリコンホトダイオード２と、重水
素ランプ１からの放射をシリコンホトダイオード２に導
くフッ化マグネシウムレンズ３と、１４７ｎｍのみを波
長選択する干渉フィルタ６と、測定雰囲気を真空に保つ
真空チャンバ７と、真空チャンバ７に接続された真空ポ
ンプ８と、シリコンホトダイオード２に接続され、その
出力信号を読み取るデジタルマルチメータ５とから構成
される。このとき、重水素ランプ１とシリコンホトダイ
オード２との距離は測定１のＬ１と等しくする。なお、
真空紫外域での放射量を測定するため、重水素ランプ１
の出射窓（図示せず）、フッ化マグネシウムレンズ３、
干渉フィルタ６、およびシリコンホトダイオード２は真
空チャンバ７内に設置する。ここで、重水素ランプ１と
干渉フィルタ６が請求項の光源２を、フッ化マグネシウ
ムレンズ３が光学系を、シリコンホトダイオード２とデ
ジタルマルチメータ５が放射検出器にそれぞれ対応す
る。なお、光学系にフッ化マグネシウムレンズ３を用い
ているので、２５４ｎｍと１４７ｎｍで透過特性に波長
選択性はない。Next, in the configuration of measurement 2 shown in FIG.
The amount of 47 nm incident on the phosphor surface to be measured is measured. In FIG. 3, measurement 2 is a deuterium lamp 1 and
In order to detect the radiant flux from the deuterium lamp 1, a silicon photodiode 2 placed on the optical axis at an incident angle of 0 °, a magnesium fluoride lens 3 for guiding the radiation from the deuterium lamp 1 to the silicon photodiode 2, and 147 nm An interference filter 6 for selecting only the wavelength, a vacuum chamber 7 for keeping the measurement atmosphere in a vacuum, a vacuum pump 8 connected to the vacuum chamber 7, a digital multimeter 5 connected to the silicon photodiode 2 and reading its output signal. Consists of At this time, the distance between the deuterium lamp 1 and the silicon photodiode 2 is made equal to L1 of the measurement 1. In addition,
Deuterium lamp 1 to measure the amount of radiation in the vacuum ultraviolet region
Exit window (not shown), magnesium fluoride lens 3,
The interference filter 6 and the silicon photodiode 2 are installed in a vacuum chamber 7. Here, the deuterium lamp 1 and the interference filter 6 correspond to the claimed light source 2, the magnesium fluoride lens 3 corresponds to the optical system, and the silicon photodiode 2 and the digital multimeter 5 correspond to the radiation detector. Since the magnesium fluoride lens 3 is used for the optical system, there is no wavelength selectivity in transmission characteristics at 254 nm and 147 nm.
【００１９】このように構成された測定系２の動作を以
下に示す。まず、真空ポンプ８を動作させ、真空チャン
バ７内を１０ー3〜１０ー4Ｔｏｒｒ程度の真空に保つ。次
に、重水素ランプ１を点灯し、重水素ランプ１が安定点
灯するのを待って、測定１と同様の方法で１４７ｎｍに
対するシリコンホトダイオード２の入射量Ｅin(147)を
測定する。このとき、測定１と異なるのは１４７ｎｍの
光のみを照射するように、干渉フィルタ６を１４７ｎｍ
を透過させるものに変更している点と、１４７ｎｍ紫外
光の大気中での吸収減衰を防止するために、測定光学系
を真空チャンバ７内に設置している点である。The operation of the measuring system 2 configured as described above will be described below. First, the vacuum pump 8 is operated to maintain the inside of the vacuum chamber 7 at a vacuum of about 10 -3 to 10 -4 Torr. Next, the deuterium lamp 1 is turned on, and after the deuterium lamp 1 is stably turned on, the incident amount E in (147) of the silicon photodiode 2 with respect to 147 nm is measured in the same manner as in the measurement 1. At this time, the interference filter 6 is different from the measurement 1 in that the interference filter 6 is irradiated with only the 147 nm light.
And a measurement optical system is installed in the vacuum chamber 7 in order to prevent absorption and attenuation of 147 nm ultraviolet light in the atmosphere.
【００２０】次に、図４に示す測定３の構成で、波長２
５４ｎｍに対する、測定しようとする蛍光体の蛍光体面
での反射率を測定する。図４において、測定３は、重水
素ランプ１と、光軸上に入射角０゜で設置した蛍光体９
と、重水素ランプ１からの波長２５４ｎｍの放射を光軸
上の測定しようとする蛍光体９に導くフッ化マグネシウ
ムレンズ３と、２５４ｎｍのみを波長選択する干渉フィ
ルタ４と、反射角θ２＝４５゜の方向の光軸上に置いた
シリコンホトダイオード２と、シリコンホトダイオード
２に接続され、その出力信号を読み取るデジタルマルチ
メータ５とから構成される。このとき、重水素ランプ１
の照射光光軸上で、重水素ランプ１から蛍光体９までの
距離をＬ２とする。距離Ｌ２は図２および図３で重水素
ランプ１とシリコンホトダイオード２までの距離Ｌ１に
対し、同一であっても、異なってもかわまわない。Next, in the configuration of measurement 3 shown in FIG.
The reflectance of the phosphor to be measured on the phosphor surface with respect to 54 nm is measured. In FIG. 4, the measurement 3 is performed by using a deuterium lamp 1 and a phosphor 9 installed on the optical axis at an incident angle of 0 °.
A magnesium fluoride lens 3 for guiding radiation of a wavelength of 254 nm from the deuterium lamp 1 to a phosphor 9 to be measured on the optical axis, an interference filter 4 for selecting only the wavelength of 254 nm, and a reflection angle θ2 = 45 ° And a digital multimeter 5 connected to the silicon photodiode 2 and reading its output signal. At this time, the deuterium lamp 1
The distance from the deuterium lamp 1 to the phosphor 9 on the optical axis of the irradiation light is L2. The distance L2 may be the same as or different from the distance L1 between the deuterium lamp 1 and the silicon photodiode 2 in FIGS.
【００２１】このように構成された測定３の動作を以下
に示す。重水素ランプ１から発せられた連続スペクトル
光は、干渉フィルタ４で２５４ｎｍのみの照射光とな
り、フッ化マグネシウムレンズ３で集光された後、測定
しようとする蛍光体９に入射する。２５４ｎｍの照射光
は測定しようとする蛍光体９の表面で大部分吸収され、
残りの拡散反射された照射光の一部は反射角４５゜方向
に反射され、その光軸上に設置したシリコンホトダイオ
ード２に入射する。シリコンホトダイオード２への入射
量を反射量Ｅout(254)としてデジタルマルチメータ５で
測定する。The operation of Measurement 3 configured as described above will be described below. The continuous spectrum light emitted from the deuterium lamp 1 becomes irradiation light of only 254 nm by the interference filter 4, is condensed by the magnesium fluoride lens 3, and then enters the phosphor 9 to be measured. Irradiation light of 254 nm is mostly absorbed on the surface of the phosphor 9 to be measured,
A part of the remaining diffusely reflected irradiation light is reflected in the direction of the reflection angle of 45 ° and enters the silicon photodiode 2 installed on the optical axis. The amount of light incident on the silicon photodiode 2 is measured by the digital multimeter 5 as the amount of reflection E out (254).
【００２２】同様に、図５に示す測定４の構成で、波長
１４７ｎｍに対する、測定しようとする蛍光体９の蛍光
体面での反射率を測定する。図５では、測定４は、重水
素ランプ１と、１４７ｎｍのみの照射を決定する干渉フ
ィルタ６と、重水素ランプ１からの波長１４７ｎｍの放
射を、光軸上の測定しようとする蛍光体９に導くフッ化
マグネシウムレンズ３と、測定雰囲気を真空に保つ真空
チャンバ７と、真空チャンバ７に接続された真空ポンプ
８と、反射角４５゜の方向の光軸上に置いたシリコンホ
トダイオード２と、シリコンホトダイオード２に接続さ
れ、その出力信号を読み取るデジタルマルチメータ５と
から構成される。このとき、重水素ランプ１の照射光光
軸上で、重水素ランプ１から蛍光体９までの距離Ｌ２
が、図２および図３で重水素ランプ１とシリコンホトダ
イオード２までの距離Ｌ１に対し、同一であっても、異
なっても問題はない。Similarly, in the configuration of measurement 4 shown in FIG. 5, the reflectance on the phosphor surface of the phosphor 9 to be measured at a wavelength of 147 nm is measured. In FIG. 5, the measurement 4 includes the deuterium lamp 1, the interference filter 6 that determines the irradiation of only 147 nm, and the emission of the wavelength 147 nm from the deuterium lamp 1 to the phosphor 9 to be measured on the optical axis. A magnesium fluoride lens 3 to be guided, a vacuum chamber 7 for keeping a measurement atmosphere in a vacuum, a vacuum pump 8 connected to the vacuum chamber 7, a silicon photodiode 2 placed on an optical axis in a direction of a reflection angle of 45 °, and silicon A digital multimeter 5 connected to the photodiode 2 and reading its output signal. At this time, the distance L2 from the deuterium lamp 1 to the phosphor 9 on the optical axis of the irradiation light of the deuterium lamp 1
However, there is no problem if the distance L1 between the deuterium lamp 1 and the silicon photodiode 2 in FIGS. 2 and 3 is the same or different.
【００２３】このように構成された測定４の動作を以下
に示す。まず、真空ポンプ８を動作させ、真空チャンバ
８内を１０ー3〜１０ー4Ｔｏｒｒ程度の真空に保つ。つぎ
に、重水素ランプ１を点灯し、安定するのを待って、測
定３と同様の方法で１４７ｎｍに対する蛍光体９の反射
角４５゜方向の反射量Ｅout(147)を測定する。The operation of the measurement 4 configured as described above will be described below. First, the vacuum pump 8 is operated to maintain the inside of the vacuum chamber 8 at a vacuum of about 10 -3 to 10 -4 Torr. Next, the deuterium lamp 1 is turned on, and after being stabilized, the reflection amount E out (147) of the phosphor 9 in the direction of the reflection angle of 45 ° with respect to 147 nm is measured in the same manner as in Measurement 3.
【００２４】次に、図６に示す測定５の構成で波長２５
４ｎｍに対する、測定しようとする蛍光体９の発光スペ
クトルを測定する。図６では、測定５は、重水素ランプ
１と、２５４ｎｍのみを波長選択する干渉フィルタ４
と、重水素ランプ１からの波長２５４ｎｍの放射を、光
軸上の測定しようとする蛍光体９に導くフッ化マグネシ
ウムレンズ３と、蛍光体９の蛍光体面の法線から４５゜
方向の光軸上に設置した光ファイバ１０と、光ファイバ
１０に接続されたマルチチャンネル分光装置１１とから
構成される。このとき、重水素ランプ１からの照射光軸
上で重水素ランプ１から蛍光体９までの距離Ｌ３が、図
４および図５で重水素ランプ１と蛍光体９までの距離Ｌ
２と等しく（Ｌ３＝Ｌ２）なるように蛍光体９を配置す
る。Next, in the configuration of the measurement 5 shown in FIG.
The emission spectrum of the phosphor 9 to be measured at 4 nm is measured. In FIG. 6, the measurement 5 includes the deuterium lamp 1 and the interference filter 4 that selects only the wavelength of 254 nm.
And a magnesium fluoride lens 3 for guiding radiation of a wavelength of 254 nm from the deuterium lamp 1 to the phosphor 9 to be measured on the optical axis, and an optical axis 45 ° from the normal to the phosphor surface of the phosphor 9 It comprises an optical fiber 10 installed above, and a multi-channel spectrometer 11 connected to the optical fiber 10. At this time, the distance L3 from the deuterium lamp 1 to the phosphor 9 on the irradiation optical axis from the deuterium lamp 1 is the distance L3 between the deuterium lamp 1 and the phosphor 9 in FIGS.
The phosphors 9 are arranged so as to be equal to 2 (L3 = L2).
【００２５】このように構成された測定５の動作を以下
に示す。重水素ランプ１から発せられた連続スペクトル
光は、干渉フィルタ４で２５４ｎｍのみの照射光となっ
てフッ化マグネシウムレンズ３で集光された後、測定し
ようとする蛍光体９に入射する。２５４ｎｍの照射光
（励起光）は測定しようとする蛍光体９に大部分吸収さ
れる。吸収された励起光により蛍光体９は特有の蛍光発
光スペクトル分布Ｐ(λ)(254)を持った拡散発光を示
す。蛍光体９からの蛍光発光は光ファイバ１０に入射
し、光ファイバ１０に接続されたマルチチャンネル分光
装置１１で蛍光体９の発光スペクトル分布Ｐ(λ)(254)
を測定する。The operation of the measurement 5 configured as described above will be described below. Continuous spectrum light emitted from the deuterium lamp 1 becomes irradiation light of only 254 nm by the interference filter 4 and is condensed by the magnesium fluoride lens 3 before being incident on the phosphor 9 to be measured. The 254 nm irradiation light (excitation light) is mostly absorbed by the phosphor 9 to be measured. Due to the absorbed excitation light, the phosphor 9 shows diffused light emission having a unique fluorescence emission spectrum distribution P (λ) (254). The fluorescent light emitted from the phosphor 9 is incident on the optical fiber 10, and the emission spectrum distribution P (λ) (254) of the phosphor 9 is obtained by the multi-channel spectroscope 11 connected to the optical fiber 10.
Is measured.
【００２６】同様に図７に示す構成の測定６で、波長１
４７ｎｍに対する、測定しようとする蛍光体９の発光ス
ペクトルを測定する。図７では、測定６は、重水素ラン
プ１と、１４７ｎｍのみを波長選択する干渉フィルタ６
と、重水素ランプ１からの波長１４７ｎｍの放射を、光
軸上の測定しようとする蛍光体９に導くフッ化マグネシ
ウムレンズ３と、測定雰囲気を真空に保つ真空チャンバ
７と、真空チャンバ７に接続された真空ポンプ８と、蛍
光体９の蛍光体面の法線から反射角４５゜方向の光軸上
に設置した光ファイバ１０と、光ファイバ１０に接続さ
れたマルチチャンネル分光装置１１とから構成される。
このとき、重水素ランプ１からの照射光軸上で重水素ラ
ンプ１から蛍光体９までの距離Ｌ３が、図４および図５
で重水素ランプ１と蛍光体９までの距離Ｌ２と等しく
（Ｌ３＝Ｌ２）なるように蛍光体９を配置する。Similarly, in measurement 6 of the configuration shown in FIG.
The emission spectrum of the phosphor 9 to be measured at 47 nm is measured. In FIG. 7, the measurement 6 is a deuterium lamp 1 and an interference filter 6 for selecting only the wavelength of 147 nm.
And a magnesium fluoride lens 3 for guiding radiation having a wavelength of 147 nm from the deuterium lamp 1 to the phosphor 9 to be measured on the optical axis, a vacuum chamber 7 for keeping the measurement atmosphere in a vacuum, and a connection to the vacuum chamber 7. Vacuum pump 8, an optical fiber 10 installed on an optical axis at a reflection angle of 45 ° from the normal to the phosphor surface of the phosphor 9, and a multi-channel spectrometer 11 connected to the optical fiber 10. You.
At this time, the distance L3 from the deuterium lamp 1 to the phosphor 9 on the irradiation optical axis from the deuterium lamp 1 is different from that shown in FIGS.
The phosphor 9 is arranged so that the distance L2 between the deuterium lamp 1 and the phosphor 9 is equal to (L3 = L2).
【００２７】このように構成された測定６の動作を以下
に示す。重水素ランプ１から発せられた連続スペクトル
光は干渉フィルタ６で１４７ｎｍのみの照射光となって
フッ化マグネシウムレンズ３で集光された後、測定しよ
うとする蛍光体９に入射する。１４７ｎｍの照射光（励
起光）は、測定しようとする蛍光体９に大部分吸収され
る。吸収された励起光により、蛍光体９は特有の蛍光発
光スペクトル分布Ｐ(λ)(147)を持つ拡散発光を示す。
蛍光体９からの蛍光発光は光ファイバ１０に入射し、光
ファイバ１０に接続されたマルチチャンネル分光装置１
１で測定する。The operation of the measurement 6 configured as described above will be described below. Continuous spectrum light emitted from the deuterium lamp 1 becomes irradiation light of only 147 nm by the interference filter 6 and is condensed by the magnesium fluoride lens 3 before being incident on the phosphor 9 to be measured. The 147 nm irradiation light (excitation light) is mostly absorbed by the phosphor 9 to be measured. Due to the absorbed excitation light, the phosphor 9 emits diffused light having a unique fluorescence emission spectrum distribution P (λ) (147).
The fluorescent light emitted from the phosphor 9 enters the optical fiber 10 and is connected to the optical fiber 10.
Measure at 1.
【００２８】以上、測定１から測定６の波長２５４ｎｍ
における蛍光体９の入射量Ｅin(254)、蛍光体９の反射
量Ｅout(254)、蛍光体９の発光スペクトルＰ(λ)(254)
と、波長１４７ｎｍにおける蛍光体９の入射量Ｅin(14
7)、蛍光体９の反射量Ｅout(147)蛍光体９の発光スペク
トルＰ(λ)(147)が求まる。As described above, the wavelength 254 nm of the measurement 1 to the measurement 6
Incident amount of the phosphor 9 in E in (254), the reflection amount E out (254) of the phosphor 9, the emission spectrum P of the phosphor 9 (λ) (254)
And the incident amount E in (14) of the phosphor 9 at a wavelength of 147 nm.
7), the reflection amount E out of the phosphor 9 (147) and the emission spectrum P (λ) (147) of the phosphor 9 are obtained.
【００２９】なお、本発明において光源に重水素ランプ
を使用したが、キセノンランプなどの紫外放射光源を使
用しても構わない。Although a deuterium lamp is used as a light source in the present invention, an ultraviolet radiation light source such as a xenon lamp may be used.
【００３０】また、本発明において、波長λ1に２５４
ｎｍ、波長λ2に１４７ｎｍを例として挙げたが、特定
波長の吸収率と量子効率が既知であれば他の任意の波長
でも構わない。Further, in the present invention, the wavelength λ1 is set to 254.
Although 147 nm has been given as an example of the wavelength and the wavelength λ2, other arbitrary wavelengths may be used as long as the absorptance and quantum efficiency at a specific wavelength are known.
【００３１】更に、放射検出器にシリコンホトダイオー
ドを使用したが、熱形放射検出器を使用しても構わな
い。Further, although the silicon photodiode is used as the radiation detector, a thermal radiation detector may be used.
【００３２】なお、本発明において、入射角θ１を０
゜、反射角θ２を４５゜としたが、入射角が４５゜な
ど、任意の角度に設定しても構わない。In the present invention, the incident angle θ1 is set to 0
Although the reflection angle θ2 is set to 45 °, the incident angle may be set to an arbitrary angle such as 45 °.
【００３３】なお、本発明において、フッ化マグネシウ
ムレンズを光学系に用いたが、測定しようとする波長に
対し、波長選択性を持たない光学素子、例えばサファイ
アレンズなどを光学系に用いてもよい。In the present invention, the magnesium fluoride lens is used for the optical system. However, an optical element having no wavelength selectivity with respect to the wavelength to be measured, for example, a sapphire lens may be used for the optical system. .
【００３４】また、本発明において、２５４ｎｍの測定
時に、測定雰囲気を大気中で行なったが、真空中もしく
は窒素中でもさしつかえない。In the present invention, the measurement atmosphere was performed in the atmosphere at the time of measurement at 254 nm, but the measurement may be performed in vacuum or in nitrogen.
【００３５】（ＩＩ）次に、これらの測定値を用いて、
１４７ｎｍにおける量子効率ε147を求める過程につい
て説明する。(II) Next, using these measured values,
A process for obtaining the quantum efficiency ε 147 at 147 nm will be described.
【００３６】まず、測定１で測定した２５４ｎｍに対す
る、測定しようとする蛍光体面の入射量Ｅin(254)は、
測定１での入射光学系の測定値と真値との差を補正する
補正係数をＫ１とし、重水素ランプ１からの２５４ｎｍ
の照射量（干渉フィルタ５で２５４ｎｍのみを透過）を
Ｐ254とするとFirst, the incident amount E in (254) of the phosphor surface to be measured with respect to 254 nm measured in measurement 1 is
The correction coefficient for correcting the difference between the measured value of the incident optical system in measurement 1 and the true value is K1, and 254 nm from the deuterium lamp 1
Let P 254 be the irradiation amount of (passing only 254 nm by the interference filter 5)
【００３７】[0037]
【数３】Ｅin(254)＝Ｋ１・Ｐ254 となる。## EQU3 ## E in (254) = K1 · P 254
【００３８】次に、測定３の入射光学系の補正係数をＫ
２、反射光学系の補正係数をＫ３とすると、蛍光体面へ
の入射量ＸはNext, the correction coefficient of the incident optical system in measurement 3 is represented by K
2. Assuming that the correction coefficient of the reflection optical system is K3, the incident amount X on the phosphor surface is
【００３９】[0039]
【数４】Ｘ＝Ｋ２・Ｐ254 となり、測定３で測定した、２５４ｎｍに対する蛍光体
９の反射量Ｅout(254)は、反射量をＹとするとX = K2 · P 254 , and the reflection amount E out (254) of the phosphor 9 with respect to 254 nm measured in Measurement 3 is represented by Y
【００４０】[0040]
【数５】Ｅout(254)＝Ｋ３・Ｙ と表わせる。E out (254) = K3 · Y
【００４１】ここで、２５４ｎｍに対する蛍光体の反射
率をβ、吸収率をρとすると（数４）、（数５）式よりHere, assuming that the reflectance of the phosphor at 254 nm is β and the absorptance is ρ, from the equations (4) and (5),
【００４２】[0042]
【数６】 (Equation 6)
【００４３】となる。（数３）、（数６）式からＰ254
を消去してIs as follows. From Equations (3) and (6), P 254
Erase
【００４４】[0044]
【数７】 (Equation 7)
【００４５】となり、Becomes
【００４６】[0046]
【数８】 (Equation 8)
【００４７】と表わせる。Can be expressed as follows.
【００４８】（数８）式ではρは蛍光体の２５４ｎｍに
対する吸収率であり、あらかじめわかっている量であ
り、Ｅin(254)、Ｅout(254)とも、測定１、測定３での
測定値であるので、（数８）式より放射量測定系の補正
係数Ｋ１と反射量測定系の補正係数Ｋ２、Ｋ３の合成値
（Ｋ１／（Ｋ２・Ｋ３））が求まる。In the equation (8), ρ is the absorbance of the phosphor at 254 nm, which is a known amount, and E in (254) and E out (254) are both measured in Measurement 1 and Measurement 3. Since the value is a value, a composite value (K1 / (K2 · K3)) of the correction coefficient K1 of the radiation amount measurement system and the correction coefficients K2 and K3 of the reflection amount measurement system is obtained from Expression (8).
【００４９】さらに、２５４ｎｍにおける蛍光体の量子
効率ε254は測定５で求めた分光スペクトル分布Ｐ(λ)
(254)を用い、マルチチャンネル分光装置の入射光学系
の補正係数Ｋ４とすると、Further, the quantum efficiency ε 254 of the phosphor at 254 nm is determined by the spectral spectrum distribution P (λ) obtained in Measurement 5.
Using (254) as a correction coefficient K4 of the incident optical system of the multi-channel spectrometer,
【００５０】[0050]
【数９】 (Equation 9)
【００５１】で表わせる。（数９）式から、Can be expressed by From equation (9),
【００５２】[0052]
【数１０】 (Equation 10)
【００５３】となり、マルチチャンネル分光装置の入射
光学系の補正係数Ｋ４が求まる。Thus, a correction coefficient K4 of the incident optical system of the multi-channel spectrometer is obtained.
【００５４】次に、測定２で測定した１４７ｎｍに対す
る蛍光体面の入射量Ｅin(147)は測定光学系に波長選択
性がないので、重水素ランプの１４７ｎｍの照射量をＰ
147とすると、Next, the incident amount E in (147) of the phosphor surface with respect to 147 nm measured in Measurement 2 was determined by setting the irradiation amount of the deuterium lamp at 147 nm to P since the measuring optical system has no wavelength selectivity.
Assuming 147
【００５５】[0055]
【数１１】Ｅin(147)＝Ｋ１・Ｐ147 となる。さらに測定４で測定した１４７ｎｍに対する蛍
光体面の反射量Ｅout(147)とすると、測定４でも測定光
学系に波長選択性をもたないものを用いているので、蛍
光体の１４７ｎｍに対する反射率γは２５４ｎｍの場合
と同様に、E in (147) = K1 · P 147 Further, assuming that the reflection amount E out (147) of the phosphor surface with respect to 147 nm measured in Measurement 4 is that the measurement optical system having no wavelength selectivity is also used in Measurement 4, the reflectance γ of the phosphor with respect to 147 nm is used. Is similar to the case of 254 nm,
【００５６】[0056]
【数１２】 (Equation 12)
【００５７】と表わせる。ここで、（数１２）式に（数
８）式を代入してCan be expressed as follows. Here, equation (8) is substituted into equation (12), and
【００５８】[0058]
【数１３】 (Equation 13)
【００５９】となり、蛍光体の１４７ｎｍに対する反射
率γが求まる。Thus, the reflectance γ of the phosphor at 147 nm is obtained.
【００６０】さらに、１４７ｎｍにおける蛍光体の量子
効率ε147は、測定６で測定した分光スペクトル分布Ｐ
(λ)(254)を用い、マルチチャンネル分光装置の入射光
学系の補正係数Ｋ４が波長選択性を持たないとすると、Further, the quantum efficiency ε 147 of the phosphor at 147 nm is determined by the spectral spectrum distribution P measured in Measurement 6.
Using (λ) (254), assuming that the correction coefficient K4 of the incident optical system of the multi-channel spectrometer does not have wavelength selectivity,
【００６１】[0061]
【数１４】 [Equation 14]
【００６２】となり、（数１４）式に（数１０）式およ
び（数１３）式を代入して、[Mathematical formula-see original document] Substituting equations (10) and (13) into equation (14),
【００６３】[0063]
【数１５】 (Equation 15)
【００６４】となる。Is obtained.
【００６５】（数１５）式で、２５４ｎｍに対する蛍光
体の量子効率ε254と蛍光体の２５４ｎｍに対する吸収
率ρは既知であり、また、２５４ｎｍに対する蛍光体へ
の入射量Ｅin(254)と蛍光体からの反射量Ｅout(254)、
分光スペクトルＰ(λ)(254)および１４７ｎｍに対する
蛍光体への入射量Ｅin(147)と反射量Ｅout(147)、分光
スペクトルＰ(λ)(147)は、測定１から測定６の測定で
求まる。したがって、式（数１５）を用いれば、１４７
ｎｍに対する蛍光体の量子効率ε147を求めることがで
きる。In the equation (15), the quantum efficiency ε 254 of the phosphor at 254 nm and the absorptivity ρ of the phosphor at 254 nm are known, and the incident amount E in (254) on the phosphor at 254 nm and the fluorescence The amount of reflection from the body E out (254),
The amount of incident light E in (147) and the amount of reflection E out (147) to the phosphor with respect to the spectral spectra P (λ) (254) and 147 nm, and the spectral spectrum P (λ) (147) are measured from Measurement 1 to Measurement 6. Is determined by Therefore, if equation (Equation 15) is used, 147
The quantum efficiency ε 147 of the phosphor with respect to nm can be determined.
【００６６】[0066]
【発明の効果】以上述べたところから明らかなように、
本発明は、積分球と分光反射率標準を用いないで、簡素
な構成で光源からの放射の絶対量の測定をせずに、波長
λ1で量子効率が既知の蛍光体の波長λ2での量子効率の
測定ができる。As is apparent from the above description,
The present invention does not use an integrating sphere and a spectral reflectance standard, and uses a simple configuration without measuring the absolute amount of radiation from a light source. Efficiency can be measured.
【図１】本発明の一実施の形態の測定過程を示す測定流
れ図である。FIG. 1 is a measurement flowchart showing a measurement process according to an embodiment of the present invention.
【図２】本発明の一実施の形態の測定１を示す図であ
る。FIG. 2 is a diagram showing Measurement 1 according to one embodiment of the present invention.
【図３】本発明の一実施の形態の測定２を示す図であ
る。FIG. 3 is a diagram showing measurement 2 according to the embodiment of the present invention.
【図４】本発明の一実施の形態の測定３を示す図であ
る。FIG. 4 is a diagram showing measurement 3 according to the embodiment of the present invention.
【図５】本発明の一実施の形態の測定４を示す図であ
る。FIG. 5 is a diagram showing measurement 4 according to the embodiment of the present invention.
【図６】本発明の一実施の形態の測定５を示す図であ
る。FIG. 6 is a diagram showing measurement 5 according to the embodiment of the present invention.
【図７】本発明の一実施の形態の測定６を示す図であ
る。FIG. 7 is a diagram showing a measurement 6 according to an embodiment of the present invention.
【図８】従来の量子効率測定方法を示す図である。FIG. 8 is a diagram showing a conventional quantum efficiency measurement method.
１ 重水素ランプ ２ シリコンホトダイオード ３ フッ化マグネシウムレンズ ４ 干渉フィルタ（２５４ｎｍ） ５ デジタルマルチメータ ６ 干渉フィルタ（１４７ｎｍ） ７ 真空チャンバ ８ 真空ポンプ ９ 蛍光体 １０ 光ファイバ １１ マルチチャンネル分光装置 DESCRIPTION OF SYMBOLS 1 Deuterium lamp 2 Silicon photodiode 3 Magnesium fluoride lens 4 Interference filter (254 nm) 5 Digital multimeter 6 Interference filter (147 nm) 7 Vacuum chamber 8 Vacuum pump 9 Phosphor 10 Optical fiber 11 Multichannel spectrometer
───────────────────────────────────────────────────── フロントページの続き (72)発明者 堀井 滋 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 松岡 富造 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 ──────────────────────────────────────────────────の Continued on the front page (72) Inventor Shigeru Horii 1006 Kazuma Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.
Claims (5)
子効率が既知の、測定しようとする蛍光体と、波長λ1
の放射束を発生する光源（１）と、波長λ2の放射束を
発生する光源（２）と、前記波長λ1とλ2の放射束を前
記蛍光体に導き波長λ1とλ2に対し、波長選択性を持た
ない光学系と、前記波長λ1とλ2の放射量と反射量を測
定する放射検出器と、前記蛍光体の発光スペクトルを測
定する分光測定器とを備え、前記蛍光体の波長λ2の放
射束と波長λ1の放射束の蛍光体面での入射量を前記放
射検出器で測定し、前記蛍光体の波長λ2での放射束と
波長λ1での放射束の光源（１）あるいは光源（２）の
光軸と、前記放射検出器の入射面の法線あるいは蛍光体
面の法線とのなす入射角θ１と反射角θ２の反射量を前
記放射検出器で測定し、波長λ1とλ2の前記蛍光体への
入射量と、反射角θ２方向への反射量と、波長λ1にお
ける吸収率とから、前記蛍光体の波長λ2に対する放射
束の吸収率を求め、波長λ1とλ2の入射量と吸収率から
吸収量を求め、波長λ1とλ2の発光スペクトルから発光
量を求め、吸収量の光量子と発光量の光量子を除算し、
さらに波長λ1の量子効率と比較して、波長λ2の蛍光体
の量子効率を求めることを特徴とする蛍光体量子効率測
定装置。1. A phosphor to be measured whose absorption and quantum efficiency for radiation at a specific wavelength λ1 are known,
A light source (1) for generating a radiant flux of the wavelength λ2, a light source (2) for generating a radiant flux of the wavelength λ2, and guiding the radiant flux of the wavelengths λ1 and λ2 to the phosphor to obtain a wavelength selectivity for the wavelengths λ1 and λ2. , A radiation detector for measuring the radiation amount and the reflection amount of the wavelengths λ1 and λ2, and a spectrometer for measuring the emission spectrum of the phosphor, the radiation of the phosphor having a wavelength λ2 The amount of incidence of the flux and the radiant flux having the wavelength λ1 on the phosphor surface is measured by the radiation detector, and the light source (1) or the light source (2) of the radiant flux at the wavelength λ2 and the radiant flux at the wavelength λ1 of the phosphor is used. The reflection amount of the incident angle θ1 and the reflection angle θ2 between the optical axis of the radiation detector and the normal of the incident surface of the radiation detector or the normal of the phosphor surface is measured by the radiation detector, and the fluorescence of wavelengths λ1 and λ2 is measured. From the amount of light incident on the body, the amount of reflection in the reflection angle θ2 direction, and the absorptance at the wavelength λ1, the wavelength Calculate the absorptance of the radiant flux to be obtained, calculate the absorptive amount from the incident amounts and the absorptances of the wavelengths λ1 and λ2, obtain the luminous amount from the emission spectra of the wavelengths λ1 and λ2, and divide the photon of the absorbed amount and the photon of the luminescent amount ,
A phosphor quantum efficiency measuring apparatus characterized in that the quantum efficiency of a phosphor having a wavelength of λ2 is determined in comparison with the quantum efficiency of a wavelength λ1.
雰囲気が窒素または真空である請求項１記載の蛍光体量
子効率測定装置。2. The phosphor quantum efficiency measuring apparatus according to claim 1, wherein the wavelengths λ1 and λ2 are in the ultraviolet region, and the measurement atmosphere is nitrogen or vacuum.
長λ2が波長２００ｎｍ以下の真空紫外域であり、波長
λ2の測定雰囲気が窒素または真空である請求項１記載
の蛍光体量子効率測定装置。3. The phosphor quantum efficiency measuring apparatus according to claim 1, wherein the wavelength λ1 is ultraviolet light having a wavelength of 254 nm, the wavelength λ2 is a vacuum ultraviolet region having a wavelength of 200 nm or less, and the measuring atmosphere having the wavelength λ2 is nitrogen or vacuum. .
ある請求項１または２記載の蛍光体量子効率測定装置。4. The phosphor quantum efficiency measuring apparatus according to claim 1, wherein the incident angle θ1 is 0 ° and the reflection angle θ2 is 45 °.
子効率が既知の、測定しようとする蛍光体と、波長λ1
の放射束を発生する光源（１）と、波長λ2の放射束を
発生する光源（２）と、前記波長λ1とλ2の放射束を前
記蛍光体に導き波長λ1とλ2に対し、波長選択性を持た
ない光学系と、前記波長λ1とλ2の放射量と反射量を測
定する放射検出器と、前記蛍光体の発光スペクトルを測
定する分光測定器とを用いて蛍光体の量子効率を測定す
る方法であって、前記蛍光体の波長λ2の放射束と波長
λ1の放射束の蛍光体面での入射量を前記放射検出器で
測定し、前記蛍光体の波長λ2での放射束と波長λ1での
放射束の光源（１）あるいは光源（２）の光軸と、前記
放射検出器の入射面の法線あるいは蛍光体面の法線との
なす入射角θ１と反射角θ２の反射量を前記放射検出器
で測定し、波長λ1とλ2の前記蛍光体への入射量と、反
射角θ２方向への反射量と、波長λ1における吸収率と
から、前記蛍光体の波長λ2に対する放射束の吸収率を
求め、波長λ1とλ2の入射量と吸収率から吸収量を求
め、波長λ1とλ2の発光スペクトルから発光量を求め、
吸収量の光量子と発光量の光量子を除算し、さらに波長
λ1の量子効率と比較して、波長λ2の蛍光体の量子効率
を求めることを特徴とする蛍光体量子効率測定方法。5. A phosphor to be measured whose absorption and quantum efficiency for radiation at a specific wavelength λ1 are known,
A light source (1) for generating a radiant flux of the wavelength λ2, a light source (2) for generating a radiant flux of the wavelength λ2, and guiding the radiant flux of the wavelengths λ1 and λ2 to the phosphor to obtain a wavelength selectivity for the wavelengths λ1 and λ2. The quantum efficiency of the phosphor is measured using an optical system having no, a radiation detector for measuring the radiation and reflection of the wavelengths λ1 and λ2, and a spectrometer for measuring the emission spectrum of the phosphor. A method, wherein the radiation detector measures the amount of incidence of the luminous flux of wavelength λ2 and the radiant flux of wavelength λ1 on the phosphor surface of the phosphor with the radiation detector, and determines the radiant flux of the phosphor at wavelength λ2 and the wavelength λ1. The reflection amount of the incident angle θ1 and the reflection angle θ2 between the optical axis of the light source (1) or the light source (2) of the radiant flux and the normal to the incident surface or the normal to the phosphor surface of the radiation detector. Measured by a detector, the incident amounts of the wavelengths λ1 and λ2 to the phosphor, the amount of reflection in the reflection angle θ2 direction, and the wavelength λ1 And a kicking absorptivity, determine the absorption of the radiant flux for the wavelength .lambda.2 of the phosphor determines the absorption from the incident amount and rate of absorption of the wavelength λ1 and .lambda.2, obtains light emission amount from the emission spectrum of a wavelength λ1 and .lambda.2,
A method for measuring the quantum efficiency of a phosphor, comprising: dividing the photon of the amount of light absorbed and the photon of the amount of light emitted, and comparing the result with the quantum efficiency of the wavelength λ1 to obtain the quantum efficiency of the phosphor having the wavelength λ2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30147896A JP3247845B2 (en) | 1996-11-13 | 1996-11-13 | Method and apparatus for measuring quantum efficiency of phosphor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30147896A JP3247845B2 (en) | 1996-11-13 | 1996-11-13 | Method and apparatus for measuring quantum efficiency of phosphor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10142152A true JPH10142152A (en) | 1998-05-29 |
| JP3247845B2 JP3247845B2 (en) | 2002-01-21 |
Family
ID=17897396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30147896A Expired - Lifetime JP3247845B2 (en) | 1996-11-13 | 1996-11-13 | Method and apparatus for measuring quantum efficiency of phosphor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3247845B2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6632401B1 (en) | 1998-04-14 | 2003-10-14 | Bodenseewerk Perkin-Elmer Gmbh | Device for the detection of a fluorescent dye |
| KR100420144B1 (en) * | 1998-06-30 | 2004-04-17 | 삼성에스디아이 주식회사 | Fluorescent material optical property measuring device |
| JP2007147305A (en) * | 2005-11-24 | 2007-06-14 | Toshiba Corp | Analyzer |
| JP2009031176A (en) * | 2007-07-30 | 2009-02-12 | Hitachi High-Technologies Corp | Spectrofluorophotometer |
| US8119996B2 (en) | 2009-01-20 | 2012-02-21 | Otsuka Electronics Co., Ltd. | Quantum efficiency measurement apparatus and quantum efficiency measurement method |
| US8415639B2 (en) | 2010-03-18 | 2013-04-09 | Otsuka Electronics Co., Ltd. | Quantum efficiency measurement method, quantum efficiency measurement apparatus, and integrator |
-
1996
- 1996-11-13 JP JP30147896A patent/JP3247845B2/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6632401B1 (en) | 1998-04-14 | 2003-10-14 | Bodenseewerk Perkin-Elmer Gmbh | Device for the detection of a fluorescent dye |
| KR100420144B1 (en) * | 1998-06-30 | 2004-04-17 | 삼성에스디아이 주식회사 | Fluorescent material optical property measuring device |
| JP2007147305A (en) * | 2005-11-24 | 2007-06-14 | Toshiba Corp | Analyzer |
| JP2009031176A (en) * | 2007-07-30 | 2009-02-12 | Hitachi High-Technologies Corp | Spectrofluorophotometer |
| US8119996B2 (en) | 2009-01-20 | 2012-02-21 | Otsuka Electronics Co., Ltd. | Quantum efficiency measurement apparatus and quantum efficiency measurement method |
| US8415639B2 (en) | 2010-03-18 | 2013-04-09 | Otsuka Electronics Co., Ltd. | Quantum efficiency measurement method, quantum efficiency measurement apparatus, and integrator |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3247845B2 (en) | 2002-01-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3287775B2 (en) | Method and apparatus for measuring quantum efficiency of phosphor | |
| JP3682528B2 (en) | Method and apparatus for measuring absolute fluorescence quantum efficiency of solid sample | |
| Piper et al. | Experimental determination of the Einstein coefficients for the N2 (B–A) transition | |
| DeRose et al. | Qualification of a fluorescence spectrometer for measuring true fluorescence spectra | |
| JP4418731B2 (en) | Photoluminescence quantum yield measurement method and apparatus used therefor | |
| JP3098241B2 (en) | Drift compensation method and device | |
| JP3247845B2 (en) | Method and apparatus for measuring quantum efficiency of phosphor | |
| Schmidt | Determination of the phosphorescence quantum yield of singlet molecular oxygen (1Δg) by means of a radiometer and an infrared luminescence spectrometer | |
| KR100367240B1 (en) | Fluorescence spectrum differential measurement method of substrate coating | |
| EP0729017B1 (en) | Method for measurement and compensation of stray light in a spectrometer | |
| JPH0348443B2 (en) | ||
| Becker-Ross et al. | A scanning echelle monochromator for ICP-OES with dynamic wavelength stabilization and CCD detection | |
| JP3102485B2 (en) | Spectrophotometer | |
| Ohkubo et al. | Quantum efficiency measurement of lamp phosphors in accordance with radiometric standards | |
| JP4336775B2 (en) | Optical measurement method, light emitting element measuring method, and light emitting element measuring apparatus | |
| JP2761215B2 (en) | Fluorescent color measurement device | |
| US20230258566A1 (en) | Fluorimeter cell and its calibration | |
| Suzuki | Absolute Photoluminescence Quantum Yield of Phosphors | |
| JPH0812111B2 (en) | A method for correcting the fluorescence excitation spectrum and fluorescence emission spectrum of a fluorescence spectrophotometer. | |
| JPH0443222B2 (en) | ||
| JPH07103825A (en) | Infrared spectroscopic radiation energy measuring equipment | |
| Goodman | Calibration of light sources and detectors | |
| SU1226079A1 (en) | Method of calibrating non-selective light detector | |
| Pulli | Improvements in spectroradiometric measurements and applications | |
| JPH06105187B2 (en) | Photometric standard receiver |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20071102 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081102 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091102 Year of fee payment: 8 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091102 Year of fee payment: 8 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20101102 Year of fee payment: 9 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111102 Year of fee payment: 10 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121102 Year of fee payment: 11 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121102 Year of fee payment: 11 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131102 Year of fee payment: 12 |
|
| EXPY | Cancellation because of completion of term |