JPH10123175A - Head for inspection - Google Patents
Head for inspectionInfo
- Publication number
- JPH10123175A JPH10123175A JP8299277A JP29927796A JPH10123175A JP H10123175 A JPH10123175 A JP H10123175A JP 8299277 A JP8299277 A JP 8299277A JP 29927796 A JP29927796 A JP 29927796A JP H10123175 A JPH10123175 A JP H10123175A
- Authority
- JP
- Japan
- Prior art keywords
- needle
- probe
- substrate
- stylus
- needle holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、集積回路のような
平板状被検査体の電気的特性試験に用いる検査用ヘッド
に関する。[0001] 1. Field of the Invention [0002] The present invention relates to an inspection head used for testing the electrical characteristics of a flat test object such as an integrated circuit.
【０００２】[0002]
【従来の技術】半導体ウエーハ上の集積回路、半導体ウ
エーハからチップに分離された集積回路（ＩＣチッ
プ）、および、チップの実装が終了した集積回路は、回
路が仕様書通りに動作するか否かの通電試験（電気的特
性試験）をされる。この種の試験すなわち検査は、一般
に、プローブカード、プローブボート等と称されている
試験用ヘッドすなわち検査用ヘッドを用いて行われる。2. Description of the Related Art An integrated circuit on a semiconductor wafer, an integrated circuit (IC chip) separated from the semiconductor wafer into chips, and an integrated circuit on which the chips have been mounted are used to determine whether or not the circuits operate according to specifications. Is subjected to an electricity test (electrical characteristic test). This type of test or inspection is generally performed using a test head or an inspection head called a probe card, a probe boat, or the like.
【０００３】この種の検査用ヘッドにおいては、一般
に、集積回路の電気的な端子部すなわち電極パッドに通
電可能の状態に接続される複数のプローブを針押えに片
持ち梁状に支持させている。プローブは、電気信号を集
積回路に確実に作用させ、対応する電気信号を集積回路
から正確に得られるように、プローブの先端すなわち針
先と集積回路の電極パッドとの間に作用するいわゆる針
圧と、プローブをオーバドライブにより反らせたときの
電極パッドに対する針先の滑り量とを均一にすることが
望まれている。In this type of inspection head, generally, a plurality of probes connected to an electric terminal portion of an integrated circuit, ie, an electrode pad in a state where current can be supplied, are supported by a needle holder in a cantilever shape. . The probe is a so-called stylus pressure acting between the tip of the probe, that is, the needle tip, and the electrode pad of the integrated circuit so that the electric signal is applied to the integrated circuit and the corresponding electric signal is accurately obtained from the integrated circuit. It is desired that the probe tip be skewed with respect to the electrode pad when the probe is warped by overdrive.
【０００４】また、この種の検査用ヘッドにおいては、
一般に、集積回路の電極パッドが複数のパッド群に分け
られて、パッド群毎に一列に配置されていることから、
プローブをパッド群に対応した複数のプローブ群に分
け、プローブ群のプローブをその針先が対応するパッド
群の電極パッドに対応して一列となるように配置するこ
とが望まれている。In this type of inspection head,
Generally, since the electrode pads of the integrated circuit are divided into a plurality of pad groups and arranged in a line for each pad group,
It is desired to divide the probes into a plurality of probe groups corresponding to the pad groups, and to arrange the probes of the probe group such that the tips thereof are aligned with the electrode pads of the corresponding pad group.
【０００５】この種の検査用ヘッドにおいては、被検査
体の電極パッドの配置密度が高くなるにしたがい、プロ
ーブの配置密度が高くなる。このため、従来の検査用ヘ
ッドは、隣り合うプローブの接触を避けるべく針押えへ
のプローブの取付高さを隣り合うプローブで変えたいわ
ゆる多層配置の構造としている。この従来の検査用ヘッ
ドでは、ほぼ同じ断面積を有する針主体部と、この針主
体部の先端側に続くテーパ部と、テーパ部を途中におい
て針押えへの取付高さに比例した長さ寸法に曲げた針先
部とを有するプローブを用いている（実公昭５９−７６
２号公報）。In this type of inspection head, as the arrangement density of the electrode pads on the object to be inspected increases, the arrangement density of the probes increases. For this reason, the conventional inspection head has a so-called multilayer structure in which the mounting height of the probe to the needle holder is changed between adjacent probes in order to avoid contact between adjacent probes. In this conventional inspection head, a needle main portion having substantially the same cross-sectional area, a tapered portion following the distal end side of the needle main portion, and a length dimension proportional to the mounting height to the needle presser in the middle of the tapered portion. Probe having a bent needle tip (Japanese Utility Model Publication No. 59-76).
No. 2).
【０００６】しかし、プローブを多層に配置するだけで
は、針先部がテーパ部の途中において曲げられているこ
とおよび針先部の曲げ位置が針押えへのプローブの取付
位置に応じて異なることに起因してプローブの曲げた部
分の断面積が針先部の長さ寸法により異なるから、針押
えから針先部までの寸法に対する針押えからテーパ部ま
での寸法（針主体部の長さ寸法）の割合が隣り合うプロ
ーブで異なり、その結果隣り合うプローブのばね力ひい
ては針圧が異なってしまう。針圧がプローブ相互に異な
ると、電極への電気的接触状態がプローブ毎に異なるか
ら、正確な試験をすることができない。However, simply arranging the probe in multiple layers may cause the needle tip to be bent in the middle of the tapered portion and the bending position of the needle tip to be different depending on the mounting position of the probe on the needle holder. Because the cross-sectional area of the bent portion of the probe differs depending on the length of the needle tip, the dimension from the needle presser to the taper portion relative to the dimension from the needle presser to the needle tip (length of the needle main portion) Are different between the adjacent probes, and as a result, the spring force of the adjacent probes and, consequently, the stylus pressure are different. If the stylus pressure differs from one probe to another, an accurate test cannot be performed because the state of electrical contact with the electrode is different for each probe.
【０００７】針圧を均一にした検査用ヘッドとして、針
押えへのプローブの取付位置を針押えへのプローブの取
付高さに比例して変化させて針押えから針先部までの寸
法を同じにしたヘッド（実開平４−８９７３号公報、特
開平７−３１８５８７号公報）、針押えを取り付ける配
線基板に対するプローブの角度を針押えへのプローブの
取付高さに比例して変化させたヘッド（特開平６−２２
２０７９号公報）が提案されている。As an inspection head having a uniform needle pressure, the mounting position of the probe on the needle holder is changed in proportion to the mounting height of the probe on the needle holder, so that the dimensions from the needle holder to the needle tip are the same. (Japanese Unexamined Utility Model Application Publication No. 4-8973, Japanese Unexamined Patent Application Publication No. 7-318587), a head in which the angle of the probe with respect to the wiring board to which the needle holder is attached is changed in proportion to the mounting height of the probe to the needle holder. JP-A-6-22
No. 2079).
【０００８】しかし、前者では、針先部の突出位置が針
押えへの取付高さに応じて異なるから、プローブ群のプ
ローブの針先が一列に整列せず、したがって同じプロー
ブ群のプローブを異なるパッド群の電極パッドに接触さ
せる構造となり、その結果針先が他の針先より突出して
いるプローブが針先と電極パッドとの相対的位置関係の
確認の妨げになる。また後者では、針主体部に対する針
先部の曲げ角度を針押えへのプローブの取付高さに比例
して変更しなければならないから、プローブ自体の製作
およびその管理、ならびに、針押えへのプローブの取付
作業が繁雑化し、高価になる。However, in the former case, the protruding positions of the needle tips differ according to the mounting height to the needle holder, so that the tips of the probes of the probe group are not aligned in a line, and therefore the probes of the same probe group are different. The structure is such that the probe is in contact with the electrode pads of the pad group. As a result, the probe whose probe tip protrudes from other probe tips hinders confirmation of the relative positional relationship between the probe tip and the electrode pad. In the latter, the bending angle of the needle tip with respect to the needle main body must be changed in proportion to the mounting height of the probe to the needle holder, so the manufacture and management of the probe itself, and the probe to the needle holder Installation work becomes complicated and expensive.
【０００９】[0009]
【解決しようとする課題】本発明の目的は、針先をプロ
ーブ群毎に一列に整列させることができるにもかかわら
ず、隣り合うプローブ間の針圧および滑り量の差をとも
に小さくすることにある。SUMMARY OF THE INVENTION An object of the present invention is to reduce both the difference in the needle pressure and the amount of slip between adjacent probes, even though the needle tips can be aligned in a line for each probe group. is there.
【００１０】[0010]
【解決手段、作用、効果】本発明の検査用ヘッドは、基
板と、該基板に取り付けられた針押えと、該針押えに間
隔をおいて取り付けられた複数のプローブであってそれ
ぞれが基板と反対の側へ曲げられた針先部を先端側に有
する複数のプローブとを含む。隣り合うプローブは、基
板に対する高さ位置を変えて針押えに取り付けられてお
り、針押えから針先部までの距離寸法は、針押えへの取
付位置が基板に近いプローブほど、大きい。An inspection head according to the present invention comprises a substrate, a needle holder attached to the substrate, and a plurality of probes attached to the needle holder at intervals. A plurality of probes each having a tip portion bent toward the opposite side on the distal end side. Adjacent probes are attached to the needle holder at different height positions with respect to the substrate, and the distance dimension from the needle holder to the needle tip is larger for a probe whose attachment position to the needle holder is closer to the substrate.
【００１１】針圧は、針押えから針先部までの長さ寸法
に対する針押えからテーパ部までの長さ寸法の割合が大
きいプローブほど大きくなる反面、針押えから針先部ま
での長さ寸法が大きいプローブほど小さい。このため、
本発明の検査用ヘッドにおいては、針押えへの取付位置
が基板に近いプローブほど、針押えから針先部までの長
さ寸法に対する針押えからテーパ部までの長さ寸法の割
合と、針押えから針先部までの長さ寸法とが大きいか
ら、針先をプローブ群毎に一列に整列させても、針押え
から針先部までの長さ寸法に対する針押えからテーパ部
までの長さ寸法の割合に起因する針圧と、針押えから針
先部までの長さ寸法に起因する針圧とが減殺される。The probe pressure increases as the ratio of the length from the needle presser to the tapered portion to the length from the needle presser to the needle tip increases, while the length from the needle presser to the needle tip increases. The larger the probe, the smaller. For this reason,
In the inspection head of the present invention, the ratio of the length of the length from the needle presser to the tapered portion with respect to the length of the length from the needle presser to the needle tip becomes smaller as the probe is attached to the needle presser closer to the substrate. Since the length from the needle to the needle tip is large, even if the needle tips are aligned in a line for each probe group, the length from the needle presser to the taper relative to the length from the needle presser to the needle tip And the needle pressure caused by the length from the needle presser to the needle tip are reduced.
【００１２】針先の位置が一列に整列している検査用ヘ
ッドにおいて、オーバードライブによる滑り量は、針押
えから針先部または針先までの長さ寸法が大きいほど小
さくなる反面、針先部の高さ寸法が大きいほど大きくな
る。このため、本発明の検査用ヘッドにおいては、針押
えへの取付位置が基板に近いプローブほど、針押えから
針先までの長さ寸法および針先部の長さ寸法が大きいか
ら、針先をプローブ群毎に一列に整列させても、針押え
から針先までの寸法に起因する滑り量と、針先部の長さ
寸法に起因する滑り量とが減殺される。In the inspection head in which the positions of the needle tips are aligned in a line, the amount of slippage due to overdrive decreases as the length from the needle presser to the needle tip or the needle tip increases, but the needle tip does not. It becomes larger as the height dimension is larger. For this reason, in the inspection head of the present invention, the closer the probe is attached to the needle holder to the substrate, the larger the length from the needle holder to the needle tip and the length of the needle tip. Even if they are aligned in a line for each probe group, the amount of slip caused by the dimension from the needle presser to the needle tip and the amount of slip caused by the length of the needle tip are reduced.
【００１３】本発明によれば、針押えから針先部までの
長さ寸法に対する針押えからテーパ部までの長さ寸法の
割合、針先部の長さ寸法、および、針押えから針先部ま
での長さ寸法を、針押えへの取付位置が基板に近いプロ
ーブほど、大きくしたから、針先をプローブ群毎に一列
に整列させることができるにもかかわらず、隣り合うプ
ローブ間における針圧および滑り量の差を小さくするこ
とができる。According to the present invention, the ratio of the length from the needle presser to the tapered portion to the length from the needle presser to the needle tip, the length of the needle tip, and the length from the needle presser to the needle tip The length of the probe up to the probe closer to the substrate is larger for the probe holder, so that the needle pressure between adjacent probes can be adjusted even though the probe tips can be aligned in a line for each probe group. And the difference in the amount of slip can be reduced.
【００１４】好ましい実施例においては、隣り合うプロ
ーブは基板の面に対しほぼ同じ角度を有する。また、各
プローブの針先部の高さ寸法は、前記基板から前記針押
えへの取付位置までの距離にほぼ比例する。さらに、各
プローブの先端部は、針押えに取り付けられた主体部の
先端側に続くテーパ部をその途中において曲げることに
より、形成されている。In a preferred embodiment, adjacent probes have approximately the same angle to the plane of the substrate. The height of the probe tip of each probe is substantially proportional to the distance from the substrate to the mounting position on the needle holder. Further, the distal end of each probe is formed by bending a tapered portion following the distal end side of the main body attached to the needle holder in the middle.
【００１５】[0015]
【発明の実施の形態】図１〜図３を参照するに、検査用
ヘッド１０は、プローブカード、プローブボート等と称
されている検査用ヘッドであり、集積回路のような平板
状の被検査体の電気的特性試験に用いられる。被検査体
は、ウエーハに形成された集積回路チップ、切断された
集積回路チップおよび実装を終了した集積回路のいずれ
であってもよいし、また液晶表示パネルであってもよ
い。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIGS. 1 to 3, an inspection head 10 is an inspection head called a probe card, a probe boat, or the like. Used for testing the electrical properties of the body. The test object may be any of an integrated circuit chip formed on a wafer, a cut integrated circuit chip, and an integrated circuit whose mounting has been completed, or may be a liquid crystal display panel.
【００１６】検査用ヘッド１０は、円板状の基板１２
と、基板１２に組み付けられた針押え１４と、基板１２
の半径方向へ伸びるように針押え１４に片持ち梁状に支
持された複数のプローブ１６とを含む。針押え１４を基
板１２に直接的に組み付ける代わりに、針押え１４を基
板１２に支持板のような適宜な手段を介して間接的に組
み付けてもよい。The inspection head 10 includes a disk-shaped substrate 12.
A needle holder 14 assembled to the substrate 12;
And a plurality of probes 16 supported in a cantilever manner on the needle holder 14 so as to extend in the radial direction of the probe. Instead of directly attaching the needle holder 14 to the substrate 12, the needle holder 14 may be indirectly attached to the substrate 12 via an appropriate means such as a support plate.
【００１７】基板１２は、セラミック、合成樹脂のよう
な電気的絶縁材料で製作することができる。基板１２
は、被検査体を目視可能に開口１８を中心部に有すると
ともに、針押え１４を受け入れる下向きの段部すなわち
切欠部２０を開口１８の周りに有する。開口１８および
切欠部２０は、被検査体の平面形状に類似した形状を有
しており、図示の例では、ほぼ四角形の形状を有する。
開口１８は、基板１２を厚さ方向に貫通する貫通穴であ
る。切欠部２０は、下面と開口１８を形成する内側面に
形成されており、また針押え１４とほぼ同じ大きさを有
する。The substrate 12 can be made of an electrically insulating material such as a ceramic or a synthetic resin. Substrate 12
Has an opening 18 at the center so that the object to be inspected can be seen, and has a downward step or notch 20 around the opening 18 for receiving the needle holder 14. The opening 18 and the notch 20 have a shape similar to the planar shape of the object to be inspected, and in the illustrated example, have a substantially square shape.
The opening 18 is a through hole penetrating the substrate 12 in the thickness direction. The cutout portion 20 is formed on the lower surface and the inner side surface forming the opening 18, and has substantially the same size as the needle holder 14.
【００１８】基板１２は、周方向に間隔をおいて切欠部
２０の周りを半径方向へ伸びる複数の配線（図示せず）
を上下の両面に有しかつ通電用および信号処理用の電気
回路に接続される複数の端子部すなわちランドを上面の
周縁部に有する配線基板である。配線は、印刷配線技術
により基板１２に形成された配線パターンの一部であ
る。しかし、配線パターンを形成したフィルム状の部材
を基板の上下の両面に配置することにより、配線を基板
１２に形成してもよい。上面の配線はランドに電気的に
接続されており、上下の配線は互いに電気的に接続され
ている。The substrate 12 has a plurality of wirings (not shown) extending radially around the notch 20 at intervals in the circumferential direction.
Is provided on both upper and lower surfaces and has a plurality of terminals, that is, lands, at the peripheral edge of the upper surface, which are connected to an electric circuit for current supply and signal processing. The wiring is a part of a wiring pattern formed on the substrate 12 by a printed wiring technique. However, the wiring may be formed on the substrate 12 by arranging a film-like member on which the wiring pattern is formed on both upper and lower surfaces of the substrate. Wirings on the upper surface are electrically connected to lands, and upper and lower wirings are electrically connected to each other.
【００１９】針押え１４は、セラミックのような電気的
な絶縁材料で四角形の枠の形に製作されており、また複
数のプローブ１６を四角形の各辺に対応する部位に支持
している。針押え１４は、図示の例では、基板１２の切
欠部２０に接着剤により取り付けられている。しかし、
針押え１４を複数のねじ部材により取り外し可能に取り
付けてもよい。針押え１４の内側の開口１８は、基板１
２の開口１８とほぼ同じ大きさのほぼ四角形である。針
押え１４の下端部は、基板１２の下面より下方へ突出し
ている。The needle holder 14 is made of an electrically insulating material such as ceramic in the form of a square frame, and supports a plurality of probes 16 at portions corresponding to the respective sides of the square. The needle holder 14 is attached to the notch 20 of the substrate 12 with an adhesive in the illustrated example. But,
The needle holder 14 may be detachably attached by a plurality of screw members. The opening 18 inside the needle holder 14 is
The second opening 18 has a substantially rectangular shape having substantially the same size as that of the second opening 18. The lower end of the needle holder 14 protrudes below the lower surface of the substrate 12.
【００２０】各プローブ１６は、導電性の丸い金属細線
から形成されており、また、同じ直径寸法の針主体部２
２と、この針主体部２２の先端側に続くテーパ部２４
と、テーパ部２４を途中において下方へ曲げた針先部２
６とを有する。プローブ１６は、針押え１４および開口
１８により形成される四角形の辺毎のプローブ群に分け
られており、また針押え１４をその幅方向に貫通して伸
びる状態に、針主体部２２においてプローブ群毎に接着
剤のような適宜な装着手段２８により針押え１４の下側
に取り付けられている。Each probe 16 is formed of a round conductive metal wire and has the same diameter as the needle main body 2.
2 and a tapered portion 24 following the distal end of the needle main body 22.
And the needle tip 2 having the tapered portion 24 bent downward on the way.
6. The probe 16 is divided into a probe group for each square side formed by the needle holder 14 and the opening 18, and extends in the needle main body 22 so as to extend through the needle holder 14 in the width direction. Each time it is attached to the lower side of the needle holder 14 by an appropriate attaching means 28 such as an adhesive.
【００２１】隣り合うプローブ１６は、基板１２に対す
る高さ位置を変えて針押え１４に取り付けられている。
テーパ部２４の長さ寸法はほぼ同じであり、また針主体
部２２の長手軸線に対する針先部２６の曲げ角度もほぼ
同じである。これに対し、針押え１４へから針先部２６
までの距離寸法Ｌ11，Ｌ12，Ｌ13と、針先部２６の長さ
寸法Ｌ21，Ｌ22，Ｌ23と、針押え１４から針先部２６ま
での寸法とは、針押え１４への取付位置が基板１２に近
いプローブほど大きく、また基板１２から針押え１４へ
の取付位置までの距離（取付高さ）にほぼ比例する。The adjacent probes 16 are attached to the needle holder 14 at different heights with respect to the substrate 12.
The length of the tapered portion 24 is substantially the same, and the bending angle of the needle tip 26 with respect to the longitudinal axis of the needle main body 22 is also substantially the same. On the other hand, the needle tip 26
Distances L11, L12, and L13, lengths L21, L22, and L23 of the needle tip 26, and dimensions from the needle presser 14 to the needle tip 26 are as follows. The larger the probe is, the larger it is, and it is almost proportional to the distance (mounting height) from the substrate 12 to the mounting position to the needle holder 14.
【００２２】各プローブ群のプローブ１６は、それらの
先端すなわち針先をプローブ群毎に一列に整列されてい
るとともに、互いに平行に伸びる。図示の例では、プロ
ーブ１６を、３層に配置しているが、２層に配置しても
よいし、４層以上の多層に配置してもよい。また図示の
例では、プローブ１６を、寸法Ｌ11，Ｌ12，Ｌ13，Ｌ1
1，Ｌ12，Ｌ13・・・の順に配置されているが、寸法Ｌ1
1，Ｌ12，Ｌ13，Ｌ12，Ｌ11，Ｌ12・・・の順に配置し
てもよい。The probes 16 of each probe group have their tips, that is, needle tips, arranged in a line for each probe group, and extend in parallel with each other. In the illustrated example, the probes 16 are arranged in three layers, but may be arranged in two layers, or may be arranged in four or more layers. Further, in the illustrated example, the probe 16 has the dimensions L11, L12, L13, L1.
Are arranged in the order of 1, L12, L13,.
1, L12, L13, L12, L11, L12,...
【００２３】針押え１４は、プローブ１６の後端側が基
板１２の下側を伸びかつ針先部２６が下方（基板１２と
反対の側）へ伸びるように、基板１２に装着される。プ
ローブ１６の後端部は基板１２の配線に後端において半
田付のような手段により連結されている。図示の例で
は、基板１２に下面に対するプローブ１６の傾斜角度
は、同じであるが、異なってもよい。The needle holder 14 is mounted on the substrate 12 such that the rear end of the probe 16 extends below the substrate 12 and the needle tip 26 extends downward (opposite to the substrate 12). The rear end of the probe 16 is connected to the wiring of the substrate 12 at the rear end by means such as soldering. In the illustrated example, the inclination angle of the probe 16 with respect to the lower surface of the substrate 12 is the same, but may be different.
【００２４】検査用ヘッド１０は、針押え１４の所定の
箇所に所定数のプローブ１６を所定の治具を用いて所定
の状態に取り付けることにより針押え１４と複数のプロ
ーブ１６とからなるプローブ組立体を作成し、次いで針
押え１４を基板１２に取り付け、各プローブ１６を基板
１２に形成された配線に半田付することにより、製作す
ることができる。The inspection head 10 is provided with a predetermined number of probes 16 at predetermined positions of the needle holder 14 in a predetermined state by using a predetermined jig, so that a probe set including the needle holder 14 and a plurality of probes 16 is provided. It can be manufactured by creating a three-dimensional structure, then attaching the needle holder 14 to the substrate 12, and soldering each probe 16 to the wiring formed on the substrate 12.
【００２５】プローブ１６は、全てのプローブ１６を適
宜な治具により所定の配置パターンにおよび所定の状態
に維持した状態で、適宜な装着手段２８により針押え１
４に取り付けることができる。針押え１４は、これを基
板１２の切欠部２０に下側から嵌め込み、接着剤（また
は、ねじ部材）により基板１２に取り付けることができ
る。The probe 16 is held in a predetermined arrangement pattern and in a predetermined state by an appropriate jig and in a predetermined state.
4 can be attached. The needle holder 14 can be fitted into the cutout 20 of the substrate 12 from below and attached to the substrate 12 with an adhesive (or a screw member).
【００２６】検査用ヘッド１０は、プローブ１６の針先
が被検査体の側となるように、検査装置に組み付けられ
る。このため、検査用ヘッド１０は、これを組み付ける
検査装置の種類により、プローブ１６が、下側、上側、
横側、前側および後側のいずれかの側となるとともに、
基板１２が、水平、垂直および斜めのいずれかの状態と
なるように検査装置に組み付けられる。The inspection head 10 is mounted on an inspection device such that the tip of the probe 16 is on the side of the object to be inspected. For this reason, depending on the type of the inspection apparatus to which the inspection head 10 is assembled, the probe 16 has the lower, upper,
Beside the side, front and back,
The substrate 12 is assembled to the inspection device so as to be in one of the horizontal, vertical, and oblique states.
【００２７】検査時、プローブ１６の針先は、ヘッド１
０と被検査体とが両者を相対的に移動されることによ
り、わずかに過剰に被検査体の電極に押圧される。これ
により、各プローブ１６はオーバードライブ作用により
弓状に反る。その結果、プローブ１６の針先と被検査体
の電極との間に、所定の針圧がプローブ１６の針先と被
検査体の電極との間に作用するとともに、所定量の滑り
が生じる。At the time of inspection, the tip of the probe 16 is
As the object 0 and the object to be inspected are relatively moved, they are slightly excessively pressed against the electrodes of the object to be inspected. Thereby, each probe 16 is bowed by an overdrive action. As a result, a predetermined stylus pressure acts between the probe tip of the probe 16 and the electrode of the device under test, and a predetermined amount of slippage occurs.
【００２８】針押させ１４から針先部２６までの長さ寸
法Ｌ11，Ｌ12，Ｌ13に対する針押え１４からテーパ部２
４までの長さ寸法の割合が大きいプローブほど、大きい
ばね力の部分（湾曲しにくい部分）の割合が大きくなる
から、針圧も大きくなる。これに対し、寸法Ｌ11，Ｌ1
2，Ｌ13が大きいプローブほど、湾曲しやすくなるか
ら、針圧も小さくなる。The length from the needle presser 14 to the needle tip 26, L11, L12, L13.
As the ratio of the length dimension up to 4 becomes larger, the ratio of the portion having a large spring force (the portion that is less likely to bend) increases, so that the needle pressure also increases. On the other hand, dimensions L11, L1
2. Probes with a larger L13 are more likely to bend, so the stylus pressure is lower.
【００２９】このため、検査用ヘッド１０においては、
針先をプローブ群毎に一列に整列させても、針押え１４
への取付位置が基板１２に近いプローブほど、寸法Ｌ1
1，Ｌ12，Ｌ13に対する針押え１４からテーパ部２４ま
での長さ寸法の割合と、寸法Ｌ11，Ｌ12，Ｌ13とが大き
いから、寸法Ｌ11，Ｌ12，Ｌ13に対する針押え１４から
テーパ部２６までの長さ寸法の割合に起因する針圧と、
寸法Ｌ11，Ｌ12，Ｌ13に起因する針圧とが減殺される。For this reason, in the inspection head 10,
Even if the needle tips are aligned in a line for each probe group,
The closer the probe is attached to the substrate 12 to the dimension L1
Since the ratio of the length from the needle holder 14 to the tapered portion 24 with respect to 1, L12, L13 and the dimensions L11, L12, L13 are large, the length from the needle holder 14 to the tapered portion 26 with respect to the dimensions L11, L12, L13. Stylus pressure due to the ratio of the height dimension,
The needle pressure caused by the dimensions L11, L12, L13 is reduced.
【００３０】針先の位置がプローブ郡毎に一列に整列し
ている検査用ヘッド１０において、オーバードライブに
よる滑り量は、針押え１２から針先部２６までの長さ寸
法Ｌ11，Ｌ12，Ｌ13（または、針先までの長さ寸法）が
大きいほど小さくなる反面、針先部２６の高さ寸法Ｌ2
1，Ｌ22，Ｌ23が大きいほど大きくなる。このため、検
査用ヘッド１０においては、針押えへ１４の取付位置が
基板に近いプローブほど、寸法Ｌ11，Ｌ12，Ｌ13および
Ｌ21，Ｌ22，Ｌ23がともに大きいから、針先をプローブ
群毎に一列に整列させても、寸法Ｌ11，Ｌ12，Ｌ13の差
に起因する滑り量と、寸法Ｌ21，Ｌ22，Ｌ23の差に起因
する滑り量とが減殺される。In the inspection head 10 in which the positions of the needle tips are aligned in a line for each probe group, the amount of slippage due to overdrive is determined by the length dimensions L11, L12, L13 (from the needle presser 12 to the needle tip 26). Alternatively, the larger the length dimension up to the needle tip), the smaller the size, but the height dimension L2 of the needle tip 26.
The larger the values of 1, L22 and L23, the larger. For this reason, in the inspection head 10, since the dimensions L11, L12, and L13 and L21, L22, and L23 are all larger for a probe in which the mounting position of the needle holder 14 to the substrate is closer to the substrate, the needle tips are arranged in a line for each probe group. Even if they are aligned, the slippage caused by the difference between the dimensions L11, L12, and L13 and the slippage caused by the difference between the dimensions L21, L22, and L23 are reduced.
【００３１】上記の結果、検査用ヘッド１０は、針押え
１４から針先部２６までの長さ寸法Ｌ11，Ｌ12，Ｌ13に
対する針押え１４からテーパ部２４までの長さ寸法の割
合、針先部２６の長さ寸法Ｌ21，Ｌ22，Ｌ23、および、
針押え１４から針先部２６までの長さ寸法Ｌ11，Ｌ12，
Ｌ13を、針押え１４へのプローブの取付位置が基板１２
に近いプローブほど、大きくしたから、針先をプローブ
群毎に一列に整列させることができるにもかかわらず、
隣り合うプローブ間における針圧および滑り量の差が小
さくなる。As a result of the above, the inspection head 10 has the ratio of the length from the needle holder 14 to the tapered portion 24 to the length L11, L12, L13 from the needle holder 14 to the needle tip 26, 26 length dimensions L21, L22, L23, and
Length dimensions L11, L12, from needle holder 14 to needle tip 26
L13, the probe mounting position on the needle holder 14 is
The closer the probe, the larger, so that the needle tips can be aligned in a row for each probe group,
The difference between the needle pressure and the amount of slip between adjacent probes is reduced.
【００３２】本発明は、上記実施例に限定されない。た
とえば、被検査体の端子の配置パターンに応じた１つの
針押えを用いる代わりに、針押えを複数の針押え部材に
分割し、それらの針押え部材を共通の取付け枠にねじ部
材のような適宜な止め手段により取り付けてもよい。ま
た、プローブの断面形状を、円形以外の他の形状、たと
えば四角形にしてもよい。The present invention is not limited to the above embodiment. For example, instead of using one needle holder according to the arrangement pattern of the terminals of the device under test, the needle holder is divided into a plurality of needle holders, and these needle holders are mounted on a common mounting frame such as a screw member. It may be attached by an appropriate stopping means. Further, the cross-sectional shape of the probe may be a shape other than a circle, for example, a square.
【図１】本発明の検査用ヘッドの一実施例を示す断面図
である。FIG. 1 is a sectional view showing an embodiment of an inspection head according to the present invention.
【図２】図１に示す検査用ヘッドにおけるプローブの形
状および寸法を説明するための拡大断面図である。FIG. 2 is an enlarged sectional view for explaining the shape and dimensions of a probe in the inspection head shown in FIG.
【図３】図２の右側面図である。FIG. 3 is a right side view of FIG. 2;
１０ 検査用ヘッド １２ 基板 １４ 針押え １６ プローブ １８ 基板の開口 ２０ 基板の切欠部 ２２ 針主体部 ２４ テーパ部 ２６ 針先部 ２８ プローブ用の装着手段 DESCRIPTION OF SYMBOLS 10 Inspection head 12 Substrate 14 Needle holder 16 Probe 18 Substrate opening 20 Substrate notch 22 Needle main part 24 Taper part 26 Needle tip 28 Probe mounting means
Claims (3)
いる検査用ヘッドであって、基板と、該基板に取り付け
られた針押えと、該針押えに間隔をおいて取り付けられ
た複数のプローブであってそれぞれが前記基板と反対の
側へ曲げられた針先部を先端側に有する複数のプローブ
とを含み、隣り合うプローブは、前記基板に対する高さ
位置を変えて前記針押えに取り付けられており、前記針
押えから前記針先部までの距離寸法は、前記針押えへの
取付位置が前記基板に近いプローブほど、大きい、検査
用ヘッド。1. An inspection head for use in an electrical characteristic test of a plate-like inspection object, comprising: a substrate; a needle holder attached to the substrate; and a plurality of needle holders attached to the needle holder at intervals. A plurality of probes each having a tip portion bent toward the opposite side to the substrate at the tip end side, wherein adjacent probes change the height position with respect to the substrate to the needle holder. An inspection head which is attached and has a larger distance dimension from the needle holder to the needle tip as the probe is attached to the needle holder closer to the substrate.
しほぼ同じ角度を有する、請求項１に記載の検査用ヘッ
ド。2. The inspection head according to claim 1, wherein adjacent probes have substantially the same angle with respect to the surface of the substrate.
基板から前記針押えへの取付位置までの距離にほぼ比例
する、請求項１または２に記載の検査用ヘッド。3. The inspection head according to claim 1, wherein a height dimension of a needle tip of each probe is substantially proportional to a distance from the substrate to a mounting position on the needle holder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29927796A JP4074677B2 (en) | 1996-10-24 | 1996-10-24 | Inspection head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29927796A JP4074677B2 (en) | 1996-10-24 | 1996-10-24 | Inspection head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10123175A true JPH10123175A (en) | 1998-05-15 |
| JP4074677B2 JP4074677B2 (en) | 2008-04-09 |
Family
ID=17870470
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29927796A Expired - Lifetime JP4074677B2 (en) | 1996-10-24 | 1996-10-24 | Inspection head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4074677B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101535905B1 (en) * | 2013-01-21 | 2015-07-10 | 엠피아이 코포레이션 | Probe module |
| WO2017022035A1 (en) * | 2015-07-31 | 2017-02-09 | 日本電子材料株式会社 | Probe card |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55115054U (en) * | 1979-02-07 | 1980-08-13 | ||
| JPS5717143A (en) * | 1980-07-03 | 1982-01-28 | Nippon Denshi Zairyo Kk | Probe for test of semiconductor wafer |
| JPS5878436A (en) * | 1981-11-05 | 1983-05-12 | Seiichiro Sogo | Assembled body of test probe |
| JPH0523537U (en) * | 1991-09-05 | 1993-03-26 | 関西日本電気株式会社 | Probe card |
| JPH0629359A (en) * | 1992-07-07 | 1994-02-04 | Toho Denshi Kk | Guide mask type probe board |
| JPH06222079A (en) * | 1993-01-22 | 1994-08-12 | Tokyo Kasoode Kenkyusho:Kk | Probe for probe card |
-
1996
- 1996-10-24 JP JP29927796A patent/JP4074677B2/en not_active Expired - Lifetime
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55115054U (en) * | 1979-02-07 | 1980-08-13 | ||
| JPS5717143A (en) * | 1980-07-03 | 1982-01-28 | Nippon Denshi Zairyo Kk | Probe for test of semiconductor wafer |
| JPS5878436A (en) * | 1981-11-05 | 1983-05-12 | Seiichiro Sogo | Assembled body of test probe |
| JPH0523537U (en) * | 1991-09-05 | 1993-03-26 | 関西日本電気株式会社 | Probe card |
| JPH0629359A (en) * | 1992-07-07 | 1994-02-04 | Toho Denshi Kk | Guide mask type probe board |
| JPH06222079A (en) * | 1993-01-22 | 1994-08-12 | Tokyo Kasoode Kenkyusho:Kk | Probe for probe card |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101535905B1 (en) * | 2013-01-21 | 2015-07-10 | 엠피아이 코포레이션 | Probe module |
| WO2017022035A1 (en) * | 2015-07-31 | 2017-02-09 | 日本電子材料株式会社 | Probe card |
| JPWO2017022035A1 (en) * | 2015-07-31 | 2017-12-14 | 日本電子材料株式会社 | Probe card |
| TWI680301B (en) * | 2015-07-31 | 2019-12-21 | 日商日本電子材料股份有限公司 | Probe card |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4074677B2 (en) | 2008-04-09 |
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