JPH0966267A - Vacuum cleaning fluid tank - Google Patents
Vacuum cleaning fluid tankInfo
- Publication number
- JPH0966267A JPH0966267A JP22530995A JP22530995A JPH0966267A JP H0966267 A JPH0966267 A JP H0966267A JP 22530995 A JP22530995 A JP 22530995A JP 22530995 A JP22530995 A JP 22530995A JP H0966267 A JPH0966267 A JP H0966267A
- Authority
- JP
- Japan
- Prior art keywords
- cleaning liquid
- tank
- cleaning
- bottom plate
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、機械部品、電子部品、
医療用機械器具等の被洗浄物を減圧状態に於て液洗浄す
る場合に、特に好都合な減圧洗浄液槽に係るものであ
る。BACKGROUND OF THE INVENTION The present invention relates to mechanical parts, electronic parts,
The present invention relates to a vacuum cleaning liquid tank which is particularly convenient when liquid-cleaning an object to be cleaned such as a medical machine tool under a reduced pressure.
【０００２】[0002]
【従来の技術】従来、被洗浄物を洗浄液に浸漬して洗浄
を行う浸漬洗浄方法が知られている。この浸漬洗浄方法
に於て、洗浄液を充填した洗浄液槽内を減圧状態として
洗浄を行う事も知られている。2. Description of the Related Art Conventionally, an immersion cleaning method is known in which an object to be cleaned is immersed in a cleaning liquid for cleaning. In this immersion cleaning method, it is also known that cleaning is performed by reducing the pressure in the cleaning liquid tank filled with the cleaning liquid.
【０００３】このように減圧下に於て、被洗浄物の浸漬
洗浄を行うと、被洗浄物に付着したエアーが極めて取り
出し易いものとなる。被洗浄物が複雑な形状をしていた
り、凹部を有するような場合、被洗浄物に付着したエア
ーは、洗浄液槽内に挿入した場合にも、被洗浄物から分
離しにくく、被洗浄物の内部に残留してしまう場合があ
る。When the object to be cleaned is immersed and washed under reduced pressure in this manner, the air attached to the object to be cleaned becomes extremely easy to take out. When the object to be cleaned has a complicated shape or has a recess, the air adhering to the object to be cleaned is difficult to separate from the object to be cleaned even when it is inserted into the cleaning liquid tank. It may remain inside.
【０００４】複雑な形状をした被洗浄物に於てエアーが
内部に残留すると、その残留部分では、洗浄液と被洗浄
物の接触が不十分となり、洗浄効果を著しく低下させる
ものとなる。そのため、洗浄液槽内を減圧下に配置して
洗浄を行えば、被洗浄物の凹部等、複雑な形状をした奥
の部分等に付着残留しているエアーも、洗浄液中若しく
はその減圧雰囲気内に取り出され、被洗浄物へのエアー
の付着がなくなるから、被洗浄物の全面に渡って、良好
な洗浄液の接触を行う事ができ、洗浄効果を高める事が
知られている。If air remains inside the object to be cleaned having a complicated shape, the contact between the cleaning liquid and the object to be cleaned becomes insufficient at the remaining portion, and the cleaning effect is significantly reduced. Therefore, if the cleaning liquid tank is placed under reduced pressure for cleaning, the air remaining on the recessed part of the object to be cleaned, such as the recessed part having a complicated shape, also remains in the cleaning liquid or its reduced pressure atmosphere. Since it is taken out and air is not attached to the object to be cleaned, it is known that good cleaning liquid can be brought into contact with the entire surface of the object to be cleaned and the cleaning effect is enhanced.
【０００５】また、被洗浄物を浸漬する洗浄液を減圧雰
囲気に配置すると、洗浄液中のガスが排除されることに
より、超音波洗浄を行う場合にガスによる超音波の減衰
がなく、超音波洗浄効果を高めることが知られている。Further, when the cleaning liquid for immersing the object to be cleaned is placed in a reduced pressure atmosphere, the gas in the cleaning liquid is eliminated, so that when ultrasonic cleaning is performed, the ultrasonic waves are not attenuated by the gas, and the ultrasonic cleaning effect is obtained. Is known to increase.
【０００６】また、従来これらの被洗浄物は、一般的に
洗浄用の洗浄籠の中に収納し、この洗浄籠を洗浄液槽内
に挿入して洗浄液による浸漬洗浄を行っている。そし
て、この洗浄籠は使い勝手が良い事から、角形のものが
多く用いられている。しかし、真空タンクは耐圧性の要
請から円筒状のもの、若しくは球状のものが一般的に用
いられている。Further, conventionally, these objects to be cleaned are generally housed in a cleaning basket for cleaning, and this cleaning basket is inserted into a cleaning liquid tank for immersion cleaning with a cleaning liquid. Since this washing basket is easy to use, square ones are often used. However, as the vacuum tank, a cylindrical one or a spherical one is generally used because of the demand for pressure resistance.
【０００７】[0007]
【発明が解決しようとする課題】そして、角形の洗浄籠
を、円筒状、若しくは球状の真空タンク内に収納して、
洗浄液による浸漬洗浄を行おうとすると収納状態に於け
る、デッドスペースが大きなものとなる。そして、真空
タンク内に角形の洗浄籠を収納すると、上記の如く、デ
ッドスペースを生じるものとなるが、このデッドスペー
ス内にも洗浄液は、充填しなければならないものである
から、洗浄に必要とする洗浄液よりも、多くの洗浄液を
用いるものとなり、不経済な洗浄を従来余儀なくされて
いた。Then, the rectangular cleaning basket is housed in a cylindrical or spherical vacuum tank,
When attempting the immersion cleaning with the cleaning liquid, the dead space in the stored state becomes large. When the rectangular cleaning basket is housed in the vacuum tank, a dead space is generated as described above. However, since the cleaning liquid must be filled in the dead space, it is necessary for cleaning. The amount of cleaning liquid used is larger than that of the cleaning liquid used in the prior art, and thus uneconomical cleaning has been conventionally required.
【０００８】勿論、真空タンクを洗浄籠と同様の角形に
形成する事により、洗浄液の使用量を少なくする事は可
能であるが、角形タンクは強度的に円筒状のタンクより
も弱いため、製造コストが高くなり、洗浄液の使用量を
減らすための目的だけで、角形の真空タンクを用いる事
は経済的なものではない。Of course, it is possible to reduce the amount of cleaning liquid used by forming the vacuum tank into the same rectangular shape as the cleaning basket, but since the rectangular tank is weaker in strength than the cylindrical tank, it is manufactured. It is not economical to use a rectangular vacuum tank only for the purpose of increasing the cost and reducing the amount of cleaning liquid used.
【０００９】本発明は上述の如き課題を解決しようとす
るものであって、耐減圧性に優れた円筒状の真空タンク
を用いながら、角形の洗浄籠を収納して、無駄なデット
スペースを生じる事がなく、洗浄液を角形の洗浄籠に必
要とされる量だけ、充填して被洗浄物の洗浄を行う事が
できるようにするものである。そして、洗浄液の使用量
を減少し、経済的な被洗浄物の浸漬洗浄を行おうとする
ものである。SUMMARY OF THE INVENTION The present invention is intended to solve the above-mentioned problems, and uses a cylindrical vacuum tank excellent in decompression resistance while accommodating a rectangular cleaning basket, resulting in a dead space. In this case, the cleaning liquid can be filled into the rectangular cleaning basket in an amount required to clean the object to be cleaned. Then, the amount of the cleaning liquid used is reduced, and economical dip cleaning of the object to be cleaned is attempted.
【００１０】[0010]
【課題を解決するための手段】本発明は、上述の如き課
題を解決するため、円筒状の耐減圧性の真空タンク内
に、洗浄液を充填する角型の洗浄液槽を配置し、この洗
浄液槽を耐減圧性を有しないものとして成るものであ
る。In order to solve the above-mentioned problems, the present invention arranges a square type cleaning liquid tank for filling a cleaning liquid in a vacuum tank having a pressure-reduction resistance and having a cylindrical shape. To have no pressure resistance.
【００１１】また、洗浄液槽は、底板を真空タンクの底
板と共用するものであっても良い。The bottom plate of the cleaning liquid tank may be shared with the bottom plate of the vacuum tank.
【００１２】また、洗浄液槽は、底板を備え独立して洗
浄液を収納できるものであっても良い。Further, the cleaning liquid tank may have a bottom plate and can store the cleaning liquid independently.
【００１３】[0013]
【作用】本発明は、上述の如く構成したものであるか
ら、角形の洗浄液槽内には、角形の洗浄籠に対応する洗
浄液を収納し、洗浄液槽も角形の洗浄籠に対応する形状
とすれば、洗浄液槽には、少なくとも洗浄液を充填する
部分には無駄なデッドスペースを生じる事ない。そのた
め、角形の洗浄籠を用いた被洗浄物の洗浄に於いて、必
要とされる最小限の洗浄液のみを、洗浄液槽に収納する
事が可能となる。Since the present invention is configured as described above, the cleaning liquid corresponding to the rectangular cleaning basket is stored in the rectangular cleaning liquid tank, and the cleaning liquid tank also has a shape corresponding to the rectangular cleaning basket. For example, in the cleaning liquid tank, useless dead space does not occur at least in the portion filled with the cleaning liquid. Therefore, it becomes possible to store only the minimum required cleaning liquid in the cleaning liquid tank when cleaning the object to be cleaned using the rectangular cleaning basket.
【００１４】また、この洗浄液槽は減圧に対する強度を
保持する必要はなく、耐減圧性を有しないものであっ
て、真空度を確保するための耐減圧性は、洗浄液槽を収
納した円筒状の耐減圧性の真空タンクに於て、これを確
保するものである。そのため、円筒状の耐減圧性の真空
タンクにより、構造的に優れた耐減圧性を保持させると
ともに、この真空タンク内に於て、角形の洗浄籠に対応
する角形の洗浄液槽を用いて、無駄のない洗浄液によ
り、被洗浄物の浸漬液洗浄を行う事が可能となるもので
ある。Further, this cleaning liquid tank does not need to maintain strength against reduced pressure and does not have resistance to pressure reduction. The pressure resistance for ensuring the degree of vacuum is the same as that of the cylindrical shape containing the cleaning liquid tank. This is ensured in a vacuum tank that is resistant to pressure reduction. Therefore, the cylindrical vacuum pressure resistant vacuum tank maintains structurally excellent vacuum resistance and at the same time, by using the rectangular cleaning liquid tank corresponding to the rectangular cleaning basket in this vacuum tank It is possible to perform the immersion liquid cleaning of the object to be cleaned with a cleaning liquid that does not exist.
【００１５】また、この洗浄液槽は、底板を真空タンク
内の底板と共用するようにすれば、洗浄液槽の構成材料
の使用量を少なくする事ができ、経済的な洗浄液槽を得
る事ができるものとなる。If the bottom plate of this cleaning liquid tank is also used as the bottom plate in the vacuum tank, the amount of the constituent material of the cleaning liquid tank used can be reduced and an economical cleaning liquid tank can be obtained. Will be things.
【００１６】勿論、洗浄液槽は独立して洗浄液を収納で
きるよう底板を設けたものであっても良い。このように
洗浄液槽を独立して洗浄液を収納できるものとする場合
には、洗浄液に、化学的に耐え得る材質を洗浄液槽に採
用し、円筒状の耐減圧性を有する真空タンクには、耐溶
剤性を有しないものを用いて形成する事も可能となる。Of course, the cleaning liquid tank may be provided with a bottom plate so that the cleaning liquid can be stored independently. When the cleaning liquid tank can store the cleaning liquid independently in this way, a material that can chemically withstand the cleaning liquid is used for the cleaning liquid tank, and the cylindrical vacuum tank with decompression resistance is It is also possible to use a material that does not have a solvent property.
【００１７】例えば、洗浄液槽に高価なステンレス材等
を用いながら、円筒状の耐減圧性の真空タンクには、コ
ンクリート、鉄等を用いて、耐溶剤性は備えていない
が、耐減圧性の強度は十分に備える真空タンクを形成
し、廉価な製品を得る事も可能となる。For example, while using an expensive stainless steel material or the like for the cleaning liquid tank, concrete, iron or the like is used for the cylindrical vacuum-resistant vacuum tank, which is not provided with solvent resistance, but has vacuum resistance. By forming a vacuum tank with sufficient strength, it is possible to obtain inexpensive products.
【００１８】[0018]
【実施例】以下本発明の一実施例を図面に於て説明すれ
ば、(１)は真空タンクで、円筒状の耐減圧性を有する材
質及び構造により形成する。そして、この真空タンク
(１)はコンクリート、鉄等の金属、若しくは非鉄金属
等、耐溶剤性を有しない材質によって形成する事も可能
となる。勿論、ステンレス等の耐溶剤性を有する材質で
真空タンクを形成する事が可能であるのは当然の事であ
る。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. (1) is a vacuum tank which is formed of a cylindrical material and structure having a pressure resistance. And this vacuum tank
(1) can also be formed of a material having no solvent resistance, such as concrete, metal such as iron, or non-ferrous metal. Of course, it is of course possible to form the vacuum tank with a solvent-resistant material such as stainless steel.
【００１９】また、この真空タンク(１)は、バキューム
ポンプ(２)を接続するとともに上端に開閉可能な蓋体
(３)をパッキン(４)を介して配置し、内部の減圧保持を
可能としている。そして、この真空タンク(１)の内部に
は、角形の洗浄液槽(５)を配置している。この洗浄液槽
(５)は洗浄籠の角形形状に対応する形状としており、耐
溶剤性を有する材質であるステンレス等により形成して
いる。また、洗浄液槽(５)は断面コ字型とし、底板(７)
を設けることにより独立して洗浄液を収納出来るものと
している。The vacuum tank (1) is connected to a vacuum pump (2) and has a lid body which can be opened and closed at the upper end.
(3) is arranged via the packing (4), and it is possible to maintain the reduced pressure inside. Inside the vacuum tank (1), a rectangular cleaning liquid tank (5) is arranged. This cleaning liquid tank
(5) has a shape corresponding to the rectangular shape of the cleaning basket, and is formed of a solvent resistant material such as stainless steel. The cleaning liquid tank (5) has a U-shaped cross section, and the bottom plate (7)
The cleaning liquid can be stored independently by providing.
【００２０】そして、この洗浄液槽(５)は耐減圧性を特
に有しないものであって、ステンレスの薄板等を用いて
形成する事が可能となる。また、この洗浄液槽(５)は角
形の洗浄籠に対応する形状としているが、収納する角形
の洗浄籠が、一つである必要はなく、複数個収納しなが
らデッドスペースを生じる事が少ないように、複数の角
形の洗浄籠に対応する形状としたものであっても良い。The cleaning liquid tank (5) does not have resistance to pressure reduction, and can be formed by using a stainless steel thin plate or the like. Further, this cleaning liquid tank (5) has a shape corresponding to a rectangular cleaning basket, but it is not necessary to store one rectangular cleaning basket, and it is possible to store a plurality of cleaning baskets without causing a dead space. Further, it may have a shape corresponding to a plurality of rectangular washing baskets.
【００２１】このように、洗浄液槽(５)を角形に形成す
る事により、円筒状に形成した真空タンク(１)内に洗浄
液(６)を収納する場合に比較し、洗浄液(６)の使用量が
減少するものとなる。例えば、正立方体に形成された洗
浄籠を円筒状の真空タンク(１)内に収納して、液洗浄を
する場合に於て、円筒状の真空タンク(１)内に洗浄液
(６)を収納する場合と、正立方体の角形の洗浄液槽(５)
に、洗浄液(６)を収納して浸漬洗浄を行う場合を比較す
ると、下記の計算式の通りとなる。As described above, by forming the cleaning liquid tank (5) into a rectangular shape, the cleaning liquid (6) is used as compared with the case where the cleaning liquid (6) is stored in the cylindrical vacuum tank (1). The amount will decrease. For example, in the case where a cleaning basket formed in a regular cube is stored in a cylindrical vacuum tank (1) and liquid cleaning is performed, the cleaning liquid is stored in the cylindrical vacuum tank (1).
When storing (6) and square cubical cleaning liquid tank (5)
In comparison, the case where the cleaning liquid (6) is stored and the immersion cleaning is performed is as follows.
【００２２】各辺５００ｍｍの角形槽の容積は、５００
ｍｍ×５００ｍｍ×５００ｍｍ＝１２５ｌとなる。これ
に対し上記の１辺５００ｍｍの正立方体の角形の洗浄籠
が収納可能な円筒形の真空タンク(１)の容積は、次のよ
うに計算される。 丸タンクの底の直径＝√(５００2＋５００2)＝７０７.
１０６７８２ すなわち、約７０７.２ｍｍ。 丸タンクの容積＝底面積×高さ＝（半径2×π）×高さ
＝（３５３.６2×π)×５００＝１９６４０１３１４.３ 約１９６.５ｌ必要となる。従って、１２５ｌの容積の
角型の洗浄籠を収納するために、最低１９６.５ｌの容
積を円筒状の真空タンク(１)に於ては必要とし、洗浄液
も最低１９６.５ｌ必要となる。The volume of a rectangular tank having a side length of 500 mm is 500
mm × 500 mm × 500 mm = 125 l. On the other hand, the volume of the cylindrical vacuum tank (1) capable of accommodating the square cubic cleaning basket having a side of 500 mm is calculated as follows. Diameter of bottom of round tank = √ (500 2 +500 2 ) = 707.
106782 That is, about 707.2 mm. Volume of round tank = bottom area × height = (radius 2 × π) × height = (353.6 2 × π) × 500 = 1964011314.3 About 196.5 l is required. Therefore, in order to store a rectangular washing basket having a volume of 125 liters, a minimum volume of 196.5 liters is required in the cylindrical vacuum tank (1), and a minimum of 196.5 liters of washing liquid is required.
【００２３】従って本発明の如く、円筒状の真空タンク
(１)内に角形の洗浄液槽(５)を収納する事により、従来
の円筒状の真空タンク(１)内に洗浄液を収納し、角形の
洗浄籠を洗浄していた場合に比較し、洗浄液の使用量を
約３６％減少する事ができるものとなる。Therefore, as in the present invention, a cylindrical vacuum tank
By storing the rectangular cleaning solution tank (5) in (1), the cleaning solution is stored in the conventional cylindrical vacuum tank (1), and the cleaning solution is compared with the case where the rectangular cleaning basket is cleaned. The usage amount of can be reduced by about 36%.
【００２４】また、上記実施例に於ては、洗浄液槽(５)
は図１に示す如く、独立して洗浄液を収納できるよう
に、底板(７)を備えたものを用いた。しかし、異なる実
施例に於ては、図２に示す如く、底板(７)を真空タンク
(１)の底板(８)と共用するよう構成するものとしても良
い。このように真空タンク(１)の底板(８)と洗浄液槽
(５)の底板(７)とを共用するものとすれば、洗浄液槽
(５)の形成に於て、底板(７)分の素材が不必要となるた
め、経済的な洗浄液槽(５)を得る事ができるものとな
る。ただしこの場合は、少なくともその真空タンク(１)
の底板(７)が、耐溶剤性を有するものである事は必要な
ものとなる。Further, in the above embodiment, the cleaning liquid tank (5)
1 has a bottom plate (7) so that the cleaning solution can be stored independently as shown in FIG. However, in another embodiment, as shown in FIG. 2, the bottom plate (7) is attached to a vacuum tank.
It may be configured to be shared with the bottom plate (8) of (1). Thus, the bottom plate (8) of the vacuum tank (1) and the cleaning liquid tank
If it is shared with the bottom plate (7) of (5), the cleaning liquid tank
In forming (5), the material for the bottom plate (7) is not required, so that an economical cleaning liquid tank (5) can be obtained. However, in this case, at least the vacuum tank (1)
It is necessary that the bottom plate (7) of (1) has solvent resistance.
【００２５】[0025]
【発明の効果】本発明は上述の如く構成したものである
から、溶剤の使用量を大幅に減少し、円筒状の真空タン
クに洗浄液を充填して、被洗浄物の洗浄を行う場合に比
較し、経済的な被洗浄物の洗浄を行う事が可能となる。EFFECTS OF THE INVENTION Since the present invention is constructed as described above, comparison is made when the amount of solvent used is greatly reduced and a cylindrical vacuum tank is filled with a cleaning liquid to clean an object to be cleaned. Therefore, it is possible to economically clean the object to be cleaned.
【００２６】また、洗浄液の減少は、経済的なだけでな
く、洗浄液が可燃性である場合には、火災の危険度も小
さなものとなる。また、洗浄液が高価なものである場合
には、特にその経済効果を高くする事ができるものであ
る。Further, the reduction of the cleaning liquid is not only economical, but also the risk of fire is small when the cleaning liquid is flammable. Further, when the cleaning liquid is expensive, the economic effect thereof can be particularly enhanced.
【図１】本発明の一実施例を示す断面図である。FIG. 1 is a sectional view showing an embodiment of the present invention.
【図２】本発明の異なる実施例で、底板を真空タンクと
洗浄液槽が、共用する場合を示す断面図である。FIG. 2 is a cross-sectional view showing a case where a vacuum tank and a cleaning liquid tank share a bottom plate according to another embodiment of the present invention.
【図３】円筒状の真空タンク内に、角形の洗浄液槽を収
納した状態を示す模式図である。FIG. 3 is a schematic view showing a state in which a rectangular cleaning liquid tank is housed in a cylindrical vacuum tank.
【図４】角形の洗浄液槽と円筒状の真空タンクとの関係
を示す平面模式図である。FIG. 4 is a schematic plan view showing the relationship between a rectangular cleaning liquid tank and a cylindrical vacuum tank.
【符号の説明】 １ 真空タンク ５ 洗浄液槽 ７ 底板 ８ 底板[Explanation of symbols] 1 vacuum tank 5 cleaning liquid tank 7 bottom plate 8 bottom plate
─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成８年２月１６日[Submission date] February 16, 1996
【手続補正１】[Procedure amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００１９[Correction target item name] 0019
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【００１９】また、この真空タンク(１)は、バキューム
ポンプ(２)を接続するとともに上端に開閉可能な蓋体
(３)をパッキン(４)を介して配置し、内部の減圧保持を
可能としている。そして、この真空タンク(１)の内部に
は、角形の洗浄液槽(５)を配置している。この洗浄液槽
(５)は洗浄籠の角形形状に対応する形状としており、耐
溶剤性を有する材質であるステンレス等により形成して
いる。また、洗浄液槽(５)は断面コ字型とし、底板(７)
を設けることにより独立して洗浄液(６)を収納出来るも
のとしている。The vacuum tank (1) is connected to a vacuum pump (2) and has a lid body which can be opened and closed at the upper end.
(3) is arranged via the packing (4), and it is possible to maintain the reduced pressure inside. Inside the vacuum tank (1), a rectangular cleaning liquid tank (5) is arranged. This cleaning liquid tank
(5) has a shape corresponding to the rectangular shape of the cleaning basket, and is formed of a solvent resistant material such as stainless steel. The cleaning liquid tank (5) has a U-shaped cross section, and the bottom plate (7)
It is assumed that can be stored washing liquid (6) independently by providing the.
【手続補正２】[Procedure amendment 2]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００２３[Correction target item name] 0023
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【００２３】従って本発明の如く、円筒状の真空タンク
(１)内に角形の洗浄液槽(５)を収納する事により、従来
の円筒状の真空タンク(１)内に洗浄液(６)を収納し、角
形の洗浄籠を洗浄していた場合に比較し、洗浄液(６)の
使用量を約３６％減少する事ができるものとなる。Therefore, as in the present invention, a cylindrical vacuum tank
By housing the cleaning liquid tank square (5) in (1), housed washed liquid (6) in the conventional cylindrical vacuum tank (1) in the case that was washed wash basket prismatic comparison, the <br/> amount of cleaning liquid (6) becomes which can be reduced by about 36%.
【手続補正３】[Procedure 3]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００２４[Name of item to be corrected] 0024
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【００２４】また、上記実施例に於ては、洗浄液槽(５)
は図１に示す如く、独立して洗浄液(６)を収納できるよ
うに、底板(７)を備えたものを用いた。しかし、異なる
実施例に於ては、図２に示す如く、底板(７)を真空タン
ク(１)の底板(８)と共用するよう構成するものとしても
良い。このように真空タンク(１)の底板(８)と洗浄液槽
(５)の底板(７)とを共用するものとすれば、洗浄液槽
(５)の形成に於て、底板(７)分の素材が不必要となるた
め、経済的な洗浄液槽(５)を得る事ができるものとな
る。ただしこの場合は、少なくともその真空タンク(１)
の底板(８)が、耐溶剤性を有するものである事は必要な
ものとなる。Further, in the above embodiment, the cleaning liquid tank (5)
It is as shown in FIG. 1, so that it can be accommodated wash liquid (6) independently, were used with the bottom plate (7). However, in a different embodiment, as shown in FIG. 2, the bottom plate (7) may be shared with the bottom plate (8) of the vacuum tank (1). Thus, the bottom plate (8) of the vacuum tank (1) and the cleaning liquid tank
If it is shared with the bottom plate (7) of (5), the cleaning liquid tank
In forming (5), the material for the bottom plate (7) is not required, so that an economical cleaning liquid tank (5) can be obtained. However, in this case, at least the vacuum tank (1)
It is necessary that the bottom plate (8) of (1) has solvent resistance.
【手続補正４】[Procedure amendment 4]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】符号の説明[Correction target item name] Explanation of sign
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【符号の説明】 １ 真空タンク ５ 洗浄液槽６ 洗浄液 ７ 底板 ８ 底板[Explanation of symbols] 1 vacuum tank 5 cleaning liquid tank 6 cleaning liquid 7 bottom plate 8 bottom plate
Claims (3)
浄液を充填する角型の洗浄液槽を配置し、この洗浄液槽
を耐減圧性を有しないものとした事を特徴とする減圧洗
浄液槽。1. A reduced pressure cleaning liquid, characterized in that a rectangular cleaning liquid tank for filling a cleaning liquid is arranged in a cylindrical vacuum pressure resistant vacuum tank, and the cleaning liquid tank does not have reduced pressure resistance. Tank.
共用するものである事を特徴とする請求項１の減圧洗浄
液槽。2. The reduced pressure cleaning liquid tank according to claim 1, wherein the cleaning liquid tank shares the bottom plate with the bottom plate of the vacuum tank.
を収納できるものである事を特徴とする請求項１の減圧
洗浄液槽。3. The reduced pressure cleaning liquid tank according to claim 1, wherein the cleaning liquid tank has a bottom plate and can store the cleaning liquid independently.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22530995A JPH0966267A (en) | 1995-09-01 | 1995-09-01 | Vacuum cleaning fluid tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22530995A JPH0966267A (en) | 1995-09-01 | 1995-09-01 | Vacuum cleaning fluid tank |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0966267A true JPH0966267A (en) | 1997-03-11 |
Family
ID=16827337
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22530995A Pending JPH0966267A (en) | 1995-09-01 | 1995-09-01 | Vacuum cleaning fluid tank |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0966267A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01120828A (en) * | 1987-11-04 | 1989-05-12 | Oki Electric Ind Co Ltd | Automatic cleaning device for semiconductor wafer |
| JPH0330329A (en) * | 1989-06-27 | 1991-02-08 | Mitsubishi Electric Corp | Semiconductor-wafer cleaning apparatus |
| JPH0398683A (en) * | 1989-09-11 | 1991-04-24 | Yamazaki Kagaku Kogyo Kk | Method and apparatus for vacuum washing of processed article |
-
1995
- 1995-09-01 JP JP22530995A patent/JPH0966267A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01120828A (en) * | 1987-11-04 | 1989-05-12 | Oki Electric Ind Co Ltd | Automatic cleaning device for semiconductor wafer |
| JPH0330329A (en) * | 1989-06-27 | 1991-02-08 | Mitsubishi Electric Corp | Semiconductor-wafer cleaning apparatus |
| JPH0398683A (en) * | 1989-09-11 | 1991-04-24 | Yamazaki Kagaku Kogyo Kk | Method and apparatus for vacuum washing of processed article |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4798307A (en) | Compartmented cleaning bucket | |
| JPH0826276A (en) | Pallet container and manufacture therefor | |
| JPH08104329A (en) | Container made of metal and its manufacture | |
| NO911308D0 (en) | CONTAINER. | |
| US20070215177A1 (en) | Method for Cleaning Object to Be Cleaned and Apparatus Therefor | |
| US7575118B2 (en) | Device for transporting and/or storing | |
| JPH0966267A (en) | Vacuum cleaning fluid tank | |
| KR100365948B1 (en) | Container box | |
| US1342321A (en) | Immerser for fruit-jars | |
| JPH04109025U (en) | Transport containers for chemicals | |
| US2944692A (en) | Expansible container for lowtemperature fluid | |
| US3191794A (en) | Protective handle for thermally insulated bulk storage container | |
| RU2214953C2 (en) | Metal can | |
| JPH0728106Y2 (en) | Pressure-resistant storage box for bag-in-box | |
| JPH06127552A (en) | Liquid containing bag | |
| JPH111281A (en) | Liquid-charging container with pressure provided with fixing tool of inner container | |
| CN218401853U (en) | Many storehouses sample transport bin | |
| CN213057994U (en) | Tumor pathological specimen fixer | |
| JP2005087869A (en) | Ultrasonic cleaning method and apparatus therefor | |
| SU1463640A1 (en) | Vessel for storing and shipping fluid materials | |
| US4253504A (en) | Drain funnel | |
| KR100363211B1 (en) | Depressing vessel | |
| RU1792317C (en) | Bucket | |
| JP2509914Y2 (en) | Cassette storage pod | |
| JP3002383U (en) | Liquid storage container |