JPH09303314A - Method for supplying compressed air to pneumatic device, and pneumatic circuit - Google Patents
Method for supplying compressed air to pneumatic device, and pneumatic circuitInfo
- Publication number
- JPH09303314A JPH09303314A JP12158196A JP12158196A JPH09303314A JP H09303314 A JPH09303314 A JP H09303314A JP 12158196 A JP12158196 A JP 12158196A JP 12158196 A JP12158196 A JP 12158196A JP H09303314 A JPH09303314 A JP H09303314A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- compressed air
- air
- pressure
- air cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
- Fluid-Pressure Circuits (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、圧縮空気を増圧弁
で増圧して、エアシリンダを有する空気圧装置へ供給す
る圧縮空気供給方法及び空気圧回路に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a compressed air supply method and a pneumatic circuit for increasing the pressure of compressed air with a pressure increasing valve and supplying it to an air pressure device having an air cylinder.
【０００２】[0002]
【従来の技術】半導体試験装置の一つであるテストヘッ
ドやテストヘッドスタンドは、テーブルやハンドラ等、
様々な駆動機構を有し、これらはエアシリンダで駆動さ
れる。従来、この種の空気圧装置へ圧縮空気を供給する
ための空気圧回路としては、図２に示すようなものがあ
る。2. Description of the Related Art A test head or a test head stand, which is one of semiconductor test equipment, is used for a table, a handler, etc.
It has various drive mechanisms, which are driven by air cylinders. Conventionally, as a pneumatic circuit for supplying compressed air to this type of pneumatic device, there is one as shown in FIG.
【０００３】図２において、入力側のレギュレータ１０
３で所定の圧力に設定された圧縮空気は増圧弁１０２ａ
に入力され、ここで増圧された圧縮空気がタンク１０２
ｂに一時的に保持された後、出力側のレギュレータ１０
４を通って、空気圧装置であるテストヘッド１０５及び
テストヘッドスタンド１０６に供給される構成となって
いる。In FIG. 2, the regulator 10 on the input side is shown.
The compressed air set to a predetermined pressure in 3 is the pressure increasing valve 102a.
The compressed air that is input to the
After being temporarily held at b, the output side regulator 10
4 is supplied to the test head 105 and the test head stand 106 which are pneumatic devices.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、上述し
た従来の空気圧回路では、空気圧装置の動作が停止して
おり増圧の必要がない場合でも、空気圧装置内の空気圧
回路から空気が漏れると、増圧弁が作動する。そのため
増圧弁の作動回数が必要以上に増えて実質的な耐用寿命
が短くなっていた。そこで、増圧弁の作動回数を少なく
するために、増圧弁で増圧された圧縮空気を一時的に保
持するタンクの容量を大きくすることが考えられるが、
それでは空気圧回路が大型化してしまう。However, in the above-described conventional pneumatic circuit, even when the operation of the pneumatic device is stopped and there is no need to increase the pressure, if air leaks from the pneumatic circuit in the pneumatic device, the increase will occur. The pressure valve operates. As a result, the number of times the booster valve is operated is increased more than necessary, and the useful life is shortened. Therefore, in order to reduce the number of times the pressure increasing valve is operated, it is possible to increase the capacity of the tank that temporarily holds the compressed air pressure increased by the pressure increasing valve.
This would increase the size of the pneumatic circuit.
【０００５】本発明は上記問題点に鑑みてなされたもの
であり、空気圧回路を大きくすることなく増圧弁の実質
的な寿命を延ばす、圧縮空気供給方法及び空気圧回路を
提供することを目的とする。The present invention has been made in view of the above problems, and an object of the present invention is to provide a compressed air supply method and an air pressure circuit which extend the substantial life of the pressure increasing valve without enlarging the air pressure circuit. .
【０００６】[0006]
【解題を解決するための手段】上記目的を達成するため
本発明の空気圧装置への圧縮空気供給方法は、空気圧装
置のエアシリンダを駆動するために、増圧弁によって増
圧された圧縮空気を前記空気圧装置へ供給する圧縮空気
供給方法において、前記エアシリンダの駆動時には前記
増圧弁を経由して圧縮空気を供給し、前記エアシリンダ
の停止時には前記増圧弁を経由せずに圧縮空気を供給す
ることを特徴とする。In order to achieve the above object, a method of supplying compressed air to a pneumatic device according to the present invention is characterized in that the compressed air increased by a pressure increasing valve is used to drive an air cylinder of the pneumatic device. In a compressed air supply method for supplying air to a pneumatic device, compressed air is supplied through the pressure increasing valve when the air cylinder is driven, and compressed air is supplied without passing through the pressure increasing valve when the air cylinder is stopped. Is characterized by.
【０００７】また、圧縮空気の供給経路の切り換えのた
めに電磁弁を用い、前記エアシリンダを駆動させるため
の電気信号に基づいて前記電磁弁を制御するものであっ
てもよい。Further, an electromagnetic valve may be used to switch the compressed air supply path, and the electromagnetic valve may be controlled based on an electric signal for driving the air cylinder.
【０００８】本発明の空気圧回路は、増圧弁を有し、前
記増圧弁によって増圧された圧縮空気を、エアシリンダ
を備えた空気圧装置へ供給する空気圧回路において、前
記エアシリンダの駆動時には前記増圧弁を経由して圧縮
空気を供給し、前記エアシリンダの停止時には前記増圧
弁を経由せずに圧縮空気を供給するように圧縮空気の供
給経路を切り換える切換弁を有することを特徴とする。An air pressure circuit according to the present invention has a pressure increasing valve, and supplies compressed air increased in pressure by the pressure increasing valve to an air pressure device having an air cylinder. Compressed air is supplied via a pressure valve, and when the air cylinder is stopped, a switching valve is provided to switch the compressed air supply path so as to supply compressed air without passing through the pressure increasing valve.
【０００９】また、前記切換弁は、前記エアシリンダを
駆動させるための電気信号に基づいて制御される電磁弁
であってもよい。Further, the switching valve may be an electromagnetic valve which is controlled based on an electric signal for driving the air cylinder.
【００１０】上記のとおり構成された本発明では、エア
シリンダが駆動していないときには増圧弁を経由しない
で圧縮空気が供給されるので、エアシリンダが停止して
いる状態で空気圧装置に空気漏れが発生しても増圧弁は
作動せず、増圧弁の作動回数が減少する。また、空気圧
装置への圧縮空気の供給経路を切り換えるために電磁弁
を用いることで、供給経路の切り換えにエアシリンダを
駆動するための電気信号を利用でき、供給経路の切り換
え制御が容易に行える。In the present invention constructed as described above, compressed air is supplied without passing through the pressure increasing valve when the air cylinder is not driven, so that air leakage to the pneumatic device occurs when the air cylinder is stopped. Even if it occurs, the booster valve does not operate, and the number of times the booster valve operates decreases. Further, by using the solenoid valve for switching the supply path of the compressed air to the pneumatic device, the electric signal for driving the air cylinder can be used for switching the supply path, and the switching control of the supply path can be easily performed.
【００１１】[0011]
【発明の実施の形態】次に、本発明の実施形態について
図面を参照して説明する。Next, embodiments of the present invention will be described with reference to the drawings.
【００１２】図１は、本発明の空気圧回路の一実施形態
を示す図である。図１において、入力側のレギュレータ
３と出力側のレギュレータ４との間には、電磁切換弁１
が設けられている。電磁切換弁１は、２つの入力ポート
１ａ，１ｂと１つの出力ポート１ｃとを有し、いずれか
一方の入力ポート１ａ，１ｂが出力ポート１ｃと通じる
ように切り換えられる。これら２つの入力ポート１ａ，
１ｂのうち一方の入力ポート１ａが、入力側のレギュレ
ータ３と接続されている。FIG. 1 is a diagram showing an embodiment of a pneumatic circuit of the present invention. In FIG. 1, an electromagnetic switching valve 1 is provided between the input side regulator 3 and the output side regulator 4.
Is provided. The electromagnetic switching valve 1 has two input ports 1a and 1b and one output port 1c, and one of the input ports 1a and 1b is switched so as to communicate with the output port 1c. These two input ports 1a,
One of the input ports 1a of 1b is connected to the input side regulator 3.
【００１３】入力側のレギュレータ３と電磁切換弁１と
を接続する管路は途中で２つに分岐して増圧弁２ａに接
続される。そして、増圧弁２ａからの出力がタンク２ｂ
を介して電磁切換弁１の他方の入力ポート１ｂに接続さ
れている。The pipeline connecting the regulator 3 on the input side and the electromagnetic switching valve 1 is branched into two on the way and connected to the pressure increasing valve 2a. The output from the pressure increasing valve 2a is the tank 2b.
Is connected to the other input port 1b of the electromagnetic switching valve 1.
【００１４】電磁切換弁１の出力ポート１ｃは出力側の
レギュレータ４に接続され、このレギュレータ４で所定
の圧力に設定された圧縮空気が、空気圧装置であるテス
トヘッド５及びテストヘッドスタンド６に供給される構
成となっている。The output port 1c of the solenoid operated directional control valve 1 is connected to the regulator 4 on the output side, and the compressed air set to a predetermined pressure by the regulator 4 is supplied to the test head 5 and the test head stand 6 which are pneumatic devices. It is configured to be.
【００１５】上記構成に基づき、テストヘッド５のエア
シリンダ及びテストヘッドスタンド６のエアシリンダを
駆動させるときには、電磁切換弁１は他方の入力ポート
１ｂが出力ポート１ｃと通じるように切り換えられてお
り、増圧弁２ａで増圧された圧縮空気はタンク２ｂに一
時的に保持された後、テストヘッド５及びテストヘッド
スタンド６に供給される。テストヘッド５のエアシリン
ダ及びテストヘッドスタンド６のエアシリンダの動作が
停止している間は、電磁切換弁１は一方の入力ポート１
ａが出力ポート１ｃと通じるように切り換えられてお
り、圧縮空気は増圧弁２を経由せずにテストヘッド５及
びテストヘッドスタンド６に供給される。Based on the above configuration, when the air cylinder of the test head 5 and the air cylinder of the test head stand 6 are driven, the electromagnetic switching valve 1 is switched so that the other input port 1b communicates with the output port 1c. The compressed air whose pressure is increased by the pressure increasing valve 2a is temporarily held in the tank 2b and then supplied to the test head 5 and the test head stand 6. While the operation of the air cylinder of the test head 5 and the air cylinder of the test head stand 6 is stopped, the solenoid operated directional control valve 1 has one input port 1
The a is switched so as to communicate with the output port 1c, and the compressed air is supplied to the test head 5 and the test head stand 6 without passing through the pressure increasing valve 2.
【００１６】電磁切換弁１の切り換えは、テストヘッド
５のエアシリンダ及びテストヘッドスタンド６のエアシ
リンダの駆動させるための電気信号を利用することで、
簡単に制御することができる。すなわち、エアシリンダ
を駆動させる電気信号が発せられたら、それと同時に電
磁切換弁１を一方の入力ポート１ａに切り換え、それか
ら所定時間経過後、電磁切換弁１が他方の入力ポート１
ｂに切り換わるようにする。ここでいう所定時間とは、
エアシリンダを駆動される電気信号が発せられてからエ
アシリンダの動作が終了するまでの時間よりも長い時間
であり、できるだけ、エアシリンダの動作が終了するま
での時間に近い時間であることが好ましい。これによ
り、エアシリンダが駆動している間は増圧弁２ａで増圧
された圧縮空気が供給され、それ以外のときには、増圧
弁２ａを経由する管路が絶たれることになる。The electromagnetic switching valve 1 is switched by using an electric signal for driving the air cylinder of the test head 5 and the air cylinder of the test head stand 6.
It can be controlled easily. That is, when an electric signal for driving the air cylinder is issued, at the same time, the electromagnetic switching valve 1 is switched to one input port 1a, and after a predetermined time has passed, the electromagnetic switching valve 1 is switched to the other input port 1a.
Switch to b. Here, the predetermined time is
It is preferable that the time is longer than the time until the operation of the air cylinder is completed after the electric signal for driving the air cylinder is issued, and the time is as close as possible to the time when the operation of the air cylinder is completed. . As a result, the compressed air whose pressure is increased by the pressure increasing valve 2a is supplied while the air cylinder is driven, and at other times, the pipeline passing through the pressure increasing valve 2a is cut off.
【００１７】上述のように電磁切換弁１を切り換えるこ
とで、テストヘッド５のエアシリンダ及びテストヘッド
スタンド６のエアシリンダの動作が停止しているときに
テストヘッド５またはテストヘッドスタンド６内の空気
圧回路から空気漏れが発生しても、圧縮空気は、入力側
のレギュレータ３、電磁切換弁１及び出力側のレギュレ
ータ４を通ってテストヘッド５またはテストヘッドスタ
ンド６に供給されるので、増圧弁２ａは作動しない。従
って、増圧弁２ａはテストヘッド５及びテストヘッドス
タンド６を駆動するのに必要なときのみに作動されるの
で、２ｂタンクの容量を大きくせずに増圧弁２ａの作動
回数を減少させ、増圧弁２ａの実質的な耐用寿命を延ば
すことができる。By switching the electromagnetic switching valve 1 as described above, the air pressure in the test head 5 or the test head stand 6 is stopped when the operation of the air cylinder of the test head 5 and the air cylinder of the test head stand 6 is stopped. Even if air leaks from the circuit, compressed air is supplied to the test head 5 or the test head stand 6 through the regulator 3 on the input side, the electromagnetic switching valve 1 and the regulator 4 on the output side. Does not work. Therefore, the pressure increasing valve 2a is operated only when it is necessary to drive the test head 5 and the test head stand 6, so that the number of times the pressure increasing valve 2a is operated is increased without increasing the capacity of the tank 2b. The substantial service life of 2a can be extended.
【００１８】本実施形態では、圧縮空気を供給する対象
となる空気圧装置としてテストヘッド５及びテストヘッ
ドスタンド６を例に挙げて説明したが、空気圧装置はこ
れらに限るものではない。In this embodiment, the test head 5 and the test head stand 6 have been described as examples of pneumatic devices to which compressed air is supplied, but the pneumatic devices are not limited to these.
【００１９】[0019]
【発明の効果】以上説明したように本発明は、エアシリ
ンダの駆動時には増圧弁を経由して圧縮空気を供給し、
エアシリンダの停止時には増圧弁を経由せずに圧縮空気
を供給するので、増圧弁の作動回数を減少させることが
でき、増圧弁の実質的な寿命を延ばすことができる。ま
た、空気圧装置への圧縮空気の供給経路を切り換えるた
めに電磁弁を用い、エアシリンダを駆動するための電気
信号に基づいて電磁弁を切り換えることで、圧縮空気の
供給経路の切り換え制御を容易に行うことができる。As described above, according to the present invention, when the air cylinder is driven, compressed air is supplied via the pressure increasing valve,
When the air cylinder is stopped, compressed air is supplied without passing through the pressure increasing valve, so that the number of times the pressure increasing valve is operated can be reduced, and the substantial life of the pressure increasing valve can be extended. In addition, a solenoid valve is used to switch the compressed air supply path to the pneumatic device, and the solenoid valve is switched based on an electric signal for driving the air cylinder, thereby facilitating the switching control of the compressed air supply path. It can be carried out.
【図１】本発明の空気圧回路の一実施形態を示す図であ
る。FIG. 1 is a diagram showing an embodiment of a pneumatic circuit of the present invention.
【図２】従来の、空気圧装置へ圧縮空気を供給するため
の空気圧回路を示す図である。FIG. 2 is a view showing a conventional pneumatic circuit for supplying compressed air to a pneumatic device.
１ 電磁切換弁 １ａ，１ｂ 入力ポート １ｃ 出力ポート ２ａ 増圧弁 ２ｂ タンク ３，４ レギュレータ ５ テストヘッド ６ テストヘッドスタンド 1 Electromagnetic switching valve 1a, 1b Input port 1c Output port 2a Booster valve 2b Tank 3,4 Regulator 5 Test head 6 Test head stand
Claims (4)
めに、増圧弁によって増圧された圧縮空気を前記空気圧
装置へ供給する圧縮空気供給方法において、 前記エアシリンダの駆動時には前記増圧弁を経由して圧
縮空気を供給し、 前記エアシリンダの停止時には前記増圧弁を経由せずに
圧縮空気を供給することを特徴とする、空気圧装置への
圧縮空気供給方法。1. A compressed air supply method for supplying compressed air pressure-increased by a pressure increasing valve to the air pressure device in order to drive an air cylinder of the air pressure device, comprising: passing through the pressure increasing valve when the air cylinder is driven. Compressed air is supplied to the compressed air without stopping the pressure increase valve when the air cylinder is stopped, and the compressed air is supplied to the pneumatic device.
電磁弁を用い、前記エアシリンダを駆動させるための電
気信号に基づいて前記電磁弁を制御する請求項１に記載
の空気圧装置への圧縮空気供給方法。2. The compression to a pneumatic device according to claim 1, wherein a solenoid valve is used for switching a supply path of compressed air, and the solenoid valve is controlled based on an electric signal for driving the air cylinder. Air supply method.
された圧縮空気を、エアシリンダを備えた空気圧装置へ
供給する空気圧回路において、 前記エアシリンダの駆動時には前記増圧弁を経由して圧
縮空気を供給し、前記エアシリンダの停止時には前記増
圧弁を経由せずに圧縮空気を供給するように圧縮空気の
供給経路を切り換える切換弁を有することを特徴とする
空気圧回路。3. An air pressure circuit having a pressure increasing valve, wherein compressed air increased in pressure by said pressure increasing valve is supplied to an air pressure device equipped with an air cylinder, when the air cylinder is driven, it passes through said pressure increasing valve. An air pressure circuit comprising a switching valve for supplying compressed air and switching a supply path of the compressed air so as to supply the compressed air without passing through the pressure increasing valve when the air cylinder is stopped.
させるための電気信号に基づいて制御される電磁弁であ
る請求項３に記載の空気圧回路。4. The pneumatic circuit according to claim 3, wherein the switching valve is an electromagnetic valve controlled based on an electric signal for driving the air cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12158196A JPH09303314A (en) | 1996-05-16 | 1996-05-16 | Method for supplying compressed air to pneumatic device, and pneumatic circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12158196A JPH09303314A (en) | 1996-05-16 | 1996-05-16 | Method for supplying compressed air to pneumatic device, and pneumatic circuit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09303314A true JPH09303314A (en) | 1997-11-25 |
Family
ID=14814793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12158196A Pending JPH09303314A (en) | 1996-05-16 | 1996-05-16 | Method for supplying compressed air to pneumatic device, and pneumatic circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09303314A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016186326A (en) * | 2015-03-27 | 2016-10-27 | 三菱重工業株式会社 | Compressed gas supply system and nuclear plant including the same |
-
1996
- 1996-05-16 JP JP12158196A patent/JPH09303314A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016186326A (en) * | 2015-03-27 | 2016-10-27 | 三菱重工業株式会社 | Compressed gas supply system and nuclear plant including the same |
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| Date | Code | Title | Description |
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| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20040609 |