JPH09253935A - Wire-edm method and device - Google Patents
Wire-edm method and deviceInfo
- Publication number
- JPH09253935A JPH09253935A JP6993996A JP6993996A JPH09253935A JP H09253935 A JPH09253935 A JP H09253935A JP 6993996 A JP6993996 A JP 6993996A JP 6993996 A JP6993996 A JP 6993996A JP H09253935 A JPH09253935 A JP H09253935A
- Authority
- JP
- Japan
- Prior art keywords
- machining
- wire
- workpiece
- electric discharge
- conductive material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、絶縁材料のワイ
ヤ放電加工方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire electric discharge machining method for an insulating material.
【０００２】[0002]
【従来の技術】従来、通常の放電加工ではセラミックス
などの絶縁材料の加工は不可能であるが、電極材料を工
作物表面に付着させ、該電極材料の電導性を利用して放
電を発生させ加工を行う方法が提案されている。図６は
その一例を示したものであり、１は電極、１０は絶縁材
工作物、１１は電導材工作物、１２は工作物を横方向に
拘束する固定部材、１３は工作物１１、１２をはさんで
前記固定部材１２の反対側に設置され、絶縁材工作物１
０と電導材工作物１１を機械的に密着、固定せしめる圧
着機構、１４は加工油、１５は加工電源である。2. Description of the Related Art Conventionally, it has been impossible to process an insulating material such as ceramics by ordinary electric discharge machining, but an electrode material is attached to the surface of a workpiece and an electric discharge is generated by utilizing the electric conductivity of the electrode material. A method of processing has been proposed. FIG. 6 shows an example thereof, 1 is an electrode, 10 is an insulating material workpiece, 11 is an electrically conductive material workpiece, 12 is a fixing member for laterally restraining the workpiece, and 13 is the workpieces 11 and 12. It is installed on the opposite side of the fixing member 12 by sandwiching the insulating work piece 1
0 is a crimping mechanism for mechanically adhering and fixing the electrically conductive material workpiece 11, 14 is working oil, and 15 is a working power source.
【０００３】次に、動作について説明する。加工に先だ
って絶縁材工作物１０と電導材工作物１１は固定治具３
により機械的に圧着・接合された状態で固定される。つ
いで、ワイヤ電極１を絶縁材工作物１０と電導材工作物
１１の接合部分に位置決めされ、加工を開始する。ま
ず、電極１を絶縁材工作物１０と電導材料１１の接合部
分に位置決めし、電圧を電極１と工作物１０、１１の間
に印加する。その際、極性は電極（−）の極性の電圧を
印加する。この電圧によりまず電導材工作物の部分のみ
放電が発生し、次いでセラミックスの金属側に最も近い
ところで、熱影響により加工と電極材成分の転写が行わ
れる。その後、その転写部分にも放電が行われ、セラミ
ックスも放電の衝撃及び熱の影響で加工が進行する。以
上の連続によりセラミックス加工が進行するが、これは
表皮効果によりセラミックス表面に電流が流れセラミッ
クス側に放電が起こり、セラミックスも加工されるもの
である。Next, the operation will be described. Prior to processing, the insulating material work piece 10 and the conductive material work piece 11 are fixed jigs 3
It is fixed in the state of being mechanically crimped and joined by. Then, the wire electrode 1 is positioned at the joint portion between the insulating material workpiece 10 and the conductive material workpiece 11, and the machining is started. First, the electrode 1 is positioned at the joint between the insulating material workpiece 10 and the conductive material 11, and a voltage is applied between the electrode 1 and the workpieces 10 and 11. At that time, as the polarity, a voltage having the polarity of the electrode (−) is applied. Due to this voltage, discharge is first generated only in the part of the conductive material work piece, and then the processing and transfer of the electrode material component are performed by the thermal effect at the position closest to the metal side of the ceramic. After that, the transferred portion is also discharged, and the ceramics are also processed due to the impact of the discharge and the effect of heat. The ceramics machining progresses as a result of the above continuation. This is because the skin effect causes an electric current to flow on the ceramics surface, causing an electric discharge on the ceramics side, so that the ceramics is also machined.
【０００４】[0004]
【発明が解決しようとする課題】従来の放電加工装置
は、上記のように構成されており、加工形状が穴形状な
どの単純な形状に限定されるため、複雑形状の加工がで
きないという問題があった。The conventional electric discharge machining apparatus is configured as described above, and since the machining shape is limited to a simple shape such as a hole shape, there is a problem that a complicated shape cannot be machined. there were.
【０００５】この発明は上記のような従来のものの課題
を解消するためになされたもので、ワイヤ電極を用いた
放電加工において、絶縁物の複雑形状の加工を可能とす
ることを目的としている。The present invention has been made in order to solve the above problems of the conventional ones, and an object thereof is to enable machining of a complicated shape of an insulator in electric discharge machining using a wire electrode.
【０００６】[0006]
【課題を解決するための手段】第１の発明のワイヤ放電
加工方法は、絶縁材料または高抵抗材料からなる工作物
を電導材料と接触固定し、加工液中に炭素を含む加工液
を使用し、放電加工の熱作用により生じた分解カーボン
を工作物表面に付着させ、該付着カーボンの電導性を利
用して放電を発生させ加工を行うようにしたものであ
る。A wire electric discharge machining method according to a first aspect of the present invention uses a machining fluid containing carbon in a machining fluid, in which a workpiece made of an insulating material or a high resistance material is fixed in contact with a conductive material. In this method, decomposed carbon generated by the thermal action of electric discharge machining is attached to the surface of a workpiece, and the electrical conductivity of the attached carbon is used to generate an electric discharge for machining.
【０００７】第２の発明のワイヤ放電加工方法は、第１
の発明のワイヤ放電加工方法において、加工液に高分子
化合物または灯油を使用するようにしたものである。The wire electric discharge machining method of the second invention is the first
In the wire electric discharge machining method according to the invention, a polymer compound or kerosene is used as a working fluid.
【０００８】第３の発明のワイヤ放電加工方法は、第１
または第２の発明のワイヤ放電加工方法において、工作
物に導電性コーティングを施し加工を行うようにしたも
のである。The wire electric discharge machining method of the third invention is the first
Alternatively, in the wire electric discharge machining method according to the second aspect of the invention, the workpiece is machined by applying a conductive coating.
【０００９】第４の発明のワイヤ放電加工方法は、第１
または第２の発明のワイヤ放電加工方法において、工作
物の表面にメッシュ状電導材料または金属細線からなる
多孔質成形体あるいは針状金属を含む複合体を密着させ
加工を行うようにしたものである。A wire electric discharge machining method according to a fourth aspect of the present invention is the first aspect.
Alternatively, in the wire electric discharge machining method according to the second aspect of the present invention, the machining is performed by bringing a porous molded body made of a mesh-shaped conductive material or a metal thin wire or a composite containing a needle-shaped metal into close contact with the surface of the workpiece. .
【００１０】第５の発明のワイヤ放電加工方法は、第１
または第２の発明のワイヤ放電加工方法において、工作
物の加工開始穴に電導材料からなるパイプ状中空部材を
挿入し、該パイプ状中空部材内部にワイヤ電極を結線し
て加工を行うようにしたものである。The wire electric discharge machining method of the fifth invention is the first
Alternatively, in the wire electric discharge machining method of the second invention, a pipe-shaped hollow member made of an electrically conductive material is inserted into a machining starting hole of a workpiece, and a wire electrode is connected inside the pipe-shaped hollow member for machining. It is a thing.
【００１１】第６の発明のワイヤ放電加工方法は、加工
液中に炭素を含む加工液を加工部分に供給する加工液供
給手段と、導電材料を絶縁材料または高抵抗材料からな
る工作物に近接せしめるとともに導電材料とワイヤ電極
との位置を相対的に移動可能に駆動する導電材料移動手
段と、加工の進行に伴って前記導電材料とワイヤ電極の
相対位置を放電が適正に継続するよう制御する制御手段
を備えるようにしたものである。According to a sixth aspect of the wire electric discharge machining method, a machining liquid supply means for supplying a machining liquid containing a machining liquid containing carbon to a machining part and a work material made of an insulating material or a high resistance material as a conductive material are provided in proximity to the machining material. And a conductive material moving means for driving the positions of the conductive material and the wire electrode so as to be relatively movable, and controlling the relative position of the conductive material and the wire electrode so that the discharge appropriately continues as the machining progresses. The control means is provided.
【００１２】[0012]
実施の形態１．以下、本発明の一実施例を図に基づき説
明する。図１は本発明の実施の形態１を示す。図におい
て、１はワイヤ電極で通常は黄銅線またはスチール線に
黄銅のコーティングを施した電極線が使用される。２は
工作物を固定するテーブル、３は工作物を固定する固定
治具、４ａ、４ｂは加工液ノズル、５ａ、５ｂはワイヤ
ガイド、６はワイヤ電極に電流を供給する給電子、７は
加工液供給用ポンプ、１０はサイアロンなどの絶縁材工
作物、１１は電導材料、１４は放電加工油、１５は加工
電源である。Embodiment 1. An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 shows a first embodiment of the present invention. In the figure, reference numeral 1 denotes a wire electrode, which is usually a brass wire or a steel wire coated with brass. 2 is a table for fixing a workpiece, 3 is a fixing jig for fixing a workpiece, 4a and 4b are machining liquid nozzles, 5a and 5b are wire guides, 6 is a power supply for supplying electric current to wire electrodes, and 7 is machining. A liquid supply pump, 10 is an insulating material work such as sialon, 11 is a conductive material, 14 is electric discharge machining oil, and 15 is a machining power source.
【００１３】次に、動作について説明する。加工に先だ
って絶縁材工作物１０と電導材料１１は固定治具３によ
り機械的に圧着・接合された状態で固定される。つい
で、ワイヤ電極１を絶縁材工作物１０と電導材工作物１
１の接合部分に位置決めし、電圧を電極１と工作物１
０、１１の間に印加する。その際、極性は電極（−）の
極性の電圧を印加する。この電圧によりまず電導材料１
１の部分のみ放電が発生し、次いで絶縁材工作物１０
（サイアロン）の金属側に最も近いところで、熱影響に
より加工と電極材成分の転写が行われる。その後、その
転写部分にも放電が行われ、セラミックスも放電の衝撃
及び熱の影響で加工が進行する。加工の進行に伴い、絶
縁性工作物１０の加工表面には電極材成分が転写される
とともに、加工液中が放電加工の熱によって分解し、加
工液中に含まれる炭素が電気抵抗の比較的低い乱層カー
ボン(結晶性炭素)として工作物表面に付着する。こうし
て形成された乱層カーボン層に対して、再び放電が発生
し、絶縁材工作物１０の加工が進行する。Next, the operation will be described. Prior to processing, the insulating material workpiece 10 and the conductive material 11 are fixed by the fixing jig 3 in a mechanically pressure-bonded and joined state. Next, the wire electrode 1 is attached to the insulating material work 10 and the conductive material work 1
Positioned at the junction of 1, the voltage is applied to the electrode 1 and the workpiece 1
It is applied between 0 and 11. At that time, as the polarity, a voltage having the polarity of the electrode (−) is applied. With this voltage, first the conductive material 1
Discharge is generated only in the first part, and then the insulating material workpiece 10
Processing and transfer of electrode material components are performed due to thermal effects at a position closest to the metal side of (sialon). After that, the transferred portion is also discharged, and the ceramics are also processed due to the impact of the discharge and the effect of heat. As the machining progresses, the electrode material components are transferred to the machined surface of the insulating workpiece 10, and the machining fluid is decomposed by the heat of electric discharge machining, and the carbon contained in the machining fluid has a relatively high electric resistance. It adheres to the work surface as low turbostratic carbon (crystalline carbon). Electric discharge is again generated with respect to the disordered carbon layer thus formed, and the processing of the insulating material workpiece 10 proceeds.
【００１４】実施の形態２．次に、本発明の他の実施例
を図に基づき説明する。図２は本発明の実施の形態２を
示すものであり、図において、１はワイヤ電極で通常は
黄銅線またはスチール線に黄銅のコーティングを施した
電極線が使用される。２は工作物を固定するテーブル、
３は工作物を固定する固定治具、４ａ、４ｂは加工液ノ
ズル、５ａ、５ｂはワイヤガイド、６はワイヤ電極に電
流を供給する給電子、７は加工液供給用ポンプ、１０は
サイアロンなどの絶縁材工作物、１１は電導材料、８は
あらかじめ絶縁材工作物１０の加工開始部分の表面にＣ
ＶＤコーティングされた導電性コーティング、１４は放
電加工油、１５は加工電源である。Embodiment 2 FIG. Next, another embodiment of the present invention will be described with reference to the drawings. 2 shows a second embodiment of the present invention. In the figure, reference numeral 1 is a wire electrode, which is usually a brass wire or a steel wire having a brass coating applied thereto. 2 is a table for fixing the workpiece,
3 is a fixing jig for fixing a workpiece, 4a and 4b are machining fluid nozzles, 5a and 5b are wire guides, 6 is a power supply for supplying electric current to wire electrodes, 7 is a machining fluid supply pump, 10 is a sialon, etc. Insulating material work piece, 11 is a conductive material, 8 is C on the surface of the insulating material work piece 10 in advance.
VD coated conductive coating, 14 is electric discharge machining oil, and 15 is a machining power supply.
【００１５】次に、動作について説明する。実施の形態
１同様、加工に先だって絶縁材工作物１０と電導材料１
１は固定治具３により機械的に圧着・接合された状態で
固定される。ついで、ワイヤ電極１を絶縁材工作物１０
と電導材工作物１１の接合部分に位置決めし、電圧を電
極１と工作物１０、１１の間に印加する。その際、極性
は電極（−）の極性の電圧を印加する。この電圧により
導電性コーティング８を施した加工開始部分で放電が開
始する。その際実施の形態１では、まず電導材料１１で
のみ放電が発生し、次いで絶縁材工作物１０（サイアロ
ン）の金属側に最も近いところで、熱影響により加工と
電極材成分の転写が行われ、徐々に電導材料１１から離
れた部分での放電が増加していくが、本実施の形態では
あらかじめ絶縁材工作物１０の加工開始部分に導電性コ
ーティングをほどこしてあるため、全面放電に短時間で
移行する。以降は実施例１と同様、加工の進行に伴って
絶縁性工作物１０の加工表面には電極材成分が転写され
るとともに、加工液中が放電加工の熱によって分解し、
加工液中に含まれる炭素が電気抵抗の比較的低い乱層カ
ーボン(結晶性炭素)として工作物表面に付着する。こう
して形成された乱層カーボン層に対して、再び放電が発
生し、絶縁材工作物１０の加工が進行する。Next, the operation will be described. Similar to the first embodiment, the insulating material workpiece 10 and the conductive material 1 are processed prior to processing.
1 is fixed by a fixing jig 3 while being mechanically pressure-bonded and joined. Next, the wire electrode 1 is attached to the insulating work piece 10
The conductive material is positioned at the joint between the workpieces 11 and a voltage is applied between the electrode 1 and the workpieces 10, 11. At that time, as the polarity, a voltage having the polarity of the electrode (−) is applied. This voltage causes electric discharge to start at the processing start portion where the conductive coating 8 is applied. At that time, in the first embodiment, discharge is first generated only in the conductive material 11, and then processing and transfer of the electrode material component are performed by the heat effect at a position closest to the metal side of the insulating material workpiece 10 (sialon). The discharge gradually increases in the part away from the conductive material 11. However, in the present embodiment, the conductive coating is applied in advance to the processing start part of the insulating material workpiece 10. Transition. After that, as in Example 1, the electrode material component is transferred to the machining surface of the insulating workpiece 10 as the machining progresses, and the machining liquid is decomposed by the heat of electric discharge machining,
Carbon contained in the working fluid adheres to the work surface as turbostratic carbon (crystalline carbon) having a relatively low electric resistance. Electric discharge is again generated with respect to the disordered carbon layer thus formed, and the processing of the insulating material workpiece 10 proceeds.
【００１６】実施の形態３．次に、本発明の他の実施の
形態を図に基づき説明する。図３は本発明の実施の形態
３を示すものであり、図において、１はワイヤ電極で通
常は黄銅線またはスチール線に黄銅のコーティングを施
した電極線が使用される。２は工作物を固定するテーブ
ル、３は工作物を固定する固定治具、４ａ、４ｂは加工
液ノズル、５ａ、５ｂはワイヤガイド、６はワイヤ電極
に電流を供給する給電子、７は加工液供給用ポンプ、１
０はサイアロンなどの絶縁材工作物、１１は電導材料、
９はあらかじめ絶縁材工作物１０の加工開始部分の表面
に密着させたメッシュ状導電性材料、１４は放電加工
油、１５は加工電源である。Embodiment 3 Next, another embodiment of the present invention will be described with reference to the drawings. FIG. 3 shows Embodiment 3 of the present invention. In the figure, reference numeral 1 is a wire electrode, which is usually a brass wire or a steel wire coated with brass. 2 is a table for fixing a workpiece, 3 is a fixing jig for fixing a workpiece, 4a and 4b are machining liquid nozzles, 5a and 5b are wire guides, 6 is a power supply for supplying electric current to wire electrodes, and 7 is machining. Liquid supply pump, 1
0 is insulating material such as sialon, 11 is conductive material,
Reference numeral 9 is a mesh-shaped conductive material that has been brought into close contact with the surface of the insulating material workpiece 10 in advance, a reference numeral 14 is an electric discharge machining oil, and a reference numeral 15 is a processing power source.
【００１７】次に、動作について説明する。実施の形態
２同様、加工に先だって絶縁材工作物１０と電導材料１
１は固定治具３により機械的に圧着・接合された状態で
固定される。ついで、ワイヤ電極１を絶縁材工作物１０
と電導材工作物１１の接合部分に位置決めし、電圧を電
極１と工作物１０、１１の間に印加する。その際、極性
は電極（−）の極性の電圧を印加する。この電圧により
メッシュ状導電性材料９を施した加工開始部分で放電が
開始する。その際実施の形態２では、あらかじめ絶縁材
工作物１０の加工開始部分に導電性コーティングをほど
こしてあるため、全面放電に短時間で移行したが、板厚
の厚い絶縁材工作物の加工の場合、メッシュ状導電性材
料９が薄く、放電にてすぐに除去されてしまうため、加
工開始部分に電極材成分が転写および乱層カーボン層が
形成されにくい場合がある。本実施の形態では導電性コ
ーティングの代わりにメッシュ状導電性材料９を使用す
るため、絶縁材工作物１０の加工に入る前にメッシュ状
導電性材料９部分での加工にて十分な放電時間を掛ける
ことができ、さらにはメッシュであるために絶縁材工作
物１０表面に電極材成分が転写および乱層カーボン層を
形成し易くなる。以降は実施の形態２と同様、乱層カー
ボン層に対して、再び放電が発生し、絶縁材工作物１０
の加工が進行する。Next, the operation will be described. Similar to the second embodiment, the insulating material workpiece 10 and the conductive material 1 are processed prior to processing.
1 is fixed by a fixing jig 3 while being mechanically pressure-bonded and joined. Next, the wire electrode 1 is attached to the insulating work piece 10
The conductive material is positioned at the joint between the workpieces 11 and a voltage is applied between the electrode 1 and the workpieces 10, 11. At that time, as the polarity, a voltage having the polarity of the electrode (−) is applied. This voltage causes electric discharge to start at the processing start portion where the mesh-shaped conductive material 9 is applied. At that time, in the second embodiment, since the conductive coating is applied to the machining starting portion of the insulating material workpiece 10 in advance, the discharge to the whole surface is completed in a short time, but in the case of machining the thick insulating material workpiece. Since the mesh-shaped conductive material 9 is thin and is immediately removed by electric discharge, it may be difficult to transfer the electrode material component and form the disordered carbon layer at the processing start portion. In the present embodiment, since the mesh-shaped conductive material 9 is used instead of the conductive coating, a sufficient discharge time is required in the processing in the mesh-shaped conductive material 9 portion before the processing of the insulating material workpiece 10. Moreover, since it is a mesh, the electrode material component is easily transferred to the surface of the insulating material workpiece 10 and the disordered carbon layer is easily formed. After that, as in the second embodiment, electric discharge is generated again to the turbostratic carbon layer, and the insulating material workpiece 10
Processing proceeds.
【００１８】実施の形態４．次に、本発明の他の実施の
形態を図に基づき説明する。図４は本発明の実施の形態
４を示すものであり、図において、１はワイヤ電極で通
常は黄銅線またはスチール線に黄銅のコーティングを施
した電極線が使用される。２は工作物を固定するテーブ
ル、３は工作物を固定する固定治具、４ａ、４ｂは加工
液ノズル、５ａ、５ｂはワイヤガイド、６はワイヤ電極
に電流を供給する給電子、７は加工液供給用ポンプ、１
０はサイアロンなどの絶縁材工作物、１１は電導材料、
２１はあらかじめ絶縁材工作物１０の加工開始穴の表面
に密着させたパイプ導電性部材、１４は放電加工油、１
５は加工電源である。Embodiment 4 Next, another embodiment of the present invention will be described with reference to the drawings. FIG. 4 shows Embodiment 4 of the present invention. In the figure, reference numeral 1 is a wire electrode, which is usually a brass wire or a steel wire coated with brass. 2 is a table for fixing a workpiece, 3 is a fixing jig for fixing a workpiece, 4a and 4b are machining liquid nozzles, 5a and 5b are wire guides, 6 is a power supply for supplying electric current to wire electrodes, and 7 is machining. Liquid supply pump, 1
0 is insulating material such as sialon, 11 is conductive material,
Reference numeral 21 is a pipe conductive member which is brought into close contact with the surface of the processing start hole of the insulating material workpiece 10 in advance, 14 is electric discharge machining oil, 1
Reference numeral 5 is a processing power source.
【００１９】次に、動作について説明する。実施の形態
４同様、加工に先だって絶縁材工作物１０と電導材料１
１は固定治具３により機械的に圧着・接合された状態で
固定されるとともに、加工開始穴の内部に密着するよ
う、導電性パイプ２１が挿入される。ついで、ワイヤ電
極１を導電性パイプ２１の内穴にワイヤを結線・位置決
めしたのち、加工を開始する。本実施の形態では導電性
コーティングやメッシュ状導電材料の代わりに導電性パ
イプ２１を使用するため、加工開始穴からの加工を容易
に行うことができる。絶縁材工作物１０表面に電極材成
分が転写および乱層カーボン層を形成した後は、実施の
形態２、３と同様、乱層カーボン層に対して、再び放電
が発生し、絶縁材工作物１０の加工が進行する。Next, the operation will be described. Similar to the fourth embodiment, the insulating material workpiece 10 and the conductive material 1 are processed prior to processing.
1 is fixed by a fixing jig 3 in a mechanically pressure-bonded / joined state, and a conductive pipe 21 is inserted so as to be in close contact with the inside of the processing start hole. Next, the wire electrode 1 is connected and positioned in the inner hole of the conductive pipe 21, and then the processing is started. In the present embodiment, since the conductive pipe 21 is used instead of the conductive coating or the mesh-shaped conductive material, it is possible to easily perform processing from the processing start hole. After the electrode material component is transferred and the disordered carbon layer is formed on the surface of the insulating material workpiece 10, discharge is again generated to the disordered carbon layer as in the second and third embodiments, and the insulating material workpiece is produced. Processing of 10 proceeds.
【００２０】実施の形態５．次に、本発明の他の実施の
形態を図に基づき説明する。図５は本発明の実施の形態
５を示すものであり、図において、１はワイヤ電極で通
常は黄銅線またはスチール線に黄銅のコーティングを施
した電極線が使用される。２は工作物を固定するテーブ
ルで、図示されない駆動装置によりワイヤ電極１に対し
てＸＹ方向に相対移動可能となっている。３は工作物を
固定する固定治具、４ａ、４ｂは加工液ノズル、５ａ、
５ｂはワイヤガイド、６はワイヤ電極に電流を供給する
給電子、７は加工液供給用ポンプ、１０はサイアロンな
どの絶縁材工作物、１１は電導材料、２２は導電材料１
１を絶縁性工作物１０に近接せしめるとともに、導電材
料１１とワイヤ電極１との位置を相対的に移動させるよ
うに駆動する導電材料駆動装置であり、絶縁部材２３を
介して機械(ワイヤ電極側)に固定されている。Embodiment 5. Next, another embodiment of the present invention will be described with reference to the drawings. FIG. 5 shows a fifth embodiment of the present invention. In the figure, reference numeral 1 is a wire electrode, which is usually a brass wire or a steel wire coated with brass. Reference numeral 2 is a table for fixing the workpiece, which can be moved in the XY directions relative to the wire electrode 1 by a driving device (not shown). 3 is a fixing jig for fixing a workpiece, 4a and 4b are machining fluid nozzles, 5a,
5b is a wire guide, 6 is a power supply for supplying a current to a wire electrode, 7 is a pump for supplying a working fluid, 10 is an insulating work such as sialon, 11 is a conductive material, 22 is a conductive material 1
1 is a conductive material driving device that drives the conductive material 11 and the wire electrode 1 so as to move relative to each other while bringing the conductive material 11 close to the insulating work piece 10. ) Is fixed.
【００２１】次に、動作について説明する。実施の形態
１同様、加工に先だって絶縁材工作物１０と電導材料１
１は導電材料駆動装置２２により機械的に圧着・接合さ
れた状態で固定される。ついで、ワイヤ電極１を絶縁材
工作物１０と電導材工作物１１の接合部分に位置決め
し、電圧を電極１と工作物１０、１１の間に印加する。
この電圧によりまず電導材料１１の部分のみ放電が発生
し、次いで絶縁材工作物１０（サイアロン）の金属側に
最も近いところで、熱影響により加工と電極材成分の転
写が行われる。その後、その転写部分にも放電が行わ
れ、セラミックスも放電の衝撃及び熱の影響で加工が進
行する。加工の進行に伴い、絶縁性工作物１０の加工表
面には電極材成分が転写されるとともに、加工液中が放
電加工の熱によって分解し、加工液中に含まれる炭素が
電気抵抗の比較的低い乱層カーボン(結晶性炭素)として
工作物表面に付着する。こうして形成された乱層カーボ
ン層に対して、再び放電が発生し、絶縁材工作物１０の
加工が進行する。加工の進行に伴い、絶縁材工作物１０
はテーブル２とともに、図示されないテーブル駆動装置
によりワイヤ電極１に対して相対移動せしめられ、加工
が進行するが、その際、絶縁材工作物１０の除去速度が
電導材料１１の除去速度がよりも低いため、実施の形態
１のような構成の場合、電導材料１１が先に消耗し、電
導材料１１とワイヤ電極１の間の放電が発生しなくなる
場合があり、その結果として加工が進行の進行が阻害さ
れる。このため、本実施例では、加工中にテーブル駆動
とは独立して、導電材料駆動装置２２により、電導材料
１１とワイヤ電極１との放電状態を一定に保つよう、電
導材料１１の送り（ワイヤ電極１に対する）を制御す
る。これにより、電導材料１１とワイヤ電極１の間の放
電周波数を絶縁材工作物１０の除去速度に関わらず常に
一定に保つことができ、安定した加工が行われる。Next, the operation will be described. Similar to the first embodiment, the insulating material workpiece 10 and the conductive material 1 are processed prior to processing.
1 is fixed by a conductive material driving device 22 in a mechanically pressure-bonded / joined state. The wire electrode 1 is then positioned at the junction of the insulating material workpiece 10 and the electrically conductive material workpiece 11 and a voltage is applied between the electrode 1 and the workpieces 10, 11.
Due to this voltage, discharge is first generated only in the portion of the conductive material 11, and then the processing and transfer of the electrode material component are performed due to the thermal effect at the position closest to the metal side of the insulating material workpiece 10 (sialon). After that, the transferred portion is also discharged, and the ceramics are also processed due to the impact of the discharge and the effect of heat. As the machining progresses, the electrode material components are transferred to the machined surface of the insulating workpiece 10, and the machining fluid is decomposed by the heat of electric discharge machining, and the carbon contained in the machining fluid has a relatively high electric resistance. It adheres to the work surface as low turbostratic carbon (crystalline carbon). Electric discharge is again generated with respect to the disordered carbon layer thus formed, and the processing of the insulating material workpiece 10 proceeds. Insulation work 10
Is moved relative to the wire electrode 1 together with the table 2 by a table driving device (not shown), and the processing proceeds, but at that time, the removal rate of the insulating material workpiece 10 is lower than that of the conductive material 11. Therefore, in the case of the configuration of the first embodiment, the conductive material 11 may be consumed first, and the discharge between the conductive material 11 and the wire electrode 1 may not be generated, and as a result, the progress of the processing may progress. Be hindered. For this reason, in the present embodiment, the conductive material driving device 22 feeds the conductive material 11 (wire feed) so as to keep the discharge state between the conductive material 11 and the wire electrode 1 constant, independently of the table drive during processing. (For electrode 1). Thereby, the discharge frequency between the conductive material 11 and the wire electrode 1 can be always kept constant regardless of the removal speed of the insulating material workpiece 10, and stable machining can be performed.
【００２２】[0022]
【発明の効果】以上、本発明によれば、高分子化合物、
灯油など、加工液中に炭素を含む加工液を使用し、放電
加工の熱作用により生じた分解カーボンを、電気抵抗の
比較的低い乱層カーボン(結晶性炭素)として工作物表面
に付着させ、該付着カーボンの電導性を利用して放電を
発生させるようにしたため、従来のワイヤ放電加工では
加工不能なセラミックスなどの絶縁性工作物の加工が可
能なワイヤ放電加工方法が得られる効果がある。As described above, according to the present invention, a polymer compound,
Using a machining fluid containing carbon in the machining fluid such as kerosene, the decomposed carbon generated by the thermal action of electrical discharge machining is attached to the surface of the workpiece as turbostratic carbon (crystalline carbon) with a relatively low electric resistance. Since the electrical conductivity of the attached carbon is used to generate electric discharge, there is an effect that a wire electric discharge machining method capable of machining an insulating workpiece such as ceramics which cannot be machined by conventional wire electric discharge machining can be obtained.
【００２３】また、本発明によれば、加工開始面部分に
導電性コーティングを施し、この部分から加工を開始す
るようにしたため、加工開始時における安定性を向上で
き、従来のワイヤ放電加工では加工不能なセラミックス
などの絶縁性工作物の加工が可能なワイヤ放電加工方法
が得られる効果がある。Further, according to the present invention, the conductive coating is applied to the processing start surface portion, and the processing is started from this portion. Therefore, the stability at the start of the processing can be improved, and in the conventional wire electric discharge machining, the processing can be performed. There is an effect that a wire electric discharge machining method capable of machining an insulative work such as impossible ceramics can be obtained.
【００２４】また、本発明によれば、加工開始面部分に
メッシュ状電導材料、金属細線からなる多孔質成形体ま
たは針状金属を含む複合体を絶縁材料の表面に密着さ
せ、この部分から加工を開始するようにしたため、より
板厚の厚い絶縁性工作物についてもより安定して加工可
能なワイヤ放電加工方法が得られる効果がある。Further, according to the present invention, a mesh-shaped conductive material, a porous compact made of fine metal wires or a composite containing acicular metal is adhered to the surface of the insulating material at the processing start surface portion, and processing is performed from this portion. Therefore, there is an effect that a wire electric discharge machining method capable of more stably machining an insulating work having a thicker plate thickness can be obtained.
【００２５】また、本発明によれば、加工開始穴に電導
材料、金属からなるパイプ状中空部材を挿入・密着さ
せ、パイプの内部にワイヤを結線して加工を開始するよ
うにしたため、加工開始穴からの加工を容易に行うこと
ができるワイヤ放電加工方法が得られる効果がある。Further, according to the present invention, since the pipe-shaped hollow member made of a conductive material and a metal is inserted into and closely contacted with the processing start hole and the wire is connected to the inside of the pipe to start the processing, the processing is started. There is an effect that a wire electric discharge machining method capable of easily machining from a hole is obtained.
【００２６】また、本発明によれば、高分子化合物、灯
油など、加工液中に炭素を含む加工液を加工部分に供給
する加工液供給手段と、導電材料を絶縁性工作物に近接
せしめるとともに、導電材料とワイヤ電極との位置を相
対的に移動可能に駆動する導電材料移動手段と、加工の
進行に伴って導電材料とワイヤ電極の相対位置を、放電
が適正に継続するよう制御する制御手段を備えるように
したため、絶縁性工作物の安定した加工を可能としたワ
イヤ放電加工装置が得られる効果がある。Further, according to the present invention, a machining fluid supply means for supplying a machining fluid containing carbon in the machining fluid such as a polymer compound and kerosene to a machining part and a conductive material are brought close to an insulating workpiece. , A control for controlling the relative position of the conductive material and the wire electrode so as to appropriately continue the discharge, and the relative position of the conductive material and the wire electrode as the machining progresses. Since the means is provided, there is an effect that a wire electric discharge machine capable of stably machining an insulating work piece can be obtained.
【００２７】[0027]
【図１】 本発明の第１の実施の形態を示す図である。FIG. 1 is a diagram showing a first embodiment of the present invention.
【図２】 本発明の第２の実施の形態の説明図である。FIG. 2 is an explanatory diagram of a second embodiment of the present invention.
【図３】 本発明の第３の実施の形態の説明図である。FIG. 3 is an explanatory diagram of a third embodiment of the present invention.
【図４】 本発明の第４の実施の形態の説明図である。FIG. 4 is an explanatory diagram of a fourth embodiment of the present invention.
【図５】 本発明の第５の実施の形態を示す図である。FIG. 5 is a diagram showing a fifth embodiment of the present invention.
【図６】 従来の絶縁材料加工用の放電加工装置を示す
図。FIG. 6 is a view showing a conventional electric discharge machining apparatus for machining an insulating material.
１・・・ワイヤ電極、２・・・テーブル、３・・・固定
治具、４ａ、４ｂ・・・加工液ノズル、５ａ、５ｂ・・
・ワイヤガイド、６・・・給電子、７・・・加工液供給
用ポンプ、８・・・導電性コーティング、９・・・メッ
シュ状導電性材料、１０・・・絶縁材工作物、１１・・
・電導材料、１４・・・放電加工油、１５・・・加工電
源、２１・・・パイプ導電性部材、２２・・・導電材料
駆動装置、２３・・・絶縁部材1 ... Wire electrode, 2 ... Table, 3 ... Fixing jig, 4a, 4b ... Machining liquid nozzle, 5a, 5b ...
・ Wire guide, 6 ... Electronic supply, 7 ... Processing liquid supply pump, 8 ... Conductive coating, 9 ... Mesh conductive material, 10 ... Insulation work, 11.・
・ Electrical conductive material, 14 ... Electric discharge machining oil, 15 ... Machining power source, 21 ... Pipe conductive member, 22 ... Conductive material driving device, 23 ... Insulating member
───────────────────────────────────────────────────── フロントページの続き (72)発明者 福澤 康 新潟県長岡市深沢町1769ー１ 深沢町宿舎 ２ー401 (72)発明者 真柄 卓司 東京都千代田区丸の内二丁目２番３号 三 菱電機株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yasushi Fukuzawa 1769-1 Fukasawa-cho, Nagaoka-shi, Niigata 2-401 Fukasawa-shuku 2-401 (72) Inventor Takuji Maji 2-3-3, Marunouchi, Chiyoda-ku, Tokyo Sanryo Denki Within the corporation
Claims (6)
物を電導材料と接触固定し、加工液中に炭素を含む加工
液を使用し、放電加工の熱作用により生じた分解カーボ
ンを工作物表面に付着させ、該付着カーボンの電導性を
利用して放電を発生させ加工を行うことを特徴とするワ
イヤ放電加工方法。1. A work surface made of an insulating material or a high-resistance material is fixed in contact with an electrically conductive material, a working fluid containing carbon is used in the working fluid, and decomposed carbon generated by the thermal action of electric discharge machining is applied to the work surface. A wire electric discharge machining method, characterized in that the wire is made to adhere to, and electric discharge is generated by utilizing the electric conductivity of the adhered carbon for machining.
いて、加工液に高分子化合物または灯油を使用すること
を特徴とするワイヤ放電加工方法。2. The wire electric discharge machining method according to claim 1, wherein a polymer compound or kerosene is used as a machining liquid.
方法において、工作物に導電性コーティングを施し、加
工を行うことを特徴とするワイヤ放電加工方法。3. The wire electric discharge machining method according to claim 1 or 2, wherein the workpiece is coated with a conductive coating to perform machining.
方法において、工作物の表面にメッシュ状電導材料また
は金属細線からなる多孔質成形体あるいは針状金属を含
む複合体を密着させ、加工を行うことを特徴とするワイ
ヤ放電加工方法。4. The wire electric discharge machining method according to claim 1, wherein the surface of the workpiece is brought into close contact with a porous molded body made of a mesh-shaped conductive material or a fine metal wire or a composite containing a needle-shaped metal for machining. A wire electrical discharge machining method characterized by performing.
方法において、工作物の加工開始穴に電導材料からなる
パイプ状中空部材を挿入し、該パイプ状中空部材内部に
ワイヤ電極を結線して加工を行うことを特徴とするワイ
ヤ放電加工方法。5. The wire electric discharge machining method according to claim 1, wherein a pipe-shaped hollow member made of a conductive material is inserted into a machining starting hole of the workpiece, and a wire electrode is connected inside the pipe-shaped hollow member. A wire electric discharge machining method characterized by performing machining.
に供給する加工液供給手段と、導電材料を絶縁材料また
は高抵抗材料からなる工作物に近接せしめるとともに導
電材料とワイヤ電極との位置を相対的に移動可能に駆動
する導電材料移動手段と、加工の進行に伴って前記導電
材料とワイヤ電極の相対位置を放電が適正に継続するよ
う制御する制御手段を備えたことを特徴とするワイヤ放
電加工装置。6. A machining fluid supply means for feeding a machining fluid containing carbon in the machining fluid to a machining part, a conductive material being brought close to a workpiece made of an insulating material or a high resistance material, and a conductive material and a wire electrode. And a control means for controlling the relative position of the conductive material and the wire electrode so that the discharge is appropriately continued as the machining progresses. Wire electrical discharge machine.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP06993996A JP3731765B2 (en) | 1996-03-26 | 1996-03-26 | Wire electric discharge machining method and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP06993996A JP3731765B2 (en) | 1996-03-26 | 1996-03-26 | Wire electric discharge machining method and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09253935A true JPH09253935A (en) | 1997-09-30 |
| JP3731765B2 JP3731765B2 (en) | 2006-01-05 |
Family
ID=13417144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP06993996A Expired - Lifetime JP3731765B2 (en) | 1996-03-26 | 1996-03-26 | Wire electric discharge machining method and apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3731765B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003061890A1 (en) * | 2002-01-24 | 2003-07-31 | Mitsubishi Denki Kabushiki Kaisha | Method and system for electric discharge machining insulating material or high resistance material |
| WO2007057948A1 (en) | 2005-11-16 | 2007-05-24 | Mitsubishi Denki Kabushiki Kaisha | Wire electrical discharge machining method, semiconductor wafer manufacturing method and solar battery cell manufacturing method |
| WO2008000072A1 (en) * | 2006-06-30 | 2008-01-03 | Mcmaster University | Abrasion assisted wire electrical discharge machining process |
| JP2016087786A (en) * | 2014-11-05 | 2016-05-23 | 國立台灣科技大學 | Cutting device of semiconductor material or non-conductive material using wire electric discharge processing, and method of the same |
-
1996
- 1996-03-26 JP JP06993996A patent/JP3731765B2/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003061890A1 (en) * | 2002-01-24 | 2003-07-31 | Mitsubishi Denki Kabushiki Kaisha | Method and system for electric discharge machining insulating material or high resistance material |
| US6946615B2 (en) | 2002-01-24 | 2005-09-20 | Mitsubishi Denki Kabushiki Kaisha | Method and system for electric discharge machining insulating material or high resistance material |
| CN1322953C (en) * | 2002-01-24 | 2007-06-27 | 三菱电机株式会社 | Discharge processing method and apparatus thereof |
| WO2007057948A1 (en) | 2005-11-16 | 2007-05-24 | Mitsubishi Denki Kabushiki Kaisha | Wire electrical discharge machining method, semiconductor wafer manufacturing method and solar battery cell manufacturing method |
| US8138442B2 (en) | 2005-11-16 | 2012-03-20 | Mitsubishi Electric Corporation | Wire electric discharge machining method, semiconductor wafer manufacturing method, and solar battery cell manufacturing method |
| WO2008000072A1 (en) * | 2006-06-30 | 2008-01-03 | Mcmaster University | Abrasion assisted wire electrical discharge machining process |
| JP2016087786A (en) * | 2014-11-05 | 2016-05-23 | 國立台灣科技大學 | Cutting device of semiconductor material or non-conductive material using wire electric discharge processing, and method of the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3731765B2 (en) | 2006-01-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR840001386A (en) | Method and apparatus for bonding on integrated circuit chip | |
| KR100411454B1 (en) | Apparatus for discharge surface treatment and method for discharge surface treatment | |
| JPH09253935A (en) | Wire-edm method and device | |
| JPS63150109A (en) | Electric discharge machining for electric insulator | |
| JPH10202431A (en) | Machining method for workpiece having insulating ceramic coat | |
| JP2001212723A (en) | Electric discharge machining method for metal member having ceramic coating layer | |
| JP3241936B2 (en) | EDM method for insulating material | |
| JP3866661B2 (en) | Electric discharge machining method and apparatus | |
| JPS629848A (en) | Method of positioning and setting metallic piece to machine tool | |
| JP4058518B2 (en) | Cutting tool using electrolytic action and manufacturing method thereof | |
| TW201532158A (en) | Ball forming device, wire bonding device and ball forming method | |
| JPH0749173B2 (en) | Wire guide for wire electric discharge machine | |
| JP2860050B2 (en) | Electric discharge machining method and apparatus | |
| TWI226270B (en) | Method and apparatus of asynchronous wire-cutting electric discharge machine | |
| GB2082954A (en) | Wire-cutting electroerosion machining method and apparatus | |
| US4687900A (en) | Fusing methods and apparatus therefor | |
| RU2254213C2 (en) | Method of electric-discharge working and electric-discharge machine tool | |
| JPS61219523A (en) | Electrically machining method for insulating type hard-to-cut material | |
| JP4567899B2 (en) | Fine shaft forming method and apparatus | |
| JP2565680B2 (en) | Perforation electric discharge machining attachment | |
| JP2001105397A (en) | Electric discharge machining method | |
| JPH01228728A (en) | Wire electrode for wire cut electric discharge machining | |
| JPH0192026A (en) | Electric discharge machining method for insulating material | |
| JP2001252830A (en) | Machining method and device with wire electrode | |
| RU2074796C1 (en) | Method of electric spark coating application |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20040629 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20040706 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20040903 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20041116 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050117 |
|
| A911 | Transfer of reconsideration by examiner before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20050121 |
|
| RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20050128 |
|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20050128 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20050128 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050414 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20051004 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20051006 |
|
| R150 | Certificate of patent (=grant) or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091021 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091021 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20101021 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111021 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121021 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131021 Year of fee payment: 8 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |