JPH09246903A - Vibrator - Google Patents
VibratorInfo
- Publication number
- JPH09246903A JPH09246903A JP5573096A JP5573096A JPH09246903A JP H09246903 A JPH09246903 A JP H09246903A JP 5573096 A JP5573096 A JP 5573096A JP 5573096 A JP5573096 A JP 5573096A JP H09246903 A JPH09246903 A JP H09246903A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- vibration
- electrode
- excitation
- longitudinal direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は水晶等の圧電材料か
らなる振動子に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrator made of a piezoelectric material such as quartz.
【０００２】[0002]
【従来の技術】従来のこの振動子は、図４に示す通り、
振動板１と、この振動板１の表、裏面を覆うカバー６，
７とを備え、前記振動板１は、その表、裏面の励振用電
極２への導通を取るためのリード電極５の根本部で前記
カバー７の保持部８に固定されていた。2. Description of the Related Art As shown in FIG.
The diaphragm 1, and a cover 6, which covers the front and back surfaces of the diaphragm 1,
7, the diaphragm 1 is fixed to the holding portion 8 of the cover 7 at the root of the lead electrode 5 for establishing conduction to the excitation electrodes 2 on the front and back surfaces thereof.
【０００３】前記振動板１は、長方形の板状であり、そ
の表、裏面に長方形の励振用電極２を形成し、その長手
方向両側には無電極部３を設けていた。The diaphragm 1 has a rectangular plate shape, and rectangular excitation electrodes 2 are formed on the front and back surfaces thereof, and electrodeless portions 3 are provided on both sides in the longitudinal direction.
【０００４】[0004]
【発明が解決しようとする課題】上記構成においては、
励振振動として厚み滑り振動を用いており、長方形状の
振動板１の長手方向に両側に十分な長さの無電極部３を
設け、励振用電極２の質量付加によって励振振動を励振
用電極２部に集中させることで、励振振動に悪影響を及
ぼす主に振動板輪郭部の長手方向において向かい合う端
面によって発生するスプリアス振動との結合を弱めてい
る。しかし、振動板１を小形化するにしたがって無電極
部３を十分に確保できず、励振用電極２部に効率良く励
振振動を集中させることは難しくなるため、前記スプリ
アス振動との結合を抑えることができず特性を劣化させ
るという問題を有していた。またこの従来例の場合振動
板１の幅方向については、その両側部においてほとんど
無電極部を設けていないため、励振振動を励振用電極２
部に十分集中させることができず、特性を劣化させると
いう問題を有していた。In the above configuration,
The thickness-shear vibration is used as the excitation vibration, and the electrodeless portions 3 having a sufficient length are provided on both sides in the longitudinal direction of the rectangular diaphragm 1, and the excitation vibration is generated by adding the mass of the excitation electrode 2 to the excitation electrode 2. By concentrating on the portion, the coupling with the spurious vibration which adversely affects the excitation vibration and is mainly generated by the end faces facing each other in the longitudinal direction of the contour portion of the diaphragm is weakened. However, as the size of the diaphragm 1 is reduced, the electrodeless portion 3 cannot be sufficiently secured, and it becomes difficult to efficiently concentrate the exciting vibration on the exciting electrode 2 portion. Therefore, the coupling with the spurious vibration is suppressed. However, there is a problem in that the characteristics are deteriorated. Further, in the case of this conventional example, in the width direction of the diaphragm 1, since almost no electrode portions are provided on both sides of the diaphragm 1, the excitation vibration is generated by the electrode
There is a problem that the characteristics cannot be sufficiently concentrated in the part, and the characteristics are deteriorated.
【０００５】そこで、本発明は上記従来の問題点を解決
するもので、励振振動がスプリアス振動と結合すること
を防ぎ、かつ励振振動を励振用電極に効率良く集中させ
ることにより発振特性の劣化を防ぐことができるように
する振動子を提供することを目的とする。Therefore, the present invention solves the above-mentioned problems of the prior art by preventing the excitation vibration from coupling with spurious vibrations and by efficiently concentrating the excitation vibration on the excitation electrode, deterioration of the oscillation characteristics is caused. It is an object of the present invention to provide a vibrator that can be prevented.
【０００６】[0006]
【課題を解決するための手段】この目的を達成するため
に本発明の振動子は、長手方向、あるいは幅方向におい
て向かい合う端面が連続して円弧状である振動板と、前
記振動板の表、裏面に設けられるとともに、長手方向あ
るいは幅方向において向かい合う端部の少なくとも一方
が連続して円弧状である励振用電極とを備え、前記振動
板の励振用電極の長手方向両側の少なくとも一方、ある
いは幅方向両側の少なくとも一方に無電極部を設けたも
のである。In order to achieve this object, a vibrator of the present invention includes a diaphragm whose end faces facing each other in the longitudinal direction or the width direction are continuously arcuate, and a surface of the diaphragm. At least one of the end portions facing each other in the longitudinal direction or the width direction, which is provided on the back surface, is provided with an exciting electrode that is continuously arcuate, and at least one of both sides in the longitudinal direction of the exciting electrode of the diaphragm, or the width. An electrodeless portion is provided on at least one of both sides in the direction.
【０００７】以上の構成とすれば、振動板の輪郭部の長
手方向において向かい合う端面が連続して円弧状を有す
ることにより、振動板の輪郭部の長手方向の端面により
反射し定在するスプリアス振動の発生を防ぐことができ
る。さらに、励振用電極の長手方向において向かい合う
端部が連続して円弧状を有することにより、振動板の小
形化に伴い無電極部を十分に確保できずとも、励振振動
の励振用電極への集中の効率を向上させることができる
ため、長手方向に発生するスプリアスとの結合を防ぐこ
とができ、発振特性の劣化を防ぐことができるようにな
る。また、励振用電極の幅方向、両側にも無電極部を設
けることにより、励振振動を励振用電極に集中させ振動
板輪郭部の幅方向において向かい合う端面での振動を抑
えることにより、発生するスプリアス振動との結合を防
ぎ、発振特性の劣化を防ぐことができるようになる。ま
た、前記振動板の輪郭部の幅方向において向かい合う端
面が連続して円弧状を有することにより、長手方向と同
様な効果が得られ、さらに、励振用電極の幅方向におい
て向かい合う端部が連続して円弧状を有することによ
り、長手方向と同様な効果が得られる。With the above arrangement, since the end faces of the contour portion of the diaphragm facing each other in the longitudinal direction have a continuous arc shape, spurious vibrations reflected by the longitudinal end face of the contour portion of the diaphragm and standing. Can be prevented. Furthermore, since the end portions of the excitation electrode that face each other in the longitudinal direction have a continuous arc shape, the excitation vibration is concentrated on the excitation electrode even if it is not possible to secure a sufficient electrodeless portion as the diaphragm becomes smaller. Since it is possible to improve the efficiency of the above, it is possible to prevent the coupling with spurious generated in the longitudinal direction and prevent the deterioration of the oscillation characteristic. In addition, by providing electrodeless portions on both sides of the excitation electrode in the width direction, the excitation vibration is concentrated on the excitation electrode and the vibration at the end faces facing each other in the width direction of the diaphragm contour portion is suppressed. It is possible to prevent coupling with vibration and prevent deterioration of oscillation characteristics. Further, since the end faces of the diaphragm that face each other in the width direction have a continuous arc shape, the same effect as in the longitudinal direction can be obtained, and further, the ends of the excitation electrode that face each other in the width direction are continuous. By having a circular arc shape, the same effect as in the longitudinal direction can be obtained.
【０００８】[0008]
【発明の実施の形態】本発明の請求項１に記載の発明
は、長手方向において向かい合う端面の少なくとも一方
が連続して円弧状である振動板と、前記振動板の表、裏
面に設けられるとともに、長手方向において向かい合う
端部の少なくとも一方が連続して円弧状である励振用電
極とを備え、前記振動板の表、裏面の励振用電極の長手
方向両側の少なくとも一方と、幅方向の両側の少なくと
も一方には無電極部を設けることにより所期の目的を達
成するものである。BEST MODE FOR CARRYING OUT THE INVENTION The invention according to claim 1 of the present invention is provided with a diaphragm having at least one of end faces facing each other in the longitudinal direction continuously arcuate, and a diaphragm provided on the front and back surfaces of the diaphragm. , At least one of the end portions facing each other in the longitudinal direction is continuously provided with an arc-shaped excitation electrode, and at least one of both longitudinal sides of the excitation electrode on the front and back surfaces of the diaphragm and both sides in the width direction. The intended purpose is achieved by providing an electrodeless portion on at least one side.
【０００９】また本発明の請求項２に記載の発明は、幅
方向において向かい合う端面の少なくとも一方が連続し
て円弧状である振動板と、前記振動板の表、裏面に設け
られるとともに、幅方向において向かい合う端部の少な
くとも一方が連続して円弧状である励振用電極とを備
え、前記振動板の表、裏面の励振用電極の長手方向両側
の少なくとも一方と、幅方向の両側の少なくとも一方に
は無電極部を設けることにより所期の目的を達成するも
のである。Further, according to a second aspect of the present invention, a diaphragm having at least one of end faces facing each other in the width direction continuously in an arc shape, and a diaphragm provided on the front and back surfaces of the diaphragm, and in the width direction. In at least one of the end portions facing each other in a continuous arc-shaped excitation electrode, the front surface of the diaphragm, at least one of both sides in the longitudinal direction of the excitation electrode on the back surface, and at least one of both sides in the width direction. Is to achieve the intended purpose by providing an electrodeless portion.
【００１０】以下本発明の一実施形態について、図面を
参照しながら説明する。図１は本発明の第１の実施形態
における振動子の振動板部分のみを示すものである。An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 shows only the diaphragm portion of the vibrator according to the first embodiment of the present invention.
【００１１】図１において１は振動板で、励振振動が厚
み滑り振動となる板材の圧電材料からなる。振動板１の
長手方向において向かい合う端面１ａの少なくとも一方
は連続して円弧状となっている。２は前記振動板１の
表、裏面に設けた励振用電極であり、長手方向において
向かい合う端部２ａは連続して円弧状となっている。３
は前記振動板１の表、裏の励振用電極２の長手方向両側
に設けた無電極部であり、４は前記表、裏の励振用電極
２の幅方向の両側に設けた無電極部である。５は前記振
動板１の表、裏面の励振用電極２への導通をとるための
リード電極である。In FIG. 1, reference numeral 1 denotes a diaphragm, which is made of a piezoelectric material which is a plate material whose excited vibration is thickness shear vibration. At least one of the end faces 1a facing each other in the longitudinal direction of the diaphragm 1 is continuously arcuate. Reference numeral 2 denotes excitation electrodes provided on the front and back surfaces of the diaphragm 1, and end portions 2a facing each other in the longitudinal direction are continuously arcuate. 3
Is an electrodeless portion provided on both sides of the vibration plate 1 on the front and back sides in the longitudinal direction of the excitation electrode 2, and 4 is an electrodeless portion provided on both sides of the front and back excitation electrodes 2 in the width direction. is there. Reference numeral 5 is a lead electrode for electrically connecting to the excitation electrodes 2 on the front and back surfaces of the diaphragm 1.
【００１２】上記構成において、振動板１の長手方向に
おいて向かい合う先端側の端面１ａが連続して円弧状を
有することにより、この端面１ａにより反射し、定在す
るスプリアス振動の発生を防ぐことができる。さらに、
従来の長方形の励振用電極においても、励振振動の厚み
滑り振動の変位は振動板１の面内で、励振用電極２の面
内中心から円弧状に分布するため、このように端部１ａ
が連続して円弧状を有することにより、励振振動の励振
用電極２への集中効率を向上させることができ、振動板
１を小形化して、無電極部３，４が減少しても、十分に
励振用電極２部に励振振動を集中させることができる。
また、この振動板１の幅方向にも無電極部４を設けるこ
とにより、励振振動を励振用電極２に集中させ、幅方向
において向かい合う端面１ｂでの振動を抑えることによ
り、この端面１ｂによって発生するスプリアス振動との
結合を防ぐことができる。In the above structure, since the end faces 1a on the front end side facing each other in the longitudinal direction of the diaphragm 1 have a continuous arc shape, it is possible to prevent the spurious vibrations that are reflected by the end faces 1a from standing. . further,
Even in the conventional rectangular excitation electrode, the displacement of the thickness vibration of the excitation vibration is distributed in the plane of the diaphragm 1 from the center of the plane of the excitation electrode 2 in an arc shape.
Has a continuous arc shape, it is possible to improve the efficiency of concentrating the excitation vibration on the excitation electrode 2, and even if the diaphragm 1 is downsized and the electrodeless portions 3 and 4 decrease. Moreover, the excitation vibration can be concentrated on the excitation electrode 2 part.
Further, by providing the electrodeless portion 4 also in the width direction of the diaphragm 1, the excitation vibration is concentrated on the excitation electrode 2, and the vibration at the end faces 1b facing each other in the width direction is suppressed, so that the end face 1b generates the vibration. It is possible to prevent coupling with spurious vibrations.
【００１３】以下本発明の第２の実施形態について図面
を参照しながら説明する。図２は本発明の第２の実施形
態における振動子の振動板部のみを示すものである。A second embodiment of the present invention will be described below with reference to the drawings. FIG. 2 shows only the diaphragm portion of the vibrator according to the second embodiment of the present invention.
【００１４】この振動子においては、振動板１の幅方向
において向かい合う端面１ｂが連続して円弧状を有する
ものとしたもので、長手方向と同様な効果が得られる。
また、第１、第２の実施形態を組み合わせた場合、つま
り、図３に示す通り、振動板１の長手方向において向か
い合う端面１ａが連続して円弧状で、さらに振動板１の
幅方向において向かい合う端面１ｂが連続して円弧状で
あれば、両者によりさらに大きな効果が得られる。In this vibrator, the end faces 1b facing each other in the width direction of the diaphragm 1 have a continuous arc shape, and the same effect as in the longitudinal direction can be obtained.
Further, when the first and second embodiments are combined, that is, as shown in FIG. 3, the end faces 1a facing each other in the longitudinal direction of the diaphragm 1 are continuously arcuate and further face each other in the width direction of the diaphragm 1. If the end surface 1b is continuous and arcuate, both of them have a greater effect.
【００１５】なお、図１〜図３の各振動板１は図４に示
した２つのカバー６，７内部に、前記振動板１のリード
電極５が引き出されている端部にて固定し、封止する構
成とすることにより振動子となる。Each of the diaphragms 1 to 3 shown in FIGS. 1 to 3 is fixed to the inside of the two covers 6 and 7 shown in FIG. 4 at the end where the lead electrode 5 of the diaphragm 1 is drawn out. The oscillator is formed by the sealing.
【００１６】[0016]
【発明の効果】以上のように本発明は、振動板の長手方
向において向かい合う端面の少なくとも一方が連続して
円弧状を有することにより、この端面により反射し定在
するスプリアス振動の発生を防ぎ、さらに、この振動板
表、裏面の励振用電極の長手方向において向かい合う端
部の少なくとも一方が連続して円弧状を有することによ
り、振動板を小形化して、無電極部が減少しても、励振
振動の励振用電極への集中の効果の効率を向上させるこ
とができるため、長手方向に関するスプリアスとの結合
を防ぎ、発振特性の劣化を防ぐことができるようにな
る。また、この振動板の幅方向にも無電極部を設けるこ
とにより、励振振動を励振用電極に集中させ、振動板の
幅方向において向かい合う端面での振動を抑えることに
より、振動板の幅形状ばらつきによる幅方向に関するス
プリアス振動との結合を防ぐことができる。また、この
振動板の幅方向において向かい合う端面の少なくとも一
方が連続して円弧状を有することにより、長手方向と同
様な効果が得られる。さらに、励振用電極の幅方向にお
いて向かい合う端部の少なくとも一方が連続して円弧状
を有することにより、長手方向と同様な効果が得られ
る。As described above, according to the present invention, since at least one of the end faces facing each other in the longitudinal direction of the diaphragm has a continuous arc shape, the occurrence of spurious vibrations reflected by the end faces and standing is prevented, Furthermore, since at least one of the end portions of the vibration plate on the front surface and the back surface which face each other in the longitudinal direction has a continuous arc shape, the vibration plate can be downsized and the excitation electrode can be reduced even if the electrodeless portion is reduced. Since the efficiency of the effect of concentrating the vibration on the excitation electrode can be improved, the coupling with the spurious in the longitudinal direction can be prevented, and the deterioration of the oscillation characteristic can be prevented. In addition, by providing an electrodeless portion in the width direction of this diaphragm as well, the excitation vibration is concentrated on the excitation electrode, and the vibration at the end faces facing each other in the width direction of the diaphragm is suppressed, so that the width shape of the diaphragm varies. It is possible to prevent coupling with spurious vibrations in the width direction due to. Further, since at least one of the end faces facing each other in the width direction of the diaphragm has a continuous arc shape, the same effect as in the longitudinal direction can be obtained. Furthermore, since at least one of the end portions of the excitation electrode facing each other in the width direction has a continuous arc shape, the same effect as in the longitudinal direction can be obtained.
【図１】本発明の第１の実施形態における振動子の振動
板の斜視図FIG. 1 is a perspective view of a diaphragm of a vibrator according to a first embodiment of the present invention.
【図２】本発明の第２の実施形態における振動子の振動
板の斜視図FIG. 2 is a perspective view of a diaphragm of a vibrator according to a second embodiment of the present invention.
【図３】本発明の第３の実施形態における振動子の振動
板の斜視図FIG. 3 is a perspective view of a diaphragm of a vibrator according to a third embodiment of the present invention.
【図４】従来の振動子の分解斜視図FIG. 4 is an exploded perspective view of a conventional vibrator
１ 振動板 １ａ 端面 １ｂ 端面 ２ 励振用電極 ２ａ 端部 ３ 無電極部 ４ 無電極部 ５ リード電極 ６ 上カバー ７ 下カバー ８ 保持部 1 Vibration Plate 1a End Surface 1b End Surface 2 Excitation Electrode 2a End Part 3 No Electrode Part 4 No Electrode Part 5 Lead Electrode 6 Upper Cover 7 Lower Cover 8 Holding Part
Claims (2)
くとも一方が連続して円弧状である振動板と、前記振動
板の表、裏面に設けられるとともに、長手方向において
向かい合う端部の少なくとも一方が連続して円弧状であ
る励振用電極とを備え、前記振動板の表、裏面の励振用
電極の長手方向両側の少なくとも一方と、幅方向の両側
の少なくとも一方には無電極部を設けた振動子。1. A vibrating plate in which at least one of end faces facing each other in the longitudinal direction is continuously arcuate, and at least one of end faces facing each other in the longitudinal direction which are provided on the front and back surfaces of the vibrating plate are continuous. An oscillator having an arc-shaped excitation electrode, and an electrodeless portion provided on at least one of both sides in the longitudinal direction and at least one of both sides in the width direction of the excitation electrode on the front and back surfaces of the diaphragm.
とも一方が連続して円弧状である振動板と、前記振動板
の表、裏面に設けられるとともに、幅方向において向か
い合う端部の少なくとも一方が連続して円弧状である励
振用電極とを備え、前記振動板の表、裏面の励振用電極
の長手方向両側の少なくとも一方と、幅方向の両側の少
なくとも一方には無電極部を設けた振動子。2. A vibrating plate in which at least one of the end faces facing each other in the width direction is continuously arcuate, and at least one of end portions facing each other in the width direction, which are provided on the front and back surfaces of the vibrating plate, are continuous. An oscillator having an arc-shaped excitation electrode, and an electrodeless portion provided on at least one of both sides in the longitudinal direction and at least one of both sides in the width direction of the excitation electrode on the front and back surfaces of the diaphragm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5573096A JPH09246903A (en) | 1996-03-13 | 1996-03-13 | Vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5573096A JPH09246903A (en) | 1996-03-13 | 1996-03-13 | Vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09246903A true JPH09246903A (en) | 1997-09-19 |
Family
ID=13006982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5573096A Pending JPH09246903A (en) | 1996-03-13 | 1996-03-13 | Vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09246903A (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006246542A (en) * | 2006-06-16 | 2006-09-14 | Kyocera Corp | Crystal oscillator and crystal device mounting the same |
| JP2009135830A (en) * | 2007-11-30 | 2009-06-18 | Epson Toyocom Corp | Crystal vibration piece, crystal vibrator, and crystal oscillator |
| US8791766B2 (en) | 2011-08-18 | 2014-07-29 | Seiko Epson Corporation | Resonating element, resonator, electronic device, electronic apparatus, moving vehicle, and method of manufacturing resonating element |
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1996
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| JP2009135830A (en) * | 2007-11-30 | 2009-06-18 | Epson Toyocom Corp | Crystal vibration piece, crystal vibrator, and crystal oscillator |
| US9048810B2 (en) | 2011-06-03 | 2015-06-02 | Seiko Epson Corporation | Piezoelectric vibration element, manufacturing method for piezoelectric vibration element, piezoelectric resonator, electronic device, and electronic apparatus |
| US9923544B2 (en) | 2011-06-03 | 2018-03-20 | Seiko Epson Corporation | Piezoelectric vibration element, manufacturing method for piezoelectric vibration element, piezoelectric resonator, electronic device, and electronic apparatus |
| US8791766B2 (en) | 2011-08-18 | 2014-07-29 | Seiko Epson Corporation | Resonating element, resonator, electronic device, electronic apparatus, moving vehicle, and method of manufacturing resonating element |
| US8970316B2 (en) | 2011-08-19 | 2015-03-03 | Seiko Epson Corporation | Resonating element, resonator, electronic device, electronic apparatus, and mobile object |
| US9225314B2 (en) | 2011-08-19 | 2015-12-29 | Seiko Epson Corporation | Resonating element, resonator, electronic device, electronic apparatus, and mobile object |
| US9013243B2 (en) | 2012-03-27 | 2015-04-21 | Seiko Epson Corporation | Resonator element, resonator, electronic device, electronic apparatus, and mobile object |
| US9013242B2 (en) | 2012-03-27 | 2015-04-21 | Seiko Epson Corporation | Resonator element, resonator, electronic device, electronic apparatus, and mobile object |
| US9866198B2 (en) | 2013-10-01 | 2018-01-09 | Seiko Epson Corporation | Resonator element, resonator, electronic device, electronic apparatus, and moving object |
| US10153749B2 (en) | 2013-10-01 | 2018-12-11 | Seiko Epson Corporation | Resonator element, resonator, and electronic device |
| JP2017046055A (en) * | 2015-08-24 | 2017-03-02 | 京セラクリスタルデバイス株式会社 | Crystal blank, crystal vibration element, and crystal device |
| CN108123697A (en) * | 2016-11-30 | 2018-06-05 | 京瓷株式会社 | Piezoelectric oscillation element and piezoelectric vibration device |
| JP2018088657A (en) * | 2016-11-30 | 2018-06-07 | 京セラ株式会社 | Piezoelectric vibration element and piezoelectric vibration device |
| CN108123697B (en) * | 2016-11-30 | 2021-10-29 | 京瓷株式会社 | Piezoelectric oscillation element and piezoelectric oscillation device |
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