JPH09213745A - 部品の表面実装方法 - Google Patents

部品の表面実装方法

Info

Publication number
JPH09213745A
JPH09213745A JP8035613A JP3561396A JPH09213745A JP H09213745 A JPH09213745 A JP H09213745A JP 8035613 A JP8035613 A JP 8035613A JP 3561396 A JP3561396 A JP 3561396A JP H09213745 A JPH09213745 A JP H09213745A
Authority
JP
Japan
Prior art keywords
substrate
bumps
resin
component
thermoplastic resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8035613A
Other languages
English (en)
Inventor
Koichi Kamiyama
孝一 神山
Hideji Mochizuki
秀司 望月
Shinji Suga
慎司 菅
Kazuhisa Kanai
和久 金井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Victor Company of Japan Ltd
Original Assignee
Victor Company of Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Victor Company of Japan Ltd filed Critical Victor Company of Japan Ltd
Priority to JP8035613A priority Critical patent/JPH09213745A/ja
Publication of JPH09213745A publication Critical patent/JPH09213745A/ja
Pending legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • HELECTRICITY
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    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/563Encapsulation of active face of flip-chip device, e.g. underfilling or underencapsulation of flip-chip, encapsulation preform on chip or mounting substrate
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    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
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    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
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    • H01L2224/8319Arrangement of the layer connectors prior to mounting
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Abstract

(57)【要約】 【課題】 基板のパッドを汚染することなく実装される
べき部品を容易に離脱することができ、基板の選択の自
由度がある。 【解決手段】 基板の主面に形成されたパッドの内側に
熱可塑性樹脂を配置し、バンプに可撓性を有する導電性
樹脂を設けた部品のバンプと該基板のパッドとを圧接・
加熱して固定し、該バンプの周囲に熱硬化性樹脂を充填
して硬化させることにより、該部品と該基板とを固着す
る部品の表面実装方法。

Description

【発明の詳細な説明】
【0001】
【発明の属する技術分野】本発明は、各種電子機器の回
路構成用に使用されるプリント板ユニットの半導体素子
等の部品の表面実装方法に関するものである。
【0002】
【従来の技術】近年、電子機器の小型化・軽量化・高能
率化など多くの機能が要求されるに伴い、電子機器に装
着されるプリント基板には多数のチップ部品を高密度で
実装することが要求されるに至っている。そのため、実
装面積や配線長さ製品性能を大きく作用する要因となっ
ているため、裸のLSIチップ(ベアチップ)によるマ
ルチチップモジュールが多く利用されているのが現状で
ある。
【0003】従来使用されているベアチップなどの半導
体実装方法は、図2に示す工法によって行われていた。
即ち、図2(a)に示すように、ベアチップ1を実装し
ようとする基板2のパッド2aの内側に予め熱硬化性樹脂
4でリング状のダムを形成し、このダム内部に熱可塑性
樹脂3を充填し、ボンディングヘッド5からの加熱、加
圧により上記熱硬化性樹脂4と熱可塑性樹脂3を押し広
げて硬化させて{図2(c)}、ベアチップ1の下面の
パンプ1aと基板2のパッド2aとの導通と固定を行う。
【0004】また、他の方法としては図3(a)に示す
ようなベアチップ1のバンプ1aに予め導電性樹脂1bを供
給し、このベアチップ1のバンプ1aを基板2のパッド2a
に対応するように搭載し{図3(b)}、その後、図3
(c)に示すようにディスペンサ7で熱硬化性樹脂4を
毛細管現象を利用し、ベアチップ1と基板2の間に充填
してから硬化させ、ベアチップ1と基板2との固定と導
通を行う。
【0005】
【発明が解決しようとする課題】前者の方法によると、
ベアチップ1のバンプ1aと基板2の該パッド2a部が熱硬
化性樹脂が硬化した時点で導通検査を行うことになり、
当該ベアチップ1が不良等で交換する際にベアチップ1
を基板2から取り外すと基板2のパッド2aは樹脂で汚染
されており、リペア(修理)で同等の特性を得ることが
困難になる。また、熱可塑性樹脂は一般的にアウトガス
が発生するものであり、熱硬化性樹脂に囲まれた状態で
硬化すると、このアウトガスが気泡(ボイド)となり、
ベアチップ1と基板2との接着強度の低下や高温時の気
泡の膨張などによるベアチップ1のバンプ1aと基板2の
パッド2aとの接続不良となるといった問題が生じてい
る。
【0006】また、後者の方法では、ベアチップ1を基
板2から取り外すためには、熱硬化性樹脂4を充填する
前の工程、即ち図2(b)に示した状態で検査を行う必
要があり、ベアチップ1のバンプ1aに供給した導電性樹
脂の接着力のみで基板2と固定しているので接着力が弱
く、基板2の反りや検査時の外力等によってベアチップ
1のバンプ1aと基板2のパッド2aとが接続不良となる。
この方法では基板の材質が反りにくい特殊なものに限定
されるといった問題が生じている。
【0007】
【課題を解決するための手段】本発明は上記課題に鑑み
てなされたものであり、図1に示すように基板2のパッ
ド2aの内側に熱可塑性樹脂3を供給し、硬化炉で硬化し
てアウトガスをとばす。そこに、あらかじめバンプ1aに
硬化後も弾性力のある導電性樹脂1bを供給、硬化したベ
アチップ1をボンディングヘッド5で保持し、バンプ1a
を上記基板2の該パッド2aに圧接して、ボンディングヘ
ッド5または基板ステージ6からの加熱により上記熱可
塑性樹脂3を軟化させて該パッド2aと該バンプ1aを導通
させた状態でベアチップ1と基板2を固定する。この時
点でバンプ1a部以外のベアチップ1下面の大部分が基板
2に固定されているので、基板の反りや外力等によるバ
ンプ1aとパッド2aとの接続不良は無くなる。また、検査
で不良となったベアチップ1はチップ本体または基板を
加熱することにより前記熱可塑性樹脂3が軟化するので
基板2よりベアチップ1が容易に離脱でき、かつ、基板
2のパッド2aは樹脂に覆われておらず、バンプ1aに供給
した導電性樹脂1bも硬化済みのものを用いているので、
パッド2aに導電性樹脂も残らず、離脱後もきれいな状態
のままなのでリペア(修理)しても同じ特性を得ること
ができる。検査後、良品となりリペアを必要としないも
のは接続および耐湿信頼性を確保するために、バンプ1
a、パッド2a部の接続部周辺にディスペンサ7を用いて
熱硬化性樹脂4を毛細管現象を利用して充填し、硬化さ
せ接続および耐湿信頼性を確保する。
【0008】
【発明の実施の形態】以下に本発明に係わる部品の表面
実装方法の一実施例を図1によって詳細に説明する。
【0009】まず、図1(a)に示すようにベアチップ
1のバンプ1a には、基板の微小うねり等にある程度追
従し、変形できるように硬化後も弾性力のある可撓性の
導電性樹脂1bを供給し、硬化炉で硬化させておく。導電
性樹脂1bとしては、例えばアサヒ科学研究所の「LS-504
V2」を使用している。本樹脂は、可撓性フェノールバイ
ンダーに1 μmの銀粉を混ぜたフェノール樹脂である。
【0010】次に、図1(b)に示すようにベアチップ
1を実装しようとする基板2の主面(表面)の回路パタ
ーンであるパッド2aの内側にベアチップ1を実装後もバ
ンプ1aがパッド2aまで達しない高さに熱可塑性樹脂3
を塗布し、硬化炉で熱可塑性樹脂3を乾燥させてアウト
ガスをとばしておく。熱可塑性樹脂3としては、例え
ば、ステイスティック製の「#383」を使用している。本
樹脂は、150 ℃で軟化する熱可塑性高分子樹脂である。
【0011】ここで、導電性樹脂を含むバンプ1aの高
さをt1 (40μm)とし、パッド2aの高さをt2 (40μ
m)、熱可塑性樹脂3の高さをt0 (90μm)とする
と、t0 >t1 +t2 なる関係としてある。
【0012】その後、図1(c)に示すように、図1
(a)で示したベアチップ1をボンディングヘッド5で
吸着し、バンプ1aと図1(b)で示した基板2のパッド
2aとが互いに対向するように実装する。この際にボンデ
ィングヘッド5からの伝熱、又は基板ステージ6からの
伝熱により、熱可塑性樹脂3は軟化しベアチップ1と基
板2は固定される。バンプ1aに供給した可撓性導電性樹
脂1bはパッド2aと弾性変形した状態で常時接しているの
でベアチップ1と基板2との導通がとれ、基板材料の選
択の自由度がある。
【0013】この時点で検査を行い、不良であればベア
チップ1の上面または基板2を加熱し、熱可塑性樹脂3
を軟化させて、ベアチップを離脱する。良品であれば、
図1(d)に示すように、バンプ1aとパッド1bの接続部
の接続および耐湿信頼性を確保するために、流動性の優
れた熱硬化性樹脂4をディスペンサ7にて毛細管現象を
利用し充填し、硬化炉で熱硬化性樹脂4を硬化させる。
熱硬化性樹脂として、例えば、北陸塗料の「XS8402」を
使用している。本樹脂は、流動性、耐湿性に優れたエポ
キシ樹脂である。
【0014】その結果、バンプ1a周囲を除くベアチップ
1の大部分を熱可塑性樹脂で基板2に固定しているので
接着強度は十分確保でき、検査の時点では、パッド2a部
は樹脂で覆われておらず、バンプ1aに供給した導電性樹
脂1bも硬化済みのものを実装しているので、パッド2a部
がきれいな状態で容易にベアチップを取り外すことがで
き、接合の信頼性を低下させることは無い。また、良品
であることを確認した後は、ベアチップ1と基板2との
導通をとっているバンプ1aとパッド2aの接合部にディス
ペンサ7を用いて熱硬化性樹脂4を充填、硬化するので
接続および耐湿信頼性も向上できる。
【0015】
【発明の効果】以上詳述した本発明に係わる部品の表面
実装方法によると、基板のパッドを汚染せずにベアチッ
プ等の実装されるべき部品を容易に離脱することがで
き、且つ基板の材質が反りにくい特殊なものを用いなく
ても容易に部品の実装信頼性を向上することができる等
の利点があり、著しい経済的および信頼性向上の効果が
期待できる部品の表面実装方法を提供することができ
る。
【図面の簡単な説明】
【図1】本発明の部品の表面実装方法の一実施例を示す
工程順側断面図である。
【図2】従来の半導体素子の実装方法を示す工程順側断
面図である。
【図3】半導体素子の実装方法の他の従来例を示す工程
順側断面図である。
【符号の説明】
1はベアチップ、1aはバンプ、1bは導電性樹脂、2は基
板、2aはパッド、3は熱可塑性樹脂、4は熱硬化性樹
脂、5はボンディングヘッド、6は基板ステージ、7は
ディスペンサ。
───────────────────────────────────────────────────── フロントページの続き (72)発明者 金井 和久 神奈川県横浜市神奈川区守屋町3丁目12番 地 日本ビクター株式会社内

Claims (3)

    【特許請求の範囲】
  1. 【請求項1】基板の主面に形成されたパッドの内側に熱
    可塑性樹脂を配置し、バンプに可撓性を有する導電性樹
    脂を設けた部品のバンプと該基板のパッドとを圧接・加
    熱して固定し、該バンプの周囲に熱硬化性樹脂を充填し
    て硬化させることにより、該部品と該基板とを固着する
    部品の表面実装方法。
  2. 【請求項2】該バンプに設けた可撓性を有する導電性樹
    脂は硬化された熱可塑性樹脂である請求項1記載の部品
    の表面実装方法。
  3. 【請求項3】該基板上の熱可塑性樹脂の高さは、該バン
    プの高さと該パッドの高さとの総和より大としてなる請
    求項1乃至2記載の部品の表面実装方法。
JP8035613A 1996-01-30 1996-01-30 部品の表面実装方法 Pending JPH09213745A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8035613A JPH09213745A (ja) 1996-01-30 1996-01-30 部品の表面実装方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8035613A JPH09213745A (ja) 1996-01-30 1996-01-30 部品の表面実装方法

Publications (1)

Publication Number Publication Date
JPH09213745A true JPH09213745A (ja) 1997-08-15

Family

ID=12446703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8035613A Pending JPH09213745A (ja) 1996-01-30 1996-01-30 部品の表面実装方法

Country Status (1)

Country Link
JP (1) JPH09213745A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001097277A1 (fr) * 2000-06-16 2001-12-20 Matsushita Electric Industrial Co., Ltd. Procede d'encapsulation de pieces electroniques et une telle encapsulation

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001097277A1 (fr) * 2000-06-16 2001-12-20 Matsushita Electric Industrial Co., Ltd. Procede d'encapsulation de pieces electroniques et une telle encapsulation
US7355126B2 (en) 2000-06-16 2008-04-08 Matsushita Electric Industrial Co., Ltd. Electronic parts packaging method and electronic parts package

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