JPH09107200A - Position fixing mechanism for substrate to be treated - Google Patents
Position fixing mechanism for substrate to be treatedInfo
- Publication number
- JPH09107200A JPH09107200A JP7290383A JP29038395A JPH09107200A JP H09107200 A JPH09107200 A JP H09107200A JP 7290383 A JP7290383 A JP 7290383A JP 29038395 A JP29038395 A JP 29038395A JP H09107200 A JPH09107200 A JP H09107200A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- processed
- positioning
- supported
- side edge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Supply And Installment Of Electrical Components (AREA)
- Tests Of Electronic Circuits (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は被処理基板用位置固
定機構に係り、さらに詳しくは、所定の処理を行うため
被処理基板を基準位置へと正確に位置固定させることが
でき、しかも、必要に応じてその固定状態を解除して被
処理基板を容易に取り出すこともできる被処理基板用位
置固定機構に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a position fixing mechanism for a substrate to be processed, and more specifically, it can accurately position and fix a substrate to be processed to a reference position for performing a predetermined process, and it is necessary. Accordingly, the present invention relates to a position fixing mechanism for a substrate to be processed, which can release the fixed state and easily take out the substrate to be processed.
【０００２】[0002]
【従来の技術】回路基板に必要な電子部品を自動実装す
る装置や、実装済回路基板の電気的特性などを自動検査
する回路基板検査装置においては、被処理基板に対しそ
の機能に応じた所定の処理を施すに先立ち、被処理基板
自体を予め設定されている基準位置に位置ずれを起こす
ことなく定置させておくことが必要になる。2. Description of the Related Art In an apparatus for automatically mounting electronic components required on a circuit board or a circuit board inspection apparatus for automatically inspecting the electrical characteristics of a mounted circuit board, a predetermined value corresponding to the function of a substrate to be processed Prior to the above processing, it is necessary to place the substrate to be processed itself at a preset reference position without causing positional displacement.
【０００３】上記要請に対処するための被処理基板を定
置させる手法としては、被処理基板を押し上げて被処理
基板の上面を基準面として基準位置との対応を図るよう
にしたいわゆる上面基準方式と、被処理基板をその下面
を基準面として基準位置との対応を図るようにしたいわ
ゆる下面基準方式とが提案されている。As a method of placing the substrate to be processed in order to meet the above-mentioned demand, there is a so-called upper surface reference method in which the substrate to be processed is pushed up and the upper surface of the substrate to be processed is used as a reference plane to correspond to a reference position. There has been proposed a so-called lower surface reference system in which the lower surface of the substrate to be processed is used as a reference surface to correspond to a reference position.
【０００４】図４は、前記上面基準方式を用いた被処理
基板用保持装置の一例を示すものであり、搬送ベルト７
上に載置された被処理基板１は、その一側縁部１ａの側
が昇降手段４が備える位置決めピン４ａにより位置決め
用孔２に下方から挿入支持されて、他側縁部１ｂの側が
昇降手段５が備える基板押上げピン５ａにより下支えさ
れた状態のもとで上方に配設されている面高規制部６へ
と押し当てられて基準位置が確保できるようになってい
る。FIG. 4 shows an example of a holding device for a substrate to be processed using the above-mentioned upper surface reference method.
The substrate 1 placed on the upper side has one side edge 1a side thereof inserted and supported from below by the positioning pin 4a of the elevating means 4 into the positioning hole 2 and the other side edge 1b side thereof. While being supported under the substrate push-up pin 5a included in the substrate 5, it is pressed against the surface height restricting portion 6 disposed above, so that the reference position can be secured.
【０００５】ところで、図４に示す前記上面基準方式に
よる場合には、位置決めピン４ａと基板押上げピン５ａ
との相互の昇降動作に同期がとれていないと、前記位置
決め用孔２に対する位置決めピン４ａの挿入がうまくい
かず、被処理基板１を落下させてしまうおそれがあっ
た。By the way, in the case of the above-mentioned upper surface reference method shown in FIG. 4, the positioning pin 4a and the substrate pushing pin 5a are
If the raising and lowering operations of and are not synchronized with each other, the positioning pin 4a may not be inserted properly into the positioning hole 2 and the substrate 1 may be dropped.
【０００６】さらに、前記位置決め用孔２に対する位置
決めピン４ａの挿入は、被処理基板１の自重のもとで行
われるものであることから、位置決めピン４ａを円滑に
挿入する必要からある程度遊びのある口径のもとで前記
位置決め用孔２を設けておく必要があり、この遊び分が
位置ずれを起こす原因ともなっていた。Further, since the positioning pin 4a is inserted into the positioning hole 2 under the own weight of the substrate 1, the positioning pin 4a needs to be inserted smoothly so that there is some play. Since it is necessary to provide the positioning hole 2 under the diameter, this play also causes a positional shift.
【０００７】一方、図３は、上面基準方式による場合の
上記不都合を解消する下面基準方式を採用した被処理基
板保持装置の一例を示すものである。On the other hand, FIG. 3 shows an example of an apparatus for holding a substrate to be processed which adopts a lower surface reference system which eliminates the above-mentioned inconvenience in the case of the upper surface reference system.
【０００８】同図によれば、搬送ベルト７上に載置され
た被処理基板１は、この被処理基板１が有する位置決め
用孔２に対し昇降手段４が備える位置決めピン４ａが下
面側から挿入された後、その上方に昇降自在に配設され
ている一対の咬持部８，８を下降させて一側縁部１ａと
他側縁部１ｂとが搬送ベルト７の側に押圧された状態の
もとで位置固定されてその基準位置が確保できるように
なっている。As shown in FIG. 1, the substrate 1 to be processed placed on the conveyor belt 7 is inserted into the positioning hole 2 of the substrate 1 by the positioning pin 4a of the elevating means 4 from the lower surface side. After that, the pair of bite portions 8, 8 arranged so as to be able to move up and down are lowered and the one side edge portion 1a and the other side edge portion 1b are pressed against the conveyor belt 7 side. The position is fixed under the condition that the reference position can be secured.
【０００９】[0009]
【発明が解決しようとする課題】ところで、図３に示す
被処理基板保持装置によっても、被処理基板１は、基準
位置を確保してその被処理面３に対し必要な処理を施す
ことはできる。By the way, also by the apparatus for holding a substrate to be processed shown in FIG. 3, it is possible to secure the reference position of the substrate to be processed 1 and perform necessary processing on the surface 3 to be processed. .
【００１０】しかし、搬入された被処理基板１が位置ず
れを起こしている場合には、前記位置決めピン４ａが位
置決め用孔２を外れて被処理基板１を押し上げてしまう
などして基準位置を確保できないことになる。このよう
な場合には、上昇させた前記位置決めピン４ａを一旦も
との位置にまで下降させた上で、被処理基板１の位置を
基準位置へと人手により直してやる必要があるものの、
前記被処理基板１が前記搬送ベルト７と前記一対の咬持
部８，８との間に形成される極めて狭小な空間に配置さ
れていることから、位置直し作業も煩雑となり、作業性
を低下させる不都合があった。However, when the substrate 1 to be processed is misaligned, the positioning pin 4a disengages from the positioning hole 2 and pushes up the substrate 1 to be processed, thus ensuring the reference position. It will not be possible. In such a case, although it is necessary to temporarily lower the raised positioning pin 4a to the original position and then manually fix the position of the substrate 1 to be processed to the reference position,
Since the substrate 1 to be processed is arranged in an extremely narrow space formed between the conveyor belt 7 and the pair of bite portions 8 and 8, repositioning work becomes complicated and the workability is deteriorated. There was an inconvenience.
【００１１】本発明は、従来技術にみられた上記課題に
鑑み、位置ずれを起こした被処理基板に対する位置修正
作業を容易化して作業性の向上に寄与させることができ
る被処理基板用保持装置を提供することにその目的があ
る。In view of the above-mentioned problems of the prior art, the present invention makes it possible to facilitate position correction work on a substrate to be processed which has been misaligned and contribute to improving workability. The purpose is to provide.
【００１２】[0012]
【課題を解決するための手段】本発明は上記目的を達成
しようとするものであり、その構成上の特徴は、被処理
基板を予め定められた基準位置へと前記被処理基板が有
する位置決め用孔を介して定置させる基板位置決め手段
と、この基板位置決め手段を介して定置された前記被処
理基板をその側縁部を介して位置固定する位置固定手段
とを少なくとも備えてなる被処理基板用位置固定機構に
おいて、前記基板位置決め手段は、前記被処理基板にお
ける位置決め用孔の配設されている側である一側縁部を
支持する一側支持部と、前記一側縁部に対向する他側縁
部を支持する他側支持部とを備える基板支持部と、この
基板支持部に支持された被処理基板の前記位置決め用孔
に対しその下面側から導入して基準位置を確保する位置
決めピンを備えて前記一側支持部に対し昇降自在に配設
される基準位置規制部とで形成し、前記位置固定手段
は、被処理基板の前記一側縁部と前記他側縁部とに対し
作動杆を介して上面側から各別に押圧を自在に駆動制御
される咬持部をそれぞれが備えてなる一側固定制御部と
他側固定制御部とで構成し、前記一側固定制御部は、前
記一側支持部の外方に向けて斜行配置される前記咬持部
を斜め方向に昇降する前記作動杆に対し揺動自在に支持
される軸支部と、前記一側支持部にその回動を自在にし
て支持される支点とで支持して非咬持時に被処理基板の
前記一側縁部からの退避を自在にして配設したことにあ
る。DISCLOSURE OF THE INVENTION The present invention is intended to achieve the above-mentioned object, and its structural feature is to position the substrate to be processed at a predetermined reference position for positioning the substrate to be processed. Position for a substrate to be processed, which comprises at least a substrate positioning means to be fixed via a hole and a position fixing means to fix the substrate to be processed fixed via the substrate positioning means via a side edge portion thereof. In the fixing mechanism, the substrate positioning means supports one side edge portion, which is a side where the positioning hole is provided in the substrate to be processed, and another side opposite to the one side edge portion. A substrate support portion including an other side support portion that supports an edge portion, and a positioning pin that is introduced from the lower surface side of the positioning hole of the substrate to be processed supported by the substrate support portion to secure a reference position. prepare for And a reference position restricting portion that is arranged so as to be able to move up and down with respect to the one side support portion, and the position fixing means provides an operating rod to the one side edge portion and the other side edge portion of the substrate to be processed. The one-sided fixed control section and the other-sided fixed control section, each of which has a bite section that is driven and controlled so as to freely press each from the upper side through the one-sided fixed control section, A shaft support portion that is swingably supported by the operating rod that obliquely moves up and down the bite portion that is obliquely arranged toward the outside of the side support portion, and the one side support portion that is pivotable. This is because it is supported by a fulcrum that is freely supported and is arranged so as to be freely retracted from the one side edge portion of the substrate to be processed when it is not biting.
【００１３】なお、前記基板位置決め手段を構成する一
側支持部と他側支持部とには、請求項２に記載のごと
く、被処理基板の対向端面を各別に位置規制する位置規
制片を添設するとともに、前記一側支持部の側の位置規
制片は、前記対向端面と対向する位置規制面を前記咬持
部との衝接を回避させるための後傾斜面として形成して
おくのが望ましい。It is to be noted that the one side supporting portion and the other side supporting portion constituting the substrate positioning means are provided with position regulating pieces for individually regulating the position of the facing end surface of the substrate to be processed. The position regulating piece on the side of the one side support portion is provided with a position regulating surface facing the facing end surface as a rear inclined surface for avoiding collision with the bite portion. desirable.
【００１４】[0014]
【実施の実施の形態】図１は本発明の実施の形態を概略
的に示す説明図であり、その全体は、位置決め用孔２を
有する被処理基板１を予め定められた基準位置へと前記
位置決め用孔２を介して定置させる基板位置決め手段１
１と、この基板位置決め手段１１を介して定置された前
記被処理基板１をその側縁部を介して位置固定する位置
固定手段２１とを少なくとも備えて構成されている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is an explanatory view schematically showing an embodiment of the present invention, in which the entire substrate 1 having a positioning hole 2 is moved to a predetermined reference position. Substrate positioning means 1 for stationary placement through positioning holes 2
1 and position fixing means 21 for fixing the position of the substrate 1 to be processed, which is fixed via the substrate positioning means 11, via the side edge portion thereof.
【００１５】このうち、前記基板位置決め手段１１は、
被処理基板１にあって位置決め用孔２が位置している一
側縁部１ａと、この一側縁部１ａに対向して位置する他
側縁部１ｂとを各別に支持する基板支持部１２と、この
基板支持部１２に支持された被処理基板１の前記位置決
め用孔２に対して基準位置を確保するために挿入される
位置決めピン１７を備える基準位置規制部１５とで構成
されている。Of these, the substrate positioning means 11 is
A substrate support portion 12 that separately supports one side edge portion 1a of the substrate 1 to be processed in which the positioning hole 2 is located and the other side edge portion 1b located opposite to the one side edge portion 1a. And a reference position restricting portion 15 having a positioning pin 17 inserted to secure a reference position with respect to the positioning hole 2 of the substrate 1 to be processed supported by the substrate supporting portion 12. .
【００１６】この場合、前記基板支持部１２は、被処理
基板１における前記一側縁部１ａの側を支持する一側支
持部１３と、前記他側縁部１ｂの側を支持する他側支持
部１４とを相互に離間させた対となって平行に配置する
ことにより形成されている。具体的には、相互に離間さ
せて立設配置されている一対の垂直支持材１３ａ，１４
ａのそれぞれに対しコンベアプーリー１３ｂ，１４ｂを
配設することにより、被処理基板１の水平支持を自在と
した一側支持部１３と他側支持部１４とで前記基板支持
部１２が形成されている。In this case, the substrate support portion 12 includes one side support portion 13 that supports the one side edge portion 1a side of the substrate to be processed 1 and another side support portion that supports the other side edge portion 1b side. It is formed by arranging the parts 14 and the parts 14 in parallel so as to be separated from each other. Specifically, the pair of vertical support members 13a and 14 are arranged upright so as to be spaced apart from each other.
By disposing the conveyor pulleys 13b and 14b for each a, the substrate supporting portion 12 is formed by the one side supporting portion 13 and the other side supporting portion 14 which can freely support the substrate 1 to be processed horizontally. There is.
【００１７】また、前記基準位置規制部１５は、前記基
板支持部１２に水平支持された被処理基板１が定置され
るべき基準位置を確保するためのものであり、具体的に
は、前記一側支持部１３に付設されている昇降手段１６
と、被処理基板１の前記位置決め用孔２に対し下面側か
ら挿入するために前記昇降手段１６に昇降自在に配設さ
れている位置決めピン１７とで構成されている。なお、
該位置決めピン１７は、前記位置決め用孔２に容易に挿
入できるようにその先端部を先細り状に形成しておくの
が望ましい。The reference position restricting portion 15 is for ensuring a reference position where the substrate 1 to be processed horizontally supported by the substrate supporting portion 12 should be placed. Lifting means 16 attached to the side support portion 13
And a positioning pin 17 that is vertically movable in the elevating means 16 so as to be inserted from the lower surface side into the positioning hole 2 of the substrate 1 to be processed. In addition,
It is desirable that the tip of the positioning pin 17 is formed in a tapered shape so that it can be easily inserted into the positioning hole 2.
【００１８】一方、前記位置固定手段２１は、被処理基
板１の前記一側縁部１ａと前記他側縁部１ｂとに対し作
動杆２７，３８を介して上面側から各別に押圧を自在に
駆動制御される咬持２３，３７をそれぞれが備えてなる
一側固定制御部２２と他側固定制御部３６とで構成され
ている。On the other hand, the position fixing means 21 can freely press the one side edge portion 1a and the other side edge portion 1b of the substrate 1 to be processed from the upper side through the operating rods 27 and 38, respectively. It is composed of a one-side fixed control unit 22 and an other-side fixed control unit 36, each of which is provided with drive-controlled bites 23 and 37.
【００１９】このうち、一側固定制御部２２は、前記一
側支持部１３の外方に向けて斜行配置される前記咬持部
２３を斜め方向に昇降する前記作動杆２７に対し揺動自
在に支持される軸支部２４と、前記一側支持部１３にそ
の回動を自在にして支持される支点２５とで支持して非
咬持時に被処理基板１の前記一側縁部１ａの側からの退
避を自在にして配設されている。具体的には、空気等の
流体を用いて作動杆２７を駆動制御する流体制御システ
ム２６により被処理基板１の前記一側縁部１ａに対し前
記咬持部２３を押圧自在として前記一側支持部１３の側
に配設されている。Of these, the one-sided fixed control section 22 swings with respect to the operating rod 27 which ascends and descends the bite section 23 obliquely arranged toward the outside of the one-side support section 13. The one side edge portion 1a of the substrate 1 to be processed is supported by a freely supported shaft support portion 24 and a fulcrum 25 supported by the one side support portion 13 so as to be freely rotatable. It is arranged so that it can be retracted from the side. Specifically, a fluid control system 26 that drives and controls an operating rod 27 using a fluid such as air allows the bite portion 23 to be freely pressed against the edge portion 1a of the substrate 1 to be processed. It is arranged on the side of the portion 13.
【００２０】この場合における流体制御システム２６
は、図２の（イ）〜（ハ）に示す構成のもとで流路を開
閉し、その際の流路の開閉状態に応じ作動杆２７を駆動
制御することにより稼働する。The fluid control system 26 in this case
2 operates by opening and closing the flow path under the configuration shown in FIGS. 2A to 2C and drivingly controlling the operating rod 27 in accordance with the open / closed state of the flow path.
【００２１】すなわち、前記流体制御システム２６の全
体は、シリンダー部２８内に一側側から空気を供給する
一側空気路Ｒ1 と、他側側から空気を供給する他側空気
路Ｒ2 とを備え、一側空気路Ｒ1 には第１コントローラ
２９を、他側空気路Ｒ2 には第２コントローラ３０を介
在させることで作動杆２７の進退速度を調節できるよう
になっている。また、一側空気路Ｒ1 には、空気圧の制
御が可能な電磁弁からなる第１切替弁３１が介在配置さ
れており、その上流側には、一側空気路Ｒ1 と他側空気
路Ｒ2 とを給気側流路３３と排気側流路３４とに切替制
御する電磁弁からなる第２切替弁３２が介在配置されて
いる。That is, the entire fluid control system 26 has one side air passage R 1 for supplying air from one side into the cylinder portion 28 and another side air passage R 2 for supplying air from the other side. By interposing the first controller 29 in the one-side air passage R 1 and the second controller 30 in the other-side air passage R 2 , the advancing / retreating speed of the operating rod 27 can be adjusted. Further, one-side air passage R 1, the first switching valve 31 to control the air pressure an electromagnetic valve capable of being interposed, on its upstream side, one side air passage R 1 and the other-side air passage A second switching valve 32, which is an electromagnetic valve that controls switching of R 2 between the air supply side passage 33 and the exhaust side passage 34, is interposed.
【００２２】このため、図２の（イ）の状態にあって
は、作動杆２７が前進して押し上げられるので、支点２
５を介して咬持部２３が閉方向に作動し、被処理基板２
１をコンベアプーリー１４ｂの側に押圧して位置固定す
ることができ、この状態のもとで定置される被処理基板
１に対しその被処理面３に必要な処理を行うことができ
る。Therefore, in the state of FIG. 2A, the operating rod 27 is moved forward and pushed up, so that the fulcrum 2
The bite part 23 is operated in the closing direction via the
1 can be pressed to the conveyor pulley 14b side to fix the position, and the substrate 1 to be processed can be subjected to necessary processing on the surface 3 to be processed in this state.
【００２３】また、図２の（ロ）の状態にあっては、作
動杆２７が後退して引き下げられるので、支点２５を介
して咬持部２３が開方向に退避し、被処理基板１に対す
る固定状態を解除することができ、この状態のもとで被
処理基板１が搬送されることになる。In the state of FIG. 2B, since the operating rod 27 is retracted and pulled down, the bite portion 23 is retracted in the opening direction via the fulcrum 25, and the substrate 1 to be processed 1 is moved. The fixed state can be released, and the substrate 1 to be processed is transported under this state.
【００２４】さらに、図２の（ハ）の状態にあっては、
作動杆２７が前進して押し上げられた状態とはなってい
るものの、一側空気路Ｒ1 と他側空気路Ｒ2 とのいずれ
もが大気側に開放されているので、シリンダー部２８内
での作動杆２７の進退はフリー状態となっており、した
がって、咬持部２３の開閉も手動により行うことができ
ることになる。このため、この状態のもとで被処理基板
１の位置決め用孔２に対し位置決めピン１７を挿入して
基準位置に定置させる処理を行うならば、仮に被処理基
板１が位置ずれを起こしていて位置決めピン１７が被処
理基板１の位置決め用孔２以外の位置に当接しても、被
処理基板１を緩やかに押し上げてそのショックを吸収す
ることができ、被処理基板１が損傷を受けることを未然
に防止することができる。Further, in the state of FIG. 2C,
Although the operating rod 27 is advanced and pushed up, both the one-side air passage R 1 and the other-side air passage R 2 are open to the atmosphere side. Since the operating rod 27 is in the free state, the bite portion 23 can be opened and closed manually. Therefore, under this condition, if the positioning pin 17 is inserted into the positioning hole 2 of the substrate 1 to be processed and is set at the reference position, the substrate 1 to be processed may be displaced. Even if the positioning pin 17 comes into contact with a position other than the positioning hole 2 of the substrate 1 to be processed, the substrate 1 to be processed can be gently pushed up to absorb the shock, and the substrate 1 to be processed may be damaged. It can be prevented.
【００２５】一方、前記他側固定制御部３６は、前記基
板支持部１２に水平支持された被処理基板１の他側縁部
１ｂに対し咬持部３７の垂直方向での駆動を自在に制御
して配設されている。具体的には、他側支持部１４に付
設された空気等の流体により制御されるシリンダー部３
９を介して進退する作動杆３８に前記咬持部３７を連結
し、被処理基板１の前記他側縁部１ｂに対する押圧が自
在となって他側固定制御部３６が形成されている。On the other hand, the other side fixing control section 36 freely controls the driving of the bite section 37 in the vertical direction with respect to the other side edge section 1b of the substrate 1 to be processed horizontally supported by the substrate supporting section 12. Are arranged. Specifically, the cylinder part 3 attached to the other side support part 14 and controlled by a fluid such as air.
The biting portion 37 is connected to the operating rod 38 that moves back and forth via 9, and the other side fixing control portion 36 is formed so that the other side edge portion 1b of the substrate to be processed 1 can be pressed freely.
【００２６】なお、前記基板位置決め手段１１を構成す
る一側支持部１２ａと他側支持部１２ｂとには、請求項
２記載のごとく、被処理基板１の対向端面１ｃを各別に
位置規制する位置規制片４１，４２を添設するととも
に、前記一側支持部１３の側の位置規制片４１は、前記
対向端面１ｃと対向する位置規制面を前記咬持部２３と
の衝接を回避させるための後傾斜面４１ａとして形成し
ておくのが好ましい。The one side supporting portion 12a and the other side supporting portion 12b constituting the substrate positioning means 11 are positioned so as to separately position the facing end surface 1c of the substrate 1 to be processed as described in claim 2. In addition to providing the restriction pieces 41, 42, the position restriction piece 41 on the side of the one side support portion 13 prevents the position restriction surface facing the facing end surface 1c from colliding with the bite portion 23. It is preferable to form the rear inclined surface 41a.
【００２７】本発明はこのようにして構成されているの
で、前記基板支持部１２に支持された被処理基板１にお
ける前記他側縁部１ｂは、他側固定制御部３６における
前記咬持部３７により押圧して固定することができる。
このとき、一側縁部１ａに押圧力を付勢する前記一側固
定制御部２２は、図２の（イ）に示すように制御され
て、一側空気路Ｒ1 が前記第１切替弁３１と第２切替弁
３２とを介して給気側流路３３に直結され、他側空気路
Ｒ2 が前記第２切替弁３２を介して排気側流路３４に直
結される結果、前記作動杆２７は前進し、前記咬持部２
３が被処理基板１の一側縁部１ａに圧接してこれを支持
することになる。かくして、定置された被処理基板１
は、一側縁部１ａと他側縁部１ｂとを介して確実に支持
され、この状態のもとでその被処理面３に対し必要な処
理が施されることになる。Since the present invention is configured in this way, the other side edge portion 1b of the substrate 1 to be processed supported by the substrate support portion 12 is the bite portion 37 of the other side fixing control portion 36. Can be pressed and fixed by.
At this time, the one-side fixed control unit 22 that applies a pressing force to the one-side edge portion 1a is controlled as shown in (a) of FIG. 2 so that the one-side air passage R 1 has the first switching valve. 31 is directly connected to the air supply side flow path 33 via the second switching valve 32 and the other side air path R 2 is directly connected to the exhaust side flow path 34 via the second switching valve 32. The rod 27 moves forward, and the bite portion 2
3 presses the one side edge portion 1a of the substrate to be processed 1 to support it. Thus, the substrate 1 to be processed is placed stationary
Is reliably supported via the one side edge portion 1a and the other side edge portion 1b, and under this state, the surface 3 to be treated is subjected to necessary treatment.
【００２８】一方、被処理基板１の搬送時にあっては、
前記他側固定制御部３６の側の作動杆１８を前進方向に
制御、つまり咬持部３７が被処理基板１の他側縁部１ｂ
から浮き上がるように制御するとともに、一側固定制御
部２２の側の作動杆２７を図２の（ロ）に示すように制
御して後退させる。これにより、被処理基板１の一側縁
部１ａから咬持部１９が浮き上がった状態のもとで退避
させておくことができることになる。On the other hand, when the substrate 1 to be processed is transported,
The operating rod 18 on the side of the other-side fixed control section 36 is controlled in the forward direction, that is, the bite section 37 causes the other-side edge portion 1b of the substrate 1 to be processed.
It is controlled so as to float from above, and the operating rod 27 on the side of the one-side fixed control unit 22 is controlled and retracted as shown in FIG. As a result, the bite portion 19 can be retracted from the one side edge portion 1a of the substrate 1 to be processed while the bite portion 19 is lifted.
【００２９】また、被処理基板１が所定位置まで搬送さ
れた後、その位置決め用孔２に位置決めピン１７を挿入
して基準位置に定置させる際には、前記他側固定制御部
３６の側の作動杆３８を後退方向に制御、つまり咬持部
３７が被処理基板１の他側縁部１ｂを押圧するように制
御するとともに、一側固定制御部２２の側の作動杆２７
を図２の（ハ）に示すように制御して進退自在なフリー
状態としておくことができる。Further, after the substrate 1 to be processed is conveyed to a predetermined position, when the positioning pin 17 is inserted into the positioning hole 2 and set in the reference position, the other side fixing control unit 36 side is placed. The operating rod 38 is controlled in the backward direction, that is, the bite portion 37 is controlled to press the other side edge portion 1b of the substrate 1 to be processed, and the operating rod 27 on the side of the one-side fixed control portion 22 is controlled.
2 can be controlled as shown in (c) of FIG.
【００３０】この場合、被処理基板１が定置されている
場合には、この状態のもとで前記位置決めピン１７を上
昇させることにより、被処理基板１の一側縁部１ａに位
置する前記位置決め用孔２へと円滑に挿入させることが
できる。一方、被処理基板１が定置されていない場合に
は、上昇する前記位置決めピン１７が被処理基板１の位
置決め用孔２以外の部位に当接する結果、被処理基板１
を押し上げる方向に力が加えられることになる。このと
き、作動杆２７が進退自在なフリー状態となっているた
め、咬持部２３も自由に押し上げることができる状態に
あり、被処理基板１に対して加えられる押圧力を吸収し
て損傷を受けることを回避させることができる。In this case, when the substrate 1 to be processed is stationary, by raising the positioning pin 17 under this state, the positioning at the one side edge 1a of the substrate 1 to be processed is performed. It can be smoothly inserted into the working hole 2. On the other hand, when the substrate 1 to be processed is not placed, the ascending positioning pin 17 comes into contact with a portion other than the positioning hole 2 of the substrate 1 to be processed.
Force will be applied in the direction of pushing up. At this time, since the operating rod 27 is in the free state in which it can be moved back and forth, the bite portion 23 can also be pushed up freely, and the pressing force applied to the substrate 1 to be processed is absorbed to prevent damage. You can avoid receiving it.
【００３１】しかも、このように被処理基板１が定置さ
れていない場合には、咬持部２３を手動操作で押し上げ
ながら、被処理基板１の位置ずれを修正して基準位置に
極く容易に定置させることができることになる。In addition, when the substrate 1 to be processed is not placed in this way, the displacement of the substrate 1 to be processed can be corrected and pushed to the reference position very easily while pushing up the bite portion 23 manually. It can be fixed.
【００３２】なお、請求項２記載のごとく前記基板位置
決め手段１１を構成している前記一側支持部１３の側の
位置規制片４１の位置規制面を前記咬持部２３との衝接
を回避させるための後傾斜面４１ａとして形成してある
場合には、前記咬持部２３の昇降動作をより円滑に行わ
せることができる。It is to be noted that the position regulating surface of the position regulating piece 41 on the side of the one side supporting portion 13 constituting the substrate positioning means 11 according to claim 2 is prevented from colliding with the bite portion 23. In the case where it is formed as the rear inclined surface 41a for making it possible, the lifting operation of the bite portion 23 can be performed more smoothly.
【００３３】[0033]
【発明の効果】以上述べたように本発明によれば、前記
基板支持部に支持された被処理基板は、一側固定制御部
と他側固定制御部とを作動させることにより、一側支持
部と他側支持部とに下支えされ、かつ、位置決め用孔に
位置決めピンを挿入して基準位置に定置させた状態のも
とで被処理基板を下面基準方式により確実に位置固定す
ることができるので、その被処理面における所定位置に
対し必要な処理を正確に施すことができる。As described above, according to the present invention, the substrate to be processed supported by the substrate supporting portion is supported on one side by operating the one side fixing control section and the other side fixing control section. The substrate to be processed can be surely fixed by the lower surface reference method under the condition that the substrate is supported by the supporting portion and the other side supporting portion, and the positioning pin is inserted into the positioning hole to be fixed at the reference position. Therefore, the required processing can be accurately performed on the predetermined position on the surface to be processed.
【００３４】しかも、基準位置に被処理基板を定置させ
る際には、一側固定制御部の側をフリー状態にしておく
ことができるので、仮に被処理基板が位置ずれを起こし
て位置決めピンが位置決め用孔以外の部位に当接するこ
とがあっても、被処理基板を緩やかに押し上げることに
より押圧力を吸収して、被処理基板が損傷を受けること
を防止することができる。しかも、この際に一側固定制
御部の側の咬持部を押し上げて退避させることができる
ので、位置ずれを起こしている被処理基板を手作業で極
く容易に位置修正したり、取り出したりすることがで
き、作業性の向上に寄与させることができる。Moreover, when the substrate to be processed is placed at the reference position, the one-side fixed control section side can be left in a free state, so that the substrate to be processed will be displaced and the positioning pin will be positioned. Even when the substrate other than the holes is abutted, the substrate to be processed can be prevented from being damaged by gently pushing up the substrate to absorb the pressing force. In addition, at this time, the bite part on the one-side fixed control part side can be pushed up and retracted, so that the position of the substrate to be processed that has been misaligned can be extremely easily manually corrected or taken out. Therefore, the workability can be improved.
【００３５】なお、請求項２記載のごとく前記基板位置
決め手段を構成している前記一側支持部の側の位置規制
片の位置規制面を前記咬持部との衝接を回避させるため
の後傾斜面として形成してある場合には、前記咬持部の
昇降動作をより円滑に行わせることができる。It is to be noted that the position control surface of the position control piece on the side of the one side support portion constituting the substrate positioning means is arranged to avoid collision with the bite portion. When it is formed as an inclined surface, the lifting and lowering operation of the bite portion can be performed more smoothly.
【図１】本発明の要部構成を示す説明図である。FIG. 1 is an explanatory diagram showing a configuration of a main part of the present invention.
【図２】本発明における一側固定制御部の側の制御シス
テムを示す説明図であり、そのうち、（イ）は基板固定
時における状態を、（ロ）は基板搬送時における状態
を、（ハ）は基板位置決め時における状態をそれぞれ示
す。2A and 2B are explanatory views showing a control system on the side of a one-sided fixed control unit in the present invention, in which (A) shows a state when the substrate is fixed, (B) shows a state when the substrate is transferred, and ) Indicates the state when the substrate is positioned.
【図３】従来からある下面基準方式による被処理基板用
位置固定機構の要部構成を示す要部説明図である。FIG. 3 is an explanatory view of a main part showing a structure of a main part of a conventional position fixing mechanism for a substrate to be processed by a lower surface reference method.
【図４】従来からある上面基準方式による被処理基板用
位置固定機構の要部構成を示す要部説明図である。FIG. 4 is an essential part explanatory view showing a main part configuration of a conventional position fixing mechanism for a substrate to be processed according to a top reference method.
１ 被処理基板 １ａ 一側縁部 １ｂ 他側縁部 １ｃ 対向端面 ２ 位置決め用孔 ３ 被処理面 １１ 基板位置決め手段 １２ 基板支持部 １３ 一側支持部 １３ａ 垂直支持部 １３ｂ コンベアプーリー １４ 他側支持部 １４ａ 垂直支持部 １４ｂ コンベアプーリー １５ 基準位置規制部 １６ 昇降手段 １７ 位置決めピン ２１ 位置固定手段 ２２ 一側固定制御部 ２３ 咬持部 ２４ 軸支部 ２５ 支点 ２６ 流体制御システム Ｒ1 一側空気路 Ｒ2 他側空気路 ２７ 作動杆 ２８ シリンダー部 ２９ 第１コントローラ ３０ 第２コントローラ ３１ 第１切替弁 ３２ 第２切替弁 ３３ 給気側流路 ３４ 排気側流路 ３６ 他側固定制御部 ３７ 咬持部 ３８ 作動杆 ３９ シリンダー部 ４１，４２ 位置規制片 ４１ａ 後傾斜面DESCRIPTION OF REFERENCE NUMERALS 1 processed substrate 1a one side edge 1b other side edge 1c facing end face 2 positioning hole 3 treated surface 11 substrate positioning means 12 substrate support 13 one side support 13a vertical support 13b conveyor pulley 14 other side support 14a Vertical support part 14b Conveyor pulley 15 Standard position regulation part 16 Elevating means 17 Positioning pin 21 Position fixing means 22 One side fixed control part 23 Bite part 24 Shaft support 25 Support point 26 Fluid control system R 1 One side air path R 2 etc. Side air passage 27 Actuating rod 28 Cylinder portion 29 First controller 30 Second controller 31 First switching valve 32 Second switching valve 33 Air supply side flow path 34 Exhaust side flow path 36 Other side fixed control section 37 Biting section 38 Operation Rod 39 Cylinder part 41, 42 Position regulating piece 41a Rear inclined surface
Claims (2)
と前記被処理基板が有する位置決め用孔を介して定置さ
せる基板位置決め手段と、この基板位置決め手段を介し
て定置された前記被処理基板をその側縁部を介して位置
固定する位置固定手段とを少なくとも備えてなる被処理
基板用位置固定機構において、 前記基板位置決め手段は、前記被処理基板における位置
決め用孔の配設されている側である一側縁部を支持する
一側支持部と、前記一側縁部に対向する他側縁部を支持
する他側支持部とを備える基板支持部と、この基板支持
部に支持された被処理基板の前記位置決め用孔に対しそ
の下面側から導入して基準位置を確保する位置決めピン
を備えて前記一側支持部に対し昇降自在に配設される基
準位置規制部とで形成し、 前記位置固定手段は、被処理基板の前記一側縁部と前記
他側縁部とに対し作動杆を介して上面側から各別に押圧
を自在に駆動制御される咬持部をそれぞれが備えてなる
一側固定制御部と他側固定制御部とで構成し、 前記一側固定制御部は、前記一側支持部の外方に向けて
斜行配置される前記咬持部を斜め方向に昇降する前記作
動杆に対し揺動自在に支持される軸支部と、前記一側支
持部にその回動を自在にして支持される支点とで支持し
て非咬持時に被処理基板の前記一側縁部からの退避を自
在にして配設したことを特徴とする被処理基板用位置固
定機構。1. A substrate positioning unit for positioning a substrate to be processed at a predetermined reference position through a positioning hole of the substrate to be processed, and the substrate to be processed fixed via the substrate positioning unit. A position fixing mechanism for fixing the position of the substrate through its side edge portion, wherein the substrate positioning device is a side where the positioning hole in the substrate is arranged. A substrate support portion having one side support portion that supports one side edge portion, and another side support portion that supports the other side edge portion facing the one side edge portion, and a substrate support portion supported by the substrate support portion. The positioning hole of the substrate to be processed is provided with a positioning pin that is introduced from the lower surface side of the positioning hole to secure a reference position, and is formed with a reference position restricting portion that is vertically movable with respect to the one side supporting portion, The position fixing hand Is a one-sided fixed member, each of which is provided with a biting portion that is driven and controlled so that the one side edge portion and the other side edge portion of the substrate to be processed can be separately pressed from the upper surface side through an operating rod. The control rod and the other-side fixed control unit, the one-side fixed control unit, the operating rod that moves up and down in an oblique direction the bite unit obliquely arranged toward the outside of the one-side support unit. With respect to the one side edge of the substrate to be processed when not supported by being supported by a pivotally supported part that is swingably supported and a fulcrum that is supported by the one side support part so as to be freely rotatable. A position fixing mechanism for a substrate to be processed, which is arranged so as to be freely retracted.
持部と他側支持部とには、被処理基板の対向端面を各別
に位置規制する位置規制片を添設するとともに、前記一
側支持部の側の位置規制片は、前記対向端面と対向する
位置規制面を前記咬持部との衝接を回避させるための後
傾斜面として形成したことを特徴とする請求項１記載の
被処理基板用位置固定機構。2. The one side supporting portion and the other side supporting portion forming the substrate positioning means are provided with position regulating pieces for separately regulating the position of the facing end surface of the substrate to be processed, and the one side supporting portion. 2. The object to be processed according to claim 1, wherein the position control piece on the side of the portion has a position control surface facing the facing end surface as a rear inclined surface for avoiding collision with the bite portion. Position fixing mechanism for substrates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29038395A JP3517499B2 (en) | 1995-10-12 | 1995-10-12 | Position fixing mechanism for substrate to be processed |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29038395A JP3517499B2 (en) | 1995-10-12 | 1995-10-12 | Position fixing mechanism for substrate to be processed |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09107200A true JPH09107200A (en) | 1997-04-22 |
| JP3517499B2 JP3517499B2 (en) | 2004-04-12 |
Family
ID=17755312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29038395A Expired - Fee Related JP3517499B2 (en) | 1995-10-12 | 1995-10-12 | Position fixing mechanism for substrate to be processed |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3517499B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008130624A (en) * | 2006-11-17 | 2008-06-05 | Hioki Ee Corp | Printed circuit board fixing device and printed circuit board inspecting device |
| DE102007039022B3 (en) * | 2007-08-17 | 2009-01-22 | Grohmann Engineering Gmbh | Board i.e. printed circuit board, transporting device for press forces measuring arrangement, has transport segment with lever to fix board, where segment is rotatably supported around pivot axis running in conveying direction of conveyor |
| JP2009049175A (en) * | 2007-08-20 | 2009-03-05 | Anritsu Corp | Printing solder inspecting apparatus |
-
1995
- 1995-10-12 JP JP29038395A patent/JP3517499B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008130624A (en) * | 2006-11-17 | 2008-06-05 | Hioki Ee Corp | Printed circuit board fixing device and printed circuit board inspecting device |
| DE102007039022B3 (en) * | 2007-08-17 | 2009-01-22 | Grohmann Engineering Gmbh | Board i.e. printed circuit board, transporting device for press forces measuring arrangement, has transport segment with lever to fix board, where segment is rotatably supported around pivot axis running in conveying direction of conveyor |
| JP2009049175A (en) * | 2007-08-20 | 2009-03-05 | Anritsu Corp | Printing solder inspecting apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3517499B2 (en) | 2004-04-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3517499B2 (en) | Position fixing mechanism for substrate to be processed | |
| JP3817894B2 (en) | Chip push-up device and die bonding device using the same | |
| JP3228140B2 (en) | Mounting method of conductive ball | |
| JP2010018429A (en) | Segregating apparatus | |
| JP2002261493A (en) | Cut and clinch device of lead wire of electronic component and electronic component inserter | |
| JP4063033B2 (en) | Substrate transfer device | |
| JP3615268B2 (en) | Substrate positioning jig mechanism | |
| KR100217285B1 (en) | Die transferring apparatus | |
| JPH0382197A (en) | Electronic component mounting device | |
| JP3958613B2 (en) | Substrate transfer method, substrate transfer apparatus, and substrate transfer arm | |
| JP2008068546A (en) | Conveying apparatus of sheet goods | |
| JP2002034330A (en) | Automatic inoculating device of stock log for shiitake mushroom | |
| JP2000233867A (en) | Film peeling device | |
| JPS6231120A (en) | Method and device for transporting semiconductor wafer | |
| JPS62188310A (en) | Wafer mounting method and device therefor | |
| JP2817080B2 (en) | Bonding equipment | |
| KR0158419B1 (en) | Auto-sorter & conveyor for input failed pcb in waveform testing controller | |
| JPH01177943A (en) | Device for carrying lead frame | |
| JPH01207998A (en) | Base plate transfer apparatus | |
| JP2002353253A (en) | Device and method for supplying semiconductor chip | |
| JPH0364988A (en) | Board backup device | |
| KR20210097011A (en) | Substrate inverting apparatus and dividing system | |
| JPH1164444A (en) | Ic handler device | |
| KR930000276Y1 (en) | Printed circuit board automatic transfer equipment | |
| JPH01207996A (en) | Base plate transporting apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20040126 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090130 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110130 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130130 Year of fee payment: 9 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150130 Year of fee payment: 11 |
|
| LAPS | Cancellation because of no payment of annual fees |