JPH0882432A - Humidifying method and air conditioning system - Google Patents
Humidifying method and air conditioning systemInfo
- Publication number
- JPH0882432A JPH0882432A JP6243296A JP24329694A JPH0882432A JP H0882432 A JPH0882432 A JP H0882432A JP 6243296 A JP6243296 A JP 6243296A JP 24329694 A JP24329694 A JP 24329694A JP H0882432 A JPH0882432 A JP H0882432A
- Authority
- JP
- Japan
- Prior art keywords
- air
- humidity
- amount
- outside air
- introduced outside
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Air Humidification (AREA)
- Ventilation (AREA)
- Air Conditioning Control Device (AREA)
- Central Air Conditioning (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、工業用クリーンルーム
等、恒温恒湿室に特に適した加湿方法及び空気調和シス
テムに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a humidifying method and an air conditioning system particularly suitable for a constant temperature and constant humidity room such as an industrial clean room.
【0002】[0002]
【従来の技術】工業用クリーンルーム等の温湿度制御に
おいては、湿度制御は外気を処理する空調機(以下、
「外調機」という)で空気中の絶対湿度を制御する露点
制御方式が採られている。このような外調機での露点制
御は、外気の絶対湿度を室内の設定湿度(絶対湿度)に
まで調湿した空気(以下、「調湿外気」という)を室内
に送風するものであり、これは室内で発生する湿分が外
気導入量に比べてきわめて少ない場合、室内の絶対湿度
は定常状態において調湿外気の絶対湿度と等しくなるこ
とを利用した制御方式である。2. Description of the Related Art In the temperature and humidity control of an industrial clean room, the humidity control is performed by an air conditioner (hereinafter,
The dew point control method is used to control the absolute humidity in the air by using the "outside air conditioner". Dew point control in such an external air conditioner is to blow air into the room where the absolute humidity of the outside air has been adjusted to the set humidity (absolute humidity) in the room (hereinafter referred to as "humidified outside air"). This is a control method that utilizes that the absolute humidity in the room is equal to the absolute humidity of the humidity-controlled outside air in a steady state when the amount of moisture generated inside the room is extremely smaller than the amount of introduced outside air.
【0003】この点に関し、循環空気の湿度を直接セン
サで検出して制御する方法も考えられるが、工業用クリ
ーンルーム等では循環空気量がきわめて多いので、変化
の小さい循環空気の湿度を直接的にセンサで検出して加
湿器で制御すると、センサや加湿器に一定の応答速度が
あるため、いわゆるハンチング現象を生じ安定的な運転
が難しい。これに対し外気の露点制御方式では、設定湿
度との差が大きい外気を調湿し、さらにその調湿外気
を、外気の十数倍もある多量の循環空気と混合するた
め、センサ及び加湿器の応答速度が循環空気系で用いる
場合より遅くても、安定な制御が可能である。このた
め、大型の工業用クリーンルーム等では露点制御方式が
用いられているのである。With respect to this point, a method of directly detecting the humidity of the circulating air by a sensor and controlling it can be considered, but since the amount of circulating air is extremely large in an industrial clean room or the like, the humidity of the circulating air, which has a small change, can be directly controlled. When detected by a sensor and controlled by a humidifier, the sensor and the humidifier have a constant response speed, so that a so-called hunting phenomenon occurs and stable operation is difficult. On the other hand, in the dew point control method of the outside air, the humidity of the outside air having a large difference from the set humidity is adjusted, and the adjusted outside air is mixed with a large amount of circulating air, which is more than ten times as much as the outside air. Even if the response speed of is slower than the case of using in the circulating air system, stable control is possible. Therefore, the dew point control method is used in large industrial clean rooms and the like.
【0004】前記した外調機での露点制御方式によれ
ば、夏期の除湿時においては、外調機の中で外調機出口
空気の露点を検出しながら、必要最小限の湿分を外調機
内の冷却コイルで除去するため、省エネルギーである
が、冬期においては、同様に外調機内の蒸気加湿器等を
用いて所定の露点温度まで加湿しているため、外気の温
度が低すぎると、加湿しても低い露点温度で飽和してし
まうので、所定の露点温度に制御できない。そのため従
来は、外気をヒータによって予め加熱する、即ち再熱後
に加湿する方法を採っている。According to the above-mentioned dew point control method in the external air conditioner, during dehumidification in the summer, the dew point of the external air conditioner outlet air is detected in the external air conditioner to remove the minimum necessary moisture. Energy is saved because it is removed by the cooling coil in the air conditioner.However, in the winter, when the temperature of outside air is too low, it is humidified to the specified dew point temperature by using the steam humidifier in the air conditioner. Even if it is humidified, it will be saturated at a low dew point temperature, so it cannot be controlled to a predetermined dew point temperature. Therefore, conventionally, a method has been adopted in which the outside air is preheated by a heater, that is, reheated and then humidified.
【0005】これを図2に基づいて説明すれば、従来一
般のクリーンルームの空調システムは、目的空間となる
クリーンルーム101への給気は、外調機102を経た
導入外気(OA)と、クリーンルーム101からの還気
(RA)を、例えば床下チャンバ103内で混合させて
いた。そして外調機102の出口付近に露点温度センサ
104を設置して、導入外気(OA)の絶対湿度を検出
し、それによって夏期の除湿時においては、外調機10
2内の冷温水コイル105を制御し、冬期の加湿時にお
いては、外調機102内の加湿器106を、湿度コント
ローラ107で制御するようにしていた。なお一般的に
温度制御については、天井チャンバ108に設置した給
気(SA)の温度を検出する温度センサ109の検出結
果に基づいて温度コントローラ110がドライコイル1
11を制御するようになっている。そして冬期の加湿時
においては、外気の温度が低いため、外調機102内に
再熱ヒータ112を設置して、外気を予め加熱していた
のである。This will be described with reference to FIG. 2. In the conventional general clean room air conditioning system, the air supplied to the clean room 101, which is the target space, is introduced outside air (OA) through the external air conditioner 102 and the clean room 101. The return air (RA) was mixed in the underfloor chamber 103, for example. A dew-point temperature sensor 104 is installed near the outlet of the external air conditioner 102 to detect the absolute humidity of the introduced outside air (OA), so that the external air conditioner 10 can be used during dehumidification in summer.
The cold / hot water coil 105 in 2 is controlled, and the humidifier 106 in the external air conditioner 102 is controlled by the humidity controller 107 during humidification in winter. In general, for temperature control, the temperature controller 110 causes the dry coil 1 to operate based on the detection result of the temperature sensor 109 that detects the temperature of the supply air (SA) installed in the ceiling chamber 108.
11 is controlled. Since the temperature of the outside air is low during humidification in the winter, the reheat heater 112 is installed in the outside air conditioner 102 to preheat the outside air.
【0006】[0006]
【発明が解決しようとする課題】ところが工業用クリー
ンルーム等では、内部の熱負荷が大きいため、冬期にお
いても冷房を行っている。そのため従来の外調機での露
点制御方式採用に伴う加湿方法では、再熱ヒータ112
による加熱に起因したエネルギーロスが大きい。以上の
点で従来の加湿方法は好ましくなかったのである。However, in an industrial clean room or the like, since the internal heat load is large, cooling is performed even in winter. Therefore, in the humidification method accompanying the adoption of the conventional dew point control method in the external air conditioner, the reheat heater 112
Energy loss due to heating due to is large. From the above points, the conventional humidification method was not preferable.
【0007】本発明はかかる点に鑑みてなされたもので
あり、循環空気系で加湿を行う方式を採用しつつもハン
チング現象が生じず、しかもエネルギーロスのない加湿
方法、並びに当該加湿方法及び既述の露点制御方式の長
所を採り入れた空気調和システムを提供して、前記問題
の解決を図ることを目的とするものである。The present invention has been made in view of the above points, and a humidifying method in which a hunting phenomenon does not occur even though a method of humidifying in a circulating air system is adopted and energy loss is not caused, and the humidifying method and the existing method are used. It is an object of the present invention to provide an air conditioning system that takes advantage of the above-mentioned dew point control method to solve the above problem.
【0008】[0008]
【課題を解決するための手段】前記目的を達成するた
め、請求項1によれば、目的空間からの還気と、空調機
によって処理された導入外気とを混合させ、これを再び
目的空間への給気とする循環空気系を有した空気調和シ
ステムにおける、前記目的空間内を加湿手段によって加
湿する方法であって、導入外気の絶対湿度と導入量を検
出し、設定湿度における絶対湿度と導入外気との絶対湿
度の差に、導入外気量を乗じた量を所要加湿量として、
前記加湿手段によって前記循環空気系の循環空気に付加
させることを特徴とする、加湿方法が提供される。In order to achieve the above object, according to claim 1, the return air from the target space and the introduced outside air treated by the air conditioner are mixed, and the mixture is returned to the target space. In the air conditioning system having a circulating air system to supply air, a method for humidifying the inside of the target space by a humidifying means, detecting the absolute humidity and the introduction amount of the introduced outside air, and the absolute humidity at the set humidity and the introduction. The required humidification amount is calculated by multiplying the difference in absolute humidity from the outside air by the amount of introduced outside air.
A humidifying method is provided, which is characterized in that the humidifying means adds to the circulating air of the circulating air system.
【0009】また請求項2によれば、さらに精密な確度
の高い制御が行えるための加湿方法として、導入外気の
絶対湿度と導入量を検出し、設定湿度における絶対湿度
と導入外気との絶対湿度の差に導入外気量を乗じた量を
所要加湿量とし、さらに給気の湿度を検出してこの検出
結果と設定湿度の差に基づいて前記所要加湿量を調整
し、これに基づいて加湿手段で循環空気系の循環空気に
付加させることを特徴とする、加湿方法が提供される。Further, according to claim 2, as a humidifying method for performing more precise and highly accurate control, the absolute humidity of the introduced outside air and the introduced amount are detected, and the absolute humidity at the set humidity and the absolute humidity between the introduced outside air are detected. The required humidification amount is obtained by multiplying the difference of the above by the introduced outside air amount, the humidity of the supply air is further detected, and the required humidification amount is adjusted based on the difference between this detection result and the set humidity, and the humidifying means is based on this. The method for humidification is provided by adding to the circulating air of the circulating air system.
【0010】前記した各加湿方法における加湿手段は、
蒸気方式を始めとする既存の種々の加湿手段を用いるこ
とが可能であるが、中でも請求項3に記載したように、
水噴霧方式及び/又は気化方式の加湿手段を採用すれ
ば、気化熱を奪い、給気の温度を下げる作用をするた
め、例えばドライコイルの負荷が小さくなるというさら
に好ましい結果が得られる。The humidifying means in each of the above humidifying methods is
It is possible to use various existing humidifying means including a steam method, but among them, as described in claim 3,
If the water spray type and / or vaporization type humidifying means is adopted, the vaporization heat is removed and the temperature of the supply air is lowered, so that a more preferable result that the load of the dry coil is reduced can be obtained.
【0011】また請求項4によれば、外気を処理する空
調機を経た導入外気と、目的空間からの還気とを混合さ
せ、これを再び目的空間への給気とする循環空気系を有
した空気調和システムにおいて、導入外気の絶対湿度を
検出する湿度センサと、導入外気の量を検出する導入外
気量検出センサと、前記循環空気系に設置された加湿手
段と、湿度コントローラとを有し、さらに前記空調機は
少なくとも冷却コイルを有し、導入外気の絶対湿度が目
的空間の設定湿度の絶対湿度よりも低い場合には、目的
空間内の設定湿度における絶対湿度と、前記湿度センサ
によって得た導入外気の絶対湿度の差に、前記導入外気
量検出センサによって得た導入外気量を乗じた量が所要
加湿量として前記湿度コントローラによって演算される
と共に、この演算結果に基づいて前記加湿手段が制御さ
れ、導入外気の絶対湿度が目的空間の設定湿度の絶対湿
度よりも高い場合には、前記湿度コントローラによって
前記空調機の冷却コイルが制御される如く構成されたこ
とを特徴とする、空気調和システムが提供される。According to the present invention, there is provided a circulating air system for mixing the introduced outside air that has passed through the air conditioner for treating the outside air with the return air from the target space, and supplying the mixed air again to the target space. In the air conditioning system described above, the humidity sensor for detecting the absolute humidity of the introduced outside air, the introduced outside air amount detection sensor for detecting the amount of the introduced outside air, the humidifying means installed in the circulating air system, and the humidity controller. Further, the air conditioner has at least a cooling coil, and when the absolute humidity of the introduced outside air is lower than the absolute humidity of the set humidity in the target space, the absolute humidity at the set humidity in the target space and the humidity sensor are obtained. The difference between the absolute humidity of the introduced outside air is multiplied by the introduced outside air amount obtained by the introduced outside air amount detection sensor to be calculated as the required humidification amount by the humidity controller, and this calculation is also performed. The humidifying means is controlled based on the result, and when the absolute humidity of the introduced outside air is higher than the absolute humidity of the set humidity of the target space, the humidity controller controls the cooling coil of the air conditioner. An air conditioning system is provided, which is characterized by:
【0012】この場合、請求項5に記載したように、さ
らに給気の湿度を検出する給気湿度センサを有し、この
給気湿度センサによって得た給気湿度と目的空間におけ
る設定湿度の差に基づいて、前記所要加湿量を調整する
ように構成したり、また請求項6に記載したように、前
記所要加湿量の調整のみならず、冷却コイルの制御の調
整を行うように構成してもよい。In this case, as described in claim 5, there is further provided a supply air humidity sensor for detecting the humidity of the supply air, and the difference between the supply air humidity obtained by this supply air humidity sensor and the set humidity in the target space. On the basis of the above, it is configured to adjust the required humidification amount, or as described in claim 6, not only the adjustment of the required humidification amount but also the control of the cooling coil is adjusted. Good.
【0013】以上に挙げた各空気調和システムにおける
加湿手段についても、請求項7に記載したように、水噴
霧方式及び/又は気化方式の加湿手段を採用すれば、な
お好ましい結果が得られる。With respect to the humidifying means in each of the air conditioning systems described above, more preferable results can be obtained by adopting the water spray type and / or vaporizing type humidifying means as described in claim 7.
【0014】[0014]
【作用】請求項1に記載の加湿方法によれば、目的空間
の湿度を直接検出する方式ではなく、導入外気の絶対湿
度と導入量を検出し、設定湿度(絶対湿度)と導入外気
との絶対湿度の差に、導入外気量を乗じた量を所要加湿
量として加湿するので、まずハンチングの問題は生じな
い。また例えば目的空間がクリーンルームである場合、
年間を通じて冷房運転を行っている関係上、循環空気の
温度は冬期でも23゜C〜25゜C程度である。したが
って循環空気に直接加湿する本発明によれば、加湿のた
めの再熱は不要である。According to the humidifying method of claim 1, instead of directly detecting the humidity of the target space, the absolute humidity and the introduction amount of the introduced outside air are detected to determine the set humidity (absolute humidity) and the introduced outside air. Since the amount of humidity obtained by multiplying the difference in absolute humidity by the amount of introduced outside air is used as the required amount of humidification, the problem of hunting does not occur first. Also, for example, if the target space is a clean room,
Due to the cooling operation throughout the year, the temperature of the circulating air is about 23 ° C to 25 ° C even in winter. Therefore, according to the present invention in which the circulating air is humidified directly, reheating for humidification is not necessary.
【0015】請求項2に記載の加湿方法では、さらに給
気の湿度を検出してこの検出結果と設定湿度の差に基づ
いて前記請求項1における所要加湿量を調整しているの
で、確度を高め、より精密な加湿を実施することができ
る。なお具体的な調整に関しては、検出結果と設定湿度
の差に基づいて割だした定数を、前記所要加湿量に乗ず
る手法をその一例として挙げることができる。In the humidifying method according to the second aspect, the humidity of the supply air is further detected, and the required humidifying amount according to the first aspect is adjusted based on the difference between the detection result and the set humidity. Higher and more precise humidification can be carried out. For specific adjustment, a method of multiplying the required humidification amount by a constant divided based on the difference between the detection result and the set humidity can be given as an example.
【0016】前記した各加湿方法において、請求項3に
記載したように、加湿手段に水噴霧方式又は気化方式、
あるいはその双方の方式を有する加湿手段を採用すれ
ば、加湿時に循環空気の温度を上昇させず、逆に温度を
下げることができる。従って、冬期でも冷房運転を行っ
ているクリーンルーム等に適しており、省エネルギーも
図れる。In each of the above humidifying methods, as described in claim 3, the humidifying means uses a water spray method or a vaporizing method,
Alternatively, if the humidifying means having both methods is adopted, the temperature of the circulating air can be lowered without increasing the temperature of the circulating air during humidification. Therefore, it is suitable for a clean room or the like that is in the air-conditioning operation even in winter, and energy can be saved.
【0017】また請求項4によれば、例えば冬期など外
気が乾燥して目的空間を加湿する必要がある場合、湿度
コントローラによって加湿手段が制御され、請求項1の
加湿が循環空気になされる。従って、ハンチング現象が
ない安定した加湿制御が可能であり、再熱の必要もな
い。そして例えば夏期など外気の湿度が高い場合には、
湿度コントローラによって空調機の冷却コイルが制御さ
れるので、従前の露点制御方式の湿度制御をそのまま実
施することができ、安定した制御で省エネ効果の高い湿
度制御が可能である。According to a fourth aspect of the present invention, for example, when the outside air is dry and it is necessary to humidify the target space, such as in winter, the humidity controller controls the humidifying means, and the humidification of the first aspect is applied to the circulating air. Therefore, stable humidification control without hunting phenomenon is possible, and there is no need for reheating. And, for example, when the humidity of the outside air is high, such as in the summer,
Since the cooling coil of the air conditioner is controlled by the humidity controller, the humidity control of the conventional dew point control method can be performed as it is, and stable humidity control with high energy-saving effect is possible.
【0018】請求項5、6によれば、さらに給気の湿度
をも勘案して加湿手段や冷却コイルを制御するので、請
求項4の場合よりもさらに確度の高い精密な湿度コント
ロールが可能になっている。According to the fifth and sixth aspects, since the humidifying means and the cooling coil are controlled in consideration of the humidity of the supply air as well, a more accurate and precise humidity control is possible than in the case of the fourth aspect. Has become.
【0019】そして請求項7に記載したように、水噴霧
方式及び/又は気化方式の加湿手段を採用した場合に
は、請求項3の場合と同様、加湿時の循環空気の温度を
下げる効果があるので、さらなる省エネルギーを図るこ
とが可能である。Further, as described in claim 7, when the water spray type and / or vaporization type humidifying means is adopted, the effect of lowering the temperature of the circulating air at the time of humidification is obtained as in the case of the third aspect. Therefore, it is possible to further save energy.
【0020】[0020]
【実施例】以下、本発明の一実施例を図面に基づき説明
すれば、図1は実施例にかかる空気調和システムの主要
な構成を示しており、本実施例では、目的空間を工業用
のクリーンルーム1としている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 shows a main configuration of an air conditioning system according to the embodiment. Clean room 1
【0021】このクリーンルーム1は、天井裏空間に天
井チャンバ2、床下空間に床下チャンバ3を有してお
り、クリーンルーム1外部に設けた循環ファン4によっ
て、給気(SA)は、天井部に設けたHEPAフィルタ
などによって構成されるフィルタユニット5を通じて天
井チャンバ2からクリーンルーム1内へと供給され、格
子板やパンチング板によって構成される床板6を通じ
て、床下チャンバ3へと流れて還気(RA)となる。そ
してこの還気(RA)は後述の空調機11を経た処理済
みの導入外気(OA)と床下チャンバ3内で混合され、
ドライコイル7を介して循環ファン4によって再び天井
チャンバ2へと供給される。本実施例における循環空気
系は、以上のような経路を有している。The clean room 1 has a ceiling chamber 2 in the space above the ceiling and an underfloor chamber 3 in the space under the floor, and the supply of air (SA) is provided at the ceiling by a circulation fan 4 provided outside the clean room 1. Is supplied from the ceiling chamber 2 into the clean room 1 through a filter unit 5 including a HEPA filter, and flows to the underfloor chamber 3 through a floor plate 6 including a lattice plate or a punching plate to generate return air (RA). Become. Then, this return air (RA) is mixed with the treated outside air (OA) that has passed through the air conditioner 11 described below in the underfloor chamber 3,
It is supplied to the ceiling chamber 2 again by the circulation fan 4 via the dry coil 7. The circulating air system in this embodiment has the above-described path.
【0022】一方外気を処理して導入外気とする空調機
11は、ガラリ12を介してファン13で吸い込んだ外
気をろ過する中間フィルタ14と、中間フィルタ14を
通過した空気を処理する冷温水コイル15と、この冷温
水コイル15を通過した空気を導入外気とするため、H
EPAフィルタなどで構成される最終フィルタ16を有
している。そしてこの空調機11における導入外気(O
A)の出口付近には、導入外気(OA)の露点温度を検
出してその絶対湿度を測定するための露点温度センサ2
1と、導入外気(OA)の導入量を検出するための風量
計22が設置されている。これら各露点温度センサ21
と風量計22の検出信号は、湿度コントローラ23へと
入力される。On the other hand, the air conditioner 11 that processes the outside air to make it into the introduced outside air includes an intermediate filter 14 for filtering the outside air sucked by the fan 13 through the louver 12 and a cold / hot water coil for treating the air passing through the intermediate filter 14. 15 and the air that has passed through the cold / hot water coil 15 is used as the introduced outside air.
It has a final filter 16 composed of an EPA filter or the like. Then, the introduced outside air (O
Dew point temperature sensor 2 for detecting the dew point temperature of the introduced outside air (OA) and measuring the absolute humidity near the outlet of A).
1 and an air flow meter 22 for detecting the amount of introduced outside air (OA). Each of these dew point temperature sensors 21
The detection signal of the air flow meter 22 is input to the humidity controller 23.
【0023】湿度コントローラ23は、前記した露点温
度センサ21からの検出信号に基づいて、クリーンルー
ム1の設定湿度(絶対湿度)と導入外気の絶対湿度の差
を算出し、加湿が必要な場合には、当該差に風量計22
からの検出信号に基づいて割だした導入外気量を乗じた
量を演算して、これを第1の所要加湿量として、加湿手
段31にその指示を出力する機能を有している。The humidity controller 23 calculates the difference between the set humidity (absolute humidity) of the clean room 1 and the absolute humidity of the introduced outside air based on the detection signal from the above-mentioned dew point temperature sensor 21, and when humidification is required. , Airflow meter 22 for the difference
It has a function of calculating an amount obtained by multiplying the amount of introduced outside air divided based on the detection signal from, and outputting the instruction to the humidifying means 31 as the first required humidifying amount.
【0024】より詳述すれば、前記床下チャンバ3にお
ける循環空気流路の下流側、即ち還気(RA)と導入外
気(OA)が混合された後の流路には、循環空気を加湿
するための水噴霧方式の加湿手段24が設置されてお
り、湿度コントローラ23によって演算された前記第1
の所要加湿量に基づく制御信号は、加湿手段24の調節
弁25へと入力され、それによって加湿量の調節が行わ
れるのである。なお流量の検出は流量計26によって行
われ、そのの検出信号は常時湿度コントローラ23へと
入力されている。More specifically, the circulating air is humidified in the downstream side of the circulating air passage in the underfloor chamber 3, that is, in the passage after the return air (RA) and the introduced outside air (OA) are mixed. A water spray type humidifying means 24 is installed, and the first controller calculated by the humidity controller 23 is used.
The control signal based on the required amount of humidification is input to the adjusting valve 25 of the humidifying means 24, and the amount of humidification is adjusted thereby. The flow rate is detected by the flow meter 26, and the detection signal of the flow rate meter is always input to the humidity controller 23.
【0025】一方逆に減湿が必要な場合には、湿度コン
トローラ23は、空調機11の冷温水コイル15の調節
弁15aに対して必要な指示を出力するようになってい
る。On the other hand, when it is necessary to reduce the humidity, the humidity controller 23 outputs a necessary instruction to the control valve 15a of the cold / hot water coil 15 of the air conditioner 11.
【0026】さらに前記湿度コントローラ23には、天
井チャンバ2内に設置されている給気(SA)の湿度を
測定する湿度センサ31と、給気(SA)の温度を測定
する温度センサ32からの各信号も入力され、最終的な
到達湿度(絶対湿度)と設定湿度(絶対湿度)に差が生
じた場合には、前記第1の所要加湿量に、当該差に基づ
いて算出された定数を乗じて演算し、その結果を第2の
所要加湿量として、加湿手段24の調節弁25に指示を
出力する機能も有している。もちろんそのようないわば
確度の高い指示出力は、減湿が必要な場合、空調機11
の冷温水コイル15の調節弁15aに対しても出力可能
である。Further, the humidity controller 23 includes a humidity sensor 31 for measuring the humidity of the supply air (SA) installed in the ceiling chamber 2 and a temperature sensor 32 for measuring the temperature of the supply air (SA). When each signal is also input and a difference occurs between the final reached humidity (absolute humidity) and the set humidity (absolute humidity), a constant calculated based on the difference is added to the first required humidification amount. It also has a function of multiplying and calculating, and using the result as the second required amount of humidification, outputting an instruction to the control valve 25 of the humidifying means 24. Of course, if it is necessary to dehumidify the air conditioner 11
It is also possible to output to the control valve 15a of the cold / hot water coil 15.
【0027】本実施例にかかる空気調和システムは以上
のように構成されており、例えば冬期において、外気が
極めて乾燥しており、その結果クリーンルーム1内の設
定湿度(絶対湿度)が外気の絶対湿度よりも高い場合、
湿度コントローラ23はその差に、導入外気量を乗じた
量を第1の所要加湿量として、加湿手段24の調節弁2
5を制御して、循環空気に当該第1の所要加湿量を付加
することが可能である。この場合、クリーンルーム1が
より精密な湿度設定を要求している場合には、湿度セン
サ31と、温度センサ32からの各信号からのデータも
取り入れて演算して求めた第2の所要加湿量に基づいて
湿分を付加させることも可能である。いずれの場合であ
っても、基本的には空調機11の出口に設置した露点温
度センサ21のデータを基にしているので、ハンチング
が生ぜず、制御性が良好で安定した湿度コントロールが
可能である。The air conditioning system according to the present embodiment is configured as described above. For example, in winter, the outside air is extremely dry, and as a result, the set humidity (absolute humidity) in the clean room 1 is the absolute humidity of the outside air. Higher than
The humidity controller 23 sets the amount obtained by multiplying the difference by the amount of introduced outside air as the first required humidifying amount, and then the control valve 2 of the humidifying means 24.
It is possible to control 5 to add the first required humidification amount to the circulating air. In this case, when the clean room 1 requires a more precise humidity setting, the second required humidification amount calculated by incorporating the data from the respective signals from the humidity sensor 31 and the temperature sensor 32 is calculated. It is also possible to add moisture based on this. In any case, since it is basically based on the data of the dew point temperature sensor 21 installed at the outlet of the air conditioner 11, hunting does not occur, good controllability and stable humidity control are possible. is there.
【0028】しかも加湿にあたっては、加湿手段24に
よって循環空気に直接加湿する方式を採っているので、
クリーンルーム1の室温が常時23゜C〜25゜Cであ
ることを鑑みると、冬期においても加湿のための再熱は
必要がない。従って、従来よりもその分、省エネルギー
が図れ、また再熱用のヒータを空調機11に設置する必
要もない。さらに加湿手段24自体は水噴霧方式を採用
しているから、加湿の際に循環空気の温度を下げる効果
があるので、この点でも、省エネ効果は大きいものとな
っている。Moreover, in humidifying, since the humidifying means 24 directly humidifies the circulating air,
Considering that the room temperature of the clean room 1 is always 23 ° C. to 25 ° C., reheating for humidification is not necessary even in winter. Therefore, it is possible to save energy more than before and it is not necessary to install a reheat heater in the air conditioner 11. Further, since the humidifying means 24 itself adopts the water spray method, it has the effect of lowering the temperature of the circulating air during humidification, and in this respect also, the energy saving effect is great.
【0029】一方、例えば夏期などにおいて外気の湿度
が高く、クリーンルーム1の設定湿度(絶対湿度)より
も外気の絶対湿度の方が高い場合には、湿度コントロー
ラ23によって、空調機11の冷温水コイル15が制御
され、減湿運転がなされる。この場合は、いわゆる既述
の外気露点制御方式であり、露点温度センサ21で導入
外気(OA)の露点を検出しながら、必要最小限の湿分
を冷温水コイル15で除去するため、省エネルギー効果
がある。またそのようにして調湿した導入外気は、より
多量の循環空気と床下チャンバ3内で混合されるため、
安定な制御が可能となっている。On the other hand, when the humidity of the outside air is high, for example in summer, and the absolute humidity of the outside air is higher than the set humidity (absolute humidity) of the clean room 1, the humidity controller 23 causes the cold / hot water coil of the air conditioner 11 to operate. 15 is controlled, and the dehumidifying operation is performed. In this case, the so-called outside air dew point control method is used, and while the dew point temperature sensor 21 detects the dew point of the introduced outside air (OA), the minimum necessary moisture is removed by the cold / hot water coil 15, so an energy saving effect is obtained. There is. Further, since the introduced outside air whose humidity has been adjusted in this way is mixed with a larger amount of circulating air in the underfloor chamber 3,
Stable control is possible.
【0030】[0030]
【発明の効果】請求項1に記載の加湿方法によれば、ハ
ンチング現象が生じないので、安定した加湿制御が可能
であり、しかもクリーンルームなど目的空間が常時冷房
運転を行っている場合には、高い省エネ効果が得られ、
再熱ヒータも不要である。請求項2の加湿方法では、さ
らに確度の高い精密な加湿制御を実施することができ
る。そして請求項3に記載の加湿方法によれば、より一
層高い省エネ効果を得ることが可能である。According to the humidifying method of the first aspect of the present invention, since the hunting phenomenon does not occur, stable humidification control is possible, and when the target space such as a clean room is constantly performing cooling operation, High energy saving effect can be obtained,
No reheat heater is required. In the humidifying method according to the second aspect, it is possible to perform highly accurate and precise humidifying control. According to the humidifying method of the third aspect, it is possible to obtain an even higher energy saving effect.
【0031】また請求項4に記載の空気調和システムに
よれば、目的空間の加湿時には、前記した請求項1の加
湿方法を実施でき、その作用効果を享有することができ
る。一方減湿時には、従前の外気を処理する空調機での
露点制御方式を採用することができ、高い省エネ効果と
安定した制御が可能である。従って、状況に応じて常に
エネルギー効率の良好な湿度コントロールが可能であ
る。請求項5、6に記載の空気調和システムによれば、
かかる作用効果に加えて、より一層確度の高い精密な湿
度コントロールを実現することができる。そして請求項
7に記載した空気調和システムによれば、加湿時の循環
空気の温度を下げる効果があるので、その分、さらなる
省エネルギーを図ることが可能である。Further, according to the air conditioning system of the fourth aspect, when the target space is humidified, the humidifying method of the above-mentioned first aspect can be carried out and the effect thereof can be enjoyed. On the other hand, at the time of dehumidification, the dew point control method in the air conditioner that processes the outside air can be adopted, and a high energy saving effect and stable control are possible. Therefore, it is possible to always control the humidity with good energy efficiency depending on the situation. According to the air conditioning system of claims 5 and 6,
In addition to such action and effect, more accurate and precise humidity control can be realized. Further, according to the air conditioning system of the seventh aspect, there is an effect of lowering the temperature of the circulating air at the time of humidification, so that it is possible to further save energy.
【図1】本発明の実施例にかかる空気調和システムの主
要な構成を示す説明図である。FIG. 1 is an explanatory diagram showing a main configuration of an air conditioning system according to an embodiment of the present invention.
【図2】従来技術にかかる空気調和システムの主要な構
成を示す説明図である。FIG. 2 is an explanatory diagram showing a main configuration of an air conditioning system according to a conventional technique.
1 クリーンルーム 2 天井チャンバ 3 床下チャンバ 4 循環ファン 7 ドライコイル 11 空調機 15 冷温水コイル 21 露点温度センサ 22 風量計 23 湿度コントローラ 24 加湿手段 25 調節弁 31 湿度センサ 32 温度センサ 33 温度コントローラ 1 Clean Room 2 Ceiling Chamber 3 Underfloor Chamber 4 Circulation Fan 7 Dry Coil 11 Air Conditioner 15 Cold / Hot Water Coil 21 Dew Point Temperature Sensor 22 Air Flow Meter 23 Humidity Controller 24 Humidification Means 25 Control Valve 31 Humidity Sensor 32 Temperature Sensor 33 Temperature Controller
Claims (7)
させ、これを再び目的空間への給気とする循環空気系を
有した空気調和システムにおける、前記目的空間内を加
湿手段によって加湿する方法であって、 導入外気の絶対湿度と導入量を検出し、設定湿度におけ
る絶対湿度と導入外気との絶対湿度の差に、導入外気量
を乗じた量を所要加湿量として、加湿手段によって前記
循環空気系の循環空気に付加させることを特徴とする、
加湿方法。1. A humidifying means for humidifying the inside of the target space in an air conditioning system having a circulating air system for mixing the return air from the target space and the introduced outside air and supplying the mixed air to the target space again. In this method, the absolute humidity and the introduction amount of the introduced outside air are detected, and the difference between the absolute humidity at the set humidity and the absolute humidity of the introduced outside air is multiplied by the introduced outside air amount to obtain the required humidification amount. Characterized in that it is added to the circulating air of the circulating air system,
Humidification method.
させ、これを再び目的空間への給気とする循環空気系を
有した空気調和システムにおける、前記目的空間内を加
湿手段によって加湿する方法であって、 導入外気の絶対湿度と導入量を検出し、設定湿度におけ
る絶対湿度と導入外気との絶対湿度の差に導入外気量を
乗じた量を所要加湿量とし、さらに給気の湿度を検出し
てこの検出結果と設定湿度の差に基づいて前記所要加湿
量を調整して、加湿手段によって前記循環空気系の循環
空気に付加させることを特徴とする、加湿方法。2. A humidifying means for humidifying the inside of the target space in an air conditioning system having a circulating air system for mixing the return air from the target space and the introduced outside air to supply the air to the target space again. In this method, the absolute humidity and the introduction amount of the introduced outside air are detected, and the required humidification amount is calculated by multiplying the difference between the absolute humidity at the set humidity and the absolute humidity between the introduced outside air and the introduced outside air as the required humidification amount. A humidifying method comprising detecting humidity, adjusting the required humidifying amount based on a difference between the detected result and the set humidity, and adding the required humidifying amount to the circulating air of the circulating air system by a humidifying means.
気化方式の加湿手段であることを特徴とする、請求項1
又は2に記載の加湿方法。3. The humidifying means is a water spray type and / or vaporizing type humidifying means.
Or the humidifying method according to 2.
と、目的空間からの還気とを混合させ、これを再び目的
空間への給気とする循環空気系を有した空気調和システ
ムにおいて、導入外気の絶対湿度を検出する湿度センサ
と、導入外気の量を検出する導入外気量検出センサと、
前記循環空気系に設置された加湿手段と、湿度コントロ
ーラとを有し、さらに前記空調機は少なくとも冷却コイ
ルを有し、導入外気の絶対湿度が目的空間の設定湿度に
おける絶対湿度よりも低い場合には、目的空間内の設定
湿度における絶対湿度と前記湿度センサによって得た導
入外気の絶対湿度の差に、前記導入外気量検出センサに
よって得た導入外気量を乗じた量が、所要加湿量として
前記湿度コントローラによって演算されると共に、この
演算結果に基づいて前記加湿手段が制御され、導入外気
の絶対湿度が目的空間の設定湿度における絶対湿度より
も高い場合には、前記湿度コントローラによって前記空
調機の冷却コイルが制御される如く構成されたことを特
徴とする、空気調和システム。4. An air conditioning system having a circulating air system for mixing the introduced outside air that has passed through an air conditioner for treating the outside air with the return air from the target space, and supplying the mixed air to the target space again. A humidity sensor that detects the absolute humidity of the introduced outside air, and an introduced outside air amount detection sensor that detects the amount of introduced outside air,
It has a humidifying means installed in the circulating air system and a humidity controller, and the air conditioner has at least a cooling coil, and when the absolute humidity of the introduced outside air is lower than the absolute humidity in the set humidity of the target space. The difference between the absolute humidity at the set humidity in the target space and the absolute humidity of the introduced outside air obtained by the humidity sensor, the amount obtained by multiplying the introduced outside air amount obtained by the introduced outside air amount detection sensor, as the required humidification amount. While being calculated by the humidity controller, the humidifying means is controlled based on this calculation result, and when the absolute humidity of the introduced outside air is higher than the absolute humidity in the set humidity of the target space, the humidity controller controls the humidity of the air conditioner. An air conditioning system, characterized in that the cooling coil is configured to be controlled.
ンサを有し、この給気湿度センサによって得た給気湿度
と目的空間における設定湿度の差に基づいて、前記所要
加湿量が調整される如く構成されたことを特徴とする、
請求項4に記載の空気調和システム。5. A supply air humidity sensor for detecting the humidity of the supply air is further provided, and the required humidification amount is adjusted based on the difference between the supply air humidity obtained by the supply air humidity sensor and the set humidity in the target space. Characterized by being configured as
The air conditioning system according to claim 4.
ンサを有し、この給気湿度センサによって得た給気湿度
と目的空間における設定湿度の差に基づいて、前記所要
加湿量の調整並びに冷却コイルの制御調整がされる如く
構成されたことを特徴とする、請求項4に記載の空気調
和システム。6. A supply air humidity sensor for detecting the humidity of supply air is further provided, and the required amount of humidification is adjusted based on the difference between the supply air humidity obtained by the supply air humidity sensor and the set humidity in the target space. The air conditioning system according to claim 4, wherein the cooling coil is configured to be controlled and adjusted.
気化方式の加湿手段であることを特徴とする、請求項
4、5又は6に記載の空気調和システム。7. The air conditioning system according to claim 4, 5 or 6, wherein the humidifying means is a water spray type and / or vaporizing type humidifying means.
Priority Applications (1)
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JP24329694A JP3310118B2 (en) | 1994-09-12 | 1994-09-12 | Humidification method and air conditioning system |
Applications Claiming Priority (1)
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---|---|---|---|
JP24329694A JP3310118B2 (en) | 1994-09-12 | 1994-09-12 | Humidification method and air conditioning system |
Publications (2)
Publication Number | Publication Date |
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JPH0882432A true JPH0882432A (en) | 1996-03-26 |
JP3310118B2 JP3310118B2 (en) | 2002-07-29 |
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