JPH085577A - Camera position correction unit, mark plate for the unit and visual inspection apparatus - Google Patents
Camera position correction unit, mark plate for the unit and visual inspection apparatusInfo
- Publication number
- JPH085577A JPH085577A JP25683694A JP25683694A JPH085577A JP H085577 A JPH085577 A JP H085577A JP 25683694 A JP25683694 A JP 25683694A JP 25683694 A JP25683694 A JP 25683694A JP H085577 A JPH085577 A JP H085577A
- Authority
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- Japan
- Prior art keywords
- light
- camera
- plate
- position correcting
- adjusting plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
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- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Image Input (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、積層型電子写真感光体
の外観欠陥検査過程にて用いられるカメラ受光位置補正
用標板の構成、およびそのカメラ受光位置補正用標板を
用いたカメラ位置補正装置、ならびに外観欠陥検査装置
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a camera light receiving position correcting reference plate used in an appearance defect inspection process of a laminated electrophotographic photosensitive member, and a camera position using the camera light receiving position correcting reference plate. The present invention relates to a correction device and an appearance defect inspection device.
【０００２】[0002]
【従来の技術】積層型電子写真感光体、特にデジタル画
像処理に対応する感光体において、外観欠陥等が生じる
と、表面層では光沢面に起因する正反射成分と表面層凹
凸に起因する散乱光成分からなる反射を起こし、一方、
内部層では欠陥での選択吸収を伴う拡散反射成分が発生
する。2. Description of the Related Art In a laminated electrophotographic photosensitive member, especially in a photosensitive member compatible with digital image processing, when an appearance defect or the like occurs, a specular reflection component caused by a glossy surface and scattered light caused by unevenness of the surface layer in the surface layer. Causes a reflection composed of components, while
In the inner layer, a diffuse reflection component is generated with selective absorption due to defects.
【０００３】一般的に、撮像カメラを用いた欠陥検査方
式としては、単一照明・撮像系による斜方照明による拡
散反射受光方式が採られていた。In general, as a defect inspection method using an image pickup camera, a diffuse reflection light receiving method by oblique illumination by a single illumination / image pickup system has been adopted.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、前記従
来方式においては、図19に示すように表面層101，内部
層102，ベース103からなる感光体100の表面層101におけ
る凹凸情報を含んだ成分は、その凹凸101aが鏡面反射性
の自由曲面であるので、図19(a)〜(c)のように３次元形
状が一定でなく、様々な傾角を有した面を構成してお
り、この場合、表面層101を照明する入射光104の入射角
度が一定であると、凹凸101aによる散乱光105の指向性
が凹凸101aの傾角によって変化するため、散乱光105
は、表面層101の前方に設置されている撮像カメラの受
光範囲から外れることが多く、実際には表面層101に凹
凸101aが存在しているにも拘らず、撮像信号には情報が
入らないことが発生する。However, in the above-mentioned conventional method, as shown in FIG. 19, the component containing the unevenness information in the surface layer 101 of the photoreceptor 100 including the surface layer 101, the inner layer 102 and the base 103 is Since the unevenness 101a is a free-form surface of specular reflection, the three-dimensional shape is not constant as shown in FIGS. 19 (a) to (c), and the surface has various inclination angles. When the incident angle of the incident light 104 that illuminates the surface layer 101 is constant, the directivity of the scattered light 105 due to the unevenness 101a changes depending on the inclination angle of the unevenness 101a, so the scattered light 105
Is often out of the light-receiving range of the imaging camera installed in front of the surface layer 101, and although the unevenness 101a actually exists on the surface layer 101, no information is included in the imaging signal. Occurs.
【０００５】このため、欠陥による全ての表面層101の
反射成分と内部層102の反射成分の双方を同時に撮像カ
メラに取り込めるような反射指向性を光学系に持たせな
ければならないが、従来、一定入射角の単一照明系およ
び撮像系で、このことを行うことは非常に困難であっ
た。また、２つの異なった反射指向性を持った検査対象
の各々の欠陥を検出する場合、セオリーとして２系統の
照明手段あるいは２系統の撮像手段を併用する対策がと
られており、単一面性状のチャート，校正シートでは異
なる二反射面性状に存在する欠陥を評価する特性が得ら
れず、充分な補正が行えなかった。For this reason, the optical system must be provided with a reflection directivity so that both the reflection components of the surface layer 101 and the reflection components of the inner layer 102 due to defects can be simultaneously captured in the image pickup camera. This was very difficult to do with a single illumination system at the angle of incidence and an imaging system. Further, in the case of detecting each defect of the inspection object having two different reflection directivities, a measure is taken in which two systems of illumination means or two systems of image pickup means are used together as theory, and thus the theory of single plane property is taken. With the chart and the calibration sheet, the characteristics for evaluating defects existing in different two-reflection surface properties could not be obtained, and sufficient correction could not be performed.
【０００６】また、この問題を解決するために、斜方照
明において照射角を小さくし正反射成分を多く取り込む
と、高輝度の正反射成分によりコントラストが低下し、
欠陥の撮像が困難となる。Further, in order to solve this problem, if the irradiation angle is made small in oblique illumination and a large amount of specular reflection component is taken in, the contrast is lowered due to the high-brightness specular reflection component,
Imaging of defects becomes difficult.
【０００７】また、マスタドラムを用いたカメラ受光位
置補正では、マスタドラム上の特定位置に欠陥が存在す
るため、撮像面への位置合わせが困難となり、定期的に
実施する校正においては、校正作業に人為的ミスが誘発
されやすく、校正作業に煩雑かつ熟練を要する等の問題
があるばかりでなく、対象欠陥ごとにマスタドラムを複
数種類用意する必要が生じ、その保管，管理が非常に煩
雑であるという問題が発生する。Further, in the correction of the light receiving position of the camera using the master drum, there is a defect at a specific position on the master drum, which makes it difficult to align the position with the imaging surface. Not only is there a problem that human error is easily induced, the calibration work is complicated and requires skill, and it is necessary to prepare multiple types of master drums for each target defect, which makes storage and management very complicated. There is a problem.
【０００８】さらに、補正を行う場合、カメラ受光位置
は、異なる反射指向性を有した２つの相乗された反射光
を、高いコントラストで受光するクリティカルな位置に
設定される必要があるため、従来、これらのセッティン
グには、直感的，経験主義的な試行錯誤が伴い、非常に
効率が悪かった。Further, when performing correction, the camera light receiving position must be set to a critical position for receiving two synergistic reflected lights having different reflection directivities with high contrast, and thus, conventionally, These settings were very inefficient, with intuitive and empirical trial and error.
【０００９】本発明の目的は、感光体表面の欠陥が、高
いコントラストで検出できるようにしたカメラ受光位置
補正用標板およびカメラ位置補正装置ならびに外観欠陥
検査装置を提供することにある。An object of the present invention is to provide a camera light-receiving position correcting reference plate, a camera position correcting device, and an appearance defect inspection device capable of detecting a defect on the surface of a photoconductor with high contrast.
【００１０】[0010]
【課題を解決するための手段】前記目的を達成するた
め、本発明のカメラ受光位置補正用標板は、積層型電子
写真感光体に照明装置から所定角度で光を照射し、この
照射された感光体面を撮像カメラによって法線方向から
撮像する画像処理方式の検査装置に用いられるカメラ受
光位置補正用標板において、表面突起を有する透光性光
沢表面層を、表面に格子パターンを有する拡散反射面上
に設けたことを特徴とする。In order to achieve the above-mentioned object, the camera light-receiving position correcting chart of the present invention irradiates a laminated electrophotographic photosensitive member with light from a lighting device at a predetermined angle and is irradiated with the light. In a camera light-receiving position correction chart used in an image processing type inspection device that images the surface of a photoconductor from the normal direction with an imaging camera, a translucent gloss surface layer with surface protrusions and diffuse reflection with a lattice pattern on the surface It is characterized by being provided on the surface.
【００１１】また前記表面における20°対比光沢度が0.
7〜0.8であることを特徴とする。Further, the 20 ° relative glossiness on the surface is 0.
It is characterized by being 7 to 0.8.
【００１２】また本発明のカメラ位置補正装置は、積層
型電子写真感光体に照明装置から所定角度で光を照射
し、この照射された感光体面を撮像カメラによって法線
方向から撮像する画像処理方式の検査装置に用いられる
カメラ位置補正装置において、表面突起を有する透光性
光沢表面層を、表面に格子パターンを有する拡散反射面
上に設けてなるカメラ受光位置補正用標板を検査対象で
ある前記感光***置に設け、このカメラ受光位置補正用
標板と前記照明装置との光路中に光調整板を設けたこと
を特徴とする。Further, the camera position correcting apparatus of the present invention is an image processing system in which a laminated electrophotographic photosensitive member is irradiated with light from an illuminating device at a predetermined angle, and the surface of the irradiated photosensitive member is imaged in a normal direction by an imaging camera. In the camera position correction device used in the inspection device, the inspection target is a camera light-reception position correction reference plate having a translucent glossy surface layer having surface protrusions on a diffuse reflection surface having a lattice pattern on the surface. A light adjusting plate is provided at the position of the photoconductor, and a light adjusting plate is provided in the optical path between the camera light receiving position correcting reference plate and the illumination device.
【００１３】また前記光調整板が遮光板であることを特
徴とする。Further, the light adjusting plate is a light shielding plate.
【００１４】また前記遮光板によって、照明装置である
ライン状照明体の輝線を40〜60％遮光することを特徴と
する。Further, it is characterized in that the light-shielding plate shields 40 to 60% of the bright line of the linear illuminating body which is the illuminating device.
【００１５】また前記光調整板が拡散板であり、その透
過率が50〜75％であることを特徴とする。Further, the light adjusting plate is a diffusion plate, and the transmittance thereof is 50 to 75%.
【００１６】また前記光調整板が、照明装置の光出射端
部に設けられたコリメートレンズ系と、前記カメラ受光
位置補正用標板と前記照明装置との間に設けられた拡散
板とであることを特徴とする。Further, the light adjusting plate is a collimating lens system provided at a light emitting end of the illuminating device, and a diffuser plate provided between the camera light receiving position correcting reference plate and the illuminating device. It is characterized by
【００１７】また本発明の外観欠陥検査装置は、積層型
電子写真感光体に照明装置から所定角度で光を照射し、
この照射された感光体面を撮像カメラによって法線方向
から撮像し、撮像部分の光学的変化を捕らえて欠陥凹凸
を検出する外観欠陥検査装置において、少なくとも表面
層と内部層とを備えた前記積層型電子写真感光体と前記
照明装置との光路中に光調整板を設けたことを特徴とす
る。In the appearance defect inspection apparatus of the present invention, the laminated electrophotographic photosensitive member is irradiated with light from the illumination device at a predetermined angle,
In the appearance defect inspecting apparatus for imaging the irradiated photoconductor surface from the normal direction by an imaging camera to detect the optical unevenness of the imaging part to detect defect irregularities, the laminated type having at least a surface layer and an internal layer. A light adjusting plate is provided in the optical path between the electrophotographic photosensitive member and the illuminating device.
【００１８】また前記光調整板が遮光板であることを特
徴とする。Further, the light adjusting plate is a light shielding plate.
【００１９】また前記遮光板によって、照明装置である
ライン状照明体の輝線を40〜60％遮光することを特徴と
する。Further, it is characterized in that the light-shielding plate shields 40 to 60% of the bright line of the linear illuminating body which is the illuminating device.
【００２０】また前記光調整板が拡散板であり、その透
過率が50〜75％であることを特徴とする。Further, the light adjusting plate is a diffusion plate, and its transmittance is 50 to 75%.
【００２１】また前記光調整板が、照明装置の光出射端
部に設けられたコリメートレンズ系と、前記カメラ受光
位置補正用標板と前記照明装置との間に設けられた拡散
板とであることを特徴とする。Further, the light adjusting plate is a collimating lens system provided at a light emitting end of the illuminating device, and a diffusion plate provided between the camera light receiving position correcting reference plate and the illuminating device. It is characterized by
【００２２】[0022]
【作用】前記構成の本発明に係るカメラ受光位置補正用
標板およびカメラ位置補正装置によれば、光沢面，拡散
面という２種の光学的特異性を持つ層を積層し、拡散面
には格子線を、また表面の光沢面には疑似欠陥である突
起を設けることで、同一の標板を用いて感光体表面に対
応した欠陥受光状態が確認され、この状態に基づいてカ
メラ受光位置を補正する。前記標板表面の20°対比光沢
度を0.7〜0.8とすることにより、より良好な狭い検出位
置を決めることが可能となる。According to the camera light-receiving position correcting reference plate and the camera position correcting device of the present invention having the above-mentioned structure, two layers having optical peculiarities, that is, a glossy surface and a diffusing surface are laminated, and the diffusing surface has By providing grid lines and projections that are pseudo defects on the glossy surface, the defect light receiving state corresponding to the photoconductor surface can be confirmed using the same standard plate, and the camera light receiving position can be determined based on this state. to correct. By setting the 20 ° relative glossiness of the surface of the plate to 0.7 to 0.8, it is possible to determine a better narrow detection position.
【００２３】本発明に係るカメラ位置補正装置および外
観欠陥検査装置では、光調整板を用いることにより、光
調整板が遮光板である場合は、最も強い正反射成分とな
るライトガイド輝線を40〜60％隠す位置への調整が行わ
れ、また拡散板である場合は、入射した光のかなりのも
のが散乱せず直進する部分的正反射成分の入射設定、お
よび突起への部分的な光の入射角をランダマイズし、ま
た光調整板がコリメートレンズ系と拡散板の組み合わせ
である場合は、入射した光の多くのものが直進できるよ
うにライン状照明装置の出射端に直進指向性を高めるコ
リメートレンズ系を設け、突起への部分的な光の入射角
をランダマイズすることで、凹凸撮像，欠陥撮像のため
の最適の投射光分布が得られ、標板，検査対象の撮像能
力を持たせることが可能となる。In the camera position correcting apparatus and the visual defect inspection apparatus according to the present invention, by using the light adjusting plate, when the light adjusting plate is the light shielding plate, the light guide bright line which is the strongest specular reflection component is 40 to 40. If the position is adjusted to 60% concealment, and if it is a diffuser plate, the incident setting of the partial specular reflection component in which a large part of the incident light goes straight without being scattered, and the partial light When the incident angle is randomized and the light adjusting plate is a combination of a collimating lens system and a diffusing plate, a collimator that enhances the directivity of directivity to the exit end of the linear illumination device so that most of the incident light can proceed straight By providing a lens system and randomizing the incident angle of partial light on the protrusions, the optimum projection light distribution for uneven image pickup and defect image pickup can be obtained, and the image pickup ability of the standard plate and the inspection object should be provided. But It becomes possible.
【００２４】[0024]
【実施例】以下、本発明の実施例を図面に基づいて説明
する。Embodiments of the present invention will be described below with reference to the drawings.
【００２５】図１は本発明に係る標板の一実施例の斜視
図、図２は本実施例の要部の断面図であり、アルミ板の
基板１の上に白地の拡散層(内部層)２が設けられ、この
拡散層２の表面には所定間隔で黒パターンからなる格子
線３が形成されている。FIG. 1 is a perspective view of an embodiment of a marking plate according to the present invention, and FIG. 2 is a cross-sectional view of the essential part of this embodiment, in which a white diffusion layer (inner layer) is formed on an aluminum plate substrate 1. ) 2 are provided, and the lattice lines 3 made of a black pattern are formed on the surface of the diffusion layer 2 at predetermined intervals.
【００２６】また、拡散層２の白地は、酸化チタンフィ
ラーによって完全拡散面を構成しており、格子線３は見
た目上、艶消し黒となっている。なお、拡散層２は、白
地でなくても有色であってもよい。Further, the white background of the diffusion layer 2 constitutes a perfect diffusion surface by the titanium oxide filler, and the lattice lines 3 appear matte black in appearance. The diffusion layer 2 may be colored or not white.
【００２７】拡散層２の上面には、透光性光沢面を有す
る表面層４が設けられており、その表面には格子線３と
重ならないように、所定間隔で疑似突起欠陥である突起
５が形成されている。A surface layer 4 having a translucent glossy surface is provided on the upper surface of the diffusion layer 2, and projections 5 which are pseudo projection defects are formed at predetermined intervals so as not to overlap the lattice lines 3 on the surface. Are formed.
【００２８】なお、突起５の幅は200μm、格子線３の間
隔は10mmとし、受光信号を識別できるようにしてある。
格子線３は矩形状でなくてもよく、また黒色でなくても
よい。The width of the protrusion 5 is 200 μm and the interval between the grid lines 3 is 10 mm so that the received light signal can be identified.
The grid lines 3 do not have to be rectangular and need not be black.
【００２９】ここで、標板の各構成材料について説明す
る。Here, each constituent material of the standard plate will be described.
【００３０】前記拡散層の内部層２は、光拡散性を有す
る酸化チタン粒子を含むもので、酸化チタンとしては屈
折率が大きく、化学的にも物理的にも安定であり、白色
度の大きなものが望ましい。酸化チタンには、ルチル
型，アナタース型があるが、このいずれも使用できる。The inner layer 2 of the diffusion layer contains titanium oxide particles having a light diffusing property, and has a large refractive index as titanium oxide, is chemically and physically stable, and has a large whiteness. Things are desirable. Titanium oxide includes rutile type and anatase type, and both of them can be used.
【００３１】結着剤樹脂としては、その上にさらに透光
性を有する表面層４を積層することを考慮すると、一般
の有機溶剤に対して耐溶剤性の高い樹脂が好ましい。水
溶性樹脂，アルコール可溶性樹脂，硬化性樹脂を用いる
ことができる。The binder resin is preferably a resin having a high solvent resistance to general organic solvents, considering that a surface layer 4 having a light-transmitting property is further laminated thereon. Water-soluble resin, alcohol-soluble resin, and curable resin can be used.
【００３２】感光層が電荷発生層の上に透明な電荷輸送
層を積層せしめた感光体の場合、検査光が電荷輸送層表
面で反射すると共に、入射光の一部は屈折して層中に入
り電荷発生層の表面で反射して屈折して外部へ出ること
になる。このような層構成の場合、内部欠陥と共に電荷
輸送層表面の凹凸とをそれぞれを区別して検出するため
の位置範囲は狭いものとなる。When the photosensitive layer is a photoreceptor having a transparent charge transport layer laminated on the charge generation layer, the inspection light is reflected on the surface of the charge transport layer and at the same time, a part of the incident light is refracted into the layer. It is reflected by the surface of the incoming charge generation layer, refracted, and goes out. In the case of such a layer structure, the position range for separately detecting the internal defects and the irregularities on the surface of the charge transport layer is narrow.
【００３３】その狭い位置を決めるためには、標板の表
面層４における20°対比光沢度を0.7〜0.8とすることに
より可能となる。The narrow position can be determined by setting the 20 ° relative glossiness in the surface layer 4 of the standard plate to 0.7 to 0.8.
【００３４】20°対比光沢度とは、入射角20°としたと
き、反射角０°における光束Ｉ0と、正反射位置(反射角
20°)における光束Ｉ20との比Ｉ0／Ｉ20を表す。The 20 ° contrast glossiness means the luminous flux I 0 at a reflection angle of 0 ° and the specular reflection position (reflection angle when the incident angle is 20 °).
The ratio I 0 / I 20 to the luminous flux I 20 at 20 ° is shown.
【００３５】この値は、内部層２に含まれるフィラーの
粒径および含有量によって制御することができる。This value can be controlled by the particle size and content of the filler contained in the inner layer 2.
【００３６】本実施例では、結着剤樹脂としてオイルフ
リーアルキッド樹脂ベッコライトＭ6401(大日本インキ
化学(株)製)とメラミン樹脂スーパーベッカミンＧ−821
(大日本インク化学(株)製)、酸化チタンとしてＴＡ−30
0(富士チタン(株)製)を使用して、400×200mmアルミ基
板上に厚さ２μmの内部層２を形成した。In this example, as a binder resin, oil-free alkyd resin Beckolite M6401 (manufactured by Dainippon Ink and Chemicals, Inc.) and melamine resin Super Beckamine G-821 were used.
(Manufactured by Dainippon Ink and Chemicals, Inc.), TA-30 as titanium oxide
0 (manufactured by Fuji Titanium Co., Ltd.) was used to form an inner layer 2 having a thickness of 2 μm on a 400 × 200 mm aluminum substrate.
【００３７】その後、内部層２の表面に格子線３を描
き、次にポリカーボネート樹脂パンライトＣ−1400(帝
人化成(株)製)を用いて、厚さ20μmの透光性を有する表
面層４と突起５を形成した。表面層４としては成膜性の
ある樹脂、例えばポリエステル，ポリカーボネート，ポ
リスチレン等を用い、これを内部層２の表面に10〜30μ
m程度成膜させればよい。Thereafter, a grid line 3 is drawn on the surface of the inner layer 2, and then a polycarbonate resin Panlite C-1400 (manufactured by Teijin Kasei Co., Ltd.) is used to form a light-transmitting surface layer 4 having a thickness of 20 μm. And projections 5 were formed. As the surface layer 4, a resin having film-forming property, such as polyester, polycarbonate, polystyrene or the like is used.
The film may be formed by about m.
【００３８】図３は検査装置における光照明装置と標板
の位置関係を示す説明図であり、７は検査時のドラムワ
ーク位置、８はシート状または板状の図１，図２にて説
明した標板、９はライン状照明装置、10は受光装置であ
る１次元ＣＣＤカメラ、11はランプハウスである。FIG. 3 is an explanatory view showing a positional relationship between the light illuminating device and the standard plate in the inspection device, 7 is a drum work position at the time of inspection, 8 is a sheet or plate shape and is described with reference to FIGS. A reference plate, 9 is a linear illumination device, 10 is a one-dimensional CCD camera as a light receiving device, and 11 is a lamp house.
【００３９】図４，図５，図６は光の反射の様子を示す
模式図であり、これらの各図において、12は入射光、13
はカメラ受光光軸、14〜16は各反射成分を示す。FIGS. 4, 5 and 6 are schematic diagrams showing how light is reflected. In each of these figures, 12 is incident light and 13 is
Is the optical axis of the light received by the camera, and 14 to 16 are the respective reflection components.
【００４０】標板８では、まず表面層４の突起５によっ
て(散乱光成分＋正反射成分)の相乗された反射成分14が
生成され(図４)、さらに表面層４を通過した光は、拡散
層２において、格子線３に沿った拡散選択反射成分15を
生成する(図５)。この２つの光の成分が相乗されたもの
が塗膜外部へ反射成分16となって出ていき(図６)、前記
１次元ＣＣＤカメラ10で受光され、信号処理システムへ
と信号が送り出されることになる。In the marking plate 8, first, the projections 5 of the surface layer 4 generate a reflection component 14 which is a synergistic (scattered light component + regular reflection component) (FIG. 4), and the light passing through the surface layer 4 is In the diffusion layer 2, the diffuse selective reflection component 15 along the grid line 3 is generated (FIG. 5). The synergistic effect of these two light components emerges as a reflection component 16 to the outside of the coating film (Fig. 6), is received by the one-dimensional CCD camera 10 and sends a signal to the signal processing system. become.
【００４１】また、前記信号処理システムは、標板８か
らの反射光を受光して得られる波形データにより、突起
５，格子線３の特徴量を計測して、カメラ位置の妥当性
を確認するためのもので、図７に例示する１次元ＣＣＤ
カメラ10および信号処理装置17と、図３に例示する補正
用の標板８，ライン状照明装置９とからなる。Further, the signal processing system measures the characteristic quantities of the projections 5 and the grid lines 3 by the waveform data obtained by receiving the reflected light from the reference plate 8 to confirm the validity of the camera position. The one-dimensional CCD illustrated in FIG.
It includes a camera 10 and a signal processing device 17, a correction reference plate 8 and a line illumination device 9 illustrated in FIG.
【００４２】受光装置である１次元ＣＣＤカメラ10は、
適当な照明下で格子線３および突起５の反射光を受光し
て、受光信号を信号処理装置17へ出力する。The one-dimensional CCD camera 10 which is a light receiving device,
The reflected light of the grid lines 3 and the projections 5 is received under appropriate illumination, and the received light signal is output to the signal processing device 17.
【００４３】信号処理装置17は、Ａ／Ｄ(アナログ／デ
ジタル信号)変換器18，ＣＰＵ19などで構成される。Ａ
／Ｄ変換器18では、１次元ＣＣＤカメラ10より入力した
アナログ信号をデジタル信号に変換し、ＣＰＵ19では、
入力された波形信号に、平滑化，微分演算，ＦＦＴ等の
信号処理を施し、波形信号を定量化し、モニタ部20へ出
力する。The signal processing device 17 is composed of an A / D (analog / digital signal) converter 18, a CPU 19, and the like. A
The / D converter 18 converts the analog signal input from the one-dimensional CCD camera 10 into a digital signal, and the CPU 19
The inputted waveform signal is subjected to signal processing such as smoothing, differential calculation, FFT, etc. to quantify the waveform signal and output to the monitor unit 20.
【００４４】図９は標板８を撮像して得られた信号波形
であり、21は突起５の検知信号、22は格子線３の検知信
号である。今、突起５の反射光を受光していないとする
とき、標板８の受光信号は図10において23で示されるよ
うな信号波形となる。FIG. 9 shows signal waveforms obtained by picking up an image of the reference plate 8, 21 is a detection signal of the projections 5, and 22 is a detection signal of the lattice lines 3. Now, assuming that the reflected light of the protrusion 5 is not received, the received light signal of the reference plate 8 has a signal waveform as shown by 23 in FIG.
【００４５】図８は信号処理のフローチャートであり、
ＣＰＵ19では、入力信号(Ｓ1)に対してＡ／Ｄ変換後(Ｓ
2)、高周波ノイズ処理(平滑化処理)(Ｓ3)を行った後、
１階時間微分を行う(Ｓ4)。微分され強調処理された波
形は、この後、単純にＣＰＵ19内で判定のための閾値と
比較されてもよいが、突起５の前記検知信号21の出現周
期で定量化を行った場合の方が補正の精度が向上するこ
とにより、高速フーリェ変換ないしは最大エントロピ法
といった周波数解析処理を施し(Ｓ5)、周波数とパワー
スペクトルで波形の特徴を特定する(Ｓ6)。その後、Ｃ
ＰＵ19で判定のための管理パラメータと比較し(Ｓ7)、
その結果をモニタ部20に表示する。FIG. 8 is a flow chart of signal processing.
In the CPU 19, the input signal (S1) is A / D converted (S
2), after performing high frequency noise processing (smoothing processing) (S3),
First-order time differentiation is performed (S4). The differentiated and emphasized waveform may be simply compared with a threshold for determination in the CPU 19 after that, but the quantification is performed in the appearance cycle of the detection signal 21 of the protrusion 5. As the accuracy of the correction is improved, frequency analysis processing such as fast Fourier transform or maximum entropy method is performed (S5), and the characteristics of the waveform are specified by the frequency and power spectrum (S6). Then C
PU19 compares with the management parameter for judgment (S7),
The result is displayed on the monitor unit 20.
【００４６】以上のごとく出力波形が管理パラメータと
一致しているかどうか、毎日または毎週のごとくカメラ
受光位置を手順書に従い調整する。その後、撮像系の校
正が済めば標板８の代わりに被検査物である積層型電子
写真感光体を検査装置に装着することになる。As described above, whether or not the output waveform matches the control parameter, the camera light receiving position is adjusted daily or weekly according to the procedure manual. After that, when the calibration of the image pickup system is completed, the laminated electrophotographic photosensitive member as the inspection object is mounted in the inspection device instead of the standard plate 8.
【００４７】本実施例によれば、前記標板８を用い表面
層４と内部層２からの受光信号を信号処理することによ
りカメラ受光位置確認を行うので、従来のような煩雑，
熟練を要する等の問題が解消されるばかりでなく、作業
効率が上がるという効果を奏する。さらに検査作業員が
目視でカメラファインダを覗いて補正をしたり、動的に
撮像画像を取得して欠陥受光状態を確認することが不要
となる。According to the present embodiment, since the camera light receiving position is confirmed by performing signal processing on the light receiving signals from the surface layer 4 and the inner layer 2 by using the standard plate 8, the complicatedness as in the conventional case,
This not only solves the problem of requiring skill, but also improves work efficiency. Further, it becomes unnecessary for the inspection worker to visually look through the camera finder to make a correction or to dynamically acquire a picked-up image to check the defect light receiving state.
【００４８】本発明に係る外観欠陥検査装置の基本的構
成としては、既に説明したが、図11に示すように、表面
層24，内部層25，ベース26からなる被検査物(積層型電
子写真感光体)Ｍの表面に光(入射光12の光軸のみを示
す)を照射するライン状照明装置９と、被検査物Ｍの表
面の光照射領域からの反射光を受光する１次元ＣＣＤカ
メラ(カメラ受光光軸13)10を有し、この１次元ＣＣＤカ
メラ10に受光された光照射領域からの取得画像を処理
し、外観欠陥を検出するものである。前記表面層24の透
明な突起欠陥による反射光情報をも画像として扱う本検
査装置では、表面層24での部分正反射となる散乱光を取
得可能な光学系を構成させ、１次元ＣＣＤカメラ10へ最
もピントの合った像を形成させることが必要となる。Although the basic structure of the appearance defect inspection apparatus according to the present invention has already been described, as shown in FIG. 11, the object to be inspected including the surface layer 24, the inner layer 25, and the base 26 (laminated electrophotography A line-shaped illuminating device 9 for irradiating the surface of the (photoreceptor) M with light (only the optical axis of the incident light 12 is shown), and a one-dimensional CCD camera for receiving reflected light from the light irradiation area on the surface of the inspection object M. The (camera light receiving optical axis 13) 10 is provided, and the acquired image from the light irradiation area received by the one-dimensional CCD camera 10 is processed to detect an appearance defect. In the present inspection apparatus which also treats the reflected light information due to the transparent protrusion defect of the surface layer 24 as an image, an optical system capable of acquiring scattered light which is partially specularly reflected on the surface layer 24 is formed. It is necessary to form the most focused image.
【００４９】以下に、表面層突起散乱光を受光すること
について説明する。The reception of the surface layer projection scattered light will be described below.
【００５０】図11のように配設されたカメラ受光光軸13
上に存在する反射面と１次元ＣＣＤカメラ10を考えた場
合、散乱光や正反射光成分(正反射光)31を撮る必要のな
い理想的な斜方照明方式・拡散反射光受光方式(内部欠
陥反射光受光のみ)の場合であれば、幾何学的には１次
元ＣＣＤカメラ10はカメラ受光光軸13に直交する形で配
設すればよく、特に必要がなければ後述する光調整板を
配置する必要もない。図11において、30は拡散反射光成
分(拡散反射光)である。A camera light receiving optical axis 13 arranged as shown in FIG.
Considering the reflective surface above and the one-dimensional CCD camera 10, it is not necessary to take scattered light or specular reflection light component (specular reflection light) 31. In the case of (only receiving the defect reflected light), geometrically, the one-dimensional CCD camera 10 may be arranged so as to be orthogonal to the camera light receiving optical axis 13. There is no need to place it. In FIG. 11, reference numeral 30 denotes a diffuse reflection light component (diffuse reflection light).
【００５１】しかし、被検査物Ｍの場合は図12〜図14に
示す通り、表面層24の突起欠陥32を検出しなければなら
ず、このため図11のセオリー通りの光学系では突起での
反射成分がカメラ側で取り込めず、これらの突起欠陥32
を撮像できなくなってしまう。However, in the case of the inspection object M, as shown in FIGS. 12 to 14, it is necessary to detect the protrusion defect 32 of the surface layer 24. Therefore, in the theory system of FIG. The reflection component cannot be captured by the camera, and these protrusion defects 32
Cannot be imaged.
【００５２】また、この問題を解決するために、斜方照
明において照射角を小さくし正反射光成分31を、１次元
ＣＣＤカメラ10側に多く取り込むようライン状照明装置
９を配設することが考えられるが、この場合、高輝度の
正反射光成分が増加することにより取得画像全体のコン
トラストが低下し(画像の白色化)、却って欠陥の撮像が
困難となる(図17参照)。Further, in order to solve this problem, it is possible to arrange the line-shaped illumination device 9 so that the irradiation angle in the oblique illumination is reduced and the specular reflection light component 31 is taken in much to the one-dimensional CCD camera 10 side. It is conceivable that in this case, since the high-brightness specularly reflected light component increases, the contrast of the entire acquired image decreases (whitening of the image), making it difficult to image the defect (see FIG. 17).
【００５３】以上の考え方から、被検査物Ｍの表面層2
4，内部層25の外観検査に用いる検査光学系について様
々な調査を行った。From the above concept, the surface layer 2 of the inspection object M is
4. Various investigations were conducted on the inspection optical system used for the visual inspection of the inner layer 25.
【００５４】その結果、投射光の空間強度分布を調整す
る下記のような光調整板を、被検査物Ｍとライン状照明
装置９との間に配置させたことにより、表面層24，内部
層25双方の欠陥が高いコントラストで撮像できることが
確認された。As a result, by disposing the following light adjusting plate for adjusting the spatial intensity distribution of the projected light between the inspection object M and the line-shaped illuminating device 9, the surface layer 24 and the inner layer It was confirmed that both defects could be imaged with high contrast.
【００５５】例えば、最も表面層24の突起欠陥32の光情
報を含んでいる位置を最適光学系とすると、それは図12
〜図14に示す光学系配設図ということになる。この場
合、ライン状照明装置９の入射角は、正反射光成分を多
めに取り込むため、θ＝20deg.と小さくしてある。For example, if the position containing the optical information of the protrusion defect 32 of the surface layer 24 is the optimum optical system, it is as shown in FIG.
This is the optical system layout diagram shown in FIG. In this case, the incident angle of the linear illuminating device 9 is set to a small value of θ = 20 deg. Because the specular reflection light component is taken in a little.
【００５６】次に前記光調整板の具体例について説明す
る。Next, a specific example of the light adjusting plate will be described.
【００５７】上述の光技術による表面検査技術を、被検
査物Ｍの欠陥検査に応用する場合、図12に示すように表
面層24，内部層25の反射指向性を利用し(図15，図16)、
この被検査物Ｍにライン状照明装置９の光12を照射し
て、この光照射領域からの反射光を１次元ＣＣＤカメラ
10により受光する装置が考えられる。図15，図16におい
て、29は散乱光成分(散乱光)である。When the above-described optical surface inspection technique is applied to the defect inspection of the object M to be inspected, the reflection directivity of the surface layer 24 and the inner layer 25 is utilized as shown in FIG. 12 (FIG. 15, FIG. 16),
This inspection object M is irradiated with the light 12 of the line-shaped illumination device 9, and the reflected light from this light irradiation area is one-dimensional CCD camera.
A device that receives light by 10 is conceivable. In FIGS. 15 and 16, 29 is a scattered light component (scattered light).
【００５８】この装置では、１次元ＣＣＤカメラ10で作
成される表面積24の突起欠陥撮像画像は、表面層24の光
照射領域から反射した光輝性の強い反射光が部分的にカ
メラ視野内に入り、高輝度の散乱光像となって捕らえら
れる。In this apparatus, in the projection defect imaged on the surface area 24 created by the one-dimensional CCD camera 10, the reflected light having a strong brilliance reflected from the light irradiation area of the surface layer 24 partially enters the field of view of the camera. , Captured as a high-intensity scattered light image.
【００５９】この場合、表面層24の正反射成分を多く取
り込めるようにするため、フレネルの法則に従い、ライ
ン状照明装置の入射角度は浅く(＝20deg.)設定してあ
る。In this case, in order to take in a large amount of regular reflection components of the surface layer 24, the incident angle of the linear illuminator is set to be shallow (= 20 deg.) According to Fresnel's law.
【００６０】また、被検査物Ｍの表面層24からの突起欠
陥32による散乱光29と、内部層25からの拡散反射光成分
30(図15，図16参照)を同時に取り込む位置に配設された
１次元ＣＣＤカメラ10と、ライン状照明装置９と、光調
整板であるライン状照明の反射輝線を40〜60％だけ遮る
位置に配設された遮光板27(図12)、もしくは透過率50〜
75％の拡散板28(図13)、もしくはコリメートレンズ系33
＋拡散板28(図14)を備えている。The scattered light 29 due to the projection defect 32 from the surface layer 24 of the inspection object M and the diffuse reflection light component from the inner layer 25
The one-dimensional CCD camera 10 arranged at a position where 30 (see FIG. 15 and FIG. 16) are simultaneously taken in, the line-shaped illumination device 9, and the reflection bright line of the line-shaped illumination which is the light adjusting plate is blocked by 40 to 60%. Light shield plate 27 (Fig. 12) placed at a position, or transmittance 50-
75% diffuser 28 (Fig. 13) or collimating lens system 33
+ A diffusion plate 28 (Fig. 14) is provided.
【００６１】このとき、撮像光学系は、表面層24での正
反射光成分31を多分に取り込んでいるので、前記光調整
板がない場合、内部層25の欠陥情報を蓄えた拡散反射光
成分30が正反射光成分31の中に埋没してしまい、内部欠
陥信号のＳＮ比が低下してしまう(図17参照)。しかし、
前記光調整板をライン状照明装置９と被検査物Ｍとの間
に配置してやれば、全ての傾角を持った突起欠陥32およ
び内部層欠陥の反射光を取り込むことができるようにな
るばかりでなく、正反射光成分31と拡散反射光成分30の
反射信号比がほぼ等しくなり、良好な画像が取得できる
ようになる(図18参照)。このとき、前記光調整板を介し
て照明された被検査物Ｍの照明領域を１次元ＣＣＤカメ
ラ10で撮像すると、撮像面の照明領域の画像信号が出力
される。その際、表面層24に突起欠陥32があると、拡散
光入射が突起欠陥32の傾角に応じて反射し、そのうち１
次元ＣＣＤカメラ10のレンズ開口部へ向かう散乱光29が
集光され、欠陥画像が結像される。At this time, since the image pickup optical system takes in much of the specular reflection light component 31 in the surface layer 24, if there is no light adjusting plate, the diffuse reflection light component in which the defect information of the inner layer 25 is stored. The 30 is buried in the specular reflection light component 31, and the SN ratio of the internal defect signal is lowered (see FIG. 17). But,
If the light adjusting plate is arranged between the line-shaped illuminating device 9 and the inspection object M, not only the reflected light of the projection defect 32 and the internal layer defect having all inclination angles can be taken in, but also The reflection signal ratios of the specular reflection light component 31 and the diffuse reflection light component 30 become substantially equal, and a good image can be acquired (see FIG. 18). At this time, when the one-dimensional CCD camera 10 captures an image of the illumination area of the inspection object M illuminated through the light adjusting plate, an image signal of the illumination area of the imaging surface is output. At that time, if the surface layer 24 has a protrusion defect 32, the diffused light incident is reflected according to the inclination angle of the protrusion defect 32, and
The scattered light 29 heading for the lens opening of the three-dimensional CCD camera 10 is collected and a defect image is formed.
【００６２】図12に示すように、光調整板として遮光板
27を備えた場合、この遮光板27は撮像領域外の遮光およ
びライトガイド輝線遮蔽のためストレートエッジを有し
ており、遮光板27は輝線に対する倒れも矯正されてい
る。配設位置の微調整は、１次元ＣＣＤカメラ10からの
アナログ出力を、オシロスコープで観察しながら行われ
る。遮光板27によって表面層24での正反射成分31のパワ
ーを50％に抑制すれば、正反射光成分31と拡散反射光成
分30の反射信号比がほぼ等しくなり、良好な画像が取得
できるようになる(図18参照)。この最も強い正反射光成
分となるライトガイド輝線を遮光する比率は、40〜60％
を満足するものが好ましい。As shown in FIG. 12, a light shielding plate as a light adjusting plate
In the case where the light shielding plate 27 is provided, the light shielding plate 27 has a straight edge for light shielding outside the image pickup area and light guide bright line shielding, and the light shielding plate 27 is also corrected for a fall to the bright line. The fine adjustment of the arrangement position is performed while observing the analog output from the one-dimensional CCD camera 10 with an oscilloscope. If the power of the specular reflection component 31 on the surface layer 24 is suppressed to 50% by the light shielding plate 27, the reflection signal ratios of the specular reflection light component 31 and the diffuse reflection light component 30 become substantially equal, and a good image can be obtained. (See Figure 18). The ratio of blocking the light guide bright line, which is the strongest specular reflection light component, is 40 to 60%.
Those satisfying are preferred.
【００６３】図13に示すように光調整板として拡散板28
(本実施例では、アクリライトNo.422,432 (三菱レイヨ
ン(株)製))を備えた場合、最も強い正反射成分となるラ
イトガイド輝線等を拡散する拡散板28の透過率は、50〜
75％を満足するものが好ましく、それ以上でも以下でも
欠陥の撮像能力に影響を及ぼす。As shown in FIG. 13, a diffusing plate 28 is used as a light adjusting plate.
(In this embodiment, Acrylite No. 422,432 (manufactured by Mitsubishi Rayon Co., Ltd.)), the transmittance of the diffuser plate 28 for diffusing the light guide bright lines and the like, which is the strongest specular reflection component, is 50 ~.
Those satisfying 75% are preferable, and more or less than that affect the imaging ability of defects.
【００６４】図14に示すようにコリメートレンズ系33＋
拡散板28を備えた場合、最も強い正反射成分となるライ
トガイド輝線等を拡散する拡散板28の透過率は、60％以
下でもよく一般照明用のものが使用できる(本実施例で
は、アクリライトNo.441,435(三菱レイヨン(株)製))。
これは、通常、拡散板を照明側に挿入する場合、表面層
欠陥(部分正反射光成分)を受光するため、入射した光の
かなりのものが散乱せずに直進する、透過率の高い(50
〜75％)拡散板が必要となるところを、コリメートレン
ズ系33で正反射光成分の指向性を高めている。本実施例
では、コリメートレンズとしてシリンドリカルレンズを
一対使用している。As shown in FIG. 14, the collimating lens system 33+
When the diffuser plate 28 is provided, the transmittance of the diffuser plate 28 for diffusing the light guide bright line or the like, which is the strongest specular reflection component, may be 60% or less, and that for general illumination can be used (in this embodiment, Light No. 441,435 (manufactured by Mitsubishi Rayon Co., Ltd.)).
This is because when a diffusion plate is inserted on the illumination side, a surface layer defect (partially specularly reflected light component) is received, so that a considerable amount of incident light goes straight without being scattered, and has high transmittance ( 50
Where the diffuser plate is required, the collimating lens system 33 enhances the directivity of the specular reflection light component. In this embodiment, a pair of cylindrical lenses are used as the collimating lens.
【００６５】ところで、突起欠陥32の散乱光成分29を１
次元ＣＣＤカメラ10が受光した場合、取得画像中には光
輝性の強い白色の点が撮像されることがあるが、この白
く写る突起欠陥画像を画像処理技術により識別すること
によって、突起欠陥32を検出することができる。By the way, the scattered light component 29 of the protrusion defect 32 is set to 1
When the three-dimensional CCD camera 10 receives light, a white spot having a strong glitter may be picked up in the acquired image. By distinguishing this white projection defect image by image processing technology, the projection defect 32 is detected. Can be detected.
【００６６】上述した光調整板を装着することによっ
て、未装着の場合に比べ、本来、正反射成分の中に埋没
してしまう内部層25の拡散反射光成分30もカメラ視野内
に到達させることができるので、内部拡散層の色ムラ，
微小欠陥等も同時に検出することが可能となり、同様
に、内部層欠陥も多階調の輝度変化として画像取得さ
れ、画像処理により欠陥が抽出される。By mounting the above-mentioned light adjusting plate, the diffuse reflection light component 30 of the inner layer 25, which is originally buried in the specular reflection component, can reach the camera visual field as compared with the case where it is not mounted. As a result, the uneven color of the internal diffusion layer,
It becomes possible to detect minute defects and the like at the same time, and similarly, images of internal layer defects are acquired as multi-gradation luminance changes, and defects are extracted by image processing.
【００６７】ただし、前記光調整板を含む光学系のアラ
イメント状態によっては、極端な場合には突起欠陥32の
散乱光成分29がカメラ視野から逸脱することになるの
で、オシロスコープを用いたアライメントには注意が必
要である。However, depending on the alignment state of the optical system including the light adjusting plate, in an extreme case, the scattered light component 29 of the projection defect 32 deviates from the camera view field. Caution must be taken.
【００６８】上述した外観欠陥検査装置において用いら
れた、投射光の空間強度分布を調整する光調整板は、前
記標板８を用いたカメラ位置補正の際にも用いられて効
果がある。The light adjusting plate used in the above-described appearance defect inspection apparatus for adjusting the spatial intensity distribution of the projected light is also effective when used for the camera position correction using the standard plate 8.
【００６９】すなわち、具体的に図示はしないが、図12
〜図14における被検査物Ｍを図１，図２にて説明した標
板８に代えて、この標板８とライン状照明装置９との間
に、図12に基づいて説明した遮光板27，図13に基づいて
説明した拡散板28，図14に基づいて説明した拡散板28と
コリメートレンズ系33のいずれかを設置することで、標
板８における拡散層２の格子線３と、表面層４の突起５
とを高いコントラストで撮像できる。That is, although not specifically shown in FIG.
14 is replaced with the reference plate 8 described in FIGS. 1 and 2, and between the reference plate 8 and the line-shaped illumination device 9, the light shielding plate 27 described based on FIG. 12 is used. , The diffusion plate 28 described with reference to FIG. 13 and the diffusion plate 28 and the collimating lens system 33 described with reference to FIG. Protrusion 5 of layer 4
And can be imaged with high contrast.
【００７０】したがって、前記光調整板をカメラ位置補
正装置に利用することで、標板８からの反射光を１次元
ＣＣＤカメラ10にて受光して得られる波形データによる
突起５，格子線３の特徴量の計測が正確かつ確実に行
え、カメラ位置の妥当性の確認がより正確になされるこ
とになる。Therefore, by utilizing the light adjusting plate in the camera position correcting device, the reflected light from the reference plate 8 is received by the one-dimensional CCD camera 10, and the projections 5 and the grid lines 3 are formed by the waveform data obtained. The feature amount can be measured accurately and reliably, and the validity of the camera position can be confirmed more accurately.
【００７１】[0071]
【発明の効果】以上説明したように、本発明のカメラ受
光位置補正用標板は、請求項１記載の発明によれば、光
沢面，拡散面という２種の光学的特異性を持つ層を積層
し、拡散面には格子線を、また表面の光沢面には疑似欠
陥である突起を設けたので、同一の標板を用いて両層の
欠陥受光状態を確認でき、この確認状態にて感光体表面
の欠陥をコントラストよく撮像，検出できるように、微
妙なカメラ受光位置の補正を行うことが可能となる。As described above, according to the invention of claim 1, the camera light-receiving position correcting reference plate of the present invention comprises two layers having two optical peculiarities, a glossy surface and a diffusing surface. Laminated layers are provided with lattice lines on the diffusion surface and protrusions that are pseudo defects on the glossy surface, so the defect receiving state of both layers can be confirmed using the same standard plate. It is possible to make a delicate correction of the camera light receiving position so that a defect on the surface of the photoconductor can be imaged and detected with good contrast.
【００７２】請求項２記載の発明によれば、表面の20°
対比光沢度を0.7〜0.8とすることにより、より良好な狭
い検出位置を決めることが可能となる。According to the invention of claim 2, the surface of 20 °
By setting the contrast glossiness to 0.7 to 0.8, it becomes possible to determine a better narrow detection position.
【００７３】また本発明のカメラ位置補正装置は、請求
項３記載の発明によれば、請求項１記載のカメラ受光位
置補正用標板と照明装置との間に配置された光調整板を
用いることにより、投光成分が調整され、標板の拡散層
と表面層における格子線と突起とをコントラストよく撮
像，検出でき、より微妙に前記カメラ受光位置の補正が
可能となる。According to the invention described in claim 3, the camera position correcting device of the present invention uses the light adjusting plate arranged between the camera light receiving position correcting reference plate according to claim 1 and the illuminating device. As a result, the light projection component is adjusted, the lattice lines and the protrusions on the diffusion layer of the reference plate and the surface layer can be imaged and detected with good contrast, and the camera light receiving position can be corrected more delicately.
【００７４】請求項４記載の発明によれば、前記光調整
板として遮光板を用いることにより、投光成分が調整さ
れ、標板の拡散層と表面層における格子線と突起とをコ
ントラストよく撮像，検出でき、より微妙に前記カメラ
受光位置の補正が可能となる。According to the fourth aspect of the present invention, by using the light shielding plate as the light adjusting plate, the light projection component is adjusted and the diffusion lines of the reference plate and the lattice lines and the projections on the surface layer are imaged with good contrast. , Can be detected, and the camera light receiving position can be corrected more delicately.
【００７５】請求項５記載の発明によれば、前記遮光板
によってライン状照明の輝線を40〜60％遮光することに
より、投光成分が調整され、標板の拡散層と表面層にお
ける格子線と突起とをコントラストよく撮像，検出で
き、より微妙に前記カメラ受光位置の補正が可能とな
る。According to the fifth aspect of the present invention, the light-shielding plate shields the bright line of the linear illumination by 40 to 60% to adjust the light projection component, and the grid line in the diffusion layer and surface layer of the standard plate. The projection and the projection can be imaged and detected with good contrast, and the camera light receiving position can be more subtly corrected.
【００７６】請求項６記載の発明によれば、前記光調整
板として、透過率が50〜75％の拡散板を用いることによ
り、投光成分が調整され、標板の拡散層と表面層におけ
る格子線と突起とをコントラストよく撮像，検出でき、
より微妙に前記カメラ受光位置の補正が可能となる。According to the sixth aspect of the present invention, by using a diffusion plate having a transmittance of 50 to 75% as the light adjustment plate, the light projection component is adjusted and the diffusion layer and the surface layer of the standard plate are adjusted. The grid lines and protrusions can be imaged and detected with good contrast,
It is possible to more subtly correct the camera light receiving position.
【００７７】請求項７記載の発明によれば、前記光調整
板として照明装置の出射端にコリメートレンズ系を備
え、さらに請求項１記載のカメラ受光位置補正用標板と
照明装置との間に拡散板を配置させたことにより、投光
成分が調整され、標板の拡散層と表面層における格子線
と突起とをコントラストよく撮像，検出でき、より微妙
に前記カメラ受光位置の補正が可能となる。According to the invention described in claim 7, a collimating lens system is provided at the emission end of the illuminating device as the light adjusting plate, and further between the camera light receiving position correcting reference plate and the illuminating device according to claim 1. By arranging the diffuser plate, the light projection component is adjusted, and it is possible to image and detect the grid lines and protrusions on the diffuser layer of the mark plate and the surface layer with good contrast, and it is possible to more subtly correct the camera light receiving position. Become.
【００７８】また本発明の外観欠陥検査装置は、請求項
８記載の発明によれば、検査対象物と照明装置との間に
配置された光調整板を用いることにより、投光成分が調
整され、検査対象の表面層，内部層にあるほとんどの欠
陥の撮像が可能となる。According to the invention described in claim 8, the appearance defect inspection device of the present invention adjusts the light projection component by using the light adjusting plate arranged between the inspection object and the illumination device. It is possible to image most of the defects in the surface layer and the inner layer to be inspected.
【００７９】請求項９記載の発明によれば、前記光調整
板として、遮光板を用いることにより、投光成分が調整
され、検査対象の表面層，内部層にあるほとんどの欠陥
の撮像が可能となる。According to the invention described in claim 9, by using a light-shielding plate as the light adjusting plate, the light projection component is adjusted, and it is possible to image most of the defects in the surface layer and the inner layer to be inspected. Becomes
【００８０】請求項10記載の発明によれば、前記遮光板
によってライン状照明の輝線を40〜60％遮光することに
より、投光成分が調整され、検査対象の表面層，内部層
にあるほとんどの欠陥の撮像が可能となる。According to the tenth aspect of the present invention, the light-shielding plate shields 40 to 60% of the bright line of the linear illumination, so that the light-emission component is adjusted, and most of the light-exposed components are present in the surface layer and the inner layer to be inspected. It is possible to image the defect.
【００８１】請求項11記載の発明によれば、前記光調整
板として、透過率が50〜75％の拡散板を用いることによ
り、投光成分が調整され、検査対象の表面層，内部層に
あるほとんどの欠陥の撮像が可能となる。According to the eleventh aspect of the present invention, by using a diffusion plate having a transmittance of 50 to 75% as the light adjusting plate, the light projection component is adjusted, and the surface layer and the inner layer to be inspected are adjusted. Imaging of most defects is possible.
【００８２】請求項12記載の発明によれば、前記光調整
板として、照明装置の出射端にコリメートレンズ系を備
え、さらに検査対象と照明装置との間に拡散板を配置さ
せたことにより、投光成分が調整され、検査対象の表面
層，内部層にあるほとんどの欠陥の撮像が可能となる。According to the twelfth aspect of the present invention, as the light adjusting plate, a collimating lens system is provided at the emission end of the illuminating device, and a diffusion plate is arranged between the inspection target and the illuminating device. The light emission component is adjusted, and it becomes possible to image most defects in the surface layer and the inner layer of the inspection target.
【図１】本発明のカメラ受光位置補正用標板の一実施例
の斜視図である。FIG. 1 is a perspective view of an embodiment of a camera light-receiving position correcting chart plate of the present invention.
【図２】本発明の一実施例のカメラ受光位置補正用標板
の要部の断面図である。FIG. 2 is a cross-sectional view of a main part of a camera light-receiving position correcting reference plate of one embodiment of the present invention.
【図３】光照明装置と標板の位置関係を示す説明図であ
る。FIG. 3 is an explanatory diagram showing a positional relationship between a light illuminating device and a marking plate.
【図４】光の反射の様子を示す模式図である。FIG. 4 is a schematic diagram showing how light is reflected.
【図５】光の反射の様子を示す模式図である。FIG. 5 is a schematic diagram showing how light is reflected.
【図６】光の反射の様子を示す模式図である。FIG. 6 is a schematic diagram showing how light is reflected.
【図７】標板からの反射光の信号処理ブロック図であ
る。FIG. 7 is a signal processing block diagram of reflected light from a marking plate.
【図８】信号処理のフローチャートである。FIG. 8 is a flowchart of signal processing.
【図９】標板を撮像して得られた信号波形図である。FIG. 9 is a signal waveform diagram obtained by imaging a plate.
【図１０】標板を撮像して得られた信号波形図である。FIG. 10 is a signal waveform diagram obtained by imaging a plate.
【図１１】外観欠陥検査装置の説明図である。FIG. 11 is an explanatory diagram of an appearance defect inspection device.
【図１２】外観欠陥検査装置の説明図である。FIG. 12 is an explanatory diagram of an appearance defect inspection device.
【図１３】外観欠陥検査装置の説明図である。FIG. 13 is an explanatory diagram of an appearance defect inspection device.
【図１４】外観欠陥検査装置の説明図である。FIG. 14 is an explanatory diagram of an appearance defect inspection device.
【図１５】表面層での反射指向性の模式図である。FIG. 15 is a schematic diagram of the reflection directivity at the surface layer.
【図１６】内部層での反射指向性の模式図である。FIG. 16 is a schematic diagram of reflection directivity in an inner layer.
【図１７】受信信号中における正反射光成分の説明図で
ある。FIG. 17 is an explanatory diagram of a specular reflection light component in a received signal.
【図１８】受信信号中における突起欠陥成分と拡散反射
光成分の説明図である。FIG. 18 is an explanatory diagram of a protrusion defect component and a diffuse reflected light component in a received signal.
【図１９】表面層の凹凸の違いによる反射状態の説明図
である。FIG. 19 is an explanatory diagram of a reflection state due to a difference in unevenness of the surface layer.
１…基板、 ２，25…拡散層(内部層)、 ３…格子線、
４，24…表面層、 ５…突起、 ８…標板、 ９…ラ
イン状照明装置、 10…１次元ＣＣＤカメラ、27…遮光
板、 28…拡散板、 32…突起欠陥、 33…コリメート
レンズ系。1 ... Substrate, 2, 25 ... Diffusion layer (inner layer), 3 ... Lattice line,
4, 24 ... Surface layer, 5 ... Projection, 8 ... Standard plate, 9 ... Line illumination device, 10 ... One-dimensional CCD camera, 27 ... Light shielding plate, 28 ... Diffusing plate, 32 ... Projection defect, 33 ... Collimating lens system .
Claims (12)
定角度で光を照射し、この照射された感光体面を撮像カ
メラによって法線方向から撮像する画像処理方式の検査
装置に用いられるカメラ受光位置補正用標板において、
表面突起を有する透光性光沢表面層を、表面に格子パタ
ーンを有する拡散反射面上に設けたことを特徴とするカ
メラ受光位置補正用標板。1. A camera light receiving unit used in an image processing type inspection apparatus for irradiating a laminated electrophotographic photosensitive member with light from an illuminating device at a predetermined angle, and capturing an image of the irradiated photosensitive member surface in a normal direction by an imaging camera. In the position correction plate,
A camera light-receiving position correcting chart which is characterized in that a translucent glossy surface layer having surface protrusions is provided on a diffuse reflection surface having a lattice pattern on the surface.
〜0.8であることを特徴とする請求項１記載のカメラ受
光位置補正用標板。2. The 20 ° relative glossiness on the surface is 0.7.
2. The camera light-receiving position correcting chart according to claim 1, wherein:
定角度で光を照射し、この照射された感光体面を撮像カ
メラによって法線方向から撮像する画像処理方式の検査
装置に用いられるカメラ位置補正装置において、表面突
起を有する透光性光沢表面層を、表面に格子パターンを
有する拡散反射面上に設けてなるカメラ受光位置補正用
標板を検査対象である前記感光***置に設け、このカメ
ラ受光位置補正用標板と前記照明装置との光路中に光調
整板を設けたことを特徴とするカメラ位置補正装置。3. A camera position used in an inspection device of an image processing system, which irradiates a laminated electrophotographic photoconductor with light from a lighting device at a predetermined angle and picks up an image of the photoconductor face irradiated with the image from a normal direction. In the correction device, a camera light receiving position correcting reference plate having a translucent glossy surface layer having surface protrusions provided on a diffuse reflection surface having a lattice pattern on the surface thereof is provided at the position of the photoconductor to be inspected. A camera position correcting device, characterized in that a light adjusting plate is provided in the optical path between the camera light receiving position correcting plate and the illuminating device.
とする請求項３記載のカメラ位置補正装置。4. The camera position correcting device according to claim 3, wherein the light adjusting plate is a light shielding plate.
イン状照明体の輝線を40〜60％遮光することを特徴とす
る請求項４記載のカメラ位置補正装置。5. The camera position correcting device according to claim 4, wherein the light-shielding plate shields 40 to 60% of the bright line of the linear illuminating body which is the illuminating device.
率が50〜75％であることを特徴とする請求項３記載のカ
メラ位置補正装置。6. The camera position correcting device according to claim 3, wherein the light adjusting plate is a diffusion plate and the transmittance thereof is 50 to 75%.
に設けられたコリメートレンズ系と、前記カメラ受光位
置補正用標板と前記照明装置との間に設けられた拡散板
とであることを特徴とする請求項３記載のカメラ位置補
正装置。7. The light adjusting plate comprises a collimating lens system provided at a light emitting end of an illuminating device, and a diffuser plate provided between the camera light receiving position correcting reference plate and the illuminating device. The camera position correction device according to claim 3, wherein the camera position correction device is provided.
定角度で光を照射し、この照射された感光体面を撮像カ
メラによって法線方向から撮像し、撮像部分の光学的変
化を捕らえて欠陥凹凸を検出する外観欠陥検査装置にお
いて、少なくとも表面層と内部層とを備えた前記積層型
電子写真感光体と前記照明装置との光路中に光調整板を
設けたことを特徴とする外観欠陥検査装置。8. A laminated type electrophotographic photosensitive member is irradiated with light from a lighting device at a predetermined angle, and the surface of the photosensitive member thus irradiated is imaged from a normal direction by an imaging camera, and an optical change in the imaging part is captured to detect a defect. In an appearance defect inspection apparatus for detecting unevenness, an appearance defect inspection, characterized in that a light adjusting plate is provided in an optical path between the laminated electrophotographic photosensitive member having at least a surface layer and an inner layer and the illuminating device. apparatus.
とする請求項８記載の外観欠陥検査装置。9. The appearance defect inspection apparatus according to claim 8, wherein the light adjusting plate is a light shielding plate.
ライン状照明体の輝線を40〜60％遮光することを特徴と
する請求項９記載の外観欠陥検査装置。10. The appearance defect inspection device according to claim 9, wherein the light-shielding plate shields 40 to 60% of the bright line of the line-shaped illuminating body which is the illuminating device.
過率が50〜75％であることを特徴とする請求項８記載の
外観欠陥検査装置。11. The appearance defect inspection apparatus according to claim 8, wherein the light adjusting plate is a diffusion plate, and the transmittance thereof is 50 to 75%.
部に設けられたコリメートレンズ系と、前記カメラ受光
位置補正用標板と前記照明装置との間に設けられた拡散
板とであることを特徴とする請求項８記載の外観欠陥検
査装置。12. The light adjusting plate comprises a collimating lens system provided at a light emitting end of an illuminating device, and a diffuser plate provided between the camera light receiving position correcting reference plate and the illuminating device. The visual defect inspection apparatus according to claim 8, wherein the visual defect inspection apparatus is provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25683694A JP3410231B2 (en) | 1993-10-25 | 1994-10-21 | Target plate for camera light receiving position correction and camera position correction device |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5-266453 | 1993-10-25 | ||
| JP26645393 | 1993-10-25 | ||
| JP5-324325 | 1993-12-22 | ||
| JP32432593 | 1993-12-22 | ||
| JP25683694A JP3410231B2 (en) | 1993-10-25 | 1994-10-21 | Target plate for camera light receiving position correction and camera position correction device |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003016281A Division JP4056399B2 (en) | 1993-10-25 | 2003-01-24 | Appearance defect inspection system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH085577A true JPH085577A (en) | 1996-01-12 |
| JP3410231B2 JP3410231B2 (en) | 2003-05-26 |
Family
ID=27334564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25683694A Expired - Lifetime JP3410231B2 (en) | 1993-10-25 | 1994-10-21 | Target plate for camera light receiving position correction and camera position correction device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3410231B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001141659A (en) * | 1999-11-11 | 2001-05-25 | Ricoh Co Ltd | Image pick-up device and defect detecting apparatus |
| JP2006162278A (en) * | 2004-12-02 | 2006-06-22 | Konica Minolta Medical & Graphic Inc | Defect-inspection device |
| JP2007507707A (en) * | 2003-10-01 | 2007-03-29 | シック アイヴィピー エービー | System and method for reflecting features of an object |
-
1994
- 1994-10-21 JP JP25683694A patent/JP3410231B2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001141659A (en) * | 1999-11-11 | 2001-05-25 | Ricoh Co Ltd | Image pick-up device and defect detecting apparatus |
| JP2007507707A (en) * | 2003-10-01 | 2007-03-29 | シック アイヴィピー エービー | System and method for reflecting features of an object |
| JP2006162278A (en) * | 2004-12-02 | 2006-06-22 | Konica Minolta Medical & Graphic Inc | Defect-inspection device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3410231B2 (en) | 2003-05-26 |
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