JPH08511898A - ポリマー材の大気圧のグロー放電プラズマ処理方法および装置 - Google Patents
ポリマー材の大気圧のグロー放電プラズマ処理方法および装置Info
- Publication number
- JPH08511898A JPH08511898A JP7501055A JP50105595A JPH08511898A JP H08511898 A JPH08511898 A JP H08511898A JP 7501055 A JP7501055 A JP 7501055A JP 50105595 A JP50105595 A JP 50105595A JP H08511898 A JPH08511898 A JP H08511898A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- electrodes
- gas
- glow discharge
- frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/24—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B64—AIRCRAFT; AVIATION; COSMONAUTICS
- B64C—AEROPLANES; HELICOPTERS
- B64C23/00—Influencing air flow over aircraft surfaces, not otherwise provided for
- B64C23/005—Influencing air flow over aircraft surfaces, not otherwise provided for by other means not covered by groups B64C23/02 - B64C23/08, e.g. by electric charges, magnetic panels, piezoelectric elements, static charges or ultrasounds
-
- D—TEXTILES; PAPER
- D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
- D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
- D04H1/00—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres
- D04H1/40—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres from fleeces or layers composed of fibres without existing or potential cohesive properties
- D04H1/54—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres from fleeces or layers composed of fibres without existing or potential cohesive properties by welding together the fibres, e.g. by partially melting or dissolving
- D04H1/56—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres from fleeces or layers composed of fibres without existing or potential cohesive properties by welding together the fibres, e.g. by partially melting or dissolving in association with fibre formation, e.g. immediately following extrusion of staple fibres
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
- H01J37/3277—Continuous moving of continuous material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B7/00—Heating by electric discharge
- H05B7/16—Heating by glow discharge
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
- B29C2059/145—Atmospheric plasma
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2023/00—Use of polyalkenes or derivatives thereof as moulding material
- B29K2023/10—Polymers of propylene
- B29K2023/12—PP, i.e. polypropylene
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/336—Changing physical properties of treated surfaces
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Aviation & Aerospace Engineering (AREA)
- Textile Engineering (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Plasma Technology (AREA)
- Treatment Of Fiber Materials (AREA)
- Chemical Or Physical Treatment Of Fibers (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Applications Claiming Priority (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/068,508 US5387842A (en) | 1993-05-28 | 1993-05-28 | Steady-state, glow discharge plasma |
US08/068,508 | 1993-05-28 | ||
US08/068,739 US5456972A (en) | 1993-05-28 | 1993-05-28 | Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure |
US08/068,739 | 1993-05-28 | ||
US08/145,786 US5414324A (en) | 1993-05-28 | 1993-10-29 | One atmosphere, uniform glow discharge plasma |
US08/145,349 | 1993-10-29 | ||
US08/145,349 US5403453A (en) | 1993-05-28 | 1993-10-29 | Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure |
US08/145,786 | 1993-10-29 | ||
PCT/US1994/006151 WO1994028568A1 (fr) | 1993-05-28 | 1994-05-26 | Procede et appareil pour le traitement au plasma a decharge luminescente de materiaux polymeres a la pression atmospherique |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH08511898A true JPH08511898A (ja) | 1996-12-10 |
Family
ID=27490710
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7501055A Pending JPH08511898A (ja) | 1993-05-28 | 1994-05-26 | ポリマー材の大気圧のグロー放電プラズマ処理方法および装置 |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP0700577A4 (fr) |
JP (1) | JPH08511898A (fr) |
KR (1) | KR960702844A (fr) |
AU (1) | AU679237B2 (fr) |
CA (1) | CA2163967C (fr) |
WO (1) | WO1994028568A1 (fr) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5714308A (en) | 1996-02-13 | 1998-02-03 | Eastman Kodak Company | Atmospheric pressure glow discharge treatment of polymeric supports to promote adhesion for photographic applications |
US5789145A (en) * | 1996-07-23 | 1998-08-04 | Eastman Kodak Company | Atmospheric pressure glow discharge treatment of base material for photographic applications |
US6879103B1 (en) | 1997-03-18 | 2005-04-12 | The Trustees Of The Stevens Institute Of Technology | Glow plasma discharge device |
US5872426A (en) * | 1997-03-18 | 1999-02-16 | Stevens Institute Of Technology | Glow plasma discharge device having electrode covered with perforated dielectric |
US6900592B2 (en) | 1997-03-18 | 2005-05-31 | The Trustees Of The Stevens Institute Of Technology | Method and apparatus for stabilizing of the glow plasma discharges |
DE19713127C1 (de) * | 1997-03-27 | 1998-11-12 | Brueckner Maschbau | Coronaelektroden-Anordnung |
US5888713A (en) * | 1997-05-19 | 1999-03-30 | Eastman Kodak Company | Atmospheric pressure glow discharge treatment of paper base material for imaging applications |
FR2782837B1 (fr) * | 1998-08-28 | 2000-09-29 | Air Liquide | Procede et dispositif de traitement de surface par plasma a pression atmospherique |
DE69929271T2 (de) | 1998-10-26 | 2006-09-21 | Matsushita Electric Works, Ltd., Kadoma | Apparat und Verfahren zur Plasmabehandlung |
EP1067432A1 (fr) * | 1999-07-07 | 2001-01-10 | Eastman Kodak Company | Traitement des polyolefins à l'aide de plasma à haute efficacité |
US6149985A (en) | 1999-07-07 | 2000-11-21 | Eastman Kodak Company | High-efficiency plasma treatment of imaging supports |
DE10011274A1 (de) * | 2000-03-08 | 2001-09-13 | Wolff Walsrode Ag | Plasmabehandelte bahnförmige Werkstoffe |
JP4930913B2 (ja) * | 2005-09-12 | 2012-05-16 | 東レバッテリーセパレータフィルム合同会社 | 多孔性素材のプラズマ処理方法及び処理装置 |
EP1931397B1 (fr) | 2005-10-05 | 2009-04-08 | SCA Hygiene Products AB | Article absorbant comprenant des regions hydrophiles et hydrophobes |
JP2009509702A (ja) | 2005-10-05 | 2009-03-12 | エスセーアー・ハイジーン・プロダクツ・アーベー | 活性剤を含む薄膜を備えた吸収性物品 |
GB0615644D0 (en) | 2006-08-07 | 2006-09-13 | Airbus Uk Ltd | Method of manufacturing composite material |
FR3013622B1 (fr) * | 2013-11-28 | 2016-06-24 | Michelin & Cie | Procede de traitement d'un element de renfort a section aplatie |
FR3013625B1 (fr) | 2013-11-28 | 2016-06-24 | Michelin & Cie | Element de renfort a section aplatie |
WO2015102858A1 (fr) * | 2013-12-31 | 2015-07-09 | Dow Global Technologies Llc | Procédé pour fabriquer une structure de non-tissé hydrophile, structure de non-tissé produite par ce dernier, et article contenant la structure de non-tissé |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB891469A (en) * | 1957-05-27 | 1962-03-14 | Minnesota Mining & Mfg | Improvements in polymers |
FR2463975A1 (fr) * | 1979-08-22 | 1981-02-27 | Onera (Off Nat Aerospatiale) | Procede et appareil pour la gravure chimique par voie seche des circuits integres |
JPS5747873A (en) * | 1980-09-03 | 1982-03-18 | Toshiba Corp | Plasma etching method |
JPS58200529A (ja) * | 1982-05-19 | 1983-11-22 | Hitachi Ltd | プラズマ処理装置 |
JPH062952B2 (ja) * | 1985-01-30 | 1994-01-12 | 株式会社島津製作所 | プラズマcvd装置及びプラズマcvdによる成膜方法 |
JPS6344965A (ja) * | 1986-04-22 | 1988-02-25 | Nippon Paint Co Ltd | 多層塗膜の形成法 |
JPH06101446B2 (ja) * | 1989-05-26 | 1994-12-12 | 三菱電機株式会社 | プラズマ処理方法およびプラズマ処理装置 |
JP3016821B2 (ja) * | 1990-06-15 | 2000-03-06 | 東京エレクトロン株式会社 | プラズマ処理方法 |
JPH0582114A (ja) * | 1991-09-18 | 1993-04-02 | Fuji Photo Film Co Ltd | 二次電池 |
-
1994
- 1994-05-26 KR KR1019950705310A patent/KR960702844A/ko not_active Application Discontinuation
- 1994-05-26 JP JP7501055A patent/JPH08511898A/ja active Pending
- 1994-05-26 CA CA002163967A patent/CA2163967C/fr not_active Expired - Fee Related
- 1994-05-26 WO PCT/US1994/006151 patent/WO1994028568A1/fr not_active Application Discontinuation
- 1994-05-26 EP EP94918192A patent/EP0700577A4/fr not_active Ceased
- 1994-05-26 AU AU69623/94A patent/AU679237B2/en not_active Ceased
Also Published As
Publication number | Publication date |
---|---|
AU6962394A (en) | 1994-12-20 |
AU679237B2 (en) | 1997-06-26 |
CA2163967A1 (fr) | 1994-12-08 |
CA2163967C (fr) | 2008-11-04 |
WO1994028568A1 (fr) | 1994-12-08 |
EP0700577A4 (fr) | 1996-12-27 |
KR960702844A (ko) | 1996-05-23 |
EP0700577A1 (fr) | 1996-03-13 |
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