JPH08511898A - ポリマー材の大気圧のグロー放電プラズマ処理方法および装置 - Google Patents

ポリマー材の大気圧のグロー放電プラズマ処理方法および装置

Info

Publication number
JPH08511898A
JPH08511898A JP7501055A JP50105595A JPH08511898A JP H08511898 A JPH08511898 A JP H08511898A JP 7501055 A JP7501055 A JP 7501055A JP 50105595 A JP50105595 A JP 50105595A JP H08511898 A JPH08511898 A JP H08511898A
Authority
JP
Japan
Prior art keywords
plasma
electrodes
gas
glow discharge
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7501055A
Other languages
English (en)
Japanese (ja)
Inventor
リース ロス,ジョン
ピンイ. ツァイ,ピーター
リュウ,チャオユ
シー. ワーズワース,ローリー
ディー. スペンス,ポール
ラルーシ,モニール
Original Assignee
ザ ユニバーシティ オブ テネシー リサーチ コーポレーション
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/068,508 external-priority patent/US5387842A/en
Priority claimed from US08/068,739 external-priority patent/US5456972A/en
Priority claimed from US08/145,786 external-priority patent/US5414324A/en
Priority claimed from US08/145,349 external-priority patent/US5403453A/en
Application filed by ザ ユニバーシティ オブ テネシー リサーチ コーポレーション filed Critical ザ ユニバーシティ オブ テネシー リサーチ コーポレーション
Publication of JPH08511898A publication Critical patent/JPH08511898A/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/24Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082Radio frequency generated discharge
    • H01J37/32174Circuits specially adapted for controlling the RF discharge
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B64AIRCRAFT; AVIATION; COSMONAUTICS
    • B64CAEROPLANES; HELICOPTERS
    • B64C23/00Influencing air flow over aircraft surfaces, not otherwise provided for
    • B64C23/005Influencing air flow over aircraft surfaces, not otherwise provided for by other means not covered by groups B64C23/02 - B64C23/08, e.g. by electric charges, magnetic panels, piezoelectric elements, static charges or ultrasounds
    • DTEXTILES; PAPER
    • D04BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
    • D04HMAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
    • D04H1/00Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres
    • D04H1/40Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres from fleeces or layers composed of fibres without existing or potential cohesive properties
    • D04H1/54Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres from fleeces or layers composed of fibres without existing or potential cohesive properties by welding together the fibres, e.g. by partially melting or dissolving
    • D04H1/56Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres from fleeces or layers composed of fibres without existing or potential cohesive properties by welding together the fibres, e.g. by partially melting or dissolving in association with fibre formation, e.g. immediately following extrusion of staple fibres
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082Radio frequency generated discharge
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32431Constructional details of the reactor
    • H01J37/32733Means for moving the material to be treated
    • H01J37/32752Means for moving the material to be treated for moving the material across the discharge
    • H01J37/32761Continuous moving
    • H01J37/3277Continuous moving of continuous material
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00Heating by electric discharge
    • H05B7/16Heating by glow discharge
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • B29C2059/145Atmospheric plasma
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29KINDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2023/00Use of polyalkenes or derivatives thereof as moulding material
    • B29K2023/10Polymers of propylene
    • B29K2023/12PP, i.e. polypropylene
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32Processing objects by plasma generation
    • H01J2237/33Processing objects by plasma generation characterised by the type of processing
    • H01J2237/336Changing physical properties of treated surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Textile Engineering (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
JP7501055A 1993-05-28 1994-05-26 ポリマー材の大気圧のグロー放電プラズマ処理方法および装置 Pending JPH08511898A (ja)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
US08/068,508 US5387842A (en) 1993-05-28 1993-05-28 Steady-state, glow discharge plasma
US08/068,508 1993-05-28
US08/068,739 US5456972A (en) 1993-05-28 1993-05-28 Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure
US08/068,739 1993-05-28
US08/145,786 US5414324A (en) 1993-05-28 1993-10-29 One atmosphere, uniform glow discharge plasma
US08/145,349 1993-10-29
US08/145,349 US5403453A (en) 1993-05-28 1993-10-29 Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure
US08/145,786 1993-10-29
PCT/US1994/006151 WO1994028568A1 (fr) 1993-05-28 1994-05-26 Procede et appareil pour le traitement au plasma a decharge luminescente de materiaux polymeres a la pression atmospherique

Publications (1)

Publication Number Publication Date
JPH08511898A true JPH08511898A (ja) 1996-12-10

Family

ID=27490710

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7501055A Pending JPH08511898A (ja) 1993-05-28 1994-05-26 ポリマー材の大気圧のグロー放電プラズマ処理方法および装置

Country Status (6)

Country Link
EP (1) EP0700577A4 (fr)
JP (1) JPH08511898A (fr)
KR (1) KR960702844A (fr)
AU (1) AU679237B2 (fr)
CA (1) CA2163967C (fr)
WO (1) WO1994028568A1 (fr)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5714308A (en) 1996-02-13 1998-02-03 Eastman Kodak Company Atmospheric pressure glow discharge treatment of polymeric supports to promote adhesion for photographic applications
US5789145A (en) * 1996-07-23 1998-08-04 Eastman Kodak Company Atmospheric pressure glow discharge treatment of base material for photographic applications
US6879103B1 (en) 1997-03-18 2005-04-12 The Trustees Of The Stevens Institute Of Technology Glow plasma discharge device
US5872426A (en) * 1997-03-18 1999-02-16 Stevens Institute Of Technology Glow plasma discharge device having electrode covered with perforated dielectric
US6900592B2 (en) 1997-03-18 2005-05-31 The Trustees Of The Stevens Institute Of Technology Method and apparatus for stabilizing of the glow plasma discharges
DE19713127C1 (de) * 1997-03-27 1998-11-12 Brueckner Maschbau Coronaelektroden-Anordnung
US5888713A (en) * 1997-05-19 1999-03-30 Eastman Kodak Company Atmospheric pressure glow discharge treatment of paper base material for imaging applications
FR2782837B1 (fr) * 1998-08-28 2000-09-29 Air Liquide Procede et dispositif de traitement de surface par plasma a pression atmospherique
DE69929271T2 (de) 1998-10-26 2006-09-21 Matsushita Electric Works, Ltd., Kadoma Apparat und Verfahren zur Plasmabehandlung
EP1067432A1 (fr) * 1999-07-07 2001-01-10 Eastman Kodak Company Traitement des polyolefins à l'aide de plasma à haute efficacité
US6149985A (en) 1999-07-07 2000-11-21 Eastman Kodak Company High-efficiency plasma treatment of imaging supports
DE10011274A1 (de) * 2000-03-08 2001-09-13 Wolff Walsrode Ag Plasmabehandelte bahnförmige Werkstoffe
JP4930913B2 (ja) * 2005-09-12 2012-05-16 東レバッテリーセパレータフィルム合同会社 多孔性素材のプラズマ処理方法及び処理装置
EP1931397B1 (fr) 2005-10-05 2009-04-08 SCA Hygiene Products AB Article absorbant comprenant des regions hydrophiles et hydrophobes
JP2009509702A (ja) 2005-10-05 2009-03-12 エスセーアー・ハイジーン・プロダクツ・アーベー 活性剤を含む薄膜を備えた吸収性物品
GB0615644D0 (en) 2006-08-07 2006-09-13 Airbus Uk Ltd Method of manufacturing composite material
FR3013622B1 (fr) * 2013-11-28 2016-06-24 Michelin & Cie Procede de traitement d'un element de renfort a section aplatie
FR3013625B1 (fr) 2013-11-28 2016-06-24 Michelin & Cie Element de renfort a section aplatie
WO2015102858A1 (fr) * 2013-12-31 2015-07-09 Dow Global Technologies Llc Procédé pour fabriquer une structure de non-tissé hydrophile, structure de non-tissé produite par ce dernier, et article contenant la structure de non-tissé

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB891469A (en) * 1957-05-27 1962-03-14 Minnesota Mining & Mfg Improvements in polymers
FR2463975A1 (fr) * 1979-08-22 1981-02-27 Onera (Off Nat Aerospatiale) Procede et appareil pour la gravure chimique par voie seche des circuits integres
JPS5747873A (en) * 1980-09-03 1982-03-18 Toshiba Corp Plasma etching method
JPS58200529A (ja) * 1982-05-19 1983-11-22 Hitachi Ltd プラズマ処理装置
JPH062952B2 (ja) * 1985-01-30 1994-01-12 株式会社島津製作所 プラズマcvd装置及びプラズマcvdによる成膜方法
JPS6344965A (ja) * 1986-04-22 1988-02-25 Nippon Paint Co Ltd 多層塗膜の形成法
JPH06101446B2 (ja) * 1989-05-26 1994-12-12 三菱電機株式会社 プラズマ処理方法およびプラズマ処理装置
JP3016821B2 (ja) * 1990-06-15 2000-03-06 東京エレクトロン株式会社 プラズマ処理方法
JPH0582114A (ja) * 1991-09-18 1993-04-02 Fuji Photo Film Co Ltd 二次電池

Also Published As

Publication number Publication date
AU6962394A (en) 1994-12-20
AU679237B2 (en) 1997-06-26
CA2163967A1 (fr) 1994-12-08
CA2163967C (fr) 2008-11-04
WO1994028568A1 (fr) 1994-12-08
EP0700577A4 (fr) 1996-12-27
KR960702844A (ko) 1996-05-23
EP0700577A1 (fr) 1996-03-13

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