JPH0847842A - Machine tool and method of work - Google Patents
Machine tool and method of workInfo
- Publication number
- JPH0847842A JPH0847842A JP18337394A JP18337394A JPH0847842A JP H0847842 A JPH0847842 A JP H0847842A JP 18337394 A JP18337394 A JP 18337394A JP 18337394 A JP18337394 A JP 18337394A JP H0847842 A JPH0847842 A JP H0847842A
- Authority
- JP
- Japan
- Prior art keywords
- rotary shaft
- work
- displacement
- holding
- cutting tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Automatic Control Of Machine Tools (AREA)
- Machine Tool Sensing Apparatuses (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、主軸の熱変位による加
工誤差を抑制して高い加工精度と生産性を実現するフラ
イス盤、旋盤などの工作機械及び工作方法に関するもの
である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a machine tool such as a milling machine or a lathe and a machining method for suppressing a machining error due to thermal displacement of a spindle to achieve high machining accuracy and productivity.
【０００２】[0002]
【従来の技術】工作機械に搭載されている主軸は回転に
より軸受け部及び駆動部において発熱する。このため、
主軸ロータは熱膨張しロータに取付けられた工具或はワ
ークは初期設定位置より変位し、切込み量が変化して加
工精度が劣化する。そこで従来では、主軸ハウジング内
に冷却水路を設けこれに温度管理された冷却水を流し、
主軸の温度上昇を抑えている。2. Description of the Related Art A spindle mounted on a machine tool generates heat in a bearing portion and a driving portion when it is rotated. For this reason,
The spindle rotor thermally expands, and the tool or work attached to the rotor is displaced from the initial setting position, the cutting depth changes and the machining accuracy deteriorates. Therefore, in the past, a cooling water passage was provided in the main shaft housing, and temperature-controlled cooling water was made to flow through it.
The temperature rise of the spindle is suppressed.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら主軸ハウ
ジング内を冷却する方法では、主軸ハウジングの温度変
化が工作機械の他の部分に影響を与えないようにハウジ
ング温度を調整するため、ロータが数℃レベルで温度上
昇することはまぬがれられない。このため、ロータの工
具またはワーク取付け位置は数μｍ程度熱変位し高い寸
法精度、形状精度が得られない。ロータの温度上昇がな
いようにハウジング側の冷却条件を設定すると、ハウジ
ングが逆に収縮し、やはり工具またはワーク取付位置は
変化してしまう。主軸温度が定常に達した状態でのロー
タ位置変位を事前に測定し、この変位量を考慮した工具
またはワークの切込み設定を行い、定常状態になった時
点で（所謂ウオームアップを行なって）加工を開始すれ
ば加工誤差は生じない。しかし、主軸温度が定常状態に
なるには一時間オーダーの時間がかかり加工能率が非常
に悪い。However, in the method of cooling the inside of the spindle housing, since the housing temperature is adjusted so that the temperature change of the spindle housing does not affect the other parts of the machine tool, the rotor has a level of several degrees Celsius. It is inevitable that the temperature will rise. Therefore, the tool or work mounting position of the rotor is thermally displaced by several μm, and high dimensional accuracy and shape accuracy cannot be obtained. If the cooling conditions on the housing side are set so that the temperature of the rotor does not rise, the housing contracts in reverse and the tool or work mounting position also changes. The rotor position displacement is measured in advance when the spindle temperature reaches a steady state, the cutting depth of the tool or workpiece is set in consideration of this displacement amount, and machining is performed at a steady state (so-called warm-up). If you start the process, no processing error will occur. However, it takes about one hour for the spindle temperature to reach a steady state, and the machining efficiency is very poor.
【０００４】本発明は以上のような事情に鑑みてなされ
たものであり、ウォームアップ時間なしに主軸の熱変位
による加工誤差を除去することが出来る工作機械及び工
作方法を提供することを目的とするものである。The present invention has been made in view of the above circumstances, and an object thereof is to provide a machine tool and a machining method capable of removing a machining error due to thermal displacement of a spindle without warm-up time. To do.
【０００５】[0005]
【課題を解決するための手段】上述の課題を解決し、目
的を達成するために、本発明の工作機械は、バイトある
いはワークの内の一方を保持した状態で回転する回転軸
と、前記バイトあるいはワークの他方を保持する保持手
段と、前記バイトの前記ワークに対する切り込み量を調
節するために、前記回転軸あるいは前記保持手段の少な
くとも一方を移動させる移動手段と、前記回転軸の回転
に伴う該回転軸の温度変化を検出する温度変化検出手段
と、前記温度変化に伴う回転軸の熱膨張による前記バイ
トあるいはワークの位置変化を検出する位置変化検出手
段と、前記温度変化検出手段により検出される温度変化
と前記位置変化検出手段により検出される位置変化との
関係を記憶しておく記憶手段と、該記憶手段に記憶され
ている情報に基づいて、前記回転軸の熱膨張による前記
バイトあるいはワークの位置変化を相殺する様に、前記
移動手段による移動量を制御する制御手段とを具備する
ことを特徴としている。In order to solve the above-mentioned problems and to achieve the object, a machine tool of the present invention has a rotary shaft that rotates while holding one of a cutting tool and a work, and the cutting tool. Alternatively, holding means for holding the other of the work, moving means for moving at least one of the rotating shaft or the holding means for adjusting the cutting amount of the cutting tool with respect to the work, and the moving means for rotating the rotating shaft. Temperature change detecting means for detecting a temperature change of the rotary shaft, position change detecting means for detecting a position change of the cutting tool or work due to thermal expansion of the rotary shaft due to the temperature change, and temperature change detecting means. A storage unit that stores the relationship between the temperature change and the position change detected by the position change detection unit, and based on the information stored in the storage unit. Te, so as to cancel out the byte or change in position of the workpiece by the thermal expansion of the rotary shaft, is characterized by comprising a control means for controlling the amount of movement by the moving means.
【０００６】また、この発明に係わる工作機械におい
て、前記位置変化検出手段は、前記回転軸の前記バイト
あるいはワークを保持する保持面に対向して配置され、
該保持面の変位を非接触で測定する変位計からなること
を特徴としている。Further, in the machine tool according to the present invention, the position change detecting means is arranged so as to face a holding surface of the rotary shaft for holding the cutting tool or the work,
It is characterized in that it comprises a displacement meter that measures the displacement of the holding surface in a non-contact manner.
【０００７】また、この発明に係わる工作機械におい
て、前記変位計は、静電容量型変位計あるいは渦電流型
変位計あるいは光学変位計であることを特徴としてい
る。Further, in the machine tool according to the present invention, the displacement gauge is a capacitance displacement gauge, an eddy current displacement gauge, or an optical displacement gauge.
【０００８】また、本発明の工作方法は、バイトあるい
はワークの内の一方を保持するための回転軸を回転させ
る第１の工程と、前記回転軸の回転に伴う該回転軸の温
度変化を計測すると共に、該回転軸の熱膨張による変位
を計測する第２の工程と、前記回転軸の温度変化と前記
回転軸の熱膨張による変位の関係をメモリに記憶する第
３の工程と、前記メモリに記憶されている前記回転軸の
温度変化と変位の関係に基づいて、前記回転軸の熱膨張
による前記バイトあるいはワークの変位を相殺しなが
ら、前記バイトにより前記ワークを加工する第４の工程
とを具備することを特徴としている。Further, in the machining method of the present invention, the first step of rotating the rotary shaft for holding one of the cutting tool and the work and the temperature change of the rotary shaft due to the rotation of the rotary shaft are measured. And a second step of measuring a displacement of the rotating shaft due to thermal expansion, a third step of storing a relationship between a temperature change of the rotating shaft and a displacement of the rotating shaft due to thermal expansion in the memory, and the memory. A fourth step of machining the work with the cutting tool while offsetting the displacement of the cutting tool or the work due to thermal expansion of the rotating shaft based on the relationship between the temperature change and the displacement of the rotating shaft stored in It is characterized by having.
【０００９】また、この発明に係わる工作方法におい
て、前記第２の工程において、前記回転軸の熱膨張によ
る変位の計測は、前記バイトあるいはワークの他方を保
持するための保持手段に取り付けられた非接触変位計に
より行なわれることを特徴としている。Further, in the machining method according to the present invention, in the second step, the displacement of the rotary shaft due to thermal expansion is measured by a non-attached means for holding the other of the cutting tool and the work. It is characterized by being performed by a contact displacement meter.
【００１０】[0010]
【作用】以上の様にこの発明に係わる工作機械及び工作
方法は構成されているので、回転軸を回転させ始めてか
ら温度が定常状態になるまで、回転軸の温度と回転軸の
のバイトまたはワーク取付位置の熱変位を測定し、この
回転軸の温度と変位の関係を記録しておき、加工時には
この回転軸の温度と変位の関係に基づいて、回転軸の変
位量をキャンセルするようにバイトとワークの相対位置
の補正をリアルタイムで行うことにより、加工中のバイ
トまたはワークの熱変位を除去でき、ウォームアップ時
間なしで高精度で能率のよい加工が可能となる。Since the machine tool and the machining method according to the present invention are configured as described above, the temperature of the rotary shaft and the bite or work of the rotary shaft are maintained from the start of rotating the rotary shaft until the temperature reaches a steady state. Measure the thermal displacement of the mounting position, record the relationship between the temperature and displacement of this rotary shaft, and use a bit to cancel the amount of displacement of the rotary shaft based on the relationship between the temperature and displacement of this rotary shaft during machining. By correcting the relative position of the workpiece in real time, it is possible to remove the thermal displacement of the cutting tool or workpiece during machining, and it is possible to perform highly accurate and efficient machining without warm-up time.
【００１１】[0011]
【実施例】以下、本発明の好適な一実施例について添付
図面を参照して詳細に説明する。図１は、本発明の一実
施例に係わる工作機械の構成を示す図である。フライカ
ットによる平面切削加工の例で、１μｍオーダーの寸法
精度と、０．１μｍオーダーの平面度を得ようとするも
のである。１は主軸、１ａは主軸ハウジング、１ｂは主
軸ロータである。主軸ハウジング１ａの内部には、主軸
ロータ１ｂを回転させるためのモータが内蔵されてい
る。バイトホルダ２にはダイヤモンドバイト３が取り付
けられ、主軸ロータ１ｂの回転によりワーク４をフライ
カット加工する。５はワーク送りスライドである。主軸
１は切込みスライド６に搭載されている。７は切込みス
ライド駆動用のリニアモーター、８は切込みスライドの
位置検出用リニアエンコーダである。また、９は加工中
に切込みスライド６の位置を制御するための制御装置で
ある。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will be described in detail below with reference to the accompanying drawings. FIG. 1 is a diagram showing a configuration of a machine tool according to an embodiment of the present invention. This is an example of plane cutting by fly cutting, and is intended to obtain dimensional accuracy on the order of 1 μm and flatness on the order of 0.1 μm. Reference numeral 1 is a spindle, 1a is a spindle housing, and 1b is a spindle rotor. A motor for rotating the spindle rotor 1b is built in the spindle housing 1a. A diamond cutting tool 3 is attached to the cutting tool holder 2, and the work 4 is fly-cut by the rotation of the spindle rotor 1b. Reference numeral 5 is a work feed slide. The main shaft 1 is mounted on a notch slide 6. Reference numeral 7 is a linear motor for driving the cutting slide, and 8 is a linear encoder for detecting the position of the cutting slide. Reference numeral 9 is a control device for controlling the position of the cutting slide 6 during processing.
【００１２】この状態で加工を開始すると、主軸１の軸
受け部及びモーター部の発熱によりバイト位置での切込
み方向変位は、例えば回転数が４０００ｒｐｍの場合１
０μｍを越える。しかもこの切込み変動は主軸温度が整
定するまで一時間以上続き、この間に複数のワークを加
工するとワーク間の寸法誤差が生じ、また一個で１０分
程度の加工の場合は場所により切込み量が変化するため
形状精度が劣化する。主軸ハウジングを冷却すれば、以
上の寸法誤差、形状誤差を半分以下にすることは可能で
あるが、本発明では主軸冷却をしてもしなくても同様の
高い加工精度が得られるため、冷凍機が必要でコストア
ップとなる主軸の冷却は行わない。When machining is started in this state, the cutting direction displacement at the cutting tool position due to heat generation of the bearing portion of the main spindle 1 and the motor portion is, for example, 1 when the rotation speed is 4000 rpm.
It exceeds 0 μm. Moreover, this cutting variation continues for more than one hour until the spindle temperature settles, and when a plurality of workpieces are machined during this time, a dimensional error occurs between the workpieces, and when machining one workpiece for about 10 minutes, the cutting amount changes depending on the location. Therefore, the shape accuracy is deteriorated. If the spindle housing is cooled, it is possible to reduce the above dimensional error and shape error to less than half, but in the present invention, the same high processing accuracy can be obtained whether or not the spindle is cooled. However, it does not cool the spindle, which increases costs.
【００１３】このような加工誤差を補正・除去するた
め、まず加工前に主軸ハウジング１ａの温度変化とバイ
ト位置での変位を測定しておく。即ち、主軸ハウジング
１ａに０．０１℃レベルの分解能を持つ熱電対、サーミ
スタ等の温度センサ１０を取付け、図２に示すようにワ
ーク４を取り付ける位置に０．０１μｍの分解能を持つ
静電容量、渦電流、光学変位計などの変位センサ１１を
取り付ける。変位センサ１１のターゲットはバイト取付
け位置をフラットにしたバイトホルダ２であり、これに
よりワークとバイト位置での相対位置変動が測定でき
る。In order to correct and remove such a machining error, first, the temperature change of the spindle housing 1a and the displacement at the bite position are measured before machining. That is, a temperature sensor 10 such as a thermocouple or a thermistor having a resolution of 0.01 ° C. is attached to the spindle housing 1a, and a capacitance having a resolution of 0.01 μm is attached to a position where the work 4 is attached as shown in FIG. A displacement sensor 11 such as an eddy current or an optical displacement meter is attached. The target of the displacement sensor 11 is the tool holder 2 having a flat tool mounting position, by which the relative position fluctuation between the work and the tool position can be measured.
【００１４】この状態で実際の加工時と同様の速度カー
ブで主軸１を起動させ、バイトホルダ２の熱変位が整定
するまで約１時間、主軸ハウジング１ａの温度とバイト
位置での熱変位を同時に測定する。この際、温度センサ
１０と変位センサ１１の出力を夫々図示しないアンプを
通して制御装置９に取り込む。制御装置９内では、それ
ぞれの信号をＡ／Ｄ変換し、メモリ上にテーブル化して
ストアする。両者の関係をグラフ化すると、図３の様な
ほぼ比例関係となる。In this state, the spindle 1 is started with a speed curve similar to that during actual machining, and the temperature of the spindle holder 1a and the thermal displacement at the bite position are simultaneously measured for about 1 hour until the thermal displacement of the bite holder 2 is settled. taking measurement. At this time, the outputs of the temperature sensor 10 and the displacement sensor 11 are taken into the control device 9 through amplifiers (not shown). In the control device 9, each signal is A / D converted, tabulated on the memory and stored. When the relationship between the two is graphed, the relationship is almost proportional as shown in FIG.
【００１５】なお、このグラフの形状は温度センサを取
り付ける主軸ハウジングの位置により異なる。主軸ハウ
ジングが切込みスライド６と接する近傍では、主軸の熱
が切込みスライド側に逃げるため、主軸ハウジングの温
度上昇が少ない。このため、ハウジング温度変化に対す
る熱変位の変化量が増加する。温度センサの分解能が一
定なので、変位分解能が落ちてしまい不利である。ま
た、主軸駆動用のモータ付近のハウジングは、モータの
発熱のため主軸ロータより温度上昇が速く、ハウジング
温度と熱変位は単純な比例関係になりにくい。したがっ
て温度センサ取付け位置は、切込みスライドやモータか
ら遠く、バイト取付け位置に近い部分がよい。本実施例
では、ハウジング上面のバイト側に取りつけてある。更
に、以上のような温度、変位測定の結果は工作機械が置
かれた環境温度に大きく影響されるため、温度管理され
た環境での事前測定及び使用が望まれる。The shape of this graph differs depending on the position of the spindle housing to which the temperature sensor is attached. In the vicinity of the main shaft housing in contact with the cut slide 6, the heat of the main shaft escapes to the cut slide side, so that the temperature rise of the main shaft housing is small. Therefore, the amount of change in thermal displacement with respect to the change in housing temperature increases. Since the resolution of the temperature sensor is constant, the displacement resolution drops, which is a disadvantage. In addition, the temperature of the housing near the motor for driving the spindle rises faster than that of the spindle rotor due to the heat generated by the motor, and the housing temperature and thermal displacement are unlikely to have a simple proportional relationship. Therefore, the temperature sensor mounting position is preferably located far from the cut slide or the motor and close to the bite mounting position. In this embodiment, it is attached to the bite side on the upper surface of the housing. Further, since the results of the above temperature and displacement measurement are greatly influenced by the environmental temperature in which the machine tool is placed, it is desired to perform pre-measurement and use in a temperature-controlled environment.
【００１６】以上のような切込み補正の準備をした状態
で加工を開始する。温度センサのみを取付け、変位セン
サは取り外しワークをセッティングする。主軸１は一時
間程度かけ温度上昇し、その間主軸ロータ１ｂは徐々に
熱膨張するが、温度センサ１０の検出信号を受けた制御
装置９が前記の温度−変位テーブルから温度に対する熱
変位量を取り出し、切込み量が変動しないように変位量
分だけ切込みスライド６を熱変位と逆方向即ちワークか
ら遠ざかる方向に移動させる。このようにリアルタイム
で切込み量補正を行うことにより、主軸起動直後から主
軸発熱による精度劣化のない加工が実現できる。 （他の実施例）以上、バイトが主軸の軸方向に取りつく
正面フライスの例を説明したが、バイトが主軸ロータの
半径方向に取りつくフライカット加工でも同様の切込み
補正ができる。即ち、加工前の補正量測定において変位
センサをワーク位置から主軸ロータの半径方向に向けて
設置し、バイト位置の半径方向変位と主軸ハウジングの
温度との関係を測定し制御装置に入力すればよい。旋盤
タイプでワークが主軸に取り付けられ回転する場合は、
バイト位置からワーク側の変位を測定すればよい。ま
た、図１の例ではバイトが切込み方向に移動するが、ワ
ークが切込み方向に移動する構成でもよい。さらに、バ
イトは砥石であっても測定、補正が可能である。Machining is started in the state where the cutting correction is prepared as described above. Attach only the temperature sensor, remove the displacement sensor and set the work. The temperature of the main spindle 1 rises over about one hour, and during that time, the main spindle rotor 1b gradually thermally expands, but the control device 9 receiving the detection signal of the temperature sensor 10 takes out the thermal displacement amount with respect to the temperature from the temperature-displacement table. The cutting slide 6 is moved in the direction opposite to the thermal displacement, that is, in the direction away from the work, by the amount of displacement so that the amount of cutting does not change. By thus performing the depth of cut correction in real time, it is possible to realize machining without accuracy deterioration due to spindle heat generation immediately after the spindle is started. (Other Embodiments) The example of the face milling machine in which the cutting tool is attached in the axial direction of the spindle has been described above, but the same cutting correction can be performed by fly cutting in which the cutting tool is attached in the radial direction of the spindle rotor. That is, in the correction amount measurement before machining, the displacement sensor may be installed from the work position in the radial direction of the spindle rotor, and the relationship between the radial displacement of the bite position and the temperature of the spindle housing may be measured and input to the control device. . In the case of a lathe type where the workpiece is attached to the spindle and rotates,
The displacement on the work side may be measured from the bite position. Further, although the cutting tool moves in the cutting direction in the example of FIG. 1, the work may move in the cutting direction. Further, even if the bite is a grindstone, it can be measured and corrected.
【００１７】以上説明したように、上記の実施例によれ
ば主軸発熱に起因する工具或はワークの位置変動による
加工誤差をウォームアップ時間無しに除去でき、能率が
高く高精度な加工が実現できる。しかも主軸の冷却を行
わないため、冷凍機が必要でなく装置コストの低減も図
れる。As described above, according to the above-described embodiment, the machining error due to the position variation of the tool or the work due to the heat generation of the spindle can be removed without warming up time, and highly efficient and highly accurate machining can be realized. . Moreover, since the main shaft is not cooled, a refrigerator is not required and the cost of the device can be reduced.
【００１８】なお、本発明はその主旨を逸脱しない範囲
で、上記実施例を修正または変形したものに適用可能で
ある。The present invention can be applied to the modified or modified embodiment described above without departing from the spirit of the invention.
【００１９】[0019]
【発明の効果】以上説明した様に、本発明の工作機械及
び工作方法によれば、回転軸を回転させ始めてから温度
が定常状態になるまで、回転軸の温度と回転軸ののバイ
トまたはワーク取付位置の熱変位を測定し、この回転軸
の温度と変位の関係を記録しておき、加工時にはこの回
転軸の温度と変位の関係に基づいて、回転軸の変位量を
キャンセルするようにバイトとワークの相対位置の補正
をリアルタイムで行うことにより、加工中のバイトまた
はワークの熱変位を除去でき、ウォームアップ時間なし
で高精度で能率のよい加工が可能となる。As described above, according to the machine tool and the working method of the present invention, the temperature of the rotary shaft and the bite or work of the rotary shaft are maintained from the start of rotation of the rotary shaft until the temperature reaches a steady state. Measure the thermal displacement of the mounting position, record the relationship between the temperature and displacement of this rotary shaft, and use a bit to cancel the amount of displacement of the rotary shaft based on the relationship between the temperature and displacement of this rotary shaft during machining. By correcting the relative position of the workpiece in real time, it is possible to remove the thermal displacement of the cutting tool or workpiece during machining, and it is possible to perform highly accurate and efficient machining without warm-up time.
【図１】本発明の一実施例の工作機械の構成を示す図で
ある。FIG. 1 is a diagram showing a configuration of a machine tool according to an embodiment of the present invention.
【図２】バイト位置の変位測定方法を説明するための図
である。FIG. 2 is a diagram for explaining a displacement measuring method of a bite position.
【図３】主軸ハウジング温度とバイト位置熱変位の関係
を示した図である。FIG. 3 is a diagram showing a relationship between spindle housing temperature and bite position thermal displacement.
１ 主軸 １ａ 主軸ハウジング １ｂ 主軸ロータ ２ バイトホルダ ３ バイト ４ ワーク ５ ワーク送りスライド ６ 切り込みスライド ７ リニアモーター ８ リニアエンコーダ ９ 制御装置 １０ 温度センサ １１ 変位センサ 1 Spindle 1a Spindle housing 1b Spindle rotor 2 Tool holder 3 Tool 4 Work 5 Work feed slide 6 Notch slide 7 Linear motor 8 Linear encoder 9 Controller 10 Temperature sensor 11 Displacement sensor
Claims (5)
した状態で回転する回転軸と、 前記バイトあるいはワークの他方を保持する保持手段
と、 前記バイトの前記ワークに対する切り込み量を調節する
ために、前記回転軸あるいは前記保持手段の少なくとも
一方を移動させる移動手段と、 前記回転軸の回転に伴う該回転軸の温度変化を検出する
温度変化検出手段と、 前記温度変化に伴う回転軸の熱膨張による前記バイトあ
るいはワークの位置変化を検出する位置変化検出手段
と、 前記温度変化検出手段により検出される温度変化と前記
位置変化検出手段により検出される位置変化との関係を
記憶しておく記憶手段と、 該記憶手段に記憶されている情報に基づいて、前記回転
軸の熱膨張による前記バイトあるいはワークの位置変化
を相殺する様に、前記移動手段による移動量を制御する
制御手段とを具備することを特徴とする工作機械。1. A rotary shaft that rotates while holding one of a cutting tool or a work, a holding unit that holds the other of the cutting tool or the work, and a cutting amount of the cutting tool with respect to the work, Moving means for moving at least one of the rotating shaft or the holding means, temperature change detecting means for detecting a temperature change of the rotating shaft due to rotation of the rotating shaft, and thermal expansion of the rotating shaft due to the temperature change A position change detecting means for detecting a position change of the cutting tool or the work; and a storage means for storing the relationship between the temperature change detected by the temperature change detecting means and the position change detected by the position change detecting means. , Offsetting the position change of the cutting tool or the work due to thermal expansion of the rotating shaft based on the information stored in the storage means Thus, a machine tool comprising: a control unit that controls the amount of movement by the moving unit.
前記バイトあるいはワークを保持する保持面に対向して
配置され、該保持面の変位を非接触で測定する変位計か
らなることを特徴とする請求項１に記載の工作機械。2. The position change detecting means comprises a displacement gauge which is arranged so as to face a holding surface of the rotary shaft for holding the cutting tool or the work and which measures the displacement of the holding surface in a non-contact manner. The machine tool according to claim 1.
は渦電流型変位計あるいは光学変位計であることを特徴
とする請求項２に記載の工作機械。3. The machine tool according to claim 2, wherein the displacement gauge is a capacitance displacement gauge, an eddy current displacement gauge, or an optical displacement gauge.
するための回転軸を回転させる第１の工程と、 前記回転軸の回転に伴う該回転軸の温度変化を計測する
と共に、該回転軸の熱膨張による変位を計測する第２の
工程と、 前記回転軸の温度変化と前記回転軸の熱膨張による変位
の関係をメモリに記憶する第３の工程と、 前記メモリに記憶されている前記回転軸の温度変化と変
位の関係に基づいて、前記回転軸の熱膨張による前記バ
イトあるいはワークの変位を相殺しながら、前記バイト
により前記ワークを加工する第４の工程とを具備するこ
とを特徴とする工作方法。4. A first step of rotating a rotary shaft for holding one of a cutting tool and a work, and measuring a temperature change of the rotary shaft due to rotation of the rotary shaft, and measuring the temperature of the rotary shaft. A second step of measuring a displacement due to thermal expansion; a third step of storing a relationship between a temperature change of the rotary shaft and a displacement of the rotary shaft due to thermal expansion; and the rotation stored in the memory. A fourth step of processing the work with the cutting tool while offsetting the displacement of the cutting tool or the work due to thermal expansion of the rotating shaft based on the relationship between the temperature change and the displacement of the shaft. How to do it.
熱膨張による変位の計測は、前記バイトあるいはワーク
の他方を保持するための保持手段に取り付けられた非接
触変位計により行なわれることを特徴とする請求項４に
記載の工作方法。5. In the second step, the measurement of the displacement of the rotary shaft due to the thermal expansion is performed by a non-contact displacement gauge attached to a holding means for holding the other of the bite and the work. The manufacturing method according to claim 4, which is characterized in that.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18337394A JPH0847842A (en) | 1994-08-04 | 1994-08-04 | Machine tool and method of work |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18337394A JPH0847842A (en) | 1994-08-04 | 1994-08-04 | Machine tool and method of work |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0847842A true JPH0847842A (en) | 1996-02-20 |
Family
ID=16134643
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18337394A Withdrawn JPH0847842A (en) | 1994-08-04 | 1994-08-04 | Machine tool and method of work |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0847842A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1020911A (en) * | 1996-07-02 | 1998-01-23 | Mitsubishi Electric Corp | Tool length correcting method for numerical controller, work center position detecting method, and tool wear degree estimating method and numerical controller |
| JP2000263375A (en) * | 1999-03-17 | 2000-09-26 | Ntn Corp | Spindle device |
| JP2002273694A (en) * | 2001-03-14 | 2002-09-25 | Ibiden Co Ltd | Cutting device for piece processing of master board for printed circuit board |
| JP2008264883A (en) * | 2007-04-16 | 2008-11-06 | Jtekt Corp | Machining device |
| JP2015536252A (en) * | 2013-04-19 | 2015-12-21 | 住友化学株式会社 | Cutting method, cutting device, and optical member manufacturing method |
| JP2016179525A (en) * | 2015-03-24 | 2016-10-13 | 三井精機工業株式会社 | Machine tool and thermal displacement correction method in machine tool |
| CN108405891A (en) * | 2018-05-04 | 2018-08-17 | 深圳市速锋科技股份有限公司 | A kind of electro spindle with temperature detection and the processing method using electro spindle |
-
1994
- 1994-08-04 JP JP18337394A patent/JPH0847842A/en not_active Withdrawn
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1020911A (en) * | 1996-07-02 | 1998-01-23 | Mitsubishi Electric Corp | Tool length correcting method for numerical controller, work center position detecting method, and tool wear degree estimating method and numerical controller |
| JP2000263375A (en) * | 1999-03-17 | 2000-09-26 | Ntn Corp | Spindle device |
| JP2002273694A (en) * | 2001-03-14 | 2002-09-25 | Ibiden Co Ltd | Cutting device for piece processing of master board for printed circuit board |
| JP2008264883A (en) * | 2007-04-16 | 2008-11-06 | Jtekt Corp | Machining device |
| JP2015536252A (en) * | 2013-04-19 | 2015-12-21 | 住友化学株式会社 | Cutting method, cutting device, and optical member manufacturing method |
| KR20150142690A (en) * | 2013-04-19 | 2015-12-22 | 스미또모 가가꾸 가부시키가이샤 | Cutting method and cutting apparatus |
| TWI629151B (en) * | 2013-04-19 | 2018-07-11 | 住友化學股份有限公司 | Cutting method and cutting apparatus |
| JP2016179525A (en) * | 2015-03-24 | 2016-10-13 | 三井精機工業株式会社 | Machine tool and thermal displacement correction method in machine tool |
| CN108405891A (en) * | 2018-05-04 | 2018-08-17 | 深圳市速锋科技股份有限公司 | A kind of electro spindle with temperature detection and the processing method using electro spindle |
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Legal Events
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