JPH08320267A - Pressure sensor - Google Patents
Pressure sensorInfo
- Publication number
- JPH08320267A JPH08320267A JP12836195A JP12836195A JPH08320267A JP H08320267 A JPH08320267 A JP H08320267A JP 12836195 A JP12836195 A JP 12836195A JP 12836195 A JP12836195 A JP 12836195A JP H08320267 A JPH08320267 A JP H08320267A
- Authority
- JP
- Japan
- Prior art keywords
- fixed
- fixed electrode
- housing
- electrode plate
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明はダイヤフラムを用いた静
電容量型の圧力センサに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a capacitance type pressure sensor using a diaphragm.
【０００２】[0002]
【従来の技術】従来、この種の圧力センサとして、例え
ば図１１及び図１２に示したような構造のものが知られ
ている（特開昭６３−２６２５３７号公報参照）。この
圧力センサ１は、下面中央部にエアー取入口３が突出形
成されたハウジング２と、このハウジング２の上面に配
置され且つ周縁部の３ヶ所がネジ４によって固定された
固定電極板５と、この固定電極板５の下側で所定の隙間
を設けて配置された可動電極板６と、この可動電極板６
の下面中央部に半田付けされ且つ周縁部が前記ハウジン
グ２の底部上面に接着固定されたダイヤフラム７とで構
成されている。そして、前記ハウジング２の周縁部に
は、前記固定電極板５と一体に打ち抜かれた一対の固定
電極端子８が、上記固定電極板のネジ４固定位置で下方
に折り曲げられて形成されており、またダイヤフラム７
の周縁部には可動電極端子９の一端が溶接もしくは半田
付けされている。なお、可動電極端子９の他端はハウジ
ング２の底を貫通して設けられている。2. Description of the Related Art Conventionally, as this type of pressure sensor, for example, a structure having a structure as shown in FIGS. 11 and 12 is known (see Japanese Patent Laid-Open No. 63-262537). The pressure sensor 1 includes a housing 2 having an air intake 3 projectingly formed in a central portion of a lower surface thereof, and a fixed electrode plate 5 disposed on an upper surface of the housing 2 and having three peripheral edge portions fixed by screws 4. A movable electrode plate 6 arranged below the fixed electrode plate 5 with a predetermined gap, and the movable electrode plate 6
Of the diaphragm 7 which is soldered to the central part of the lower surface and whose peripheral portion is adhesively fixed to the upper surface of the bottom part of the housing 2. A pair of fixed electrode terminals 8 punched out integrally with the fixed electrode plate 5 are formed on the peripheral edge of the housing 2 by bending downward at the screw 4 fixing position of the fixed electrode plate. Also diaphragm 7
One end of the movable electrode terminal 9 is welded or soldered to the peripheral edge of the. The other end of the movable electrode terminal 9 is provided so as to penetrate the bottom of the housing 2.
【０００３】上述のような構成からなる圧力センサ１に
あっては、測定圧力に応じた空気がエアー取入口３から
ハウジング２内に入ると、その空気圧に対応してダイヤ
フラム７が押圧変形され、さらにこのダイヤフラム７の
変形量に応じて可動電極板６が固定電極板５の方へ移動
するので、両者間の測定前後の静電容量の変化をとらえ
て圧力を測定することができる。なお、この種の圧力セ
ンサは、例えば血圧計などに利用されており、圧力セン
サ１から得られた電気的信号をＣＲ回路によって周波数
に変換し、これをマイコンなどで処理して血圧を表示す
る。In the pressure sensor 1 having the above-mentioned structure, when the air corresponding to the measured pressure enters the housing 2 through the air inlet 3, the diaphragm 7 is pressed and deformed in accordance with the air pressure. Further, since the movable electrode plate 6 moves toward the fixed electrode plate 5 according to the deformation amount of the diaphragm 7, it is possible to measure the pressure by grasping the change in the capacitance between the two before and after the measurement. Note that this type of pressure sensor is used, for example, in a blood pressure monitor, etc., and an electric signal obtained from the pressure sensor 1 is converted into a frequency by a CR circuit and processed by a microcomputer or the like to display blood pressure. .
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、上記従
来の圧力センサ１にあっては、固定電極板５がハウジン
グ２に対して３ヶ所のネジ４で固定されているために、
ネジ固定の応力によるハウジング２の経時変形やネジ４
の経時緩みなどによって、固定電極板５と可動電極板６
との間の隙間が変化してしまい、これが測定誤差の原因
となるおそれがあった。また、従来の固定電極端子８は
固定電極板５と一体にプレス加工され、なおかつネジ４
により固定されており、大きなボリュームを占めている
ために、固定電極端子８及びネジ４の持つ浮遊容量が静
電容量の測定に影響して圧力感度や直線性を悪くしてし
まう等の問題があった。However, in the above-mentioned conventional pressure sensor 1, since the fixed electrode plate 5 is fixed to the housing 2 with the screws 4 at three places,
Deformation of the housing 2 over time due to stress of screw fixing and screws 4
The fixed electrode plate 5 and the movable electrode plate 6 are
The gap between and changes, which may cause a measurement error. Further, the conventional fixed electrode terminal 8 is press-formed integrally with the fixed electrode plate 5, and the screw 4
Since the fixed electrode terminal 8 and the screw 4 have a large volume, the stray capacitance of the fixed electrode terminal 8 and the screw 4 influences the measurement of the electrostatic capacitance and deteriorates the pressure sensitivity and linearity. there were.
【０００５】そこで、本発明は固定電極と可動電極との
間の隙間を一定に保持すると共に、電極以外の部分が静
電容量の測定に影響を及ぼさないようにして圧力感度や
直線性を向上させ、測定精度や信頼性をアップすること
を目的とする。Therefore, according to the present invention, the gap between the fixed electrode and the movable electrode is kept constant, and the pressure sensitivity and linearity are improved by preventing the portion other than the electrode from affecting the measurement of the electrostatic capacitance. The purpose is to improve measurement accuracy and reliability.
【０００６】[0006]
【課題を解決するための手段】本発明に係る圧力センサ
は、測定圧力に対応して変位を発生するダイヤフラム
と、該ダイヤフラムに対して固着された可動電極と、該
可動電極に対向して設けられた固定電極とをハウジング
に組み込み、且つ前記可動電極および固定電極にハウジ
ングから突出する電極端子をそれぞれ設けてなる圧力セ
ンサにおいて、前記固定電極および固定電極の電極端子
を導電性接着剤によりハウジングに一体に固定したこと
を特徴とする。特に、固定電極の電極端子はピンのよう
なボリュームの小さなものが好ましい。A pressure sensor according to the present invention is provided with a diaphragm that generates a displacement in response to a measured pressure, a movable electrode that is fixed to the diaphragm, and a movable electrode that faces the movable electrode. A fixed electrode incorporated in a housing, and the movable electrode and the fixed electrode are provided with electrode terminals protruding from the housing, respectively.In the pressure sensor, the fixed electrode and the electrode terminal of the fixed electrode are attached to the housing by a conductive adhesive. The feature is that they are fixed together. In particular, it is preferable that the fixed electrode has a small volume such as a pin.
【０００７】[0007]
【作用】上述の手段によれば、固定電極は導電性接着剤
によりハウジングに固定されるため、ネジ固定の応力に
よるハウジングの経時変形やネジの経時緩みなどがな
く、固定電極と可動電極との間の隙間が経時変化するこ
とがない。また、固定電極とその電極端子とを別体に構
成しネジをなくしたことで、電極端子の持つ浮遊容量が
静電容量の測定に影響を及ぼすことが非常に少ない。According to the above means, since the fixed electrode is fixed to the housing by the conductive adhesive, the housing is not deformed with time due to the stress of screw fixing and the screw is not loosened with time. The gap between them does not change over time. Further, since the fixed electrode and its electrode terminal are separately formed and the screw is eliminated, the stray capacitance of the electrode terminal has very little influence on the measurement of the electrostatic capacitance.
【０００８】[0008]
【実施例】以下添付図面に基づいて本発明に係る圧力セ
ンサの実施例を詳細に説明する。図１乃至図９は圧力セ
ンサ１１の一実施例を示したものであり、先の実施例と
同様、下面中央部にエアー取入口１３が突出形成された
ハウジング１２を備える。そして、このハウジング１２
の上部周縁には等間隔に３ヶ所、固定電極板１４の周縁
部を固定するための円柱部１５ａ，１５ｂ，１５ｃが設
けられ、その内の２ヶ所の円柱部１５ａ，１５ｂには図
６及び図９に示したように上下方向の貫通孔１６が形成
され、残りの１ヶ所の円柱部１５ｃには図４に示したよ
うに突起部１７が設けられている。Embodiments of the pressure sensor according to the present invention will be described in detail below with reference to the accompanying drawings. 1 to 9 show an embodiment of the pressure sensor 11, and like the previous embodiment, the housing 12 is provided with an air intake 13 projecting from the center of the lower surface. And this housing 12
3 are equidistantly provided on the upper peripheral edge of the columnar columnar portions 15a, 15b, 15c for fixing the peripheral edge portion of the fixed electrode plate 14, and two columnar portions 15a, 15b among them are shown in FIG. As shown in FIG. 9, a vertical through hole 16 is formed, and the remaining columnar portion 15c is provided with a protrusion 17 as shown in FIG.
【０００９】一方、固定電極板１４は薄い金属製の円板
で構成されており、上記ハウジング１２の各円柱部１５
ａ，１５ｂ，１５ｃに対応して張出部１８ａ，１８ｂ，
１８ｃが周囲３ヶ所に形成されている．また、各張出部
１８ａ，１８ｂ，１８ｃの中央には図６及び図９に示し
たように固定電極端子１９と一緒にハウジング１２に固
定するための取付孔２０が設けられている。この取付孔
２０は、図９に示したように、左右に一対の小孔部２１
ａ，２１ｂを有する円孔であり、左右の小孔部２１ａ，
２１ｂから内部に導電性接着剤が流れ込み易い形状とな
っている。一方、上記ハウジング１２の円柱部１５ａ，
１５ｂに形成されている貫通孔１６は、図９に示したよ
うに、円柱部１５ａ，１５ｂの上面開口が上記取付孔２
０の小孔部２１ａ，２１ｂ側と同じ大きさの楕円形状を
している。そして、上面開口から下側へ向かってテーパ
２２が付けられており、さらにその下側にはハウジング
１２の底を貫通する細長い孔が形成されている。なお、
上記固定電極端子１９は、図３及び図９に示したよう
に、頭部２３と長い脚部２４とで構成されるが、この頭
部２３は上記取付孔２０の円孔の直径より小さく、また
上記貫通孔１６の上面開口の短軸径より大きい。また、
この固定電極端子１９は特にピン形状のボリュームの小
さいものが望ましい。On the other hand, the fixed electrode plate 14 is composed of a thin metal disk, and each cylindrical portion 15 of the housing 12 is formed.
a, 15b, 15c corresponding to the overhanging portions 18a, 18b,
18c are formed in three places around. Further, as shown in FIGS. 6 and 9, a mounting hole 20 for fixing to the housing 12 together with the fixed electrode terminal 19 is provided at the center of each of the overhanging portions 18a, 18b and 18c. As shown in FIG. 9, the mounting hole 20 has a pair of small hole portions 21 on the left and right.
a circular hole having a and 21b, and small hole portions 21a on the left and right,
The shape is such that the conductive adhesive easily flows in from 21b. On the other hand, the cylindrical portion 15a of the housing 12
As shown in FIG. 9, the through-hole 16 formed in 15b is such that the upper surface openings of the columnar portions 15a and 15b are the above-mentioned mounting holes 2.
It has an elliptical shape with the same size as the 0 side of the small holes 21a and 21b. Further, a taper 22 is attached downward from the upper surface opening, and a slender hole penetrating the bottom of the housing 12 is formed further below the taper 22. In addition,
As shown in FIGS. 3 and 9, the fixed electrode terminal 19 is composed of a head portion 23 and a long leg portion 24. The head portion 23 is smaller than the diameter of the circular hole of the mounting hole 20, Further, it is larger than the minor axis diameter of the upper surface opening of the through hole 16. Also,
The fixed electrode terminal 19 is preferably a pin-shaped one having a small volume.
【００１０】上記ハウジング１２に固定電極板１４を取
り付ける場合には、先ずハウジング１２の上面に固定電
極板１４を載置し、２ヶ所の取付孔２０を円柱部１５
ａ，１５ｂの各貫通孔１６に位置合わせすると共に、１
ヶ所の取付孔２０を円柱部１５ｃの突起部１７に嵌め合
わせる。そして、固定電極板１４の上から取付孔２０内
に固定電極端子１９を挿入し、脚部２４の先端を貫通孔
１６から突出させる。この時、固定電極端子１９の頭部
２３は貫通孔１６の上面開口縁に係合する。そして、こ
の状態で取付孔２０の小孔２１ａ，２１ｂ内にエポキシ
系銀ペースト等の導電性接着剤２５を注入すると、図６
に示したように、導電性接着剤２５が貫通孔１６のテー
パ２２内に流れ込むと共に、固定電極端子１９の頭部２
３の周囲にも充填され、更に頭部２３が導電性接着剤２
５によって被覆される。なお、図４に示したように、円
柱部１５ｃの突起部１７の周囲にも導電性接着剤２５を
充填して突起部１７と固定電極板１４とを接着する。こ
のように、固定電極端子１９の周囲に導電性接着剤２５
を充填することで、ハウジング１２に対して固定電極板
１４と固定電極端子１９が一体となって確実に固定され
ると共に、固定電極板１４と固定電極端子１９との間の
導通も確実となる。When the fixed electrode plate 14 is attached to the housing 12, the fixed electrode plate 14 is first placed on the upper surface of the housing 12 and the mounting holes 20 at two places are formed in the cylindrical portion 15.
Align with each through hole 16 of a and 15b, and
The mounting holes 20 at several places are fitted to the protrusions 17 of the columnar portion 15c. Then, the fixed electrode terminal 19 is inserted into the mounting hole 20 from above the fixed electrode plate 14, and the tip of the leg portion 24 is projected from the through hole 16. At this time, the head 23 of the fixed electrode terminal 19 engages with the opening edge of the upper surface of the through hole 16. Then, when a conductive adhesive 25 such as an epoxy-based silver paste is injected into the small holes 21a and 21b of the mounting hole 20 in this state, as shown in FIG.
As shown in FIG. 3, the conductive adhesive 25 flows into the taper 22 of the through hole 16 and the head 2 of the fixed electrode terminal 19
3 is also filled around the head 3, and the head 23 further has a conductive adhesive 2
Covered by 5. As shown in FIG. 4, the conductive adhesive 25 is also filled around the protrusion 17 of the column 15c to bond the protrusion 17 and the fixed electrode plate 14 together. As described above, the conductive adhesive 25 is formed around the fixed electrode terminal 19.
By filling with, the fixed electrode plate 14 and the fixed electrode terminal 19 are securely fixed to the housing 12 as a unit, and the conduction between the fixed electrode plate 14 and the fixed electrode terminal 19 is also ensured. .
【００１１】一方、前記固定電極板１４の下面側には、
同心円状の可動電極板２６及びダイヤフラム２７がそれ
ぞれ所定の隙間を設けた状態で配置される。可動電極板
２６は固定電極板１４との間に設けられる隙間が全面に
亘って同一寸法を保持するように配置され、図４及び図
７に示したように、可動電極板２６の下面中央部がダイ
ヤフラム２７の上面中央部に半田付けされている。ダイ
ヤフラム２７は、その周縁部がハウジング１２の底部上
面にエポキシ系接着剤によって固定されていると共に、
図５及び図８に示したように、その周縁部の１ヶ所にピ
ン形状の可動電極端子２８が立設されている。この可動
電極端子２８は、上記固定電極端子１９と同様、頭部２
９と脚部３０とで構成されており、ハウジング１２に設
けられた貫通孔３１に脚部３０が挿入される。脚部３０
の先端が貫通孔３１から突出した状態で頭部２９及びダ
イヤフラム２７の周縁固定部を覆うようにして導電性接
着剤３２を充填すると、可動電極端子２８がハウジング
１２に固定されると共に、可動電極端子２８とダイヤフ
ラム２７との導通が確実にとれる。なお、上記いずれの
導電性接着剤２５，３２も、約１２０°Ｃのキュアー炉
で５分間ほど加熱することで固着する。On the other hand, on the lower surface side of the fixed electrode plate 14,
The movable electrode plate 26 and the diaphragm 27, which are concentric, are arranged with a predetermined gap therebetween. The movable electrode plate 26 is arranged so that the gap provided between the movable electrode plate 26 and the fixed electrode plate 14 maintains the same size over the entire surface. As shown in FIGS. Is soldered to the central portion of the upper surface of the diaphragm 27. The periphery of the diaphragm 27 is fixed to the upper surface of the bottom of the housing 12 with an epoxy adhesive, and
As shown in FIGS. 5 and 8, a pin-shaped movable electrode terminal 28 is provided upright at one position on the peripheral portion thereof. The movable electrode terminal 28 is similar to the fixed electrode terminal 19 in the head 2
9 and a leg portion 30, the leg portion 30 is inserted into a through hole 31 provided in the housing 12. Leg 30
When the conductive adhesive 32 is filled so as to cover the head portion 29 and the peripheral edge fixed portion of the diaphragm 27 with the tip of the movable electrode protruding from the through hole 31, the movable electrode terminal 28 is fixed to the housing 12 and the movable electrode The electrical connection between the terminal 28 and the diaphragm 27 can be ensured. It should be noted that any of the above conductive adhesives 25 and 32 is fixed by heating for about 5 minutes in a cure oven at about 120 ° C.
【００１２】このようにして完成させた圧力センサ１１
の圧力感度は、従来のものに比べて大幅に向上する。例
えば、圧力センサ１１に掛かる空気圧が０ｍｍＨｇの時
の静電容量の値と、空気圧が２８０ｍｍＨｇ（圧力セン
サを血圧計用として使用したときの最大空気圧とほぼ同
じ）の時の静電容量の値を測定した所、その容量変化が
上記実施例に係る圧力センサ１１の場合には１００サン
プル測定した平均が１５．７３８〔ｐＦ〕であったのに
対して、上述の従来例に係る圧力センサ１の場合には１
００サンプル測定した平均が１２．３０６〔ｐＦ〕であ
った。したがって、その差３．４３２（１５．７３８−
１２．３０６）となり、圧力感度が概ね２８％も向上し
たことになる。The pressure sensor 11 thus completed
The pressure sensitivity of is greatly improved compared to the conventional one. For example, the capacitance value when the air pressure applied to the pressure sensor 11 is 0 mmHg and the capacitance value when the air pressure is 280 mmHg (approximately the same as the maximum air pressure when the pressure sensor is used for a sphygmomanometer) As a result of the measurement, in the case of the pressure sensor 11 according to the above-described embodiment, the change in the capacitance was 15.738 [pF], which was an average of 100 samples. In case 1
The average of the 00 samples measured was 12.306 [pF]. Therefore, the difference 3.432 (15.738-
12.306), which means that the pressure sensitivity is improved by about 28%.
【００１３】また、本実施例に係る圧力センサ１１は、
圧力感度だけなく直線性も大幅に向上する。直線性は、
圧力センサ１１に所定の空気圧を加えた時の入力側と出
力側の圧力をそれぞれ測定し、そのときの圧力差の大小
で善し悪しを判断することができ、圧力差が小さいほど
直線性に優れる。図１０は、上記実施例に係る圧力セン
サ１１と従来の圧力センサ１との間で直線性を比較した
ものであり、空気圧が０ｍｍＨｇから２８０ｍｍＨｇの
間の数ヶ所で入出力側双方の圧力を測定し、その圧力差
をそれぞれプロットした。これによれば、各測定圧力に
おける圧力差は、実施例の場合が従来例に比べて約１／
２の値となっている。換言すれば、本実施例の圧力セン
サ１１は、従来例の圧力センサ１に対して約２倍の直線
性があることになる。このことは測定値を補正して直線
に近づけるために用いるトリマ抵抗の抵抗値が小さくて
済むことを意味しており、その分ノイズに対する影響が
少なくなり信頼性がアップすると共にノイズ対策も容易
となる。Further, the pressure sensor 11 according to this embodiment is
Not only pressure sensitivity but also linearity is greatly improved. Linearity is
The pressure on the input side and the pressure on the output side when a predetermined air pressure is applied to the pressure sensor 11 can be measured respectively, and it can be judged whether the pressure difference is good or bad. The smaller the pressure difference, the better the linearity. FIG. 10 compares the linearity between the pressure sensor 11 according to the above-described embodiment and the conventional pressure sensor 1, and measures the pressure on both the input and output sides at several points where the air pressure is between 0 mmHg and 280 mmHg. Then, the pressure difference was plotted. According to this, the pressure difference at each measured pressure is about 1 / th in the case of the embodiment as compared with the conventional example.
It has a value of 2. In other words, the pressure sensor 11 of this embodiment has approximately twice the linearity of the pressure sensor 1 of the conventional example. This means that the resistance value of the trimmer resistor used to correct the measured value and bring it closer to a straight line can be small, which reduces the effect on noise, improves reliability, and facilitates noise countermeasures. Become.
【００１４】[0014]
【発明の効果】以上説明したように、本発明に係る圧力
センサによれば、固定電極を導電性接着剤によりハウジ
ングに固定したから、従来のようなネジの緩みなどによ
って固定電極と可動電極との間の隙間が経時変化するこ
とがない。また、固定電極とその電極端子とを別体で構
成したので、電極端子が持つ浮遊容量が固定電極と可動
電極との間の静電容量の測定に影響を及ぼすことが少な
く、その分圧力感度や直線性が向上した。その結果、従
来の圧力センサに比べて測定精度が大幅にアップし信頼
性を一段と増すことができた。As described above, according to the pressure sensor of the present invention, since the fixed electrode is fixed to the housing by the conductive adhesive, the fixed electrode and the movable electrode can be separated from each other by loosening a screw as in the prior art. The gap between them does not change over time. In addition, since the fixed electrode and its electrode terminal are configured separately, the stray capacitance of the electrode terminal does not affect the measurement of the electrostatic capacitance between the fixed electrode and the movable electrode, and the pressure sensitivity is correspondingly increased. And improved linearity. As a result, the measurement accuracy was greatly improved and the reliability was further increased compared to the conventional pressure sensor.
【図１】本発明に係る圧力センサの一実施例を示す斜視
図である。FIG. 1 is a perspective view showing an embodiment of a pressure sensor according to the present invention.
【図２】本発明に係る圧力センサの一実施例を示す平面
図である。FIG. 2 is a plan view showing an embodiment of a pressure sensor according to the present invention.
【図３】上記図２のＰ1 −Ｏ−Ｐ2 線断面図である。3 is a cross-sectional view taken along line P1-OP2 of FIG.
【図４】上記図２のＯ−Ｐ3 線断面図である。FIG. 4 is a cross-sectional view taken along line OP3 of FIG.
【図５】上記図２のＯ−Ｐ4 線断面図である。5 is a sectional view taken along the line O-P4 in FIG.
【図６】上記図３のＡ部拡大図である。FIG. 6 is an enlarged view of part A of FIG.
【図７】上記図３のＢ部拡大図である。FIG. 7 is an enlarged view of part B of FIG.
【図８】上記図５のＣ部拡大図である。FIG. 8 is an enlarged view of portion C of FIG.
【図９】上記図６の拡大斜視図である。9 is an enlarged perspective view of the above FIG.
【図１０】圧力センサの直線性を従来例と比較したとき
のグラフである。FIG. 10 is a graph comparing the linearity of the pressure sensor with that of the conventional example.
【図１１】従来における圧力センサの一例を示す斜視図
である。FIG. 11 is a perspective view showing an example of a conventional pressure sensor.
【図１２】上記図１１における圧力センサの縦断面図で
ある。12 is a vertical cross-sectional view of the pressure sensor in FIG.
１１ 圧力センサ １２ ハウジング １４ 固定電極板（固定電極） １９ 固定電極端子 ２５ 導電性接着剤 ２６ 可動電極板（可動電極） ２７ ダイヤフラム ２８ 可動電極端子 11 Pressure Sensor 12 Housing 14 Fixed Electrode Plate (Fixed Electrode) 19 Fixed Electrode Terminal 25 Conductive Adhesive 26 Movable Electrode Plate (Movable Electrode) 27 Diaphragm 28 Movable Electrode Terminal
Claims (1)
ヤフラムと、該ダイヤフラムに固着された可動電極と、
該可動電極に対向して設けられた固定電極とをハウジン
グに組み込み、且つ前記可動電極および固定電極にハウ
ジングから突出する電極端子をそれぞれ設けてなる圧力
センサにおいて、 前記固定電極および固定電極の電極端子を導電性接着剤
によりハウジングに一体に固定したことを特徴とする圧
力センサ。1. A diaphragm that generates a displacement in response to a measured pressure, and a movable electrode fixed to the diaphragm.
A pressure sensor, wherein a fixed electrode provided opposite to the movable electrode is incorporated in a housing, and electrode terminals projecting from the housing are provided on the movable electrode and the fixed electrode, respectively. A pressure sensor, characterized in that is integrally fixed to the housing with a conductive adhesive.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12836195A JP3465996B2 (en) | 1995-05-26 | 1995-05-26 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12836195A JP3465996B2 (en) | 1995-05-26 | 1995-05-26 | Pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08320267A true JPH08320267A (en) | 1996-12-03 |
| JP3465996B2 JP3465996B2 (en) | 2003-11-10 |
Family
ID=14982926
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12836195A Expired - Fee Related JP3465996B2 (en) | 1995-05-26 | 1995-05-26 | Pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3465996B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001508540A (en) * | 1997-01-13 | 2001-06-26 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | Diaphragm for pressure sensor |
| US6810746B2 (en) * | 2000-03-25 | 2004-11-02 | Robert Bosch Gmbh | Sensor arrangement with pressure detector and sensor circuit |
| JP2011007499A (en) * | 2009-06-23 | 2011-01-13 | Kyocera Corp | Substrate for pressure detector, and pressure detector |
| JP2012255800A (en) * | 2007-07-10 | 2012-12-27 | Robert Bosch Gmbh | Connection unit for pressure measuring cell |
-
1995
- 1995-05-26 JP JP12836195A patent/JP3465996B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001508540A (en) * | 1997-01-13 | 2001-06-26 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | Diaphragm for pressure sensor |
| US6810746B2 (en) * | 2000-03-25 | 2004-11-02 | Robert Bosch Gmbh | Sensor arrangement with pressure detector and sensor circuit |
| JP2012255800A (en) * | 2007-07-10 | 2012-12-27 | Robert Bosch Gmbh | Connection unit for pressure measuring cell |
| JP2011007499A (en) * | 2009-06-23 | 2011-01-13 | Kyocera Corp | Substrate for pressure detector, and pressure detector |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3465996B2 (en) | 2003-11-10 |
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