JPH08303475A - Bearing device - Google Patents
Bearing deviceInfo
- Publication number
- JPH08303475A JPH08303475A JP12918395A JP12918395A JPH08303475A JP H08303475 A JPH08303475 A JP H08303475A JP 12918395 A JP12918395 A JP 12918395A JP 12918395 A JP12918395 A JP 12918395A JP H08303475 A JPH08303475 A JP H08303475A
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- bearing
- air vent
- groove
- inner ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Mounting Of Bearings Or Others (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】この発明は、半導体製造装置等の
真空環境下で使用される軸受装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bearing device used in a vacuum environment such as semiconductor manufacturing equipment.
【0002】[0002]
【従来の技術】従来、真空槽内に設置されるローラ支持
用の軸受装置として、図3に示すものが使用されてい
る。これは、軸箱51内に複数の玉軸受52を設置し、
両軸受52の内輪に嵌合させた軸53にローラ54とス
プロケット55とを設けたものである。両軸受52の内
輪間および外輪間には内輪間座56および外輪間座57
を各々介在させ、軸箱51には外輪間座の内周に貫通す
る空気抜き孔58を形成してある。このように空気抜き
孔58を形成することにより、真空槽の使用開始時に、
軸受52の内部の空気が早く抜け、これにより真空槽内
を目的とする真空度に達成するまでの時間を短くしてい
る。2. Description of the Related Art Conventionally, as shown in FIG. 3, a bearing device for supporting rollers installed in a vacuum chamber has been used. This is to install a plurality of ball bearings 52 in the axle box 51,
A roller 54 and a sprocket 55 are provided on a shaft 53 fitted to the inner rings of both bearings 52. An inner ring spacer 56 and an outer ring spacer 57 are provided between the inner and outer rings of both bearings 52.
And an air vent hole 58 penetrating the inner circumference of the outer ring spacer is formed in the axle box 51. By forming the air vent hole 58 in this way, at the start of use of the vacuum chamber,
The air inside the bearing 52 quickly escapes, thereby shortening the time required to achieve the desired degree of vacuum in the vacuum chamber.
【0003】[0003]
【発明が解決しようとする課題】この従来構造では、軸
受52の内部の空気は速やかに逃げるが、軸受内輪と軸
との嵌合部分aや、面取り部分b、あるいは盗み部cに
存在していた空気は逃げ道がほとんどないために、真空
槽全体の真空度を短時間のうちに高めるにはなお不満が
残る。In this conventional structure, the air inside the bearing 52 quickly escapes, but it exists in the fitting portion a between the bearing inner ring and the shaft, the chamfered portion b, or the stove portion c. Since the air has almost no escape route, it is still unsatisfactory to raise the vacuum degree of the entire vacuum chamber in a short time.
【0004】この発明の目的は、真空環境下での使用時
に、軸受内輪と軸との嵌合部、面取部、盗み部等にある
空気が外部に逃げ易い軸受装置を提供することである。An object of the present invention is to provide a bearing device in which air in a fitting portion between a bearing inner ring and a shaft, a chamfered portion, a stolen portion, etc. easily escapes to the outside when used in a vacuum environment. .
【0005】[0005]
【課題を解決するための手段】この発明の軸受装置は、
軸箱内に転がり軸受を複数個並べて設置し、前記各転が
り軸受にわたって軸受内輪に軸を嵌合させた軸受装置に
おいて、前記軸の外径面における軸受嵌合部分に空気抜
き溝を設けたことを特徴とする。請求項1の発明では、
前記空気抜き溝をねじ溝状に形成する。請求項2の発明
では、前記空気抜き溝を軸方向に沿う溝とする。なお、
特許請求の範囲で言う複数の転がり軸受とは、内輪が複
数個に分割された組み合わせ軸受等の場合は、全体とし
ての軸受が1個とされるものも含む意味である。The bearing device of the present invention comprises:
In a bearing device in which a plurality of rolling bearings are arranged side by side in a shaft box, and the shaft is fitted to the bearing inner ring over the rolling bearings, an air vent groove is provided in the bearing fitting portion on the outer diameter surface of the shaft. Characterize. According to the invention of claim 1,
The air vent groove is formed in a thread groove shape. In the invention of claim 2, the air vent groove is a groove along the axial direction. In addition,
In the case of a combination bearing in which the inner ring is divided into a plurality, the term "a plurality of rolling bearings" as used in the claims means that the bearing as a whole is one.
【0006】[0006]
【作用】この構成によると、軸の外径面にねじ溝状また
は軸方向の空気抜き溝が設けられているため、軸受内輪
と軸の嵌合部や、面取部、盗み部分などが前記空気抜き
溝で連通する。そのため、真空環境下で使用するとき
に、前記面取部等にあった空気が外部に逃げ易く、真空
槽全体の真空度を短時間のうちに高めることができる。According to this structure, the shaft outer diameter surface is provided with the thread groove shape or the axial air bleeding groove, so that the fitting portion between the bearing inner ring and the shaft, the chamfered portion, the stolen portion, and the like are evacuated. Connect with a groove. Therefore, when used in a vacuum environment, the air in the chamfered portion or the like easily escapes to the outside, and the degree of vacuum of the entire vacuum chamber can be increased in a short time.
【0007】[0007]
【実施例】この発明の一実施例を図1に基づいて説明す
る。軸箱1内に2個の転がり軸受2,2を設置し、軸箱
1を貫通する軸3を両軸受2,2の内輪7,7に嵌合さ
せてある。軸3には軸箱1の両側でローラ4,5を設
け、かつ一端にスプロケット6を設けてある。各軸受2
は、深溝玉軸受からなり、内輪7と外輪8の間に、保持
器9で保持された鋼球等の転動体10を介在させて構成
される。両側の軸受2,2の内輪7,7間には内輪間座
11を介在させ、外輪8,8間には外輪間座12を介在
させてある。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention will be described with reference to FIG. Two rolling bearings 2 and 2 are installed in a shaft box 1, and a shaft 3 penetrating the shaft box 1 is fitted to inner rings 7 and 7 of both bearings 2 and 2. The shaft 3 is provided with rollers 4 and 5 on both sides of the shaft box 1 and a sprocket 6 at one end. Each bearing 2
Is a deep groove ball bearing, and is formed by interposing a rolling element 10 such as a steel ball held by a cage 9 between an inner ring 7 and an outer ring 8. An inner ring spacer 11 is interposed between the inner rings 7, 7 of the bearings 2, 2 on both sides, and an outer ring spacer 12 is interposed between the outer rings 8, 8.
【0008】軸3の一方のローラ4は、軸端に一体にフ
ランジ状に形成したものである。他方のローラ5は、ス
プロケット6と共に軸3に外嵌させ、両軸受2,2の軸
受内輪7,7を両側のローラ4,5間で挟み付けてい
る。内輪7およびローラ5の内径面の両端は面取りを施
してある。軸箱1の中央には空気抜き孔18を設け、外
輪間座12の外周の連通溝19およびこの溝19から内
径面に貫通した空気抜き孔20を介して、両軸受2,2
間の空間を外部に開口させてある。One roller 4 of the shaft 3 is integrally formed at the shaft end in a flange shape. The other roller 5 is fitted onto the shaft 3 together with the sprocket 6, and the bearing inner rings 7, 7 of both bearings 2, 2 are sandwiched between the rollers 4, 5 on both sides. Both ends of the inner ring 7 and the inner diameter surface of the roller 5 are chamfered. An air vent hole 18 is provided in the center of the axle box 1, and both bearings 2, 2 are provided through a communication groove 19 on the outer periphery of the outer ring spacer 12 and an air vent hole 20 penetrating from the groove 19 to the inner diameter surface.
The space between them is opened to the outside.
【0009】上記構成において、この実施例では軸3の
外径面にねじ溝状の空気抜き溝13を設けている。空気
抜き溝13は、軸3における両軸受2,2の内輪7,7
とローラ5とに嵌合する範囲に連続して形成してあり、
その両端は軸3の外径面に加工した環状溝14,15に
開口している。一方の環状溝14はフランジ状のローラ
4に接して軸受内輪7を嵌合させることを可能とするた
めの盗み部cとなり、他方の環状溝15は空気抜き溝1
3の溝加工を可能とするための盗み部cとなる。内輪間
座11には内径面に環状の連通溝16を設け、この溝1
6から外径面に貫通する空気抜き孔17を周方向の1か
所ないし複数箇所に設けてある。この軸受装置は、例え
ば真空槽内に設置され、ローラ4,5によるワークの搬
送等に使用される。スプロケット6は回転駆動用のチェ
ーン(図示せず)が掛装される。In the above-mentioned structure, in this embodiment, a screw groove-shaped air vent groove 13 is provided on the outer diameter surface of the shaft 3. The air vent groove 13 is formed by the inner rings 7, 7 of the two bearings 2, 2 on the shaft 3.
And the roller 5 are continuously formed in the range of fitting,
Both ends thereof are open to annular grooves 14 and 15 formed on the outer diameter surface of the shaft 3. One annular groove 14 contacts the flange-shaped roller 4 and serves as a stealing portion c for allowing the bearing inner ring 7 to be fitted, and the other annular groove 15 is the air vent groove 1
It becomes a stealing part c for enabling the groove processing of No. 3. The inner ring spacer 11 is provided with an annular communication groove 16 on its inner diameter surface.
Air vent holes 17 penetrating from 6 to the outer diameter surface are provided at one or a plurality of positions in the circumferential direction. This bearing device is installed, for example, in a vacuum chamber and is used for transporting a work by the rollers 4 and 5. The sprocket 6 is mounted with a chain (not shown) for rotational drive.
【0010】この構成の軸受装置によると、真空槽内で
使用したときに、軸受2,2の内部の空気は軸箱1の空
気抜き孔18から逃げる。軸3と各軸受内輪7,7との
嵌合面aや、軸受内輪7およびローラ5の面取り部bに
生じる空間、ならびに盗み部cとなる環状溝14,15
内の空間は、軸3の空気抜き溝13で連通する。そのた
め、前記各空間(a〜c)の空気は、内輪間座11の連
通溝16および空気抜き孔17を介して内輪間座11の
外方に逃げ、さらに軸箱1の空気抜き孔18を介して外
部に逃げる。このように、軸受内2内の空気だけでな
く、軸受2と軸3の間の各空間の空気も逃げ易くなるた
め、真空槽全体の真空度を短時間のうちに高めることが
できる。半導体製造装置等では、高真空が要求されるた
め、僅かな空気の残存も問題となるが、このような極限
状態の使用の場合に、簡単な構造であるが、空気抜き溝
13による効果が有効に発揮される。According to the bearing device having this structure, the air inside the bearings 2 and 2 escapes from the air vent hole 18 of the shaft box 1 when used in a vacuum chamber. The fitting surface a between the shaft 3 and each bearing inner ring 7, 7, the space generated in the bearing inner ring 7 and the chamfered portion b of the roller 5, and the annular grooves 14, 15 serving as the stove portion c
The inner space communicates with the air vent groove 13 of the shaft 3. Therefore, the air in each of the spaces (a to c) escapes to the outside of the inner ring spacer 11 through the communication groove 16 and the air vent hole 17 of the inner ring spacer 11 and further through the air vent hole 18 of the axle box 1. Escape to the outside. As described above, not only the air in the bearing 2 but also the air in each space between the bearing 2 and the shaft 3 can easily escape, so that the vacuum degree of the entire vacuum chamber can be increased in a short time. A high vacuum is required in a semiconductor manufacturing apparatus or the like, and a slight amount of air remains a problem, but in such an extreme state of use, the structure is simple, but the effect of the air vent groove 13 is effective. To be demonstrated.
【0011】図2はこの発明の他の実施例を示す。この
例は、図1の実施例において、ねじ溝状に設ける空気抜
き溝13に代えて、軸方向に延びるキー溝状の空気抜き
溝23を複数本形成したものである。その他の構成は図
1の実施例と同じである。軸方向の空気抜き溝23は1
本であっても良い。このように軸方向の空気抜き溝23
を設けた場合でも、軸3と軸受内輪7等との間の各空間
が空気抜き溝23に連通するため、前記各空間の空気が
抜け易くなり、真空度を短時間で高める効果が得られ
る。FIG. 2 shows another embodiment of the present invention. In this example, a plurality of key groove-shaped air vent grooves 23 extending in the axial direction are formed in place of the air vent groove 13 provided in the thread groove shape in the embodiment of FIG. The other structure is the same as that of the embodiment shown in FIG. The axial air vent groove 23 is 1
It may be a book. In this way, the axial air vent groove 23
Even in the case where the space is provided, each space between the shaft 3 and the bearing inner ring 7 and the like communicates with the air vent groove 23, so that the air in each space easily escapes, and the effect of increasing the degree of vacuum in a short time can be obtained.
【0012】[0012]
【発明の効果】この発明の軸受装置は、軸の外径面にお
ける軸受嵌合部分にねじ溝状または軸方向の空気抜き溝
を設けたため、軸受内輪と軸の嵌合部や、面取部、盗み
部分などの空気が前記空気抜き溝で連通して外部に逃げ
易く、この軸受装置を内部に設置した真空槽の真空度を
短時間のうちに高めることができる。Since the bearing device of the present invention is provided with a thread groove shape or an axial air bleed groove in the bearing fitting portion on the outer diameter surface of the shaft, the fitting portion between the bearing inner ring and the shaft, the chamfered portion, Air in the stolen portion or the like is easily communicated with the air vent groove and easily escapes to the outside, and the vacuum degree of the vacuum chamber in which this bearing device is installed can be increased in a short time.
【図1】この発明の一実施例の破断平面図である。FIG. 1 is a cutaway plan view of an embodiment of the present invention.
【図2】この発明の他の実施例の破断平面図である。FIG. 2 is a cutaway plan view of another embodiment of the present invention.
【図3】従来例の破断平面図である。FIG. 3 is a cutaway plan view of a conventional example.
1…軸箱、2…軸受、3…軸、4,5…ローラ、6…ス
プロケット、7…軸受内輪、11…内輪間座、12…外
輪間座、13…空気抜き溝、16…連通溝、17…空気
抜き孔、18…空気抜き孔、23…空気抜き溝DESCRIPTION OF SYMBOLS 1 ... Shaft box, 2 ... Bearing, 3 ... Shaft, 4, 5 ... Roller, 6 ... Sprocket, 7 ... Bearing inner ring, 11 ... Inner ring spacer, 12 ... Outer ring spacer, 13 ... Air vent groove, 16 ... Communication groove, 17 ... Air vent hole, 18 ... Air vent hole, 23 ... Air vent groove
Claims (2)
し、前記各転がり軸受にわたって軸受内輪に軸を嵌合さ
せた軸受装置において、前記軸の外径面における軸受嵌
合部分に、ねじ溝状の空気抜き溝を設けたことを特徴と
する軸受装置。1. A bearing device in which a plurality of rolling bearings are arranged side by side in a shaft box, and a shaft is fitted to a bearing inner ring over each of the rolling bearings, wherein a screw is provided at a bearing fitting portion on an outer diameter surface of the shaft. A bearing device having a groove-shaped air vent groove.
し、前記各転がり軸受にわたって軸受内輪に軸を嵌合さ
せた軸受装置において、前記軸の外径面における軸受嵌
合部分に、軸方向に沿う一または複数条の空気抜き溝を
設けたことを特徴とする軸受装置。2. A bearing device in which a plurality of rolling bearings are arranged side by side in a shaft box, and a shaft is fitted to a bearing inner ring across the rolling bearings, wherein a shaft is fitted to a bearing fitting portion on an outer diameter surface of the shaft. A bearing device comprising one or a plurality of air bleeding grooves arranged along the direction.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12918395A JPH08303475A (en) | 1995-04-27 | 1995-04-27 | Bearing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12918395A JPH08303475A (en) | 1995-04-27 | 1995-04-27 | Bearing device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH08303475A true JPH08303475A (en) | 1996-11-19 |
Family
ID=15003202
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12918395A Pending JPH08303475A (en) | 1995-04-27 | 1995-04-27 | Bearing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH08303475A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5901013A (en) * | 1997-08-11 | 1999-05-04 | International Business Machines Corporation | Fluid spindle bearing vent |
JP7033817B1 (en) * | 2021-12-14 | 2022-03-11 | 片山チエン株式会社 | Fixed structure of sprocket |
-
1995
- 1995-04-27 JP JP12918395A patent/JPH08303475A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5901013A (en) * | 1997-08-11 | 1999-05-04 | International Business Machines Corporation | Fluid spindle bearing vent |
JP7033817B1 (en) * | 2021-12-14 | 2022-03-11 | 片山チエン株式会社 | Fixed structure of sprocket |
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