JPH0828718A - Orifice valve - Google Patents
Orifice valveInfo
- Publication number
- JPH0828718A JPH0828718A JP6159047A JP15904794A JPH0828718A JP H0828718 A JPH0828718 A JP H0828718A JP 6159047 A JP6159047 A JP 6159047A JP 15904794 A JP15904794 A JP 15904794A JP H0828718 A JPH0828718 A JP H0828718A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- plate
- valve body
- orifice
- flow path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/40—Static mixers
- B01F25/45—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/40—Static mixers
- B01F25/45—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads
- B01F25/452—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads characterised by elements provided with orifices or interstitial spaces
- B01F25/4521—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads characterised by elements provided with orifices or interstitial spaces the components being pressed through orifices in elements, e.g. flat plates or cylinders, which obstruct the whole diameter of the tube
- B01F25/45212—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads characterised by elements provided with orifices or interstitial spaces the components being pressed through orifices in elements, e.g. flat plates or cylinders, which obstruct the whole diameter of the tube the elements comprising means for adjusting the orifices
Landscapes
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Details Of Valves (AREA)
- Sliding Valves (AREA)
- Check Valves (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、管路の開閉と流体の流
量制御とを行うオリフィス弁に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an orifice valve for opening / closing a pipeline and controlling the flow rate of fluid.
【0002】[0002]
【従来の技術】従来、管路の開閉と流量制御は、それぞ
れの用途の弁を別個に据付けることにより行っている。
たとえば、管路の開閉を行う場合、図4に示したような
逆止弁を用いている。逆止弁は、弁箱1の内部に流路2
を開放する位置と閉塞する位置にわたって揺動する弁体
3を配置し、弁箱1の内周面に弁座部4を形成してい
る。弁体3は回転支軸5において保持されており、弁箱
1の内周面には、流路2の全開状態において弁体3が当
接する弁体ストッパー6が形成されている。弁体3は弁
体シート7を設け、弁座部4は弁箱シート8を設けてい
る。2. Description of the Related Art Conventionally, opening and closing of pipes and control of flow rate have been performed by separately installing valves for respective applications.
For example, when opening and closing a pipeline, a check valve as shown in FIG. 4 is used. The check valve has a flow path 2 inside the valve box 1.
The valve body 3 that swings between the open position and the closed position is disposed, and the valve seat portion 4 is formed on the inner peripheral surface of the valve box 1. The valve body 3 is held by the rotary support shaft 5, and a valve body stopper 6 with which the valve body 3 abuts when the flow path 2 is fully opened is formed on the inner peripheral surface of the valve box 1. The valve body 3 is provided with a valve body seat 7, and the valve seat portion 4 is provided with a valve box seat 8.
【0003】このような構成により、流路2を流体が正
方向(矢印で示した方向)に流れるときは、流体が弁体
3に衝突して押し上げるため弁体3は回転支軸5の軸心
廻りに開動し、流体が逆流するときは、弁体3が自重量
で閉動方向に揺動するとともに逆流する流体が弁体3を
閉動方向に押圧して、弁体3により流路2が閉塞され
る。With such a structure, when the fluid flows through the flow path 2 in the forward direction (the direction indicated by the arrow), the fluid collides with the valve body 3 and pushes it up. When the fluid moves back around the center and the fluid flows backward, the valve body 3 oscillates in the closing direction by its own weight and the fluid flowing backward presses the valve body 3 in the closing direction, and the flow path is caused by the valve body 3. 2 is closed.
【0004】一方、流量制御を行う場合は、図5に示し
たようなオリフィス弁を用いている。図5において、管
路9に配設された環状の本体10はくぼみ11を形成し
ており、くぼみ11内に位置して、オリフィス12を有
する固定有孔板13を下流側に設け、オリフィス14を
有する可動有孔板15を上流側に設けている。可動有孔
板15は、ハンドル16の回転により駆動されて流路を
横切る方向に出退可能であり、リップ17の当接によっ
て、固定有孔板13のオリフィス12を開放する位置と
閉塞する位置との間で出退するようになっている。On the other hand, when controlling the flow rate, an orifice valve as shown in FIG. 5 is used. In FIG. 5, an annular main body 10 disposed in the conduit 9 forms a recess 11, a fixed perforated plate 13 having an orifice 12 is provided on the downstream side, and is located in the recess 11. The movable perforated plate 15 having the is provided on the upstream side. The movable perforated plate 15 is driven by the rotation of the handle 16 so as to be able to move in and out in a direction traversing the flow path, and the position where the orifice 12 of the fixed perforated plate 13 is opened and closed by the contact of the lip 17. It is designed to move in and out of.
【0005】このような構成において、ハンドル16を
回転して可動有孔板15を出退させると、オリフィス1
4が存在する位置に依存して固定有孔板13のオリフィ
ス12が開放または閉塞されるので、オリフィス12が
開放される程度を調節することにより流路断面を変化さ
せて被制御流体の流量を制御している。In such a structure, when the handle 16 is rotated to move the movable perforated plate 15 back and forth, the orifice 1
Since the orifice 12 of the fixed perforated plate 13 is opened or closed depending on the position where 4 exists, the flow passage cross section is changed by adjusting the opening degree of the orifice 12 to change the flow rate of the controlled fluid. Have control.
【0006】[0006]
【発明が解決しようとする課題】しかしながら、上記し
たような逆止弁と流量制御弁の両方を配設することは、
弁室や管路の構造あるいは寸法的制約のため困難な場合
がある。However, the provision of both the check valve and the flow control valve as described above is
It may be difficult due to the structure of the valve chamber or the conduit or dimensional restrictions.
【0007】本発明は上記問題を解決するもので、1つ
の弁のスペースで両方の弁の機能が得られるようにする
ことを目的とする。SUMMARY OF THE INVENTION The present invention solves the above problems and aims to provide the functions of both valves in the space of one valve.
【0008】[0008]
【課題を解決するための手段】上記問題を解決するため
に、本発明のオリフィス弁は、弁箱内に回転支軸を揺動
中心として流路を開放する位置と全閉する位置とにわた
って揺動する弁体を配置し、弁体の下流側に、流路を横
切る方向に出退して弁体を前記全閉位置に固定可能な弁
体固定手段を設け、前記弁体は、前記全閉位置において
流路断面に沿って複数のポートを形成する多孔板と、多
孔板の各ポートに対応する複数のオリフィスを有して、
各ポートを閉塞する位置と開放する位置とにわたり摺動
自在に多孔板に係止された可動オリフィス板とで構成し
たものである。In order to solve the above-mentioned problems, the orifice valve of the present invention is oscillated in a valve box between a position where a flow passage is opened and a position where the flow passage is fully closed with a rotary support shaft as a swing center. A moving valve element is arranged, and a valve element fixing means capable of fixing the valve element in the fully closed position by retracting in the direction transverse to the flow path is provided on the downstream side of the valve element. A perforated plate forming a plurality of ports along the flow path cross section in the closed position, and a plurality of orifices corresponding to each port of the perforated plate,
It is composed of a movable orifice plate slidably locked to the perforated plate between the position where each port is closed and the position where it is opened.
【0009】[0009]
【作用】上記構成により、流量制御弁として作動させる
場合は、弁体固定手段を弁箱内に進出させて弁体(可動
オリフィス板と多孔板)を流路全閉位置に固定し、可動
オリフィス板を、多孔板の各ポートを開放または一部閉
塞または全面的に閉塞する位置にわたって摺動させるこ
とにより、流路断面を変化させて流量を制御できる。With the above structure, when operating as a flow control valve, the valve body fixing means is advanced into the valve box to fix the valve body (the movable orifice plate and the perforated plate) to the fully closed position of the flow path, and the movable orifice. The flow rate can be controlled by changing the cross section of the flow path by sliding the plate over a position where each port of the perforated plate is opened, partially closed, or completely closed.
【0010】また、逆止弁として作動させる場合は、弁
体固定手段を弁箱内より後退させて弁体を揺動自在とす
るとともに、可動オリフィス板は多孔板の各ポートを閉
塞する位置とする。これにより、弁箱内を流体が正方向
に流れるときは、流体が弁体に衝突して弁体を開動方向
に押圧し回転支軸の軸心廻りに揺動させて流路を開放
し、流体が逆流するときは、逆流する流体が弁体を閉動
方向に押圧し揺動させて流路を全閉する。このとき、可
動オリフィス板を多孔板に係止させているので、弁体は
一体として揺動する。When operating as a check valve, the valve body fixing means is retracted from the inside of the valve box to allow the valve body to swing, and the movable orifice plate is positioned so as to close each port of the perforated plate. To do. As a result, when the fluid flows in the positive direction in the valve box, the fluid collides with the valve body and presses the valve body in the opening direction, swings around the axis of the rotation support shaft, and opens the flow path. When the fluid flows backward, the fluid that flows backward presses the valve element in the closing direction to oscillate the valve element to fully close the flow path. At this time, since the movable orifice plate is locked to the perforated plate, the valve body swings as a unit.
【0011】[0011]
【実施例】以下、本発明の実施例を図面を参照しながら
説明する。図1から図3は本発明の一実施例のオリフィ
ス弁を示し、弁箱21の内周面に弁座22を形成し、弁
箱21の内部に回転支軸23を揺動中心として流路24
を開放する位置と全閉する位置とにわたって揺動する弁
体25を配置している。弁箱21には、弁体25の下流
側に、流路24を横切る方向に出退して弁体25を流路
の全閉位置に固定可能な弁体固定ボルト26などの弁体
固定手段が設けられるとともに、流路の全開状態におい
て弁体25が当接する弁体ストッパー27が形成されて
いる。Embodiments of the present invention will be described below with reference to the drawings. 1 to 3 show an orifice valve according to an embodiment of the present invention, in which a valve seat 22 is formed on an inner peripheral surface of a valve box 21, and a flow path is formed inside the valve box 21 with a rotary support shaft 23 as a swing center. 24
The valve body 25 is arranged so as to swing between the open position and the fully closed position. In the valve box 21, a valve body fixing means such as a valve body fixing bolt 26 capable of fixing the valve body 25 to the fully closed position of the flow path by retracting in the direction transverse to the flow path 24 on the downstream side of the valve body 25. And a valve body stopper 27 with which the valve body 25 abuts when the flow path is fully opened.
【0012】弁体25は、流路全閉位置において流路断
面に沿って複数のポート28を形成する多孔板29と、
多孔板29の各ポート28に対応する複数のオリフィス
30を有して多孔板29の下流側に配置された可動オリ
フィス板31とで構成されている。多孔板29は回転支
軸23に支持されて揺動自在であり、可動オリフィス板
31は、多孔板29の各ポート28を閉塞する位置と開
放する位置とにわたり摺動自在に多孔板29に係止され
ている。The valve body 25 includes a perforated plate 29 which forms a plurality of ports 28 along the cross section of the flow path at the flow path fully closed position.
The movable orifice plate 31 has a plurality of orifices 30 corresponding to the respective ports 28 of the porous plate 29 and is arranged on the downstream side of the porous plate 29. The perforated plate 29 is supported by the rotary support shaft 23 and is swingable, and the movable orifice plate 31 is slidably attached to the perforated plate 29 between a position where each port 28 of the perforated plate 29 is closed and a position where the port 28 is opened. It has been stopped.
【0013】すなわち、可動オリフィス板31は、上部
において弁箱外部の操作機(図示せず)に接続した可動
板移動用弁棒32に係合するとともに、下部に、図示し
たような凸部33を備えた鍵状の係止部34を有してい
て、凸部33が多孔板下部に形成されたスリット35の
内部に嵌入した状態で、スリット35の長さの範囲内に
おいて流路24を横切る方向に出退自在である。弁体2
5には弁体シート36が周状に設けられ、弁座22の内
周面には、弁体シート36に当接する弁箱シート37が
周状に設けられている。That is, the movable orifice plate 31 engages with the movable plate moving valve rod 32 connected to an operating device (not shown) outside the valve box at the upper portion, and at the lower portion, the convex portion 33 as shown in the drawing. In the state where the convex portion 33 is fitted inside the slit 35 formed in the lower portion of the perforated plate, the flow path 24 is formed within the length range of the slit 35. You can move in and out in any direction. Valve 2
5, a valve body seat 36 is circumferentially provided, and a valve box seat 37 that abuts the valve body seat 36 is circumferentially provided on the inner peripheral surface of the valve seat 22.
【0014】以下、上記構成における作用を説明する。
図1および図2は上記オリフィス弁を流量制御弁として
作動させる状態を示し、弁体固定ボルト26を弁箱21
内に進出させて、弁体25を流路24を全閉可能な位置
に固定している。The operation of the above structure will be described below.
1 and 2 show a state in which the above-mentioned orifice valve is operated as a flow control valve, and the valve body fixing bolt 26 is attached to the valve box 21.
By advancing inside, the valve body 25 is fixed at a position where the flow path 24 can be fully closed.
【0015】図1において、可動板移動用弁棒32は下
方位置に配置されるとともに、係止部34の凸部33は
多孔板のスリット35内における下部に位置しており、
可動オリフィス板31は、多孔板の各ポート28を全面
的に閉塞する位置にあって流路24を全閉し、流体の流
れを止めている。また、弁体シート36は弁箱シート3
7に当接して、流体の漏れを防止している。In FIG. 1, the movable plate moving valve rod 32 is arranged at the lower position, and the convex portion 33 of the locking portion 34 is located at the lower part in the slit 35 of the perforated plate.
The movable orifice plate 31 is located at a position where the ports 28 of the perforated plate are completely closed, and the flow passage 24 is completely closed to stop the flow of fluid. Further, the valve body seat 36 is the valve box seat 3
7 is abutted to prevent fluid leakage.
【0016】図2において、可動板移動用弁棒32は上
方位置に配置されるとともに、係止部34の凸部33は
多孔板のスリット35の上側面に当接しており、可動オ
リフィス板31は、オリフィス30が多孔板の各ポート
28を全面的に開放する位置に存在している。したがっ
て、流路24に流体が流れているが流路断面は絞られて
おり、流量は低減されている。In FIG. 2, the movable plate moving valve rod 32 is arranged at the upper position, and the convex portion 33 of the locking portion 34 is in contact with the upper side surface of the slit 35 of the perforated plate. Exists at a position where the orifice 30 completely opens each port 28 of the perforated plate. Therefore, although the fluid is flowing in the flow path 24, the cross section of the flow path is narrowed and the flow rate is reduced.
【0017】可動オリフィス板31を、図1に示した位
置と図2に示した位置との中間位置として各ポート28
の一部を閉塞するようにすれば、流量を適宜制御でき
る。図3は上記オリフィス弁を逆止弁として作動させる
状態を示し、弁体固定ボルト26を弁箱21内より後退
させて弁体25を揺動自在としている。可動オリフィス
板31は、図1に示したのと同様に係止部34によって
多孔板の各ポート28を全閉する位置に係止されてお
り、多孔板29と可動オリフィス板31は一体の弁体2
5として揺動するようになっている。The movable orifice plate 31 is used as an intermediate position between the position shown in FIG. 1 and the position shown in FIG.
The flow rate can be appropriately controlled by closing a part of the flow rate. FIG. 3 shows a state in which the orifice valve is operated as a check valve, and the valve body fixing bolt 26 is retracted from the inside of the valve box 21 to allow the valve body 25 to swing. The movable orifice plate 31 is locked by the locking portion 34 at a position where the ports 28 of the perforated plate are fully closed, as shown in FIG. 1, and the perforated plate 29 and the movable orifice plate 31 are integrated valves. Body 2
It swings as 5.
【0018】この状態において、流体が正方向(矢印A
で示した方向)に流れる通常時には、流路24を流れる
流体が弁体25に衝突して弁体25を押し上げ、弁体2
5は回転支軸23の軸心廻りに揺動して流路24を開放
する。一方、流体の逆流時には、弁体25が自重量で閉
動方向に揺動するとともに、逆流する流体が弁体25を
閉動方向に押圧し、弁体25が流路24を閉塞する。In this state, the fluid is in the forward direction (arrow A
(In the direction indicated by the arrow), the fluid flowing in the flow path 24 collides with the valve body 25 and pushes up the valve body 25, so that the valve body 2
Reference numeral 5 swings around the axis of the rotary support shaft 23 to open the flow path 24. On the other hand, when the fluid flows backward, the valve body 25 oscillates in the closing direction by its own weight, and the flowing fluid presses the valve body 25 in the closing direction, and the valve body 25 closes the flow path 24.
【0019】[0019]
【発明の効果】以上のように、本発明のオリフィス弁
は、可動オリフィス板と多孔板とで弁体を構成し、可動
オリフィス板にて多孔板の各ポートを開放または閉塞す
ることにより流路断面を変化可能とするとともに、多孔
板と可動オリフィス板は一体の弁体として揺動可能とし
た。これにより、オリフィス弁は、弁体を流路全閉位置
に固定して可動オリフィス板により流路断面を変化させ
るときは、流量を制御する流量制御弁として機能し、弁
体を一体に揺動させるときは、流路を開閉する閉止弁と
して機能することができる。また、弁体が揺動可能であ
ることにより、流体にゴミなどが混在している場合も詰
まりを防止でき、安定して流量制御を行うことができ
る。As described above, in the orifice valve of the present invention, the movable orifice plate and the perforated plate constitute a valve body, and the movable orifice plate opens or closes each port of the perforated plate to form a flow path. The cross section can be changed, and the perforated plate and the movable orifice plate can swing as an integral valve body. As a result, the orifice valve functions as a flow rate control valve that controls the flow rate when the valve body is fixed at the fully closed position of the flow path and the flow path cross section is changed by the movable orifice plate, and the valve body swings integrally. When this is done, it can function as a shutoff valve that opens and closes the flow path. Further, since the valve body can swing, clogging can be prevented even when dust and the like are mixed in the fluid, and stable flow rate control can be performed.
【図1】本発明の一実施例のオリフィス弁による流量制
御を説明する断面図である。FIG. 1 is a sectional view illustrating flow rate control by an orifice valve according to an embodiment of the present invention.
【図2】図1のオリフィス弁による流量制御を説明する
他の断面図である。FIG. 2 is another cross-sectional view illustrating flow rate control by the orifice valve of FIG.
【図3】図1のオリフィス弁による流路の開閉を説明す
る断面図である。3 is a cross-sectional view illustrating opening and closing of a flow path by the orifice valve of FIG.
【図4】従来の逆止弁を示した断面図である。FIG. 4 is a sectional view showing a conventional check valve.
【図5】従来の流量制御弁を示した断面図である。FIG. 5 is a sectional view showing a conventional flow control valve.
21 弁箱 23 回転支軸 24 流路 25 弁体 26 弁体固定ボルト(弁体固定手段) 28 ポート 29 多孔板 30 オリフィス 31 可動オリフィス板 21 Valve box 23 Rotating spindle 24 Flow path 25 Valve body 26 Valve body fixing bolt (valve body fixing means) 28 Port 29 Perforated plate 30 Orifice 31 Movable orifice plate
Claims (1)
を開放する位置と全閉する位置とにわたって揺動する弁
体を配置し、弁体の下流側に、流路を横切る方向に出退
して弁体を前記全閉位置に固定可能な弁体固定手段を設
け、前記弁体は、前記全閉位置において流路断面に沿っ
て複数のポートを形成する多孔板と、多孔板の各ポート
に対応する複数のオリフィスを有して、各ポートを閉塞
する位置と開放する位置とにわたり摺動自在に多孔板に
係止された可動オリフィス板とで構成したことを特徴と
するオリフィス弁。1. A valve body is disposed in a valve box, the valve body swinging around a rotation support shaft between a position where the flow passage is opened and a position where the flow passage is fully closed, and the flow passage is crossed on the downstream side of the valve body. A valve element fixing means capable of fixing the valve element to the fully closed position by retracting in a direction, the valve element having a perforated plate forming a plurality of ports along the flow passage cross section at the fully closed position; It has a plurality of orifices corresponding to each port of the perforated plate, and is composed of a movable orifice plate slidably locked to the perforated plate between the position where each port is closed and the position where it is opened. Orifice valve to.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6159047A JPH0828718A (en) | 1994-07-12 | 1994-07-12 | Orifice valve |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6159047A JPH0828718A (en) | 1994-07-12 | 1994-07-12 | Orifice valve |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0828718A true JPH0828718A (en) | 1996-02-02 |
Family
ID=15685074
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6159047A Pending JPH0828718A (en) | 1994-07-12 | 1994-07-12 | Orifice valve |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0828718A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007013143A1 (en) * | 2005-07-26 | 2007-02-01 | Kawasaki Plant Systems Kabushiki Kaisha | Mixed fluid uniformization device and mixed fluid feeding apparatus |
JP2007115449A (en) * | 2005-10-18 | 2007-05-10 | Yamaha Motor Co Ltd | Fuel cell system |
EP2189212A1 (en) * | 2008-11-25 | 2010-05-26 | I-Fu Yang | Emulsifier system |
KR101652063B1 (en) * | 2015-03-25 | 2016-08-30 | 강림중공업 주식회사 | A swing check valve |
CN111536279A (en) * | 2020-05-06 | 2020-08-14 | 刘艳文 | Precision control liquid flow valve |
WO2022019082A1 (en) * | 2020-07-22 | 2022-01-27 | 株式会社堀場製作所 | Dilution gas mixing unit and exhaust gas analysis system |
-
1994
- 1994-07-12 JP JP6159047A patent/JPH0828718A/en active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007013143A1 (en) * | 2005-07-26 | 2007-02-01 | Kawasaki Plant Systems Kabushiki Kaisha | Mixed fluid uniformization device and mixed fluid feeding apparatus |
JPWO2007013143A1 (en) * | 2005-07-26 | 2009-02-05 | カワサキプラントシステムズ株式会社 | Mixing fluid homogenizer and mixed fluid supply equipment |
JP4684295B2 (en) * | 2005-07-26 | 2011-05-18 | カワサキプラントシステムズ株式会社 | Mixing fluid homogenizer and mixed fluid supply equipment |
JP2007115449A (en) * | 2005-10-18 | 2007-05-10 | Yamaha Motor Co Ltd | Fuel cell system |
EP2189212A1 (en) * | 2008-11-25 | 2010-05-26 | I-Fu Yang | Emulsifier system |
KR101652063B1 (en) * | 2015-03-25 | 2016-08-30 | 강림중공업 주식회사 | A swing check valve |
CN111536279A (en) * | 2020-05-06 | 2020-08-14 | 刘艳文 | Precision control liquid flow valve |
WO2022019082A1 (en) * | 2020-07-22 | 2022-01-27 | 株式会社堀場製作所 | Dilution gas mixing unit and exhaust gas analysis system |
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