JPH08159714A - Position detection sensor - Google Patents
Position detection sensorInfo
- Publication number
- JPH08159714A JPH08159714A JP32390294A JP32390294A JPH08159714A JP H08159714 A JPH08159714 A JP H08159714A JP 32390294 A JP32390294 A JP 32390294A JP 32390294 A JP32390294 A JP 32390294A JP H08159714 A JPH08159714 A JP H08159714A
- Authority
- JP
- Japan
- Prior art keywords
- light
- position detection
- mask
- shadow
- distance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は三角測量法を用いて物体
までの距離を測定する位置検出センサに関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a position detecting sensor for measuring a distance to an object by using a triangulation method.
【０００２】[0002]
【従来の技術】従来三角測量法を用いた変位測定装置と
しては、特開平３−120412号等の変位測定装置が提案さ
れている。これは図８に示すように、一定周期毎に生じ
る投光パルスに基づいて駆動回路１を介して投光素子２
を駆動し、投光レンズ３により平行な光ビーム４を物体
検知領域に照射している。そして検知物体５からの反射
光を受光レンズ６を介して位置検出素子７、例えばポジ
ションセンシティブディバイス（ＰＳＤ）で受光してい
る。位置検出素子７は受光位置に応じてその両端の電流
の出力比が変化する素子であって、その両端の出力はＩ
／Ｖ変換器８及び９によって電圧信号に変換される。Ｉ
／Ｖ変換器８及び９の出力は夫々加算器１０，減算器１
１に与えられ、加算及び減算されて割算回路１２に入力
される。割算回路１２は減算値を加算値で割算すること
によって検知物体５の位置信号を出力するものであり、
その出力は補正回路１３を介して距離に対応した直線的
な電圧信号として出力するようにしている。この補正回
路１３は、位置検出素子７の不均一性や受光レンズ６に
よる誤差が生じるため、装置から測定対象物までの距離
と割算回路の出力である電圧値が直線性を有するように
補正するものである。2. Description of the Related Art Conventionally, as a displacement measuring device using a triangulation method, a displacement measuring device such as Japanese Patent Laid-Open No. 3-120412 has been proposed. This is as shown in FIG.
Is driven to irradiate the object detection area with the parallel light beam 4 by the light projecting lens 3. The reflected light from the detection object 5 is received by the position detection element 7, for example, a position sensitive device (PSD), via the light receiving lens 6. The position detection element 7 is an element in which the output ratio of the current at both ends changes according to the light receiving position, and the output at both ends is I.
It is converted into a voltage signal by the / V converters 8 and 9. I
The outputs of the / V converters 8 and 9 are the adder 10 and the subtractor 1, respectively.
1 is added, subtracted and added, and input to the division circuit 12. The division circuit 12 outputs the position signal of the detection object 5 by dividing the subtraction value by the addition value,
The output is output as a linear voltage signal corresponding to the distance via the correction circuit 13. The correction circuit 13 corrects so that the distance from the device to the object to be measured and the voltage value output from the division circuit have linearity because the nonuniformity of the position detection element 7 and the error due to the light receiving lens 6 occur. To do.
【０００３】[0003]
【発明が解決しようとする課題】しかしながらこのよう
な従来の位置検出センサでは、受光側にレンズ６を用い
て反射光を集光させて位置検出素子７で受光している。
そのため受光側にレンズ等を用いる必要があり、装置自
体が大型となる。又受光量が小さく分解能にも限界があ
り、出力の直線性を保持するための処理回路を必要とす
るという欠点があった。又対象物からの反射光のビーム
径で線形の幅が決定され、センサの仕様を変更する際に
構成を変更する必要があり、容易に変更することができ
なくなるという欠点があった。However, in such a conventional position detecting sensor, the lens 6 is used on the light receiving side to collect the reflected light and the position detecting element 7 receives the reflected light.
Therefore, it is necessary to use a lens or the like on the light receiving side, and the device itself becomes large. Further, the amount of received light is small, the resolution is limited, and a processing circuit for maintaining the linearity of the output is required. In addition, the beam width of the reflected light from the object determines the linear width, and it is necessary to change the configuration when changing the specifications of the sensor, which is a drawback that it cannot be changed easily.
【０００４】本発明はこのような従来の問題点に鑑みて
なされたものであって、受光素子のビーム分布を凹状と
することによって従来の問題点を解決することを目的と
する。The present invention has been made in view of such conventional problems, and an object thereof is to solve the conventional problems by making the beam distribution of the light receiving element concave.
【０００５】[0005]
【課題を解決するための手段】本願の請求項１の発明
は、光を物体検知領域に照射する投光素子を有する投光
部と、検知物体からの反射光を受光し、その受光位置に
応じた位置検知信号を出力する位置検出素子と、位置検
出素子の受光面に近接して配置され、反射光の一部を遮
光するマスク手段と、位置検出素子に得られるマスク手
段の影の位置に基づいて物体までの距離を検出する信号
処理手段と、を具備することを特徴とするものである。According to the invention of claim 1 of the present application, a light projecting portion having a light projecting element for irradiating an object detection region with light, and reflected light from a detected object are received, and the light is received at the light receiving position. A position detection element that outputs a position detection signal corresponding to the position detection element, a mask means that is arranged close to the light receiving surface of the position detection element and that shields part of the reflected light, and the position of the shadow of the mask means that is obtained by the position detection element. Signal processing means for detecting a distance to an object based on the above.
【０００６】本願の請求項２の発明は、光を物体検知領
域に照射する投光素子を有する投光部と、投光部より照
射される光と平行に配置され、検知物体からの反射光を
受光し、その受光位置に応じた位置検知信号を出力する
位置検出素子と、位置検出素子の受光面に近接して配置
され反射光の一部を遮光するマスク手段と、位置検出素
子に得られるマスク手段の影の位置に基づいて物体まで
の距離を検出する信号処理手段と、を具備することを特
徴とするものである。According to a second aspect of the present invention, a light projecting portion having a light projecting element for irradiating the object detection area with light, and light reflected by the detected object are arranged in parallel with the light emitted from the light projecting portion. The position detection element that receives the light and outputs a position detection signal according to the light receiving position, the mask means that is arranged close to the light receiving surface of the position detection element and that blocks a part of the reflected light, and the position detection element Signal processing means for detecting the distance to the object based on the position of the shadow of the mask means.
【０００７】[0007]
【作用】このような特徴を有する本願の請求項１の発明
によれば、投光部の光軸上にセンサから離れた位置にあ
る検知物体に光が照射されると、その反射光がマスク手
段を介して位置検出素子に受光される。そして検知物体
までの距離に応じてマスク手段で遮光される影の位置が
異なるため、位置検出素子に得られる影の位置に基づい
て物体までの距離を検出することができる。又請求項２
の発明では、位置検出素子の受光軸と投光軸とを平行に
配置しておくことにより、影の中心と検知物体とを結ぶ
線分は常に一定の点を通過することとなる。従って投光
軸と位置検出センサ及びこの一定の点を通る投光ビーム
に垂直な線との成す線分から常に相似の三角形が得ら
れ、検知物体までの距離と位置検出素子上の光の重心と
は常に比例関係にある。従って物体までの距離を直線化
した出力が得られることとなる。According to the invention of claim 1 of the present application having such a feature, when light is applied to a detection object located at a position apart from the sensor on the optical axis of the light projecting portion, the reflected light is masked. The light is received by the position detection element via the means. Since the position of the shadow shielded by the mask means differs depending on the distance to the detected object, the distance to the object can be detected based on the position of the shadow obtained by the position detection element. Claim 2
In the invention described above, by arranging the light receiving axis of the position detecting element and the light projecting axis in parallel, the line segment connecting the center of the shadow and the detected object always passes through a fixed point. Therefore, a similar triangle is always obtained from the line segment formed by the projection axis, the position detection sensor, and the line perpendicular to the projection beam that passes through this fixed point, and the distance to the detection object and the center of gravity of the light on the position detection element Is always proportional. Therefore, an output obtained by linearizing the distance to the object can be obtained.
【０００８】[0008]
【実施例】図１は本発明の一実施例による位置検出セン
サの全体構成を示すブロック図である。本図において前
述した従来例と同一部分は同一符号を付して詳細な説明
を省略する。本実施例の位置検出センサも従来例と同様
に駆動回路１を介して投光素子２を駆動する。そしてこ
の投光素子と所定間隔を隔てて位置検出素子７を設け
る。位置検出素子７はＰＳＤやＣＣＤ等の１次元の受光
素子を用いる。位置検出素子をＰＳＤとすると、その両
端に入射される光の重心位置に応じた電流が両端に出力
される。この出力はＩ／Ｖ変換器８及び９によって電圧
信号に変換される。Ｉ／Ｖ変換器８及び９の出力は夫々
加算器１０，減算器１１に与えられて加算及び減算され
て、割算回路１２に入力される。割算回路１２は減算値
を加算値で割算することによって検知物体の位置信号を
出力するものである。Ｉ／Ｖ変換器８，９、加算器１
０、減算器１１及び割算回路１２は、光の重心に基づい
て物体までの距離を検出する信号処理手段を構成してい
る。1 is a block diagram showing the overall construction of a position detecting sensor according to an embodiment of the present invention. In this figure, the same parts as those of the conventional example described above are designated by the same reference numerals, and detailed description thereof is omitted. The position detection sensor of this embodiment also drives the light projecting element 2 via the drive circuit 1 as in the conventional example. The position detecting element 7 is provided at a predetermined distance from the light projecting element. As the position detecting element 7, a one-dimensional light receiving element such as PSD or CCD is used. When the position detection element is PSD, a current corresponding to the barycentric position of light incident on both ends of the PSD is output to both ends. This output is converted into a voltage signal by the I / V converters 8 and 9. The outputs of the I / V converters 8 and 9 are given to the adder 10 and the subtractor 11, added and subtracted, and input to the division circuit 12. The division circuit 12 outputs the position signal of the detected object by dividing the subtracted value by the added value. I / V converters 8 and 9, adder 1
0, the subtractor 11 and the division circuit 12 constitute a signal processing means for detecting the distance to the object based on the center of gravity of the light.
【０００９】さて本実施例では、位置検出素子７の直前
に図示のように反射光の一部を遮光するためのマスク２
０を設けておく。このマスク２０は位置検出素子７に受
光される反射光を遮光するマスク手段であり、遮光によ
って得られる影の位置によって物体の位置を検出するよ
うにしている。又位置検出素子７を１次元ＣＣＤとする
と、１ライン分を読出してその影の中心位置を出力する
ものとする。In this embodiment, the mask 2 for blocking a part of the reflected light is provided immediately before the position detecting element 7 as shown in the figure.
0 is set. This mask 20 is a mask means for blocking the reflected light received by the position detecting element 7, and detects the position of the object by the position of the shadow obtained by the light blocking. When the position detecting element 7 is a one-dimensional CCD, one line is read and the center position of the shadow is output.
【００１０】次に本実施例の動作について図２を参照し
つつ説明する。図２（ａ）に示すようにこの位置検出セ
ンサからの距離Ｌ１に検知物体５Ａが位置する場合に
は、その反射光の一部はマスク２０によって遮光され
る。図２（ｂ）は位置検出素子までの距離Ｌ１に検知物
体５Ａが位置する場合に、光の位置検出素子７上の反射
光の分布を示すものである。又図２（ｃ）は検知物体５
Ｂが距離Ｌ２にある場合の反射光の分布を示す図であ
る。図２（ｂ），（ｃ）に示すようにマスク２０によっ
て反射光が遮光されるが、その遮光される位置が検知物
体までの距離に応じて変化する。×印で示す受光した光
の重心はこの影の位置によって変化するため、光の重心
も同様にして物体までの距離に応じて変化することとな
る。従ってＩ／Ｖ変換器８，９から割算回路１２までの
信号処理手段により、影の中心位置を検出することによ
って、距離信号を出力することができる。この方法によ
れば受光レンズを要せず、光を集束させて位置検出素子
７に導く必要がなく、構成が簡単となり、センサ自体の
小型化及び薄型化も可能となる。Next, the operation of this embodiment will be described with reference to FIG. As shown in FIG. 2A, when the detection object 5A is located at a distance L1 from the position detection sensor, a part of the reflected light is blocked by the mask 20. FIG. 2B shows a distribution of reflected light on the position detecting element 7 of light when the detection object 5A is located at a distance L1 to the position detecting element. Further, FIG. 2C shows the detection object 5
It is a figure which shows distribution of the reflected light when B is in the distance L2. As shown in FIGS. 2B and 2C, the mask 20 shields the reflected light, and the shielded position changes depending on the distance to the detection object. Since the center of gravity of the received light indicated by X changes depending on the position of this shadow, the center of gravity of the light also changes in accordance with the distance to the object. Therefore, the distance signal can be output by detecting the center position of the shadow by the signal processing means from the I / V converters 8 and 9 to the division circuit 12. According to this method, it is not necessary to use a light receiving lens, and it is not necessary to focus light to be guided to the position detecting element 7, the configuration is simplified, and the sensor itself can be made smaller and thinner.
【００１１】次に本発明の第２実施例について説明す
る。図３は第２実施例の光学系部分と反射光を示す説明
図、図５はその信号処理部を示すブロック図である。本
実施例は投光ビーム４に平行に位置検出素子７を配置し
たものである。そしてその前面には第１実施例と同様に
マスク２０を配置しておく。そして投光素子１の投光面
と位置検出素子７の端部を投光ビーム４と垂直とする。
そして検知物体５Ａが距離Ｌ１の位置にあるときに、そ
の反射光が位置検出素子７に受光される。ここでその反
射光の一部はマスク２０によって遮光される。ここで図
３において投光軸４をＹ軸、これと垂直な位置検出素子
７の上面を通る直線をＸ軸とし、マスク２の右上端部
の座標を（ｘ１，ｙ１）、左下端部を（ｘ２，ｙ２）
とする。そして検知物体５Ａの位置を座標（０，ｙ
３）、検知物体５Ｂの位置を座標（０，ｙ４）で表
す。このとき検知物体５Ａで反射され、点，を通過
する直線Ａ１は次式（１）で示される。Next, a second embodiment of the present invention will be described. FIG. 3 is an explanatory view showing an optical system portion and reflected light of the second embodiment, and FIG. 5 is a block diagram showing its signal processing unit. In this embodiment, the position detecting element 7 is arranged in parallel with the projection beam 4. Then, the mask 20 is arranged on the front surface thereof as in the first embodiment. The light projecting surface of the light projecting element 1 and the end of the position detecting element 7 are perpendicular to the light projecting beam 4.
Then, when the detection object 5A is at the position of the distance L1, the reflected light is received by the position detection element 7. Here, a part of the reflected light is blocked by the mask 20. Here, in FIG. 3, the light projection axis 4 is the Y axis, the straight line passing through the upper surface of the position detection element 7 perpendicular thereto is the X axis, the coordinates of the upper right end of the mask 2 are (x1, y1), and the lower left end is (X2, y2)
And Then, the position of the detected object 5A is set to coordinates (0, y
3), the position of the detection object 5B is represented by coordinates (0, y4). At this time, a straight line A1 that is reflected by the detection object 5A and passes through the point is expressed by the following equation (1).
【数１】 又検知物体５Ａの点と頂点を通る直線Ａ２は次式
（２）で示される。[Equation 1] A straight line A2 passing through the point and the apex of the detected object 5A is expressed by the following equation (2).
【数２】 そして直線Ａ１，Ａ２で示される範囲が位置検出素子７
上の影の領域となる。そして投光ビーム４と検知物体５
Ａの表面の交点と、この影の中心とを結ぶ直線Ａ３を
考えると、影の中心（ｘ５，ｙ５）のＹ座標ｙ５は次
式で示される。[Equation 2] The area indicated by the straight lines A1 and A2 is the position detecting element 7.
It becomes the upper shadow area. Then, the projection beam 4 and the detection object 5
Considering a straight line A3 connecting the intersection of the surface of A and the center of this shadow, the Y coordinate y5 of the center (x5, y5) of the shadow is expressed by the following equation.
【数３】 従って直線Ａ３は次式（４）で示される。(Equation 3) Therefore, the straight line A3 is expressed by the following equation (4).
【数４】 但しＰ，Ｑを次式（５）とする。[Equation 4] However, P and Q are set to the following formula (5).
【数５】 同様にしてマスク２０の頂点，を通り、位置検出物
体５Ｂを通過する直線Ｂ１，Ｂ２は夫々次式（６），
（７）で示される。(Equation 5) Similarly, straight lines B1 and B2 passing through the apex of the mask 20 and passing through the position detection object 5B are expressed by the following equations (6),
This is indicated by (7).
【数６】 そして同様にその位置検出素子７上の中点と点を通る
直線Ｂ３は次式（８）で示される。(Equation 6) Similarly, a straight line B3 passing through the midpoint and the point on the position detecting element 7 is expressed by the following equation (8).
【数７】 そして直線Ａ３とＢ３の交わる点Ｋの座標は（Ｑ／２，
Ｐ／Ｑ）で示され、式（５）より明らかなように点，
の座標によってのみ定まる。従って投光素子２から検
知物体までの距離にかかわらず常に一点Ｋを通過するこ
ととなる。Ｘ軸に平行な点Ｋを通る直線Ｃと、直線Ａ
３、投光ビーム４及び位置検出素子７の表面で成す２つ
の三角形は相似となる。(Equation 7) The coordinates of the point K where the straight lines A3 and B3 intersect are (Q / 2,
P / Q), as is clear from the equation (5),
Only determined by the coordinates of. Therefore, the point K always passes regardless of the distance from the light projecting element 2 to the detected object. A straight line C passing through a point K parallel to the X axis and a straight line A
3, the two triangles formed by the surface of the projection beam 4 and the position detection element 7 are similar.
【００１２】又同様にして直線Ｂ３，Ｃと投光ビーム
４，位置検出素子７の表面で２つの相似な三角形が形成
される。従って投光素子から検知物体５Ａ，５Ｂまでの
距離に対応して位置検出素子７の上部の端部から影の中
心までの距離は、図４に示すように直線的に変化するこ
ととなる。Similarly, two similar triangles are formed on the surfaces of the straight lines B3 and C, the projection beam 4 and the position detecting element 7. Therefore, the distance from the upper end of the position detecting element 7 to the center of the shadow corresponding to the distance from the light projecting element to the detection objects 5A and 5B changes linearly as shown in FIG.
【００１３】次に図５を用いて信号処理部の構成につい
て説明する。本実施例では影の中心を検出するため位置
検出素子７をＣＣＤとし、ＣＣＤ駆動回路２１によって
位置検出素子７を駆動する。そして位置検出素子７から
読出された信号をコンパレータ２２によって所定レベル
で弁別し、ラインメモリ２３に一旦保持する。ラインメ
モリ２３は受光レベルを二値化したＣＣＤの１ライン分
の信号を保持するものであり、ＣＣＤのビット数に対応
している。そしてこのラインメモリ２３を走査すること
によって零レベルの中心、即ち影の中心位置を中心検出
部２４によって読出す。こうすれば前述したように物体
までの距離Ｌに応じて直線化された位置信号を出力する
ことができる。この場合には線形補正する回路が不要と
なり、部品点数を少なくすることができる。又図３にお
いてマスク２０の位置や形状を変化させることによっ
て、位置検出素子７に入射するビームプロファイルを自
由に設定することができ、検知物体の測定範囲も任意に
選択することができる。Next, the configuration of the signal processing section will be described with reference to FIG. In the present embodiment, the position detecting element 7 is a CCD for detecting the center of the shadow, and the CCD driving circuit 21 drives the position detecting element 7. Then, the signal read from the position detection element 7 is discriminated at a predetermined level by the comparator 22, and is temporarily held in the line memory 23. The line memory 23 holds a signal for one line of the CCD whose light reception level has been binarized and corresponds to the number of bits of the CCD. Then, by scanning the line memory 23, the center of the zero level, that is, the center position of the shadow is read by the center detector 24. By doing this, as described above, it is possible to output the position signal linearized according to the distance L to the object. In this case, a circuit for linear correction becomes unnecessary, and the number of parts can be reduced. Further, by changing the position and shape of the mask 20 in FIG. 3, the beam profile incident on the position detecting element 7 can be freely set, and the measurement range of the detection object can be arbitrarily selected.
【００１４】次に本発明の第３実施例について説明す
る。図６は第３実施例の光学系部分を示す概略図であ
る。又信号処理部は図１又は図５のものを用いる。本実
施例では図６（ａ）に示すように位置検出素子７より所
定距離を離れてフィルタ板３０を配置する。フィルタ板
３０は図６（ｂ）及び（ｃ）に上面図及び側面図を示す
ように、可視光をカットするフィルタ３１とその中心に
ライン上に形成された特定波長をカットするフィルタ３
２とから構成されている。図７はこのフィルタ３１，３
２の透過特性、及び投光素子３の発光特性を示すグラフ
である。本図に示すように可視範囲より長い波長の光を
投光素子２より発光するものとすると、フィルタ３１は
この特定波長を含む領域の波長を通過し可視光領域をカ
ットする特性を有しており、フィルタ３２は投光素子２
の波長より短い可視光領域を通過させる特性を有してい
るものとする。この場合には反射光を一部遮光するフィ
ルタ板３０を位置検出素子７より離れて配置しておくだ
けでビームプロファイルを凹状とすることができ、又線
形幅を変化させることによって容易に測定範囲を規定す
ることができる。又フィルタを交換する場合には自由に
線形で距離を検知する範囲が規定できることとなる。Next, a third embodiment of the present invention will be described. FIG. 6 is a schematic view showing an optical system portion of the third embodiment. As the signal processing unit, the one shown in FIG. 1 or 5 is used. In this embodiment, as shown in FIG. 6A, the filter plate 30 is arranged at a predetermined distance from the position detecting element 7. As shown in the top view and the side view of FIGS. 6B and 6C, the filter plate 30 includes a filter 31 that cuts visible light and a filter 3 that cuts a specific wavelength formed on the line at the center thereof.
2 and. FIG. 7 shows the filters 31, 3
3 is a graph showing the transmission characteristics of No. 2 and the emission characteristics of the light projecting element 3. As shown in the figure, when light having a wavelength longer than the visible range is emitted from the light projecting element 2, the filter 31 has a characteristic of passing a wavelength in the range including the specific wavelength and cutting the visible range. And the filter 32 is the light projecting element 2
It has a characteristic of transmitting a visible light region shorter than the wavelength of. In this case, the beam profile can be made concave by merely disposing the filter plate 30 that partially shields the reflected light from the position detection element 7, and the linear range can be changed to easily measure the measurement range. Can be defined. Further, when the filter is replaced, the range for detecting the distance can be freely defined.
【００１５】[0015]
【発明の効果】以上詳細に説明したように本願の請求項
１及び２の発明では、入射光量が多いためノイズ等の影
響が相対的に少なくなり、精度を向上させることができ
る。又受光側にレンズ等の光を集束させる光学部品が不
要となるため、装置自体を小型，薄型化することができ
る。又ビームプロファイルが凹状となるため、反射光の
頂点が位置検出素子の受光面に入射する必要がなくな
り、投光ビームの幅を適宜選択することができる。この
ように光学系の構成を容易にすることができる。更に請
求項２の発明では、マスクの形状を変化させることによ
って所定範囲を線形で検出することができる。従って線
形補正回路が不要となり、装置が小型化でき、部品点数
を少なくすることができるという効果が得られる。As described in detail above, in the inventions of claims 1 and 2 of the present application, since the amount of incident light is large, the influence of noise or the like is relatively small, and the accuracy can be improved. Further, since an optical component such as a lens for focusing light on the light receiving side is unnecessary, the device itself can be made small and thin. Further, since the beam profile is concave, the apex of the reflected light does not need to be incident on the light receiving surface of the position detecting element, and the width of the projected beam can be appropriately selected. In this way, the configuration of the optical system can be facilitated. Further, according to the invention of claim 2, the predetermined range can be detected linearly by changing the shape of the mask. Therefore, the effect that the linear correction circuit becomes unnecessary, the device can be downsized, and the number of parts can be reduced can be obtained.
【図１】本発明の第１実施例による位置検出センサの全
体構成を示すブロック図である。FIG. 1 is a block diagram showing an overall configuration of a position detection sensor according to a first embodiment of the present invention.
【図２】（ａ）は本実施例の光学系部分を示す概略図、
（ｂ）及び（ｃ）は位置検出素子上の受光レベルの変化
を示すグラフである。FIG. 2A is a schematic diagram showing an optical system portion of this embodiment,
(B) and (c) are graphs showing changes in the light receiving level on the position detecting element.
【図３】本発明の第２実施例による位置検出センサの光
学系部分を示す構成図である。FIG. 3 is a configuration diagram showing an optical system portion of a position detection sensor according to a second embodiment of the present invention.
【図４】第２実施例による位置検出センサの検知物体ま
での距離に対する影の重心位置の変化を示すグラフであ
る。FIG. 4 is a graph showing changes in the position of the center of gravity of the shadow with respect to the distance to the detection object of the position detection sensor according to the second example.
【図５】本発明の第２実施例による位置検出センサの全
体構成を示すブロック図である。FIG. 5 is a block diagram showing an overall configuration of a position detection sensor according to a second embodiment of the present invention.
【図６】本発明の第３実施例による位置検出センサの光
学系部分を示す概略図である。FIG. 6 is a schematic diagram showing an optical system portion of a position detection sensor according to a third embodiment of the present invention.
【図７】第３実施例の位置検出センサのフィルタ板３０
及び投光素子２の波長特性を示すグラフである。FIG. 7 is a filter plate 30 of the position detection sensor of the third embodiment.
3 is a graph showing the wavelength characteristics of the light projecting element 2.
【図８】従来の位置検出センサの一例を示すブロック図
である。FIG. 8 is a block diagram showing an example of a conventional position detection sensor.
１ 駆動回路 ２ 投光素子 ４ 投光ビーム ５，５Ａ，５Ｂ 検知物体 ７ 位置検出素子 ８，９ Ｉ／Ｖ変換器 １０ 加算器 １１ 減算器 １２ 割算回路 ２０ マスク ２１ ＣＣＤ駆動部 ２２ コンパレータ ２３ ラインメモリ ２４ 中心検出部 ３０ フィルタ板 ３１，３２ フィルタ 1 Driving Circuit 2 Light Emitting Element 4 Light Emitting Beam 5, 5A, 5B Detecting Object 7 Position Detecting Element 8, 9 I / V Converter 10 Adder 11 Subtractor 12 Division Circuit 20 Mask 21 CCD Driver 22 Comparator 23 Line Memory 24 Center detector 30 Filter plate 31, 32 Filter
Claims (2)
有する投光部と、 検知物体からの反射光を受光し、その受光位置に応じた
位置検知信号を出力する位置検出素子と、 前記位置検出素子の受光面に近接して配置され、反射光
の一部を遮光するマスク手段と、 前記位置検出素子に得られるマスク手段の影の位置に基
づいて物体までの距離を検出する信号処理手段と、を具
備することを特徴とする位置検出センサ。1. A light projecting portion having a light projecting element for irradiating an object detection area with light, and a position detecting element for receiving reflected light from a detected object and outputting a position detection signal corresponding to the light receiving position. A mask unit which is arranged close to the light receiving surface of the position detecting element and which shields a part of the reflected light, and a signal which detects the distance to the object based on the position of the shadow of the mask unit obtained by the position detecting element. A position detecting sensor comprising: a processing unit.
有する投光部と、 前記投光部より照射される光と平行に配置され、検知物
体からの反射光を受光し、その受光位置に応じた位置検
知信号を出力する位置検出素子と、 前記位置検出素子の受光面に近接して配置され反射光の
一部を遮光するマスク手段と、 前記位置検出素子に得られるマスク手段の影の位置に基
づいて物体までの距離を検出する信号処理手段と、を具
備することを特徴とする位置検出センサ。2. A light projecting portion having a light projecting element for irradiating the object detection region with light, and a light projecting portion disposed in parallel with the light projected from the light projecting portion, for receiving reflected light from the detected object and receiving the light. A position detection element that outputs a position detection signal according to the position, a mask means that is arranged close to the light receiving surface of the position detection element and that shields a part of the reflected light, and a mask means that is obtained in the position detection element. A position detection sensor, comprising: a signal processing unit that detects a distance to an object based on a position of a shadow.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32390294A JPH08159714A (en) | 1994-11-30 | 1994-11-30 | Position detection sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32390294A JPH08159714A (en) | 1994-11-30 | 1994-11-30 | Position detection sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08159714A true JPH08159714A (en) | 1996-06-21 |
Family
ID=18159894
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32390294A Pending JPH08159714A (en) | 1994-11-30 | 1994-11-30 | Position detection sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08159714A (en) |
Cited By (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009019979A (en) * | 2007-07-11 | 2009-01-29 | Fujitsu Ltd | Light receiver, distance calculator, distance calculation program, recording medium, and distance calculation method |
| WO2012110924A1 (en) * | 2011-02-15 | 2012-08-23 | Basf Se | Detector for optically detecting at least one object |
| US9001029B2 (en) | 2011-02-15 | 2015-04-07 | Basf Se | Detector for optically detecting at least one object |
| WO2016092452A1 (en) * | 2014-12-09 | 2016-06-16 | Basf Se | Optical detector |
| US9389315B2 (en) | 2012-12-19 | 2016-07-12 | Basf Se | Detector comprising a transversal optical sensor for detecting a transversal position of a light beam from an object and a longitudinal optical sensor sensing a beam cross-section of the light beam in a sensor region |
| US9557856B2 (en) | 2013-08-19 | 2017-01-31 | Basf Se | Optical detector |
| US9665182B2 (en) | 2013-08-19 | 2017-05-30 | Basf Se | Detector for determining a position of at least one object |
| US9741954B2 (en) | 2013-06-13 | 2017-08-22 | Basf Se | Optical detector and method for manufacturing the same |
| US9829564B2 (en) | 2013-06-13 | 2017-11-28 | Basf Se | Detector for optically detecting at least one longitudinal coordinate of one object by determining a number of illuminated pixels |
| US10094927B2 (en) | 2014-09-29 | 2018-10-09 | Basf Se | Detector for optically determining a position of at least one object |
| US10353049B2 (en) | 2013-06-13 | 2019-07-16 | Basf Se | Detector for optically detecting an orientation of at least one object |
| US10412283B2 (en) | 2015-09-14 | 2019-09-10 | Trinamix Gmbh | Dual aperture 3D camera and method using differing aperture areas |
| US10775505B2 (en) | 2015-01-30 | 2020-09-15 | Trinamix Gmbh | Detector for an optical detection of at least one object |
| US10890491B2 (en) | 2016-10-25 | 2021-01-12 | Trinamix Gmbh | Optical detector for an optical detection |
| US10948567B2 (en) | 2016-11-17 | 2021-03-16 | Trinamix Gmbh | Detector for optically detecting at least one object |
| US10955936B2 (en) | 2015-07-17 | 2021-03-23 | Trinamix Gmbh | Detector for optically detecting at least one object |
| US11041718B2 (en) | 2014-07-08 | 2021-06-22 | Basf Se | Detector for determining a position of at least one object |
| US11060922B2 (en) | 2017-04-20 | 2021-07-13 | Trinamix Gmbh | Optical detector |
| US11067692B2 (en) | 2017-06-26 | 2021-07-20 | Trinamix Gmbh | Detector for determining a position of at least one object |
| US11125880B2 (en) | 2014-12-09 | 2021-09-21 | Basf Se | Optical detector |
| US11211513B2 (en) | 2016-07-29 | 2021-12-28 | Trinamix Gmbh | Optical sensor and detector for an optical detection |
| US11428787B2 (en) | 2016-10-25 | 2022-08-30 | Trinamix Gmbh | Detector for an optical detection of at least one object |
| US11860292B2 (en) | 2016-11-17 | 2024-01-02 | Trinamix Gmbh | Detector and methods for authenticating at least one object |
-
1994
- 1994-11-30 JP JP32390294A patent/JPH08159714A/en active Pending
Cited By (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009019979A (en) * | 2007-07-11 | 2009-01-29 | Fujitsu Ltd | Light receiver, distance calculator, distance calculation program, recording medium, and distance calculation method |
| JP2014510909A (en) * | 2011-02-15 | 2014-05-01 | ビーエーエスエフ ソシエタス・ヨーロピア | Detector for optically detecting at least one object |
| WO2012110924A1 (en) * | 2011-02-15 | 2012-08-23 | Basf Se | Detector for optically detecting at least one object |
| US9001029B2 (en) | 2011-02-15 | 2015-04-07 | Basf Se | Detector for optically detecting at least one object |
| JP2019049573A (en) * | 2011-02-15 | 2019-03-28 | ビーエーエスエフ ソシエタス・ヨーロピアＢａｓｆ Ｓｅ | Detector for optically detecting at least one object |
| CN106019305A (en) * | 2011-02-15 | 2016-10-12 | 巴斯夫欧洲公司 | Detector for optically detecting at least one object |
| CN103492835A (en) * | 2011-02-15 | 2014-01-01 | 巴斯夫欧洲公司 | Detector for optically detecting at least one object |
| US10120078B2 (en) | 2012-12-19 | 2018-11-06 | Basf Se | Detector having a transversal optical sensor and a longitudinal optical sensor |
| US9389315B2 (en) | 2012-12-19 | 2016-07-12 | Basf Se | Detector comprising a transversal optical sensor for detecting a transversal position of a light beam from an object and a longitudinal optical sensor sensing a beam cross-section of the light beam in a sensor region |
| US10823818B2 (en) | 2013-06-13 | 2020-11-03 | Basf Se | Detector for optically detecting at least one object |
| US9741954B2 (en) | 2013-06-13 | 2017-08-22 | Basf Se | Optical detector and method for manufacturing the same |
| US9829564B2 (en) | 2013-06-13 | 2017-11-28 | Basf Se | Detector for optically detecting at least one longitudinal coordinate of one object by determining a number of illuminated pixels |
| US10353049B2 (en) | 2013-06-13 | 2019-07-16 | Basf Se | Detector for optically detecting an orientation of at least one object |
| US9989623B2 (en) | 2013-06-13 | 2018-06-05 | Basf Se | Detector for determining a longitudinal coordinate of an object via an intensity distribution of illuminated pixels |
| US10845459B2 (en) | 2013-06-13 | 2020-11-24 | Basf Se | Detector for optically detecting at least one object |
| US9665182B2 (en) | 2013-08-19 | 2017-05-30 | Basf Se | Detector for determining a position of at least one object |
| US9557856B2 (en) | 2013-08-19 | 2017-01-31 | Basf Se | Optical detector |
| US10012532B2 (en) | 2013-08-19 | 2018-07-03 | Basf Se | Optical detector |
| US9958535B2 (en) | 2013-08-19 | 2018-05-01 | Basf Se | Detector for determining a position of at least one object |
| US11041718B2 (en) | 2014-07-08 | 2021-06-22 | Basf Se | Detector for determining a position of at least one object |
| US10094927B2 (en) | 2014-09-29 | 2018-10-09 | Basf Se | Detector for optically determining a position of at least one object |
| US11125880B2 (en) | 2014-12-09 | 2021-09-21 | Basf Se | Optical detector |
| WO2016092452A1 (en) * | 2014-12-09 | 2016-06-16 | Basf Se | Optical detector |
| US10775505B2 (en) | 2015-01-30 | 2020-09-15 | Trinamix Gmbh | Detector for an optical detection of at least one object |
| US10955936B2 (en) | 2015-07-17 | 2021-03-23 | Trinamix Gmbh | Detector for optically detecting at least one object |
| US10412283B2 (en) | 2015-09-14 | 2019-09-10 | Trinamix Gmbh | Dual aperture 3D camera and method using differing aperture areas |
| US11211513B2 (en) | 2016-07-29 | 2021-12-28 | Trinamix Gmbh | Optical sensor and detector for an optical detection |
| US10890491B2 (en) | 2016-10-25 | 2021-01-12 | Trinamix Gmbh | Optical detector for an optical detection |
| US11428787B2 (en) | 2016-10-25 | 2022-08-30 | Trinamix Gmbh | Detector for an optical detection of at least one object |
| US10948567B2 (en) | 2016-11-17 | 2021-03-16 | Trinamix Gmbh | Detector for optically detecting at least one object |
| US11415661B2 (en) | 2016-11-17 | 2022-08-16 | Trinamix Gmbh | Detector for optically detecting at least one object |
| US11635486B2 (en) | 2016-11-17 | 2023-04-25 | Trinamix Gmbh | Detector for optically detecting at least one object |
| US11698435B2 (en) | 2016-11-17 | 2023-07-11 | Trinamix Gmbh | Detector for optically detecting at least one object |
| US11860292B2 (en) | 2016-11-17 | 2024-01-02 | Trinamix Gmbh | Detector and methods for authenticating at least one object |
| US11060922B2 (en) | 2017-04-20 | 2021-07-13 | Trinamix Gmbh | Optical detector |
| US11067692B2 (en) | 2017-06-26 | 2021-07-20 | Trinamix Gmbh | Detector for determining a position of at least one object |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH08159714A (en) | Position detection sensor | |
| US6741082B2 (en) | Distance information obtaining apparatus and distance information obtaining method | |
| JP3073897B2 (en) | Distance measuring device | |
| JP4546047B2 (en) | Optical distance measuring device | |
| JP3695170B2 (en) | Optical sensor | |
| JP3230625B2 (en) | Reflective photoelectric sensor | |
| JPH0778429B2 (en) | Ranging device | |
| JP2816257B2 (en) | Non-contact displacement measuring device | |
| JP2522191B2 (en) | IC lead height measuring device | |
| JP2544789B2 (en) | Optical displacement measuring device | |
| JPH06258040A (en) | Laser displacement meter | |
| WO2024004166A1 (en) | Distance measurement device | |
| JP2901747B2 (en) | Distance measuring device | |
| JP2970250B2 (en) | Distance measuring device | |
| JPH0599620A (en) | Edge detection device | |
| JPH086244Y2 (en) | Dimension measuring device | |
| JPS6136884Y2 (en) | ||
| JPS59202012A (en) | Optical range finder | |
| JPH04344408A (en) | Dimension measuring instrument | |
| JP3040881B2 (en) | Light beam diameter measuring device | |
| JPH04110907U (en) | Dimension measuring device | |
| JPS61231409A (en) | Optical position measuring apparatus | |
| JP2000310509A (en) | Stroke measuring device | |
| JPH04364414A (en) | Distance-measuring device | |
| JPS6341486B2 (en) |