JPH08141905A - Belt sander machine - Google Patents
Belt sander machineInfo
- Publication number
- JPH08141905A JPH08141905A JP31246794A JP31246794A JPH08141905A JP H08141905 A JPH08141905 A JP H08141905A JP 31246794 A JP31246794 A JP 31246794A JP 31246794 A JP31246794 A JP 31246794A JP H08141905 A JPH08141905 A JP H08141905A
- Authority
- JP
- Japan
- Prior art keywords
- belt
- material feeding
- polishing
- tread plate
- feeding device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、金属，木材等の加工材
の表面を研削研磨するベルトサンダー機に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a belt sander machine for grinding and polishing the surface of a processed material such as metal or wood.
【０００２】[0002]
【従来の技術】複数個のロールに研磨ベルトを掛け渡
し、かつ研磨ベルトの内面に踏圧パッド装置を配設して
なる研磨ヘッドを、送材装置に対設したベルトサンダー
機は、種々提案されている。2. Description of the Related Art Various belt sander machines have been proposed in which a polishing belt is provided around a plurality of rolls and a treading pad device is provided on the inner surface of the polishing belt, which is opposed to a material feeding device. ing.
【０００３】[0003]
【発明が解決しようとする課題】ところで、この種のベ
ルトサンダー機にあって、加工材の表面に過剰な凸部が
あったり、又はその肉厚が長さ方向でばら付いて基準値
よりも過剰に厚くなっている場合があり、このような加
工材を研削研磨すると、研削加工中に研磨ベルトや、送
材ベルトに大きな負荷がかかって、その破断または過剰
な損耗を生じることがある。とくに、最近ではダイヤモ
ンドベルト等の高価なベルトを使用することが多く、こ
のような破損により保守コストやランニングコストが大
きく押し上げられることとなる。By the way, in this type of belt sander machine, there is an excessive convex portion on the surface of the processed material, or the thickness thereof varies in the length direction, and the thickness exceeds the reference value. In some cases, the work material is excessively thick, and when such a processed material is ground and polished, a large load may be applied to the polishing belt and the material feeding belt during the grinding processing, causing breakage or excessive wear. In particular, recently, expensive belts such as diamond belts are often used, and such breakage greatly increases maintenance costs and running costs.
【０００４】本発明はかかる問題点を解決することを目
的とするものである。The present invention aims to solve such problems.
【０００５】[0005]
【課題を解決するための手段】本発明は、パッドフレー
ムに開口を設け、踏圧板を、開口内に昇降可能に装着し
てその下面を該開口から露出し、かつパッドフレーム内
に設けた発条により下方付勢して該踏圧板下面を加工材
に圧接するようにすると共に、踏圧板の所定以上の上昇
を検知する検出センサを備え、さらに、前記検出センサ
による前記上昇検知にともない送材装置による送材を停
止し、かつ研磨ベルトの走行を停止すると共に、送材装
置と研磨ヘッドとを離間させる駆動停止制御手段を備え
たことを特徴とするものである。SUMMARY OF THE INVENTION According to the present invention, an opening is provided in a pad frame, and a tread plate is mounted in the opening so that the tread plate can be moved up and down so that its lower surface is exposed from the opening, and a strip provided in the pad frame. The lower surface of the tread plate is pressed against the workpiece by means of a pressure sensor, and a detection sensor for detecting a rise of the tread plate more than a predetermined value is provided, and further, a material feeding device according to the rise detection by the detection sensor. And a drive stop control means for separating the material feeding device and the polishing head from each other while stopping the feeding of the material and stopping the traveling of the polishing belt.
【０００６】[0006]
【作用】加工材の表面に過剰な凸部があったり、過剰厚
となると、加工材表面に圧接している踏圧板が所定以上
に上昇し、検出センサがこの過剰上昇を検知し、この検
知により駆動停止制御手段が作動して、研磨ベルト及び
送材ベルトの走行が停止し、送材装置と研磨ヘッドとが
離間して、加工材への踏圧が解除される。このため、研
磨ベルト及び送材ベルトに対する過剰負荷の印加が未然
に阻止される。[Function] When the surface of the processed material has an excessive convex portion or becomes excessively thick, the tread plate pressed against the surface of the processed material rises above a predetermined level, and the detection sensor detects this excessive increase and detects this. As a result, the drive stop control means is activated, the traveling of the polishing belt and the material feeding belt is stopped, the material feeding device and the polishing head are separated from each other, and the stepping pressure on the processed material is released. Therefore, application of an excessive load to the polishing belt and the material feeding belt is blocked in advance.
【０００７】[0007]
【実施例】図１〜４に従って本発明に係るベルトサンダ
ー機の一実施例を説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a belt sander machine according to the present invention will be described with reference to FIGS.
【０００８】基部フレーム１の一側部には、送材フレー
ム２が乗載されており、前記送材フレーム２内には、送
材モータＭ1 により駆動する駆動ロール３と従動ロール
４とを前後に枢支し、該ロール３，４に送材ベルト５を
掛け渡して、その上面を送材通路とする送材装置６が配
設される。A material feeding frame 2 is mounted on one side of the base frame 1, and a driving roll 3 and a driven roll 4 driven by a material feeding motor M 1 are mounted in the material feeding frame 2. A material feeding device 6 is provided, which is pivotally supported in the front and rear direction, and a material feeding belt 5 is stretched over the rolls 3 and 4, and the upper surface thereof serves as a material feeding passage.
【０００９】また基部フレーム１の他側には縦フレーム
７が立設され、該縦フレーム７には前後二つの研磨ヘッ
ド８ａ，８ｂが取付けられる。A vertical frame 7 is erected on the other side of the base frame 1, and two front and rear polishing heads 8a and 8b are attached to the vertical frame 7.
【００１０】前記研磨ヘッド８ａ，８ｂは、昇降枠１６
の内部に装架され、、該昇降枠１６は縦フレーム７の内
側面に形成した上下方向の昇降ガイド９に嵌装されて昇
降ハンドル１０の回転操作及び該昇降ハンドル１０によ
り回転する回動杆１１に連繋した昇降モータＭ2 の駆動
により、連係機構を介して昇降移動可能としている。す
なわちこの昇降枠１６の内部で、テンションロール１
２，駆動ロール１３及び従動ロール１４を夫々前後方向
に支持して、テンションロール１２を最上位置とする三
角状に配設し、各ロール１２〜１４に研磨面を外側にし
て研磨ベルト１５を掛け渡し、研削モータＭ3 の駆動力
を駆動ロール１３に伝達することにより、研磨ベルト１
５を送材通路と交差する図１の反時計方向に走行させる
ようにして、研磨ヘッド８ａ，８ｂを構成している。The polishing heads 8a and 8b are provided with a lifting frame 16
The lifting frame 16 is mounted inside the vertical frame 7, and the lifting frame 16 is fitted to a vertical lifting guide 9 formed on the inner surface of the vertical frame 7 to rotate the lifting handle 10 and rotate by the lifting handle 10. By driving an elevating motor M 2 linked to 11, it is possible to move up and down through a linkage mechanism. That is, inside the elevating frame 16, the tension roll 1
2, the driving roll 13 and the driven roll 14 are respectively supported in the front-rear direction, and the tension rolls 12 are arranged in a triangular shape at the uppermost position, and the polishing belt 15 is hung on each of the rolls 12 to 14 with the polishing surface facing outward. By passing the driving force of the grinding motor M 3 to the driving roll 13, the polishing belt 1
The polishing heads 8a and 8b are configured so that the roller 5 runs in the counterclockwise direction in FIG.
【００１１】前記ロール１３，１４間には研磨ベルト１
５に内接する踏圧パッド装置１７が配設されている。こ
の踏圧パッド装置１７を、図４について詳細に説明す
る。The polishing belt 1 is provided between the rolls 13 and 14.
A pedaling pad device 17 inscribed in 5 is provided. The pedaling pad device 17 will be described in detail with reference to FIG.
【００１２】１８は縦フレーム７に固定されたパッドフ
レームであって、その下面の円形開口１９の周縁で、パ
ッドフレーム１８内に配設した踏圧板２０の係止鍔２１
を支持し、その下面を円形開口１９から露出している。
前記踏圧板２０の下面には、その中心を通って、径方向
に接触条板２２が固着され、該下面を長尺状接触部２３
としている。さらに前記係止鍔２１には、周方向に等角
度間隔で位置決め溝２４が複数個形成されている。Reference numeral 18 denotes a pad frame fixed to the vertical frame 7. The pad frame 18 has a peripheral edge of a circular opening 19 on the lower surface thereof, and a locking collar 21 for a tread plate 20 arranged in the pad frame 18.
Is supported, and its lower surface is exposed from the circular opening 19.
A contact strip 22 is fixed to the lower surface of the tread plate 20 through the center thereof in the radial direction, and the lower surface is provided with a long contact portion 23.
And Further, the locking flange 21 is formed with a plurality of positioning grooves 24 at equal angular intervals in the circumferential direction.
【００１３】パッドフレームの上板２５の中心にはバネ
座２６がパッドフレーム１８内で上下位置調整可能に吊
持されている。前記バネ座２６には、その下部周面に発
条２７が外嵌し、その下端を踏圧板２０の上面に弾接し
て、踏圧板２０の係止鍔２１を円形開口１９の周縁に圧
接させている。A spring seat 26 is suspended at the center of the upper plate 25 of the pad frame in the pad frame 18 so as to be adjustable in vertical position. A spring 27 is externally fitted to the lower peripheral surface of the spring seat 26, and the lower end of the spring seat 26 is elastically contacted with the upper surface of the tread plate 20 so that the locking flange 21 of the tread plate 20 is pressed against the peripheral edge of the circular opening 19. There is.
【００１４】さらに、前記係止鍔２１の周部位置で、パ
ッドフレーム１８には挿通孔２９が形成され、該挿通孔
２９に回転止め３０を挿通し、その先端を前記位置決め
溝２４のいずれかに嵌入して、接触条板２２の接触部２
３を研磨ベルト１５の走行方向に対して所望の傾斜角度
位置に固定している。Further, an insertion hole 29 is formed in the pad frame 18 at a peripheral position of the locking collar 21, a rotation stopper 30 is inserted into the insertion hole 29, and a tip of the rotation stopper 30 is inserted into one of the positioning grooves 24. The contact portion 2 of the contact strip 22
3 is fixed at a desired inclination angle position with respect to the traveling direction of the polishing belt 15.
【００１５】次に本発明の要部につき説明する。Next, the main part of the present invention will be described.
【００１６】前記バネ座２６の下面には前記踏圧板２０
の上面が所定閾値以上に近接したことを検知する近接ス
イッチからなる検出センサＳが固着されている。尚、こ
の実施例のように近接スイッチを設けた場合には、受波
強度が所定閾値を越えているかどうかを判別して、信号
出力を発生することとなるが、近接スイッチからは踏圧
板２０の上面との離間距離に対応した出力を常に発生す
るようにし、後述する中央制御装置ＣＰＵによって、そ
の出力値を所定域値と比較判定し、該判定値に基づき踏
圧板２０の所定以上上昇を検知するようにしてもよい。
そしてこの場合には近接スイッチと中央制御装置とで検
出センサＳが構成されることとなる。On the lower surface of the spring seat 26, the tread plate 20 is provided.
A detection sensor S formed of a proximity switch for detecting that the upper surface of the is close to a predetermined threshold value or more is fixed. When a proximity switch is provided as in this embodiment, it is determined whether the received wave intensity exceeds a predetermined threshold value and a signal output is generated. An output corresponding to the distance from the upper surface of the pedal is constantly generated, and the output value is compared with a predetermined range value by a central control unit CPU, which will be described later, to raise the tread plate 20 by a predetermined amount or more based on the determination value. You may make it detect.
In this case, the proximity sensor and the central control device constitute the detection sensor S.
【００１７】この検出センサＳとして、リミットスイッ
チ等、他のスイッチを適用してもよい。As the detection sensor S, another switch such as a limit switch may be applied.
【００１８】しかして、この検出センサＳにより前記踏
圧板２０が所定以上上昇すると検知され、その上昇検知
により駆動停止制御手段が作動し、送材ベルト５及び研
磨ベルト１５の走行が停止し、送材装置６と研磨ヘッド
８ａ，８ｂとが離間して、加工材への踏圧板２０による
踏圧が解除される。However, the detection sensor S detects that the tread plate 20 has risen by a predetermined amount or more, and the drive stop control means is activated by the detection of the rise to stop the running of the material feeding belt 5 and the polishing belt 15, The material device 6 and the polishing heads 8a and 8b are separated from each other, and the treading pressure of the treading plate 20 on the processed material is released.
【００１９】この駆動停止制御手段の構成を図５により
説明する。The structure of the drive stop control means will be described with reference to FIG.
【００２０】中央制御装置ＣＰＵには、入力側に検出セ
ンサＳが接続され、出力側に送材モータＭ1 、昇降モー
タＭ2 、研削モータＭ3 とが接続される。そして、前記
検出センサＳにより踏圧板２０の所定以上の上昇が検知
されると、送材モータＭ1 、研削モータＭ3 を夫々駆動
解除して、送材ベルト５及び研磨ベルト１５の走行を停
止させると共に、昇降モータＭ2 を駆動し、昇降ガイド
９に沿って昇降枠１６を上昇させる。これにより、研磨
ヘッド８ａ，８ｂが、送材装置６から離間し、踏圧板２
０による加工材への踏圧が解除される。A detection sensor S is connected to the input side of the central control unit CPU, and a material feeding motor M 1 , a lifting motor M 2 and a grinding motor M 3 are connected to the output side thereof. When the detection sensor S detects that the treading plate 20 has risen by a predetermined amount or more, the feeding motor M 1 and the grinding motor M 3 are released from driving, and the traveling of the feeding belt 5 and the polishing belt 15 is stopped. At the same time, the elevating motor M 2 is driven to elevate the elevating frame 16 along the elevating guide 9. As a result, the polishing heads 8a and 8b are separated from the material feeding device 6, and the tread plate 2
The stepping force on the processed material due to 0 is released.
【００２１】尚、この構成では研磨ヘッド８ａ，８ｂは
別個に昇降するものであるから、検出センサＳにより加
工材の過剰昇降が検知された一方の研磨ヘッド８ａ，８
ｂが上昇することとなる。この場合に、前方の研磨ヘッ
ド８ａのみに、前記検出センサＳを適用するようにして
も良い。Since the polishing heads 8a and 8b are moved up and down separately in this structure, one of the polishing heads 8a and 8b is detected by the detection sensor S when the workpiece is excessively moved up and down.
b will rise. In this case, the detection sensor S may be applied only to the front polishing head 8a.
【００２２】前記実施例の作動について説明する。The operation of the above embodiment will be described.
【００２３】加工材ｗ（図２参照）が送材装置に送られ
て、踏圧板２０の下部にくると、該踏圧板２０の接触部
２３下面で横断方向へ走行する研磨ベルト１５が圧接し
て、所定量の研削研磨加工が施される。When the processed material w (see FIG. 2) is sent to the material feeding device and reaches the lower portion of the tread plate 20, the polishing belt 15 running in the transverse direction is pressed against the lower surface of the contact portion 23 of the tread plate 20. Then, a predetermined amount of grinding and polishing is performed.
【００２４】このとき供給された加工材ｗの厚が所定厚
よりも大きい場合や、加工材ｗ上面が凹凸のある不整面
であると、その研削研磨の反作用として、接触部２３下
面に過剰圧を生じ、発条２７の付勢力に抗して、踏圧板
２０は微浮上する。このため、踏圧板２０には無理がか
からない。しかしこの加工材ｗの表面に凸部や厚み偏位
が過剰であると、加工材ｗ表面に圧接している踏圧板２
０が上昇し、前記検出センサＳが過剰上昇を検知し、そ
の上昇検知により駆動停止制御手段が作動し、送材ベル
ト５及び研磨ベルト１５の走行が停止し、送材装置６と
研磨ヘッド８ａ，８ｂとが離間して、加工材ｗへの踏圧
が解除される。そこで、この加工材ｗを除去し、次の加
工材ｗを供給することにより、送材ベルト５及び研磨ベ
ルト１５への過剰な負荷が阻止され、その破断又は損耗
を阻止できることとなる。If the thickness of the workpiece w supplied at this time is larger than a predetermined thickness, or if the upper surface of the workpiece w is an irregular surface having irregularities, an excessive pressure is applied to the lower surface of the contact portion 23 as a reaction of the grinding and polishing. Then, the tread plate 20 slightly floats against the urging force of the spring 27. Therefore, the tread plate 20 is not overloaded. However, if the convex portion or the thickness deviation is excessive on the surface of the processed material w, the tread plate 2 pressed against the surface of the processed material w.
0 rises, the detection sensor S detects an excessive rise, the drive stop control means is activated by the rise detection, the traveling of the material feeding belt 5 and the polishing belt 15 is stopped, and the material feeding device 6 and the polishing head 8a. , 8b are separated from each other, and the pedaling pressure on the processed material w is released. Therefore, by removing this processing material w and supplying the next processing material w, it is possible to prevent an excessive load on the material feeding belt 5 and the polishing belt 15, and to prevent its breakage or wear.
【００２５】ところで、上述の構成にあっては、踏圧板
２０による踏圧力を解除するために、研磨ヘッド８ａ，
８ｂを上昇する構成であるが、該研磨ヘッド８ａ，８ｂ
を固定しておき、送材装置６を下降させるようにしても
良い。By the way, in the above-mentioned structure, in order to release the stepping pressure by the stepping plate 20, the polishing head 8a,
8b, the polishing heads 8a, 8b
May be fixed and the material feeding device 6 may be lowered.
【００２６】図６，７は、かかる構成を示し、送材装置
６を、基部フレーム１に下部が螺装する螺子杆４０，４
０で昇降可能に支持し、該螺子杆４０，４０に差し渡し
て、両端部の傘歯車により、前記螺子杆４０，４０と連
繋する連動杆４１を介して螺子杆４０，４０を連動する
と共に、一方の螺子杆４０，４０に固着した傘歯車４２
に、前記送材装置６に取付けた昇降モータＭ2 の駆動軸
に設けた傘歯車４３を螺合したものである。かかる構成
にあっては、検出センサＳによる踏圧板２０の過剰上昇
検知に伴って、前記昇降モータＭ2 を駆動して、送材装
置６を下降し、これにより、踏圧板２０の踏圧力が解除
される。FIGS. 6 and 7 show such a structure, in which the material feeding device 6 is screwed onto the base frame 1 at its lower portion by screw rods 40, 4.
The screw rods 40 and 40 are movably supported by 0 and passed over the screw rods 40 and 40, and the bevel gears at both ends interlock the screw rods 40 and 40 via the interlocking rod 41 that is connected to the screw rods 40 and 40. Bevel gear 42 fixed to one screw rod 40, 40
Further, a bevel gear 43 provided on the drive shaft of the lifting motor M 2 attached to the material feeding device 6 is screwed. In such a configuration, when the detection sensor S detects an excessive rise of the tread plate 20, the elevating motor M 2 is driven to lower the material feeding device 6, whereby the tread pressure of the tread plate 20 is increased. It will be canceled.
【００２７】[0027]
【発明の効果】本発明は、上述したように、加工材ｗの
表面に凸部があったり、過剰厚となると、パッドフレー
ム１８内に付装され、発条２７によって下方付勢された
て加工材ｗ表面に圧接している踏圧板２０が上昇し、か
かる踏圧板２０の所定以上の上昇を検出センサＳで検知
し、その検知により駆動停止制御手段を作動させ、送材
ベルト５及び研磨ベルト１５の走行を停止し、送材装置
６と研磨ヘッド８ａ，８ｂとを離間して、加工材ｗへの
踏圧を解除するようにしたから、送材ベルト５や研磨ベ
ルト１５に過剰な負荷がかからず、このため、その破断
や損耗を未然に防止でき、保守コストを低廉とし得る等
の優れた効果がある。As described above, according to the present invention, when the surface of the processed material w has a convex portion or becomes excessively thick, the processed material w is mounted inside the pad frame 18 and is urged downward by the spring 27 to be processed. The treading plate 20 pressed against the surface of the material w rises, and the detection sensor S detects the rise of the treading plate 20 more than a predetermined value, and the drive stop control means is operated by the detection, and the material feeding belt 5 and the polishing belt. 15 is stopped and the material feeding device 6 and the polishing heads 8a and 8b are separated from each other to release the stepping pressure on the processed material w. Therefore, an excessive load is applied to the material feeding belt 5 and the polishing belt 15. Therefore, there is an excellent effect that the breakage and the wear can be prevented and the maintenance cost can be reduced.
【図１】ベルトサンダー機の正面図である。FIG. 1 is a front view of a belt sander machine.
【図２】同上の側面図である。FIG. 2 is a side view of the same.
【図３】研磨ヘッド８ａ，８ｂの下部を示す側面図であ
る。FIG. 3 is a side view showing a lower portion of polishing heads 8a and 8b.
【図４】パッドフレーム１８の縦断側面図である。FIG. 4 is a vertical sectional side view of a pad frame 18.
【図５】駆動停止制御手段を示すブロック図である。FIG. 5 is a block diagram showing drive stop control means.
【図６】他の構成のベルトサンダー機の正面図である。FIG. 6 is a front view of a belt sander having another configuration.
【図７】同上の側面図である。FIG. 7 is a side view of the above.
２ 送材フレーム ５ 送材ベルト ６ 送材装置 ８ａ，８ｂ 研磨ヘッド １５ 研磨ベルト １７ 踏圧パッド装置 １８ パッドフレーム ２０ 踏圧板 ２７ 発条 Ｍ1 送材モータ Ｍ2 昇降モータ Ｍ3 研削モータ Ｓ 検出センサ2 Material feeding frame 5 Material feeding belt 6 Material feeding device 8a, 8b Polishing head 15 Polishing belt 17 Stepping pad device 18 Pad frame 20 Stepping plate 27 Stroke M 1 Feeding motor M 2 Lifting motor M 3 Grinding motor S Detection sensor
Claims (1)
かつ研磨ベルトの内面に踏圧パッド装置を配設してなる
研磨ヘッドを、送材装置に対設したベルトサンダー機に
おいて、 パッドフレームに開口を設け、踏圧板を、開口内に昇降
可能に装着してその下面を該開口から露出し、かつパッ
ドフレーム内に設けた発条により下方付勢して該踏圧板
下面を加工材に圧接するようにすると共に、踏圧板の所
定以上の上昇を検知する検出センサを備え、さらに、前
記検出センサによる前記上昇検知にともない送材装置に
よる送材を停止し、かつ研磨ベルトの走行を停止すると
共に、送材装置と研磨ヘッドとを離間させる駆動停止制
御手段を備えたことを特徴とするベルトサンダー機。1. A polishing belt is stretched over a plurality of rolls,
In addition, in a belt sander machine in which a polishing head having a treading pad device arranged on the inner surface of a polishing belt is provided opposite to a material feeding device, an opening is provided in a pad frame, and a treading plate is mounted in the opening so that it can be lifted and lowered. The lower surface of the tread plate is exposed from the opening, and the lower surface of the tread plate is pressed against the work material by downwardly urging it by a spring provided in the pad frame. And a drive stop control means for stopping the material feeding by the material feeding device and stopping the traveling of the polishing belt along with the rise detection by the detection sensor, and for separating the material feeding device and the polishing head from each other. A belt sander machine characterized by being equipped.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31246794A JP2799832B2 (en) | 1994-11-22 | 1994-11-22 | Belt sander machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31246794A JP2799832B2 (en) | 1994-11-22 | 1994-11-22 | Belt sander machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08141905A true JPH08141905A (en) | 1996-06-04 |
| JP2799832B2 JP2799832B2 (en) | 1998-09-21 |
Family
ID=18029557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31246794A Expired - Lifetime JP2799832B2 (en) | 1994-11-22 | 1994-11-22 | Belt sander machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2799832B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003028079A1 (en) * | 2001-09-25 | 2003-04-03 | Nihon Micro Coating Co., Ltd. | Polishing head and semiconductor wafer end face polishing machine |
| JP2007105858A (en) * | 2005-10-17 | 2007-04-26 | Amitec Corp | Sanding machine |
| CN106425775A (en) * | 2016-12-06 | 2017-02-22 | 无锡昊康通用机械有限公司 | Abrasive belt sander |
| CN110549208A (en) * | 2019-08-26 | 2019-12-10 | 王祉晗 | Burr removing device for cutting surface of cylindrical workpiece |
| CN114571364A (en) * | 2020-12-01 | 2022-06-03 | Hb技术有限公司 | Defect polishing apparatus using polishing belt |
-
1994
- 1994-11-22 JP JP31246794A patent/JP2799832B2/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003028079A1 (en) * | 2001-09-25 | 2003-04-03 | Nihon Micro Coating Co., Ltd. | Polishing head and semiconductor wafer end face polishing machine |
| US6736710B2 (en) | 2001-09-25 | 2004-05-18 | Nihon Microcoating Co., Ltd. | Polisher for polishing end surface of semiconductor wafer |
| JP2007105858A (en) * | 2005-10-17 | 2007-04-26 | Amitec Corp | Sanding machine |
| CN106425775A (en) * | 2016-12-06 | 2017-02-22 | 无锡昊康通用机械有限公司 | Abrasive belt sander |
| CN110549208A (en) * | 2019-08-26 | 2019-12-10 | 王祉晗 | Burr removing device for cutting surface of cylindrical workpiece |
| CN110549208B (en) * | 2019-08-26 | 2021-04-20 | 安徽舜邦精细化工有限公司 | Burr removing device for cutting surface of cylindrical workpiece |
| CN114571364A (en) * | 2020-12-01 | 2022-06-03 | Hb技术有限公司 | Defect polishing apparatus using polishing belt |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2799832B2 (en) | 1998-09-21 |
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