JPH08104502A - Ozone forming device - Google Patents
Ozone forming deviceInfo
- Publication number
- JPH08104502A JPH08104502A JP6239912A JP23991294A JPH08104502A JP H08104502 A JPH08104502 A JP H08104502A JP 6239912 A JP6239912 A JP 6239912A JP 23991294 A JP23991294 A JP 23991294A JP H08104502 A JPH08104502 A JP H08104502A
- Authority
- JP
- Japan
- Prior art keywords
- comb
- electrodes
- shaped electrodes
- discharge
- plate electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Apparatus For Disinfection Or Sterilisation (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明はオゾン殺菌装置のオゾン
生成装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ozone generator for an ozone sterilizer.
【０００２】[0002]
【従来の技術】放電方式による従来法のオゾン生成は、
２枚の金属電極間に１枚以上の固体誘電体を挿入し、電
極間に交流の高電圧を印加することにより、１枚の電極
と誘電体間の間（ギャップ：１〜２mm）で発生する無声
放電を用い、原料ガス中の酸素分子を解離させ、生成し
た酸素原子と酸素分子を反応させてオゾンを生成してい
る。2. Description of the Related Art Conventional ozone generation by a discharge method is
By inserting one or more solid dielectrics between two metal electrodes and applying an alternating high voltage between the electrodes, it occurs between one electrode and the dielectric (gap: 1-2 mm) Oxygen molecules in the raw material gas are dissociated by using this silent discharge, and the generated oxygen atoms are reacted with the oxygen molecules to generate ozone.
【０００３】[0003]
【発明が解決しようとする課題】前記従来のオゾン生成
法では、放電間隔を１〜２mm程度に設定する必要があっ
たため、原料ガスの管路抵抗が増加する欠点があった。
またオゾン生成量を増加させるためには、放電面積の増
加が必要であるが、この際時間的、場所的に不均一放電
が形成される場合があった。更に誘電体を使用している
ため、交流電圧や高周波電圧による誘電損失が発生する
問題があり、またガス温度は高周波化に伴って増加し、
生成したオゾンを破壊する欠点があった。本発明は前記
従来の問題を解決しようとするもので、電極間のギャッ
プ増大が可能なストリーマ放電を用いることにより、原
料ガスの管路抵抗を大幅に減少させ、オゾン生成効率の
低下を押さえることができるオゾン生成装置を提供せん
とするものである。In the above-mentioned conventional ozone generation method, it was necessary to set the discharge interval to about 1 to 2 mm, so that there was a drawback that the conduit resistance of the raw material gas increased.
Further, in order to increase the amount of ozone generated, it is necessary to increase the discharge area, but in this case, non-uniform discharge may be formed temporally and locally. Furthermore, since a dielectric is used, there is a problem that dielectric loss due to AC voltage or high frequency voltage occurs, and the gas temperature increases with increasing frequency,
It has a drawback that it destroys the generated ozone. The present invention is intended to solve the above-mentioned conventional problems, and by using a streamer discharge capable of increasing a gap between electrodes, a conduit resistance of a raw material gas is significantly reduced and a decrease in ozone generation efficiency is suppressed. It is intended to provide an ozone generator capable of performing the above.
【０００４】[0004]
【課題を解決するための手段】このため本発明は、放電
方式によるオゾン生成装置において、金属針を連ねた櫛
型電極を単一又は複数段有し、同櫛型電極は、金属平板
電極との間に面状に近いストリーマ放電を発生させる機
能を持ち、直流電圧を印加した前記櫛型電極とアースに
接地している平板電極間に誘電体を挿入しないように構
成したものであり、また前記ストリーマ放電を原料ガス
流路に対し垂直に発生させて、酸素分子を電子衝突によ
り確実に解離させるようにしたものであり、更に前記櫛
型電極はガス流れ方向に絶縁体スペーサを挟んで所定間
隔で設置してなるもので、これを課題解決のための手段
とするものである。For this reason, the present invention provides a discharge type ozone generator having a single or a plurality of comb-shaped electrodes in which metal needles are connected, and the comb-shaped electrodes are metal flat plate electrodes and It has a function of generating a streamer discharge close to a planar shape between, and is configured so that a dielectric is not inserted between the comb-shaped electrode to which a DC voltage is applied and the flat plate electrode grounded to earth. The streamer discharge is generated perpendicularly to the raw material gas flow path so that oxygen molecules are surely dissociated by electron collision, and the comb-shaped electrodes are arranged in a predetermined direction with an insulator spacer interposed therebetween in the gas flow direction. They are installed at intervals and are used as means for solving the problems.
【０００５】[0005]
【作用】複数の針電極からなる櫛型電極により、ガス流
れ面に垂直に個々の針先端からストリーマ放電を発生さ
せるため、ガス流れ断面にほぼ均一な面状のプラズマを
発生させることができる。また複数針の櫛型電極をガス
流れ方向に対して、複数設置する際の櫛型電極間に挟み
込む絶縁スペーサは、針電極近傍の不平等電界を強調す
る作用を示す。一方個々の針先端から、平板電極に向け
て発生するストリーマ放電は、平板電極に近づくにつれ
て広がるため、一部の針から放電が発生しなくても面状
のプラズマ生成が可能である。With the comb-shaped electrode composed of a plurality of needle electrodes, a streamer discharge is generated from the tip of each needle perpendicular to the gas flow surface, so that a substantially uniform planar plasma can be generated in the gas flow cross section. Further, the insulating spacers sandwiching the comb-shaped electrodes having a plurality of needles between the comb-shaped electrodes when a plurality of comb-shaped electrodes are installed in the gas flow direction have a function of emphasizing the unequal electric field near the needle electrodes. On the other hand, the streamer discharge generated from the tip of each needle toward the flat plate electrode spreads as it approaches the flat plate electrode, so that planar plasma can be generated without discharge from some needles.
【０００６】[0006]
【実施例】以下本発明を図面の実施例について説明する
と、図１及び図２は本発明の実施例を示し、オゾナイザ
本体は絶縁体（例えばアクリル）で出来たケース１の内
部に金属平板電極２と、それに対向して設置された金属
針で出来た櫛型電極３とを有する。この櫛型電極３は、
絶縁スペーサ４により所定の距離だけ離されており、各
櫛型電極３は、高電圧平板電極５と接触させて、高電圧
が印加可能となっている。また各櫛型電極３を確実に高
電圧平板電極５に接触させるため、金属箔６をＬ字型に
折って挟み込むことにより導通を完全にしている。また
平板電極２は、電流計７を経て接地されている。一方高
電圧平板電極５には、直流高電圧電源８により、数kvま
で正或いは負の電圧を印加する。これにより櫛型電極３
と平板電極２間に、パルス状のストリーマ放電によるプ
ラズマ９が形成される。また原料ガスボンベ１０から空
気又は酸素ガスは除湿装置１１を通過した後オゾナイザ
内部に導かれる。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the embodiments of the drawings. FIG. 1 and FIG. 2 show the embodiments of the present invention. The ozonizer body is made of an insulating material (for example, acrylic). 2 and a comb-shaped electrode 3 made of a metal needle which is installed so as to face it. This comb-shaped electrode 3 is
The comb-shaped electrodes 3 are separated from each other by a predetermined distance by the insulating spacers 4, and each of the comb-shaped electrodes 3 is brought into contact with the high-voltage flat plate electrode 5 so that a high voltage can be applied. Further, in order to ensure that each comb-shaped electrode 3 is brought into contact with the high-voltage flat plate electrode 5, the metal foil 6 is folded into an L-shape and sandwiched to complete conduction. The plate electrode 2 is grounded via the ammeter 7. On the other hand, a positive or negative voltage of up to several kv is applied to the high voltage flat plate electrode 5 by the DC high voltage power source 8. Thereby, the comb-shaped electrode 3
A plasma 9 is formed by a pulsed streamer discharge between the plate electrode 2 and the flat plate electrode 2. Further, air or oxygen gas from the raw material gas cylinder 10 is introduced into the ozonizer after passing through the dehumidifier 11.
【０００７】ここでプラズマ９中の電子衝突により酸素
分子Ｏ2 が解離してオゾンＯ3 が生成される。原料ガス
はガス流れ方向に多段（図１では５段）の櫛型電極３で
発生したプラズマ９により、段階的にオゾン濃度を増加
させ、オゾナイザ出口Ｂから放出される。図２はオゾナ
イザのガス流れ方向から見た断面図であり、櫛型電極３
により、ガス流路全面にストリーマ放電が発生している
ことが分かる。また図３と図４は、本発明により製作し
た小型装置による典型的なオゾン発生特性図であり、放
電部のサイズは、幅５０mm、電極間隔は１０mm、ガス流
路長は１００ｍである。Oxygen molecules O 2 are dissociated by electron collision in the plasma 9 to generate ozone O 3 . The source gas is discharged from the ozonizer outlet B by gradually increasing the ozone concentration by the plasma 9 generated in the comb-shaped electrodes 3 in multiple stages (five stages in FIG. 1) in the gas flow direction. FIG. 2 is a cross-sectional view of the ozonizer viewed from the gas flow direction.
Thus, it can be seen that streamer discharge is generated on the entire surface of the gas flow path. 3 and 4 are typical ozone generation characteristic diagrams of a small-sized device manufactured according to the present invention. The discharge part has a size of 50 mm in width, an electrode interval of 10 mm, and a gas flow path length of 100 m.
【０００８】以上の如く本発明は、放電間隔を増加させ
るため、従来の無声放電方式を改め、電極間のギャップ
増大が可能なストリーマ放電を用いてなるものである。
またストリーマ放電を原料ガス流路に対して垂直に発生
させ、酸素分子を電子衝突により確実に解離させるた
め、複数の針電極を互いに接近させて針により一列の電
極、即ち櫛型電極３を形成し、また他法の電極は金属平
板電極２とした。櫛型電極３はガス流れ方向に絶縁体ス
ペーサ４を挟み所定の間隔で設置した。更に電極間に誘
電体を挿入せず、金属平板と金属針間で放電させた。ま
た金属針に印加する電圧は、交流や高周波ではなく、直
流電圧を印加した。As described above, according to the present invention, in order to increase the discharge interval, the conventional silent discharge method is modified, and the streamer discharge capable of increasing the gap between the electrodes is used.
Further, in order to generate streamer discharge perpendicularly to the raw material gas flow channel and surely dissociate oxygen molecules by electron collision, a plurality of needle electrodes are brought close to each other to form a row of electrodes, that is, comb-shaped electrodes 3. The electrode of the other method was the metal plate electrode 2. The comb electrodes 3 are arranged at a predetermined interval with the insulator spacers 4 sandwiched in the gas flow direction. Further, the dielectric was not inserted between the electrodes, and the electric discharge was made between the metal flat plate and the metal needle. The voltage applied to the metal needle was not a direct current or a high frequency but a direct current voltage.
【０００９】[0009]
【発明の効果】以上詳細に説明した如く本発明による
と、金属針を使用した櫛型電極と平板電極の間は、１〜
３０ｍｍまで設定可能となるため、従来法で問題となる
原料ガスの管路抵抗を大幅に減少させることができる。
また個々の針電極でストリーマ放電が安定して発生する
ため、従来法で問題となっている不均一放電によるオゾ
ン生成効率の低下を抑えることができる。特に放電発生
と安定化には絶縁スペーサによる針電極近傍の不平等電
界の形成が重要な効果を示している。更に櫛型電極と平
板電極間に誘電体を挿入していないため、従来法に比べ
て電子密度の高い放電の発生が可能である。また直流高
電圧を印加するため、従来法に比べてガス温度の上昇が
少なく、従ってオゾンの破壊が少ない。As described in detail above, according to the present invention, between the comb-shaped electrode using the metal needle and the plate electrode,
Since it can be set up to 30 mm, the conduit resistance of the raw material gas, which is a problem in the conventional method, can be significantly reduced.
Further, since the streamer discharge is stably generated at each needle electrode, it is possible to suppress the decrease in ozone generation efficiency due to the nonuniform discharge, which is a problem in the conventional method. In particular, the formation of an unequal electric field near the needle electrode by an insulating spacer has an important effect on the generation and stabilization of discharge. Further, since no dielectric is inserted between the comb-shaped electrode and the plate electrode, it is possible to generate a discharge having a higher electron density than the conventional method. Further, since a high DC voltage is applied, the increase in gas temperature is less than that in the conventional method, and therefore ozone is less destroyed.
【図１】本発明の実施例に係るオゾン生成装置の系統図
である。FIG. 1 is a system diagram of an ozone generator according to an embodiment of the present invention.
【図２】図１におけるオゾナイザの側断面図である。FIG. 2 is a side sectional view of the ozonizer shown in FIG.
【図３】本発明におけるオゾン発生特性（放電電力と濃
度）の説明図である。FIG. 3 is an explanatory diagram of ozone generation characteristics (discharge power and concentration) in the present invention.
【図４】同オゾン発生特性（放電電力の収率）の説明図
である。FIG. 4 is an explanatory diagram of the ozone generation characteristic (yield of discharge power).
１ ケース ２ 金属平板電極 ３ 櫛型電極 ４ 絶縁スペーサ ５ 高電圧平板電極 ６ 金属箔 ７ 電流計 ８ 直流高電圧電源 ９ プラズマ １０ 原料ガスボンベ １１ 除湿装置 1 Case 2 Metal flat plate electrode 3 Comb type electrode 4 Insulation spacer 5 High voltage flat plate electrode 6 Metal foil 7 Ammeter 8 DC high voltage power supply 9 Plasma 10 Raw material gas cylinder 11 Dehumidifier
───────────────────────────────────────────────────── フロントページの続き (72)発明者 大宅 一浩 広島市西区観音新町四丁目６番22号 三菱 重工業株式会社広島製作所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kazuhiro Ohya 4-6-22 Kannon Shinmachi, Nishi-ku, Hiroshima City Mitsubishi Heavy Industries Ltd. Hiroshima Works
Claims (3)
て、金属針を連ねた櫛型電極を単一又は複数段有し、同
櫛型電極は、金属平板電極との間に面状に近いストリー
マ放電を発生させる機能を持ち、直流電圧を印加した前
記櫛型電極とアースに接地している平板電極間に誘電体
を挿入しないように構成したとを特徴とするオゾン生成
装置。1. A discharge-type ozone generator having a single or a plurality of comb-shaped electrodes in which metal needles are connected, and the comb-shaped electrodes generate a streamer discharge having a substantially planar shape between the comb-shaped electrodes and a metal plate electrode. An ozone generator having a function of generating a DC voltage and configured not to insert a dielectric between the comb-shaped electrode to which a DC voltage is applied and a plate electrode grounded to ground.
し垂直に発生させて、酸素分子を電子衝突により確実に
解離させるようにしたことを特徴とする請求項１記載の
オゾン生成装置。2. The ozone generator according to claim 1, wherein the streamer discharge is generated perpendicularly to the raw material gas flow path to surely dissociate oxygen molecules by electron collision.
ペーサを挟んで所定間隔で設置してなることを特徴とす
る請求項１記載のオゾン生成装置。3. The ozone generator according to claim 1, wherein the comb-shaped electrodes are arranged at a predetermined interval in the gas flow direction with an insulating spacer interposed therebetween.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6239912A JPH08104502A (en) | 1994-10-04 | 1994-10-04 | Ozone forming device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6239912A JPH08104502A (en) | 1994-10-04 | 1994-10-04 | Ozone forming device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08104502A true JPH08104502A (en) | 1996-04-23 |
Family
ID=17051703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6239912A Withdrawn JPH08104502A (en) | 1994-10-04 | 1994-10-04 | Ozone forming device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08104502A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002151295A (en) * | 2000-11-13 | 2002-05-24 | Yaskawa Electric Corp | Discharge generating device |
| JP2009291579A (en) * | 2008-06-05 | 2009-12-17 | Tds:Kk | Discharge element and harmful substance removing device of direct current streamer discharge |
| CN105848399A (en) * | 2016-05-19 | 2016-08-10 | 北京交通大学 | Glow discharge jet plasma generating structure |
-
1994
- 1994-10-04 JP JP6239912A patent/JPH08104502A/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002151295A (en) * | 2000-11-13 | 2002-05-24 | Yaskawa Electric Corp | Discharge generating device |
| JP2009291579A (en) * | 2008-06-05 | 2009-12-17 | Tds:Kk | Discharge element and harmful substance removing device of direct current streamer discharge |
| CN105848399A (en) * | 2016-05-19 | 2016-08-10 | 北京交通大学 | Glow discharge jet plasma generating structure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20020115 |