JPH0792419B2 - Leak inspection device - Google Patents
Leak inspection deviceInfo
- Publication number
- JPH0792419B2 JPH0792419B2 JP10280692A JP10280692A JPH0792419B2 JP H0792419 B2 JPH0792419 B2 JP H0792419B2 JP 10280692 A JP10280692 A JP 10280692A JP 10280692 A JP10280692 A JP 10280692A JP H0792419 B2 JPH0792419 B2 JP H0792419B2
- Authority
- JP
- Japan
- Prior art keywords
- shutoff valve
- air pressure
- reference tank
- valve
- inspected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【０００１】[0001]
【産業上の利用分野】この発明は各種の容器の洩れの有
無を自動的に検査することに用いられる洩れ検査装置に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a leak inspection device used for automatically inspecting various containers for leaks.
【０００２】[0002]
【従来の技術】図２に従来の洩れ検査装置の概略の構成
を示す。図中１は空圧源を示す。この空圧源１で発生す
る空気圧が管２を通じて調整弁３に与えられ、調整弁３
により一定の空気圧に安定化されて３方電磁弁４に与え
られる。３方電磁弁４の出口側に分岐管５が接続され、
分岐管５によって空圧源１から与えられる空気圧を二つ
の管路６と７に分岐する。2. Description of the Related Art FIG. 2 shows a schematic configuration of a conventional leak inspection device. In the figure, 1 indicates an air pressure source. The air pressure generated by the air pressure source 1 is given to the adjusting valve 3 through the pipe 2, and the adjusting valve 3
By this, the air pressure is stabilized to a constant air pressure and applied to the three-way solenoid valve 4. A branch pipe 5 is connected to the outlet side of the three-way solenoid valve 4,
The air pressure provided from the pneumatic source 1 by the branch pipe 5 is branched into two pipe lines 6 and 7.
【０００３】二つの管路６と７のそれぞれに第１遮断弁
８Ａ，８Ｂが介挿され、これら第１遮断弁８Ａと８Ｂを
通じて被検査体９と基準タンク１１に空圧源１から与え
られる空気圧を与える。管路６，７の第１遮断弁８Ａ，
８Ｂの先の部分（被検査体９と基準タンク１１との間の
管路）を管路６´，７´とする。管路６´と７´の間に
は差圧検出器１２が差渡され、管路６´と７´の間の差
圧を計測できるように構成される。First shutoff valves 8A and 8B are inserted in the two pipelines 6 and 7, respectively, and are supplied from the pneumatic source 1 to the device under test 9 and the reference tank 11 through the first shutoff valves 8A and 8B. Give air pressure. The first cutoff valve 8A of the pipelines 6 and 7,
Portions 8B (pipes between the inspection object 9 and the reference tank 11) are referred to as pipes 6'and 7 '. A differential pressure detector 12 is passed between the pipelines 6'and 7 ', and is configured to measure the differential pressure between the pipelines 6'and 7'.
【０００４】差圧検出器１２の検出出力は増幅器１３で
増幅され、その増幅出力信号を良否判定装置１４に与
え、被検査体９の洩れの有無を判定し、その判定結果を
表示器１５に表示させるか、又は良否仕分け装置を作動
させて、洩れの有る不良品と良品とを自動的に仕分けさ
せる。洩れの検査は次のようにして行われる。３方電磁
弁４をＡ−Ｂ間が連通する状態に制御し，第１遮断弁８
Ａ，８Ｂを開に制御して被検査体９と基準タンク１１に
空気圧を与える。The detection output of the differential pressure detector 12 is amplified by the amplifier 13, and the amplified output signal is given to the pass / fail judgment device 14 to judge whether the inspection object 9 is leaking or not, and the judgment result is displayed on the display 15. Either the display is made or the quality sorting device is operated to automatically sort the defective product having leakage and the good product. The leak inspection is performed as follows. The three-way solenoid valve 4 is controlled so that A and B communicate with each other, and the first shut-off valve 8
By controlling A and 8B to open, air pressure is applied to the inspection object 9 and the reference tank 11.
【０００５】加圧後一定時間の後に第１遮断弁８Ａ，８
Ｂを閉じる。基準タンク１１は被検査体９と同一内容積
の洩れのない容器で構成される。従って被検査体９に洩
れが無ければ管路６´と７´の間には圧力差が発生しな
いが、被検査体９に洩れが有る場合は時間の経過に従っ
て管路６´と７´の間に圧力差が発生する。この圧力差
を差圧検出器１２で検出し、この検出出力信号を増幅器
１３で増幅し、良否判定装置１４で所定時間経過後の差
圧検出値が所定値以上に達したとき洩れ有りと判定す
る。After a certain period of time after pressurization, the first shutoff valves 8A, 8
Close B. The reference tank 11 is composed of a leakproof container having the same internal volume as the device under test 9. Therefore, if there is no leak in the inspected body 9, a pressure difference does not occur between the pipelines 6'and 7 ', but if there is a leak in the inspected body 9, the pressure in the pipelines 6'and 7'will increase as time passes. There is a pressure difference between them. This pressure difference is detected by the differential pressure detector 12, this detection output signal is amplified by the amplifier 13, and it is judged that there is a leak when the differential pressure detection value reaches a predetermined value or more after a predetermined time elapses by the quality determination device 14. To do.
【０００６】検査終了後、３方電磁弁４をＢ−Ｃ間が連
通する状態に切換え、第１遮断弁８Ａ，８Ｂを開に制御
することにより被検査体９と基準タンク１１に与えられ
た空気圧を３方電磁弁４の排気口Ｃから放出させ、一工
程を終了し、被検査体９の交換を行なう。１６はこれら
の工程を制御する制御器である。After completion of the inspection, the three-way solenoid valve 4 is switched to a state in which B and C are communicated with each other, and the first shutoff valves 8A and 8B are controlled to be opened, so that the inspection object 9 and the reference tank 11 are provided. The air pressure is released from the exhaust port C of the three-way solenoid valve 4, one step is completed, and the inspection object 9 is replaced. Reference numeral 16 is a controller for controlling these steps.
【０００７】[0007]
【発明が解決しようとする課題】従来の洩れ検査装置に
おいて、例えば３方電磁弁４がＡ−Ｂ間を連通する状態
に転換できない状態の故障に陥いったとすると、被検査
体９と基準タンク１１に圧力が与えられない状態のまま
検査が行なわれることになる。つまり、被検査体９及び
基準タンク１１に圧力が与えられない状態のまま良否判
定装置１４で良否の判定を行なったとすると、差圧検出
器１２の出力がゼロであることから被検査体９は全て良
品として判定される。従って洩れのある不良品も良品と
して判定されてしまう大きな不都合が生じる。In the conventional leak inspection apparatus, if the three-way solenoid valve 4 fails to switch to a state in which A and B are in communication with each other, a failure occurs in the inspection object 9 and the reference tank. The inspection will be performed with no pressure applied to 11. That is, if the quality determination device 14 determines the quality with the pressure not applied to the inspection target 9 and the reference tank 11, the output of the differential pressure detector 12 is zero. All are judged as non-defective. Therefore, there is a great inconvenience that a defective product with leakage is also judged as a good product.
【０００８】このため例えば図示するように被検査体９
に連通する管路６´に圧力検出器１７を接続し、圧力検
出器１７によって被検査体９に空気圧が与えられたか否
かを検出し、空気圧が与えられたことを検出することに
より３方電磁弁４が正常に動作していることを確認し、
検査を行なうように構成することができる。然し乍ら、
このような自己チェック機能を付加したとしても、差圧
検出器１２が不良となって差圧検出信号を出力しない状
態に陥いったとすると、被検査体９と基準タンク１１に
正規の圧力が与えられ、管路６´と７´の間に圧力差が
発生したとしても、差圧検出信号はゼロのままであるか
ら、この場合にも不良品を良品と判断してしまう大きな
不都合が生じる。Therefore, for example, as shown in FIG.
The pressure detector 17 is connected to the pipe line 6'which communicates with, and the pressure detector 17 detects whether or not the air pressure is applied to the object 9 to be inspected. Confirm that the solenoid valve 4 is operating normally,
It can be configured to perform an inspection. However,
Even if such a self-check function is added, if the differential pressure detector 12 becomes defective and does not output a differential pressure detection signal, a normal pressure is applied to the device under test 9 and the reference tank 11. Therefore, even if a pressure difference occurs between the pipelines 6'and 7 ', the differential pressure detection signal remains zero, and in this case too, there arises a great inconvenience that the defective product is determined to be a good product.
【０００９】この発明の目的はあらゆる状態に対して自
己チェック機能を働かせることができる洩れ検査装置を
提供しようとするものである。An object of the present invention is to provide a leak inspection device capable of operating a self-check function for all states.
【００１０】[0010]
【課題を解決するための手段】この発明では排気用の３
方電磁弁４を除去し、これに代えて管路６´及び７´に
排気用の分岐管路を設ける。この排気用の分岐管路には
この分岐管路の他端を選択的に大気に開放する遮断弁を
設け、この遮断弁を開に制御することにより管路６´と
７´を大気に連通させる。この状態で被検査体と基準タ
ンクに与えられた圧力を大気に排出させることができ
る。According to the present invention, there are three exhaust ports.
The one-way solenoid valve 4 is removed, and instead of this, branch lines for exhaust are provided in the lines 6'and 7 '. A cutoff valve for selectively opening the other end of the branch pipe to the atmosphere is provided in the exhaust branch pipe, and by controlling the cutoff valve to open, the pipes 6 ′ and 7 ′ are connected to the atmosphere. Let In this state, the pressure applied to the device under test and the reference tank can be discharged to the atmosphere.
【００１１】然もこの発明ではこの大気に排出させる分
岐管路の何れか一方に絞り弁を設ける。この絞り弁によ
って空圧源から与えた空気圧を分岐管路を通じて大気に
放出させるとき、管路６´と７´との間に強制的に圧力
差を発生させる。この圧力差の発生を差圧検出器で検出
させることにより、管路６と７に挿入した遮断弁が正常
に動作し、空圧源から管路６´と７´に空気圧が与えら
れている点と、差圧検出器が正常に動作している点を自
己チェックすることができる。Of course, in the present invention, a throttle valve is provided on either one of the branch pipes for discharging to the atmosphere. When the air pressure given from the air pressure source by this throttle valve is released to the atmosphere through the branch pipe line, a pressure difference is forcibly generated between the pipe lines 6'and 7 '. By detecting the occurrence of this pressure difference with the differential pressure detector, the shutoff valves inserted in the pipelines 6 and 7 operate normally, and air pressure is applied from the pneumatic source to the pipelines 6 ′ and 7 ′. The point and the point where the differential pressure detector is operating normally can be self-checked.
【００１２】[0012]
【実施例】図１はこの発明の一実施例を示す。図と対応
する部分には同一符号を付して示す。この発明において
は調整弁３の出口側に分岐管５を接続する。分岐管５に
よって２分された管路６と７に第１遮断弁８Ａ，８Ｂを
接続すると共に、第１遮断弁８Ａ及び８Ｂと被検査体９
及び基準タンク１１のそれぞれの間に分岐管２２Ａ，２
２Ｂを接続する。分岐管２２Ａと２２Ｂで管路６´と７
´から分岐された分岐管路２３Ａ，２３Ｂに第２遮断弁
２４Ａ，２４Ｂを接続し、この第２遮断弁２４Ａ，２４
Ｂを開に制御することにより、管路６と７を大気に連通
させることができるように構成する。これと共に、分岐
管路２３Ｂに絞り弁２５を介挿する。FIG. 1 shows an embodiment of the present invention. Portions corresponding to those in the figure are denoted by the same reference numerals. In the present invention, the branch pipe 5 is connected to the outlet side of the adjusting valve 3. The first cutoff valves 8A and 8B are connected to the pipe lines 6 and 7 divided into two by the branch pipe 5, and the first cutoff valves 8A and 8B and the inspection object 9 are connected.
And the branch pipes 22A, 2 between the reference tank 11 and the reference tank 11, respectively.
Connect 2B. The branch pipes 22A and 22B connect the pipe lines 6'and 7
The second cutoff valves 24A, 24B are connected to the branch lines 23A, 23B branched from the second cutoff valves 24A, 24B.
By controlling B to be open, the pipelines 6 and 7 can be connected to the atmosphere. At the same time, the throttle valve 25 is inserted in the branch conduit 23B.
【００１３】これら第１遮断弁８Ａ，８Ｂと、第２遮断
弁２４Ａ，２４Ｂは制御器１６によって開閉制御され
る。つまり検査開始時に第１遮断弁８Ａ，８Ｂを開に、
第２遮断弁２４Ａ，２４Ｂを開に制御する。この結果空
圧源１から与えられる空気圧は第２遮断弁２４Ａ，２４
Ｂを通じて大気に排出される。このとき分岐管路２３Ｂ
側に絞り弁２５を介挿したからこの絞り弁２５の絞り作
用によって管路７´側の圧力が管路６´側の圧力より高
くなる。この圧力差は絞り弁２５の絞り量によって任意
に設定することができる。この例ではわずかな圧力差が
発生すればよいから絞り弁２５の絞り量はわずかでよ
い。この圧力差の発生状態をチェックモードと称するこ
とにする。The opening and closing of the first shutoff valves 8A and 8B and the second shutoff valves 24A and 24B are controlled by the controller 16. In other words, open the first shutoff valves 8A, 8B at the start of the inspection,
The second cutoff valves 24A and 24B are controlled to open. As a result, the air pressure applied from the air pressure source 1 is the second cutoff valves 24A, 24A.
It is discharged to the atmosphere through B. At this time, the branch pipe 23B
Since the throttle valve 25 is inserted on the side, the pressure on the pipeline 7'side becomes higher than the pressure on the pipeline 6'side due to the throttle action of the throttle valve 25. This pressure difference can be arbitrarily set by the throttle amount of the throttle valve 25. In this example, it is sufficient that a slight pressure difference is generated, so the throttle amount of the throttle valve 25 may be small. The generation state of this pressure difference will be referred to as a check mode.
【００１４】管路６´と７´の間に発生した圧力差が差
圧検出器１２に与えられ、差圧検出器１２が正常に動作
していれば、圧力差に対応した検出信号を発信する。従
って検査開始前のわずかな時間、例えば０．５〜１秒程
度の間チェックモードに制御することにより、このとき
差圧検出器１２が絞り弁２５で規定した圧力差に対応す
る検出信号を発信するか否かを判別すれば空圧源１が正
常であること、第１遮断弁８Ａ、８Ｂが正常に動作した
か否かと、差圧検出器１２が正常に動作しているか否か
を自己チェックすることができる。The pressure difference generated between the pipe lines 6'and 7'is given to the differential pressure detector 12, and if the differential pressure detector 12 is operating normally, a detection signal corresponding to the pressure difference is transmitted. To do. Therefore, by controlling to the check mode for a short time before the inspection is started, for example, for about 0.5 to 1 second, the differential pressure detector 12 at this time transmits a detection signal corresponding to the pressure difference defined by the throttle valve 25. If it is determined whether the air pressure source 1 is normal, whether the first cutoff valves 8A and 8B are normally operated, and whether the differential pressure detector 12 is normally operated are self-determined. You can check.
【００１５】よってチェックモードで差圧検出器１２か
ら差圧検出信号が発信されるか否かを良否判定装置１４
で判定し、差圧検出信号が発信されたことを確認して、
次の加圧モード及び検査モードに制御シーケンスを進め
るようにプログラムすることができる。つまり、チェッ
クモードで正常と判定されると、第１遮断弁８Ａ，８Ｂ
を開のまま、第２遮断弁２４Ａ，２４Ｂを閉じる。この
状態を加圧モードと称する。加圧後一定時間経過した時
点、つまり被検査体９と基準タンク１１内の圧力が安定
した時点で第１遮断弁８Ａ，８Ｂを閉じ検査モードに入
る。Therefore, it is determined whether or not the differential pressure detection signal is transmitted from the differential pressure detector 12 in the check mode.
And confirm that the differential pressure detection signal is transmitted,
The next pressurization mode and test mode can be programmed to advance the control sequence. That is, if it is determined that the check mode is normal, the first shutoff valves 8A and 8B are
The second shutoff valves 24A and 24B are closed while the valve is open. This state is called a pressurizing mode. The first shutoff valves 8A and 8B are closed at the time when a certain time has elapsed after pressurization, that is, when the pressures in the device under test 9 and the reference tank 11 are stable, and the inspection mode is entered.
【００１６】第１遮断弁８Ａ，８Ｂが閉じられたことに
より、被検査体９と基準タンク１１は空圧源１から切離
され封止状態となる。この状態で被検査体９に洩れが無
ければ管路６´と７´との間には圧力差が発生しない。
被検査体９に洩れが存在する場合には、時間の経過と共
に管路６´と７´の間に圧力差が発生する。予め設定し
た一定時間内に規定値以上の圧力差が発生した場合に
は、許容される値以上の漏れが有るものとして不良と判
定する。更に、この過程において第２遮断弁２４Ａ，２
４Ｂの両方または何れか一方が閉じないときは大きな差
圧が発生することにより第２遮断弁がチェックされる。Since the first shutoff valves 8A and 8B are closed, the object 9 to be inspected and the reference tank 11 are separated from the air pressure source 1 to be in a sealed state. In this state, if there is no leak in the inspected body 9, there will be no pressure difference between the pipe lines 6'and 7 '.
When the inspected body 9 has a leak, a pressure difference occurs between the pipe lines 6'and 7'with the passage of time. When a pressure difference of a specified value or more occurs within a preset fixed time, it is determined that there is a leak of an allowable value or more, and it is determined to be defective. Further, in this process, the second cutoff valves 24A, 2
If either or both of the 4B's are not closed, a large differential pressure will be generated to check the second shutoff valve.
【００１７】判定後、第１遮断弁８Ａ，８Ｂを閉じた状
態のまま、第２遮断弁２４Ａ，２４Ｂを開に制御するこ
とにより、被検査体９と基準タンク１１内の空気圧を第
２遮断弁２４Ａ，２４Ｂを通じて大気に排気させる。こ
の排気状態を排気モードと称する。以上の動作は制御器
１６に備えた例えばマイクロコンピュータに組込んだプ
ログラムに従って自動的に実行される。After the determination, the second shutoff valves 24A and 24B are controlled to be opened while the first shutoff valves 8A and 8B are closed, so that the air pressures inside the object 9 and the reference tank 11 are shut off by the second shutoff. Exhaust to atmosphere through valves 24A, 24B. This exhaust state is called an exhaust mode. The above operation is automatically executed according to a program installed in the microcomputer provided in the controller 16, for example.
【００１８】[0018]
【発明の効果】以上説明したように、この発明によれば
管路６´と７´の間に圧力差を発生させ、この圧力差を
差圧検出器に与えて差圧検出信号を発信するか否かを見
て自己チェックを行なう構造としたから、この自己チェ
ックによれば空圧源１の動作状態、第１遮断弁８Ａ，８
Ｂが正常に動作しているか否かと、第２遮断弁２４Ａ，
２４Ｂの動作と、更に差圧検出器１２が正常であるか否
かをチェックすることができる。つまり全ての要素のチ
ェックを行なうことができ、信頼性の高い自己チェック
を行なうことができる。As described above, according to the present invention, a pressure difference is generated between the pipe lines 6'and 7 ', and this pressure difference is given to the differential pressure detector to transmit the differential pressure detection signal. According to this self-check, the self-check is performed depending on whether or not the operation state of the air pressure source 1 and the first shutoff valves 8A, 8
B is operating normally, and the second shutoff valve 24A,
It is possible to check the operation of 24B and whether or not the differential pressure detector 12 is normal. That is, all elements can be checked, and highly reliable self-check can be performed.
【００１９】またこの発明の実施例によれば、被検査体
９と基準タンク１１の近くに設けた分岐管路２３Ａ，２
３Ｂを使って排気を行なう構造としたから、被検査体９
及び基準タンク１１に仮に水滴等が発生したとしても、
その水滴はこの分岐路２３Ａと２３Ｂを通じて排気され
る。この結果被検査体９及び基準タンク１１に水滴等が
発生しても、この水滴が差圧検出器１２に侵入すること
を阻止することができる。よって差圧検出器１２を長期
にわたって安定に動作させることができる利点が得られ
る。Further, according to the embodiment of the present invention, the branch pipe lines 23A, 2 provided near the object to be inspected 9 and the reference tank 11 are provided.
Since the structure for exhausting air is provided using 3B, the inspection object 9
And even if water drops or the like occur in the reference tank 11,
The water droplets are exhausted through the branch passages 23A and 23B. As a result, even if water drops or the like are generated on the device under test 9 and the reference tank 11, the water drops can be prevented from entering the differential pressure detector 12. Therefore, there is an advantage that the differential pressure detector 12 can be stably operated for a long period of time.
【図１】この発明の一実施例を説明するためのブロック
図。FIG. 1 is a block diagram for explaining an embodiment of the present invention.
【図２】従来の技術を説明するためのブロック図。FIG. 2 is a block diagram for explaining a conventional technique.
１ 空圧源 ３ 調整弁 ５，２２Ａ，２２Ｂ 分岐管 ６，７ 管路 ６´，７´ 管路 ８Ａ，８Ｂ 第１遮断弁 ９ 被検査体 １１ 基準タンク １２ 差圧検出器 １３ 増幅器 １４ 良否判定装置 １５ 表示器 １６ 制御器 ２３Ａ，２３Ｂ 分岐管路 ２４Ａ，２４Ｂ 第２遮断弁 ２５ 絞り弁 1 Pneumatic pressure source 3 Adjustment valve 5, 22A, 22B Branch pipe 6, 7 Pipe line 6 ', 7' Pipe line 8A, 8B 1st cutoff valve 9 Inspected body 11 Reference tank 12 Differential pressure detector 13 Amplifier 14 Pass / fail judgment Device 15 Indicator 16 Controller 23A, 23B Branch pipe 24A, 24B Second shutoff valve 25 Throttle valve
Claims (1)
た空気圧を分岐して被検査体と基準タンクとに空気圧を
与える一対の管路と、この一対の管路に挿入され上記被
検査体及び基準タンクに空気圧を与えた状態で上記空圧
源と被検査体及び基準タンクとの間を遮断する一対の第
１遮断弁と、この一対の第１遮断弁と上記被検査体及び
基準タンクの間を接続する各管路間に接続され上記第１
遮断弁を閉じた状態で上記被検査体及び基準タンクとの
間の圧力差を計測する差圧検出器とを具備して構成され
る洩れ検査装置において、 Ｂ．上記被検査体及び基準タンクと上記第１遮断弁との
間の各管路に一端が接続された分岐管路と、 Ｃ．この各分岐管路に接続され各分岐管路の他端を選択
的に大気に開放する第２遮断弁と、 Ｄ．上記分岐管路の何れか一方に挿入され、上記空圧源
から与えられる空気圧を第２遮断弁を通じて大気に放出
する状態において、上記一対の管路の間に差圧を発生さ
せるために設けた絞り弁と、 Ｅ．上記第１遮断弁を開、第２遮断弁を開に制御するチ
ェックモードと、更に第１遮断弁を開、第２遮断弁を閉
に制御する加圧モードと、第１遮断弁を閉、第２遮断弁
を閉に制御する安定及び検査モードと、第１遮断弁を
閉、第２遮断弁を開に制御する排気モードとに切換制御
する制御器と、を設けたことを特徴とする洩れ検査装
置。1. A. An air pressure source, a pair of pipes for branching the air pressure drawn from the air pressure source to give air pressure to the object to be inspected and the reference tank, and the object to be inspected and the reference tank inserted into the pair of lines. A pair of first shut-off valves for shutting off the air pressure source from the object to be inspected and the reference tank in a state where air pressure is applied to the pair of first shut-off valves and the object to be inspected and the reference tank. The first is connected between the connecting pipes
A leak inspection device comprising a differential pressure detector for measuring a pressure difference between the object to be inspected and the reference tank with the shutoff valve closed. A branch pipeline having one end connected to each pipeline between the DUT and the reference tank and the first shutoff valve; A second shutoff valve connected to each of the branch pipes and selectively opening the other end of each of the branch pipes to the atmosphere; Provided to generate a differential pressure between the pair of pipelines in a state of being inserted into one of the branch pipelines and releasing the air pressure given from the pneumatic source to the atmosphere through the second cutoff valve. A throttle valve, and E. A check mode in which the first shutoff valve is opened and the second shutoff valve is controlled to open; a pressurization mode in which the first shutoff valve is opened and the second shutoff valve is closed; and a first shutoff valve is closed, A controller for controlling switching between a stability and inspection mode for controlling the second shutoff valve to be closed and an exhaust mode for controlling the first shutoff valve to be closed and the second shutoff valve to be open are provided. Leak inspection device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10280692A JPH0792419B2 (en) | 1992-04-22 | 1992-04-22 | Leak inspection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10280692A JPH0792419B2 (en) | 1992-04-22 | 1992-04-22 | Leak inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05296871A JPH05296871A (en) | 1993-11-12 |
| JPH0792419B2 true JPH0792419B2 (en) | 1995-10-09 |
Family
ID=14337305
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10280692A Expired - Fee Related JPH0792419B2 (en) | 1992-04-22 | 1992-04-22 | Leak inspection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0792419B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012005199A1 (en) | 2010-07-05 | 2012-01-12 | 国立大学法人山口大学 | Leakage inspection device and leakage inspection method |
-
1992
- 1992-04-22 JP JP10280692A patent/JPH0792419B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05296871A (en) | 1993-11-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6435010B1 (en) | Leak detection system | |
| CA2328269C (en) | Fuel system leakage detector | |
| JP2009281934A (en) | External pressure detection type leak inspection device and leak inspection method using the same | |
| JP3771167B2 (en) | Air leak test method and apparatus | |
| JP3201667B2 (en) | Check valve test apparatus and check valve test method | |
| JP3571453B2 (en) | Gas supply device | |
| KR20220081032A (en) | Performance test system and test method for valve | |
| JPS6042411B2 (en) | Differential pressure leak detection method and device | |
| JP3454406B2 (en) | Leakage and flow rate inspection device | |
| JPH0792419B2 (en) | Leak inspection device | |
| JPH09280990A (en) | Method for testing leakage | |
| JP3422348B2 (en) | Leak inspection method and device | |
| JPH01269028A (en) | Leak testing method | |
| JPH04221733A (en) | Differential pressure type leak tester with self-diagnostic function | |
| JPH0222666Y2 (en) | ||
| JPH0968474A (en) | Air leak tester | |
| JP3798976B2 (en) | Gas leak inspection method and gas leak inspection apparatus | |
| JP2999548B2 (en) | Fluid leak inspection device | |
| JPH0868494A (en) | Gas feeder | |
| JPH0419431B2 (en) | ||
| JPH06300657A (en) | Leak detector | |
| JPH04132926A (en) | Method and apparatus for leak test | |
| JPH0419440B2 (en) | ||
| JP2001311677A (en) | Air leak test apparatus | |
| SU1024776A1 (en) | Article air-tightness testing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081009 Year of fee payment: 13 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 13 Free format text: PAYMENT UNTIL: 20081009 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091009 Year of fee payment: 14 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091009 Year of fee payment: 14 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 15 Free format text: PAYMENT UNTIL: 20101009 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111009 Year of fee payment: 16 |
|
| LAPS | Cancellation because of no payment of annual fees |