JP3454406B2 - Leakage and flow rate inspection device - Google Patents
Leakage and flow rate inspection deviceInfo
- Publication number
- JP3454406B2 JP3454406B2 JP19101597A JP19101597A JP3454406B2 JP 3454406 B2 JP3454406 B2 JP 3454406B2 JP 19101597 A JP19101597 A JP 19101597A JP 19101597 A JP19101597 A JP 19101597A JP 3454406 B2 JP3454406 B2 JP 3454406B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- valve
- inspection device
- leak
- flow rate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Examining Or Testing Airtightness (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】この発明は例えば洩れが有っ
てはならない容器の洩れの有無を検査することと、或る
程度流体が流れることを正常な状態とする器具を検査す
ることに用いることができる洩れ及び流量検査装置に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used, for example, for inspecting a container which should not be leaked for leakage, and for inspecting a device which makes a certain amount of fluid flow normal. Leakage and flow rate inspection device capable of
【０００２】[0002]
【従来の技術】従来より洩れが有ってはならない容器の
洩れの有無を検査する洩れ検査装置と、或る量の流量で
流体が流れることを正常とする器具（例えばガスのノズ
ル部分或いは医療用のカテーテル等）を検査する検査装
置は全く別の検査装置で検査されている。2. Description of the Related Art Conventionally, a leak inspection device for inspecting a container which should not be leaked for leaks, and an instrument for normalizing the flow of fluid at a certain flow rate (for example, a gas nozzle portion or medical equipment) The inspection device for inspecting a catheter etc.) is inspected by a completely different inspection device.
【０００３】前者を一般に洩れ検査装置と称し、後者は
流量検査装置等と呼ばれ全く別の装置で構成されてい
る。因みに図２は洩れ検査装置の構成を示し、図３は流
量検査装置の構成を示す。図２に示す洩れ検査装置は空
圧源１と、調圧弁２、３方電磁弁３、分岐管４、遮断弁
５Ａ，５Ｂ、差圧検出器６、基準タンク７と被検査体８
と、検査器９とによって構成される。The former is generally called a leak inspection device, and the latter is called a flow rate inspection device or the like and is constituted by a completely different device. Incidentally, FIG. 2 shows the configuration of the leak inspection device, and FIG. 3 shows the configuration of the flow rate inspection device. The leak inspection apparatus shown in FIG. 2 includes an air pressure source 1, a pressure regulating valve 2, a three-way solenoid valve 3, a branch pipe 4, shutoff valves 5A and 5B, a differential pressure detector 6, a reference tank 7 and an object 8 to be inspected.
And an inspection device 9.
【０００４】尚、３方電磁弁３、遮断弁５Ａ，５Ｂを開
閉制御する制御系に関してはここでは省略して示してい
る。空圧源１は一般にエアーコンプレッサのような圧搾
空気発生装置を用いることができ、この空圧源１で発生
した空気圧を調圧弁２で適当な空気圧に調圧し、この調
圧された空気圧を３方電磁弁３と分岐管４を通じて２本
の配管４Ａ，４Ｂに分配し、加圧工程では３方電磁弁３
と遮断弁５Ａ，５Ｂが開かれて基準タンク７と被検査体
８に空気圧を与える。The control system for controlling the opening / closing of the three-way solenoid valve 3 and the shutoff valves 5A, 5B is omitted here. Generally, a compressed air generator such as an air compressor can be used as the air pressure source 1. The air pressure generated by the air pressure source 1 is regulated to an appropriate air pressure by a pressure regulating valve 2, and the regulated air pressure is reduced to 3 It is distributed to two pipes 4A and 4B through the one-way solenoid valve 3 and the branch pipe 4, and the three-way solenoid valve 3 is used in the pressurizing process.
The shutoff valves 5A and 5B are opened to apply air pressure to the reference tank 7 and the inspection object 8.
【０００５】加圧後遮断弁５Ａ，５Ｂが閉じられて時間
の経過を待つ。基準タンク７は洩れのない被検査体８と
同一内容積を持つ容器が用いられる。従って被検査体８
に洩れが無ければ差圧検出器６は遮断弁５Ａ，５Ｂが閉
じられてから時間が一定時間（２〜３秒程度）経過して
も差圧の発生を検出しないが、被検査体８に洩れが有る
場合は差圧検出器６は時間の経過に従って被検査体８側
の圧力が漸次低下していくことを検出し、その検出信号
を検査器９に送り込む。検査器９は一定時間経過した時
点で被検査体８側の圧力が規定値以下に低下しているこ
とを検出すると、被検査体８に許容値以上の洩れ（ｃｃ
／分）が有ると判定し、例えば警報等を発して被検査体
８に洩れがあることを知らせる。After pressurization, the shutoff valves 5A and 5B are closed and wait for the passage of time. As the reference tank 7, a container having the same internal volume as the inspected object 8 without leak is used. Therefore, the inspection object 8
If there is no leakage, the differential pressure detector 6 does not detect the generation of the differential pressure even if a certain time (about 2 to 3 seconds) has elapsed since the shutoff valves 5A and 5B were closed. When there is a leak, the differential pressure detector 6 detects that the pressure on the inspected body 8 side gradually decreases with the passage of time, and sends the detection signal to the inspector 9. When the inspector 9 detects that the pressure on the inspected object 8 side has dropped below a specified value after a certain time has elapsed, the inspected object 8 leaks to the inspected object 8 in excess of an allowable value (cc
/ Min) is present, and an alarm or the like is issued to notify that there is a leak in the inspected body 8.
【０００６】図３は流量検査装置の構成を示す。流量検
査装置は空圧源１と調圧弁２を有し、調圧弁２によって
空圧源１の空気圧を適当な圧力に設定し、その調圧した
空気圧を絞り（絞りとして層流管を用いる場合がある）
１１と遮断弁５Ａを通じて被検査体８に供給する。調圧
弁２の出力側と遮断弁５Ａの出力側との間にバイパス用
の遮断弁５Ｂが接続され、加圧時にこの遮断弁５Ｂを開
に制御して被検査体８に空気圧を直接供給できるように
構成している。FIG. 3 shows the structure of the flow rate inspection device. The flow rate inspection device has an air pressure source 1 and a pressure regulating valve 2, and the air pressure of the air pressure source 1 is set to an appropriate pressure by the pressure regulating valve 2, and the regulated air pressure is throttled (when a laminar flow pipe is used as a throttle. There is)
11 and the cutoff valve 5A to supply the object 8 to be inspected. A bypass cutoff valve 5B is connected between the output side of the pressure regulating valve 2 and the output side of the cutoff valve 5A, and at the time of pressurization, the cutoff valve 5B is controlled to be open so that air pressure can be directly supplied to the object 8 to be inspected. Is configured as follows.
【０００７】絞り１１には並列に３方電磁弁１３と差圧
検出器６との直列回路が接続され、絞り１１に発生する
圧力差を差圧検出器６で検出するように構成される。
尚、１４は絞り１１に与える圧力値を表示する圧力計を
示し、この圧力値は検査中常に一定に維持させる。３方
電磁弁１３は待機状態でＢ−Ｃ間を連通させる状態に維
持し、差圧検出器６に等圧を印加している。検査時はＡ
−Ｂ間を連通させ、差圧検出器６に絞り１１に発生する
圧力差を印加する。つまり、加圧時は遮断弁５Ａと５Ｂ
を開の状態に制御し、被検査体８に充分に空気圧を与え
る。一定時間加圧した状態で遮断弁５Ｂを閉じ、遮断弁
５Ａだけを開の状態に制御し、絞り１１を通じて被検査
体８に空気圧を与え続ける。この状態で３方電磁弁１３
をＢ−Ｃ連通状態からＡ−Ｂ連通状態に切替え、絞り１
１に発生する圧力差を差圧検出器６に印加する。この差
圧検出値は検査器９に取込まれ、差圧検出器６で検出し
た差圧値により被検査体８を流れる空気の量（ｃｃ／
分）を算出し、その流量が規定の範囲に入っているか否
かを判定する。A serial circuit of a three-way solenoid valve 13 and a differential pressure detector 6 is connected in parallel to the throttle 11, and the differential pressure detector 6 detects the pressure difference generated in the throttle 11.
Reference numeral 14 denotes a pressure gauge for displaying the pressure value applied to the throttle 11, and this pressure value is kept constant during the inspection. The three-way solenoid valve 13 is maintained in a state where B and C are communicated with each other in a standby state, and a constant pressure is applied to the differential pressure detector 6. A at the time of inspection
The pressure difference generated in the throttle 11 is applied to the differential pressure detector 6 by communicating between B and B. That is, when pressurizing, shutoff valves 5A and 5B
Is controlled to an open state, and sufficient air pressure is applied to the object 8 to be inspected. The shutoff valve 5B is closed while pressurized for a certain period of time, and only the shutoff valve 5A is controlled to be in the open state, and air pressure is continuously applied to the object 8 to be inspected through the throttle 11. In this state, the 3-way solenoid valve 13
Is switched from the B-C communication state to the A-B communication state, and the diaphragm 1
The pressure difference generated at 1 is applied to the differential pressure detector 6. This differential pressure detection value is taken into the inspection device 9, and the amount of air flowing through the device under test 8 (cc /
Minute) and determine whether the flow rate is within the specified range.
【０００８】[0008]
【発明が解決しようとする課題】上述したように、従来
は洩れ検査装置と流量検査装置とが存在し、被検査体の
性質によってどちらで検査するかを決めている。従って
各種の物品を製造する場合、洩れ検査装置と流量検査装
置の双方を用意しなければならないため、経済的な負担
が大きい。As described above, conventionally, there are a leak inspection device and a flow rate inspection device, and which one is to be inspected is determined according to the property of the object to be inspected. Therefore, when manufacturing various articles, both a leak inspection device and a flow rate inspection device must be prepared, which imposes a heavy economic burden.
【０００９】この発明の目的は洩れ検査も流量検査も同
一の検査装置で検査することができる洩れ及び流量検査
装置を提供しようとするものである。An object of the present invention is to provide a leak and flow rate inspection device capable of performing both the leak inspection and the flow rate inspection with the same inspection device.
【００１０】[0010]
【課題を解決するための手段】この発明では空圧源から
出力される空気圧を加圧弁の開閉によって選択的に取り
出すと共に２分岐し、一方の配管に基準タンクを接続
し、他方の配管に被測定体を接続する。これらの配管の
相互間に差圧検出器を接続すると共に、被測定体に空気
圧を与える配管の差圧検出器の接続点より空圧源側に絞
りを接続し、更に差圧検出器の接続点より基準タンク及
び被測定体側の各配管の間にバイパス通路を形成するた
めのバイパス弁を接続する。According to the present invention, the air pressure output from an air pressure source is selectively taken out by opening and closing a pressurizing valve and is branched into two, one pipe is connected to a reference tank, and the other pipe is covered. Connect the measuring body. Connect a differential pressure detector between these pipes, connect a throttle to the air pressure source side from the connection point of the differential pressure detector of the pipe that applies air pressure to the measured object, and connect the differential pressure detector. A bypass valve for forming a bypass passage is connected between the reference tank and each pipe on the measured object side from the point.
【００１１】このバイパス弁を開の状態に維持すること
により、加圧時には洩れ検査であっても流量検査であっ
てもこのバイパス弁を通じて被検査体に空気圧をバイパ
スさせて充分に与えることができる。洩れ検査では加圧
弁を閉にした後、一定の温度安定時間をとり、この間に
大きな洩れは圧力降下量を圧力計で検出し、その後バイ
パス弁を共に閉に制御することにより、洩れ検査を実行
する状態となる。By maintaining the bypass valve in the open state, it is possible to bypass the air pressure to the object to be inspected through the bypass valve and sufficiently give it to both the leak test and the flow rate test during pressurization. . In the leak test, after closing the pressurizing valve, a certain temperature stabilization time is taken, during which a large leak detects a pressure drop amount with a pressure gauge, and then controls the bypass valve together to perform the leak test. Ready to go.
【００１２】これに対し、流量検査ではバイパス弁だけ
を閉の状態に制御することにより、被検査体には絞りを
通じて空気圧が与え続けられる。然もこの状態で絞りの
両端に差圧検出器が接続された状態となり、絞りの両端
間に発生する圧力差を検出することができる。よってこ
のとき空圧源から出力される空気圧が既知であれば絞り
の両端に発生する圧力差から絞りを流れる空気の量を測
定することができ、この空気の流量は被検査体を流れる
空気の流量に対応する。On the other hand, in the flow rate inspection, by controlling only the bypass valve in the closed state, the air pressure is continuously applied to the object to be inspected through the throttle. In this state, the differential pressure detector is connected to both ends of the throttle, and the pressure difference generated between the both ends of the throttle can be detected. Therefore, at this time, if the air pressure output from the air pressure source is known, the amount of air flowing through the throttle can be measured from the pressure difference generated at both ends of the throttle. Corresponds to the flow rate.
【００１３】このように、この発明では洩れ検査装置に
絞りとバイパス通路を構成するためのバイパス弁を付加
するだけの構成によって洩れ検査装置を流量検査装置と
流用することができる。従って利用者は洩れ検査装置と
流量検査装置の双方を用意しなくても、この発明による
検査装置を用いることにより、洩れがあってはならない
容器の洩れの有無、及び被検査体を流れる空気の量を検
査することができる。As described above, according to the present invention, the leak inspection device can be used as the flow rate inspection device only by adding the bypass valve for forming the throttle and the bypass passage to the leak inspection device. Therefore, even if the user does not prepare both the leak inspection device and the flow rate inspection device, the use of the inspection device according to the present invention enables the presence or absence of the leakage of the container which should not be leaked, and the air flowing through the inspection object. The quantity can be tested.
【００１４】[0014]
【発明の実施の形態】図１にこの発明による洩れ及び流
量検査装置の実施例を示す。図中図２及び図３と対応す
る部分には同一符号を付して示す。図中１は空圧源、２
は調圧弁をそれぞれ示す。調圧弁２を通じて取り出され
た空気圧は加圧弁１５を通じて配管４Ａと４Ｂに取り出
される。つまり、この例では加圧弁１５として空気作動
弁を用いた場合を示す。この加圧弁１５に電磁弁１６を
通じてパイロット圧源１′からパイロット圧Ｐ３を与え
ることにより加圧弁１５は開の状態に制御され、調圧弁
２から出力される空気圧が配管４Ａと４Ｂに伝達され
る。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an embodiment of a leak and flow rate inspection device according to the present invention. In the figure, portions corresponding to those in FIGS. 2 and 3 are designated by the same reference numerals. In the figure, 1 is a pneumatic source, 2
Indicate pressure regulating valves, respectively. The air pressure taken out through the pressure regulating valve 2 is taken out through the pressurizing valve 15 into the pipes 4A and 4B. That is, in this example, the case where an air operated valve is used as the pressurizing valve 15 is shown. By applying pilot pressure P3 from the pilot pressure source 1'to the pressurizing valve 15 via the solenoid valve 16, the pressurizing valve 15 is controlled to the open state, and the air pressure output from the pressure regulating valve 2 is transmitted to the pipes 4A and 4B. .
【００１５】配管４Ｂ側（被検査体８が接続される側の
配管）に絞り１１を接続すると共に、差圧検出器６を配
管４Ａと４Ｂの相互間に接続する。更に、差圧検出器６
の接続点より基準タンク及び被検査体８側にバイパス通
路を構成するためのバイパス弁１８を配管４Ａと４Ｂ間
に接続する。バイパス弁１８もこの例では空気作動弁を
用いた場合を示す。従ってこのバイパス弁１８にも電磁
弁１７を通じてパイロット圧Ｐ３を与えることによりバ
イパス弁１８は断の状態に制御される。バイパス弁１８
からパイロット圧Ｐ３を除去すると、バイパス弁１８は
図の状態に戻される。バイパス弁１８の出力側には排気
用の排気弁１９を接続し、排気弁１９を開の状態に制御
することにより基準タンク７と被検査体８を大気に解放
（排気）させることができる。A throttle 11 is connected to the pipe 4B side (a pipe to which the object 8 to be inspected is connected), and a differential pressure detector 6 is connected between the pipes 4A and 4B. Further, the differential pressure detector 6
A bypass valve 18 for forming a bypass passage is connected between the pipes 4A and 4B on the side of the reference tank and the inspection object 8 from the connection point. In this example, the bypass valve 18 is also an air-operated valve. Therefore, by supplying the pilot pressure P3 to the bypass valve 18 through the solenoid valve 17, the bypass valve 18 is controlled to be in the disconnected state. Bypass valve 18
When the pilot pressure P3 is removed from the bypass valve 18, the bypass valve 18 is returned to the state shown in the figure. By connecting an exhaust valve 19 for exhaust to the output side of the bypass valve 18 and controlling the exhaust valve 19 to an open state, the reference tank 7 and the object 8 to be inspected can be released (exhausted) to the atmosphere.
【００１６】尚、基準タンク７と被検査体８の各配管４
Ａ，４Ｂの接続部分に例えば手動操作弁２１，２２を接
続し、必要に応じて手動操作弁２１，２２を閉じること
により基準タンク７と被検査体８を切り離すことができ
るように構成している。また、各電磁弁１６，１７，１
９，及び２３は制御器２４によって制御される。バイパ
ス弁１８の出力側の空気圧Ｐ２を切替弁２３によって圧
力計１４に与え、バイパス弁１８が構成するバイパス通
路の圧力Ｐ２を測定できるように構成している。尚、こ
の実施例では切替弁２３を３方電磁弁とし、必要に応じ
て調圧弁２の出力側の圧力Ｐ１も測定できるように構成
した場合を示す。Each pipe 4 of the reference tank 7 and the object 8 to be inspected
For example, the manually operated valves 21 and 22 are connected to the connecting portions of A and 4B, and the manually operated valves 21 and 22 are closed as necessary, so that the reference tank 7 and the inspection object 8 can be separated. There is. In addition, each solenoid valve 16, 17, 1
9 and 23 are controlled by the controller 24. The air pressure P2 on the output side of the bypass valve 18 is applied to the pressure gauge 14 by the switching valve 23 so that the pressure P2 in the bypass passage formed by the bypass valve 18 can be measured. In this embodiment, the switching valve 23 is a three-way solenoid valve, and the pressure P1 on the output side of the pressure regulating valve 2 can be measured if necessary.
【００１７】図１に示す構成において、洩れ検査装置と
して動作させる場合を説明する。洩れ検査装置として動
作させるには、電磁弁１７を閉じた状態に制御しバイパ
ス弁１８を開に、つまり図示の状態に制御し、排気弁１
９は閉の状態に設定する。この状態で電磁弁１６を開の
状態に制御し加圧弁１５を開の状態に制御する。加圧弁
１５が開の状態に制御されることにより基準タンク７に
は配管４Ａを通じて空気圧が与えられる。また絞り１１
を通じて被検査体８にも空気圧が与えられるが、ここで
バイパス弁１８が開に制御されているから、配管４Ａ側
から配管４Ｂに空気圧がバイパスされる。よって被検査
体８にも空気圧が充分に印加される。A case will be described in which the device shown in FIG. 1 is operated as a leak inspection device. In order to operate as a leak inspection device, the solenoid valve 17 is controlled to be closed and the bypass valve 18 is opened, that is, controlled to the illustrated state, and the exhaust valve 1
9 is set to the closed state. In this state, the solenoid valve 16 is controlled to the open state and the pressurizing valve 15 is controlled to the open state. Air pressure is applied to the reference tank 7 through the pipe 4A by controlling the pressurizing valve 15 in the open state. Also, diaphragm 11
Although air pressure is also applied to the inspection object 8 through the bypass valve 18, the bypass valve 18 is controlled to be open, so that the air pressure is bypassed from the pipe 4A side to the pipe 4B. Therefore, sufficient air pressure is also applied to the inspection object 8.
【００１８】一定時間（例えば３〜５秒程度）加圧した
後、制御器２４によって電磁弁１６を閉の状態に制御す
る。この制御により、加圧弁１５は閉の状態に制御さ
れ、配管４Ａと４Ｂは空圧源１から切り離される。一
方、バイパス弁１８は開いているため基準タンク側と被
検査体側は等圧に保たれている。加圧された空気圧の温
度安定時間（３〜５秒程度）をとる。このとき非常に大
きな洩れがあるときは圧力計１４がバイパス通路の圧力
Ｐ２の低下を検出し、大きな洩れ有りと判定する。一定
の時間後、更にバイパス弁１８が閉の状態に制御される
から配管４Ａと４Ｂは互いに切り離される。After pressurizing for a fixed time (for example, about 3 to 5 seconds), the solenoid valve 16 is controlled to be closed by the controller 24. By this control, the pressurizing valve 15 is controlled to be closed, and the pipes 4A and 4B are disconnected from the pneumatic pressure source 1. On the other hand, since the bypass valve 18 is open, the reference tank side and the inspection object side are kept at the same pressure. Allow time for the temperature of the pressurized air to stabilize (about 3 to 5 seconds). At this time, if there is a very large leak, the pressure gauge 14 detects a decrease in the pressure P2 in the bypass passage and determines that there is a large leak. After a certain period of time, the bypass valve 18 is further controlled to be closed, so that the pipes 4A and 4B are disconnected from each other.
【００１９】この結果基準タンク７と被検査体８は空気
圧が与えられた状態で孤立し、被検査体８に洩れが無け
れば時間が経過しても配管４Ａと４Ｂの間には圧力差が
発生しない。これに対し、被検査体８に洩れが有る場合
は、時間の経過に伴って配管４Ｂ側の圧力が漸次低下す
る。所定の時間経過した時点で圧力の低下量を測定する
ことにより、その圧力の低下量が予め設定した値に達し
た場合は検査器９は被検査体８が許容量以上の洩れが有
るものと判定し、被検査体８を不良として処理する。As a result, the reference tank 7 and the object 8 to be inspected are isolated in the state where the air pressure is applied, and if there is no leakage in the object 8 to be inspected, there will be a pressure difference between the pipes 4A and 4B over time. Does not occur. On the other hand, when there is a leak in the object 8 to be inspected, the pressure on the pipe 4B side gradually decreases with the passage of time. By measuring the amount of decrease in pressure when a predetermined time has elapsed, if the amount of decrease in pressure reaches a preset value, the inspector 9 determines that the object 8 to be inspected has leaked more than an allowable amount. The judgment is made and the inspection object 8 is processed as defective.
【００２０】試験が１サイクル終了した時点で排気弁１
９を開に制御し、基準タンク７と被検査体８に供給され
た空気圧を大気に解放させる。一方、図１に示す構成に
おいて、被検査体８として例えばガス器具のノズル部分
或いは医療器具のカテーテルのように、流体が一定量流
通することが要求される被検査体８を検査する場合には
バイパス弁１８を開の状態（配管４Ａと４Ｂの間を連通
させる状態）及び排気弁１９を閉の状態に制御する。こ
の状態で加圧弁１５を開の状態に制御すると、被検査体
８にはバイパス弁１８を通じて空気圧源１から空気圧が
バイパスされて与えられる。被検査体８に充分空気圧が
与えられた時点で、加圧弁１５を開の状態のまま、バイ
パス弁１８を断の状態に制御する。When the test is completed for one cycle, the exhaust valve 1
The air pressure supplied to the reference tank 7 and the inspection object 8 is released to the atmosphere by controlling 9 to open. On the other hand, in the configuration shown in FIG. 1, when inspecting an inspected body 8 that requires a certain amount of fluid to flow, such as a nozzle part of a gas instrument or a catheter of a medical instrument, The bypass valve 18 is controlled to be in an open state (a state in which the pipes 4A and 4B are in communication) and the exhaust valve 19 is in a closed state. When the pressurizing valve 15 is controlled to be in the open state in this state, the air pressure from the air pressure source 1 is supplied to the device under test 8 through the bypass valve 18. When sufficient air pressure is applied to the object 8 to be inspected, the pressurizing valve 15 is kept open and the bypass valve 18 is controlled to be disconnected.
【００２１】この状態では被検査体８には絞り１１を通
じて空気圧が与えられる。よって絞り１１には被検査体
８を流れる空気の流量と等しい量の空気が流れ、絞り１
１の両端間に流量に対応した圧力差が発生する。この圧
力差を差圧検出器６で検出し、検査器９に電気信号とし
て与える。検査器９は差圧値が予め設定した範囲に入っ
ているか否かを判定し、所定の範囲に入っていれば良、
範囲から外れている場合は不良と判定する。In this state, air pressure is applied to the inspection object 8 through the diaphragm 11. Therefore, an amount of air equal to the flow rate of the air flowing through the DUT 8 flows through the diaphragm 11, and the diaphragm 1
A pressure difference corresponding to the flow rate is generated between both ends of 1. This pressure difference is detected by the differential pressure detector 6 and given to the inspector 9 as an electric signal. The inspector 9 determines whether the differential pressure value is within a preset range, and if it is within a predetermined range,
If it is out of the range, it is determined to be defective.
【００２２】[0022]
【発明の効果】以上説明したように、この発明によれば
一般的な洩れ検査装置に絞り１１とバイパス弁１８を付
加した構成としただけで洩れ検査と流量検査とを行なう
洩れ及び流量検査装置を構成することができる。この結
果、洩れ検査装置と流量検査装置の２台の検査装置を作
るコストより大幅に安いコストで２つの検査機能を持つ
検査装置を得ることができるから、２つの検査機能を持
つ検査装置を安価に提供できる利点が得られる。As described above, according to the present invention, the leak and flow rate inspection device for performing the leak inspection and the flow rate inspection only by adding the throttle 11 and the bypass valve 18 to the general leak inspection device. Can be configured. As a result, an inspection device having two inspection functions can be obtained at a cost significantly lower than the cost of making two inspection devices, a leak inspection device and a flow rate inspection device. The advantages that can be provided to
【００２３】また、絞り１１を付けるか否かによって洩
れ検査専用装置と洩れ検査と流量検査の双方を行なうこ
とができる装置を構成することができる。よって製造上
でも互換性が得られ、製造上の管理が容易にできる利点
も得られる。Further, it is possible to configure a leak inspection dedicated device and a device capable of performing both the leak inspection and the flow rate inspection depending on whether or not the throttle 11 is attached. Therefore, compatibility can be obtained even in manufacturing, and there is an advantage that management in manufacturing can be easily performed.
【図１】この発明の一実施例を説明するための空気回路
の構成を示す図。FIG. 1 is a diagram showing a configuration of an air circuit for explaining an embodiment of the present invention.
【図２】従来の洩れ検査装置を説明するための空気回路
の構成を示す図。FIG. 2 is a diagram showing a configuration of an air circuit for explaining a conventional leak inspection device.
【図３】従来の流量検査装置を説明するための空気回路
の構成を示す図。FIG. 3 is a diagram showing a configuration of an air circuit for explaining a conventional flow rate inspection device.
１ 空圧源 １′ パイロット圧源 ２ 調圧弁 ４Ａ，４Ｂ 配管 ６ 差圧検出器 ７ 基準タンク ８ 被検査体 ９ 検査器 １５ 加圧弁 １６，１７ 電磁弁 １８ バイパス弁 １９ 排気弁 ２１ モード切換え弁 1 Air pressure source 1'Pilot pressure source 2 Pressure regulator 4A, 4B piping 6 Differential pressure detector 7 standard tank 8 Inspected body 9 inspection device 15 Pressurizing valve 16,17 Solenoid valve 18 Bypass valve 19 Exhaust valve 21 Mode switching valve
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) G01M 3/26 ─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. 7 , DB name) G01M 3/26
Claims (3)
開閉によって選択的に取り出すと共に、加圧弁で取り出
した空気圧を第１、第２の配管に分配し、第１の配管の
加圧弁と反対の端部に被検査体を接続し、第２の配管の
加圧弁と反対の端部に基準タンクを接続し、第１の配管
に絞りを挿入し、第１の配管における絞りの被検査体側
と第２の配管の相互間に差圧検出器を接続し、この差圧
検出器と並列に上記２本の配管の間を連通状態と非連通
状態とに切替るバイパス弁を設けバイパス弁が連通状態
に切替られている状態でバイパス通路の圧力を測定する
圧力計を設けた構成としたことを特徴とする洩れ及び流
量検査装置。1. An air pressure output from an air pressure source is selectively taken out by opening and closing a pressurizing valve, and the air pressure taken out by the pressurizing valve is distributed to first and second pipes.
Connect the DUT to the end opposite to the pressurizing valve, and
Connect the reference tank to the end opposite to the pressure valve, and connect the first pipe.
The throttle in the first pipe, and the side of the throttle in the first pipe to be inspected
A differential pressure detector is connected between the first pipe and the second pipe, and a bypass valve is provided in parallel with the differential pressure detector to switch between the two pipes between a communication state and a non-communication state. A leak and flow rate inspection device comprising a pressure gauge for measuring the pressure in the bypass passage in a state of being switched to a communication state.
洩れ検査装置として動作させる場合は、加圧時に上記加
圧弁を開に、バイパス弁を開に制御して上記基準タンク
と被測定体とに同一圧力の空気圧を供給し、一定時間後
に加圧弁を閉じた後、基準タンク側及び被検査体側を導
通させた状態で上記圧力計が圧力の低下を検出すること
により上記被検査体に大きな洩れが有ると判定し、圧力
の低下がない場合は上記バイパス弁を閉じ、更に一定時
間後に差圧検出器に差圧の発生が検出されることにより
被測定体に小さい洩れが有ると判定させることを特徴と
する洩れ及び流量検査装置。2. When the leak and flow rate inspection device according to claim 1 is operated as a leak inspection device, the pressurizing valve is opened and the bypass valve is controlled to open during pressurization to control the reference tank and the object to be measured. The same pressure is supplied to the and, after closing the pressurizing valve after a certain period of time, the pressure gauge detects a decrease in pressure in the state where the reference tank side and the side to be inspected are conducted to the inspected object. It is determined that there is a large leak, and if there is no pressure drop, the bypass valve is closed, and after a certain period of time, the differential pressure detector detects the occurrence of a differential pressure, and thus the measured object has a small leak. A leak and flow rate inspection device characterized by:
流量検査装置として動作させる場合は、加圧弁とバイパ
ス弁を開に制御して空気圧を主にバイパス弁を通じて被
測定体に供給し、一定時間後に加圧弁を開の状態に維持
したままバイパス弁を閉じ、上記絞りを通じて被検査体
に空気圧を印加し、絞りに発生する差圧を上記差圧検出
器によって検出し、その差圧値によって被測定体を流れ
る空気量を算出し、良否を判定することを特徴とする洩
れ及び流量検査装置。3. When operating the leak and flow rate inspection device according to claim 1 as a flow rate inspection device, the pressurizing valve and the bypass valve are controlled to be opened to supply air pressure to the object to be measured mainly through the bypass valve. After a certain period of time, the bypass valve is closed while keeping the pressurizing valve open, air pressure is applied to the object to be inspected through the throttle, the differential pressure generated in the throttle is detected by the differential pressure detector, and the differential pressure value A leak and flow rate inspection device characterized by calculating the amount of air flowing through an object to be measured by means of and determining the quality.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19101597A JP3454406B2 (en) | 1997-07-16 | 1997-07-16 | Leakage and flow rate inspection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19101597A JP3454406B2 (en) | 1997-07-16 | 1997-07-16 | Leakage and flow rate inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1137889A JPH1137889A (en) | 1999-02-12 |
| JP3454406B2 true JP3454406B2 (en) | 2003-10-06 |
Family
ID=16267470
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19101597A Expired - Fee Related JP3454406B2 (en) | 1997-07-16 | 1997-07-16 | Leakage and flow rate inspection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3454406B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102519682A (en) * | 2011-10-27 | 2012-06-27 | 天瀚科技(吴江)有限公司 | GPS (Global Position System) module watertightness testing device |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103091059B (en) * | 2012-12-21 | 2015-05-06 | 青岛大学 | Leakage real-time self-closing system |
| CN103528769A (en) * | 2013-10-24 | 2014-01-22 | 中电电气(江苏)股份有限公司 | Sealing leakage test device for oil-immersed transformer |
| CN104075858B (en) * | 2013-11-08 | 2016-07-06 | 上海威宁整形制品有限公司 | A kind of silica-gel breast prosthesis housing inflation inspection equipment |
| JP2016176867A (en) * | 2015-03-20 | 2016-10-06 | 株式会社ガスター | Leak inspection device and leak inspection method |
| CN108254167A (en) * | 2017-12-29 | 2018-07-06 | 广州市上腾电子科技有限公司 | A kind of discharge coefficient test gas circuit and its application method |
-
1997
- 1997-07-16 JP JP19101597A patent/JP3454406B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102519682A (en) * | 2011-10-27 | 2012-06-27 | 天瀚科技(吴江)有限公司 | GPS (Global Position System) module watertightness testing device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH1137889A (en) | 1999-02-12 |
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