JPH0784290B2 - Film transport device - Google Patents

Film transport device

Info

Publication number
JPH0784290B2
JPH0784290B2 JP62100009A JP10000987A JPH0784290B2 JP H0784290 B2 JPH0784290 B2 JP H0784290B2 JP 62100009 A JP62100009 A JP 62100009A JP 10000987 A JP10000987 A JP 10000987A JP H0784290 B2 JPH0784290 B2 JP H0784290B2
Authority
JP
Japan
Prior art keywords
film
flexible
vacuum suction
transport
transporting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62100009A
Other languages
Japanese (ja)
Other versions
JPS63267648A (en
Inventor
宏 青柳
功 高倉
才次郎 木下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teijin Ltd
Original Assignee
Teijin Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teijin Ltd filed Critical Teijin Ltd
Priority to JP62100009A priority Critical patent/JPH0784290B2/en
Publication of JPS63267648A publication Critical patent/JPS63267648A/en
Publication of JPH0784290B2 publication Critical patent/JPH0784290B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2402/00Constructional details of the handling apparatus
    • B65H2402/60Coupling, adapter or locking means

Landscapes

  • Advancing Webs (AREA)

Description

【発明の詳細な説明】 (1) 産業上の利用分野 本発明は、可撓性フイルムを、表面に真空吸引しつつ搬
送するフイルム搬送装置に関し、特にロール上ですべら
すことなく定速,定張力下で搬送するフイルム搬送ロー
ルに好適なフイルム搬送装置に関する。
DETAILED DESCRIPTION OF THE INVENTION (1) Field of Industrial Application The present invention relates to a film transporting device for transporting a flexible film while vacuum suctioning it to a surface thereof, and particularly to a constant speed and constant velocity without sliding on a roll. The present invention relates to a film transport device suitable for a film transport roll that is transported under tension.

(2) 従来例の構成とその問題点 高分子フイルム加工装置、フイルムコーター,フイルム
検査装置,フイルム巻取機等のフイルム搬送装置は、多
くの搬送ロールが使用される。搬送ロールは、従来、搬
送するフイルムにロール表面形状が転写したり、フイル
ムに傷を与えたりするのを防ぐため、硬質クロムメッキ
等をほどこして、鏡面状のロールが使用されている。
(2) Configuration of Conventional Example and Problems Thereof A large number of transport rolls are used in a film transport device such as a polymer film processing device, a film coater, a film inspection device, and a film winder. Conventionally, a transport roll is a mirror-like roll that has been coated with hard chrome to prevent the roll surface shape from being transferred to the transport film and scratching the film.

そして、搬送ロール前後の張力差が大きい所、搬送ロー
ルへの巻掛角が小さな所、ロールとフイルムとの摩擦が
小さく、スベリを発生しそうな所には、ロール表面に真
空吸引孔をもうけた真空吸引形の搬送ロールが使用され
ている。
A vacuum suction hole was provided on the roll surface where the tension difference before and after the transport roll was large, where the wrap angle to the transport roll was small, and where the friction between the roll and the film was small and slippage was likely to occur. A vacuum suction type transfer roll is used.

しかしながら、この従来の搬送ロールは、フイルムが非
常に平滑であったり、フイルムの剛性が低かったりし
て、真空吸引孔付近にフイルムが密着する場合、真空雰
囲気が真空吸引孔周囲だけに限定され、フイルムとロー
ル間全域にゆき渡らず、期待したフイルム把持力を得ら
れないという問題があった。
However, this conventional transport roll, when the film is very smooth or the rigidity of the film is low, and the film adheres to the vicinity of the vacuum suction hole, the vacuum atmosphere is limited to only the vacuum suction hole periphery, There was a problem that the expected film gripping force could not be obtained because the film did not reach the entire area between the film and the roll.

(3) 発明の目的 本発明は、かかる現状に鑑みなされたもので上述したフ
イルム搬送装置に於いて、特にフイルム把持力を必要と
する場合、真空吸引によりフイルムを安定にすべること
なく把持しつつ搬送するフイルム搬送装置を提供するこ
とを目的とするものである。
(3) Object of the invention The present invention has been made in view of the above circumstances, and in the above-described film transport apparatus, particularly when film gripping force is required, while gripping the film stably by vacuum suction without slipping. An object of the present invention is to provide a film transport device for transporting.

(4) 発明の構成 上記の目的は、以下の本発明により達成される。すなわ
ち本発明は、可撓性フイルムを真空吸引により表面に吸
引しつつ搬送する搬送装置において、立体的に多数の連
通孔を有する通気材を連通材が該表面の真空吸引孔上に
連通するように該表面上に配設し、真空吸引孔からの排
気作用により、通気材と可撓性フイルムとの間の空気を
均一に排気するようにしたことを特徴とするフイルム搬
送装置である。
(4) Structure of the Invention The above object is achieved by the present invention described below. That is, according to the present invention, in a transporting device that transports a flexible film while suctioning it to the surface by vacuum suction, a venting material having a large number of three-dimensionally communicating holes is formed so that the communicating material communicates with the vacuum suction holes on the surface. The film transfer device is characterized in that the air between the ventilation member and the flexible film is uniformly exhausted by the exhaust action from the vacuum suction hole.

上述の通り本発明では、真空吸引孔の上に可撓性フイル
ムの吸引により閉鎖されない多数の連通孔を立体的すな
わち三次元的に有する通気材を配設してあるので、従来
の如く真空吸引孔が吸引したフイルムにより完全に塞が
れることがなく、よって期待通りの大きな把持力が得ら
れると同時に、通気材の連通孔は可撓性フイルムに閉鎖
されない換言すれば可撓性フイルムをその中まで吸引し
ない微小なものであるので搬送するフイルムに損傷を与
えることなく搬送できるのである。
As described above, in the present invention, since the ventilation member having the three-dimensionally or three-dimensionally a plurality of communication holes which are not closed by the suction of the flexible film is disposed above the vacuum suction hole, the vacuum suction as in the conventional case is performed. The hole is not completely blocked by the sucked film, and thus the expected large gripping force is obtained, and at the same time, the communication hole of the ventilation member is not closed by the flexible film. Since it is a minute item that does not suck into the inside, it can be conveyed without damaging the conveyed film.

上述の本発明は以下に述べるフイルム搬送ロールに特に
好ましくは適用できるものであるが、その他ロボットの
ハンド等にも適用できるものであることはその趣旨より
明らかである。
The present invention described above is particularly preferably applicable to the film transport rolls described below, but it is apparent from that point that it is also applicable to other robot hands and the like.

以下本発明の詳細を前述のフイルム用搬送ロールを例に
説明する 第1図(A)は実施例の搬送ロールの構成を示す部分断
面図,第1図(B)は(A)図のA部の拡大図である。
The details of the present invention will be described below by taking the above-mentioned film transfer roll as an example. FIG. 1 (A) is a partial cross-sectional view showing the structure of the transfer roll of the embodiment, and FIG. 1 (B) is a part (A) of FIG. It is an enlarged view of a part.

図の1がロール本体5に穿設された真空吸引孔、2は搬
送ロール内を真空に保つための排気管、3は気密を保つ
ための回転シールであり、この基本構成は従来の真空吸
引形搬送ロールと同じである。
1 is a vacuum suction hole formed in the roll body 5, 2 is an exhaust pipe for keeping the inside of the transfer roll in a vacuum, and 3 is a rotary seal for keeping airtightness. It is the same as the shape carrier roll.

図の4が本発明に係わる通気材で、前述の通り、真空吸
引口1に連通し、可撓性フイルム10の吸引により閉鎖さ
れない多数の連通孔を立体的すなわち三次元的に有する
ものであれば良いが、図示の通り、真空吸引口が設けら
れたロール表面のほぼ全域を被うように配設するのが把
持力等の面から好ましい。又連通孔6は、排気面からは
前述の吸引した可撓性フイルムで閉鎖されない範囲で断
面積が大きい程良いが、フイルムへの転写,損傷等の面
からは小断面積が好ましい。かかる通気材の孔形状;厚
み及び材料は対象とするフイルムの剛性及び必要な把持
力によって決められ、実験的に決定する必要がある。
As shown in FIG. 4, reference numeral 4 denotes a ventilating material according to the present invention, which has three-dimensionally or three-dimensionally a plurality of communication holes communicating with the vacuum suction port 1 and not closed by suction of the flexible film 10 as described above. However, as shown in the drawing, it is preferable from the viewpoint of gripping force and the like that the roll surface is provided with a vacuum suction port so as to cover substantially the entire area. The communicating hole 6 preferably has a large cross-sectional area from the exhaust surface within the range in which it is not closed by the sucked flexible film, but a small cross-sectional area is preferable from the viewpoint of transfer to the film and damage. The hole shape, thickness and material of such a ventilation material are determined by the rigidity of the target film and the necessary gripping force, and must be determined experimentally.

特に取扱いが難しく、転写の発生し易い高分子フイルム
及びその上に機能性膜を形成した機能性高分子フイルム
に対しては連通孔が転写の発生しない微小な断面積とす
ることが好ましい。かかる連通孔の開口断面積は前述の
通り把持力及びフイルム剛性によって変化するが、100
μm以下にすることにより、膜厚200μm以下の上記高
分子フイルムにおいても実用的な条件下で転写の発生が
防止される。
Particularly for a polymer film which is difficult to handle and is likely to cause transfer and a functional polymer film having a functional film formed thereon, it is preferable that the communication holes have a minute cross-sectional area in which transfer does not occur. The opening cross-sectional area of such a communication hole varies depending on the gripping force and the film rigidity as described above.
When the thickness is not more than μm, the occurrence of transfer is prevented under practical conditions even in the above polymer film having a film thickness of not more than 200 μm.

以上の点及び入手の容易性の点から、通気材4として
は、高分子材料から出来ている不織布,過などに使用
される連通孔を多くする紙,布などに使用される特殊
に加工された織布,表面が平滑な焼結金属が好ましく利
用出来る。中でも、高分子材料から出来ている不織布で
は、目付け20〜300g/m2,厚み1mm以下のものが、又、焼
結金属では、粒径が相当直径で100μm以下のものが、
前記高分子フイルムの搬送に対して、把持力面、フイル
ム損傷面で巾広く適用出来、好ましく用いられる。
In view of the above points and the availability, the ventilation member 4 is a non-woven fabric made of a polymer material, a specially processed paper or cloth having a large number of communication holes used for the excess. Woven cloth and sintered metal with a smooth surface can be preferably used. Among them, non-woven fabrics made of polymer materials have a basis weight of 20 to 300 g / m 2 and a thickness of 1 mm or less, and sintered metals have a particle diameter of 100 μm or less in equivalent diameter,
It can be widely applied to conveyance of the polymer film in terms of gripping force and film-damaged surface, and is preferably used.

以下、上記通気材4の具体例の把持力の評価結果を説明
する把持力測定は、第2図に示す把持力評価方法にて、
従来の表面、すなわち、真空吸引孔を穿設した硬質クロ
ムメッキ鏡面表面と、その上面に、通気材4をすべる事
なきよう固定配設した表面につき、比較を実施した。
Hereinafter, the gripping force measurement for explaining the evaluation result of the gripping force of the specific example of the ventilation member 4 will be performed by the gripping force evaluation method shown in FIG.
A comparison was made between a conventional surface, that is, a hard chrome-plated mirror surface having a vacuum suction hole formed therein and a surface on which a ventilation member 4 is fixedly arranged so as not to slip.

第2図において、101は、上面に評価サンプルを取付け
るようなした吸引ボックスで、吸引ブロア102により、
内部を真空に引かれる。サンプル板103を吸引ボックス1
01にセットし、この上に可撓性フイルム104を置き、張
力計105にその1端を接続する。
In FIG. 2, 101 is a suction box having an upper surface to which an evaluation sample is attached, and a suction blower 102
The inside is evacuated. Suction box for sample plate 103 1
Set to 01, place the flexible film 104 on it, and connect one end of it to the tensiometer 105.

真空バルブ106で、排気を調整し、真空計107で真空度、
すなわちその目盛りを一定にした条件で、張力計105を
引張り、サンプル板103上でフイルム104がずれる点の張
力を測定し、この価で把持力を評価した。
Adjust the exhaust with the vacuum valve 106 and the vacuum degree with the vacuum gauge 107,
That is, the tensiometer 105 was pulled under the condition that the scale was constant, the tension at the point where the film 104 was displaced on the sample plate 103 was measured, and the gripping force was evaluated by this value.

評価したサンプル板は、第3図に示す。The sample plate evaluated is shown in FIG.

可撓性フイルム104の厚みを変えて測定した結果を第4
図に示す。図の把持力は前記張力計の測定値である。な
お可撓性フイルム104には、ポリエチレンテレフタレー
ト(PET)フイルムを用いた。
The result obtained by changing the thickness of the flexible film 104 is
Shown in the figure. The gripping force in the figure is the measured value of the tensiometer. A polyethylene terephthalate (PET) film was used for the flexible film 104.

第4図より従来例の鏡面では、175μm以下の高分子フ
イルムに対しては大きな把持力が期待できないことがわ
かる。
It can be seen from FIG. 4 that with the mirror surface of the conventional example, a large gripping force cannot be expected for a polymer film of 175 μm or less.

これに対して、通気材を設けた実施例では、従来例の数
倍以上の把持力となる。特に膜厚の薄い方において大き
な把持力が得られており、200μm以下の高分子フイル
ムに特に有効なことがわかる。
On the other hand, in the embodiment provided with the ventilation material, the gripping force is several times or more that of the conventional example. In particular, a large gripping force is obtained in a thin film, and it is understood that it is particularly effective for a polymer film having a thickness of 200 μm or less.

なお、いずれの実施例も上記評価においてはサンプル板
表面形状の可撓性フイルムへの転写は発生しなかつた。
従って、スリップ時にフイルムへ与えるスクラッチ等の
影響,加工の容易性,メンテナンス性を考慮し、上記通
気材を選定することにより、所望のフイルムに適した搬
送ロールが得られる。
In each of the examples, no transfer of the surface shape of the sample plate to the flexible film occurred in the above evaluations.
Therefore, a transport roll suitable for a desired film can be obtained by selecting the above-mentioned ventilation material in consideration of the influence of scratches or the like on the film at the time of slip, the ease of processing, and the maintainability.

又、通気材は、一般に平面状をなすものが多く、ロール
表面に配設する場合には、ロール円周上の1線で接続す
る必要がある。接続線によるフイルムへの品質面への影
響は、十分防ぐことが可能であるが、第5図に示す如
く、一般につき合せ貼付けの場合は、斜め継ぎ((A)
図),厚手の通気材202の場合は、厚み方向斜め継ぎ
((B)図)が好ましく、薄手の通気材202の場合は、
重ね継ぎ((C)図)でも構わない。
Further, most of the ventilation materials are generally flat, and when they are arranged on the roll surface, they need to be connected by one line on the circumference of the roll. It is possible to sufficiently prevent the influence of the connecting line on the quality of the film, but as shown in FIG. 5, in the case of general sticking and pasting, a diagonal joint ((A)
(Fig.), In the case of the thick ventilation member 202, the thickness direction diagonal joint (Fig. (B)) is preferable, and in the case of the thin ventilation member 202,
It may be spliced (Fig. (C)).

この場合、ロール本体201に配設された真空吸引孔203を
つぶすことなく接続することが好ましく、つき合せのす
き間は、0.1mm以下が好ましい。
In this case, it is preferable that the vacuum suction holes 203 provided in the roll body 201 be connected without being crushed, and the gap between the contacts is preferably 0.1 mm or less.

(5) 発明の効果 以上のように、本発明は、真空吸引孔上に、立体的に多
数の連通孔を有する通気材を配設することにより、搬送
するフイルムと把持表面間全域に減圧状態を行き渡らし
め、有効に、フイルムを把持することが出来る。特に随
伴気流により、把持力が減少する高速搬送ロールや、重
力の影響を無視できないフイルムを堅に搬送する堅型搬
送ロールに適する。
(5) Effects of the Invention As described above, according to the present invention, by disposing the ventilation member having a large number of three-dimensionally communicating holes on the vacuum suction holes, a reduced pressure state is provided between the film to be conveyed and the gripping surface. The film can be effectively spread and held. In particular, it is suitable for a high-speed transport roll whose gripping force is reduced due to the accompanying airflow and a rigid transport roll that firmly transports a film whose influence of gravity cannot be ignored.

【図面の簡単な説明】[Brief description of drawings]

第1図(A)は、実施例の真空吸引式搬送ロールの説明
図,同(B)図は(A)図のA部の拡大図,第2図は、
把持力テスト装置の説明図,第3図は、テストサンプル
の特性一覧表,第4図は各サンプルの把持力測定結果を
示すグラフ,第5図は、通気材を搬送ロールへ配設する
方法の説明図である。 5,201:ロール本体、1,203:真空吸引孔 4,202:通気材、101:吸引ボックス 103:サンプル板、105:張力計
FIG. 1 (A) is an explanatory view of a vacuum suction type transfer roll of the embodiment, FIG. 1 (B) is an enlarged view of part A of FIG. 1 (A), and FIG.
FIG. 3 is an explanatory view of the gripping force test device, FIG. 3 is a list of characteristics of test samples, FIG. 4 is a graph showing a gripping force measurement result of each sample, and FIG. 5 is a method of arranging a ventilation material on a transport roll. FIG. 5,201: Roll body, 1,203: Vacuum suction hole 4,202: Ventilation material, 101: Suction box 103: Sample plate, 105: Tensiometer

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭59−43757(JP,A) 特開 昭60−56552(JP,A) 特開 昭62−12560(JP,A) ─────────────────────────────────────────────────── ─── Continuation of the front page (56) Reference JP-A-59-43757 (JP, A) JP-A-60-56552 (JP, A) JP-A-62-12560 (JP, A)

Claims (8)

【特許請求の範囲】[Claims] 【請求項1】可撓性フイルムを真空吸引により表面に吸
引しつつ搬送する搬送装置において、立体的に多数の連
通孔を有する通気材を連通孔が該表面の真空吸引孔に連
通するように該表面上に配設し、真空吸引孔からの排気
作用により、通気材と可撓性フイルムとの間の空気を均
一に排気するようにしたものであり、かつ通気材は吸引
により可撓性フイルムに転写を生じない微小連通孔と表
面平滑性とを有し、さらに通気材は相当直径が100μm
以下の微粒子よりなる焼結金属であることを特徴とする
フイルム搬送装置。
1. A transporting device for transporting a flexible film while suctioning it to a surface by vacuum suction so that a ventilating material having a number of three-dimensionally communicating holes is communicated with the vacuum suction holes on the surface. It is arranged on the surface so that the air between the ventilation material and the flexible film is uniformly exhausted by the exhaust action from the vacuum suction hole, and the ventilation material is flexible by suction. It has minute communication holes that do not cause transfer to the film and surface smoothness, and the ventilation material has an equivalent diameter of 100 μm.
A film transporting device comprising a sintered metal composed of the following fine particles.
【請求項2】搬送装置が搬送ローラである特許請求の範
囲第1項記載のフイルム搬送装置。
2. The film transport device according to claim 1, wherein the transport device is a transport roller.
【請求項3】可撓性フイルムは高分子フイルム若しくは
高分子フイルム上に機能性膜を積層した機能性高分子フ
イルムである特許請求の範囲第1項〜第2項記載のいず
れかのフイルム搬送装置。
3. The film transport according to claim 1, wherein the flexible film is a polymer film or a functional polymer film in which a functional film is laminated on the polymer film. apparatus.
【請求項4】可撓性フイルムの膜厚が10〜200μmであ
る特許請求の範囲第1項〜第3項記載のいずれかのフイ
ルム搬送装置。
4. The film transporting device according to claim 1, wherein the film thickness of the flexible film is 10 to 200 μm.
【請求項5】可撓性フイルムを真空吸引により表面に吸
引しつつ搬送する搬送装置において、立体的に多数の連
通孔を有する通気材を連通孔が該表面の真空吸引孔に連
通するように該表面上に配設し、真空吸引孔からの排気
作用により、通気材と可撓性フイルムとの間の空気を均
一に排気するようにしたものであり、かつ通気材は吸引
により可撓性フイルムに転写を生じない微小連通孔と表
面平滑性とを有し、さらに通気材は目付け20〜300g/
m2、厚み1mm以下の不織布であることを特徴とするフイ
ルム搬送装置。
5. A transporting device for transporting a flexible film while suctioning it to the surface by vacuum suction, wherein a ventilating material having a number of three-dimensionally communicating holes is communicated with the vacuum suction holes on the surface. It is arranged on the surface so that the air between the ventilation material and the flexible film is uniformly exhausted by the exhaust action from the vacuum suction hole, and the ventilation material is flexible by suction. It has minute communication holes that do not cause transfer to the film and surface smoothness, and the breathable material has a basis weight of 20 to 300 g /
A film transport device characterized by being a non-woven fabric having a thickness of m 2 and a thickness of 1 mm or less.
【請求項6】搬送装置が搬送ローラである特許請求の範
囲第5項記載のフイルム搬送装置。
6. The film transport device according to claim 5, wherein the transport device is a transport roller.
【請求項7】可撓性フイルムは高分子フイルム若しくは
高分子フイルム上に機能性膜を積層した機能性高分子フ
イルムである特許請求の範囲第5項〜第6項記載のいず
れかのフイルム搬送装置。
7. The film transport according to any one of claims 5 to 6, wherein the flexible film is a polymer film or a functional polymer film having a functional film laminated on the polymer film. apparatus.
【請求項8】可撓性フイルムの膜厚が10〜200μmであ
る特許請求の範囲第5項〜第7項記載のいずれかのフイ
ルム搬送装置。
8. The film transporting device according to claim 5, wherein the flexible film has a film thickness of 10 to 200 μm.
JP62100009A 1987-04-24 1987-04-24 Film transport device Expired - Fee Related JPH0784290B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62100009A JPH0784290B2 (en) 1987-04-24 1987-04-24 Film transport device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62100009A JPH0784290B2 (en) 1987-04-24 1987-04-24 Film transport device

Publications (2)

Publication Number Publication Date
JPS63267648A JPS63267648A (en) 1988-11-04
JPH0784290B2 true JPH0784290B2 (en) 1995-09-13

Family

ID=14262562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62100009A Expired - Fee Related JPH0784290B2 (en) 1987-04-24 1987-04-24 Film transport device

Country Status (1)

Country Link
JP (1) JPH0784290B2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4998658A (en) * 1988-12-27 1991-03-12 Eastman Kodak Company Drilled unported vacuum drum with a porous sleeve
US5232141A (en) * 1989-11-01 1993-08-03 Basf Magnetics Gmbh Suction roller arrangement for transporting web-form material
AU7877491A (en) * 1990-05-11 1991-12-10 Rudolph J. Liedtke Air bearing for web material
DE19944959A1 (en) * 1999-09-20 2001-04-05 Voith Paper Patent Gmbh Paper winding roller has surface layer with orifices which communicate with channels in intermediate layer leading to air take-up chambers in porous layer
JP5196752B2 (en) 2005-09-16 2013-05-15 東レバッテリーセパレータフィルム株式会社 Polyethylene microporous membrane, method for producing the same, and battery separator
JP5362285B2 (en) * 2007-08-07 2013-12-11 日本タングステン株式会社 Adsorption roll
JP5352034B2 (en) * 2009-02-16 2013-11-27 日本タングステン株式会社 Adsorption roll
EP2955136B1 (en) * 2013-02-06 2019-09-25 JDC, Inc. Suction roll device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5943757A (en) * 1982-09-03 1984-03-10 Hitachi Seiko Ltd Vacuum roller for magnetic coater
JPS6056552A (en) * 1983-09-08 1985-04-02 Toshin Kogyo Kk Conveying apparatus of substrate in automatic screen printing machine
DE3522829A1 (en) * 1985-06-26 1987-01-02 Hell Rudolf Dr Ing Gmbh Vacuum clamping plate with automatic format adaptation

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