JPH0779581A - Vibration-wave motor - Google Patents
Vibration-wave motorInfo
- Publication number
- JPH0779581A JPH0779581A JP5225530A JP22553093A JPH0779581A JP H0779581 A JPH0779581 A JP H0779581A JP 5225530 A JP5225530 A JP 5225530A JP 22553093 A JP22553093 A JP 22553093A JP H0779581 A JPH0779581 A JP H0779581A
- Authority
- JP
- Japan
- Prior art keywords
- vibrating body
- vibration
- wave motor
- mechanical energy
- vibration wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は電気−機械エネルギー変
換素子に電圧を印加することにより、振動体に進行性振
動波を生じさせ、この振動体に接触する移動体との間の
摩擦駆動で相対移動を起こさせる振動波モータ、特に高
精度型の振動波モータに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention produces a progressive vibration wave in a vibrating body by applying a voltage to an electro-mechanical energy conversion element, and friction driving between the vibrating body and a moving body in contact therewith. The present invention relates to a vibration wave motor that causes relative movement, and particularly to a high precision vibration wave motor.
【０００２】[0002]
【従来の技術】図３は従来の振動波モータの縦断面図、
図４の（ａ）の電極構成図、図４の（ｂ）はステータの
展開側面図、図５は振動体の正面図、図６は圧縮ばね部
材の正面図である。2. Description of the Related Art FIG. 3 is a longitudinal sectional view of a conventional vibration wave motor,
4A is an electrode configuration diagram, FIG. 4B is a developed side view of the stator, FIG. 5 is a front view of the vibrating body, and FIG. 6 is a front view of the compression spring member.
【０００３】図３、図４の（ａ），（ｂ）及び図５にお
いて、１は厚さｂの薄い円環形状の圧電素子で、弾性材
料からなり、λ／２（但しλは波長）あたり４個（２の
整数倍）の突起を全周にわたり等間隔でスリットを入れ
ることで形成した振動体２にベタ電極面を固着してステ
ータとしている。In FIGS. 3, 4 (a), 4 (b) and 5, 1 is a thin annular piezoelectric element having a thickness b, which is made of an elastic material and has a wavelength of λ / 2 (where λ is a wavelength). A solid electrode surface is fixed to the vibrating body 2 formed by forming four (a multiple of 2) projections at equal intervals over the entire circumference to form a stator.
【０００４】圧電素子１の他面の電極構成は、図４
（ａ）に示す通り、励起されるべき振動数の波長λに対
し、交互に逆の伸縮極性となるようλ／２ピッチで分極
された駆動用のＡ電極群（Ａ1 〜Ａ8 ）及びＢ電極群
（Ｂ1 〜Ｂ8 ）と、これらＡ及びＢ電極間にあり、それ
ぞれの電極群の振動状態を検出するλ／４ピッチの振動
検出用電極ＳA 及びＳB と、他に接地用の三つの共通電
極Ｇからなっている。そして上記の駆動用の各電極と振
動検出用電極及び共通電極はｙ−ｙ′軸に対して配置及
び分極の極性が鏡面対称になっている。The electrode structure on the other surface of the piezoelectric element 1 is shown in FIG.
As shown in (a), a driving A electrode group (A 1 to A 8 ) polarized at a λ / 2 pitch so as to alternately have expansion and contraction polarities with respect to the wavelength λ of the frequency to be excited, and B electrode group (B 1 to B 8 ), λ / 4 pitch vibration detection electrodes S A and S B between the A and B electrodes for detecting the vibration state of each electrode group, and other ground It consists of three common electrodes G for. The driving electrodes, the vibration detecting electrodes, and the common electrode are arranged and polarized in mirror symmetry with respect to the y-y 'axis.
【０００５】前記の駆動用Ａ電極群（Ａ1 〜Ａ8 ）に対
し駆動用Ｂ電極群（Ｂ1 〜Ｂ8 ）は３／４λずれたピッ
チで配置され、一方振動検出用の電極ＳA 及びＳB は駆
動用のＡ電極群（Ａ1 〜Ａ8 ）及びＢ電極群（Ｂ1 〜Ｂ
8 ）によるそれぞれ定在波の実質的に腹の位置を中心と
して配置されている。The driving B electrode group (B 1 to B 8 ) is arranged at a pitch shifted by 3 / 4λ with respect to the driving A electrode group (A 1 to A 8 ), while the vibration detecting electrode S A is arranged. and S B are a electrode group for driving (a 1 to a 8) and the B electrode group (B 1 .about.B
8 ), each of which is arranged around the substantially antinode position of the standing wave.
【０００６】図４の（ｂ）の振動体２の接触面の複数個
の突起は軸心に対して一定幅（ｔ）のスリットを入れる
ことで形成されるが、ｈがスリット深さでＨは振動体２
の全高さである。A plurality of protrusions on the contact surface of the vibrating body 2 of FIG. 4B are formed by forming slits of a constant width (t) with respect to the axis, where h is the slit depth and H is H. Is the vibrating body 2
Is the total height of.
【０００７】更に図４の（ｂ）が示したように圧電素子
１の振動検出用の電極ＳA 及びＳBの中央点を振動体２
のスリット部の中央点に合致させ固着してステータとし
ているので、駆動用のＡ電極群（Ａ1 〜Ａ8 ）或はＢ電
極群（Ｂ1 〜Ｂ8 ）の中央点は全てスリットの中央点に
合致している。Further, as shown in FIG. 4B, the center point of the vibration detecting electrodes S A and S B of the piezoelectric element 1 is placed at the vibrating body 2.
Since the stator is made to match the central point of the slit part and is fixed, the central points of the driving A electrode group (A 1 to A 8 ) or B electrode group (B 1 to B 8 ) are all the central points of the slit. It matches the points.
【０００８】前記の振動体２は中立面の薄板円板部２ｂ
を介してさらに内径側の厚板円環部２ｃで３本のネジ４
で筐体３に固定されている。The vibrating body 2 is a thin circular plate portion 2b having a neutral surface.
3 screws 4 on the thick plate ring portion 2c on the inner diameter side.
It is fixed to the housing 3 with.
【０００９】又熱伝導性の優れた材料からなる筐体３の
中心部には第１のボール軸受１１が外輪を固着して設け
られている。A first ball bearing 11 is provided with an outer ring fixed to the center of the housing 3 made of a material having excellent thermal conductivity.
【００１０】１０は回転軸でその１端は第１のボール軸
受１１の内輪に軸方向摺動可能に支持され、他端はネジ
９で筐体３に固定された筐体カバー８の中心部に外輪を
固着して設けられた第２のボール軸受の内輪に軸方向摺
動可能に支持されている。Reference numeral 10 denotes a rotary shaft, one end of which is supported by the inner ring of the first ball bearing 11 so as to be slidable in the axial direction, and the other end of which is a central portion of a housing cover 8 fixed to the housing 3 with a screw 9. An outer ring is fixedly attached to the inner ring of a second ball bearing which is slidably supported in the axial direction.
【００１１】なお、回転軸の他端にはエンコーダの図示
されていない入力軸を固定するための内径嵌合部１０ｃ
と固定ネジ１０ｄが設けられている。An inner diameter fitting portion 10c for fixing an input shaft (not shown) of the encoder to the other end of the rotary shaft.
And a fixing screw 10d are provided.
【００１２】７は複合樹脂からなる環状の摺動体６と摺
動体６を外径部端面５ａに耐熱性のエポキシ系接着剤で
同心的に固着した、例えば黄銅からなる支持体５とで構
成された移動体で、この移動体７は回転軸１０の外径部
に直接例えば焼ばめ或は圧着などで固定されている。Reference numeral 7 is composed of an annular slide body 6 made of a composite resin, and a support body 5 made of, for example, brass, which is concentrically fixed to the end surface 5a of the outer diameter portion of the slide body 6 with a heat-resistant epoxy adhesive. The moving body 7 is directly fixed to the outer diameter portion of the rotary shaft 10 by, for example, shrink fitting or pressure bonding.
【００１３】支持体５は摺動体６を固着した内径側に薄
板円板部５ｂを有しており、この支持体５の薄板円板部
５ｂと第２のボール軸受１２の内輪との間にゴム製の弾
性シート部材１７及び、図６に示す形状の圧縮ばね部材
１４を配置し、圧縮ばね部材１４の軸方向荷重を支持体
５の薄板円板部５ｂの軸方向に与えて振動体２の摺動面
２ａに移動体７の摺動体６を加圧接触させて振動波モー
タを構成している。The support 5 has a thin disk portion 5b on the inner diameter side to which the sliding member 6 is fixed, and between the thin disk portion 5b of the support 5 and the inner ring of the second ball bearing 12. The elastic sheet member 17 made of rubber and the compression spring member 14 having the shape shown in FIG. 6 are arranged, and the axial load of the compression spring member 14 is applied in the axial direction of the thin disk portion 5b of the support 5 to vibrate the body 2. The sliding body 2 of the moving body 7 is brought into pressure contact with the sliding surface 2a of FIG.
【００１４】なお、筐体カバー８の中心部の第２のボー
ル軸受１２の内輪と圧縮ばね部材１４の間に図示されて
いないスペーサーが設置され、圧縮ばね部材１４の発生
する軸方向荷重を調整している。A spacer (not shown) is installed between the inner ring of the second ball bearing 12 and the compression spring member 14 at the center of the housing cover 8 to adjust the axial load generated by the compression spring member 14. is doing.
【００１５】振動体２の支持固定は、スリットの形成さ
れた振動発生部に振動を阻害することのないように支持
固定することが望ましく、薄板円板部２ｂの径を大きく
し、その内径側に設けた厚板円環部２ｃでネジ止めする
ことは、薄板円板部２ｂの適度なバネ剛性によって該振
動発生部を支持することができると云える。When supporting and fixing the vibrating body 2, it is desirable that the vibrating body 2 be supported and fixed so that the vibration is not impeded by the vibration generating portion in which the slit is formed. It can be said that the vibration generation portion can be supported by screwing with the thick plate circular ring portion 2c provided in the above, by the appropriate spring rigidity of the thin circular plate portion 2b.
【００１６】[0016]
【発明が解決しようとする課題】しかしながら従来型の
振動波モータを評価したところ下記の通りの問題点があ
った。However, when the conventional vibration wave motor was evaluated, the following problems were encountered.
【００１７】図５の振動体２を筐体３に３本のネジ４
で固定した状態で、振動検出用電極ＳA 及びＳB の検出
電圧の振幅を等しく、かつ両検出電圧間の時間的位相差
をπ／２とする交流電圧を印加して、振動体２の接触面
に曲げ振動の進行波を図３のモータの回転軸がＣＣＷ方
向に回転するように発生したときわずかな振動音が聞か
れた。The vibrating body 2 shown in FIG.
In the state where the vibrating body 2 is fixed, the amplitudes of the detection voltages of the vibration detection electrodes S A and S B are made equal and an AC voltage having a temporal phase difference between the detection voltages of π / 2 is applied. A slight vibration sound was heard when a traveling wave of bending vibration was generated on the contact surface so that the rotating shaft of the motor in FIG. 3 rotated in the CCW direction.
【００１８】図５の振動体２を組込んだ図３の従来型
のモータを振動検出用電極ＳA 及びＳB の検出電圧を大
にして駆動していくと、まずＣＣＷ方向の回転で、次い
でＣＷ方向の回転で振動音の発生があった。When the conventional motor of FIG. 3 incorporating the vibrating body 2 of FIG. 5 is driven by increasing the detection voltage of the vibration detection electrodes S A and S B , first the rotation in the CCW direction causes Next, vibration sound was generated by rotation in the CW direction.
【００１９】次にトルク計を用いて検出電圧を変えた
ときのトルク対回転数特性を測定したが、いずれの特性
カーブでも高トルク領域で回転数が一気に低下するいわ
ゆる「脱調現象」がみられた。Next, the torque-rotational speed characteristics when the detected voltage was changed were measured by using a torque meter. The so-called "step-out phenomenon" in which the rotational speed suddenly decreased in the high torque range was observed in any of the characteristic curves. Was given.
【００２０】[0020]
【課題を解決するための手段（及び作用）】本発明は移
動体との接触面にスリットにより形成される複数個の突
起を有すると共に、又接触面の内径側の中立面上に複数
個の取付孔或は取付ネジを有する振動体に励起されるべ
き振動数の波長（λ）に対しλ／４の奇数倍のずれがあ
る二つの駆動用電気−機械エネルギ変換素子群を配列固
着すると共に該二つの駆動用電気−機械エネルギー変換
素子群の中間に二つのそれぞれの駆動用電気−機械エネ
ルギー変換素子に対応する振動検出用電気−機械エネル
ギー変換素子を配列固着したステータを備えた振動波モ
ータにおいて、 各駆動用及び振動検出用等の電気−機械エネルギー変
換素子の配置及び極性が鏡面対称であり、 振動体の接触面の複数個の突起の数がλ／２あたり２
の整数倍（２，４，６…）であり、 振動体の接触面の内径側の中立面上の複数個の取付孔
或は取付ネジの数が２の整数倍（２，４，６…）であ
り、 振動体の突起を形成するスリット位置に、二つの振動
検出用電気−機械エネルギー変換素子の中央位置及び振
動体の接触面の内径側の中立面上の２の整数倍の取付孔
或は取付ネジを合致させ、振動波モータのステータを鏡
面対称に構成して、振動体の支持による振動体の内部応
力をより均一化し、同時に振動体をより剛性的に支持す
るものである。The present invention has a plurality of projections formed by slits on the contact surface with the moving body, and a plurality of projections on the neutral surface on the inner diameter side of the contact surface. Two driving electro-mechanical energy conversion element groups which are offset by an odd multiple of λ / 4 with respect to the wavelength (λ) of the frequency to be excited in the vibrating body having the mounting holes or mounting screws And a vibration wave having a stator in which vibration detection electro-mechanical energy conversion elements corresponding to two respective drive electro-mechanical energy conversion elements are arrayed and fixed in the middle of the two drive electro-mechanical energy conversion elements. In the motor, the arrangement and polarities of the electro-mechanical energy conversion elements for each drive and vibration detection are mirror-symmetrical, and the number of multiple protrusions on the contact surface of the vibrating body is 2 per λ / 2.
Is an integer multiple (2, 4, 6 ...), and the number of a plurality of mounting holes or mounting screws on the neutral surface on the inner diameter side of the contact surface of the vibrator is an integer multiple of 2 (2, 4, 6). …), At the slit position forming the protrusion of the vibrating body, at the center position of the two vibration-detecting electro-mechanical energy conversion elements and at an integral multiple of 2 on the neutral surface on the inner diameter side of the contact surface of the vibrating body. By matching the mounting holes or mounting screws, the stator of the vibration wave motor is configured to be mirror-symmetrical, and the internal stress of the vibrating body due to the supporting of the vibrating body is made more uniform and at the same time the vibrating body is supported more rigidly. is there.
【００２１】[0021]
【実施例】以下本発明を図面に示す実施例に基づいて詳
細に説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail based on the embodiments shown in the drawings.
【００２２】図１は本発明による振動波モータの第１の
実施例を示す縦断面図、図２は図１に示す振動体の正面
図である。FIG. 1 is a longitudinal sectional view showing a first embodiment of a vibration wave motor according to the present invention, and FIG. 2 is a front view of the vibrating body shown in FIG.
【００２３】図において、１は圧電素子、５は支持体、
６は摺動体、７は移動体、８は筐体カバー、９はネジ、
１０は回転軸、１１は第１のボール軸受、１２は第２の
ボール軸受、１４は圧縮ばね部材、１７は弾性シート部
材で以上の構成部品は図３の従来例の振動波モータと同
等であり、詳しい説明は省略する。In the figure, 1 is a piezoelectric element, 5 is a support,
6 is a sliding body, 7 is a moving body, 8 is a housing cover, 9 is a screw,
Reference numeral 10 is a rotary shaft, 11 is a first ball bearing, 12 is a second ball bearing, 14 is a compression spring member, 17 is an elastic sheet member, and the above components are equivalent to those of the conventional vibration wave motor of FIG. Yes, detailed description is omitted.
【００２４】２２は本実施例による振動体で、従来例の
振動体２と同様にスリットにより形成されたλ／２あた
り２の整数倍（図２では４）の突起部を有しており、圧
電素子１が裏面に同心的にかつ振動体２２のスリット位
置に対し、その電極構成を特定して固着している。Reference numeral 22 denotes a vibrating body according to the present embodiment, which has projections of an integral multiple of 2 (4 in FIG. 2) per λ / 2 formed by slits, like the vibrating body 2 of the conventional example. The piezoelectric element 1 is concentrically attached to the back surface and fixed to the slit position of the vibrating body 22 by specifying its electrode configuration.
【００２５】又従来例の振動体２と同様に接触面の中立
面上の薄板円板部２２ｂを介して内径側の厚板円環部２
２ｃで筐体２３に固定されているが、従来例の振動体２
が３本のネジで筐体３に固定されていたのに対し、本実
施例の振動体２２はｙ−ｙ′軸に対称でかつスリット位
置に合致する２の整数倍（図２では４）の取付ネジ２２
ｄを用いて筐体２３に固定されている。Similarly to the vibrating body 2 of the conventional example, the thick disk annular portion 2 on the inner diameter side is provided via the thin disk portion 22b on the neutral surface of the contact surface.
The vibrating body 2 of the conventional example is fixed to the housing 23 by 2c.
Was fixed to the housing 3 with three screws, whereas the vibrating body 22 of this embodiment is an integral multiple of 2 (4 in FIG. 2) that is symmetrical with respect to the y-y 'axis and matches the slit position. Mounting screw 22
It is fixed to the housing 23 by using d.
【００２６】図７は第１の実施例の変形例を示す。FIG. 7 shows a modification of the first embodiment.
【００２７】図７において、３２は支持剛性を大にする
振動体の例で、接触面の内径側の中立面上に薄板円環部
３２ｂと内径側に厚板円環部３２ｃを有し、厚板円環部
３２ｃにｙ−ｙ′軸に対称でかつスリット位置に合致す
る２の整数倍（図では８）の取付ネジ３２ｄがある。In FIG. 7, reference numeral 32 is an example of a vibrating body for increasing the support rigidity, which has a thin plate annular portion 32b on the neutral surface on the inner diameter side of the contact surface and a thick plate annular portion 32c on the inner diameter side. The thick plate annular portion 32c has a mounting screw 32d which is symmetrical with respect to the y-y 'axis and which is an integral multiple of 2 (8 in the figure) and matches the slit position.
【００２８】また、薄板円環部３２ｂにはこの整数倍
（図では８）の長孔３２ｅが同心円上等間隔にかつ厚板
円環部３２ｃの隣り合う取付ネジ３２ｄの中心の角度位
置に形成されて、薄板円環部３２ｂによる支持の損失を
軽減している。Further, the thin plate annular portion 32b is formed with elongated holes 32e of an integral multiple (8 in the figure) at equal intervals on the concentric circles and at the angular position of the center of adjacent mounting screws 32d of the thick plate annular portion 32c. Thus, the loss of support by the thin plate annular portion 32b is reduced.
【００２９】図８は本発明の第２の実施例における振動
波モータの縦断面図、図９は図８に示す振動体の正面図
である。FIG. 8 is a vertical sectional view of a vibration wave motor according to a second embodiment of the present invention, and FIG. 9 is a front view of the vibration body shown in FIG.
【００３０】図３の従来例の振動波モータと異なる構成
部品のみ説明すると、４２は従来例の図３の振動体２と
同様にλ／２あたり４の突起部を有し、裏面に圧電素子
１を固着しているが、接触面の内径側の中立面上に薄板
円環部４２ｂを形成し、薄板円環部４２ｂのｙ−ｙ′軸
に対称でかつ振動体４２のスリット位置に合致する２の
整数倍（図９では６）の取付孔４２ｄを用いて筐体３３
に固定されている。Explaining only the components different from the vibration wave motor of the conventional example of FIG. 3, reference numeral 42 has four protrusions per λ / 2 similarly to the vibration body 2 of the conventional example of FIG. 1 is fixed, but a thin plate annular portion 42b is formed on the neutral surface on the inner diameter side of the contact surface, and is symmetrical with respect to the y-y 'axis of the thin plate annular portion 42b and at the slit position of the vibrating body 42. Using the mounting holes 42d that are an integral multiple of 2 (6 in FIG. 9) that match, the housing 33
It is fixed to.
【００３１】図９の振動体４２も振動体の支持剛性を大
にするためのもので、振動音の発生を防ぐためｙ−ｙ′
軸上に取付け孔４２ｄがこないようにしている。The vibrating body 42 shown in FIG. 9 is also for increasing the supporting rigidity of the vibrating body, and y-y 'for preventing generation of vibration noise.
The mounting hole 42d is prevented from coming on the shaft.
【００３２】図１０は第２の実施例の変形例を示す。FIG. 10 shows a modification of the second embodiment.
【００３３】図１０の振動体５２は図９の振動体４２と
同様、接触面の内径側の中立面上に薄板円環部５２ｂを
形成し、薄板円環部５２ｂのｙ−ｙ′軸に対称で、かつ
振動体５２のスリット位置に合致する２の整数倍（図１
０で６）の取付ネジ５２ｃで図示されてない筐体に固定
されるが、薄板円環部５２ｂには、やはり支持による損
失の軽減をはかるための長孔５２ｅが形成されている。The vibrating body 52 of FIG. 10 is similar to the vibrating body 42 of FIG. 9 in that the thin plate annular portion 52b is formed on the neutral surface on the inner diameter side of the contact surface, and the y-y 'axis of the thin plate annular portion 52b is formed. Is a multiple of 2 which is symmetric to and which matches the slit position of the vibrating body 52 (see FIG.
Although it is fixed to a housing (not shown) with a mounting screw 52c of 0) and 6), the thin plate annular portion 52b is also formed with a long hole 52e for reducing loss due to support.
【００３４】図１１は第２の実施例の第２変形例を示
す。FIG. 11 shows a second modification of the second embodiment.
【００３５】図１１において、振動体６２は、接触面の
内径側の中立面上の薄板円環部６２ｂのｙ−ｙ′軸に対
称でかつ振動体６２のスリット位置に合致する２の整数
倍（図１１では８）の取付孔６２ｃを用いて筐体に固定
する。In FIG. 11, the vibrating body 62 is an integer of 2 which is symmetrical with respect to the y-y 'axis of the thin plate annular portion 62b on the neutral surface on the inner diameter side of the contact surface and which coincides with the slit position of the vibrating body 62. It is fixed to the housing using double (8 in FIG. 11) mounting holes 62c.
【００３６】振動体６２では取付孔６２ｃを形成する支
持部６２ｄを除いて薄板円環部６２ｂを肉抜きしてい
る。In the vibrating body 62, the thin plate annular portion 62b is thinned out except for the supporting portion 62d forming the mounting hole 62c.
【００３７】図１２は本発明の第３の実施例の振動波モ
ータの縦断面図、図１３は図１２に示す振動体の正面
図、図１４は固定部材の正面図である。FIG. 12 is a longitudinal sectional view of a vibration wave motor according to a third embodiment of the present invention, FIG. 13 is a front view of the vibrating body shown in FIG. 12, and FIG. 14 is a front view of a fixing member.
【００３８】この実施例では振動体７２の薄板円環部７
２ｂのｙ−ｙ′軸に対称でかつ振動体７２のスリット位
置に合致する２の整数倍（図１３で４）の取付孔７２ｃ
を形成し、図１４の円環形状の固定部材１８で振動体７
２を筐体４３に挟持しネジで固定するものである。In this embodiment, the thin plate annular portion 7 of the vibrating body 72 is used.
Mounting hole 72c that is an integral multiple of 2 (4 in FIG. 13) and that is symmetrical with respect to the y-y 'axis of 2b and matches the slit position of the vibrating body 72.
And the ring-shaped fixing member 18 of FIG.
2 is sandwiched between the housings 43 and fixed with screws.
【００３９】[0039]
【発明の効果】以上説明したように本発明の振動波モー
タでは以下のような効果が得られる。 振動体の不均一支持による不要振動を軽減し、 ・より高精度回転を可能とする。As described above, the vibration wave motor of the present invention has the following effects. Unnecessary vibration due to non-uniform support of the vibrator is reduced. ・ Higher precision rotation is possible.
【００４０】・より高振幅での駆動を可能としてモータ
特性の使用範囲を拡大できる。It is possible to drive with a higher amplitude and to expand the range of use of motor characteristics.
【００４１】振動体の剛性支持により、高トルク領域
での「脱調現象」を軽減する特性が得られる。By virtue of the rigid support of the vibrating body, it is possible to obtain the characteristic of reducing the "step-out phenomenon" in the high torque region.
【００４２】振動体の形状を簡略化して低価格化が可
能となる。It is possible to reduce the cost by simplifying the shape of the vibrating body.
【図１】本発明の第１の実施例を示す断面図。FIG. 1 is a sectional view showing a first embodiment of the present invention.
【図２】図１の振動体の正面図。FIG. 2 is a front view of the vibrator shown in FIG.
【図３】従来の振動波モータの断面図。FIG. 3 is a sectional view of a conventional vibration wave motor.
【図４】振動波モータのステータを示し、（ａ）は電極
構成を示す図、（ｂ）はステータの展開側面図。4A and 4B show a stator of a vibration wave motor, FIG. 4A is a diagram showing an electrode configuration, and FIG. 4B is a developed side view of the stator.
【図５】図３の振動波モータの振動体を示す正面図。5 is a front view showing a vibrating body of the vibration wave motor of FIG.
【図６】図３の振動波モータの圧縮バネ部材の正面図。6 is a front view of a compression spring member of the vibration wave motor of FIG.
【図７】第１の実施例の変形例を示す振動体の正面図。FIG. 7 is a front view of a vibrating body showing a modification of the first embodiment.
【図８】第２の実施例を示す断面図。FIG. 8 is a sectional view showing a second embodiment.
【図９】図８の振動波モータの振動体の正面図。9 is a front view of a vibrating body of the vibration wave motor of FIG.
【図１０】第２の実施例の第１変形例を示す振動体の正
面図。FIG. 10 is a front view of a vibrating body showing a first modification of the second embodiment.
【図１１】第２の実施例の第２変形例を示す振動体の正
面図。FIG. 11 is a front view of a vibrating body showing a second modification of the second embodiment.
【図１２】第３の実施例を示す断面図。FIG. 12 is a sectional view showing a third embodiment.
【図１３】図１２の振動波モータの振動体の正面図。13 is a front view of a vibrating body of the vibration wave motor of FIG.
【図１４】図１２の振動波モータの固定部材の正面図。14 is a front view of a fixing member of the vibration wave motor of FIG.
１…圧電素子 ２，２２，３２，４２，５２，６２，７２…振動体 ３，２３，３３，４３…筐体 ５…支持体 ６…摺動体 ７…移動体 ８…筐体カバー DESCRIPTION OF SYMBOLS 1 ... Piezoelectric element 2, 22, 32, 42, 52, 62, 72 ... Vibrating body 3, 23, 33, 43 ... Housing 5 ... Supporting body 6 ... Sliding body 7 ... Moving body 8 ... Housing cover
Claims (5)
される複数個の突起を有すると共に接触面の内径側の中
立面上に複数個の取付孔或は取付ネジを有する振動体
に、励起されるべき振動数の波長（λ）に対しλ／４の
奇数倍のずれがある二つの駆動用電気−機械エネルギー
変換素子群を配列固着すると共に、該二つの駆動用電気
−機械エネルギー変換素子群の中間に二つのそれぞれ駆
動用電気−機械エネルギー変換素子に対応する振動検出
用電気−機械エネルギー変換素子を配列固着したステー
タを備える振動波モータにおいて、 前記ステータを鏡面対称に構成したことを特徴とする振
動波モータ。1. A vibrating body having a plurality of protrusions formed by slits on a contact surface with a moving body and having a plurality of mounting holes or mounting screws on a neutral surface on an inner diameter side of the contact surface, Two driving electro-mechanical energy conversion element groups having an offset of an odd multiple of λ / 4 with respect to the wavelength (λ) of the frequency to be excited are arrayed and fixed, and the two driving electro-mechanical energy conversion is performed. In a vibration wave motor including a stator in which two vibration detection electro-mechanical energy conversion elements corresponding to respective driving electro-mechanical energy conversion elements are arranged and fixed in the middle of the element group, the stator is mirror-symmetrical. Characteristic vibration wave motor.
機械エネルギー変換素子の配置及び極性が鏡面対称であ
ることを特徴とする請求項１の振動波モータ。2. Electricity for each drive and vibration detection, etc.
The vibration wave motor according to claim 1, wherein the arrangement and the polarities of the mechanical energy conversion elements are mirror-symmetrical.
がλ／２あたり２の整数倍（２，４，６…）であること
を特徴とする請求項１の振動波モータ。3. The vibration wave motor according to claim 1, wherein the number of the plurality of protrusions on the contact surface of the vibrating body is an integral multiple of 2 per λ / 2 (2, 4, 6, ...).
の複数個の取付孔或は取付ネジの数が２の整数倍（２，
４，６…）であることを特徴とする請求項１の振動波モ
ータ。4. The number of a plurality of mounting holes or mounting screws on the neutral surface on the inner diameter side of the contact surface of the vibrating body is an integer multiple of 2 (2.
4, 6 ...), The vibration wave motor according to claim 1, wherein
置に前記二つの振動検出用電気−機械エネルギー変換素
子の中央位置及び前記振動体の接触面の内径側の中立面
上の複数個の取付孔或は取付ネジを合致させたことを特
徴とする請求項１の振動波モータ。5. A center position of the two electro-mechanical energy conversion elements for vibration detection at a slit position forming a protrusion of the vibrating body and a plurality of neutral surface of an inner diameter side of a contact surface of the vibrating body. The vibration wave motor according to claim 1, wherein the mounting holes or the mounting screws are matched.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5225530A JPH0779581A (en) | 1993-09-10 | 1993-09-10 | Vibration-wave motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5225530A JPH0779581A (en) | 1993-09-10 | 1993-09-10 | Vibration-wave motor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0779581A true JPH0779581A (en) | 1995-03-20 |
Family
ID=16830750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5225530A Pending JPH0779581A (en) | 1993-09-10 | 1993-09-10 | Vibration-wave motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0779581A (en) |
-
1993
- 1993-09-10 JP JP5225530A patent/JPH0779581A/en active Pending
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