JPH0777632A - Photodetection module - Google Patents
Photodetection moduleInfo
- Publication number
- JPH0777632A JPH0777632A JP20736593A JP20736593A JPH0777632A JP H0777632 A JPH0777632 A JP H0777632A JP 20736593 A JP20736593 A JP 20736593A JP 20736593 A JP20736593 A JP 20736593A JP H0777632 A JPH0777632 A JP H0777632A
- Authority
- JP
- Japan
- Prior art keywords
- light receiving
- optical fiber
- receiving element
- optical
- receiving module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Optical Couplings Of Light Guides (AREA)
Abstract
Description
【０００１】[0001]
【技術分野】本発明は、受光モジュールに関し、より詳
細には、光通信などに用いる光伝送モジュールに関す
る。例えば、光通信，光情報処理，光インターコネクシ
ョンに適用されるものである。TECHNICAL FIELD The present invention relates to a light receiving module, and more particularly to an optical transmission module used for optical communication and the like. For example, it is applied to optical communication, optical information processing, and optical interconnection.
【０００２】[0002]
【従来技術】本発明に係る従来技術を記載した公知文献
としては「多チャンネルＬＤ，ＰＤアレイモジュールの
試作」（守谷 薫 外３名，１９９２年電子情報通信学
会春季大会、Ｃ−２６９，Ｐ４−３１１）に光モジュー
ルが提案されている。この文献のものは、光素子固定用
部材の側面にＰＤを実装し、シリコンＶ溝上に固定され
たファイバとレンズを介して配置され、調整固定用ブロ
ックを用いて光軸を調整された後固定する構造を有する
ものである。2. Description of the Related Art As a publicly known document describing the prior art of the present invention, "multi-channel LD, PD array module prototype" (Kaoru Moriya 3 persons, 1992 IEICE Spring Conference, C-269, P4-). 311) proposed an optical module. In this document, a PD is mounted on the side surface of a member for fixing an optical element, the PD is arranged via a lens and a lens fixed on a silicon V groove, and the optical axis is adjusted by using an adjusting and fixing block and then fixed. It has a structure that
【０００３】図５は、前記文献に記載されている光モジ
ュール（ＰＤアレイモジュール）の従来例を示す図で、
図中、３１はキャリア、３２はレンズアレイ、３３はテ
ープファイバ、３４はＰＤアレイ、３５は調整固定用ブ
ロック、３６はＳｉＶ溝ファバ整列部材である。ファイ
バ３３は、シリコンの異方性エッチングにて等間隔に形
成されたＶ溝で精密に配列している。また、レンズアレ
イ３２は、マイクロレンズをモノリシックに集積化した
レンズアレイを用いている。FIG. 5 is a view showing a conventional example of the optical module (PD array module) described in the above document,
In the figure, 31 is a carrier, 32 is a lens array, 33 is a tape fiber, 34 is a PD array, 35 is an adjusting and fixing block, and 36 is a SiV groove fiber aligning member. The fibers 33 are precisely arranged in V grooves formed at equal intervals by anisotropic etching of silicon. The lens array 32 uses a lens array in which microlenses are monolithically integrated.
【０００４】本モジュールの特徴は以下のとおりであ
る。 広トレランス結合系；（ＬＤ・レンズ）ＶＳ（ファイ
バ）調整固定のトレランス特性は、ＬＤとファイバの直
接結合と比較して結合損失及びトレランスの両面で大幅
な改善が成されている。 簡易調整固定；スペーサ等を使用してＺ軸（光軸方
向）は無調整とし、Ｘ，Ｙ軸のみ調整を行なっている。 レーザ溶接固定；主要固定箇所は、レーザ溶接により
信頼性の向上を図っている。The features of this module are as follows. Wide tolerance coupling system; (LD / lens) VS (fiber) adjustment and fixed tolerance characteristics are significantly improved in terms of both coupling loss and tolerance compared with direct coupling between LD and fiber. Simple adjustment and fixing; Z axis (optical axis direction) is not adjusted by using a spacer and only X and Y axes are adjusted. Laser welding fixation: Laser welding is used to improve reliability at main fixing points.
【０００５】しかしながら、前述したような従来の光モ
ジュールにおいて、光素子と光ファイバとを調整ブロッ
ク上に個別に組み上げるような構成では、光軸調整をモ
ジュールごとに個別に行う必要があり、またモジュール
自体が大きくなってしまうなどの問題点がある。However, in the conventional optical module as described above, in the structure in which the optical element and the optical fiber are individually assembled on the adjustment block, it is necessary to perform the optical axis adjustment individually for each module, and There is a problem that the size itself becomes large.
【０００６】[0006]
【目的】本発明は、上述のごとき実情に鑑みてなされた
もので、小型で光軸調整の容易な高性能な受光モジュー
ルを提供することを目的としてなされたものである。[Object] The present invention has been made in view of the above circumstances, and an object thereof is to provide a high-performance light receiving module which is small in size and whose optical axis can be easily adjusted.
【０００７】[0007]
【構成】本発明は、上記目的を達成するために、（１）
少なくとも１つ以上の光ファイバと、光ファイバ固定機
能と光路変換機能を有する溝を形成した光ファイバ保持
部材と、少なくとも１つ以上の受光素子を形成した受光
素子形成部材とからなり、前記光ファイバからの出射光
を前記光ファイバ保持部材に設けた反射機能を有する加
工面により光路変換した後、前記受光素子の受光部に効
率よく入射するように位置関係を調整した受光素子形成
部材を配置し、前記光ファイバ保持部材と張り合わせて
構成したこと、更には、（２）前記光路変換機能を有す
る光ファイバ保持部材に所定の結晶方位を有する結晶基
板を用い、異方性エッチング手段及び薄膜形成手段を用
いて光ファイバ固定用溝と反射膜を形成したこと、更に
は、（３）前記受光素子形成部材に受光素子を設けた結
晶基板を用い、該結晶基板上に光ファイバ位置合わせ用
溝を異方性エッチング手段により設けたこと、更には
（４）前記受光素子形成部材に多層結晶基板を用いて受
光素子を設けたこと、更には、（５）前記光ファイバの
出射端から受光面まで屈折率がファイバの屈折率と概略
一致する透明物質で充填したこと、更には、（６）端面
にレンズ機能を有する光ファイバを用いたこと、更に
は、（７）前記受光素子の受光面に単層もしくは多層膜
を形成したこと、更には（８）所定の結晶方位を有する
結晶基板上に、異方性エッチング手段を用いた基板を型
に複製手段を用いて作製した樹脂基板を用いて光ファイ
バ固定用溝を形成した後、通常の薄膜形成手段を用いて
反射膜を形成した樹脂基板を前記光ファイバ保持基板に
用いたことを特徴としたものである。以下、本発明の実
施例に基づいて説明する。In order to achieve the above object, the present invention provides (1)
The optical fiber comprises at least one optical fiber, an optical fiber holding member having a groove having an optical fiber fixing function and an optical path changing function, and a light receiving element forming member having at least one light receiving element. After the optical path is changed by the processed surface having a reflection function provided on the optical fiber holding member, the light emitted from the optical fiber holding member is provided with a light receiving element forming member whose positional relationship is adjusted so as to efficiently enter the light receiving portion of the light receiving element. The optical fiber holding member is bonded to the optical fiber holding member, and (2) the optical fiber holding member having the optical path changing function uses a crystal substrate having a predetermined crystal orientation, and anisotropic etching means and thin film forming means are used. The optical fiber fixing groove and the reflection film are formed by using, and (3) using a crystal substrate provided with a light receiving element in the light receiving element forming member, An optical fiber alignment groove is provided on the crystal substrate by anisotropic etching means, and further, (4) a light receiving element is provided on the light receiving element forming member using a multilayer crystal substrate, and further, (5) ) A transparent material having a refractive index substantially equal to the refractive index of the fiber is filled from the emitting end to the light receiving surface of the optical fiber, and (6) an optical fiber having a lens function is used for the end surface, (7) A single layer or a multi-layer film is formed on the light-receiving surface of the light-receiving element, and (8) a substrate using anisotropic etching means is duplicated on a crystal substrate having a predetermined crystal orientation. After forming an optical fiber fixing groove using a resin substrate manufactured by using a means, a resin substrate on which a reflection film is formed by using an ordinary thin film forming means is used as the optical fiber holding substrate. It is a thing. Hereinafter, description will be given based on examples of the present invention.
【０００８】図１（ａ),(ｂ）は、本発明による受光モ
ジュールの一実施例を説明するための構成図で、図
（ａ）は断面図、図（ｂ）は平面図である。図中、１は
受光モジュール、２は光ファイバ保持部材、３は受光素
子形成部材、４は光ファイバ、５はファイバ固定用溝、
６は反射面、７は受光素子、８は電極である。本発明の
小型受光モジュール１では、少なくとも１つ以上の光フ
ァイバ４と、ファイバ固定機能と光路変換機能を有する
溝５を形成した部材２と、受光素子形成部材３とからな
り、前記光ファイバ４からの出射光を前記部材上に設け
た反射機能を有する加工面６により光路変換した後、受
光素子７の受光部に効率よく入射するよう位置関係を調
整した受光素子形成部材３を精度よく配置し、前記光フ
ァイバ保持部材と張り合わせた構造を有する。1 (a) and 1 (b) are configuration diagrams for explaining one embodiment of a light receiving module according to the present invention, FIG. 1 (a) is a sectional view, and FIG. 1 (b) is a plan view. In the figure, 1 is a light receiving module, 2 is an optical fiber holding member, 3 is a light receiving element forming member, 4 is an optical fiber, 5 is a fiber fixing groove,
Reference numeral 6 is a reflecting surface, 7 is a light receiving element, and 8 is an electrode. The small-sized light receiving module 1 of the present invention comprises at least one or more optical fibers 4, a member 2 having a groove 5 having a fiber fixing function and an optical path changing function, and a light receiving element forming member 3. The light receiving element forming member 3 whose positional relationship is adjusted so as to be efficiently incident on the light receiving portion of the light receiving element 7 is arranged with high precision after the output light from the optical path is converted by the processed surface 6 having a reflection function provided on the member. However, it has a structure in which it is bonded to the optical fiber holding member.
【０００９】図２（ａ）〜（ｆ）は、受光モジュールの
作製方法を説明するための図で、図中、９は位置決め用
溝、１０はマスク開口部、１１は酸化膜、１２は反射膜
で、その他、図１と同じ作用をする部分は同一の符号を
付してある。本実施例では安価なシステムが構成可能な
光源の波長が１μｍ以下の短波長光通信用モジュールに
ついて説明する。また、本実施例では光ファイバ固定用
溝５と受光素子側の位置決め用溝をエッチングにより形
成するために、結晶基板に１００面を有するｎ型のＳｉ
結晶基板をもちいている。2 (a) to 2 (f) are views for explaining a method of manufacturing a light receiving module, in which 9 is a positioning groove, 10 is a mask opening, 11 is an oxide film, and 12 is a reflection. Other parts of the film that have the same function as in FIG. 1 are denoted by the same reference numerals. In this embodiment, a short-wavelength optical communication module whose light source has a wavelength of 1 μm or less and which can constitute an inexpensive system will be described. Further, in this embodiment, since the optical fiber fixing groove 5 and the light receiving element side positioning groove are formed by etching, an n-type Si having 100 faces on the crystal substrate is formed.
It uses a crystal substrate.
【００１０】まず、光ファイバ固定用溝５は、水蒸気酸
化等を用いて結晶表面に酸化膜１１を形成後、フォトリ
ソグラフィの手法及びエッチングにより酸化膜１１に異
方性エッチング用の長方形のマスク開口部１０を形成し
て（図（ａ））、ＫＯＨやＥＰＷ（エチレンジアミンピ
テカテロール水溶液）などのエッチング液を用いて異方
性エッチングを行い、光ファイバ固定用溝５を作製する
（図（ｂ））。この時、マスク開口を所定の結晶方位に
することにより、短辺のエッチング面６と基板とのなす
角がほぼ５５度となる。First, in the optical fiber fixing groove 5, after forming an oxide film 11 on the crystal surface by using steam oxidation or the like, a rectangular mask opening for anisotropic etching is formed in the oxide film 11 by a photolithography method and etching. The portion 10 is formed (FIG. (A)), and anisotropic etching is performed using an etching solution such as KOH or EPW (ethylenediamine pitecaterol aqueous solution) to produce the optical fiber fixing groove 5 (FIG. (B). )). At this time, the angle formed between the etching surface 6 of the short side and the substrate becomes approximately 55 degrees by setting the mask opening in a predetermined crystal orientation.
【００１１】次に、この基板に通常の蒸着法によりＡｕ
の薄膜を蒸着して、このエッチング面に反射膜１２を形
成後、絶縁のための酸化膜をスパッタ等により形成して
光ファイバ４を固定することにより光ファイバ保持部材
２を作製する。一方、受光素子形成部材３は、前記酸化
膜形成方法により酸化膜を形成したｎ型Ｓｉ結晶基板に
フォトリソグラフィの手法及びエッチングによりほぼ正
方形の開口部を設け、前記開口部からボロン（Ｂ）を選
択的にイオン注入してｐ型の領域７を形成してフォトダ
イオード（ＰＤ）を作製した（図（ｄ））後、電極パタ
ーン８を基板表裏面に形成して受光素子形成部材３を作
製する（図（ｅ））。Next, Au is formed on this substrate by a usual vapor deposition method.
After depositing a thin film of, the reflective film 12 is formed on the etched surface, an oxide film for insulation is formed by sputtering or the like, and the optical fiber 4 is fixed, whereby the optical fiber holding member 2 is manufactured. On the other hand, the light-receiving element forming member 3 is provided with a substantially square opening on the n-type Si crystal substrate on which an oxide film is formed by the above-mentioned oxide film forming method by a photolithography method and etching, and a boron (B) is formed from the opening. After selectively implanting ions to form a p-type region 7 to manufacture a photodiode (PD) (FIG. (D)), an electrode pattern 8 is formed on the front and back surfaces of the substrate to manufacture the light receiving element forming member 3. (Figure (e)).
【００１２】また、この時、光ファイバ保持部材２との
アライメント精度を確保するために、位置決め用溝９
を、電極形成前に酸化膜をマスクに上記異方性エッチン
グの方法で形成しても良い（図（ｆ））。本発明による
受光モジュールは、前記光ファイバ保持部材と受光素子
形成部材とを光ファイバからの出射光が効率よく受光素
子に入射するように、位置調整後に張り合わせるように
対向させて接着等により保持する。At this time, in order to secure the alignment accuracy with the optical fiber holding member 2, the positioning groove 9 is provided.
May be formed by the above-mentioned anisotropic etching method using an oxide film as a mask before forming the electrodes (FIG. (F)). In the light receiving module according to the present invention, the optical fiber holding member and the light receiving element forming member are held facing each other so that the light emitted from the optical fiber is efficiently incident on the light receiving element so that they are bonded to each other after the position adjustment. To do.
【００１３】図３（ａ),(ｂ）は、本発明による受光モ
ジュールの他の実施例を示す図で、図（ａ）は断面図、
図（ｂ）は平面図である。図中の参照番号は図１と同様
である。図１に示す実施例において、受光モジュール
は、光ファイバ保持部材２と受光素子形成部材３とを光
ファイバからの出射光が効率よく受光素子に入射するよ
うに、位置調後整に張り合わせるように対向させて接着
等により保持しているが、この際、受光素子側に位置決
め用溝９が形成されている場合には、該位置決め用溝９
に光ファイバ４を沿わせることにより位置決めがなさ
れ、受光モジュールの組付時の位置決めを無調整にする
ことが可能となる。3 (a) and 3 (b) are views showing another embodiment of the light receiving module according to the present invention. FIG. 3 (a) is a sectional view,
Figure (b) is a plan view. Reference numerals in the figure are the same as those in FIG. In the embodiment shown in FIG. 1, in the light receiving module, the optical fiber holding member 2 and the light receiving element forming member 3 are bonded to each other so that the light emitted from the optical fiber is efficiently incident on the light receiving element. And is held by adhesion or the like. At this time, when the positioning groove 9 is formed on the light receiving element side, the positioning groove 9 is formed.
Positioning is performed by arranging the optical fiber 4 along the optical fiber 4, and it is possible to adjust the positioning when the light receiving module is assembled.
【００１４】図４（ａ)〜(ｄ）は、本発明による受光モ
ジュールの更に他の実施例を示す図で、図中、２１は先
球光ファイバ、２２は熱硬化型透明樹脂、２３は多層光
学薄膜、２４はｎ型結晶薄膜で、その他、図１と同じ作
用をする部分は同一の符号を付してある。図（ａ）のよ
うに、光ファイバの先端部にレンズ機能を付加した先球
光ファイバ２１を用いて出射光に指向性を持たせたり、
図（ｂ）のように、光ファイバ先端部から受光面にいた
る空間を固定もかねて屈折率がファイバの屈折率と概略
一致する熱硬化型透明樹脂２２により充填して固定する
ことにより、ファイバ４からの出射光束の広がりを抑え
ることも可能である。FIGS. 4A to 4D are views showing still another embodiment of the light receiving module according to the present invention, in which 21 is a front optical fiber, 22 is a thermosetting transparent resin, and 23 is a transparent resin. The multilayer optical thin film, 24 is an n-type crystal thin film, and other parts having the same functions as those in FIG. As shown in FIG. 3A, the front end of the optical fiber is provided with a lens function to give a directivity to the emitted light,
As shown in FIG. 2B, the space from the tip of the optical fiber to the light-receiving surface is fixed and filled with the thermosetting transparent resin 22 whose refractive index substantially matches the refractive index of the fiber, and fixed. It is also possible to suppress the spread of the light flux emitted from the.
【００１５】また、受光素子部にも種々の構成が可能
で、例えば図（ｃ）のように、受光面に多層光学薄膜２
３を形成して波長選択性を持たせるなどの能動的な機能
を設けたり、図（ｄ）のように、結晶基板にｎ型板表面
にｉもしくは基板より低濃度のｎ型結晶薄膜２４を有す
る基板を用い、ＰＤ部をＰＩＮ構造にして高速応答可能
な受光素子とすることも可能である。さらに、受光素子
側の結晶基板にＩｎＰ結晶基板を用いて長波長用受光モ
ジュールを作製することも可能であり、また光ファイバ
保持部材も前記異方性エッチングで溝を形成したＳｉ結
晶基板を型に、通常の複製技術を用いて溝を転写した樹
脂基板に蒸着法などで反射面を形成した基板を用いても
良い。Further, the light receiving element portion can also have various configurations. For example, as shown in FIG. 3C, the multilayer optical thin film 2 is formed on the light receiving surface.
3 is provided with an active function such as having wavelength selectivity, or as shown in FIG. 3D, an n-type crystal thin film 24 of i or a lower concentration than the substrate is formed on the surface of the n-type plate on the crystal substrate. It is also possible to make the PD portion a PIN structure and use it as a light receiving element capable of high-speed response using the substrate. Further, it is possible to fabricate a long wavelength light receiving module by using an InP crystal substrate for the crystal substrate on the light receiving element side, and the optical fiber holding member is also a Si crystal substrate having a groove formed by the anisotropic etching. In addition, a substrate in which a reflection surface is formed by a vapor deposition method or the like may be used on a resin substrate on which a groove is transferred by using an ordinary duplication technique.
【００１６】[0016]
【効果】以上の説明から明らかなように、本発明による
と、以下のような効果がある。 （１）請求項１に対応する効果；２つの機能部材を張り
合わせ構成にすることにより、小型で光軸調整の容易な
高性能な受光モジュールを提供する事が可能である。 （２）請求項２に対応する効果；精度良く溝及び反射面
を形成することができ、生産性良く受光モジュールを提
供することが可能である。 （３）請求項３に対応する効果；各部材を精度良く位置
合わせすることができ、組付け時の工程を簡単化するこ
とが可能である。 （４）請求項４に対応する効果；各部材を精度良く位置
合わせすることができ、組付け時の工程を簡単化するこ
とが可能であるとともに高性能な受光素子を設けること
が可能である。 （５）請求項５に対応する効果；各部材の組付時の補強
効果とともにファイバからの出射光の広がり角を小さく
することが可能で、受光面での光束の広がりを抑え、効
率よく光信号を受信することが可能である。 （６）請求項６に対応する効果；光ファイバからの出射
光に指向性を付加することができ、効率よく光信号を受
信することが可能である。 （７）構成７に対応する効果；保護膜や波長選択機能な
どの光学的な機能薄膜を受光面に付加することができ信
頼性の高い高性能な受光モジュールを提供することが可
能である。 （８）構成８に対応する効果；安価で生産性の良い受光
モジュールを提供することが可能である。As is apparent from the above description, the present invention has the following effects. (1) Effect corresponding to claim 1; It is possible to provide a small-sized and high-performance light-receiving module in which the optical axis can be easily adjusted by bonding two functional members to each other. (2) Effect corresponding to claim 2; It is possible to form the groove and the reflecting surface with high accuracy, and it is possible to provide the light receiving module with high productivity. (3) Effect corresponding to claim 3; It is possible to align each member with high accuracy, and it is possible to simplify the assembly process. (4) Effect corresponding to claim 4; each member can be accurately aligned, the process at the time of assembly can be simplified, and a high-performance light receiving element can be provided. . (5) The effect corresponding to claim 5; it is possible to reduce the divergence angle of the light emitted from the fiber together with the reinforcing effect at the time of assembling each member, and to suppress the divergence of the light flux on the light-receiving surface to efficiently emit the light. It is possible to receive a signal. (6) Effect corresponding to claim 6; Directivity can be added to the light emitted from the optical fiber, and an optical signal can be efficiently received. (7) Effect corresponding to the configuration 7; It is possible to provide a highly reliable and high-performance light receiving module because an optical functional thin film such as a protective film and a wavelength selection function can be added to the light receiving surface. (8) Effects corresponding to the configuration 8; It is possible to provide a light-receiving module that is inexpensive and has good productivity.
【図１】 本発明による受光モジュールの一実施例を説
明するための構成図である。FIG. 1 is a configuration diagram for explaining an embodiment of a light receiving module according to the present invention.
【図２】 本発明による受光モジュールの作製方法を説
明するための図である。FIG. 2 is a diagram for explaining a method of manufacturing a light receiving module according to the present invention.
【図３】 本発明による受光モジュールの他の実施例を
示す図である。FIG. 3 is a view showing another embodiment of the light receiving module according to the present invention.
【図４】 本発明による受光モジュールの更に他の実施
例を示す図である。FIG. 4 is a view showing still another embodiment of the light receiving module according to the present invention.
【図５】 従来の受光モジュールの構成図である。FIG. 5 is a configuration diagram of a conventional light receiving module.
１…受光モジュール、２…光ファイバ保持部材、３…受
光素子形成部材、４…光ファイバ、５…光ファイバ固定
溝、６…反射面、７…受光素子、８…電極。DESCRIPTION OF SYMBOLS 1 ... Light receiving module, 2 ... Optical fiber holding member, 3 ... Light receiving element forming member, 4 ... Optical fiber, 5 ... Optical fiber fixing groove, 6 ... Reflecting surface, 7 ... Light receiving element, 8 ... Electrode.
Claims (6)
ファイバ固定機能と光路変換機能を有する溝を形成した
光ファイバ保持部材と、少なくとも１つ以上の受光素子
を形成した受光素子形成部材とからなり、前記光ファイ
バからの出射光を前記光ファイバ保持部材に設けた反射
機能を有する加工面により光路変換した後、前記受光素
子の受光部に効率よく入射するように位置関係を調整し
た受光素子形成部材を配置し、前記光ファイバ保持部材
と張り合わせて構成したことを特徴とする受光モジュー
ル。1. An optical fiber holding member having at least one optical fiber, a groove having an optical fiber fixing function and an optical path changing function, and a light receiving element forming member having at least one light receiving element. The light receiving element having the positional relationship adjusted so as to efficiently enter the light receiving portion of the light receiving element after the optical path of the emitted light from the optical fiber is changed by the processing surface provided on the optical fiber holding member having a reflection function. A light receiving module, wherein a forming member is disposed and the optical fiber holding member is laminated.
持部材に所定の結晶方位を有する結晶基板を用い、異方
性エッチング手段及び薄膜形成手段を用いて光ファイバ
固定用溝と反射膜を形成したことを特徴とする請求項１
記載の受光モジュール。2. A groove for fixing an optical fiber and a reflection film are formed by using an anisotropic etching means and a thin film forming means by using a crystal substrate having a predetermined crystal orientation as the optical fiber holding member having the optical path changing function. Claim 1 characterized by the above.
The light receiving module described.
た結晶基板を用い、該結晶基板上に光ファイバ位置合わ
せ用溝を異方性エッチング手段により設けたことを特徴
とする請求項１記載の受光モジュール。3. A crystal substrate provided with a light receiving element as the light receiving element forming member, and an optical fiber alignment groove is provided on the crystal substrate by anisotropic etching means. Light receiving module.
用いて受光素子を設けたことを特徴とする請求項１記載
の受光モジュール。4. The light receiving module according to claim 1, wherein the light receiving element forming member is provided with a light receiving element by using a multilayer crystal substrate.
屈折率がファイバの屈折率と概略一致する透明物質で充
填したことを特徴とする請求項１記載の受光モジュー
ル。5. The light receiving module according to claim 1, wherein a transparent material having a refractive index substantially equal to that of the fiber is filled from the emitting end of the optical fiber to the light receiving surface.
用いたことを特徴とする請求項１記載の受光モジュー
ル。6. The light receiving module according to claim 1, wherein an optical fiber having a lens function on the end face is used.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20736593A JP3202425B2 (en) | 1993-07-12 | 1993-08-23 | Light receiving module |
| US08/272,734 US5555333A (en) | 1993-07-12 | 1994-07-11 | Optical module and a fabrication process thereof |
| US08/670,015 US5759453A (en) | 1993-07-12 | 1996-06-25 | Optical module and a fabrication process thereof |
| US08/950,733 US5853626A (en) | 1993-07-12 | 1997-10-15 | Optical module and a fabrication process thereof |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17172693 | 1993-07-12 | ||
| JP5-171726 | 1993-07-12 | ||
| JP20736593A JP3202425B2 (en) | 1993-07-12 | 1993-08-23 | Light receiving module |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0777632A true JPH0777632A (en) | 1995-03-20 |
| JP3202425B2 JP3202425B2 (en) | 2001-08-27 |
Family
ID=26494350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20736593A Expired - Fee Related JP3202425B2 (en) | 1993-07-12 | 1993-08-23 | Light receiving module |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3202425B2 (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09318845A (en) * | 1996-05-24 | 1997-12-12 | Ricoh Co Ltd | Optical transmission module |
| US6132107A (en) * | 1996-09-30 | 2000-10-17 | Nec Corporation | Light-receiving module and method for fabricating a same |
| EP1402301A1 (en) * | 2001-06-30 | 2004-03-31 | Mergeoptics GmbH | Device for positioning an optical fibre |
| JP2004333590A (en) * | 2003-04-30 | 2004-11-25 | Fujikura Ltd | Optical connector |
| JP2006285232A (en) * | 2005-04-01 | 2006-10-19 | Taida Electronic Ind Co Ltd | Optical transceiver module |
| JP2006301610A (en) * | 2005-03-25 | 2006-11-02 | Fuji Xerox Co Ltd | Optical coupling device |
| WO2014073297A1 (en) * | 2012-11-08 | 2014-05-15 | 株式会社ブイ・テクノロジー | Optical interconnection device |
| WO2014109158A1 (en) * | 2013-01-11 | 2014-07-17 | 株式会社ブイ・テクノロジー | Optical interconnection device |
| WO2017122809A1 (en) * | 2016-01-14 | 2017-07-20 | 株式会社フジクラ | Photoelectric conversion module and active optical cable |
| CN112904495A (en) * | 2019-12-04 | 2021-06-04 | 讯芯电子科技（中山）有限公司 | Optical module device |
-
1993
- 1993-08-23 JP JP20736593A patent/JP3202425B2/en not_active Expired - Fee Related
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09318845A (en) * | 1996-05-24 | 1997-12-12 | Ricoh Co Ltd | Optical transmission module |
| US6132107A (en) * | 1996-09-30 | 2000-10-17 | Nec Corporation | Light-receiving module and method for fabricating a same |
| KR100306688B1 (en) * | 1996-09-30 | 2001-12-17 | 가네꼬 히사시 | Light receiving module and its manufacturing method |
| EP1402301A1 (en) * | 2001-06-30 | 2004-03-31 | Mergeoptics GmbH | Device for positioning an optical fibre |
| JP2004333590A (en) * | 2003-04-30 | 2004-11-25 | Fujikura Ltd | Optical connector |
| JP2006301610A (en) * | 2005-03-25 | 2006-11-02 | Fuji Xerox Co Ltd | Optical coupling device |
| JP2006285232A (en) * | 2005-04-01 | 2006-10-19 | Taida Electronic Ind Co Ltd | Optical transceiver module |
| WO2014073297A1 (en) * | 2012-11-08 | 2014-05-15 | 株式会社ブイ・テクノロジー | Optical interconnection device |
| WO2014109158A1 (en) * | 2013-01-11 | 2014-07-17 | 株式会社ブイ・テクノロジー | Optical interconnection device |
| CN104919731A (en) * | 2013-01-11 | 2015-09-16 | 株式会社V技术 | Optical interconnection device |
| WO2017122809A1 (en) * | 2016-01-14 | 2017-07-20 | 株式会社フジクラ | Photoelectric conversion module and active optical cable |
| JP2017125943A (en) * | 2016-01-14 | 2017-07-20 | 株式会社フジクラ | Photoelectric conversion module and active optical cable |
| CN112904495A (en) * | 2019-12-04 | 2021-06-04 | 讯芯电子科技（中山）有限公司 | Optical module device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3202425B2 (en) | 2001-08-27 |
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