JPH09101435A - Self-matching type small-sized optical module - Google Patents
Self-matching type small-sized optical moduleInfo
- Publication number
- JPH09101435A JPH09101435A JP25904095A JP25904095A JPH09101435A JP H09101435 A JPH09101435 A JP H09101435A JP 25904095 A JP25904095 A JP 25904095A JP 25904095 A JP25904095 A JP 25904095A JP H09101435 A JPH09101435 A JP H09101435A
- Authority
- JP
- Japan
- Prior art keywords
- optical fiber
- light receiving
- optical
- receiving element
- holding member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Optical Couplings Of Light Guides (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、光モジュールに関
し、より詳細には、光通信などに用いる光伝送モジュー
ルに関する。例えば、光通信、光情報処理、光インター
コネクションに適用されるものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical module, and more particularly to an optical transmission module used for optical communication and the like. For example, it is applied to optical communication, optical information processing, and optical interconnection.
【０００２】[0002]
【従来の技術】従来の光変換機能を有する光モジュール
について記載した公知文献としては、例えば、特開平４
−２０８９０５号公報がある。この公報のものは、光変
換機能として異方性エッチングの手法により得られた半
導体基板に設けられた凹部の側面に露呈した結晶面を反
射面として用い、受光素子及び光導波素子とを精度よく
位置調整することにより小型モジュールを形成してい
る。2. Description of the Related Art As a known document describing an optical module having a conventional light converting function, for example, Japanese Patent Laid-Open No. Hei.
There is a publication of -208905. In this publication, the crystal plane exposed on the side surface of the concave portion provided in the semiconductor substrate obtained by the anisotropic etching method as the light conversion function is used as the reflection surface, and the light receiving element and the optical waveguide element are accurately measured. A small module is formed by adjusting the position.
【０００３】図７は、前記公報に記載の光モジュールの
構成図で、図７（Ａ）は反射器の拡大図、図７（Ｂ）は
反射器とファイバ及びＰＤ（フォトデイテクタ）との実
装方法を示す図である。Ｓｉ基板３１の表面に装着した
酸化膜３２に適当なマスク合わせ工程を経て溝を形成
し、異方性エッチングを行うと、反射面となる側面３
３，３４に｛１１１｝面が露呈した凹部３５が形成され
る。このようにして形成された反射器３９の表面に合わ
せマーカ３７を形成しておき、ＰＤ３８の受光面を下に
してフリップチップを接続する。反射器３９の表面の酸
化膜３２上には必要な電極配線３６を施してある。FIG. 7 is a block diagram of the optical module described in the above publication, FIG. 7 (A) is an enlarged view of a reflector, and FIG. 7 (B) shows the reflector and a fiber and a PD (photodetector). It is a figure which shows the mounting method. When a groove is formed in the oxide film 32 mounted on the surface of the Si substrate 31 through an appropriate mask aligning step and anisotropic etching is performed, the side surface 3 that becomes a reflective surface is formed.
A concave portion 35 having a {111} plane exposed is formed on each of 3, 34. The marker 37 is formed in advance on the surface of the reflector 39 thus formed, and the flip chip is connected with the light receiving surface of the PD 38 facing down. Necessary electrode wiring 36 is provided on the oxide film 32 on the surface of the reflector 39.
【０００４】反射器３９とファイバの接続は、ファイバ
コネクタ４０が利用でき、２本のピン４１を介してコネ
クタ同士を突き合わせることにより、２本のファイバを
簡便に接続するためのものでいるが、そのためピン４１
とファイバ端面４２との位置関係が精密に作製されてい
る。従ってこのピン４１でＳｉ基盤３１を挾み込み、適
当な方法で固定すれば、ファイバ端面４２と凹部３５と
の位置関係も精密に決まる。すなわち、このモジュール
では異方性エッチングなどの手法により、半導体基板に
設けられた凹部の結晶面を反射面として、光半導体素子
と光導波素子とを精度よく位置を調整し、光結合させて
いる。つまり、図７に示した従来技術のような方法で
は、各構成部品間の位置関係を高精度にする必要があり
組付け時の作業が繁雑になるなど生産性に問題が残る。A fiber connector 40 can be used to connect the reflector 39 to the fiber, and the two fibers are simply connected by abutting the connectors with each other through two pins 41. , So pin 41
The positional relationship between the fiber end face 42 and the fiber end face 42 is precisely manufactured. Therefore, by pinching the Si substrate 31 with the pin 41 and fixing it by an appropriate method, the positional relationship between the fiber end face 42 and the recess 35 can be precisely determined. That is, in this module, the optical semiconductor element and the optical waveguide element are precisely aligned and optically coupled by a method such as anisotropic etching using the crystal plane of the recess provided in the semiconductor substrate as a reflecting surface. . That is, in the method of the prior art shown in FIG. 7, it is necessary to make the positional relationship between the respective components highly accurate, and the work at the time of assembling becomes complicated, thus leaving a problem in productivity.
【０００５】また、本出願人は、先に、光ファイバと、
ファイバ固定機能と光路変換機能を有する溝とを形成し
たファイバ保持部材と、受光素子を形成した受光素子形
成部材とからなり、光ファイバからの出射光を前記ファ
イバ保持部材上に設けた光路変換機能を有する加工面に
より光路変換後、受光素子の受光部に効率よく入射する
ように位置関係を調整して配置された構成の光モジュー
ルを出願している（特願平６−９４１４４号、特願平５
−２０７３６５号、参照）。しかし、上記光モジュール
においても、ファイバ保持部材と受光素子形成部材との
精密な位置調整の必要性から、精密組付けや自己整合的
な位置決め用の加工の工程等を導入する必要があり、生
産性にまだ問題が残っている。Further, the present applicant has previously proposed that an optical fiber,
An optical path changing function provided with a fiber holding member having a fiber fixing function and a groove having an optical path changing function, and a light receiving element forming member having a light receiving element, wherein light emitted from an optical fiber is provided on the fiber holding member. An optical module having a configuration in which the positional relationship is adjusted so that the light is efficiently incident on the light-receiving portion of the light-receiving element after the optical path is changed by the processed surface having the optical axis is applied (Japanese Patent Application No. 6-94144, Japanese Patent Application No. 6-94144). Flat 5
-207365). However, even in the above optical module, it is necessary to introduce a process for precision assembly and self-aligning positioning, etc. from the necessity of precisely adjusting the position of the fiber holding member and the light receiving element forming member. There is still a problem with sex.
【０００６】[0006]
【発明が解決しようとする課題】本発明は、上述のごと
き問題に鑑みてなされたもので、光ファイバ端面を受光
素子に結合して光電変換を行う光モジュールにおいて、
受光性能を低下させることなく、光ファイバと受光素子
との位置合わせに精密な位置決めを不要とした作製の容
易な小型の光モジュールを提供することをその課題とす
る。SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and in an optical module for performing photoelectric conversion by coupling an end face of an optical fiber to a light receiving element,
An object of the present invention is to provide a small-sized optical module which is easy to manufacture and does not require precise positioning for alignment between an optical fiber and a light receiving element without degrading light receiving performance.
【０００７】[0007]
【課題を解決するための手段】請求項１の発明は、少な
くとも一つ以上の光ファイバと、該光ファイバの固定機
能と光路変換機能を有する溝と電極接続用パターンとを
形成した光ファイバ保持部材と、多数の受光素子をアレ
イ状に形成した受光素子形成部材とからなる光モジュー
ルにおいて、前記光ファイバ保持部材上に設けた光路変
換機能を有する前記溝の加工面により光路変換した後の
出射光の投射部分に前記受光素子の複数が位置するよう
に前記光ファイバ保持部材と前記受光素子形成部材を配
置し、かつ、前記電極接続用パターンは複数の前記受光
素子の電極を電気的に接続するように構成し、光モジュ
ールの性能を低下させることなく、光ファイバと受光素
子との位置合わせの精密な位置決めが不要とし、得られ
る電気出力を低下させることなくするようにするもので
ある。According to a first aspect of the present invention, there is provided an optical fiber holder having at least one optical fiber, a groove having an optical fiber fixing function and an optical path changing function, and an electrode connection pattern. In an optical module comprising a member and a light-receiving element forming member in which a large number of light-receiving elements are formed in an array, an output after the optical path is changed by the processed surface of the groove provided on the optical fiber holding member and having the optical path changing function. The optical fiber holding member and the light receiving element forming member are arranged so that a plurality of the light receiving elements are located in a projected portion of the emitted light, and the electrode connection pattern electrically connects the electrodes of the plurality of light receiving elements. With this configuration, it is possible to reduce the electrical output obtained without deteriorating the performance of the optical module and eliminating the need for precise positioning of the optical fiber and the light receiving element. It is intended to be without.
【０００８】請求項２の発明は、請求項１において、前
記光ファイバ固定用溝、光路変換機能としての反射膜、
及び、電極接続用パターンを形成した前記光ファイバ保
持部材は、結晶基板かガラス基板から、異方性もしくは
等方性のエッチング手段及び薄膜形成手段を用いて製造
され、光ファイバ保持用溝と光路変換部との位置関係が
高精度に作製されるようにするものである。According to a second aspect of the present invention, in the first aspect, the groove for fixing the optical fiber, the reflection film as an optical path changing function,
And, the optical fiber holding member on which the electrode connection pattern is formed is manufactured from a crystal substrate or a glass substrate by using anisotropic or isotropic etching means and thin film forming means, and the optical fiber holding groove and the optical path are formed. The positional relationship with the converter is made with high accuracy.
【０００９】請求項３の発明は、請求項１又は２におい
て、前記受光素子形成部材上に形成した多数の受光素子
の電極間、及び又は、前記受光素子の周辺部に凸部を設
け、光ファイバ保持部材と受光素子形成部材とを接触さ
せる際に電極接続用パターン部材が変形するが、その変
形部によって生じる不要な受光素子の電極との電気的接
続や、受光面への回り込みを防止するようにするもので
ある。According to a third aspect of the present invention, in the first or second aspect, a convex portion is provided between electrodes of a large number of light receiving elements formed on the light receiving element forming member and / or in a peripheral portion of the light receiving element. When the fiber holding member and the light receiving element forming member are brought into contact with each other, the electrode connecting pattern member is deformed, but it is possible to prevent unnecessary electrical connection with the electrode of the light receiving element and wraparound to the light receiving surface due to the deformed portion. To do so.
【００１０】請求項４の発明は、請求項１乃至３の何れ
かにおいて、前記光ファイバの先端に球面を有する光フ
ァイバを用い、光ファイバからの出射光の広がりを抑え
るようにするものである。According to a fourth aspect of the present invention, in any one of the first to third aspects, an optical fiber having a spherical surface at the tip of the optical fiber is used to suppress the spread of the light emitted from the optical fiber. .
【００１１】請求項５の発明は、請求項１乃至４の何れ
かにおいて、前記光ファイバの光出射端から受光素子面
までの空間に、屈折率が前記光ファイバのコア部の屈折
率と概略一致する透明な物質を充填し、光ファイバ保持
部材と受光素子形成部材との固定を行うと同時に、光フ
ァイバからの出射光の広がりを抑えるようにするもので
ある。According to a fifth aspect of the present invention, in any one of the first to fourth aspects, the refractive index is approximately the same as the refractive index of the core portion of the optical fiber in the space from the light emitting end of the optical fiber to the light receiving element surface. By filling a matching transparent substance, the optical fiber holding member and the light receiving element forming member are fixed, and at the same time, the spread of the light emitted from the optical fiber is suppressed.
【００１２】請求項６の発明は、請求項１乃至５の何れ
かにおいて、前記光ファイバ固定用溝の一部に前記光フ
ァイバの位置決め用の段差を設け、光ファイバ保持部材
に光ファイバを固定する際に、光路変換部との位置関係
を精度よく位置決めできるようにするものである。According to a sixth aspect of the present invention, in any one of the first to fifth aspects, a step for positioning the optical fiber is provided in a part of the optical fiber fixing groove, and the optical fiber is fixed to the optical fiber holding member. In doing so, the positional relationship with the optical path changing unit can be accurately positioned.
【００１３】[0013]
【発明の実施の形態】図１は、本発明の実施の形態の構
造を示す概略斜視図で、図２は図１における光ファイバ
と受光素子との結合方法を説明するための図で、図２
（Ａ）は受光素子形成部材の平面図、図２（Ｂ）は図１
における光モジュールの側面図である。1 is a schematic perspective view showing a structure of an embodiment of the present invention, and FIG. 2 is a diagram for explaining a method of coupling an optical fiber and a light receiving element in FIG. Two
FIG. 2A is a plan view of the light receiving element forming member, and FIG.
2 is a side view of the optical module in FIG.
【００１４】この実施の形態では、光ファイバ保持部材
１の基板として所定の結晶方位面（ここでは＜１００＞
面）を有するＳｉ結晶基板を用い、この基板上に、光フ
ァイバ固定機能として異方性エッチングの手法で作製し
た複数のＶ溝５（ここでは２つ）と、光路変換機能面と
してＶ溝５の側面の結晶面を結晶面そのままか、もしく
は、高反射率の金属膜等で被膜した光路反射部と、電極
接続用パターン４として通常のフォトリソグラフィーの
手法とリフトオフ法などによるパターニングの手法によ
り作製した金属パターンか、もしくは、その上に半田や
導電性接着剤やバンプで接触凸部を形成している。そし
て、この光ファイバ保持部材１の各Ｖ溝５に光ファイバ
３を所定の位置に接着剤等で固定して光ファイバ保持部
材１を作製している。In this embodiment, a predetermined crystal orientation plane (here <100> is used as the substrate of the optical fiber holding member 1).
Surface) is used, and a plurality of V-grooves 5 (here, two) formed by anisotropic etching as an optical fiber fixing function and a V-groove 5 as an optical path changing function surface are used on the substrate. The side surface of the crystal plane is formed by the crystal plane as it is, or by an optical path reflection part in which a metal film having a high reflectance is coated and an electrode connection pattern 4 by a normal photolithography method and a patterning method such as a lift-off method. The contact protrusions are formed on the metal pattern or on the metal pattern with solder, a conductive adhesive, or bumps. Then, the optical fiber 3 is fixed at a predetermined position in each V groove 5 of the optical fiber holding member 1 with an adhesive or the like to manufacture the optical fiber holding member 1.
【００１５】また、半導体結晶基板上に横幅が光ファイ
バ径に対し、同程度かそれ以下の大きさの多数の受光素
子６（例えば２種類のｎ型濃度を持つ層を有するＳｉ結
晶基板上に作製するＰｉｎ型のフォトダイオード等）を
Ｖ溝５の間隔に比し、近接させてアレイ状に形成された
受光素子形成部材２を作製している。そして、光ファイ
バ保持部材１を受光素子形成部材２の上面に配置する
と、受光素子面に対し光ファイバが平行に固定される光
モジュールとなり、光ファイバ３からの出射光を光ファ
イバ保持部材１上に設けた光路変換面により光路変換し
た後の投射光は、受光素子形成部材２に設けた複数の受
光素子６の受光面に入射するようになっている。ここ
に、一つの光に対する受光素子が複数になるため、一つ
の受光素子の電気出力があまり大きくないという場合も
ある。Further, a large number of light-receiving elements 6 having a width of the same or smaller than the optical fiber diameter on the semiconductor crystal substrate (for example, on a Si crystal substrate having a layer having two kinds of n-type concentrations) The light receiving element forming member 2 formed in an array shape is manufactured by bringing the manufactured Pin type photodiode or the like) closer to the V groove 5. Then, when the optical fiber holding member 1 is arranged on the upper surface of the light receiving element forming member 2, an optical module is obtained in which the optical fiber is fixed in parallel to the light receiving element surface, and the light emitted from the optical fiber 3 is placed on the optical fiber holding member 1. The projection light after the optical path is changed by the optical path changing surface provided on the light receiving element forming member 2 is incident on the light receiving surfaces of the plurality of light receiving elements 6. Here, there are cases where the electric output of one light receiving element is not so large because there are a plurality of light receiving elements for one light.
【００１６】そこで、この実施の形態では、図２（Ａ）
に示したように同一の光ファイバ３からの出射光の光路
変換した後の投射部分８に位置する受光素子６の複数の
電極７の上面に同一の電極接続用パターン４がくるよう
にするため、電極接続用パターン４をＶ溝５と同一幅
で、光ファイバ保持部材１の面上のＶ溝５の延長上に設
けてある。つまり、この電極接続用パターン４を受光素
子形成部材２に接触させることにより、自動的に光が入
射した受光素子６の複数の電極７が互いに電気的に接続
され、同一の光ファイバ３に反応する複数の受光素子が
一つの受光素子として機能することになる。従って、特
に光ファイバの微調整や高精度な位置決めを要求する必
要がなく（この場合、受光素子の配列方向に対し）組付
けができ、かつ、反応する受光素子を一つにまとめてい
るので得られる電気出力は充分大きいものである。Therefore, in this embodiment, as shown in FIG.
In order to have the same electrode connection pattern 4 on the upper surface of the plurality of electrodes 7 of the light receiving element 6 located in the projection portion 8 after the optical path conversion of the outgoing light from the same optical fiber 3 as shown in FIG. The electrode connecting pattern 4 has the same width as the V groove 5 and is provided on the surface of the optical fiber holding member 1 on the extension of the V groove 5. That is, by bringing the electrode connection pattern 4 into contact with the light receiving element forming member 2, the plurality of electrodes 7 of the light receiving element 6 to which light is automatically incident are electrically connected to each other and react with the same optical fiber 3. The plurality of light receiving elements that function as one function as one light receiving element. Therefore, it is not necessary to make fine adjustment of the optical fiber or highly accurate positioning (in this case, in the arrangement direction of the light receiving elements), and the light receiving elements that react can be combined into one. The electric output obtained is sufficiently high.
【００１７】図３は、本発明の他の実施の形態を説明す
るための図で、図３（Ａ）は受光素子形成部材２の平面
図、図３（Ｂ）は図３（Ａ）のＢ−Ｂ線断面図である。
電極接続用パターン４（例えば、Ａｌ等の金属被膜）の
上に半田や導電性接着剤でバンプ等の接触凸部４ａを形
成したものを用いた場合、光ファイバ保持部材１と受光
素子形成部材２とを接触させた時に電極接続用パターン
４上に設けた接触凸部４ａがつぶれて、変形し、その変
形部によって隣接電極を短絡等してしまう場合がある。3A and 3B are views for explaining another embodiment of the present invention. FIG. 3A is a plan view of the light receiving element forming member 2, and FIG. 3B is a plan view of FIG. 3A. It is a BB line sectional view.
When the electrode connection pattern 4 (for example, a metal coating such as Al) on which the contact protrusions 4a such as bumps are formed with solder or a conductive adhesive is used, the optical fiber holding member 1 and the light receiving element forming member are used. There is a case where the contact protrusion 4a provided on the electrode connection pattern 4 is crushed and deformed when the two are brought into contact with each other, and the adjacent electrode is short-circuited by the deformed portion.
【００１８】そこで、この実施の形態では、受光素子電
極７間に通常の成膜及びフォトリソ、エッチングの手法
により（または、レジスト塗布及びフォトリソによるパ
ターニングにより）防護凸部１０を電極７に並行して設
けることにより、接触凸部４ａの変形部が同一光ファイ
バ３からの投射光を受光する受光素子６の電極７以外の
不要な受光素子の電極と電気的な接触をすることを防止
することができ、更に、クロストークの低減や背景光な
どからのノイズの低減が可能になる。また、受光素子６
の受光部周辺にこの防護凸部１０を設けた場合には半田
等の接触凸部４ａの変形部による受光素子６の受光面へ
の回り込みを防止することも可能になる。Therefore, in this embodiment, the protective convex portion 10 is provided between the light-receiving element electrodes 7 in parallel with the electrodes 7 by the usual film-forming, photolithography and etching techniques (or by resist coating and patterning by photolithography). By providing the contact convex portion 4a, it is possible to prevent the deformed portion of the contact convex portion 4a from making electrical contact with an electrode of an unnecessary light receiving element other than the electrode 7 of the light receiving element 6 that receives the projection light from the same optical fiber 3. In addition, it is possible to reduce crosstalk and noise from background light. The light receiving element 6
When this protective convex portion 10 is provided around the light receiving portion, it is possible to prevent the deformation of the contact convex portion 4a such as solder from wrapping around the light receiving surface of the light receiving element 6.
【００１９】図４は、本発明の更に他の実施の形態の構
造を示す側面図である。この実施の形態は、光ファイバ
３に先端面３ａを球面化した先球光ファイバを用いるこ
とにより、その光ファイバ３からの出射光の広がりを抑
えるようにしたものである。従って、受光部の面積を小
さくして寄生容量を低減し、受光素子の応答速度を高速
化することができる。また、反対に応答速度が低速な光
モジュールでよい場合には、受光面積を大きくすること
によりＶ溝５に光ファイバ３を取付ける際に溝方向の許
容度を大きくすることが可能で生産性のよい光モジュー
ルを提供することが可能となる。FIG. 4 is a side view showing the structure of still another embodiment of the present invention. In this embodiment, a spherical optical fiber having a spherical tip surface 3a is used as the optical fiber 3 to suppress the spread of the light emitted from the optical fiber 3. Therefore, the area of the light receiving portion can be reduced to reduce the parasitic capacitance and the response speed of the light receiving element can be increased. On the other hand, when an optical module having a low response speed is sufficient, the light receiving area can be increased to increase the allowance in the groove direction when the optical fiber 3 is mounted in the V groove 5, which results in high productivity. It is possible to provide a good optical module.
【００２０】図５は、本発明の更に他の実施の形態の構
造を示す側面図である。この実施の形態では、光ファイ
バ３と光路変換部及び受光素子面との空間にファイバコ
ア部の屈折率と一致するか概略一致するような透明な接
着剤２０（例えば、光ファイバが石英部材からなる場合
には、屈折率が１．４〜１．５程度の熱もしくは光によ
り硬化する接着剤）を充填することによって、出射光の
広がりを抑えるものである。このことは、図４を使い説
明したように光モジュールの高速応答性や作製の容易性
を可能とするとともに光ファイバ３の保持及び光ファイ
バ保持部材１と受光素子６との固定を同時に達成するこ
とが可能となり、作製工程の低減が可能になる。FIG. 5 is a side view showing the structure of still another embodiment of the present invention. In this embodiment, a transparent adhesive 20 (for example, the optical fiber is made of a quartz member, which is the same as or approximately the same as the refractive index of the fiber core portion in the space between the optical fiber 3 and the optical path changing portion and the light receiving element surface). In such a case, the spread of the emitted light is suppressed by filling with an adhesive which has a refractive index of about 1.4 to 1.5 and is cured by heat or light. As described above with reference to FIG. 4, this enables high-speed responsiveness of the optical module and easiness of manufacture, and simultaneously holds the optical fiber 3 and fixes the optical fiber holding member 1 and the light receiving element 6 at the same time. Therefore, the number of manufacturing steps can be reduced.
【００２１】図６は、本発明の更に他の実施の形態を説
明するための図で、図６（Ａ）は使用する酸化膜のマス
ク開口パターン図、図６（Ｂ）は、図６（Ａ）を使用し
て作製した光ファイバ保持部材１の平面図である。光フ
ァイバ保持部材１の作製時に異方性エッチングを行う
際、図６（Ａ）に示したように酸化膜２５のマスク開口
パターン２６の所定の位置Ｘに一部くびれを設けること
により、Ｖ溝５に段差５ａを作製できる（光ファイバ保
持部材１として用いるには、エッチング後中央部２７で
切断）。そして、光ファイバ３を保持する際に、この段
差に光ファイバ３の先端部を付き当てることにより光フ
ァイバ３の位置決めが精度よく簡単にでき、光ファイバ
端面と光路変換面との位置関係を精度よく位置決めする
ことが可能となる。6A and 6B are views for explaining still another embodiment of the present invention. FIG. 6A is a mask opening pattern diagram of an oxide film to be used, and FIG. 6B is FIG. It is a top view of the optical fiber holding member 1 produced using A). When anisotropic etching is performed at the time of manufacturing the optical fiber holding member 1, a V-groove is formed by providing a partial constriction at a predetermined position X of the mask opening pattern 26 of the oxide film 25 as shown in FIG. A step 5a can be formed in 5 (to use as the optical fiber holding member 1, cut at the central portion 27 after etching). Then, when the optical fiber 3 is held, the tip of the optical fiber 3 is brought into contact with this step so that the optical fiber 3 can be positioned accurately and easily, and the positional relationship between the optical fiber end surface and the optical path conversion surface can be accurately adjusted. Good positioning is possible.
【００２２】また、以上述べてきた実施の形態では、光
ファイバ保持部材１は、Ｓｉ結晶基板を用いているが、
ほかにガラス基板を用いた方法もある。この場合、エッ
チングは等方性になることからエッチングに用いるマス
クパターン（レジスト開口パターン）を工夫することに
より、反射面を球面もしくは非球面化することが可能に
なり高性能な集光作用を持たせることが可能になる。In the embodiment described above, the optical fiber holding member 1 uses the Si crystal substrate.
There is also a method using a glass substrate. In this case, since the etching is isotropic, it is possible to make the reflecting surface spherical or aspherical by devising the mask pattern (resist opening pattern) used for etching, which has a high-performance light condensing function. It is possible to make it.
【００２３】本発明は、上記方法に限らずその他この精
神に逸脱することなく種々の変形が可能である。例え
ば、光ファイバ保持部材１は、精密機械加工でも作製す
ることが可能であるし、また、Ｖ溝基板などをもとに電
鋳法による金型を作製し、その型に樹脂等で出射成形し
てもよいし、他の方法で複製した樹脂部材を用いてもよ
い。The present invention is not limited to the above method, and various modifications can be made without departing from this spirit. For example, the optical fiber holding member 1 can be manufactured by precision machining as well, or a metal mold is manufactured by an electroforming method based on a V-groove substrate and the like, and is injection molded with resin or the like. Alternatively, a resin member duplicated by another method may be used.
【００２４】[0024]
請求項１に対応する効果：一つの光ファイバからの出射
光に対応する受光素子を複数にし、その複数の受光素子
の電極を電気的に接続しているので、光モジュールの受
光性能を低下させることなく光ファイバと受光素子との
位置決め精度を緩和することが可能になり、同時に、同
一の光ファイバに反応する受光素子は電気的に接続され
ているので得られる電気出力は充分大きく、作製の容易
な光モジュールを提供することができる。Effect corresponding to claim 1: Since the plurality of light receiving elements corresponding to the emitted light from one optical fiber are provided and the electrodes of the plurality of light receiving elements are electrically connected, the light receiving performance of the optical module is deteriorated. It is possible to relax the positioning accuracy between the optical fiber and the light receiving element without needing to do so. At the same time, since the light receiving element that reacts to the same optical fiber is electrically connected, the electric output obtained is sufficiently large. An easy optical module can be provided.
【００２５】請求項２に対応する効果：請求項１の効果
に加え、光ファイバ保持部材をパターン成形すること
で、光ファイバ保持部材の形成時、光ファイバ保持用溝
と光路変換部との位置関係が高精度に位置された光ファ
イバ保持部材を容易に提供することができる。Effect corresponding to claim 2: In addition to the effect of claim 1, by patterning the optical fiber holding member, the positions of the optical fiber holding groove and the optical path changing portion are formed when the optical fiber holding member is formed. It is possible to easily provide the optical fiber holding member in which the relationship is positioned with high accuracy.
【００２６】請求項３に対応する効果：請求項１又は２
の効果に加え、受光素子の電極間や受光面の回りに凸部
を設けることで、光ファイバ保持部材と受光素子形成部
材とを接触させる際に、電極接続用パターン部材が変形
し、その変形部が不要な受光素子の電極との電気的に接
続することや、受光素子面へ回り込むのを防止し、生産
性がよく高性能な光モジュールを提供することができ
る。Effect corresponding to claim 3: Claim 1 or 2
In addition to the effect of the above, by providing the convex portion between the electrodes of the light receiving element or around the light receiving surface, the electrode connecting pattern member is deformed when the optical fiber holding member and the light receiving element forming member are brought into contact with each other, and the deformation It is possible to provide a high-performance optical module with high productivity by preventing electrical connection with an electrode of a light-receiving element that does not require a part and wrapping around to the surface of the light-receiving element.
【００２７】請求項４に対応する効果：請求項１乃至３
の何れかの効果に加え、光ファイバの先端を球面状にす
ることによって、光ファイバからの出射光の広がりを抑
えることができ、受光素子の受光面積の微小化による応
答速度を高速化した光モジュールや、光ファイバの取付
許容度の大きい光モジュールを提供することができる。Effects corresponding to claim 4: Claims 1 to 3
In addition to any of the above effects, by making the tip of the optical fiber spherical, it is possible to suppress the spread of the light emitted from the optical fiber, and to improve the response speed by miniaturizing the light receiving area of the light receiving element. It is possible to provide a module or an optical module having a high tolerance for mounting an optical fiber.
【００２８】請求項５に対応する効果：請求項１乃至４
の何れかの効果に加え、光ファイバの光出射端から受光
素子面までの空間に、屈折率が前記光ファイバのコア部
の屈折率と概略一致する透明な物質が充填し、光ファイ
バ保持部材と受光素子形成部材との固定とともに、光フ
ァイバからの出射光の広がりを抑えることができ、受光
素子の受光面積の微小化による応答速度を高速化した光
モジュールや、光ファイバの取付許容度の大きい光モジ
ュールを提供することができる。Effects corresponding to claim 5: Claims 1 to 4
In addition to any one of the effects, the space from the light emitting end of the optical fiber to the light receiving element surface is filled with a transparent substance having a refractive index substantially equal to the refractive index of the core portion of the optical fiber. In addition to fixing the light receiving element forming member with the light receiving element forming member, the spread of the light emitted from the optical fiber can be suppressed, and the response speed can be increased due to the miniaturization of the light receiving area of the light receiving element and the mounting tolerance of the optical fiber. A large optical module can be provided.
【００２９】請求項６に対応する効果：請求項１乃至５
の何れかの効果に加え、溝の一部に段差を設けることに
より、光ファイバ保持部材に光ファイバを固定する際
に、光路変換部との位置関係を容易に精度よく位置決め
することができ、作製の容易な高性能な光モジュールを
提供することができる。Effects corresponding to claim 6: Claims 1 to 5
In addition to any one of the effects, by providing a step in a part of the groove, when fixing the optical fiber to the optical fiber holding member, it is possible to easily and accurately position the positional relationship with the optical path conversion unit, A high-performance optical module that can be easily manufactured can be provided.
【図１】 本発明の実施の形態の構造を示す概略斜視図
である。FIG. 1 is a schematic perspective view showing a structure of an embodiment of the present invention.
【図２】 図１における光ファイバと受光素子との結合
方法を説明するための図である。FIG. 2 is a diagram for explaining a method of coupling an optical fiber and a light receiving element in FIG.
【図３】 本発明の他の実施の形態を説明するための図
である。FIG. 3 is a diagram for explaining another embodiment of the present invention.
【図４】 本発明の更に他の実施の形態の構造を示す側
面図である。FIG. 4 is a side view showing the structure of still another embodiment of the present invention.
【図５】 本発明の更に他の実施の形態の構造を示す側
面図である。FIG. 5 is a side view showing the structure of still another embodiment of the present invention.
【図６】 本発明の更に他の実施の形態を説明するため
の図である。FIG. 6 is a diagram for explaining still another embodiment of the present invention.
【図７】 従来技術を説明するための概略斜視図であ
る。FIG. 7 is a schematic perspective view for explaining a conventional technique.
１…光ファイバ保持部材、２…受光素子形成部材、３…
光ファイバ、４…電極接続用パターン、５…Ｖ溝、６…
受光素子、７…受光素子６の電極、８…出射光の投射部
分、１０…凸部、２０…透明接着剤、２５…酸化膜、２
６…酸化膜２５のマスク開口パターン、２７…切断線。1 ... Optical fiber holding member, 2 ... Light receiving element forming member, 3 ...
Optical fiber, 4 ... Electrode connection pattern, 5 ... V groove, 6 ...
Light receiving element, 7 ... Electrode of light receiving element 6, 8 ... Projection portion of emitted light, 10 ... Convex portion, 20 ... Transparent adhesive, 25 ... Oxide film, 2
6 ... Mask opening pattern of oxide film 25, 27 ... Cutting line.
Claims (6)
光ファイバの固定機能と光路変換機能を有する溝と電極
接続用パターンとを形成した光ファイバ保持部材と、多
数の受光素子をアレイ状に形成した受光素子形成部材と
からなる光モジュールにおいて、前記光ファイバ保持部
材上に設けた光路変換機能を有する前記溝の加工面によ
り光路変換した後の出射光の投射部分に前記受光素子の
複数が位置するように前記光ファイバ保持部材と前記受
光素子形成部材を配置し、かつ、前記電極接続用パター
ンは複数の前記受光素子の電極を電気的に接続するよう
に構成されたことを特徴とする光モジュール。1. An optical fiber holding member having at least one optical fiber, a groove having an optical fiber fixing function and an optical path changing function, and an electrode connecting pattern, and a large number of light receiving elements arranged in an array. In the optical module comprising the formed light receiving element forming member, a plurality of the light receiving elements are provided on the projection portion of the emitted light after the optical path is changed by the processed surface of the groove having the optical path changing function provided on the optical fiber holding member. The optical fiber holding member and the light receiving element forming member are arranged so as to be positioned, and the electrode connection pattern is configured to electrically connect electrodes of the plurality of light receiving elements. Optical module.
としての反射膜、及び、電極接続用パターンを形成した
前記光ファイバ保持部材は、結晶基板かガラス基板か
ら、異方性もしくは等方性のエッチング手段及び薄膜形
成手段を用いて製造されたことを特徴とする請求項１に
記載の光モジュール。2. The optical fiber holding member on which the optical fiber fixing groove, the reflection film as an optical path changing function, and the electrode connecting pattern are formed is anisotropic or isotropic from a crystal substrate or a glass substrate. 2. The optical module according to claim 1, which is manufactured by using the etching means and the thin film forming means.
の受光素子の電極間、及び又は、前記受光素子の周辺部
に凸部を設けたことを特徴とする請求項１又は２に記載
の光モジュール。3. The light receiving element forming member according to claim 1, wherein a convex portion is provided between electrodes of a large number of light receiving elements formed on the light receiving element forming member and / or in a peripheral portion of the light receiving element. Optical module.
ファイバを用いたことを特徴とする請求項１乃至３の何
れかに記載の光モジュール。4. The optical module according to claim 1, wherein an optical fiber having a spherical surface is used at the tip of the optical fiber.
面までの空間に、屈折率が前記光ファイバのコア部の屈
折率と概略一致する透明な物質が充填されたこと特徴と
する請求項１乃至４の何れかに記載の光モジュール。5. A transparent material having a refractive index substantially equal to that of the core portion of the optical fiber is filled in a space from a light emitting end of the optical fiber to a light receiving element surface. The optical module according to any one of 1 to 4.
ファイバの位置決め用の段差を設けたこと特徴とする請
求項１乃至５の何れかに記載の光モジュール。6. The optical module according to claim 1, wherein a step for positioning the optical fiber is provided in a part of the optical fiber fixing groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25904095A JPH09101435A (en) | 1995-10-05 | 1995-10-05 | Self-matching type small-sized optical module |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25904095A JPH09101435A (en) | 1995-10-05 | 1995-10-05 | Self-matching type small-sized optical module |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09101435A true JPH09101435A (en) | 1997-04-15 |
Family
ID=17328506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25904095A Pending JPH09101435A (en) | 1995-10-05 | 1995-10-05 | Self-matching type small-sized optical module |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09101435A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100322581B1 (en) * | 1998-10-15 | 2002-03-08 | 윤종용 | Optical connector module |
| US7123798B2 (en) | 2002-03-29 | 2006-10-17 | Ngk Insulators, Ltd. | Optical device and method of producing the same |
| US7195402B2 (en) | 2002-12-20 | 2007-03-27 | Ngk Insulators, Ltd. | Optical device |
| US7308174B2 (en) | 2002-12-20 | 2007-12-11 | Ngk Insulators, Ltd. | Optical device including a filter member for dividing a portion of signal light |
| US7321703B2 (en) | 2002-12-20 | 2008-01-22 | Ngk Insulators, Ltd. | Optical device |
| US7324729B2 (en) | 2003-06-02 | 2008-01-29 | Ngk Insulators, Ltd. | Optical device |
| WO2017122809A1 (en) * | 2016-01-14 | 2017-07-20 | 株式会社フジクラ | Photoelectric conversion module and active optical cable |
-
1995
- 1995-10-05 JP JP25904095A patent/JPH09101435A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100322581B1 (en) * | 1998-10-15 | 2002-03-08 | 윤종용 | Optical connector module |
| US7123798B2 (en) | 2002-03-29 | 2006-10-17 | Ngk Insulators, Ltd. | Optical device and method of producing the same |
| US7195402B2 (en) | 2002-12-20 | 2007-03-27 | Ngk Insulators, Ltd. | Optical device |
| US7308174B2 (en) | 2002-12-20 | 2007-12-11 | Ngk Insulators, Ltd. | Optical device including a filter member for dividing a portion of signal light |
| US7321703B2 (en) | 2002-12-20 | 2008-01-22 | Ngk Insulators, Ltd. | Optical device |
| US7324729B2 (en) | 2003-06-02 | 2008-01-29 | Ngk Insulators, Ltd. | Optical device |
| WO2017122809A1 (en) * | 2016-01-14 | 2017-07-20 | 株式会社フジクラ | Photoelectric conversion module and active optical cable |
| JP2017125943A (en) * | 2016-01-14 | 2017-07-20 | 株式会社フジクラ | Photoelectric conversion module and active optical cable |
| CN108463755A (en) * | 2016-01-14 | 2018-08-28 | 株式会社藤仓 | Photoelectric conversion module and active optical cable |
| CN108463755B (en) * | 2016-01-14 | 2020-07-28 | 株式会社藤仓 | Photoelectric conversion module and active optical cable |
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