JPH0768397A - Method for decompression laser beam machining - Google Patents
Method for decompression laser beam machiningInfo
- Publication number
- JPH0768397A JPH0768397A JP5238727A JP23872793A JPH0768397A JP H0768397 A JPH0768397 A JP H0768397A JP 5238727 A JP5238727 A JP 5238727A JP 23872793 A JP23872793 A JP 23872793A JP H0768397 A JPH0768397 A JP H0768397A
- Authority
- JP
- Japan
- Prior art keywords
- laser
- pressure
- laser beam
- atmosphere
- penetration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Laser Beam Processing (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、減圧レーザ加工方法に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a low pressure laser processing method.
【０００２】[0002]
【従来の技術】従来のレーザ溶接及び熱処理において
は、大気中もしくはシールドガス等の大気圧ガス環境下
で加工が行われている。2. Description of the Related Art In conventional laser welding and heat treatment, processing is performed in the atmosphere or under an atmospheric pressure gas environment such as a shield gas.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、このよ
うな従来方法には下記のような問題がある。 （１）大気中でのレーザ加工であるために、大きなレー
ザプラズマが溶接部，熱処理部直上に発生し、このプラ
ズマがレーザビームを屈折，吸収するので、加工部の溶
込み，入熱が制限され、深溶込み，溶接等が困難とな
る。 （２）レーザプラズマの形成が不安定なため、加工部の
品質が不安定となり、溶接部にはブローホールなどの欠
陥が発生しやすく、また熱処理には深さのばらつきが発
生しやすい。 （３）活性な金属などでは、レーザプラズマの不安定さ
によるシールドガスの乱れが生じ、溶融部が酸化し、施
工が不可能となる。 （４）これを解決する方法として、真空にした場合に、
レーザ光学部品に大気圧がかかり、施工条件の再現性が
困難であるとともに、真空引きのために多大の時間を要
し、電子ビーム加工に対してのメリットがなくなってし
まう。However, such a conventional method has the following problems. (1) Since the laser processing is performed in the atmosphere, a large laser plasma is generated directly above the welded portion and the heat-treated portion, and this plasma refracts and absorbs the laser beam, limiting the penetration and heat input of the processed portion. This makes deep penetration and welding difficult. (2) Since the formation of the laser plasma is unstable, the quality of the processed portion becomes unstable, defects such as blow holes are likely to occur in the welded portion, and the depth of the heat treatment tends to vary. (3) In the case of an active metal, the shield gas is disturbed due to the instability of the laser plasma, the molten portion is oxidized, and the construction becomes impossible. (4) As a method of solving this, when a vacuum is applied,
Atmospheric pressure is applied to the laser optical parts, the reproducibility of the working conditions is difficult, and a lot of time is required for vacuuming, so that there is no merit for electron beam processing.
【０００４】本発明はこのような事情に鑑みて提案され
たもので、活性金属でも深溶込み性がよく、溶接部の欠
陥が少なく、加工速度が大きい減圧レーザ加工方法を提
供することを目的とする。The present invention has been proposed in view of the above circumstances, and an object thereof is to provide a low-pressure laser processing method which has good deep penetration even with an active metal, has few defects in the welded portion, and has a high processing speed. And
【０００５】[0005]
【課題を解決するための手段】そのために本発明は、レ
ーザ加工において、レーザ照射部の雰囲気を５０Ｔｏｒ
ｒ以下に減圧するとともに、Ｈｅ，Ａｒなどのシールド
ガスを供給することにより、減圧イナートガス雰囲気と
して、レーザ加工を行うことを特徴とする。Therefore, according to the present invention, in laser processing, the atmosphere of the laser irradiation portion is set to 50 Torr.
Laser processing is performed in a reduced pressure inert gas atmosphere by supplying a shielding gas such as He or Ar while reducing the pressure to r or less.
【０００６】[0006]
【作用】本発明では、レーザ加工の品質を劣化させるレ
ーザプラズマを加工に影響を与えないレベルまで低減す
るために、低圧シールドガス下でのレーザ加工を行う。
また、レーザガス圧の選定にあたっては、レーザビーム
は大気中でも伝送できるので電子ビーム伝送に求められ
る高真空を必要としないため、溶接においては溶込み特
性を安定して良くする低圧の値を選定するとともに、真
空ポンプもロータリポンプなどの真空ポンプで対応でき
る低圧の値とする。さらに、低圧のため被加工物によっ
ては不純物が混入する惧れがあるので、これに対する対
策として加工目的に対応したシールドガス（Ａｒ，Ｈ
ｅ，Ｎ2 など）の低圧雰囲気を形成する。このような本
発明方法によれば、レーザビームエネルギが消耗される
ことなく母材に入り、深溶込みの溶接部が得られる。ま
た、プラズマの縮小化により、レーザビームエネルギの
母材への入射量が一定となるため、溶込み深さも安定
し、欠陥のない溶接部が得られる。さらに、低圧のガス
シールドのため、溶接金属の酸化等の影響は小さく、特
に活性な金属であっても、低圧のイナートガス（不活性
ガス）を用いることによって、機械的性質など優れた溶
接部が得られる。In the present invention, in order to reduce the laser plasma that deteriorates the quality of laser processing to a level that does not affect the processing, laser processing is performed under a low pressure shield gas.
Also, when selecting the laser gas pressure, since the laser beam can be transmitted in the atmosphere, the high vacuum required for electron beam transmission is not required. Therefore, in welding, select a low pressure value that stabilizes and improves the penetration characteristics. The vacuum pump shall be a low-pressure value that can be supported by a vacuum pump such as a rotary pump. Furthermore, because of the low pressure, impurities may be mixed depending on the workpiece, so as a countermeasure against this, a shield gas (Ar, H
e, N 2 etc.) to form a low pressure atmosphere. According to such a method of the present invention, the laser beam energy enters the base metal without being consumed and a deep-penetration welded portion is obtained. In addition, since the amount of laser beam energy incident on the base metal becomes constant due to the reduction in plasma, the penetration depth is stable, and a weld portion having no defects can be obtained. Furthermore, because of the low-pressure gas shield, the effect of oxidation of the weld metal is small, and even if it is an especially active metal, the use of a low-pressure inert gas (inert gas) makes it possible to obtain a weld with excellent mechanical properties. can get.
【０００７】[0007]
【実施例】本発明の一実施例を図面について説明する
と、図１はその第１実施例を示す縦断面図、図２はその
第２実施例を示す縦断面図、図３は図１〜図２における
レーザ加工ヘッドを示し、同図（Ａ）は横断面図、同図
（Ｂ）は縦断面図、図４は図１〜図２によるレーザ加工
における雰囲気圧力とレーザプラズマの大きさとの関係
を示す線図、図５は図１〜図２によるレーザ加工におけ
る雰囲気圧力と溶込み深さとの関係を示す線図である。1 is a longitudinal sectional view showing a first embodiment of the present invention, FIG. 2 is a vertical sectional view showing a second embodiment thereof, and FIG. FIG. 2 shows the laser processing head in FIG. 2, (A) is a horizontal sectional view, (B) is a vertical sectional view, and FIG. 4 shows the atmospheric pressure and the size of laser plasma in the laser processing shown in FIGS. FIG. 5 is a diagram showing the relationship, and FIG. 5 is a diagram showing the relationship between the atmospheric pressure and the penetration depth in the laser processing according to FIGS.
【０００８】まず、図１に示す第１実施例においては、
被加工物５は真空容器である減圧室６の加工テーブル７
上にセットされ、レーザ光１は減圧室６の頂板から入射
され、集束レンズ４で大気圧と遮断されている。減圧室
６はロータリポンプなどで５０Ｔｏｒｒ以下に減圧さ
れ、また不活性ガスを少量シールドガスとして流すこと
で、減圧室６内に低圧の不活性ガスの雰囲気を形成す
る。７はＸ，Ｙ及びＺ方向に移動可能の加工テーブルで
ある。First, in the first embodiment shown in FIG.
The workpiece 5 is a processing table 7 in a decompression chamber 6 which is a vacuum container.
The laser beam 1 is set on the upper side, is incident from the top plate of the decompression chamber 6, and is blocked from the atmospheric pressure by the focusing lens 4. The decompression chamber 6 is decompressed to 50 Torr or less by a rotary pump or the like, and a small amount of inert gas is caused to flow as a shield gas to form a low-pressure inert gas atmosphere in the decompression chamber 6. A machining table 7 is movable in X, Y and Z directions.
【０００９】次に、図２に示す第２実施例は、局部減圧
レーザ加工装置を示し、被加工物５は大気中に設置し、
そのレーザ加工部のみを局部的に減圧することで、被加
工物の形状による制約を少なくしている。レーザ加工ヘ
ッド３には真空排気配管１０と、シールドガス配管１１
がそれぞれ接続され、被加工物５との間はゴムなどのシ
ール材でシールされる。なお、レーザ加工ヘッド３は被
加工物５の表面に沿って移動可能であり、シール部は適
切な力で押しつけられ、移動中もシールを確保すること
ができる。また、大気（酸素，窒素）が混入しないよう
に、１段目シール部と２段目シール部の間は不活性ガス
でシールドされている。９は被加工物５の被加工部の下
面をシールするバックシールである。Next, a second embodiment shown in FIG. 2 shows a local decompression laser processing apparatus, in which the workpiece 5 is placed in the atmosphere,
By locally depressurizing only the laser processing part, restrictions due to the shape of the workpiece are reduced. The laser processing head 3 has a vacuum exhaust pipe 10 and a shield gas pipe 11
Are connected to each other and are sealed from the workpiece 5 with a sealing material such as rubber. The laser processing head 3 can be moved along the surface of the workpiece 5, and the seal portion can be pressed with an appropriate force to secure the seal during the movement. Further, an inert gas is shielded between the first-stage sealing portion and the second-stage sealing portion so that atmospheric air (oxygen, nitrogen) is not mixed. Reference numeral 9 is a back seal that seals the lower surface of the processed portion of the workpiece 5.
【００１０】上記第１，第２実施例によれば、図３
（Ａ），（Ｂ）及び同図（Ｃ）に示すように、被加工物
５にはレーザを照射した個所に溶込みが生ずるととも
に、溶込み部にはレーザプラズマ２が発生する。図４は
その際のレーザプラズマの大きさと雰囲気圧力との関係
を定性的に示し、図５はレーザ出力５Ｋｗでの雰囲気圧
力と溶込み深さ及びポロシティ発生状況を示している。
同図によれば、圧力が５０Ｔｏｒｒ以下では、大気圧時
に比較して溶込みで、１．５倍以上となり、ポロシティ
（溶接欠陥つまり気泡）の発生も抑えられることが示さ
れている。According to the above first and second embodiments, FIG.
As shown in (A), (B) and (C) of the same figure, the work piece 5 is melted at the portion irradiated with the laser, and the laser plasma 2 is generated at the melted portion. FIG. 4 qualitatively shows the relationship between the size of the laser plasma and the atmospheric pressure at that time, and FIG. 5 shows the atmospheric pressure, the penetration depth, and the porosity generation state at a laser output of 5 Kw.
According to the figure, when the pressure is 50 Torr or less, the penetration is 1.5 times or more as compared with the atmospheric pressure, and the generation of porosity (welding defects, that is, bubbles) is suppressed.
【００１１】[0011]
【発明の効果】このような減圧レーザ加工方法によれ
ば、下記の効果が奏せられる。 （１）レーザ溶接雰囲気の低圧下（約５０Ｔｏｒｒ）に
よりレーザ溶接直上部のプラズマ形成を抑え、レーザ溶
接溶込みを深くし、レーザ溶接部のポロシティなどの欠
陥が除去できる。 （２）レーザ溶接の大気中使用可能なメリットを生か
し、低圧下のレベルを５０Ｔｏｒｒ以下程度とし、ＥＢ
Ｗ（電子ビーム溶接）のように高真空１０-2〜１０-4Ｔ
ｏｒｒを得るための拡散ポンプ，クライオポンプなどの
設備，真空引きの時間及び被溶接部周りの制約を受ける
ことなしに、比較的簡単な設備で対応できるようにな
る。 （３）将来の大出力レーザ（１０Ｋｗ以上）溶接におい
ても、本発明方法によるレーザプラズマはレーザの出力
増大とともに大きくなるので、低圧ガスシールド方法が
有効である。According to such a low-pressure laser processing method, the following effects can be obtained. (1) The low pressure (about 50 Torr) of the laser welding atmosphere suppresses the plasma formation immediately above the laser welding, deepens the laser welding penetration, and removes defects such as porosity in the laser welding portion. (2) Taking advantage of the fact that laser welding can be used in the atmosphere, the level under low pressure is about 50 Torr or less, and EB
High vacuum 10 -2 to 10 -4 T like W (electron beam welding)
A relatively simple equipment can be used without being restricted by equipment such as a diffusion pump and a cryopump for obtaining the orr, a vacuuming time, and the surroundings of the welded portion. (3) Even in future high-power laser (10 Kw or more) welding, the low-pressure gas shield method is effective because the laser plasma according to the method of the present invention increases as the laser output increases.
【００１２】要するに本発明によれば、レーザ加工にお
いて、レーザ照射部の雰囲気を５０Ｔｏｒｒ以下に減圧
するとともに、Ｈｅ，Ａｒなどのシールドガスを供給す
ることにより、減圧イナートガス雰囲気として、レーザ
加工を行うことにより、活性金属でも深溶込み性がよ
く、溶接部の欠陥が少なく、加工速度が大きい減圧レー
ザ加工方法を得るから、本発明は産業上極めて有益なも
のである。In short, according to the present invention, in laser processing, the atmosphere of the laser irradiation portion is depressurized to 50 Torr or less, and a shield gas such as He or Ar is supplied to perform laser processing as a depressurized inert gas atmosphere. As a result, a low-pressure laser processing method that has good deep penetration even with an active metal, has few defects in the welded portion, and has a high processing speed can be obtained. Therefore, the present invention is extremely useful industrially.
【図１】本発明の第１実施例を示す縦断面図である。FIG. 1 is a vertical cross-sectional view showing a first embodiment of the present invention.
【図２】本発明の第２実施例を示す縦断面図である。FIG. 2 is a vertical sectional view showing a second embodiment of the present invention.
【図３】図１〜図２における加工機のレーザ加工ヘッド
を示し、同図（Ａ）は横断面図、同図（Ｂ）は縦断面
図、同図（Ｃ）は同図（Ａ）のＣ部を示す拡大図であ
る。FIG. 3 shows a laser processing head of the processing machine in FIGS. 1 and 2, where FIG. 3A is a horizontal sectional view, FIG. 3B is a vertical sectional view, and FIG. It is an enlarged view which shows the C section of.
【図４】図１〜図２によるレーザ加工での雰囲気圧力と
レーザプラズマの大きさとの関係を示す線図である。FIG. 4 is a diagram showing the relationship between the atmospheric pressure and the size of laser plasma in the laser processing shown in FIGS.
【図５】図１〜図２によるレーザ加工での雰囲気圧力と
溶込み深さとの関係を示す線図である。FIG. 5 is a diagram showing a relationship between an atmospheric pressure and a penetration depth in the laser processing shown in FIGS.
１ レーザ光 ２ レーザプラズマ ３ レーザ加工ヘッド ４ 集束レンズ ５ 被加工物 ６ 減圧室 ７ 加工テーブル ８ シール材 ９ バックシール １０ 真空排気配管 １１ シールドガス配管 １２ シールドガス 1 Laser Light 2 Laser Plasma 3 Laser Processing Head 4 Focusing Lens 5 Workpiece 6 Decompression Chamber 7 Processing Table 8 Sealing Material 9 Back Seal 10 Vacuum Exhaust Pipe 11 Shield Gas Pipe 12 Shield Gas
Claims (1)
囲気を５０Ｔｏｒｒ以下に減圧するとともに、Ｈｅ，Ａ
ｒなどのシールドガスを供給することにより、減圧イナ
ートガス雰囲気として、レーザ加工を行うことを特徴と
する減圧レーザ加工方法。1. In laser processing, the atmosphere of a laser irradiation portion is depressurized to 50 Torr or less, and He, A
A low-pressure laser processing method, wherein laser processing is performed in a low-pressure inert gas atmosphere by supplying a shield gas such as r.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5238727A JPH0768397A (en) | 1993-08-31 | 1993-08-31 | Method for decompression laser beam machining |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5238727A JPH0768397A (en) | 1993-08-31 | 1993-08-31 | Method for decompression laser beam machining |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0768397A true JPH0768397A (en) | 1995-03-14 |
Family
ID=17034365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5238727A Pending JPH0768397A (en) | 1993-08-31 | 1993-08-31 | Method for decompression laser beam machining |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0768397A (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09271979A (en) * | 1996-04-09 | 1997-10-21 | Nec Corp | Local vacuum laser beam welding machine |
| JP2011143416A (en) * | 2010-01-12 | 2011-07-28 | Ihi Corp | Laser welding method |
| CN103521920A (en) * | 2013-10-16 | 2014-01-22 | 江苏大学 | Laser processing device and method without blowing auxiliary gas |
| JP2014128832A (en) * | 2012-11-28 | 2014-07-10 | Toshiba Corp | Apparatus and method for laser welding |
| JP2014205148A (en) * | 2013-04-10 | 2014-10-30 | 株式会社東芝 | Laser welding device and laser welding method |
| JP2015231629A (en) * | 2014-06-09 | 2015-12-24 | 株式会社Ihi | Laser weld device and laser weld method |
| DE102015118486A1 (en) * | 2015-10-29 | 2017-05-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method and apparatus for laser welding under gas atmosphere |
| CN107580534A (en) * | 2015-04-08 | 2018-01-12 | 费尔索梅特有限及两合公司 | Method for the vacuum laser welding at least workpiece of two-part |
| CN109014574A (en) * | 2018-08-24 | 2018-12-18 | 温州大学 | Intelligent Laser welder |
| CN109483055A (en) * | 2018-12-28 | 2019-03-19 | 东莞塔菲尔新能源科技有限公司 | A kind of battery core connection sheet welding mechanism and its welding method |
-
1993
- 1993-08-31 JP JP5238727A patent/JPH0768397A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09271979A (en) * | 1996-04-09 | 1997-10-21 | Nec Corp | Local vacuum laser beam welding machine |
| JP2011143416A (en) * | 2010-01-12 | 2011-07-28 | Ihi Corp | Laser welding method |
| JP2014128832A (en) * | 2012-11-28 | 2014-07-10 | Toshiba Corp | Apparatus and method for laser welding |
| JP2014205148A (en) * | 2013-04-10 | 2014-10-30 | 株式会社東芝 | Laser welding device and laser welding method |
| CN103521920A (en) * | 2013-10-16 | 2014-01-22 | 江苏大学 | Laser processing device and method without blowing auxiliary gas |
| JP2015231629A (en) * | 2014-06-09 | 2015-12-24 | 株式会社Ihi | Laser weld device and laser weld method |
| CN107580534A (en) * | 2015-04-08 | 2018-01-12 | 费尔索梅特有限及两合公司 | Method for the vacuum laser welding at least workpiece of two-part |
| DE102015118486A1 (en) * | 2015-10-29 | 2017-05-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method and apparatus for laser welding under gas atmosphere |
| DE102015118486B4 (en) * | 2015-10-29 | 2020-03-26 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method and device for laser welding in a gas atmosphere |
| CN109014574A (en) * | 2018-08-24 | 2018-12-18 | 温州大学 | Intelligent Laser welder |
| CN109483055A (en) * | 2018-12-28 | 2019-03-19 | 东莞塔菲尔新能源科技有限公司 | A kind of battery core connection sheet welding mechanism and its welding method |
| CN109483055B (en) * | 2018-12-28 | 2024-04-26 | 江苏正力新能电池技术有限公司 | Welding mechanism and welding method for battery cell connecting sheet |
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|---|---|---|---|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20020123 |