JPH0752589A - Ic card module - Google Patents

Ic card module

Info

Publication number
JPH0752589A
JPH0752589A JP5199577A JP19957793A JPH0752589A JP H0752589 A JPH0752589 A JP H0752589A JP 5199577 A JP5199577 A JP 5199577A JP 19957793 A JP19957793 A JP 19957793A JP H0752589 A JPH0752589 A JP H0752589A
Authority
JP
Japan
Prior art keywords
card
chip
thickness
module
card module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5199577A
Other languages
Japanese (ja)
Inventor
Kazunari Nakagawa
和成 中川
Takeshi Tottori
猛志 鳥取
Kazuo Takasugi
和夫 高杉
Kaname Tamada
要 玉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maxell Holdings Ltd
Original Assignee
Hitachi Maxell Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Maxell Ltd filed Critical Hitachi Maxell Ltd
Priority to JP5199577A priority Critical patent/JPH0752589A/en
Publication of JPH0752589A publication Critical patent/JPH0752589A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144Gold (Au) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484Connecting portions
    • H01L2224/48463Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48465Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors

Abstract

PURPOSE:To improve reliability by preventing an IC chip from being damaged by improving strength against external force, by a method wherein, in an IC card module which is built in an IC card, an extremely thin state IC chip film having a specific thickness is joined to a module base having a specific thickness. CONSTITUTION:In an IC card module being used for a cash card, a module base 2 comprised of glassy epoxy is formed by providing an outer electrode 3 prepared by performing nickel and gold plating of a copper foil after, for example, the copper foil is etched and an electrode pattern 4 prepared similarly to the electrode 3. Although an IC chip film 1 is stuck to the module base 2 like this by an adhesive agent 5 comprised, for example, of an epoxy resin, on this occasion, this is constituted so that the IC chip film 1 having a thickness of not exceeding 0.1mm is joined to the module base 2 having a thickness of at least 0.3mm. Then the IC chip film 1 is formed by providing an active layer 1c containing a layer p and layer n and a protective layer 1b on a wafer 1a.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はICカードに内蔵もしく
は装着されるICカードモジュールに係わり、さらに詳
しくはその信頼性向上に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an IC card module built in or attached to an IC card, and more particularly to improving its reliability.

【0002】[0002]

【従来の技術】現在、キャッシュカードやクレジットカ
ードをはじめ病院の診察券に至るまで様々なカードが使
用されている。これらのカードは現在、磁気ストライプ
カードが主流である。しかし、このカードは記憶容量が
不足しているため機能拡張に限界があり、偽造、変造が
容易であるなどセキュリティ、信頼性の面でも限界があ
る。
2. Description of the Related Art Currently, various cards such as cash cards, credit cards, and medical examination tickets for hospitals are used. Currently, these cards are mainly magnetic stripe cards. However, this card has a limit in expansion of functions due to lack of storage capacity, and there is a limit in terms of security and reliability such as easy forgery and alteration.

【0003】このような問題を解消し、非常に大きな記
憶容量を持ち、高度なセキュリティ機能を有するカード
に、ICチップ内蔵のモジュールを埋め込んだICカー
ドがある。このICカードは多方面で開発されており、
既に一部では銀行の預金通帳機能を合わせ持つキャッシ
ュカードやIDカードなどに実用化されている。
There is an IC card in which a module having a built-in IC chip is embedded in a card which solves such a problem, has a very large storage capacity, and has a high security function. This IC card has been developed in various fields,
It has already been put to practical use in some areas, such as cash cards and ID cards that also have a bank passbook function.

【0004】図6に一般的なICカードの平面図を示
す。ICカードは例えば、塩化ビニルからなるカード基
体40の一部にICカードモジュール30が埋設されて
構成されている。
FIG. 6 shows a plan view of a general IC card. The IC card is configured by embedding the IC card module 30 in a part of a card base 40 made of vinyl chloride, for example.

【0005】図7は、図6に示したICカードモジュー
ルの断面図である。ICカードモジュール30は、モジ
ュール基板2にICチップ50が接着剤5で固定され、
ICチップ50上に形成されたボンディングパッド7と
パターン電極4がボンディングワイヤ6で接続され、封
止枠9内に充填された封止材10で気液密に封止されて
いる。
FIG. 7 is a sectional view of the IC card module shown in FIG. In the IC card module 30, the IC chip 50 is fixed to the module substrate 2 with the adhesive 5,
The bonding pad 7 formed on the IC chip 50 and the pattern electrode 4 are connected by a bonding wire 6, and are sealed in a gas-liquid tight manner by a sealing material 10 filled in a sealing frame 9.

【0006】前記モジュール基板2の片面にはICカー
ド端末装置と電気的に接続される外部端子3が、また他
の片面にはパターン電極4が、それぞれ形成され、両者
はスルーホール8で電気的に接続されている。
External terminals 3 electrically connected to the IC card terminal device are formed on one surface of the module substrate 2, and pattern electrodes 4 are formed on the other surface of the module substrate 2, both of which are electrically connected through a through hole 8. It is connected to the.

【0007】このICカードモジュール30は、ICチ
ップ50の厚みが0.3mm程度と非常に薄くて割れや
すいから、それを保護するためにモジュール基板2に充
分な剛性を持たせ、ICカードモジュール30自体が変
形しないようにすることが必要である。
In this IC card module 30, the IC chip 50 has a very thin thickness of about 0.3 mm and is easily cracked. Therefore, in order to protect the IC chip 50, the module substrate 2 has sufficient rigidity so that the IC card module 30 can be protected. It is necessary not to deform itself.

【0008】[0008]

【発明が解決しようとする課題】しかし、ICカードモ
ジュール30は薄いカード(約0.8mm厚)に埋設さ
れるため、その厚みは約0.6mm以下にしなければな
らず、他の部材によって寸法制限を受け、充分な厚み
(約200μm程度)の高剛性のモジュール基板2を用
いることができない。
However, since the IC card module 30 is embedded in a thin card (thickness of about 0.8 mm), its thickness must be less than about 0.6 mm. Due to the limitation, it is not possible to use a highly rigid module substrate 2 having a sufficient thickness (about 200 μm).

【0009】よって従来のICカードモジュール30は
外力によって変形し、内部のICチップ50が割れた
り、ボンディングワイヤ6が外れたりするトラブルが発
生しやすいという欠点があった。
Therefore, the conventional IC card module 30 is deformed by an external force, and there is a drawback that the internal IC chip 50 is cracked and the bonding wire 6 is easily detached.

【0010】本発明は、外力によって内部のICチップ
が破損するという欠点を解決し、以て信頼性に優れたI
Cカードモジュールを提供することを目的とする。
The present invention solves the drawback that the internal IC chip is damaged by an external force, and thus has an excellent reliability.
It is intended to provide a C card module.

【0011】[0011]

【課題を解決するための手段】上記目的は、ICカード
に内蔵もしくは装着されるICカードモジュールにおい
て、厚さが0.3mm以上のモジュール基板上に厚さが
0.1mm以下の極薄状のICチップ膜を接合した第1
の手段により達成される。
SUMMARY OF THE INVENTION The above-mentioned object is to provide an IC card module built in or mounted in an IC card with an ultrathin film having a thickness of 0.1 mm or less on a module substrate having a thickness of 0.3 mm or more. 1st IC chip membrane joined
It is achieved by means of.

【0012】また、この第1の手段は、前記ICチップ
膜がp層とn層を含むアクティブ層と、そのアクティブ
層の片面に形成された保護層とからなる第2の手段によ
り達成される。
The first means is achieved by the second means in which the IC chip film comprises an active layer including ap layer and an n layer, and a protective layer formed on one surface of the active layer. .

【0013】[0013]

【作用】ICカードに内蔵もしくは装着されるICカー
ドモジュールにおいて、チップ厚が0.1mm以下のI
Cチップを内蔵することにより、モジュール基板の厚み
を0.3mm以上に充分に取ることができ、外力に非常
に強い構造のICカードモジュールを得ることができ
る。
In the IC card module built in or mounted in the IC card, the chip thickness is 0.1 mm or less
By incorporating the C chip, the thickness of the module substrate can be sufficiently set to 0.3 mm or more, and an IC card module having a structure extremely resistant to external force can be obtained.

【0014】[0014]

【実施例】本発明のICカードモジュールの第1実施例
について、図1ならびに図2を用いて説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the IC card module of the present invention will be described with reference to FIGS.

【0015】図1において図中の2は例えばガラスエポ
キシからなるモジュール基板で、それぞれ片面に例えば
銅箔をエッチングした後、ニッケルおよび金メッキを施
して作製された外部電極3、および外部電極3と同様に
して作製された電極パターン4が形成されている。8は
外部電極3と電極パターン4を電気的に接続するスルー
ホールである。9はICチップ1を封止する封止材の流
れを堰き止める例えばガラスエポキシからなる封止枠
で、モジュール基板2にエポキシ系樹脂などで接着され
ている。
In FIG. 1, reference numeral 2 in the drawing denotes a module substrate made of, for example, glass epoxy, which is the same as the external electrode 3 and the external electrode 3 which are produced by etching copper foil on one surface and then nickel and gold plating, respectively. The electrode pattern 4 manufactured as described above is formed. Reference numeral 8 is a through hole that electrically connects the external electrode 3 and the electrode pattern 4. Reference numeral 9 denotes a sealing frame that blocks the flow of the sealing material that seals the IC chip 1 and is made of, for example, glass epoxy, and is bonded to the module substrate 2 with an epoxy resin or the like.

【0016】ICチップ1は例えばエポキシ系樹脂から
なる接着剤5でモジュール基板2に固定されている。6
は例えば金線からなるボンディングワイヤで、ICチッ
プ1上のボンディングパッド7と電極パターン4とを電
気的に接続している。10は例えばSiO2 フィラ入り
のエポキシ樹脂からなる封止材である。ICチップ1
は、厚みが50μm程度でウェハの例えば機械的研磨も
しくはケミカルエッチングにより薄膜化される。
The IC chip 1 is fixed to the module substrate 2 with an adhesive 5 made of, for example, an epoxy resin. 6
Is a bonding wire made of, for example, a gold wire, and electrically connects the bonding pad 7 on the IC chip 1 and the electrode pattern 4. Reference numeral 10 is a sealing material made of, for example, an epoxy resin containing a SiO 2 filler. IC chip 1
Is thinned to a thickness of about 50 μm by, for example, mechanical polishing or chemical etching of the wafer.

【0017】図2は、その薄膜ICチップの製造工程を
示す説明図である。
FIG. 2 is an explanatory view showing a manufacturing process of the thin film IC chip.

【0018】珪素(Si)のウェハ1a上に二酸化珪素
(SiO2 )の保護膜1bを形成し、さらにその上にp
層、n層を含むアクティブ層1cを形成する。この積層
体の形成方法は従来から周知の技術であり、ウェハ1a
を担体としてその上に保護膜1bならびにアクティブ層
1cが順次形成される。
A silicon dioxide (SiO 2 ) protective film 1b is formed on a silicon (Si) wafer 1a, and p is further formed thereon.
An active layer 1c including a layer and an n layer is formed. The method of forming this laminated body is a well-known technique, and the wafer 1a
As a carrier, a protective film 1b and an active layer 1c are sequentially formed on the carrier.

【0019】しかる後、この積層体を例えば、水酸化カ
リウムの40%水溶液(70℃)に10〜20時間浸漬
することにより、ウェハ1aを溶解除去し、保護膜1b
とアクティブ層1cとを有する厚さtが約10〜50μ
mの極薄の膜状ICチップ1を得ることができる。この
時、積層体のアクティブ層側は例えばガラス板などで保
護しているため、エッチング液に侵されない。
Thereafter, the wafer 1a is dissolved and removed by immersing the laminated body in, for example, a 40% aqueous solution of potassium hydroxide (70 ° C.) for 10 to 20 hours to form a protective film 1b.
And the active layer 1c have a thickness t of about 10 to 50 μm.
It is possible to obtain an ultrathin film-shaped IC chip 1 of m. At this time, since the active layer side of the laminate is protected by, for example, a glass plate, it is not attacked by the etching solution.

【0020】なお、必要に応じてケミカルエッチングの
時間を前述の条件より短くして、ウェハ1aの一部を残
した極薄のICチップ1を得ることも可能である。
If necessary, the chemical etching time may be set shorter than the above conditions to obtain an ultrathin IC chip 1 in which a part of the wafer 1a remains.

【0021】この構成によればモジュール基板2の厚み
は、ICチップ1の厚みを50μmとした場合、約40
0μm確保することができ、充分に剛性を持たせること
ができるため、外力に対して非常に強く、内部のICチ
ップ1が破損されることはない。なお、一般に材料の強
度は厚みの2乗にほぼ比例することから考えて、モジュ
ール基板2の厚みを従来のモジュール基板の厚み(20
0μm)の1.5倍(強度にして約2倍強)の300μ
m(0.3mm)以上にすれば、充分な効果が得られ
る。
According to this structure, the thickness of the module substrate 2 is about 40 when the thickness of the IC chip 1 is 50 μm.
Since 0 μm can be secured and sufficient rigidity can be provided, it is extremely strong against external force and the internal IC chip 1 is not damaged. Since the strength of the material is generally proportional to the square of the thickness, the thickness of the module substrate 2 is set to the thickness of the conventional module substrate (20
300μ, which is 1.5 times (about 2 times stronger) than 0μm)
If it is m (0.3 mm) or more, a sufficient effect can be obtained.

【0022】そしてICチップ1の厚みを0.1mm以
下にすれば、モジュール基板2の厚み300μm(0.
3mm)は充分に達成できる。
If the IC chip 1 has a thickness of 0.1 mm or less, the module substrate 2 has a thickness of 300 μm (0.
3 mm) can be fully achieved.

【0023】図3は、本発明の第2実施例を説明するた
めの断面図である。図中の11は例えばPIQ,SiO
2 などからなる絶縁材であり、薄膜配線12とチップの
電気的接触を防ぐためのものである。12は例えばA
u,Al,Cuなどの金属導体からなる薄膜配線であ
る。ICチップ1はボンディングパッド7とパターン電
極4を薄膜配線12で接続することによりモジュール基
板2に電気的に接続される。
FIG. 3 is a sectional view for explaining the second embodiment of the present invention. 11 in the figure is, for example, PIQ, SiO
It is an insulating material composed of 2 or the like, and is for preventing electrical contact between the thin film wiring 12 and the chip. 12 is for example A
It is a thin film wiring made of a metal conductor such as u, Al, or Cu. The IC chip 1 is electrically connected to the module substrate 2 by connecting the bonding pad 7 and the pattern electrode 4 with the thin film wiring 12.

【0024】本構造によれば、薄膜配線12としたこと
で図1のワイヤボンディングを施したICカードモジュ
ールに比べて配線に必要な高さが縮小でき、その分モジ
ュール基板2の厚みをさらに厚くすることができるか
ら、ICカードモジュールの信頼性をさらに向上でき
る。
According to this structure, since the thin film wiring 12 is used, the height required for wiring can be reduced as compared with the IC card module to which the wire bonding shown in FIG. 1 is applied, and the thickness of the module substrate 2 is further increased accordingly. Therefore, the reliability of the IC card module can be further improved.

【0025】図4に図3に示した実施例の製造方法の一
例を示す。
FIG. 4 shows an example of the manufacturing method of the embodiment shown in FIG.

【0026】まず同図(a)に示すように、ガラスエポ
キシからなるモジュール基板2のそれぞれ片面に、銅箔
をエッチングした後、ニッケルおよび金メッキを施して
作製された外部電極3、および外部電極3と同様にして
作製された電極パターン4が形成され、それらがスルー
ホール8で導通される。
First, as shown in FIG. 3A, an external electrode 3 and an external electrode 3 each made by etching copper foil on one surface of a module substrate 2 made of glass epoxy and then plating it with nickel and gold. Electrode patterns 4 produced in the same manner as above are formed, and they are conducted through through holes 8.

【0027】封止枠9を設けてなるICカードモジュー
ル基体20に、裏面を水酸化カリウム水溶液で適量除去
して厚みを50μm以下にしたICチップ1を、エポキ
シ系樹脂からなる接着剤5で接着固定する。
An IC chip 1 having a thickness of 50 μm or less obtained by removing an appropriate amount of the back surface with an aqueous potassium hydroxide solution is bonded to an IC card module substrate 20 provided with a sealing frame 9 with an adhesive 5 made of an epoxy resin. Fix it.

【0028】次に同図(b)に示すように、PIQから
なる絶縁材11を滴下し、加熱硬化させる。
Next, as shown in FIG. 3B, the insulating material 11 made of PIQ is dropped and cured by heating.

【0029】次に同図(c)に示すように、パターン電
極15およびボンディングパッド7上の絶縁材11を公
知のリソグラフィ技術により除去する。
Next, as shown in FIG. 3C, the pattern electrode 15 and the insulating material 11 on the bonding pad 7 are removed by a known lithography technique.

【0030】次に同図(d)に示すように、Alからな
る薄膜配線12をリソグラフィ技術により形成する。
Next, as shown in FIG. 3D, the thin film wiring 12 made of Al is formed by the lithography technique.

【0031】最後に同図(e)に示すように、SiO2
フィラ入りのエポキシ樹脂からなる封止材10を充填し
て、図3に示した本発明のICカードモジュールを得
る。
Finally, as shown in FIG. 2 (e), SiO 2
The sealing material 10 made of epoxy resin containing filler is filled to obtain the IC card module of the present invention shown in FIG.

【0032】図5は、本発明の第3実施例を説明するた
めの断面図である。図中の13は例えばステンレス、セ
ラミック、ガラスエポキシ樹脂などからなる補強板で、
モジュール基板2の反対の面に例えばエポキシ系樹脂な
どの接着剤によって封止枠9に接着固定されている。
FIG. 5 is a sectional view for explaining the third embodiment of the present invention. Reference numeral 13 in the figure is a reinforcing plate made of, for example, stainless steel, ceramic, glass epoxy resin, or the like.
An adhesive such as an epoxy resin is used to adhere and fix the sealing frame 9 to the opposite surface of the module substrate 2.

【0033】本構造によれば、モジュール基板2の反対
の面にも補強手段を施すことにより、ICカードモジュ
ール裏面からの直接的なストレスから内部ICチップ1
を保護することができる。なお、本構成は図3に示した
実施例と組み合わせてもよい。
According to this structure, the internal IC chip 1 is prevented from being directly stressed from the rear surface of the IC card module by providing the reinforcing means also on the opposite surface of the module substrate 2.
Can be protected. Note that this configuration may be combined with the embodiment shown in FIG.

【0034】[0034]

【発明の効果】以上説明したように本発明によれば、I
Cカードモジュールは非常に薄いICチップを用いるこ
とにより、ICチップを充分な厚みの剛性の高いモジュ
ール基板で保護できるため、ICカードモジュールは殆
ど曲がらず、内部のICチップにダメージを与えること
はない。よって、外力に対して充分な抗力を有する信頼
性の高いICカードモジュールを得ることができる。
As described above, according to the present invention, I
By using a very thin IC chip in the C card module, the IC chip can be protected by a highly rigid module substrate with a sufficient thickness, so that the IC card module is hardly bent and does not damage the internal IC chip. . Therefore, it is possible to obtain a highly reliable IC card module having sufficient resistance to external force.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1実施例に係るICカードモジュー
ルの縦断面図である。
FIG. 1 is a vertical cross-sectional view of an IC card module according to a first embodiment of the present invention.

【図2】ICチップの製造工程を示す説明図である。FIG. 2 is an explanatory diagram showing a manufacturing process of an IC chip.

【図3】本発明の第2実施例に係るICカードモジュー
ルの縦断面図である。
FIG. 3 is a vertical sectional view of an IC card module according to a second embodiment of the present invention.

【図4】図3に示したICカードモジュールの製造工程
を示す縦断面図である。
4 is a vertical cross-sectional view showing a manufacturing process of the IC card module shown in FIG.

【図5】本発明の第3実施例に係るICカードモジュー
ルの縦断面図である。
FIG. 5 is a vertical sectional view of an IC card module according to a third embodiment of the present invention.

【図6】一般的なICカードの平面図である。FIG. 6 is a plan view of a general IC card.

【図7】従来のICカードモジュールの縦断面図であ
る。
FIG. 7 is a vertical sectional view of a conventional IC card module.

【符号の説明】[Explanation of symbols]

1 ICチップ 1a ウェハ 1b 保護膜 1c アクティブ層 2 モジュール基板 3 外部電極 4 電極パターン 5 接着剤 6 ボンディングワイヤ 7 ボンディングパッド 8 スルーホール 9 封止枠 10 封止材 1 IC Chip 1a Wafer 1b Protective Film 1c Active Layer 2 Module Substrate 3 External Electrode 4 Electrode Pattern 5 Adhesive 6 Bonding Wire 7 Bonding Pad 8 Through Hole 9 Sealing Frame 10 Sealing Material

───────────────────────────────────────────────────── フロントページの続き (72)発明者 玉田 要 大阪府茨木市丑寅一丁目1番88号 日立マ クセル株式会社内 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Kaname Tamada 1-88, Toyora, Ibaraki-shi, Osaka Inside Hitachi Maxell Co., Ltd.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 ICカードに内蔵もしくは装着されるI
Cカードモジュールにおいて、厚さが0.3mm以上の
モジュール基板上に厚さが0.1mm以下の極薄状のI
Cチップ膜を接合したことを特徴とするICカードモジ
ュール。
1. An I built in or attached to an IC card
In the C card module, an ultra-thin I having a thickness of 0.1 mm or less is formed on a module substrate having a thickness of 0.3 mm or more.
An IC card module having a C-chip film bonded thereto.
【請求項2】 請求項1記載において、前記ICチップ
膜がp層とn層を含むアクティブ層と、そのアクティブ
層の片面に形成された保護層とからなることを特徴とす
るICカードモジュール。
2. The IC card module according to claim 1, wherein the IC chip film comprises an active layer including ap layer and an n layer, and a protective layer formed on one surface of the active layer.
【請求項3】 請求項1記載において、前記ICチップ
膜のボンディングパットと前記モジュール基板に設けら
れたパターン電極間の接続を薄膜配線で行ったことを特
徴とするICカードモジュール。
3. The IC card module according to claim 1, wherein the bonding pad of the IC chip film and the pattern electrode provided on the module substrate are connected by thin film wiring.
【請求項4】 請求項1記載において、前記ICカード
モジュールの外部電極とは反対側に補強板が設けられて
いることを特徴とするICカードモジュール。
4. The IC card module according to claim 1, wherein a reinforcing plate is provided on the opposite side of the IC card module from the external electrodes.
JP5199577A 1993-08-11 1993-08-11 Ic card module Pending JPH0752589A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5199577A JPH0752589A (en) 1993-08-11 1993-08-11 Ic card module

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5199577A JPH0752589A (en) 1993-08-11 1993-08-11 Ic card module

Publications (1)

Publication Number Publication Date
JPH0752589A true JPH0752589A (en) 1995-02-28

Family

ID=16410158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5199577A Pending JPH0752589A (en) 1993-08-11 1993-08-11 Ic card module

Country Status (1)

Country Link
JP (1) JPH0752589A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005346559A (en) * 2004-06-04 2005-12-15 Nittoku Eng Co Ltd Ic module and manufacturing method thereof
US7652359B2 (en) 2002-12-27 2010-01-26 Semiconductor Energy Laboratory Co., Ltd. Article having display device
WO2012141246A1 (en) * 2011-04-12 2012-10-18 凸版印刷株式会社 Ic module and ic card

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7652359B2 (en) 2002-12-27 2010-01-26 Semiconductor Energy Laboratory Co., Ltd. Article having display device
US7863116B2 (en) 2002-12-27 2011-01-04 Semiconductor Energy Laboratory Co., Ltd. IC card and booking-account system using the IC card
US8268702B2 (en) 2002-12-27 2012-09-18 Semiconductor Energy Laboratory Co., Ltd. IC card and booking-account system using the IC card
US8674493B2 (en) 2002-12-27 2014-03-18 Semiconductor Energy Laboratory Co., Ltd. IC card and booking-account system using the IC card
JP2005346559A (en) * 2004-06-04 2005-12-15 Nittoku Eng Co Ltd Ic module and manufacturing method thereof
WO2012141246A1 (en) * 2011-04-12 2012-10-18 凸版印刷株式会社 Ic module and ic card
JP6079624B2 (en) * 2011-04-12 2017-02-15 凸版印刷株式会社 IC module and IC card

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