JPH07501124A - 微小機械式配量装置用の微小機械式弁 - Google Patents
微小機械式配量装置用の微小機械式弁Info
- Publication number
- JPH07501124A JPH07501124A JP5500704A JP50070493A JPH07501124A JP H07501124 A JPH07501124 A JP H07501124A JP 5500704 A JP5500704 A JP 5500704A JP 50070493 A JP50070493 A JP 50070493A JP H07501124 A JPH07501124 A JP H07501124A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- micromechanical
- diaphragm
- layer
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0005—Lift valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0015—Diaphragm or membrane valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0044—Electric operating means therefor using thermo-electric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0048—Electric operating means therefor using piezoelectric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0051—Electric operating means therefor using electrostatic means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
- F16K99/0059—Operating means specially adapted for microvalves actuated by fluids actuated by a pilot fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0082—Microvalves adapted for a particular use
- F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0082—Microvalves adapted for a particular use
- F16K2099/0086—Medical applications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Theoretical Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Electrically Driven Valve-Operating Means (AREA)
- Micromachines (AREA)
- Reciprocating Pumps (AREA)
- Multiple-Way Valves (AREA)
Abstract
Description
Claims (13)
- 1.実質的に、上下に設けられ分離不能に相互連結された少なくとも3つの層か らなり、この層が操作要素に連結され、層が入口通路と出口通路または入口小室 と出口小室を形成するために偏平な構造部分を有し、中間の層が入口と出口の間 の分離層として設けられ、外側の層が下層および上層として設けられている、微 小機械式配量装置用の微小機械式弁において、分離層が薄くて弾性的な弁ダイヤ フラム(2)として形成され、この弁ダイヤフラムの両側に、通路や小室を形成 する、入口と出口用の構造部分が加工され、分離層が中央の貫通穴(9)を備え 、分離層の中央の範囲が薄い駆動ダイヤフラム(3,13)として形成された上 層に分離不能に連結され、かつ下層(1)に分離可能に連結され、それによって 入口通路(7)、入口小室(5)、貫通穴(9)、開放状態での出口小室(6) および出口通路(8)を経て媒体が流れ、操作要素(4)が薄い駆動ダイヤフラ ム(3,13)の外面に設けられていることを特徴とする微小機械式配量装置用 の微小機械式弁。
- 2.請求の範囲第1項の微小機械式弁において、分離層の両側に、通路および小 室を形成する入口と出口用のすべての構造部分が加工され、その図心が重なるよ うに、弾性的な弁ダイヤフラム(2)が形成されることを特徴とする微小機械式 弁。
- 3.請求の範囲第1項と第2項の微小機械式弁において、入口小室(5)と出口 小室(6)がほぼ同じ形および大きさを有することを特徴とする微小機械式弁。
- 4.請求の範囲第1項から第3項までのいずれか一つの微小機械式弁において、 入口小室(5)が駆動ダイヤフラム(3)と弁ダイヤフラム(2)の間に設けら れ、出口小室(6)が弁ダイヤフラム(2)と下層(1)の間に設けられ、入口 通路(7)と出口通路(8)が側方へずれて対向していることを特徴とする徴小 機械式弁。
- 5.請求の範囲第1項の微小機械式弁において、弁ダイヤフラム(2)の中央範 囲において、貫通穴(9)として形成された貫通部の周りに、少なくとも一つの 連結要素(10)が駆動ダイヤフラム(3)に分離可能に連結され、この連結要 素が入口小室(5)内で駆動ダイヤフラム(3)まで達し、かつ互いに間隔をお いて設けられていることを特徴とする微小機械式弁。
- 6.請求の範囲第1項と第5項の微小機械式弁において、弁ダイヤフラム(2) の中央範囲において、弁壁(11)が貫通穴(9)の周りにしかも出口側に設け られ、この弁壁が非操作状態で下層(1)の内面に接触していることを特徴とす る微小機械式弁。
- 7.請求の範囲第1項と第6項の微小機械式弁において、弁壁(11)の載置面 と下層(1)の内面の間に、酸化シリコンまたは亜硝酸シリコンのような接着不 可能な材料からなる薄い層(12)が設けられていることを特徴とする微小機械 式弁。
- 8.請求の範囲第1項から第7項までのいずれか一つの微小機械式弁において、 下層(1)、弁ダイヤフラム(2)および駆動ダイヤフラム(3)が特に陽極ボ ンディングによって分離不能に互いに連結されていることを特徴とする微小機械 式弁。
- 9.請求の範囲第1項から第8項までのいずれか一つの微小機械式弁において、 下層(1)と駆動ダイヤフラム(3)が特に温度的に適合したガラス材料からな り、弁ダイヤフラム(2)が半導体シリコン基板からなっていることを特徴とす る微小機械式弁。
- 10.請求の範囲第1項の微小機械式弁において、上層が半導体シリコン基板か らなり、その外側の面に操作要素(4)用の凹部が加工され、残りの層が駆動ダ イヤフラム面(13)を形成し、入口小室(5)と出口小室(6)の形と大きさ が異なるように形成されていることを特徴とする微小機械式弁。
- 11.請求の範囲第10項の微小機械式弁において、上層と分離層がウェーハボ ンディングによって分離不能に連結され、分離層が陽極ボンディングによって下 層に分離不能に連結されていることを特徴とする微小機械式弁。
- 12.請求の範囲第1項から第11項までのいずれか一つの微小機械式弁におい て、操作要素(4)として圧電ダイヤフラム要素が設けられ、この圧電ダイヤフ ラム要素が特に圧電ディスクの形をし、駆動ダイヤフラム(3)の外面にボンデ ィングされていることを特徴とする微小機械式弁。
- 13.請求の範囲第1項から第12項までのいずれか一つの微小機械式弁におい て、弁ダイヤフラム(2)を制御するために、熱電式または静電式ダイヤフラム 励起要素が駆動ダイヤフラム(3)に設けられていることを特徴とする微小機械 式弁。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4138491.1 | 1991-11-23 | ||
DE4138491A DE4138491C2 (de) | 1991-11-23 | 1991-11-23 | Mikromechanisches Ventil für mikromechanische Dosiereinrichtungen |
PCT/DE1992/000976 WO1993010385A1 (de) | 1991-11-23 | 1992-11-19 | Mikromechanisches ventil für mikromechanische dosiereinrichtungen |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH07501124A true JPH07501124A (ja) | 1995-02-02 |
Family
ID=6445391
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5500704A Withdrawn JPH07501124A (ja) | 1991-11-23 | 1992-11-19 | 微小機械式配量装置用の微小機械式弁 |
Country Status (7)
Country | Link |
---|---|
US (1) | US5538221A (ja) |
EP (1) | EP0613535B1 (ja) |
JP (1) | JPH07501124A (ja) |
DE (2) | DE4138491C2 (ja) |
DK (1) | DK0613535T3 (ja) |
ES (1) | ES2080526T3 (ja) |
WO (1) | WO1993010385A1 (ja) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4342849A1 (de) * | 1993-12-10 | 1995-06-14 | Rainer Dr Habil Hintsche | Anordnung und Verfahren zur Mikrodosierung |
DE19511022C1 (de) * | 1995-03-28 | 1996-06-20 | Hahn Schickard Ges | Mikromechanisches Ventil für Mikrodosiereinrichtungen |
US6126140A (en) * | 1997-12-29 | 2000-10-03 | Honeywell International Inc. | Monolithic bi-directional microvalve with enclosed drive electric field |
CA2382371C (en) | 2000-07-07 | 2011-09-20 | Baxter International Inc. | Medical system, method and apparatus employing mems |
DE10048376C2 (de) | 2000-09-29 | 2002-09-19 | Fraunhofer Ges Forschung | Mikroventil mit einem normalerweise geschlossenen Zustand |
US20040120836A1 (en) * | 2002-12-18 | 2004-06-24 | Xunhu Dai | Passive membrane microvalves |
WO2006114596A1 (en) * | 2005-04-26 | 2006-11-02 | Aviza Technology Limited | Microfluidic structures and how to make them |
WO2009020432A1 (en) * | 2007-08-08 | 2009-02-12 | Agency For Science, Technology And Research | An electro-optic device and a method for manufacturing the same |
DE102009007317A1 (de) * | 2009-02-03 | 2010-08-12 | Continental Automotive Gmbh | Ventil |
DE102016014946A1 (de) | 2016-12-14 | 2018-06-14 | Dürr Systems Ag | Druckkopf zur Applikation eines Beschichtungsmittels auf ein Bauteil |
DE102016014944A1 (de) | 2016-12-14 | 2018-06-14 | Dürr Systems Ag | Beschichtungsverfahren und entsprechende Beschichtungseinrichtung |
DE102016014956A1 (de) | 2016-12-14 | 2018-06-14 | Dürr Systems Ag | Beschichtungseinrichtung und zugehöriges Betriebsverfahren |
DE102016014951A1 (de) | 2016-12-14 | 2018-06-14 | Dürr Systems Ag | Beschichtungseinrichtung und zugehöriges Betriebsverfahren |
DE102016014943A1 (de) | 2016-12-14 | 2018-06-14 | Dürr Systems Ag | Druckkopf mit Temperiereinrichtung |
DE102016014955A1 (de) | 2016-12-14 | 2018-06-14 | Dürr Systems Ag | Beschichtungseinrichtung und entsprechendes Beschichtungsverfahren |
DE102016014947A1 (de) * | 2016-12-14 | 2018-06-14 | Dürr Systems Ag | Druckkopf zur Applikation eines Beschichtungsmittels |
DE102016014952A1 (de) | 2016-12-14 | 2018-06-14 | Dürr Systems Ag | Beschichtungseinrichtung zur Beschichtung von Bauteilen |
DE102016014948A1 (de) | 2016-12-14 | 2018-06-14 | Dürr Systems Ag | Druckkopf und zugehöriges Betriebsverfahren |
DE102016014919A1 (de) | 2016-12-14 | 2018-06-14 | Dürr Systems Ag | Applikationsvorrichtung und Verfahren zum Applizieren eines Beschichtungsmittels |
DE102016014953A1 (de) | 2016-12-14 | 2018-06-14 | Dürr Systems Ag | Lackieranlage und entsprechendes Lackierverfahren |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3814150A1 (de) * | 1988-04-27 | 1989-11-09 | Draegerwerk Ag | Ventilanordnung aus mikrostrukturierten komponenten |
US4826131A (en) * | 1988-08-22 | 1989-05-02 | Ford Motor Company | Electrically controllable valve etched from silicon substrates |
CH679555A5 (ja) * | 1989-04-11 | 1992-03-13 | Westonbridge Int Ltd | |
DE3919876A1 (de) * | 1989-06-19 | 1990-12-20 | Bosch Gmbh Robert | Mikroventil |
DE3936647C1 (ja) * | 1989-11-03 | 1990-10-31 | Jas Ag Jet Age Systems, Kloten, Ch | |
DE4035852A1 (de) * | 1990-11-10 | 1992-05-14 | Bosch Gmbh Robert | Mikroventil in mehrschichtenaufbau |
US5176358A (en) * | 1991-08-08 | 1993-01-05 | Honeywell Inc. | Microstructure gas valve control |
-
1991
- 1991-11-23 DE DE4138491A patent/DE4138491C2/de not_active Expired - Fee Related
-
1992
- 1992-11-19 WO PCT/DE1992/000976 patent/WO1993010385A1/de active IP Right Grant
- 1992-11-19 DK DK92923356.7T patent/DK0613535T3/da active
- 1992-11-19 US US08/240,736 patent/US5538221A/en not_active Expired - Fee Related
- 1992-11-19 EP EP92923356A patent/EP0613535B1/de not_active Expired - Lifetime
- 1992-11-19 DE DE59204154T patent/DE59204154D1/de not_active Expired - Fee Related
- 1992-11-19 JP JP5500704A patent/JPH07501124A/ja not_active Withdrawn
- 1992-11-19 ES ES92923356T patent/ES2080526T3/es not_active Expired - Lifetime
Non-Patent Citations (2)
Title |
---|
CELLULAR IMMUNOLOGY=1983 * |
PROC.NATL.ACAD.SCI.USA=1986 * |
Also Published As
Publication number | Publication date |
---|---|
ES2080526T3 (es) | 1996-02-01 |
DE4138491A1 (de) | 1993-05-27 |
DE59204154D1 (de) | 1995-11-30 |
DE4138491C2 (de) | 1995-07-20 |
DK0613535T3 (da) | 1996-03-04 |
US5538221A (en) | 1996-07-23 |
EP0613535A1 (de) | 1994-09-07 |
WO1993010385A1 (de) | 1993-05-27 |
EP0613535B1 (de) | 1995-10-25 |
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