JPH0738466B2 - Magnetic sensor - Google Patents
Magnetic sensorInfo
- Publication number
- JPH0738466B2 JPH0738466B2 JP60041854A JP4185485A JPH0738466B2 JP H0738466 B2 JPH0738466 B2 JP H0738466B2 JP 60041854 A JP60041854 A JP 60041854A JP 4185485 A JP4185485 A JP 4185485A JP H0738466 B2 JPH0738466 B2 JP H0738466B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magnetic sensor
- shield
- magnetic sensitive
- sensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/80—Constructional details
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
- Hall/Mr Elements (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は、ビデオ用キャプスタンモータ等の回転速度検
出用の磁気センサに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic sensor for detecting a rotation speed of a video capstan motor or the like.
（従来の技術） 従来のこの種類に属する磁気センサについて第３図およ
び第４図により説明する。(Prior Art) A conventional magnetic sensor of this type will be described with reference to FIGS. 3 and 4.
第３図は、例えば特開昭59−19810号公報に示されてい
る磁気センサの平面図である。同図において、磁気セン
サは、ガラス基板１の表面にニッケルとコバルト又はニ
ッケルと鉄からなる強磁性合金を真空蒸着法によって全
面にわたって蒸着した後に、写真製版技術によって２個
の感磁部２および３とこれらに接続された端子部4,5お
よび６を形成し、さらにバイアス磁界７を45゜方向に加
えたものである。FIG. 3 is a plan view of a magnetic sensor disclosed in, for example, Japanese Patent Laid-Open No. 59-19810. In the figure, in the magnetic sensor, a ferromagnetic alloy made of nickel and cobalt or nickel and iron is vapor-deposited over the entire surface of a glass substrate 1 by a vacuum vapor deposition method, and then two magnetic sensitive portions 2 and 3 are formed by photolithography. And terminal portions 4, 5 and 6 connected to them are formed, and a bias magnetic field 7 is further applied in the direction of 45 °.
第４図は上記の磁気センサをブラシレスモータに取り付
けた、模型的な斜視図で、磁気センサはモータの外周に
設けた回転信号用着磁リング８の外径面にこれに相対向
するように装着し、その両側の端子部４および６を電池
９に接続することによって、中間の端子部５からモータ
の回転情報を得ていた。FIG. 4 is a schematic perspective view in which the above magnetic sensor is attached to a brushless motor. The magnetic sensor is arranged so as to face the outer diameter surface of the rotation signal magnetizing ring 8 provided on the outer periphery of the motor. By mounting and connecting the terminals 4 and 6 on both sides to the battery 9, the rotation information of the motor was obtained from the intermediate terminal 5.
（発明が解決しようとする問題点） しかしながら、このような構造の磁気センサでは、モー
タ駆動用磁石10からの感磁部と同一平面上に位置する漏
洩磁界の成分が、感磁部２および３に影響を及ぼして、
精度の悪い回転情報しか得られないという問題点があっ
た。(Problems to be Solved by the Invention) However, in the magnetic sensor having such a structure, the component of the leakage magnetic field located on the same plane as the magnetic sensitive portion from the motor driving magnet 10 is the magnetic sensitive portions 2 and 3. Affecting
There was a problem that only rotation information with poor accuracy could be obtained.
（問題点を解決するための手段） 上記の問題を解決するために、基板上に形成した強磁性
薄膜からなる感磁部と、この感磁部と同一平面内に、前
記感磁部と同一材料で、前記感磁部を囲むように形成し
たシールド部とを有するものである。(Means for Solving the Problems) In order to solve the above-mentioned problems, a magnetic sensitive section made of a ferromagnetic thin film formed on a substrate and the same magnetic sensitive section as the magnetic sensitive section in the same plane as the magnetic sensitive section. A shield part formed of a material so as to surround the magnetically sensitive part.
（作 用） 上記の構造にすることによって、モータ駆動用磁石10か
らの漏洩磁界を磁気シールド側にバイパスさせて感磁部
への影響を低減させるものである。(Operation) With the above-described structure, the leakage magnetic field from the motor driving magnet 10 is bypassed to the magnetic shield side to reduce the influence on the magnetically sensitive portion.
（実施例） 本発明の実施例を第１図および第２図により説明する。(Embodiment) An embodiment of the present invention will be described with reference to FIGS. 1 and 2.
第１図は本発明による磁気センサの平面図で、磁気セン
サは、ガラス基板１の表面に全面にわたってニッケルと
コバルトからなる強磁性合金を真空蒸着した後、感磁部
２および３の両側に端子部４および６に連なるシールド
部11および12を写真製版技術を用いて形成したものであ
る。また、シールド部11および12は、感磁部２および３
をシールド部11および12により囲むように形成されてい
る。なお、端子部５が感磁部２および３に接続されてい
ることは従来例と同じである。FIG. 1 is a plan view of a magnetic sensor according to the present invention. In the magnetic sensor, a ferromagnetic alloy made of nickel and cobalt is vacuum-deposited on the entire surface of a glass substrate 1, and terminals are provided on both sides of the magnetic sensitive portions 2 and 3. The shield portions 11 and 12 connected to the portions 4 and 6 are formed by using a photomechanical technique. Further, the shield parts 11 and 12 have the magnetic sensitive parts 2 and 3, respectively.
Is formed so as to be surrounded by the shield parts 11 and 12. Note that the terminal portion 5 is connected to the magnetic sensitive portions 2 and 3 as in the conventional example.
具体的に述べれば、ニッケル−コバルト合金膜の膜厚を
1000Å、感磁部２および３とその両側のシールド部11お
よび12とのそれぞれの間隔を0.2mm、感磁部２および３
の長さを2mm、これら両者相互の間隔を0.22mmにそれぞ
れ設定し、バイアス磁界７を45゜方向に150ガウス加え
て磁気センサとし、ブラシレスモータへの装着は第４図
の従来例と同様に、外周に設けた回転信号用着磁リング
８の外周面近傍に、外周面に相対向するように装着し
た。Specifically, the thickness of the nickel-cobalt alloy film is
1000 Å, the distance between the magnetic sensitive parts 2 and 3 and the shield parts 11 and 12 on both sides thereof is 0.2 mm, the magnetic sensitive parts 2 and 3
2mm, the distance between them is set to 0.22mm, and the bias magnetic field 7 is added by 150 gauss in the direction of 45 ° to make a magnetic sensor. Mounting on the brushless motor is the same as the conventional example in FIG. The magnetizing ring 8 for rotation signals provided on the outer periphery was mounted near the outer peripheral surface so as to face the outer peripheral surface.
磁気センサの精度を測定するために、磁気センサの中央
の端子部５からの出力を、第２図に示すように増幅器13
で増幅した後、弁別器14で信号周波数を除去してから周
波数分析器15により周波数分析を行ないモータ駆動用磁
石10による波形成分を取り出した。第３図に示した例で
はN,S8極なので１回転について4Hzの成分となる。In order to measure the accuracy of the magnetic sensor, the output from the central terminal portion 5 of the magnetic sensor is fed to an amplifier 13 as shown in FIG.
After being amplified by, the signal frequency was removed by the discriminator 14, and then frequency analysis was performed by the frequency analyzer 15 to extract the waveform component by the motor driving magnet 10. In the example shown in FIG. 3, since there are N and S8 poles, there is a 4 Hz component for one rotation.
従来例と本発明の磁気センサを比較した結果、従来例で
は−30dBであったものが、上記の実施例では−38dBとな
り、8dB検出精度が向上した。As a result of comparison between the conventional example and the magnetic sensor of the present invention, -30 dB in the conventional example was -38 dB in the above example, and the 8 dB detection accuracy was improved.
（発明の効果） 以上、説明した本発明によれば、感磁部と同一平面内
に、前記感磁部と同一材料で、前記感磁部を囲むように
シールド部を形成することにより、感磁部と同一平面上
に位置する漏洩磁界成分をシールドすることが可能とな
り、漏洩磁界が検出磁界と重なって検出磁界が乱れるこ
とのない安定した検出信号が得られる。しかも、シール
ド部は、写真製版技術によって端子部や感磁部と同時に
形成されるため、従来と全く同じ工程で造ることができ
る。(Effect of the Invention) According to the present invention described above, by forming a shield part in the same plane as the magnetic sensing part so as to surround the magnetic sensing part with the same material as the magnetic sensing part, It becomes possible to shield the leakage magnetic field component located on the same plane as the magnetic portion, and a stable detection signal can be obtained without the leakage magnetic field overlapping the detection magnetic field and disturbing the detection magnetic field. Moreover, since the shield portion is formed at the same time as the terminal portion and the magnetic sensitive portion by the photoengraving technique, the shield portion can be manufactured in exactly the same process as the conventional one.
第１図は本発明による磁気センサの平面図、第２図は磁
気センサの精度を測定する回路のブロック図、第３図は
従来の磁気センサの平面図、第４図は、磁気センサをブ
ラシレスモータに取り付けた模型的斜視図である。 １……基板、2,3……感磁部、4,5,6……端子部、７……
バイアス磁界、８……着磁リング、９……電池、10……
モータ駆動用磁石、11,12……シールド部、13……増幅
器、14……弁別器、15……周波数分析器。FIG. 1 is a plan view of a magnetic sensor according to the present invention, FIG. 2 is a block diagram of a circuit for measuring the accuracy of the magnetic sensor, FIG. 3 is a plan view of a conventional magnetic sensor, and FIG. 4 is a brushless magnetic sensor. It is a model perspective view attached to the motor. 1 ... Substrate, 2,3 ... Magnetic sensitive part, 4,5,6 ... Terminal part, 7 ...
Bias magnetic field, 8 ... Magnetizing ring, 9 ... Battery, 10 ...
Motor drive magnets, 11, 12 ...... shield, 13 ...... amplifier, 14 …… discriminator, 15 …… frequency analyzer.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 前 肇 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (56)参考文献 特開 昭58−106462（ＪＰ，Ａ) 特開 昭59−16123（ＪＰ，Ａ) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hajime Hajime 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (56) Reference JP-A-58-106462 (JP, A) JP-A-59-16123 (JP, A)
Claims (1)
部と、この感磁部と同一平面内に、前記感磁部と同一材
料で、前記感磁部を囲むように形成したシールド部とを
有することを特徴とする磁気センサ。1. A magnetic sensitive section formed of a ferromagnetic thin film formed on a substrate, and a shield formed of the same material as the magnetic sensitive section so as to surround the magnetic sensitive section in the same plane as the magnetic sensitive section. And a magnetic sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60041854A JPH0738466B2 (en) | 1985-03-05 | 1985-03-05 | Magnetic sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60041854A JPH0738466B2 (en) | 1985-03-05 | 1985-03-05 | Magnetic sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61201486A JPS61201486A (en) | 1986-09-06 |
| JPH0738466B2 true JPH0738466B2 (en) | 1995-04-26 |
Family
ID=12619835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60041854A Expired - Fee Related JPH0738466B2 (en) | 1985-03-05 | 1985-03-05 | Magnetic sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0738466B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0677557A (en) * | 1992-07-30 | 1994-03-18 | Mitsubishi Electric Corp | Hybrid intengrated circuit device |
| JP3397026B2 (en) * | 1995-12-06 | 2003-04-14 | トヨタ自動車株式会社 | Magnetic rotation detector |
| US6714374B1 (en) * | 2000-08-31 | 2004-03-30 | Nec Corporation | Magnetoresistive sensor, magnetoresistive head, and magnetic recording/reproducing apparatus |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58106462A (en) * | 1981-12-18 | 1983-06-24 | Matsushita Electric Ind Co Ltd | Rotation detector |
| JPS5916123A (en) * | 1982-07-16 | 1984-01-27 | Matsushita Electric Ind Co Ltd | Thin film magnetic head |
-
1985
- 1985-03-05 JP JP60041854A patent/JPH0738466B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61201486A (en) | 1986-09-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |