JPH0735514A - Film thickness measuring device - Google Patents
Film thickness measuring deviceInfo
- Publication number
- JPH0735514A JPH0735514A JP5156494A JP15649493A JPH0735514A JP H0735514 A JPH0735514 A JP H0735514A JP 5156494 A JP5156494 A JP 5156494A JP 15649493 A JP15649493 A JP 15649493A JP H0735514 A JPH0735514 A JP H0735514A
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- Prior art keywords
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- film thickness
- image
- measured
- camera
- Prior art date
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- Length Measuring Devices By Optical Means (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は膜厚測定装置に関し、特
に測定対象の試料からの反射光を検出し試料の膜厚を測
定する膜厚測定装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film thickness measuring device, and more particularly to a film thickness measuring device for detecting the reflected light from a sample to be measured and measuring the film thickness of the sample.
【０００２】[0002]
【従来の技術】従来の膜厚測定装置は、例えば、特開昭
６１−１１７４０４号公報に記述されている。この膜厚
測定装置は、図４に示すように、ステージ５１に載せた
被測定試料５０を照射する光源５２と、被測定試料５０
を撮影し被測定試料５０からの反射光を検出するカメラ
５３と、カメラ５３から入力したた画像情報を保存する
画像記憶部５４と、入力した画像情報から波長分析を行
う波長分析部５５と、分析したデータを解析して被測定
試料５０の膜厚を求める膜厚解析部５６とから構成され
る。そして、膜厚解析部５６は、予じめ波長分析データ
と膜厚との関係を示す基準データを備えており、波長分
析部５５から得た波長分析データを基に、基準データを
検索し膜厚を求める。2. Description of the Related Art A conventional film thickness measuring device is described in, for example, Japanese Patent Application Laid-Open No. 61-117404. As shown in FIG. 4, this film thickness measuring device includes a light source 52 for irradiating a measured sample 50 mounted on a stage 51, and a measured sample 50.
A camera 53 that captures an image and detects reflected light from the measured sample 50, an image storage unit 54 that stores image information input from the camera 53, and a wavelength analysis unit 55 that performs wavelength analysis from the input image information, A film thickness analysis unit 56 that analyzes the analyzed data to obtain the film thickness of the measured sample 50. The film thickness analysis unit 56 is provided with reference data indicating the relationship between the preliminary wavelength analysis data and the film thickness. Based on the wavelength analysis data obtained from the wavelength analysis unit 55, the film thickness analysis unit 56 searches for the reference data. Find the thickness.
【０００３】また、別の従来例として特開平２−９００
０８号公報に記述されている。これは、基板上に塗布さ
れたレジスト膜の厚さを測定するものであって、基板を
加熱し、その際に基板上のレジスト膜表面から放射され
る赤外線エネルギー強度を測定し、予め求めておいた赤
外線エネルギー強度とレジスト膜厚との関係からレジス
ト膜の膜厚を求めるものである。As another conventional example, Japanese Patent Laid-Open No. 2-900
08 publication. This is to measure the thickness of the resist film applied on the substrate, heating the substrate, measuring the infrared energy intensity radiated from the resist film surface on the substrate at that time, to obtain in advance The film thickness of the resist film is obtained from the relationship between the infrared energy intensity and the resist film thickness.
【０００４】[0004]
【発明が解決しようとする課題】上述した前者の例で
は、試料表面状態をカメラを用いて入力する機構を有
し、入力画像を波長解析して求められた波長分布にもと
づき基づいて、あらかじめ保存した波長分布と膜厚との
相関関係のデータを検索し膜厚を求める方式であるため
に、多量の基準データを必要とし、試料の膜厚を求める
ために時間がかかるという欠点がある。In the former example described above, there is a mechanism for inputting the sample surface state using a camera, and the image is saved in advance based on the wavelength distribution obtained by wavelength analysis of the input image. Since this is a method for obtaining the film thickness by searching the data of the correlation between the wavelength distribution and the film thickness, there is a drawback that a large amount of reference data is required and it takes time to obtain the film thickness of the sample.
【０００５】また、後者の例では、試料に物理的な処理
を施し、それによって発生する影響を基に膜厚を測定す
る原理を利用しているため、測定時に試料の変質が起こ
る場合があり、すべての試料に対して適用できないとい
う欠点がある。Further, in the latter example, the principle of subjecting the sample to physical treatment and measuring the film thickness on the basis of the influence caused by it is used, so that the sample may be altered during the measurement. However, there is a drawback that it cannot be applied to all samples.
【０００６】[0006]
【課題を解決するための手段】本発明の膜厚測定装置
は、被測定試料の表面に光を照射する光源と、前記被測
定試料からの反射光を撮影するカメラ部と、このカメラ
部の露出を制御するカメラ露出制御部と、前記カメラ部
が撮影した画像を画像情報として記憶する画像記憶部
と、記憶した画像情報から背景部分と被測定試料部分と
を識別する背景識別部と、識別された前記被測定試料部
分の画像情報から任意の箇所を切り出しその範囲の平均
濃淡値を計算する平均濃淡値計算部と、前記切り出した
範囲の画像情報の濃淡ヒストグラムを算出する濃淡ヒス
トグラム算出部と、算出した前記濃淡ヒストグラムから
前記被測定試料部主要部の代表的な濃淡値を計算する代
表濃淡値計算部と、計算した前記平均濃淡値，前記代表
濃淡値および予め備える基準データとを基に解析し被測
定試料の膜厚を求める膜厚解析部とを備えている。A film thickness measuring apparatus of the present invention comprises a light source for irradiating the surface of a sample to be measured with light, a camera section for photographing reflected light from the sample to be measured, and a camera section for the camera section. A camera exposure control unit that controls exposure, an image storage unit that stores an image captured by the camera unit as image information, a background identification unit that identifies a background portion and a measured sample portion from the stored image information, and an identification unit. An average gray value calculation unit that calculates an average gray value of the range by cutting an arbitrary portion from the image information of the measured sample portion, and a gray histogram calculation unit that calculates a gray histogram of the image information of the cut range. A representative gray value calculation unit that calculates a typical gray value of the main part of the measured sample portion from the calculated gray histogram, the calculated average gray value, the representative gray value and It analyzes based on the reference data and a film thickness analyzer for determining the thickness of the sample to be measured.
【０００７】[0007]
【実施例】次に、本発明について図面を参照して詳細に
説明する。The present invention will be described in detail with reference to the drawings.
【０００８】図１は、本発明の一実施例を示す構成図で
あり、図２は、図１の画像記憶装置２および画像処理装
置３の詳細を示す構成図である。また、図３は、膜厚解
析に用いる基準データの構成例を示す図である。FIG. 1 is a block diagram showing an embodiment of the present invention, and FIG. 2 is a block diagram showing details of the image storage device 2 and the image processing device 3 of FIG. Further, FIG. 3 is a diagram showing a configuration example of reference data used for film thickness analysis.
【０００９】本発明の膜厚測定装置は、図１に示すよう
に、被測定試料１０を載せるステージ１１と、被測定試
料１０およびステージ１１に光を照射する光源１２と被
測定試料１０を撮影し被測定試料１０の表面からの反射
光を検出するカメラ１３とを有する実体顕微鏡１と、カ
メラ１３が撮影した被測定試料１０の表面状態を画像情
報として記憶する画像記憶部２と、画像記憶部２に保存
した画像情報を処理する画像処理部３と、画像処理部３
の処理結果を基に被測定試料１０の膜厚を解析する膜厚
解析部４と、入力画像の濃淡が適正な範囲になるように
カメラ１３を制御するカメラ露出制御回路５とから構成
される。また、膜厚解析部４は、予め実験により求めた
平均濃淡値，代表濃淡値および膜厚の相関を示すデータ
を基準データ４１を備えている。As shown in FIG. 1, the film thickness measuring apparatus of the present invention photographs the stage 11 on which the sample 10 to be measured is placed, the sample 10 to be measured, the light source 12 for irradiating the stage 11 with light, and the sample 10 to be measured. Then, a stereoscopic microscope 1 having a camera 13 for detecting reflected light from the surface of the sample to be measured 10, an image storage section 2 for storing the surface state of the sample to be measured 10 photographed by the camera 13 as image information, and an image memory An image processing unit 3 for processing the image information stored in the unit 2, and an image processing unit 3
And a camera exposure control circuit 5 for controlling the camera 13 so that the shading of the input image falls within an appropriate range. . Further, the film thickness analysis unit 4 is provided with reference data 41, which is data indicating a correlation between an average gray value, a representative gray value, and a film thickness, which are previously obtained by an experiment.
【００１０】続いて、図２を参照すると、画像記憶部２
は、ステージ１１に被測定試料１０を載せた状態の画像
を記憶する原画像記憶部２１と、ステージ１１に被測定
試料１０を載せていない状態の画像を記憶する背景記憶
部２２と、処理対象記憶部２３とから構成される。Next, referring to FIG. 2, the image storage unit 2
Is an original image storage unit 21 that stores an image of a state in which the measured sample 10 is placed on the stage 11, a background storage unit 22 that stores an image of a state in which the measured sample 10 is not placed on the stage 11, and a processing target. It is composed of a storage unit 23.
【００１１】画像処理部３は、画像記憶部２の原画像記
憶部２１，背景記憶部２２からのデータを入力し、これ
から背景部分の濃淡を補正する背景補正部３１と、背景
補正部３１の出力データを基に濃淡の平均を計算する平
均値計算部３２と、濃淡の分布を求めるヒストグラム算
出部３３と、求めた濃淡分布データから処理対象画像の
うち最も代表的な濃淡値を求める代表濃淡値計算部３４
と、処理対象記憶部２３からのデータを一時的に記憶す
る一時記憶部３５とから構成される。The image processing unit 3 inputs data from the original image storage unit 21 and the background storage unit 22 of the image storage unit 2, and a background correction unit 31 for correcting the shading of the background portion and a background correction unit 31. An average value calculation unit 32 that calculates the average of the light and shade based on the output data, a histogram calculation unit 33 that obtains the light and shade distribution, and a representative light and shade that obtains the most representative light and shade value of the processing target image from the obtained light and shade distribution data Value calculator 34
And a temporary storage unit 35 that temporarily stores the data from the processing target storage unit 23.
【００１２】次に、本実施例の動作について図面を参照
して説明する。Next, the operation of this embodiment will be described with reference to the drawings.
【００１３】まず、ステージ１１に被測定試料１０を載
せない状態で、画像記憶部２の背景記憶部２２にカメラ
１３から写し出された画像を入力する。続いて、ステー
ジ１１に被測定試料１０を載せ、画像記憶部２の原画像
記憶部２１にカメラ１３から写し出された画像を入力す
る。First, the image projected from the camera 13 is input to the background storage unit 22 of the image storage unit 2 with the sample 10 to be measured not placed on the stage 11. Then, the sample 10 to be measured is placed on the stage 11, and the image projected from the camera 13 is input to the original image storage unit 21 of the image storage unit 2.
【００１４】ここで、背景補正部３１は原画像記憶部２
１と背景記憶部２２の内容を入力し、これらの差分を計
算することにより背景部分の濃淡を補正する。補正後の
画像は処理対象記憶部２３へ出力される。このとき、処
理対象記憶部２３に記憶された画像のうち、濃淡が最小
もしくは最大値をとる画素数が基準の数以上になった場
合、カメラ露出制御回路５はカメラ１３の動作を制御
し、最小もしくは最大値をとる画素の数を基準値まで減
少させる。その後、カメラ１３から原画像記憶部２１お
よび背景記憶部２２に再度画像入力を行う。Here, the background correction unit 31 is the original image storage unit 2.
1 and the contents of the background storage unit 22 are input, and the difference between these is calculated to correct the shading of the background portion. The corrected image is output to the processing target storage unit 23. At this time, in the image stored in the processing target storage unit 23, when the number of pixels having the minimum or maximum density becomes equal to or larger than the reference number, the camera exposure control circuit 5 controls the operation of the camera 13. The number of pixels having the minimum or maximum value is reduced to the reference value. After that, the image is again input from the camera 13 to the original image storage unit 21 and the background storage unit 22.
【００１５】画像処理部３は、処理対象記憶部２３から
平均濃淡値および代表濃淡値を求めるための処理範囲を
指定し、その範囲の画像情報を一時記憶部３５に移す。
平均値計算部３２は、一時記憶部３５から処理範囲の画
像を入力し、濃淡値の平均を計算し、それを平均濃淡値
データとして膜厚解析部４へ出力する。The image processing unit 3 specifies a processing range for obtaining the average gray value and the representative gray value from the processing target storage unit 23, and transfers the image information of the range to the temporary storage unit 35.
The average value calculation unit 32 inputs the image of the processing range from the temporary storage unit 35, calculates the average of the grayscale values, and outputs it as the average grayscale value data to the film thickness analysis unit 4.
【００１６】同様に、ヒストグラム算出部３３は、一時
記憶部３５から処理範囲の画像情報を入力し、濃淡値の
分布を算出して濃淡分布データを代表濃淡値計算部３４
へ出力する。代表濃淡値計算部３４は、入力した濃淡分
布データから最大分布をなす濃淡値を求め、それを代表
濃淡値データとして膜厚解析部４に出力する。膜厚解析
部４は、画像処理部３から平均濃淡値データおよび代表
濃淡値データを入力する。そして、予め備えしている基
準データ４１から相当する基準データを検索する。検索
された基準データは、図３に示すように、平均濃淡値
ａ，代表濃淡値ｍおよびその状態における膜厚値ｄから
構成される。この、膜厚値ｄは、表面の濃淡により
（１）式に示すように一意的に求められる。Similarly, the histogram calculating section 33 inputs the image information of the processing range from the temporary storage section 35, calculates the distribution of the gradation values, and calculates the gradation distribution data as the representative gradation value calculating section 34.
Output to. The representative shade value calculation unit 34 obtains a shade value having the maximum distribution from the inputted shade distribution data, and outputs it as the representative shade value data to the film thickness analysis unit 4. The film thickness analysis unit 4 inputs the average gray value data and the representative gray value data from the image processing unit 3. Then, the corresponding reference data is retrieved from the reference data 41 provided in advance. As shown in FIG. 3, the retrieved reference data is composed of an average gray value a, a representative gray value m, and a film thickness value d in that state. The film thickness value d is uniquely determined by the lightness and darkness of the surface as shown in equation (1).
【００１７】ｄ＝ｆ（ａ，ｍ） …………（１） ここで、関数ｆは、試料および試料の膜の材質により決
定される関数である。D = f (a, m) (1) Here, the function f is a function determined by the material of the sample and the film of the sample.
【００１８】これにより、膜厚解析部４は、平均濃淡値
データ，代表濃淡値データおよび基準データから試料の
膜厚を求めることができる。Thus, the film thickness analyzing section 4 can obtain the film thickness of the sample from the average gray value data, the representative gray value data and the reference data.
【００１９】[0019]
【発明の効果】以上説明したように本発明の膜厚測定装
置は、被測定試料の膜厚を解析するための基準データと
して、被測定試料からの反射光の濃淡値を用いることに
より、基準データの構造が単純になり、検索や解析を高
速かつ容易にできるという効果がある。As described above, the film thickness measuring apparatus of the present invention uses the gray value of the reflected light from the sample to be measured as the reference data for analyzing the film thickness of the sample to be measured. This has the effect of simplifying the data structure and facilitating search and analysis at high speed.
【図１】本発明の一実施例を示す構成図である。FIG. 1 is a configuration diagram showing an embodiment of the present invention.
【図２】図１の画像記憶部２および画像処理部３の詳細
を示す構成図である。FIG. 2 is a configuration diagram showing details of an image storage unit 2 and an image processing unit 3 in FIG.
【図３】膜厚解析に用いる基準データの構成例を示す図
である。FIG. 3 is a diagram showing a configuration example of reference data used for film thickness analysis.
【図４】従来例を示す構成図である。FIG. 4 is a configuration diagram showing a conventional example.
１ 実体顕微鏡 ２，５４ 画像記憶部 ３ 画像処理部 ４，５６ 膜厚解析部 ５ カメラ露出制御回路 １０，５０ 被測定試料 １１，５１ ステージ １２，５２ 光源 １３，５３ カメラ ２１ 原画像記憶部 ２２ 背景記憶部 ２３ 処理対象記憶部 ３１ 背景補正部 ３２ 平均濃淡値計算部 ３３ 濃淡ヒストグラム算出部 ３４ 代表濃淡値計算部 ３５ 一時記憶部 ４１ 基準データ ５５ 波長分析部 1 Stereoscopic Microscope 2,54 Image Storage Section 3 Image Processing Section 4,56 Film Thickness Analysis Section 5 Camera Exposure Control Circuit 10,50 Measured Sample 11,51 Stage 12,52 Light Source 13,53 Camera 21 Original Image Storage Section 22 Background Storage unit 23 Processing target storage unit 31 Background correction unit 32 Average gray value calculation unit 33 Gray histogram calculation unit 34 Representative gray value calculation unit 35 Temporary storage unit 41 Reference data 55 Wavelength analysis unit
Claims (1)
と、前記被測定試料からの反射光を撮影するカメラ部
と、このカメラ部の露出を制御するカメラ露出制御部
と、前記カメラ部が撮影した画像を画像情報として記憶
する画像記憶部と、記憶した画像情報から背景部分と被
測定試料部分とを識別する背景識別部と、識別された前
記被測定試料部分の画像情報から任意の箇所を切り出し
その範囲の平均濃淡値を計算する平均濃淡値計算部と、
前記切り出した範囲の画像情報の濃淡ヒストグラムを算
出する濃淡ヒストグラム算出部と、算出した前記濃淡ヒ
ストグラムから前記被測定試料部主要部の代表的な濃淡
値を計算する代表濃淡値計算部と、計算した前記平均濃
淡値，前記代表濃淡値および予め備える基準データとを
基に解析し被測定試料の膜厚を求める膜厚解析部とを備
えることを特徴とする膜厚測定装置。1. A light source for irradiating the surface of a sample to be measured with light, a camera section for photographing reflected light from the sample to be measured, a camera exposure control section for controlling exposure of the camera section, and the camera section. An image storage unit that stores the image captured by the device as image information, a background identification unit that identifies a background portion and a measured sample portion from the stored image information, and an arbitrary image information from the identified image information of the measured sample portion. An average gray value calculation unit that cuts out a portion and calculates the average gray value of the range,
A grayscale histogram calculation unit that calculates a grayscale histogram of the image information in the clipped range, and a representative grayscale value calculation unit that calculates a typical grayscale value of the measured sample main part from the calculated grayscale histogram, A film thickness measuring device, comprising: a film thickness analyzing unit that analyzes the film based on the average gray value, the representative gray value, and reference data provided in advance to obtain a film thickness of a sample to be measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5156494A JPH081370B2 (en) | 1993-06-28 | 1993-06-28 | Film thickness measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5156494A JPH081370B2 (en) | 1993-06-28 | 1993-06-28 | Film thickness measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0735514A true JPH0735514A (en) | 1995-02-07 |
| JPH081370B2 JPH081370B2 (en) | 1996-01-10 |
Family
ID=15628983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5156494A Expired - Fee Related JPH081370B2 (en) | 1993-06-28 | 1993-06-28 | Film thickness measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH081370B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006337310A (en) * | 2005-06-06 | 2006-12-14 | Global Nuclear Fuel-Japan Co Ltd | Method for measuring thickness of oxide film on metal surface |
| US7679739B2 (en) | 2005-09-02 | 2010-03-16 | Panasonic Corporation | Device and method for measuring microporous film on battery electrode plate, coater equipped with film measuring device, and coating method using film measuring method |
| CN102319654A (en) * | 2011-04-26 | 2012-01-18 | 东莞市九州浩德新能源设备有限公司 | Dynamic image monitoring control system for coating machine |
| CN107860322A (en) * | 2017-12-07 | 2018-03-30 | 东华大学 | A kind of thickness of liquid film measurement apparatus and method |
| CN109739166A (en) * | 2018-11-30 | 2019-05-10 | 惠州锂威新能源科技有限公司 | A kind of coating size surveys the intelligent monitor system of length |
-
1993
- 1993-06-28 JP JP5156494A patent/JPH081370B2/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006337310A (en) * | 2005-06-06 | 2006-12-14 | Global Nuclear Fuel-Japan Co Ltd | Method for measuring thickness of oxide film on metal surface |
| US7679739B2 (en) | 2005-09-02 | 2010-03-16 | Panasonic Corporation | Device and method for measuring microporous film on battery electrode plate, coater equipped with film measuring device, and coating method using film measuring method |
| US7952703B2 (en) | 2005-09-02 | 2011-05-31 | Panasonic Corporation | Device and method for measuring microporous film on battery electrode plate, coater equipped with film measuring device, and coating method using film measuring method |
| CN102319654A (en) * | 2011-04-26 | 2012-01-18 | 东莞市九州浩德新能源设备有限公司 | Dynamic image monitoring control system for coating machine |
| CN107860322A (en) * | 2017-12-07 | 2018-03-30 | 东华大学 | A kind of thickness of liquid film measurement apparatus and method |
| CN109739166A (en) * | 2018-11-30 | 2019-05-10 | 惠州锂威新能源科技有限公司 | A kind of coating size surveys the intelligent monitor system of length |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH081370B2 (en) | 1996-01-10 |
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