JPH07272239A - Magnetic recording medium including reproduction-only region and its production - Google Patents

Magnetic recording medium including reproduction-only region and its production

Info

Publication number
JPH07272239A
JPH07272239A JP5852894A JP5852894A JPH07272239A JP H07272239 A JPH07272239 A JP H07272239A JP 5852894 A JP5852894 A JP 5852894A JP 5852894 A JP5852894 A JP 5852894A JP H07272239 A JPH07272239 A JP H07272239A
Authority
JP
Japan
Prior art keywords
magnetic
recording medium
forming
area
magnetic recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5852894A
Other languages
Japanese (ja)
Inventor
Yoshinori Miyamura
芳徳 宮村
Keikichi Ando
圭吉 安藤
Shinkichi Horigome
信吉 堀籠
Masaaki Futamoto
正昭 二本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5852894A priority Critical patent/JPH07272239A/en
Publication of JPH07272239A publication Critical patent/JPH07272239A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/012—Recording on, or reproducing or erasing from, magnetic disks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/74—Record carriers characterised by the form, e.g. sheet shaped to wrap around a drum
    • G11B5/82—Disk carriers

Abstract

PURPOSE:To obtain a magnetic recording medium having a reproduction-only region and a process for producing such medium. CONSTITUTION:The surface of a substrate 1 or ground surface layer 2 formed with information in arrangement of flat parts A and fine rugged parts B on the surface is provided with a magnetic layer 3 and the arrangement of regions 7 where high coercive force is relatively high and regions 6 where coercive force is relatively low is formed in correspondence to the information on this magnetic layer 3. Such magnetic layer is subjected to processing to first orient the magnetization of the magnetic layer in an initial direction by impressing a strong magnetic field then to invert only the magnetization of the regions where the coercive force is low in the magnetic layer by impressing a relatively weak backward magnetic field thereto, by which the regions are converted to the recording magnetic domains where reproduction by a magnetic head is possible. Then, the mass reproduction of the substrate described above by a stamper, etc., is possible and, therefore, the magnetic recording media previously recorded with the information are easily produced.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】本発明は、情報を磁気ヘッドによ
って再生可能な磁区として記録する磁気記録媒体及びそ
の製造方法に関し、特に予め磁気情報が記録された再生
専用領域を有する磁気記録媒体及びその製造方法に関す
る。なお、本明細書では、予め磁気情報が記録された領
域のことを再生専用領域と称する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium for recording information as magnetic domains reproducible by a magnetic head and a method for manufacturing the same, and more particularly to a magnetic recording medium having a read-only area in which magnetic information is recorded in advance. Manufacturing method In this specification, a region in which magnetic information is recorded in advance is referred to as a read-only region.

【０００２】[0002]

【従来の技術】従来の磁気記録媒体は、例えば図２に示
したような断面構造を有し、金属やガラス等の平坦な基
板４０の表面に、クロム等の下地層４１、Ｃｏあるいは
その合金等の磁性層４２、カーボン等の保護層４３を順
次積層して磁気記録媒体４４としている。保護層４３
は、酸化等の腐食から磁性層４２を保護すると共に、ヘ
ッドの衝突によって磁性層４２が損傷するのを防止す
る。2. Description of the Related Art A conventional magnetic recording medium has a cross-sectional structure as shown in FIG. 2, for example, and an underlayer 41 such as chromium or Co or its alloy is formed on the surface of a flat substrate 40 such as metal or glass. A magnetic layer 42 such as the above and a protective layer 43 such as carbon are sequentially laminated to form a magnetic recording medium 44. Protective layer 43
Protects the magnetic layer 42 from corrosion such as oxidation and prevents the magnetic layer 42 from being damaged by the collision of the head.

【０００３】情報記録時には、図２に略示するように、
スライダ４８に取り付けられた磁気ヘッド４７により、
記録情報に応じて強度変調された記録磁界を磁気記録媒
体４４に印加すると、磁性層４２の磁化は記録磁界の方
向に向き、記録磁区が形成される。再生時には、磁気ヘ
ッド４７によって記録磁区からの漏洩磁束を検出するこ
とにより、記録磁区の有無、形状や大きさを検出して情
報再生を行うことができる。このような磁気記録媒体の
記録再生方法については、例えば、特開平４−３３９３
１５号公報に記載されている。At the time of recording information, as schematically shown in FIG.
With the magnetic head 47 attached to the slider 48,
When a recording magnetic field whose intensity is modulated according to the recording information is applied to the magnetic recording medium 44, the magnetization of the magnetic layer 42 is oriented in the direction of the recording magnetic field, and a recording magnetic domain is formed. At the time of reproduction, by detecting the leakage magnetic flux from the recording magnetic domain by the magnetic head 47, it is possible to detect the presence or absence, the shape and the size of the recording magnetic domain and reproduce the information. A recording / reproducing method for such a magnetic recording medium is disclosed in, for example, JP-A-4-3393.
No. 15 publication.

【０００４】[0004]

【発明が解決しようとする課題】上記従来の磁気記録媒
体は、情報の記録に磁気記録ヘッドを用いた記録動作を
必要とする。一方、磁気記録媒体の利用形態の一つとし
て、辞書、百科事典、ナビゲーション用地図、映画等の
ビデオ情報、音楽等のオーディオ情報、ビデオゲーム用
のプログラムやデータなどの大容量の情報を画一的に記
録して頒布し、利用に供することが考えられる。The above-mentioned conventional magnetic recording medium requires a recording operation using a magnetic recording head for recording information. On the other hand, as one of the usage forms of the magnetic recording medium, a large amount of information such as a dictionary, an encyclopedia, a navigation map, video information such as movies, audio information such as music, programs and data for video games, etc. It may be possible to record it, distribute it, and use it.

【０００５】しかし、従来の磁気記録媒体は、前述のよ
うに情報の記録に磁気記録ヘッドを用いた逐次記録動作
を必要とし、光ディスク等のように簡単に複製を作るこ
とができないため、情報記録に非常な時間とコストを要
する。従って、従来の技術では、予め情報が記録された
磁気記録媒体を大量に作製することは現実的ではなかっ
た。本発明は、磁気記録ヘッドを用いない簡便な記録方
法によって予め情報が記録された再生専用領域を有する
磁気記録媒体及びその製造方法を提供することを目的と
する。However, the conventional magnetic recording medium requires the sequential recording operation using the magnetic recording head for recording information as described above, and cannot duplicate as easily as an optical disk. Takes a lot of time and money. Therefore, in the conventional technique, it is not realistic to manufacture a large number of magnetic recording media in which information is recorded in advance. It is an object of the present invention to provide a magnetic recording medium having a read-only area in which information is recorded in advance by a simple recording method that does not use a magnetic recording head, and a manufacturing method thereof.

【０００６】[0006]

【課題を解決するための手段】本発明においては、磁気
記録媒体の磁性層に情報に対応して相対的に保磁力の高
い領域と相対的に保磁力の低い領域の配列を形成するこ
とにより予め情報が記録された再生専用領域を形成す
る。磁気記録媒体は再生専用領域だけからなっていても
よいし、再生専用領域と共に記録再生領域を有していて
もよい。According to the present invention, an array of regions having a relatively high coercive force and regions having a relatively low coercive force is formed corresponding to information in a magnetic layer of a magnetic recording medium. A reproduction-only area in which information is recorded in advance is formed. The magnetic recording medium may be composed of only the read-only area, or may have a read / write area as well as a read / write area.

【０００７】磁性層中の相対的に保磁力の高い領域と相
対的に保磁力の低い領域の配列は、磁気記録媒体に最初
に強い磁界を印加して磁性層の磁化を初期方向に配向さ
せ、次に比較的弱い逆向きの磁界を印加して磁性層中の
保磁力の低い領域の磁化のみを反転させる処理を行うこ
とにより、磁気ヘッドによって再生することが可能な記
録磁区に変換される。The arrangement of a region having a relatively high coercive force and a region having a relatively low coercive force in the magnetic layer is such that a strong magnetic field is first applied to the magnetic recording medium to orient the magnetization of the magnetic layer in the initial direction. Then, a relatively weak opposite magnetic field is applied to reverse only the magnetization in the region of the magnetic layer having a low coercive force, whereby the magnetic domain is converted into a recording domain that can be reproduced by the magnetic head. .

【０００８】磁気記録媒体の磁性層中の相対的に保磁力
の高い領域と相対的に保磁力の低い領域の配列は、磁気
記録媒体の基板又はその上に設けられた下地層の表面に
平坦部と微細な凹凸部の配列を形成し、その上に磁性層
を設けることによって形成することができる。この時、
磁性層には平坦部の上方に位置する領域に相対的に保磁
力の低い領域が形成され、微細な凹凸部の上方に位置す
る領域に相対的に保磁力の高い領域が形成される。The arrangement of the region having a relatively high coercive force and the region having a relatively low coercive force in the magnetic layer of the magnetic recording medium is flat on the surface of the substrate of the magnetic recording medium or the underlayer provided thereon. Can be formed by forming an array of the microscopic portion and the fine concavo-convex portion and providing a magnetic layer thereon. At this time,
In the magnetic layer, a region having a relatively low coercive force is formed in a region located above the flat portion, and a region having a relatively high coercive force is formed in a region located above the fine irregularities.

【０００９】微細な凹凸部の凹の深さあるいは凸の高さ
の平均値は１０〜５０ｎｍの範囲であることが好適であ
り、微細な凹と凹の間隔あるいは凸と凸の間隔の平均値
は４〜６０ｎｍの範囲であることが好適である。また、
平坦部の領域及び微細な凹凸部の領域の幅及び／又は長
さは１００〜６００ｎｍの範囲とするのが望ましい。磁
性層は１層であってもよいし、複数の磁性層を積層した
ものであってもよい。磁性層を積層構造とすると、基板
側の磁性層としてノイズの小さな特性を有する磁性材料
を選択し、その上に形成される磁性層として漏洩磁束の
大きな磁性材料を選択することができるので、低ノイズ
かつ再生出力の大きな特性を有する磁性層のための磁性
材料の選択の幅が広がる。The average of the depth of the concaves or the height of the convexes of the fine irregularities is preferably in the range of 10 to 50 nm, and the average value of the intervals between the fine concaves and the concaves or the intervals between the convexes and the convexes. Is preferably in the range of 4 to 60 nm. Also,
It is desirable that the width and / or the length of the area of the flat portion and the area of the fine uneven portion be in the range of 100 to 600 nm. The magnetic layer may be a single layer or may be a laminate of a plurality of magnetic layers. When the magnetic layer has a laminated structure, a magnetic material having low noise characteristics can be selected as the magnetic layer on the substrate side, and a magnetic material having a large leakage flux can be selected as the magnetic layer formed thereon. The range of selection of magnetic materials for the magnetic layer, which has characteristics of noise and large reproduction output, is widened.

【００１０】また、磁気記録媒体の磁性層中の相対的に
保磁力の高い領域と相対的に保磁力の低い領域の配列
は、磁気記録媒体の表面が平坦な基板又はその上に設け
られた下地層に凹状領域又は凸状領域を離散的に配置
し、その上に磁性層を設けることによって形成すること
もできる。その場合、凹状領域の深さ又は凸状領域の高
さの平均値は１０〜５０ｎｍの範囲、凹状領域の深さ又
は凸状領域の高さの半値幅の平均値は１００〜５００ｎ
ｍの範囲とするのが好ましい。The arrangement of the region having a relatively high coercive force and the region having a relatively low coercive force in the magnetic layer of the magnetic recording medium is provided on a substrate having a flat surface of the magnetic recording medium or on the substrate. It can also be formed by disposing concave regions or convex regions discretely on the underlayer and providing a magnetic layer thereon. In that case, the average value of the depth of the concave region or the height of the convex region is in the range of 10 to 50 nm, and the average value of the half value width of the depth of the concave region or the height of the convex region is 100 to 500 n.
It is preferably in the range of m.

【００１１】平坦部と微細な凹凸部の領域を有する基板
は、フォトレジスト等の感光性樹脂又は電子線レジスト
等の層を形成し、レジストに所望の平坦部と微細な凹凸
部の領域のパターンを有するマスクを介して光又は電子
線を照射し、現像によりレジストの表面に微細な凹凸部
を形成して母型を作製し、この母型からスタンパを作製
し、スタンパから光硬化性樹脂又は熱硬化性樹脂を用い
て複製する、いわゆる露光法及びレプリカ作製方法によ
り作製することができる。このようにして、所望のパタ
ーンの平坦部と微細な凹凸部を有する基板を多数枚再現
性よく作製することができる。こうして作製された基板
上に従来例と同様に、下地層、磁性層及び保護層を形成
することにより、磁性層中に相対的に保磁力の高い領域
と相対的に保磁力の低い領域が配列された媒体が得られ
る。また、前記母型上に磁性層を形成することもでき
る。A substrate having a flat portion and a fine concavo-convex area is formed by forming a layer of a photosensitive resin such as photoresist or an electron beam resist, and a pattern of the desired flat portion and the fine concavo-convex area on the resist. Irradiate light or electron beam through a mask having a, to form a master mold by forming fine irregularities on the surface of the resist by development, to prepare a stamper from the master mold, a photocurable resin from the stamper or It can be produced by a so-called exposure method and a replica production method in which a thermosetting resin is used for replication. In this way, it is possible to reproducibly produce a large number of substrates each having a flat portion having a desired pattern and fine irregularities. By forming an underlayer, a magnetic layer, and a protective layer on the substrate thus manufactured, as in the conventional example, a region having a relatively high coercive force and a region having a relatively low coercive force are arranged in the magnetic layer. The obtained medium is obtained. Also, a magnetic layer may be formed on the mother die.

【００１２】また、凹状領域又は凸状領域が離散的に配
置された基板は、下地層が設けられた又は設けられてい
ない平坦な基板表面に高エネルギービームを照射して照
射領域を凹状又は凸状に形状変化させることによって形
成することができる。Further, in the case of the substrate in which the concave regions or the convex regions are discretely arranged, the high energy beam is irradiated to the flat substrate surface with or without the underlying layer to make the irradiation region concave or convex. It can be formed by changing the shape.

【００１３】[0013]

【作用】図３に基板又は下地層の表面粗さと、その上に
形成された磁性層の保磁力との関係を示す。図３から明
らかなように、表面粗さが粗くなると保磁力が高くな
る。例えば、下地層表面の微細な凹凸の凹と凹の間隔あ
るいは凸と凸の間隔の平均値が３〜５ｎｍの時、その上
に形成された磁性層の保磁力は約１０ｋＯｅとなり、下
地層表面の凹凸が２０〜３０ｎｍの時、その上に形成さ
れた磁性層の保磁力は１２ｋＯｅとなる。FIG. 3 shows the relationship between the surface roughness of the substrate or the underlayer and the coercive force of the magnetic layer formed thereon. As is clear from FIG. 3, the coarser the surface roughness, the higher the coercive force. For example, when the average value of the concave-convex spacing or the convex-convex spacing of the fine irregularities on the surface of the underlayer is 3 to 5 nm, the coercive force of the magnetic layer formed thereon is about 10 kOe. When the unevenness of 20 is 30 to 30 nm, the coercive force of the magnetic layer formed thereon is 12 kOe.

【００１４】このため、基板又はその上に設けられた下
地層の表面に平坦部と微細な凹凸部をディジタル情報に
対応させて形成し、その上に磁性層を設けると、基板又
は下地層表面の平坦部の上方に位置する領域には相対的
に保磁力の低い領域が形成され、微細な凹凸部の上方に
位置する領域には相対的に保磁力の高い領域が形成され
る。次に、この磁気記録媒体に対して最初に強い磁界を
印加して磁性層の磁化を初期方向に配向させ、次に比較
的弱い逆向きの磁界を印加すると、保磁力の低い領域の
磁化のみが反転されて、磁性層中の相対的に保磁力の高
い領域と相対的に保磁力の低い領域の配列は通常の記録
磁区に変換され、磁気ヘッドによって再生することが可
能となる。For this reason, if a flat portion and fine irregularities are formed in correspondence with digital information on the surface of the substrate or the underlying layer provided thereon, and a magnetic layer is provided thereon, the surface of the substrate or underlying layer is formed. A region having a relatively low coercive force is formed in a region located above the flat portion, and a region having a relatively high coercive force is formed in a region located above the fine uneven portion. Next, when a strong magnetic field is first applied to this magnetic recording medium to orient the magnetization of the magnetic layer in the initial direction and then a relatively weak opposite magnetic field is applied, only the magnetization of the region with a low coercive force is applied. Is reversed, and the arrangement of the region having a relatively high coercive force and the region having a relatively low coercive force in the magnetic layer is converted into a normal recording magnetic domain and can be reproduced by the magnetic head.

【００１５】基板表面に微細な凹凸部の代わりに凹状領
域又は凸状領域を設け、その凹状領域の深さ又は凸状領
域の高さの平均値を１０〜５０ｎｍの範囲、凹状領域の
深さ又は凸状領域の高さの半値幅の平均値を１００〜５
００ｎｍの範囲としても、その凹状領域又は凸状領域の
上方の磁性層領域の保磁力を相対的に高めることが可能
である。A concave region or a convex region is provided on the surface of the substrate instead of the fine concavo-convex portion, and the depth of the concave region or the average value of the height of the convex region is in the range of 10 to 50 nm. Or, the average value of the full width at half maximum of the height of the convex region is 100 to 5
Even in the range of 00 nm, the coercive force of the magnetic layer region above the concave region or the convex region can be relatively increased.

【００１６】また、記録磁区の大きさは、基板又はその
上に設けられた下地層の表面に形成した平坦部と微細な
凹凸部、又は凹状領域又は凸状領域の大きさによって決
定されるので、その平坦部、微細な凹凸部、又は凹状領
域又は凸状領域の大きさを小さくすることによって高密
度記録が可能となる。表面に微細な凹凸部及び平坦部を
所望のパターンで有する基板は、スタンパ等によって大
量に複製することができる。Further, since the size of the recording magnetic domain is determined by the size of the flat portion and the fine concavo-convex portion formed on the surface of the substrate or the underlying layer provided thereon, or the size of the concave region or the convex region. By reducing the size of the flat portion, the fine uneven portion, or the concave region or the convex region, high density recording becomes possible. A substrate having a fine uneven portion and a flat portion in a desired pattern on the surface can be reproduced in a large amount by a stamper or the like.

【００１７】[0017]

【実施例】以下、本発明の実施例について説明する。 〔実施例１〕図１に、本発明による磁気記録媒体の一実
施例の概略断面を示す。本実施例の再生専用領域を含む
磁気記録媒体は、本来平坦なディスク状基板１の表面に
後述の方法により、所望のパターンで平坦部Ａと微細な
凹凸部Ｂを設け、その上に下地層２、磁性層３及び保護
層４からなる磁気記録媒体５を形成したものである。EXAMPLES Examples of the present invention will be described below. [Embodiment 1] FIG. 1 shows a schematic cross section of an embodiment of a magnetic recording medium according to the present invention. In the magnetic recording medium including the read-only area of this embodiment, the flat portion A and the fine uneven portion B are formed in a desired pattern on the surface of the disk-shaped substrate 1 which is originally flat by a method described later, and the underlying layer is formed thereon. 2, a magnetic recording medium 5 including a magnetic layer 3 and a protective layer 4 is formed.

【００１８】基板上に設けた微細な凹凸部Ｂの凹の深さ
又は凸の高さの平均値は約３０ｎｍ、微細な凹凸の凹と
凹あるいは凸と凸の間隔は約５０ｎｍとした。この平坦
部Ａと微細な凹凸部Ｂは、ディスク状基板１の表面に螺
旋状に設けられた幅２μｍのトラック上に配列し、平坦
部Ａは長さ０．５μｍを１単位とし、平坦部Ａと微細な
凹凸部Ｂの配列によって情報を表した。上記微細な凹凸
部の平均高さは上記平坦部と同一面上でもよいし、平坦
部より上に位置していても下に位置していてもよい。The average value of the depth of the concaves or the height of the convexes of the fine concave-convex portion B provided on the substrate was about 30 nm, and the interval between the fine concave-convex concaves and concaves or the convexes and convexes was about 50 nm. The flat portion A and the fine uneven portion B are arranged on a track having a width of 2 μm spirally provided on the surface of the disk-shaped substrate 1, and the flat portion A has a length of 0.5 μm as one unit. The information is represented by the arrangement of A and the fine uneven portion B. The average height of the fine irregularities may be on the same plane as the flat portion, or may be above or below the flat portion.

【００１９】磁性層３には膜厚１００ｎｍのＣｏＣｒ20
等の垂直磁気記録に適した磁性材料を用いた。下地層２
としては膜厚１５０ｎｍのＣｒを用い、保護層４として
は膜厚１０ｎｍのカーボンを用いた。前述のように、磁
性層３のうち基板の平坦部Ａの上に位置する部分６は保
磁力が相対的に低くなり、微細な凹凸部Ｂの上に位置す
る部分７は保磁力が相対的に高くなる。従って、図４
（ａ）に示すように、磁気記録媒体に最初強い磁界Ｈ1
を印加して磁性層３を一様な方向に磁化した後、図４
（ｂ）のように、保磁力が相対的に低い領域の磁化のみ
を反転できる少し弱い逆向きの磁界Ｈ2 を印加すると、
磁性層３中で保磁力が相対的に低く高感度の領域、すな
わち平坦部Ａの上に位置する磁性層の部分６にのみ記録
磁区を形成することができる。The magnetic layer 3 has a thickness of 100 nm of CoCr 20.
Magnetic materials suitable for perpendicular magnetic recording such as Underlayer 2
As the protective layer 4, carbon having a film thickness of 150 nm was used, and as the protective layer 4, carbon having a film thickness of 10 nm was used. As described above, the coercive force of the portion 6 of the magnetic layer 3 located on the flat portion A of the substrate is relatively low, and the coercive force of the portion 7 of the magnetic layer 3 located on the fine uneven portion B is relatively low. Become higher. Therefore, FIG.
As shown in (a), a strong magnetic field H 1 is initially applied to the magnetic recording medium.
Is applied to magnetize the magnetic layer 3 in a uniform direction.
As shown in (b), when a slightly weak reverse magnetic field H 2 capable of reversing only the magnetization in the region where the coercive force is relatively low is applied,
The recording magnetic domain can be formed only in a region having a relatively low coercive force in the magnetic layer 3 and a high sensitivity, that is, a portion 6 of the magnetic layer located above the flat portion A.

【００２０】このように、図１の構造を有する磁気記録
媒体に、図４に示すように、最初は初期化用の強い一様
磁界を印加し、次に少し弱い逆方向の一様磁界を印加す
る２段階の磁界印加処理を行うことにより、基板１の表
面に平坦部Ａと微細な凹凸部Ｂとして形成された情報が
磁性層３中の記録磁区に変換され、磁気ヘッドによって
再生可能となる。このような方法で予め磁気情報を記録
した領域は再生専用領域として利用することができる。Thus, as shown in FIG. 4, a strong uniform magnetic field for initialization is first applied to the magnetic recording medium having the structure of FIG. 1, and then a slightly weaker uniform magnetic field in the opposite direction is applied. By performing a two-step magnetic field application process for applying information, information formed as a flat portion A and minute uneven portions B on the surface of the substrate 1 is converted into a recording magnetic domain in the magnetic layer 3 and can be reproduced by a magnetic head. Become. An area in which magnetic information is recorded in advance by such a method can be used as a read-only area.

【００２１】再生専用情報が辞書、百科事典、ナビゲー
ション用地図、映画等のビデオ情報、音楽等のオーディ
オ情報等、利用者が独自の情報を記録する必要がない場
合には、磁気記録媒体の全領域を再生専用領域とするの
が好ましい。一方、再生専用情報がビデオゲーム用のプ
ログラムやデータ等である場合には磁気記録媒体の一部
を再生専用領域として再生専用情報を記録し、他の領域
を記録再生領域として、利用者が所望の情報を記録した
り情報をオーバーライトできるようにしてもよい。記録
再生領域は、その領域下方の基板表面を全て平坦にし
て、その領域内の磁性層の保磁力を均一にすることによ
って形成することができる。When the user does not need to record unique information such as the dictionary, encyclopedia, navigation map, video information such as movies, audio information such as music, etc., the read-only information is the entire magnetic recording medium. It is preferable that the area is a reproduction-only area. On the other hand, when the reproduction-only information is a program or data for a video game, the reproduction-only information is recorded in a part of the magnetic recording medium as a reproduction-only area, and the other area is set as a recording / reproducing area, which is desired by the user. Information may be recorded or the information may be overwritten. The recording / reproducing area can be formed by flattening the entire substrate surface below the area so that the coercive force of the magnetic layer in the area is uniform.

【００２２】表面に微細な凹凸部及び平坦部を所望のパ
ターンで有する基板は、後述のようにスタンパ等によっ
て大量に複製することができる。従って、再生専用領域
を有し、再生専用情報を予め記録した磁気記録媒体を大
量に複製することが容易にできる。本実施例では、磁性
層として垂直磁気異方性層を用いる例について説明した
が、磁性層としてＣｏＣｒＴａ，ＣｏＣｒＰｔ等の面内
方向磁気異方性層を用いてもよい。その場合、前記磁界
Ｈ1 及びＨ2 は磁性層の面内方向に印加する必要があ
る。その場合でも、印加磁界は変調磁界ではなく一様な
磁界であるので、磁界Ｈ1 あるいはＨ2 は、磁気記録媒
体を回転させながら複数のトラックあるいは全てのトラ
ックに同時に印加するようにして処理時間を短縮するこ
とができる。A substrate having a fine pattern of unevenness and a flat portion on the surface in a desired pattern can be reproduced in large quantities by a stamper or the like as described later. Therefore, it is possible to easily duplicate a large amount of a magnetic recording medium having a read-only area and pre-recorded with read-only information. In this embodiment, an example in which the perpendicular magnetic anisotropic layer is used as the magnetic layer has been described, but an in-plane magnetic anisotropic layer such as CoCrTa or CoCrPt may be used as the magnetic layer. In that case, the magnetic fields H 1 and H 2 must be applied in the in-plane direction of the magnetic layer. Even in that case, since the applied magnetic field is not a modulation magnetic field but a uniform magnetic field, the magnetic field H 1 or H 2 is applied to a plurality of tracks or all tracks at the same time while rotating the magnetic recording medium. Can be shortened.

【００２３】また、本実施例では微細な凹凸部及び平坦
部の配列による情報を基板１の表面に形成したが、基板
表面を平坦にし、その上に形成する下地層表面に微細な
凹凸部及び平坦部を形成しても同様に磁性層３に再生専
用情報を記録することができる。なお、記録トラックは
螺旋状ではなく同心円状としてもよい。Further, in this embodiment, the information based on the arrangement of the fine concavo-convex portion and the flat portion is formed on the surface of the substrate 1. However, the surface of the substrate is flattened, and the fine concavo-convex portion and Even if the flat portion is formed, read-only information can be recorded in the magnetic layer 3 in the same manner. The recording tracks may have concentric circular shapes instead of spiral shapes.

【００２４】〔実施例２〕図５に、本発明による磁気記
録媒体の他の実施例の概略断面を示す。本実施例の再生
専用領域を含む磁気記録媒体は、本来平坦なディスク状
基板１の表面に後述の方法により、所望のパターンで平
坦部Ｃと凹状領域Ｄを設け、その上に下地層２、磁性層
３及び保護層４からなる磁気記録媒体５を形成したもの
である。[Embodiment 2] FIG. 5 shows a schematic cross section of another embodiment of the magnetic recording medium according to the present invention. In the magnetic recording medium including the read-only area of this embodiment, a flat portion C and a concave area D are formed in a desired pattern on the surface of an originally flat disk-shaped substrate 1 by a method described below, and an underlayer 2, A magnetic recording medium 5 comprising a magnetic layer 3 and a protective layer 4 is formed.

【００２５】凹状領域の深さの平均値は１０〜５０ｎ
ｍ、凹状領域の深さの半分のところの幅の平均値は１０
０〜５００ｎｍ、凹状領域と凹状領域の間隔の平均値は
２００〜１０００ｎｍとした。磁性層３には膜厚１００
ｎｍのＣｏＣｒ20等の垂直磁気記録に適した磁性材料を
用いた。下地層２としては膜厚１５０ｎｍのＣｒを用
い、保護層４としては膜厚１０ｎｍのカーボンを用い
た。The average value of the depth of the concave region is 10 to 50 n.
m, the average value of the width at half the depth of the concave region is 10
The average value of the distance between the concave regions is 0 to 500 nm, and the average value is 200 to 1000 nm. The magnetic layer 3 has a film thickness of 100.
A magnetic material suitable for perpendicular magnetic recording, such as CoCr 20 of nm, was used. The underlayer 2 was made of Cr with a thickness of 150 nm, and the protective layer 4 was made of carbon with a thickness of 10 nm.

【００２６】本実施例の磁気記録媒体では、磁性層３の
うち基板１の平坦部Ｃの上に位置する部分は保磁力が相
対的に低くなり、凹状領域Ｄの上に位置する部分は保磁
力が相対的に高くなる。従って、前記実施例１と同様
に、図４（ａ）に示すように、磁気記録媒体に最初強い
磁界Ｈ1 を印加して磁性層３を一様な方向に磁化した
後、図４（ｂ）のように、保磁力が相対的に低い領域の
磁化のみを反転できる少し弱い逆向きの磁界Ｈ2 を印加
すると、磁性層３中で保磁力が相対的に低く高感度の領
域、すなわち平坦部Ｃの上に位置する磁性層の部分にの
み記録磁区を形成することができる。In the magnetic recording medium of this example, the coercive force of the portion of the magnetic layer 3 located above the flat portion C of the substrate 1 is relatively low, and the portion of the magnetic layer 3 located above the concave region D is retained. The magnetic force becomes relatively high. Therefore, as in the first embodiment, as shown in FIG. 4A, a strong magnetic field H 1 is first applied to the magnetic recording medium to magnetize the magnetic layer 3 in a uniform direction, and then, as shown in FIG. ), A slightly weak reverse magnetic field H 2 capable of reversing only the magnetization in the region where the coercive force is relatively low is applied. The recording magnetic domain can be formed only in the portion of the magnetic layer located above the portion C.

【００２７】〔実施例３〕次に、本発明による再生専用
領域を有する磁気記録媒体の製造方法の一実施例を図６
により説明する。まず、厚さ１０ｍｍの透明なガラス板
１０の表面にフォトレジスト又はＸ線レジスト等の感光
性樹脂１１を塗布し、所望の平坦部と微細な凹凸部を形
成するためのパターンを有するマスク１２を介して光又
はＸ線１３を照射する（ａ）。次に、マスク１２を除去
して、現像液２３のシャワー２３であるいは現像液中に
浸積して現像することによって、光又はＸ線に照射され
た領域の感光性樹脂１１の表面に微細な凹凸部の領域１
４を形成して母型１５を作製する（ｂ）。次に、母型１
５に膜厚２０ｎｍのＡｌ−Ｔｉ合金からなる剥離層２２
を形成し（ｃ）、母型１５から光硬化あるいは熱硬化型
樹脂１６を用いて樹脂基板１７に転写して第２母型１８
を作製する（ｃ，ｄ）。さらに、第２母型１８から光硬
化あるいは熱硬化樹脂１９を用いて透明なガラス円板２
０に複製し（ｅ）、平坦部２４と微細な凹凸部の領域１
４を有する基板２１を作製する（ｆ）。[Embodiment 3] Next, an embodiment of a method of manufacturing a magnetic recording medium having a read-only area according to the present invention will be described with reference to FIG.
Will be described. First, a photosensitive resin 11 such as a photoresist or an X-ray resist is applied to the surface of a transparent glass plate 10 having a thickness of 10 mm, and a mask 12 having a pattern for forming a desired flat portion and fine irregularities is formed. Light or X-rays 13 are radiated via (a). Next, the mask 12 is removed, and the surface of the photosensitive resin 11 in the area irradiated with light or X-rays is finely divided by developing with the shower 23 of the developing solution 23 or by immersing in the developing solution. Area 1 of the uneven portion
4 is formed to form a matrix 15 (b). Next, master block 1
5 has a peeling layer 22 made of an Al-Ti alloy having a film thickness of 20 nm.
(C), and is transferred from the mother die 15 to the resin substrate 17 using the photo-curing or thermosetting resin 16 to form the second mother die 18.
Are prepared (c, d). Further, a transparent glass disk 2 is formed from the second mold 18 by using a photo-curing or thermosetting resin 19.
0 (e), flat area 24 and area 1 of fine irregularities
The substrate 21 having 4 is manufactured (f).

【００２８】これにより、所望のパターンの平坦部と微
細な凹凸部を有する基板を多数枚再現性よく作製するこ
とができる。また、上記の母型表面にＮｉメッキを行っ
てＮｉ製第２母型を作製し、射出成形法あるいはキャス
ティング法により微細な凹凸部を有する基板を作製して
もよい。前記レプリカ基板を走査型電子顕微鏡で観察し
た結果、上記の微細な凹凸部の凸と凸の間隔の平均値は
２０ｎｍであった。As a result, a large number of substrates having a desired pattern of flat portions and fine irregularities can be produced with good reproducibility. Alternatively, the surface of the master die may be plated with Ni to produce a Ni second master die, and a substrate having fine irregularities may be produced by an injection molding method or a casting method. As a result of observing the replica substrate with a scanning electron microscope, the average value of the intervals between the protrusions of the fine irregularities was 20 nm.

【００２９】上記微細な凹凸部の領域の凹凸の大きさ
は、上記光又はＸ線の照射量及び現像時間を変化させる
ことにより容易に変えることができる。また、微細な凹
凸部を形成後、イオンエッチングなどを行うことにより
微細な凹凸部の凹凸形状を顕著にできる。なお、上記
（ａ）の工程で、フォトレジスト又はＸ線レジスト１１
を塗布後、マスクを介することなく直接光あるいはＸ線
を所望のパターンで照射後、現像して微細な凹凸部を形
成してもよい。The size of the unevenness in the area of the fine unevenness can be easily changed by changing the irradiation amount of the light or X-ray and the developing time. In addition, by performing ion etching or the like after forming the fine concavo-convex portion, the concavo-convex shape of the fine concavo-convex portion can be made remarkable. In the step (a), the photoresist or X-ray resist 11
After coating, the composition may be directly irradiated with light or X-rays in a desired pattern without passing through a mask and then developed to form fine irregularities.

【００３０】上記基板２１に下地層として膜厚１５０ｎ
ｍのＣｒを、磁性層として膜厚１００ｎｍのＣｏＣｒ22
を、保護層として膜厚１０ｎｍのカーボンを順次積層
し、図１に示す従来例と同様の構造の磁気記録媒体５を
形成し、前記実施例と同様に２段階の磁界印加処理を行
った。また、上記母型１５を作製後、これを基板として
従来と同様の積層構造の磁気記録媒体５（図１）を形成
してもよい。その場合は、図６に示すガラス板１０はあ
らかじめ表面にフォトレジスト又はＸ線レジスト１１を
塗布し、所望の平坦部と微細な凹凸部を形成するための
パターンを有するマスク１２を介して光又はＸ線１３を
照射する。それを現像２３することによって光又はＸ線
に照射された領域のフォトレジスト又はＸ線レジスト１
１の表面に微細な凹凸部の領域１４を形成し、これを基
板とする。The substrate 21 has a film thickness of 150 n as a base layer.
m of Cr is used as a magnetic layer of CoCr 22 having a film thickness of 100 nm.
As a protective layer, carbon having a film thickness of 10 nm was sequentially laminated to form a magnetic recording medium 5 having a structure similar to that of the conventional example shown in FIG. Further, after the master block 15 is manufactured, the magnetic recording medium 5 (FIG. 1) having a laminated structure similar to the conventional one may be formed using this as a substrate. In that case, the glass plate 10 shown in FIG. 6 is coated with a photoresist or an X-ray resist 11 on its surface in advance, and is exposed to light or a light through a mask 12 having a pattern for forming a desired flat portion and fine irregularities. Irradiate X-ray 13. By developing it 23, the photoresist or X-ray resist 1 in the region irradiated with light or X-rays
A region 14 having fine irregularities is formed on the surface of No. 1 and is used as a substrate.

【００３１】この場合にも、上記フォトレジスト又はＸ
線レジスト１１を塗布後、上記マスク１２を介すること
なく、光又はＸ線１３を照射し、現像することによって
光又はＸ線に照射された領域のフォトレジスト又はＸ線
レジスト１１の表面に微細な凹凸部の領域１４を形成
し、これを基板としてもよい。上記のレプリカ基板を製
造する工程の剥離を確実に行うための剥離層としては、
Ａｌ−Ｔｉ合金の他にもＡｌ，Ｔｉ，Ａｕ，Ａｇ，Ｃ
ｕ，Ｐｔ，Ｒｈ，Ｔａ，Ｃｒ，Ｎｉ，Ｍｎ，Ｎｂ，Ｚｒ
及びＳｉから選ばれる少なくとも一種を用いることがで
きる。さらに、必要により剥離剤（例えばシリコンオイ
ル、カルコゲン化合物、すなわちＴｅ，Ｓｅ，Ｓのうち
少なくとも一者を含む混合物又は化合物等）を蒸着等の
方法でコーティングしても同様の効果がある。Also in this case, the photoresist or X
After the line resist 11 is applied, the surface of the photoresist or the X-ray resist 11 in a region irradiated with the light or the X-ray is irradiated with light or the X-ray 13 and developed without passing through the mask 12 to form a fine pattern. It is also possible to form the concavo-convex region 14 and use this as the substrate. The peeling layer for surely peeling in the step of manufacturing the above replica substrate,
In addition to Al-Ti alloys, Al, Ti, Au, Ag, C
u, Pt, Rh, Ta, Cr, Ni, Mn, Nb, Zr
And at least one selected from Si can be used. Further, if necessary, a stripping agent (for example, silicon oil, a chalcogen compound, that is, a mixture or compound containing at least one of Te, Se and S) is coated by a method such as vapor deposition, and the same effect can be obtained.

【００３２】また、第２母型用のプラスチック基板の表
面に剥離層として下地を用いると良い。下地としてはＳ
ｉＯ2 ，Ｓｉ3Ｎ4 等の酸化物、窒化物等が好ましい。
本実施例では、基板材料としてガラスを用いたが、基板
はアルミ等の金属基板としてもよい。Further, it is preferable to use an underlayer as a release layer on the surface of the plastic substrate for the second mother die. S as the base
Oxides such as iO 2 , Si 3 N 4 and nitrides are preferable.
In this embodiment, glass is used as the substrate material, but the substrate may be a metal substrate such as aluminum.

【００３３】〔実施例４〕下地層の表面に平坦部と微細
な凹凸部を形成して情報を書き込み、その上に磁性層を
形成することによって磁性層に記録磁区を形成した。表
面に平坦部と微細な凹凸部を有する下地層は、下地層の
上にフォトレジスト又はＸ線レジスト等の感光性樹脂層
を形成し、パターン照射及び現像によつてレジストの表
面に所望の形状の微細な凹凸部を形成し、そのレジスト
をマスクとしてイオンエッチングすることにより作製す
る。Example 4 A recording magnetic domain was formed in the magnetic layer by forming a flat portion and a fine uneven portion on the surface of the underlayer to write information, and forming a magnetic layer on the flat portion. For the underlayer having a flat portion and fine irregularities on the surface, a photosensitive resin layer such as a photoresist or an X-ray resist is formed on the underlayer, and a desired shape is formed on the surface of the resist by pattern irradiation and development. It is produced by forming fine irregularities of and performing ion etching using the resist as a mask.

【００３４】本実施例による下地層の製造工程を図７に
示す。ガラスからなる基板１上にスパッタリング法等に
よりＣｒからなる下地層３０を、例えば膜厚１５０ｎｍ
に形成する。次に、下地層３０の表面にフォトレジスト
又はＸ線レジスト１１を塗布し、所望の平坦部と微細な
凹凸部を形成するためのパターンを有するマスク１２を
介して光又はＸ線１３を照射し（ａ）、現像液のシャワ
ー２３でレジストの表面層を現像することによって光又
はＸ線に照射された領域のフォトレジスト又はＸ線レジ
スト１１の一部を除去し、微細な凹凸部を有するレジス
トマスク３１を形成する（ｂ）。次に、レジストマスク
３１をマスクとしてイオンエッチング３２して（ｃ）、
下地層３０の表面に微細な凹凸部３６及び平坦部３３を
形成する（ｄ）。FIG. 7 shows the manufacturing process of the underlayer according to this embodiment. An underlayer 30 made of Cr is formed on the substrate 1 made of glass by a sputtering method or the like, for example, with a film thickness of 150 nm.
To form. Next, a photoresist or X-ray resist 11 is applied to the surface of the underlayer 30, and light or X-rays 13 are radiated through a mask 12 having a pattern for forming desired flat portions and fine irregularities. (A) A resist having fine irregularities by removing a part of the photoresist or the X-ray resist 11 in a region irradiated with light or X-rays by developing the surface layer of the resist with a shower 23 of a developer. A mask 31 is formed (b). Next, ion etching 32 is performed using the resist mask 31 as a mask (c),
Fine irregularities 36 and flat portions 33 are formed on the surface of the base layer 30 (d).

【００３５】こうして、所望のパターンの平坦部と微細
な凹凸部を表面に有する下地層を形成できる。上記下地
層に従来例と同様の方法で膜厚３０ｎｍのＣｏＣｒＰｔ
からなる磁性層を形成し、さらに、ダイヤモンド構造の
カーボンからなる保護層を形成して磁気記録媒体を作製
した。これにより、磁気記録媒体の磁性層には下地層の
平坦部と微細な凹凸部に対応して保磁力が異なる領域が
得られる。したがって、磁気記録媒体を回転させながら
最初トラック方向に強い磁界を印加し、次にトラック方
向逆向きに弱い磁界を印加する２段階の磁界印加処理を
行って磁気記録媒体に記録磁区を形成した。In this way, it is possible to form a base layer having a flat portion having a desired pattern and fine irregularities on the surface. CoCrPt with a film thickness of 30 nm is formed on the underlayer in the same manner as in the conventional example.
Was formed, and a protective layer made of diamond-structured carbon was further formed to prepare a magnetic recording medium. As a result, in the magnetic layer of the magnetic recording medium, a region having different coercive force can be obtained corresponding to the flat portion and the fine irregularities of the underlayer. Therefore, a recording magnetic domain was formed in the magnetic recording medium by performing a two-step magnetic field application process in which a strong magnetic field was first applied in the track direction and then a weak magnetic field was applied in the opposite track direction while rotating the magnetic recording medium.

【００３６】なお、前記工程ｂにおけるレジストマスク
３１は、フォトレジスト又はＸ線レジスト１１を塗布
後、マスク１２を介することなく直接光あるいはＸ線を
所望のパターンで照射した後、現像することによって形
成してもよい。The resist mask 31 in the step b is formed by applying a photoresist or an X-ray resist 11, irradiating direct light or X-rays in a desired pattern without passing through the mask 12, and then developing. You may.

【００３７】〔実施例５〕表面に平坦部と微細な凹凸部
を有する下地層の製造工程の他の実施例を図８に示す。
本実施例では、表面全体に微細な凹凸を有する下地層を
スパッタリング法等により形成し、後にその一部をイオ
ンエッチングして平坦化することにより平坦部と微細な
凹凸部とを形成する。図８に示すように、ガラス等の基
板１上にスパッタリング法等により表面に微細な凹凸を
有するＣｒ等の下地層３４を、例えば膜厚１５０ｎｍに
形成する。次に、下地層３４の表面にフォトレジスト又
はＸ線レジスト１１を塗布し、所望の平坦部と微細な凹
凸部を形成するためのパターンを有するマスク１２を介
して光又はＸ線１３を照射し（ａ）、現像液のシャワー
２３により現像することによって光に照射された領域の
フォトレジスト又はＸ線レジスト１１を除去して、レジ
ストマスク３５を形成する（ｂ）。次に、このレジスト
マスクク３５をマスクとしてイオンエッチング３２して
（ｃ）、下地層３４の表面に平坦部３３と微細な凹凸部
３６を形成する（ｄ）。[Embodiment 5] FIG. 8 shows another embodiment of the manufacturing process of the underlayer having a flat portion and fine irregularities on the surface.
In this embodiment, a base layer having fine irregularities is formed on the entire surface by a sputtering method or the like, and a flat portion and fine irregularities are formed by flattening a part of the underlying layer by ion etching. As shown in FIG. 8, an underlayer 34 of Cr or the like having fine irregularities on the surface is formed on the substrate 1 of glass or the like by a sputtering method or the like to have a film thickness of 150 nm, for example. Next, a photoresist or X-ray resist 11 is applied to the surface of the underlayer 34, and light or X-rays 13 are radiated through a mask 12 having a pattern for forming desired flat portions and fine irregularities. (A), the photoresist or the X-ray resist 11 in the region irradiated with light is removed by developing with the shower 23 of the developing solution, and the resist mask 35 is formed (b). Next, using this resist mask 35 as a mask, ion etching 32 (c) is performed to form a flat portion 33 and a fine uneven portion 36 on the surface of the underlying layer 34 (d).

【００３８】これにより、所望のパターンの平坦部と微
細な凹凸部を表面に有する下地層を形成できる。上記下
地層に従来例と同様の方法でＣｏＣｒＰｔからなる膜厚
３０ｎｍの磁性層を形成し、さらに、ダイヤモンド構造
のカーボンからなる保護層を形成して磁気記録媒体を作
製した。こうして、磁気記録媒体の磁性層には下地層の
平坦部と微細な凹凸部に対応して保磁力が異なる領域が
得られる。したがって、前記実施例と同様に磁気記録媒
体を回転させながら最初トラック方向に強い磁界を印加
し、次にトラック方向逆向きに弱い磁界を印加する２段
階の磁界印加処理を行うことにより、磁気記録媒体に記
録磁区が形成される。As a result, it is possible to form a base layer having a desired pattern of flat portions and fine irregularities on the surface. A magnetic layer made of CoCrPt and having a thickness of 30 nm was formed on the underlayer in the same manner as in the conventional example, and a protective layer made of carbon having a diamond structure was further formed to produce a magnetic recording medium. Thus, in the magnetic layer of the magnetic recording medium, regions having different coercive forces are obtained corresponding to the flat portion and the fine irregularities of the underlayer. Therefore, similar to the above-described embodiment, while rotating the magnetic recording medium, a strong magnetic field is first applied in the track direction and then a weak magnetic field is applied in the opposite track direction. Recording magnetic domains are formed on the medium.

【００３９】なお、前記工程ｂにおけるレジストマスク
３１は、フォトレジスト又はＸ線レジスト１１を塗布
後、マスク１２を介することなく直接光あるいはＸ線を
所望のパターンで照射し後、現像することによって形成
してもよい。The resist mask 31 in the step b is formed by applying a photoresist or an X-ray resist 11, irradiating direct light or X-rays in a desired pattern without passing through the mask 12, and then developing. You may.

【００４０】〔実施例６〕表面に平坦部と微細な凹凸部
を有する基板の製造工程の他の実施例を図９に示す。本
実施例は、基板上に熱によって形状が変化する無機材料
や有機材料の薄膜を形成し、その上に金属材料の薄膜を
形成する。次に、金属材料の薄膜の表面全体をイオンエ
ッチングして、上記熱によって形状変化する薄膜の表面
に微細な凹凸を形成する。その後、熱によって形状変化
する薄膜の表面に光あるいはＸ線を照射して所望の形状
の平坦部の領域を形成するものである。[Embodiment 6] FIG. 9 shows another embodiment of the manufacturing process of a substrate having a flat portion and fine irregularities on the surface. In this embodiment, a thin film of an inorganic material or an organic material whose shape is changed by heat is formed on a substrate, and a thin film of a metal material is formed thereon. Next, the entire surface of the thin film of metal material is ion-etched to form fine irregularities on the surface of the thin film whose shape is changed by the heat. After that, the surface of the thin film whose shape is changed by heat is irradiated with light or X-rays to form a flat portion region having a desired shape.

【００４１】図９に示すように、ガラス等の基板１上に
スパッタリング法等により、熱的に形状変化する薄膜６
１として、例えばＧｅＳｂＴｅを膜厚１００ｎｍに形成
し、その上にマスク材６２として粒状の金属薄膜、例え
ばＴｉ膜を膜厚２０ｎｍに形成する。次に、上記マスク
材６２の表面をイオンエッチング６３して（ａ）、マス
ク材６２の表面全体を順次除去することにより、上記薄
膜６１の表面に上記マスク材６２の金属薄膜の粒状に対
応した微細な凹凸を形成する（ｂ）。次に、上記微細な
凹凸を有する薄膜６１の表面に光を収束したレーザ光を
照射して、照射部分を熱的に融解して形状変化させて平
坦にし（ｃ）、所望のパターンの平坦部の領域６５と微
細な凹凸部の領域６６を形成し母型とする（ｄ）。以
後、前記実施例３に示した第２母型作製工程と基板作製
工程により基板を作製する。As shown in FIG. 9, a thin film 6 whose shape is thermally changed on a substrate 1 made of glass or the like by a sputtering method or the like.
As No. 1, for example, GeSbTe is formed to a film thickness of 100 nm, and a granular metal thin film such as a Ti film is formed to a film thickness of 20 nm as the mask material 62 thereon. Next, the surface of the mask material 62 is subjected to ion etching 63 (a), and the entire surface of the mask material 62 is sequentially removed, so that the surface of the thin film 61 corresponds to the granularity of the metal thin film of the mask material 62. Fine irregularities are formed (b). Next, the surface of the thin film 61 having the fine irregularities is irradiated with laser light that converges the light, and the irradiated portion is thermally melted to change its shape to be flat (c), and a flat portion of a desired pattern is formed. The area 65 and the area 66 of the fine uneven portion are formed to serve as a matrix (d). After that, a substrate is manufactured by the second master block manufacturing process and the substrate manufacturing process shown in the third embodiment.

【００４２】こうして、所望のパターンの平坦部と微細
な凹凸部を表面に有する基板を形成できる。この基板上
に直接あるいはＣｒ等の下地層を介して膜厚３０ｎｍの
ＣｏＣｒ15Ｔａ4 からなる磁性層を形成し、さらに、カ
ーボン保護層を形成して磁気記録媒体を作製した。これ
により、磁気記録媒体に基板の平坦部及び微細な凹凸部
に対応して保磁力が異なる領域が得られる。したがっ
て、前記実施例と同様に磁気記録媒体を回転させながら
最初トラック方向に強い磁界を印加し、次にトラック方
向逆向きに弱い磁界を印加する２段階の磁界印加処理を
行うことにより、磁気記録媒体に記録磁区が形成され
る。In this way, it is possible to form a substrate having a desired pattern of flat portions and fine irregularities on the surface. A magnetic layer made of CoCr 15 Ta 4 having a film thickness of 30 nm was formed on this substrate directly or via an underlayer of Cr or the like, and a carbon protective layer was further formed to produce a magnetic recording medium. As a result, a region having different coercive force can be obtained in the magnetic recording medium corresponding to the flat portion and the fine irregularities of the substrate. Therefore, similar to the above-described embodiment, while rotating the magnetic recording medium, a strong magnetic field is first applied in the track direction and then a weak magnetic field is applied in the opposite track direction. Recording magnetic domains are formed on the medium.

【００４３】上記熱的に形状変化する薄膜としては、低
融点材料が好ましく、上記ＧｅＳｂＴｅの成分元素うち
の少なくとも一つを、Ｃｕ，Ｚｎ，Ｇａ，Ａｓ，Ｓｅ，
Ａｇ，Ｃｄ，Ｉｎ，Ｓｎ，Ｂａ，Ａｕ，Ｔｌ，Ｐｂ及び
Ｂｉの少なくとも一者に置き換えた材料でもよいし、合
金又は化合物でもよい。また、上記マスク材のＴｉの一
部又は全部をＡｌ，Ｓｉ，Ｖ，Ｃｒ，Ｍｎ，Ｆｅ，Ｃ
ｏ，Ｎｉ，Ｃｕ，Ｚｎ，Ｇｅ，Ｚｒ，Ｎｂ，Ｍｏ，Ｔ
ｃ，Ｒｕ，Ｒｈ，Ｐｄ，Ａｇ，Ｉｎ，Ｓｎ，Ｓｂ，Ｔ
ｅ，Ｈｆ，Ｔａ，Ｗ，Ｒｅ，Ｏｓ，Ｉｒ，Ｐｔ，Ａｕ，
Ｔｌ，Ｐｂ，Ｂｉ又はＣに置き換えても同様の微小凹凸
を形成できる。この場合，融点の高い金属ほど微小凹凸
の間隔を小さく出来き、融点の低い金属ほど微小凹凸の
間隔を大きくできる。As the thin film that changes its shape thermally, a low melting point material is preferable, and at least one of the constituent elements of GeSbTe is replaced by Cu, Zn, Ga, As, Se,
The material may be replaced with at least one of Ag, Cd, In, Sn, Ba, Au, Tl, Pb and Bi, or an alloy or compound. In addition, a part or all of Ti of the mask material is Al, Si, V, Cr, Mn, Fe, C.
o, Ni, Cu, Zn, Ge, Zr, Nb, Mo, T
c, Ru, Rh, Pd, Ag, In, Sn, Sb, T
e, Hf, Ta, W, Re, Os, Ir, Pt, Au,
Even if it is replaced with Tl, Pb, Bi or C, the same minute unevenness can be formed. In this case, the higher the melting point of the metal, the smaller the interval of the fine irregularities, and the lower the melting point, the larger the interval of the fine irregularities.

【００４４】上記所望のパターンの平坦部と微細な凹凸
部を有する基板を作製する工程において、上記マスク材
６２の表面をイオンエッチング６３して、マスク材６２
の表面全体を順次除去し、上記薄膜６１の表面に微細な
凹凸を形成後、所望のパターンの平坦部を形成するため
のマスクを介して、上記薄膜６１の照射部分を熱的に形
状変化させて平坦にし、所望のパターンの平坦部の領域
６５と微細な凹凸部の領域６６を形成し母型としてもよ
い。また、上記薄膜６１の表面を熱的に形状変化させた
ものを基板として直接用いてもよい。In the step of producing the substrate having the flat portion and the fine uneven portion of the desired pattern, the surface of the mask material 62 is ion-etched 63 to form the mask material 62.
The entire surface of the thin film 61 is sequentially removed to form fine irregularities on the surface of the thin film 61, and the irradiated portion of the thin film 61 is thermally changed in shape through a mask for forming a flat portion having a desired pattern. It may be flattened by forming a flat portion region 65 and a fine concavo-convex portion region 66 of a desired pattern to form a master block. Further, the thin film 61 whose surface is thermally changed in shape may be directly used as the substrate.

【００４５】〔実施例７〕表面に平坦部と凹状領域を有
する基板の製造工程の他の実施例を図１０に示す。本実
施例は、高いエネルギービームを照射して、照射領域を
凹状に形状変化させることにより磁性層内に相対的に保
磁力の高い領域を設けるものである。図１０に示すよう
に、ガラスからなる基板１上に、下地層として膜厚１５
０ｎｍのＣｒを設けた（ａ）。次に、波長８３０ｎｍの
レーザを用い、レーザパワー１０ｍＷでレーザ７４を照
射した。このレーザ照射によって基板が熱変形を起こ
し、その形状に沿って下地層２も変形し凹状領域７５が
形成される（ｂ）。上記凹状領域７５の表面形状を原子
間力顕微鏡により測定したところ、凹状領域の半値幅
（凹状領域の直径に相当）の平均値は１００ｎｍであっ
た。続いて、ＣｏＣｒ25からなる膜厚１００ｎｍの磁性
層４、カーボンからなる膜厚１０ｎｍの保護層４の順に
積層して記録媒体５を形成した（ｃ）。[Embodiment 7] FIG. 10 shows another embodiment of the process of manufacturing a substrate having a flat portion and a concave region on the surface. In this embodiment, a region having a relatively high coercive force is provided in the magnetic layer by irradiating a high energy beam and changing the shape of the irradiation region into a concave shape. As shown in FIG. 10, a film having a thickness of 15 is formed as a base layer on a substrate 1 made of glass.
0 nm of Cr was provided (a). Then, a laser having a wavelength of 830 nm was used to irradiate the laser 74 with a laser power of 10 mW. This laser irradiation causes the substrate to be thermally deformed, and the underlying layer 2 is also deformed along the shape thereof to form the concave region 75 (b). When the surface shape of the concave region 75 was measured by an atomic force microscope, the average value of the full width at half maximum of the concave region (corresponding to the diameter of the concave region) was 100 nm. Subsequently, a magnetic layer 4 made of CoCr 25 and having a thickness of 100 nm and a protective layer 4 made of carbon and having a thickness of 10 nm were laminated in this order to form a recording medium 5 (c).

【００４６】こうして、磁気記録媒体に基板の平坦部及
び凹状領域に対応して保磁力が異なる領域が得られる。
したがって、磁気記録媒体に最初強い磁界を印加して磁
性層３を一様な方向に磁化した後、保磁力が相対的に低
い領域の磁化のみを反転できる少し弱い逆向きの磁界を
印加する２段階の磁界印加処理を行うことにより、磁気
記録媒体に記録磁区が形成される。In this way, regions having different coercive forces can be obtained in the magnetic recording medium corresponding to the flat regions and the concave regions of the substrate.
Therefore, a strong magnetic field is first applied to the magnetic recording medium to magnetize the magnetic layer 3 in a uniform direction, and then a slightly weak reverse magnetic field capable of reversing only the magnetization in the region having a relatively low coercive force is applied. Recording magnetic domains are formed in the magnetic recording medium by performing the stepwise magnetic field application process.

【００４７】本実施例では、磁性層の積層前に凹凸を形
成するためのレーザ照射を行ったが、磁性層又は／及び
保護層積層後に同様の処理を行っても、本実施例と同様
の効果が得られる。上記凹状領域の深さ又は凸状領域の
高さの平均値は１０〜５０ｎｍの範囲、深さ又は高さの
半値幅の平均値は１００〜５００ｎｍの範囲が好まし
い。上記深さ又は高さの平均値が１０ｎｍ未満満では保
磁力の差が小さく、上記深さ又は高さの平均値が５０ｎ
ｍを超えるとノイズが増大する。In this embodiment, laser irradiation for forming irregularities was carried out before laminating the magnetic layer, but even if the same treatment is carried out after laminating the magnetic layer and / or the protective layer, it is the same as this embodiment. The effect is obtained. The average value of the depth of the concave region or the height of the convex region is preferably in the range of 10 to 50 nm, and the average value of the full width at half maximum of the depth or height is preferably in the range of 100 to 500 nm. When the average value of the depth or height is less than 10 nm, the difference in coercive force is small, and the average value of the depth or height is 50 n.
If it exceeds m, noise increases.

【００４８】〔実施例８〕図１１に、本発明による磁気
記録媒体の他の実施例の断面を示す。本実施例の磁気記
録媒体は、磁性層を垂直磁気異方性を持つ磁性層と面内
方向磁気異方性を持つ磁性層とからなる２層の積層構造
とした。基板１の表面には、情報を表す平坦部と微細な
凹凸部の配列が形成されている。その基板上にＣｒから
なる下地層を約１５０ｎｍの厚さに形成し（図示せ
ず）、その上に垂直磁気異方性を有するＣｏＣｒ24等の
第１磁性層７０を約１００ｎｍの厚さに形成し、さらに
その上に、面内方向磁気異方性を有するＣｏＣｒ15Ｔａ
4 等の第２磁性層７１を約２５ｎｍの厚さに順次積層
し、最後にカーボン等の保護層（図示せず）を積層して
磁気記録媒体５を作製した。[Embodiment 8] FIG. 11 shows a cross section of another embodiment of the magnetic recording medium according to the present invention. In the magnetic recording medium of this example, the magnetic layer had a two-layer laminated structure including a magnetic layer having perpendicular magnetic anisotropy and a magnetic layer having in-plane magnetic anisotropy. On the surface of the substrate 1, an array of flat portions representing information and fine uneven portions is formed. An underlayer made of Cr is formed on the substrate to a thickness of about 150 nm (not shown), and a first magnetic layer 70 such as CoCr 24 having perpendicular magnetic anisotropy is formed thereon to a thickness of about 100 nm. CoCr 15 Ta formed on and further having in-plane magnetic anisotropy
A second magnetic layer 71 such as 4 was sequentially laminated to a thickness of about 25 nm, and finally a protective layer (not shown) such as carbon was laminated to manufacture the magnetic recording medium 5.

【００４９】この磁気記録媒体の全面を下向きに強く磁
化した後、全面に上向きの弱い磁界を印加すると、垂直
磁気異方性を有する第１磁性層７０は、平坦部上に形成
された保磁力の小さい領域６だけが上向きに磁化反転
し、微細な凹凸部上に形成された保磁力の大きい領域７
は下向きに強く磁化したままである。第１磁性層７０の
上の第２磁性層７１は面内方向に磁化が向きやすく、第
１磁性層７０の影響で図示したように磁化の向きの配列
ができた。これは、磁気記録媒体に磁気情報が記録され
たことを意味し、磁気ヘッドによって情報再生が可能で
ある。When the entire surface of this magnetic recording medium is strongly magnetized downward and a weak upward magnetic field is applied to the entire surface, the first magnetic layer 70 having perpendicular magnetic anisotropy forms a coercive force formed on the flat portion. The region 6 having a small coercive force is inverted in the upward direction, and the region 7 having a large coercive force is formed on the fine uneven portion.
Remains strongly magnetized downward. The magnetization of the second magnetic layer 71 on the first magnetic layer 70 was likely to be oriented in the in-plane direction, and due to the influence of the first magnetic layer 70, the orientation of the magnetization was formed as illustrated. This means that magnetic information is recorded on the magnetic recording medium, and the information can be reproduced by the magnetic head.

【００５０】情報を表す平坦部と微細な凹凸部の配列が
形成された基板１の製作は、前記実施例の方法によって
行うことができる。本実施例のように磁性層を２層構造
にすると、平坦部と微細な凹凸部を保磁力の違いに反映
するのに適した磁性材料を第１層に選択し、漏洩磁束の
大きい磁性材料を第２磁性層として選択することで機能
分化を図ることができ、磁性材料の選択の幅が広がる。The manufacture of the substrate 1 on which the array of the flat portions and the fine irregularities for expressing information is formed can be performed by the method of the above-mentioned embodiment. When the magnetic layer has a two-layer structure as in this embodiment, a magnetic material suitable for reflecting the flat portion and the fine irregularities in the difference in coercive force is selected for the first layer, and the magnetic material having a large leakage flux is selected. Is selected as the second magnetic layer, the function can be differentiated, and the range of selection of the magnetic material is expanded.

【００５１】〔実施例９〕図１２に、本発明による磁気
記録媒体の他の実施例の断面を示す。本実施例の磁気記
録媒体は、磁性層を、第１磁性層７０として面内方向磁
気異方性を持つ磁性層を用い、第２磁性層７１として垂
直磁気異方性を持つ磁性層を用いた２層構造としたもの
である。[Embodiment 9] FIG. 12 shows a cross section of another embodiment of the magnetic recording medium according to the present invention. The magnetic recording medium of the present embodiment uses a magnetic layer, a magnetic layer having in-plane magnetic anisotropy as the first magnetic layer 70, and a magnetic layer having perpendicular magnetic anisotropy as the second magnetic layer 71. It has a two-layer structure.

【００５２】基板１の表面には、情報を表す平坦部と微
細な凹凸部の配列が形成されている。その基板上にＣｒ
からなる下地層を約１５０ｎｍの厚さに形成し（図示せ
ず）、その上に面内方向磁気異方性を持つＣｏＣｒ15Ｔ
ａ4 等の第１磁性層７０を約２５ｎｍの厚さに形成し、
さらにその上に、垂直磁気異方性を持つＣｏＣｒ20等の
第２磁性層７１を約１００ｎｍの厚さに積層し、最後に
カーボン等の保護層（図示せず）を積層した。On the surface of the substrate 1, an array of flat portions representing information and fine irregularities is formed. Cr on the substrate
An underlayer made of Co is formed to a thickness of about 150 nm (not shown), and CoCr 15 T having in-plane magnetic anisotropy is formed thereon.
forming the first magnetic layer 70 such as a 4 to a thickness of about 25 nm,
Further thereon, a second magnetic layer 71 such as CoCr 20 having perpendicular magnetic anisotropy was laminated to a thickness of about 100 nm, and finally a protective layer such as carbon (not shown) was laminated.

【００５３】この磁気記録媒体５を回転させながら、そ
の全面を面内トラック方向に沿って強く初期磁化した
後、全面をトラック方向逆向きに弱く磁化すると、面内
方向磁気異方性を有する第１磁性層７０は平坦部上に形
成された保磁力の小さい領域６だけが磁化反転し、微細
な凹凸部上に形成された保磁力の大きい領域７は強く初
期磁化したままである。第１磁性層７０の上の第２磁性
層７１は垂直方向に磁化が向きやすく、第１磁性層７０
の影響で図示したように磁化の向きの配列ができ、磁気
ヘッドによって情報再生が可能であった。While the magnetic recording medium 5 is being rotated, the entire surface of the magnetic recording medium 5 is initially magnetized strongly along the in-plane track direction, and then the entire surface is weakly magnetized in the opposite track direction. In the 1 magnetic layer 70, only the region 6 having a small coercive force formed on the flat portion has its magnetization reversed, and the region 7 having a large coercive force formed on the fine uneven portion remains strongly initial magnetized. The magnetization of the second magnetic layer 71 on the first magnetic layer 70 tends to be perpendicular to the first magnetic layer 70, and
As a result, the magnetization direction can be arranged as shown in the drawing, and the information can be reproduced by the magnetic head.

【００５４】〔実施例１０〕図１３に、本発明による磁
気記録媒体の他の実施例の断面を示す。本実施例の磁気
記録媒体は、面内方向磁気異方性を有する磁性層を２層
積層した例である。基板１の表面には、情報を表す平坦
部と微細な凹凸部の配列が形成されている。その基板上
にＣｒからなる下地層を約１５０ｎｍの厚さに形成し
（図示せず）、その上に面内方向磁気異方性を持ちノイ
ズの小さいＣｏＣｒＰｔＳｉ等の第１磁性層７０を約１
５ｎｍの厚さに形成し、さらにその上に、面内方向磁気
異方性を有し漏洩磁束の出やすいＣｏＣｒＰｔ等の第２
磁性層７１を約１５ｎｍの厚さに積層し、最後にカーボ
ン等の保護層（図示せず）を積層した。[Embodiment 10] FIG. 13 shows a cross section of another embodiment of the magnetic recording medium according to the present invention. The magnetic recording medium of this example is an example in which two magnetic layers having in-plane magnetic anisotropy are laminated. On the surface of the substrate 1, an array of flat portions representing information and fine uneven portions is formed. An underlayer of Cr is formed on the substrate to a thickness of about 150 nm (not shown), and a first magnetic layer 70 of CoCrPtSi or the like having in-plane magnetic anisotropy and small noise is formed on the underlayer of about 1 nm.
A second layer of CoCrPt or the like, which is formed to have a thickness of 5 nm, and has magnetic anisotropy in the in-plane direction so that leakage flux is easily generated
The magnetic layer 71 was laminated to a thickness of about 15 nm, and finally a protective layer (not shown) such as carbon was laminated.

【００５５】この磁気記録媒体５の全面を面内トラック
方向に沿って強く初期磁化した後、全面をトラック方向
逆向きに弱く磁化すると、面内方向磁気異方性を有する
第１磁性層７０は平坦部上に形成された保磁力の小さい
領域６だけが磁化反転し、微細な凹凸部上に形成された
保磁力の大きい領域７は強く初期磁化したままである。
第１磁性層７０の上の第２磁性層７１には、第１磁性層
７０の影響で図示したように第１磁性層の磁化と同じ方
向に向いた磁化の配列ができ、磁気ヘッドによって情報
再生が可能であった。When the entire surface of the magnetic recording medium 5 is strongly initially magnetized along the in-plane track direction and then weakly magnetized in the opposite direction to the track direction, the first magnetic layer 70 having in-plane direction magnetic anisotropy is formed. Only the region 6 having a small coercive force formed on the flat portion is reversible in magnetization, and the region 7 having a large coercive force formed on the fine uneven portion remains strongly initial magnetized.
In the second magnetic layer 71 on the first magnetic layer 70, due to the influence of the first magnetic layer 70, an array of magnetizations oriented in the same direction as the magnetization of the first magnetic layer can be formed, and information can be recorded by the magnetic head. It was possible to reproduce.

【００５６】〔実施例１１〕図１４に、本発明による磁
気記録媒体の他の実施例の断面を示す。本実施例の磁気
記録媒体は、面内方向磁気異方性を有する磁性層を非磁
性層を挟んで２層積層したものである。情報を表す平坦
部と微細な凹凸部の配列が形成されている基板１上にＣ
ｒからなる下地層を約１５０ｎｍの厚さに形成し（図示
せず）、その上に面内方向磁気異方性を持つＣｏＣｒＰ
ｔＳｉ等の第１磁性層７０を約１５ｎｍの厚さに形成
し、その上にＳｉＯ2 等の非磁性層を約１０ｎｍ形成し
た。さらにその上に、面内方向磁気異方性を有するＣｏ
ＣｒＰｔ等の第２磁性層７１を約１５ｎｍの厚さに積層
し、最後にカーボン等の保護層（図示せず）を積層し
た。[Embodiment 11] FIG. 14 shows a cross section of another embodiment of the magnetic recording medium according to the present invention. The magnetic recording medium of the present embodiment is formed by laminating two magnetic layers having in-plane magnetic anisotropy with a non-magnetic layer interposed therebetween. C is formed on the substrate 1 on which an array of flat portions representing information and fine irregularities is formed.
An underlayer made of r is formed to a thickness of about 150 nm (not shown), and CoCrP having in-plane magnetic anisotropy is formed thereon.
A first magnetic layer 70 of tSi or the like was formed to a thickness of about 15 nm, and a nonmagnetic layer of SiO 2 or the like was formed thereon to a thickness of about 10 nm. On top of that, Co having in-plane magnetic anisotropy is formed.
A second magnetic layer 71 of CrPt or the like was laminated to a thickness of about 15 nm, and finally a protective layer of carbon or the like (not shown) was laminated.

【００５７】この磁気記録媒体５を回転させながら、そ
の全面を、前記実施例と同様に、面内トラック方向に沿
って強く初期磁化した後、全面をトラック方向逆向きに
弱く磁化すると、面内方向磁気異方性を有する第１磁性
層７０は平坦部上に形成された保磁力の小さい領域６だ
けが磁化反転し、微細な凹凸部上に形成された保磁力の
大きい領域７は強く初期磁化したままである。第１磁性
層７０の上の第２磁性層７１には、第１磁性層７０の影
響で図示したように第１磁性層の磁化と反対方向に向い
た磁化の配列ができ、磁気ヘッドによって情報再生が可
能であった。While rotating the magnetic recording medium 5, the entire surface of the magnetic recording medium 5 is strongly initially magnetized along the in-plane track direction in the same manner as in the above embodiment, and then the entire surface is weakly magnetized in the reverse direction of the track direction. In the first magnetic layer 70 having the directional magnetic anisotropy, only the region 6 having a small coercive force formed on the flat portion undergoes magnetization reversal, and the region 7 having a large coercive force formed on the fine irregularities has a strong initial state. It remains magnetized. In the second magnetic layer 71 on the first magnetic layer 70, due to the influence of the first magnetic layer 70, an array of magnetizations oriented in the direction opposite to the magnetization of the first magnetic layer is formed, and the information can be read by the magnetic head. It was possible to reproduce.

【００５８】〔実施例１２〕図１５に、本発明による磁
気記録媒体の他の実施例の断面を示す。本実施例の磁気
記録媒体は、垂直磁気異方性を有する磁性層を２層積層
した例である。情報を表す平坦部と微細な凹凸部の配列
が形成されている基板１上にＣｒからなる下地層を約１
５０ｎｍの厚さに形成し（図示せず）、その上に垂直磁
気異方性を有するＣｏＣｒ25等の第１磁性層７０を約１
００ｎｍの厚さに形成し、さらにその上に、垂直方向磁
気異方性を有するＣｏＣｒ20等の第２磁性層７１を約１
００ｎｍの厚さに積層し、最後にカーボン等の保護層
（図示せず）を積層した。[Embodiment 12] FIG. 15 shows a cross section of another embodiment of the magnetic recording medium according to the present invention. The magnetic recording medium of this embodiment is an example in which two magnetic layers having perpendicular magnetic anisotropy are laminated. About 1 base layer of Cr is formed on the substrate 1 on which an array of flat portions and fine irregularities for expressing information is formed.
It is formed to a thickness of 50 nm (not shown), and a first magnetic layer 70 of CoCr 25 or the like having perpendicular magnetic anisotropy is formed thereon with a thickness of about 1.
The second magnetic layer 71 of CoCr 20 or the like having a perpendicular magnetic anisotropy is formed to a thickness of 00 nm, and further thereon.
The layers were laminated to a thickness of 00 nm, and finally a protective layer (not shown) such as carbon was laminated.

【００５９】この磁気記録媒体の全面を下向きに強く磁
化した後、全面に上向きの弱い磁界を印加すると、垂直
磁気異方性を有する第１磁性層７０は、平坦部上に形成
された保磁力の小さい領域６だけが上向きに磁化反転
し、微細な凹凸部上に形成された保磁力の大きい領域７
は下向きに強く磁化したままである。第１磁性層７０の
上の第２磁性層７１は、第１磁性層７０の影響で第１磁
性層と同じ向きに磁化した磁化の向きの配列ができた。
これは、磁気記録媒体に磁気情報が記録されたことを意
味し、磁気ヘッドによって情報再生が可能であった。When the entire surface of this magnetic recording medium is strongly magnetized downward and a weak upward magnetic field is applied to the entire surface, the first magnetic layer 70 having perpendicular magnetic anisotropy forms the coercive force formed on the flat portion. The region 6 having a small coercive force is inverted in the upward direction, and the region 7 having a large coercive force is formed on the fine uneven portion.
Remains strongly magnetized downward. The second magnetic layer 71 on the first magnetic layer 70 was magnetized in the same direction as the first magnetic layer due to the influence of the first magnetic layer 70, and the magnetization direction was arranged.
This means that magnetic information was recorded on the magnetic recording medium, and the information could be reproduced by the magnetic head.

【００６０】〔実施例１３〕図１６に示すように、本発
明による磁気記録媒体８０を、磁気記録媒体駆動部８
１、磁気ヘッド８２、磁気ヘッドを磁気記録媒体に対し
て相対的に駆動する磁気ヘッド駆動部８３、及び記録再
生信号処理系８４を備える磁気記録再生装置に装着して
再生専用領域に記録された磁気情報の再生を行ったとこ
ろ、磁気ヘッドによる逐次記録動作を行って記録した通
常の情報と同様に再生することができた。[Embodiment 13] As shown in FIG. 16, the magnetic recording medium 80 according to the present invention is used in the magnetic recording medium drive section 8.
1, a magnetic head 82, a magnetic head drive unit 83 for driving the magnetic head relative to a magnetic recording medium, and a magnetic recording / reproducing apparatus equipped with a recording / reproducing signal processing system 84, and recording in a reproduction-only area. When the magnetic information was reproduced, it was possible to reproduce it in the same manner as the normal information recorded by performing the sequential recording operation by the magnetic head.

【００６１】以上の実施例では磁気記録媒体の再生専用
領域についての説明をしたが、ディスク上に予め情報が
記録された再生専用領域と併せて、前述のように磁気ヘ
ッドによって情報の記録再生を行う領域を設けることも
可能である。また、磁気ディスクの情報記録番地を識別
するためのトラック番号情報やセクタ番号情報等を本発
明の方法によって予め記録して、プリフォーマットした
磁気記録媒体を作製することもできる。In the above embodiments, the read-only area of the magnetic recording medium has been described. However, in addition to the read-only area in which information is recorded in advance on the disk, the information is recorded and reproduced by the magnetic head as described above. It is also possible to provide a region to be performed. It is also possible to pre-record the track number information, sector number information, etc. for identifying the information recording address of the magnetic disk by the method of the present invention to produce a pre-formatted magnetic recording medium.

【００６２】また、本発明の磁気情報記録方法による
と、磁性層に形成される磁区の大きさは基板又は下地層
に形成した微細な凹凸部又は平坦部の大きさによって決
定されるため、磁区の大きさを小さくすることができ、
再生専用情報を高密度に記録することが可能となる。な
お、図１７に模式的に示すように、例えば幅０．３μｍ
の微細な凹凸部の領域を、隣接する微細な凹凸部の間隔
を１μｍとして基板上に螺旋状に形成し、その上に、下
地層、磁性層、保護層を積層して磁気記録媒体を作製す
ると、前記微細な凹凸部の上方に形成された螺旋状領域
７が高保磁力領域となり、その間の領域６が低保磁力領
域となる。従って、高保磁力領域７をガードバンドとし
て使用すると、記録にじみのない高密度記録が可能とな
る。Further, according to the magnetic information recording method of the present invention, the size of the magnetic domain formed in the magnetic layer is determined by the size of the fine concavo-convex portion or flat portion formed in the substrate or the underlayer. Can be reduced in size,
It becomes possible to record the reproduction-only information at a high density. In addition, as schematically shown in FIG. 17, for example, a width of 0.3 μm
The region of the fine irregularities of 1 is spirally formed on the substrate with the interval between the adjacent fine irregularities of 1 μm, and the underlayer, the magnetic layer, and the protective layer are laminated thereon to produce a magnetic recording medium. Then, the spiral region 7 formed above the fine irregularities becomes a high coercive force region, and the region 6 between them becomes a low coercive force region. Therefore, when the high coercive force area 7 is used as a guard band, high density recording without recording bleeding becomes possible.

【００６３】[0063]

【発明の効果】本発明によると、複製の作製が容易な平
坦部と微細な凹凸部、又は平坦部と凹状又は凸状領域の
配列によって情報を形成し、それを磁性層の磁化の配
列、すなわち磁気情報に変換するものであるので、予め
情報が記録された再生専用領域を有する磁気記録媒体を
安価かつ簡易に大量に製造することができる。According to the present invention, information is formed by an arrangement of flat portions and fine uneven portions, or flat portions and concave or convex regions, which are easy to make a duplicate, and the information is formed by the arrangement of the magnetization of the magnetic layer, That is, since it is converted into magnetic information, it is possible to inexpensively and easily mass-produce a magnetic recording medium having a read-only area in which information is recorded in advance.

【図面の簡単な説明】[Brief description of drawings]

【図１】本発明による磁気記録媒体の一実施例の断面模
式図。FIG. 1 is a schematic sectional view of an embodiment of a magnetic recording medium according to the present invention.

【図２】従来の磁気記録媒体の断面模式図。FIG. 2 is a schematic sectional view of a conventional magnetic recording medium.

【図３】基板又は下地層の表面粗さとその上に形成され
た磁性膜の保磁力の関係を示す図。FIG. 3 is a diagram showing the relationship between the surface roughness of a substrate or an underlayer and the coercive force of a magnetic film formed thereon.

【図４】磁気記録媒体へ磁区を形成する方法の説明図。FIG. 4 is an explanatory diagram of a method of forming magnetic domains on a magnetic recording medium.

【図５】本発明による磁気記録媒体の他の実施例の断面
模式図。FIG. 5 is a schematic sectional view of another embodiment of the magnetic recording medium according to the present invention.

【図６】本発明による基板の製造工程の一実施例を示す
図。FIG. 6 is a diagram showing an example of a manufacturing process of a substrate according to the present invention.

【図７】本発明による下地層の製造工程の一実施例を示
す図。FIG. 7 is a diagram showing an example of a process of manufacturing an underlayer according to the present invention.

【図８】本発明による下地層の製造工程の他の実施例を
示す図。FIG. 8 is a diagram showing another embodiment of the manufacturing process of the underlayer according to the present invention.

【図９】本発明による基板の製造工程の他の実施例を示
す図。FIG. 9 is a diagram showing another embodiment of the manufacturing process of the substrate according to the present invention.

【図１０】本発明による基板の製造工程の他の実施例を
示す図。FIG. 10 is a view showing another embodiment of the manufacturing process of the substrate according to the present invention.

【図１１】本発明による磁気記録媒体の他の実施例の断
面模式図。FIG. 11 is a schematic sectional view of another embodiment of the magnetic recording medium according to the present invention.

【図１２】本発明による磁気記録媒体の他の実施例の断
面模式図。FIG. 12 is a schematic sectional view of another embodiment of the magnetic recording medium according to the present invention.

【図１３】本発明による磁気記録媒体の他の実施例の断
面模式図。FIG. 13 is a schematic sectional view of another embodiment of the magnetic recording medium according to the present invention.

【図１４】本発明による磁気記録媒体の他の実施例の断
面模式図。FIG. 14 is a schematic sectional view of another embodiment of the magnetic recording medium according to the present invention.

【図１５】本発明による磁気記録媒体の他の実施例の断
面模式図。FIG. 15 is a schematic sectional view of another embodiment of the magnetic recording medium according to the present invention.

【図１６】磁気記録再生装置の概略図。FIG. 16 is a schematic diagram of a magnetic recording / reproducing apparatus.

【図１７】ガードバンド領域を有する磁気記録媒体の模
式図。FIG. 17 is a schematic diagram of a magnetic recording medium having a guard band area.

【符号の説明】[Explanation of symbols]

１，４０…基板、２，３０，４１…下地層、３，４２…
磁性層、４，４３…保護層、５，４４…磁気記録媒体、
６…保磁力の低い領域、７…保磁力の高い領域、１０…
ガラス板、１１…レジスト、１２…マスク、１３…光又
はＸ線、１４…微細な凹凸部の領域、１５…母型、１６
…光硬化あるいは熱硬化型樹脂Ａ、１７…レジン樹脂基
板、１８…第２母型、１９…光硬化性樹脂又は熱硬化性
樹脂、２０…ガラス円板、２１…平坦部と微細な凹凸部
を有する基板、２２…剥離層、２４…平坦部、３１…レ
ジストマスク、３２，６３…イオンエッチング、３３…
下地層の平坦部、３６…下地層の微細な凹凸部、４７…
ヘッド、４８…スライダ、５１…磁気記録媒体、５２…
バイアス磁石、５３…バイアス磁界の方向、６１…低融
点材料、６２…マスク材、６３…イオンエッチング、６
４…光あるいはＸ線、６５…平坦部の領域、６６…微細
な凹凸部の領域、７０…第１磁性層、７１…第１磁性
層、８０…磁気記録媒体、８１…磁気記録媒体駆動部、
８２…磁気ヘッド、８３…磁気ヘッド駆動部、８４…記
録再生信号処理系1, 40 ... Substrate, 2, 30, 41 ... Underlayer, 3, 42 ...
Magnetic layer, 4, 43 ... protective layer, 5, 44 ... magnetic recording medium,
6 ... low coercive force region, 7 ... high coercive force region, 10 ...
Glass plate, 11 ... Resist, 12 ... Mask, 13 ... Light or X-ray, 14 ... Area of fine unevenness, 15 ... Mother mold, 16
Photocurable or thermosetting resin A, 17 ... Resin resin substrate, 18 ... Second mold, 19 ... Photocurable resin or thermosetting resin, 20 ... Glass disc, 21 ... Flat portion and fine irregularities Substrate having 22, peeling layer, 24 flat portion, 31 resist mask, 32, 63 ion etching, 33
Flat portion of the underlayer, 36 ... Fine uneven portion of the underlayer, 47 ...
Head, 48 ... Slider, 51 ... Magnetic recording medium, 52 ...
Bias magnet, 53 ... Bias magnetic field direction, 61 ... Low melting point material, 62 ... Mask material, 63 ... Ion etching, 6
4 ... Light or X-ray, 65 ... Flat area, 66 ... Fine uneven area, 70 ... First magnetic layer, 71 ... First magnetic layer, 80 ... Magnetic recording medium, 81 ... Magnetic recording medium driving section ,
82 ... Magnetic head, 83 ... Magnetic head drive unit, 84 ... Recording / reproducing signal processing system

───────────────────────────────────────────────────── フロントページの続き (72)発明者 二本 正昭 東京都国分寺市東恋ヶ窪一丁目280番地 株式会社日立製作所中央研究所内 ─────────────────────────────────────────────────── --- Continuation of the front page (72) Inventor Masaaki Ninomoto 1-280, Higashikoigakubo, Kokubunji, Tokyo Inside the Central Research Laboratory, Hitachi, Ltd.

Claims (23)

【特許請求の範囲】[Claims] 【請求項１】 基板上に直接又は下地層を介して設けら
れた磁性層と、その上に設けられた保護層とを備え、前
記磁性層は情報に対応して相対的に保磁力の高い領域と
相対的に保磁力の低い領域の配列が形成されている再生
専用領域を含むことを特徴とする磁気記録媒体。1. A magnetic layer provided on a substrate directly or via an underlayer, and a protective layer provided thereon, the magnetic layer having a relatively high coercive force corresponding to information. A magnetic recording medium comprising a read-only area in which an array of areas having a relatively low coercive force is formed. 【請求項２】 再生専用領域だけからなることを特徴と
する請求項１記載の磁気記録媒体。2. The magnetic recording medium according to claim 1, wherein the magnetic recording medium comprises only a read-only area. 【請求項３】 表面の少なくとも一部に平坦部と微細な
凹凸部の配列を有する基板上に直接又は下地層を介して
磁性層が設けられ、前記磁性層は前記平坦部の上方に位
置する相対的に保磁力の低い領域と前記微細な凹凸部の
上方に位置する相対的に保磁力の高い領域とを有し、前
記相対的に保磁力の低い領域と相対的に保磁力の高い領
域の配列は情報に対応していることを特徴とする再生専
用領域を含む磁気記録媒体。3. A magnetic layer is provided directly or through an underlayer on a substrate having an array of flat portions and fine irregularities on at least a part of its surface, and the magnetic layer is located above the flat portions. A region having a relatively low coercive force and a region having a relatively high coercive force located above the fine irregularities, and a region having a relatively low coercive force and a region having a relatively high coercive force. The magnetic recording medium including a read-only area, characterized in that the array corresponds to information. 【請求項４】 基板上に下地層を介して磁性層が設けら
れ、前記下地層は表面の少なくとも一部に平坦部と微細
な凹凸部の配列を有し、前記磁性層は前記平坦部の上方
に位置する相対的に保磁力の低い領域と前記微細な凹凸
部の上方に位置する相対的に保磁力の高い領域とを有
し、前記相対的に保磁力の低い領域と相対的に保磁力の
高い領域の配列は情報に対応していることを特徴とする
再生専用領域を含む磁気記録媒体。4. A magnetic layer is provided on a substrate via an underlayer, and the underlayer has an array of flat portions and fine irregularities on at least a part of the surface thereof, and the magnetic layer has a flat portion of the flat portion. A region having a relatively low coercive force located above and a region having a relatively high coercive force located above the fine irregularities, and having a relatively low coercive force relative to the region having a relatively low coercive force. A magnetic recording medium including a read-only area, wherein an array of areas having high magnetic force corresponds to information. 【請求項５】 前記微細な凹凸部の凹の深さあるいは凸
の高さの平均値は１０〜５０ｎｍの範囲であり、該微細
な凹と凹の間隔あるいは凸と凸の間隔の平均値は４〜６
０ｎｍの範囲であることを特徴とする請求項３又は４記
載の再生専用領域を含む磁気記録媒体。5. The average value of the depth of the concaves or the height of the convexes of the fine concavo-convex portion is in the range of 10 to 50 nm, and the average value of the distance between the fine concaves and the concaves or the distance between the convexes and the convexes is 4-6
The magnetic recording medium including the read-only area according to claim 3 or 4, wherein the magnetic recording medium has a range of 0 nm. 【請求項６】 前記平坦部の領域及び微細な凹凸部の領
域の幅及び／又は長さは１００〜６００ｎｍの範囲であ
ることを特徴とする請求項３、４又は５記載の再生専用
領域を含む磁気記録媒体。6. A read-only area according to claim 3, wherein the width and / or the length of the area of the flat portion and the area of the fine uneven portion are in the range of 100 to 600 nm. Including magnetic recording media. 【請求項７】 前記磁性層は第１の磁性層と第２の磁性
層を積層したものであることを特徴とする請求項１〜６
のいずれか１項記載の再生専用領域を含む磁気記録媒
体。7. The magnetic layer is a stack of a first magnetic layer and a second magnetic layer.
A magnetic recording medium including the read-only area according to any one of 1. 【請求項８】 前記第１の磁性層は垂直磁気異方性又は
面内方向磁気異方性を有する磁性層であり、前記第２の
磁性層は垂直磁気異方性又は面内方向磁気異方性を有す
る磁性層であることを特徴とする請求項７記載の再生専
用領域を含む磁気記録媒体。8. The first magnetic layer is a magnetic layer having perpendicular magnetic anisotropy or in-plane magnetic anisotropy, and the second magnetic layer is perpendicular magnetic anisotropy or in-plane magnetic anisotropy. 8. A magnetic recording medium including a read-only area according to claim 7, which is a magnetic layer having a directionality. 【請求項９】 表面の少なくとも一部に平坦な領域中に
凹状領域又は凸状領域が離散的に配置された基板上に直
接又は下地層を介して磁性層が設けられ、前記磁性層は
前記平坦部の上方に位置する相対的に保磁力の低い領域
と前記凹状領域又は凸状領域の上方に位置する相対的に
保磁力の高い領域とを有し、前記相対的に保磁力の低い
領域と相対的に保磁力の高い領域の配列は情報に対応し
ていることを特徴とする再生専用領域を含む磁気記録媒
体。9. A magnetic layer is provided directly or through an underlayer on a substrate in which concave regions or convex regions are discretely arranged in a flat region on at least a part of the surface, and the magnetic layer is A region having a relatively low coercive force located above a flat portion and a region having a relatively high coercive force located above the concave region or the convex region, and the region having a relatively low coercive force. A magnetic recording medium including a read-only area, wherein an array of areas having a relatively high coercive force corresponds to information. 【請求項１０】 前記凹状領域の深さ又は凸状領域の高
さの平均値は１０〜５０ｎｍの範囲、凹状領域の深さ又
は凸状領域の高さの半値幅の平均値は１００〜５００ｎ
ｍの範囲であることを特徴とする請求項９記載の再生専
用領域を含む磁気記録媒体。10. The average value of the depth of the concave region or the height of the convex region is in the range of 10 to 50 nm, and the average value of the full width at half maximum of the depth of the concave region or the height of the convex region is 100 to 500 n.
The magnetic recording medium including the read-only area according to claim 9, wherein the magnetic recording medium has a range of m. 【請求項１１】 基板上に感光性樹脂膜を形成する工程
と、前記感光性樹脂膜を情報に対応する所望のパターン
で露光する工程と、現像によって前記感光性樹脂膜の表
面に前記パターンに対応する平坦部の領域と微細な凹凸
部の領域を形成する工程と、その上に磁性層を形成する
工程とを含むことを特徴とする再生専用領域を含む磁気
記録媒体の製造方法。11. A step of forming a photosensitive resin film on a substrate, a step of exposing the photosensitive resin film with a desired pattern corresponding to information, and a step of forming a pattern on the surface of the photosensitive resin film by development. A method of manufacturing a magnetic recording medium including a read-only area, comprising: a step of forming a corresponding flat area and a fine uneven area; and a step of forming a magnetic layer thereon. 【請求項１２】 基板上に感光性樹脂膜を形成する工程
と、前記感光性樹脂膜を情報に対応する所望のパターン
で露光する工程と、現像によって前記感光性樹脂膜の表
面に前記パターンに対する平坦部の領域と微細な凹凸部
の領域を形成する工程と、その上に下地層を形成する工
程と、さらにその上に磁性層を形成する工程とを含むこ
とを特徴とする再生専用領域を含む磁気記録媒体の製造
方法。12. A step of forming a photosensitive resin film on a substrate, a step of exposing the photosensitive resin film with a desired pattern corresponding to information, and a step of developing the surface of the photosensitive resin film to the pattern. A read-only area characterized by including a step of forming a flat area and a fine uneven area, a step of forming an underlayer thereon, and a step of further forming a magnetic layer thereon. A method of manufacturing a magnetic recording medium including the same. 【請求項１３】 基板上に感光性樹脂膜を形成する工程
と、前記感光性樹脂膜を情報に対応する所望のパターン
で露光する工程と、現像によって前記感光性樹脂膜の表
面に前記パターンに対する平坦部の領域と微細な凹凸部
の領域を形成して母型を作製する工程と、前記母型から
光硬化性樹脂又は熱硬化性樹脂を用いる転写もしくはＮ
ｉメッキによって第２母型を作製する工程と、前記第２
母型から光硬化性樹脂又は熱硬化性樹脂を用いて第２の
基板を複製する工程と、前記第２の基板上に磁性層を形
成する工程とを含むことを特徴とする再生専用領域を含
む磁気記録媒体の製造方法。13. A step of forming a photosensitive resin film on a substrate, a step of exposing the photosensitive resin film with a desired pattern corresponding to information, and a step of developing the photosensitive resin film on the surface of the photosensitive resin film. A step of forming a master area by forming a flat area and a fine uneven area, and transferring or N using a photocurable resin or a thermosetting resin from the master
a step of producing a second mother die by i plating, and the second step
A reproduction-only area comprising: a step of replicating a second substrate from a matrix using a photo-curable resin or a thermosetting resin; and a step of forming a magnetic layer on the second substrate. A method of manufacturing a magnetic recording medium including the same. 【請求項１４】 基板上に感光性樹脂膜を形成する工程
と、前記感光性樹脂膜を情報に対応する所望のパターン
で露光する工程と、現像によって前記感光性樹脂膜の表
面に前記パターンに対する平坦部の領域と微細な凹凸部
の領域を形成して母型を作製する工程と、前記母型から
光硬化性樹脂又は熱硬化性樹脂を用いる転写もしくはＮ
ｉメッキによって第２母型を作製する工程と、前記第２
母型から光硬化性樹脂又は熱硬化性樹脂を用いて第２の
基板を複製する工程と、前記第２の基板上に下地層を形
成する工程と、その上に磁性層を形成する工程とを含む
ことを特徴とする再生専用領域を含む磁気記録媒体の製
造方法。14. A step of forming a photosensitive resin film on a substrate, a step of exposing the photosensitive resin film with a desired pattern corresponding to information, and a step of developing the surface of the photosensitive resin film with respect to the pattern. A step of forming a master area by forming a flat area and a fine uneven area, and transferring or N using a photocurable resin or a thermosetting resin from the master
a step of producing a second mother die by i plating, and the second step
A step of replicating the second substrate from the master mold using a photo-curable resin or a thermosetting resin, a step of forming an underlayer on the second substrate, and a step of forming a magnetic layer thereon. A method of manufacturing a magnetic recording medium including a read-only area, comprising: 【請求項１５】 基板上に下地層を形成する工程と、前
記下地層上に感光性樹脂膜を形成する工程と、前記感光
性樹脂膜を情報に対応する所望のパターンで露光する工
程と、現像によって前記感光性樹脂膜の表面に前記パタ
ーンに対する平坦部の領域と微細な凹凸部の領域を形成
する工程と、前記感光性樹脂層をマスクとしてイオンエ
ッチングして前記下地層の表面に平坦部と微細な凹凸部
を形成する工程と、前記下地層の上に磁性層を形成する
工程とを含むことを特徴とする再生専用領域を含む磁気
記録媒体の製造方法。15. A step of forming a base layer on a substrate, a step of forming a photosensitive resin film on the base layer, and a step of exposing the photosensitive resin film in a desired pattern corresponding to information. A step of forming a flat area and a fine uneven area for the pattern on the surface of the photosensitive resin film by developing; and a flat area on the surface of the underlayer by ion etching using the photosensitive resin layer as a mask. And a step of forming a fine concavo-convex portion, and a step of forming a magnetic layer on the underlayer, and a method of manufacturing a magnetic recording medium including a read-only area. 【請求項１６】 基板上に微細な凹凸を全面に有する下
地層を形成する工程と、前記下地層上に感光性樹脂膜を
形成する工程と、前記感光性樹脂膜を情報に対応する所
望のパターンで露光する工程と、現像によつて前記パタ
ーンを有する感光性樹脂マスクを形成する工程と、前記
感光性樹脂マスクを介してイオンエッチングして前記下
地層の表面に平坦部と微細な凹凸部を形成する工程とを
含むことを特徴とする再生専用領域を含む磁気記録媒体
の製造方法。16. A step of forming an underlayer having fine irregularities on the entire surface of a substrate, a step of forming a photosensitive resin film on the underlayer, and a step of forming the photosensitive resin film on a desired layer corresponding to information. A step of exposing with a pattern, a step of forming a photosensitive resin mask having the pattern by development, a flat portion and a fine uneven portion on the surface of the underlayer by ion etching through the photosensitive resin mask And a step of forming a magnetic recording medium including a read-only area. 【請求項１７】 基板上に下地層を形成する工程と、前
記下地層上に熱的に形状変化する材料の薄膜を形成する
工程と、前記薄膜上に粒状の金属薄膜をマスク材として
形成する工程と、該マスク材をイオンエッチングして除
去することにより前記薄膜表面に金属薄膜の粒状に対応
した微細な凹凸を形成する工程と、微細な凹凸が形成さ
れた前記薄膜表面に情報に対応する所望のパターンのエ
ネルギー線を照射して平坦部の領域を形成する工程とを
含むことを特徴とする再生専用領域を含む磁気記録媒体
の製造方法。17. A step of forming a base layer on a substrate, a step of forming a thin film of a material whose shape changes thermally on the base layer, and a granular metal thin film formed on the thin film as a mask material. A step of forming fine irregularities corresponding to the grain of the metal thin film on the surface of the thin film by ion-etching and removing the mask material; and information corresponding to the thin film surface on which the fine irregularities are formed. And a step of irradiating an energy beam having a desired pattern to form a flat region, a method for manufacturing a magnetic recording medium including a read-only region. 【請求項１８】 前記所望のパターンはマスクによって
形成することを特徴とする請求項１１〜１７のいずれか
１項記載の再生専用領域を含む磁気記録媒体の製造方
法。18. The method of manufacturing a magnetic recording medium including a read-only area according to claim 11, wherein the desired pattern is formed by a mask. 【請求項１９】 前記所望のパターンはエネルギー線の
微小なスポットを走査して形成することを特徴とする請
求項１１〜１７のいずれか１項記載の再生専用領域を含
む磁気記録媒体の製造方法。19. The method of manufacturing a magnetic recording medium including a read-only area according to claim 11, wherein the desired pattern is formed by scanning a minute spot of energy rays. . 【請求項２０】 平坦な基板表面に高エネルギービーム
を照射して該照射領域を凹状又は凸状に形状変化させ、
情報に対応させて平坦部と前記凹状又は凸状領域の配列
を形成する工程と、前記基板上に下地層を形成する工程
と、その上に磁性層を形成する工程とを含むことを特徴
とする再生専用領域を含む磁気記録媒体の製造方法。20. A flat substrate surface is irradiated with a high energy beam to change the irradiation region into a concave shape or a convex shape,
A step of forming an array of flat portions and the concave or convex regions corresponding to information, a step of forming an underlayer on the substrate, and a step of forming a magnetic layer thereon. Of manufacturing a magnetic recording medium including a read-only area. 【請求項２１】 平坦な基板状に下地層を形成する工程
と、その表面に高エネルギービームを照射して該照射領
域を凹状又は凸状に形状変化させ、情報に対応させて平
坦部と前記凹状又は凸状領域の配列を形成する工程と、
前記下地層上に磁性層を形成する工程とを含むことを特
徴とする再生専用領域を含む磁気記録媒体の製造方法。21. A step of forming a base layer on a flat substrate, and irradiating the surface thereof with a high energy beam to change the shape of the irradiation region into a concave shape or a convex shape, and the flat portion and the Forming an array of concave or convex regions,
And a step of forming a magnetic layer on the underlayer, the method for manufacturing a magnetic recording medium including a read-only area. 【請求項２２】 強い磁界を印加して磁性層の磁化を初
期方向に配向させる工程と、次に比較的弱い逆向きの磁
界を印加して磁性層中の保磁力の低い領域の磁化を反転
させる工程とを更に含むことを特徴とする請求項１１〜
２１のいずれか１項記載の再生専用領域を含む磁気記録
媒体の製造方法。22. A step of applying a strong magnetic field to orient the magnetization of the magnetic layer in the initial direction, and then applying a relatively weak opposite magnetic field to invert the magnetization of a region having a low coercive force in the magnetic layer. The method further comprising the step of:
22. A method of manufacturing a magnetic recording medium including the read-only area according to claim 21. 【請求項２３】 請求項１〜１０のいずれか１項に記載
の再生専用領域を含む磁気記録媒体と、前記磁気記録媒
体を駆動する手段と、前記磁気記録媒体からの情報を再
生する磁気ヘッドと、前記磁気ヘッドを前記磁気記録媒
体に対して相対的に移動させるための手段と、再生信号
を処理するための信号処理系を含むことを特徴とする磁
気記録再生装置。23. A magnetic recording medium including the read-only area according to claim 1, means for driving the magnetic recording medium, and a magnetic head for reproducing information from the magnetic recording medium. And a means for moving the magnetic head relative to the magnetic recording medium, and a signal processing system for processing a reproduced signal.
JP5852894A 1994-03-29 1994-03-29 Magnetic recording medium including reproduction-only region and its production Pending JPH07272239A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5852894A JPH07272239A (en) 1994-03-29 1994-03-29 Magnetic recording medium including reproduction-only region and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5852894A JPH07272239A (en) 1994-03-29 1994-03-29 Magnetic recording medium including reproduction-only region and its production

Publications (1)

Publication Number Publication Date
JPH07272239A true JPH07272239A (en) 1995-10-20

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JP5852894A Pending JPH07272239A (en) 1994-03-29 1994-03-29 Magnetic recording medium including reproduction-only region and its production

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JP (1) JPH07272239A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006286158A (en) * 2005-04-05 2006-10-19 Canon Inc Magnetic recording medium and its manufacturing method
JP2011222103A (en) * 2010-04-14 2011-11-04 Toshiba Corp Magnetic recording medium and method for manufacturing the same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006286158A (en) * 2005-04-05 2006-10-19 Canon Inc Magnetic recording medium and its manufacturing method
JP4560433B2 (en) * 2005-04-05 2010-10-13 キヤノン株式会社 Magnetic recording medium, magnetic recording / reproducing apparatus using magnetic recording medium, and information processing apparatus using magnetic recording / reproducing apparatus
JP2011222103A (en) * 2010-04-14 2011-11-04 Toshiba Corp Magnetic recording medium and method for manufacturing the same
US9053733B2 (en) 2010-04-14 2015-06-09 Kabushiki Kaisha Toshiba Magnetic recording medium with magnetic portions of different orientations and method of manufacturing the same

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