JPH07243970A - Applied oil quantity measuring method on metal material surface and device therefor - Google Patents
Applied oil quantity measuring method on metal material surface and device thereforInfo
- Publication number
- JPH07243970A JPH07243970A JP17852894A JP17852894A JPH07243970A JP H07243970 A JPH07243970 A JP H07243970A JP 17852894 A JP17852894 A JP 17852894A JP 17852894 A JP17852894 A JP 17852894A JP H07243970 A JPH07243970 A JP H07243970A
- Authority
- JP
- Japan
- Prior art keywords
- fluorescence
- oil
- light
- metal material
- excitation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、金属材料表面の塗油量
測定方法および装置に係り、特に製鉄業における冷間圧
延工程や表面処理工程でのオンライン品質管理、塗油量
制御に適用するのに好適な金属材料表面の塗油量測定方
法および装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for measuring the amount of oil coating on the surface of a metal material, and is particularly applied to online quality control and oil coating amount control in the cold rolling process and surface treatment process in the steel industry. The present invention relates to a method and apparatus for measuring the amount of oil coating on the surface of a metal material suitable for use in
【０００２】[0002]
【従来の技術】鉄鋼業における冷間圧延工程や表面処理
工程を例に説明すると、冷間圧延工程や表面処理工程を
経て製造された冷延鋼板や各種メッキ材などの鋼板の表
面には、防錆や潤滑を目的として油が塗布されている。
その塗油方法は、通常、静電塗油装置を用いた連続的な
塗油方法が一般的である。2. Description of the Related Art A cold rolling process or a surface treatment process in the steel industry will be described as an example. On the surface of a cold rolled steel sheet or a steel plate such as various plated materials manufactured through the cold rolling process or the surface treatment process, Oil is applied for the purpose of rust prevention and lubrication.
The oiling method is generally a continuous oiling method using an electrostatic oiling device.
【０００３】しかし、たとえば防錆油の塗布量が不足し
たり塗布むらが生じたりすると、防錆効果の低下を招く
ので問題である。また、逆に過塗油の場合、防錆油の原
単位が高くなって不利であるとともに、次工程でのスリ
ップ、脱脂が必要なラインでの脱脂不良などが発生する
という問題が生じるため、最近では防錆油の油種、塗油
量が指定され、製造工程での厳密な塗油量管理が要求さ
れている。However, if the amount of rust-preventive oil applied is insufficient or unevenly applied, the rust-preventive effect is lowered, which is a problem. On the other hand, in the case of over-coating oil, the basic unit of rust-preventing oil becomes high and disadvantageous, and there is a problem that slipping in the next step, degreasing failure in a line requiring degreasing, etc. occurs. Recently, the type of rust preventive oil and the amount of oil applied have been specified, and strict oil amount control in the manufacturing process is required.
【０００４】ところで、従来行われている塗油量の管理
はサンプリングによるオフラインバッチ測定が主流であ
り、たとえば精密天秤による重量測定法とか、あるいは
水面上に形成された単分子層の油の面積から塗油量を算
出するハイドロフィルバランス法などがある。By the way, in the conventional management of the amount of applied oil, off-line batch measurement by sampling is the mainstream. For example, a weight measurement method using a precision balance or the area of oil of a monomolecular layer formed on the water surface is used. There is a hydrofill balance method for calculating the amount of oil applied.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、上記し
た前者の重量測定法の場合は100mg/m2程度の軽塗油量に
対しては精度が悪く、後者のハイドロフィルバランス法
についても測定に長時間を要するという問題がある。ま
た、これらの方法はいずれもオフラインによる測定方式
であるから、圧延コイル中の１点から数点を測定するの
みでコイル全長の代表値を表しているとは限らないとい
う問題がある。However, in the case of the former weight measuring method described above, the accuracy is low with respect to a light oil coating amount of about 100 mg / m 2 , and the latter hydrofill balance method is also long in measuring. There is a problem that it takes time. Further, since all of these methods are off-line measuring methods, there is a problem in that the representative value of the total coil length is not always represented only by measuring one to several points in the rolling coil.
【０００６】そこで、これら従来法の欠点を克服し、迅
速かつ厳密な塗油量管理のために、以下に示すような種
々のオンライン測定法が提案され、あるいは実用化され
ている。すなわち、たとえば特開昭63− 61146号公報に
は、水銀ランプの励磁波長光 (253.77nm) を防錆油付着
面に照射した際に生じる蛍光量を測定することにより油
の付着量を算出する方法が提案されている。しかし、こ
の方法では十分な感度が得られることの確認はなされて
いるが、コイル毎に異なり、経時的に変化する表面粗
度、光沢などの表面性状による光反射特性の変化に対し
て考慮されておらず、測定誤差が生じる欠点がある。Therefore, in order to overcome these drawbacks of the conventional methods and quickly and strictly control the amount of applied oil, various online measuring methods as shown below have been proposed or put into practical use. That is, for example, in Japanese Patent Laid-Open No. 63-61146, the amount of oil adhered is calculated by measuring the amount of fluorescence generated when the excitation wavelength light (253.77 nm) of a mercury lamp is applied to the surface on which the antirust oil is adhered. A method has been proposed. However, although it has been confirmed that sufficient sensitivity can be obtained by this method, it is considered for changes in light reflection characteristics due to surface texture such as surface roughness and gloss, which vary with each coil and change over time. However, there is a drawback that a measurement error occurs.
【０００７】また、特開昭61−138102号公報には、鋼板
の表面に塗布された油の量を測定する鋼板表面の塗油量
測定方法において、油が塗布された鋼板または鋼帯の表
面または前記油が溶解された有機溶剤の溶液に、特定波
長の励起レーザ光を照射し、前記鋼板表面または溶液か
らの蛍光スペクトルのうち、油にのみ含まれる成分の蛍
光スペクトル強度を測定し、蛍光スペクトル強度から油
の塗布量を求める方法が提案されている。しかし、この
方法の場合はその上流側にオンライン粗度計を設置する
必要があり、また同一の粗度測定値であっても光沢など
の表面性状が異なる鋼板の場合は、その測定値に誤差が
生じてしまうという欠点がある。Further, Japanese Patent Laid-Open No. 61-138102 discloses a method for measuring the amount of oil applied to the surface of a steel sheet, which is a method for measuring the amount of oil applied to the surface of a steel sheet. Alternatively, the solution of the organic solvent in which the oil is dissolved, is irradiated with excitation laser light of a specific wavelength, of the fluorescence spectrum from the steel plate surface or solution, the fluorescence spectrum intensity of the component contained only in the oil is measured, and the fluorescence A method of obtaining the amount of oil applied from the spectral intensity has been proposed. However, in the case of this method, it is necessary to install an online roughness meter on the upstream side, and even for the same roughness measurement value, in the case of steel sheets with different surface properties such as gloss, there is an error in the measurement value. There is a drawback that is caused.
【０００８】さらに、特開平３− 77003号公報には、鋼
板表面で反射する励起レーザ光の散乱分布から鋼板表面
性状を測定して半値幅を求め、この値をもとに蛍光スペ
クトル強度を補正する方法が提案されているが、この場
合、自動車用鋼板など粗度の大きい冷延板や溶融亜鉛メ
ッキ鋼板などでは、励起光に用いる可視波長領域での反
射率が低く半値幅を求める精度が低くなり、精度よく表
面性状の補正を行うことができないという欠点を有す
る。また、反射分布測定のために検出器内にアレイセン
サを設置するが、このため装置が大型となる欠点を有す
る。Further, in Japanese Patent Laid-Open No. 3-77003, the halftone width is obtained by measuring the steel sheet surface property from the scattering distribution of the excitation laser light reflected on the steel sheet surface, and the fluorescence spectrum intensity is corrected based on this value. However, in this case, in a cold-rolled sheet or a hot-dip galvanized sheet having a high degree of roughness such as a steel sheet for automobiles, the reflectance in the visible wavelength region used for the excitation light is low and the accuracy of obtaining the half-value width is low. It becomes low, and there is a drawback that the surface texture cannot be accurately corrected. Further, an array sensor is installed in the detector for measuring the reflection distribution, but this has a drawback that the device becomes large in size.
【０００９】なお、これらのオンライン測定法に共通し
ていえることは、蛍光量から塗油量を測定する装置を製
造ラインに設置する場合、塗油対象の鋼板の移動速度は
毎分数百メートルもの高速度であるので、測定対象であ
る鋼板自体の振動や測定距離の上下方向変化などの問題
が発生することが避けられない。また、上記した従来の
オンライン測定法では微弱な蛍光量を検出するために励
起用光源を強力にし、集光系を複雑にするために装置が
大型化し、そのため、装置の操作性が劣りまたコストが
高くつくという問題が避けられない。[0009] It should be noted that the same thing can be said to be common to these online measuring methods, when a device for measuring the amount of oil applied from the amount of fluorescence is installed in the production line, the moving speed of the steel sheet to be oiled is several hundred meters per minute. Since the speed is extremely high, it is inevitable that problems such as vibration of the steel sheet itself as a measurement target and vertical change of the measurement distance will occur. Further, in the above-described conventional online measurement method, the excitation light source is made strong in order to detect a weak fluorescence amount, and the device becomes large in size to complicate the light collecting system, so that the operability of the device is poor and the cost is low. The problem of high cost is inevitable.
【００１０】本発明は、上記のような従来技術の有する
課題を解決すべくなされたものであって、オンラインで
金属材料表面の塗油量を正確に測定し得る方法および装
置を提供することを目的とする。The present invention has been made to solve the problems of the prior art as described above, and provides a method and an apparatus capable of accurately measuring the amount of oil coating on the surface of a metal material online. To aim.
【００１１】[0011]
【課題を解決するための手段】本発明の第１の態様は、
油が塗布された金属材料表面に特定波長の励起光を照射
し、その照射によって生じる蛍光を含む反射光のスペク
トル分布から金属材料表面の油の塗布量を測定する方法
において、金属材料表面からの蛍光を含む反射光を集光
し、集光された光のうち励起波長成分と蛍光波長成分に
分光し、該分光された励起波長成分と蛍光波長成分から
励起波長強度と蛍光波長強度とをそれぞれ測定し、予め
測定された油の蛍光効率と前記した励起波長強度および
蛍光波長強度とから塗油量を算出することを特徴とする
金属材料表面の塗油量測定方法である。The first aspect of the present invention is as follows.
In the method of irradiating the metal material surface coated with oil with excitation light of a specific wavelength and measuring the amount of oil coated on the metal material surface from the spectral distribution of reflected light including fluorescence generated by the irradiation, The reflected light containing fluorescence is collected, and the collected light is split into an excitation wavelength component and a fluorescence wavelength component, and the excitation wavelength intensity and the fluorescence wavelength intensity are respectively separated from the split excitation wavelength component and the fluorescence wavelength component. It is a method for measuring the amount of oil applied to the surface of a metallic material, which comprises measuring and measuring the amount of oil applied from the fluorescence efficiency of the oil measured in advance and the above-mentioned excitation wavelength intensity and fluorescence wavelength intensity.
【００１２】なお、前記油の蛍光効率は前記した励起波
長強度と蛍光波長強度の測定時に同時に測定してもよ
い。また、励起光は油が塗布された金属材料表面に対し
て垂直な投光軸で照射し、蛍光を含む反射光を前記投光
軸と同軸方向から集光するようにしてもよい。本発明の
第２の態様は、油が塗布された金属材料表面に特定波長
の励起光を照射する手段と、金属材料表面からの蛍光を
含む反射光を集光する集光装置と、集光された光のうち
励起波長成分と蛍光波長成分に分光する分光素子と、前
記励起波長成分と蛍光波長成分から励起波長強度と蛍光
波長強度とをそれぞれ測定する励起波長検出器および蛍
光検出器と、予め測定された油の蛍光効率と前記した各
検出器からの測定値を用いて塗油量を算出する演算処理
回路と、を備えてなることを特徴とする金属材料表面の
塗油量測定装置である。The fluorescence efficiency of the oil may be measured simultaneously with the measurement of the excitation wavelength intensity and the fluorescence wavelength intensity. Further, the excitation light may be emitted along a projection axis perpendicular to the surface of the metal material coated with oil, and the reflected light including fluorescence may be condensed from the direction coaxial with the projection axis. A second aspect of the present invention is a means for irradiating an oil-coated metal material surface with excitation light of a specific wavelength, a light collector for collecting reflected light including fluorescence from the metal material surface, and a light collector. A spectroscopic element that separates the excitation wavelength component and the fluorescence wavelength component of the light, and an excitation wavelength detector and a fluorescence detector that respectively measure the excitation wavelength intensity and the fluorescence wavelength intensity from the excitation wavelength component and the fluorescence wavelength component, and An apparatus for measuring the amount of oil on the surface of a metal material, comprising: an arithmetic processing circuit for calculating the amount of oil by using the fluorescence efficiency of oil measured in advance and the measured values from the respective detectors described above. Is.
【００１３】なお、前記油の蛍光効率は塗油機で塗油す
る前の油が満たされた分光セルに前記光源から分岐され
た光束を透過させる分光手段と、前記分光セル内の蛍光
強度を分光素子を介して測定する蛍光効率測定用蛍光検
出器とによって測定してもよい。また、前記特定波長の
励起光を照射する手段を励起光が金属材料表面に対して
垂直な投光軸となるように配置し、かつ金属材料表面か
らの蛍光を含む反射光を集光する集光装置を前記投光軸
と同軸方向から集光するように配置してもよい。The fluorescence efficiency of the oil is determined by the spectroscopic means for transmitting the light beam branched from the light source to the spectroscopic cell filled with the oil before the oil is applied by the oil coating machine, and the fluorescence intensity in the spectroscopic cell. It may be measured by a fluorescence detector for measuring fluorescence efficiency which is measured via a spectroscopic element. Further, the means for irradiating the excitation light of the specific wavelength is arranged so that the excitation light has a projection axis perpendicular to the surface of the metal material, and a means for collecting reflected light including fluorescence from the surface of the metal material. The optical device may be arranged so as to collect light from a direction coaxial with the projection axis.
【００１４】さらに、前記集光装置は、励起光の投光軸
上に配置されて励起光を通過させる穴を有するとともに
金属材料表面からの蛍光を含む反射光を集光して平行光
とする第１の集光レンズと、励起光の投光軸上に配置さ
れて前記第１の集光レンズからの平行光を前記投光軸に
対して直角の方向に反射するとともに励起光を通過させ
る穴を有する平面ミラーと、該平面ミラーで反射された
平行光を集光して前記分光素子を介して前記励起波長検
出器と蛍光検出器に導く第２の集光レンズと、によって
構成してもよく、あるいは励起光の投光軸上に配置され
て励起光を通過させる穴を有するとともに集光した金属
材料表面からの蛍光を含む反射光を投光軸に対して直角
な方向に平行光として反射する第１の放物面ミラーと、
該第１の放物面ミラーにより反射された平行光を投光軸
と平行な方向に反射する平面ミラーと、該平面ミラーで
反射された平行光を集光して前記分光素子を介して前記
励起波長検出器と蛍光検出器に導く第２の放物面ミラー
と、によって構成してもよく、また金属材料表面からの
蛍光を含む反射光を入光する穴と、励起光を通過させる
穴と、分光素子を介して前記励起波長検出器と蛍光検出
器に導く穴を有する蛍光を含む反射光を集光する積分光
学装置を用いてもよい。Further, the condensing device has a hole arranged on the projection axis of the excitation light to pass the excitation light, and condenses the reflected light containing fluorescence from the surface of the metal material into parallel light. The first condenser lens is arranged on the projection axis of the excitation light and reflects the parallel light from the first condenser lens in a direction perpendicular to the projection axis and allows the excitation light to pass through. A plane mirror having a hole, and a second condenser lens that collects parallel light reflected by the plane mirror and guides the parallel light to the excitation wavelength detector and the fluorescence detector via the spectroscopic element. Or, it has a hole that is placed on the projection axis of the excitation light and allows the excitation light to pass therethrough, and the reflected light containing fluorescence from the surface of the collected metal material is collimated in the direction perpendicular to the projection axis. A first parabolic mirror that reflects as
A plane mirror that reflects the parallel light reflected by the first parabolic mirror in a direction parallel to the projection axis, and collects the parallel light reflected by the plane mirror through the spectroscopic element. It may be constituted by an excitation wavelength detector and a second parabolic mirror leading to the fluorescence detector, and a hole for receiving reflected light containing fluorescence from the surface of the metal material and a hole for passing the excitation light. In addition, an integrating optical device that collects reflected light containing fluorescence having a hole that leads to the excitation wavelength detector and the fluorescence detector via the spectroscopic element may be used.
【００１５】さらにまた、前記集光装置を測定距離調整
用ベースに取付けて、駆動装置によって測定対象面に対
して垂直方向に移動可能とするのがよい。Furthermore, it is preferable that the condensing device is attached to a measuring distance adjusting base so that the condensing device can be moved in a direction perpendicular to a surface to be measured by a driving device.
【００１６】[0016]
【作 用】まず、図10を用いて本発明の原理を説明す
る。図10(a) に示すように、ｄなる膜厚の油２を塗布し
た下地の鋼板１の面に光源51から波長λ1 なる励起光LB
を照射し、その反射光RBを集光光学系52を介して分光素
子53で分光し、光検出器54で受光するものとする。そし
て、図10(b) に示すように、油２の膜厚ｄに対してＩ0
の強度をもつ励起光LBを入射した場合、油膜中の鋼板１
からの部位ｘにおける励起光LBの強度は鋼板１からの反
射前の強度Ｉ 1 と反射後の強度Ｉ2 に分けると、それぞ
れ下記(1) ，(2) の関係で表すことができる。[Operation] First, the principle of the present invention will be described with reference to FIG.
It As shown in Fig. 10 (a), apply oil 2 with a film thickness of d.
From the light source 51 to the surface of the underlying steel plate 1, the wavelength λ1Excitation light LB
The reflected light RB is irradiated onto the spectroscopic element through the condensing optical system 52.
The light is split by the child 53 and received by the photodetector 54. That
As shown in FIG. 10 (b), I0
Steel plate in oil film when excited light LB with intensity of 1 is incident
The intensity of the excitation light LB at the part x from
Strength before shooting I 1And intensity after reflection I2If you divide it into
This can be expressed by the following relationships (1) and (2).
【００１７】[0017]
【数１】 [Equation 1]
【００１８】ここで、Ｋ1 は吸収係数、αは下地面の反
射率、Ｒa は下地面の平均粗さ、θ R は反射光RBの拡が
り角度、Ｔは下地面の自己相関長さ、θは入・反射角
度、ｆ（Ｒa,Ｔ，θ，θR ）はＲa,Ｔ，θおよびθR の
関数である。このとき、Δｘ部位における蛍光強度ΔＩ
f は下記(3) 式で表せる。 ΔＩf （λ1 ，ｘ）＝｛Ｉ1(λ1 ，ｘ）＋Ｉ2(λ1 ，ｘ）｝・φ・Δｘ・γ ・θT ／２π ……………(3) ここで、φは励起光LBのビーム径（したがって、φ・Δ
ｘはビーム体積）、γは油２の蛍光効率、θT は集光レ
ンズの立体角とする。Where K1Is the absorption coefficient, α is the reverse of the surface
Emissivity, Ra is the average roughness of the underlying surface, θ RIs the spread of the reflected light RB
Angle, T is the autocorrelation length of the underlying surface, θ is the incident / reflection angle
Degree, f (Ra, T, θ, θR) Is Ra, T, θ and θRof
Is a function. At this time, the fluorescence intensity ΔI at the Δx site
fCan be expressed by equation (3) below. ΔIf(Λ1, X) = {I1(λ1, X) + I2(λ1, X)} ・ φ ・ Δx ・ γ ・ θT/ 2π …………… (3) where φ is the beam diameter of the pumping light LB (hence φ ・ Δ
x is the beam volume), γ is the fluorescence efficiency of oil 2, θTIs the condenser
The solid angle of the angle.
【００１９】これより、全蛍光強度Ｉf は下記(4) ，
(5) 式で求めることが可能である。From this, the total fluorescence intensity If is given by the following (4),
It is possible to obtain by the equation (5).
【００２０】[0020]
【数２】 [Equation 2]
【００２１】ここで、油の吸収係数の測定結果より、本
発明が対象としている０〜10μm 程度の油の膜厚では、 Ｋ1 ・ｄ≫（Ｋ1 ・ｄ）2 ……………(6) であるため、(5) 式が成立する。なお、Ａは集光光学系
等の光学素子や検出素子感度、さらには増幅系等の電気
的特性によって決まる定数、θT は集光光学系52の受光
立体角、βは下地粗度に関係する情報であり、また、油
２の蛍光効率γ、吸収係数Ｋ1 は使用する油ごとに測定
できるものである。特に、蛍光効率γについては、油種
ごとに予めオフラインで測定した値を用いてもよく、あ
るいは蛍光強度の測定時にオンラインで同時に測定した
値を用いてもよい。[0021] Here, from the measurement results of the absorption coefficient of oil, the thickness of the oil of about 0~10μm which the present invention is targeted, K 1 · d» (K 1 · d) 2 ............... ( Since (6), Eq. (5) holds. Note that A is a constant determined by the sensitivity of optical elements such as a condensing optical system and the detection element, and electrical characteristics of an amplification system, θ T is the light receiving solid angle of the condensing optical system 52, and β is related to the surface roughness The fluorescence efficiency γ and the absorption coefficient K 1 of the oil 2 can be measured for each oil used. In particular, for the fluorescence efficiency γ, a value that is previously measured offline for each oil type may be used, or a value that is simultaneously measured online when measuring the fluorescence intensity may be used.
【００２２】なお、式中における下地面反射率αおよび
下地粗度情報βについては、つぎのように補正に利用さ
れる。すなわち、全蛍光強度Ｉf (λ2)と同時に、鋼板
１からの反射スペクトルのうちの励起光波長強度Ｉ（λ
1)が測定されるが、このＩ（λ1)とαおよびβとの間に
は、 Ｉ（λ1)＝Ｂ・α・β・ｅ-2K1d ・Ｉ0 （λ1) ……………(7) の関係が成立する。The base surface reflectance α and the base surface roughness information β in the equation are used for correction as follows. That is, at the same time as the total fluorescence intensity I f (λ 2 ), the excitation light wavelength intensity I (λ
1 ) is measured, and between I (λ 1 ) and α and β, I (λ 1 ) = B · α · β · e −2K1d · I 0 (λ 1 ) ………… … (7) is established.
【００２３】ここで、Ｂは励起光波長強度を測定するた
めの集光光学系等の光学素子や検出素子感度、さらには
増幅系等の電気的特性によって決まる定数である。い
ま、ある鋼板を基準としたときに測定される励起光波長
強度をＩSTD （λ1)、そのときのα・βの値を（α・
β）STD とすれば、 ＩSTD （λ1)＝Ｂ・（α・β）STD ・ｅ-2K1d ・Ｉ0 （λ1) ……(8) となるので、(7) ，(8) 式から、 α・β＝｛（α・β）STD ／ＩSTD （λ1)｝・Ｉ（λ1) ……(9) が得られる。(9) 式中の｛｝内は基準となる鋼板を決め
ると定数となり、その値をＣ′とすれば、 α・β＝Ｃ′・Ｉ（λ1) ……………(10) となる。Here, B is a constant determined by the sensitivity of optical elements such as a condensing optical system for measuring the excitation light wavelength intensity and the detection element, and the electrical characteristics of the amplification system. Now, the excitation light wavelength intensity measured with a certain steel plate as a reference is I STD (λ 1 ), and the value of α · β at that time is (α ·
If β) STD , then I STD (λ 1 ) = B · (α · β) STD · e −2K1d · I 0 (λ 1 ) ... (8) Therefore, equations (7) and (8) are obtained. From this, α · β = {(α · β) STD / I STD (λ 1 )} · I (λ 1 ) ... (9) is obtained. The value in {} in the equation (9) becomes a constant when the standard steel plate is determined, and if that value is C ′, α · β = C ′ · I (λ 1 ) …………… (10) Become.
【００２４】したがって、(5) , (10)式から、 ｄ＝Ｉf (λ2)／［Ｃ・γ・Ｉ0 （λ1)｛１＋Ｃ′・Ｉ（λ1)｝］ ……………(11) となり、オンラインにて測定されるＩf (λ2)，Ｉ（λ
1)の値と油の蛍光効率γの値から膜厚ｄを求めることが
できる。Therefore, from the equations (5) and (10), d = If (λ 2 ) / [C · γ · I 0 (λ 1 ) {1 + C ′ · I (λ 1 )}] ...... … (11), and I f (λ 2 ), I (λ
The film thickness d can be obtained from the value of 1 ) and the value of the fluorescence efficiency γ of oil.
【００２５】なお、Ｃ，Ｃ′は測定に用いる装置の構成
や基準となる鋼板などを決めると一定となる定数なの
で、あらかじめ実験的に求めておくことができる。ま
た、励起光強度Ｉ0 （λ1)は励起光を照射する際に電気
的に制御されているために通常は一定値となるが、長時
間使用時の寿命を考慮すると低下していくので、別の検
出系を照射光学系内に組み入れて実測することも可能で
ある。Since C and C'are constants that are constant when the structure of the apparatus used for the measurement and the steel plate as a reference are determined, they can be experimentally obtained in advance. Further, the excitation light intensity I 0 (λ 1 ) is usually a constant value because it is electrically controlled when irradiating the excitation light, but it decreases when considering the life during long-term use. It is also possible to incorporate another detection system into the irradiation optical system for actual measurement.
【００２６】このようにして、本発明によれば、測定対
象である金属材料の表面に塗布された油の量を単位面積
当たりの塗油量がたとえ微量であっても十分な感度で測
定することが可能であり、油の蛍光効率および下地金属
材料の表面性状の違いによる受光蛍光強度の変化を反射
励起光強度変化により補正することにより、下地金属材
料の表面状態が変化しても油の塗油量を精度よく測定す
ることができる。As described above, according to the present invention, the amount of oil applied to the surface of the metal material to be measured is measured with sufficient sensitivity even if the amount of oil applied per unit area is very small. It is possible to correct the change in the received fluorescence intensity due to the difference in oil fluorescence efficiency and the surface property of the underlying metal material by the change in the reflected excitation light intensity, so that even if the surface state of the underlying metal material changes, the oil It is possible to accurately measure the amount of oil applied.
【００２７】また、本発明によれば、測定対象である金
属材料表面に対して垂直方向から励起光を照射するとと
もに、励起光と同軸方向から反射光を集光するようにし
たので、金属材料の振動による影響を最小限に抑制して
塗油量を測定することができる。さらに、本発明によれ
ば、塗布された油から効率よく蛍光を発光させ得る紫外
線領域の励起波長を使用することの可能な超高圧水銀キ
セノンランプなどを用いることができ、かつ積分光学装
置として市販の積分球を使用して蛍光波長強度および励
起波長強度を測定することにより、金属材料表面の粗さ
や反射率等の状態に影響を受けにくい小型で、かつ安価
な塗油量測定装置を実現することができる。Further, according to the present invention, the surface of the metal material to be measured is irradiated with the excitation light from the vertical direction and the reflected light is condensed from the direction coaxial with the excitation light. The amount of oil can be measured while suppressing the influence of the vibration of the. Furthermore, according to the present invention, it is possible to use an ultra-high pressure mercury xenon lamp or the like capable of using an excitation wavelength in the ultraviolet region capable of efficiently emitting fluorescence from the applied oil, and commercially available as an integrating optical device. By measuring the fluorescence wavelength intensity and the excitation wavelength intensity using the integrating sphere of, a compact and inexpensive oil coating amount measuring device that is not easily affected by conditions such as roughness and reflectance of the metal material surface is realized. be able to.
【００２８】なお、蛍光波長としてはλ2 なる単色を用
いるとして説明したが、蛍光波長域を広範囲にして、た
とえばλ3 ＜λ2 ＜λ4 としてλ3 からλ4 までの幅を
持った領域としてもよい。このようにすることにより、
微量な塗油量に対しても高感度な測定を行うことができ
る。Although it has been described that a single color λ 2 is used as the fluorescence wavelength, the fluorescence wavelength range is widened, for example, a region having a width from λ 3 to λ 4 where λ 3 <λ 2 <λ 4. May be By doing this,
It is possible to perform highly sensitive measurement even for a small amount of oil.
【００２９】[0029]
【実施例】以下に、本発明の実施例について、図面を参
照して詳しく説明する。図１は本発明に係る塗油量測定
装置の全体構成を示す正面図である。図において、１は
その上面に油２が塗布されて、テーブルローラ３で連続
して搬送される測定対象の鋼板である。４は検出ヘッド
で、門型架台５に取付けられたレール６上を動く車輪７
を介して鋼板１の幅方向に移動自在とされる。８は演算
処理装置で、回線９を介して検出ヘッド４に接続され
る。10は上位計算機で、油２の種類や他の情報を演算処
理装置８に提供する。Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 is a front view showing the overall configuration of the oil coating amount measuring apparatus according to the present invention. In the figure, reference numeral 1 is a steel plate to be measured which has oil 2 applied on its upper surface and which is continuously conveyed by a table roller 3. Reference numeral 4 denotes a detection head, which is a wheel 7 that moves on a rail 6 attached to a portal frame 5.
It is made movable in the width direction of the steel plate 1 via. Reference numeral 8 denotes an arithmetic processing unit, which is connected to the detection head 4 via a line 9. Reference numeral 10 is a host computer, which provides the type of oil 2 and other information to the arithmetic processing unit 8.
【００３０】検出ヘッド４の構成の一例について、図２
を用いて以下に詳しく説明する。この図において、11は
ｄなる膜厚の油２が塗布された鋼板１の表面に励起波長
λ1 の励起光LBを照射する手段としての励起用光源、12
は鋼板１の表面から反射する油２からの蛍光を含む反射
光RBを集光するたとえばレンズとされる集光装置、13は
集光された光のうち励起波長成分と蛍光波長成分に分光
する分光素子、14は蛍光波長λ2 の強度を測定する蛍光
検出器、15は励起波長λ1 の強度を測定する励起波長検
出器である。FIG. 2 shows an example of the structure of the detection head 4.
Will be described in detail below. In this figure, 11 is an excitation light source as a means for irradiating the surface of a steel plate 1 coated with oil 2 having a film thickness of d with excitation light LB having an excitation wavelength λ 1 , 12
Is a condenser that condenses the reflected light RB containing the fluorescence from the oil 2 reflected from the surface of the steel plate 1, for example, a condenser, and 13 disperses the condensed light into an excitation wavelength component and a fluorescence wavelength component. A spectroscopic element, 14 is a fluorescence detector that measures the intensity of the fluorescence wavelength λ 2 , and 15 is an excitation wavelength detector that measures the intensity of the excitation wavelength λ 1 .
【００３１】また、16は油２の蛍光効率を測定するため
の塗油機（図示せず）で塗油する前の油が満たされた分
光セル、17は鋼板１と分光セル16にレーザ照射するため
のビームスプリッタ、18は分光セル16内の油の蛍光のみ
を選択する分光素子、19は分光セル16内の蛍光強度を検
出して蛍光効率を測定する蛍光効率測定用蛍光検出器で
ある。Further, 16 is a spectroscopic cell filled with oil before being applied with an oiling machine (not shown) for measuring the fluorescence efficiency of the oil 2, and 17 is laser irradiation to the steel plate 1 and the spectroscopic cell 16. Beam splitter for, 18 is a spectroscopic element that selects only the fluorescence of the oil in the spectroscopic cell 16, 19 is a fluorescence detector for fluorescence efficiency measurement that detects the fluorescence intensity in the spectroscopic cell 16 and measures the fluorescence efficiency. .
【００３２】ここで、この蛍光効率の算出方法について
説明すると、ある特性の油を基準となる油温にしたとき
に、ビームスプリッタ17, 分光素子18, 蛍光効率測定用
蛍光検出器19の機器構成で測定される蛍光強度をＩγ0
（λ1)とし、それ以外の油に対して油温も変化した場合
に測定される蛍光強度をＩγ（λ1)とすると、蛍光効率
γは、 γ＝Ｉγ（λ1)／Ｉγ0 （λ1) ……………(12) で求めることができる。Here, the method of calculating the fluorescence efficiency will be described. When the oil having a certain characteristic is used as the reference oil temperature, the device configuration of the beam splitter 17, the spectroscopic element 18, and the fluorescence efficiency measuring fluorescence detector 19 will be described. in Iγ fluorescence intensity measured 0
Let (λ 1 ) be the fluorescence intensity measured when the oil temperature also changes for other oils, and Iγ (λ 1 ), the fluorescence efficiency γ is γ = Iγ (λ 1 ) / Iγ 0 ( λ 1 ) …………… It can be calculated by (12).
【００３３】20は検出ヘッド４の励起用光源11、集光装
置12、各検出器14, 15等の構成部品を一体的に収納し
て、オイルミストなどから保護するハウジングである。
また、蛍光検出器14，励起波長検出器15，油中蛍光検出
器19からの出力信号はそれぞれ演算処理回路８に入力さ
れて演算処理される。ここで、励起用光源11からの励起
波長λ1 や蛍光波長強度を測定する蛍光検出器14の測定
波長λ2 は、各油種の特性を調べることによって予め適
切なものに設定されているものとするが、励起波長λ1
としてはおよそ0.25〜0.6 μm の範囲内の紫外から可視
領域が適当である。したがって、励起用光源11として
は、水銀ランプとかアルゴンレーザ、He-Cd レーザ、Ｙ
ＡＧレーザ、エキシマレーザなどが考えられるが、波
長、発振出力、寸法、価格などを考慮して選定するのが
望ましい。Reference numeral 20 designates a housing for accommodating components such as the excitation light source 11, the condenser 12, the detectors 14, 15 and the like of the detection head 4 integrally and protecting them from oil mist and the like.
Output signals from the fluorescence detector 14, the excitation wavelength detector 15, and the in-oil fluorescence detector 19 are input to the arithmetic processing circuit 8 to be arithmetically processed. Here, the excitation wavelength λ 1 from the excitation light source 11 and the measurement wavelength λ 2 of the fluorescence detector 14 for measuring the fluorescence wavelength intensity are those set in advance by examining the characteristics of each oil species. , But the excitation wavelength λ 1
Is suitable in the ultraviolet to visible region within the range of about 0.25 to 0.6 μm. Therefore, as the excitation light source 11, a mercury lamp, an argon laser, a He-Cd laser, a Y laser, etc.
Although an AG laser, an excimer laser, etc. are conceivable, it is desirable to select them in consideration of wavelength, oscillation output, size, price, etc.
【００３４】鋼板１からの反射光RBを集光する集光装置
12としてはレンズ以外に平面ミラー、放物面ミラーなど
が使用可能であり、許容寸法、集光効率などを考慮して
選定する。分光素子13としては、図２に示したように回
折格子が望ましいが、集光された光をビームスプリッタ
で分岐して分岐後の光を励起波長と蛍光波長それぞれの
波長のみを透過する光学フィルタを使用する方法でも測
定することができる。蛍光検出器14，励起波長検出器15
はそれぞれ測定光強度に応じた感度のものを用いる。ま
た、これらの検出器の設置スペースに制約がある場合
は、光ファイバ等を利用することも可能である。A condenser for condensing the reflected light RB from the steel plate 1.
As the lens 12, a flat mirror, a parabolic mirror, etc. can be used in addition to the lens, and it is selected in consideration of the allowable size and the light collection efficiency. As the spectroscopic element 13, a diffraction grating is desirable as shown in FIG. 2, but the condensed light is split by a beam splitter, and the split light is an optical filter that transmits only the excitation wavelength and the fluorescence wavelength. Can also be measured by the method using. Fluorescence detector 14, Excitation wavelength detector 15
For each, the one having the sensitivity corresponding to the measurement light intensity is used. Further, when the installation space for these detectors is limited, an optical fiber or the like can be used.
【００３５】また、演算処理回路８では、蛍光検出器1
4，励起波長検出器15，蛍光効率測定用蛍光検出器19か
らのアナログ信号をデジタル変換して、前出(11)式の演
算を行い塗油量算出を行う。このように処理された塗油
量測定値は上位計算機10に伝送されてロギンギングされ
る。なお、そのロギングの内容は、アナログ記録計やデ
ジタル表示装置などの出力装置に出力される。Further, in the arithmetic processing circuit 8, the fluorescence detector 1
4. The analog signals from the excitation wavelength detector 15 and the fluorescence efficiency measurement fluorescence detector 19 are converted into digital signals, and the calculation of the above formula (11) is performed to calculate the amount of oil coating. The oil coating amount measured value thus processed is transmitted to the host computer 10 and logged. The contents of the logging are output to an output device such as an analog recorder or a digital display device.
【００３６】以下に、このように構成された塗油量測定
装置による測定例を説明する。表面粗度がＡ，Ｂ，Ｃな
る冷延鋼板と、溶融亜鉛メッキ鋼板と亜鉛ニッケルメッ
キ鋼板の表面処理鋼板に、３種類の油ａ，ｂ，ｃを用い
て設定塗油量を０〜2200mg/m2 の範囲で変化させてオン
ラインで塗布した。そのときの本発明装置による蛍光強
度測定値と従来の重量測定法により測定した塗油量実測
値との関係を図３(a) ，(b) ，(c) に比較して示した。An example of measurement by the oil coating amount measuring device having such a configuration will be described below. A cold-rolled steel sheet with surface roughness of A, B, C, and surface-treated steel sheet of hot-dip galvanized steel sheet and zinc-nickel plated steel sheet, using three kinds of oils a, b, c, the set oil amount is 0 to 2200 mg. It was applied online while varying in the range of / m 2 . The relationship between the measured value of the fluorescence intensity by the apparatus of the present invention and the measured value of the amount of applied oil measured by the conventional gravimetric method at that time is shown in comparison with FIGS. 3 (a), 3 (b) and 3 (c).
【００３７】これらの図からわかるように、同一鋼板上
の塗油量の変化に対して塗油量実測値と蛍光強度には良
好な相関関係が得られているが、下地鋼板の表面状態の
違いおよび油種の違いにより特性の傾きが異なる結果が
得られた。このことは、蛍光強度から塗油量を算出する
ためには下地鋼板の表面状態および油種によって蛍光強
度を補正して、塗油量を算出する必要があることを示し
ている。As can be seen from these figures, there is a good correlation between the measured amount of oil applied and the fluorescence intensity with respect to changes in the amount of oil applied on the same steel plate. The results showed that the slope of the characteristics was different due to the difference and the oil type. This indicates that in order to calculate the amount of oil applied from the fluorescence intensity, it is necessary to correct the fluorescence intensity according to the surface condition of the base steel sheet and the type of oil, and calculate the amount of oil applied.
【００３８】本発明による蛍光強度と同時に測定した励
起波長強度と蛍光効率より前出(11)式および(12)式によ
り演算した塗油量測定値と重量測定法による塗油量実測
値との関係を図４に示した。本発明による塗油量の測定
値は、重量測定法による塗油量実測値とほぼ±10％の精
度でよく一致していることが確認できる。つぎに、本発
明装置の他の実施例について説明する。Based on the excitation wavelength intensity and the fluorescence efficiency measured at the same time as the fluorescence intensity according to the present invention, the measured oil coating amount calculated by the above equations (11) and (12) and the measured oil coating amount by the weight measurement method were used. The relationship is shown in FIG. It can be confirmed that the measured value of the amount of oil applied according to the present invention is in good agreement with the actual value of the amount of oil applied measured by the gravimetric method with an accuracy of approximately ± 10%. Next, another embodiment of the device of the present invention will be described.
【００３９】図５は、本発明装置に用いられる検出ヘッ
ド４の他の構成例を示したものであり、励起光を照射す
る手段として励起用光源11に反射ミラーを組み合わせた
ものである。すなわち、この図において、22は励起用光
源11から出力される波長λ1の励起光LBの光路に取付け
られて励起光LBを90°に反射して鋼板１の上面に垂直に
照射する手段の一つである反射ミラー、23は励起光LBを
チョッピングして外乱光の影響を除去するチョッパ、24
は45°の角度で傾斜配置され、中央部に励起光LBを通過
させる穴25を有する平面ミラーである。FIG. 5 shows another example of the structure of the detection head 4 used in the device of the present invention, in which a reflection mirror is combined with the excitation light source 11 as a means for irradiating the excitation light. That is, in this figure, 22 is a means for attaching to the optical path of the excitation light LB of the wavelength λ 1 output from the excitation light source 11, reflecting the excitation light LB at 90 ° and irradiating the upper surface of the steel plate 1 vertically. One is a reflection mirror, 23 is a chopper that chops the excitation light LB to remove the influence of ambient light, 24
Is a plane mirror that is tilted at an angle of 45 ° and that has a hole 25 in the center for passing the excitation light LB.
【００４０】また、26は中央部に励起光LBを通過させる
穴27を有し、鋼板１の表面から反射する油２からの蛍光
を含む反射光を投光軸と平行で投光軸を中心とする角度
で集光し、平行光とすることが可能な焦点距離をもつ第
１の集光レンズ、28はこの第１の集光レンズ26を固定す
る測定距離調整用のベースである。このベース28は、駆
動装置29によって第１の集光レンズ26から鋼板１までの
測定距離が常に一定になるように調整可能とされ、これ
によって最小限の数の光学系の位置制御により安定した
反射光量の測定が可能である。Further, 26 has a hole 27 for passing the excitation light LB in the central portion, and the reflected light containing the fluorescence from the oil 2 reflected from the surface of the steel plate 1 is parallel to the projection axis and is centered on the projection axis. A first condenser lens 28 having a focal length capable of converging light at an angle of, and making it a parallel light is a base for measuring distance adjustment for fixing the first condenser lens 26. The base 28 can be adjusted by a driving device 29 so that the measurement distance from the first condenser lens 26 to the steel plate 1 is always constant, and thereby stable by controlling the position of a minimum number of optical systems. It is possible to measure the amount of reflected light.
【００４１】さらに、30は平面ミラー24で反射された光
を集光する第２の集光レンズ、31はハーフミラーであ
る。このハーフミラー31で反射された反射光から波長λ
1 の励起波長強度は励起波長検出器15によって検出され
る。また、32は第２の集光レンズ30で集光された反射光
の中から波長λ2 の蛍光のみを選択して透過する光学フ
ィルタであり、この光学フィルタ32を透過した蛍光波長
強度は蛍光検出器14によって検出される。なお、光軸上
に取付けられたビームスリッタ17で分光された励起光LB
を光学フィルタ18、分光セル16に導いて、蛍光効率測定
用蛍光検出器19によって油２の蛍光効率を測定するよう
にしている。Further, 30 is a second condenser lens for condensing the light reflected by the plane mirror 24, and 31 is a half mirror. From the reflected light reflected by this half mirror 31, the wavelength λ
The excitation wavelength intensity of 1 is detected by the excitation wavelength detector 15. Reference numeral 32 denotes an optical filter that selects and transmits only the fluorescence of wavelength λ 2 from the reflected light condensed by the second condenser lens 30, and the fluorescence wavelength intensity transmitted through this optical filter 32 is fluorescence. It is detected by the detector 14. In addition, the excitation light LB dispersed by the beam slitter 17 mounted on the optical axis
Is guided to the optical filter 18 and the spectroscopic cell 16, and the fluorescence efficiency of the oil 2 is measured by the fluorescence efficiency measuring fluorescence detector 19.
【００４２】このように検出ヘッド４Ａを構成すること
によって、励起用光源11からの励起光LBを鋼板１の測定
対象面に対して垂直方向から照射し、鋼板１からの油２
の蛍光を含む反射光を第１の集光レンズ26で受光する。
これによって、鋼板１の振動による影響を最小限に抑え
ることが可能となる。ここで、この測定系が鋼板１の振
動の影響を受けにくい理由について説明すると、図６に
示すように、鋼板１が基準測定位置Ｌ0 に対して上下に
集光装置の焦点深度範囲±ΔＬだけ変動するものとす
る。そこで、鋼板１に対して45°で入射した励起光LB45
に対する集光範囲は励起光の光路と一致しなくなるのに
対し、鋼板１に対して垂直に入射する励起光LB90の場合
は、焦点深度２ΔＬに対してその集光光学系の集光範囲
は斜線で示す範囲をとるから、焦点深度範囲内で鋼板１
が振動しても、光学系の焦点深度から外れて測定される
蛍光強度に誤差が生じるという問題がない。By constructing the detection head 4A in this way, the excitation light LB from the excitation light source 11 is irradiated from the direction perpendicular to the surface to be measured of the steel sheet 1, and the oil 2 from the steel sheet 1 is irradiated.
The reflected light including the fluorescent light is received by the first condenser lens 26.
This makes it possible to minimize the influence of vibration of the steel sheet 1. Here, the reason why this measuring system is not easily affected by the vibration of the steel plate 1 will be explained. As shown in FIG. 6, the steel plate 1 is vertically above and below the reference measurement position L 0 , and the depth of focus range of the condenser is ± ΔL. Only fluctuates. Therefore, the excitation light LB 45 incident on the steel plate 1 at 45 °
However, in the case of the excitation light LB 90 which is perpendicularly incident on the steel plate 1, the collection range of the focusing optical system is 2 for the focal depth 2ΔL. Since the range shown by the diagonal lines is taken, the steel plate 1 is within the depth of focus range.
Does not cause a problem that an error occurs in the fluorescence intensity measured outside the depth of focus of the optical system.
【００４３】そして、蛍光検出器14で検出された蛍光波
長強度Ｉf （λ2)と励起波長検出器15で検出された励起
波長強度Ｉ（λ1)を用いて、演算処理装置８において前
出(11)式の演算を行い、塗油量を算出する。また、図７
は上記した検出ヘッド４Ａの別の構成例を示したもので
ある。すなわち、図５における平面ミラー24と第１の集
光レンズ26の代わりに、穴部34を有する第１の放物面ミ
ラー33および平面ミラー35がベース28に固定されて、駆
動装置29によって測定距離を調整可能とされる。また第
２の集光レンズ30の代わりに第２の放物面ミラー36が用
いられる。Then, the fluorescence wavelength intensity I f (λ 2 ) detected by the fluorescence detector 14 and the excitation wavelength intensity I (λ 1 ) detected by the excitation wavelength detector 15 are used in the arithmetic processing unit 8. The oil amount is calculated by calculating the equation (11). Also, FIG.
Shows another configuration example of the detection head 4A described above. That is, instead of the plane mirror 24 and the first condenser lens 26 in FIG. 5, a first parabolic mirror 33 having a hole 34 and a plane mirror 35 are fixed to a base 28 and measured by a driving device 29. The distance can be adjusted. A second parabolic mirror 36 is used instead of the second condenser lens 30.
【００４４】このように検出ヘッド４Ｂを構成すること
により、穴部34を通過した励起光LBは鋼板１の表面に対
して垂直方向に照射することができる。そして、鋼板１
表面の油２からの蛍光を含む反射光は第１の放物面ミラ
ー33によって垂直方向を中心とする角度で集光され、投
光軸と直角方向にかつ平行光で反射される。この反射光
はさらに平面ミラー35で直角に反射され、第２の放物面
ミラー36によって蛍光検出器14および励起波長検出器15
に導かれるから、図５の場合と同様に演算処理装置８に
おいて塗油量の演算ができる。By constructing the detection head 4B in this way, the excitation light LB that has passed through the hole 34 can be irradiated in the direction perpendicular to the surface of the steel sheet 1. And steel plate 1
The reflected light containing fluorescence from the oil 2 on the surface is condensed by the first parabolic mirror 33 at an angle centered on the vertical direction, and reflected in the direction perpendicular to the projection axis and in parallel light. The reflected light is further reflected at a right angle by the plane mirror 35, and the fluorescence detector 14 and the excitation wavelength detector 15 are reflected by the second parabolic mirror 36.
Therefore, the amount of oil can be calculated in the arithmetic processing unit 8 as in the case of FIG.
【００４５】さらに、図８は検出ヘッド４Ａの別の構成
例を示したものである。すなわち、この検出ヘッド４Ｃ
における前出図５に示した検出ヘッド４Ａとの相違点
は、照射する手段の一つである反射ミラー22なしで励起
光LBを直接鋼板１の表面に対して垂直方向に照射し得る
ように照射する手段である励起用光源11の位置を変更し
たものである。なお、光軸上に取付けられたビームスリ
ッタ17で分光された励起光LBを分光素子18、分光セル16
に導いて、蛍光効率測定用蛍光検出器19によって油２の
蛍光効率を測定するようにしている。Further, FIG. 8 shows another configuration example of the detection head 4A. That is, this detection head 4C
The difference from the detection head 4A shown in FIG. 5 is that the excitation light LB can be directly irradiated to the surface of the steel sheet 1 directly without the reflection mirror 22 which is one of the irradiation means. The position of the excitation light source 11 which is a means for irradiation is changed. In addition, the excitation light LB dispersed by the beam slitter 17 mounted on the optical axis is used to disperse the excitation light LB.
Then, the fluorescence efficiency of the oil 2 is measured by the fluorescence efficiency measuring fluorescence detector 19.
【００４６】図９は、図８に示した検出ヘッド４Ｃの変
形例を示したもので、反射光の検出に積分球を用いたも
のである。すなわち、37は鋼板１の表面上の油２からの
蛍光および励起光が油２を透過して下地である鋼板１の
表面から反射して散乱される反射光を空間的に積分して
受光するための積分光学装置である。この積分光学装置
37には、反射光中の蛍光および励起光が積分されて入射
するように、少なくとも２つの光検出用ポート38, 39が
取付けられている。そして、一方の光検出用ポート38に
は波長λ1 を含む狭帯域の波長のみを透過するバンドパ
スフィルタ40が取付けられ、もう一方の光検出用ポート
39にはλ1 の波長より長い波長λ3 からλ4 までの領域
の広い帯域で光を透過するバンドパスフィルタ41が取付
けられる。FIG. 9 shows a modification of the detection head 4C shown in FIG. 8, in which an integrating sphere is used to detect reflected light. That is, 37 receives the fluorescence and excitation light from the oil 2 on the surface of the steel plate 1 by spatially integrating the reflected light that is transmitted from the oil 2 and is reflected and scattered from the surface of the steel plate 1 as the base. It is an integrating optical device for. This integrating optics
At least two light detection ports 38 and 39 are attached to the 37 so that the fluorescence and the excitation light in the reflected light are integrated and incident. Then, a bandpass filter 40 that transmits only a narrow band wavelength including the wavelength λ 1 is attached to one photodetection port 38, and the other photodetection port
A bandpass filter 41 that transmits light in a wide band in a region from wavelengths λ 3 to λ 4 longer than the wavelength of λ 1 is attached to 39.
【００４７】ここで、波長λ1 としてたとえば313 nmの
波長を選択するとすれば、油２から発する蛍光はおよそ
350nm 以上であるので、たとえば波長λ3 として380nm
、波長λ4 として450nm を設定することが可能であ
る。あるいは波長λ4 としてとくに定めずに380nm 以上
の波長の光を透過するハイパスフィルタを使用すること
もできる。If a wavelength of 313 nm is selected as the wavelength λ 1 , the fluorescence emitted from the oil 2 is about
Since it is 350 nm or more, for example, the wavelength λ 3 is 380 nm.
It is possible to set 450 nm as the wavelength λ 4 . Alternatively, it is possible to use a high-pass filter that transmits light having a wavelength of 380 nm or more without specifically determining the wavelength λ 4 .
【００４８】このように検出ヘッド４Ｄを構成すること
により、励起用光源11（たとえばハロゲンランプ、キセ
ノンランプ、水銀ランプ等）から発光された光は、干渉
フィルタ42によって単一の波長λ1 のみが選択的に透過
されて積分光学装置37の頂部の穴43を介して鋼板１表面
の油２に照射される。そして、鋼板１の表面から反射し
て積分光学装置37内に散乱する反射光のうち、バンドパ
スフィルタ40を透過した狭帯域波長の強度は励起波長検
出器15によって検出され、バンドパスフィルタ41を透過
した広帯域波長の強度は蛍光検出器14によって検出され
る。By configuring the detection head 4D in this way, the light emitted from the excitation light source 11 (for example, a halogen lamp, a xenon lamp, a mercury lamp, etc.) has only a single wavelength λ 1 by the interference filter 42. The oil 2 on the surface of the steel plate 1 is radiated through the hole 43 at the top of the integrating optical device 37 selectively transmitted. Then, of the reflected light reflected from the surface of the steel plate 1 and scattered in the integrating optical device 37, the intensity of the narrow band wavelength transmitted through the band pass filter 40 is detected by the excitation wavelength detector 15, and the band pass filter 41 is detected. The intensity of the transmitted broadband wavelength is detected by the fluorescence detector 14.
【００４９】ついで、励起波長検出器15で検出された励
起波長強度Ｉ（λ1 ）と蛍光検出器14で検出された波長
λ3 からλ4 までの広範囲における蛍光波長強度Ｉ
f （λ3，λ4 ）とを用いて演算処理装置８において塗
油量ｄを下記(13)式で演算し、その結果を上位計算機10
に伝送し、さらに表示を行うようにする。 ｄ＝Ｉf （λ3 ，λ4)／〔Ｃ1 ・γ・Ｉ0 （λ1)・｛１＋Ｃ2 ・Ｉ（λ1)｝〕 ……………(13) ここで、Ｃ1 ，Ｃ2 は定数、γは（12) 式で表される蛍
光効率、Ｉ0 （λ1)は照射される励起光強度である。Next, the excitation wavelength intensity I (λ 1 ) detected by the excitation wavelength detector 15 and the fluorescence wavelength intensity I in the wide range from the wavelengths λ 3 to λ 4 detected by the fluorescence detector 14
f (λ 3 , λ 4 ) is used to calculate the oil amount d in the arithmetic processing unit 8 by the following equation (13), and the result is calculated by the host computer 10
To the device for further display. d = I f (λ 3 , λ 4 ) / [C 1 · γ · I 0 (λ 1 ) · {1 + C 2 · I (λ 1 )}] ………… (13) where C 1 , C 2 is a constant, γ is the fluorescence efficiency represented by the equation (12), and I 0 (λ 1 ) is the intensity of the excitation light to be irradiated.
【００５０】上記したように、油２からの蛍光強度Ｉf
（λ3 ，λ4)と鋼板１からの反射励起光強度Ｉ（λ1)と
油２の蛍光効率γを測定することにより、高精度にオン
ラインで塗油量を求めることができる。なお、上記実施
例においては、いずれの場合も蛍光効率をオンラインで
測定するとして説明したが、本発明はこれに限るもので
はなく、使用される油種ごとに予めオフラインで測定し
ておいた蛍光効率の値を用いるようにしても同等の作用
効果を得ることができる。As described above, the fluorescence intensity I f from the oil 2 is
By measuring (λ 3 , λ 4 ), the intensity I (λ 1 ) of the reflection excitation light from the steel plate 1 and the fluorescence efficiency γ of the oil 2, it is possible to accurately determine the amount of oil coating online. In each of the above examples, it was described that the fluorescence efficiency was measured online in any case, but the present invention is not limited to this, and fluorescence measured in advance offline for each oil type used. Even if the efficiency value is used, the same effect can be obtained.
【００５１】また、本発明によって測定された塗油量の
情報を塗油装置にフィードバックするようにすれば、よ
り一層安定な品質管理体制の実現を図ることができる。
さらに、上記実施例はいずれも、鉄鋼ラインにおいて走
行する鋼板表面の塗油量測定に適用されるとして説明し
たが、本発明における適用範囲はこれに限定されるもの
ではなく、アルミニウム板や銅箔などの各種非鉄分野へ
の応用も可能であることはいうまでもない。Further, by feeding back the information of the amount of applied oil measured by the present invention to the oil applying device, a more stable quality control system can be realized.
Furthermore, all of the above examples have been described as being applied to the measurement of the amount of oil coating on the surface of the steel plate running in the steel line, but the scope of application of the present invention is not limited to this, and aluminum plates and copper foils are also applicable. Needless to say, it can be applied to various non-ferrous fields such as.
【００５２】[0052]
【発明の効果】以上説明したように、本発明の方法によ
れば、測定対象である金属材料の表面に塗布された油の
量を単位面積当たりの塗油量が微量であっても十分な感
度で測定することが可能であり、下地金属材料の表面性
状の違いによる受光蛍光強度の変化を反射励起光強度変
化により補正することにより、下地金属材料の表面状態
が変化しても精度よく測定を行うことができる。これに
よって、要求通りの塗油ができるほか、塗りむらをなく
すことによる品質の安定化や目標通りの最少塗油量の実
現による経済的効果と装置が小型化できるというすぐれ
た効果を奏する。As described above, according to the method of the present invention, the amount of oil applied to the surface of the metal material to be measured is sufficient even if the amount of oil applied per unit area is very small. It is possible to measure with sensitivity, and even if the surface condition of the underlying metal material changes, it can be measured accurately by correcting the change in the received fluorescence intensity due to the difference in the surface properties of the underlying metal material with the change in the reflected excitation light intensity. It can be performed. As a result, in addition to the required oiling, there is an excellent effect that the quality is stabilized by eliminating unevenness of application, the economical amount is achieved by achieving the target minimum amount of oiling, and the device can be downsized.
【００５３】また、本発明によれば、測定対象である金
属材料表面に対して垂直方向から励起光を照射するよう
にするとともに、励起光と同軸から反射光を集光するよ
うにしたので、金属材料の振動による影響を最小限に抑
制して塗油量を測定することが可能である。さらに、本
発明による装置は対象が連続的走行する場合だけでな
く、静止している場合やあるいは小片のサンプルに対し
ても使用することができるので、簡易式に携帯してサン
プリング測定やオフラインでのバッチ的な検査にも使用
することができる。Further, according to the present invention, the excitation light is emitted from the direction perpendicular to the surface of the metal material to be measured, and the reflected light is condensed coaxially with the excitation light. It is possible to measure the amount of oil coating while minimizing the influence of vibration of the metal material. Furthermore, since the device according to the present invention can be used not only when the object runs continuously but also when the object is stationary or on a small sample, it is possible to carry it in a simple manner for sampling measurement or offline. It can also be used for batch inspection of
【図１】本発明に係る塗油量測定装置の全体構成を示す
正面図である。FIG. 1 is a front view showing an overall configuration of an oil application amount measuring device according to the present invention.
【図２】本発明に用いられる検出ヘッドの一実施例の構
成を示す模式図である。FIG. 2 is a schematic diagram showing a configuration of an embodiment of a detection head used in the present invention.
【図３】油種および下地金属材料の表面状態の違いによ
り蛍光強度が変わることを示す特性図で、(a) ，(b) ，
(c) は油種をそれぞれ変えたときの蛍光強度測定値と重
量測定法での塗油量実測値との関係を示したものであ
る。FIG. 3 is a characteristic diagram showing that the fluorescence intensity varies depending on the difference in the oil type and the surface condition of the underlying metal material, (a), (b),
(c) shows the relationship between the fluorescence intensity measurement value and the oil coating amount measurement value measured by the gravimetric method when the type of oil was changed.
【図４】本発明による塗油量測定値と重量測定法での塗
油量実測値との関係を示す特性図である。FIG. 4 is a characteristic diagram showing a relationship between a measured amount of oil applied according to the present invention and an actual measured amount of oil applied by a weight measurement method.
【図５】本発明に用いられる検出ヘッドの他の実施例の
構成を示す模式図である。FIG. 5 is a schematic view showing the configuration of another embodiment of the detection head used in the present invention.
【図６】図５に示した検出ヘッドの作用の説明図であ
る。FIG. 6 is an explanatory view of the operation of the detection head shown in FIG.
【図７】図５に示した検出ヘッドの他の実施例の構成を
示す模式図である。FIG. 7 is a schematic diagram showing the configuration of another embodiment of the detection head shown in FIG.
【図８】図５に示した検出ヘッドの他の実施例の構成を
示す模式図である。8 is a schematic diagram showing the configuration of another embodiment of the detection head shown in FIG.
【図９】図８に示した検出ヘッドの別の実施例の構成を
示す模式図である。9 is a schematic diagram showing the configuration of another embodiment of the detection head shown in FIG.
【図10】(a) , (b) は本発明の原理の説明図である。10A and 10B are explanatory views of the principle of the present invention.
１ 鋼板（金属材料） ２ 油 ４ 検出ヘッド ８ 演算処理装置 10 上位計算機 11 励起用光源（励起光を照射する手段） 12 集光装置 13 分光素子 14 蛍光検出器 15 励起波長検出器 16 分光セル 17 ビームスプリッタ（分光手段） 18，18′光学フィルタ 19 蛍光効率測定用蛍光検出器 20 ハウジング 22 反射ミラー（励起光を照射する手段） 23 チョッパ 24 平面ミラー 25，27, 34, 43 穴 26 第１の集光レンズ 28 ベース 29 駆動装置 30 第２の集光レンズ 31 ハーフミラー 32 光学フィルタ 33 第１の放物面ミラー 35 平面ミラー 36 第２の放物面ミラー 37 積分光学装置 38, 39 光検出用ポート 40，41 バンドパスフィルタ 42 干渉フィルタ LB 励起光 1 Steel Plate (Metallic Material) 2 Oil 4 Detection Head 8 Processor 10 High-level Computer 11 Excitation Light Source (Means for Irradiating Excitation Light) 12 Focusing Device 13 Spectroscopic Element 14 Fluorescence Detector 15 Excitation Wavelength Detector 16 Spectroscopic Cell 17 Beam splitter (spectroscopic means) 18, 18 'Optical filter 19 Fluorescence detector for fluorescence efficiency measurement 20 Housing 22 Reflecting mirror (means for irradiating excitation light) 23 Chopper 24 Plane mirror 25, 27, 34, 43 Hole 26 First Condensing lens 28 Base 29 Driving device 30 Second condensing lens 31 Half mirror 32 Optical filter 33 First parabolic mirror 35 Planar mirror 36 Second parabolic mirror 37 Integrating optical device 38, 39 For light detection Port 40, 41 Band pass filter 42 Interference filter LB pump light
───────────────────────────────────────────────────── フロントページの続き (72)発明者 守屋 進 千葉県千葉市中央区川崎町１番地 川崎製 鉄株式会社鉄鋼開発・生産本部鉄鋼研究所 内 (72)発明者 市川 文彦 千葉県千葉市中央区川崎町１番地 川崎製 鉄株式会社鉄鋼開発・生産本部鉄鋼研究所 内 (72)発明者 清野 芳一 千葉県千葉市中央区川崎町１番地 川崎製 鉄株式会社鉄鋼開発・生産本部千葉製鉄所 内 (72)発明者 馬場 幸裕 千葉県千葉市中央区川崎町１番地 川崎製 鉄株式会社鉄鋼開発・生産本部千葉製鉄所 内 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Susumu Moriya 1 Kawasaki-cho, Chuo-ku, Chiba-shi, Chiba Kawasaki Steel Corporation Steel Research & Development Division Steel Research Laboratory (72) Inventor Fumihiko Ichikawa, Chiba-shi, Chiba Kawasaki-cho, Kawasaki Steel Co., Ltd. Steel Research and Development Division Steel Research Laboratory (72) Inventor Yoshikazu Seino 1 Kawasaki-cho, Chuo-ku, Chiba City, Chiba Prefecture Kawasaki Steel Co., Ltd. Steel Development and Chiba Works (72) Inventor Yukihiro Baba 1 Kawasaki-cho, Chuo-ku, Chiba-shi, Chiba Kawasaki Steel Co., Ltd. Steel Development & Production Division Chiba Steel Works
Claims (10)
長の励起光を照射し、その照射によって生じる蛍光を含
む反射光のスペクトル分布から金属材料表面の油の塗布
量を測定する方法において、金属材料表面からの蛍光を
含む反射光を集光し、集光された光のうち励起波長成分
と蛍光波長成分に分光し、該分光された励起波長成分と
蛍光波長成分から励起波長強度と蛍光波長強度とをそれ
ぞれ測定し、予め測定された油の蛍光効率と前記した励
起波長強度および蛍光波長強度とから塗油量を算出する
ことを特徴とする金属材料表面の塗油量測定方法。1. A method for irradiating an oil-coated metal material surface with excitation light of a specific wavelength, and measuring the amount of oil coated on the metal material surface from the spectral distribution of reflected light including fluorescence generated by the irradiation, The reflected light including the fluorescence from the surface of the metal material is condensed, and the condensed light is separated into the excitation wavelength component and the fluorescence wavelength component, and the excitation wavelength intensity and the fluorescence are extracted from the separated excitation wavelength component and the fluorescence wavelength component. A method for measuring the amount of oil coating on the surface of a metal material, characterized in that the wavelength intensity is measured, and the amount of oil coating is calculated from the fluorescence efficiency of the oil measured in advance and the above-mentioned excitation wavelength intensity and fluorescence wavelength intensity.
長の励起光を照射し、その照射によって生じる蛍光を含
む反射光のスペクトル分布から金属材料表面の油の塗布
量を測定する方法において、金属材料表面からの蛍光を
含む反射光を集光し、集光された光のうち励起波長成分
と蛍光波長成分に分光し、該分光された励起波長成分と
蛍光波長成分から励起波長強度と蛍光波長強度とをそれ
ぞれ測定し、かつ油の蛍光効率を測定し、該蛍光効率と
前記した励起波長強度および蛍光波長強度とから塗油量
を算出することを特徴とする金属材料表面の塗油量測定
方法。2. A method for irradiating an oil-coated metal material surface with excitation light of a specific wavelength and measuring the amount of oil coated on the metal material surface from the spectral distribution of reflected light including fluorescence generated by the irradiation, The reflected light including the fluorescence from the surface of the metal material is condensed, and the condensed light is separated into the excitation wavelength component and the fluorescence wavelength component, and the excitation wavelength intensity and the fluorescence are extracted from the separated excitation wavelength component and the fluorescence wavelength component. Each wavelength intensity is measured, and the fluorescence efficiency of the oil is measured, and the amount of oil is calculated from the fluorescence efficiency and the excitation wavelength intensity and the fluorescence wavelength intensity described above. Measuring method.
象面に対して、垂直な投光軸で特定波長の励起光を照射
し、蛍光を含む反射光を前記投光軸と同軸方向から集光
することを特徴とする請求項１または２記載の金属材料
表面の塗油量測定方法。3. A surface to be measured, which is a surface of a metallic material coated with oil, is irradiated with excitation light of a specific wavelength on a vertical projection axis, and reflected light containing fluorescence is emitted from a direction coaxial with the projection axis. The method for measuring the amount of oil coating on the surface of a metal material according to claim 1 or 2, wherein light is collected.
長の励起光を照射する手段と、金属材料表面からの蛍光
を含む反射光を集光する集光装置と、集光された光のう
ち励起波長成分と蛍光波長成分に分光する分光素子と、
前記励起波長成分と蛍光波長成分から励起波長強度と蛍
光波長強度とをそれぞれ測定する励起波長検出器および
蛍光検出器と、予め測定された油の蛍光効率と前記した
各検出器からの測定値を用いて塗油量を算出する演算処
理回路と、を備えてなることを特徴とする金属材料表面
の塗油量測定装置。4. A means for irradiating an oil-coated metal material surface with excitation light of a specific wavelength, a condenser for condensing reflected light containing fluorescence from the metal material surface, and a means for converging the condensed light. Of these, a spectroscopic element that disperses into excitation wavelength components and fluorescence wavelength components,
Excitation wavelength detector and fluorescence detector to measure the excitation wavelength intensity and fluorescence wavelength intensity from the excitation wavelength component and the fluorescence wavelength component, respectively, the fluorescence efficiency of the oil measured in advance and the measurement value from each of the detectors described above. An arithmetic processing circuit for calculating the amount of applied oil using the same, and a device for measuring the amount of applied oil on the surface of a metal material.
長の励起光を照射する手段と、金属材料表面からの蛍光
を含む反射光を集光する集光装置と、集光された光のう
ち励起波長成分と蛍光波長成分に分光する分光素子と、
前記励起波長成分と蛍光波長成分から励起波長強度と蛍
光波長強度とをそれぞれ測定する励起波長検出器および
蛍光検出器と、塗油機で塗油する前の油が満たされた分
光セルに前記光源から分岐された光束を透過させる分光
手段と、前記分光セル内の蛍光強度を分光素子を介して
測定する蛍光効率測定用蛍光検出器と、前記した各検出
器からの測定値を用いて塗油量を算出する演算処理回路
と、を備えてなることを特徴とする金属材料表面の塗油
量測定装置。5. A means for irradiating an oil-coated metal material surface with excitation light of a specific wavelength, a condenser for condensing reflected light containing fluorescence from the metal material surface, and a means for converging the condensed light. Of these, a spectroscopic element that disperses into excitation wavelength components and fluorescence wavelength components,
An excitation wavelength detector and a fluorescence detector for measuring the excitation wavelength intensity and the fluorescence wavelength intensity from the excitation wavelength component and the fluorescence wavelength component, respectively, and the light source in a spectroscopic cell filled with oil before being oiled by an oiling machine. Spectroscopic means for transmitting the light flux branched from the, a fluorescence efficiency measurement fluorescence detector for measuring the fluorescence intensity in the spectroscopic cell through a spectroscopic element, and oil coating using the measured values from each of the detectors An arithmetic processing circuit for calculating the amount, and a device for measuring the amount of oil coating on the surface of a metal material, comprising:
励起光が金属材料表面に対して垂直な投光軸となるよう
に配置し、かつ金属材料表面からの蛍光を含む反射光を
集光する集光装置を、前記投光軸と同軸方向から集光す
るように配置したことを特徴とする請求項４または５記
載の金属材料表面の塗油量測定装置。6. A means for irradiating excitation light of a specific wavelength,
A condenser for arranging the excitation light so as to have a projection axis perpendicular to the surface of the metal material and collecting reflected light including fluorescence from the surface of the metal material in a direction coaxial with the projection axis. The apparatus for measuring the amount of oil applied to the surface of a metal material according to claim 4 or 5, wherein the device is arranged so as to illuminate.
されて励起光を通過させる穴を有するとともに金属材料
表面からの蛍光を含む反射光を集光して平行光とする第
１の集光レンズと、励起光の投光軸上に配置されて前記
第１の集光レンズからの平行光を前記投光軸に対して直
角の方向に反射するとともに励起光を通過させる穴を有
する平面ミラーと、該平面ミラーで反射された平行光を
集光して前記分光素子を介して前記励起波長検出器と蛍
光検出器に導く第２の集光レンズと、によって構成され
ることを特徴とする請求項６記載の金属材料表面の塗油
量測定装置。7. The condensing device has a hole arranged on the projection axis of the excitation light for passing the excitation light, and condenses reflected light containing fluorescence from the surface of the metal material into parallel light. No. 1 condenser lens and a hole arranged on the projection axis of the excitation light to reflect the parallel light from the first condenser lens in a direction perpendicular to the projection axis and allow the excitation light to pass therethrough. And a second condenser lens that condenses parallel light reflected by the plane mirror and guides the parallel light to the excitation wavelength detector and the fluorescence detector via the spectroscopic element. The apparatus for measuring the amount of oil coating on the surface of a metal material according to claim 6.
されて励起光を通過させる穴を有するとともに集光した
金属材料表面からの蛍光を含む反射光を投光軸に対して
直角な方向に平行光として反射する第１の放物面ミラー
と、該第１の放物面ミラーにより反射された平行光を投
光軸と平行な方向に反射する平面ミラーと、該平面ミラ
ーで反射された平行光を集光して前記分光素子を介して
前記励起波長検出器と蛍光検出器に導く第２の放物面ミ
ラーと、によって構成されることを特徴とする請求項６
記載の金属材料表面の塗油量測定装置。8. The condensing device has a hole arranged on the projection axis of the excitation light to allow the excitation light to pass therethrough, and collects reflected light containing fluorescence from the surface of the collected metal material with respect to the projection axis. A first parabolic mirror that reflects parallel light in a perpendicular direction, a plane mirror that reflects the parallel light reflected by the first parabolic mirror in a direction parallel to the projection axis, and the plane mirror 7. A second parabolic mirror that collects the parallel light reflected by the laser beam and guides it to the excitation wavelength detector and the fluorescence detector via the spectroscopic element.
A device for measuring the amount of oil coating on the surface of a metal material as described above.
を含む反射光を入光する穴と、励起光を通過させる穴
と、分光素子を介して前記励起波長検出器と蛍光検出器
に導く穴を有する蛍光を含む反射光を集光する積分光学
装置であることを特徴とする請求項６記載の金属材料表
面の塗油量測定装置。9. The condensing device includes a hole for receiving reflected light containing fluorescence from the surface of the metal material, a hole for passing excitation light, and the excitation wavelength detector and the fluorescence detector via a spectroscopic element. 7. An apparatus for measuring the amount of oil coating on the surface of a metal material according to claim 6, which is an integrating optical device that collects reflected light containing fluorescence having a hole for guiding.
けて、駆動装置によって測定対象面に対して垂直方向に
移動可能とすることを特徴とする請求項６、７、８また
は９記載の金属材料表面の塗油量測定装置。10. The condensing device is attached to a measurement distance adjusting base, and is movable in a direction perpendicular to a surface to be measured by a driving device, according to claim 6, 7, 8 or 9. A device for measuring the amount of oil applied to the surface of metal materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17852894A JP2915294B2 (en) | 1993-10-27 | 1994-07-29 | Method and apparatus for measuring oil coating amount on metal material surface |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26874293 | 1993-10-27 | ||
| JP6-1808 | 1994-01-13 | ||
| JP5-268742 | 1994-01-13 | ||
| JP180894 | 1994-01-13 | ||
| JP17852894A JP2915294B2 (en) | 1993-10-27 | 1994-07-29 | Method and apparatus for measuring oil coating amount on metal material surface |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07243970A true JPH07243970A (en) | 1995-09-19 |
| JP2915294B2 JP2915294B2 (en) | 1999-07-05 |
Family
ID=27275084
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17852894A Expired - Fee Related JP2915294B2 (en) | 1993-10-27 | 1994-07-29 | Method and apparatus for measuring oil coating amount on metal material surface |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2915294B2 (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11287758A (en) * | 1998-04-01 | 1999-10-19 | Kawasaki Steel Corp | Method for forming calibration curve for use in measurement of applied oil amount |
| JP2002148191A (en) * | 2000-11-08 | 2002-05-22 | Dowa Mining Co Ltd | Semiconductor characteristic evaluation method and apparatus |
| KR100502829B1 (en) * | 2000-12-28 | 2005-07-20 | 주식회사 포스코 | Oilling apparatus of steel strip in sector |
| JP2006518454A (en) * | 2003-02-10 | 2006-08-10 | カーベーアー−ジオリ ソシエテ アノニム | Detection device |
| JP2007515645A (en) * | 2003-12-23 | 2007-06-14 | プリシセンス エイ／エス | Fluorescence measuring instrument |
| JP2009541713A (en) * | 2006-06-17 | 2009-11-26 | エス・エム・エス・ジーマーク・アクチエンゲゼルシャフト | Method and apparatus for analyzing a layer of auxiliary substances on a molded article |
| JP2010164409A (en) * | 2009-01-15 | 2010-07-29 | Mitsubishi Electric Corp | Method and instrument for measuring spray distribution |
| CN104076019A (en) * | 2014-07-22 | 2014-10-01 | 中国海洋石油总公司 | Method by adopting three-dimensional quantificational fluorescence measurement parameter to judge oil type |
-
1994
- 1994-07-29 JP JP17852894A patent/JP2915294B2/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11287758A (en) * | 1998-04-01 | 1999-10-19 | Kawasaki Steel Corp | Method for forming calibration curve for use in measurement of applied oil amount |
| JP2002148191A (en) * | 2000-11-08 | 2002-05-22 | Dowa Mining Co Ltd | Semiconductor characteristic evaluation method and apparatus |
| KR100502829B1 (en) * | 2000-12-28 | 2005-07-20 | 주식회사 포스코 | Oilling apparatus of steel strip in sector |
| JP2006518454A (en) * | 2003-02-10 | 2006-08-10 | カーベーアー−ジオリ ソシエテ アノニム | Detection device |
| JP2007515645A (en) * | 2003-12-23 | 2007-06-14 | プリシセンス エイ／エス | Fluorescence measuring instrument |
| US7869042B2 (en) | 2003-12-23 | 2011-01-11 | Precisense A/S | Fluorometers |
| JP4771545B2 (en) * | 2003-12-23 | 2011-09-14 | プリシセンス エイ／エス | Fluorescence measuring instrument |
| US8305580B2 (en) | 2003-12-23 | 2012-11-06 | Precisense A/S | Fluorometers |
| JP2009541713A (en) * | 2006-06-17 | 2009-11-26 | エス・エム・エス・ジーマーク・アクチエンゲゼルシャフト | Method and apparatus for analyzing a layer of auxiliary substances on a molded article |
| US8141401B2 (en) | 2006-06-17 | 2012-03-27 | Sms Demag Aktiengesellschaft | Method and apparatus for analyzing a layer of metal-working liquid |
| JP2010164409A (en) * | 2009-01-15 | 2010-07-29 | Mitsubishi Electric Corp | Method and instrument for measuring spray distribution |
| CN104076019A (en) * | 2014-07-22 | 2014-10-01 | 中国海洋石油总公司 | Method by adopting three-dimensional quantificational fluorescence measurement parameter to judge oil type |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2915294B2 (en) | 1999-07-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105044139B (en) | With the XRF system of multiple excitation energy bands in the packaging of altitude calibration | |
| US6529273B1 (en) | Monitoring oil films | |
| JPH0915156A (en) | Spectroscopic measuring method and measuring device | |
| NL8802920A (en) | COATING THICKNESS GAUGE. | |
| JP2915294B2 (en) | Method and apparatus for measuring oil coating amount on metal material surface | |
| US5281819A (en) | Apparatus for nondestructively determining coating thickness on a metal object and associated method | |
| JPH0690014B2 (en) | How to measure the amount of oil applied to the surface of steel sheet | |
| JPS59168345A (en) | Spectroscopic analysis method | |
| US6687015B1 (en) | Method and device for measuring the thickness of a layer | |
| US6856395B2 (en) | Reflectometer arrangement and method for determining the reflectance of selected measurement locations of measurement objects reflecting in a spectrally dependent manner | |
| US6738136B2 (en) | Accurate small-spot spectrometry instrument | |
| KR100328926B1 (en) | Method for measuring degree of on-line plating of plated steel sheet using laser | |
| JP2011196766A (en) | Method for measuring shape of measured object having light transmittance | |
| JP2943215B2 (en) | Method and apparatus for measuring the amount of deposited rust-preventive oil | |
| KR101220796B1 (en) | Apparatus for measuring oxide layer thickness of plated steel | |
| JPH0418763B2 (en) | ||
| KR100456204B1 (en) | Measuring apparatus and method of oil film thickness for coil strip | |
| JPH03264850A (en) | Method and apparatus for measuring amount of applied oil on steel plate surface | |
| JP3331169B2 (en) | Measurement method of oil amount on steel sheet surface | |
| US6804007B2 (en) | Apparatus for multiplexing two surface plasma resonance channels onto a single linear scanned array | |
| KR100299453B1 (en) | Method of measuring surface cleanness of steel plate | |
| EP4206656A1 (en) | Method for enhancing a raman contribution in a spectrum, spectroscopy system and non-transitory computer-readable storage medium | |
| JPH09210908A (en) | Method and device for measuring coated oil quantity on the surface of metal material | |
| JP2895816B2 (en) | ICP emission spectrometer | |
| KR0158569B1 (en) | Method for manufacturing thickness of oil on steel stripe |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080416 Year of fee payment: 9 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090416 Year of fee payment: 10 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100416 Year of fee payment: 11 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100416 Year of fee payment: 11 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110416 Year of fee payment: 12 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110416 Year of fee payment: 12 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120416 Year of fee payment: 13 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130416 Year of fee payment: 14 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130416 Year of fee payment: 14 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140416 Year of fee payment: 15 |
|
| LAPS | Cancellation because of no payment of annual fees |