JPH07241598A - Water treatment apparatus - Google Patents
Water treatment apparatusInfo
- Publication number
- JPH07241598A JPH07241598A JP6034976A JP3497694A JPH07241598A JP H07241598 A JPH07241598 A JP H07241598A JP 6034976 A JP6034976 A JP 6034976A JP 3497694 A JP3497694 A JP 3497694A JP H07241598 A JPH07241598 A JP H07241598A
- Authority
- JP
- Japan
- Prior art keywords
- water
- ozone
- hydrogen peroxide
- ultraviolet irradiation
- treated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、水中の有機物を除去す
る水処理装置に係り、特に純水・超純水製造に好適な水
処理装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a water treatment apparatus for removing organic substances in water, and more particularly to a water treatment apparatus suitable for producing pure water / ultra pure water.
【０００２】[0002]
【従来の技術】近年、半導体製造においては、洗浄工程
で著しく純度の高い純水・超純水が必要とされ、この純
水・超純水を製造するために多くの研究がなされてい
る。2. Description of the Related Art In recent years, in semiconductor manufacturing, pure water / ultra pure water of extremely high purity is required in a cleaning process, and many studies have been conducted to manufacture the pure water / ultra pure water.
【０００３】純水・超純水の原料水として一般に市水ま
たは井水が使用されるが、このような原料水には腐敗し
た動植物や微生物に起因する有機物が含まれており、こ
の有機物をほぼ完全に除去しなければならない。また、
半導体製造の洗浄工程では、アルコール等の有機系洗浄
剤を含む廃水が大量に発生しているが、廃棄物発生量を
低減する上でもこの廃水再生利用が望まれている。City water or well water is generally used as the raw material water for pure water and ultrapure water. Such raw material water contains organic substances derived from spoiled plants and animals and microorganisms. It should be removed almost completely. Also,
In the semiconductor manufacturing cleaning process, a large amount of waste water containing an organic cleaning agent such as alcohol is generated, and it is desired to reuse this waste water in order to reduce the amount of waste generated.
【０００４】このような市水および再生水から純水を製
造するにあたっては、通常凝集ろ過、逆浸透膜処理、イ
オン交換処理、限外ろ過膜処理などを組み合わせて用い
ているが、これらの方法によっても有機物は完全には除
去することはできないため、この微量に残存する有機物
濃度を減少させるために、従来は、被処理水に紫外線を
照射して、水中の有機物を有機酸に酸化分解し、生成さ
れた有機酸を後段のイオン交換樹脂塔で除去するという
方法をとっていた。In producing pure water from such city water and recycled water, coagulation filtration, reverse osmosis membrane treatment, ion exchange treatment, ultrafiltration membrane treatment and the like are usually used in combination. However, since organic substances cannot be completely removed, in order to reduce the concentration of the trace amount of organic substances, conventionally, the water to be treated is irradiated with ultraviolet rays to oxidize and decompose the organic substances in water into organic acids, The produced organic acid was removed by the ion-exchange resin tower in the subsequent stage.
【０００５】[0005]
【発明が解決しようとする課題】有機物を効率よく除去
するには、有機物の一部の結合を解離して（例えばカル
ボキシル基に酸化して）有機物を有機酸にし、後段のイ
オン交換樹脂塔で吸着除去可能にすることが好ましい。In order to efficiently remove the organic matter, some bonds of the organic matter are dissociated (for example, oxidized to a carboxyl group) to turn the organic matter into an organic acid, and the ion exchange resin tower in the subsequent stage is used. It is preferable that adsorption and removal be possible.
【０００６】しかしながら、紫外線照射のみによって有
機物を完全に分解するには、多量の電力消費量が必要に
なり、処理コストが高くつくという問題がある。However, there is a problem that a large amount of power consumption is required to completely decompose the organic matter by only the irradiation of ultraviolet rays, resulting in a high processing cost.
【０００７】この紫外線照射にあたって有機物を効率よ
く適度に酸化するために、従来法では、酸化助剤として
過酸化水素水を添加する試みもなされているが、必要以
上の濃度を添加しなければならず、余剰の過酸化水素を
除去するための処理が負担となっていた。[0007] In order to efficiently and appropriately oxidize organic substances upon irradiation with ultraviolet rays, attempts have been made to add hydrogen peroxide solution as an oxidation aid in the conventional method, but it is necessary to add more than necessary concentration. However, the processing for removing the excess hydrogen peroxide was a burden.
【０００８】本発明は、このような従来の問題点を解消
すべくなされたもので、紫外線照射により有機物を酸化
分解するにあたって、効率よく有機酸に分解して電力消
費量および処理コストを低減することのできる水処理装
置を提供することを目的とする。The present invention has been made to solve the above-mentioned conventional problems, and when oxidatively decomposing an organic substance by irradiation of ultraviolet rays, it is efficiently decomposed into an organic acid to reduce power consumption and processing cost. It is an object of the present invention to provide a water treatment device that can be used.
【０００９】[0009]
【課題を解決するための手段】すなわち、本発明の水処
理装置は、被処理水にオゾンを添加するオゾン添加装置
と、オゾンを添加された被処理水に紫外線を照射し水中
の有機物を分解する紫外線照射装置とを備えたことを特
徴とする。[Means for Solving the Problems] That is, the water treatment apparatus of the present invention comprises an ozone addition device for adding ozone to the water to be treated and ultraviolet rays to the water to be treated to which ozone has been added to decompose organic substances in the water. And an ultraviolet irradiating device for controlling the irradiation.
【００１０】また本発明の水処理装置は、被処理水にオ
ゾンを添加するオゾン添加装置と、オゾンを添加された
被処理水に紫外線を照射し水中の有機物を分解する紫外
線照射装置と、この紫外線照射装置によって処理された
処理水を導入し水中の過酸化水素および不純物を活性炭
または触媒で除去する過酸化水素除去装置を備えたこと
を特徴とする。The water treatment apparatus of the present invention further comprises an ozone addition apparatus for adding ozone to the water to be treated, an ultraviolet irradiation apparatus for irradiating the treated water to which ozone has been added with ultraviolet rays, and decomposing organic substances in the water. It is characterized in that it is provided with a hydrogen peroxide removing device for introducing the treated water treated by the ultraviolet irradiation device and removing hydrogen peroxide and impurities in the water with activated carbon or a catalyst.
【００１１】また本発明の水処理装置は、被処理水にオ
ゾンを添加するオゾン添加装置と、オゾンを添加された
被処理水に紫外線を照射し水中の有機物を分解する紫外
線照射装置と、この紫外線照射装置によって処理された
処理水を導入し水中の過酸化水素および不純物を活性炭
または触媒で除去する過酸化水素除去装置と、この過酸
化水素除去装置を経た処理水を導入し水中のイオンを除
去するイオン交換装置とを備えたことを特徴とする。The water treatment apparatus of the present invention further comprises an ozone adding apparatus for adding ozone to the water to be treated, an ultraviolet ray irradiating apparatus for irradiating the treated water to which ozone has been added with ultraviolet rays, and decomposing organic substances in the water. A hydrogen peroxide removal device that introduces the treated water treated by the ultraviolet irradiation device to remove hydrogen peroxide and impurities in the water with activated carbon or a catalyst, and the treated water that has passed through this hydrogen peroxide removal device is introduced to remove the ions in the water. And an ion exchange device for removal.
【００１２】また本発明の水処理装置は、被処理水にオ
ゾンを添加するオゾン添加装置と、オゾンを添加された
被処理水に紫外線を照射し水中の有機物を分解する紫外
線照射装置と、この紫外線照射装置によって処理された
処理水を導入し水中の過酸化水素および不純物を活性炭
または触媒で除去する過酸化水素除去装置と、この過酸
化水素除去装置を経た処理水を導入し水中のイオンを除
去するイオン交換装置とからなる水処理系を複数直列に
連設したことを特徴とする。The water treatment apparatus of the present invention further comprises an ozone adding apparatus for adding ozone to the water to be treated, an ultraviolet ray irradiating apparatus for irradiating the water to be treated with ozone with ultraviolet rays to decompose organic substances in the water, and A hydrogen peroxide removal device that introduces the treated water treated by the ultraviolet irradiation device to remove hydrogen peroxide and impurities in the water with activated carbon or a catalyst, and the treated water that has passed through this hydrogen peroxide removal device is introduced to remove the ions in the water. It is characterized in that a plurality of water treatment systems including an ion exchange device for removal are connected in series.
【００１３】また本発明の水処理装置は、被処理水にオ
ゾンを添加するオゾン添加装置と、オゾンを添加された
被処理水に紫外線を照射し水中の有機物を分解する第１
の紫外線照射装置と、この紫外線照射装置によって処理
された処理水を導入し水中の過酸化水素および不純物を
活性炭または触媒で除去する過酸化水素除去装置と、こ
の過酸化水素除去装置を経た処理水を導入し水中のイオ
ンを除去する第１のイオン交換装置と、このイオン交換
装置を経た処理水を導入し紫外線を照射する第２の紫外
線照射装置と、この第２の紫外線照射装置を経た処理水
を導入し水中のイオンを除去する第２のイオン交換装置
とを備えたことを特徴とする。The water treatment apparatus of the present invention further comprises an ozone addition apparatus for adding ozone to the water to be treated and a first ozone treatment apparatus for irradiating the water to be treated with ozone with ultraviolet rays to decompose organic substances in the water.
Ultraviolet irradiation device, a hydrogen peroxide removal device that introduces the treated water treated by this ultraviolet irradiation device to remove hydrogen peroxide and impurities in the water with activated carbon or a catalyst, and the treated water that has passed through this hydrogen peroxide removal device First ion exchange device for introducing ions to remove ions in water, a second ultraviolet irradiation device for introducing treated water that has passed through the ion exchange device and irradiating ultraviolet rays, and a process for performing the second ultraviolet irradiation device A second ion exchange device for introducing water to remove ions in the water is provided.
【００１４】上記水処理装置において、紫外線照射装置
は、310 nm以下の波長の紫外線を発生する低圧または中
圧水銀ランプを用いることが好ましい。特に前段にオゾ
ン添加装置を設けていない紫外線照射装置は、185 nmの
波長の紫外線を発生するものが好ましい。In the above water treatment device, it is preferable that the ultraviolet irradiation device uses a low-pressure or medium-pressure mercury lamp that emits ultraviolet light having a wavelength of 310 nm or less. In particular, the ultraviolet irradiation device which is not provided with the ozone addition device in the preceding stage is preferably one which generates ultraviolet light having a wavelength of 185 nm.
【００１５】また、上記水処理装置において、イオン交
換装置には、アニオン交換樹脂を充填したアニオン交換
装置またはアニオン交換樹脂とカチオン交換樹脂との混
床からなるアニオン・カチオン混床式交換装置が用いら
れる。Further, in the above water treatment apparatus, an anion exchange apparatus filled with an anion exchange resin or an anion / cation mixed bed type exchange apparatus comprising a mixed bed of anion exchange resin and cation exchange resin is used as the ion exchange apparatus. To be
【００１６】また、上記水処理装置において、オゾン添
加装置に用いられるオゾンガスは、無声放電法、電解
法、光化学反応法、高周波電解法などのいずれの生成方
法によっても好ましく用いられる。In the water treatment device, the ozone gas used in the ozone addition device is preferably used by any of the production methods such as the silent discharge method, the electrolysis method, the photochemical reaction method and the high frequency electrolysis method.
【００１７】[0017]
【作用】各種の酸化剤のポテンシャルに着目した場合、[Function] When focusing on the potential of various oxidants,
【化１】 となり、・ＯＨ（以下ヒドロラジカルという）の酸化力
が最も強いことが分かる。したがって、有機物を効率よ
く酸化するためには、ヒドロラジカルをいかに効率よく
生成するかが重要である。[Chemical 1] Therefore, it can be seen that • OH (hereinafter referred to as hydroradical) has the strongest oxidizing power. Therefore, in order to efficiently oxidize organic substances, it is important to efficiently generate hydroradicals.
【００１８】従来は、過酸化水素に400 nm以上の波長の
紫外線を照射して次式のごとく、Conventionally, hydrogen peroxide is irradiated with ultraviolet rays having a wavelength of 400 nm or more as shown in the following equation:
【化２】 ヒドロラジカルを生成するか、あるいは水に波長185 nm
の紫外線を照射してヒドロラジカルを生成する方法がと
られていた。[Chemical 2] Produces hydroradicals or produces water with a wavelength of 185 nm
The method of irradiating the ultraviolet ray of the above and generating a hydro radical was taken.
【００１９】本発明においては、オゾン添加装置により
被処理水にオゾンを添加し、ついで紫外線照射装置によ
り紫外線を照射することにより、水中のオゾン（Ｏ3 ）
は励起酸素分子に分解され、励起酸素分子は直ちに水と
反応してヒドロラジカルを生成する。この生成されたヒ
ドロラジカルによって被処理水中の有機物は有機酸に酸
化分解される。特に、中・低圧水銀ランプで例えば波長
310 nm以下の紫外線を発生させることにより、効率よく
ヒドロラジカルを生成することができ、低コストで有機
物分解処理を行うことができる。In the present invention, ozone in the water (O 3 ) is added by adding ozone to the water to be treated by the ozone addition device and then irradiating it with ultraviolet rays by the ultraviolet irradiation device.
Is decomposed into excited oxygen molecules, and the excited oxygen molecules immediately react with water to generate hydroradicals. Organic substances in the water to be treated are oxidatively decomposed into organic acids by the generated hydroradicals. Especially for medium and low pressure mercury lamps, for example
By generating ultraviolet rays having a wavelength of 310 nm or less, hydroradicals can be efficiently generated, and organic substance decomposition treatment can be performed at low cost.
【００２０】また、紫外線照射装置を経た処理水のオゾ
ン添加に伴って若干残存していた過酸化水素は、次の過
酸化水素除去装置で活性炭または触媒により分解され除
去される。ついで過酸化水素を除去された処理水は、イ
オン交換装置に通水され、紫外線照射装置によって分解
生成された有機酸が効率よく吸着除去される。Further, the hydrogen peroxide that has remained a little with the addition of ozone to the treated water that has passed through the ultraviolet irradiation device is decomposed and removed by activated carbon or a catalyst in the next hydrogen peroxide removal device. Next, the treated water from which hydrogen peroxide has been removed is passed through an ion exchange device, and the organic acid decomposed and produced by the ultraviolet irradiation device is efficiently adsorbed and removed.
【００２１】このようにして、被処理水中の有機物はオ
ゾンの添加のもとに紫外線照射することにより効率よく
酸化分解され、さらにイオン交換樹脂の吸着能を著しく
低下させる過酸化水素は過酸化水素除去装置で前もって
除去されるため、水中の有機物濃度を有効に減少させる
ことができる。In this way, the organic matter in the water to be treated is efficiently oxidatively decomposed by irradiating it with ultraviolet rays under the addition of ozone, and hydrogen peroxide which significantly reduces the adsorption capacity of the ion exchange resin is hydrogen peroxide. Since it is removed in advance by the removal device, the concentration of organic substances in water can be effectively reduced.
【００２２】さらにこのような水処理系を連続して設け
ることにより、さらに水の純度を高めることができる。Further, by continuously providing such a water treatment system, the purity of water can be further increased.
【００２３】また、上記の水処理系の後段に紫外線照射
装置とイオン交換装置のみ付加しても同様な効果を上げ
ることができる。この場合には、後段の紫外線照射装置
は、有機物分解能の高い波長（185 nm）を有する紫外線
を発生するものが好ましい。The same effect can be obtained by adding only the ultraviolet irradiation device and the ion exchange device to the latter stage of the above water treatment system. In this case, it is preferable that the latter ultraviolet irradiation device emits ultraviolet light having a wavelength (185 nm) with high organic matter resolving power.
【００２４】[0024]
【実施例】以下、図面に基づいて本発明の実施例を説明
する。Embodiments of the present invention will be described below with reference to the drawings.
【００２５】図１は、本発明の水処理装置の一実施例を
示すもので、原水１に、オゾン添加装置２によりオゾン
が添加され、紫外線照射装置３により導かれる。ここで
紫外線により原水１中の有機物が有機酸に酸化分解され
る。ついで活性炭または触媒を充填された過酸化水素除
去装置４によりオゾン添加による水中の過酸化水素が分
解されて除去され、アニオンまたはアニオン・カチオン
混床式イオン交換装置５により、水中の有機酸が吸着さ
れ除去される。FIG. 1 shows an embodiment of the water treatment apparatus of the present invention, in which ozone is added to raw water 1 by an ozone addition device 2 and guided by an ultraviolet irradiation device 3. Here, the organic matter in the raw water 1 is oxidatively decomposed into organic acids by the ultraviolet rays. Then, the hydrogen peroxide removal device 4 filled with activated carbon or a catalyst decomposes and removes the hydrogen peroxide in the water by adding ozone, and the anion or anion / cation mixed bed type ion exchange device 5 adsorbs the organic acid in the water. And removed.
【００２６】図２は、本発明の水処理装置の他の実施例
を示し、図１の構成の処理系の後に同じ構成の処理系を
接続したものである。後段の処理系の前段と共通する部
分には′つきの同一番号を付している。FIG. 2 shows another embodiment of the water treatment apparatus of the present invention, in which the treatment system having the same constitution is connected after the treatment system having the constitution shown in FIG. The same parts as those in the former stage of the latter stage processing system are designated by the same reference numerals.
【００２７】図３は、本発明の水処理装置のさらに他の
実施例を示し、図１の装置構成の後に、紫外線照射装置
３″およびイオン交換装置５″が設置されている。FIG. 3 shows still another embodiment of the water treatment apparatus of the present invention, in which an ultraviolet irradiation apparatus 3 ″ and an ion exchange apparatus 5 ″ are installed after the apparatus configuration of FIG.
【００２８】（実施例１）比抵抗17ＭΩ、ＴＯＣ160ppb
の原水を、図１に示す構成の水処理装置により、紫外線
照射量0.3kWh／ｍ3 、オゾン添加量１ppm の条件で処理
した。(Embodiment 1) Specific resistance 17 MΩ, TOC 160 ppb
The raw water of No. 1 was treated with a water treatment device having the configuration shown in FIG. 1 under the conditions of an ultraviolet irradiation amount of 0.3 kWh / m 3 and an ozone addition amount of 1 ppm.
【００２９】ここで、各装置の仕様は次の通りである。 オゾン添加装置２：電解発生式のオゾン発生器（ペルメ
レック社製「ＭＳ−２−Ｇ」 過酸化水素除去装置４：純水洗浄した活性炭（カルゴン
社製「コルベース Ｆ−４００」）を充填 イオン交換装置５：強塩基性アニオン交換樹脂（三菱化
成社製「ダイヤイオンＳＡ−１０Ａ」）を充填 各処理後の流出水の水質を表１に示す。なお、表１にお
いて下段はオゾンを添加しないで同様の処理を行った場
合の結果を比較して示すものである。Here, the specifications of each device are as follows. Ozone addition device 2: Electrolytic generation type ozone generator (Permerek's "MS-2-G" hydrogen peroxide removal device 4: Pure water washed activated carbon (Calgon's "Colbase F-400") is filled Ion exchange Device 5: Filling with strongly basic anion exchange resin (“DIAION SA-10A” manufactured by Mitsubishi Kasei Co., Ltd.) The water quality of the effluent water after each treatment is shown in Table 1. In Table 1, ozone is not added to the lower part of Table 1. The results obtained when the same processing is performed are compared and shown.
【００３０】[0030]
【表１】 この結果からも明らかなように、本実施例によればＴＯ
Ｃの分解率は格段に向上する。[Table 1] As is clear from this result, according to this embodiment, the TO
The decomposition rate of C is remarkably improved.
【００３１】（実施例２）実施例１と同じ装置を用い、
オゾン添加量を変化させて紫外線照射後のＴＯＣの分解
率を測定した。その結果を図４に示す。Example 2 Using the same apparatus as in Example 1,
The decomposition rate of TOC after ultraviolet irradiation was measured by changing the amount of ozone added. The result is shown in FIG.
【００３２】この時の処理条件によれば、オゾン濃度は
1.0ppmが最適であった。しかし、この最適オゾン濃度は
ＴＯＣの成分や濃度に依存すると予測される。According to the processing conditions at this time, the ozone concentration is
1.0ppm was the optimum. However, this optimum ozone concentration is predicted to depend on the TOC component and concentration.
【００３３】実施例１の原水にイソプロピルアルコール
（ＩＰＡ）をＴＯＣとして10ppm を添加し、この被処理
水を、実施例１と同じ仕様の装置を用いて、図１、図２
および図３の装置構成でそれぞれ処理した。図１、図２
および図３の装置構成における最終処理水中のＴＯＣの
濃度を表２に示す。なお、表２の最下欄は、図１の紫外
線照射装置３におけるの紫外線照射量を２倍にした時の
結果である。1 and 2 were obtained by adding 10 ppm of isopropyl alcohol (IPA) as the TOC to the raw water of Example 1 and using the same treated water as that of Example 1.
And the apparatus configuration shown in FIG. 1 and 2
Table 2 shows the concentration of TOC in the final treated water in the apparatus configuration of FIG. The bottom column of Table 2 shows the results when the ultraviolet irradiation amount in the ultraviolet irradiation device 3 in FIG. 1 is doubled.
【００３４】[0034]
【表２】 （実施例４）実施例３において、原水中のＩＰＡ添加量
を１ppm とし、それぞれ行った処理結果を表３に示す。[Table 2] (Example 4) In Example 3, the amount of IPA added to the raw water was 1 ppm, and the results of the respective treatments are shown in Table 3.
【００３５】[0035]
【表３】 実施例３および実施例４の処理結果からも明らかなよう
に、ＩＰＡのような比較的難分解性の物が混入した場
合、合計消費電力を同一とすると、図１の処理装置のよ
うに単段にするよりも、図２および図３のように複数段
構成とする方がより効果がある。また、ＴＯＣ濃度が高
い（10 ppm）場合、図２の構成が図３の構成よりも効果
があり、ＴＯＣ濃度が低い（１ppm ）場合には、図２の
構成も図３の構成もほとんど分解率に差がなく、そのた
めコスト的に図３の構成の方が有利である。[Table 3] As is clear from the processing results of Example 3 and Example 4, when a relatively difficult-to-decompose substance such as IPA is mixed, assuming that the total power consumption is the same, a single unit like the processing apparatus of FIG. It is more effective to have a plurality of stages as shown in FIGS. 2 and 3 than to have stages. When the TOC concentration is high (10 ppm), the configuration of FIG. 2 is more effective than the configuration of FIG. 3, and when the TOC concentration is low (1 ppm), the configuration of FIG. 2 and the configuration of FIG. 3 are almost decomposed. There is no difference in the rates, and therefore the configuration of FIG. 3 is more advantageous in terms of cost.
【００３６】[0036]
【発明の効果】上記したように、本発明によれば、紫外
線を照射する前にオゾンを添加することにより、有機物
分解除去処理に要する消費電力量を少なくして効率よく
水中の有機物を分解し除去することができる。もって、
有機物分解除去処理コストを有効に低減することができ
る。As described above, according to the present invention, by adding ozone before irradiating with ultraviolet rays, the power consumption required for the organic substance decomposition and removal treatment is reduced and the organic substances in water are efficiently decomposed. Can be removed. So,
It is possible to effectively reduce the cost of organic substance decomposition and removal treatment.
【図１】本発明の一実施例の水処理装置を示す模式図で
ある。FIG. 1 is a schematic diagram showing a water treatment device according to an embodiment of the present invention.
【図２】本発明の他の実施例の水処理装置を示す模式図
である。FIG. 2 is a schematic diagram showing a water treatment device according to another embodiment of the present invention.
【図３】本発明のさらに他の実施例の水処理装置を示す
模式図である。FIG. 3 is a schematic view showing a water treatment device according to still another embodiment of the present invention.
【図４】本発明におけるオゾン添加量によるＴＯＣの分
解率の変化を示すグラフである。FIG. 4 is a graph showing changes in the decomposition rate of TOC according to the amount of ozone added in the present invention.
１………原水 ２、２′………オゾン添加装置 ３、３′、３″………紫外線照射装置 ４、４′………過酸化水素除去装置 ５、５′、５″………イオン交換装置 1 ......... Raw water 2, 2 '... Ozone addition device 3, 3', 3 "... UV irradiation device 4, 4 '... Hydrogen peroxide removal device 5, 5', 5" .... Ion exchange device
─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成６年１２月２７日[Submission date] December 27, 1994
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００１７[Correction target item name] 0017
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【００１７】[0017]
【作用】各種の酸化剤のポテンシャルに着目した場合、[Function] When focusing on the potential of various oxidants,
【化１】 となり、・ＯＨ（以下ヒドロキシラジカルという）の酸
化力が最も強いことが分かる。したがって、有機物を効
率よく酸化するためには、ヒドロキシラジカルをいかに
効率よく生成するかが重要である。[Chemical 1] Therefore, it can be seen that • OH (hereinafter referred to as hydroxy radical ) has the strongest oxidizing power. Therefore, in order to efficiently oxidize organic substances, it is important to efficiently generate hydroxy radicals .
【手続補正２】[Procedure Amendment 2]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００１８[Correction target item name] 0018
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【００１８】従来は、過酸化水素に４００ｎｍ以上の波
長の紫外線を照射して次式のごとく、Conventionally, hydrogen peroxide is irradiated with ultraviolet rays having a wavelength of 400 nm or more as shown in the following equation:
【化２】 ヒドロキシラジカルを生成するか、あるいは水に波長１
８５ｎｍの紫外線を照射してヒドロキシラジカルを生成
する方法がとられていた。[Chemical 2] Produces hydroxy radicals , or has wavelength 1 in water
A method of irradiating 85 nm ultraviolet rays to generate hydroxy radicals has been used.
【手続補正３】[Procedure 3]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００１９[Correction target item name] 0019
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【００１９】本発明においては、オゾン添加装置により
被処理水にオゾンを添加し、ついで紫外線照射装置によ
り紫外線を照射することにより、水中のオゾン（Ｏ３）
は励起酸素分子に分解され、励起酸素分子は直ちに水と
反応してヒドロキシラジカルを生成する。この生成され
たヒドロキシラジカルによって被処理水中の有機物は有
機酸に酸化分解される。特に、中・低圧水銀ランプで例
えば波長３１０ｎｍ以下の紫外線を発生させることによ
り、効率よくヒドロキシラジカルを生成することがで
き、低コストで有機物分解処理を行うことができる。In the present invention, ozone (O 3 ) in water is obtained by adding ozone to the water to be treated by the ozone adding device and then irradiating it with ultraviolet rays by the ultraviolet irradiation device.
Is decomposed into excited oxygen molecules, and the excited oxygen molecules immediately react with water to generate hydroxy radicals . Organic substances in the water to be treated are oxidatively decomposed into organic acids by the generated hydroxyl radicals . In particular, by generating ultraviolet rays having a wavelength of 310 nm or less with a medium / low pressure mercury lamp, hydroxy radicals can be efficiently generated, and the organic substance decomposition treatment can be performed at low cost.
【手続補正４】[Procedure amendment 4]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００２６[Correction target item name] 0026
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【００２６】図２は、本発明の水処理装置の他の実施例
を示し、図１の構成の処理系の後に同じ構成の処理系を
接続したものである。後段の処理系の前段と共通する部
分には、′（ダッシュ）つきの同一番号を付している。FIG. 2 shows another embodiment of the water treatment apparatus of the present invention, in which the treatment system having the same constitution is connected after the treatment system having the constitution shown in FIG. The parts common to the former stage of the latter stage processing system are designated by the same numbers with ‘(dash) .
【手続補正５】[Procedure Amendment 5]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００２９[Name of item to be corrected] 0029
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【００２９】ここで、各装置の仕様は次の通りである。 オゾン添加装置２：電解発生式のオゾン発生器（ペルメ
レック社製「ＭＳ−２−Ｇ」 過酸化水素除去装置４：純水洗浄した活性炭（カルゴン
社製「コールベース Ｆ−４００」）を充填 イオン交換装置５：強塩基性アニオン交換樹脂（三菱化
成社製「ダイヤイオンＳＡ−１０Ａ」）を充填 各処理後の流出水の水質を表１に示す。なお、表１にお
いて下段はオゾンを添加しないで同様の処理を行った場
合の結果を比較して示すものである。Here, the specifications of each device are as follows. Ozone adding device 2: Electrolytic generation type ozone generator ("MS-2-G" manufactured by Permelek Co., Ltd.) Hydrogen peroxide removal device 4: Filled with activated carbon washed with pure water (" Call Base F-400" manufactured by Calgon Co., Ltd.) Exchanger 5: Filled with a strongly basic anion exchange resin (“DIAION SA-10A” manufactured by Mitsubishi Kasei Co., Ltd.) The water quality of the effluent after each treatment is shown in Table 1. In Table 1, ozone is not added to the lower stage. The results obtained when the same process is performed are compared and shown.
【手続補正６】[Procedure correction 6]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００３０[Name of item to be corrected] 0030
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【００３０】[0030]
【表１】 この結果からも明らかなように、本実施例によればＴＯ
Ｃの分解率は格段に向上する。[Table 1] As is clear from this result, according to this embodiment, the TO
The decomposition rate of C is remarkably improved.
【手続補正７】[Procedure Amendment 7]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００３５[Correction target item name] 0035
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【００３５】[0035]
【表３】 実施例３および実施例４の処理結果からも明らかなよう
に、ＩＰＡのような比較的難分解性の物が混入した場
合、合計消費電力を同一とすると、図１の処理装置のよ
うに単段にするよりも、図２および図３のように複数段
構成とする方がより効果がある。また、ＴＯＣ濃度が比
較的高い（１０ｐｐｍ）場合、図２の構成が図３の構成
よりも効果があり、ＴＯＣ濃度が比較的低い（１ｐｐ
ｍ）場合には、図２の構成も図３の構成もほとんど分解
率に差がなく、そのためコスト的に図３の構成の方が有
利である。[Table 3] As is clear from the processing results of Example 3 and Example 4, when a relatively difficult-to-decompose substance such as IPA is mixed, assuming that the total power consumption is the same, a single unit like the processing apparatus of FIG. It is more effective to have a plurality of stages as shown in FIGS. 2 and 3 than to have stages. In addition, TOC concentration ratio
At a relatively high level (10 ppm), the configuration of FIG. 2 is more effective than the configuration of FIG. 3, and the TOC concentration is relatively low (1 pp).
In the case of m), there is almost no difference in the decomposition rate between the configuration of FIG. 2 and the configuration of FIG. 3, and therefore the configuration of FIG. 3 is more advantageous in terms of cost.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｃ０２Ｆ 1/32 1/42 Ａ 1/58 Ｈ 1/72 １０１ 1/78 ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Office reference number FI technical display location C02F 1/32 1/42 A 1/58 H 1/72 101 1/78
Claims (7)
装置と、オゾンを添加された被処理水に紫外線を照射し
水中の有機物を分解する紫外線照射装置とを備えたこと
を特徴とする水処理装置。1. Water comprising an ozone addition device for adding ozone to treated water and an ultraviolet irradiation device for irradiating the treated water to which ozone has been added with ultraviolet rays to decompose organic substances in the water. Processing equipment.
記紫外線照射装置によって処理された処理水を導入し、
水中の過酸化水素および不純物を活性炭または触媒で除
去する過酸化水素除去装置をさらに備えたことを特徴と
する水処理装置。2. The water treatment device according to claim 1, wherein treated water treated by the ultraviolet irradiation device is introduced,
A water treatment device further comprising a hydrogen peroxide removal device for removing hydrogen peroxide and impurities in water with activated carbon or a catalyst.
記過酸化水素除去装置を経た処理水を導入し、水中のイ
オンを除去するイオン交換装置をさらに備えたことを特
徴とする水処理装置。3. The water treatment device according to claim 2, further comprising an ion exchange device that introduces the treated water that has passed through the hydrogen peroxide removal device and removes the ions in the water. .
装置と、オゾンを添加された被処理水に紫外線を照射し
水中の有機物を分解する紫外線照射装置と、この紫外線
照射装置によって処理された処理水を導入し水中の過酸
化水素および不純物を活性炭または触媒で除去する過酸
化水素除去装置と、この過酸化水素除去装置を経た処理
水を導入し水中のイオンを除去するイオン交換装置とか
らなる水処理系を複数直列に連設したことを特徴とする
水処理装置。4. An ozone addition device for adding ozone to treated water, an ultraviolet irradiation device for irradiating the treated water added with ozone with ultraviolet rays to decompose organic substances in the water, and an ultraviolet irradiation device for treatment. From a hydrogen peroxide removal device that introduces treated water to remove hydrogen peroxide and impurities in water with activated carbon or a catalyst, and an ion exchange device that introduces treated water that has passed through this hydrogen peroxide removal device to remove ions in the water A water treatment device comprising a plurality of water treatment systems connected in series.
装置と、オゾンを添加された被処理水に紫外線を照射し
水中の有機物を分解する第１の紫外線照射装置と、この
紫外線照射装置によって処理された処理水を導入し水中
の過酸化水素および不純物を活性炭または触媒で除去す
る過酸化水素除去装置と、この過酸化水素除去装置を経
た処理水を導入し水中のイオンを除去する第１のイオン
交換装置と、このイオン交換装置を経た処理水を導入し
紫外線を照射する第２の紫外線照射装置と、この第２の
紫外線照射装置を経た処理水を導入し水中のイオンを除
去する第２のイオン交換装置とを備えたことを特徴とす
る水処理装置。5. An ozone addition device for adding ozone to treated water, a first ultraviolet irradiation device for irradiating the treated water added with ozone with ultraviolet rays to decompose organic matters in the water, and the ultraviolet irradiation device. A hydrogen peroxide removing device that introduces treated treated water to remove hydrogen peroxide and impurities in water with activated carbon or a catalyst, and treated water that has passed through this hydrogen peroxide removing device to remove ions in water Ion exchange device, a second ultraviolet irradiation device that introduces the treated water that has passed through the ion exchange device and irradiates ultraviolet rays, and a second ultraviolet irradiation device that introduces the treated water that has passed through the second ultraviolet irradiation device to remove ions in the water 2. A water treatment device comprising: an ion exchange device of 2.
装置において、紫外線照射装置は、低圧または中圧水銀
ランプを用いることを特徴とする水処理装置。6. The water treatment apparatus according to claim 1, wherein the ultraviolet irradiation device uses a low-pressure or medium-pressure mercury lamp.
装置において、イオン交換装置は、アニオン交換装置ま
たはアニオン・カチオン混床式交換装置であることを特
徴とする水処理装置。7. The water treatment apparatus according to any one of claims 1 to 6, wherein the ion exchange apparatus is an anion exchange apparatus or an anion / cation mixed bed type exchange apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP03497694A JP3560631B2 (en) | 1994-03-04 | 1994-03-04 | Water treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP03497694A JP3560631B2 (en) | 1994-03-04 | 1994-03-04 | Water treatment equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07241598A true JPH07241598A (en) | 1995-09-19 |
| JP3560631B2 JP3560631B2 (en) | 2004-09-02 |
Family
ID=12429181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP03497694A Expired - Lifetime JP3560631B2 (en) | 1994-03-04 | 1994-03-04 | Water treatment equipment |
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| Country | Link |
|---|---|
| JP (1) | JP3560631B2 (en) |
Cited By (7)
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|---|---|---|---|---|
| JP2004181369A (en) * | 2002-12-03 | 2004-07-02 | Nomura Micro Sci Co Ltd | Ultrapure water making apparatus |
| JP2006239617A (en) * | 2005-03-04 | 2006-09-14 | Kurita Water Ind Ltd | Water treatment method and water treatment apparatus |
| JP2006289283A (en) * | 2005-04-12 | 2006-10-26 | Nippon Rensui Co Ltd | Apparatus for treating waste water, apparatus and system for recovering waste water form rinser and method for treating waste water |
| KR101010279B1 (en) * | 2009-01-30 | 2011-01-25 | (주)에스비아이 환경 | agriculture water |
| JP2018089587A (en) * | 2016-12-05 | 2018-06-14 | 栗田工業株式会社 | Apparatus for producing ultrapure water and method for operating the same |
| WO2021261144A1 (en) * | 2020-06-23 | 2021-12-30 | オルガノ株式会社 | Water treatment apparatus, ultrapure water production apparatus, and water treatment method |
| WO2023047732A1 (en) * | 2021-09-22 | 2023-03-30 | 栗田工業株式会社 | Method for treating raw water for producing purified water |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004181369A (en) * | 2002-12-03 | 2004-07-02 | Nomura Micro Sci Co Ltd | Ultrapure water making apparatus |
| JP2006239617A (en) * | 2005-03-04 | 2006-09-14 | Kurita Water Ind Ltd | Water treatment method and water treatment apparatus |
| JP2006289283A (en) * | 2005-04-12 | 2006-10-26 | Nippon Rensui Co Ltd | Apparatus for treating waste water, apparatus and system for recovering waste water form rinser and method for treating waste water |
| KR101010279B1 (en) * | 2009-01-30 | 2011-01-25 | (주)에스비아이 환경 | agriculture water |
| JP2018089587A (en) * | 2016-12-05 | 2018-06-14 | 栗田工業株式会社 | Apparatus for producing ultrapure water and method for operating the same |
| CN110049952A (en) * | 2016-12-05 | 2019-07-23 | 栗田工业株式会社 | The method of operation of Ultrapure Water Purifiers and Ultrapure Water Purifiers |
| WO2021261144A1 (en) * | 2020-06-23 | 2021-12-30 | オルガノ株式会社 | Water treatment apparatus, ultrapure water production apparatus, and water treatment method |
| JP7012196B1 (en) * | 2020-06-23 | 2022-01-27 | オルガノ株式会社 | Water treatment equipment, ultrapure water production equipment, water treatment method and regenerative ion exchange tower |
| JP2022036290A (en) * | 2020-06-23 | 2022-03-04 | オルガノ株式会社 | Water treatment device, pure water production device, ultrapure water production device, and water treatment method |
| WO2023047732A1 (en) * | 2021-09-22 | 2023-03-30 | 栗田工業株式会社 | Method for treating raw water for producing purified water |
| JP2023045790A (en) * | 2021-09-22 | 2023-04-03 | 栗田工業株式会社 | Treatment method of raw water for purified water production |
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| JP3560631B2 (en) | 2004-09-02 |
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