JPH07237965A - Ceramics guide member and production thereof - Google Patents
Ceramics guide member and production thereofInfo
- Publication number
- JPH07237965A JPH07237965A JP6029870A JP2987094A JPH07237965A JP H07237965 A JPH07237965 A JP H07237965A JP 6029870 A JP6029870 A JP 6029870A JP 2987094 A JP2987094 A JP 2987094A JP H07237965 A JPH07237965 A JP H07237965A
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- Japan
- Prior art keywords
- guide member
- oxide
- less
- weight
- al2o3
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、例えば繊維機械用摺動
部材、釣具用の糸道、あるいは磁気テープガイドなどと
して使用するセラミックス製ガイド部材に関するもので
ある。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic guide member used as, for example, a sliding member for a textile machine, a yarn path for fishing tackle, or a magnetic tape guide.
【０００２】[0002]
【従来技術】従来のガイド部材は、硬質クロムメッキを
施した炭素鋼で作られたものが多くみられた。しかしな
がら、その様なガイドは硬度が低く、硬質物質との接触
によりメッキが剥がれ、極めて著しい摩耗を生じたり、
錆等の腐食の問題があった。その結果、寿命が短いだけ
でなく、ガイド部材の摩耗のため繊維や釣糸にダメージ
を与えるという不都合があった。2. Description of the Related Art Many conventional guide members are made of hard chrome-plated carbon steel. However, such a guide has a low hardness, and when it comes into contact with a hard substance, the plating is peeled off, causing extremely remarkable wear,
There was a problem of corrosion such as rust. As a result, not only the service life is short, but also the fibers and the fishing line are damaged due to the abrasion of the guide member.
【０００３】そこで、近年ではアルミナ、ジルコニア、
炭化珪素等のセラミックス製のガイド部材が用いられて
いる。これらのセラミックスは耐摩耗性、耐食性に優れ
るため、錆びる心配がなく長期間良好に使用することが
できる。例えば、特公昭６３−４１５３２号公報には高
強度の部分安定化ジルコニアセラミックスを釣糸ガイド
に用いることが示されている。Therefore, in recent years, alumina, zirconia,
A guide member made of ceramics such as silicon carbide is used. Since these ceramics have excellent wear resistance and corrosion resistance, they can be used satisfactorily for a long time without worrying about rusting. For example, Japanese Examined Patent Publication No. 63-41532 discloses that high-strength partially stabilized zirconia ceramics are used for a fishing line guide.
【０００４】[0004]
【発明が解決しようとする課題】しかし、従来のアルミ
ナセラミックス製ガイド部材は、主成分であるＡｌ2 Ｏ
3 に焼結助剤としてＳｉＯ2 、ＭｇＯ、ＣａＯ等を添加
したものであり、強度が３０〜４０ｋｇ／ｍｍ2 程度と
やや低かった。そのため、例えば釣具用糸道として用い
た場合、割れや欠けが生じやすい等の問題点があった。However, the conventional alumina ceramic guide member has a main component of Al 2 O.
SiO 2, MgO 3 as a sintering aid, is obtained by addition of CaO or the like, the strength was slightly low as 30-40 kg / mm 2 approximately. Therefore, when it is used as a fishing line, for example, there is a problem that cracks and chips easily occur.
【０００５】またジルコニアセラミックスの場合は、硬
度がやや低く、砂や潤滑剤等に含まれるシリカ（Ｓｉ
Ｏ，ＳｉＯ2 ）等と同程度であるため、案内面にキズが
生じやすく糸にダメージを与えてしまう恐れがあった。In the case of zirconia ceramics, the hardness is rather low and silica (Si
Since it is almost the same as that of O, SiO 2 ), etc., the guide surface is likely to be scratched, which may damage the yarn.
【０００６】さらに、炭化ケイ素セラミックスでは化学
的安定性に欠けるため、表面層からシリカ等に異種変化
するトライボケミカル的影響の作用で摩耗が比較的大き
かった。Furthermore, since silicon carbide ceramics lacks chemical stability, wear is relatively large due to the effect of a tribochemical effect that changes from the surface layer to silica or the like.
【０００７】以上の様に、従来のセラミックス製ガイド
部材は全ての条件を満足するものではなかった。そこで
本発明は、以上の問題を解決し、極めて高い耐摩耗性を
有する耐久性に優れたセラミックス製ガイド部材を提供
することにある。As described above, the conventional ceramic guide member does not satisfy all the conditions. Therefore, the present invention is to solve the above problems and provide a ceramic guide member having extremely high wear resistance and excellent durability.
【０００８】[0008]
【課題を解決するための手段】本発明者は、上記の問題
点について検討を重ねた結果、Ｔｉ，Ｖ，Ｃｒから選ば
れる少なくとも一種の金属の酸化物を０．０５〜０．８
重量％と、不純物０．１％以下と、残部がＡｌ2 Ｏ3 か
ら成り、平均結晶粒子径が５μｍ以下の焼結体によりセ
ラミックス製ガイド部材を構成すれば良いことを見出し
た。As a result of repeated studies on the above problems, the present inventor has found that 0.05 to 0.8 of an oxide of at least one metal selected from Ti, V and Cr is selected.
It has been found that the ceramic guide member may be composed of a sintered body having a weight percentage, impurities of 0.1% or less, and the balance of Al 2 O 3 and having an average crystal grain diameter of 5 μm or less.
【０００９】つまり、本発明のセラミックス製ガイド部
材は、Ａｌ2 Ｏ3 を主成分とするが、Ｔｉ，Ｖ，Ｃｒか
ら選ばれる少なくとも一種の金属の酸化物を０．０５〜
０．８重量％含有させ、かつこれら以外の不純物の含有
量を０．１重量％以下とすることにより、強度、耐摩耗
性を高め、かつ低摩擦特性とできるのである。That is, the ceramic guide member of the present invention contains Al 2 O 3 as a main component, but contains at least one metal oxide selected from Ti, V and Cr in an amount of 0.05 to 0.05.
By containing 0.8% by weight and the content of impurities other than these in 0.1% by weight or less, strength and wear resistance can be enhanced and low friction characteristics can be obtained.
【００１０】。[0010]
【００１１】つまりα型のＡｌ2 Ｏ3 と同型の結晶構造
（Ｍ2 Ｏ3 型）をもつＴｉ，Ｖ，Ｃｒの酸化物を微量添
加すれば、これらの酸化物はＡｌ2 Ｏ3 分子と容易に固
溶置換反応し、粒子間結合距離を短縮変形させて結合力
を著しく強化することができ、その結果極めて高い耐摩
耗性、及び高い強度を得ることができるのである。ま
た、上記酸化物を添加することにより表面粒子形状が特
殊な凹凸面となり、これにより低摩擦特性が得られる。That is, if a small amount of oxides of Ti, V and Cr having the same crystal structure (M 2 O 3 type) as α type Al 2 O 3 is added, these oxides become Al 2 O 3 molecules. The solid solution substitution reaction can be easily performed, the bond distance between particles can be shortened and deformed, and the bond strength can be remarkably strengthened, and as a result, extremely high wear resistance and high strength can be obtained. Further, by adding the above oxide, the surface particle shape becomes a special uneven surface, whereby low friction characteristics are obtained.
【００１２】このような効果を奏するためには、Ｔｉ，
Ｖ，Ｃｒの酸化物を単独または複合して添加すれば良
く、その合計量を０．０５〜０．８重量％とすれば良
い。これは０．０５重量％よりも少ないと、上記のよう
な耐摩耗性、強度を高める効果に乏しく、一方０．８重
量％よりも多いと逆に強度、耐摩耗性が低下するためで
ある。なお、Ｔｉ，Ｖ，Ｃｒの酸化物のうち特にＣｒの
酸化物を用いた場合が最も上記の効果が大きかった。To obtain such an effect, Ti,
The oxides of V and Cr may be added individually or in combination, and the total amount may be 0.05 to 0.8% by weight. This is because if it is less than 0.05% by weight, the effect of enhancing the wear resistance and strength as described above is poor, and if it is more than 0.8% by weight, the strength and wear resistance are decreased. . The above effect was greatest when the oxide of Cr was used among the oxides of Ti, V, and Cr.
【００１３】また、本発明では上記Ｔｉ，Ｖ，Ｃｒの酸
化物とＡｌ2 Ｏ3 以外の不純物を０．１重量％以下と極
めて少なくした点が重要である。つまり通常のアルミナ
セラミックスには焼結助剤として含まれているＳｉ
Ｏ2 、ＭｇＯ等の成分や、Ｎａ、Ｋ等のアルカリ成分等
の合計を０．１重量％以下と微量にすることによって、
焼結体の強度、耐摩耗性を高くできるのである。Further, in the present invention, it is important that the oxides of Ti, V, Cr and impurities other than Al 2 O 3 are extremely reduced to 0.1% by weight or less. That is, Si which is contained as a sintering aid in ordinary alumina ceramics.
By making the total amount of components such as O 2 and MgO and alkali components such as Na and K to be 0.1% by weight or less,
The strength and wear resistance of the sintered body can be increased.
【００１４】さらに、本発明のセラミックス製ガイド部
材は、焼結体の平均結晶粒子径を５μｍ以下とすること
によって、強度、耐摩耗性を高くできる。Further, in the ceramic guide member of the present invention, the strength and wear resistance can be increased by setting the average crystal grain size of the sintered body to 5 μm or less.
【００１５】次に、本発明のセラミックス製ガイド部材
の製造方法を説明する。Next, a method of manufacturing the ceramic guide member of the present invention will be described.
【００１６】まず、純度９９％以上、好ましくは純度９
９．９重量％以上の高純度で、平均粒径３μｍ以下のア
ルミナ粉末を用意する。ここで平均粒径３μｍ以下とし
たのは、３μｍ以上のものを使用すると焼結性が低下し
強度が低くなり、また粉末成形時の三重点欠陥が大きく
なる等の不具合が生じる為である。First, the purity is 99% or more, preferably 9
An alumina powder having a high purity of 9.9% by weight or more and an average particle diameter of 3 μm or less is prepared. The reason why the average particle size is 3 μm or less is that the use of particles having an average particle size of 3 μm or more causes problems such as a decrease in sinterability and a decrease in strength, and an increase in triple point defects during powder molding.
【００１７】一方、Ｔｉ，Ｖ，Ｃｒから選ばれる少なく
とも一種の金属の酸化物粉末は平均粒径５μｍ以下のも
のが好ましい。上記アルミナ原料に、これらの添加物粉
末を合計で０．０５〜０．８重量％だけ添加配合した原
料粉末を混合した後、パラフィンワックスを２〜４重量
％添加造粒する。得られた原料を公知の方法で所定形状
に粉末成形した後、大気雰囲気もしくは真空中にて１４
００〜１７００℃にて加熱焼結すれば本発明のセラミッ
クス製ガイド部材を得ることができる。On the other hand, the oxide powder of at least one metal selected from Ti, V and Cr preferably has an average particle size of 5 μm or less. After mixing the above-mentioned alumina raw material with a raw material powder obtained by adding and blending these additive powders in a total amount of 0.05 to 0.8% by weight, 2 to 4% by weight of paraffin wax is added and granulated. After powder-forming the obtained raw material into a predetermined shape by a known method,
The ceramic guide member of the present invention can be obtained by heating and sintering at 00 to 1700 ° C.
【００１８】[0018]
【実施例】以下、本発明実施例を説明する。EXAMPLES Examples of the present invention will be described below.
【００１９】高純度アルミナ粉末に、さまざまな量比で
添加物を配合し１５時間混合粉砕した。これを乾燥後、
パラフィンワックスを４重量％添加し、１．０ｔｏｎ／
ｃｍ2 の圧力で加圧成形したものを大気雰囲気にて１５
００℃で１時間焼成した。Additives were added to the high-purity alumina powder in various quantitative ratios and mixed and pulverized for 15 hours. After drying it,
Add paraffin wax 4% by weight, 1.0 ton /
What was pressure molded at a pressure of cm 2 in the air atmosphere for 15
It was baked at 00 ° C. for 1 hour.
【００２０】得られた焼結体を粉砕して、ＩＣＰ（発光
分光定量分析装置）により定量分析して得られた値を全
て酸化物換算としたものを焼結体組成とした。又、得ら
れた焼結体の表面を研削した後、抗折強度を測定した。
また、鏡面研磨した後、ビッカース硬度、摩擦係数の測
定および耐摩耗性の評価を行った。The obtained sintered body was pulverized and quantitatively analyzed by an ICP (emission spectrophotometric quantitative analyzer), and all the values obtained were converted to oxides to obtain a sintered body composition. Further, the bending strength was measured after grinding the surface of the obtained sintered body.
Further, after mirror-polishing, Vickers hardness, friction coefficient were measured and abrasion resistance was evaluated.
【００２１】抗折強度はＪＩＳＲ１６０１の３点曲げ試
験法に従い、ビッカース硬度の測定はＪＩＳＺ２２４４
試験法に従った。The bending strength is in accordance with the JISR1601 three-point bending test method, and the Vickers hardness is measured in JISZ2244.
The test method was followed.
【００２２】摩擦係数（μ）の測定は図１に示すよう
に、焼結体を直径５ｍｍの円柱体として表面粗さ（Ｒ
ａ）を０．３〜０．５μｍとし、各試料に対して、太さ
７５ｄのポリエステル糸を接触角θが９０°となるよう
に接触させ、この糸を１００ｍ／分で摺動させて、試料
の前の張力Ｔ１を２０ｇｆとした時の試料の後での張力
Ｔ２を測定し、数１のアモントンの法則式から算出し
た。As shown in FIG. 1, the friction coefficient (μ) was measured by using a sintered body as a columnar body having a diameter of 5 mm and a surface roughness (R).
a) is 0.3 to 0.5 μm, a polyester thread having a thickness of 75 d is brought into contact with each sample so that the contact angle θ becomes 90 °, and this thread is slid at 100 m / min, The tension T2 after the sample when the tension T1 before the sample was set to 20 gf was measured and calculated from the Amonton's law equation of the equation 1.
【００２３】[0023]
【数１】 [Equation 1]
【００２４】又、耐摩耗性の評価は図２に示すように、
リング状とした各試料にナイロンテグス３号の糸を接触
させ、１ｋｇの荷重を加えて摺動面に海水を垂らしなが
ら、この糸を３００ｍｍのストロークで、２秒間に１往
復の速度で１万回往復させた。その後、各試料の摺動部
を２０倍程度の双眼顕微鏡で観察し、摩耗痕跡が確認で
きないものは○とし、摩耗痕跡は確認できるが深さが１
μｍ以下のものは□とし、深さが１μｍ〜３μｍのもの
は△とし、深さが３μｍ以上のものは×として表した。The evaluation of wear resistance is as shown in FIG.
Nylon Teguth No. 3 thread was brought into contact with each ring-shaped sample, and a load of 1 kg was applied to drop the seawater on the sliding surface. I made a round trip. After that, the sliding part of each sample was observed with a binocular microscope with a magnification of about 20. When the wear trace could not be confirmed, it was marked with ○, and the wear trace could be confirmed, but the depth was 1
Those having a depth of less than μm are represented by □, those having a depth of 1 μm to 3 μm are represented by Δ, and those having a depth of 3 μm or more are represented by x.
【００２５】これらの結果は表１に示す通りである。The results are shown in Table 1.
【００２６】[0026]
【表１】 [Table 1]
【００２７】この結果より、炭化珪素質セラミックスか
らなるもの（Ｎｏ．１）やジルコニアセラミックスから
なるもの（Ｎｏ．２）はいずれも耐摩耗性が悪く、摩擦
係数も大きかった。また、本発明の組成のアルミナセラ
ミックスでも、添加物の量が０．８重量％より多いもの
（Ｎｏ．３、４）は強度が５０ｋｇ／ｍｍ2 未満と低く
耐摩耗性も悪かった。さらに、添加成分として、本発明
とは異なる成分を用いたもの（Ｎｏ．７）は強度、耐摩
耗性が低かった。From these results, the silicon carbide ceramics (No. 1) and the zirconia ceramics (No. 2) both had poor wear resistance and a large friction coefficient. Further, even in the alumina ceramics having the composition of the present invention, the one having the additive amount of more than 0.8% by weight (Nos. 3 and 4) had a low strength of less than 50 kg / mm 2 and poor wear resistance. Furthermore, the one using a component different from the present invention as the additive component (No. 7) had low strength and low wear resistance.
【００２８】また、サファイアを用いたもの（Ｎｏ．１
０）は、強度、耐摩耗性は優れているが、単結晶体であ
り表面に適度な凹凸が存在しないことから、摩擦係数が
大きかった。Moreover, the one using sapphire (No. 1)
0) was excellent in strength and wear resistance, but had a large friction coefficient because it was a single crystal and did not have appropriate irregularities on the surface.
【００２９】これらに対し、本発明の範囲内のもの（Ｎ
ｏ．５、６、８、９）は、いずれも強度が５０ｋｇ／ｍ
ｍ2 以上、ビッカース硬度１７００ｋｇ／ｍｍ2 以上で
あり、耐摩耗性も高く、摩擦係数も０．３以下と低く、
優れた結果であった。On the other hand, those within the scope of the present invention (N
o. 5, 6, 8, 9) all have a strength of 50 kg / m
m 2 or more, Vickers hardness of 1700 kg / mm 2 or more, high wear resistance, low friction coefficient of 0.3 or less,
It was an excellent result.
【００３０】なお、本発明のセラミックス製ガイド部材
は各種用途に用いることができる。例えば、釣糸用の糸
道や各種繊維機械用糸道、あるいは磁気テープのガイド
やその他の線状体のガイドとして用いることができる。The ceramic guide member of the present invention can be used for various purposes. For example, it can be used as a yarn path for fishing lines, a yarn path for various textile machines, a guide for a magnetic tape, or a guide for other linear bodies.
【００３１】[0031]
【発明の効果】以上のように、本発明によれば、Ｔｉ，
Ｖ，Ｃｒから選ばれる少なくとも一種の金属の酸化物を
０．０５〜０．８重量％と、不純物０．１％以下と、残
部がＡｌ2 Ｏ3 から成り、平均結晶粒子径が５μｍ以下
の焼結体によりセラミックス製ガイド部材を構成したこ
とによって、アルミナ本来の高硬度、高耐食性を低下さ
せずに、充分に高い強度、および優れた耐摩耗、摩擦特
性を有することができる。この結果、長期に渡り腐食や
キズ、摩耗が発生しないセラミックス製ガイド部材を得
ることができ、各種用途に好適に用いることができる。As described above, according to the present invention, Ti,
An oxide of at least one metal selected from V and Cr is 0.05 to 0.8% by weight, impurities are 0.1% or less, and the balance is Al 2 O 3 , and the average crystal grain size is 5 μm or less. By configuring the ceramic guide member with the sintered body, it is possible to have sufficiently high strength and excellent wear resistance and friction characteristics without deteriorating the high hardness and high corrosion resistance inherent to alumina. As a result, it is possible to obtain a ceramic guide member that is free from corrosion, scratches, and wear over a long period of time, and can be suitably used for various applications.
【図１】本発明のセラミックス製ガイド部材における、
繊維との摩擦係数の測定方法を説明するための図であ
る。FIG. 1 shows a ceramic guide member of the present invention,
It is a figure for demonstrating the measuring method of the friction coefficient with a fiber.
【図２】本発明のセラミックス製ガイド部材における、
耐摩耗性を評価する試験方法を説明するための図であ
る。FIG. 2 shows a ceramic guide member of the present invention,
It is a figure for demonstrating the test method which evaluates abrasion resistance.
Claims (3)
種の金属の酸化物を０．０５〜０．８重量％と、不純物
０．１重量％以下と、残部がＡｌ2 Ｏ3 から成り、平均
結晶粒子径が５μｍ以下の焼結体から成るセラミックス
製ガイド部材。1. An oxide of at least one metal selected from Ti, V and Cr, 0.05 to 0.8% by weight, impurities of 0.1% by weight or less, and the balance Al 2 O 3 , A ceramic guide member made of a sintered body having an average crystal grain size of 5 μm or less.
カース硬度が１７００ｋｇ／ｍｍ2 以上であることを特
徴とする請求項１記載のセラミックス製ガイド部材。2. The ceramic guide member according to claim 1, which has a bending strength of 50 kg / mm 2 or more and a Vickers hardness of 1700 kg / mm 2 or more.
に、Ｔｉ，Ｖ，Ｃｒから選ばれる少なくとも一種の金属
の酸化物粉末を０．０５〜０．８重量％添加混合した原
料を所定形状に成形した後、大気雰囲気または真空中で
１４００〜１７００℃で焼成する工程からなるセラミッ
クス製ガイド部材の製造方法。3. A raw material obtained by adding 0.05 to 0.8% by weight of oxide powder of at least one metal selected from Ti, V, and Cr to high-purity alumina powder having an average particle size of 3 μm or less and having a predetermined shape. A method for manufacturing a ceramic guide member, which comprises the steps of firing at 1400 to 1700 ° C. in an air atmosphere or a vacuum after molding into a sheet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP02987094A JP3559303B2 (en) | 1994-02-28 | 1994-02-28 | Ceramic guide member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP02987094A JP3559303B2 (en) | 1994-02-28 | 1994-02-28 | Ceramic guide member |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07237965A true JPH07237965A (en) | 1995-09-12 |
| JP3559303B2 JP3559303B2 (en) | 2004-09-02 |
Family
ID=12288015
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP02987094A Expired - Fee Related JP3559303B2 (en) | 1994-02-28 | 1994-02-28 | Ceramic guide member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3559303B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017090717A1 (en) * | 2015-11-28 | 2017-06-01 | 京セラ株式会社 | Guide member for fishing line |
| WO2019026871A1 (en) * | 2017-08-01 | 2019-02-07 | 株式会社フェローテックセラミックス | Alumina sintered compact, method of manufacturing same, and component for semiconductor manufacturing apparatus |
| US11647740B2 (en) | 2017-02-27 | 2023-05-16 | Kyocera Corporation | Fishing line guide member and fishing rod provided with same |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63236756A (en) * | 1987-03-26 | 1988-10-03 | 東陶機器株式会社 | Polycrystal artificial ruby and manufacture |
| JPS6354331B2 (en) * | 1981-05-29 | 1988-10-27 | Daiwa Seiko Co | |
| JPH05246758A (en) * | 1991-12-26 | 1993-09-24 | Pentel Kk | Production of ceramic product |
-
1994
- 1994-02-28 JP JP02987094A patent/JP3559303B2/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6354331B2 (en) * | 1981-05-29 | 1988-10-27 | Daiwa Seiko Co | |
| JPS63236756A (en) * | 1987-03-26 | 1988-10-03 | 東陶機器株式会社 | Polycrystal artificial ruby and manufacture |
| JPH05246758A (en) * | 1991-12-26 | 1993-09-24 | Pentel Kk | Production of ceramic product |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017090717A1 (en) * | 2015-11-28 | 2017-06-01 | 京セラ株式会社 | Guide member for fishing line |
| JPWO2017090717A1 (en) * | 2015-11-28 | 2017-11-24 | 京セラ株式会社 | Fishing line guide member |
| CN108289440A (en) * | 2015-11-28 | 2018-07-17 | 京瓷株式会社 | Fishline guiding parts |
| US11089769B2 (en) | 2015-11-28 | 2021-08-17 | Kyocera Corporation | Guide member for fishing line |
| US11647740B2 (en) | 2017-02-27 | 2023-05-16 | Kyocera Corporation | Fishing line guide member and fishing rod provided with same |
| WO2019026871A1 (en) * | 2017-08-01 | 2019-02-07 | 株式会社フェローテックセラミックス | Alumina sintered compact, method of manufacturing same, and component for semiconductor manufacturing apparatus |
| KR20200052876A (en) * | 2017-08-01 | 2020-05-15 | 가부시키가이샤 페로텍 머티리얼 테크놀로지즈 | Alumina sintered body and its manufacturing method and parts for semiconductor manufacturing equipment |
| CN111164060A (en) * | 2017-08-01 | 2020-05-15 | 飞罗得材料技术股份有限公司 | Alumina sintered body, method for producing same, and member for semiconductor production device |
| JPWO2019026871A1 (en) * | 2017-08-01 | 2020-08-06 | 株式会社フェローテックマテリアルテクノロジーズ | Alumina sintered body, manufacturing method thereof, and parts for semiconductor manufacturing apparatus |
| TWI715857B (en) * | 2017-08-01 | 2021-01-11 | 日商飛羅得材料科技股份有限公司 | Alumina sintered body and its manufacturing method and parts for semiconductor manufacturing equipment |
| US11306029B2 (en) | 2017-08-01 | 2022-04-19 | Ferrotec Material Technologies Corporation | Alumina sintered body, method for manufacturing the same, and part for semiconductor manufacturing apparatus |
| TWI778471B (en) * | 2017-08-01 | 2022-09-21 | 日商飛羅得材料科技股份有限公司 | Alumina sintered body, method for producing the same, and parts for semiconductor production equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3559303B2 (en) | 2004-09-02 |
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