JPH07215566A - Method and device for positioning plate member - Google Patents
Method and device for positioning plate memberInfo
- Publication number
- JPH07215566A JPH07215566A JP6036529A JP3652994A JPH07215566A JP H07215566 A JPH07215566 A JP H07215566A JP 6036529 A JP6036529 A JP 6036529A JP 3652994 A JP3652994 A JP 3652994A JP H07215566 A JPH07215566 A JP H07215566A
- Authority
- JP
- Japan
- Prior art keywords
- plate
- shaped member
- holding means
- color filter
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Liquid Crystal (AREA)
- Collation Of Sheets And Webs (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、重ね合わせた２つの板
状部材を位置合わせする方法及びその装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for aligning two plate-like members which are superposed on each other.
【０００２】[0002]
【従来の技術】例えば、携帯用カラーテレビに用いられ
る液晶画面の製造工程において、該液晶画面を構成する
カラーフィルタ基板とＴＦＴ基板を重ね合わせる際に
は、図４に斜視図で示すように、重ね合わせる面１０
１，３０１を上に向けてカラーフィルタ基板１やＴＦＴ
基板３を載置したキャリア５，７が、マガジン９から引
き出されてアライメント装置に供給される。2. Description of the Related Art For example, in a process of manufacturing a liquid crystal screen used for a portable color television, when a color filter substrate and a TFT substrate constituting the liquid crystal screen are superposed, as shown in a perspective view of FIG. Surface 10
Color filter substrate 1 and TFT with 1,301 facing up
The carriers 5 and 7 on which the substrate 3 is placed are pulled out from the magazine 9 and supplied to the alignment device.
【０００３】図５は従来のアライメント装置における位
置合わせ部を示す。図５において１３は、位置合わせ部
１１の下部箇所に水平面内で所定方向に移動可能に配設
されたスライドステージ、１５は前記スライドステージ
１３の上に配設された移載テーブル、１７は前記位置合
わせ部１１の上部箇所に昇降可能に配設された上アライ
ナー、１９は前記スライドステージ１３上で前記移載テ
ーブル１５から前記スライドステージ１３の移動方向に
間隔を置いて配設された下アライナーである。前記カラ
ーフィルタ基板１は、前記キャリア５から不図示の反転
移載ロボットによって、前記面１０１が下に向くように
上下に反転されて前記移載テーブル１５に移載される。
前記カラーフィルタ基板１が移載された前記移載テーブ
ル１５は、前記スライドステージ１３に内蔵された駆動
源によって該スライドステージ１３が前記所定方向に移
動することで、前記上アライナー１７の下面箇所に移送
され、上アライナー１７の昇降動作及び該上アライナー
１７に設けられた吸着保持手段により吸着保持される。FIG. 5 shows a positioning section in a conventional alignment apparatus. In FIG. 5, 13 is a slide stage which is arranged at a lower portion of the alignment unit 11 so as to be movable in a predetermined direction in a horizontal plane, 15 is a transfer table arranged on the slide stage 13, and 17 is the above-mentioned table. An upper aligner disposed so as to be able to move up and down at a position above the alignment unit 11, and a lower aligner 19 disposed on the slide stage 13 at a distance from the transfer table 15 in the moving direction of the slide stage 13. Is. The color filter substrate 1 is transferred from the carrier 5 to the transfer table 15 by an upside down transfer robot (not shown) so that the surface 101 faces downward.
The transfer table 15 on which the color filter substrate 1 is transferred is located on the lower surface of the upper aligner 17 when the slide stage 13 is moved in the predetermined direction by a drive source built in the slide stage 13. The upper aligner 17 is transferred and held by suction by the lifting operation of the upper aligner 17 and suction holding means provided on the upper aligner 17.
【０００４】一方、前記ＴＦＴ基板３は、前記移載テー
ブル１５が前記上アライナー１７の下面箇所に位置して
いる際に、前記キャリア７から不図示の移載ロボットに
よって、前記面３０１を上に向けて前記下アライナー１
９に移載される。On the other hand, when the transfer table 15 is located on the lower surface of the upper aligner 17, the surface of the TFT substrate 3 is moved upward from the carrier 7 by a transfer robot (not shown). Towards the lower aligner 1
9 reprinted.
【０００５】前記カラーフィルタ基板１と前記ＴＦＴ基
板３が前記キャリア５，７から前記上下の各アライナー
１７，１９にそれぞれ受け渡されたならば、前記スライ
ドステージ１３の移動により、前記下アライナー１９を
前記上アライナー１７の下方箇所に移動させて、該上ア
ライナー１７に内蔵された昇降駆動源によって該上アラ
イナー１７を下動させ、前記カラーフィルタ基板１の面
１０１と前記ＴＦＴ基板３の面３０１を重ね合わせて加
圧する。さらに、前記下アライナー１９を構成するＸＹ
テーブル２１と旋回テーブル２３を、それらにそれぞれ
内蔵された駆動源によって、水平面内で前記所定方向及
び該所定方向に直交する方向に移動させると共に水平面
内で旋回させて、前記カラーフィルタ基板１と前記ＴＦ
Ｔ基板３を位置合わせする。When the color filter substrate 1 and the TFT substrate 3 are respectively transferred from the carriers 5, 7 to the upper and lower aligners 17, 19, the lower aligner 19 is moved by moving the slide stage 13. The surface of the color filter substrate 1 and the surface 301 of the TFT substrate 3 are moved to a position below the upper aligner 17, and the upper aligner 17 is moved downward by an elevation drive source built in the upper aligner 17. Overlap and pressurize. Further, XY which constitutes the lower aligner 19
The table 21 and the swivel table 23 are moved in the predetermined direction and a direction orthogonal to the predetermined direction in the horizontal plane by the drive sources respectively incorporated therein, and are swung in the horizontal plane, and the color filter substrate 1 and the TF
The T substrate 3 is aligned.
【０００６】尚、前記ＴＦＴ基板３の面３０１の周縁部
には、図６に一部截断正面図で示すように、紫外線を照
射することで硬化する接着剤３０３が塗布されており、
位置合わせした前記カラーフィルタ基板１と前記ＴＦＴ
基板３は、不図示の紫外線照射器により上方から紫外線
を照射することで接着される。Incidentally, as shown in a partially cutaway front view of FIG. 6, a peripheral portion of the surface 301 of the TFT substrate 3 is coated with an adhesive 303 which is cured by being irradiated with ultraviolet rays,
Aligned color filter substrate 1 and TFT
The substrate 3 is bonded by irradiating ultraviolet rays from above with an ultraviolet irradiator (not shown).
【０００７】[0007]
【発明が解決しようとする課題】しかしながら、上述し
た従来の構成では、上下に反転した前記カラーフィルタ
基板１を前記上アライナー１７に供給するために前記移
載テーブル１５を前記スライドステージ１３上に設けて
いたので、スライドステージ１３が大型化し前記位置合
わせ部１１の大型化を招くという不具合があった。However, in the above-mentioned conventional structure, the transfer table 15 is provided on the slide stage 13 in order to supply the vertically inverted color filter substrate 1 to the upper aligner 17. Therefore, there is a problem in that the slide stage 13 is upsized and the position adjustment part 11 is upsized.
【０００８】そこで、例えば図７に示すように、垂直面
内で揺動可能な揺動板１７０１を前記上アライナー１７
の下面に設け、図中想像線で示す揺動位置で前記揺動板
１７０１に前記面１０１を上に向けて前記カラーフィル
タ基板１を移載し、該カラーフィルタ基板１を前記吸着
保持手段により前記揺動板１７０１に吸着保持させ、そ
の後、図中実線で示す揺動位置に前記揺動板１７０１を
揺動させることで、前記面１０１が下を向くように前記
カラーフィルタ基板１を上下に反転させて前記上アライ
ナー１７に保持させることが考えられる。このように構
成すれば、前記移載テーブル１５を省略でき、前記スラ
イドステージ１３を小型化できる利点があるが、その代
わりに、前記揺動板１７０１の揺動駆動源を収容する分
だけ前記上アライナー１７の内部スペースを広げる必要
が生じる。Therefore, for example, as shown in FIG. 7, a swing plate 1701 that can swing in a vertical plane is provided on the upper aligner 17 as described above.
Is provided on the lower surface of the color filter substrate 1, and the color filter substrate 1 is transferred to the swing plate 1701 with the surface 101 facing upward at a swing position shown by an imaginary line in the figure, and the color filter substrate 1 is moved by the suction holding means. The color filter substrate 1 is moved up and down so that the surface 101 faces downward by adsorbing and holding it on the swing plate 1701 and then swinging the swing plate 1701 to the swing position shown by the solid line in the figure. It is conceivable that the upper aligner 17 is reversed and held by the upper aligner 17. According to this structure, the transfer table 15 can be omitted, and the slide stage 13 can be downsized. However, instead of the above, the slide drive source of the swing plate 1701 is accommodated. It becomes necessary to increase the internal space of the aligner 17.
【０００９】ところが、前記カラーフィルタ基板１と前
記ＴＦＴ基板３の位置合わせにはサブミクロンの精度を
必要とし、前記上アライナー１７の剛性を高める必要が
あるので、前記揺動駆動源を収容するため前記上アライ
ナー１７の内部スペースを広げると、その分の剛性を確
保するため前記上アライナー１７を大型化しなければな
らず、結局は前記位置合わせ部１１の大型化を招いてし
まう。However, since alignment of the color filter substrate 1 and the TFT substrate 3 requires sub-micron accuracy and the rigidity of the upper aligner 17 needs to be increased, the swing drive source is accommodated. If the inner space of the upper aligner 17 is widened, the upper aligner 17 must be increased in size in order to ensure the rigidity, and eventually the alignment portion 11 is increased in size.
【００１０】さらに、上述した２つの方式ではいずれ
も、前記キャリア５から前記上下の各アライナー１７，
１９に前記カラーフィルタ基板１や前記ＴＦＴ基板３を
それぞれ個別に受け渡すため、２組の受け渡し機構が必
要となり、これら２組の受け渡し機構が入り込むスペー
スを前記位置合わせ部１１に確保しなければならず、そ
の点からしても前記位置合わせ部１１が大型化してしま
うという不具合がある。Further, in both of the above two methods, the carrier 5 and the upper and lower aligners 17,
In order to individually transfer the color filter substrate 1 and the TFT substrate 3 to 19, the two transfer mechanisms are required, and a space for the two transfer mechanisms to enter must be secured in the alignment section 11. However, even from that point, there is a problem that the alignment section 11 becomes large.
【００１１】また、前記上下の各アライナー１７，１９
では、前記カラーフィルタ基板１や前記ＴＦＴ基板３
を、それらの重ね合わせる面１０１，３０１をそれぞれ
露出させて保持しなけばならないので、該上下の各アラ
イナー１７，１９に前記カラーフィルタ基板１や前記Ｔ
ＦＴ基板３を受け渡す受け渡し機構の保持機構部分に、
前記各面１０１，３０１に触れないような工夫を凝らさ
なければならないという不具合がある。The upper and lower aligners 17, 19 are also provided.
Then, the color filter substrate 1 and the TFT substrate 3
Since it is necessary to expose and hold the overlapping surfaces 101 and 301, respectively, the color filter substrate 1 and the T-layer are provided on the upper and lower aligners 17 and 19, respectively.
In the holding mechanism part of the transfer mechanism that transfers the FT substrate 3,
There is a problem in that it is necessary to devise a device that does not touch the surfaces 101 and 301.
【００１２】本発明は前記事情に鑑みてなされたもの
で、本発明の目的は、第１板状部材と第２板状部材を重
ね合わせ加圧しながら位置合わせするに当たり、それら
両板状部材の位置合わせ部への受け渡し機構を簡略化し
て位置合わせ部のスペースを小型化でき、両板状部材の
位置を精度よく合わせられると共に、位置合わせ部での
各板状部材の取り扱いを容易にできる板状部材の位置合
わせ方法及びその装置を提供することにある。The present invention has been made in view of the above circumstances, and an object of the present invention is to align the first plate-shaped member and the second plate-shaped member while superposing and pressurizing them. A plate that simplifies the delivery mechanism to the alignment unit to reduce the space of the alignment unit, allows the positions of both plate members to be aligned accurately, and facilitates the handling of each plate member at the alignment unit. It is an object of the present invention to provide a method for aligning a linear member and an apparatus therefor.
【００１３】[0013]
【課題を解決するための手段】上述した目的を達成する
ため本発明は、第１板状部材と第２板状部材を位置合わ
せ部に供給し、前記位置合わせ部において、前記第１板
状部材と前記第２板状部材を重ね合わせ加圧しながら位
置合わせするに際して、前記第１板状部材に前記第２板
状部材を重ね合わせた状態で前記位置合わせ部に供給す
るようにしたことを特徴とする。In order to achieve the above-mentioned object, the present invention supplies a first plate-shaped member and a second plate-shaped member to an alignment section, and in the alignment section, the first plate-shaped member is provided. When the member and the second plate-shaped member are superposed and aligned with each other while being pressed, the second plate-shaped member is superposed on the first plate-shaped member and supplied to the alignment section. Characterize.
【００１４】また、本発明は、前記第２板状部材は上下
に反転されて前記第１板状部材に重ね合わされるものと
した。さらに、本発明は、前記第１板状部材は液晶画面
を構成するＴＦＴ基板であり、前記第２板状部材は液晶
画面を構成するカラーフィルタ基板であるものとした。Further, according to the present invention, the second plate-shaped member is turned upside down and superposed on the first plate-shaped member. Furthermore, in the present invention, the first plate-shaped member is a TFT substrate that constitutes a liquid crystal screen, and the second plate-shaped member is a color filter substrate that constitutes a liquid crystal screen.
【００１５】また、上述した目的を達成するため本発明
は、第１板状部材を保持する第１保持手段と、前記第１
板状部材の上方で第２板状部材を保持する第２保持手段
と、前記第１保持手段と前記第２保持手段の少なくとも
一方を、水平面内で直交する２方向に且つ水平面内で旋
回可能に移動させる移動手段と、前記第１保持手段と前
記第２保持手段を離間接近する方向に移動させる昇降手
段とを備え、前記第１保持手段及び前記第２保持手段に
より、前記第１板状部材と前記第２板状部材を重ね合わ
せて加圧し、前記移動手段による移動と旋回により前記
第１板状部材と前記第２板状部材の位置合わせを行う位
置合わせ装置において、前記第１板状部材に前記第２板
状部材を重ね合わせる重ね合わせ手段と、前記重ね合わ
せ手段で重ね合わせた前記第１板状部材と前記第２板状
部材を重ね合わせた状態で前記第１保持手段に供給する
供給手段を設けたことを特徴とする。Further, in order to achieve the above-mentioned object, the present invention provides a first holding means for holding a first plate member, and the first holding means.
Second holding means for holding the second plate-shaped member above the plate-shaped member, and at least one of the first holding means and the second holding means can be swung in two directions orthogonal to each other in the horizontal plane and in the horizontal plane. And a lifting means for moving the first holding means and the second holding means in a direction in which the first holding means and the second holding means are separated from each other, and the first holding means and the second holding means A member and the second plate-shaped member are superposed and pressed, and the first plate-shaped member and the second plate-shaped member are aligned by moving and turning by the moving means, wherein the first plate Means for superposing the second plate-shaped member on the plate-shaped member, and the first holding means in the state where the first plate-shaped member and the second plate-shaped member superposed by the superposing means are superposed on each other. Provided a supply means for supplying And wherein the door.
【００１６】さらに、本発明は、前記重ね合わせ手段
は、前記第１板状部材と前記第２板状部材が重ね合わさ
れる中継ステージと、前記第１板状部材が載置された第
１キャリアから前記中継ステージに前記第１板状部材を
移載する第１移載手段と、前記第２板状部材が載置され
た第２キャリアから前記中継ステージの前記第１板状部
材上に前記第２板状部材を移載する第２移載手段とで構
成されているものとした。また、本発明は、前記第２移
載手段は、前記第２キャリアと前記中継ステージの間で
前記第２板状部材の前記第１板状部材に対する重ね合わ
せ面を上下に反転させる反転手段を含んで構成されてい
るものとした。さらに、本発明は、前記第１保持手段を
支持するスライドステージと、該スライドステージを水
平面内で第１移動位置と第２移動位置の間で移動させる
ステージ駆動手段とをさらに備え、前記第２保持手段は
前記スライドステージの第１移動位置における前記第１
保持手段の上方箇所に配設され、前記供給手段は、前記
スライドステージの前記第２移動位置における前記第１
保持手段に、前記第１板状部材及び前記第２板状部材を
重ね合わせた状態で供給するものとした。また、本発明
は、前記第１板状部材は液晶画面を構成するＴＦＴ基板
であり、前記第２板状部材は液晶画面を構成するカラー
フィルタ基板であるものとした。Further, according to the present invention, the superposing means includes a relay stage on which the first plate member and the second plate member are superposed, and a first carrier on which the first plate member is placed. From the first carrier for transferring the first plate-shaped member from the second carrier on which the second plate-shaped member is mounted to the relay stage to the first plate-shaped member of the relay stage. It is assumed that the second plate-shaped member is configured to be transferred and the second transfer device is installed. Further, in the present invention, the second transfer means includes a reversing means for vertically reversing an overlapping surface of the second plate-shaped member with respect to the first plate-shaped member between the second carrier and the relay stage. It is assumed that it is configured to include. Furthermore, the present invention further comprises a slide stage that supports the first holding means, and stage drive means that moves the slide stage between a first movement position and a second movement position in a horizontal plane, and the second stage The holding means includes the first stage at the first movement position of the slide stage.
The supply means is disposed above the holding means, and the supply means is provided at the first moving position of the slide stage at the second moving position.
The first plate-shaped member and the second plate-shaped member are supplied to the holding means in a stacked state. Further, in the present invention, the first plate-shaped member is a TFT substrate forming a liquid crystal screen, and the second plate-shaped member is a color filter substrate forming a liquid crystal screen.
【００１７】[0017]
【作用】本発明によれば、第１板状部材と第２板状部材
をあらかじめ重ね合わせておき、この状態でそれら両板
状部材を位置合わせ部に供給することで、各板状部材を
個別に供給する場合に比べて板状部材の受け渡し機構が
簡略化され、該受け渡し機構が入り込むのに必要な前記
位置合わせ部のスペースが小さくて済む。また、前記第
１板状部材と第２板状部材を重ね合わせておくことで、
それら各板状部材の重ね合わせる面が前記位置合わせ部
で露出することがなくなる。さらに、前記第２板状部材
を上下に反転させて前記第１板状部材に重ね合わせる場
合には、該第２板状部材の反転を前記位置合わせ部への
供給前に行うことで、該位置合わせ部での反転動作が不
要となり、位置合わせ部のさらなる小型化が図られる。According to the present invention, the first plate-shaped member and the second plate-shaped member are preliminarily overlapped with each other, and in this state, both plate-shaped members are supplied to the alignment portion, whereby the respective plate-shaped members are separated from each other. The delivery mechanism for the plate-shaped members is simplified as compared with the case where they are individually supplied, and the space of the alignment portion required for the delivery mechanism to enter is small. Further, by overlapping the first plate-shaped member and the second plate-shaped member,
The overlapping surfaces of the plate members are not exposed at the alignment section. Further, when the second plate-shaped member is turned upside down and superposed on the first plate-shaped member, the reversal of the second plate-shaped member is performed before the supply to the alignment section. Since the reversing operation in the alignment unit is unnecessary, the size of the alignment unit can be further reduced.
【００１８】[0018]
【実施例】以下、本発明の板状部材の位置合わせ方法を
その装置と共に図面を参照して説明する。図１は本発明
の一実施例に係るアライメント装置の斜視図で、図中図
４乃至図７と同一の要素には、それらの図で付したもの
と同一の引用符号を付しその説明を省略する。図１に示
すアライメント装置３１（位置合わせ装置に相当）は、
基板供給ユニット３３と、位置合わせユニット３５（位
置合わせ部に相当）と、基板接合ユニット３７と、制御
ユニット３９で構成され、前記基板供給ユニット３３
は、前記アライメント装置３１の前部左側の第１架台４
１に設けられ、前記位置合わせユニット３５及び前記基
板接合ユニット３７は、前記アライメント装置３１の前
部右側の第２架台４３に設けられ、前記制御ユニット３
９は、前記第１架台４１及び前記第２架台４３のそれぞ
れ後方の第３架台４５及び第４架台４７の一方又は両方
に亘って設けられている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A method for aligning a plate-like member according to the present invention will be described below with reference to the apparatus with reference to the drawings. FIG. 1 is a perspective view of an alignment apparatus according to an embodiment of the present invention. In the figure, the same elements as those in FIGS. 4 to 7 are designated by the same reference numerals as those given in those figures, and the description thereof is omitted. Omit it. The alignment device 31 (corresponding to the alignment device) shown in FIG.
The substrate supply unit 33, a positioning unit 35 (corresponding to a positioning unit), a substrate joining unit 37, and a control unit 39 are provided.
Is the first gantry 4 on the front left side of the alignment device 31.
1, the alignment unit 35 and the substrate bonding unit 37 are provided on the second pedestal 43 on the front right side of the alignment apparatus 31, and the control unit 3 is provided.
9 is provided over one or both of the third pedestal 45 and the fourth pedestal 47 at the rear of the first pedestal 41 and the second pedestal 43, respectively.
【００１９】前記基板供給ユニット３３は、エレベータ
部４９と、引き出し部５１と、移送ロボット５３と、中
継ステージ５５と、反転ステージ５７を備えている。The substrate supply unit 33 comprises an elevator section 49, a drawer section 51, a transfer robot 53, a relay stage 55, and a reversing stage 57.
【００２０】前記エレベータ部４９は、前記第１架台４
１の前部に、不図示の昇降駆動手段により昇降可能に配
設され、該エレベータ部４９には、前記キャリア５（第
２キャリアに相当）や、前記キャリア７（第１キャリア
に相当）をそれぞれ複数収容した前記マガジン９と、前
記カラーフィルタ基板１（第２板状部材に相当）と前記
ＴＦＴ基板３（第１板状部材に相当）を重ね合わせて接
合した基板ユニット載置用のキャリア５９を出し入れ可
能に複数収容するマガジン６１が、左右方向に間隔を置
いてそれぞれ２つずつ設置されている。The elevator section 49 includes the first mount 4
1 is arranged in the front part of 1 so as to be able to move up and down by a not-shown lifting drive means, and the carrier 5 (corresponding to the second carrier) and the carrier 7 (corresponding to the first carrier) are installed in the elevator part 49. A carrier for mounting a substrate unit in which a plurality of the magazines 9 respectively accommodating, the color filter substrate 1 (corresponding to a second plate-shaped member) and the TFT substrate 3 (corresponding to a first plate-shaped member) are superposed and joined. Two magazines 61, each accommodating a plurality of which can accommodate 59, are installed at intervals in the left-right direction.
【００２１】前記引き出し部５１は、前記第１架台４１
の後部に前記マガジン９，６１と同数設けられ、各引き
出し部５１は、前記各マガジン９，６１のキャリア引き
出し用開口部に臨んで配置され、前記各キャリア５，
７，５９を把持する把持体（図示せず）と、該把持体を
前後方向に移動させて前記各マガジン９，６１のキャリ
ア引き出し用開口部に接近離間させる移動手段（図示せ
ず）からなる。The drawer portion 51 is connected to the first mount 41.
The same number as the magazines 9 and 61 are provided in the rear part, and the drawers 51 are arranged so as to face the carrier drawer openings of the magazines 9 and 61, respectively.
It comprises a gripping body (not shown) for gripping 7, 59, and a moving means (not shown) for moving the gripping body in the front-rear direction so as to move toward and away from the carrier pulling opening of each of the magazines 9, 61. .
【００２２】前記移送ロボット５３は、前記第１架台４
１の後部中央に立設された支柱５３０１と、該支柱５３
０１に支持されたアーム部５３０３と、該アーム部５３
０３の先端に設けられた吸着部５３０５を備えている。
前記吸着部５３０５は、前記第１架台４１或は前記支柱
５３０１に収容された不図示のアーム駆動源により前記
アームが駆動されることで、水平面内及び垂直面内で任
意の方向に移動される。そして、前記吸着部５３０５
は、前記第１架台４１或は前記支柱５３０１に収容され
た不図示の吸引源の作動により前記カラーフィルタ基板
１や前記ＴＦＴ基板３を吸着保持し、前記アーム駆動源
の駆動により、前記カラーフィルタ基板１や前記ＴＦＴ
基板３を、前記把持体で引き出された前記各キャリア
５，７から前記中継ステージ５５や前記反転ステージ５
７へ、また、前記中継ステージ５５や前記反転ステージ
５７から前記キャリア５９へと移送する。The transfer robot 53 includes the first mount 4
1, a column 5301 which is erected in the center of the rear part of the first column, and the column 53
01 is supported by the arm portion 5303 and the arm portion 53.
03 is provided with a suction portion 5305 provided at the tip thereof.
The suction unit 5305 is moved in an arbitrary direction within a horizontal plane and a vertical plane by driving the arm by an arm driving source (not shown) housed in the first frame 41 or the support column 5301. . Then, the suction unit 5305
Holds the color filter substrate 1 and the TFT substrate 3 by suction by operating a suction source (not shown) housed in the first mount 41 or the support column 5301, and drives the arm drive source to hold the color filter. Substrate 1 and the TFT
The substrate 3 is pulled out from the carriers 5 and 7 by the gripper to the relay stage 55 and the reversing stage 5.
7, and from the relay stage 55 and the reversal stage 57 to the carrier 59.
【００２３】前記中継ステージ５５は、前記第１架台４
１の後部で前記第２架台４３寄りの箇所に２つ配設さ
れ、各中継ステージ５５には、前記移送ロボット５３に
よって、前記キャリア７の前記ＴＦＴ基板３が１つずつ
交互に移載される。The relay stage 55 includes the first mount 4
Two of them are arranged at a position near the second pedestal 43 in the rear part of 1, and the TFT substrates 3 of the carrier 7 are alternately transferred to the relay stages 55 one by one by the transfer robot 53. .
【００２４】前記反転ステージ５７は、前記各中継ステ
ージ５５に隣接して前記第１架台４１の側部箇所に２つ
配設され、各反転ステージ５７には、前記移送ロボット
５３により、前記キャリア５の前記カラーフィルタ基板
１が１つずつ交互に移載される。前記各反転ステージ５
７は、図２に模式図で示すように、前記カラーフィルタ
基板１を吸着保持する保持板５７０１と、前記第１架台
４１の上部に水平に延設され前記保持板５７０１を垂直
面内において旋回可能に支持する支軸５７０３と、前記
保持板５７０１を前記第１架台４１上で前記支軸５７０
３の回りに１８０°旋回駆動する旋回駆動手段（図示せ
ず）と、前記カラーフィルタ基板１を前記保持板５７０
１に吸着保持させる吸引源（図示せず）を備え、前記旋
回駆動手段と前記吸引源は前記第１架台４１の内部に収
容されている。尚、前記各反転ステージ５７の吸引源
は、前記移送ロボット５３の吸引源と共用することも可
能である。前記保持板５７０１に吸着保持された前記カ
ラーフィルタ基板１は、該保持板５７０１が前記旋回駆
動手段により１８０°旋回されることで、前記各中継ス
テージ５５の前記ＴＦＴ基板３上に重ね合わされる。Two reversing stages 57 are arranged adjacent to each of the relay stages 55 at a side portion of the first frame 41, and each reversing stage 57 is moved to the carrier 5 by the transfer robot 53. The color filter substrates 1 are alternately transferred one by one. Each of the inversion stages 5
As shown in the schematic view of FIG. 2, a reference numeral 7 designates a holding plate 5701 for attracting and holding the color filter substrate 1, and a holding plate 5701 horizontally extended above the first mount 41 so that the holding plate 5701 can be rotated in a vertical plane. The support shaft 5703 that supports the support shaft 5703 and the holding plate 5701 are supported by the support shaft 570 on the first mount 41.
3, a swivel driving means (not shown) that swivels 180 ° around the color filter substrate 1 and the holding plate 570.
1 is provided with a suction source (not shown) that is suction-held, and the swivel drive means and the suction source are housed inside the first mount 41. The suction source of each reversing stage 57 can be shared with the suction source of the transfer robot 53. The color filter substrate 1 sucked and held by the holding plate 5701 is superposed on the TFT substrate 3 of each of the relay stages 55 by turning the holding plate 5701 by 180 ° by the turning drive means.
【００２５】本実施例では、反転手段が前記反転ステー
ジ５７で構成され、第１移載手段が前記移送ロボット５
３で構成され、第２移載手段が前記移送ロボット５３と
前記反転ステージ５７で構成されていると共に、重ね合
わせ手段が前記中継ステージ５５と前記反転ステージ５
７で構成されている。In this embodiment, the reversing means is composed of the reversing stage 57, and the first transferring means is the transfer robot 5.
3, the second transfer means is composed of the transfer robot 53 and the reversing stage 57, and the superposing means is the relay stage 55 and the reversing stage 5.
It is composed of 7.
【００２６】前記位置合わせユニット３５は、図１に示
すように、スライドステージ６３と、下アライナー６５
（第１保持手段に相当）と、上アライナー６７（第２保
持手段に相当）と、供給ロボット６９（供給手段に相
当）と、ＩＴＶカメラ７１を備えている。As shown in FIG. 1, the alignment unit 35 includes a slide stage 63 and a lower aligner 65.
It is provided with (corresponding to first holding means), upper aligner 67 (corresponding to second holding means), supply robot 69 (corresponding to supply means), and ITV camera 71.
【００２７】前記スライドステージ６３は、前記第２架
台４３の後部で前記第１架台４１寄りの箇所に配設され
ている。前記スライドステージ６３は、前記第２架台４
３の内部に収容された不図示のステージ駆動手段の駆動
により、前記第１架台４１に接近した第１移動位置と該
第１架台４１から離間した第２移動位置の間で、水平面
内で左右方向に移動される。The slide stage 63 is arranged at a position near the first frame 41 at the rear of the second frame 43. The slide stage 63 includes the second mount 4
3 is driven by a stage driving means (not shown) housed in the inside of the third frame, between the first moving position approaching the first gantry 41 and the second moving position distant from the first gantry 41 in the horizontal plane. Is moved in the direction.
【００２８】前記下アライナー６５は前記スライドステ
ージ６３上に前後に間隔を置いて２つ設けられ、各下ア
ライナー６５は前記各中継ステージ５５の側方箇所に配
置されている。前記各下アライナー６５は、前記スライ
ドステージ６３上に水平面内で前後方向及び左右方向に
移動可能に支持されたＸＹテーブル６５０１と、該ＸＹ
テーブル６５０１上に水平面内で旋回可能に支持された
旋回テーブル６５０３とを備え、前記ＸＹテーブル６５
０１の移動手段（図示せず）や、前記旋回テーブル６５
０３の旋回駆動手段（図示せず）は、前記第２架台４３
の内部にそれぞれ収容されている。また、図２に示すよ
うに、前記旋回テーブル６５０３の上面には吸着部６５
０５が設けられ、前記第２架台４３の内部に収容された
不図示の吸引源の作動により、前記吸着部６５０５によ
る物品の吸着が行われる。尚、前記下アライナー６５の
吸引源は、前記移送ロボット５３の吸引源や前記各反転
ステージ５７の吸引源と共用することも可能である。ま
た、本実施例では、移動手段が、前記ＸＹテーブル６５
０１と、該ＸＹテーブル６５０１の移動手段と、前記旋
回テーブル６５０３と、該旋回テーブル６５０３の旋回
駆動手段で構成されている。Two lower aligners 65 are provided on the slide stage 63 at intervals in the front and rear, and each lower aligner 65 is arranged at a lateral position of each relay stage 55. Each of the lower aligners 65 is an XY table 6501 supported on the slide stage 63 so as to be movable in the front-rear direction and the left-right direction in a horizontal plane, and the XY table 6501.
A turntable 6503 supported on the table 6501 so as to turn in a horizontal plane, and the XY table 65
01 moving means (not shown) and the turning table 65.
The turning drive means (not shown) of No. 03 is used for the second mount 43.
Each is housed inside. Further, as shown in FIG. 2, the suction portion 65 is provided on the upper surface of the turning table 6503.
05 is provided, and the suction unit (not shown) accommodated in the second mount 43 causes the suction unit 6505 to suck the article. The suction source of the lower aligner 65 can be shared with the suction source of the transfer robot 53 and the suction source of each of the reversing stages 57. Further, in this embodiment, the moving means is the XY table 65.
01, a moving means of the XY table 6501, the turning table 6503, and a turning drive means of the turning table 6503.
【００２９】前記上アライナー６７は、前記スライドス
テージ６３を跨いで前記第１架台４１上に設けられた支
持機構７３によって、該スライドステージ６３の上方に
配設されている。The upper aligner 67 is disposed above the slide stage 63 by a support mechanism 73 provided on the first frame 41 so as to straddle the slide stage 63.
【００３０】前記支持機構７３は、前記スライドステー
ジ６３の左右両側の第１架台４１箇所からそれぞれ立設
された一対の支持片７３０１と、これら支持片７３０１
上に前後に移動可能に支持された移動片７３０３と、図
中右側の支持片７３０１に取着されモータ等からなる駆
動手段７３０５で構成され、前記移動片７３０３は前記
駆動手段７３０５の駆動により、前方の進出位置と後方
の退避位置の間で前後方向に移動される。The support mechanism 73 includes a pair of support pieces 7301 which are erected from the first mount 41 on the left and right sides of the slide stage 63, and these support pieces 7301.
It is composed of a moving piece 7303 movably supported upward and backward, and a driving means 7305 attached to the supporting piece 7301 on the right side in the drawing, which is composed of a motor, etc., and the moving piece 7303 is driven by the driving means 7305. It is moved back and forth between the forward advance position and the rearward retracted position.
【００３１】前記上アライナー６７は、前記移動片７３
０３の下部に昇降可能に支持され、前記支持機構７３中
に設けられた不図示の昇降駆動手段（昇降手段に相当）
の駆動により昇降される。また、前記上アライナー６７
は、前記スライドステージ６３が前記第２移動位置にあ
り、しかも、前記移動片７３０３が前記進出位置にある
ときに、前記両下アライナー６５に臨む大きさで形成さ
れている。さらに、前記スライドステージ６３や前記移
動片７３０３が前記状態にあるときに、前記各下アライ
ナー６５に臨む前記上アライナー６７の下面箇所には、
図２に示すように吸着部６７０１がそれぞれ設けられ、
前記第２架台４３の内部に収容された不図示の吸引源の
作動により、前記吸着部６７０１による物品の吸着が行
われる。尚、前記上アライナー６７の吸引源は、前記下
アライナー６５の吸引源と共用することも可能であり、
さらに、前記移送ロボット５３の吸引源や前記各反転ス
テージ５７の吸引源と共用することも可能である。The upper aligner 67 has the moving piece 73.
An unillustrated lifting drive means (corresponding to the lifting means) which is supported in the lower part of 03 so as to be liftable and is provided in the support mechanism 73.
It is raised and lowered by driving. In addition, the upper aligner 67
Is formed to have a size facing both lower aligners 65 when the slide stage 63 is in the second movement position and the movement piece 7303 is in the advance position. Furthermore, when the slide stage 63 or the moving piece 7303 is in the above state, the lower surface portion of the upper aligner 67 facing the lower aligner 65 is
As shown in FIG. 2, suction parts 6701 are provided,
By the operation of a suction source (not shown) housed inside the second frame 43, the suction of the article by the suction section 6701 is performed. The suction source of the upper aligner 67 can be shared with the suction source of the lower aligner 65.
Further, the suction source of the transfer robot 53 and the suction source of each of the reversing stages 57 can be shared.
【００３２】前記供給ロボット６９は、図１に示すよう
に、前記スライドステージ６３の前後にそれぞれ設けら
れ、各供給ロボット６９は、前記スライドステージ６３
の前後の第２架台４３箇所にそれぞれ立設され左右方向
に延在するガイド部６９０１と、該ガイド部６９０１に
左右方向及び前後方向に移動可能に支持されたヘッド部
６９０３と、該ヘッド部６９０３にエアシリンダを介し
て昇降可能に支持された挟持部６９０５を備える。As shown in FIG. 1, the supply robots 69 are provided before and after the slide stage 63, and the supply robots 69 are provided with the slide stage 63.
Of the second pedestal 43 at the front and rear of the guide frame 6901 extending in the left-right direction, a head part 6903 supported by the guide part 6901 so as to be movable in the left-right direction and the front-back direction, and the head part 6903. Further, it is provided with a holding portion 6905 which is supported so as to be able to move up and down via an air cylinder.
【００３３】前記ヘッド部６９０３は、前記ガイド部６
９０１に収容された不図示の移動手段により前後方向に
移動され、また、前記ヘッド部６９０３は前記移動手段
により、前記中継ステージ５５と前記下アライナー６５
の間で左右方向に移動される。さらに、前記ヘッド部６
９０３は、前記第２架台４３の内部に収容された不図示
のエア源から供給されるエアで前記エアシリンダが作動
することにより、前記中継ステージ５５や前記下アライ
ナー６５に接近離間するように昇降される。The head portion 6903 has the guide portion 6
901 is moved in the front-rear direction by a moving means (not shown) housed in 901, and the head section 6903 is moved by the moving means in the relay stage 55 and the lower aligner 65.
It is moved to the left and right between. Further, the head portion 6
903 moves up and down so as to approach and separate from the relay stage 55 and the lower aligner 65 by operating the air cylinder with air supplied from an air source (not shown) housed inside the second mount 43. To be done.
【００３４】前記挟持部６９０５は、例えば、前記カラ
ーフィルタ基板１や前記ＴＦＴ基板３の周面を挟持する
一対のチャック（図示せず）と、これらチャックを開閉
駆動するエアシリンダ（図示せず）とで構成され、該エ
アシリンダに前記エア源からのエアが供給されること
で、前記チャックが開閉駆動される。このような構成の
前記各供給ロボット６９は、前記カラーフィルタ基板１
や前記ＴＦＴ基板３を、前記各中継ステージ５５から前
記各下アライナー６５へ、また、前記各下アライナー６
５から前記各中継ステージ５５へと移送する。The holding part 6905 is, for example, a pair of chucks (not shown) for holding the peripheral surfaces of the color filter substrate 1 and the TFT substrate 3, and an air cylinder (not shown) for driving the chucks to open and close. The chuck is opened and closed by supplying air from the air source to the air cylinder. Each of the supply robots 69 having the above-mentioned configuration is provided with the color filter substrate 1
And the TFT substrate 3 from the relay stages 55 to the lower aligners 65, and the lower aligners 6
5 to each of the relay stages 55.
【００３５】前記ＩＴＶカメラ７１は２つ設けられ、各
ＩＴＶカメラ７１は、前記支持機構７３上の移動片７１
０１の前部及び後部にそれぞれ支持されている。前記移
動片７１０１は、前記一対の支持片７３０１上に、前記
駆動手段７３０５とは別の駆動手段によって、前記移動
片７３０３とは独立して前後方向に移動可能に支持され
ている。前記各ＩＴＶカメラ７１は、前記スライドステ
ージ６３が前記第２移動位置にあり、しかも、前記移動
片７３０３が前記退避位置にあるときに、前記移動片７
１０１の移動により、前記移動片７３０３の前記進出位
置上の箇所に位置して前記下アライナー６５を撮影す
る。Two ITV cameras 71 are provided, and each ITV camera 71 has a moving piece 71 on the support mechanism 73.
01 is supported on the front part and the rear part, respectively. The moving piece 7101 is supported on the pair of support pieces 7301 by a driving means other than the driving means 7305 so as to be movable in the front-rear direction independently of the moving piece 7303. Each of the ITV cameras 71 has the moving piece 7 when the slide stage 63 is in the second moving position and the moving piece 7303 is in the retracted position.
By the movement of 101, the lower aligner 65 is photographed at a position on the advance position of the moving piece 7303.
【００３６】前記基板接合ユニット３７は、前記第２架
台４１の後部で、前記スライドステージ６３の前記第２
移動位置における後端の上方箇所に、前後方向に移動可
能に配設され、該基板接合ユニット３７の下部には紫外
線照射器７５が設けられている。前記紫外線照射器７５
は、前記スライドステージ６３の前記第２移動位置にお
いて、例えば前記第２架台４１に立設された不図示の支
持機構や該第２架台４１の内部に収容された不図示の移
動機構により、前記上アライナー６７や前記支持機構７
３と干渉することなく、前記スライドステージ６３の後
端の上方箇所と前記各下アライナー６５の上方箇所の間
で移動される。The substrate joining unit 37 is located at the rear of the second mount 41 and is located at the second stage of the slide stage 63.
An ultraviolet irradiator 75 is provided above the rear end of the moving position so as to be movable in the front-rear direction, and below the substrate joining unit 37. The ultraviolet irradiator 75
At the second movement position of the slide stage 63, for example, by a support mechanism (not shown) provided upright on the second pedestal 41 or a movement mechanism (not shown) housed inside the second pedestal 41, The upper aligner 67 and the support mechanism 7
3 is moved between the upper part of the rear end of the slide stage 63 and the upper part of each of the lower aligners 65 without interfering with 3.
【００３７】前記制御ユニット３９は、前記第３架台４
３と前記第４架台４５の一方又は両方に亘って収容され
例えばパソコンクラスのコンピュータからなる制御部
（図示せず）と、前記第４架台４５の前面に配設された
２台のモニタテレビ７７を備えている。前記制御部は、
前記各ＩＴＶカメラ７１で撮影した前記各下アライナー
６５の画像を画像処理する等して、前記ＴＦＴ基板３と
これに重ね合わせた前記カラーフィルタ基板１の位置ず
れ状態を検出し、その結果に応じて前記下アライナー６
５の駆動を制御すると共に、前記エレベータ部４９、引
き出し部５１、移送ロボット５３、反転ステージ５７、
スライドステージ６３、下アライナー６５、上アライナ
ー６７、供給ロボット６９、ＩＴＶカメラ７１、並びに
紫外線照射器７５を互いにリンクして動作するように制
御する。また、前記各ＩＴＶカメラ７１で撮影した画像
は、前記２台のモニタテレビ７７にそれぞれ映し出され
る。The control unit 39 includes the third mount 4
3 and the fourth pedestal 45, or a control unit (not shown) which is a computer of a PC class, for example, and is housed over both, and two monitor televisions 77 arranged on the front surface of the fourth pedestal 45. Is equipped with. The control unit is
The position shift state of the TFT substrate 3 and the color filter substrate 1 superposed on the TFT substrate 3 is detected by performing image processing on the image of each lower aligner 65 taken by each ITV camera 71, and according to the result. The lower aligner 6
5, the drive of the elevator 5 is controlled, and the elevator 49, the drawer 51, the transfer robot 53, the reversing stage 57,
The slide stage 63, the lower aligner 65, the upper aligner 67, the supply robot 69, the ITV camera 71, and the ultraviolet irradiator 75 are controlled so as to be linked and operated. The images taken by the ITV cameras 71 are displayed on the two monitor televisions 77, respectively.
【００３８】尚、図中７７はＮＧ基板排出用キャリアで
あり、前記第１架台４１の後方で前記引き出し部５１の
左側箇所に配設されている。このＮＧ基板排出用キャリ
ア７７には、寸法誤差等が所定の許容範囲を超えた前記
カラーフィルタ基板１や前記ＴＦＴ基板３の不良基板
が、前記移送ロボット５３により移載される。Incidentally, reference numeral 77 in the drawing denotes a carrier for discharging an NG substrate, which is arranged behind the first frame 41 and on the left side of the drawer portion 51. On the NG substrate discharge carrier 77, defective substrates such as the color filter substrate 1 and the TFT substrate 3 whose dimensional error exceeds a predetermined allowable range are transferred by the transfer robot 53.
【００３９】次に、前記アライメント装置３１の動作に
ついて図３を参照して説明する。尚、図３において７９
は前記カラーフィルタ基板１と前記ＴＦＴ基板３を重ね
合わせた後に位置合わせして接着した積層体を示す。ま
ず、前記引き出し部５１で前記マガジン９からキャリア
５，７を引き出し、引き出されたキャリア５，７の前記
カラーフィルタ基板１や前記ＴＦＴ基板３を、前記移送
ロボット５３で前記２つの反転ステージ５７や中継ステ
ージ５５にそれぞれ移載する。次に、前記各反転ステー
ジ５７の不図示の吸引源を駆動させて、２つのカラーフ
ィルタ基板１を前記各保持板５７０１により吸着保持
し、さらに、前記旋回駆動手段を駆動させて前記保持板
５７０１を垂直面内で１８０°旋回させ、前記各カラー
フィルタ基板１を前記各中継ステージ５５の各ＴＦＴ基
板３上に重ね合わせる。これにより、前記面１０１と面
３０１とが合わさって、それら面１０１，３０１が共に
外部に露出しない状態となる。Next, the operation of the alignment device 31 will be described with reference to FIG. Incidentally, in FIG.
Indicates a laminated body in which the color filter substrate 1 and the TFT substrate 3 are superposed and then aligned and bonded. First, the carriers 5, 7 are pulled out from the magazine 9 by the pull-out section 51, and the color filter substrate 1 and the TFT substrate 3 of the pulled-out carriers 5, 7 are transferred by the transfer robot 53 to the two inversion stages 57, Each is transferred to the relay stage 55. Next, a suction source (not shown) of each reversing stage 57 is driven to suck and hold the two color filter substrates 1 by each holding plate 5701, and further, the turning drive means is driven to hold the holding plate 5701. Is rotated 180 ° in a vertical plane, and each color filter substrate 1 is superposed on each TFT substrate 3 of each relay stage 55. As a result, the surface 101 and the surface 301 are brought together so that the surfaces 101 and 301 are not exposed to the outside.
【００４０】続いて、前記ステージ駆動手段を駆動させ
て前記スライドステージ６３を前記第１移動位置に移動
させる。そして、前記各中継ステージ５５上の前記ＴＦ
Ｔ基板３とこの上に重ねた前記カラーフィルタ基板１の
周面を、前記各供給ロボット６９の挟持部６９０５で挟
持して、該カラーフィルタ基板１とＴＦＴ基板３を一体
的に前記スライドステージ６３上の前記各下アライナー
６５の吸着部６５０５に移送し、該各下アライナー６５
の吸引源を駆動させて該吸着部６５０５で前記ＴＦＴ基
板３を吸着保持する。Subsequently, the stage driving means is driven to move the slide stage 63 to the first moving position. Then, the TF on each of the relay stages 55
The T substrate 3 and the peripheral surface of the color filter substrate 1 superposed on the T substrate 3 are clamped by the clamping unit 6905 of each of the supply robots 69, and the color filter substrate 1 and the TFT substrate 3 are integrated into the slide stage 63. The lower aligners 65 are transferred to the suction portions 6505 of the upper lower aligners 65.
The suction source is driven to suck and hold the TFT substrate 3 by the suction portion 6505.
【００４１】次に、前記ステージ駆動手段を駆動させて
前記スライドステージ６３を前記第２移動位置に移動さ
せると共に、前記移動片７１０１を前記移動片７３０３
の前記進出位置の上方箇所に移動させ、前記各ＩＴＶカ
メラ７１により前記各下アライナー６５の前記カラーフ
ィルタ基板１及び前記ＴＦＴ基板３を撮影する。そし
て、前記各ＩＴＶカメラ７１の撮影画像を基に前記制御
部で、前記各下アライナー６５の前記ＴＦＴ基板３とこ
れに重ね合わせた前記カラーフィルタ基板１の位置ずれ
状態を検出し、各下アライナー６５の前記ＸＹテーブル
６５０１や旋回テーブル６５０３の駆動量を算出する。Next, the stage driving means is driven to move the slide stage 63 to the second moving position, and the moving piece 7101 is moved to the moving piece 7303.
Then, the ITV camera 71 photographs the color filter substrate 1 and the TFT substrate 3 of each lower aligner 65. Then, based on the imaged image of each ITV camera 71, the control unit detects the positional deviation state of the TFT substrate 3 of each lower aligner 65 and the color filter substrate 1 superposed thereon, and detects each lower aligner. The drive amounts of the XY table 6501 and the turning table 6503 of 65 are calculated.
【００４２】続いて、前記移動片７１０１を前記移動片
７３０３の前記退避位置の上方箇所に移動させると共
に、該移動片７３０３を前記駆動手段７３０５の駆動に
より前記進出位置に移動させ、さらに、前記昇降駆動手
段を駆動させて前記上アライナー６７を下動させ、該上
アライナー６７を前記各下アライナー６５上の前記カラ
ーフィルタ基板１に当接させる。前記上アライナー６７
が前記各カラーフィルタ基板１に当接したならば、該上
アライナー６７の吸引源を駆動させてそれら各カラーフ
ィルタ基板１を前記各吸着部６７０１で吸着保持する。
そして、さらなる前記上アライナー６７の下動により前
記各下アライナー６５の前記カラーフィルタ基板１から
前記ＴＦＴ基板３に圧力を加えつつ、該各下アライナー
６５の前記前記ＸＹテーブル６５０１や旋回テーブル６
５０３を駆動させて、前記カラーフィルタ基板１と前記
ＴＦＴ基板３の位置合わせを行う。Subsequently, the moving piece 7101 is moved to a position above the retracted position of the moving piece 7303, the moving piece 7303 is moved to the advanced position by the driving of the driving means 7305, and further the elevating / lowering operation is performed. The driving means is driven to move the upper aligner 67 downward, and the upper aligner 67 is brought into contact with the color filter substrate 1 on each of the lower aligners 65. The upper aligner 67
When each of the color filter substrates 1 comes into contact with the color filter substrate 1, the suction source of the upper aligner 67 is driven to suck and hold the color filter substrate 1 by the suction portion 6701.
Then, by further downward movement of the upper aligner 67, pressure is applied to the TFT substrate 3 from the color filter substrate 1 of each lower aligner 65, while the XY table 6501 and the turning table 6 of each lower aligner 65 are applied.
The color filter substrate 1 and the TFT substrate 3 are aligned by driving 503.
【００４３】前記各下アライナー６５の前記カラーフィ
ルタ基板１と前記ＴＦＴ基板３の位置合わせが済んだな
らば、前記基板接合ユニット３７の移動手段を駆動させ
て前記紫外線照射器７５を前記各下アライナー６５の上
方箇所に順次移動させ、それら各下アライナー６５に前
記紫外線照射器７５から紫外線を照射して、前記接着剤
３０３により前記カラーフィルタ基板１と前記ＴＦＴ基
板３を接着する。接着した前記カラーフィルタ基板１と
前記ＴＦＴ基板３の積層体７９は、前記スライドステー
ジ６３を前記第１移動位置に移動させた後に、前記各供
給ロボット６９により前記各下アライナー６５から前記
各中継ステージ５５に移送し、さらに、前記引き出し部
５１の前記各マガジン６１から引き出された前記キャリ
ア５９に、前記移送ロボット５３によって前記各中継ス
テージ５５から移載する。After the alignment of the color filter substrate 1 and the TFT substrate 3 of each lower aligner 65 is completed, the moving means of the substrate joining unit 37 is driven to move the ultraviolet irradiator 75 to each lower aligner 75. The lower aligners 65 are sequentially moved to a position above 65, and ultraviolet rays are irradiated to the lower aligners 65 from the ultraviolet ray irradiator 75 to bond the color filter substrate 1 and the TFT substrate 3 with the adhesive 303. The laminated body 79 of the color filter substrate 1 and the TFT substrate 3 adhered together is moved from the lower aligner 65 to the relay stage by the supply robots 69 after the slide stage 63 is moved to the first movement position. Then, the transfer robot 53 transfers the transfer robot 55 to the carrier 59, and the carrier 59 is transferred from the magazines 61 of the drawer 51 to the carrier 59.
【００４４】尚、前記ＩＴＶカメラ７１の撮影画像か
ら、前記制御部により寸法誤差等が所定の許容範囲を超
えていると判別された前記カラーフィルタ基板１や前記
ＴＦＴ基板３の不良基板は、前記紫外線照射器７５によ
る紫外線照射の前或は後に、前記供給ロボット６９及び
移送ロボット５３によって、前記下アライナー６５から
前記ＮＧ基板排出用キャリア７７に移載される。The defective substrates such as the color filter substrate 1 and the TFT substrate 3 which are determined by the control unit from the image captured by the ITV camera 71 to have a dimensional error or the like exceeding a predetermined allowable range are Before or after the ultraviolet irradiation by the ultraviolet irradiator 75, it is transferred from the lower aligner 65 to the NG substrate discharge carrier 77 by the supply robot 69 and the transfer robot 53.
【００４５】以上に説明した本実施例の位置合わせ動作
においては、前記カラーフィルタ基板１を前記反転ステ
ージ５７で上下に反転して、前記中継ステージ５５の前
記ＴＦＴ基板３に、前記面１０１と面３０１が接するよ
うに重ね合わせ、その重ね合わせた前記カラーフィルタ
基板１と前記ＴＦＴ基板３の周面を前記供給ロボット６
９の挟持部６５０５で挟持して前記下アライナー６５に
移送供給するようにした。このため、従来のように、前
記カラーフィルタ基板１と前記ＴＦＴ基板３を前記上下
のアライナー６７，６５にそれぞれ個別に供給する場合
に比べて、前記位置合わせユニット３５へのカラーフィ
ルタ基板１やＴＦＴ基板３の受け渡し機構を簡略化で
き、従って、受け渡し機構が入り込むのに必要な前記位
置合わせユニット３３のスペースが少なくて済む分だ
け、該位置合わせユニット３３を小型化でき、ひいては
前記アライメント装置３１を小型化できる。In the alignment operation of the present embodiment described above, the color filter substrate 1 is vertically inverted by the inversion stage 57 and the TFT substrate 3 of the relay stage 55 is provided with the surface 101 and the surface. The color filter substrate 1 and the TFT substrate 3 are overlapped with each other so that they are in contact with each other.
It was sandwiched by the sandwiching portion 6505 of 9 and transferred to the lower aligner 65. Therefore, as compared with the conventional case where the color filter substrate 1 and the TFT substrate 3 are individually supplied to the upper and lower aligners 67 and 65, respectively, the color filter substrate 1 and the TFT to the alignment unit 35 are provided. The delivery mechanism of the substrate 3 can be simplified, and therefore, the space required for the alignment unit 33 to fit in the delivery mechanism can be reduced, so that the alignment unit 33 can be downsized, and thus the alignment device 31 can be installed. Can be miniaturized.
【００４６】また、前記カラーフィルタ基板１を反転し
て前記上アライナー６７に供給する必要がないので、従
来のように前記スライドステージ６３に中継用テーブル
を設けたり、前記カラーフィルタ基板１を上下に反転さ
せるためのスペースを前記位置合わせユニット３３内に
確保する必要がなく、従って、該位置合わせユニット３
３の大型化を避け、前記アライメント装置３１を小型化
できる。さらに、前記カラーフィルタ基板１を反転して
前記上アライナー６７に供給する必要がないことから、
例えば前記上アライナー６７に前記カラーフィルタ基板
１の反転機構を付設せずに済み、従って、該上アライナ
ー６７の内部スペースを広げると共に剛性を確保するた
め上アライナー６７を大きくするといった前記位置合わ
せユニット３３の大型化を招く設計変更を不要にでき
る。Since it is not necessary to invert the color filter substrate 1 and supply it to the upper aligner 67, a relay table is provided on the slide stage 63 or the color filter substrate 1 is moved up and down as in the conventional case. It is not necessary to secure a space for reversing in the alignment unit 33, and thus the alignment unit 3
The alignment device 31 can be miniaturized while avoiding the increase in size of No. 3 described above. Furthermore, since it is not necessary to invert the color filter substrate 1 to supply it to the upper aligner 67,
For example, it is not necessary to attach a reversing mechanism of the color filter substrate 1 to the upper aligner 67. Therefore, the alignment unit 33 that enlarges the inner space of the upper aligner 67 and enlarges the upper aligner 67 to secure rigidity. It is possible to eliminate the need for design changes that lead to an increase in size.
【００４７】また、前記カラーフィルタ基板１と前記Ｔ
ＦＴ基板３を重ね合わせてから前記位置合わせユニット
３３に供給するため、前記面１０１と面３０１とが合わ
さって、それら面１０１，３０１が共に外部に露出せ
ず、従って、前記供給ロボット６９によるそれらカラー
フィルタ基板１とＴＦＴ基板３の取り扱いを容易にでき
る。Further, the color filter substrate 1 and the T
Since the FT substrates 3 are superposed on each other and supplied to the alignment unit 33, the surfaces 101 and 301 are combined so that the surfaces 101 and 301 are not exposed to the outside, and therefore, the surfaces of the surfaces 101 and 301 are not exposed by the supply robot 69. The color filter substrate 1 and the TFT substrate 3 can be easily handled.
【００４８】尚、本発明方法を実施するに当たり、前記
カラーフィルタ基板１を前記ＴＦＴ基板３に重ね合わせ
る装置部分の構成は、本実施例で示した前記基板供給ユ
ニット３３の構成に限定されない。例えば、前記カラー
フィルタ基板１と前記ＴＦＴ基板３の重ね合わせを前記
キャリア７上で行う構成としたり、前記キャリア５に前
記カラーフィルタ基板１を前記面１０１を下に向けた状
態で載置しておいて、前記ＴＦＴ基板３を前記中継ステ
ージ５５に移載した後に前記カラーフィルタ基板１を前
記中継ステージ５５に移載し前記ＴＦＴ基板３に重ね合
わせる構成とする等任意である。In carrying out the method of the present invention, the structure of the device portion for superposing the color filter substrate 1 on the TFT substrate 3 is not limited to the structure of the substrate supply unit 33 shown in this embodiment. For example, the color filter substrate 1 and the TFT substrate 3 may be superposed on each other on the carrier 7, or the color filter substrate 1 may be placed on the carrier 5 with the surface 101 facing downward. The color filter substrate 1 may be transferred to the relay stage 55 after being transferred to the relay stage 55, and may be superposed on the TFT substrate 3.
【００４９】同様に、本発明方法を実施するに当たり、
前記ＴＦＴ基板３とこれに重ね合わせた前記カラーフィ
ルタ基板１の位置を合わせる装置部分の構成は、本実施
例で示した前記位置合わせユニット３５の構成に限定さ
れず、例えば、前記下アライナー６５に昇降手段及び昇
降駆動手段を設け、前記上アライナー６７を昇降不能に
構成する等任意である。さらに、前記カラーフィルタ基
板１、ＴＦＴ基板３、並びに積層体７９を保持する部分
の構成は、本実施例で示した前記吸着部５３０５、保持
板５７０１、吸着部６５０５，６７０１、並びに挟持部
６９０５の構成に限定されず、例えば把持部とする等任
意である。Similarly, in carrying out the method of the present invention,
The configuration of the device portion for aligning the positions of the TFT substrate 3 and the color filter substrate 1 superposed on the TFT substrate 3 is not limited to the configuration of the alignment unit 35 shown in the present embodiment. It is optional such that the elevating means and the elevating drive means are provided and the upper aligner 67 cannot be elevated. Further, the structure of the portion for holding the color filter substrate 1, the TFT substrate 3, and the laminated body 79 is the same as that of the suction portion 5305, the holding plate 5701, the suction portions 6505, 6701, and the holding portion 6905 shown in this embodiment. The configuration is not limited, and it may be an arbitrary unit such as a grip.
【００５０】また、本実施例では、前記カラーフィルタ
基板１とＴＦＴ基板３の重ね合わせ作業及び位置合わせ
作業のタクトタイムを向上させるため、前記マガジン
９，６１、引き出し部５１、中継ステージ５５、反転ス
テージ５７、下アライナー６５、供給ロボット６９、並
びにＩＴＶカメラ７１をそれぞれ２組設けたが、それら
を１組にしたり３組以上設けてもよく、それらの数に応
じて前記紫外線照射器７５の数を増やしてもよい。さら
に、前記エレベータ部４９や前記引き出し部５１は、前
記カラーフィルタ基板１や前記ＴＦＴ基板３の前記基板
供給ユニット３３への供給形態により適宜変更或は省略
可能である。また、本実施例では、液晶画面を構成する
カラーフィルタ基板１とＴＦＴ基板３を重ね合わせる場
合を例に取って説明したが、本発明は、カラーフィルタ
基板１やＴＦＴ基板３に限らず、種々の板状部材どうし
を重ね合わせ加圧しながら位置合わせする場合に広く適
用可能であり、その場合の位置合わせ装置において、本
実施例で示した前記紫外線照射器７５は、その他の接着
手段に変更或は省略可能である。Further, in the present embodiment, in order to improve the takt time of the overlaying work and the aligning work of the color filter substrate 1 and the TFT substrate 3, the magazines 9, 61, the drawer portion 51, the relay stage 55, and the reversing stage are reversed. The stage 57, the lower aligner 65, the supply robot 69, and the ITV camera 71 are provided in two sets, respectively, but they may be provided in one set or in three or more sets, and the number of the ultraviolet irradiators 75 may be set according to the number of them. May be increased. Further, the elevator portion 49 and the lead portion 51 can be appropriately changed or omitted depending on the supply form of the color filter substrate 1 and the TFT substrate 3 to the substrate supply unit 33. Further, in the present embodiment, the case where the color filter substrate 1 and the TFT substrate 3 constituting the liquid crystal screen are overlapped with each other has been described as an example, but the present invention is not limited to the color filter substrate 1 and the TFT substrate 3, and various types are possible. It is widely applicable to the case where the plate-like members of the above are superposed and aligned with each other while applying pressure. In the case of the aligning device in that case, the ultraviolet irradiator 75 shown in the present embodiment is changed to another bonding means. Can be omitted.
【００５１】[0051]
【発明の効果】以上説明したように本発明によれば、第
１板状部材と第２板状部材を位置合わせ部に供給し、前
記位置合わせ部において、前記第１板状部材と前記第２
板状部材を重ね合わせ加圧しながら位置合わせするに際
して、前記第１板状部材に前記第２板状部材を重ね合わ
せた状態で前記位置合わせ部に供給するようにした。ま
た、本発明によれば、第１板状部材を保持する第１保持
手段と、前記第１板状部材の上方で第２板状部材を保持
する第２保持手段と、前記第１保持手段と前記第２保持
手段の少なくとも一方を、水平面内で直交する２方向に
且つ水平面内で旋回可能に移動させる移動手段と、前記
第１保持手段と前記第２保持手段を離間接近する方向に
移動させる昇降手段とを備え、前記第１保持手段及び前
記第２保持手段により、前記第１板状部材と前記第２板
状部材を重ね合わせて加圧し、前記移動手段による移動
と旋回により前記第１板状部材と前記第２板状部材の位
置合わせを行う位置合わせ装置において、前記第１板状
部材に前記第２板状部材を重ね合わせる重ね合わせ手段
と、前記重ね合わせ手段で重ね合わせた前記第１板状部
材と前記第２板状部材を重ね合わせた状態で前記第１保
持手段に供給する供給手段を設ける構成とした。このた
め、第１板状部材と第２板状部材を重ね合わせ加圧しな
がら位置合わせするに当たり、それら両板状部材の位置
合わせ部への受け渡し機構を簡略化して位置合わせ部の
スペースを小型化でき、両板状部材の位置を精度よく合
わせられると共に、位置合わせ部での各板状部材の取り
扱いを容易にできる。As described above, according to the present invention, the first plate-shaped member and the second plate-shaped member are supplied to the alignment section, and at the alignment section, the first plate-shaped member and the second plate-shaped member are provided. Two
When the plate-shaped members are superposed and aligned with each other while being aligned, the second plate-shaped member is superposed on the first plate-shaped member and supplied to the alignment section. Further, according to the present invention, first holding means for holding the first plate-shaped member, second holding means for holding the second plate-shaped member above the first plate-shaped member, and the first holding means. And a moving means for moving at least one of the second holding means in two directions orthogonal to each other in a horizontal plane and pivotally movable in the horizontal plane, and a direction for moving the first holding means and the second holding means away from each other. Lifting and lowering means for causing the first and second holding means to overlap and press the first plate-shaped member and the second plate-shaped member, and the first and second plate-shaped members are moved and swung by the moving means to move the first plate-shaped member and the second plate-shaped member. In a positioning device for positioning a first plate-shaped member and the second plate-shaped member, the first plate-shaped member and the second plate-shaped member are superposed by superposing means and the superposing means. The first plate member and the second plate And configured to provide a supply means for supplying to said first holding means in a state of superposed members. Therefore, when the first plate-shaped member and the second plate-shaped member are superposed and aligned with each other while being aligned, the mechanism for delivering the both plate-shaped members to the alignment part is simplified to reduce the space of the alignment part. Therefore, the positions of both plate-shaped members can be accurately aligned, and the plate-shaped members can be easily handled at the alignment portion.
【図１】本発明の一実施例に係るアライメント装置の斜
視図である。FIG. 1 is a perspective view of an alignment apparatus according to an embodiment of the present invention.
【図２】図１に示すアライメント装置の要部の模式図で
ある。FIG. 2 is a schematic diagram of a main part of the alignment apparatus shown in FIG.
【図３】図１に示すアライメント装置によるカラーフィ
ルタ基板とＴＦＴ基板の重ね合わせ及び位置合わせの工
程を示す説明図である。3A and 3B are explanatory views showing a process of superposing and aligning a color filter substrate and a TFT substrate by the alignment apparatus shown in FIG.
【図４】カラーフィルタ基板やＴＦＴ基板が載置された
キャリアと該キャリアが複数収容されるマガジンの斜視
図である。FIG. 4 is a perspective view of a carrier on which a color filter substrate or a TFT substrate is placed and a magazine in which a plurality of the carriers are accommodated.
【図５】従来のアライメント装置における位置合わせ部
の構成の一例を示す模式図である。FIG. 5 is a schematic diagram showing an example of a configuration of a position alignment section in a conventional alignment apparatus.
【図６】図４のＴＦＴ基板の一部截断正面図である。6 is a partially cutaway front view of the TFT substrate of FIG.
【図７】従来のアライメント装置における位置合わせ部
の構成の他の例を示す模式図である。FIG. 7 is a schematic diagram showing another example of the configuration of the alignment unit in the conventional alignment apparatus.
１ カラーフィルタ基板（第２板状部材） ３ ＴＦＴ基板（第１板状部材） ５ キャリア（第２キャリア） ７ キャリア（第１キャリア） ３１ アライメント装置（位置合わせ装置） ３５ 位置合わせユニット（位置合わせ部） ５３ 移送ロボット（第１移載手段、第２移載手段） ５５ 中継ステージ（重ね合わせ手段） ５７ 反転ステージ（第２移載手段、重ね合わせ手段） ６３ スライドステージ ６５ 下アライナー（第１保持手段） ６５０１ ＸＹテーブル（移動手段） ６５０３ 旋回テーブル（移動手段） ６７ 上アライナー（第２保持手段） 1 Color Filter Substrate (Second Plate Member) 3 TFT Substrate (First Plate Member) 5 Carrier (Second Carrier) 7 Carrier (First Carrier) 31 Alignment Device (Alignment Device) 35 Alignment Unit (Alignment) Part) 53 transfer robot (first transfer means, second transfer means) 55 relay stage (superposition means) 57 reversal stage (second transfer means, superposition means) 63 slide stage 65 lower aligner (first holding) Means) 6501 XY table (moving means) 6503 Turning table (moving means) 67 Upper aligner (second holding means)
Claims (8)
せ部に供給し、 前記位置合わせ部において、前記第１板状部材と前記第
２板状部材を重ね合わせ加圧しながら位置合わせするに
際して、 前記第１板状部材に前記第２板状部材を重ね合わせた状
態で前記位置合わせ部に供給するようにした、 ことを特徴とする板状部材の位置合わせ方法。1. A first plate-shaped member and a second plate-shaped member are supplied to an alignment section, and in the alignment section, the first plate-shaped member and the second plate-shaped member are overlapped and pressed while being positioned. When aligning, the second plate-shaped member is superposed on the first plate-shaped member and is supplied to the alignment unit, and the plate-shaped member is aligned.
記第１板状部材に重ね合わされる請求項１記載の板状部
材の位置合わせ方法。2. The method for aligning a plate-shaped member according to claim 1, wherein the second plate-shaped member is turned upside down and superposed on the first plate-shaped member.
ＴＦＴ基板であり、前記第２板状部材は液晶画面を構成
するカラーフィルタ基板である請求項１又は２記載の板
状部材の位置合わせ方法。3. The plate-shaped member according to claim 1, wherein the first plate-shaped member is a TFT substrate forming a liquid crystal screen, and the second plate-shaped member is a color filter substrate forming a liquid crystal screen. Alignment method.
と、 前記第１板状部材の上方で第２板状部材を保持する第２
保持手段と、 前記第１保持手段と前記第２保持手段の少なくとも一方
を、水平面内で直交する２方向に且つ水平面内で旋回可
能に移動させる移動手段と、 前記第１保持手段と前記第２保持手段を離間接近する方
向に移動させる昇降手段とを備え、 前記第１保持手段及び前記第２保持手段により、前記第
１板状部材と前記第２板状部材を重ね合わせて加圧し、
前記移動手段による移動と旋回により前記第１板状部材
と前記第２板状部材の位置合わせを行う位置合わせ装置
において、 前記第１板状部材に前記第２板状部材を重ね合わせる重
ね合わせ手段と、 前記重ね合わせ手段で重ね合わせた前記第１板状部材と
前記第２板状部材を重ね合わせた状態で前記第１保持手
段に供給する供給手段を設けた、 ことを特徴とする板状部材の位置合わせ装置。4. A first holding means for holding a first plate-shaped member, and a second holding means for holding a second plate-shaped member above the first plate-shaped member.
Holding means, moving means for moving at least one of the first holding means and the second holding means so as to be rotatable in two directions orthogonal to each other in a horizontal plane and in the horizontal plane, the first holding means and the second Lifting and lowering means for moving the holding means in a direction of approaching and separating, the first holding means and the second holding means superpose and press the first plate-shaped member and the second plate-shaped member,
An aligning device for aligning the first plate-shaped member and the second plate-shaped member by moving and turning by the moving unit, a superposing unit that superimposes the second plate-shaped member on the first plate-shaped member. And a supply means for supplying the first plate-shaped member and the second plate-shaped member, which are overlapped by the overlapping means, to the first holding means in a state of being overlapped with each other. Positioning device for parts.
材と前記第２板状部材が重ね合わされる中継ステージ
と、前記第１板状部材が載置された第１キャリアから前
記中継ステージに前記第１板状部材を移載する第１移載
手段と、前記第２板状部材が載置された第２キャリアか
ら前記中継ステージの前記第１板状部材上に前記第２板
状部材を移載する第２移載手段とで構成されている請求
項４記載の板状部材の位置合わせ装置。5. The relay unit includes a relay stage on which the first plate-shaped member and the second plate-shaped member are stacked, and a relay stage from a first carrier on which the first plate-shaped member is placed. First transfer means for transferring the first plate-shaped member onto the first plate-shaped member of the relay stage from the second carrier on which the second plate-shaped member is mounted. The plate-shaped member alignment device according to claim 4, comprising a second transfer means for transferring the member.
と前記中継ステージの間で前記第２板状部材の前記第１
板状部材に対する重ね合わせ面を上下に反転させる反転
手段を含んで構成されている請求項５記載の板状部材の
位置合わせ装置。6. The second transfer means comprises the first plate of the second plate-shaped member between the second carrier and the relay stage.
The positioning device for a plate-shaped member according to claim 5, further comprising a reversing means for vertically reversing an overlapping surface with respect to the plate-shaped member.
テージと、該スライドステージを水平面内で第１移動位
置と第２移動位置の間で移動させるステージ駆動手段と
をさらに備え、前記第２保持手段は前記スライドステー
ジの第１移動位置における前記第１保持手段の上方箇所
に配設され、前記供給手段は、前記スライドステージの
前記第２移動位置における前記第１保持手段に、前記第
１板状部材及び前記第２板状部材を重ね合わせた状態で
供給する請求項４、５又は６記載の板状部材の位置合わ
せ装置。7. A slide stage for supporting the first holding means, and stage driving means for moving the slide stage between a first moving position and a second moving position in a horizontal plane, the second holding means. The means is disposed at a position above the first holding means in the first moving position of the slide stage, and the supplying means includes the first plate in the first holding means at the second moving position of the slide stage. The plate-shaped member alignment device according to claim 4, 5 or 6, wherein the plate-shaped member and the second plate-shaped member are supplied in a state of being superposed.
ＴＦＴ基板であり、前記第２板状部材は液晶画面を構成
するカラーフィルタ基板である請求項４、５、６又は７
記載の板状部材の位置合わせ装置。8. The first plate-shaped member is a TFT substrate that constitutes a liquid crystal screen, and the second plate-shaped member is a color filter substrate that constitutes a liquid crystal screen.
Positioning device for the plate-shaped member described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP03652994A JP3344060B2 (en) | 1994-02-08 | 1994-02-08 | Method and apparatus for aligning plate member and method for manufacturing liquid crystal screen using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP03652994A JP3344060B2 (en) | 1994-02-08 | 1994-02-08 | Method and apparatus for aligning plate member and method for manufacturing liquid crystal screen using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07215566A true JPH07215566A (en) | 1995-08-15 |
| JP3344060B2 JP3344060B2 (en) | 2002-11-11 |
Family
ID=12472328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP03652994A Expired - Fee Related JP3344060B2 (en) | 1994-02-08 | 1994-02-08 | Method and apparatus for aligning plate member and method for manufacturing liquid crystal screen using the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3344060B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7096911B2 (en) | 2000-11-30 | 2006-08-29 | Fujitsu Limited | Apparatus for manufacturing bonded substrate |
| JP2006227181A (en) * | 2005-02-16 | 2006-08-31 | Shibaura Mechatronics Corp | Device and method for inverting substrate, and device for manufacturing substrate |
| JP2008122654A (en) * | 2006-11-13 | 2008-05-29 | Toshiba Matsushita Display Technology Co Ltd | Assembly system |
| CN110514412A (en) * | 2019-10-12 | 2019-11-29 | 奥普镀膜技术（广州）有限公司 | Optical filter reflection measurement and turn-over mechanism |
| JP2020161509A (en) * | 2018-12-07 | 2020-10-01 | ▲東▼泰高科装▲備▼科技有限公司 | Wafer removal and separation device and method |
-
1994
- 1994-02-08 JP JP03652994A patent/JP3344060B2/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7096911B2 (en) | 2000-11-30 | 2006-08-29 | Fujitsu Limited | Apparatus for manufacturing bonded substrate |
| US7300532B2 (en) | 2000-11-30 | 2007-11-27 | Fujitsu Limited | Method for manufacturing bonded substrate |
| US7513966B2 (en) | 2000-11-30 | 2009-04-07 | Fujitsu Limited | Apparatus for manufacturing bonded substrate |
| US7621310B2 (en) | 2000-11-30 | 2009-11-24 | Fujitsu Limited | Apparatus for manufacturing bonded substrate |
| US7681522B2 (en) | 2000-11-30 | 2010-03-23 | Fujitsu Limited | Apparatus for manufacturing bonded substrate |
| US7703494B2 (en) | 2000-11-30 | 2010-04-27 | Fujitsu Limited | Apparatus for manufacturing bonded substrate |
| US7819165B2 (en) | 2000-11-30 | 2010-10-26 | Fujitsu Limited | Apparatus for manufacturing bonded substrate |
| US8128768B2 (en) | 2000-11-30 | 2012-03-06 | Fujitsu Limited | Apparatus for manufacturing bonded substrate |
| JP2006227181A (en) * | 2005-02-16 | 2006-08-31 | Shibaura Mechatronics Corp | Device and method for inverting substrate, and device for manufacturing substrate |
| JP2008122654A (en) * | 2006-11-13 | 2008-05-29 | Toshiba Matsushita Display Technology Co Ltd | Assembly system |
| JP2020161509A (en) * | 2018-12-07 | 2020-10-01 | ▲東▼泰高科装▲備▼科技有限公司 | Wafer removal and separation device and method |
| CN110514412A (en) * | 2019-10-12 | 2019-11-29 | 奥普镀膜技术（广州）有限公司 | Optical filter reflection measurement and turn-over mechanism |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3344060B2 (en) | 2002-11-11 |
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