JPH07197205A - Austenitic stainless steel sheet and its production - Google Patents
Austenitic stainless steel sheet and its productionInfo
- Publication number
- JPH07197205A JPH07197205A JP35101693A JP35101693A JPH07197205A JP H07197205 A JPH07197205 A JP H07197205A JP 35101693 A JP35101693 A JP 35101693A JP 35101693 A JP35101693 A JP 35101693A JP H07197205 A JPH07197205 A JP H07197205A
- Authority
- JP
- Japan
- Prior art keywords
- stainless steel
- amount
- less
- austenitic stainless
- steel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Heat Treatment Of Steel (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は真空装置、真空機器ある
いは、高純度ガス雰囲気下の使用に供するステンレス鋼
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum apparatus, a vacuum apparatus, or stainless steel used in a high-purity gas atmosphere.
【０００２】[0002]
【従来の技術】半導体製造装置や粒子加速器等の高真
空、あるいは高純度ガス雰囲気を必要とする装置の容
器、配管、バルブ及び各種部品には一般的にＳＵＳ３０
４鋼やＳＵＳ３１６鋼と言ったステンレス鋼が使用され
ている。これらのステンレス鋼は銹の発生が少なく、高
真空や高純度雰囲気を作る上で好ましい材料である。し
かしながら、これらの鋼の表面が大気に晒される場合は
大気中の種々のガス分子の吸着がおこり、保守点検、試
料の交換等の後に吸着ガスを除くためのベーキング処理
が必要となる。ベーキング処理は装置を高温に保持して
行うが、その時間は時には数百時間にも及び、装置の稼
働率や経済性を落としている。2. Description of the Related Art Generally, SUS30 is used for containers, pipes, valves, and various parts of semiconductor manufacturing equipment, particle accelerators and other equipment that require a high vacuum or high purity gas atmosphere.
Stainless steel such as 4 steel and SUS316 steel is used. These stainless steels are less prone to rust and are preferable materials for creating a high vacuum and high purity atmosphere. However, when the surface of these steels is exposed to the atmosphere, various gas molecules in the atmosphere are adsorbed, and a baking process is required to remove the adsorbed gas after maintenance and inspection, replacement of the sample, and the like. The baking process is performed by keeping the apparatus at a high temperature, but the time sometimes reaches hundreds of hours, which lowers the operation rate and economical efficiency of the apparatus.
【０００３】これに対して、特開昭６２−３９２３４号
公報、特開平２−５７６６７号公報、特開平４−２６３
０１１号公報には鋼にＢとＮを多量に含有させて鋼の表
面に窒化ボロンを析出させ、ガス吸着を減少させる技術
が開示されている。On the other hand, JP-A-62-39234, JP-A-2-57667, and JP-A-4-263.
Japanese Patent Laid-Open No. 011 discloses a technique in which a large amount of B and N is contained in steel to precipitate boron nitride on the surface of the steel to reduce gas adsorption.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、上記の
発明はいずれも高度の塑性加工をその製造工程に含まな
い場合における製品のガス吸着性の減少を目的としてお
り、例えばベローズやダイヤフラムバルブあるいはブラ
ウン管の電子銃の部品等の薄板に応用する場合の解決方
法とはなっていない。すなわち、ＢとＮを鋼中に多量に
含有させると鋼中に多量の介在物が生成し、塑性加工に
より表面疵等の微細な疵が発生しガスの吸着点が増加す
るため、薄板製品にした場合のガス吸着量の減少は必ず
しも十分ではない。However, all of the above inventions are aimed at reducing the gas adsorbability of the product when high-level plastic working is not included in the manufacturing process thereof. For example, bellows, diaphragm valves or Braun tubes are used. It is not a solution when applied to thin plates such as electron gun parts. That is, when B and N are contained in the steel in a large amount, a large amount of inclusions are generated in the steel, and microscopic flaws such as surface flaws are generated by plastic working and the gas adsorption point is increased, so that the thin plate product In that case, the reduction of the gas adsorption amount is not always sufficient.
【０００５】[0005]
【課題を解決するための手段】本発明者らは上記のよう
な従来技術の課題の解決のため、オーステナイト系ステ
ンレス鋼薄板において、ＢＮの析出量に対する非金属介
在物量及びＢ量及びＮ量の検討を行ない本発明を完成し
た。In order to solve the above-mentioned problems of the prior art, the present inventors have investigated the amount of nonmetallic inclusions and the amount of B and N with respect to the amount of BN precipitation in an austenitic stainless steel sheet. The present invention was completed through examination.
【０００６】第一の発明は重量％で Ｂ：０．００３５〜０．０１５％、Ｎ：０．０８〜０．
１５％ Ｃａ＋Ｍｇ：０．００１〜０．０１％ を含有し、不可避的不純物を以下に示す量に制限した、
表面へのガスの吸着量の少ないことを特徴とするオース
テナイト系ステンれス鋼薄板である。Ｓ：０．０２％以
下、Ｐ：０．０４％以下、Ａｌ：０．０３％以下The first invention is, by weight%, B: 0.0035 to 0.015%, N: 0.08 to 0.
15% Ca + Mg: 0.001 to 0.01% was contained, and inevitable impurities were limited to the amounts shown below.
It is an austenitic stainless steel thin plate characterized by having a small amount of adsorbed gas on the surface. S: 0.02% or less, P: 0.04% or less, Al: 0.03% or less
【０００７】また、第二の発明は重量％で Ｂ：０．００３５〜０．０１５％、Ｎ：０．０８〜０．
１５％ Ｃａ＋Ｍｇ：０．００１〜０．０１％を含有し、不可避
的不純物及び非金属介在物量を以下に示す量に制限し
た、表面へのガスの吸着量の少ないことを特徴とするオ
ーステナイト系ステンレス鋼薄板である。 Ｓ：０．０２％以下、Ｐ：０．０４％以下、Ａｌ：０．
０３％以下 非金属介在物量：０．１％以下The second aspect of the present invention is, by weight%, B: 0.0035 to 0.015%, N: 0.08 to 0.
Austenitic stainless steel containing 15% Ca + Mg: 0.001 to 0.01% and having a small amount of gas adsorbed on the surface, with the amount of unavoidable impurities and non-metallic inclusions limited to the amounts shown below. It is a thin steel plate. S: 0.02% or less, P: 0.04% or less, Al: 0.
03% or less Non-metallic inclusion amount: 0.1% or less
【０００８】また、第三の発明は鋼の表面の９０％以上
にＢＮが析出した請求項１または請求項２に記載の表面
へのガスの吸着量の少ないことを特徴とするオーステナ
イト系ステンレス鋼薄板である。The third invention is characterized in that BN is precipitated on 90% or more of the surface of the steel, and the amount of gas adsorbed on the surface is small, and the austenitic stainless steel is characterized in that It is a thin plate.
【０００９】また、第四の発明は請求項１または請求項
２に記載のオーステナイト系ステンレス鋼に、固溶化処
理を行った後に表面近傍の変質層を除去し、真空中或い
は不活性ガス雰囲気中で６５０℃〜９００℃に加熱する
ことを特徴とする表面へのガスの吸着量の少ないオース
テナイト系ステンレス鋼薄板の製造方法である。A fourth aspect of the present invention is that the austenitic stainless steel according to claim 1 or 2 is subjected to a solution treatment, and then the altered layer near the surface is removed to obtain a vacuum or an inert gas atmosphere. The method for producing an austenitic stainless steel thin plate having a small amount of adsorbed gas on the surface is characterized by heating to 650 ° C. to 900 ° C.
【００１０】また、第五の発明は請求項１または請求項
２に記載のオーステナイト系ステンレス鋼に、冷間加工
後に１０００℃以上の温度で固溶化処理を行った後、表
層を３μｍ以上除去し、真空中或いは不活性ガス雰囲気
中で６５０℃〜９００℃に加熱することを特徴とする表
面へのガスの吸着量の少ないオーステナイト系ステンレ
ス鋼薄板の製造方法である。A fifth aspect of the present invention is that the austenitic stainless steel according to claim 1 or 2 is subjected to solution treatment at a temperature of 1000 ° C. or higher after cold working, and then the surface layer is removed by 3 μm or more. The method for producing an austenitic stainless steel sheet having a small amount of adsorbed gas on the surface is characterized by heating at 650 ° C. to 900 ° C. in a vacuum or in an inert gas atmosphere.
【００１１】[0011]
【作用】発明者は高度に塑性加工をうけた状態のオース
テナイト系ステンレス鋼薄板の表面に十分なＢＮを析出
させるための条件である、鋼の組成、非金属介在物量、
固溶化処理条件、研磨条件、析出処理条件を検討し本発
明を完成した。The present inventors have found that the composition of the steel, the amount of non-metallic inclusions, which are the conditions for precipitating sufficient BN on the surface of the austenitic stainless steel thin plate that has undergone highly plastic working,
The present invention was completed by examining the solution treatment conditions, polishing conditions, and precipitation treatment conditions.
【００１２】まず、本発明においては、組成を以下に示
す範囲に限定する。 Ｂ：０．００３〜０．０１５％ Ｎ：０．０８〜０．１５％ Ｂ及びＮは鋼の表面に析出しＢＮの皮膜を形成し、鋼の
表面へのガスの吸着量を減少させ、ベーキングに要する
時間を短縮させる。ベーキング時間を１／２に減少させ
るためには、鋼の表面の９０％以上に析出させる必要が
あり、このためにはＢ及びＮはそれぞれ、０．００３％
以上及び０．０８％以上必要である。一方、過剰の添加
は介在物となり、例えば鋼の冷間加工時に微細な表面欠
陥となりガスのトラップ点を増加させ真空度の上昇を困
難にし、また、高純度ガスの純度を下げる。冷間加工に
よる微細な表面欠陥は介在物量が０．１％を越えると著
しくなる。介在物量をこの値以下とするためには、Ｂ及
びＮはそれぞれ、０．０１５％以下及び０．１５％以下
に制限する必要がある。熱間加工後に固溶化処理を行な
い、機械加工等により製造する場合も同様である。した
がって、Ｂは０．００３〜０．０１５％に、Ｎは０．０
８〜０．１５％の範囲とする。First, in the present invention, the composition is limited to the following range. B: 0.003 to 0.015% N: 0.08 to 0.15% B and N precipitate on the surface of the steel to form a film of BN, and reduce the amount of gas adsorbed on the surface of the steel. Reduce the time required for baking. In order to reduce the baking time to 1/2, it is necessary to precipitate it on 90% or more of the surface of the steel, and for this purpose B and N are each 0.003%.
Above and 0.08% or more are required. On the other hand, excessive addition becomes inclusions, for example, which causes fine surface defects during cold working of steel to increase the gas trap point, making it difficult to increase the degree of vacuum and lowering the purity of high-purity gas. Fine surface defects due to cold working become remarkable when the amount of inclusions exceeds 0.1%. In order to keep the amount of inclusions below this value, B and N must be limited to 0.015% or less and 0.15% or less, respectively. The same applies to the case where the solution treatment is performed after the hot working and the manufacturing is performed by machining or the like. Therefore, B is 0.003 to 0.015% and N is 0.0
The range is 8 to 0.15%.
【００１３】Ｃａ＋Ｍｇ：０．００１〜０．０１％ Ｃａ及びＭｇは共に、ＢＮの析出を妨害するＳを硫化物
として固定し、その悪影響を大幅に軽減する。Ｃａ及び
Ｍｇの効果は略同等であり、両者を合計して、０．００
１％以上で有効である。また、両者を合計して０．０１
％をこえると、硫化物固定化効果は飽和する。また、加
工性が劣化する。したがって、Ｃａ＋Ｍｇは０．００１
〜０．０１％とする。Ca + Mg: 0.001 to 0.01% Both Ca and Mg fix S, which interferes with the precipitation of BN, as a sulfide and significantly reduce its adverse effects. The effects of Ca and Mg are almost the same, and the total of both is 0.00
Effective above 1%. The total of both is 0.01
If it exceeds%, the effect of fixing sulfide is saturated. In addition, workability is deteriorated. Therefore, Ca + Mg is 0.001
To 0.01%.
【００１４】Ｓ：０．０２％以下 Ｐ：０．０４％以下 Ｓ及びＰはＢＮの表面析出を妨害する不純物である。そ
の影響は各々０．０２％、及び０．０４％を越えると著
しくなる。したがってＳは０．０２％以下に、Ｐは０．
０４％以下とする。S: 0.02% or less P: 0.04% or less S and P are impurities that hinder the surface precipitation of BN. The influence becomes remarkable when the content exceeds 0.02% and 0.04%, respectively. Therefore, S is 0.02% or less and P is 0.
It should be 04% or less.
【００１５】Ａｌ：０．０３％以下 Ａｌは非金属介在物となりＢＮの表面析出を妨害する。
その影響は０．０３％をこえると著しくなる。したがっ
てＡｌは０．０３％以下とする。 非金属介在物量：０．１％以下 非金属介在物は鋼が加工された場合の表面欠陥の原因と
なり、ガスの吸着点となるためＢＮの析出によるガス吸
着量の減少の効果は相当に低くなる。また、内部に存在
する場合も非金属介在物と鋼との界面にＢＮが析出し、
ＢＮの表面への析出量を減少させ、要求されるベーキン
グの時間を長くする。その影響は非金属介在物量が０．
１％を越えると著しくなる。したがって、非金属介在物
量は０．１％以下とする。Al: 0.03% or less Al becomes a non-metallic inclusion and interferes with the surface precipitation of BN.
The effect becomes remarkable when it exceeds 0.03%. Therefore, Al is 0.03% or less. Amount of non-metallic inclusions: 0.1% or less Non-metallic inclusions cause surface defects when steel is processed and serve as gas adsorption points, so the effect of reducing the gas adsorption amount due to BN precipitation is considerably low. Become. In addition, when it exists inside, BN precipitates at the interface between the non-metallic inclusions and the steel,
It reduces the amount of BN deposited on the surface and prolongs the required baking time. The effect is that the amount of non-metallic inclusions is 0.
It becomes remarkable when it exceeds 1%. Therefore, the amount of non-metallic inclusions is 0.1% or less.
【００１６】なお、本発明は薄板に加工可能なオーステ
ナイト系ステンレス鋼であれば、他の成分は特に規程し
ない。ただし、一般的には、Ｃｒ：１５〜２７％、Ｎｉ
＋Ｃｏ：６〜３５％、Ｓｉ：１％以下 Ｍｎ：２％以下、Ｃ：０．２％以下、Ｍｏ：５％以下、
Ｗ：５％以下、Ｃｕ：５％以下、Ｓｎ：０．０１％以下
の範囲にある。In the present invention, other components are not specified as long as it is an austenitic stainless steel that can be processed into a thin plate. However, in general, Cr: 15 to 27%, Ni
+ Co: 6 to 35%, Si: 1% or less Mn: 2% or less, C: 0.2% or less, Mo: 5% or less,
W: 5% or less, Cu: 5% or less, Sn: 0.01% or less.
【００１７】Ｃｒ、Ｎｉ＋Ｃｏの組成範囲はオーステナ
イト系ステンレス鋼または合金を得るために上記の範囲
にすることが多い。また、Ｓｉ及びＭｎは脱酸元素とし
て、あるいは脱硫元素として添加するが、上記範囲をこ
えると脆化の原因となることがある。Ｃは上記の範囲を
越えると加工性、耐蝕性に大きく影響を与える。Ｍｏ、
Ｗ、Ｃｕ、Ｓｎはいずれも鋼の耐蝕性を向上させる元素
であるが、上記範囲をこえて添加しても効果は飽和する
傾向にあり、また加工性、延靱性の低下の原因となる。The composition range of Cr and Ni + Co is often set to the above range in order to obtain an austenitic stainless steel or alloy. Si and Mn are added as deoxidizing elements or as desulfurizing elements, but if they exceed the above range, they may cause embrittlement. When C exceeds the above range, workability and corrosion resistance are greatly affected. Mo,
W, Cu, and Sn are all elements that improve the corrosion resistance of steel, but if they are added beyond the above range, the effect tends to saturate, and it causes a decrease in workability and ductility.
【００１８】上記した成分組成の鋼の表面にＢＮの析出
を起こさせることにより、ガス吸着量を減少させること
ができるが、そのためには表面の９０％以上にＢＮが析
出している必要がある。すなわち、９０％未満の場合の
真空中または高純度ガス中の不純物ガス量はＢＮ析出処
理を行っていない場合の数分の１に低下するにすぎず、
装置の立ち上がり時や再起動時のリードタイムはあまり
減少しない。これに対して９０％以上にする事により、
リードタイムを１／２以下にすることが出来る。ＣＲＴ
等の部品に使用する場合も同様である。 冷間加工を受
けた鋼の表面にＢＮを９０％以上析出させるためには、
鋼の組成及び非金属介在物量を上記に示す範囲に限定し
た鋼を用い、塑性加工により、所定の製品、または半製
品とした後、加工の影響を除くために固溶化処理をおこ
なう。この処理により、ＢＮの析出の妨げとなる格子欠
陥が大幅に減少する。The amount of gas adsorbed can be reduced by causing the precipitation of BN on the surface of the steel having the above-described composition, but for that purpose, BN must be precipitated on 90% or more of the surface. . That is, the amount of the impurity gas in the vacuum or the high-purity gas in the case of less than 90% is only reduced to a fraction of that in the case where the BN precipitation treatment is not performed,
The lead time when the equipment starts up or restarts does not decrease much. By setting it to 90% or more,
The lead time can be reduced to 1/2 or less. CRT
The same applies when used for parts such as. In order to precipitate 90% or more of BN on the surface of cold-worked steel,
Using a steel having a steel composition and the amount of non-metallic inclusions limited to the ranges shown above, a predetermined product or a semi-finished product is formed by plastic working, and then a solution treatment is performed to remove the influence of the working. This treatment significantly reduces the lattice defects that hinder the precipitation of BN.
【００１９】一方、固溶化処理を行うことにより、鋼の
表面では酸化、合金成分の蒸発等の反応が起こる。固溶
化処理を不活性雰囲気で行った場合もこれらの変化は避
けられない。Ｂも雰囲気中または皮膜中の酸素と反応し
鋼の表面近傍から抜け、脱Ｂ反応がおこる。この脱Ｂ反
応も雰囲気中の酸素量、温度等の影響をうけ、固溶化処
理温度が１２００℃を越えると著しくなる。なを、上記
組成の鋼においては、１０００℃未満では固溶化処理が
十分に行われないため、固溶化処理温度の範囲は１００
０℃〜１２００℃とする。On the other hand, the solution treatment causes reactions such as oxidation and evaporation of alloy components on the surface of the steel. Even when the solution treatment is performed in an inert atmosphere, these changes are unavoidable. B also reacts with oxygen in the atmosphere or in the film to escape from the vicinity of the surface of the steel, and the B removal reaction occurs. This B-removing reaction is also affected by the amount of oxygen in the atmosphere, temperature, etc., and becomes remarkable when the solution treatment temperature exceeds 1200 ° C. However, in the steel having the above composition, the solution treatment temperature is less than 1000 ° C., so that the solution treatment temperature range is 100.
It is set to 0 ° C to 1200 ° C.
【００２０】上記した固溶化処理により、形成された脱
Ｂ層はＢＮを鋼の表面に析出させるためには好ましくな
いためこの脱Ｂ層を除去する必要がある。なを、脱Ｂ層
の深さは固溶化処理条件の影響をうける。The B-elimination layer formed by the above-mentioned solution treatment is not preferable for precipitating BN on the surface of the steel, so it is necessary to remove the B-elimination layer. However, the depth of the B-free layer is influenced by the solution treatment conditions.
【００２１】第４表に固溶化処理条件と研磨量とＢＮ析
出量の関係を示した。ＢＮを９０％以上析出させるため
には、１０００℃の場合は３μｍ、１２００℃の場合は
７μｍの研磨を行う必要があることがわかる。もちろ
ん、固溶化処理時間が長くなると必要な研磨量は増加す
る。研磨方法は著しく鋼の内質に影響を与えない方法が
好ましい。化学研磨、電解研磨、あるいは、例えばホー
ニング加工等の機械研磨であっても加工層の浅い方法は
採用可能である。加工量の上限は特に定める必要はな
い。Table 4 shows the relationship between the solution treatment conditions, the polishing amount and the BN precipitation amount. It can be seen that in order to precipitate BN in an amount of 90% or more, it is necessary to perform polishing of 3 μm at 1000 ° C. and 7 μm at 1200 ° C. Of course, the required polishing amount increases as the solution treatment time increases. The polishing method is preferably a method that does not significantly affect the internal quality of steel. Even with chemical polishing, electrolytic polishing, or mechanical polishing such as honing, a method with a shallow processing layer can be adopted. It is not necessary to set the upper limit of the processing amount.
【００２２】ＢＮの析出は低酸素雰囲気中で加熱するこ
とにより行う。Ｏが過剰に存在すると、ＢＮの析出に先
だって、Ｃｒ，Ｆｅ等の酸化皮膜が形成され、ＢＮの析
出は阻害される。低酸素雰囲気は真空、不活性ガス、還
元性ガスのいずれでも良い。しかし、雰囲気中の酸化成
分は十分に低くする必要があり、例えば真空中の場合
は、１０−5 Ｔｏｒｒ以下に、ガス雰囲気の場合は９
９．９９％以上の純度か、もしくは水素を添加したガス
を用いる必要がある。BN is deposited by heating in a low oxygen atmosphere. When O is present excessively, an oxide film of Cr, Fe, etc. is formed prior to the precipitation of BN, and the precipitation of BN is hindered. The low oxygen atmosphere may be vacuum, an inert gas, or a reducing gas. However, the oxidizing component in the atmosphere should be sufficiently low, for example in the case of a vacuum, below 10- 5 Torr, in the case of gas atmosphere 9
It is necessary to use a gas having a purity of 9.99% or higher or a gas added with hydrogen.
【００２３】析出温度範囲は６５０℃〜９００℃であ
る。第５表に析出処理条件を示したように、６５０℃以
下の場合は、Ｂ，Ｎの拡散速度が遅くＢＮが表面への析
出する割合は減少し、鋼の内部でＢＮの析出物となり析
出する割合が増加する。一方、９００℃以上においては
拡散速度は十分であるが、ＢＮの鋼への溶解度が増加
し、やはり表面への析出は不十分となる。したがって、
析出温度範囲は６５０℃〜９００℃とする。The deposition temperature range is 650 ° C to 900 ° C. As shown in the precipitation treatment conditions in Table 5, when the temperature is 650 ° C. or lower, the diffusion rate of B and N is slow, and the ratio of BN deposited on the surface is reduced, resulting in BN precipitates inside the steel. The percentage to do increases. On the other hand, at 900 ° C. or higher, the diffusion rate is sufficient, but the solubility of BN in steel increases, and precipitation on the surface also becomes insufficient. Therefore,
The deposition temperature range is 650 ° C to 900 ° C.
【００２４】析出処理時間は特に規程しない、鋼が上記
温度範囲に上がれば、十分である。ただし、直接通電加
熱等の昇温時間の短い加熱方法の場合は昇温後１分以上
保持する必要がある。The precipitation treatment time is not specified, but it is sufficient if the temperature of the steel is within the above temperature range. However, in the case of a heating method such as direct current heating in which the temperature rising time is short, it is necessary to hold for 1 minute or more after the temperature is raised.
【００２５】[0025]
【実施例】第１表に示す組成及び第２表及び第３表に示
す清浄度の本発明鋼Ｎｏ．１〜Ｎｏ．１２及び、比較鋼
Ｎｏ．２１〜Ｎｏ．２５を溶解し、分解圧延後に１２５
０℃に加熱し３ｍｍｔの熱延板とした。これらの熱延板
を１１００℃×２０分水冷の固溶化処理後、表面の酸化
層を完全に除去後さらに０．５ｍｍ以上の研磨後に、８
３０℃×３０分の析出処理を１０−5 Ｔorr レベルの真
空中で行ない、ＢＮ析出処理を行ない熱間加工供試材と
した。なを、最終の０．２ｍｍの範囲の研磨は鋼に加工
硬化が生じない様に、化学研磨により行った。EXAMPLES Steel Nos. Of the present invention having compositions shown in Table 1 and cleanliness shown in Tables 2 and 3 were obtained. 1-No. 12 and comparative steel No. 21-No. 25 is melted, 125 after melting and rolling
It was heated to 0 ° C. to obtain a hot rolled plate of 3 mmt. These hot-rolled sheets were subjected to solution treatment with water cooling at 1100 ° C. for 20 minutes, after completely removing the oxide layer on the surface and further polishing by 0.5 mm or more.
Performs deposition process 30 ° C. × 30 minutes of 10- 5 T orr levels in vacuo to a hot working test materials subjected to BN deposition process. The final polishing in the range of 0.2 mm was performed by chemical polishing so that work hardening does not occur in the steel.
【００２６】また、ＢＮ析出処理前の熱間加工供試材を
冷間圧延により、２０％〜６０％の加工を行ない１１０
０℃×３分の固溶化処理、５μｍ研磨後に同様のＢＮ析
出処理をおこない冷間加工供試材とした。Further, the hot-working specimen before the BN precipitation treatment is cold-rolled and processed by 20% to 60%.
The solution was subjected to a solution treatment at 0 ° C. for 3 minutes and after polishing for 5 μm, the same BN precipitation treatment was performed to obtain a cold-working test material.
【００２７】清浄度はＢＮ析出処理前にＪＩＳ Ｇ ０
５５５に準じてサンプルのＬ断面について行っており、
ＢＮの析出状態の観察は走査型電子顕微鏡により行っ
た。Ｂ量またはＮ量が上限値を越えている鋼は非金属介
在物量が０．１％をこえておりＢＮ被覆率は低い。Ｎ
ｏ．２５鋼はＢ量下限値以下であり、清浄度は０．１％
以下であるが、ＢＮ被覆率は当然も低い。また、Ｎｏ．
２１鋼はＰ及びＳの量が多く、Ｎｏ．２２鋼はＣａ量が
少ないため、同様に非金属介在物量は制限内であるがＢ
Ｎ被覆率は低い。The cleanliness is JIS G 0 before the BN precipitation treatment.
According to 555, the L cross section of the sample is done,
The BN deposition state was observed with a scanning electron microscope. The steel with the B content or N content exceeding the upper limit has a non-metallic inclusion content of more than 0.1% and a low BN coverage. N
o. 25 steel is below the B content lower limit value, cleanliness is 0.1%
Although it is below, the BN coverage is naturally low. In addition, No.
No. 21 steel has a large amount of P and S, and No. 21 steel. Since No. 22 steel has a small amount of Ca, the amount of non-metallic inclusions is within the limit, but B
N coverage is low.
【００２８】第２表及び第３表より明らかなように、本
発明鋼においてはＢＮ析出は鋼に表面の９０％以上にな
ることがわかる。これに対して、組成が本発明の範囲か
ら外れる場合には十分なＢＮ析出は起こっていない。ま
た、先の第４表及び第５表に示したように、組成が本発
明の範囲内であっても製造方法が本発明の範囲外の場合
も同様に十分なＢＮ析出は起こっていない。As is clear from Tables 2 and 3, in the steels of the present invention, BN precipitation is 90% or more of the surface of the steel. On the other hand, when the composition is out of the range of the present invention, sufficient BN precipitation does not occur. Further, as shown in Tables 4 and 5 above, even when the composition is within the range of the present invention, when the manufacturing method is outside the range of the present invention, similarly, sufficient BN precipitation does not occur.
【００２９】[0029]
【表１】 [Table 1]
【００３０】[0030]
【表２】 [Table 2]
【００３１】[0031]
【表３】 [Table 3]
【００３２】[0032]
【表４】 [Table 4]
【００３３】[0033]
【表５】 [Table 5]
【００３４】[0034]
【発明の効果】本発明の実施により、表面にＢＮが９０
％以上析出したステンレス鋼薄板を得ることができる。
このステンレス鋼薄板はガスの吸着が少なく、真空雰囲
気、もしくは高純度ガス雰囲気を必要とする用途に使用
する材料として最適である。As a result of the practice of the present invention, BN on the surface is 90%.
% Or more of the deposited stainless steel sheet can be obtained.
This stainless steel thin plate has little gas adsorption, and is optimal as a material used for applications requiring a vacuum atmosphere or a high-purity gas atmosphere.
Claims (5)
％、Ｎ：０．０８〜０．１５％、Ｃａ＋Ｍｇ：０．００
１〜０．０１％を含有し、不可避的不純物を以下に示す
量に制限した、表面へのガスの吸着量の少ないことを特
徴とするオーステナイト系ステンレス鋼薄板。Ｓ：０．
０２％以下、Ｐ：０．０４％以下、Ａｌ：０．０３％以
下1. B: 0.0035 to 0.015 in% by weight.
%, N: 0.08 to 0.15%, Ca + Mg: 0.00
An austenitic stainless steel thin plate containing 1 to 0.01% and limiting the amount of inevitable impurities to the amount shown below and having a small amount of adsorbed gas on the surface. S: 0.
02% or less, P: 0.04% or less, Al: 0.03% or less
％、Ｎ：０．０８〜０．１５％、Ｃａ＋Ｍｇ：０．００
１〜０．０１％を含有し、不可避的不純物及び非金属介
在物量を以下に示す量に制限した、表面へのガスの吸着
量の少ないことを特徴とするオーステナイト系ステンレ
ス鋼薄板。Ｓ：０．０２％以下、Ｐ：０．０４％以下、
Ａｌ：０．０３％以下 非金属介在物量：０．１％以下2. B: 0.0035 to 0.015 in% by weight.
%, N: 0.08 to 0.15%, Ca + Mg: 0.00
An austenitic stainless steel thin plate containing 1 to 0.01% and limiting the amount of unavoidable impurities and non-metallic inclusions to the amount shown below, and having a small gas adsorption amount on the surface. S: 0.02% or less, P: 0.04% or less,
Al: 0.03% or less Non-metallic inclusion amount: 0.1% or less
求項１または請求項２に記載の表面へのガスの吸着量の
少ないことを特徴とするオーステナイト系ステンレス鋼
薄板。3. An austenitic stainless steel thin plate having a small amount of adsorbed gas on the surface according to claim 1 or 2, wherein BN is precipitated on 90% or more of the surface of the steel.
ナイト系ステンレス鋼に、固溶化処理を行った後に表面
近傍の変質層を除去し、真空中或いは不活性ガス雰囲気
中で６５０℃〜９００℃に加熱することを特徴とする表
面へのガスの吸着量の少ないオーステナイト系ステンレ
ス鋼薄板の製造方法。4. The austenitic stainless steel according to claim 1 or 2 is subjected to a solution treatment to remove the altered layer near the surface, and 650 ° C. to 900 ° C. in a vacuum or an inert gas atmosphere. A method for producing an austenitic stainless steel thin plate having a small amount of adsorbed gas on the surface, which is characterized by heating to ℃.
ナイト系ステンレス鋼に、冷間加工後に１０００℃以上
の温度で固溶化処理を行った後、表層を３μｍ以上除去
し、真空中或いは不活性ガス雰囲気中で６５０℃〜９０
０℃に加熱することを特徴とする表面へのガスの吸着量
の少ないオーステナイト系ステンレス鋼薄板の製造方
法。5. The austenitic stainless steel according to claim 1 or 2 is subjected to solid solution treatment at a temperature of 1000 ° C. or higher after cold working, and then the surface layer is removed by 3 μm or more, and the surface is removed in vacuum or in vacuum. 650 ° C to 90 in an active gas atmosphere
A method for producing an austenitic stainless steel thin plate having a small amount of adsorbed gas on the surface, characterized by heating to 0 ° C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35101693A JPH07197205A (en) | 1993-12-29 | 1993-12-29 | Austenitic stainless steel sheet and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35101693A JPH07197205A (en) | 1993-12-29 | 1993-12-29 | Austenitic stainless steel sheet and its production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07197205A true JPH07197205A (en) | 1995-08-01 |
Family
ID=18414471
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP35101693A Pending JPH07197205A (en) | 1993-12-29 | 1993-12-29 | Austenitic stainless steel sheet and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07197205A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100427627C (en) * | 2003-08-07 | 2008-10-22 | 住友金属工业株式会社 | Duplex stainless steel and manufacturing method thereof |
| JP2017088928A (en) * | 2015-11-05 | 2017-05-25 | 新日鐵住金ステンレス株式会社 | Austenite-based stainless steel sheet excellent in heat resistance and processability and manufacturing method therefor and exhaust component made from stainless steel |
| KR20220089276A (en) * | 2020-12-21 | 2022-06-28 | 주식회사 포스코 | Austenitic stainless steel with improved corrosion resistance and machinability and method for manufacturing the same |
-
1993
- 1993-12-29 JP JP35101693A patent/JPH07197205A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100427627C (en) * | 2003-08-07 | 2008-10-22 | 住友金属工业株式会社 | Duplex stainless steel and manufacturing method thereof |
| JP2017088928A (en) * | 2015-11-05 | 2017-05-25 | 新日鐵住金ステンレス株式会社 | Austenite-based stainless steel sheet excellent in heat resistance and processability and manufacturing method therefor and exhaust component made from stainless steel |
| KR20220089276A (en) * | 2020-12-21 | 2022-06-28 | 주식회사 포스코 | Austenitic stainless steel with improved corrosion resistance and machinability and method for manufacturing the same |
| WO2022139275A1 (en) * | 2020-12-21 | 2022-06-30 | 주식회사 포스코 | Austenitic stainless steel with improved corrosion resistance and machinability and method for manufacturing same |
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