JPH0716566A - Cleaning method of separating membrane for water treatment - Google Patents
Cleaning method of separating membrane for water treatmentInfo
- Publication number
- JPH0716566A JPH0716566A JP16177093A JP16177093A JPH0716566A JP H0716566 A JPH0716566 A JP H0716566A JP 16177093 A JP16177093 A JP 16177093A JP 16177093 A JP16177093 A JP 16177093A JP H0716566 A JPH0716566 A JP H0716566A
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- JP
- Japan
- Prior art keywords
- water
- cleaning
- membrane
- treated
- acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は電子産業、医薬品製造
業、発電所等で用いられる純水や超純水等の処理水製造
用の膜装置の水処理用分離膜の洗浄方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for cleaning a separation membrane for water treatment of a membrane device for producing treated water such as pure water or ultrapure water used in the electronic industry, pharmaceutical manufacturing industry, power plants and the like.
【０００２】[0002]
【従来の技術】純水や超純水等の処理水を製造するため
に、ＲＯ（逆浸透膜）、ＵＦ（限外濾過膜）、ＭＦ（精
密濾過膜）等の膜装置が用いられている。これらの装置
に使用されている水処理用分離膜（以下、単に「分離
膜」ということもある。）は長期間使用すると膜に対し
て微粒子等が沈着してその処理量が低下するので、この
ような場合には膜を洗浄して再生することが行なわれて
いる。この方法としては一般的には図７に示すように
（ａ）膜装置の運転停止後、（ｂ）酸洗浄、（ｃ）酸の
除去（洗い出し）、（ｄ）アルカリ洗浄、（ｅ）アルカ
リの除去（洗い出し）、（ｆ）運転再開、（ｇ）水質達
成まで運転継続、（ｈ）水質達成後採水開始の各工程を
行なうものである。また、場合によっては上記酸、アル
カリ等の薬液除去工程を省略したり、上記酸洗浄工程を
行なわず、アルカリ洗浄のみを行なう場合や、界面活性
剤等の洗浄液を利用する事もある。2. Description of the Related Art Membrane devices such as RO (reverse osmosis membrane), UF (ultrafiltration membrane) and MF (microfiltration membrane) are used for producing treated water such as pure water and ultrapure water. There is. The separation membrane for water treatment used in these devices (hereinafter sometimes simply referred to as "separation membrane") has a large amount of fine particles and the like deposited on the membrane when used for a long period of time, so that the treatment amount decreases. In such a case, the membrane is washed and regenerated. As this method, generally, as shown in FIG. 7, after (a) the operation of the membrane device is stopped, (b) acid cleaning, (c) acid removal (washout), (d) alkali cleaning, (e) alkali (F) restart operation, (g) continue operation until the water quality is achieved, and (h) start collecting water after the water quality is achieved. In some cases, the step of removing the chemicals such as the acid and the alkali may be omitted, or only the alkali cleaning may be performed without performing the acid cleaning step, or a cleaning solution such as a surfactant may be used.
【０００３】しかし、洗浄をアルカリ性溶液のみで行な
ったり、あるいは洗浄工程の最後にアルカリ洗浄を行な
う従来の方法では、運転再開後処理水が所定の純度に達
するまでには比較的長時間の運転が必要であり、その結
果多量の処理水を無駄に排出していた。とくに、処理水
純度が１ＭΩ・ｃｍ以上の高純度水を得る場合にはこの
傾向が著しかった。However, in the conventional method in which the cleaning is performed only with an alkaline solution or the alkaline cleaning is performed at the end of the cleaning step, a relatively long operation is required until the treated water reaches a predetermined purity after the restart of operation. It was necessary and, as a result, wasted a large amount of treated water. This tendency was particularly remarkable when high-purity water having a treated water purity of 1 MΩ · cm or more was obtained.
【０００４】[0004]
【発明が解決しようとする課題】本発明者らは、上記問
題を解決するために種々検討した結果、アルカリ性の洗
浄液を除去後、酸性の溶液を予め通液し、その後運転を
再開すると、水質の純度の回復の立上がりが極めて早い
ことを知得して、本発明を完成するに至ったもので、そ
の目的とするところは、膜の洗浄後、運転を再開してか
ら短時間に処理水の純度が回復して所定の水質が達成さ
れ、従って運転再開から採水開始までの時間を短縮する
ことのできる水処理用分離膜の洗浄方法を提供すること
にある。DISCLOSURE OF THE INVENTION As a result of various investigations for solving the above-mentioned problems, the inventors of the present invention have found that after removing an alkaline cleaning liquid, an acidic solution is passed in advance, and then the operation is restarted, the water quality is It was discovered that the recovery of the purity of the product was extremely fast, and the present invention was completed.The purpose is to treat the treated water within a short time after restarting the operation after cleaning the membrane. It is an object of the present invention to provide a method for cleaning a separation membrane for water treatment, in which the purity of water is recovered and a predetermined water quality is achieved, and therefore the time from the restart of operation to the start of water sampling can be shortened.
【０００５】[0005]
【課題を解決するための手段】上記目的を達成するため
に本発明を、水処理用分離膜を用いて水を処理する膜装
置の分離膜の洗浄方法において、まず膜装置にアルカリ
性洗浄液を通水して水処理用分離膜をアルカリ性洗浄液
で洗浄し、次いで酸性水を通水した後、被処理水を通水
するように構成するもので、膜装置から取り出される処
理水の水質が１ＭΩ・ｃｍ以上のものであることを含む
ものである。In order to achieve the above object, the present invention provides a method for cleaning a separation membrane of a membrane device for treating water using a separation membrane for water treatment, in which an alkaline cleaning liquid is first passed through the membrane device. Water is used to wash the separation membrane for water treatment with an alkaline cleaning liquid, and then acidic water is passed through, followed by water to be treated. The quality of the treated water taken out from the membrane device is 1 MΩ. Including those of cm or more.
【０００６】本発明の構成によって純度の立上がりが改
善される理由は充分解明されていないが、おそらくアル
カリ溶液はその性質上、水によって洗浄除去されにくい
のに対し、酸溶液は洗浄除去されやすく、したがって、
アルカリ溶液をそのまま洗浄するのではなく、酸溶液で
一旦中和、もしくは酸性にする事により洗浄性が高ま
り、結果として純度の立上がりが改善されるものと推定
される。The reason why the constitution of the present invention improves the rise of purity has not been fully clarified. Probably due to the nature of the alkaline solution, it is difficult to wash it off with water, whereas the acid solution is easily washed off. Therefore,
It is presumed that, instead of washing the alkaline solution as it is, neutralization or acidification with an acid solution enhances the washing property, and as a result, the rise of the purity is improved.
【０００７】以下、本発明を詳細に説明する。The present invention will be described in detail below.
【０００８】本発明はＲＯ、ＵＦ、ＭＦなどの分離膜を
用いた膜装置一般に利用できるが、ＲＯ装置、特に２段
ＲＯ方式と総称される１ＭΩ・ｃｍ以上の比較的高純度
の純水を製造する装置において特に効果的である。The present invention can be generally applied to a membrane device using a separation membrane such as RO, UF and MF, but an RO device, particularly a pure water having a relatively high purity of 1 MΩ · cm or more generally called a two-stage RO system is used. It is particularly effective in the manufacturing device.
【０００９】本発明方法の特徴は、上述のごとく水処理
膜をアルカリ性洗浄液で洗浄した後に酸性水を通水し、
その後被処理水を通水する点にあるが、本発明方法を適
用した洗浄工程の一例を挙げれば、図７に示すように
（ａ）運転停止、（ｂ）酸洗浄、（ｃ）酸洗浄液の除
去、（ｄ）アルカリ洗浄、（ｅ）アルカリ洗浄液の除
去、（ｉ）酸性水通水、（ｆ）運転再開、（ｇ）水質達
成、（ｈ）採水、の各工程を順次行なうのが一般的であ
る。The feature of the method of the present invention is that the water treatment membrane is washed with an alkaline washing solution as described above, and then acidic water is passed through the membrane.
After that, the point of passing water to be treated is, as an example of the cleaning step to which the method of the present invention is applied, as shown in FIG. 7, (a) operation stop, (b) acid cleaning, (c) acid cleaning solution. , (D) alkaline cleaning, (e) removal of alkaline cleaning liquid, (i) passing acidic water, (f) restarting operation, (g) achieving water quality, and (h) sampling water. Is common.
【００１０】なお、酸性水通水工程ｉにおいては、この
工程専用の酸性水を調製して通水するようにしてもよい
が、後述する実施例に示した様に、膜装置本体にもとも
と酸性水の調製機構が付設されている場合には、この調
製機構を用いて行なうのが簡便で好ましい。In the acidic water passing step i, acidic water dedicated to this step may be prepared and passed. However, as shown in Examples described later, the acidic water is originally supplied to the membrane device main body. When a water preparation mechanism is additionally provided, it is simple and preferable to use this preparation mechanism.
【００１１】ここで、酸洗浄工程に用いる酸洗浄液とし
ては、塩酸、シュウ酸、クエン酸、硫酸等の酸の水溶液
が例示でき、濃度はｐＨ１〜ｐＨ４のものが一般的であ
る。Examples of the acid cleaning solution used in the acid cleaning step include aqueous solutions of acids such as hydrochloric acid, oxalic acid, citric acid, and sulfuric acid, and the concentration is generally pH 1 to pH 4.
【００１２】酸洗浄液の除去は膜装置内に残っている酸
洗浄液を膜装置外に放出させるもので、一般的には被処
理水を膜装置に供給し、膜装置内の酸洗浄液を膜装置外
へ洗い出す操作を行なう。The removal of the acid cleaning liquid is to discharge the acid cleaning liquid remaining in the membrane device to the outside of the membrane device. Generally, the water to be treated is supplied to the membrane device and the acid cleaning liquid in the membrane device is removed. Perform the operation to wash out.
【００１３】アルカリ洗浄工程に用いるアルカリ洗浄液
としては水酸化ナトリウム（ＮａＯＨ）、次亜塩素酸ソ
ーダ（ＮａＣｌＯ）等の水溶液が例示でき、濃度はｐＨ
９〜ｐＨ１３（ＮａＯＨ水溶液の場合）、あるいは５０
〜５００ｐｐｍ（ＮａＣｌＯ水溶液の場合）のものが好
ましい。An example of the alkaline cleaning liquid used in the alkaline cleaning step is an aqueous solution of sodium hydroxide (NaOH), sodium hypochlorite (NaClO) or the like, and the concentration is pH.
9-pH13 (in case of NaOH aqueous solution), or 50
.About.500 ppm (in the case of NaClO aqueous solution) is preferable.
【００１４】アルカリ洗浄液の除去は前記酸洗浄液の除
去とほぼ同様の方法で行なうものである。The removal of the alkaline cleaning liquid is carried out in the same manner as the removal of the acid cleaning liquid.
【００１５】酸性水通水工程に用いる酸性水としては、
前記酸洗浄工程の場合と同様の酸、すなわち塩酸、シュ
ウ酸、クエン酸、硫酸等の酸の水溶液が例示でき、濃度
はｐＨ１〜６のものが好ましい。As the acidic water used in the acidic water passing step,
The same acid as in the case of the acid washing step, that is, an aqueous solution of an acid such as hydrochloric acid, oxalic acid, citric acid, or sulfuric acid can be exemplified, and the concentration is preferably 1 to 6.
【００１６】[0016]
（実施例１）図１に示す２段ＲＯ装置の膜洗浄を行なっ
た。原水（工業用水）１は除濁装置等の前処理装置２で
処理され、脱炭酸装置３に供給された。脱炭酸後の処理
水３ａは加圧手段（図示せず）を経て膜装置４さらに５
に供給された。膜装置４と５の間には加圧手段を設ける
場合もある。本装置は通常の運転時には酸添加手段７に
よって脱炭酸装置３の入口水ｐＨが４〜６．５となるよ
うにｐＨ調整され、更に、アルカリ添加手段８により、
膜装置４の入口水のｐＨが７〜９となるようにｐＨ調整
がされ、膜装置５の処理水５ａとしては５ＭΩ・ｃｍ程
度の高純度水を連続的に供給可能であった。なお、４
ｂ，５ｂはそれぞれ膜装置４及び５の濃縮水で、濃縮水
５ｂは脱炭酸装置３の入口に返送されるものである。(Example 1) Membrane cleaning of the two-stage RO device shown in FIG. 1 was performed. Raw water (industrial water) 1 was treated by a pretreatment device 2 such as a turbidity removal device and supplied to a decarbonation device 3. The treated water 3a after decarboxylation passes through a pressurizing means (not shown) and then the membrane device 4 and 5
Was supplied to. A pressure means may be provided between the membrane devices 4 and 5. During normal operation, the present apparatus adjusts the pH of the inlet water of the decarboxylation device 3 to be 4 to 6.5 by the acid addition means 7, and further, by the alkali addition means 8,
The pH of the inlet water of the membrane device 4 was adjusted to 7-9, and high-purity water of about 5 MΩ · cm could be continuously supplied as the treated water 5a of the membrane device 5. 4
b and 5b are concentrated water of the membrane devices 4 and 5, respectively, and the concentrated water 5b is returned to the inlet of the decarbonation device 3.
【００１７】図７に示した発明方法の洗浄工程に従って
図１の膜装置４及び５のそれぞれを洗浄した。酸洗浄と
してはシュウ酸洗浄を、アルカリ洗浄としてはＮａＯＨ
洗浄を行なった。シュウ酸洗浄に用いた酸洗浄液は純水
にシュウ酸を溶解してなるｐＨ２の水溶液であり、また
アルカリ洗浄に用いたアルカリ洗浄液は純水にＮａＯＨ
を溶解してなるｐＨ１１の水溶液であった。各々薬品洗
浄用のライン９及び１０により膜装置４及び５に供給さ
れた。洗浄時間は１時間で、循環洗浄を行なった。洗浄
終了後、本発明においてはアルカリ添加手段８を停止
し、酸添加手段７による酸添加のみを行なった状態で運
転を再開した。すなわち、酸添加手段７により酸性水が
調整され、この酸性水が膜装置４及び５に通水された事
になる。その際のｐＨは４〜６程度であった。運転再開
１５分後にアルカリ添加手段８の運転を開始し定常運転
に移行した。一方、比較例１（従来法）においては、図
７に示した従来方法の洗浄工程に従って上記と同じシュ
ウ酸洗浄及びアルカリ洗浄を実施した後、酸添加手段７
及びアルカリ添加手段８を同時に運転して装置全体を直
ちに定常運転に移行させた。定常運転に移行後のそれぞ
れの処理水質の変化（純度の立上がり）を図２に示し
た。本実施例においては、あらかじめ設定した純度５Ｍ
Ω・ｃｍに約４時間で達した。それに対し、比較例１
（従来法）では約１０時間が必要であった。この様に、
本発明の効果は明らかである。Each of the membrane devices 4 and 5 of FIG. 1 was cleaned according to the cleaning process of the inventive method shown in FIG. Oxalic acid cleaning for acid cleaning, NaOH for alkaline cleaning
Washed. The acid cleaning solution used for oxalic acid cleaning is an aqueous solution of pH 2 prepared by dissolving oxalic acid in pure water, and the alkali cleaning solution used for alkaline cleaning is pure water in NaOH.
Was an aqueous solution having a pH of 11. Membrane devices 4 and 5 were supplied by chemical cleaning lines 9 and 10, respectively. The cleaning time was 1 hour, and the circulation cleaning was performed. After the completion of cleaning, in the present invention, the alkali adding means 8 was stopped, and the operation was restarted in a state where only the acid addition by the acid adding means 7 was performed. That is, the acidic water is adjusted by the acid addition means 7, and this acidic water is passed through the membrane devices 4 and 5. The pH at that time was about 4 to 6. After 15 minutes from the restart of the operation, the operation of the alkali adding means 8 was started and the operation was shifted to the steady operation. On the other hand, in Comparative Example 1 (conventional method), after performing the same oxalic acid cleaning and alkali cleaning as the above according to the cleaning step of the conventional method shown in FIG.
Then, the alkali adding means 8 was operated at the same time, and the entire apparatus was immediately shifted to the steady operation. FIG. 2 shows changes in the quality of treated water (rise of purity) after the shift to steady operation. In this embodiment, the preset purity is 5M.
It reached Ω · cm in about 4 hours. On the other hand, Comparative Example 1
(Conventional method) required about 10 hours. Like this
The effect of the present invention is clear.
【００１８】（実施例２）図３にパイロジェンフリー水
製造装置を示した。工業用水１は凝集濾過装置２により
前処理され、次いでイオン交換式純水装置１０で処理さ
れて純水となり、純水タンク１１に貯留される。その
後、純水タンク１１より加圧手段（図示せず）により限
外濾過膜装置１２に送液された純水は透過水１２ａと濃
縮水１２ｂに分離される。この様な装置に於て限外濾過
膜装置１２の透過水量低下を回復するために、次亜塩素
酸ソーダで洗浄した。洗浄液は次亜塩素酸ソーダ１００
ｐｐｍ溶液で、ｐＨは１０前後であった。洗浄液で１時
間、限外濾過膜を洗浄後、純水タンク１１内の純水の限
外濾過膜装置１２への通水を開始すると共に、この時、
同時に限外濾過膜装置１２の入口で塩酸を添加すること
によってｐＨ約２の酸性水を調整し、この酸性水を１５
分間通水した。その後、純水の通水を停止することなく
塩酸の添加を停止して定常運転に移行し、透過水（処理
水）水質の回復を調べた結果を図４に示した。なお、図
４における比較例２（従来法）は洗浄後ただちに純水を
通水した場合である。図４に示したごとく、本実施例の
場合、透過水１２ａの抵抗率が２ＭΩ・ｃｍに達するま
での時間が、比較例２に比べて約２時間短縮された。(Example 2) Fig. 3 shows a pyrogen-free water producing apparatus. The industrial water 1 is pretreated by the coagulation filtration device 2 and then treated by the ion exchange type pure water device 10 to become pure water, which is stored in the pure water tank 11. Thereafter, the pure water sent from the pure water tank 11 to the ultrafiltration membrane device 12 by a pressurizing means (not shown) is separated into permeated water 12a and concentrated water 12b. In order to recover the decrease in the amount of permeated water in the ultrafiltration membrane device 12 in such a device, it was washed with sodium hypochlorite. Cleaning solution is sodium hypochlorite 100
The pH was around 10 in ppm solution. After washing the ultrafiltration membrane with the cleaning liquid for 1 hour, the pure water in the pure water tank 11 is started to flow to the ultrafiltration membrane device 12, and at this time,
At the same time, by adding hydrochloric acid at the inlet of the ultrafiltration membrane device 12, the acidic water having a pH of about 2 is adjusted.
Water was passed for a minute. Thereafter, the addition of hydrochloric acid was stopped without stopping the passage of pure water, the operation was shifted to steady operation, and the recovery of the quality of the permeated water (treated water) was examined. The results are shown in FIG. Comparative Example 2 (conventional method) in FIG. 4 is a case where pure water was passed immediately after cleaning. As shown in FIG. 4, in the case of this example, the time required for the resistivity of the permeated water 12a to reach 2 MΩ · cm was shortened by about 2 hours as compared with Comparative Example 2.
【００１９】（実施例３）図５に、使用した装置構成を
示した。この装置にあっては、実施例２の装置からイオ
ン交換式純水装置１０、及び純水タンク１１を除いた構
成であり、その他の構成及び実施条件は実施例２と同様
である。工業用水を前処理後、イオン交換処理すること
なく限外濾過膜装置１２に供給するようにしたので、限
外濾過膜装置へは抵抗率の小さい純水ではない水、即ち
１５０μＳ／ｃｍ（０．００６５ＭΩ・ｃｍ）のものが
流入したことになる。図６より、本実施例の場合もある
程度の洗浄時間短縮効果はあったが、比較例３と比べて
あまり大きな差がない。従って、本実施例の場合には、
酸通水工程が増える点などから考えて、実質的なメリッ
トは小さい。(Embodiment 3) FIG. 5 shows the apparatus configuration used. This device has the same structure as that of the second embodiment except that the ion exchange type pure water device 10 and the pure water tank 11 are omitted. After the industrial water was pretreated, it was supplied to the ultrafiltration membrane device 12 without being subjected to an ion exchange treatment, so that the ultrafiltration membrane device is not pure water having a small resistivity, that is, 150 μS / cm (0 This means that something that has flown in. As shown in FIG. 6, the cleaning time reduction effect of the present embodiment has been achieved to some extent, but it is not so different from that of Comparative Example 3. Therefore, in the case of this embodiment,
Considering that the number of acid water passing steps increases, the actual merit is small.
【００２０】以上の結果から考えて、本発明は処理水水
質が高純度である場合の分離膜に実施すれば特に有効で
あることは明らかである。From the above results, it is clear that the present invention is particularly effective when applied to a separation membrane when the quality of treated water is high purity.
【００２１】[0021]
【発明の効果】以上説明したように、本発明によれば膜
装置をアルカリ洗浄後、極めて短い時間で処理水の純度
が回復するので、採水不可能な時間が短縮され、実用面
でのメリットは大きい。As described above, according to the present invention, the purity of the treated water is recovered in an extremely short time after the membrane device is washed with an alkali, so that the time during which water cannot be collected is shortened and it is practical. The benefits are great.
【図１】本発明の実施に用いる水処理装置の１例を示す
フロー図である。FIG. 1 is a flow chart showing an example of a water treatment device used for carrying out the present invention.
【図２】図１の装置の膜洗浄を行なった後の装置運転時
間と処理水の抵抗率の関係を示すグラフである。FIG. 2 is a graph showing the relationship between the operating time of the apparatus after the membrane cleaning of the apparatus of FIG. 1 and the resistivity of treated water.
【図３】本発明の実施に用いる水処理装置の他の例を示
すフロー図である。FIG. 3 is a flowchart showing another example of the water treatment device used for carrying out the present invention.
【図４】図３の装置の膜洗浄を行なった後の装置運転時
間と処理水の抵抗率の関係を示すグラフである。FIG. 4 is a graph showing the relationship between the operating time of the apparatus after the membrane cleaning of the apparatus of FIG. 3 and the treated water resistivity.
【図５】本発明の実施に用いる水処理装置の更に他の例
を示すフロー図である。FIG. 5 is a flowchart showing still another example of the water treatment device used for carrying out the present invention.
【図６】図５の装置の膜洗浄を行なった後の装置運転時
間と処理水の抵抗率の関係を示すグラフである。FIG. 6 is a graph showing the relationship between the operating time of the apparatus after the membrane cleaning of the apparatus of FIG. 5 and the treated water resistivity.
【図７】本発明、及び従来の洗浄方法を説明するフロー
図である。FIG. 7 is a flowchart illustrating the present invention and a conventional cleaning method.
Claims (2)
装置の分離膜の洗浄方法において、まず膜装置にアルカ
リ性洗浄液を通水して水処理用分離膜をアルカリ性洗浄
液で洗浄し、次いで酸性水を通水した後、被処理水を通
水することを特徴とする水処理用分離膜の洗浄方法。1. A method for cleaning a separation membrane of a membrane device for treating water using a separation membrane for water treatment, wherein an alkaline cleaning liquid is first passed through the membrane device to wash the separation membrane for water treatment with an alkaline cleaning liquid, Next, a method for cleaning a separation membrane for water treatment, which comprises passing acidic water and then water to be treated.
１ＭΩ・ｃｍ以上のものである請求項１に記載の洗浄方
法。2. The cleaning method according to claim 1, wherein the quality of the treated water taken out from the membrane device is 1 MΩ · cm or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5161770A JP3024693B2 (en) | 1993-06-30 | 1993-06-30 | Cleaning method for separation membrane for water treatment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5161770A JP3024693B2 (en) | 1993-06-30 | 1993-06-30 | Cleaning method for separation membrane for water treatment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0716566A true JPH0716566A (en) | 1995-01-20 |
| JP3024693B2 JP3024693B2 (en) | 2000-03-21 |
Family
ID=15741576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5161770A Expired - Fee Related JP3024693B2 (en) | 1993-06-30 | 1993-06-30 | Cleaning method for separation membrane for water treatment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3024693B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1304157A1 (en) * | 2001-10-19 | 2003-04-23 | Technologies Avancees & Membranes Industrielles S.A. | Method for cleaning a ceramic membrane for use in the filtration of wines |
| JP2008161807A (en) * | 2006-12-28 | 2008-07-17 | Kuraray Co Ltd | Filtering device |
| US7414238B2 (en) | 2004-09-28 | 2008-08-19 | Mabuchi Motor Co., Ltd. | Optical encoder device for small-sized motor and method of producing the same |
| WO2010123238A3 (en) * | 2009-04-20 | 2011-03-10 | Kolon Industries, Inc. | Method for cleaning filtering membrane |
| WO2011068027A1 (en) * | 2009-12-02 | 2011-06-09 | 三菱重工業株式会社 | Method for cleaning filtration membrane |
-
1993
- 1993-06-30 JP JP5161770A patent/JP3024693B2/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1304157A1 (en) * | 2001-10-19 | 2003-04-23 | Technologies Avancees & Membranes Industrielles S.A. | Method for cleaning a ceramic membrane for use in the filtration of wines |
| FR2831078A1 (en) * | 2001-10-19 | 2003-04-25 | Tech Avancees & Membranes Ind | NEW PROCESS FOR CLEANING A CERAMIC MEMBRANE USED IN WINE FILTRATION |
| US7414238B2 (en) | 2004-09-28 | 2008-08-19 | Mabuchi Motor Co., Ltd. | Optical encoder device for small-sized motor and method of producing the same |
| JP2008161807A (en) * | 2006-12-28 | 2008-07-17 | Kuraray Co Ltd | Filtering device |
| WO2010123238A3 (en) * | 2009-04-20 | 2011-03-10 | Kolon Industries, Inc. | Method for cleaning filtering membrane |
| US8506722B2 (en) | 2009-04-20 | 2013-08-13 | Kolon Industries Inc. | Method for cleaning filtering membrane |
| WO2011068027A1 (en) * | 2009-12-02 | 2011-06-09 | 三菱重工業株式会社 | Method for cleaning filtration membrane |
| JP2011115712A (en) * | 2009-12-02 | 2011-06-16 | Mitsubishi Heavy Ind Ltd | Washing method of filter membrane |
| EP2508249A1 (en) * | 2009-12-02 | 2012-10-10 | Mitsubishi Heavy Industries, Ltd. | Method for cleaning filtration membrane |
| EP2508249A4 (en) * | 2009-12-02 | 2014-07-30 | Mitsubishi Heavy Ind Ltd | Method for cleaning filtration membrane |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3024693B2 (en) | 2000-03-21 |
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