JPH07128263A - X-ray analyzing device - Google Patents
X-ray analyzing deviceInfo
- Publication number
- JPH07128263A JPH07128263A JP5297362A JP29736293A JPH07128263A JP H07128263 A JPH07128263 A JP H07128263A JP 5297362 A JP5297362 A JP 5297362A JP 29736293 A JP29736293 A JP 29736293A JP H07128263 A JPH07128263 A JP H07128263A
- Authority
- JP
- Japan
- Prior art keywords
- ray
- rays
- sample
- fluorescent
- diffracted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、試料からの蛍光Ｘ線
および回折Ｘ線に基づいて試料の分析を行うＸ線分析装
置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray analyzer for analyzing a sample based on fluorescent X-rays and diffracted X-rays from the sample.
【０００２】[0002]
【従来の技術】蛍光Ｘ線分析装置およびＸ線回折分析装
置は、ともにＸ線分析装置の一種である。蛍光Ｘ線分析
装置は、試料に励起Ｘ線を照射し、試料の原子を励起す
ることで、試料に含まれる元素固有の蛍光Ｘ線を検出し
て、試料の組成や膜厚などの分析を行う装置である。一
方、Ｘ線回折分析装置は、試料にＸ線を照射し、試料の
結晶構造（格子）で回折された回折Ｘ線を検出すること
で、試料の結晶構造を分析する装置である。2. Description of the Related Art An X-ray fluorescence analyzer and an X-ray diffraction analyzer are both types of X-ray analyzer. An X-ray fluorescence analyzer irradiates a sample with excited X-rays and excites atoms in the sample, thereby detecting fluorescent X-rays specific to the elements contained in the sample and analyzing the composition and film thickness of the sample. It is a device to perform. On the other hand, the X-ray diffraction analyzer is an apparatus that analyzes the crystal structure of the sample by irradiating the sample with X-rays and detecting the diffracted X-rays diffracted by the crystal structure (lattice) of the sample.
【０００３】[0003]
【発明が解決しようとする課題】一般に、試料を分析す
る場合、試料の組成または結晶構造の一方のみを分析す
ることが多く、組成および結晶構造の双方を分析するこ
とは少ない。しかし、セメント原料のクリンカなどで
は、その品質管理上、組成および結晶構造の両方を知る
必要がある。したがって、１つのＸ線分析装置で、蛍光
Ｘ線分析およびＸ線回折分析を可能とすることは有意義
である。Generally, when a sample is analyzed, only one of the composition and the crystal structure of the sample is analyzed, and both the composition and the crystal structure are rarely analyzed. However, for clinker, which is a raw material for cement, it is necessary to know both the composition and the crystal structure for quality control. Therefore, it is significant to enable fluorescent X-ray analysis and X-ray diffraction analysis with one X-ray analysis device.
【０００４】しかし、従来は、以下に説明する理由によ
り、１つの装置で２種類の分析を行うことはなされてい
なかった。Ｘ線の回折条件は、下記のブラッグの式によ
り与えられる。 ２ｄsin θ＝ｎλ ｄ：結晶の面間隔 θ：回折角 λ：回折されるＸ線の波長 ｎ：反射の次数（１，２，３…） ここで、クリンカ中のＣａＯの結晶の面間隔ｄは、2.40
56Åであり、用いるＸ線Ｂ１の波長λを1.5418Å（Ｃｕ
Ｋα線）とすると、回折角θは18.69 °になる。したが
って、図３（a)のように、反射型のＸ線回折を行う場合
には、試料１への入射角α（α＝θ）を比較的小さな角
度に設定する。However, conventionally, two types of analyzes have not been performed by one device for the reason described below. The X-ray diffraction condition is given by the following Bragg equation. 2dsin θ = nλ d: Crystallographic spacing θ: Diffraction angle λ: Diffracted X-ray wavelength n: Order of reflection (1, 2, 3 ...) Here, CaO crystallographic spacing d in the clinker is , 2.40
56Å, and the wavelength λ of the X-ray B1 used is 1.5418Å (Cu
Kα line), the diffraction angle θ becomes 18.69 °. Therefore, as shown in FIG. 3A, when performing reflection type X-ray diffraction, the incident angle α (α = θ) on the sample 1 is set to a relatively small angle.
【０００５】一方、図３（ｂ）に示すように、蛍光Ｘ線
分析装置では、試料１に照射される励起Ｘ線Ｂ１の強度
を大きくして蛍光Ｘ線Ｂ２の強度を大きくするために、
励起Ｘ線Ｂ１の入射角αが９０°程度の大きな角度に設
定される。On the other hand, as shown in FIG. 3B, in the fluorescent X-ray analyzer, in order to increase the intensity of the excited X-ray B1 and the intensity of the fluorescent X-ray B2 with which the sample 1 is irradiated,
The incident angle α of the excited X-ray B1 is set to a large angle of about 90 °.
【０００６】このように、Ｘ線回折と蛍光Ｘ線分析で
は、試料１に入射させるＸ線Ｂ１の入射角αが大きく異
なっているので、１つの装置で２種類の分析を行うこと
はなされていない。As described above, in X-ray diffraction and fluorescent X-ray analysis, since the incident angle α of the X-ray B1 incident on the sample 1 is largely different, two kinds of analyzes have been performed by one device. Absent.
【０００７】なお、図３（ｃ）のように、Ｘ線回折にお
いて、入射角αを大きくすることも考えられる。しか
し、こうすると、回折Ｘ線Ｂ３を試料１の表面に取り出
す透過型のＸ線回折となり、一方、試料１の厚さは一般
に２mm〜３mm程度であるから、十分な強度の回折Ｘ線Ｂ
３を取り出すことができないので、入射角αを大きくす
ることはできない。It is also possible to increase the incident angle α in X-ray diffraction as shown in FIG. 3 (c). However, when this is done, transmission-type X-ray diffraction is performed in which the diffracted X-rays B3 are extracted onto the surface of the sample 1. On the other hand, the thickness of the sample 1 is generally about 2 mm to 3 mm.
Since 3 cannot be taken out, the incident angle α cannot be increased.
【０００８】この発明は、かかる課題に鑑みてなされた
もので、１つの装置で、蛍光Ｘ線分析およびＸ線回折分
析の両方を行い得るＸ線分析装置を提供することを目的
とする。The present invention has been made in view of the above problems, and an object of the present invention is to provide an X-ray analysis apparatus capable of performing both fluorescent X-ray analysis and X-ray diffraction analysis with one apparatus.
【０００９】[0009]
【課題を解決するための手段】上記目的を達成するため
に、この発明は、蛍光Ｘ線分析装置の基本的構成に加
え、試料に照射するＸ線に含まれる波長の長い特性Ｘ線
であって試料により回折されて反射された特性Ｘ線を分
光する分光素子と、この分光素子によって回折された波
長の長い特性Ｘ線を検出する回折Ｘ線検出器とを備えて
いる。In order to achieve the above object, the present invention provides a characteristic X-ray having a long wavelength contained in an X-ray irradiating a sample, in addition to the basic structure of a fluorescent X-ray analyzer. A spectroscopic element that disperses the characteristic X-rays diffracted and reflected by the sample and a diffractive X-ray detector that detects the characteristic X-rays having a long wavelength diffracted by the spectroscopic element are provided.
【００１０】[0010]
【作用】この発明によれば、特性Ｘ線のうち波長の長い
特性Ｘ線を用いてＸ線回折分析を行うので、回折角が大
きくなる。そのため、Ｘ線を大きな入射角度で試料に入
射させても、試料の表面から回折Ｘ線を取り出すことが
可能となる。According to the present invention, since the X-ray diffraction analysis is performed using the characteristic X-rays having a long wavelength among the characteristic X-rays, the diffraction angle becomes large. Therefore, even if X-rays are incident on the sample at a large incident angle, it is possible to extract the diffracted X-rays from the surface of the sample.
【００１１】[0011]
【実施例】以下、この発明の一実施例を図面にしたがっ
て説明する。図１において、試料１は、セメント原料の
クリンカで、ＣａＯの多結晶を含んでいる。Ｘ線分析装
置は、Ｘ線管（照射装置）３と、フィルタ装置２と、第
１および第２の分光素子４Ａ，４Ｂと、第１および第２
の測定器５Ａ，５Ｂを備えている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. In FIG. 1, sample 1 is a clinker as a cement raw material and contains a polycrystal of CaO. The X-ray analysis device includes an X-ray tube (irradiation device) 3, a filter device 2, first and second spectroscopic elements 4A and 4B, and first and second
Measuring instruments 5A and 5B.
【００１２】上記フィルタ装置２は、Ｘ線管３の出射窓
の近傍に設けられており、図２に示すように、複数のフ
ィルタ２ａ，２ｂ、透過窓２１およびコリメータ２０を
備えている。各フィルタ２ａ，２ｂ、透過窓２１および
コリメータ２０は、０点を中心に回転して、図１の励起
Ｘ線Ｂ１の光路に挿入される。上記各フィルタ２ａ，２
ｂ（図２）は、互いに異なる元素を含んでおり、蛍光Ｘ
線分析の際に用いられ、Ｘ線Ｂ１のうちバックグラウン
ドとなる所定の波長の成分を吸収するものである。一
方、上記コリメータ２０（図２）は、Ｘ線Ｂ１を平行光
にして、試料１に入射するＸ線Ｂ１の角度の拡がりを小
さくするものである。第１および第２の測定器５Ａ，５
Ｂは、それぞれ、蛍光Ｘ線検出器８Ａおよび回折Ｘ線検
出器８Ｂと、第１および第２計数回路部９Ａ，９Ｂとを
備えている。The filter device 2 is provided in the vicinity of the emission window of the X-ray tube 3 and is provided with a plurality of filters 2a and 2b, a transmission window 21 and a collimator 20, as shown in FIG. Each of the filters 2a and 2b, the transmission window 21, and the collimator 20 rotate about the 0 point and are inserted into the optical path of the excitation X-ray B1 in FIG. Each of the above filters 2a, 2
b (FIG. 2) contains elements different from each other, and fluorescence X
It is used at the time of line analysis and absorbs a component of a predetermined wavelength that becomes a background in the X-ray B1. On the other hand, the collimator 20 (FIG. 2) collimates the X-ray B1 to reduce the angular spread of the X-ray B1 incident on the sample 1. First and second measuring instruments 5A, 5
B includes a fluorescent X-ray detector 8A and a diffraction X-ray detector 8B, and first and second counting circuit units 9A and 9B, respectively.
【００１３】Ｘ線管３は、試料１の表面に対向して配設
されている。このＸ線管３は、たとえばロジウムＲｈを
ターゲット材としており、ＲｈＫα線，ＲｈＫβ線およ
びＲｈＬα線などの互いに波長の異なる複数種類の特性
Ｘ線を含むＸ線Ｂ１を出射するものである。Ｘ線Ｂ１を
受けた試料１は、原子が励起されて、試料１に含まれて
いる元素固有の蛍光Ｘ線Ｂ２を発生するとともに、Ｃａ
Ｏの多結晶により、Ｘ線Ｂ１の一部を回折Ｘ線Ｂ３とし
て回折する。The X-ray tube 3 is arranged so as to face the surface of the sample 1. The X-ray tube 3 uses, for example, rhodium Rh as a target material, and emits X-rays B1 including a plurality of types of characteristic X-rays having different wavelengths such as RhKα rays, RhKβ rays, and RhLα rays. In the sample 1 that has received the X-ray B1, the atoms are excited to generate the fluorescent X-ray B2 peculiar to the element contained in the sample 1 and Ca
Due to the polycrystal of O, a part of the X-ray B1 is diffracted as a diffracted X-ray B3.
【００１４】上記両分光素子４Ａ，４ＢおよびＸ線検出
器８Ａ，８Ｂは、たとえば真空雰囲気やヘリウムのよう
な希ガスの雰囲気に保持された分光室に収納されてお
り、全てのＸ線Ｂ１，Ｂ２，Ｂ２１，Ｂ３は、かかる雰
囲気内を通過する。第１の分光素子４Ａは、図示してい
ないが複数個設けられており、試料１からの蛍光Ｘ線Ｂ
２および回折Ｘ線Ｂ３のうち、測定しようとする元素の
蛍光Ｘ線Ｂ２１を分光する。一方、第２の分光素子４Ｂ
は、試料１からの蛍光Ｘ線Ｂ２および回折Ｘ線Ｂ３のう
ち、波長の長い特性Ｘ線であるＲｈＬα線（回折Ｘ線Ｂ
３）を分光する。これら第１および第２の分光素子４
Ａ，４Ｂで分光された蛍光Ｘ線Ｂ２１および回折Ｘ線Ｂ
３は、それぞれ、第１および第２のＸ線検出器８Ａ，８
Ｂに入射する。なお、回折Ｘ線Ｂ３（ＲｈＬα線）の取
出角βは、測定対象であるＣａＯの多結晶の格子面間隔
ｄおよび検出する回折Ｘ線Ｂ３の波長から上記ブラッグ
の式に従って算出された２θ（１４５．６９°）に基づ
いて設定される。たとえば、Ｘ線Ｂ１の入射角αを９０
°とすると、取出角βは５５．６９°になる。Both the spectroscopic elements 4A, 4B and the X-ray detectors 8A, 8B are housed in a spectroscopic chamber maintained in, for example, a vacuum atmosphere or an atmosphere of a rare gas such as helium, and all X-rays B1, B2, B21, B3 pass through such an atmosphere. Although not shown, a plurality of first spectroscopic elements 4A are provided, and the fluorescent X-rays B from the sample 1 are provided.
Of 2 and the diffracted X-ray B3, the fluorescent X-ray B21 of the element to be measured is separated. On the other hand, the second spectroscopic element 4B
Of the fluorescent X-rays B2 and diffracted X-rays B3 from the sample 1 is a characteristic X-ray with a long wavelength, that is, a RhLα ray (diffracted X-ray
3) is dispersed. These first and second spectroscopic elements 4
Fluorescent X-ray B21 and diffracted X-ray B, which are spectrally separated by A and 4B
3 is the first and second X-ray detectors 8A, 8 respectively.
It is incident on B. The extraction angle β of the diffracted X-ray B3 (RhLα ray) was calculated according to the Bragg equation from the lattice spacing d of the CaO polycrystal to be measured and the wavelength of the diffracted X-ray B3 to be detected. .69 °). For example, the incident angle α of X-ray B1 is 90
If the angle is °, the take-out angle β becomes 55.69 °.
【００１５】上記第１および第２のＸ線検出器８Ａ，８
Ｂは、それぞれ、入射した蛍光Ｘ線Ｂ２１および回折Ｘ
線Ｂ３（ＲｈＬα線）を検出して、検出出力ｅ１，ｅ２
を第１および第２計数回路部９Ａ，９Ｂに出力する。第
１および第２計数回路部９Ａ，９Ｂは、それぞれ、検出
出力ｅ１，ｅ２をカウントして、蛍光Ｘ線Ｂ２１および
回折Ｘ線Ｂ３（ＲｈＬα線）の強度を測定信号ｘ１，ｘ
２として第１および第２の演算器６Ａ，６Ｂに出力す
る。第１および第２の演算器６Ａ，６Ｂは、それぞれ、
上記測定信号ｘ１，ｘ２を受けて、蛍光Ｘ線Ｂ２１およ
び回折Ｘ線Ｂ３（ＲｈＬα線）の測定強度に基づいて、
試料中の元素の濃度およびＣａＯの結晶状態を求める。The above-mentioned first and second X-ray detectors 8A, 8
B is the incident fluorescent X-ray B21 and the diffraction X-ray B21, respectively.
The line B3 (RhLα line) is detected, and the detection outputs e1 and e2
Is output to the first and second counting circuit units 9A and 9B. The first and second counting circuit sections 9A and 9B respectively count the detection outputs e1 and e2 to measure the intensities of the fluorescent X-ray B21 and the diffracted X-ray B3 (RhLα ray) as measurement signals x1 and x.
2 is output to the first and second arithmetic units 6A and 6B. The first and second arithmetic units 6A and 6B are respectively
Upon receiving the measurement signals x1 and x2, based on the measurement intensities of the fluorescent X-ray B21 and the diffracted X-ray B3 (RhLα ray),
The concentration of elements in the sample and the crystalline state of CaO are obtained.
【００１６】つぎに、分析方法について説明する。ま
ず、蛍光Ｘ線分析を行う際には、図２のフィルタ２ａ，
２ｂまたは透過窓２１を選択して、図１のＸ線管３の出
射窓に対向させる。つづいて、Ｘ線管３から拡がりのあ
るＸ線Ｂ１を励起Ｘ線として試料１に照射する。Ｘ線Ｂ
１を受けた試料１は、ＲｈＫα線やＲｈＫβ線などによ
って原子が励起されて、元素固有の蛍光Ｘ線Ｂ２が発生
する。蛍光Ｘ線Ｂ２は、第１の分光素子４Ａにより測定
対象の波長の蛍光Ｘ線Ｂ２１が回折されて、蛍光Ｘ線検
出器８Ａで検出され、周知の蛍光Ｘ線分析がなされる。
これにより、試料１の組成の分析がなされる。Next, the analysis method will be described. First, when performing the fluorescent X-ray analysis, the filter 2a of FIG.
2b or the transmission window 21 is selected to face the emission window of the X-ray tube 3 in FIG. Next, the sample 1 is irradiated with the spread X-ray B1 from the X-ray tube 3 as an excited X-ray. X-ray B
In the sample 1 which received 1, the atoms are excited by the RhKα ray and the RhKβ ray, and the fluorescent X-ray B2 peculiar to the element is generated. The fluorescent X-rays B2 are diffracted by the first spectroscopic element 4A into the fluorescent X-rays B21 having the wavelength to be measured, and are detected by the fluorescent X-ray detector 8A, and the known fluorescent X-ray analysis is performed.
Thereby, the composition of the sample 1 is analyzed.
【００１７】つぎに、Ｘ線回折分析を行う際には、図２
のコリメータ２０を選択して、図１のＸ線管３の出射窓
に対向させる。つづいて、Ｘ線管３からコリメータ２０
を通して平行なＸ線Ｂ１を試料１に照射する。Ｘ線Ｂ１
を受けた試料１は、蛍光Ｘ線Ｂ２を発生するとともに、
試料１に含まれる結晶の格子で、Ｘ線Ｂ１を種々の方向
に回折させる。回折Ｘ線Ｂ３は、２θが所定の角度に設
定されているので、試料１中に含まれる結晶の格子との
関係上、所定の波長の特性Ｘ線（たとえばＲｈＬα線）
のみが、第２の分光素子４Ｂに向かう。第２の分光素子
４Ｂは、入射した蛍光Ｘ線Ｂ２および回折Ｘ線Ｂ３のう
ち、ブラッグの式に従って、回折Ｘ線（ＲｈＬα線）Ｂ
３のみを分光する。分光されたＲｈＬα線Ｂ３は、回折
Ｘ線検出器８Ｂで検出され、周知のＸ線回折分析がなさ
れる。これにより、試料１の結晶構造を知ることができ
る。Next, when performing the X-ray diffraction analysis, as shown in FIG.
The collimator 20 is selected so as to face the emission window of the X-ray tube 3 in FIG. Next, from the X-ray tube 3 to the collimator 20
The sample 1 is irradiated with parallel X-rays B1 through. X-ray B1
The sample 1 that received the light emits fluorescent X-ray B2 and
The crystal lattice contained in the sample 1 diffracts the X-ray B1 in various directions. Since 2θ is set to a predetermined angle in the diffracted X-ray B3, a characteristic X-ray (for example, RhLα ray) having a predetermined wavelength is taken into consideration in relation to the crystal lattice contained in the sample 1.
Only towards the second dispersive element 4B. Of the incident fluorescent X-rays B2 and diffracted X-rays B3, the second spectroscopic element 4B follows the Bragg equation and the diffracted X-rays (RhLα rays) B
Only 3 is separated. The separated RhLα ray B3 is detected by the diffraction X-ray detector 8B, and the well-known X-ray diffraction analysis is performed. Thereby, the crystal structure of Sample 1 can be known.
【００１８】このように、このＸ線分析装置は、Ｘ線管
３から出射されたＸ線Ｂ１のうち、波長の長い特性Ｘ線
であるＲｈＬα線を第２の分光素子４Ｂにより分光する
から、前述のブラッグの式から分かるように、２θが大
きくなる。そのため、Ｘ線管３からのＸ線Ｂ１の入射角
αが大きくても回折Ｘ線Ｂ３（ＲｈＬα線）を試料１の
表面側に取り出すことができる。したがって、Ｘ線管３
を試料１に対向させる蛍光Ｘ線分析装置を用いて、Ｘ線
回折分析を行うことができる。As described above, since the X-ray analysis apparatus disperses the RhLα rays, which are characteristic X-rays having a long wavelength, out of the X-rays B1 emitted from the X-ray tube 3, by the second spectroscopic element 4B, As can be seen from the above Bragg equation, 2θ becomes large. Therefore, even if the incident angle α of the X-ray B1 from the X-ray tube 3 is large, the diffracted X-ray B3 (RhLα ray) can be extracted to the surface side of the sample 1. Therefore, the X-ray tube 3
X-ray diffraction analysis can be performed by using a fluorescent X-ray analyzer in which the sample is opposed to the sample 1.
【００１９】ところで、ＲｈＬα線のように波長の長い
Ｘ線は、空気などにより吸収される。そのため、通常、
大気で分析を行うＸ線回折装置の場合には、ＲｈＬα線
などの波長の長いＸ線を用いてＸ線回折分析を行うこと
はできない。これに対し、このＸ線分析装置は、一般の
蛍光Ｘ線分析装置を流用するものであるから、Ｘ線Ｂ
１，Ｂ２，Ｂ３が真空雰囲気内や希ガスの雰囲気内を通
過するので、波長の長いＲｈＬα線であっても吸収され
るおそれがない。したがって、Ｘ線Ｂ１に含まれる波長
の長い特性Ｘ線を用いてＸ線回折分析を行うことができ
る。By the way, X-rays having a long wavelength such as RhLα rays are absorbed by air or the like. Therefore, usually
In the case of an X-ray diffractometer that performs analysis in the atmosphere, X-ray diffraction analysis cannot be performed using long-wavelength X-rays such as RhLα rays. On the other hand, since this X-ray analyzer is a general fluorescent X-ray analyzer, the X-ray B
Since 1, B2, B3 pass through the vacuum atmosphere or the atmosphere of the rare gas, there is no possibility that RhLα rays having a long wavelength will be absorbed. Therefore, the X-ray diffraction analysis can be performed using the characteristic X-ray having a long wavelength contained in the X-ray B1.
【００２０】なお、上記実施例では、図２のフィルタ装
置２にコリメータ２０を設けて、蛍光Ｘ線分析とＸ線回
折分析とを別々に行ったが、必ずしも、コリメータ２０
を設ける必要はない。たとえば、Ｘ線回折に関する精度
が低くてもよい場合などは、Ｘ線回折を行う際にＸ線Ｂ
１を平行光にする必要はなく、この場合、フィルタ２
ａ，２ｂまたは透過窓２１を用いて蛍光Ｘ線分析とＸ線
回折分析とを同時に行うことができる。In the above-described embodiment, the collimator 20 is provided in the filter device 2 of FIG. 2 to perform the fluorescent X-ray analysis and the X-ray diffraction analysis separately, but the collimator 20 is not always necessary.
Need not be provided. For example, when the accuracy of X-ray diffraction may be low, the X-ray B
1 does not need to be parallel light, in this case the filter 2
The fluorescent X-ray analysis and the X-ray diffraction analysis can be simultaneously performed by using a, 2b or the transmission window 21.
【００２１】また、上記実施例では、波長の長い特性Ｘ
線として、図１のＸ線管３から発生したＲｈＬα線を用
いたが、必ずしもＸ線管３から発生した特性Ｘ線を用い
る必要はない。たとえば、Ｘ線管３からのＸ線Ｂ１で図
２のフィルタ２ａ，２ｂの原子が励起されて発生した蛍
光Ｘ線であって、上記Ｘ線管３からのＬ線よりも波長の
長い、たとえばジルコニウムのＬ線のような特性Ｘ線を
用いて、Ｘ線回折分析を行ってもよい。この場合、フィ
ルタ装置２およびＸ線管３によって、照射装置が構成さ
れる。In the above embodiment, the characteristic X with a long wavelength is used.
Although the RhLα ray generated from the X-ray tube 3 in FIG. 1 is used as the ray, it is not always necessary to use the characteristic X-ray generated from the X-ray tube 3. For example, it is a fluorescent X-ray generated by exciting the atoms of the filters 2a and 2b of FIG. 2 with the X-ray B1 from the X-ray tube 3, and has a longer wavelength than the L-ray from the X-ray tube 3, for example, X-ray diffraction analysis may be performed using characteristic X-rays such as zirconium L-rays. In this case, the filter device 2 and the X-ray tube 3 constitute an irradiation device.
【００２２】[0022]
【発明の効果】以上説明したように、この発明によれ
ば、特性Ｘ線のうち波長の長い特性Ｘ線を用いてＸ線回
折分析を行うので、回折角が大きくなる。そのため、Ｘ
線を大きな入射角度で試料に入射させても、試料の表面
から回折Ｘ線を取り出すことが可能となる。したがっ
て、励起Ｘ線を大きな入射角で試料に入射させる蛍光Ｘ
線分析装置を用いて、Ｘ線回折分析を行うことができ
る。As described above, according to the present invention, since the X-ray diffraction analysis is performed using the characteristic X-ray having the long wavelength among the characteristic X-rays, the diffraction angle becomes large. Therefore, X
Even if a ray is incident on the sample at a large incident angle, it is possible to extract the diffracted X-ray from the surface of the sample. Therefore, the fluorescent X that causes the excitation X-ray to enter the sample at a large incident angle.
X-ray diffraction analysis can be performed using a line analyzer.
【図１】この発明の一実施例を示すＸ線分析装置の概略
構成図である。FIG. 1 is a schematic configuration diagram of an X-ray analysis apparatus showing an embodiment of the present invention.
【図２】フィルタ装置の斜視図である。FIG. 2 is a perspective view of a filter device.
【図３】Ｘ線の入射角と取出角の関係を示す正面図であ
る。FIG. 3 is a front view showing a relationship between an X-ray incident angle and an X-ray extraction angle.
１…試料、３…Ｘ線管、４Ａ…第１の分光素子、４Ｂ…
第２の分光素子、８Ａ…蛍光Ｘ線検出器、８Ｂ…回折Ｘ
線検出器、Ｂ１…Ｘ線、Ｂ２，Ｂ２１…蛍光Ｘ線、Ｂ３
…回折Ｘ線。1 ... Sample, 3 ... X-ray tube, 4A ... 1st spectroscopic element, 4B ...
Second spectroscopic element, 8A ... Fluorescent X-ray detector, 8B ... Diffraction X
X-ray detector, B1 ... X-ray, B2, B21 ... Fluorescent X-ray, B3
… Diffracted X-rays.
Claims (1)
を含むＸ線を試料に照射する照射装置と、 上記試料から発生した蛍光Ｘ線を分光する第１の分光素
子と、 この第１の分光素子によって分光された蛍光Ｘ線を検出
する蛍光Ｘ線検出器と、 上記特性Ｘ線のうち波長の長い特性Ｘ線であって上記試
料により回折されて反射された特性Ｘ線を分光する第２
の分光素子と、 この第２の分光素子によって分光された波長の長い特性
Ｘ線を検出する回折Ｘ線検出器とを備えたＸ線分析装
置。1. An irradiation device for irradiating a sample with X-rays including a plurality of types of characteristic X-rays having different wavelengths, a first spectroscopic element for separating fluorescent X-rays generated from the sample, and A fluorescent X-ray detector for detecting fluorescent X-rays dispersed by the spectroscopic element, and a spectral X-ray detector for separating characteristic X-rays having a long wavelength among the characteristic X-rays, which is diffracted and reflected by the sample. Two
An X-ray analysis apparatus comprising: the spectroscopic element and the diffractive X-ray detector that detects the characteristic X-ray having a long wavelength that is dispersed by the second spectroscopic element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29736293A JP3160135B2 (en) | 1993-11-02 | 1993-11-02 | X-ray analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29736293A JP3160135B2 (en) | 1993-11-02 | 1993-11-02 | X-ray analyzer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07128263A true JPH07128263A (en) | 1995-05-19 |
| JP3160135B2 JP3160135B2 (en) | 2001-04-23 |
Family
ID=17845520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29736293A Expired - Fee Related JP3160135B2 (en) | 1993-11-02 | 1993-11-02 | X-ray analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3160135B2 (en) |
Cited By (8)
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|---|---|---|---|---|
| JP2002350373A (en) * | 2001-05-29 | 2002-12-04 | Seiko Instruments Inc | Complex x-ray analyzing apparatus |
| JP2007155651A (en) * | 2005-12-08 | 2007-06-21 | Rigaku Industrial Co | Multi-element simultaneous type fluorescent x-ray analyzer |
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| JP2011089987A (en) * | 2009-10-22 | 2011-05-06 | Panalytical Bv | X-ray diffraction and fluorescence |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002350373A (en) * | 2001-05-29 | 2002-12-04 | Seiko Instruments Inc | Complex x-ray analyzing apparatus |
| JP2007155651A (en) * | 2005-12-08 | 2007-06-21 | Rigaku Industrial Co | Multi-element simultaneous type fluorescent x-ray analyzer |
| JP2009236622A (en) * | 2008-03-26 | 2009-10-15 | Tohken Co Ltd | High-resolution x-ray microscopic apparatus with fluorescent x-ray analysis function |
| JP2011089987A (en) * | 2009-10-22 | 2011-05-06 | Panalytical Bv | X-ray diffraction and fluorescence |
| JP2013224923A (en) * | 2012-03-23 | 2013-10-31 | Rigaku Corp | X-ray composite device |
| CN107238620A (en) * | 2017-07-26 | 2017-10-10 | 中国地质大学（武汉） | A kind of XRF diffraction integrated analysis instrument of rotatable sample |
| CN107238620B (en) * | 2017-07-26 | 2023-03-24 | 中国地质大学（武汉） | X-ray fluorescence diffraction integrated analyzer of rotatable sample |
| WO2020008727A1 (en) * | 2018-07-04 | 2020-01-09 | 株式会社リガク | Luminescent x-ray analysis device |
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| JP2021189088A (en) * | 2020-06-02 | 2021-12-13 | 株式会社島津製作所 | Analyzer and method for analysis |
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|---|---|
| JP3160135B2 (en) | 2001-04-23 |
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