JPH07116565B2 - Magnetostrictive layer forming method and torque sensor using the magnetostrictive layer - Google Patents
Magnetostrictive layer forming method and torque sensor using the magnetostrictive layerInfo
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- JPH07116565B2 JPH07116565B2 JP60011845A JP1184585A JPH07116565B2 JP H07116565 B2 JPH07116565 B2 JP H07116565B2 JP 60011845 A JP60011845 A JP 60011845A JP 1184585 A JP1184585 A JP 1184585A JP H07116565 B2 JPH07116565 B2 JP H07116565B2
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- magnetostrictive layer
- magnetostrictive
- alloy layer
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Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、磁歪層の形成方法およびこの磁歪層を用いた
トルクセンサに関するもので、特に磁気の変化によって
トルクを検出するトルクセンサに関するものである。Description: TECHNICAL FIELD The present invention relates to a method for forming a magnetostrictive layer and a torque sensor using the magnetostrictive layer, and more particularly to a torque sensor that detects torque by a change in magnetism. is there.
従来から例えば円柱状の被検出部材の表面にアモルファ
ス化した磁歪層を形成したトルクセンサが知られてい
る。Conventionally, there is known a torque sensor in which an amorphous magnetostrictive layer is formed on the surface of a cylindrical member to be detected.
このトルクセンサは、被検出部材のねじれ等に伴う磁歪
層の磁気的な変化によって、トルクを検出するものであ
る。This torque sensor detects torque by the magnetic change of the magnetostrictive layer due to the twist of the member to be detected.
このトルクセンサに用いられている磁歪層は、被検出部
材表面に樹脂層を介して、あらかじめアモルファス化し
た金属箔を接着することによって得られる。The magnetostrictive layer used in this torque sensor is obtained by adhering a metal foil which has been amorphized in advance to the surface of a member to be detected via a resin layer.
しかしながら、被検出部材表面にあらかじめアモルファ
ス化した金属箔を、樹脂層を介して接着することにより
磁歪層を形成するには以下の問題が生じる。However, the following problems occur when the magnetostrictive layer is formed by adhering a metal foil, which has been amorphized in advance, to the surface of the member to be detected through the resin layer.
即ち、あらかじめアモルファス化した金属箔を円柱状の
被検出部材に接着させると、金属箔の外表面側に、内部
表面側に比べてひっぱりの残留応力が生じてしまう。That is, if a metal foil that has been amorphized in advance is adhered to a cylindrical member to be detected, a tensile residual stress is generated on the outer surface side of the metal foil as compared with the inner surface side.
そして、この残留応力のために、アモルファス化によっ
て得られる所望の磁気的特性が劣化するという問題が生
じてしまう。Then, due to this residual stress, there arises a problem that desired magnetic characteristics obtained by amorphization are deteriorated.
また、この残留応力は、接着状態のバラツキから場所に
よって不均一になるため、アモルファス磁歪層の磁気特
性もまた不均一になってしまう。Further, this residual stress becomes non-uniform depending on the location due to variations in the adhesion state, and therefore the magnetic characteristics of the amorphous magnetostrictive layer also become non-uniform.
さらには、この残留応力を取り除くために、熱処理を行
う方法があるが、熱処理を行うことにより、アモルファ
ス化された磁歪層の強度がもろくなったり、磁歪層と被
検出部材とを接着している樹脂層の溶融化が生じ、磁歪
層と被検出部材との接着強度が劣化するという問題もま
た生じてしまう。Furthermore, in order to remove this residual stress, there is a method of performing a heat treatment. However, the heat treatment weakens the strength of the amorphized magnetostrictive layer or bonds the magnetostrictive layer and the member to be detected. There is also a problem that the resin layer is melted and the adhesive strength between the magnetostrictive layer and the member to be detected is deteriorated.
そこで、本発明は、上記の問題点に鑑みられたものであ
り、所望の磁気特性を得ることのできる磁歪層の形成方
法およびこの磁歪層を用いたトルクセンサを得ることを
目的とするものである。Therefore, the present invention has been made in view of the above problems, and an object of the present invention is to provide a method for forming a magnetostrictive layer capable of obtaining desired magnetic characteristics and a torque sensor using the magnetostrictive layer. is there.
そこで、本発明は、被検出部材表面にアモルファス（非
晶質）状態となり得る組成材料の合金層を形成する合金
層形成工程と、前記工程にて形成された合金層に、この
合金層が溶融する以上のエネルギーの高エネルギー電磁
波を照射して前記合金層を溶融・急冷させることにより
アモルファス化し磁歪層を形成する磁歪層形成工程と、
を有する磁歪層形成方法を提供するものである。Therefore, in the present invention, an alloy layer forming step of forming an alloy layer of a composition material that can be in an amorphous state on the surface of a member to be detected, and the alloy layer formed in the step is melted. A magnetostrictive layer forming step of forming a magnetostrictive layer by amorphizing by melting and quenching the alloy layer by irradiating high-energy electromagnetic waves with energy higher than
And a method for forming a magnetostrictive layer having the above.
また、被検出部材表面にアモルファス（非晶質）状態と
なり得る組成材料の合金層を形成し、前記合金層に高エ
ネルギー電磁波を照射して前記合金層を溶融させた後、
急冷することによりアモルファス化された磁歪層と、該
磁歪層の磁気的変化を検出する磁気変化検出手段とを有
するトルクセンサを提供するものである。In addition, after forming an alloy layer of a composition material that can be in an amorphous state on the surface of the member to be detected and irradiating the alloy layer with high-energy electromagnetic waves to melt the alloy layer,
The present invention provides a torque sensor having a magnetostrictive layer which is made amorphous by rapid cooling and a magnetic change detecting means for detecting a magnetic change of the magnetostrictive layer.
上記磁歪層形成方法を採用することによって、被検出部
材表面において、直接、アモルファス化された磁歪層を
形成することができるので、たとえ被検出部材の表面が
曲面をなしていたとしても磁歪層中に大きな残留応力を
存在させることなく均一かつ確実に所望の磁気特性を有
する磁歪層とすることができる。By adopting the above-mentioned magnetostrictive layer forming method, it is possible to directly form an amorphized magnetostrictive layer on the surface of the member to be detected, so that even if the surface of the member to be detected has a curved surface It is possible to obtain a magnetostrictive layer having desired magnetic characteristics uniformly and surely without causing a large residual stress.
さらにまた、所望の磁気特性を得ることができるので、
検出精度の優れたトルクセンサもまた得ることができ
る。Furthermore, since the desired magnetic characteristics can be obtained,
A torque sensor with excellent detection accuracy can also be obtained.
以下、アモルファス化した磁歪層を被検出部材表面に直
接形成する具体的方法を詳細に述べる。Hereinafter, a specific method of directly forming the amorphized magnetostrictive layer on the surface of the member to be detected will be described in detail.
まず、合金層成形工程について説明する。First, the alloy layer forming step will be described.
粉末状、線状または棒状のアモルファス化に適当な均一
な組成を有する合金材料を用意する。An alloy material having a uniform composition suitable for powdery, linear, or rod-shaped amorphization is prepared.
そして、ガス式（電気式、プラズマ式等）溶射ガンから
加熱溶融したこの合金材料の微粒子を、被検出部材表面
に射出する。Then, fine particles of this alloy material heated and melted from a gas type (electric type, plasma type, etc.) spray gun are injected onto the surface of the member to be detected.
その際の溶射条件は、粒径30〜100μｍの合金粉末を用
いた場合には、電圧50〜100V、電流300〜1000Aとし、１
分間に40〜50gの合金粉末を溶射距離100〜200mmで溶射
させる。The thermal spraying conditions at that time are: voltage of 50 to 100 V, current of 300 to 1000 A when alloy powder having a particle size of 30 to 100 μm is used, and 1
40 to 50 g of alloy powder is sprayed at a spraying distance of 100 to 200 mm per minute.
また、溶射時に合金層が形成しやすいように結合材とし
て、厚さ50〜100μｍ程度のNi−Al合金、Ni−Cr−Al合
金を被検出部材の表面にあらかじめ形成してもよい。Further, a Ni—Al alloy or Ni—Cr—Al alloy having a thickness of about 50 to 100 μm may be previously formed on the surface of the member to be detected as a binder so that the alloy layer is easily formed during thermal spraying.
このようにして噴射した溶融金属微粒子を、被検出部材
の表面に密着させ、合金層（厚さ20〜300μｍ）を形成
させた。被検出部材の表面は、あらかじめ前処理として
ブラスト、脱脂、酸洗い等によって、清浄化及び粗面化
をはかっておく必要がある。The molten metal fine particles thus sprayed were brought into close contact with the surface of the member to be detected to form an alloy layer (thickness 20 to 300 μm). The surface of the member to be detected needs to be cleaned and roughened in advance by blasting, degreasing, pickling, etc. as pretreatment.
上記条件によって、形成した合金層は被検出部材の表面
において、密着性が良いだけでなく、ち密度が高く、気
孔が少ないという結果が得られた。Under the above conditions, the obtained alloy layer has not only good adhesion on the surface of the member to be detected but also high density and few pores.
次に、磁歪層形成工程について説明する。Next, the magnetostrictive layer forming step will be described.
溶射によって形成した所望の合金層に機械加工例えば、
切削、研磨等を施して平滑にした後、高エネルギー電磁
波例えばレーザー光の照射によって合金層をアモルファ
ス化させ磁歪層とする。Machining the desired alloy layer formed by thermal spraying, for example:
After being subjected to cutting, polishing, etc. to make it smooth, the alloy layer is made amorphous by irradiation with a high-energy electromagnetic wave, for example, a laser beam to form a magnetostrictive layer.
レーザー光照射はCO2ガスを封入したレーザー光発生装
置から得られるビームを用いて、出力300〜1000W、レン
ズでビームを直径0.1〜0.5mmに絞り、ビームまたは被検
出部材のどちらかを移動させて行った。Laser beam irradiation uses a beam obtained from a laser beam generator filled with CO 2 gas, output 300 ~ 1000 W, squeeze the beam to a diameter of 0.1 ~ 0.5 mm with a lens, and move either the beam or the detected member. I went.
その被検出部材が平面状の場合には、その移動速度はＸ
方向に100〜1000mm/secで行い、１パスごとにＹ方向
（Ｘ方向に直角方向）に50〜200μｍずつ送って（いわ
ゆるレーザー光ビームをスキャンさせて）、合金層表面
に照射した。即ち、レーザー光によって照射される前記
合金層の部位を、連続的に変位させて照射を行った。If the detected member is flat, the moving speed is X.
Direction was performed at 100 to 1000 mm / sec, and each pass was sent in the Y direction (direction perpendicular to the X direction) by 50 to 200 μm (scanned with a laser beam) to irradiate the alloy layer surface. That is, irradiation was performed by continuously displacing the portion of the alloy layer irradiated with the laser beam.
レーザー光照射は、酸化を防止するために、アルゴンガ
ス雰囲気中で行い、試料の照射面以外を液体窒素あるい
は冷却水によって冷却しながら行った。Laser light irradiation was performed in an argon gas atmosphere in order to prevent oxidation, and was performed while cooling the surface other than the irradiated surface of the sample with liquid nitrogen or cooling water.
レーザー光照射により、瞬時に合金層の照射部は溶融さ
れるが、即座にその熱は被検出部材の表面から内部に奪
われるため、照射により溶融した合金部分は超急冷さ
れ、アモルファス化し、所望の磁気特性を有する磁歪層
を得ることができる。The irradiated part of the alloy layer is instantly melted by the laser light irradiation, but the heat is immediately absorbed from the surface of the detected member to the inside, so the alloy part melted by the irradiation is rapidly quenched and becomes amorphous. It is possible to obtain a magnetostrictive layer having the magnetic characteristics of
このようにして得られた磁歪層は表面が平滑な上、硬度
が高く照射条件を変えることによって、厚さ（深さ）を
20〜200μｍ程度に調整することが可能である。The magnetostrictive layer thus obtained has a smooth surface and high hardness, so that the thickness (depth) can be changed by changing the irradiation conditions.
It can be adjusted to about 20 to 200 μm.
以上のような方法をなして、被検出部材表面に直接アモ
ルファス化した磁歪層を形成することが可能である。It is possible to form the amorphized magnetostrictive layer directly on the surface of the member to be detected by the above method.
そして、このように被検出部材表面に直接アモルファス
化させた磁歪層を採用することによって、磁歪層の内部
に大きな残留応力が残存することなく、均一なアモルフ
ァス状態によって、所望の磁気特性を磁歪層に容易に与
えることができる。Then, by adopting the magnetostrictive layer which is directly amorphized on the surface of the member to be detected in this manner, a desired amorphous magnetic property can be obtained by a uniform amorphous state without a large residual stress remaining inside the magnetostrictive layer. Can be easily given to.
上記の実施例においては、例えば、被検出部材の25cm程
度の面積の被検出部材に、厚み20〜300μｍ程度のアモ
ルファス化された磁歪層を形成する時には、12〜500秒
程度で形成可能となる。In the above embodiment, for example, when forming an amorphized magnetostrictive layer having a thickness of about 20 to 300 μm on a detected member having an area of about 25 cm, it can be formed in about 12 to 500 seconds. .
尚、合金組成については、今回はFe−Ｂ−Si系、Fe−Ｂ
系、Fe−Co−Si−Ｂ系、Fe−Ni−Ｐ−Ｂ系、Co−Si−Ｂ
系、Ni−Si−Ｂ系あるいはそれらにCr、Moを添加した組
成で行ったが、アモルファス化に適した適当な組成であ
れば可能である。Regarding the alloy composition, this time Fe-B-Si system, Fe-B
System, Fe-Co-Si-B system, Fe-Ni-P-B system, Co-Si-B
System, Ni-Si-B system or a composition in which Cr and Mo are added to them, but any suitable composition suitable for amorphization is possible.
尚、上述の実施例においては、平面状の被検出部材に形
成される合金層に対してレーザー光をｘ、ｙ方向へ移動
したが、被検出部材が円柱状である場合は、その被検出
部材を回転させるとともに、その回転軸方向にレーザー
光を移動してレーザー光によって照射される部位を連続
的に変えさせてもよい。In the above embodiment, the laser light was moved in the x and y directions with respect to the alloy layer formed on the flat member to be detected. While rotating the member, the laser beam may be moved in the rotation axis direction to continuously change the portion irradiated with the laser beam.
また、上述の実施例においては、レーザー光による照射
を行ったが、高エネルギーの電子線を集束して照射して
も同様の効果が得られることは容易に推考できるであろ
う。Further, in the above-mentioned embodiment, the irradiation with the laser beam was performed, but it can be easily inferred that the same effect can be obtained by focusing and irradiating the high-energy electron beam.
次に、直接アモルファス化させた磁歪層を用いたトルク
センサについて説明する。Next, a torque sensor using a magnetostrictive layer that is directly amorphized will be described.
第１図は本発明のトルクセンサである。FIG. 1 shows a torque sensor of the present invention.
このトルクセンサの被検出部材である駆動軸４の表面に
磁性材料として磁歪層１が厚さ10〜30μｍ程度形成され
ている。A magnetostrictive layer 1 is formed as a magnetic material on the surface of a drive shaft 4 which is a detected member of the torque sensor to a thickness of about 10 to 30 μm.
この基本的な構成・作動を説明する。The basic configuration and operation will be described.
この磁歪層１を形成した駆動軸４の表面近傍には、磁気
変化検出手段である磁歪層１を励磁するコイル３と、や
はり磁気変化検出手段である磁歪層１の磁歪特性を検出
する検出コイル２が設けられている。そして、このコイ
ル３および検出コイル２によって、駆動軸４に伝達する
トルクによる歪みに起因する起電力が測定される。この
起電力は増幅され電気信号として取り出される。In the vicinity of the surface of the drive shaft 4 on which the magnetostrictive layer 1 is formed, a coil 3 for exciting the magnetostrictive layer 1 which is a magnetic change detecting means and a detection coil which detects the magnetostrictive characteristic of the magnetostrictive layer 1 which is also a magnetic change detecting means. Two are provided. The coil 3 and the detection coil 2 measure the electromotive force caused by the distortion due to the torque transmitted to the drive shaft 4. This electromotive force is amplified and taken out as an electric signal.
検出回路としては発振器11から出された信号を駆動回路
12にて方形波にし、励磁コイル３に電流を付加する。検
出コイル２にて、駆動により生じた歪みにて発生する起
電力を交流増幅器13にて増幅し、サンプリング回路14に
てサンプリングし、更に励磁方形波と比較することによ
りトルクを検出するものである。The detection circuit uses a signal output from the oscillator 11 as a drive circuit.
A square wave is generated at 12 and a current is applied to the exciting coil 3. In the detection coil 2, the electromotive force generated by the distortion generated by driving is amplified by the AC amplifier 13, sampled by the sampling circuit 14, and further compared with the excitation square wave to detect the torque. .
第２図は、組成Fe26B8Si16からなる磁歪層１が形成され
る駆動軸４に加えられるトルクとその出力との関係を示
す図である。FIG. 2 is a diagram showing the relationship between the torque applied to the drive shaft 4 on which the magnetostrictive layer 1 made of the composition Fe 26 B 8 Si 16 is formed and its output.
これによれば、磁歪層１が形成された駆動軸４に加えら
れるトルクと、その結果、磁歪層１から得られる出力
は、従来のもの（Niをメッキによって20μｍ被覆したも
の）に比較して良い比例関係が成立している。According to this, the torque applied to the drive shaft 4 on which the magnetostrictive layer 1 is formed, and as a result, the output obtained from the magnetostrictive layer 1 is higher than that of the conventional one (Ni coated with 20 μm by plating). A good proportional relationship is established.
また、印加トルクの上昇と下降とによるヒステリシスの
差も、従来のもの（Niメッキ20μｍ）に比較して小さ
く、感度（トルクと出力の比）も良好である。Further, the difference in hysteresis due to the rise and fall of the applied torque is smaller than the conventional one (Ni plating 20 μm), and the sensitivity (ratio of torque and output) is good.
以上のように、本発明においては、被検出部材の表面に
合金層を形成した後、高エネルギー電磁波を照射させる
ことによって、被転出部材表面においてアモルファス化
させた磁歪層を形成した。As described above, in the present invention, the alloy layer is formed on the surface of the member to be detected, and then the high-energy electromagnetic wave is irradiated to form the amorphized magnetostrictive layer on the surface of the member to be transferred.
そして、このような構成とすることによって、本発明の
磁歪層をトルクセンサの磁性材料として採用すると、従
来と比較して磁気特性を向上させることができる。With such a configuration, when the magnetostrictive layer of the present invention is used as the magnetic material of the torque sensor, the magnetic characteristics can be improved as compared with the conventional one.
第１図は本発明のトルクセンサを示す模式図、第２図は
第１図のトルクセンサの駆動軸のトルクと、その出力の
関係を示す関係図である。FIG. 1 is a schematic diagram showing the torque sensor of the present invention, and FIG. 2 is a relational diagram showing the relation between the torque of the drive shaft of the torque sensor of FIG. 1 and its output.
Claims (4)
状態となり得る組成材料の合金層を形成する合金層形成
工程と、前記工程にて形成された合金層に、この合金層
が溶融する以上のエネルギーの高エネルギー電磁波を照
射して前記合金層を溶融・急冷させることによりアモル
ファス化させ磁歪層を形成する磁歪層形成工程と を有することを特徴とする磁歪層形成方法。1. An amorphous material on the surface of a member to be detected.
The alloy layer forming step of forming an alloy layer of a composition material that can be in a state, and the alloy layer formed in the step is irradiated with a high-energy electromagnetic wave having energy higher than that of melting the alloy layer to melt the alloy layer. A magnetostrictive layer forming step of forming a magnetostrictive layer by making it amorphous by quenching.
ある特許請求の範囲第１項記載の磁歪層形成方法。2. The method for forming a magnetostrictive layer according to claim 1, wherein the high-energy electromagnetic wave is laser light.
ルギー電磁波によって照射される前記合金層の部位を連
続的に変位させることを特徴とする特許請求の範囲第１
項記載の磁歪層形成方法。3. The magnetostrictive layer forming step, wherein the portion of the alloy layer irradiated with the high energy electromagnetic wave is continuously displaced.
The method for forming a magnetostrictive layer according to item.
状態となり得る組成材料の合金層を形成し、前記合金層
に高エネルギー電磁波を照射して前記合金層を溶融させ
た後、急冷することによりアモルファス化された磁歪層
と、 該磁歪層の磁気的変化を検出する磁気変化検出手段とを
有することを特徴とするトルクセンサ。4. An amorphous material on the surface of a member to be detected.
Forming an alloy layer of a composition material that can be brought into a state, irradiating the alloy layer with a high-energy electromagnetic wave to melt the alloy layer, and then rapidly cooling it to form an amorphous magnetostrictive layer, and a magnetic strain of the magnetostrictive layer. A torque sensor having a magnetic change detecting means for detecting a change.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60011845A JPH07116565B2 (en) | 1985-01-24 | 1985-01-24 | Magnetostrictive layer forming method and torque sensor using the magnetostrictive layer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60011845A JPH07116565B2 (en) | 1985-01-24 | 1985-01-24 | Magnetostrictive layer forming method and torque sensor using the magnetostrictive layer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61170546A JPS61170546A (en) | 1986-08-01 |
| JPH07116565B2 true JPH07116565B2 (en) | 1995-12-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60011845A Expired - Fee Related JPH07116565B2 (en) | 1985-01-24 | 1985-01-24 | Magnetostrictive layer forming method and torque sensor using the magnetostrictive layer |
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| Country | Link |
|---|---|
| JP (1) | JPH07116565B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02185957A (en) * | 1989-01-11 | 1990-07-20 | Yazaki Corp | Surface treatment for terminal |
| US7341765B2 (en) * | 2004-01-27 | 2008-03-11 | Battelle Energy Alliance, Llc | Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates |
| KR101247410B1 (en) | 2004-03-25 | 2013-03-25 | 가부시키가이샤 토호쿠 테크노 아치 | Metallic glass laminate, process for producing the same and use thereof |
| WO2021187477A1 (en) * | 2020-03-18 | 2021-09-23 | 臼井国際産業株式会社 | Method for forming magnetostrictive material-coated pattern of magnetostriction type torque sensor shaft, and magnetostriction type torque sensor shaft |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55148752A (en) * | 1979-05-11 | 1980-11-19 | Nippon Steel Corp | Formation method of coating on metal surface |
| JPS57200536A (en) * | 1981-06-02 | 1982-12-08 | Mitsubishi Heavy Ind Ltd | Preparation of corrosion resistant structural member |
| JPS583979A (en) * | 1981-07-01 | 1983-01-10 | Mitsubishi Heavy Ind Ltd | Production of corrosion- and erosion resistant member |
-
1985
- 1985-01-24 JP JP60011845A patent/JPH07116565B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61170546A (en) | 1986-08-01 |
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