WO2021187477A1 - Method for forming magnetostrictive material-coated pattern of magnetostriction type torque sensor shaft, and magnetostriction type torque sensor shaft - Google Patents
Method for forming magnetostrictive material-coated pattern of magnetostriction type torque sensor shaft, and magnetostriction type torque sensor shaft Download PDFInfo
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- WO2021187477A1 WO2021187477A1 PCT/JP2021/010594 JP2021010594W WO2021187477A1 WO 2021187477 A1 WO2021187477 A1 WO 2021187477A1 JP 2021010594 W JP2021010594 W JP 2021010594W WO 2021187477 A1 WO2021187477 A1 WO 2021187477A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
- G01L3/02—Rotary-transmission dynamometers
- G01L3/04—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
- G01L3/10—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
Definitions
- the magnetically distorted portion of the striped pattern is obtained through the processing of each step.
- the components of the amorphous alloy Fe—Co type, Fe—Ni type, Ni—P type and the like are known.
- the magnetostrictive material in addition to the amorphous alloy, for example, a permendur (Fe and Co) having a Fe—Co-based magnetostrictive characteristic such as a component ratio of 36Fe-36Co-4Si-20B-4Nb (unit: at%). There is a special compound version with a ratio of 1: 1).
- an amorphous coating pattern is performed by attaching a masking sheet to the surface of a base material (metal material such as aluminum, copper, carbon steel and stainless steel) after thermal spraying.
- a base material metal material such as aluminum, copper, carbon steel and stainless steel
- an amorphous sprayed coating is formed on the surface of the base material after the rough surface processing treatment, a masking sheet is attached, and the amorphous sprayed coating is formed by shot blasting with aluminum powder. It is peeled off.
- the method for forming the amorphous coating pattern of the magnetostrictive torque sensor shaft of the present invention is to irradiate the amorphous foil coating formed on the surface of the base material made of a metal member with a laser.
- the amorphous foil coating is removed from the surface of the base material to form a desired coating pattern.
- the laser irradiation method is adopted instead of the conventional shot blast method using aluminum powder as the magnetostrictive material coating pattern forming processing means for the reasons described below. That is, in the conventional shot blasting with aluminum powder, it occurs after the masking sheet is attached and peeled and the sheet is peeled off in the coating pattern forming process of the magnetic strain material such as the amorphous sprayed coating, the amorphous foil coating, and the plating coating such as Ni plating. It takes a lot of time and effort to dispose of the waste sheet, and when the aluminum powder wears due to repeated use and becomes smaller than the predetermined particle size, the shot blasting function is lost and the waste sheet is disposed of.
- the conventional shot blasting with aluminum powder it occurs after the masking sheet is attached and peeled and the sheet is peeled off in the coating pattern forming process of the magnetic strain material such as the amorphous sprayed coating, the amorphous foil coating, and the plating coating such as Ni plating. It takes a lot of time and effort to dispose
- a laser irradiation method is adopted as a pattern forming processing means for a magnetostrictive material such as an amorphous sprayed coating, an amorphous foil coating, and an amorphous plating coating by Ni plating. It is complicated in addition to reducing masking sheet costs, simplifying equipment by eliminating the need for shot blasting equipment, masking sheet pasting equipment, and peeling equipment, omitting masking sheet pasting and peeling work, and shortening post-processing time. It is easy to form an amorphous pattern. Further, since the magnetostrictive torque sensor shaft of the present invention has a magnetostrictive material coating pattern formed by removing the magnetostrictive material coating by a laser irradiation method, the output sensitivity is also stable.
Abstract
Provided are: a magnetostriction type torque sensor shaft that has excellent machining accuracy and quality stability; and a preferable method for manufacturing said magnetostriction type torque sensor shaft. This magnetostriction type torque sensor shaft has a magnetostrictive material coating on a surface of a base material made from a metal member. The magnetostriction type torque sensor shaft is characterized by performing a magnetostrictive material-coated pattern forming process through laser irradiation.
Description
本発明は、シャフト（回転軸）の表面にトルク検出用の磁歪部を有する磁歪式トルクセンサー用シャフトのアモルファス溶射被膜、アモルファス箔、めっきによるアモルファス被膜等の各種磁歪材料被膜パターンの形成方法およびその各種磁歪材料被膜パターンを有する磁歪式トルクセンサー用シャフトに関するものである。
The present invention provides a method for forming various magnetostrictive material coating patterns such as an amorphous spray coating, an amorphous foil, and an amorphous coating by plating on a shaft for a magnetostrictive torque sensor having a magnetostrictive portion on the surface of the shaft (rotating shaft) for torque detection. It relates to a shaft for a magnetostrictive torque sensor having various magnetostrictive material coating patterns.
磁歪部を有するシャフトを用いてトルクを検出するトルクセンサーは、一般的な構造を図５に示すように、トルクを受けるシャフト（トルクセンサーシャフト）１１が軸受１６を介してハウジング１７に支持されており、そのシャフト１１の一部表面において全周（３６０度）に磁歪部１１Ｖ・１１Ｗが形成されている。又、ハウジング１７の内側で、磁歪部１１Ｖ・１１Ｗの各外周に近い位置にコイルＸ・Ｙが配置されている。磁歪部１１Ｖ・１１Ｗとしては、シャフト１１の周面に磁歪材料が、図示の通り軸方向に対して逆向きに傾斜した螺旋状（いわゆるシェブロン状）の縞模様に形成される（つまり、磁歪体の被膜や突出部を螺旋状の複数の線として形成される）のが一般的である。ハウジング１７には、図示のようにアンプ基板１８や信号線用のコネクタ１９なども付設される。
即ち、図５に示す一般的なトルクセンサーは、シャフト１１にトルクが作用すると、磁歪部１１Ｖ・１１Ｗに引張応力と圧縮応力とがそれぞれ発生し、その結果、相反する磁歪効果によって各磁歪部１１Ｖ・１１Ｗの透磁率がそれぞれ増加・減少することにより、この透磁率の変化に基づいてコイルＸ・Ｙに誘導起電力が発生し、直流変換や両者の差動増幅を行うことにより、トルクの大きさに比例した電圧出力が得られる構造となっている（特許文献１、特許文献２参照）。 A torque sensor that detects torque using a shaft having a magnetostrictive portion has a general structure in which a shaft (torque sensor shaft) 11 that receives torque is supported by ahousing 17 via a bearing 16 as shown in FIG. A magnetostrictive portion 11V / 11W is formed on the entire circumference (360 degrees) of a part of the surface of the shaft 11. Further, inside the housing 17, the coils XY are arranged at positions close to the outer circumferences of the magnetostrictive portions 11V and 11W. As the magnetostrictive portions 11V and 11W, a magnetostrictive material is formed on the peripheral surface of the shaft 11 in a spiral (so-called chevron-like) striped pattern inclined in the opposite direction to the axial direction as shown in the figure (that is, a magnetostrictive body). The coating and protrusions of the surface are generally formed as a plurality of spiral lines). As shown in the figure, the housing 17 is also provided with an amplifier board 18, a connector 19 for a signal line, and the like.
That is, in the general torque sensor shown in FIG. 5, when torque acts on theshaft 11, tensile stress and compressive stress are generated in the magnetostrictive portions 11V and 11W, respectively, and as a result, the magnetostrictive portions 11V are caused by the opposite magnetostrictive effects.・ As the magnetostriction of 11W increases and decreases, induced electromotive force is generated in the coils XY based on the change in the magnetostriction, and the torque is large by performing DC conversion and differential amplification of both. The structure is such that a voltage output proportional to the above can be obtained (see Patent Document 1 and Patent Document 2).
即ち、図５に示す一般的なトルクセンサーは、シャフト１１にトルクが作用すると、磁歪部１１Ｖ・１１Ｗに引張応力と圧縮応力とがそれぞれ発生し、その結果、相反する磁歪効果によって各磁歪部１１Ｖ・１１Ｗの透磁率がそれぞれ増加・減少することにより、この透磁率の変化に基づいてコイルＸ・Ｙに誘導起電力が発生し、直流変換や両者の差動増幅を行うことにより、トルクの大きさに比例した電圧出力が得られる構造となっている（特許文献１、特許文献２参照）。 A torque sensor that detects torque using a shaft having a magnetostrictive portion has a general structure in which a shaft (torque sensor shaft) 11 that receives torque is supported by a
That is, in the general torque sensor shown in FIG. 5, when torque acts on the
上記構成のトルクセンサーの上記シャフトの表面に形成される磁歪部１１Ｖ・１１Ｗが金属ガラス（例えばアモルファス合金）の被膜の場合、当該被膜は、火炎を急速冷却する方式の溶射によってシャフトの表面に形成される。火炎を急速冷却する溶射とは、金属粉末を含む火炎を噴射して金属粉末を溶融させるとともに、当該火炎を冷却ガスによって冷却する方式の溶射である。そのアモルファス溶射被膜成形の主な工程は、溶射前の粗面加工処理（ショットブラスト）、アモルファス溶射、マスキング（シート貼り付け）、アモルファス被膜のシェブロン状パターン成形（ショットブラスト）、マスキングシート剥がし工程からなり、各工程の処理を経て前記縞模様の磁歪部が得られる。アモルファス合金の成分としては、Ｆｅ－Ｃｏ系、Ｆｅ－Ｎｉ系、Ｎｉ－Ｐ系等が知られている。
なお、磁歪材料としては、アモルファス合金の他に、例えば成分比が３６Ｆｅ－３６Ｃｏ－４Ｓｉ－２０Ｂ－４Ｎｂ（単位：ａｔ％）等のＦｅ－Ｃｏ系の磁歪特性を持つパーメンジュール（ＦｅとＣｏの割合が１：１）の特殊配合版等がある。 When the magnetostrictive portions 11V and 11W formed on the surface of the shaft of the torque sensor having the above configuration are a coating of metallic glass (for example, an amorphous alloy), the coating is formed on the surface of the shaft by thermal spraying of a method of rapidly cooling the flame. Will be done. The thermal spraying for rapidly cooling a flame is a thermal spraying method in which a flame containing a metal powder is injected to melt the metal powder and the flame is cooled by a cooling gas. The main steps of forming the amorphous thermal spray coating are rough surface processing before thermal spraying (shot blasting), amorphous thermal spraying, masking (sheet pasting), shebron-like pattern forming of amorphous coating (shot blasting), and masking sheet peeling process. Therefore, the magnetically distorted portion of the striped pattern is obtained through the processing of each step. As the components of the amorphous alloy, Fe—Co type, Fe—Ni type, Ni—P type and the like are known.
As the magnetostrictive material, in addition to the amorphous alloy, for example, a permendur (Fe and Co) having a Fe—Co-based magnetostrictive characteristic such as a component ratio of 36Fe-36Co-4Si-20B-4Nb (unit: at%). There is a special compound version with a ratio of 1: 1).
なお、磁歪材料としては、アモルファス合金の他に、例えば成分比が３６Ｆｅ－３６Ｃｏ－４Ｓｉ－２０Ｂ－４Ｎｂ（単位：ａｔ％）等のＦｅ－Ｃｏ系の磁歪特性を持つパーメンジュール（ＦｅとＣｏの割合が１：１）の特殊配合版等がある。 When the
As the magnetostrictive material, in addition to the amorphous alloy, for example, a permendur (Fe and Co) having a Fe—Co-based magnetostrictive characteristic such as a component ratio of 36Fe-36Co-4Si-20B-4Nb (unit: at%). There is a special compound version with a ratio of 1: 1).
前記した従来の磁歪式トルクセンサー用シャフトの製造方法において、例えばアモルファス溶射後に基材（アルミニウム、銅、炭素鋼およびステンレス鋼等の金属材）の表面にマスキングシートを貼り付けて行われるアモルファス被膜パターンの成形処理は、例えば特許文献２に記載されているように、粗面加工処理後の基材表面にアモルファス溶射被膜を形成した後マスキングシートを貼り付け、アルミ粉末によるショットブラストによりアモルファス溶射被膜を剥がして行われる。このアモルファス溶射被膜を剥がす際は、溶射被膜を残したい所望するパターンのマスクを製作しておき、このマスクを被膜形成された基材表面に貼り付け、アルミ粉末によるショットブラストをかける方法がとられる。
In the conventional method for manufacturing a shaft for a magnetic strain type torque sensor, for example, an amorphous coating pattern is performed by attaching a masking sheet to the surface of a base material (metal material such as aluminum, copper, carbon steel and stainless steel) after thermal spraying. In the molding treatment of, for example, as described in Patent Document 2, an amorphous sprayed coating is formed on the surface of the base material after the rough surface processing treatment, a masking sheet is attached, and the amorphous sprayed coating is formed by shot blasting with aluminum powder. It is peeled off. When peeling off this amorphous sprayed coating, a method is taken in which a mask with a desired pattern for which the sprayed coating is to be left is produced, this mask is attached to the surface of the base material on which the coating is formed, and shot blasting is performed with aluminum powder. ..
しかしながら、上記した特許文献２に記載されている従来のアルミ粉末を用いたショットブラストによるアモルファス被膜パターンの成形処理には、以下に記載する(1)～(6)の問題点がある。
(1).マスキングシートの剥離に相当の時間を要する。
(2).シャフト径（通常φ６ｍｍ未満）が細い場合、マスキングシートが有効に作用しない。
(3).マスキングシートに所望する複雑なパターンを形成しにくい。
(4).マスキングシートの貼り付け、剥離作業および剥離後の廃棄シートの処理に多くの手間と時間を要する。
(5).ショットブラスト装置やマスキングシート貼り付けおよび剥離装置が必要で、設備費が高くつく。
(6).アルミ粉末は繰り返しの使用により摩耗して所定の粒径より小さくなると、ショットブラスト機能が失われて廃棄処理されることとなり、不経済である。 However, the molding process of the amorphous film pattern by shot blasting using the conventional aluminum powder described inPatent Document 2 described above has the problems (1) to (6) described below.
(1). It takes a considerable amount of time to peel off the masking sheet.
(2). If the shaft diameter (usually less than φ6 mm) is small, the masking sheet does not work effectively.
(3). It is difficult to form the desired complicated pattern on the masking sheet.
(4). It takes a lot of time and effort to attach the masking sheet, peel it off, and dispose of the waste sheet after peeling off.
(5). A shot blasting device and a masking sheet pasting and peeling device are required, and the equipment cost is high.
(6). If the aluminum powder wears due to repeated use and becomes smaller than the predetermined particle size, the shot blasting function is lost and the aluminum powder is discarded, which is uneconomical.
(1).マスキングシートの剥離に相当の時間を要する。
(2).シャフト径（通常φ６ｍｍ未満）が細い場合、マスキングシートが有効に作用しない。
(3).マスキングシートに所望する複雑なパターンを形成しにくい。
(4).マスキングシートの貼り付け、剥離作業および剥離後の廃棄シートの処理に多くの手間と時間を要する。
(5).ショットブラスト装置やマスキングシート貼り付けおよび剥離装置が必要で、設備費が高くつく。
(6).アルミ粉末は繰り返しの使用により摩耗して所定の粒径より小さくなると、ショットブラスト機能が失われて廃棄処理されることとなり、不経済である。 However, the molding process of the amorphous film pattern by shot blasting using the conventional aluminum powder described in
(1). It takes a considerable amount of time to peel off the masking sheet.
(2). If the shaft diameter (usually less than φ6 mm) is small, the masking sheet does not work effectively.
(3). It is difficult to form the desired complicated pattern on the masking sheet.
(4). It takes a lot of time and effort to attach the masking sheet, peel it off, and dispose of the waste sheet after peeling off.
(5). A shot blasting device and a masking sheet pasting and peeling device are required, and the equipment cost is high.
(6). If the aluminum powder wears due to repeated use and becomes smaller than the predetermined particle size, the shot blasting function is lost and the aluminum powder is discarded, which is uneconomical.
このように、特許文献２に開示されている従来のアルミ粉末を用いたショットブラストによるアモルファス被膜パターンの成形処理技術は、溶射後のパターン成形処理、マスキングシートの貼り付け、剥離作業および剥離後の廃棄シートの処理等に相当の時間を必要とするのみならず、ショットブラスト装置やマスキングシートの貼り付け装置および剥離装置が必要であり、また細いシャフトの場合には、マスキングシートが有効に作用せず、さらに消耗品であるアルミ粉末も高くつくことなどから、磁歪式トルクセンサー用シャフトの製造コストが高くつくのみならず、加工精度および品質の安定性に優れた磁歪式トルクセンサー用シャフトを低コストで製造することは容易ではなかった。
As described above, the conventional technique for forming an amorphous film pattern by shot blasting using aluminum powder disclosed in Patent Document 2 includes a pattern forming process after spraying, a masking sheet, a peeling operation, and a peeling process. Not only does it take a considerable amount of time to dispose of the waste sheet, but it also requires a shot blasting device, a masking sheet pasting device, and a peeling device, and in the case of a thin shaft, the masking sheet works effectively. In addition, since aluminum powder, which is a consumable item, is also expensive, the manufacturing cost of the magnetostrictive torque sensor shaft is high, and the magnetostrictive torque sensor shaft, which has excellent processing accuracy and quality stability, is low. It was not easy to manufacture at cost.
本発明は、前記した従来技術の問題点を解消すべくなされたもので、マスキングシート不要によるシート費の削減、ショットブラスト装置やマスキングシート貼り付け装置および剥離装置の不要による設備の簡便化、マスキングシートの貼り付けおよび剥離作業の省略、アモルファス被膜パターンの形成時間の短縮等が図られる、磁歪式トルクセンサー用シャフトの磁歪材料被膜パターンの形成方法およびその磁歪式トルクセンサー用シャフトを提案しようとするものである。
The present invention has been made to solve the above-mentioned problems of the prior art, and reduces the sheet cost by not requiring a masking sheet, simplifies the equipment by eliminating the shot blasting device, the masking sheet pasting device, and the peeling device, and masking. We will propose a method for forming a magnetostrictive material coating pattern on a shaft for a magnetostrictive torque sensor and a shaft for the magnetostrictive torque sensor, which can eliminate sheet pasting and peeling work, shorten the formation time of an amorphous coating pattern, and the like. It is a thing.
本発明者らは、加工精度および品質の安定性に優れた磁歪式トルクセンサー用シャフトを低コストで製造し得る手段ついて種々研究を重ねた結果、アモルファス溶射被膜に限らず、アモルファス箔被膜や、アモルファスめっき被膜（Ｎｉめっき等）等の各種磁歪材料被膜パターン成形処理として、従来のショットブラスト方式に替えて、レーザ照射方式を採用することにより、加工精度および品質の安定性に優れた磁歪式トルクセンサー用シャフトを低コストで製造できることを見出した。
即ち、本発明に係る磁歪式トルクセンサー用シャフトの磁歪材料被膜パターンの形成方法は、従来のアルミ粉末によるショットブラスト方式に替えて、被膜パターンの形成にレーザ照射方式を採用したもので、その要旨は金属製部材からなる基材表面に形成された磁歪材料被膜にレーザ照射することにより、レーザの持つ光エネルギーを磁歪材料被膜が吸収し瞬時に蒸発することとなり基材表面から除去、あるいは結晶化し磁歪特性を失うことで所望の被膜パターンを形成することを特徴とするものである。なお、磁歪材料としては、前記したようにアモルファス溶射被膜、アモルファス箔被膜、Ｎｉめっき等によるアモルファスめっき被膜等がある。 As a result of various studies on a means for manufacturing a shaft for a magnetostrictive torque sensor having excellent processing accuracy and quality stability at low cost, the present inventors have conducted not only an amorphous sprayed coating but also an amorphous foil coating and an amorphous foil coating. By adopting a laser irradiation method instead of the conventional shot blasting method as a pattern forming process for various magnetostrictive material coatings such as amorphous plating film (Ni plating, etc.), magnetostrictive torque with excellent processing accuracy and quality stability. We have found that sensor shafts can be manufactured at low cost.
That is, the method for forming the magnetostrictive material coating pattern of the magnetostrictive torque sensor shaft according to the present invention adopts a laser irradiation method for forming the coating pattern instead of the conventional shot blast method using aluminum powder. By irradiating the magnetostrictive material coating formed on the surface of the base material made of a metal member with a laser, the magnetostrictive material coating absorbs the light energy of the laser and instantly evaporates, removing or crystallizing from the surface of the base material. It is characterized in that a desired film pattern is formed by losing the magnetostrictive property. As the magnetostrictive material, as described above, there are an amorphous sprayed coating, an amorphous foil coating, an amorphous plating coating by Ni plating and the like.
即ち、本発明に係る磁歪式トルクセンサー用シャフトの磁歪材料被膜パターンの形成方法は、従来のアルミ粉末によるショットブラスト方式に替えて、被膜パターンの形成にレーザ照射方式を採用したもので、その要旨は金属製部材からなる基材表面に形成された磁歪材料被膜にレーザ照射することにより、レーザの持つ光エネルギーを磁歪材料被膜が吸収し瞬時に蒸発することとなり基材表面から除去、あるいは結晶化し磁歪特性を失うことで所望の被膜パターンを形成することを特徴とするものである。なお、磁歪材料としては、前記したようにアモルファス溶射被膜、アモルファス箔被膜、Ｎｉめっき等によるアモルファスめっき被膜等がある。 As a result of various studies on a means for manufacturing a shaft for a magnetostrictive torque sensor having excellent processing accuracy and quality stability at low cost, the present inventors have conducted not only an amorphous sprayed coating but also an amorphous foil coating and an amorphous foil coating. By adopting a laser irradiation method instead of the conventional shot blasting method as a pattern forming process for various magnetostrictive material coatings such as amorphous plating film (Ni plating, etc.), magnetostrictive torque with excellent processing accuracy and quality stability. We have found that sensor shafts can be manufactured at low cost.
That is, the method for forming the magnetostrictive material coating pattern of the magnetostrictive torque sensor shaft according to the present invention adopts a laser irradiation method for forming the coating pattern instead of the conventional shot blast method using aluminum powder. By irradiating the magnetostrictive material coating formed on the surface of the base material made of a metal member with a laser, the magnetostrictive material coating absorbs the light energy of the laser and instantly evaporates, removing or crystallizing from the surface of the base material. It is characterized in that a desired film pattern is formed by losing the magnetostrictive property. As the magnetostrictive material, as described above, there are an amorphous sprayed coating, an amorphous foil coating, an amorphous plating coating by Ni plating and the like.
磁歪材料にアモルファス溶射被膜を採用した場合の、本発明の磁歪式トルクセンサー用シャフトのアモルファス被膜パターンの形成方法は、金属製部材からなる基材表面に形成されたアモルファス溶射被膜にレーザ照射することにより、レーザの持つ光エネルギーをアモルファス溶射被膜が吸収し瞬時に蒸発することとなり基材表面から除去、あるいは結晶化し磁歪特性を失うことで所望のアモルファス被膜パターンを形成することを特徴とするものである。
When an amorphous spray coating is used as the magnetostrictive material, the method for forming the amorphous coating pattern of the magnetostrictive torque sensor shaft of the present invention is to irradiate the amorphous spray coating formed on the surface of the base material made of a metal member with a laser. As a result, the amorphous spray coating absorbs the light energy of the laser and evaporates instantly, removing it from the surface of the substrate or crystallizing it and losing its magnetostrictive characteristics to form a desired amorphous coating pattern. be.
磁歪材料にアモルファス箔被膜を採用した場合の、本発明の磁歪式トルクセンサー用シャフトのアモルファス被膜パターンの形成方法は、金属製部材からなる基材表面に形成されたアモルファス箔被膜にレーザ照射することにより、アモルファス箔被膜を基材表面から除去し、所望の被膜パターンを形成することを特徴とするものである。
When an amorphous foil coating is used as the magnetostrictive material, the method for forming the amorphous coating pattern of the magnetostrictive torque sensor shaft of the present invention is to irradiate the amorphous foil coating formed on the surface of the base material made of a metal member with a laser. The amorphous foil coating is removed from the surface of the base material to form a desired coating pattern.
磁歪材料にアモルファスめっき被膜を採用した場合の、本発明の磁歪式トルクセンサー用シャフトのアモルファス被膜パターンの形成方法は、金属製部材からなる基材表面に形成されたアモルファスめっき被膜にレーザ照射することにより、アモルファス箔被膜を基材表面から除去し、所望の被膜パターンを形成することを特徴とするものである。
When an amorphous plating film is used as the magnetostrictive material, the method for forming the amorphous film pattern of the magnetostrictive torque sensor shaft of the present invention is to irradiate the amorphous plating film formed on the surface of the base material made of a metal member with a laser. The amorphous foil coating is removed from the surface of the base material to form a desired coating pattern.
又、本発明に係る磁歪式トルクセンサー用シャフトは、シャフトの表面にトルク検出用の磁歪部を有する磁歪式トルクセンサー用シャフトであって、金属製部材からなる基材表面に形成された磁歪材料被膜にレーザ照射して形成した所望の被膜パターンを有することを特徴とするものである。
ここで、磁歪材料としては、前記したようにアモルファス溶射被膜、アモルファス箔、又はめっき（Ｎｉめっき等）によるアモルファス形成品等である。 The magnetostrictive torque sensor shaft according to the present invention is a magnetostrictive torque sensor shaft having a magnetostrictive portion for torque detection on the surface of the shaft, and is a magnetostrictive material formed on the surface of a base material made of a metal member. It is characterized by having a desired coating pattern formed by irradiating the coating with a laser.
Here, the magnetostrictive material is an amorphous sprayed coating, an amorphous foil, or an amorphous formed product by plating (Ni plating or the like) as described above.
ここで、磁歪材料としては、前記したようにアモルファス溶射被膜、アモルファス箔、又はめっき（Ｎｉめっき等）によるアモルファス形成品等である。 The magnetostrictive torque sensor shaft according to the present invention is a magnetostrictive torque sensor shaft having a magnetostrictive portion for torque detection on the surface of the shaft, and is a magnetostrictive material formed on the surface of a base material made of a metal member. It is characterized by having a desired coating pattern formed by irradiating the coating with a laser.
Here, the magnetostrictive material is an amorphous sprayed coating, an amorphous foil, or an amorphous formed product by plating (Ni plating or the like) as described above.
なお、本発明における基材としては、例えばアルミニウム、銅、炭素鋼およびステンレス鋼等の金属材を用いることができる。
As the base material in the present invention, for example, metal materials such as aluminum, copper, carbon steel and stainless steel can be used.
本発明において、磁歪材料被膜パターン成形処理手段として、従来のアルミ粉末によるショットブラスト方式に替えて、レーザ照射方式を採用したのは、以下に記載する理由による。
即ち、従来のアルミ粉末によるショットブラストでは、アモルファス溶射被膜、アモルファス箔被膜、Ｎｉめっき等のめっき被膜等の磁歪材料の被膜パターン成形処理において、マスキングシートの貼り付けおよび剥離作業とシート剥離後に発生する廃棄シートの処理に多くの手間と時間を要すること、アルミ粉末は繰り返しの使用により摩耗して所定の粒径より小さくなるとショットブラスト機能が失われて廃棄処理されることとなり、前記シートと合わせ、廃棄物が発生し不経済であること、ショットブラスト装置やマスキングシート貼り付け装置および剥離装置が必要で、設備費が高くつく等の問題点があるのに対し、レーザ照射方式はショットブラスト装置やマスキングシート貼り付け装置および剥離装置の不要による設備の簡便化、マスキングシートの貼り付けおよび剥離作業の省略、後処理時間の短縮と廃棄物削減がはかられ、加工精度および品質の安定性に優れた磁歪式トルクセンサー用シャフトを低コストで製造することが可能となる等の多くの効果が得られることに加え、国連が主導する持続可能な開発目標（ＳＤＧｓ）の目標１２「持続可能な生産消費形態を確保する」に貢献することが可能となるためである。 In the present invention, the laser irradiation method is adopted instead of the conventional shot blast method using aluminum powder as the magnetostrictive material coating pattern forming processing means for the reasons described below.
That is, in the conventional shot blasting with aluminum powder, it occurs after the masking sheet is attached and peeled and the sheet is peeled off in the coating pattern forming process of the magnetic strain material such as the amorphous sprayed coating, the amorphous foil coating, and the plating coating such as Ni plating. It takes a lot of time and effort to dispose of the waste sheet, and when the aluminum powder wears due to repeated use and becomes smaller than the predetermined particle size, the shot blasting function is lost and the waste sheet is disposed of. While waste is generated and it is uneconomical, a shot blasting device, a masking sheet pasting device, and a peeling device are required, and the equipment cost is high, the laser irradiation method has problems such as a shot blasting device and Simplified equipment by eliminating the need for a masking sheet pasting device and peeling device, omitting masking sheet pasting and peeling work, shortening post-treatment time and reducing waste, and excellent processing accuracy and quality stability. In addition to many effects such as the ability to manufacture shafts for magnetic strain type torque sensors at low cost, Goal 12 of the United Nations-led Sustainable Development Goals (SDGs) "Sustainable Production" This is because it is possible to contribute to "securing the form of consumption".
即ち、従来のアルミ粉末によるショットブラストでは、アモルファス溶射被膜、アモルファス箔被膜、Ｎｉめっき等のめっき被膜等の磁歪材料の被膜パターン成形処理において、マスキングシートの貼り付けおよび剥離作業とシート剥離後に発生する廃棄シートの処理に多くの手間と時間を要すること、アルミ粉末は繰り返しの使用により摩耗して所定の粒径より小さくなるとショットブラスト機能が失われて廃棄処理されることとなり、前記シートと合わせ、廃棄物が発生し不経済であること、ショットブラスト装置やマスキングシート貼り付け装置および剥離装置が必要で、設備費が高くつく等の問題点があるのに対し、レーザ照射方式はショットブラスト装置やマスキングシート貼り付け装置および剥離装置の不要による設備の簡便化、マスキングシートの貼り付けおよび剥離作業の省略、後処理時間の短縮と廃棄物削減がはかられ、加工精度および品質の安定性に優れた磁歪式トルクセンサー用シャフトを低コストで製造することが可能となる等の多くの効果が得られることに加え、国連が主導する持続可能な開発目標（ＳＤＧｓ）の目標１２「持続可能な生産消費形態を確保する」に貢献することが可能となるためである。 In the present invention, the laser irradiation method is adopted instead of the conventional shot blast method using aluminum powder as the magnetostrictive material coating pattern forming processing means for the reasons described below.
That is, in the conventional shot blasting with aluminum powder, it occurs after the masking sheet is attached and peeled and the sheet is peeled off in the coating pattern forming process of the magnetic strain material such as the amorphous sprayed coating, the amorphous foil coating, and the plating coating such as Ni plating. It takes a lot of time and effort to dispose of the waste sheet, and when the aluminum powder wears due to repeated use and becomes smaller than the predetermined particle size, the shot blasting function is lost and the waste sheet is disposed of. While waste is generated and it is uneconomical, a shot blasting device, a masking sheet pasting device, and a peeling device are required, and the equipment cost is high, the laser irradiation method has problems such as a shot blasting device and Simplified equipment by eliminating the need for a masking sheet pasting device and peeling device, omitting masking sheet pasting and peeling work, shortening post-treatment time and reducing waste, and excellent processing accuracy and quality stability. In addition to many effects such as the ability to manufacture shafts for magnetic strain type torque sensors at low cost, Goal 12 of the United Nations-led Sustainable Development Goals (SDGs) "Sustainable Production" This is because it is possible to contribute to "securing the form of consumption".
本発明の磁歪式トルクセンサー用シャフトの製造方法によれば、アモルファス溶射被膜、アモルファス箔被膜、Ｎｉめっき等によるアモルファスめっき被膜等の磁歪材料のパターン成形処理手段にレーザ照射方式を採用したことにより、マスキングシート費の削減、ショットブラスト装置やマスキングシート貼り付け装置および剥離装置の不要による設備の簡便化、マスキングシートの貼り付けおよび剥離作業の省略、後処理時間の短縮等がはかられる上、複雑なパターンの形成も容易である。又、本発明の磁歪式トルクセンサー用シャフトは、レーザ照射方式により磁歪材料被膜を除去して形成した磁歪材料被膜パターンを有するので、出力感度も安定している。
According to the method for manufacturing a shaft for a magnetostrictive torque sensor of the present invention, a laser irradiation method is adopted as a pattern forming processing means for a magnetostrictive material such as an amorphous sprayed coating, an amorphous foil coating, and an amorphous plating coating by Ni plating. It is complicated in addition to reducing masking sheet costs, simplifying equipment by eliminating the need for shot blasting equipment, masking sheet pasting equipment, and peeling equipment, omitting masking sheet pasting and peeling work, and shortening post-processing time. It is easy to form an amorphous pattern. Further, since the magnetostrictive torque sensor shaft of the present invention has a magnetostrictive material coating pattern formed by removing the magnetostrictive material coating by a laser irradiation method, the output sensitivity is also stable.
図１に示す本発明の磁歪式トルクセンサー用シャフトの第一実施例（磁歪材料：アモルファス溶射被膜）の製造方法は、基材（アルミニウム、銅、炭素鋼およびステンレス鋼等の金属材）の表面に施すアモルファス溶射前の粗面加工処理（前処理）と、前記粗面加工処理を終えた基材の表面に磁歪材料であるアモルファスを溶射して磁歪部を形成するアモルファス溶射工程と、前記アモルファス溶射工程で形成したアモルファス溶射被膜をレーザ照射により基材より除去し、所望の被膜パターンを形成するパターン成形処理工程（後処理）とからなっている。なお、アモルファス溶射前の粗面加工処理は、アルミ粉末によるショットブラスト方式等が採用されるが、必ずしも必要とするものではない。
The method for producing the first embodiment (magnetic strain material: amorphous sprayed coating) of the shaft for a magnetic strain type torque sensor of the present invention shown in FIG. 1 is the surface of a base material (metal material such as aluminum, copper, carbon steel and stainless steel). Rough surface processing (pretreatment) before amorphous thermal spraying, an amorphous thermal spraying step of spraying amorphous, which is a magnetic strain material, on the surface of the base material after the rough surface processing to form a magnetic strain portion, and the amorphous It consists of a pattern forming treatment step (post-treatment) in which the amorphous thermal spray coating formed in the thermal spraying step is removed from the base material by laser irradiation to form a desired coating pattern. For the rough surface processing before amorphous thermal spraying, a shot blasting method using aluminum powder or the like is adopted, but it is not always necessary.
即ち、図１に示す本発明の磁歪式トルクセンサー用シャフトの製造方法（磁歪材料：アモルファス溶射被膜）は、後処理工程であるパターン成形処理工程において、前記アモルファス溶射被膜をレーザ照射により基材より除去し、所望の被膜パターン（模様）を形成する。その際は、レーザ照射によるパターン形成の進行に応じて、当該基材の周角度の相当量をコントロールしながらパターン形成を進めていく。この処理により所望の被膜パターン（模様）が形成された磁歪式トルクセンサー用シャフトが得られる。
That is, in the method for manufacturing the magnetostrictive torque sensor shaft (magnetostrictive material: amorphous sprayed coating) shown in FIG. 1, the amorphous sprayed coating is irradiated from a substrate by laser irradiation in a pattern forming treatment step which is a post-treatment step. Remove to form the desired coating pattern. In that case, the pattern formation is advanced while controlling the equivalent amount of the circumferential angle of the base material according to the progress of the pattern formation by the laser irradiation. By this treatment, a shaft for a magnetostrictive torque sensor on which a desired coating pattern (pattern) is formed can be obtained.
図２に示す本発明の磁歪式トルクセンサー用シャフトの製造方法（磁歪材料：アモルファス箔）は、基材（アルミニウム、銅、炭素鋼およびステンレス鋼等の金属材）の表面に施すアモルファス箔装着前の粗面加工処理（前処理）と、前記粗面加工処理を終えた基材の表面に磁歪材料であるアモルファス箔（箔厚：２５μｍ等）を装着（例えば円筒体の基材に巻き付ける方式等により装着）するアモルファス箔装着工程と、前記アモルファス箔装着工程で形成したアモルファス箔をレーザ照射により基材より除去し所望のアモルファス箔被膜パターンを形成するパターン成形処理工程（後処理）とからなっている。このアモルファス箔を採用した磁歪式トルクセンサー用シャフトの製造方法の場合も、レーザ照射によるパターン形成の進行に応じて、当該基材の周角度の相当量をコントロールしながらパターン形成を進めていくことにより所望の被膜パターン（模様）が形成された磁歪式トルクセンサー用シャフトが得られる。
なお、アモルファス箔の成分としては、例えばＦｅ：６５～８５重量％、Ｃｏ：１５～２５重量％、Ｂ：１～５重量％、Ｓｉ：０．１～１重量％等がある。 The method for manufacturing the shaft for a magnetic strain type torque sensor (magnetic strain material: amorphous foil) of the present invention shown in FIG. 2 is performed before mounting the amorphous foil on the surface of a base material (metal material such as aluminum, copper, carbon steel and stainless steel). Roughing surface processing (pretreatment) and mounting an amorphous foil (foil thickness: 25 μm, etc.), which is a magnetic strain material, on the surface of the base material after the rough surface processing treatment (for example, a method of wrapping around a cylindrical base material, etc.) It consists of an amorphous foil mounting step (post-treatment) of removing the amorphous foil formed in the amorphous foil mounting step from the base material by laser irradiation to form a desired amorphous foil coating pattern. There is. Also in the case of the method of manufacturing a shaft for a magnetostrictive torque sensor using this amorphous foil, the pattern formation is advanced while controlling a considerable amount of the circumferential angle of the base material according to the progress of the pattern formation by laser irradiation. A magnetostrictive torque sensor shaft on which a desired coating pattern is formed can be obtained.
The components of the amorphous foil include, for example, Fe: 65 to 85% by weight, Co: 15 to 25% by weight, B: 1 to 5% by weight, Si: 0.1 to 1% by weight, and the like.
なお、アモルファス箔の成分としては、例えばＦｅ：６５～８５重量％、Ｃｏ：１５～２５重量％、Ｂ：１～５重量％、Ｓｉ：０．１～１重量％等がある。 The method for manufacturing the shaft for a magnetic strain type torque sensor (magnetic strain material: amorphous foil) of the present invention shown in FIG. 2 is performed before mounting the amorphous foil on the surface of a base material (metal material such as aluminum, copper, carbon steel and stainless steel). Roughing surface processing (pretreatment) and mounting an amorphous foil (foil thickness: 25 μm, etc.), which is a magnetic strain material, on the surface of the base material after the rough surface processing treatment (for example, a method of wrapping around a cylindrical base material, etc.) It consists of an amorphous foil mounting step (post-treatment) of removing the amorphous foil formed in the amorphous foil mounting step from the base material by laser irradiation to form a desired amorphous foil coating pattern. There is. Also in the case of the method of manufacturing a shaft for a magnetostrictive torque sensor using this amorphous foil, the pattern formation is advanced while controlling a considerable amount of the circumferential angle of the base material according to the progress of the pattern formation by laser irradiation. A magnetostrictive torque sensor shaft on which a desired coating pattern is formed can be obtained.
The components of the amorphous foil include, for example, Fe: 65 to 85% by weight, Co: 15 to 25% by weight, B: 1 to 5% by weight, Si: 0.1 to 1% by weight, and the like.
図３に示す本発明の磁歪式トルクセンサー用シャフトの製造方法（磁歪材料：Ｎｉめっき被膜）は、基材（アルミニウム、銅、炭素鋼およびステンレス鋼等の金属材）の表面に施すアモルファスめっき前の粗面加工処理（前処理）と、前記粗面加工処理を終えた基材の表面に磁歪材料であるＮｉめっきを施すＮｉめっき処理工程と、前記Ｎｉめっき処理工程で形成したＮｉめっき被膜をレーザ照射により基材より除去し所望のアモルファスＮｉめっき被膜パターンを形成するパターン成形処理工程（後処理）とからなっている。このアモルファスＮｉめっき被膜を採用した磁歪式トルクセンサー用シャフトの製造方法の場合も、レーザ照射によるパターン形成の進行に応じて、当該基材の周角度の相当量をコントロールしながらパターン形成を進めていくことにより所望の被膜パターン（模様）が形成された磁歪式トルクセンサー用シャフトが得られる。
The method for manufacturing the shaft for a magnetic strain type torque sensor (magnetic strain material: Ni plating film) of the present invention shown in FIG. 3 is before amorphous plating applied to the surface of a base material (metal material such as aluminum, copper, carbon steel and stainless steel). Rough surface processing (pretreatment), a Ni plating process in which Ni plating, which is a magnetic strain material, is applied to the surface of the base material after the rough surface processing, and a Ni plating film formed in the Ni plating process. It consists of a pattern forming treatment step (post-treatment) of removing from the base material by laser irradiation to form a desired amorphous Ni plating film pattern. Also in the case of the method for manufacturing a shaft for a magnetostrictive torque sensor that employs this amorphous Ni plating film, pattern formation is advanced while controlling a considerable amount of the circumferential angle of the base material according to the progress of pattern formation by laser irradiation. By doing so, a shaft for a magnetostrictive torque sensor on which a desired coating pattern (pattern) is formed can be obtained.
前記図１～図３に示す本発明の磁歪式トルクセンサー用シャフトの製造方法は、前記したように加工精度および品質の安定性に優れた磁歪式トルクセンサー用シャフトと、該磁歪式トルクセンサー用シャフトを低コストで製造するため、アモルファス被膜形成後のパターン成形処理（後処理）として、従来のアルミ粉末によるショットブラスト方式に替えて、レーザ照射方式を採用したものである。
The method for manufacturing the magnetostrictive torque sensor shaft of the present invention shown in FIGS. 1 to 3 is, as described above, for a magnetostrictive torque sensor shaft having excellent processing accuracy and quality stability, and for the magnetostrictive torque sensor. In order to manufacture the shaft at low cost, a laser irradiation method is adopted instead of the conventional shot blasting method using aluminum powder as a pattern forming process (post-treatment) after forming an amorphous film.
即ち、本発明の磁歪式トルクセンサー用シャフトの製造方法は、後処理工程であるパターン成形処理工程において、前記アモルファス溶射被膜、アモルファス箔被膜、Ｎｉめっき等によるアモルファスめっき被膜をレーザ照射により基材より除去し、所望の被膜パターン（模様）を形成する。その際は、レーザ照射によるパターン形成の進行に応じて、当該基材の周角度の相当量をコントロールしながらパターン形成を進めていく。この処理により所望の被膜パターン（模様）が形成された磁歪式トルクセンサー用シャフトが得られる。
That is, in the method for manufacturing a shaft for a magnetostrictive torque sensor of the present invention, in the pattern forming processing step which is a post-processing step, the amorphous sprayed coating, the amorphous foil coating, the amorphous plating coating by Ni plating or the like is irradiated from the substrate by laser irradiation. It is removed to form the desired coating pattern. In that case, the pattern formation is advanced while controlling the equivalent amount of the circumferential angle of the base material according to the progress of the pattern formation by the laser irradiation. By this treatment, a shaft for a magnetostrictive torque sensor on which a desired coating pattern (pattern) is formed can be obtained.
図４は前記図１～図３に示す本発明の磁歪式トルクセンサー用シャフトの製造方法による所望の被膜パターン（模様）が形成された磁歪式トルクセンサー用シャフトの外観の一部を例示したもので、１は磁歪式トルクセンサー用シャフト、２はスリット、３は磁歪部（アモルファス溶射被膜、アモルファス箔、Ｎｉめっき）をそれぞれ示す。
FIG. 4 illustrates a part of the appearance of the magnetostrictive torque sensor shaft on which the desired coating pattern (pattern) is formed by the method for manufacturing the magnetostrictive torque sensor shaft of the present invention shown in FIGS. 1 to 3. 1 is a shaft for a magnetostrictive torque sensor, 2 is a slit, and 3 is a magnetostrictive portion (amorphous sprayed coating, amorphous foil, Ni plating).
本発明の磁歪式トルクセンサー用シャフトの製造方法によれば、アモルファス溶射後のパターン成形処理（後処理）にレーザ照射方式を採用したことにより、レーザ出力や移動速度等を調節するだけで基材表面に適度な粗面を短時間で形成することができる上、このパターン成形処理（後処理）においては、マスキングシートが不要となることによりマスキングシート費の削減、マスキングシート貼り付け装置および剥離装置の不要による設備の簡便化、マスキングシートの貼り付けおよび剥離作業の省略、後処理時間の短縮等がはかられ、加工精度および品質の安定性に優れた磁歪式トルクセンサー用シャフトを低コストで製造することができるなどの優れた効果を奏する。
According to the method for manufacturing a shaft for a magnetostrictive torque sensor of the present invention, by adopting a laser irradiation method for a pattern forming process (post-processing) after amorphous spraying, a base material can be obtained simply by adjusting the laser output, moving speed, and the like. An appropriate rough surface can be formed on the surface in a short time, and in this pattern forming process (post-treatment), the masking sheet is not required, so that the masking sheet cost is reduced, and the masking sheet pasting device and peeling device are used. The shaft for magnetostrictive torque sensor, which has excellent processing accuracy and quality stability, can be manufactured at low cost by simplifying the equipment by eliminating the need for, omitting the work of attaching and peeling the masking sheet, and shortening the post-processing time. It has excellent effects such as being able to be manufactured.
１ 磁歪式トルクセンサー用シャフト
２ スリット
３ 磁歪部 1 Magnetostrictivetorque sensor shaft 2 Slit 3 Magnetostrictive part
２ スリット
３ 磁歪部 1 Magnetostrictive
Claims (5)
- シャフトの表面にトルク検出用の磁歪部を有する磁歪式トルクセンサー用シャフトの製造方法であって、金属製部材からなる基材表面に形成された磁歪材料被膜にレーザ照射することにより、磁歪材料被膜を基材表面から除去し、所望の被膜パターンを形成することを特徴とする磁歪式トルクセンサー用シャフトの磁歪材料被膜パターンの形成方法。 A method for manufacturing a magnetostrictive torque sensor shaft having a magnetostrictive portion for torque detection on the surface of the shaft. The magnetostrictive material coating is formed by irradiating a magnetostrictive material coating formed on the surface of a base material made of a metal member with a laser. A method for forming a magnetostrictive material coating pattern of a shaft for a magnetostrictive torque sensor, which comprises removing the above-mentioned material from the surface of a base material to form a desired coating pattern.
- シャフトの表面にトルク検出用の磁歪部を有する磁歪式トルクセンサー用シャフトの製造方法であって、金属製部材からなる基材表面に形成されたアモルファス溶射被膜にレーザ照射することにより、アモルファス溶射被膜を基材表面から除去し、所望の被膜パターンを形成することを特徴とする磁歪式トルクセンサー用シャフトの磁歪材料被膜パターンの形成方法。 A method for manufacturing a magnetostrictive torque sensor shaft having a magnetostrictive portion for torque detection on the surface of the shaft. The amorphous thermal spray coating is formed by irradiating an amorphous thermal spray coating formed on the surface of a base material made of a metal member with a laser. A method for forming a magnetostrictive material coating pattern of a shaft for a magnetostrictive torque sensor, which comprises removing the above-mentioned material from the surface of a base material to form a desired coating pattern.
- シャフトの表面にトルク検出用の磁歪部を有する磁歪式トルクセンサー用シャフトの製造方法であって、金属製部材からなる基材表面に形成されたアモルファス箔被膜にレーザ照射することにより、アモルファス箔被膜を基材表面から除去し、所望の被膜パターンを形成することを特徴とする磁歪式トルクセンサー用シャフトの磁歪材料被膜パターンの形成方法。 A method for manufacturing a magnetostrictive torque sensor shaft having a magnetostrictive portion on the surface of the shaft for detecting torque. The amorphous foil coating is formed by irradiating an amorphous foil coating formed on the surface of a base material made of a metal member with a laser. A method for forming a magnetostrictive material coating pattern on a shaft for a magnetostrictive torque sensor, which comprises removing
- シャフトの表面にトルク検出用の磁歪部を有する磁歪式トルクセンサー用シャフトの製造方法であって、金属製部材からなる基材表面に形成されたアモルファスめっき被膜表面にレーザ照射することにより、アモルファスめっき被膜を基材表面から除去し、所望の被膜パターンを形成することを特徴とする磁歪式トルクセンサー用シャフトの磁歪材料被膜パターンの形成方法。 A method for manufacturing a magnetostrictive torque sensor shaft having a magnetostrictive portion on the surface of the shaft for torque detection. Amorphous plating is performed by irradiating the surface of an amorphous plating film formed on the surface of a base material made of a metal member with a laser. A method for forming a magnetostrictive material coating pattern of a shaft for a magnetostrictive torque sensor, which comprises removing a coating from the surface of a base material to form a desired coating pattern.
- シャフトの表面にトルク検出用の磁歪部を有する磁歪式トルクセンサー用シャフトであって、金属製部材からなる基材表面に形成された磁歪材料被膜にレーザ照射して形成した所望の被膜パターンを有することを特徴とする磁歪式トルクセンサー用シャフト。 A shaft for a magnetostrictive torque sensor having a magnetostrictive portion for torque detection on the surface of the shaft, and having a desired coat pattern formed by irradiating a magnetostrictive material film formed on the surface of a base material made of a metal member with a laser. A shaft for a magnetostrictive torque sensor.
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| JP2020047744 | 2020-03-18 | ||
| JP2020-047744 | 2020-03-18 |
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| PCT/JP2021/010594 WO2021187477A1 (en) | 2020-03-18 | 2021-03-16 | Method for forming magnetostrictive material-coated pattern of magnetostriction type torque sensor shaft, and magnetostriction type torque sensor shaft |
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|---|---|---|---|---|
| JPS61170546A (en) * | 1985-01-24 | 1986-08-01 | Nippon Denso Co Ltd | Forming of amorphous metal layer |
| JPS6425490A (en) * | 1987-07-21 | 1989-01-27 | Mitsubishi Electric Corp | Manufacture of stress detector |
| JPH0566165A (en) * | 1991-09-06 | 1993-03-19 | Komatsu Ltd | Detection shaft for torque sensor and manufacture thereof |
| JPH0658827A (en) * | 1992-08-06 | 1994-03-04 | Toyota Autom Loom Works Ltd | Manufacture of magnetostrictive film in magnetostrictive torque sensor |
| JP2009122042A (en) * | 2007-11-16 | 2009-06-04 | Toshiba Corp | Method for manufacturing magnetostrictive torque sensor shaft |
| US20130186209A1 (en) * | 2012-01-24 | 2013-07-25 | GM Global Technology Operations LLC | System and method for sensing torque and angular position of a shaft |
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2021
- 2021-03-16 WO PCT/JP2021/010594 patent/WO2021187477A1/en active Application Filing
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61170546A (en) * | 1985-01-24 | 1986-08-01 | Nippon Denso Co Ltd | Forming of amorphous metal layer |
| JPS6425490A (en) * | 1987-07-21 | 1989-01-27 | Mitsubishi Electric Corp | Manufacture of stress detector |
| JPH0566165A (en) * | 1991-09-06 | 1993-03-19 | Komatsu Ltd | Detection shaft for torque sensor and manufacture thereof |
| JPH0658827A (en) * | 1992-08-06 | 1994-03-04 | Toyota Autom Loom Works Ltd | Manufacture of magnetostrictive film in magnetostrictive torque sensor |
| JP2009122042A (en) * | 2007-11-16 | 2009-06-04 | Toshiba Corp | Method for manufacturing magnetostrictive torque sensor shaft |
| US20130186209A1 (en) * | 2012-01-24 | 2013-07-25 | GM Global Technology Operations LLC | System and method for sensing torque and angular position of a shaft |
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