JPH07104103A - Production of reflection preventive member and polarizing plate - Google Patents
Production of reflection preventive member and polarizing plateInfo
- Publication number
- JPH07104103A JPH07104103A JP5273030A JP27303093A JPH07104103A JP H07104103 A JPH07104103 A JP H07104103A JP 5273030 A JP5273030 A JP 5273030A JP 27303093 A JP27303093 A JP 27303093A JP H07104103 A JPH07104103 A JP H07104103A
- Authority
- JP
- Japan
- Prior art keywords
- ultrafine particles
- particles
- superfine particles
- antireflection member
- binder layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、フラットパネルディス
プレイ等の種々の視認装置や偏光板等の光学部材などの
反射防止に好適な反射防止部材の製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing an antireflection member suitable for antireflection of various visual recognition devices such as flat panel displays and optical members such as polarizing plates.
【０００２】[0002]
【従来の技術】従来、表面に可視光の波長レベルの微細
な凹凸を設けてなる反射防止部材が提案されており、そ
の製造方法としてサブミクロンオーダーの微粒子を含有
するバインダ液をベース基材に塗布し、そのバインダ層
をエッチング液による湿式方式で除去して超微粒子を露
出させる方法が知られていた（特開平３−１５０５０１
号公報）。かかる超微粒子含有のバインダ液による方式
は、超微粒子の可及的に均等な分散とその分散状態を固
定することを目的とする。2. Description of the Related Art Conventionally, there has been proposed an antireflection member having a surface on which fine irregularities having a wavelength level of visible light are provided. As a manufacturing method thereof, a binder solution containing fine particles of submicron order is used as a base material. There is known a method of applying and removing the binder layer by a wet method using an etching solution to expose ultrafine particles (Japanese Patent Laid-Open No. 3-150501).
Issue). The method using such a binder solution containing ultrafine particles aims at fixing the dispersed state of the ultrafine particles as uniformly as possible.
【０００３】しかしながら、波長レベルのデリケートな
加工精度が要求されるかかる反射防止部材にあって、前
記従来の湿式方式ではバインダ層の除去精度に劣り、エ
ッチング液の回り込みなどにより超微粒子背部の固着に
必要な部分までも除去されて超微粒子の固定強度に乏し
く接触等で超微粒子が脱落しやすい問題点、また各超微
粒子の露出状態のバラツキが大きいためか、超微粒子を
単に並べた状態のものより反射防止効果に劣る問題点な
どがあった。However, in such an antireflection member which requires delicate processing accuracy at the wavelength level, the conventional wet method is inferior in the removal accuracy of the binder layer and sticks to the back of the ultrafine particles due to sneaking of the etching solution. Even if necessary parts are removed, the fixing strength of the ultra-fine particles is poor and the ultra-fine particles are likely to fall off due to contact, etc. Also, because the dispersion of the exposed state of each ultra-fine particle is large, the ultra-fine particles are simply arranged. There were problems such as poor antireflection effect.
【０００４】[0004]
【発明が解決しようとする課題】本発明は、超微粒子の
固定力に優れそれが脱落しにくくて反射防止効果及びそ
の持続性に優れる反射防止部材の製造方法の開発を課題
とする。SUMMARY OF THE INVENTION An object of the present invention is to develop a method for producing an antireflection member which has excellent fixing power for ultrafine particles, is hard to drop out, and has excellent antireflection effect and durability.
【０００５】[0005]
【課題を解決するための手段】本発明は、ベース基材上
に設けた超微粒子含有の硬化バインダ層をイオン又は／
及び紫外線照射によるドライエッチング方式で超微粒子
の背部を残して除去し、超微粒子を硬化バインダ層の残
部で固着させた状態で露出させることを特徴とする反射
防止部材の製造方法を提供するものである。According to the present invention, a cured binder layer containing ultrafine particles provided on a base material is ionized or / or
And a method for producing an antireflection member, characterized in that the back portion of ultrafine particles is removed by a dry etching method by ultraviolet irradiation, and the ultrafine particles are exposed in a state of being fixed in the remaining portion of the cured binder layer. is there.
【０００６】[0006]
【作用】本発明者等は、前記の課題を克服するために鋭
意研究を重ねる中で反射防止効果の点よりは、超微粒子
が半球状で露出し、かつ超微粒子間にバインダ層が存在
しない深い凹凸状態にあることが好ましく、上記のドラ
イエッチング方式でその目的を達成できることを見出し
た。またかかるドライエッチング方式によれば超微粒子
背部の硬化バインダ層を良好な状態に残存させることが
できて超微粒子の固定力に優れ、その耐熱性にも優れ
る。The present inventors have conducted extensive studies to overcome the above-mentioned problems, and in view of the antireflection effect, the ultrafine particles are exposed in a hemispherical shape, and there is no binder layer between the ultrafine particles. It has been found that it is preferable to have a deep unevenness, and the purpose can be achieved by the above dry etching method. Further, according to such a dry etching method, the cured binder layer at the back of the ultrafine particles can be left in a good state, the fixing force of the ultrafine particles is excellent, and the heat resistance thereof is also excellent.
【０００７】[0007]
【実施例】本発明の製造方法は、ベース基材上に設けた
超微粒子含有の硬化バインダ層をイオン又は／及び紫外
線照射によるドライエッチング方式で超微粒子の背部を
残して除去し、超微粒子を硬化バインダ層の残部で固着
させた状態で露出させて反射防止部材を得るものであ
る。その製造工程を図１（Ａ），（Ｂ）に例示した。１
がベース基材、２が硬化バインダ層、３が超微粒子であ
り、４が形成目的の反射防止部材である。EXAMPLES The production method of the present invention is to remove the ultrafine particles by removing the ultrafine particle-containing cured binder layer provided on the base substrate by a dry etching method by ion or / and ultraviolet irradiation, leaving behind the ultrafine particles. The antireflection member is obtained by exposing the cured binder layer in the state where it is fixed to the rest. The manufacturing process is illustrated in FIGS. 1 (A) and 1 (B). 1
Is a base substrate, 2 is a cured binder layer, 3 is ultrafine particles, and 4 is an antireflection member for the purpose of formation.
【０００８】ベース基材としては、光学材料として用い
うる透明体であれば特に限定はない。一般には、ガラス
や、ポリエステル、トリアセチルセルロースの如きプラ
スチックからなる板、フィルムないしシートなどが用い
られる。また偏光板や位相差板等の光学機能素材なども
用いうる。The base material is not particularly limited as long as it is a transparent material that can be used as an optical material. Generally, a plate, a film or a sheet made of glass, a plastic such as polyester or triacetyl cellulose is used. Further, optical functional materials such as a polarizing plate and a retardation plate can be used.
【０００９】さらにハードーコートや紫外線吸収等の適
宜な処理を施したベース基材なども用いうる。ハードー
コート処理は基材、特にその表面の補強等を目的とする
ものでシリコーン系樹脂等の熱硬化性樹脂などで一般に
形成される。Further, a hard coat or a base material which has been subjected to an appropriate treatment such as absorption of ultraviolet rays may be used. The hard coat treatment is intended to reinforce the substrate, especially the surface thereof, and is generally formed of a thermosetting resin such as a silicone resin.
【００１０】紫外線吸収処理は、例えばオキシベンゾフ
ェノン系化合物、ベンゾトリアゾール系化合物、サリチ
ル酸エステル系化合物、ベンゾフェノール系化合物、シ
アノアクリレート系化合物、ニッケル錯塩系化合物など
の適宜な紫外線吸収剤をベース基材に配合することによ
り行うことができる。なおベース基材の厚さは、適宜に
決定でき１０μm〜５mmが一般的であるが、これに限定
されない。In the ultraviolet absorption treatment, an appropriate ultraviolet absorber such as an oxybenzophenone compound, a benzotriazole compound, a salicylate compound, a benzophenol compound, a cyanoacrylate compound, a nickel complex salt compound is used as a base material. It can be performed by blending. The thickness of the base material can be appropriately determined and is generally 10 μm to 5 mm, but is not limited to this.
【００１１】超微粒子としては、セラミック等の無機物
やプラスチック等の有機物からなる種々のものを用いる
ことができる。好ましく用いうる超微粒子は、硬質で可
及的に球状であり、光透過率に優れるものである。その
例としては、シリカ、アルミナ、チタニア、ジルコニア
などからなるものがあげられ、就中シリカが入手容易で
ある。As the ultrafine particles, various particles made of inorganic materials such as ceramics and organic materials such as plastics can be used. Ultrafine particles that can be preferably used are hard and spherical as much as possible, and have excellent light transmittance. Examples thereof include those made of silica, alumina, titania, zirconia, etc. Among them, silica is easily available.
【００１２】また超微粒子に透明な導電性のものを用い
て帯電防止能を付与することもできる。その透明導電性
超微粒子の例としては、酸化錫、アンチモンやフッ素を
ドープした酸化錫、酸化インジウム、錫をドープした酸
化インジウム、酸化アンチモンの如き導電性の金属酸化
物からなるものなどがあげられる。It is also possible to impart an antistatic ability to the ultrafine particles by using a transparent conductive material. Examples of the transparent conductive ultrafine particles include those made of a conductive metal oxide such as tin oxide, tin oxide doped with antimony or fluorine, indium oxide, indium oxide doped with tin, and antimony oxide. .
【００１３】超微粒子の平均粒径は、３０〜３００nm、
就中５０〜１００nmが一般的である。その平均粒径が３
００nmを超えると視覚障害となる干渉が現れやすくな
る。かかる点より用いる超微粒子は、平均粒径が５０〜
３００nmのものを７０重量％以上含有するものが好まし
い。The average particle diameter of the ultrafine particles is 30 to 300 nm,
Especially, 50 to 100 nm is general. The average particle size is 3
If it exceeds 00 nm, interference that causes visual disturbances tends to appear. From this point, the ultrafine particles used have an average particle size of 50 to 50.
It is preferable that 70% by weight or more of 300 nm is contained.
【００１４】バインダ成分としては、ベース基材の種類
による密着力などに応じ硬化層を形成する適宜なものを
用いることができ、透明性、接着性に優れてイオン又は
／及び紫外線照射によりドライエッチングしやすいもの
が好ましく用いうる。ベース基材がガラスからなる場合
には、テトラアルコキシシランが好ましく、アルコール
等の溶媒を用いて溶液とすることができ、そのアルコキ
シル基を介しエポキシ基等の官能基を導入することで紫
外線等にても簡単に硬化させうるものとすることができ
る。As the binder component, an appropriate one which forms a cured layer depending on the adhesion force depending on the type of the base material can be used, and it is excellent in transparency and adhesiveness and is dry-etched by irradiation of ions or / and ultraviolet rays. Those that are easy to use can be preferably used. When the base material is made of glass, tetraalkoxysilane is preferable, and it can be made into a solution by using a solvent such as alcohol. By introducing a functional group such as an epoxy group through the alkoxyl group, it is possible to prevent ultraviolet rays and the like. However, it can be easily cured.
【００１５】ベース基材がプラスチックからなる場合に
は、例えばエポキシ基やビニルエーテル基等の官能基を
有するカチオン重合性のモノマーを成分とする紫外線な
いし放射線硬化型のものなどが好ましく用いうる。また
その主ポリマーとしては、硬化バインダ層の選択的エッ
チングによる超微粒子の残存性の点より、メタクリル酸
メチル、イソブチレン、α−メチルスチレンなどを主成
分とするコポリマーやそのホモポリマーが好ましい。た
だし超微粒子がシリカ等のセラミックからなる場合、殆
どのポリマーは本発明において選択的にエッチングする
ことができ、従って前記以外の種々のポリマーを主ポリ
マーに用いうる。When the base material is made of plastic, it is possible to preferably use an ultraviolet or radiation curable one containing a cationically polymerizable monomer having a functional group such as an epoxy group or a vinyl ether group as a component. As the main polymer, a copolymer containing methyl methacrylate, isobutylene, α-methylstyrene, or the like as a main component or a homopolymer thereof is preferable from the viewpoint of the persistence of ultrafine particles due to selective etching of the cured binder layer. However, when the ultrafine particles are made of a ceramic such as silica, most polymers can be selectively etched in the present invention, and thus various polymers other than the above can be used as the main polymer.
【００１６】硬化バインダ層の形成は、例えば適宜な溶
媒を用いて超微粒子混入のバインダ成分の溶液を調製
し、それをベース基材に塗工して形成した塗工層を加熱
方式や紫外線ないし放射線照射方式等のバインダ成分に
応じた方式で硬化処理する方式などにより行うことがで
きる。The hardened binder layer is formed by, for example, preparing a solution of a binder component mixed with ultrafine particles using an appropriate solvent and applying the solution to a base material to form a coating layer by a heating method, ultraviolet rays, or the like. It can be performed by a method of curing treatment by a method according to the binder component such as a radiation irradiation method.
【００１７】前記調製液の塗工は、例えばディッピング
方式やスピンコート方式、グラビア方式やスプレー方式
などの適宜な薄膜塗工方式で行うことができる。塗工厚
は、混入させた超微粒子の平均粒径の約１〜約２倍が好
ましい。その厚さが薄すぎると超微粒子の高密度な分散
状態を形成できない場合があり、厚すぎると超微粒子が
多段に重なりあった分散状態が形成されて反射防止効果
の低下を招く場合がある。The coating of the preparation liquid can be carried out by an appropriate thin film coating method such as a dipping method, a spin coating method, a gravure method or a spray method. The coating thickness is preferably about 1 to about 2 times the average particle size of the mixed ultrafine particles. If the thickness is too thin, it may not be possible to form a high-density dispersed state of ultrafine particles, and if it is too thick, a dispersed state in which ultrafine particles are superposed in multiple stages may be formed, leading to a reduction in the antireflection effect.
【００１８】好ましい超微粒子の分散状態は、超微粒子
の重なりが２段以下であり均等に分散した１層状態の面
積が可及的に多く占めるものである。また超微粒子が平
面面積に基づきベース基材面の６５％以上、就中７０〜
９５％占めることが好ましい。かかる塗工層を形成する
点より、バインダ成分１００重量部あたり超微粒子を５
０〜２００重量部、就中７０〜１５０重量部含有する、
固形分濃度０．１〜３０重量％、就中０．５〜２０重量
％の塗工液を調製することが好ましい。The preferred dispersed state of the ultrafine particles is such that the overlap of the ultrafine particles is two steps or less and the area of the uniformly dispersed one-layer state is as large as possible. Further, the ultrafine particles are 65% or more of the surface of the base material based on the plane area, especially 70-
It is preferable to occupy 95%. From the viewpoint of forming such a coating layer, 5 parts of ultrafine particles are added per 100 parts by weight of the binder component.
0 to 200 parts by weight, especially 70 to 150 parts by weight,
It is preferable to prepare a coating solution having a solid content concentration of 0.1 to 30% by weight, especially 0.5 to 20% by weight.
【００１９】本発明においてベース基材上に設けた超微
粒子含有の硬化バインダ層の除去処理は、イオン又は／
及び紫外線照射によるドライエッチング方式で行う。こ
れにより図１Ｂに例示の如く、硬化バインダ層２の上層
や超微粒子間のバインダ成分が超微粒子３の背部におけ
る部分を残して除去でき、超微粒子３を硬化バインダ層
２の残部で固着させた状態で露出させることができる。In the present invention, the treatment for removing the hardened binder layer containing ultrafine particles provided on the base substrate is performed by ion or / or
And the dry etching method by ultraviolet irradiation is used. As a result, as illustrated in FIG. 1B, the binder component between the upper layer of the hardened binder layer 2 and the ultrafine particles can be removed except for the portion at the back of the ultrafine particles 3, and the ultrafine particles 3 are fixed to the remaining portion of the hardened binder layer 2. It can be exposed in the state.
【００２０】本発明においては、反射防止の点より超微
粒子上部の半球が露出し、かつ超微粒子間のバインダ成
分が奥深く除去されていることが好ましく、かかる点よ
りイオン又は／及び紫外線照射によるドライエッチング
方式としては、プラズマエッチング方式よりも直進性の
高いイオン等が得られるスパッタエッチング方式や短波
長の紫外線が得られるエキシマレーザー照射方式が好ま
しい。In the present invention, it is preferable that the hemisphere above the ultrafine particles is exposed and the binder component between the ultrafine particles is deeply removed from the viewpoint of antireflection, and from this point, dryness by irradiation with ions or / and ultraviolet rays is preferable. As the etching method, a sputter etching method that can obtain ions or the like having a higher linearity than a plasma etching method and an excimer laser irradiation method that can obtain ultraviolet rays of a short wavelength are preferable.
【００２１】なおスパッタエッチングは、例えば低圧の
アルゴンガス等の希ガスを真空グロー放電させ、発生し
た希ガスイオンを陰極暗部に配置した硬化バインダ層に
照射する方式などにより行うことができ、レーザによる
方式はエキシマレーザー等を硬化バインダ層に照射する
方式などにより行うことができる。The sputter etching can be carried out, for example, by a method in which a rare gas such as a low-pressure argon gas is vacuum-glow-discharged and the generated rare gas ions are irradiated on the hardened binder layer arranged in the dark portion of the cathode. The method can be performed by irradiating the cured binder layer with an excimer laser or the like.
【００２２】得られた反射防止部材は、偏光板等の光学
機能素材や液晶表示装置等のディスプレイ装置、重量計
等の計器類など、種々の物品の表面反射防止に好ましく
用いることができる。The obtained antireflection member can be preferably used for the surface antireflection of various articles such as optical functional materials such as polarizing plates, display devices such as liquid crystal display devices, measuring instruments such as weight scales.
【００２３】本発明による反射防止部材には、その片面
に接着剤層を設けることもできる。図２に例示の如く、
かかる接着剤層５は適用対象６への接着等を目的とする
もので通例、ベース基材がプラスチックフィルムからな
るものの如く柔軟な反射防止部材の超微粒子層を有しな
い面に設けられる。The antireflection member according to the present invention may be provided with an adhesive layer on one surface thereof. As illustrated in FIG.
Such an adhesive layer 5 is intended for adhesion to the application target 6 or the like, and is usually provided on the surface of the flexible antireflection member which does not have the ultrafine particle layer such as a base substrate made of a plastic film.
【００２４】接着剤層の形成には、例えばアクリル系粘
着剤、ゴム系粘着剤、シリコーン系粘着剤等の粘着剤や
ホットメルト系接着剤などの適宜なものを用いうる。設
ける接着剤層は、透明性や耐候性等に優れるものが好ま
しく、また透過率の低減防止等の点より屈折率差がベー
ス基材の±５％以内のものが好ましい。接着剤層の付設
は、塗工方式やセパレータ上に設けたものの移着方式な
ど適宜な方式で行ってよい。なお接着剤層が粘着層の場
合には、実用に供するまでの間その表面をセパレータ等
で保護しておくことが好ましい。For forming the adhesive layer, an appropriate adhesive such as an acrylic adhesive, a rubber adhesive, a silicone adhesive or a hot melt adhesive may be used. The adhesive layer to be provided is preferably one having excellent transparency and weather resistance, and it is also preferable that the difference in refractive index is within ± 5% of the base material from the viewpoint of preventing reduction of transmittance. The attachment of the adhesive layer may be performed by an appropriate method such as a coating method or a transfer method of the one provided on the separator. When the adhesive layer is a pressure-sensitive adhesive layer, it is preferable to protect the surface with a separator or the like until practical use.
【００２５】上記したように本発明による反射防止部材
は、偏光板の表面反射防止に好ましく用いうるが、その
場合の好ましい適用方式は、薄型化の点より図２に例示
の如く偏光子６の片側における保護フィルムとして反射
防止部材４を付与したものである。なお図２中の７は、
偏光子６の他方側に必要に応じて設けられる保護フィル
ムである。As described above, the antireflection member according to the present invention can be preferably used for the antireflection of the surface of the polarizing plate. In that case, the preferred application method is to reduce the thickness of the polarizer 6 as illustrated in FIG. The antireflection member 4 is provided as a protective film on one side. In addition, 7 in FIG.
It is a protective film provided on the other side of the polarizer 6 as necessary.
【００２６】かかる構造の偏光板は、ベース基材に前記
の保護フィルムとなるものを用いて反射防止部材を形成
しそれを偏光子とラミネートする方式や、表面に保護フ
ィルム層を有する偏光板をベース基材に用いて反射防止
部材を形成する方式などにより得ることができる。The polarizing plate having such a structure may be formed by forming an antireflection member on the base material using the protective film and laminating it with a polarizer, or a polarizing plate having a protective film layer on the surface. It can be obtained by a method of forming an antireflection member using the base material.
【００２７】なお前記の保護フィルムとしては、透明
性、機械的強度、熱安定性、水分遮蔽性などに優れるも
のが好ましく用いられ一般には、ポリエステル系樹脂、
ポリエーテルサルホン系樹脂、ポリカーボネート系樹
脂、ポリアミド系樹脂、ポリイミド系樹脂、ポリオレフ
ィン系樹脂、アクリル系樹脂、アセテート系樹脂の如き
ポリマーなどからなるものが用いられる。As the above-mentioned protective film, one having excellent transparency, mechanical strength, thermal stability, moisture shielding property, etc. is preferably used, and generally polyester resin,
Polymers such as polyether sulfone resin, polycarbonate resin, polyamide resin, polyimide resin, polyolefin resin, acrylic resin and acetate resin are used.
【００２８】また偏光子としては通例、偏光フィルムが
用いられその例としては、ポリビニルアルコール系フィ
ルム、部分ホルマール化ポリビニルアルコール系フィル
ム、エチレン・酢酸ビニル共重合体系部分ケン化フィル
ムの如き親水性高分子フィルムにヨウ素及び／又は二色
性染料を吸着させて延伸したもの、ポリビニルアルコー
ルの脱水処理物やポリ塩化ビニルの脱塩酸処理物の如き
ポリエン配向フィルムなどがあげられる。A polarizing film is usually used as the polarizer, and examples thereof include hydrophilic polymers such as polyvinyl alcohol film, partially formalized polyvinyl alcohol film, and ethylene / vinyl acetate copolymer partially saponified film. Examples of the film include a film obtained by adsorbing iodine and / or a dichroic dye on a film and stretching, and a polyene oriented film such as a dehydrated product of polyvinyl alcohol or a dehydrochlorinated product of polyvinyl chloride.
【００２９】実施例１ アクリルウレタン樹脂９０部（重量部、以下同じ）、ア
クリル系樹脂１０部、ポリイソシアネート１部、及び光
重合開始剤５部からなる紫外線硬化型のバインダを、平
均粒径１００nmのシリカ（６重量％）分散メタノール液
１６００部に添加混合し、それを厚さ１００μmのポリ
カーボネートフィルムにディッピング方式にてコーティ
ングし１００℃で３分間乾燥させて厚さ０．１５μmの
塗膜を形成後、高圧水銀ランプにて紫外線を５０mj／cm
2照射し硬化させて超微粒子含有の硬化バインダ層を形
成した。Example 1 A UV-curable binder comprising 90 parts of acrylic urethane resin (parts by weight, the same applies hereinafter), 10 parts of acrylic resin, 1 part of polyisocyanate, and 5 parts of photopolymerization initiator was used, and an average particle size of 100 nm. Of silica (6% by weight) dispersed in 1600 parts of methanol solution is added and mixed, a 100 μm thick polycarbonate film is coated by a dipping method and dried at 100 ° C. for 3 minutes to form a 0.15 μm thick coating film. After that, a high pressure mercury lamp is used to radiate ultraviolet rays of 50 mj / cm.
It was irradiated and cured to form a cured binder layer containing ultrafine particles.
【００３０】次に前記の硬化バインダ層を、５００ｅＶ
のアルゴンイオンで６０秒間スパッタエッチング処理し
た。これにより超微粒子の背部を残してバインダ成分が
除去され、背部の硬化バインダ層残部で超微粒子が強固
に固着された状態で露出した反射防止部材（図１Ｂ）を
得た。この反射防止部材は、耐摩耗性に優れてその超微
粒子が脱落しにくく、可視光の反射率が０．３％であっ
た。Next, the above-mentioned cured binder layer was applied to 500 eV.
Sputter etching treatment was performed for 60 seconds with Argon ion. As a result, the binder component was removed while leaving the back of the ultrafine particles, and the antireflection member (FIG. 1B) was obtained in which the ultrafine particles were firmly adhered to the remaining hardened binder layer on the back. This antireflection member was excellent in abrasion resistance, its ultrafine particles were hard to fall off, and the reflectance of visible light was 0.3%.
【００３１】実施例２ ２−（３，４−エポキシシクロヘキシル）エチルトリメ
トキシシラン９８重量％とビス（ドデシルフェニル）ヨ
ードニウムヘキサフルオロアンチモネート（ヨードニウ
ム塩系カチオン重合触媒）２重量％からなる紫外線硬化
型のバインダ６部を、平均粒径８０nmのシリカ（６重量
％）分散ノルマルブタノール液１００部に添加混合し、
それを厚さ８０μmのトリアセテートフィルムにディッ
ピング方式にてコーティングし５０℃で３分間乾燥させ
て厚さ０．１μmの塗膜を形成後、高圧水銀ランプにて
紫外線を５０mj／cm2照射し硬化させて超微粒子含有の
硬化バインダ層を形成した。Example 2 A UV-curable type comprising 98% by weight of 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane and 2% by weight of bis (dodecylphenyl) iodonium hexafluoroantimonate (an iodonium salt type cationic polymerization catalyst). 6 parts of the binder are added to 100 parts of silica (6% by weight) -dispersed normal butanol solution having an average particle size of 80 nm, and mixed.
It is coated on 80 μm thick triacetate film by dipping method and dried at 50 ° C. for 3 minutes to form a 0.1 μm thick coating film, which is then cured by irradiating it with ultraviolet rays at 50 mj / cm 2 with a high pressure mercury lamp. To form a cured binder layer containing ultrafine particles.
【００３２】次に前記の硬化バインダ層を、ＫrＦエキ
シマレーザー（０．６j／cm2）で５０ナノ秒間照射して
エッチング処理した。これにより超微粒子の背部を残し
てバインダ成分が除去され、背部の硬化バインダ層残部
で超微粒子が強固に固着された状態で露出した反射防止
部材（図１Ｂ）を得た。この反射防止部材は、耐摩耗性
に優れてその超微粒子が脱落しにくく、可視光の反射率
が０．２５％であった。Next, the cured binder layer was subjected to etching treatment by irradiation with a KrF excimer laser (0.6 j / cm 2 ) for 50 nanoseconds. As a result, the binder component was removed while leaving the back of the ultrafine particles, and the antireflection member (FIG. 1B) was obtained in which the ultrafine particles were firmly fixed and exposed in the remaining portion of the cured binder layer on the back. This antireflection member was excellent in abrasion resistance, the ultrafine particles were hard to fall off, and the visible light reflectance was 0.25%.
【００３３】比較例１ スパッタによる硬化バインダ層のエッチング処理を施さ
ないほかは実施例１に準じて反射防止部材を得た。この
反射防止部材は、超微粒子含有の硬化バインダ層を未処
理のまま有するため実質的に反射防止効果を示さず、そ
の可視光反射率は３．０％であった。Comparative Example 1 An antireflection member was obtained in the same manner as in Example 1 except that the cured binder layer was not etched by sputtering. This antireflection member did not substantially exhibit an antireflection effect because it had a cured binder layer containing ultrafine particles as it was, and its visible light reflectance was 3.0%.
【００３４】比較例２ エキシマレーザーによる硬化バインダ層のエッチング処
理を施さないほかは実施例２に準じて反射防止部材を得
た。この反射防止部材は、実質的に反射防止効果を示さ
ずその可視光反射率は２．８％であった。Comparative Example 2 An antireflection member was obtained in the same manner as in Example 2 except that the cured binder layer was not etched with an excimer laser. This antireflection member did not substantially exhibit an antireflection effect, and its visible light reflectance was 2.8%.
【００３５】比較例３ 硬化バインダ層の厚さを０．０８μmとし、ＫrＦエキシ
マレーザーに代えて５重量％水酸化ナトリウム水溶液に
２５秒間浸漬する方式でエッチング処理後、水洗乾燥さ
せたほかは実施例２に準じて反射防止部材を得た。この
反射防止部材は、０．３％の可視光反射率を示したもの
の、その超微粒子が消しゴムによる擦りテスト（１kg／
cm2）で簡単に剥離脱落し耐摩耗性に劣るものであっ
た。Comparative Example 3 A cured binder layer having a thickness of 0.08 μm was used instead of the KrF excimer laser by immersing in a 5 wt% sodium hydroxide aqueous solution for 25 seconds, followed by washing with water and drying. According to 2, an antireflection member was obtained. This antireflection member showed a visible light reflectance of 0.3%, but its ultrafine particles were rubbed by an eraser (1 kg /
It easily peeled off at cm 2 ) and was inferior in wear resistance.
【００３６】[0036]
【発明の効果】本発明によれば、イオン又は／及び紫外
線照射によるドライエッチング方式としたので、超微粒
子が半球状で露出し、かつ超微粒子間のバインダ層も除
去されて優れた反射防止効果を示すと共に、超微粒子背
部の硬化バインダ層が良好な状態で残存して超微粒子が
強固に固着されて脱落しにくく反射防止効果の持続性に
優れる耐熱性の反射防止部材を得ることができる。According to the present invention, since the dry etching method by irradiation of ions or / and ultraviolet rays is employed, the ultrafine particles are exposed in a hemispherical shape, and the binder layer between the ultrafine particles is also removed, resulting in an excellent antireflection effect. It is possible to obtain a heat-resistant antireflection member having a cured binder layer on the backside of the ultrafine particles in a good state, in which the ultrafine particles are firmly fixed and are unlikely to fall off, and which has an excellent antireflection effect durability.
【図１】（Ａ）：エッチング処理前の説明断面図。 （Ｂ）：エッチング処理後の説明断面図。FIG. 1A is an explanatory cross-sectional view before an etching process. (B): An explanatory cross-sectional view after the etching process.
【図２】偏光板の実施例の断面図。FIG. 2 is a sectional view of an example of a polarizing plate.
１：ベース基材 ２：硬化バインダ層 ３：超微粒子 ４：反射防止部材 ５：接着剤層 ６：偏光子 ７：保護フィルム 1: Base substrate 2: Cured binder layer 3: Ultrafine particles 4: Antireflection member 5: Adhesive layer 6: Polarizer 7: Protective film
Claims (6)
化バインダ層をイオン又は／及び紫外線照射によるドラ
イエッチング方式で超微粒子の背部を残して除去し、超
微粒子を硬化バインダ層の残部で固着させた状態で露出
させることを特徴とする反射防止部材の製造方法。1. A cured binder layer containing ultrafine particles provided on a base substrate is removed by a dry etching method by irradiation of ions and / or ultraviolet rays, leaving behind the ultrafine particles, and the ultrafine particles are removed by the remaining portion of the cured binder layer. A method for manufacturing an antireflection member, which comprises exposing in a fixed state.
のを７０重量％以上含有するシリカからなる請求項１に
記載の方法。2. The method according to claim 1, wherein the ultrafine particles are silica containing 70% by weight or more of particles having an average particle size of 50 to 300 nm.
リル酸メチル、イソブチレン又は／及びα−メチルスチ
レンを主成分とするものである請求項１に記載の方法。3. The method according to claim 1, wherein the binder component of the cured binder layer is based on methyl methacrylate, isobutylene or / and α-methylstyrene.
による希ガスイオンのスパッタエッチング方式又はエキ
シマレーザー照射方式である請求項１に記載の方法。4. The method according to claim 1, wherein the dry etching method is a sputter etching method of rare gas ions by vacuum glow discharge or an excimer laser irradiation method.
いて請求項１〜４に記載の方法で得た反射防止部材の片
面に接着剤層を有することを特徴とする反射防止部材。5. An antireflection member having an adhesive layer on one surface of the antireflection member obtained by the method according to any one of claims 1 to 4 using a plastic film as a base material.
の片側における保護フィルムとして有することを特徴と
する偏光板。6. A polarizing plate comprising the antireflection member according to claim 5 as a protective film on one side of a polarizer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27303093A JP3360898B2 (en) | 1993-10-05 | 1993-10-05 | Method for producing antireflection member and polarizing plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27303093A JP3360898B2 (en) | 1993-10-05 | 1993-10-05 | Method for producing antireflection member and polarizing plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07104103A true JPH07104103A (en) | 1995-04-21 |
| JP3360898B2 JP3360898B2 (en) | 2003-01-07 |
Family
ID=17522197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27303093A Expired - Fee Related JP3360898B2 (en) | 1993-10-05 | 1993-10-05 | Method for producing antireflection member and polarizing plate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3360898B2 (en) |
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| JPWO2018180003A1 (en) * | 2017-03-31 | 2019-11-07 | 富士フイルム株式会社 | Laminate, method for producing laminate, and method for producing antireflection film |
| US11097520B2 (en) | 2017-03-31 | 2021-08-24 | Fujifilm Corporation | Laminate, method of manufacturing laminate, and method of manufacturing antireflection film |
| JP2022060214A (en) * | 2020-07-17 | 2022-04-14 | デクセリアルズ株式会社 | Method for manufacturing optical laminate |
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| JP3360898B2 (en) | 2003-01-07 |
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